WO2013131874A1 - Procédé pour l'application d'une couche de revêtement stable à haute température sur la surface d'un composant et composant pourvu d'une telle couche de revêtement - Google Patents

Procédé pour l'application d'une couche de revêtement stable à haute température sur la surface d'un composant et composant pourvu d'une telle couche de revêtement Download PDF

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Publication number
WO2013131874A1
WO2013131874A1 PCT/EP2013/054337 EP2013054337W WO2013131874A1 WO 2013131874 A1 WO2013131874 A1 WO 2013131874A1 EP 2013054337 W EP2013054337 W EP 2013054337W WO 2013131874 A1 WO2013131874 A1 WO 2013131874A1
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WO
WIPO (PCT)
Prior art keywords
coating layer
micron
component
sub
powder
Prior art date
Application number
PCT/EP2013/054337
Other languages
English (en)
Inventor
Sophie Betty Claire Duval
Piero-Daniele Grasso
Sven Olliges
Alexander Stankowski
Original Assignee
Alstom Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alstom Technology Ltd filed Critical Alstom Technology Ltd
Priority to CA2864618A priority Critical patent/CA2864618A1/fr
Priority to CN201380012678.5A priority patent/CN104160059B/zh
Publication of WO2013131874A1 publication Critical patent/WO2013131874A1/fr
Priority to US14/474,564 priority patent/US20150284834A1/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/02—Pretreatment of the material to be coated, e.g. for coating on selected surface areas
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/06—Metallic material
    • C23C4/073—Metallic material containing MCrAl or MCrAlY alloys, where M is nickel, cobalt or iron, with or without non-metal elements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/06—Metallic material
    • C23C4/08—Metallic material containing only metal elements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y10T428/256—Heavy metal or aluminum or compound thereof

Definitions

  • the present invention relates to thermally loaded components of thermal machines, especially gas turbines. It refers to a method for applying a high- temperature stable coating layer on the surface of a component. It further refers to a component with such a coating layer.
  • a thermal barrier coating TBC
  • a bond coat may be provided between the base material of the component and the TBC.
  • the hot-section stationary components mainly combustors, transition pieces, and vanes
  • TBCs thermal barrier coatings
  • M metallic MCrAIY
  • YPSZ Yttria partially stabilized zirconia
  • the document further asserts that the full potential of the YPSZ TBCs is yet to be realized due mainly to the cracking problem that occurs along or near the bond coat/top coat interface after a limited number of cycles of engine operation.
  • This interfacial cracking often leading to premature coating failure by debonding (spallation) of the top coat from the bond coat, has been amply demonstrated from microstructural evidence that was obtained from in-service degradation of deposited coatings as well as from laboratory experiments that have been conducted.
  • the thin oxide layer that grows on top of the bond coat, at the bond coat/top coat interface plays a critical role in the interface cracking. It is quite evident that this cracking problem negatively impacts the coating performance by reducing both the engine efficiency (because the engine operating temperature is kept below its optimum temperature) and the lifetime of the engine components. In turn, this greatly affects the reliability and the efficiency of the entire engine system.
  • the bond coat surface, onto which the YPSZ top coat is disposed has a thin oxide layer that consists mostly of various oxides (NiO, Ni(Cr,AI) 2 0 4 , Cr 2 0 3 , Y2O3, Al 2 0 3 ).
  • This thin oxide layer plays an important role in the adhesion (bonding) between the metallic bond coat and the ceramic top coat.
  • another oxide layer forms in addition to the native oxide.
  • This second layer also mostly alumina, is commonly referred to as the thermally grown oxide (TGO) and slowly grows during exposure to elevated temperatures.
  • TGO thermally grown oxide
  • Interfacial oxides, in particular the TGO layer play a pivotal role in the cracking process. It is believed that the growth of the TGO layer leads to the build up of stresses at the interface region between the TGO layer and top coat.
  • document US 7,361 ,386 B2 proposes to modify the microstructure of the MCrAIY bond coat (in a thermal barrier coating) in a controlled way prior to exposure to high temperatures, in order to control the subsequent changes during high temperature exposure. More specifically, the structure, composition, and growth rate of the thermally grown oxide (TGO) is controlled to ultimately improve the performance of TBCs.
  • a nanostructure is provided in the bond coat and, consequently, nanocrystalline dispersoids are introduced into the structure. The purpose of the dispersoids is to stabilize the nanocrystalline structure and to nucleate the desirable [alpha]-AI 2 0 3 in the TGO.
  • the method according to the invention for applying a high-temperature stable coating layer on the surface of a component comprises the steps of:
  • said powder material is applied to the surface of the component by means of a thermal spraying technique.
  • the thermal spraying technique used is one of High Velocity Oxygen Fuel Spraying (HVOF), Low Pressure Plasma Spraying (LPPS), Air Plasma Spraying (APS) or Suspension Plasma Spraying (SPS).
  • HVOF High Velocity Oxygen Fuel Spraying
  • LPPS Low Pressure Plasma Spraying
  • APS Air Plasma Spraying
  • SPS Suspension Plasma Spraying
  • said powder material has the form of agglomerates.
  • said powder material has the form of a suspension.
  • the powder material contains powder particles of micron size and/or larger agglomerates, and that the sub-micron powder particles are in said coating layer distributed around the surface of said powder particles of micron size and/or said larger agglomerates.
  • the sub-micron powder particles are pre-oxidized before being incorporated into said coating layer.
  • the pre-oxidation takes place in-flight during spraying.
  • the pre-oxidation is done by an oxidative pre heat treatment of the powder material.
  • the powder material is a metallic powder.
  • the coating layer is a bond coat or an overlay coating.
  • said component having a surface, which is coated with a coating layer is characterized in that said coating layer comprises sub-micron powder particles, which are each at least partially surrounded by an oxide shell and establish with their oxide shells an at least partially interconnected sub-micron oxide network within said coating layer.
  • said coating layer further comprises powder particles of micron size and/or larger agglomerates.
  • said sub-micron powder particles are in said coating layer distributed around the surface of said powder particles of micron size and/or said larger agglomerates.
  • Fig. 1 shows in a simplified schematic diagram a thermal spray configuration, which can be used for the present invention
  • Fig. 2 shows the creation of a coating layer with an internal oxide
  • Fig. 3 shows - similar to Fig. 2 - the embedding of micron particles or agglomerates in said sub-micron powder particle oxide network
  • Fig. 4 shows schematically a graded coating layer in accordance with an embodiment of the invention.
  • the present invention discloses a specific type of sub-micron structured coating. Due to a sub-micron scale oxide network and fine grain microstructure, the invention aims to reduce the LCF/TMF cracking.
  • Another aspect of the invention is the retardant effect for the oxidation and the corrosion. Due to the nano-scale oxide network of the bond coat/overlay coating, the impact by oxidation and corrosion is slowed down.
  • the invention should enable a longer service life and/or assure reconditionability with less scrap parts and/or decreased operation risks, such as crack formation in critical area of the component due to mechanical/thermal load, and/or oxidation/corrosion and/or FOD (Foreign Objects Damage) events.
  • the invention enables:
  • the novelty of the invention is the use of a sub-micron powder (at least to a certain percentage of the total powder mixture) and the way to process it (preparation and thermal spray application) to reach the mentioned improved coating properties.
  • the improved coating behavior is particularly based on a reduced TMF/LCF effect of the coating with (at least partial) sub-micron structure.
  • the invention is based on:
  • suspension plasma spray SPS
  • In-flight oxidation during spraying has the effect of pre-oxidizing the sub-micron powder of the agglomerate or suspension. Pre-oxidation can also be achieved by oxidative pre heat treatment of the powder mixture. When only a portion of the powder exhibits a sub-micron scale, it is preferable to have the sub-micron particles distributed around the surface of the micron and/or agglomerated spray powder particles.
  • thermal spray methods HVOF, LPPS, APS, SPS etc.
  • Air gun spray technologies can also be used.
  • the use of pre- oxidized spray powder is preferred.
  • a homogeneous or a graded coating can be applied (see the graded coating layer 12b in Fig. 4).
  • the graded layer 12b can have an oxide content, which increases or decreases with the distance from the surface of the base metal to the top surface of the coating.
  • the oxide content could have a minimum in the middle of the coating thickness.
  • the function of such a coating can be as bond coat, overlay coating or a thermal barrier coating system for turbo machine components like gas turbine blades or vanes.
  • the coating of the invention can be used alone or in combination with other standard coatings.
  • the coating of the invention can be used on newly made components or reconditioned components and can also locally be applied for the partial (surface) repair of components.
  • TGO thermally grown oxide
  • the oxide network (22) formed by the connecting oxide shells (20) allows to reduce the build-up of the depletion zone in the coating (top and interface to the base metal) by slowing down the diffusion mechanism.
  • Chromium is finely dispersed in the coating. This enables a faster gattering of sulfur and a slowing down of the corresponding corrosion process(es).
  • the improved coating oxidation properties enable to reduce the overall coating thickness. As a consequence, the risk of crack formation due to TMF and LCF is also reduced. This effect implies the slowing down of formation and propagation of respective damages, such as cracks.
  • the metallic matrix ductility is increased due to the fine grain structure, which is also beneficial for the overall coating lifetime.
  • Fig. 1 shows a typical thermal spray configuration 10, which can be used to apply the sub-micron powder coating layer according to the invention.
  • the thermal spray configuration 10 comprises a spray gun 13, which is supplied with the sub-micron powder 15, a fuel 16 and an oxidant 17. By burning the fuel 16, a flame 14 is generated, which transports the powder particles to the surface of a component 1 1 , thereby building the coating layer 12.
  • the sub-micron powder particles 18 undergo a reaction, as can be seen in Fig. 2, such that they are transformed into particles having a (metallic) core 19 surrounded by an oxide shell 20.
  • those oxidized sub-micron particles build up an interconnected structure with a sub-micron oxide network 22.
  • the resulting coating layer 12a comprises those agglomerates or micron powder particles 21 being surrounded by oxidized sub-micron powder particles 18.
  • said sub-micron powder particles ( ⁇ 1 micron) are each surrounded by an oxide shell (50-100 nm) and establish with their oxide shells an at least partially interconnected 3D sub-micron oxide network in the final coating layer application,
  • the first powder blend contains 25 wt% of pre-oxidised sub- micron ( ⁇ 1 micron; 50-100 nm oxide shell) powder particles agglomerated (average 80 micron) with microsized powder particles (20-50 micron) of same chemical composition,
  • HVOF High Velocity Oxygen Fuel
  • the first and third layer contains each at least a partially interconnected 3D submicron oxide network.
  • the fine grain sized coating allows a diffusion heat treatment with a reduced number of heat treatment cycles.
  • a nano coating as top layer improves the TMF and oxidation resistance, which results in an improved overall coating lifetime.
  • 12,12a,12b coating layer e.g. bond coat

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

L'invention concerne un procédé pour appliquer une couche de revêtement stable à haute température (12) sur la surface d'un composant (11), comprenant les étapes suivantes : a) la fourniture d'un composant (11) avec une surface à revêtir ; b) la fourniture d'un matériau en poudre contenant au moins une fraction de particules de poudre sous-micronique (18) ; c) l'application dudit matériau en poudre à la surface du composant (11) au moyen d'une technique de pulvérisation pour former une couche de revêtement (12), moyennant quoi d) lesdites particules de poudre sous-micronique (18) sont chacune au moins partiellement entourées par une enveloppe d'oxyde et (20) l'établissement avec leurs coques oxyde (20) d'un réseau d'oxyde sous - micronique au moins partiellement interconnecté (22) à l' intérieur de ladite couche de revêtement (12).
PCT/EP2013/054337 2012-03-05 2013-03-05 Procédé pour l'application d'une couche de revêtement stable à haute température sur la surface d'un composant et composant pourvu d'une telle couche de revêtement WO2013131874A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CA2864618A CA2864618A1 (fr) 2012-03-05 2013-03-05 Procede pour l'application d'une couche de revetement stable a haute temperature sur la surface d'un composant et composant pourvu d'une telle couche de revetement
CN201380012678.5A CN104160059B (zh) 2012-03-05 2013-03-05 在组件的表面上涂敷高温稳定涂层的方法和具有这种涂层的组件
US14/474,564 US20150284834A1 (en) 2012-03-05 2014-09-02 Method for applying a high-temperature stable coating layer on the surface of a component and component with such a coating layer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP12158129.2A EP2636763B1 (fr) 2012-03-05 2012-03-05 Procédé pour appliquer une couche de revêtement stable à haute température sur la surface d'un composant et composant avec une telle couche de revêtement
EP12158129.2 2012-03-05

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US14/474,564 Continuation US20150284834A1 (en) 2012-03-05 2014-09-02 Method for applying a high-temperature stable coating layer on the surface of a component and component with such a coating layer

Publications (1)

Publication Number Publication Date
WO2013131874A1 true WO2013131874A1 (fr) 2013-09-12

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PCT/EP2013/054337 WO2013131874A1 (fr) 2012-03-05 2013-03-05 Procédé pour l'application d'une couche de revêtement stable à haute température sur la surface d'un composant et composant pourvu d'une telle couche de revêtement

Country Status (5)

Country Link
US (1) US20150284834A1 (fr)
EP (1) EP2636763B1 (fr)
CN (1) CN104160059B (fr)
CA (1) CA2864618A1 (fr)
WO (1) WO2013131874A1 (fr)

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CN104451520B (zh) * 2014-12-04 2017-08-01 中国船舶重工集团公司第十二研究所 一种氧化锆多晶团陶瓷涂层的制备方法
EP3168204B1 (fr) * 2015-11-12 2019-02-27 Ansaldo Energia IP UK Limited Procédé de fabrication d'une pièce de turbine à gaz
US10752999B2 (en) 2016-04-18 2020-08-25 Rolls-Royce Corporation High strength aerospace components
US10763715B2 (en) 2017-12-27 2020-09-01 Rolls Royce North American Technologies, Inc. Nano-crystalline coating for magnet retention in a rotor assembly
CN108004498A (zh) * 2017-12-29 2018-05-08 上海英佛曼纳米科技股份有限公司 一种具有抗高温结瘤抗氧化耐腐蚀耐磨损涂层的高温热轧钢炉辊
US11317540B2 (en) 2019-09-20 2022-04-26 Samsung Electronics Co., Ltd. Solid state drive apparatus and data storage apparatus including the same
CN113881912B (zh) * 2021-10-09 2023-01-31 矿冶科技集团有限公司 一种纳米氧化物弥散型MCrAlY抗氧化涂层及其制备方法

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US7361386B2 (en) 2002-07-22 2008-04-22 The Regents Of The University Of California Functional coatings for the reduction of oxygen permeation and stress and method of forming the same
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US7361386B2 (en) 2002-07-22 2008-04-22 The Regents Of The University Of California Functional coatings for the reduction of oxygen permeation and stress and method of forming the same
US20080090071A1 (en) * 2004-10-21 2008-04-17 Commissariat A L'energie Atomique Nanosturctured Coating and Coating Method
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GB2426010A (en) * 2005-05-14 2006-11-15 Jeffrey Boardman Production of oxide coated metallic particles for use in semiconductor devices.
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Publication number Publication date
US20150284834A1 (en) 2015-10-08
CA2864618A1 (fr) 2013-09-12
CN104160059A (zh) 2014-11-19
EP2636763A1 (fr) 2013-09-11
EP2636763B1 (fr) 2020-09-02
CN104160059B (zh) 2019-01-08

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