WO2013143304A1 - Manufacturing method for touch screen and touch screen - Google Patents

Manufacturing method for touch screen and touch screen Download PDF

Info

Publication number
WO2013143304A1
WO2013143304A1 PCT/CN2012/084907 CN2012084907W WO2013143304A1 WO 2013143304 A1 WO2013143304 A1 WO 2013143304A1 CN 2012084907 W CN2012084907 W CN 2012084907W WO 2013143304 A1 WO2013143304 A1 WO 2013143304A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer pattern
transparent conductive
protective layer
conductive layer
protective
Prior art date
Application number
PCT/CN2012/084907
Other languages
French (fr)
Chinese (zh)
Inventor
黄炜赟
玄明花
高永益
Original Assignee
京东方科技集团股份有限公司
成都京东方光电科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 京东方科技集团股份有限公司, 成都京东方光电科技有限公司 filed Critical 京东方科技集团股份有限公司
Publication of WO2013143304A1 publication Critical patent/WO2013143304A1/en

Links

Classifications

    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04111Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate

Definitions

  • Embodiments of the present invention relate to a method of fabricating a touch screen and a touch screen. Background technique
  • the touch screen can be divided into two types: resistive and capacitive. Because capacitive touch screens are highly sensitive, long-lived, and support multi-touch, they are now the mainstream touch technology. Capacitive touch screens are further divided into self-touch touch screens and mutual touch screens. The following describes how to make several mutual-sensing touch screens.
  • the lateral ITO layer and the vertical ITO were patterned twice with two depositions and two masks.
  • the lateral ITO is separated from the vertical ITO by an insulating layer such as SiNx (silicon nitride) or OC (organic insulating layer), and finally a protective layer is required.
  • the double ITO touch screen requires the following processes: MetaK deposition metal) ITO 1 SiNx (or OC) 1 Via Hole ⁇ ITO 2 SiNx (or OC) 2, total required 5 Masks, the process is more complicated.
  • the lateral ITO and the vertical ITO are deposited in the same layer, and a layer of metal (Metal) is bridged through the vias to connect the ITOs in the off direction (either horizontally or vertically).
  • the specific step is ITO SiNx (or OC) 1 Via Hole ⁇ Metal ⁇ SiNx (or OC) 2, for a total of 4 masks.
  • Metal SiNx (or OC) 1 Via Hole ⁇ ITO ⁇ SiNx (or OC) 2.
  • the difference between the island mode and the via mode process is that the SiNx (or OC) insulating layer of the lateral ITO and the vertical ITO crossing portion is retained while the SiNx (or OC) 1 is etched or developed, and the rest is left. The insulation of the location is removed, ITO SiNx (or OC) 1 Island ⁇ Metal ⁇ SiNx (or OC), a total of 4 Masks. Like the via mode, this process also interchanges the Metal Mask and ITO Mask positions, ie: Metal SiNx (or OC) 1 Island ⁇ ITO ⁇ SiNx (or OC) 2
  • Embodiments of the present invention provide a touch screen manufacturing method and a touch screen, which can simplify a process
  • An aspect of the present invention provides a method of fabricating a touch screen, including: depositing a metal on a substrate, and forming a metal layer pattern through a first patterning process, wherein the metal layer pattern includes a bridge line of the display area; a protective material is inkjet printed on the substrate on which the metal layer pattern is formed to deposit the first protective material on the bridge wire to form a first protective layer pattern; the first protective layer is formed Depositing a transparent conductive material on the patterned substrate, and forming a transparent conductive layer pattern through a second patterning process; depositing an insulating material on the substrate on which the transparent conductive layer pattern is formed, and forming a second through a third patterning process Protective layer pattern.
  • the first protective layer pattern is island-shaped; and the thickness of the first protective layer pattern is greater than the thickness of the metal layer pattern; the width of the first protective layer pattern is smaller than the metal a width of the layer pattern such that opposite first and second sides of the metal layer pattern are exposed; a length of the first protective layer pattern is greater than a length of the metal layer pattern such that the metal layer pattern is opposite The third side and the fourth side are covered.
  • the range of the transparent conductive layer pattern is larger than the range of the first protective layer pattern such that the transparent conductive layer pattern and the metal layer pattern are on a first side opposite to the metal layer pattern Electrically connected to the location on the second side.
  • the metal layer pattern may further include a circuit line of the pad region;
  • the transparent conductive layer pattern includes: a transparent conductive layer pattern of the pad region and a transparent conductive layer pattern of the display region;
  • the second protective layer pattern covers the transparent conductive layer pattern of the display region, and exposes the transparent conductive layer pattern of the pad region.
  • the transparent conductive layer pattern is an indium tin oxide layer.
  • the first protective layer pattern and the second protective layer pattern are made of a propylene-based resin and an epoxy resin, or the first protective layer pattern and the second protective layer
  • the pattern is made of silicon nitride.
  • the shape of the transparent conductive layer pattern is a diamond shape.
  • a touch screen including: a substrate; a metal layer pattern formed by depositing a metal on the substrate and passing through a first patterning process, the metal layer pattern including a bridge line of a display area; a first protective layer pattern formed by a process of performing inkjet printing on a substrate on which the metal layer pattern is formed using a first protective material to deposit the first protective material on the bridge line; a transparent conductive layer a pattern formed by depositing a transparent conductive material on a substrate on which the first protective layer pattern is formed and subjected to a second patterning process; and a second protective layer pattern passing through the substrate on which the transparent conductive layer pattern is formed An insulating material is deposited thereon and formed through a third patterning process.
  • the first protective layer pattern is island-shaped; and the thickness of the first protective layer pattern is greater than the thickness of the metal layer pattern; the width of the first protective layer pattern is smaller than the metal layer The width of the pattern is such that the opposite first and second sides of the metal layer pattern are exposed.
  • the range of the transparent conductive layer pattern is larger than the range of the first protective layer pattern, such that the transparent conductive layer pattern and the metal layer pattern are on a first side opposite to the metal layer pattern and The second side is electrically connected.
  • Another aspect of the present invention provides a method of fabricating a touch screen, including: depositing a transparent conductive material on a substrate, and forming a transparent conductive layer pattern through a first patterning process, wherein the transparent conductive layer pattern includes a display area a lateral scan line and a vertical scan line; performing inkjet printing on the substrate on which the transparent conductive layer pattern is formed using a first protective material to deposit the first protective material on the lateral scan line and vertical scan Forming a first protective layer pattern on the node of the line; depositing a metal on the substrate on which the first protective layer pattern is formed, and forming a metal layer pattern through a second patterning process; forming the pattern of the metal layer An insulating material is deposited on the substrate, and a third patterning process is performed to form a second protective layer pattern.
  • a touch screen including: a substrate; a transparent conductive layer pattern formed by depositing a transparent conductive material on the substrate and performing a first patterning process, the transparent conductive layer pattern a horizontal scan line and a vertical scan line including a display area; the first protective layer pattern is inkjet printed on the substrate on which the transparent conductive layer pattern is formed by using the first protective material to apply the first protection a material is deposited on the nodes of the lateral scan lines and the vertical scan lines; the metal layer pattern is formed by depositing metal on the substrate on which the first protective layer pattern is formed and undergoing a second patterning process And the second protective layer pattern is An insulating material is deposited on the substrate on which the metal layer pattern is formed, and is formed through a third patterning process.
  • the transparent conductive layer pattern includes at least one notch; the first protective layer pattern is island-shaped, and the thickness of the first protective layer pattern is greater than the thickness of the transparent conductive layer pattern; The first protective layer pattern covers the notch and the periphery of the notch, and exposes the transparent conductive layer pattern except the notch and the position around the periphery of the notch.
  • the range of the metal layer pattern is larger than the range of the first protective layer pattern such that the metal layer pattern is at a position outside the range of the first protective layer pattern and the transparent conductive layer
  • the pattern is electrically connected.
  • the transparent conductive layer pattern includes at least one notch; the first protective layer pattern is island-shaped, and the thickness of the first protective layer pattern is greater than the thickness of the transparent conductive layer pattern; The first protective layer pattern covers the notch and the periphery of the notch, and exposes the transparent conductive layer pattern except the notch and the position around the periphery of the notch.
  • the range of the metal layer pattern is larger than the range of the first protective layer pattern such that the metal layer pattern is at a position outside the range of the first protective layer pattern and the transparent conductive layer
  • the pattern is electrically connected.
  • the transparent conductive layer pattern further includes: a transparent conductive layer pattern of the pad region; the metal layer pattern includes: a bridge line of the display region and a circuit line of the pad region; the second protective layer The pattern covers the bridge lines of the display area and exposes the circuit lines of the pad area.
  • the transparent conductive layer pattern is an indium tin oxide layer.
  • the first protective layer pattern and the second protective layer pattern are made of a propylene-based resin and an epoxy resin, or the first protective layer pattern and the second protective layer pattern are Made of silicon nitride.
  • the shape of the transparent conductive layer pattern is a diamond shape.
  • the first protective layer pattern is deposited at the intersection of the lateral scanning line and the vertical scanning line by means of inkjet printing (Ink Inject), and the number of masks used can be reduced compared with the prior art. Therefore, the patterning processes such as exposure, development, etching, and peeling can be reduced correspondingly, thereby achieving the purpose of simplifying the process.
  • FIG. 1 is a schematic flow chart of an embodiment of a method for fabricating a touch screen according to the present invention
  • FIG. 2A is a plan view showing a display area of a touch screen corresponding to step 111 in the method for fabricating the touch screen shown in FIG.
  • 2B is a cross-sectional view showing a display area of the touch screen corresponding to step 111 in the method of fabricating the touch screen shown in FIG. 1;
  • 3A is a plan view showing a display area of the touch screen corresponding to step 112 in the method for fabricating the touch screen shown in FIG. 1;
  • 3B is a cross-sectional view showing a display area of the touch screen corresponding to step 112 in the method of fabricating the touch screen shown in FIG. 1;
  • 4A is a plan view showing a display area of the touch screen corresponding to step 113 in the method of fabricating the touch screen shown in FIG. 1;
  • 4B is a cross-sectional view showing a display area of the touch screen corresponding to step 113 in the method of fabricating the touch screen shown in FIG. 1;
  • 5A is a plan view showing a display area of the touch screen corresponding to step 114 in the method for fabricating the touch screen shown in FIG. 1;
  • 5B is a cross-sectional view showing a display area of the touch screen corresponding to step 114 in the method of fabricating the touch screen shown in FIG. 1;
  • FIG. 6 is a schematic flow chart of another embodiment of a method for fabricating a touch screen according to the present invention.
  • 7A is a plan view showing a display area of the touch screen corresponding to step 211 in the method of fabricating the touch screen shown in FIG. 6;
  • FIG. 7B is a cross-sectional view showing a display area of the touch screen corresponding to step 211 in the method of fabricating the touch screen shown in FIG. 6;
  • FIG. 8A is a plan view of a display area of the touch screen corresponding to step 212 in the method of fabricating the touch screen shown in FIG. 6;
  • 8B is a cross-sectional view of a display area of the touch screen corresponding to step 212 in the method of fabricating the touch screen illustrated in FIG. 6;
  • 9A is a plan view showing a display area of the touch screen corresponding to step 213 in the method for fabricating the touch screen shown in FIG. 6;
  • 9B is a cross-sectional view showing a display area of the touch screen corresponding to step 213 in the method of fabricating the touch screen shown in FIG. 6;
  • FIG. 10A is a plan view showing a display area of the touch screen corresponding to step 214 in the method of fabricating the touch screen shown in FIG. 6; FIG.
  • Fig. 10B is a cross-sectional view showing a display area of the touch panel corresponding to step 214 in the method of fabricating the touch panel shown in Fig. 6. detailed description
  • FIG. 5A is a top view of a display area of the touch screen finally generated by the present solution
  • FIG. 5B is a cross-sectional view of the touch screen finally generated by the solution.
  • the method may only require three masks ( Mask ).
  • FIG. 1 is a schematic flow chart of an embodiment of a method for fabricating a touch screen according to the present invention, The method includes the following steps.
  • Step 111 depositing a metal on the substrate 11, and through a first patterning process, forming a metal layer pattern 12, the metal layer pattern 12 including a bridge line of the display area.
  • the metal layer pattern may further include: a circuit line of the pad region.
  • An example of this step may be: depositing a layer of metal on a glass substrate and patterning through a process including exposure, etching, lift, etc. to form a bridge between the peripheral circuit lines and the display area.
  • the patterning process comprises: coating a photoresist on the metal layer; exposing the photoresist using a photomask; developing the exposed photoresist to obtain a photoresist pattern; etching using the photoresist pattern to The exposed metal layer is removed, thereby obtaining a metal layer pattern; thereafter, the remaining photoresist is removed from the metal layer pattern.
  • the composition process of the following steps is similar and will not be repeated here.
  • FIG. 2A is a plan view of a display area of the touch screen corresponding to step 111; and FIG. 2B is a cross-sectional view of a display area of the touch screen corresponding to step 111.
  • Step 112 performing inkjet printing on the substrate on which the metal layer pattern 12 is formed using a first protective material to deposit the first protective material on the bridge line to form a first protective layer pattern 13.
  • An example of this step may be: forming a first overcoat layer on the node of the laterally transparent conductive layer pattern to be formed and the vertical transparent conductive layer pattern by an ink jet printing (Ink Inject) method.
  • Ink Inject ink jet printing
  • FIG. 3A is a plan view of a display area of the touch screen corresponding to step 112; and FIG. 3B is a cross-sectional view of a display area of the touch screen corresponding to step 112.
  • the first protective layer pattern 13 may be island-shaped; and the thickness of the first protective layer pattern is greater than the thickness of the metal layer pattern; the width of the first protective layer pattern is smaller than the width of the metal layer pattern, The first side and the second side of the metal layer pattern are exposed; the length of the first protective layer pattern is greater than the length of the metal layer pattern, such that the metal layer pattern is opposite to the third side and the third The four sides are covered; in the subsequent process, the covered area may be deposited with a transparent conductive material of a transparent conductive layer pattern.
  • Step 113 depositing a transparent conductive material on the substrate on which the first protective layer pattern is formed, and forming a transparent conductive layer pattern 14 through a second patterning process.
  • the transparent conductive layer pattern may be an indium tin oxide layer.
  • An example of this step can be: depositing a layer of ITO (indium tin oxide layer) or other transparent
  • the conductive layer pattern is patterned to form a diamond or other shaped ITO layer pattern through a patterning process including exposure, etching, and lift-off.
  • FIG. 4A is a plan view of a display area of the touch screen corresponding to step 113; and FIG. 4B is a cross-sectional view of a display area of the touch screen corresponding to step 113.
  • the transparent conductive layer pattern 14 may have a range greater than a range of the first protective layer pattern such that the transparent conductive layer pattern and the metal layer pattern are opposite to the first side and the second side of the metal layer pattern The location is electrically connected.
  • the metal layer pattern includes opposing first end regions and second end regions and opposite third end regions and fourth end regions, all of which are in communication.
  • the width of the first protective layer pattern is smaller than the width of the metal layer pattern, such that the first side region and the second side region of the metal layer pattern are exposed; the length of the first protective layer pattern is greater than The length of the metal layer pattern is such that the opposite third side region and fourth side region of the metal layer pattern are covered.
  • the covered regions of the third side region and the fourth side region may be deposited with a transparent conductive material of a transparent conductive layer pattern.
  • the transparent conductive layer pattern may include a first region, a second region, and a third region that are isolated from each other, with a gap between the first region and the third region, and a gap between the second region and the third region.
  • the first region and the second region of the transparent conductive layer pattern are electrically connected by the first side region and the second side region opposite to the metal layer pattern, and a partial region of the third region of the transparent conductive layer pattern may be deposited on the third side region and The four regions are covered by the first protective layer pattern so as to be able to traverse the first protective layer pattern.
  • Step 114 depositing an insulating material on the substrate on which the transparent conductive layer pattern is formed, and forming a second protective layer pattern 15 through the third patterning process.
  • the transparent conductive layer pattern includes: a transparent conductive layer pattern of the pad region and a transparent conductive layer pattern of the display region; the second protective layer pattern covers the transparent conductive layer pattern of the display region, and exposes the pad The transparent conductive layer pattern of the area (the effect of the dew is not shown in the figure).
  • An example of this step may be: depositing an insulating layer coated with an organic insulating layer or other material, and forming a protective layer to protect the transparent conductive layer of the display region by a patterning process including exposure, etching, lift-off, and the like.
  • the protective layer exposes the transparent conductive layer of the pad pad region to facilitate bonding of the IC (drive chip).
  • the first protective layer pattern and the second protective layer pattern may be an organic insulating layer or an inorganic insulating layer, and the first protective layer pattern and the second protective layer pattern may be made of a propylene-based resin and an epoxy resin. Or, the first protective layer pattern and the second protective layer pattern are made of silicon nitride.
  • the shape of the transparent conductive layer pattern may be a diamond shape.
  • the touch screen corresponding to the above method includes: a substrate 11; a metal layer pattern 12 formed by depositing metal on the substrate and undergoing a first patterning process, the metal layer pattern including a display area a bridge wiring; a first protective layer pattern 13 through a process of performing inkjet printing on a substrate on which the metal layer pattern is formed using a first protective material to deposit the first protective material on the bridge line Forming; a transparent conductive layer pattern 14 formed by depositing a transparent conductive material on a substrate on which the first protective layer pattern is formed and subjected to a second patterning process; and a second protective layer pattern 15 through which the transparent layer is formed An insulating material is deposited on the substrate of the conductive layer pattern and formed through a third patterning process.
  • the first protective layer pattern 13 is island-shaped; and the thickness of the first protective layer pattern is greater than the thickness of the metal layer pattern; the width of the first protective layer pattern is smaller than the width of the metal layer pattern The first side and the second side of the metal layer pattern are exposed to each other.
  • the range of the transparent conductive layer pattern 14 is larger than the range of the first protective layer pattern such that the transparent conductive layer pattern and the metal layer pattern are on the first side and the second side opposite to the metal layer pattern.
  • the location is electrically connected.
  • the metal layer pattern 12 further includes: a circuit line of the pad region.
  • the transparent conductive layer pattern 14 includes: a transparent conductive layer pattern of a pad region and a transparent conductive layer pattern of the display region; the transparent conductive layer pattern may be an indium tin oxide layer; the transparent conductive layer pattern 14
  • the shape may be a diamond shape, including a first region, a second region, and a third region separated from each other, a gap between the first region and the third region, a gap between the second region and the third region, and a second region in the middle .
  • the second protective layer pattern 15 covers the transparent conductive layer pattern of the display region and exposes the transparent conductive layer pattern of the pad region.
  • first protective layer pattern and the second protective layer pattern may be made of a propylene-based resin and an epoxy resin, or the first protective layer pattern and the second protective layer pattern may be made of nitrogen. Made of silicon.
  • FIG. 10A is a touch screen finally generated by the solution.
  • FIG. 10B is a cross-sectional view of the touch screen finally generated by the present scheme. Compared with the above embodiment, this embodiment replaces step 111 and step 113, and the method can only require three masks.
  • FIG. 6 is a schematic flow chart of another embodiment of a method for fabricating a touch screen according to the present invention, the method comprising the following steps.
  • Step 211 depositing a transparent conductive material on the substrate 21, and forming a transparent conductive layer pattern 24 through a first patterning process, the transparent conductive layer pattern including a horizontal scan line and a vertical scan line having a display area.
  • the transparent conductive layer pattern may further include: a transparent conductive layer pattern of the pad region.
  • An example of this step may be: depositing a pattern of ITO or other transparent conductive layer on a glass substrate and forming a diamond or other shaped ITO through a patterning process including exposure, etching, lift-off, and the like.
  • FIG. 7A is a plan view of a display area of the touch screen corresponding to step 211; and FIG. 7A is a cross-sectional view of the display area of the touch screen corresponding to step 211.
  • the transparent conductive layer pattern 24 can include at least one notch.
  • Step 212 performing inkjet printing on the substrate on which the transparent conductive layer pattern is formed by using a first protective material to deposit the first protective material on the nodes of the horizontal scan line and the vertical scan line to form The first protective layer pattern 23.
  • An example of this step may be: depositing a first protective layer on the nodes of the lateral ITO and the vertical ITO by an inkjet printing (Ink Inject) method.
  • FIG. 8A is a plan view of a display area of the touch screen corresponding to step 212; and FIG. 8B is a cross-sectional view of a display area of the touch screen corresponding to step 212.
  • the first protective layer pattern 23 is island-shaped, and the thickness of the first protective layer pattern is greater than the thickness of the transparent conductive layer pattern; the first protective layer pattern covers the gap and the The periphery of the notch is exposed, and the transparent conductive layer pattern is exposed except for the notch and the periphery of the notch.
  • Step 213 depositing a metal on the substrate on which the first protective layer pattern is formed, and forming a metal layer pattern 22 through a second patterning process.
  • An example of this step may be: depositing a layer of metal and patterning through the exposure, etching, and stripping to form a bridge between the peripheral circuit lines and the display area.
  • FIG. 9A is a plan view of a display area of the touch screen corresponding to step 213; and FIG. 9B is step 213. A cross-sectional view of the display area of the corresponding touch screen.
  • the range of the metal layer pattern 22 is larger than the range of the first protective layer pattern such that the metal layer pattern is at a position outside the range of the first protective layer pattern and the transparent conductive layer The pattern is electrically connected.
  • Step 214 depositing an insulating material on the substrate on which the metal layer pattern is formed, and performing a third patterning process to form a second protective layer pattern 25.
  • the metal layer pattern may include: a bridge line of the display area and a circuit line of the pad area; the second protection layer pattern covers the bridge line of the display area, and the circuit line of the pad area is exposed The effect of the dew is not indicated in the middle).
  • An example of the step may be: depositing an insulating layer coated with an organic insulating layer or other material, and forming a protective layer to protect the transparent conductive layer of the display region by a patterning process including exposure, etching, peeling, and the like, and The metal layer of the Pad pad area is exposed to facilitate the bonding of the IC (drive chip).
  • FIG. 10A is a plan view of a display area of the touch screen corresponding to step 214; and FIG. 10B is a cross-sectional view of a display area of the touch screen corresponding to step 214.
  • the transparent conductive layer pattern 24 may include a first region, a second region, and a third region separated from each other; a gap between the third region and the second region, between the third region and the first region Has a gap.
  • the first protective layer pattern covers the periphery of the notch and the notch, and exposes a position of the transparent conductive layer pattern except for a notch and a periphery of the notch. That is, the first protective layer pattern exposes a partial position of the first region and a partial position of the third region.
  • the metal layer pattern 22 includes opposing first end regions and second end regions and opposing third end regions and fourth end regions, all of which are in communication.
  • the range of the metal layer pattern 22 is larger than the range of the first protective layer pattern such that the metal layer pattern is electrically connected to the transparent conductive layer pattern at a position outside the range of the first protective layer pattern. That is, the metal layer pattern covers the first region partial position and the partial portion of the third region such that the first region and the third region are electrically connected by the metal layer pattern.
  • the transparent conductive layer pattern may be an indium tin oxide layer; the first protective layer pattern and the second protective layer pattern are made of a propylene-based resin and an epoxy resin, or the first protection
  • the layer pattern and the second protective layer pattern are made of silicon nitride.
  • the shape of the transparent conductive layer pattern may be a diamond shape.
  • the touch screen corresponding to the second embodiment includes: a substrate 21; a transparent conductive layer pattern 24 formed by depositing a transparent conductive material on the substrate and undergoing a first patterning process.
  • the transparent conductive layer pattern includes a lateral scan line and a vertical scan line having a display area; the first protective layer pattern 23 is subjected to inkjet printing on the substrate on which the transparent conductive layer pattern is formed by using the first protective material The first protective material is deposited on the nodes of the lateral scan lines and the vertical scan lines; the metal layer pattern 22, after depositing metal on the substrate on which the first protective layer pattern is formed and after a second time Forming a patterning process; and, the second protective layer pattern 25 is formed by depositing an insulating material on the substrate on which the metal layer pattern is formed, and performing a third patterning process.
  • the transparent conductive layer pattern 24 may include at least one notch; the first protective layer pattern 23 may be island-shaped, and the thickness of the first protective layer pattern is greater than the thickness of the transparent conductive layer pattern; The first protective layer pattern covers the notch and the periphery of the notch, and exposes the transparent conductive layer pattern except the notch and the position around the periphery of the notch.
  • the range of 22 of the metal layer pattern may be larger than the range of the first protective layer pattern 23 such that the metal layer pattern is at a position outside the range of the first protective layer pattern and the transparent conductive layer pattern Electrical connection.
  • the transparent conductive layer pattern 24 may further include: a transparent conductive layer pattern of the pad region; the metal layer pattern includes: a bridge line of the display region and a circuit line of the pad region; the second protective layer pattern covers The bridge of the display area and the circuit line of the pad area are exposed.
  • the transparent conductive layer pattern 24 may be an indium tin oxide layer; the first protective layer pattern 23 and the second protective layer pattern 25 may be made of a propylene-based resin and an epoxy resin, or The first protective layer pattern and the second protective layer pattern may be made of silicon nitride.
  • the transparent conductive layer pattern 24 has a diamond shape, and includes a first region, a second region, and a third region that are isolated from each other. There is a gap between the first region and the third region, and the second region and the third region are There is a gap between them, and the second area is in the middle.
  • Embodiments of the present invention deposit an insulating layer at the intersection (node) of the lateral scanning line and the vertical scanning line by means of inkjet printing, instead of the prior art mask (Mask)
  • the method of depositing the insulating layer can reduce the number of the reticle used, so that the total number of reticle used in the preparation method is as low as three, thereby correspondingly reducing the patterning processes such as exposure, development, etching, and peeling. Reduce production costs and simplify the production process.
  • each layer (protective layer, transparent conductive layer pattern) is not limited to the material described in the present application, and the transparent conductive layer pattern is not limited to the diamond (Diamond) mentioned in the present application.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Position Input By Displaying (AREA)

Abstract

Provided are a manufacturing method for a touch screen and a touch screen. The manufacturing method for a touch screen comprises: depositing a metal on a substrate, forming a metal layer pattern through a first configuration process, the metal layer pattern comprising a bridging line of a display area; using a first protective material to perform inkjet printing on the substrate formed with the metal layer pattern, to deposit the first protective material on the bridging line, and forming a first protective layer pattern; depositing a transparent conducting material on the substrate formed with the first protective layer pattern, and forming a transparent conducting layer pattern through a second configuration process; and depositing an insulating material on the substrate formed with the transparent conducting layer pattern, and forming a second protective layer pattern through a third configuration process.

Description

触摸屏的制作方法和触摸屏 技术领域  Touch screen manufacturing method and touch screen
本发明的实施例涉及一种触摸屏的制作方法和触摸屏。 背景技术  Embodiments of the present invention relate to a method of fabricating a touch screen and a touch screen. Background technique
触摸屏可以分为电阻式和电容式两种。 由于电容式触摸屏具有高敏感、 长寿命、 且支持多点触摸, 成为时下的主流触摸技术。 电容式触摸屏又分为 自感式触摸屏和互感式触摸屏。 以下介绍几种互感式触摸屏的制作方法。  The touch screen can be divided into two types: resistive and capacitive. Because capacitive touch screens are highly sensitive, long-lived, and support multi-touch, they are now the mainstream touch technology. Capacitive touch screens are further divided into self-touch touch screens and mutual touch screens. The following describes how to make several mutual-sensing touch screens.
1、双层铟锡氧化物 ITO (也可以是别的透明导电层图案)触摸屏: 5 Mask (光罩)模式  1, double-layer indium tin oxide ITO (can also be another transparent conductive layer pattern) touch screen: 5 Mask (mask) mode
横向 ITO层和竖向 ITO分别釆用两次沉积、 两次使用光罩的构图。横向 ITO与竖向 ITO用 SiNx (氮化硅)或 OC (有机绝缘层 )等绝缘层隔开, 最 后还需要一层保护层。 加上金属(Metal )导电层以及过孔(Via Hole ) , 双 层 ITO触摸屏需要以下工序: MetaK沉积金属) ITO 1 SiNx (或者 OC) 1 Via Hole^ITO 2 SiNx (或者 OC) 2, 总共需要 5张 Mask (光罩 ) , 制程较为复 杂。  The lateral ITO layer and the vertical ITO were patterned twice with two depositions and two masks. The lateral ITO is separated from the vertical ITO by an insulating layer such as SiNx (silicon nitride) or OC (organic insulating layer), and finally a protective layer is required. In addition to the metal conductive layer and the Via Hole, the double ITO touch screen requires the following processes: MetaK deposition metal) ITO 1 SiNx (or OC) 1 Via Hole^ITO 2 SiNx (or OC) 2, total required 5 Masks, the process is more complicated.
2、 单层 ΙΤΟ触摸屏 4 Mask—— Via Hole过孔模式  2, single layer ΙΤΟ touch screen 4 Mask - Via Hole mode
横向 ITO和竖向 ITO釆用同一层沉积, 釆用一层金属(Metal )通过过 孔做桥接, 将断开方向的 ITO连接在一起(可以是横向, 也可以是竖向) 。 具体步骤是 ITO SiNx (或者 OC) 1 Via Hole^Metal^ SiNx (或者 OC) 2, 总 共 4张 Mask。  The lateral ITO and the vertical ITO are deposited in the same layer, and a layer of metal (Metal) is bridged through the vias to connect the ITOs in the off direction (either horizontally or vertically). The specific step is ITO SiNx (or OC) 1 Via Hole^Metal^ SiNx (or OC) 2, for a total of 4 masks.
另一种做法是: 将 Metal Mask和 ITO Mask位置互换, Metal SiNx (或 者 OC) 1 Via Hole^ITO^ SiNx (或者 OC) 2。  Another option is to interchange the Metal Mask and ITO Mask locations, Metal SiNx (or OC) 1 Via Hole^ITO^ SiNx (or OC) 2.
3、 单层 ITO触摸屏 4 Mask—— Island岛模式  3, single layer ITO touch screen 4 Mask - Island Island mode
岛模式和过孔模式制程的不同之处在于, 在 SiNx (或者 OC) 1刻蚀或显 影的时候,将横向 ITO和竖向 ITO交叉部分的 SiNx (或者 OC)的绝缘层保留, 而将其余位置的绝缘层都去除, ITO SiNx (或者 OC) 1 Island^Metal^ SiNx (或者 OC) , 共 4张 Mask。 和过孔模式一样 , 此制程也可以将 Metal Mask和 ITO Mask位置互换 , 即: Metal SiNx (或者 OC) 1 Island^ITO^ SiNx (或者 OC) 2 The difference between the island mode and the via mode process is that the SiNx (or OC) insulating layer of the lateral ITO and the vertical ITO crossing portion is retained while the SiNx (or OC) 1 is etched or developed, and the rest is left. The insulation of the location is removed, ITO SiNx (or OC) 1 Island^Metal^ SiNx (or OC), a total of 4 Masks. Like the via mode, this process also interchanges the Metal Mask and ITO Mask positions, ie: Metal SiNx (or OC) 1 Island^ITO^ SiNx (or OC) 2
从以上可以看出, 现有触摸屏的制程工艺比较复杂。 发明内容  It can be seen from the above that the manufacturing process of the existing touch screen is relatively complicated. Summary of the invention
本发明的实施例提供一种触摸屏的制作方法和触摸屏, 能够简化制程工 艺  Embodiments of the present invention provide a touch screen manufacturing method and a touch screen, which can simplify a process
本发明的一方面提供了一种触摸屏的制作方法, 包括: 在基板上沉积金 属, 并经过第一次构图工艺, 形成金属层图案, 所述金属层图案包括显示区 域的桥接线; 使用第一保护材料在形成有所述金属层图案的基板上进行喷墨 打印, 以将所述第一保护材料沉积在所述桥接线上, 形成第一保护层图案; 在形成有所述第一保护层图案的基板上沉积透明导电材料, 并经过第二次构 图工艺, 形成透明导电层图案; 在形成有所述透明导电层图案的基板上沉积 绝缘材料, 并经过第三次构图工艺, 形成第二保护层图案。  An aspect of the present invention provides a method of fabricating a touch screen, including: depositing a metal on a substrate, and forming a metal layer pattern through a first patterning process, wherein the metal layer pattern includes a bridge line of the display area; a protective material is inkjet printed on the substrate on which the metal layer pattern is formed to deposit the first protective material on the bridge wire to form a first protective layer pattern; the first protective layer is formed Depositing a transparent conductive material on the patterned substrate, and forming a transparent conductive layer pattern through a second patterning process; depositing an insulating material on the substrate on which the transparent conductive layer pattern is formed, and forming a second through a third patterning process Protective layer pattern.
对于该制作方法, 例如, 所述第一保护层图案为岛状; 并且所述第一保 护层图案的厚度大于所述金属层图案的厚度; 所述第一保护层图案的宽度小 于所述金属层图案的宽度, 使得所述金属层图案相对的第一侧和第二侧被棵 露; 所述第一保护层图案的长度大于所述金属层图案的长度, 使得所述金属 层图案相对的第三侧和第四侧被覆盖。  For the manufacturing method, for example, the first protective layer pattern is island-shaped; and the thickness of the first protective layer pattern is greater than the thickness of the metal layer pattern; the width of the first protective layer pattern is smaller than the metal a width of the layer pattern such that opposite first and second sides of the metal layer pattern are exposed; a length of the first protective layer pattern is greater than a length of the metal layer pattern such that the metal layer pattern is opposite The third side and the fourth side are covered.
对于该制作方法, 例如, 所述透明导电层图案的范围大于所述第一保护 层图案的范围, 使得所述透明导电层图案和所述金属层图案在所述金属层图 案相对的第一侧和第二侧的位置处电连接。  For the manufacturing method, for example, the range of the transparent conductive layer pattern is larger than the range of the first protective layer pattern such that the transparent conductive layer pattern and the metal layer pattern are on a first side opposite to the metal layer pattern Electrically connected to the location on the second side.
对于该制作方法,例如,所述金属层图案还可以包括焊盘区域的电路线; 所述透明导电层图案包括: 焊盘区域的透明导电层图案和显示区域的透明导 电层图案; 所述第二保护层图案覆盖所述显示区域的透明导电层图案, 并棵 露所述焊盘区域的透明导电层图案。  For the manufacturing method, for example, the metal layer pattern may further include a circuit line of the pad region; the transparent conductive layer pattern includes: a transparent conductive layer pattern of the pad region and a transparent conductive layer pattern of the display region; The second protective layer pattern covers the transparent conductive layer pattern of the display region, and exposes the transparent conductive layer pattern of the pad region.
对于该制作方法, 例如, 所述透明导电层图案为铟锡氧化物层。  For the manufacturing method, for example, the transparent conductive layer pattern is an indium tin oxide layer.
对于该制作方法, 例如, 所述第一保护层图案和所述第二保护层图案由 丙婦基树脂和环氧树脂制成, 或者, 所述第一保护层图案和所述第二保护层 图案由氮化硅制成。 对于该制作方法, 例如, 所述透明导电层图案的形状为菱形。 For the manufacturing method, for example, the first protective layer pattern and the second protective layer pattern are made of a propylene-based resin and an epoxy resin, or the first protective layer pattern and the second protective layer The pattern is made of silicon nitride. For the manufacturing method, for example, the shape of the transparent conductive layer pattern is a diamond shape.
本发明的另一方面提供了一种触摸屏, 包括: 基板; 金属层图案, 经过 在所述基板上沉积金属并经过第一次构图工艺而形成, 所述金属层图案包括 显示区域的桥接线; 第一保护层图案, 经过使用第一保护材料在形成有所述 金属层图案的基板上进行喷墨打印以将所述第一保护材料沉积在所述桥接线 上的工艺而形成; 透明导电层图案, 经过在形成有所述第一保护层图案的基 板上沉积透明导电材料并经过第二次构图工艺而形成; 以及, 第二保护层图 案, 经过在形成有所述透明导电层图案的基板上沉积绝缘材料并经过第三次 构图工艺而形成。  Another aspect of the present invention provides a touch screen, including: a substrate; a metal layer pattern formed by depositing a metal on the substrate and passing through a first patterning process, the metal layer pattern including a bridge line of a display area; a first protective layer pattern formed by a process of performing inkjet printing on a substrate on which the metal layer pattern is formed using a first protective material to deposit the first protective material on the bridge line; a transparent conductive layer a pattern formed by depositing a transparent conductive material on a substrate on which the first protective layer pattern is formed and subjected to a second patterning process; and a second protective layer pattern passing through the substrate on which the transparent conductive layer pattern is formed An insulating material is deposited thereon and formed through a third patterning process.
对于该触摸屏, 例如, 所述第一保护层图案为岛状; 并且所述第一保护 层图案的厚度大于所述金属层图案的厚度; 所述第一保护层图案的宽度小于 所述金属层图案的宽度,使得所述金属层图案相对的第一侧和第二侧被棵露。  For the touch screen, for example, the first protective layer pattern is island-shaped; and the thickness of the first protective layer pattern is greater than the thickness of the metal layer pattern; the width of the first protective layer pattern is smaller than the metal layer The width of the pattern is such that the opposite first and second sides of the metal layer pattern are exposed.
对于该触摸屏, 例如, 所述透明导电层图案的范围大于所述第一保护层 图案的范围, 使得所述透明导电层图案和所述金属层图案在所述金属层图案 相对的第一侧和第二侧的位置处电连接。  For the touch screen, for example, the range of the transparent conductive layer pattern is larger than the range of the first protective layer pattern, such that the transparent conductive layer pattern and the metal layer pattern are on a first side opposite to the metal layer pattern and The second side is electrically connected.
本发明的另一方面提供了一种触摸屏的制作方法, 包括: 在基板上沉积 透明导电材料, 并经过第一次构图工艺, 形成透明导电层图案, 所述透明导 电层图案包括有显示区域的横向扫描线与竖向扫描线; 使用第一保护材料在 形成有所述透明导电层图案的基板上进行喷墨打印, 以将所述第一保护材料 沉积在所述横向扫描线与竖向扫描线的节点上, 形成第一保护层图案; 在形 成有所述第一保护层图案的基板上沉积金属, 并经过第二次构图工艺, 形成 金属层图案; 在形成有所述金属层图案的基板上沉积绝缘材料, 并经过第三 次构图工艺, 形成第二保护层图案。  Another aspect of the present invention provides a method of fabricating a touch screen, including: depositing a transparent conductive material on a substrate, and forming a transparent conductive layer pattern through a first patterning process, wherein the transparent conductive layer pattern includes a display area a lateral scan line and a vertical scan line; performing inkjet printing on the substrate on which the transparent conductive layer pattern is formed using a first protective material to deposit the first protective material on the lateral scan line and vertical scan Forming a first protective layer pattern on the node of the line; depositing a metal on the substrate on which the first protective layer pattern is formed, and forming a metal layer pattern through a second patterning process; forming the pattern of the metal layer An insulating material is deposited on the substrate, and a third patterning process is performed to form a second protective layer pattern.
本发明的另一方面提供了一种触摸屏, 包括: 基板; 透明导电层图案, 是经过在所述基板上沉积透明导电材料, 并经过第一次构图工艺而形成的, 所述透明导电层图案包括有显示区域的横向扫描线与竖向扫描线; 第一保护 层图案, 是经过使用第一保护材料在形成有所述透明导电层图案的基板上进 行喷墨打印以将所述第一保护材料沉积在所述横向扫描线与竖向扫描线的节 点上而形成的; 金属层图案, 是经过在形成有所述第一保护层图案的基板上 沉积金属并经过第二次构图工艺而形成的; 以及第二保护层图案,是经过在 形成有所述金属层图案的基板上沉积绝缘材料, 并经过第三次构图工艺而形 成的。 Another aspect of the present invention provides a touch screen, including: a substrate; a transparent conductive layer pattern formed by depositing a transparent conductive material on the substrate and performing a first patterning process, the transparent conductive layer pattern a horizontal scan line and a vertical scan line including a display area; the first protective layer pattern is inkjet printed on the substrate on which the transparent conductive layer pattern is formed by using the first protective material to apply the first protection a material is deposited on the nodes of the lateral scan lines and the vertical scan lines; the metal layer pattern is formed by depositing metal on the substrate on which the first protective layer pattern is formed and undergoing a second patterning process And the second protective layer pattern is An insulating material is deposited on the substrate on which the metal layer pattern is formed, and is formed through a third patterning process.
对于该触摸屏, 例如, 所述透明导电层图案包括至少一个缺口; 所述第 一保护层图案为岛状, 并且所述第一保护层图案的厚度大于所述透明导电层 图案的厚度; 所述第一保护层图案覆盖所述缺口以及所述缺口的周围, 并棵 露所述透明导电层图案除缺口以及所述缺口的周围外的位置。  For the touch screen, for example, the transparent conductive layer pattern includes at least one notch; the first protective layer pattern is island-shaped, and the thickness of the first protective layer pattern is greater than the thickness of the transparent conductive layer pattern; The first protective layer pattern covers the notch and the periphery of the notch, and exposes the transparent conductive layer pattern except the notch and the position around the periphery of the notch.
对于该触摸屏, 例如, 所述金属层图案的范围大于所述第一保护层图案 的范围, 使得所述金属层图案在所述第一保护层图案的范围外的位置处与所 述透明导电层图案电连接。  For the touch screen, for example, the range of the metal layer pattern is larger than the range of the first protective layer pattern such that the metal layer pattern is at a position outside the range of the first protective layer pattern and the transparent conductive layer The pattern is electrically connected.
对于该触摸屏, 例如, 所述透明导电层图案包括至少一个缺口; 所述第 一保护层图案为岛状, 并且所述第一保护层图案的厚度大于所述透明导电层 图案的厚度; 所述第一保护层图案覆盖所述缺口以及所述缺口的周围, 并棵 露所述透明导电层图案除缺口以及所述缺口的周围外的位置。  For the touch screen, for example, the transparent conductive layer pattern includes at least one notch; the first protective layer pattern is island-shaped, and the thickness of the first protective layer pattern is greater than the thickness of the transparent conductive layer pattern; The first protective layer pattern covers the notch and the periphery of the notch, and exposes the transparent conductive layer pattern except the notch and the position around the periphery of the notch.
对于该触摸屏, 例如, 所述金属层图案的范围大于所述第一保护层图案 的范围, 使得所述金属层图案在所述第一保护层图案的范围外的位置处与所 述透明导电层图案电连接。  For the touch screen, for example, the range of the metal layer pattern is larger than the range of the first protective layer pattern such that the metal layer pattern is at a position outside the range of the first protective layer pattern and the transparent conductive layer The pattern is electrically connected.
对于该触摸屏, 例如, 所述透明导电层图案还包括: 焊盘区域的透明导 电层图案; 所述金属层图案包括: 显示区域的桥接线和焊盘区域的电路线; 所述第二保护层图案覆盖所述显示区域的桥接线, 并棵露所述焊盘区域的电 路线。  For the touch screen, for example, the transparent conductive layer pattern further includes: a transparent conductive layer pattern of the pad region; the metal layer pattern includes: a bridge line of the display region and a circuit line of the pad region; the second protective layer The pattern covers the bridge lines of the display area and exposes the circuit lines of the pad area.
对于该触摸屏, 例如, 所述透明导电层图案为铟锡氧化物层。  For the touch screen, for example, the transparent conductive layer pattern is an indium tin oxide layer.
对于该触摸屏, 例如, 所述第一保护层图案和所述第二保护层图案由丙 烯基树脂和环氧树脂制成, 或者, 所述第一保护层图案和所述第二保护层图 案由氮化硅制成。  For the touch screen, for example, the first protective layer pattern and the second protective layer pattern are made of a propylene-based resin and an epoxy resin, or the first protective layer pattern and the second protective layer pattern are Made of silicon nitride.
对于该触摸屏, 例如, 所述透明导电层图案的形状为菱形。  For the touch screen, for example, the shape of the transparent conductive layer pattern is a diamond shape.
上述方案中, 通过喷墨打印 (Ink Inject ) 的方式, 在横向扫描线和竖向 扫描线的交叉位置, 沉积第一保护层图案, 和现有技术相比, 可以减少所使 用的光罩数量, 从而可以相应减少曝光、 显影、 刻蚀、 剥离等构图工艺, 达 到简化工艺的目的。 附图说明 In the above solution, the first protective layer pattern is deposited at the intersection of the lateral scanning line and the vertical scanning line by means of inkjet printing (Ink Inject), and the number of masks used can be reduced compared with the prior art. Therefore, the patterning processes such as exposure, development, etching, and peeling can be reduced correspondingly, thereby achieving the purpose of simplifying the process. DRAWINGS
为了更清楚地说明本发明实施例的技术方案, 下面将对实施例的附图作 简单地介绍,显而易见地,下面描述中的附图仅仅涉及本发明的一些实施例, 而非对本发明的限制。  In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings of the embodiments will be briefly described below. It is obvious that the drawings in the following description relate only to some embodiments of the present invention, and are not intended to limit the present invention. .
图 1为本发明所述的触摸屏的制作方法的一实施例的流程示意图; 图 2A是图 1所示的触摸屏的制作方法中步骤 111对应的触摸屏的显示 区域的俯视图;  1 is a schematic flow chart of an embodiment of a method for fabricating a touch screen according to the present invention; FIG. 2A is a plan view showing a display area of a touch screen corresponding to step 111 in the method for fabricating the touch screen shown in FIG.
图 2B是图 1所示的触摸屏的制作方法中步骤 111对应的触摸屏的显示 区域的截面图;  2B is a cross-sectional view showing a display area of the touch screen corresponding to step 111 in the method of fabricating the touch screen shown in FIG. 1;
图 3A是图 1所示的触摸屏的制作方法中步骤 112对应的触摸屏的显示 区域的俯视图;  3A is a plan view showing a display area of the touch screen corresponding to step 112 in the method for fabricating the touch screen shown in FIG. 1;
图 3B是图 1所示的触摸屏的制作方法中步骤 112对应的触摸屏的显示 区域的截面图;  3B is a cross-sectional view showing a display area of the touch screen corresponding to step 112 in the method of fabricating the touch screen shown in FIG. 1;
图 4A是图 1所示的触摸屏的制作方法中步骤 113对应的触摸屏的显示 区域的俯视图;  4A is a plan view showing a display area of the touch screen corresponding to step 113 in the method of fabricating the touch screen shown in FIG. 1;
图 4B是图 1所示的触摸屏的制作方法中步骤 113对应的触摸屏的显示 区域的截面图;  4B is a cross-sectional view showing a display area of the touch screen corresponding to step 113 in the method of fabricating the touch screen shown in FIG. 1;
图 5A是图 1所示的触摸屏的制作方法中步骤 114对应的触摸屏的显示 区域的俯视图;  5A is a plan view showing a display area of the touch screen corresponding to step 114 in the method for fabricating the touch screen shown in FIG. 1;
图 5B是图 1所示的触摸屏的制作方法中步骤 114对应的触摸屏的显示 区域的截面图;  5B is a cross-sectional view showing a display area of the touch screen corresponding to step 114 in the method of fabricating the touch screen shown in FIG. 1;
图 6为本发明所述的触摸屏的制作方法的另一实施例的流程示意图。 图 7A是图 6所示的触摸屏的制作方法中步骤 211对应的触摸屏的显示 区域的俯视图;  FIG. 6 is a schematic flow chart of another embodiment of a method for fabricating a touch screen according to the present invention. 7A is a plan view showing a display area of the touch screen corresponding to step 211 in the method of fabricating the touch screen shown in FIG. 6;
图 7B是图 6所示的触摸屏的制作方法中步骤 211对应的触摸屏的显示 区域的截面图;  7B is a cross-sectional view showing a display area of the touch screen corresponding to step 211 in the method of fabricating the touch screen shown in FIG. 6;
图 8A是图 6所示的触摸屏的制作方法中步骤 212对应的触摸屏的显示 区域的俯视图;  8A is a plan view of a display area of the touch screen corresponding to step 212 in the method of fabricating the touch screen shown in FIG. 6;
图 8B是图 6所示的触摸屏的制作方法中步骤 212对应的触摸屏的显示 区域的截面图; 图 9A是图 6所示的触摸屏的制作方法中步骤 213对应的触摸屏的显示 区域的俯视图; 8B is a cross-sectional view of a display area of the touch screen corresponding to step 212 in the method of fabricating the touch screen illustrated in FIG. 6; 9A is a plan view showing a display area of the touch screen corresponding to step 213 in the method for fabricating the touch screen shown in FIG. 6;
图 9B是图 6所示的触摸屏的制作方法中步骤 213对应的触摸屏的显示 区域的截面图;  9B is a cross-sectional view showing a display area of the touch screen corresponding to step 213 in the method of fabricating the touch screen shown in FIG. 6;
图 10A是图 6所示的触摸屏的制作方法中步骤 214对应的触摸屏的显示 区域的俯视图;  FIG. 10A is a plan view showing a display area of the touch screen corresponding to step 214 in the method of fabricating the touch screen shown in FIG. 6; FIG.
图 10B是图 6所示的触摸屏的制作方法中步骤 214对应的触摸屏的显示 区域的截面图。 具体实施方式  Fig. 10B is a cross-sectional view showing a display area of the touch panel corresponding to step 214 in the method of fabricating the touch panel shown in Fig. 6. detailed description
为使本发明实施例的目的、 技术方案和优点更加清楚, 下面将结合本发 明实施例的附图,对本发明实施例的技术方案进行清楚、 完整地描述。显然, 所描述的实施例是本发明的一部分实施例, 而不是全部的实施例。 基于所描 述的本发明的实施例, 本领域普通技术人员在无需创造性劳动的前提下所获 得的所有其他实施例, 都属于本发明保护的范围。  The technical solutions of the embodiments of the present invention are clearly and completely described in the following with reference to the accompanying drawings of the embodiments of the present invention. It is apparent that the described embodiments are part of the embodiments of the invention, rather than all of the embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the described embodiments of the present invention without departing from the scope of the invention are within the scope of the invention.
除非另作定义, 此处使用的技术术语或者科学术语应当为本发明所属领 域内具有一般技能的人士所理解的通常意义。 本发明专利申请说明书以及权 利要求书中使用的 "第一" 、 "第二" 以及类似的词语并不表示任何顺序、 数量或者重要性,而只是用来区分不同的组成部分。同样, "一个 "或者 "一" 等类似词语也不表示数量限制, 而是表示存在至少一个。 "包括" 或者 "包 含" 等类似的词语意指出现在 "包括" 或者 "包含" 前面的元件或者物件涵 盖出现在 "包括" 或者 "包含" 后面列举的元件或者物件及其等同, 并不排 除其他元件或者物件。 "连接" 或者 "相连" 等类似的词语并非限定于物理 的或者机械的连接, 而是可以包括电性的连接, 不管是直接的还是间接的。 "上" 、 "下" 、 "左" 、 "右" 等仅用于表示相对位置关系, 当被描述对 象的绝对位置改变后, 则该相对位置关系也可能相应地改变。  Unless otherwise defined, technical terms or scientific terms used herein shall be of the ordinary meaning understood by those of ordinary skill in the art to which the invention pertains. The words "first", "second" and similar terms used in the specification and claims of the present invention do not denote any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the words "a" or "an" do not denote a quantity limitation, but rather mean that there is at least one. The words "including" or "comprising", etc., are intended to mean that the elements or objects preceding "including" or "comprising" are intended to encompass the elements or Component or object. Words such as "connected" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "Down", "Left", "Right", etc. are only used to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationship may also change accordingly.
本发明实施例所述的触摸屏的制作方法, 图 5A是本方案最终生成的触 摸屏的显示区域的俯视图, 图 5B是本方案最终生成的触摸屏的截面图, 该 方法可以只需要 3张光罩(Mask ) 。  FIG. 5A is a top view of a display area of the touch screen finally generated by the present solution, and FIG. 5B is a cross-sectional view of the touch screen finally generated by the solution. The method may only require three masks ( Mask ).
图 1为本发明所述的触摸屏的制作方法的一实施例的流程示意图, 该方 法包括如下步骤。 1 is a schematic flow chart of an embodiment of a method for fabricating a touch screen according to the present invention, The method includes the following steps.
步骤 111 , 在基板 11上沉积金属, 并经过第一次构图工艺, 形成金属层 图案 12, 所述金属层图案 12包括显示区域的桥接线。  Step 111, depositing a metal on the substrate 11, and through a first patterning process, forming a metal layer pattern 12, the metal layer pattern 12 including a bridge line of the display area.
所述金属层图案还可以包括: 焊盘区域的电路线。  The metal layer pattern may further include: a circuit line of the pad region.
该步骤的一个示例可以为: 在玻璃基板上沉积一层金属, 并经过包括曝 光, 刻蚀, 剥离 (remove )等的构图工艺, 形成周边电路线和显示区域的桥 接线。该构图工艺包括: 在金属层上涂覆光刻胶; 使用光罩将该光刻胶曝光; 将曝光后的光刻胶进行显影得到光刻胶图案; 使用该光刻胶图案进行刻蚀以 将暴露的金属层去除, 由此得到金属层图案; 之后, 将剩余的光刻胶从金属 层图案上去除。 以下步骤的构图工艺与之类似, 这里不再重复。  An example of this step may be: depositing a layer of metal on a glass substrate and patterning through a process including exposure, etching, lift, etc. to form a bridge between the peripheral circuit lines and the display area. The patterning process comprises: coating a photoresist on the metal layer; exposing the photoresist using a photomask; developing the exposed photoresist to obtain a photoresist pattern; etching using the photoresist pattern to The exposed metal layer is removed, thereby obtaining a metal layer pattern; thereafter, the remaining photoresist is removed from the metal layer pattern. The composition process of the following steps is similar and will not be repeated here.
图 2A为步骤 111对应的触摸屏的显示区域的俯视图; 图 2B是步骤 111 对应的触摸屏的显示区域的截面图。  2A is a plan view of a display area of the touch screen corresponding to step 111; and FIG. 2B is a cross-sectional view of a display area of the touch screen corresponding to step 111.
步骤 112,使用第一保护材料在形成有所述金属层图案 12的基板上进行 喷墨打印, 以将所述第一保护材料沉积在所述桥接线上, 形成第一保护层图 案 13。  Step 112, performing inkjet printing on the substrate on which the metal layer pattern 12 is formed using a first protective material to deposit the first protective material on the bridge line to form a first protective layer pattern 13.
该步骤的一个示例可以为: 通过喷墨打印 (Ink Inject ) 的方法将第一保 护层 (Overcoat )形成在待形成的横向透明导电层图案与竖向透明导电层图 案的节点上。  An example of this step may be: forming a first overcoat layer on the node of the laterally transparent conductive layer pattern to be formed and the vertical transparent conductive layer pattern by an ink jet printing (Ink Inject) method.
图 3A是步骤 112对应的触摸屏的显示区域的俯视图; 图 3B是步骤 112 对应的触摸屏的显示区域的截面图。  3A is a plan view of a display area of the touch screen corresponding to step 112; and FIG. 3B is a cross-sectional view of a display area of the touch screen corresponding to step 112.
所述第一保护层图案 13可以为岛状;并且所述第一保护层图案的厚度大 于所述金属层图案的厚度; 所述第一保护层图案的宽度小于所述金属层图案 的宽度, 使得所述金属层图案相对的第一侧和第二侧被棵露; 所述第一保护 层图案的长度大于所述金属层图案的长度, 使得所述金属层图案相对的第三 侧和第四侧被覆盖; 后续过程中, 被覆盖区域可以沉积透明导电层图案的透 明导电材料。  The first protective layer pattern 13 may be island-shaped; and the thickness of the first protective layer pattern is greater than the thickness of the metal layer pattern; the width of the first protective layer pattern is smaller than the width of the metal layer pattern, The first side and the second side of the metal layer pattern are exposed; the length of the first protective layer pattern is greater than the length of the metal layer pattern, such that the metal layer pattern is opposite to the third side and the third The four sides are covered; in the subsequent process, the covered area may be deposited with a transparent conductive material of a transparent conductive layer pattern.
步骤 113 , 在形成有所述第一保护层图案的基板上沉积透明导电材料, 并经过第二次构图工艺, 形成透明导电层图案 14。  Step 113, depositing a transparent conductive material on the substrate on which the first protective layer pattern is formed, and forming a transparent conductive layer pattern 14 through a second patterning process.
所述透明导电层图案可以为铟锡氧化物层。  The transparent conductive layer pattern may be an indium tin oxide layer.
该步骤的一个示例可以为: 沉积一层 ITO (铟锡氧化物层)或其他透明 导电层图案, 并经过包括曝光、刻蚀、剥离的构图工艺,形成菱形(diamond ) 或其他形状的 ITO层图案。 An example of this step can be: depositing a layer of ITO (indium tin oxide layer) or other transparent The conductive layer pattern is patterned to form a diamond or other shaped ITO layer pattern through a patterning process including exposure, etching, and lift-off.
图 4A是步骤 113对应的触摸屏的显示区域的俯视图; 图 4B是步骤 113 对应的触摸屏的显示区域的截面图。  4A is a plan view of a display area of the touch screen corresponding to step 113; and FIG. 4B is a cross-sectional view of a display area of the touch screen corresponding to step 113.
所述透明导电层图案 14的范围可以为大于所述第一保护层图案的范围, 使得所述透明导电层图案和所述金属层图案在所述金属层图案相对的第一侧 和第二侧的位置处电连接。  The transparent conductive layer pattern 14 may have a range greater than a range of the first protective layer pattern such that the transparent conductive layer pattern and the metal layer pattern are opposite to the first side and the second side of the metal layer pattern The location is electrically connected.
上述实施例中, 金属层图案包括相对的第一端区域和第二端区域以及相 对的第三端区域和第四端区域, 这些区域均连通。 所述第一保护层图案的宽 度小于所述金属层图案的宽度, 使得所述金属层图案相对的第一侧区域和第 二侧区域被棵露; 所述第一保护层图案的长度大于所述金属层图案的长度, 使得所述金属层图案相对的第三侧区域和第四侧区域被覆盖。 后续过程中, 第三侧区域和第四侧区域的被覆盖区域可以沉积透明导电层图案的透明导电 材料。 透明导电层图案可以包括相互之间隔离的第一区域、 第二区域、 第三 区域, 第一区域之间和第三区域之间有缺口, 第二区域和第三区域之间有缺 口。 透明导电层图案的第一区域和第二区域通过金属层图案相对的第一侧区 域和第二侧区域电连接, 透明导电层图案的第三区域的部分区域可以沉积在 第三侧区域和第四区域的被第一保护层图案覆盖的位置处, 从而可以横跨第 一保护层图案。  In the above embodiment, the metal layer pattern includes opposing first end regions and second end regions and opposite third end regions and fourth end regions, all of which are in communication. The width of the first protective layer pattern is smaller than the width of the metal layer pattern, such that the first side region and the second side region of the metal layer pattern are exposed; the length of the first protective layer pattern is greater than The length of the metal layer pattern is such that the opposite third side region and fourth side region of the metal layer pattern are covered. In the subsequent process, the covered regions of the third side region and the fourth side region may be deposited with a transparent conductive material of a transparent conductive layer pattern. The transparent conductive layer pattern may include a first region, a second region, and a third region that are isolated from each other, with a gap between the first region and the third region, and a gap between the second region and the third region. The first region and the second region of the transparent conductive layer pattern are electrically connected by the first side region and the second side region opposite to the metal layer pattern, and a partial region of the third region of the transparent conductive layer pattern may be deposited on the third side region and The four regions are covered by the first protective layer pattern so as to be able to traverse the first protective layer pattern.
步骤 114, 在形成有所述透明导电层图案的基板上沉积绝缘材料, 并经 过第三次构图工艺, 形成第二保护层图案 15。  Step 114, depositing an insulating material on the substrate on which the transparent conductive layer pattern is formed, and forming a second protective layer pattern 15 through the third patterning process.
所述透明导电层图案包括: 焊盘区域的透明导电层图案和显示区域的透 明导电层图案; 所述第二保护层图案覆盖所述显示区域的透明导电层图案, 并棵露所述焊盘区域的透明导电层图案(图中未示意出棵露效果) 。  The transparent conductive layer pattern includes: a transparent conductive layer pattern of the pad region and a transparent conductive layer pattern of the display region; the second protective layer pattern covers the transparent conductive layer pattern of the display region, and exposes the pad The transparent conductive layer pattern of the area (the effect of the dew is not shown in the figure).
该步骤的一个示例可以为: 沉积涂覆有机绝缘层或其他材料的绝缘层, 并经过包括曝光、 刻蚀、 剥离等的构图工艺, 形成一层保护层, 以保护显示 区域的透明导电层。 同时, 该保护层将 Pad焊盘区域的透明导电层棵露, 方 便 IC (驱动芯片) 的 Bonding (绑定) 。  An example of this step may be: depositing an insulating layer coated with an organic insulating layer or other material, and forming a protective layer to protect the transparent conductive layer of the display region by a patterning process including exposure, etching, lift-off, and the like. At the same time, the protective layer exposes the transparent conductive layer of the pad pad region to facilitate bonding of the IC (drive chip).
图 5A是步骤 114对应的触摸屏的显示区域的俯视图; 图 5B是步骤 114 对应的触摸屏的显示区域的截面图。 所述第一保护层图案和所述第二保护层图案可以为有机绝缘层也可以无 机绝缘层, 所述第一保护层图案和所述第二保护层图案可以由丙烯基树脂和 环氧树脂制成, 或者, 所述第一保护层图案和所述第二保护层图案由氮化硅 制成。 所述透明导电层图案的形状可以为菱形。 5A is a plan view of a display area of the touch screen corresponding to step 114; and FIG. 5B is a cross-sectional view of a display area of the touch screen corresponding to step 114. The first protective layer pattern and the second protective layer pattern may be an organic insulating layer or an inorganic insulating layer, and the first protective layer pattern and the second protective layer pattern may be made of a propylene-based resin and an epoxy resin. Or, the first protective layer pattern and the second protective layer pattern are made of silicon nitride. The shape of the transparent conductive layer pattern may be a diamond shape.
如图 5A和 5B所示, 与上述方法对应的触摸屏包括: 基板 11 ; 金属层 图案 12, 经过在所述基板上沉积金属并经过第一次构图工艺而形成, 所述金 属层图案包括显示区域的桥接线; 第一保护层图案 13 , 经过使用第一保护材 料在形成有所述金属层图案的基板上进行喷墨打印以将所述第一保护材料沉 积在所述桥接线上的工艺而形成; 透明导电层图案 14, 经过在形成有所述第 一保护层图案的基板上沉积透明导电材料并经过第二次构图工艺而形成; 第 二保护层图案 15,经过在形成有所述透明导电层图案的基板上沉积绝缘材料 并经过第三次构图工艺而形成。  As shown in FIGS. 5A and 5B, the touch screen corresponding to the above method includes: a substrate 11; a metal layer pattern 12 formed by depositing metal on the substrate and undergoing a first patterning process, the metal layer pattern including a display area a bridge wiring; a first protective layer pattern 13 through a process of performing inkjet printing on a substrate on which the metal layer pattern is formed using a first protective material to deposit the first protective material on the bridge line Forming; a transparent conductive layer pattern 14 formed by depositing a transparent conductive material on a substrate on which the first protective layer pattern is formed and subjected to a second patterning process; and a second protective layer pattern 15 through which the transparent layer is formed An insulating material is deposited on the substrate of the conductive layer pattern and formed through a third patterning process.
例如,所述第一保护层图案 13为岛状; 并且所述第一保护层图案的厚度 大于所述金属层图案的厚度; 所述第一保护层图案的宽度小于所述金属层图 案的宽度, 使得所述金属层图案相对的第一侧和第二侧被棵露。  For example, the first protective layer pattern 13 is island-shaped; and the thickness of the first protective layer pattern is greater than the thickness of the metal layer pattern; the width of the first protective layer pattern is smaller than the width of the metal layer pattern The first side and the second side of the metal layer pattern are exposed to each other.
例如, 所述透明导电层图案 14的范围大于所述第一保护层图案的范围, 使得所述透明导电层图案和所述金属层图案在所述金属层图案相对的第一侧 和第二侧的位置处电连接。  For example, the range of the transparent conductive layer pattern 14 is larger than the range of the first protective layer pattern such that the transparent conductive layer pattern and the metal layer pattern are on the first side and the second side opposite to the metal layer pattern. The location is electrically connected.
例如, 所述金属层图案 12还包括: 焊盘区域的电路线。  For example, the metal layer pattern 12 further includes: a circuit line of the pad region.
例如,所述透明导电层图案 14包括:焊盘区域的透明导电层图案和显示 区域的透明导电层图案; 所述透明导电层图案可以为铟锡氧化物层; 所述透 明导电层图案 14的形状可以为菱形, 包括相互隔离的第一区域、 第二区域、 第三区域, 第一区域和第三区域之间有缺口, 第二区域和第三区域之间有缺 口, 第二区域位于中间。  For example, the transparent conductive layer pattern 14 includes: a transparent conductive layer pattern of a pad region and a transparent conductive layer pattern of the display region; the transparent conductive layer pattern may be an indium tin oxide layer; the transparent conductive layer pattern 14 The shape may be a diamond shape, including a first region, a second region, and a third region separated from each other, a gap between the first region and the third region, a gap between the second region and the third region, and a second region in the middle .
例如,所述第二保护层图案 15覆盖所述显示区域的透明导电层图案,并 棵露所述焊盘区域的透明导电层图案。  For example, the second protective layer pattern 15 covers the transparent conductive layer pattern of the display region and exposes the transparent conductive layer pattern of the pad region.
例如, 所述第一保护层图案和所述第二保护层图案可以由丙婦基树脂和 环氧树脂制成, 或者, 所述第一保护层图案和所述第二保护层图案可以由氮 化硅制成。  For example, the first protective layer pattern and the second protective layer pattern may be made of a propylene-based resin and an epoxy resin, or the first protective layer pattern and the second protective layer pattern may be made of nitrogen. Made of silicon.
以下描述另一种触摸屏的制作方法, 图 10A是本方案最终生成的触摸屏 的俯视图,图 10B是本方案最终生成的触摸屏的截面图。与上述实施例相比, 本实施例将步骤 111和步骤 113调换,该方法可以只需要 3张光罩(Mask ) 。 Another method for manufacturing a touch screen is described below, and FIG. 10A is a touch screen finally generated by the solution. FIG. 10B is a cross-sectional view of the touch screen finally generated by the present scheme. Compared with the above embodiment, this embodiment replaces step 111 and step 113, and the method can only require three masks.
图 6本发明所述的触摸屏的制作方法的另一实施例的流程示意图, 该方 法包括如下步骤。  FIG. 6 is a schematic flow chart of another embodiment of a method for fabricating a touch screen according to the present invention, the method comprising the following steps.
步骤 211 , 在基板 21上沉积透明导电材料, 并经过第一次构图工艺, 形 成透明导电层图案 24,所述透明导电层图案包括有显示区域的横向扫描线与 竖向扫描线。  Step 211, depositing a transparent conductive material on the substrate 21, and forming a transparent conductive layer pattern 24 through a first patterning process, the transparent conductive layer pattern including a horizontal scan line and a vertical scan line having a display area.
所述透明导电层图案还可以包括: 焊盘区域的透明导电层图案。  The transparent conductive layer pattern may further include: a transparent conductive layer pattern of the pad region.
该步骤的一个示例可以为: 在玻璃基板上沉积一层 ITO或其他透明导电 层图案, 并经过包括曝光、 刻蚀、 剥离等的构图工艺, 形成菱形 (diamond ) 或其他形状的 ITO。  An example of this step may be: depositing a pattern of ITO or other transparent conductive layer on a glass substrate and forming a diamond or other shaped ITO through a patterning process including exposure, etching, lift-off, and the like.
图 7Α是步骤 211对应的触摸屏的显示区域的俯视图; 图 7Β是步骤 211 对应的触摸屏的显示区域的截面图。  7A is a plan view of a display area of the touch screen corresponding to step 211; and FIG. 7A is a cross-sectional view of the display area of the touch screen corresponding to step 211.
如图所示, 所述透明导电层图案 24可以包括至少一个缺口。  As shown, the transparent conductive layer pattern 24 can include at least one notch.
步骤 212, 使用第一保护材料在形成有所述透明导电层图案的基板上进 行喷墨打印, 以将所述第一保护材料沉积在所述横向扫描线与竖向扫描线的 节点上, 形成第一保护层图案 23。  Step 212, performing inkjet printing on the substrate on which the transparent conductive layer pattern is formed by using a first protective material to deposit the first protective material on the nodes of the horizontal scan line and the vertical scan line to form The first protective layer pattern 23.
该步骤的一个示例可以为: 通过喷墨打印 (Ink Inject ) 的方法, 将第一 保护层沉积在横向 ITO与竖向 ITO的节点上。  An example of this step may be: depositing a first protective layer on the nodes of the lateral ITO and the vertical ITO by an inkjet printing (Ink Inject) method.
图 8A是步骤 212对应的触摸屏的显示区域的俯视图; 图 8B是步骤 212 对应的触摸屏的显示区域的截面图。  8A is a plan view of a display area of the touch screen corresponding to step 212; and FIG. 8B is a cross-sectional view of a display area of the touch screen corresponding to step 212.
如图所示,所述第一保护层图案 23为岛状,并且所述第一保护层图案的 厚度大于所述透明导电层图案的厚度; 所述第一保护层图案覆盖所述缺口以 及所述缺口的周围, 并棵露所述透明导电层图案除缺口以及所述缺口的周围 外的位置。  As shown, the first protective layer pattern 23 is island-shaped, and the thickness of the first protective layer pattern is greater than the thickness of the transparent conductive layer pattern; the first protective layer pattern covers the gap and the The periphery of the notch is exposed, and the transparent conductive layer pattern is exposed except for the notch and the periphery of the notch.
步骤 213 , 在形成有所述第一保护层图案的基板上沉积金属, 并经过第 二次构图工艺, 形成金属层图案 22。  Step 213, depositing a metal on the substrate on which the first protective layer pattern is formed, and forming a metal layer pattern 22 through a second patterning process.
该步骤的一个示例可以为: 沉积一层金属, 并经过包括曝光、 刻蚀、 剥 离的构图工艺, 形成周边电路线和显示区域的桥接线。  An example of this step may be: depositing a layer of metal and patterning through the exposure, etching, and stripping to form a bridge between the peripheral circuit lines and the display area.
图 9A是步骤 213对应的触摸屏的显示区域的俯视图; 图 9B是步骤 213 对应的触摸屏的显示区域的截面图。 9A is a plan view of a display area of the touch screen corresponding to step 213; and FIG. 9B is step 213. A cross-sectional view of the display area of the corresponding touch screen.
如图所示, 所述金属层图案 22的范围大于所述第一保护层图案的范围, 使得所述金属层图案在所述第一保护层图案的范围外的位置处与所述透明导 电层图案电连接。  As shown, the range of the metal layer pattern 22 is larger than the range of the first protective layer pattern such that the metal layer pattern is at a position outside the range of the first protective layer pattern and the transparent conductive layer The pattern is electrically connected.
步骤 214, 在形成有所述金属层图案的基板上沉积绝缘材料, 并经过第 三次构图工艺, 形成第二保护层图案 25。  Step 214, depositing an insulating material on the substrate on which the metal layer pattern is formed, and performing a third patterning process to form a second protective layer pattern 25.
所述金属层图案可以包括: 显示区域的桥接线和焊盘区域的电路线; 所 述第二保护层图案覆盖所述显示区域的桥接线, 并棵露所述焊盘区域的电路 线(图中未示意出棵露效果) 。  The metal layer pattern may include: a bridge line of the display area and a circuit line of the pad area; the second protection layer pattern covers the bridge line of the display area, and the circuit line of the pad area is exposed The effect of the dew is not indicated in the middle).
该步骤的一个示例可以为: 沉积涂覆有机绝缘层或其他材料的绝缘层, 并经过包括曝光、 刻蚀、 剥离等的构图工艺, 形成一层保护层, 保护显示区 域的透明导电层, 并将焊盘 Pad区域的金属层棵露, 方便 IC (驱动芯片)的 Bonding绑定。  An example of the step may be: depositing an insulating layer coated with an organic insulating layer or other material, and forming a protective layer to protect the transparent conductive layer of the display region by a patterning process including exposure, etching, peeling, and the like, and The metal layer of the Pad pad area is exposed to facilitate the bonding of the IC (drive chip).
图 10A是步骤 214对应的触摸屏的显示区域的俯视图; 图 10B是步骤 214对应的触摸屏的显示区域的截面图。  10A is a plan view of a display area of the touch screen corresponding to step 214; and FIG. 10B is a cross-sectional view of a display area of the touch screen corresponding to step 214.
上述实施例中, 透明导电层图案 24可以包括相互之间隔离的第一区域、 第二区域以及第三区域; 第三区域和第二区域之间具有缺口, 第三区域和第 一区域之间具有缺口。 所述第一保护层图案覆盖所述缺口以及所述缺口的周 围, 并棵露所述透明导电层图案除缺口以及所述缺口的周围外的位置。 也就 是说, 第一保护层图案棵露出所述第一区域的部分位置和第三区域的部分位 置。金属层图案 22包括相对的第一端区域和第二端区域以及相对的第三端区 域和第四端区域,这些区域均连通。所述金属层图案 22的范围大于所述第一 保护层图案的范围, 使得所述金属层图案在所述第一保护层图案的范围外的 位置处与所述透明导电层图案电连接。 也就是说, 金属层图案覆盖了第一区 域部分位置和第三区域的部分位置, 使得所述第一区域和第三区域通过金属 层图案电连接。  In the above embodiment, the transparent conductive layer pattern 24 may include a first region, a second region, and a third region separated from each other; a gap between the third region and the second region, between the third region and the first region Has a gap. The first protective layer pattern covers the periphery of the notch and the notch, and exposes a position of the transparent conductive layer pattern except for a notch and a periphery of the notch. That is, the first protective layer pattern exposes a partial position of the first region and a partial position of the third region. The metal layer pattern 22 includes opposing first end regions and second end regions and opposing third end regions and fourth end regions, all of which are in communication. The range of the metal layer pattern 22 is larger than the range of the first protective layer pattern such that the metal layer pattern is electrically connected to the transparent conductive layer pattern at a position outside the range of the first protective layer pattern. That is, the metal layer pattern covers the first region partial position and the partial portion of the third region such that the first region and the third region are electrically connected by the metal layer pattern.
例如, 所述透明导电层图案可以为铟锡氧化物层; 所述第一保护层图案 和所述第二保护层图案由丙婦基树脂和环氧树脂制成, 或者, 所述第一保护 层图案和所述第二保护层图案由氮化硅制成。 所述透明导电层图案的形状可 以为菱形。 如图 10A和 10B所示, 与第二种实施例对应的触摸屏包括: 基板 21 ; 透明导电层图案 24, 经过在所述基板上沉积透明导电材料, 并经过第一次构 图工艺而形成, 所述透明导电层图案包括有显示区域的横向扫描线与竖向扫 描线; 第一保护层图案 23 , 经过使用第一保护材料在形成有所述透明导电层 图案的基板上进行喷墨打印以将所述第一保护材料沉积在所述横向扫描线与 竖向扫描线的节点上而形成; 金属层图案 22, 经过在形成有所述第一保护层 图案的基板上沉积金属并经过第二次构图工艺而形成; 以及, 第二保护层图 案 25, 经过在形成有所述金属层图案的基板上沉积绝缘材料, 并经过第三次 构图工艺而形成。 For example, the transparent conductive layer pattern may be an indium tin oxide layer; the first protective layer pattern and the second protective layer pattern are made of a propylene-based resin and an epoxy resin, or the first protection The layer pattern and the second protective layer pattern are made of silicon nitride. The shape of the transparent conductive layer pattern may be a diamond shape. As shown in FIGS. 10A and 10B, the touch screen corresponding to the second embodiment includes: a substrate 21; a transparent conductive layer pattern 24 formed by depositing a transparent conductive material on the substrate and undergoing a first patterning process. The transparent conductive layer pattern includes a lateral scan line and a vertical scan line having a display area; the first protective layer pattern 23 is subjected to inkjet printing on the substrate on which the transparent conductive layer pattern is formed by using the first protective material The first protective material is deposited on the nodes of the lateral scan lines and the vertical scan lines; the metal layer pattern 22, after depositing metal on the substrate on which the first protective layer pattern is formed and after a second time Forming a patterning process; and, the second protective layer pattern 25 is formed by depositing an insulating material on the substrate on which the metal layer pattern is formed, and performing a third patterning process.
例如,所述透明导电层图案 24可以包括至少一个缺口; 所述第一保护层 图案 23可以为岛状,并且所述第一保护层图案的厚度大于所述透明导电层图 案的厚度; 所述第一保护层图案覆盖所述缺口以及所述缺口的周围, 并棵露 所述透明导电层图案除缺口以及所述缺口的周围外的位置。  For example, the transparent conductive layer pattern 24 may include at least one notch; the first protective layer pattern 23 may be island-shaped, and the thickness of the first protective layer pattern is greater than the thickness of the transparent conductive layer pattern; The first protective layer pattern covers the notch and the periphery of the notch, and exposes the transparent conductive layer pattern except the notch and the position around the periphery of the notch.
例如, 所述金属层图案的 22范围可以大于所述第一保护层图案 23的范 围, 使得所述金属层图案在所述第一保护层图案的范围外的位置处与所述透 明导电层图案电连接。  For example, the range of 22 of the metal layer pattern may be larger than the range of the first protective layer pattern 23 such that the metal layer pattern is at a position outside the range of the first protective layer pattern and the transparent conductive layer pattern Electrical connection.
例如,所述透明导电层图案 24还可以包括:焊盘区域的透明导电层图案; 所述金属层图案包括: 显示区域的桥接线和焊盘区域的电路线; 所述第二保 护层图案覆盖所述显示区域的桥接线, 并棵露所述焊盘区域的电路线。  For example, the transparent conductive layer pattern 24 may further include: a transparent conductive layer pattern of the pad region; the metal layer pattern includes: a bridge line of the display region and a circuit line of the pad region; the second protective layer pattern covers The bridge of the display area and the circuit line of the pad area are exposed.
例如,所述透明导电层图案 24可以为铟锡氧化物层; 所述第一保护层图 案 23和所述第二保护层图案 25可以由丙婦基树脂和环氧树脂制成, 或者, 所述第一保护层图案和所述第二保护层图案可以由氮化硅制成。  For example, the transparent conductive layer pattern 24 may be an indium tin oxide layer; the first protective layer pattern 23 and the second protective layer pattern 25 may be made of a propylene-based resin and an epoxy resin, or The first protective layer pattern and the second protective layer pattern may be made of silicon nitride.
例如,所述透明导电层图案 24的形状为菱形,包括相互隔离的第一区域、 第二区域、 第三区域, 第一区域和第三区域之间有缺口, 第二区域和第三区 域之间有缺口, 第二区域位于中间。  For example, the transparent conductive layer pattern 24 has a diamond shape, and includes a first region, a second region, and a third region that are isolated from each other. There is a gap between the first region and the third region, and the second region and the third region are There is a gap between them, and the second area is in the middle.
本发明的实施例通过喷墨打印的方式, 在横向扫描线和竖向扫描线的交 叉位置(节点处), 沉积涂覆一层绝缘层, 取代现有技术中釆用光罩(Mask ) 的方式沉积绝缘层的方法, 可以减少所使用的光罩的数量, 使得制备方法的 所使用的光罩的总数低至 3道, 从而可以相应减少曝光、 显影, 刻蚀、 剥离 等构图工艺, 达到降低生产成本和简化生产工艺的目的。 本发明的实施例中, 各层(保护层、 透明导电层图案) 不限于本申请中 描述的材料,并且,透明导电层图案不限于本申请中提到的菱形(Diamond )。 Embodiments of the present invention deposit an insulating layer at the intersection (node) of the lateral scanning line and the vertical scanning line by means of inkjet printing, instead of the prior art mask (Mask) The method of depositing the insulating layer can reduce the number of the reticle used, so that the total number of reticle used in the preparation method is as low as three, thereby correspondingly reducing the patterning processes such as exposure, development, etching, and peeling. Reduce production costs and simplify the production process. In the embodiment of the present invention, each layer (protective layer, transparent conductive layer pattern) is not limited to the material described in the present application, and the transparent conductive layer pattern is not limited to the diamond (Diamond) mentioned in the present application.
以上所述仅是本发明的示范性实施方式, 而非用于限制本发明的保护范 围, 本发明的保护范围由所附的权利要求确定。  The above is only an exemplary embodiment of the present invention, and is not intended to limit the scope of the present invention. The scope of the present invention is defined by the appended claims.

Claims

权利要求书 Claim
1. 一种触摸屏的制作方法, 包括: A method of manufacturing a touch screen, comprising:
在基板上沉积金属, 并经过第一次构图工艺, 形成金属层图案, 所述金 属层图案包括显示区域的桥接线;  Depositing a metal on the substrate, and forming a metal layer pattern through a first patterning process, the metal layer pattern including a bridge line of the display area;
使用第一保护材料在形成有所述金属层图案的基板上进行喷墨打印, 以 将所述第一保护材料沉积在所述桥接线上, 形成第一保护层图案;  Performing inkjet printing on the substrate on which the metal layer pattern is formed using a first protective material to deposit the first protective material on the bridge wire to form a first protective layer pattern;
在形成有所述第一保护层图案的基板上沉积透明导电材料, 并经过第二 次构图工艺, 形成透明导电层图案;  Depositing a transparent conductive material on the substrate on which the first protective layer pattern is formed, and forming a transparent conductive layer pattern through a second patterning process;
在形成有所述透明导电层图案的基板上沉积绝缘材料, 并经过第三次构 图工艺, 形成第二保护层图案。  An insulating material is deposited on the substrate on which the transparent conductive layer pattern is formed, and a third patterning process is formed to form a second protective layer pattern.
2. 根据权利要求 1所述的触摸屏的制作方法, 其中,  2. The method of manufacturing a touch screen according to claim 1, wherein
所述第一保护层图案为岛状, 并且所述第一保护层图案的厚度大于所述 金属层图案的厚度;所述第一保护层图案的宽度小于所述金属层图案的宽度, 使得所述金属层图案相对的第一侧和第二侧被棵露;  The first protective layer pattern is island-shaped, and the thickness of the first protective layer pattern is greater than the thickness of the metal layer pattern; the width of the first protective layer pattern is smaller than the width of the metal layer pattern, so that The first side and the second side of the opposite metal layer pattern are exposed;
所述透明导电层图案的范围大于所述第一保护层图案的范围, 使得所述 透明导电层图案和所述金属层图案在所述金属层图案相对的第一侧和第二侧 的位置处电连接。  The range of the transparent conductive layer pattern is larger than the range of the first protective layer pattern such that the transparent conductive layer pattern and the metal layer pattern are at positions opposite to the first side and the second side of the metal layer pattern Electrical connection.
3. 根据权利要求 1所述的触摸屏的制作方法, 其中,  3. The method of manufacturing a touch screen according to claim 1, wherein
所述金属层图案还包括: 焊盘区域的电路线;  The metal layer pattern further includes: a circuit line of the pad region;
所述透明导电层图案包括: 焊盘区域的透明导电层图案和显示区域的透 明导电层图案;  The transparent conductive layer pattern includes: a transparent conductive layer pattern of the pad region and a transparent conductive layer pattern of the display region;
所述第二保护层图案覆盖所述显示区域的透明导电层图案, 并棵露所述 焊盘区域的透明导电层图案。  The second protective layer pattern covers the transparent conductive layer pattern of the display region and exposes the transparent conductive layer pattern of the pad region.
4. 根据权利要求 1所述的触摸屏的制作方法, 其中,  4. The method of manufacturing a touch screen according to claim 1, wherein
所述透明导电层图案为铟锡氧化物层;  The transparent conductive layer pattern is an indium tin oxide layer;
所述第一保护层图案和所述第二保护层图案由丙婦基树脂和环氧树脂制 成, 或者, 所述第一保护层图案和所述第二保护层图案由氮化硅制成。  The first protective layer pattern and the second protective layer pattern are made of a propylene-based resin and an epoxy resin, or the first protective layer pattern and the second protective layer pattern are made of silicon nitride .
5. 根据权利要求 1所述的触摸屏的制作方法, 其中, 所述透明导电层图 案的形状为菱形。 The method of manufacturing a touch panel according to claim 1, wherein the transparent conductive layer pattern has a diamond shape.
6. 一种触摸屏, 包括: 6. A touch screen comprising:
基板;  Substrate
金属层图案,经过在所述基板上沉积金属并经过第一次构图工艺而形成, 所述金属层图案包括显示区域的桥接线;  a metal layer pattern formed by depositing a metal on the substrate and passing through a first patterning process, the metal layer pattern including a bridge line of the display area;
第一保护层图案, 经过使用第一保护材料在形成有所述金属层图案的基 板上进行喷墨打印以将所述第一保护材料沉积在所述桥接线上的工艺而形 成;  a first protective layer pattern formed by a process of performing inkjet printing on a substrate on which the metal layer pattern is formed using a first protective material to deposit the first protective material on the bridge line;
透明导电层图案, 经过在形成有所述第一保护层图案的基板上沉积透明 导电材料并经过第二次构图工艺而形成; 以及  a transparent conductive layer pattern formed by depositing a transparent conductive material on a substrate on which the first protective layer pattern is formed and subjected to a second patterning process;
第二保护层图案, 经过在形成有所述透明导电层图案的基板上沉积绝缘 材料并经过第三次构图工艺而形成。  The second protective layer pattern is formed by depositing an insulating material on the substrate on which the transparent conductive layer pattern is formed and passing through a third patterning process.
7. 根据权利要求 6所述的触摸屏, 其中,  7. The touch screen according to claim 6, wherein
所述第一保护层图案为岛状, 并且所述第一保护层图案的厚度大于所述 金属层图案的厚度;所述第一保护层图案的宽度小于所述金属层图案的宽度, 使得所述金属层图案相对的第一侧和第二侧被棵露;  The first protective layer pattern is island-shaped, and the thickness of the first protective layer pattern is greater than the thickness of the metal layer pattern; the width of the first protective layer pattern is smaller than the width of the metal layer pattern, so that The first side and the second side of the opposite metal layer pattern are exposed;
所述透明导电层图案的范围大于所述第一保护层图案的范围, 使得所述 透明导电层图案和所述金属层图案在所述金属层图案相对的第一侧和第二侧 的位置处电连接。  The range of the transparent conductive layer pattern is larger than the range of the first protective layer pattern such that the transparent conductive layer pattern and the metal layer pattern are at positions opposite to the first side and the second side of the metal layer pattern Electrical connection.
8. 一种触摸屏的制作方法, 包括:  8. A method of making a touch screen, comprising:
在基板上沉积透明导电材料, 并经过第一次构图工艺, 形成透明导电层 图案, 所述透明导电层图案包括有显示区域的横向扫描线与竖向扫描线; 使用第一保护材料在形成有所述透明导电层图案的基板上进行喷墨打 印, 以将所述第一保护材料沉积在所述横向扫描线与竖向扫描线的节点上, 形成第一保护层图案;  Depositing a transparent conductive material on the substrate, and forming a transparent conductive layer pattern through a first patterning process, the transparent conductive layer pattern including a horizontal scan line and a vertical scan line having a display area; Performing inkjet printing on the substrate of the transparent conductive layer pattern to deposit the first protective material on the nodes of the horizontal scanning line and the vertical scanning line to form a first protective layer pattern;
在形成有所述第一保护层图案的基板上沉积金属, 并经过第二次构图工 艺, 形成金属层图案;  Depositing a metal on the substrate on which the first protective layer pattern is formed, and performing a second patterning process to form a metal layer pattern;
在形成有所述金属层图案的基板上沉积绝缘材料, 并经过第三次构图工 艺, 形成第二保护层图案。  An insulating material is deposited on the substrate on which the metal layer pattern is formed, and a third patterning process is performed to form a second protective layer pattern.
9. 根据权利要求 8所述的触摸屏的制作方法, 其中,  9. The method of manufacturing a touch screen according to claim 8, wherein
所述透明导电层图案包括至少一个缺口; 所述第一保护层图案为岛状, 并且所述第一保护层图案的厚度大于所述 透明导电层图案的厚度; 所述第一保护层图案覆盖所述缺口以及所述缺口的 周围, 并棵露所述透明导电层图案除缺口以及所述缺口的周围外的位置; 所述金属层图案的范围大于所述第一保护层图案的范围, 使得所述金属 层图案在所述第一保护层图案的范围外的位置处与所述透明导电层图案电连 接。 The transparent conductive layer pattern includes at least one notch; The first protective layer pattern is island-shaped, and the thickness of the first protective layer pattern is greater than the thickness of the transparent conductive layer pattern; the first protective layer pattern covers the gap and the periphery of the gap, and Depicting a position of the transparent conductive layer pattern except a notch and a periphery of the notch; the range of the metal layer pattern is larger than a range of the first protective layer pattern, such that the metal layer pattern is in the first protection The position outside the range of the layer pattern is electrically connected to the transparent conductive layer pattern.
10. 根据权利要求 8所述的触摸屏的制作方法, 其中,  10. The method of manufacturing a touch screen according to claim 8, wherein
所述透明导电层图案还包括: 焊盘区域的透明导电层图案;  The transparent conductive layer pattern further includes: a transparent conductive layer pattern of the pad region;
所述金属层图案包括: 显示区域的桥接线和焊盘区域的电路线; 所述第二保护层图案覆盖所述显示区域的桥接线, 并棵露所述焊盘区域 的电路线。  The metal layer pattern includes: a bridge line of the display area and a circuit line of the pad area; the second protection layer pattern covers the bridge line of the display area, and exposes the circuit line of the pad area.
11. 根据权利要求 8所述的触摸屏的制作方法, 其中,  11. The method of manufacturing a touch screen according to claim 8, wherein
所述透明导电层图案为铟锡氧化物层;  The transparent conductive layer pattern is an indium tin oxide layer;
所述第一保护层图案和所述第二保护层图案由丙婦基树脂和环氧树脂制 成, 或者, 所述第一保护层图案和所述第二保护层图案由氮化硅制成。  The first protective layer pattern and the second protective layer pattern are made of a propylene-based resin and an epoxy resin, or the first protective layer pattern and the second protective layer pattern are made of silicon nitride .
12. 根据权利要求 8所述的触摸屏的制作方法, 其中, 所述透明导电层 图案的形状为菱形。  The method of manufacturing a touch panel according to claim 8, wherein the transparent conductive layer pattern has a diamond shape.
13. 一种触摸屏, 包括:  13. A touch screen comprising:
基板;  Substrate
透明导电层图案, 经过在所述基板上沉积透明导电材料, 并经过第一次 构图工艺而形成, 所述透明导电层图案包括有显示区域的横向扫描线与竖向 扫描线;  a transparent conductive layer pattern formed by depositing a transparent conductive material on the substrate and subjected to a first patterning process, the transparent conductive layer pattern including a horizontal scan line and a vertical scan line having a display area;
第一保护层图案 , 经过使用第一保护材料在形成有所述透明导电层图案 的基板上进行喷墨打印以将所述第一保护材料沉积在所述横向扫描线与竖向 扫描线的节点上而形成;  a first protective layer pattern, which is subjected to inkjet printing on a substrate on which the transparent conductive layer pattern is formed by using a first protective material to deposit the first protective material on the nodes of the horizontal scan line and the vertical scan line Formed on the top;
金属层图案, 经过在形成有所述第一保护层图案的基板上沉积金属并经 过第二次构图工艺而形成; 以及  a metal layer pattern formed by depositing a metal on a substrate on which the first protective layer pattern is formed and subjected to a second patterning process;
第二保护层图案,经过在形成有所述金属层图案的基板上沉积绝缘材料, 并经过第三次构图工艺而形成。  The second protective layer pattern is formed by depositing an insulating material on the substrate on which the metal layer pattern is formed, and undergoing a third patterning process.
14. 根据权利要求 13所述的触摸屏, 其中, 所述透明导电层图案包括至少一个缺口; 14. The touch screen according to claim 13, wherein The transparent conductive layer pattern includes at least one notch;
所述第一保护层图案为岛状, 并且所述第一保护层图案的厚度大于所述 透明导电层图案的厚度; 所述第一保护层图案覆盖所述缺口以及所述缺口的 周围, 并棵露所述透明导电层图案除缺口以及所述缺口的周围外的位置; 所述金属层图案的范围大于所述第一保护层图案的范围, 使得所述金属 层图案在所述第一保护层图案的范围外的位置处与所述透明导电层图案电连 接。  The first protective layer pattern is island-shaped, and the thickness of the first protective layer pattern is greater than the thickness of the transparent conductive layer pattern; the first protective layer pattern covers the gap and the periphery of the gap, and Depicting a position of the transparent conductive layer pattern except a notch and a periphery of the notch; the range of the metal layer pattern is larger than a range of the first protective layer pattern, such that the metal layer pattern is in the first protection The position outside the range of the layer pattern is electrically connected to the transparent conductive layer pattern.
PCT/CN2012/084907 2012-03-28 2012-11-20 Manufacturing method for touch screen and touch screen WO2013143304A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201210086965.8 2012-03-28
CN201210086965.8A CN102722277B (en) 2012-03-28 2012-03-28 The method for making of touch-screen and touch-screen

Publications (1)

Publication Number Publication Date
WO2013143304A1 true WO2013143304A1 (en) 2013-10-03

Family

ID=46948070

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2012/084907 WO2013143304A1 (en) 2012-03-28 2012-11-20 Manufacturing method for touch screen and touch screen

Country Status (2)

Country Link
CN (1) CN102722277B (en)
WO (1) WO2013143304A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102722277B (en) * 2012-03-28 2015-08-05 京东方科技集团股份有限公司 The method for making of touch-screen and touch-screen
CN104423667B (en) * 2013-08-30 2018-01-12 Lg伊诺特有限公司 Touch pad and display
CN103487971B (en) 2013-09-30 2016-05-04 京东方科技集团股份有限公司 The preparation method of color membrane substrates, touch control display apparatus and color membrane substrates
CN106970730A (en) * 2016-01-13 2017-07-21 中华映管股份有限公司 Contact panel and its manufacture method
CN108415602A (en) * 2018-03-12 2018-08-17 武汉华星光电半导体显示技术有限公司 A kind of preparation method of touch-control structure, OLED touch control display apparatus
CN114995683A (en) * 2022-08-04 2022-09-02 湖南兴威新材料有限公司 Single-sided capacitive touch screen and manufacturing method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101859213A (en) * 2009-04-13 2010-10-13 群康科技(深圳)有限公司 Making method of capacitor-type touch panel
CN201984462U (en) * 2011-04-22 2011-09-21 上海晨兴希姆通电子科技有限公司 Capacitive touch screen
CN102722277A (en) * 2012-03-28 2012-10-10 京东方科技集团股份有限公司 Method for manufacturing touch screen and touch screen

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101859213A (en) * 2009-04-13 2010-10-13 群康科技(深圳)有限公司 Making method of capacitor-type touch panel
CN201984462U (en) * 2011-04-22 2011-09-21 上海晨兴希姆通电子科技有限公司 Capacitive touch screen
CN102722277A (en) * 2012-03-28 2012-10-10 京东方科技集团股份有限公司 Method for manufacturing touch screen and touch screen

Also Published As

Publication number Publication date
CN102722277B (en) 2015-08-05
CN102722277A (en) 2012-10-10

Similar Documents

Publication Publication Date Title
TWI396901B (en) Method of fabricating touch panel
KR101314779B1 (en) Electrostatic capacity type touch screen panel and method of manufacturing the same
WO2013143304A1 (en) Manufacturing method for touch screen and touch screen
KR102056928B1 (en) Touch screen panel and method for manufacturing the same
TWI469026B (en) Touch devices and fabrication methods thereof
KR101719368B1 (en) Electrostatic capacity type touch screen panel and method of manufacturing the same
CN109976578B (en) Touch substrate, manufacturing method thereof and touch display device
WO2018099174A1 (en) Touch screen and manufacturing method thereof, and touch display device
KR102017155B1 (en) Touch screen panel and method for manufacturing the same
WO2018024133A1 (en) Touch panel, preparation method therefor, and add-on-mode touch display device
WO2017045341A1 (en) Touch structure and preparation method therefor, touch substrate, and display device
TWI489362B (en) Touch sensor structures and methods of forming the same
WO2018040792A1 (en) Touch-control substrate and manufacturing method therefor, and touch-control apparatus
WO2018076817A1 (en) Touch-control panel and preparation method therefor, and display device
CN106201136A (en) Touch base plate and preparation method thereof, touch screen
TW201131441A (en) Fabrication of touch sensor panel using laser ablation
WO2018157814A1 (en) Touch screen manufacturing method, touch screen ,and display device
WO2019196338A1 (en) Metal mesh touch control display structure and manufacturing method therefor
CN108228014B (en) Touch module, preparation method thereof and touch screen
WO2013143292A1 (en) Touch sensor, manufacturing method therefor and liquid crystal display with touch screen
TWI703481B (en) Touch panel with transparent flexible electrodes and manufacturing methods thereof
WO2016045278A1 (en) Ogs touch panel substrate and manufacturing method therefor, and related device
KR101721259B1 (en) Electrostatic capacity type touch screen panel and method of manufacturing the same
WO2015117468A1 (en) Touch screen, manufacturing method therefor, and touch display device
WO2022042082A1 (en) Touch substrate and touch device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12873128

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205A DATED 10/12/2014)

122 Ep: pct application non-entry in european phase

Ref document number: 12873128

Country of ref document: EP

Kind code of ref document: A1