WO2013122391A1

WO2013122391A1 - Thin film sealing device

Info

Publication number: WO2013122391A1
Application number: PCT/KR2013/001139
Authority: WO
Inventors: 윤현식
Original assignee: 에스엔유 프리시젼 주식회사
Priority date: 2012-02-15
Filing date: 2013-02-14
Publication date: 2013-08-22
Also published as: TW201334128A; TWI484602B; KR20130094037A; CN104205405A; KR101325489B1; CN104205405B

Abstract

The present invention relates to a thin film sealing device. The thin film sealing device according to the present invention is used to seal a thin film by injecting monomers supplied from the outside onto a substrate through a nozzle. The present invention includes: a housing having an accommodating space inside and provided with an opening portion so that the monomers are injected onto the substrate through the nozzle; a head portion receiving the monomers so as to accommodate the monomers therein, wherein the head portion is provided in a rotatable manner in the accommodating space in the housing, and the nozzle is formed on the outer circumferential surface so that the monomers are injected when the nozzle is placed at a position corresponding to the opening portion; a gate portion disposed away from the nozzle in an arcing direction on the outer circumferential surface of the head portion, wherein at least one inclined surface is formed on at least one surface in such a manner as to be capable of moving upward and downward so that the opening portion is closed when the gate portion is placed at a position corresponding to the opening portion; and at least one guide member interposed between the housing and the head portion away from one side of the opening portion, wherein the guide member guides the gate portion in the direction in which the opening portion is opened or closed by making contact with the inclined surface which is formed in the gate portion.

Description

Thin film encapsulation device

The present invention relates to a thin film encapsulation device, and more particularly, a gate part spaced in an arc direction with respect to a nozzle installed on an outer circumferential surface of a head part installed to accommodate a monomer therein and rotatable inside the housing, thereby providing a head inside the housing. As the additional rotation, the nozzle is selectively opened to inject the monomer, or the opening is closed to isolate the monomer from the outside to prevent the solidification of the monomer to prevent degradation of the product quality and to improve the durability of the equipment It is about.

The display device is manufactured by various types of detailed processes. One of the main processes in the manufacturing process of the display device is a process for forming a plurality of thin films on a substrate or the like, and the deposition process is widely used in such a thin film forming process.

In particular, organic light emitting diodes (OLEDs) are self-luminous devices that can function as a display on a single plate, and are not only very fast in response, but also thin in thickness, wide viewing angle, and low power consumption.

The organic light emitting device-based deposition equipment used in the deposition process is a method of printing organic materials in a liquid state and sealing them by printing the organic materials in a liquid state, unlike conventional heating and chemical deposition on a substrate. The advantage is that the display can be produced.

However, when the organic light emitting device is exposed to moisture and oxygen due to its properties, and the organic light emitting device is not being driven, moisture present in the air gradually contacts the internal electrode or the organic thin film to generate black spots. There is a problem that is lowered and the life is reduced.

Therefore, the thin film encapsulation technology is a process for protecting the material inside the device from moisture or oxygen and is a core technology required. The thin film encapsulation film deposits monomers on the surface of the thin film to block access of moisture and oxygen to the organic light emitting device. Thin Film Encapsulation System is used.

In the thin film encapsulation device, the nozzle for injecting the monomer is conventionally not completely blocked from the outside in the housing, so that the monomer is exposed to the outside and solidified, thereby degrading product quality and preventing the device from operating properly due to a phenomenon such as clogging of the nozzle. There is a problem.

Accordingly, an object of the present invention is to solve such a conventional problem, in which the nozzle is selectively opened as the head portion rotates in the housing to inject the monomer, or the monomer is solidified by closing the opening to isolate the monomer from the outside. It is to provide a thin film encapsulation device that can prevent the.

According to the present invention, a thin film encapsulation device for encapsulating a thin film by injecting monomer supplied from the outside onto a substrate through a nozzle, wherein a receiving space is provided therein and the monomer is injected from the nozzle to the substrate. A housing provided with an opening so as to receive the monomer therein, and being accommodated therein, rotatably installed in the accommodation space inside the housing, and having a nozzle formed on an outer circumferential surface thereof, the nozzle corresponding to the opening. A head part which sprays the monomer when positioned; and an outer circumferential surface of the head part spaced apart from the nozzle in an arc direction, and an inclined surface is formed on at least one surface and is movable to move upward and downward, A gate portion closing the opening when positioned at a corresponding position; And a guide member interposed between the housing and the head and spaced apart from one side of the opening to guide the gate in a direction in which the opening is opened or closed in contact with an inclined surface formed in the gate. It is achieved by a thin film encapsulation device comprising a.

In addition, it is preferable that at least one hinge is provided between the gate portion and the head portion to be movable in the vertical direction.

In addition, it is preferable to include at least one elastic member installed between the gate portion and the head portion to apply an elastic force between the head portion and the gate portion.

In addition, it is preferable to include a stopper provided between the gate portion and the head portion to prevent the gate portion from being in close contact with the outer peripheral surface of the head portion by the elastic member.

In addition, it is preferable that a sealing member is provided at the gate portion in contact with the opening, and the opening and the gate portion are in close contact with each other to prevent leakage of the monomer.

According to the present invention, there is provided a thin film encapsulation device capable of preventing the solidification of monomers by selectively opening nozzles as the head rotates in the housing to inject the monomers, or closing the openings formed in the housing to isolate the monomers from the outside. do.

1 is a cross-sectional view of a thin film encapsulation device according to the present invention,

2 and 3 is an operation diagram showing the operation of the thin film encapsulation device according to the present invention.

Prior to the description, components having the same configuration will be representatively described in one embodiment using the same reference numerals.

Hereinafter, a thin film encapsulation apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a cross-sectional view of the thin film encapsulation device of the present invention. As shown in the drawings, the thin film encapsulation device according to the present invention includes a housing 10 having an accommodation space therein and an opening 11 formed at one side thereof, and a head portion installed in the accommodation space inside the housing 10. 20, a gate part 30 installed to move up and down and selectively opening and closing the opening 11, and a guide part 40 installed inside the housing 10 to guide the movement of the gate part 30. ).

The housing 10 is a member in which the head part 20 is installed inside and insulates the head part 20 from the outside. Communicating circular holes are formed so that both ends of the head portion 20 to be described later is coupled.

In addition, the opening part 11 is formed in the center part of the upper end surface in the longitudinal direction, and the nozzle 23 is exposed or the opening part 11 is closed by the gate 31.

The head portion 20 is a member that accommodates the monomer supplied from the outside to inject the monomer through the opening 11 and is rotatable in the housing 10, the body 21 and the receiving portion for receiving the monomer (22), a nozzle 23 for injecting the monomer, and a supply path (not shown) to which the monomer is supplied from the outside. The body 21 is cylindrical in shape, and an accommodating portion 22 in which the monomer supplied from the outside is accommodated is formed therein in the longitudinal direction of the body 21.

When the nozzle 23 is installed in the longitudinal direction of the body 21 on the outer circumferential surface of the body 21, is connected to the outside from the receiving portion 22 when the nozzle 23 is located at a position corresponding to the opening 11 The monomer stored in the accommodating portion 22 is injected to the outside.

The supply path (not shown) is a flow path for supplying the monomer supplied from the outside to the accommodating part 22 inside the body 21, and is installed at one end of the body 21.

The gate portion 30 is a member that closes the opening 11 by rotating the head portion 20. The gate portion 30 closing the opening 11 and the hinge 32 for adjusting the height of the gate 31. And an elastic member 33 for applying an elastic force, a stopper 34 for maintaining a separation distance between the gate 31 and the body 21 of the head portion 20, and the gate 31 opens the opening 11. It includes a sealing member 35 to be in close contact with each other when closing.

The gate 31 is a member that closes the opening 11 to isolate the nozzle installed in the housing 10 from the outside to prevent solidification, and is formed in a rectangular plate shape, and thus, one side of the outer peripheral surface of the body 21 of the head portion 20. It is provided by the hinge 32 and the elastic member 33 to be described later. In addition, the inclined surface is formed on one side of the gate 31 is guided in contact with the guide member 40 to be described later when the head portion 20 is rotated in the counterclockwise direction.

An inclined surface is formed on one side of the gate 31 in contact with the guide member 40 to be described later when the head 20 rotates. The hinge 32 is interposed between the body 21 and the gate 31, and a plurality of hinges 32 are installed in the longitudinal direction of the gate 31 to allow the gate 31 to be spaced apart in the vertical direction. A plurality of elastic members 33 are interposed between the body 21 and the gate 31 to apply an elastic force in a direction opposite to the direction in which the gate 31 is separated from the body 21.

The stopper 34 is installed on a surface of the gate 31 opposite to the body 21, and adjusts the distance between the gate 31 and the body 21 in a situation in which an elastic force of the elastic member 33 is applied. 31 and the body 21 to maintain a certain distance.

Therefore, when the head part 20 rotates counterclockwise by the stopper 34, the inclined surface of the gate 31 comes into contact with the guide member 40 described later.

The sealing member 35 is installed as an elastic member along the side of the upper surface of the gate 31 in contact with the opening 11, and keeps airtightness inside the housing 10 by being in close contact with the opening 11.

1 to 3, the guide member 40 is spaced apart from one side of the opening 11 and is interposed between the housing 10 and the head 20, and in this embodiment, the guide member 40 is generally used. The roller is used as a guide, the head portion 20 is in contact with the inclined surface formed in the gate 31 during rotation to guide the gate 31 in the direction in which the opening 11 is closed.

On the other hand, the guide member 40 is preferably installed in a plurality in the longitudinal direction inside the housing 10.

The operation of one embodiment of the above-described thin film encapsulation device will now be described.

FIG. 1 is a view illustrating a case in which the nozzle 23 is positioned at a position corresponding to the opening 11, and as shown in the drawing, the nozzle 23 of the head part 20 to seal the organic thin film layer deposited on the substrate. ) Is located at a position corresponding to the opening 11.

The monomer stored in the accommodating part 22 inside the head 20 through a supply path (not shown) is sprayed to the outside of the housing 10 through the nozzle 23 to encapsulate the organic thin film layer formed on the substrate. When the encapsulation process is completed, the controller (not shown) drives the actuator (not shown) to rotate the head unit 20.

2 is a view illustrating a state in which the gate 31 moves in contact with the guide member 40 as the head part 20 rotates, and FIG. 3 illustrates a state in which the gate 31 completely closes the opening 11. It is a figure which shows.

As shown in FIGS. 2 and 3, when the head portion 20 is rotated 90 degrees or more counterclockwise, the inclined surface of the gate 31 properly spaced from the body 21 by the stopper 34 is a guide member. Contact with (40).

Thereafter, as shown in FIG. 3, the inclined surface and the guide member 40 contact each other, such that the roller-shaped guide member 40 rotates and the gate 31 moves upward along the inclined surface, so that the gate 31 is moved. The opening 11 is closed. At this time, the sealing member 35 provided in the gate 31 is in close contact with the lower portion of the opening 11, the interior of the housing 10 is hermetically sealed. Accordingly, the monomers stored in the head 20 may be kept insulated from the outside except when the monomers are sprayed and deposited on the substrate by the gate 31 of the gate part 30. Therefore, by the above-described method it can be blocked from the outside of the housing 10 to protect the monomer to prevent solidification.

On the other hand, when the driving unit 50 is driven to rotate the head 20 in the clockwise direction in order to spray the sealed monomer on the substrate again, the elastic member 33 interposed between the body 21 and the gate 31. The gate 31 is moved back to its original position by the stopper 34, and the gate 31 is disposed to be spaced apart from the body 21 by a stopper 34, and the nozzle 23 is again connected to the opening 11. Is located at the corresponding position.

According to the above, the monomer is injected to the outside only when the nozzle 23 is located at a position corresponding to the opening 11, the head 20 is rotated so that the gate 31 closes the opening 11. The lower surface nozzle 23 is located inside the housing 10 in a state of being blocked from the outside.

Therefore, since the monomer can be protected by the nozzle 23 blocked from the outside, it is possible to improve the quality of the product and the durability of the device for a long time.

The scope of the present invention is not limited to the above-described embodiments but may be implemented in various forms of embodiments within the scope of the appended patents. Without departing from the gist of the invention as claimed in the patent scope, those skilled in the art to which the invention pertains are considered to be within the scope of the claims described in the present invention to various extents that can be modified.

As the head portion rotates inside the housing, a nozzle is selectively opened to inject the monomer, or a thin film encapsulation apparatus capable of preventing the solidification of the monomer by closing the opening to isolate the monomer from the outside is provided.

Claims

A thin film encapsulation device for encapsulating a thin film by spraying a monomer supplied from the outside onto a substrate through a nozzle,

A housing having an accommodating space therein and having an opening configured to spray the monomer from the nozzle to the substrate;

A head receiving the monomer and accommodating therein, rotatably installed in the accommodation space inside the housing, the nozzle being formed on an outer circumferential surface, and injecting the monomer when the nozzle is located at a position corresponding to the opening; part;

A gate spaced apart from the nozzle in an circumferential direction on the outer circumferential surface of the head, the inclined surface is formed on at least one or more surfaces thereof, and is installed to be movable in the vertical direction, the gate closing the opening when positioned at a position corresponding to the opening part; And,

A guide member interposed between the housing and the head and spaced apart from one side of the opening to guide the gate in a direction in which the opening is opened or closed in contact with an inclined surface formed in the gate; Thin film sealing apparatus comprising a.
The method of claim 1,

And at least one hinge disposed between the gate and the head to move the gate in a vertical direction.
The method of claim 2,

And at least one elastic member disposed between the gate portion and the head portion to apply an elastic force between the head portion and the gate portion.
The method of claim 3,

And a stopper disposed between the gate part and the head part to prevent the gate part from being in close contact with the outer circumferential surface of the head part by the elastic member.
The method of claim 4, wherein

A sealing member is installed in the gate part in contact with the opening, and the thin film encapsulation device is characterized in that the opening and the gate part is in close contact with each other to prevent leakage of the monomer.