WO2013143534A1 - Four tunnel - Google Patents

Four tunnel Download PDF

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Publication number
WO2013143534A1
WO2013143534A1 PCT/DE2013/100106 DE2013100106W WO2013143534A1 WO 2013143534 A1 WO2013143534 A1 WO 2013143534A1 DE 2013100106 W DE2013100106 W DE 2013100106W WO 2013143534 A1 WO2013143534 A1 WO 2013143534A1
Authority
WO
WIPO (PCT)
Prior art keywords
tunnel
transport
metal
rollers
tunnel kiln
Prior art date
Application number
PCT/DE2013/100106
Other languages
German (de)
English (en)
Inventor
Thomas Rupp
Ralf Lechner
Original Assignee
Curamik Electronics Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Curamik Electronics Gmbh filed Critical Curamik Electronics Gmbh
Priority to DE201310102797 priority Critical patent/DE102013102797A1/de
Priority claimed from DE201310102797 external-priority patent/DE102013102797A1/de
Publication of WO2013143534A1 publication Critical patent/WO2013143534A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
    • F27B9/243—Endless-strand conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/008—Soldering within a furnace
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/021—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles in a direct manner, e.g. direct copper bonding [DCB]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C13/00—Rolls, drums, discs, or the like; Bearings or mountings therefor
    • F16C13/02—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/04—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity adapted for treating the charge in vacuum or special atmosphere
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
    • C04B2235/9623—Ceramic setters properties
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/343—Alumina or aluminates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/366—Aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/368—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/407—Copper
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/86—Joining of two substrates at their largest surfaces, one surface being complete joined and covered, the other surface not, e.g. a small plate joined at it's largest surface on top of a larger plate

Definitions

  • the invention relates to a tunnel kiln according to the preamble
  • DGB Direct Copper Bond
  • Metal sheets or foils in particular also those of copper or copper alloys, which have on their surface sides a layer or a coating of a chemical compound of the metal and a reactive gas, preferably oxygen.
  • this layer or coating forms together with the adjacent metal, a eutectic (reflow) with a melting temperature below the melting temperature of the metal (eg copper) in that by laying the film on the ceramic and by heating all the layers they can be connected together, through
  • This DCB method then indicates e.g. the following process steps: ® Oxidizing a metal foil, e.g. Copper foil so, which is a
  • DCB bonding Substrates prepared by this method (hereinafter also referred to as “DCB bonding") are hereinafter referred to as “DCB substrates", irrespective of the etaH used for the metal layers or sheets. The process itself is hereinafter referred to as “DCB bonding" regardless of the metal used for the metal layers or foils.
  • Metal layers or metal foils in particular also of copper layers or copper foils with KeramikmateriaL
  • this method which is also used especially for the production of metal-ceramic substrates, at a temperature between about 800 - 1000 ° C a
  • Main component such as copper, silver and / or gold also contains an active metal.
  • This active metal which is for example at least one element of the group Hf, Ti, Zr, Nb, Ce, establishes a connection between the solder and the ceramic by chemical reaction, while the
  • connection between the solder and the Metali a metallic Hartlot- connection est.
  • ceramic substrates usually tunnel ovens are used. These include, inter alia, an oven housing forming an elongate tunnel-like furnace space (also called muffle) and a conveyor with a transport element in the form of a flexible and heat-resistant conveyor belt for transporting the specialistssiungsgut by heated with at least one heater oven space.
  • the conveyor belt which looks from a high-temperature resistant metallic material, forms a self-contained and circumferentially driven loop and is passed with an example upper loop length through the furnace chamber and lies with this loop length slidably provided on within the furnace chamber guides.
  • the drive of the conveyor belt is such that it is pulled with its upper loop length through the furnace chamber.
  • Conveyor belt only a relatively short service life reachable, i. It is a relatively frequent change of the conveyor belt required, which means not only by the actual replacement of the conveyor belt, but also by the cooling and reheating of the tunnel kiln and for the reinstatement of the required tunnel kiln atmosphere a significant production downtime. It has to be taken into consideration that especially for DCB bonding, active soldering and burning in of thick film or metal thick film impurities in the tunnel area, a protective gas atmosphere with an exactly set oxygen content is required in order to achieve the respective
  • Conveyor belt and the guides of the tunnel kiln results in a significant burden of the furnace interior and thus the local atmosphere caused by abrasion particles.
  • a transport system or a conveyor for tunnel ovens (DE 20 2010 01 461 U 1), whose transport elements consists of a roller adapter system with a plurality of rolls made of a ceramic material, which in a transport direction of the conveyor successive and spaced apart rollers form the
  • Tunnel kiln is moved.
  • the disadvantage here is, inter alia, that with the known system, a full-surface edition of the material to be treated is not possible, this is supported by spatially offset on the rollers.
  • Ceramic slideways serve to support the rollers.
  • the object of the invention is to provide a tunnel oven, which avoids the aforementioned disadvantages and in particular for the
  • High temperature bonding in the sense of the invention means bonding or bonding at high temperature, i.e. at a temperature above 600 ° C,
  • Multilayer products are within the meaning of the invention, such products, which consists of at least a first element of metal or ceramic, for example in the form of a metal or ceramic layer: or metal or ceramic plate, and at least a second metal element, for example in the form of a Metal layer or metal plate, wherein these elements are connected by high-temperature bonding with each other.
  • “Full-surface or essentially voüflambaige edition” means in the context of the invention that the respective item to be treated with his
  • Transport element immediately adjacent side over the entire surface or in the
  • the tunnel kiln for example, is designed
  • the furnace housing seals the at least one furnace chamber in a gastight manner towards an environment at least at all circumferential sides extending in the transport direction
  • metal or copper foils with metal or copper foils or for a DCB bonding or active brazing of metal with ceramic
  • metal or copper foils with ceramic or for the burning of thick film or Metalldickfiimpasten is formed, and / or
  • rolling elements and preferably also bearings and / or
  • transport element sliding means are formed by a plurality of rolling elements in the form of rollers, which in the transport direction successively form a roller or roller track for the conveyor or for the at least one transport element,
  • rollers or rollers made of the ceramic material are freely rotatably mounted in the at least one furnace chamber on bearings likewise arranged in the at least one furnace chamber, preferably with rolling or ball bearings made of the ceramic material,
  • Transportelementgleitsch in particular the roller conveyor of several in the transport direction of the conveyor to each other
  • the bearing bodies arranged on two opposite sides of a segment are connected to one another by at least one preferably releasable retaining clip,
  • the transport element meshing means are formed by rollers or rollers which are freely rotatably mounted on the conveyor or on its transport elements, and in that the rollers or rollers consist of the ceramic material and preferably cooperate with guides of the tunnel kiln also made of the ceramic material,
  • transport elements are lubricants guided in ball guides balls on which the feed dog or the at least one
  • Ball guides consist of the ceramic material
  • nozzle openings are provided for introducing a gaseous medium, for example in the form of an inert gas and / or in the form of oxygen, into the at least one furnace space, wherein the
  • Nozzle openings at least partially on guides for the Transportelemenglitsitmiltel forming distribution pipes, for example to the
  • Ball guides forming distributor pipes are provided,
  • the transport element is a conveyor belt, which forms a self-contained loop which can be driven in rotation and which passes through the at least one tunnel space with a loop length, and / or
  • Transport elements or recordings is formed, that the recordings are moved as non-interconnected individual elements of a tunnel kiln inlet to a tunnel kiln exit and fed back from the tunnel kiln outlet to the tunnel kiln inlet, or that the recordings are connected together in a chain-link with each other to a circulating transport element,
  • Alumina is,
  • FIG. 1 in a simplified representation and in section through
  • FIG. 2 in a schematic representation and in longitudinal section a
  • FIG. 3 is a schematic sectional view of the tunnel kiln of FIG. 2;
  • FIG. 4 is a simplified representation of a plan view of a roller conveyor for guiding and supporting the transport element, together with a partial view of this transport element.
  • Fig. 5 in an enlarged view the storage of one of the rollers or
  • Fig. 6 is a representation like Figure 5 in a further embodiment
  • FIGs 7 and 8 in a schematic representation similar to Figures 2 and 3, a further embodiments of the treatment or tunnel oven according to the invention.
  • FIG. 12 is a simplified representation of a plan view of a roller conveyor for guiding and supporting the transport element according to a further embodiment of the invention
  • Fig. 13 is an end view of a roller conveyor segment of the roller conveyor of Fig. 12;
  • FIG. 14 shows an individual view and a side view of one of the bearing bodies of the roller conveyor of FIG. 12;
  • Fig. 1 5 in an enlarged partial view the storage of a roll or
  • 1 is a product in the form of a metal-ceramic substrate, which in a known manner from a ceramic layer 2, for example of alumina; Aluminum nitride, silicon nitride or aluminum oxide with zirconium oxide as well as made of MetailfoHen 3, such as copper foils metallizations made by high-temperature bonding, for example by DCB bonding, to each other
  • the treatment or tunnel kiln is used, inter alia. a horizontally open, elongated furnace housing 5 (muffle) with furnace chamber 5.1 and a feed dog 6, which in the embodiment shown in Figures 2-5 in a conventional manner of a closed loop forming and this over at least two
  • Deflections 7 and 8 guided conveyor belt 9 is illustrated, which with his in the figures 2 and 3 upper length by the appropriate manner, for example electrically or with a gas or liquid
  • Heating medium heated furnace chamber 5.1 is passed.
  • the wall of the furnace housing 5 consists of a high heat-resistant steel or a nickel base alloy.
  • the heating elements 10 serving for heating the oven space 5.1 are provided outside the oven space 5.1 and are controlled by thermosensors assigned to them.
  • the transport element 9 consists of a plurality of chain elements or members, which are arranged adjacent to one another in both the transport direction A and transverse to the transport direction A and hinged together, so that the lattice-like, flexible
  • Conveyor belt 9 results.
  • the conveyor belt 9, the links and joints are made of a high heat resistant steel.
  • the conveyor belt 9 is driven circumferentially so that the respective upper loop length 9.1 moves in the direction indicated in the figure 2 with the arrow A transport direction through the furnace chamber 5.1, from the inlet 4.1 to the outlet 4.2 of
  • the furnace chamber 5.1 open at appropriate areas nozzles 14 for introducing a protective gas and in particular during DCB bonding and for the controlled introduction of oxygen or a protective gas-oxygen mixture with regulated Sauerstoffanteii.
  • the corresponding item to be treated is 1 .1, which in the illustrated embodiment in each case of the stack assembly consisting of the two elalSfolien 3 and arranged between them
  • Ceramic layer 2 is formed, placed on the kiln inlet 4.1 on the top of a horizontal transport plane forming loops length 9.1 and then moved with the conveyor belt 9 through the furnace chamber 5.1. The finished product 1 is removed from the oven outlet 4.2.
  • Deflections 7 and 8 is also designed for tensioning or retightening of the conveyor belt 9.
  • Transportelementgleitstoff are provided, which in the in Figures 3 - 5 illustrated embodiment are realized by a plurality of rollers or rollers 1 1.1, which form a roller conveyor 1 1 and each freely rotatable in the oven housing 5 or at a local
  • rollers 1 1 .1 are oriented with their axes parallel to the horizontal transport plane of the conveyor belt 9 and perpendicular to the transport direction A.
  • the upper loop length 9.1 thus forms a horizontal or im
  • rollers 1 1 .1 To support the rollers 1 1 .1 are ball bearings 13, which consist for example of an inner bearing ring 1 3.1, an outer bearing ring 13.2 and a plurality of balls 13.3, between the bearing rings 13.1 and 13.2 or between the local ball treads are arranged. At least the rollers 1 1 .1 and also the ball bearings 1 3
  • bearing rings 1 3.1 and 13.2 and balls 1 3.3 each made of a ceramic material or material, which not only has a high temperature resistance but also a high mechanical strength at the maximum treatment or bonding temperature.
  • the upper loop length 9.1 lies with its underside on the rollers 1 1 .1 or on the roller conveyor formed by these rollers.
  • FIG. 6 shows, in a representation similar to FIG. 5, a ball bearing 1 3a for the rollers 11 .1.
  • the ball bearing 13a is different from the
  • Ball bearing 1 3 characterized in that the inner ring 13.1 is omitted and the balls 1 3.3 against the respective roller 1 1.1 directly toSiegen.
  • FIGS. 7 and 8 show, as a further embodiment, a tunnel kiln 4 a, which differs from the tunnel kiln 4 essentially only in that the transporter 6 b is made of a large number of, for example
  • the recordings 1 5 are each provided with a plurality of rollers 16, with which the receptacles 5 on guides 1 7 of the
  • Support tunnel kiln 4a At least between the inlet 4a.1 and the outlet 4a.2 of the tunnel kiln 4 close the individual receptacles 15 close to each other, so that they by a schematically illustrated in Figure 7 by the arrow 18 thrust by pushing through the
  • Tunnel space 5.1 are moved in the transport direction A, wherein the rollers 16 each roll on the guides 1 7.
  • the material to be treated is placed on the receptacles 1 5 at the inlet 4a. 1 and the finished product 1 is removed from the receptacles 1 5 at the outlet 4.
  • the receptacles 15 are moved back in the direction of transport A 'from the outlet 4a.2 to the inlet 4a via a transport path designated schematically by 19 in FIG.
  • the transport path 19 may be expedient for the transport path 19 to run within an inner space that is thermally insulated and / or heated relative to the surroundings, as indicated by the broken line 20 in FIG strong cooling of the receptacles 15 during their return to the inlet 4a.1 to avoid.
  • FIGS. 9 and 0 show, as a further embodiment, a tunnel kiln 4b, in which the transport element sliding means are formed by a multiplicity of balls 21 in two parallel ball guides 22 extending in each case in transport rib A.
  • the feed dog 6b of the tunnel oven 4b is again formed in this embodiment by a plurality of receptacles 23, for example, plate-shaped or im
  • the receptacles 23 are formed substantially plate-shaped. At least between the inlet 4b.1 and the outlet 4b.2 close the receptacles 23 close to each other, so that they are moved, for example by pushing with a schematically indicated in Figure 9 with the arrow 24 shear drive through the furnace chamber 5.1.
  • the receptacles 23 are each supported in the region of their two sides oriented in the transport direction A on the balls 21, which are sealed in the associated ball guides 22 are provided consecutively, and when moving the
  • Receivers 23 are also moved in this transport direction of the inlet 4b1 to the Ausiass 4b2.
  • each receptacle 23 is placed at the inlet 4b.1 on the there already provided with a plurality of balls 21 sections of the ball guides 23 and then the treated 1 .1 placed on the respective receptacle 23.
  • the product 1 produced in each case is removed from the receptacle 23 at the exit 4b.2.
  • the empty receptacle 23 is removed from the Kugei Adjusten 22 and moved back over a transport path 25 together with such balls 21, which have also passed to the Ausiass 4b.2, to the inlet 4b.1.
  • the receptacles 23, for example, are also on provided with the balls 21 ball guides.
  • Analogous to the Transportirecke 19 and the transport path 25 preferably extends in a relation to the environment thermally insulated and / or heated room 20 or by another used for the manufacture of products 1 furnace chamber of the tunnel oven 4b or another tunnel kiln, the balls 21 and the ball guides 22nd
  • each formed by two tubes 26 which are parallel and slightly spaced from each other with their longitudinal extent in
  • the tubes 27 are preferably used at the same time for supplying the protective gas and / or oxygen and / or the protective gas-oxygen mixture in the furnace chamber 5.1 and are for this purpose formed with a plurality of nozzle openings 26.1, nozzle openings 26.1 are preferably also located at the mutually facing peripheral regions of Tubes 26 with the additional advantage that the space 28 formed between the tubes 26 is cleaned by blowing out of the local nozzle openings 26.1 gas by blowing.
  • At least the balls 21 and the ball guides 22 and the elements forming them, eg tubes 26 are made of the heat-resistant and also mechanically high-strength ceramic material.
  • FIG. 11 shows an embodiment in which the
  • Transport element sliding means i. the lubricant for the receptacles 23 are not formed by mechanical lubricants, but by a pressurized gas.
  • two tubes 29 are provided along the path of movement of the receptacles 23 and below the receptacles 23, which at their the
  • the tubes 29 are subjected to a pressurized inert gas or inert gas-oxygen mixture, so that this gas then exits under pressure from the nozzle openings 29.1 and thereby the receptacles 23 in the area oriented in the direction of transport
  • a pages support a compressed gas cushion 30 formed by the exiting compressed gas.
  • the tubes 29 in turn consist of the heat-resistant and also mechanically high-strength ceramic material.
  • Figures 12 and 13 show the transport system or a
  • Transport path 6c of a tunnel kiln which in turn the
  • Transport element or conveyor belt 9 Transport element or conveyor belt 9 and the
  • Transportelementgleitstoff for the upper length 9.1 of the conveyor belt forming roller conveyor 1 1 c with a plurality of successive in the transport direction A rollers or rollers 1 1 c.1. These are oriented with their roll axes horizontally or substantially horizontally and perpendicular to the transport direction A and rotatably mounted at both ends in bearing housings 31 which are formed in the illustrated embodiment, each strip-like oriented with their longitudinal extent in the transport direction A.
  • the conveyor belt 9 in turn sees of a plurality of chain elements or members, both in the transport direction A consecutive, as well as arranged transversely to the transport direction A next to each other and are hinged together, so that there is a grid-like, flexible conveyor belt.
  • the rollers ⁇ 1 c.1 are mounted at both ends with bearings 32 freely rotatable about its roller axis in the bearing housings 31, namely ball bearing or roller bearing.
  • each bearing 32 on several Lagerisselz analyses 33 which are balls in the illustrated embodiment and each bear directly against a rolling or bearing surface 34 of the respective roller 1 1 c.1 or roll on this bearing surface 34, respectively, in the illustrated embodiment from the peripheral surface of a cross-section reduced end 1 c.1 .1 of the respective roller 1 1 c.1 is formed.
  • the LagerisselzSystem 33 bear against an outer bearing surface 35 of the bearing body 31, which in the illustrated
  • Embodiment is formed in each case by the inner surface of a provided in the bearing body 31 recess 36.
  • the LagerskylzSystem 33 thus roll directly on the respective roller 1 1 c.1 or
  • Bearing recess 36 from.
  • the bearings 32 thus have neither at
  • Axial support for the LagerisselzSystem 33 is achieved on the rollers 1 1 c.1, so that in the likewise axial support of the LagerisselzSystem to the bearing bodies 31 and in the bearing openings 36, the bearing 32 not only as a radial bearing, but also act as Axialiager.
  • At least the rollers 1 l c.1 and the Lagerskyskyz stresses 33 are made of a heat-resistant and mechanically high-strength ceramic material.
  • the bearing body 31 are made for example of a high temperature resistant material, such as steel or else also from the heat-resistant and mechanically high-strength ceramic material.
  • roller conveyor 1 1 c Another special feature of the roller conveyor 1 1 c is that it consists of several consecutive in the transport direction
  • Roller track segments 37 sets together, each consisting of two bearing body 31 on the two longitudinal sides of the respective segment 37 and a plurality of rollers 1 1 c mounted in these bearing bodies 31 in the manner described above. During assembly of the transport system or the transport path 6c, these segments are before mounting the
  • each segment 37 has at least one e.g. made of a heat-resistant metal, holding element 38 which serves as an assembly aid and extends on the underside of the relevant segment 37 between the two bearing bodies 31 and these each with a
  • each segment 37 is at least as far pushed into the tunnel kiln 4c, that the bearing body 31 with their rollers 1 1 1 c.1 facing away from the outside
  • Abutment elements 39 come to rest, which are required in the tunnel kiln for proper positioning of the segments 37. Following this, the holding element 38 can already be released from the segment 37 and then completely inserted into the tunnel oven, in which the cohesion of the segments 37 is ensured by the support members 39. With appropriate design of the holding elements 38, these can be removed even after each complete assembly of a segment 37 of this.
  • the holding elements 38 are
  • retaining plates or retaining clips e.g. made of spring steel.
  • Conveyor belt 9 is used, but in principle it is also possible, instead of the conveyor belt 9 plate-shaped recordings or
  • Material to be treated 1 .1 consists for example of the
  • Metallfoiie 3 with the consisting of a mechanically high-strength ceramic material transport elements or receptacles 40, these are provided at least on its upper side with a release layer 41, which is made for example with a high porosity of ceramic material, e.g. from Muiiit and / or Al 2 O 3 and / or TiO 3 and / or ZrO 2 and / or MgO and / or CaO and / or CaCO 2.
  • a release layer 41 which is made for example with a high porosity of ceramic material, e.g. from Muiiit and / or Al 2 O 3 and / or TiO 3 and / or ZrO 2 and / or MgO and / or CaO and / or CaCO 2.
  • Material i. As a ceramic material, which is not only stable at the maximum treatment temperature, but also has the required mechanical strength at this temperature, is in all the above-described embodiments preferably a
  • Ceramic with a low coefficient of thermal expansion For example, at least one ceramic from the group SiC, SI3N4, Al2CO, AlN, BN, B4C, B-SiC, Si-SiC, N-SiC and / or Muliit.
  • This ceramic material is particularly suitable for the rollers 1 1 .1 and their bearings 1 3 and 1 3a, the receptacles 1 5 and their rollers 16, the guides 7, the balls 21, ball guides 22 and the tubes 29.
  • transport element is a flat or substantially flat and / or full-surface or in the
  • Outlet 4.2, 4a.2 and 4b.2 results in an outwardly closed furnace chamber 5.1 and openings in the wall or in the furnace housing 5 are avoided, through which ambient air enter the furnace chamber 5.1 and / or inert gas or inert gas oxygen Mixture could emerge from the oven chamber 5.1.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Tunnel Furnaces (AREA)

Abstract

Four tunnel permettant un traitement thermique de pièces à traiter, en particulier la fabrication de produits à partir d'au moins un premier élément en métal ou en céramique, par exemple sous forme de couche métallique ou céramique ou bien de plaque métallique ou de carreau céramique, et d'au moins un deuxième élément en métal, par exemple sous forme de couche métallique ou de plaque métallique par assemblage haute température de ces éléments, ledit four tunnel comprenant un caisson de four formant au moins une enceinte de four sous forme de tunnel ; au moins un dispositif de chauffe destiné à chauffer ladite au moins une enceinte de four, ainsi qu'au moins un convoyeur comprenant au moins un élément de transport destiné au transport des pièces à traiter, dans une direction de transport, à travers ladite au moins une enceinte de four.
PCT/DE2013/100106 2012-03-30 2013-03-19 Four tunnel WO2013143534A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE201310102797 DE102013102797A1 (de) 2012-03-30 2013-03-19 Tunnelofen

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102012102786.2 2012-03-30
DE102012102786 2012-03-30
DE102013102797.0 2013-03-19
DE201310102797 DE102013102797A1 (de) 2012-03-30 2013-03-19 Tunnelofen

Publications (1)

Publication Number Publication Date
WO2013143534A1 true WO2013143534A1 (fr) 2013-10-03

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PCT/DE2013/100106 WO2013143534A1 (fr) 2012-03-30 2013-03-19 Four tunnel

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WO (1) WO2013143534A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107525397A (zh) * 2017-09-19 2017-12-29 海盐众信电子有限公司 一种用于生产继电器的隧道炉及烘干方法
CN109556396A (zh) * 2018-12-06 2019-04-02 广东邦普循环科技有限公司 一种锂离子电池正极材料烧结用超长辊道窑
CN111452480A (zh) * 2020-05-11 2020-07-28 陕西长石电子材料股份有限公司 高频感应制作陶瓷覆铜板的装置

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3744120A (en) 1972-04-20 1973-07-10 Gen Electric Direct bonding of metals with a metal-gas eutectic
US3750904A (en) * 1971-06-30 1973-08-07 Electric Furnace Co Heat treating furnace
DE2213115A1 (de) 1972-03-17 1973-09-27 Siemens Ag Verfahren zum hochfesten verbinden von karbiden, einschliesslich des diamanten, boriden, nitriden, siliziden mit einem metall nach dem trockenloetverfahren
DE2319854A1 (de) 1972-04-20 1973-10-25 Gen Electric Verfahren zum direkten verbinden von metallen mit nichtmetallischen substraten
EP0153618A2 (fr) 1984-02-24 1985-09-04 Kabushiki Kaisha Toshiba Procédé pour fabriquer un substrat à haute thermoconductivité et feuille pour conducteurs en cuivre utilisable dans ce procédé
EP0304872A2 (fr) * 1987-08-26 1989-03-01 Koyo Seiko Co., Ltd. Palier à billes résistant à la chaleur
WO1993020000A1 (fr) * 1992-03-31 1993-10-14 Feco Engineered Systems, Inc. Systeme de bandes convoyeuses en tandem
US6336775B1 (en) * 1998-08-20 2002-01-08 Matsushita Electric Industrial Co., Ltd. Gas floating apparatus, gas floating-transporting apparatus, and thermal treatment apparatus
DE202010014461U1 (de) 2010-10-19 2010-12-23 Cerapro Hochtemperaturtechnik Gmbh Eine antriebslose keramische Rollenbahn für Hochtemperaturanwendungen von 500- 1500≧C
DE102010017530A1 (de) * 2010-06-23 2011-12-29 Roth & Rau Ag Lagerung von Transportrollen

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3750904A (en) * 1971-06-30 1973-08-07 Electric Furnace Co Heat treating furnace
DE2213115A1 (de) 1972-03-17 1973-09-27 Siemens Ag Verfahren zum hochfesten verbinden von karbiden, einschliesslich des diamanten, boriden, nitriden, siliziden mit einem metall nach dem trockenloetverfahren
US3744120A (en) 1972-04-20 1973-07-10 Gen Electric Direct bonding of metals with a metal-gas eutectic
DE2319854A1 (de) 1972-04-20 1973-10-25 Gen Electric Verfahren zum direkten verbinden von metallen mit nichtmetallischen substraten
EP0153618A2 (fr) 1984-02-24 1985-09-04 Kabushiki Kaisha Toshiba Procédé pour fabriquer un substrat à haute thermoconductivité et feuille pour conducteurs en cuivre utilisable dans ce procédé
EP0304872A2 (fr) * 1987-08-26 1989-03-01 Koyo Seiko Co., Ltd. Palier à billes résistant à la chaleur
WO1993020000A1 (fr) * 1992-03-31 1993-10-14 Feco Engineered Systems, Inc. Systeme de bandes convoyeuses en tandem
US6336775B1 (en) * 1998-08-20 2002-01-08 Matsushita Electric Industrial Co., Ltd. Gas floating apparatus, gas floating-transporting apparatus, and thermal treatment apparatus
DE102010017530A1 (de) * 2010-06-23 2011-12-29 Roth & Rau Ag Lagerung von Transportrollen
DE202010014461U1 (de) 2010-10-19 2010-12-23 Cerapro Hochtemperaturtechnik Gmbh Eine antriebslose keramische Rollenbahn für Hochtemperaturanwendungen von 500- 1500≧C

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107525397A (zh) * 2017-09-19 2017-12-29 海盐众信电子有限公司 一种用于生产继电器的隧道炉及烘干方法
CN109556396A (zh) * 2018-12-06 2019-04-02 广东邦普循环科技有限公司 一种锂离子电池正极材料烧结用超长辊道窑
CN109556396B (zh) * 2018-12-06 2024-01-09 广东邦普循环科技有限公司 一种锂离子电池正极材料烧结用超长辊道窑
CN111452480A (zh) * 2020-05-11 2020-07-28 陕西长石电子材料股份有限公司 高频感应制作陶瓷覆铜板的装置

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