WO2013113306A8 - Co2-laser mit schneller leistungssteuerung - Google Patents

Co2-laser mit schneller leistungssteuerung Download PDF

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Publication number
WO2013113306A8
WO2013113306A8 PCT/DE2013/000069 DE2013000069W WO2013113306A8 WO 2013113306 A8 WO2013113306 A8 WO 2013113306A8 DE 2013000069 W DE2013000069 W DE 2013000069W WO 2013113306 A8 WO2013113306 A8 WO 2013113306A8
Authority
WO
WIPO (PCT)
Prior art keywords
power
laser
branch
power control
rapid power
Prior art date
Application number
PCT/DE2013/000069
Other languages
English (en)
French (fr)
Other versions
WO2013113306A1 (de
Inventor
Gisbert Staupendahl
Original Assignee
Iai Industrial Systems B.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iai Industrial Systems B.V. filed Critical Iai Industrial Systems B.V.
Priority to CN201380007900.2A priority Critical patent/CN104380544B/zh
Priority to US14/376,298 priority patent/US20150014286A1/en
Priority to EP13712472.3A priority patent/EP2810345A1/de
Priority to KR1020147021706A priority patent/KR20140122239A/ko
Priority to JP2014555074A priority patent/JP6473926B2/ja
Publication of WO2013113306A1 publication Critical patent/WO2013113306A1/de
Publication of WO2013113306A8 publication Critical patent/WO2013113306A8/de

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08054—Passive cavity elements acting on the polarization, e.g. a polarizer for branching or walk-off compensation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0626—Energy control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/704—Beam dispersers, e.g. beam wells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08004—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection
    • H01S3/08009—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection using a diffraction grating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/10061—Polarization control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0064—Anti-reflection devices, e.g. optical isolaters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1123—Q-switching
    • H01S3/115—Q-switching using intracavity electro-optic devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1123—Q-switching
    • H01S3/117—Q-switching using intracavity acousto-optic devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1123—Q-switching
    • H01S3/121—Q-switching using intracavity mechanical devices

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Lasers (AREA)
  • Laser Beam Processing (AREA)

Abstract

Gegenstand der Erfindung ist ein CO2-Laser, der eine schnelle Leistungsmodulation, insbesondere eine hocheffiziente Güteschaltung ermöglicht. Kerngedanke ist dabei die Unterteilung des Resonators in einen Hochleistungszweig, der u.a. das aktive Medium (1) enthält, sowie einen Niederleistungs-Rückkoppelzweig (14), in dem die leistungsempfindlichen Elemente zur Strahlformung, insbesondere die Modulatoren, angeordnet sind. Ermöglicht wird dies durch eine geeignete Anordnung eines Polarisationsstrahlteilers (5) und eines λ/4-Phasenschiebers (2). Die freie Einstellbarkeit eines Winkels φ zwischen diesen beiden Bauelementen gestattet die außerordentlich flexible Realisierung verschiedener Betriebsarten, insbesondere die Optimierung des Rückkoppelgrades bei der Impulserzeugung.
PCT/DE2013/000069 2012-02-03 2013-01-31 Co2-laser mit schneller leistungssteuerung WO2013113306A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN201380007900.2A CN104380544B (zh) 2012-02-03 2013-01-31 具有快速功率控制的二氧化碳激光器
US14/376,298 US20150014286A1 (en) 2012-02-03 2013-01-31 Co2 laser with rapid power control
EP13712472.3A EP2810345A1 (de) 2012-02-03 2013-01-31 Co2-laser mit schneller leistungssteuerung
KR1020147021706A KR20140122239A (ko) 2012-02-03 2013-01-31 고속 전력 제어를 갖는 ｃｏ₂ 레이저
JP2014555074A JP6473926B2 (ja) 2012-02-03 2013-01-31 急速出力制御を備えるｃｏ２レーザー、およびｃｏ２レーザーを備える材料加工装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012002470A DE102012002470A1 (de) 2012-02-03 2012-02-03 CO2-Laser mit schneller Leistungssteuerung
DE102012002470.3 2012-02-03

Publications (2)

Publication Number Publication Date
WO2013113306A1 WO2013113306A1 (de) 2013-08-08
WO2013113306A8 true WO2013113306A8 (de) 2014-01-09

Family

ID=47998117

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2013/000069 WO2013113306A1 (de) 2012-02-03 2013-01-31 Co2-laser mit schneller leistungssteuerung

Country Status (7)

Country Link
US (1) US20150014286A1 (de)
EP (1) EP2810345A1 (de)
JP (1) JP6473926B2 (de)
KR (1) KR20140122239A (de)
CN (1) CN104380544B (de)
DE (1) DE102012002470A1 (de)
WO (1) WO2013113306A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016042387A1 (de) 2014-09-18 2016-03-24 Feha Lasertec Gmbh Gütegeschaltetes co2-laser-materialbearbeitungssystem mit akustooptischen modulatoren

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DE102015211999A1 (de) 2015-06-29 2016-12-29 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Laserbearbeitungskopf und Laserbearbeitungsmaschine damit
US10374384B2 (en) 2015-07-20 2019-08-06 Afl Telecommunications Llc Laser feedback control systems
US11123822B2 (en) * 2016-03-31 2021-09-21 AGC Inc. Manufacturing method for glass substrate, method for forming hole in glass substrate, and apparatus for forming hole in glass substrate
DE102017104392A1 (de) * 2017-03-02 2018-09-06 Active Fiber Systems Gmbh Schnelle Modulation von Laserstrahlung hoher Leistung
CN106918920B (zh) * 2017-04-20 2023-02-07 长春理工大学 利用偏振co2激光干涉加工镜片防雾结构的装置与方法
EP3631914A4 (de) * 2017-05-25 2021-03-31 Bae Systems Information And Electronic Systems Integration Inc. Mechanischer q-schalter
CN108581189B (zh) * 2018-06-01 2020-04-17 业成科技（成都）有限公司 激光切割方法
CN110434470B (zh) * 2019-07-04 2020-06-12 中国科学院西安光学精密机械研究所 一种大幅面透明曲面零件减反功能微纳结构加工方法及系统
US11374375B2 (en) 2019-08-14 2022-06-28 Kla Corporation Laser closed power loop with an acousto-optic modulator for power modulation
CN111129915B (zh) * 2019-12-23 2021-04-13 北京航天控制仪器研究所 一种用于光纤激光器的防反射系统及方法
JP2022128033A (ja) * 2021-02-22 2022-09-01 住友重機械工業株式会社 レーザ加工装置及びレーザ加工方法
CN115121938B (zh) * 2022-08-10 2023-09-26 南京辉锐光电科技有限公司 激光头监测模组、多波段激光光路系统及激光加工设备
US11813697B1 (en) * 2023-04-07 2023-11-14 Intraaction Corp Laser methods of fabrication of clothing

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016042387A1 (de) 2014-09-18 2016-03-24 Feha Lasertec Gmbh Gütegeschaltetes co2-laser-materialbearbeitungssystem mit akustooptischen modulatoren

Also Published As

Publication number Publication date
CN104380544A (zh) 2015-02-25
DE102012002470A1 (de) 2013-08-08
JP6473926B2 (ja) 2019-02-27
KR20140122239A (ko) 2014-10-17
EP2810345A1 (de) 2014-12-10
US20150014286A1 (en) 2015-01-15
CN104380544B (zh) 2017-12-19
JP2015510693A (ja) 2015-04-09
WO2013113306A1 (de) 2013-08-08

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