WO2013128621A1 - 有機el装置及びその製造方法 - Google Patents
有機el装置及びその製造方法 Download PDFInfo
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- WO2013128621A1 WO2013128621A1 PCT/JP2012/055283 JP2012055283W WO2013128621A1 WO 2013128621 A1 WO2013128621 A1 WO 2013128621A1 JP 2012055283 W JP2012055283 W JP 2012055283W WO 2013128621 A1 WO2013128621 A1 WO 2013128621A1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
- H10K50/813—Anodes characterised by their shape
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/842—Containers
- H10K50/8426—Peripheral sealing arrangements, e.g. adhesives, sealants
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/17—Passive-matrix OLED displays
- H10K59/179—Interconnections, e.g. wiring lines or terminals
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Definitions
- the present invention relates to an organic EL device and a manufacturing method thereof.
- a self-luminous device (organic EL device) including an organic EL element includes, for example, a display screen of a mobile phone, a monitor screen of an in-vehicle or household electronic device, an information display screen of a personal computer or a television receiver, a lighting panel for advertisement
- a display screen of a mobile phone a monitor screen of an in-vehicle or household electronic device
- an information display screen of a personal computer or a television receiver a lighting panel for advertisement
- various display devices used in various applications as various light sources used in scanners, printers, etc., as illumination devices used in general illumination and backlights of liquid crystal display devices, etc., and as an optical communication device utilizing a photoelectric conversion function It can be used for various applications and models.
- an organic EL element is disposed on a substrate, and the organic EL element is disposed in a sealing region that is hermetically sealed by a sealing member.
- the electrode of the organic EL element is connected to an extraction electrode drawn out of the sealing region, and the extraction electrode is connected to the driving element and the wiring board in a connection space provided at the periphery of the substrate.
- an ACF (Anisotropic Conductive Film) method or an eutectic method is generally employed.
- a circuit pattern connected to an organic EL element is formed on a substrate outside a sealing member, and an IC chip mounting (COG) or flexible print is applied to the circuit pattern. It is shown that a substrate is mounted (FPC) and a resin is applied to an exposed portion of a circuit pattern.
- an element formation space where an organic EL element on a substrate is arranged is an effective space for obtaining light emission
- the outer space is a so-called frame space where light emission cannot be obtained.
- connection space outside the sealing region In order to narrow the frame space described above in the organic EL device, the connection space outside the sealing region must be narrowed.
- the connection space In COG or FPC mounting using an anisotropic conductive layer, the conductive particles flow from the connection region where the connection terminal exists within the narrow connection space to the non-connection region where the connection terminal does not exist, Densification of the conductive particles in the non-connected region occurs.
- the conductive particles are connected in the non-connection region, and there is a problem that a short circuit failure is likely to occur between adjacent terminals in the connection space. Such a short circuit between adjacent terminals causes a further problem when the electrode interval of the organic EL element is made dense in order to obtain high resolution.
- connection space in the connection space described above, COG and FPC can be mounted by pulling out and exposing the connection terminal from the sealing region.
- a mask pattern that covers the connection space is formed prior to the sealing film forming step in order to expose the connection terminals of the connection space.
- a separate process for exposing the connection terminal is required, and equipment for performing the process is required. There is an unavoidable problem that extension and increase in manufacturing cost are inevitable.
- the present invention is an example of a problem to deal with such a problem. That is, in the organic EL device, the risk of a short circuit between adjacent terminals in the connection space on the substrate can be reduced, and when the organic EL element is sealed with a sealing film, the connection terminal is exposed in the connection space. It is an object of the present invention to eliminate necessary processes and equipment, avoiding an increase in tact time and an increase in manufacturing cost.
- the organic EL device and the manufacturing method thereof according to the present invention have at least the following configurations.
- a substrate one or a plurality of organic EL elements formed on the substrate, a plurality of connection terminals provided on the substrate and electrically connected to electrodes of the organic EL elements, and the connection terminals;
- An insulating cover layer that covers the substrate between the connection terminals, and a mounting component that is mounted via an anisotropic conductive layer and includes a connected terminal that is electrically connected to the connection terminal,
- the anisotropic conductive layer includes conductive particles that electrically connect the connection terminals and the connected terminals, and the conductive particles pass through the cover layer to electrically connect the connection terminals and the connected terminals.
- Forming an organic EL element on the substrate forming a connection terminal connected to an electrode of the organic EL element in a connection space on the substrate, and covering the connection terminal and the substrate in the connection space;
- FIG. 1 is an explanatory diagram showing an overall configuration of an organic EL device according to an embodiment of the present invention (FIG. 1A is an example of COG mounting, and FIG. 1B is an example of FPC mounting).
- 1 is a partial cross-sectional view of an organic EL device according to an embodiment of the present invention, and shows an XX cross-sectional view in FIG.
- FIG. 3 is a cross-sectional view taken along the line X1-X1 in FIG. It is explanatory drawing which showed typically the form example of the preferable electroconductive particle in embodiment of this invention. It is explanatory drawing which showed the manufacturing method of the organic electroluminescent apparatus concerning embodiment of this invention. It is explanatory drawing which showed the manufacturing method of the organic electroluminescent apparatus concerning embodiment of this invention.
- FIG. 1 is an explanatory diagram showing the overall configuration of an organic EL device according to an embodiment of the present invention (FIG. 1A is an example of COG mounting, and FIG. 1B is an example of FPC mounting. ).
- FIG. 2 is a partial cross-sectional view of the organic EL device according to the embodiment of the present invention, and shows an XX cross-sectional view in FIG. 2A and 2B show cross-sectional views of different embodiments.
- the organic EL device 1 includes a substrate 2, one or a plurality of organic EL elements 1 U formed on the substrate 2, and a mounting component 3 mounted on the substrate 2.
- the mounting component 3 include a semiconductor chip 3-1 as illustrated in FIG. 1A and a flexible printed circuit board 3-2 as illustrated in FIG. 1B. It is not limited.
- connection space 2b On the substrate 2, an element formation space 2a in which the organic EL element 1U is formed is provided, and a connection space 2b is provided outside the element formation space 2a.
- a plurality of connection terminals 4 that are electrically connected to the electrodes (lower electrode 11 or upper electrode 13) of the organic EL element 1U are provided.
- the connection terminal 4 is electrically connected to the electrode (lower electrode 11 or upper electrode 13) of the organic EL element 1U in the element formation space 2a via the lead wiring 5, the auxiliary electrode, or the like.
- the plurality of connection terminals connected to the electrodes of the organic EL element mentioned here include connection terminals connected to the TFTs in the active matrix driving type organic EL device.
- connection terminal is indirectly connected to the organic EL element via the TFT.
- connection terminal 4 may have a multi-layer structure in which a treatment such as plating is performed with gold or copper. Thereby, the resistance of the wiring by the connection terminal 4 can be reduced.
- the organic EL element 1U formed in the element formation space 2a on the substrate 2 is hermetically sealed between the substrate 2 and the sealing member 6.
- a sealing substrate 6A as shown in FIG. 2A is used, and the substrate 2 and the sealing substrate 6A are bonded to each other with the adhesive layer 7 interposed therebetween.
- the sealing space 6S may be formed between them (hollow sealing), or the sealing film 6B as shown in FIG. 2B is used, and the sealing film 6B has no space in the organic EL element 1U. What covers a component (film
- the organic EL element 1U is laminated on the substrate 2 as shown in FIGS. 2 (a) and 2 (b).
- the organic EL element 1U includes at least a lower electrode 11, an organic layer 12, and an upper electrode 13.
- the lower electrode 11 is formed on the substrate 2, the organic layer 12 is formed thereon, and the upper electrode 13 is further formed thereon.
- Several film-forming layers may exist between them, and other layers may be laminated between the lower electrode 11, the organic layer 12, and the upper electrode 13.
- the organic layer 12 is composed of one light emitting layer or several functional layers for emitting light (hole injection / transport layer, light emitting layer, electron injection / transport layer, etc.).
- the organic EL element 1U includes an insulating film 14 that insulates a light emitting region of each organic EL element 1U on the lower electrode 11, and a partition wall 15 that is formed on the insulating film 14 and insulates the upper electrode 13 from each other.
- the configuration example of the illustrated organic EL element 1U is an example, and the driving method of the organic EL element 1U in the embodiment of the present invention may be either a passive driving method or an active driving method.
- connection space 2 b on the substrate 2 an insulating cover layer 10 covering the substrate 2 between the connection terminals 4 and the connection terminals 4 is provided.
- the cover layer 10 is formed alone in the connection space 2b.
- the cover layer 10 is formed by extending a sealing film 6B.
- the cover layer 10 can be formed in the connection space 2b by forming the sealing film 6B on the entire substrate 2.
- the mounting component 3 is mounted via the anisotropic conductive layer 20, and the connection terminal 4 and the connected terminal 3A of the mounting component 3 are conductive particles of the anisotropic conductive layer 20. Is electrically connected.
- connection terminal 4 can have a multi-layer structure in which a treatment such as plating is performed with gold or copper.
- a treatment such as plating is performed with gold or copper.
- cover layer 10 since the surface of the connection terminal 4 is covered with the cover layer 10, it is possible to actively reduce the resistance of the terminal by using a metal such as gold which is easily corroded as the surface layer of the connection terminal 4.
- FIG. 3 is a cross-sectional view taken along the line X1-X1 in FIG. 2, and is an explanatory diagram showing an enlarged connection structure in the connection space.
- the anisotropic conductive layer 20 interposed between the substrate 2 and the mounting component 3 has a bonding layer 21 for physically bonding the substrate 2 and the mounting component 3, and a conductive material dispersed in the bonding layer 21.
- grains 22 are provided.
- a thermocompression-bonding anisotropic conductive film (ACF) a material in which conductive particles 22 are dispersed in a bonding layer 21 made of a photocurable resin, or the like can be used.
- connection terminals 4 in the connection space 2b are in an insulated compartment by being individually covered with an insulating cover layer 10.
- the anisotropic conductive layer 20 is formed on the cover layer 10 and the substrate 2 and the mounting component 3 are pressure-bonded, between the connection terminal 4 of the substrate 2 and the connected terminal 3A of the mounting component 3.
- the cover layer 10 is penetrated by the sandwiched conductive particles 22.
- the electrical connection with the connecting terminal 4 and the to-be-connected terminal 3A is made
- connection space 2b narrowed for narrowing the frame and the density of the conductive particles 22 is increased in the connected region of the connection space 2b, Since the side surface of the connection terminal 4 is covered with the insulating cover layer 10, even if the conductive particles 22 are in a continuous state, a short circuit failure between the adjacent connection terminals 4 and 4 should be avoided. Can do.
- the condition for the conductive particles 22 sandwiched between the connection terminals 4 of the substrate 2 and the connected terminals 3A of the mounting component 3 to penetrate the cover layer 10 by the pressure contact between the substrate 2 and the mounting component 3 is that the conductive particles
- the hardness, particle size, and shape of 22 can be set experimentally in a relative relationship between the material of the cover layer 10 and the film thickness.
- the diameter of the conductive particles 22 is preferably larger than the layer thickness of the cover layer 10.
- the conductive particles 22 sandwiched between the connection terminal 4 and the connection terminal 3A can be covered with the cover layer without satisfying this condition. It is possible to penetrate 10.
- FIG. 4 schematically shows a preferred embodiment of the conductive particles 22.
- the overall shape is a triangle or a polygon, and the overall shape has corners.
- the example shown in FIGS. 4C, 4D, and 4E has a shape having protrusions on the surface, and has partial corners on the surface.
- the substrate 2 is light transmissive and is formed of a base material that can support the organic EL element 1U, such as glass or plastic.
- the transparent conductive film layer forming the lower electrode 11 is a transparent metal such as ITO (Indium Tin Oxide), IZO (Indium Zinc Oxide), zinc oxide-based transparent conductive film, SnO 2 -based transparent conductive film, titanium dioxide-based transparent conductive film, etc. An oxide can be used.
- an insulating film 14 is provided to ensure insulation between the electrodes.
- the insulating film 14 is made of a material such as polyimide resin, acrylic resin, silicon oxide, or silicon nitride.
- the insulating film 14 is formed by forming the material of the insulating film 14 on the substrate 2 on which the lower electrode 11 is patterned, and then forming an opening for forming a light emitting region for each organic EL element 1U on the lower electrode 11. Patterning is performed.
- a film is formed on the substrate 2 on which the lower electrode 11 is formed to have a predetermined coating thickness by spin coating, and an exposure process and a development process are performed using an exposure mask, whereby an organic EL element is obtained.
- a layer of insulating film 14 having an opening pattern shape of 1U is formed. The insulating film 14 is formed so as to fill the space between the patterns of the lower electrode 11 and partially cover the side end portion thereof, and is formed in a lattice shape when the organic EL elements 1U are arranged in a dot matrix.
- the partition wall 15 is formed in a stripe shape in a direction intersecting the lower electrode 11 in order to form a pattern of the upper electrode 13 without using a mask or the like, or to completely electrically insulate the adjacent upper electrode 13.
- an insulating material such as a photosensitive resin is formed on the above-described insulating film 14 so that the film thickness is larger than the total thickness of the organic layer 12 and the upper electrode 13 that form the organic EL element 1U.
- the photosensitive resin film is irradiated with ultraviolet rays or the like through a photomask having a stripe pattern intersecting with the lower electrode 11, and the development speed resulting from the difference in the exposure amount in the thickness direction of the layer is applied.
- the partition wall 15 having a taper surface whose side faces downward is formed.
- the organic layer 12 has a laminated structure of light emitting functional layers including a light emitting layer.
- a hole injection layer and a hole transport are sequentially formed from the anode side.
- a layer, a light emitting layer, an electron transport layer, an electron injection layer, and the like are selectively formed.
- a vacuum deposition method or the like is used as a dry film formation, and coating or various printing methods are used as a wet film formation.
- NPB N, N-di (naphtalence) -N, N-dipheneyl-benzidene
- This hole transport layer has a function of transporting holes injected from the anode to the light emitting layer.
- the hole transport layer may be a single layer or a stack of two or more layers.
- the hole transport layer is not formed by a single material, but a single layer may be formed by a plurality of materials, and a guest material having a high charge donating (accepting) property may be formed on a host material having a high charge transport capability. Doping may be performed.
- red (R), green (G), and blue (B) light-emitting layers are formed in respective film formation regions by using a resistance heating vapor deposition method using a coating mask.
- red (R) an organic material that emits red light such as a styryl dye such as DCM1 (4- (dicyanomethylene) -2-methyl-6- (4'-dimethylaminostyryl) -4H-pyran) is used.
- An organic material that emits green light such as aluminum quinolinol complex (Alq3), is used as green (G).
- blue (B) an organic material emitting blue light such as a distyryl derivative or a triazole derivative is used.
- the emission form may be a fluorescent light emitting material or a phosphorescent light emitting material.
- the electron transport layer formed on the light emitting layer is formed by using various materials such as an aluminum quinolinol complex (Alq3) by various film forming methods such as resistance heating vapor deposition.
- the electron transport layer has a function of transporting electrons injected from the cathode to the light emitting layer.
- This electron transport layer may have a multilayer structure in which only one layer is stacked or two or more layers are stacked.
- the electron transport layer may be formed of a plurality of materials instead of a single material, and a guest material having a high charge donating (accepting) property may be formed on a host material having a high charge transport capability. It may be formed by doping.
- a material (metal, metal oxide, metal fluoride, alloy, etc.) having a work function smaller than that of the anode (for example, 4 eV or less) is used.
- metal films such as aluminum (Al), indium (In), magnesium (Mg), amorphous semiconductors such as doped polyaniline and doped polyphenylene vinylene, Cr 2 O 3 , NiO , Oxides such as Mn 2 O 5 can be used.
- a single layer structure made of a metal material, a laminated structure such as LiO 2 / Al, or the like can be adopted.
- a glass substrate or a metal substrate is used as the sealing substrate 6A that performs hollow sealing.
- the sealing film 6B for film sealing for example, a single layer or a multilayer film of metal, silicon oxide, nitride, or oxynitride formed by an atomic layer growth method can be used.
- an aluminum oxide film for example, Al 2 O
- an alkyl metal such as TMA (trimethylaluminum), TEA (triethylaluminum), DMAH (dimethylaluminum hydride) and water, oxygen, or alcohols.
- a silicon oxide film for example, SiO 2 film
- a silicon oxide film for example, SiO 2 film
- the cover layer 10 preferably contains an inorganic material, particularly an aluminum oxide film such as Al 2 O 3 .
- a layer formed by atomic layer deposition (ALD) is preferable.
- 5 and 6 are explanatory views showing a method for manufacturing the organic EL device according to the embodiment of the present invention.
- the example shown in FIG. 5 shows a manufacturing process corresponding to the embodiment shown in FIG.
- the organic EL element 1U is formed on the substrate 2, and the connection terminals 4 connected to the electrodes (upper electrode 11 and lower electrode 13) of the organic EL element 1U are formed in the connection space 2b on the substrate 2 (S1). Process).
- the organic EL element 1U is sealed (step S2). In this step, the organic EL element 1U is sealed in the sealing space 6S by bonding the substrate 2 and the sealing substrate 6A together.
- the cover layer 10 is formed in the connection space 2b (step S3), and the anisotropic conductive layer 20 is formed thereon (step S4).
- the anisotropic conductive layer 20 is formed integrally with the mounting component 3 such as a flexible wiring board
- the anisotropic conductive layer 20 is formed by arranging the connected terminal 3A of the mounting component 3 in the connection space 2b.
- an anisotropic conductive film (ACF) is disposed in the connection space 2b where the cover layer 10 is formed.
- the bonding layer 21 in which the conductive particles 22 are dispersed is applied to the connection space 2b in which the cover layer 10 is formed, or the conductive particles 22 are dispersed in the bonding layer 21 after the bonding layer 21 is applied. .
- the substrate 2 and the mounting component 3 are pressure-bonded in the connection space 2b (step S5).
- the bonding layer 21 of the anisotropic conductive layer 20 interposed between the substrate 2 and the mounting component 3 is heat-meltable, the substrate 2 and the mounting component 3 are pressure-bonded while being heated.
- the bonding layer 21 is a photo-curing resin, the substrate 2 and the mounting component 3 are pressure-bonded under conditions where the resin is not cured.
- the cover layer 10 is penetrated by the conductive particles 22 sandwiched between the connection terminal 4 of the substrate 2 and the connection terminal 3A of the mounting component 3, and the connection terminal 4 and the connection terminal 3A face each other.
- connection terminal 4 and the connected terminal 3A are electrically connected via the conductive particles 22.
- the bonding layer 21 is cured (step S6).
- the bonding layer 21 is a photocurable resin
- the bonding layer 21 is cured by irradiating the bonding layer 21 with light such as ultraviolet rays while maintaining the pressure-bonded state.
- the example shown in FIG. 6 shows a manufacturing process corresponding to the embodiment shown in FIG.
- the organic EL element 1U is formed on the substrate 2, and the connection terminals 4 connected to the electrodes (upper electrode 11 and lower electrode 13) of the organic EL element 1U are connected to the substrate 2.
- a sealing film 6B for sealing the organic EL element 1U is formed on the entire substrate.
- the organic EL element 1U is sealed by the sealing film 6B, and the cover layer 10 is formed in the connection space 2b by the sealing film 6B.
- the subsequent anisotropic conductive film forming step (S3-1), mounting component crimping step (S4-1), and bonding layer curing step (S5-1) are the same as the above-described S4 step, S5 step, and S6 step. .
Abstract
Description
Claims (15)
- 基板と、
前記基板上に形成された一つ又は複数の有機EL素子と、
前記基板上に設けられ、前記有機EL素子の電極に電気的に接続された複数の接続端子と、
前記接続端子と前記接続端子間の前記基板上を覆う絶縁性のカバー層と、
異方性導電層を介して実装され、前記接続端子と電気的に接続される被接続端子を備える実装部品とを備え、
前記異方性導電層は、前記接続端子と前記被接続端子を電気的に接続する導電性粒子を備え、
前記導電性粒子は、前記カバー層を貫通して前記接続端子と前記被接続端子を電気的に接続することを特徴とする有機EL装置。 - 前記異方性導電層は、前記基板と前記実装部品を物理的に接合させる絶縁性の接合層を備え、前記導電性粒子は該接合層内に分散されていることを特徴とする請求項1記載の有機EL装置。
- 前記基板と前記実装部品の圧着によって、前記導電性粒子が前記カバー層を貫通して前記接続端子と前記被接続端子を電気的に接続することを特徴とする請求項2記載の有機EL装置。
- 前記接続端子及び前記カバー層は、前記基板と前記実装部品が接続されている接続スペースに配置されていることを特徴とする請求項3記載の有機EL装置。
- 前記カバー層は、前記有機EL素子を前記基板との間で封止する封止膜によって形成されることを特徴とする請求項4記載の有機EL装置。
- 前記カバー層は、無機物を含むことを特徴とする請求項5記載の有機EL装置。
- 前記カバー層は、アルミニウム酸化物膜を含むことを特徴とする請求項6記載の有機EL装置。
- 前記カバー層は、原子層成長法(ALD)によって成膜された層であることを特徴とする請求項5記載の有機EL装置。
- 前記異方性導電層は、熱圧着性の異方性導電フィルムであることを特徴とする請求項3記載の有機EL装置。
- 前記異方性導電層の接合層は、光硬化性樹脂であることを特徴とする請求項2記載の有機EL装置。
- 前記導電性粒子の直径が前記カバー層の層厚よりも大きいことを特徴とする請求項1記載の有機EL装置。
- 前記導電性粒子は、表面又は全体形状に角部を有することを特徴とする請求項11記載の有機EL装置。
- 前記接続端子は複数層の積層構造であることを特徴とする請求項1記載の有機EL装置。
- 基板上に有機EL素子を形成すると共に、該有機EL素子の電極に接続される接続端子を前記基板上の接続スペースに形成する工程と、
前記接続端子と前記接続スペース内の前記基板上を覆う絶縁性のカバー層を形成する工程と、
前記接続スペースに異方性導電層を介して実装部品を実装する実装工程を有し、
前記実装工程では、前記基板と前記実装部品とを圧着することで、前記異方性導電層の導電性粒子が前記カバー層を貫通して前記接続端子と前記実装部品の被接続端子を電気的に接続することを特徴とする有機EL装置の製造方法。 - 基板上に有機EL素子を形成すると共に、該有機EL素子の電極に接続される接続端子を前記基板上の接続スペースに形成する工程と、
前記有機EL素子を前記基板との間で封止する封止膜を形成することで、該封止膜によって、前記接続端子と前記接続スペース内の前記基板上を覆う絶縁性のカバー層を形成する工程と、
前記接続スペースに異方性導電層を介して実装部品を実装する実装工程を有し、
前記実装工程では、前記基板と前記実装部品とを圧着することで、前記異方性導電層の導電性粒子が前記カバー層を貫通して前記接続端子と前記実装部品の被接続端子を電気的に接続することを特徴とする有機EL装置の製造方法。
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CN104201189B (zh) * | 2014-08-22 | 2017-03-22 | 京东方科技集团股份有限公司 | 一种有机发光显示装置及有机发光二极管的封装方法 |
DE102019129832A1 (de) * | 2019-11-05 | 2021-05-06 | Heliatek Gmbh | Optoelektronisches Bauelement, sowie Verfahren zur Kontaktierung eines optoelektronischen Bauelements |
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JP2006040589A (ja) * | 2004-07-22 | 2006-02-09 | Asahi Glass Co Ltd | 積層体、有機el表示素子、及び、有機el表示素子の製造方法 |
JP2008083365A (ja) * | 2006-09-27 | 2008-04-10 | Citizen Miyota Co Ltd | 液晶表示装置 |
JP2009224321A (ja) * | 2008-02-18 | 2009-10-01 | Fuji Electric Holdings Co Ltd | 有機elディスプレイ |
JP2010244850A (ja) * | 2009-04-06 | 2010-10-28 | Toshiba Mobile Display Co Ltd | 有機el表示装置 |
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AU2003220088A1 (en) * | 2002-03-08 | 2003-09-22 | Sundew Technologies, Llc | Ald method and apparatus |
JP4692544B2 (ja) * | 2005-04-14 | 2011-06-01 | パナソニック株式会社 | 電子回路装置およびその製造方法 |
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- 2012-03-01 WO PCT/JP2012/055283 patent/WO2013128621A1/ja active Application Filing
- 2012-03-01 US US14/380,922 patent/US20150076463A1/en not_active Abandoned
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JP2006040589A (ja) * | 2004-07-22 | 2006-02-09 | Asahi Glass Co Ltd | 積層体、有機el表示素子、及び、有機el表示素子の製造方法 |
JP2008083365A (ja) * | 2006-09-27 | 2008-04-10 | Citizen Miyota Co Ltd | 液晶表示装置 |
JP2009224321A (ja) * | 2008-02-18 | 2009-10-01 | Fuji Electric Holdings Co Ltd | 有機elディスプレイ |
JP2010244850A (ja) * | 2009-04-06 | 2010-10-28 | Toshiba Mobile Display Co Ltd | 有機el表示装置 |
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