WO2013174525A1 - Procédé et appareil de génération d'un rayonnement électromagnétique - Google Patents

Procédé et appareil de génération d'un rayonnement électromagnétique Download PDF

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Publication number
WO2013174525A1
WO2013174525A1 PCT/EP2013/001555 EP2013001555W WO2013174525A1 WO 2013174525 A1 WO2013174525 A1 WO 2013174525A1 EP 2013001555 W EP2013001555 W EP 2013001555W WO 2013174525 A1 WO2013174525 A1 WO 2013174525A1
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WIPO (PCT)
Prior art keywords
radiation
plasma
fuel
collector
acceleration
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PCT/EP2013/001555
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English (en)
Inventor
Andrea Giovannini
Reza Abhari
Thorsten Henrik HASLINDE
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Eth Zurich
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Publication of WO2013174525A1 publication Critical patent/WO2013174525A1/fr

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H05G2/006—X-ray radiation generated from plasma being produced from a liquid or gas details of the ejection system, e.g. constructional details of the nozzle
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/008—X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma

Definitions

  • the present invention relates to a method and an apparatus for generation of electromagnetic radiation from a plasma, preferably in the soft x-rays and extreme ultraviolet radiation range, according to claim 1 and claim 9, respectively. It furthermore refers to a way of increasing the lifetime of a radiation collector needed to reflect and/or transmit the produced radiation.
  • EUV extreme ultraviolet
  • the most advanced radiation source known to the applicant in the mentioned photon energy range generates photons with 92eV (13.5nm wavelength), and is mainly used for EUV lithography and actinic inspection.
  • Research in this field for example [A. Z. Giovannini et al . , Normal incidence collector for LPP sources with integrated debris mitigation, SPIE 2010]) has demonstrated that the plasma produces debris particles in form of ions, neutral particles and clusters which deposit eventually onto the collector mirror reducing its lifetime and increasing the cost of ownership of the machine .
  • WO 2001 078 469 A2 discloses a x-ray source based on a Z- pinch mechanism.
  • the source initiates a discharge leading to a Z-pinch which remains enclosed in the source.
  • the source is cylindrical and the Z-pinch develops within the cylinder along the axis of symmetry, so that the radiation leaves the source in one direction along the Z-pinch axis.
  • US 836 244 4 B2 discloses a plasma radiation source based on a discharge between two electrodes and enhanced by the use of an external magnetic field.
  • the radiation source is part of a lithographic apparatus.
  • the discharge is generated between the two electrodes, where respectively also the radiation is emitted.
  • the magnetic field is used to confine a portion of the ion leaving the Z-pinch.
  • US 760 538 5 B2 discloses an electrode-less EUV discharge source based on a ⁇ -pinch.
  • a magnetic field in form of magnetic mirror is used to confine a plasma.
  • the EUV is generated between the magnetic mirror coils for generation of the ⁇ -pinch. All of these plasma-based radiation sources have the disadvantage that the collector mirrors and the source components exhibit a very short lifetime due to very high debris and thermal loads.
  • the invention is based on the thought that the large debris and the high thermal load on the collector optics and source components is routed in the expansion of the plasma due to its high temperature and density leading to a large pressure gradient to the surrounding and the matter of fact that the relative distance between the plasma, the collector mirrors and the source components generating the plasma in all of the known radiation sources is constant. Hence, the debris and the thermal load of the plasma expanding mainly radially outwards reach the collector mirrors and source components . Furthermore, in the known radiation sources, the location of the highest plasma temperature and density is located close or even between or inside solid surfaces implying additional effort in the thermal management due to the direct thermal load.
  • the pressure gradient becomes extremely large since such plasmas require a high density and high ion stages (11+, 12+ etc.) resulting in large expansion forces and therefore high kinetic energy ions impacting and destroying the radiation collector.
  • the plasma expansion velocity is referred to within the scope of this invention as the thermal velocity of the plasma.
  • the present invention significantly mitigates this debris by providing a method for generating electromagnetic radiation from a plasma in which a radiation fuel - the substance that is to emit the electromagnetic radiation that is aimed at - which is preferably a gas and/or liquid is accelerated with a fuel acceleration device towards a location within the operating area of a radiation collector for collecting electromagnetic radiation.
  • a radiation collector can be a mirror, for instance a multilayer mirror, but also a bandpass filter for filtering out the unwanted radiation wavelengths and letting only the wanted radiation wavelengths pass through, a combination of a mirror and such a filter or several filters, several mirror, or a combination of those.
  • the operating area of the radiation collector is understood as that area in which the collector exhibits its respective function, namely for a mirror that area where radiation is collected and/or collimated and for a filter that area where radiation reaches the filter to pass through it.
  • the inventive methods includes a step in which the radiation fuel is plasmatized using a plasma production device so that the radiation fuel exhibits a plasma state and radiates electromagnetic radiation at the specific location within the operating area of the radiation collector where it was previously accelerated to.
  • the plasma production device can plasmatize the radiation fuel at a location within the operating area of the .radiation collector, for instance that location inside the operating area where it was accelerated to, but also at a different location.
  • the radiation fuel is provided in a plasma state at the specific location within the operating area of the radiation collector where it was accelerated to.
  • the electromagnetic radiation that is emitted from the plasma radiation fuel at the location within the operating area of the radiation collector where it was accelerated to is collected with the radiation collector.
  • a collection of electromagnetic radiation is for instance understood as a passing of radiation through one the above described filters and/or multiple filters and/or a capturing of radiation by a collimating mirror.
  • the radiation fuel is accelerated by the fuel acceleration device in a direction and up to a velocity, so that it exhibits, at the specific location within the operating area of the radiation collector, an average drift velocity component normal to and oriented away from the collecting surface of the radiation collector that has an absolute value that is equal or larger than the absolute value of the average thermal velocity of the plasma radiation fuel at the specific location within the operating area of the radiation collector.
  • the drift velocity is understood as the directed velocity of the radiation fuel which is attributed to its externally generated acceleration through the fuel acceleration device whereas, as described previously, the thermal velocity of the plasma radiation fuel at the specific location within the operating area of the radiation collector which it was accelerated to is attributed to the expansion velocity of the plasma due to its pressure gradient to the surrounding.
  • the thermal velocity, of the plasma radiation fuel is meant here that is oriented towards and especially normal to the collecting surface of the radiation collector.
  • the collecting surface of the radiation collector is understood as that surface or that surfaces which is/are oriented towards the plasma radiation fuel.
  • the thermal management is significantly facilitated by providing a plasma radiation fuel at location within the operational area of the radiation collector which is spaced apart from the fuel acceleration and/or the plasma generation device. This in turn increases the distance of the high temperature plasma to any source components leading to a reduced thermal load on the source and correspondingly an increased lifetime.
  • the radiation fuel acceleration device and the plasma generation device are included in an acceleration and generation device.
  • This device plasmatizes the radiation fuel and accelerates the plasma radiation fuel.
  • the acceleration is thereby preferably conducted or executed by the Lorentz force which is particularly preferred generated through the discharge of a capacitor storing the electrical energy for the generation of the plasma acceleration force - the Lorentz force capacitively in an electric field.
  • the energy for generating the Lorentz force can also be stored inductively in a magnetic field.
  • the Lorentz force is the most effective way of accelerating a plasma and its generating through the discharge of a capacitor allows plasma velocities in the order of 10 to 100 km/s which are required for the inventive debris mitigation for high density, high ion-stage plasmas needed for the generation of EUV and/or soft x-ray radiation.
  • the plasma radiation fuel is further compressed at the specific location within the operating area of the radiation collector where it was accelerated to through a plasma pinch to increase, and/or maintaining its density.
  • a plasma pinch to increase, and/or maintaining its density.
  • This allows a further heating of the plasma and an increase in its density to generate higher ion stages required for especially short wave length radiation, for instance extreme ultraviolet and/or soft x-ray.
  • such a pinch can also be used to maintain the plasma density and therefore for instance counteract the pressure gradient from the plasma to the surrounding.
  • the plasma pinch is generated through the ejection of the plasma radiation fuel out of the acceleration and production device which is preferably a directly coupled electromagnetic thruster and particularly preferred a magnetoplasma compres-sor.
  • a directly coupled electromagnetic thruster is for instance described in [Comparison of directly and inductively coupled pulsed electromagnetic thrusters, J. Cassibry, IEEE Transactions on Plasma Science, Vol.36, No.5, 10/2008].
  • a magnetoplasma compressor is for example described in [Processes in a magnetoplasma compressor, A.I. Morozov, Fiz Plazmy 1, 179- 191, March-April 1975; Diagnostics of magnetoplasma compressor of compact geometry, J. Puric et al, Publ . Astron. Obs. Belgrade No.
  • the linear current is induced within the accelerated plasma when the accelerator exhibits an azimuthal magnetic field leading to a magnetic field gradient that the plasma experiences when ejected out of the magnetic field of the accelerator and correspondingly an induction of a current within the plasma oriented to counteract the experienced magnetic field gradient.
  • the magnetic field in the accelerator is azimuthal, the induced current during ejection is correspondingly linear since such a current leads to an azimuthal magnetic field counteracting the experienced magnetic field gradient.
  • Such an embodiment allows very high plasma densities in the order of at least 10 17 -10 18 cm "3 through the Z-pinch mechanism. Furthermore, this embodiment enables a relatively simple system configuration since no additional components are necessary to generate the pinch.
  • the pulsed discharge enables very high discharge current in the order of 10 to lOOka allowing very large acceleration force and therefore large magnetic field gradient that the plasma experiences during ejection leading to very high compression forces outside the acceleration and production device and correspondingly very high densities.
  • the radiation fuel is plasmatized and accelerated inductively, preferably through an inductively coupled electromagnetic thruster, as described for instance in [Comparison of directly and inductively coupled pulsed electromagnetic thrusters, J. Cassibry, IEEE Transactions on Plasma Science, Vol.36, No.5, 10/2008; Status of pulsed inductive thruster research, I. Hrbud et al, AIP Conf. Proc, 2002, 627].
  • the plasma can be accelerated inductively. This is an enormous advantage since it avoids or at least significantly mitigates the erosion of electrodes in the previously described directly coupled electromagnetic accelerator.
  • the plasma is in no contact with the electrodes since it is generated through an inductively coupled discharge and also accelerated through induction.
  • the plasma pinch is generated through an external magnetic and/or electric field which is preferably generated through a pulsed capacitor discharge.
  • the inductively coupled thruster does however not exhibit an azimuthal magnetic field within the accelerator leading to a linear induction current in the plasma at ejection of the plasma radiation fuel out of the accelerator with a compressing self-field, as described previously. Up on ejection of the plasma radiation fuel in the inductively coupled thruster, an azimuthal induction current is induced. This induced azimuthal current does not exhibit a compressing self-field and therefore an external field is required to compress the plasma to high densities at the location within the operation area of the radiation collector.
  • This embodiment therefore enables the compression of the plasma radiation fuel at the specific location within the operating area of the radiation collector in combination with an inductively operated acceleration and generation device, addressing the erosion problem of directly coupled accelerators .
  • the plasma radiation fuel is, at the specific location within the operating area of the radiation collector, further irradiated with a laser beam of a laser beam generation device to excite the plasma, whereby the laser beam preferably exhibits one specific wavelength and the plasma preferably exhibits, before excitation, a density which is equal or larger than the critical plasma density for that specific wavelength of the laser beam.
  • the use of the laser permits to have a source size which is dominated by the laser spot size (as small as tens of microns) rather than the larger size of the plasma radiation fuel, enhancing the radiation source brightness.
  • the method is executed in a vacuum environment and the radiation that is aimed at is extreme ultraviolet and/or soft x-ray radiation. Since the wavelength of this radiation is absorbed by air, a vacuum environment is required for its generation.
  • the invention provides an apparatus for generating electromagnetic radiation, preferably extreme ultra violet and soft x-ray, from a plasma according to independent claim 9.
  • electromagnetic radiation preferably extreme ultra violet and soft x-ray
  • the plasma pinch is generated with electrodes made of a liquid conductive jet leading to regenerative electrodes which avoids or simplifies the problems with respect to electrode erosion. Furthermore, this setup allows the configuration of the liquid conductive jets similarly to the directly coupled electromagnetic thruster configuration leading to the same compressing self- field upon ejection out of the acceleration and generation device .
  • Fig. 1 illustrates the apparatus of a first preferred embodiment of the present invention
  • Fig. 2 illustrates the apparatus of the first preferred embodiment of the present invention with the use of a laser
  • Fig. 3 illustrates the apparatus of a second preferred embodiment of the present invention with the use of grazing incidence collector mirrors
  • Fig. 4 illustrates a first preferred acceleration and generation device variant of the present invention
  • Fig. 5 illustrates a second preferred acceleration and generation dive variant of the present invention
  • Fig. 6 illustrates a third preferred acceleration and generation dive variant of the present invention
  • Fig. 1 illustrates a preferred embodiment of an apparatus for generating electromagnetic radiation 1 of the present invention that is targeted to generate radiation ranging extreme ultra violet to soft x-ray radiation, depending on the operating condition of the acceleration and production device 3 which will described later.
  • the operating condition depends mainly on the density and temperature of the plasma radiation fuel present at the location in the operating area of the radiation collector 4 described below, and on the radiators.
  • Plasma density and temperature depends on the amount of electrical energy and on the power, which is used in the acceleration and production device 3.
  • different ions are produced, and different transitions are dominating the emission spectra of the plasma radiation fuel at the location in the operating area of the radiation collector 4.
  • the choice of the radiators is also a fundamental parameter to tailor the radiation source to produce photons with the wanted wavelengths.
  • Experiments on the spectra that is emitted by the source using the technology sketched in Fig. 4 have shown the presence of emission lines of the gaseous material present in the accelerating and production region 3, but also on the material of the solids and the liquids present on the accelerating and production region 3 (in the conducted experiments solid and liquid copper was present in the region and was detected in the spectra) .
  • the radiation emission at the location within the operating area of the radiation collector 4 can be optimized by choosing the gas to be dispensed in the generation and acceleration region and by choosing the material of, for example, the electrodes or by coating them or by dispensing a thin film of other materials on the electrodes.
  • the device 3 is electrode-less, walls can be inserted in the formation and/or acceleration region to feed the plasma with radiators. For instance EUV radiation centered at 13.5nm is emitted when dispensing gaseous xenon in the generation and acceleration region (emission at 13.5nm comes mainly from Xe 10+ ) , or by having tin on the electrodes (emission from the unresolved transition array of Sn 8+ to Sn 13+ ) .
  • gallium and indium or alloys of these materials are also best-suited as radiation fuel.
  • gallium and indium or alloys of these materials have an advantageous low melting temperature of 30 °C and can be used as radiator using the 4f-3d transitions for photons with a wavelength shorter than 13.5nm.
  • Indium instead can be used for the transitions of Inl and Inll for larger wavelength photons, in the range of 40-70nm.
  • the fuel of choice for this preferred embodiment is Xenon due to the fact that it does not contaminate the collector optics and other source components as terrific as for example tin does. Since extreme ultra violet radiation is absorbed by almost all matter, the electromagnetic radiation generation apparatus 1 is arranged inside a not illustrated vacuum vessel that preferably exhibits a vacuum of around 10 ⁇ 2 mbar- lmbar.
  • the pump needed to generate such a vacuum is a positive displacement vacuum pump, for example a rotary vane pump.
  • the vacuum vessel needs different flanges, in this preferred embodiment at least : one used to fit an acceleration and generation device 3 which plasmatizes and accelerates the radiation fuel and will be described in more detail later, one for the radiation fuel feed-through, one for the mounting of the collector mirror 2 if used, and one as an interface between the source vacuum vessel and the stage where the produced radiation is used.
  • the interface hosts a filter or filter assembly to filter the radiation produced at the location within the operating area.
  • the apparatus 1 of the preferred embodiment shown in FIG. 1 comprises a normal incidence mirror 2 as radiation collector that is preferably a multilayer (ML) mirror which preferably uses the principle of Bragg reflection in order to bring the radiation to the previously described interface.
  • the multilayer mirror has to be chosen in combination with the fuel choice.
  • the best-suited collector mirror uses layers of Mo and Si, with thicknesses in the order of nm.
  • the reflectivity to 13.5nm in the 2%BW of these mirrors arrives up to 70% when the number of layers is larger than 50. Radiation of other wavelength is reflected using ML mirrors with other layer thicknesses and other materials.
  • the material of the coating of the normal incidence mirror has to be changed.
  • the Sc/Si multilayers are used or Al single layer and fluoride (for this range indium is for example a suitable radiation fuel) .
  • At shorter wavelengths between 6 and 12nm B-based multilayer are best suited (for this range gallium is for example a suitable radiation fuel) .
  • the later described acceleration and production device 3 is arranged with respect to the mirror 2 and configured, so that it accelerates the plasma radiation fuel up to a velocity so that at a point 4 within the operating area of the mirror 2, the plasma radiation fuel exhibits a normal drift velocity component v n normal the mirror 2 and oriented away from the mirror 2 that is larger in magnitude than the average thermal velocity of the plasma radiation fuel at the point 4.
  • This configuration applies to all preferred embodiments and variants of the present invention illustrated in FIG. 1, 2, 3.
  • the relative position of the collector mirror 2 to the location within the operating area of the radiation collector 4 is therefore such that the plasma radiation fuel particles cannot reach the collector surface.
  • the ion acoustic or thermal velocity for Xe 10+ ions would be of 8.5km/s.
  • the location within the operating area of the radiation collector 4 is located several cm away from all source component. This strongly facilitates the heat management of the source, since the heat load on the source components is significantly reduced.
  • the radiation emitted in the location within the operating area of the radiation collector 4 by the plasma radiation fuel coming from the acceleration and generation device 3 is collected and reflected by the mirror collector 2 and focused to the intermediate focus 5 of the ellipsoidal mirror collector. At the intermediate focus 5, the radiation is filtered using a spectral purity filter.
  • a divertor 6 is arranged within the streamline of the plasma radiation fuel flow. The function of the divertor 6 is to dump part of the energy of the incoming plasma radiation fuel beam, and to deflect the remaining in a direction away from the radiation collector 2.
  • the divertor 6 is water cooled, for example with channels on the outer mantle of the cylinder, to resist the large heat load.
  • the deflection of the plasma stream in the divertor 6 is done either physically or by means of a magnetic field, whereas the magnetic field lines have to be directed away from the radiation collector 2.
  • the first and second preferred embodiments, shown in Fig. 1 and 3, can each be coupled with a laser, as shown in Fig. 2.
  • the laser 8 is used to enhance the brightness of the EUV or soft x-ray source by hitting the plasma radiation fuel in the location within the operating area of the radiation collector 4, which is preferably compressed through pinch.
  • the source size is not anymore given by the plasma dimension, but by the spot size of the laser, which can be in the order of tens of microns (depending on the lens diameter and focal length, and on the laser beam M 2 ) .
  • the choice of the wavelength of the laser is such that the critical density of the laser photons is of the same order of magnitude or smaller than the density of the region of the pinch that is irradiated.
  • the plasma generation and the laser pulse are triggered, in order to account for the time needed for the formation of the pinch.
  • the laser can also be pulsed, in order to irradiate the plasma radiation fuel more than once, taking advantage of the duration of the plasma, which by using a Z-pinch is of tens to hundreds of microseconds.
  • the laser 8 includes a lens tube that hosts the laser lens 7 which is mounted in the centre of the collector mirror 2. The lens 7 and focuses the laser radiation onto the location within the operating area of the radiation collector 4.
  • An external magnetic field can also be added to increase the density in the pinch through coils or permanent magnets 3 . This allows to decrease the wavelength of the laser used.
  • the collector mirror 2 has an ellipsoidal shape and focuses the radiation in its intermediate focus 4. The laser radiation that is not absorbed by the pinch 4 is then blocked by a beam dump 9, which is water-cooled. Further measures to protect the collector mirror 2 can be taken, such as the implementation of a gas flow flowing parallel to the collector surface. The latter is injected in the chamber by a number of converging- diverging nozzles fitted around the outer border.
  • the collector mirror 2 can also be on the side of the lens assembly (as in FIG. 1), without a hole in the middle, in this way the collected radiation would be smaller, but also the cost of ownership would decrease making this solution more viable for metrology and microscopy applications.
  • Fig. 3 illustrates a second preferred embodiment of the inventive apparatus 10.
  • This embodiment includes a collector mirror 11 which a grazing incidence mirror 11.
  • the grazing incidence collector mirror 11 is made out of one or more shells, every shell is cooled and coated with for example ruthenium.
  • the grazing incidence mirror reflects the radiation with two bounces in a direction opposite to the direction of the plasma radiation fuel acceleration direction.
  • the use of a grazing incidence collector mirror 11 permits also to have a broader range of the photons to be reflected. Hence the source has a more flexible construction, where different ranges of radiation can be filtered by different spectral purity filters.
  • This embodiment can also be coupled with a laser, as illustrated in Fig. 2.
  • Fig. 4 illustrates a first preferred acceleration and generation device 3.
  • This device is designed as a magneto plasma compressor.
  • the magneto plasma compressor (referred to as MPC from hereon) is a pulsed plasma acceleration device.
  • the MPC comprises coaxial electrodes 31 and 35.
  • the central electrode 35 which is in this preferred embodiment the cathode of the device exhibits a cone tip portion 36 at its front end to provide a Laval nozzle-like cross sectional area profile of the inter-electrode cross sectional area.
  • the central electrode 36 is configured rotational symmetric. It exhibits in this preferred embodiment a diameter of 15 mm at its core body and a maximum diameter of 30 mm at its cone tip portion 36 which linearly decreases to a minimum of 6 mm at the front end of the cone portion 36.
  • the outer electrode 31 which is the anode in this preferred embodiment is configured by multiple cylindrical rods, namely eight rods with a diameter of each 10 mm in this preferred embodiment, that are connected to an anode carrier 32 arranged coaxially around the cathode 35.
  • the rods 31 are arranged at equally spaced intervals form each other and coaxially around the cathode 35.
  • the anode carrier 32 exhibits in this preferred embodiment a rotationally symmetric design with openings to receive the anode rods 31.
  • the anode rods 31 are fixed by screws within anode carrier 32.
  • the anode carrier 32 exhibits a central through- hole for receiving an isolator 33.
  • the isolator 33 is formed in a ring-like fashion for receiving the cathode 35 at its center portion isolating the cathode 35 from the anode carrier 32 and the anode rods 31 when arranged within the through-hole of the anode carrier 32.
  • the anode carrier 32 as well as the anode rods 31 are made from copper and are arranged to be electrically conductive with each other.
  • the cathode 35 including the tip portion 36 is also made from copper but is electrically isolated from the anode carrier 32 through the isolator 33 which is made in this preferred embodiment from Polyether ether ketone (PEEK) .
  • the material of the electrodes 35, 31, 36, 32 can also be a different electrically conducting material, for example silver, tungsten, electrically conducting carbon fibers or any other electrically conducting material. It is also possible that the anode carrier 32 is not made from an electrically conductive material and/or the different parts are made from different electrically conductive materials.
  • the radiation fuel 30 which is in this preferred embodiment, as previously described, Xenon, is injected through not illustrated rotationally symmetric arranged injection holes which are located radially outwards of the anode rods 35.
  • the MPC 1 Radially outwards of the injection holes, the MPC 1 exhibits a not illustrated cylindrical casing, preferably made of glass, acrylic glass or any transparent material, fixed to the anode carrier 32 and arranged coaxially to and extending along the electrodes 31, 35 for minimizing a radially outward expansion of the injected gas and guiding it towards the inter-electrode region between anode rods 31 and cathode 35.
  • the MPC 1 is connected via a switch 15 to a capacitor 16.
  • One of the electrodes of the capacitor 16 is connected via the switch 15 to the cathode 35 which is electrically isolated from the anode carrier 32 connected with the anode rods 31 and the other electrode of the capacitor 16 is connected to the anode carrier 32.
  • the capacitor exhibits a capacitance of 800yF which can withstand maximal charging voltage of 7,25kV and a maximal surged current of 140kA is used.
  • the switch in this preferred embodiment is an ignitron capable of withstanding a peak current of lOOkA.
  • the capacitor is connected to a not illustrated charging circuit consisting of a transformer with a winding- ratio of primary to secondary circuit that allows a 22-fold voltage step up, a set of four rectifying diodes for rectifying the transformer output voltage and several control switches and charging resistors.
  • the charging circuit allows charging the capacitor 16 up to a voltage of around 7kV.
  • this preferred embodiment comprises a trigger circuit for triggering the ignitron 15.
  • the trigger circuit comprises of a trigger capacitor for storing energy that is necessary for the ignitron triggering and a high-speed . switch for discharging the energy of the trigger capacitor which is in this preferred embodiment a thyristor into the ignitron 15.
  • the pulsed operation of the device enables to cool the active components of the acceleration and generation device through radiation, conduction and convective cooling.
  • the capacitor 16 will be charged over the charging circuit up to an operating voltage. Thereafter, the Xenon gas is injected and diffuses to the inter-electrode gap between cathode 35 and anodes 31. Since the switch 15 is not closed at this stage, the anode rods 31 and the anode carrier lie on the same potential as the electrode of the capacitor 16 that they are connected to but the cathode lies on a floating potential.
  • the trigger capacitor of the trigger circuit is discharged over the thyristor in the ignitron for closing the switch 15 and putting the cathode 35 on the same potential as the other capacitor 16 electrode.
  • the capacitor operating voltage will be present between the two electrodes 31 and 35. If the voltage is larger than the Paschen minimum, a discharge will be initiated between the electrodes. Here, this discharge is initiated between the anode 31 and the part of the tip portion 36 of the cathode 35 which is exhibits the smallest distance to the anode 35.
  • the discharge plasmatizes the Xenon gas 30 and leads to a closed circuit with a corresponding current I flowing through the . Xenon plasma as well as the electrodes 31, 35 from one electrode of the capacitor 16 to its other electrode.
  • the current I generated an azimuthal magnet field ⁇ ⁇ inside the MPC 3 which interacts with the plasma 30. As illustrated in Fig.
  • the interaction of the current I with the magnetic field ⁇ ⁇ leads a Lorentz- force F L which I is oriented in parallel to the electrodes 31 and 35 accelerating the plasma 30 out of the MPC 3.
  • the MPC 1 acts as plasma generation device and as acceleration device.
  • the velocity of the plasma 30 while leaving the MPC 3 is in the order of 10-100 km/s .
  • the plasma Upon leaving the MPC 3, the plasma leaves the magnetic field ⁇ ⁇ of the accelerator 3 experiencing a corresponding magnetic field gradient.
  • This gradient induces a respective current in the plasma 30 (see Maxwell equations) which is oriented in this preferred embodiment to be parallel and arranged coaxially to the electrodes 31, 35.
  • This induced current is thus a result of the ejection process of the plasma out of the accelerator 3.
  • the induced current has a magnetic self- field which is oriented azimuthally around it which leads to an interaction of the magnetic self-field with the current in the plasma 30 leading to a Lorentz-force that is directed radially inwards.
  • the Lorentz-force is therefore compressing the plasma 30 after ejection out of the MPC 3.
  • This mechanism of compressing a plasma with the Lorentz- force in this form is also known as a Z-pinch.
  • the plasma is therefore created in the MPC 3, accelerated through the MPC 3 and compressed while being ejected out of the MPC 3 to exhibit a maximal density at a location outside of the MPC 3 which is spaced apart of the MPC 3 and correspond to the location 3 in Fig. 1, 2 and 3.
  • Fig. 5 illustrates another preferred acceleration and generation device 3.
  • This device is configured as an inductively coupled plasma accelerator 3 (referred to as IPT from hereon) .
  • IPT inductively coupled plasma accelerator 3
  • the IPT 3 exhibits a planar circular shaped induction coil 20 which is designed coaxially around a center axis m of the IPT 3 and which is configured by a spirally wounded wire 21.
  • the induction coil 20 has the shape of a flat spiral (tesla coil) .
  • the coil 20 is connected via a switch 15 to a capacitor 16.
  • the IPT 3 exhibits not illustrated injection holes for injection a radiation fuel 30, here Xenon, in the region next to the planar coil side face.
  • a current is flowing through the coil 20 leading to a mainly radially oriented magnetic field B r in the region next to the coils side face where the radiation fuel 30 is located. Since the current in the coil 20 is time-varying, and electric field is induced within the Xenon gas 30 which leads to a gas breakdown, as in inductively coupled plasma sources, plasmatizing the Xenon gas. The induced electric field generates an eddy current I ind within the plasma 30 that interacts with the radially oriented magnetic field B r leading to a Lorentz-fore F L which accelerates the plasma 30 in the direction of the center axis m of the IPT 3 out of the acceleration and plasma generation device.
  • the ejection velocities are around 10-100 km/s.
  • the electrodeless nature of the IPT 3 it has the advantage over electrode based accelerators that the problem of electrode erosion is avoided.
  • the IPT it is referred to [Performance optimization criteria for pulsed inductive plasma acceleration; Kurt Polzin; IEEE Transactions on Plasma Science, 34, 2006, 945-953] .
  • the acceleration and generation device 3 can be is surrounded by an enclosure in radial direction.
  • the radial enclosure is added, in order to further shield the radiation collector 2 from the particles that could possibly be ejected in the formation and acceleration region with a velocity that is still not significantly higher than the thermal velocity.
  • the radial enclosure should not impose a significant shadow on the collected radiation.
  • the enclosure that prevents the line-of-sight between radiation collector 2 and acceleration and generation region, should be cooled by radiation and conduction, and depending on the operation also with convective cooling through a tubular channel around its walls where a liquid is flowing (for example water) .
  • Fig. 6 illustrates a third preferred acceleration and generation device 3.
  • the generation of the plasma with high drift velocity is achieved using the JxB force with a discharge between electrodes, where the electrodes are regenerative.
  • the electrodes are of a liquid and conductive material in form of jets (for example tin or tin compounds or gallium, or indium), this embodiment is shown in FIG. 6.
  • Multiple jets can be used.
  • a central jet is the cathode 13 and multiple (more than two jets) are organized around the central one and are the anodes 14. All the jets dispense the liquid material in one direction and the outer anode jets can be parallel or be divergent with respect with the central one.
  • the diverging jets are used to further accelerate the plasma through hydrodynamic expansion getting a supersonic plasma stream.
  • the advantage of having jets is that there are no problems related with erosion and with the thermal management of the electrodes.
  • Another advantage is that the electrodes and the whole assembly can be smaller without incurring in the problem that the discharges quickly erode or melt the electrodes that would not have place for cooling systems.
  • Every jet has a separate nozzle, and the diameter of the nozzle is such that no break-up of the jet happens before typically 2-3 diameters of the circle described by the position of the outer jets.
  • Two reservoirs (11 for the cathode and 12 for the anodes) have to be used, and they have to be electrically insulated. The reservoirs can be heated if the liquid material is solid at ambient condition.
  • the reservoirs have to be pressurized up to a pressure that depends on the material property of the liquid used. In general the Weber number (which depends on the jet exit velocity, which depends on the applied pressure) in this application should not be higher than 12.
  • the tube used to bring the pressure to the reservoir should be of a dielectric material, in order to avoid shortcuts.
  • the capacitor bank 16 should be connected to the reservoirs, and a switch 15 as for example an ignitron should be used to discharge the capacitors.
  • a fuel trap Downstream of the z-pinch generated by the plasma coming from the jet electrodes a fuel trap is used to contain the liquid fuel and is connected to the ground potential.
  • the surface of the fuel trap which is hit by the jets should not be perpendicular to the jets, in order to avoid as much as possible splashing of the fuel in the source vacuum vessel. If the fuel is solid at ambient condition the fuel trap should be heated. A plate with one hole corresponding to every jet can be added over the fuel trap to further reduce the splashing.
  • the EUV or soft x-ray radiation generated at the operating area of the radiation collector as described above can be extracted directly without using a collector mirror.
  • the radiation the radiation collector is just the spectral purity filter, which would seal the source vacuum vessel from the external components, and filter the radiation emitted by the plasma as a band-pass filter, letting only the wanted radiation out of the source vessel.
  • the collector mirror the plasma flow is directed in such a way that the drift velocity component perpendicular to the filter surface is larger than the thermal expansion velocity.
  • the filter can be made of multiple filters and attached to an actively cooled frame. The advantage of having multiple filters mounted on a frame is that the ratio between the filter thickness and the filter dimension parallel to the filter surface is larger, leading to a filter, which is more robust.
  • the choice of the materials of the filters depends on the radiation to be filtered. For example with EUV a Zr filter is suitable.
  • the plasma in the location within the operating area can be further compressed by using a magnetic field.
  • the magnetic field is produced by a coil 37, with the axis of symmetry parallel to the plasma drift trajectory or at an angle between the coil symmetry axis and the plasma drift trajectory from 0° to 45° in a direction away from the radiation collector.
  • the coil should apply to the plasma a magnetic field of at least the self-induced magnetic field of the z-pinch plasma, whereas typical values are 0.1T.
  • the coil is surrounding the plasma, therefore is exposed to a significant heat load, in order to manage thermally the coil, it should be actively cooled, preferably with water cooling in terms of a tube surrounding the coil.
  • the joule heating of the coil should be reduced by pulsing the current flowing into the coil, synchronizing the peak current with the generation and acceleration events.
  • a good compromise between the coil dimension and the coil thermal management (given by the wire diameter) to produce IT is a 3mm wire with around 24 loop per cm, and with 340A of current.
  • the radiation collector is further protected by a gas flow.
  • the gas flows parallel to the surface of the radiation collector and is a further measure of protection of the radiation collector, by means of inertial collisions.
  • the gas flow should have a velocity as high as possible.
  • the total temperature of the gas has to be as high as possible and the gas has to be expanded to super or hypersonic speed.
  • the gas has to flow through a divergent geometry or a set of divergent geometries.
  • the end of the divergent geometry corresponds to the radial outer border of the radiation collector.
  • the gas to be injected should not be a strong absorber of the radiation that is wanted.
  • the gases that are preferably used are Ar, He, 3 ⁇ 4, H.
  • the radiation collector is exchanged during operation without venting the vacuum vessel.
  • the substitution is made in order to ensure long-term operation of the source without maintenance.
  • the multiple radiation collectors are mounted on a holder, preferably made out of a vacuum compatible material with high thermal conduction, for example aluminium.
  • the shape of the holder is either linear or circular, depending on the shape of the vacuum vessel and on the space available. If a linear holder is used, the collector mirror is exchanged by translating the holder in one direction. If the circular holder is used the exchange is done by rotation.
  • the holder with the mounted radiation collectors should be inside a housing, which is sealed versus the source vacuum vessel with just one hole corresponding to the incoming radiation to be filtered or reflected.
  • the housing can have a higher pressure (generated by a gas infeed) , in order to prevent possible particles to reach the radiation collector.
  • the present invention can also be described by: It is an object of this invention to generate radiation from a high density and high velocity plasma.
  • the radiation that is aimed at is extreme ultraviolet (EUV) , and soft x-rays.
  • EUV extreme ultraviolet
  • the radiation can be generated by the plasma source itself or/and by the interaction between the said plasma and a laser pulse. In the latter case the density of the plasma has to be in the order of the critical density for the wavelength of the laser used or higher.
  • the generated radiation should then be collected by collector optics and focused close to the interface between the source module and a following module for the use of the radiation.
  • the plasma generator is such that the spot with the highest density is separated by the plasma generator by a space sufficient to enable the thermal management of the components.
  • the high velocity of the plasma generated by the plasma generator is used for debris mitigation means, because the device is directed not in direction of the mirror and the drift velocity component towards the mirror is of the same order of magnitude or larger than the thermal velocity, this implies that the plasma load on the collector surface is minimized.
  • the plasma generator needed to achieve the high velocity and high density uses a pinch to confine/compress the plasma while moving it from the accelerator exit to the collector optic focus.
  • the most effective way of plasma acceleration is Lorentz acceleration, which is therefore used as an acceleration mechanism.
  • MPC magneto plasma compressor
  • the plasma generation is the mechanism of a DC discharge, this approach is called below electrode plasma generator; Electrodeless accelerators where the current is usually induced and flows azimuthal and the magnetic field is oriented radially as within the Pulsed inductive thruster (PIT) , the plasma generation mechanism is the mechanism of an inductively coupled plasma source, this approach is called below electrodeless plasma generator.
  • the plasma is generated in the device, accelerated and focused by a pinch up to a density in the order of 1017-1018cm-3. The velocity is in the order of tens of kilometers per seconds.
  • a further advantage in both approaches is that the region of highest density is not close to the plasma generator device, but rather but rather typically centimeters away.
  • the plasma generator is positioned in the chamber so that the region of the highest density matches the focus of the collector optics and the focus of a laser (if this is used for further excitation of the plasma) .
  • the radiation is then collected by a collector and focused at its intermediate focus.
  • the collector might be protected by a gas curtain system for further debris mitigation.
  • the system injects a gas flow parallel to the surface deflecting the incoming debris by momentum exchange.
  • Another mechanism of shielding that might be used is an electromagnetic system, which generate an electromagnetic field in a direction that deflect the debris that might hit the surface.
  • the plasma generator is an electrode plasma generator.
  • the plasma generator is an electrodeless plasma generator.
  • the said collector is cooled _ on the back-side using impingement cooling for mass flow control, and/or turbulators for heat transfer control, enabling to match locally the heat flux in order to maintain the mirror temperature as uniform as possible.
  • the same collector has a debris mitigation system, which consists in a gas curtain, which flows along the surface of the mirror deflecting the debris coming from the source.
  • the gas influx is realized by a plurality of axis-symmetric injection nozzles positioned around the outer border of the collector optics.
  • the gas influx is realized by one axis-symmetric injection nozzle covering the whole outer border of the collector optics.
  • the gas comprises a noble gas, preferably being selected from the group containing Hydrogen, Helium, Argon, Neon, Krypton, Xenon, Chlorine, Fluorine, Bromine, and Iodine.
  • the gas influx speed is very high, and preferably significantly above the speed of the sound at the injection point.
  • the gas is actively pumped out of the device through a vacuum applied at the center of the collector optics.
  • the gas influx comprises an additional component that is tangent to the border of the collector optics so that a swirl is induced in the flow of the gas curtain.
  • the tangential angle at the injection point relative to the radial line is between 0° and 45°.
  • the gas curtain comprises at least two layers, wherein a first layer that is further away from the collector optics implies a higher velocity than a second layer closer to the surface of the collector optics, so that the second layer is not perturbed by the pressure conditions of the production site.
  • the collector is a normal incidence mirror, which reflects the radiation in the direction of the incoming laser beam.
  • a laser beam is going through a hole in the collector.
  • the plasma generator is going through a hole in the collector.
  • the plasma generator is oriented with an angle - defined between the collector axis (defined as the line that goes through the two foci) and the plasma generator axis - smaller or equal 90°.
  • coils or magnets are used to generate a magnetic field in quasi- parallel direction with the plasma generator axis.
  • no laser is used to excite the plasma for radiation production, but the plasma generator is tuned so that it emits in the wanted wavelengths close to its focus (region of highest density) .
  • Figure 1 and Figure 2 show experimental results that confirm the possibility to produce EUV in this manner.
  • the collector can be an off-axis normal incidence mirror.
  • the collector is a grazing incidence mirror, which reflects the radiation produced - with electrode or electrodeless design for the plasma generator - on the axis of the plasma generator in opposite direction with respect to the plasma velocity.
  • the collector is a grazing incidence mirror, which reflects the radiation produced by the interaction between laser and electrode or electrodeless the plasma generator.
  • the collector is a grazing incidence mirror with one or more shells, which reflects the radiation produced on an axis that is not in the direction of the plasma generator.
  • the plasma generator fires in direction of the intermediate focus (IF) of the collector. In order to protect the IF a plasma divertor is used.
  • the plasma divertor is a physical barrier deflecting the plasma at least so that the plasma does not get to the IF and/or a device that produce a magnetic field in a direction such that the plasma does not reach the IF.
  • the plasma generator is multiplexed and the different components are directed to a region where the radiation is produced.
  • the plasma generator's fuel is a gas that emits in the wavelength of interest.
  • the fuel is a combination of gaseous fuel introduced in the plasma generator device and solid or liquid material in the plasma generator.
  • the solid fuel is stored on the electrodes, if electrode plasma generator is used.
  • the solid fuel is stored in the plasma generator in the region where the breakdown initiates.
  • the liquid fuel is injected in the plasma generator - either electrode or electrodeless - in form of droplets.
  • the fuel is injected or stored in the breakdown region.
  • the fuel is injected or stored downstream of breakdown region.
  • the fuel might be Hydrogen, Helium, Argon, Neon, Krypton, Xenon, Chlorine, Fluorine, Bromine, and Iodine, Tin, Gallium, Tungsten, Gadolinium, Terbium, Boron Nitride, Nitrogen, Radon, Iridium.
  • two or more fuels are mixed together.
  • the material of the electrodes is one or a mixture of the following: Copper, carbon nanotubes, Carbon, Tungsten, Tin, Xenon.
  • the conductors to the plasma generator are made of superconductive material .
  • Item 1 A method to produce electromagnetic radiation, comprising: A collector optics for collimating the extreme ultraviolet radiation at the production site: One or more plasma production systems capable of producing a plasma, wherein the generated plasma moves relatively to the source production site; and it is oriented and generated in such a way that the component of drift velocity of the generated plasma going away from the collector optics is in the same order of magnitude or larger than the thermal velocity of the said plasma at the collector optics focus.
  • Item 2 A method as in item 1, wherein the plasma at the production site is irradiated by a laser beam.
  • Item 3 A method as in item 1, wherein the collector is placed so that it reflects the light from the production region in the direction of the plasma flow.
  • Item 4 A method as in item 1 , wherein the collector is placed so that it reflects the light from the production region in the direction opposite to the one of the plasma flow .
  • Item 5 A method as in item 1, wherein the collector is an off-axis mirror
  • Item 6 A method as in item 1, wherein the plasma generator Item 7 : A method as in item 1. , wherein the radiation
  • Item 8 A method as in item 1. , wherein the radiation
  • Item 9 A system to produce electromagnetic radiation, comprising : a collector optics for collimating the extreme ultraviolet radiation at the production site: One or more plasma production systems capable of producing a plasma, wherein the generated plasma moves to the source production site; and it is oriented and generated in such a way that the component of drift velocity of the generated plasma going away from the collector optics is in the same order of magnitude or larger than the thermal velocity of the said plasma .
  • Item 10 A s stem as in
  • Item 11 A s stem as in
  • Item 12 A s stem as in
  • Item 13 A s stem, as in
  • Item 14 A s stem, as in
  • Item 15 A system, as in item 6, wherein the plasma generator has electrodes.
  • Item 16 A system, as in item 6, wherein the plasma generator is electrodeless .
  • Item 17 A system, as in item 6, wherein the material of the electrodes is chosen to have emission from the material once transported to the focus point and irradiated by the laser.
  • Item 18 A system, as in item 6, wherein the fuel used is a gas injected from outside the electrodes by an array of nozzles .
  • Item 19 A system, as in item 17, where the nozzle array dispenses a homogeneous flow between anode and cathode.
  • Item 20 A system, as in item 6, wherein the fuel is a mixture of the gas and the electrode material
  • Item 21 A system, as in item 6, wherein the plasma
  • Item 21 A system, as in item 6, wherein the direction of the acceleration of the plasma is such that does not have a velocity component toward the collector optics .
  • Item 22 A system, as in item 6, wherein the velocity of the plasma generated by the plasma production system is such that most of the particles after being irradiated by the plasma don't reach the collector optics.
  • Item 23 A system, as in item 6, wherein the fuel dispensed in the plasma generator is a gas composed of one or more elements or compound.
  • Item 24 A system, as in item 6, wherein the fuel used in the plasma generator is a solid placed in the breakdown region.
  • Item 25 A system, as in item 6, wherein the fuel used in the plasma generator is a solid placed downstream of the
  • Item 26 A system, as in item 6, wherein the fuel is a liquid dispensed in form of droplet in the breakdown region.
  • Item 27 A system, as in item 6, wherein the fuel is a liquid dispensed in form of droplet downstream of the breakdown region .
  • Item 28 A system, as in item 6, wherein the fuel is a liquid, which remains on the surface of the electrodes.
  • Item 29 A system, as in item 6, wherein the is made of one or more of the following elements/compound: Hydrogen, Helium, Argon, Neon, Krypton, Xenon, Chlorine, Fluorine, Bromine, and Iodine, Tin, Gallium, Tungsten, Gadolinium, Terbium, Boron Nitride, Nitrogen, Radon, Iridium.

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  • X-Ray Techniques (AREA)

Abstract

La présente invention concerne un procédé de génération d'un rayonnement électromagnétique qui est de préférence un rayonnement du domaine de l'ultraviolet extrême et / ou des rayons X mous à partir d'un plasma, le procédé comportant les étapes consistant à : accélérer un combustible de rayonnement qui est de préférence un gaz à l'aide d'un dispositif (3) d'accélération de combustible en direction d'un emplacement (4) situé à l'intérieur de la zone d'action d'un collecteur (2) de rayonnement servant à recueillir le rayonnement électromagnétique ; plasmifier le combustible de rayonnement à l'aide d'un dispositif de production de plasma de telle façon que le combustible de rayonnement se trouve à l'état de plasma et irradie un rayonnement électromagnétique à l'emplacement situé à l'intérieur de la zone d'action du collecteur de rayonnement ; recueillir, à l'emplacement situé à l'intérieur de la zone d'action du collecteur de rayonnement, le rayonnement électromagnétique irradié du plasma à l'aide d'un collecteur de rayonnement ; le combustible de rayonnement étant accéléré par le dispositif d'accélération de combustible dans une direction et jusqu'à une vitesse moyenne telles que la composante moyenne (vn) de vitesse de dérive normal à la surface de collecte du collecteur de rayonnement et s'écartant de celle-ci, à l'emplacement situé à l'intérieur de la zone d'action du collecteur de rayonnement, soit d'un module supérieur ou égal au module de la vitesse thermique moyenne du combustible de rayonnement de plasma à l'emplacement situé à l'intérieur de la zone d'action du collecteur de rayonnement ; et l'emplacement situé à l'intérieur de la zone d'action du collecteur de rayonnement étant espacé par rapport au dispositif d'accélération de combustible et / ou au dispositif de génération de plasma.
PCT/EP2013/001555 2012-05-25 2013-05-27 Procédé et appareil de génération d'un rayonnement électromagnétique WO2013174525A1 (fr)

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