WO2013112759A1 - Moteur planaire comprenant des ensembles d'aimants asymétriques - Google Patents

Moteur planaire comprenant des ensembles d'aimants asymétriques Download PDF

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Publication number
WO2013112759A1
WO2013112759A1 PCT/US2013/023020 US2013023020W WO2013112759A1 WO 2013112759 A1 WO2013112759 A1 WO 2013112759A1 US 2013023020 W US2013023020 W US 2013023020W WO 2013112759 A1 WO2013112759 A1 WO 2013112759A1
Authority
WO
WIPO (PCT)
Prior art keywords
axis
stage
magnet
assembly
conductor
Prior art date
Application number
PCT/US2013/023020
Other languages
English (en)
Inventor
Michael B. Binnard
Yuichi Shibazaki
J. Kyle WELLS
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Publication of WO2013112759A1 publication Critical patent/WO2013112759A1/fr

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Abstract

Un ensemble d'étages (10) qui déplace un dispositif (38) comprend un moteur d'étage (16) qui déplace l'étage (14) le long d'un premier axe et le long d'un deuxième axe. Le moteur d'étage (16) comprend un ensemble d'aimants (20), et un ensemble de conducteurs (22). L'ensemble de conducteurs (22) comprend une pluralité d'unités conductrices de premier axe (24) et une pluralité d'unités conductrices de deuxième axe (26). L'ensemble d'aimants (20) comprend un ensemble d'aimants de premier axe (28a) et un ensemble d'aimants de second axe (30a). Les unités conductrices de premier axe (24) sont disposées de manière alternée avec les unités conductrices de deuxième axe (26) le long du premier axe et le long du deuxième axe. Les performances du moteur d'étage (16) peuvent être différentes dans les premier et second axes. Soit les unités conductrices (24) (26) et/ou les ensembles d'aimants (30a) (28a) peuvent présenter une géométrie différente dans les premier et les second axes.
PCT/US2013/023020 2012-01-25 2013-01-24 Moteur planaire comprenant des ensembles d'aimants asymétriques WO2013112759A1 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US201261590687P 2012-01-25 2012-01-25
US61/590,687 2012-01-25
US201261591231P 2012-01-26 2012-01-26
US61/591,231 2012-01-26
US201261623201P 2012-04-12 2012-04-12
US61/623,201 2012-04-12

Publications (1)

Publication Number Publication Date
WO2013112759A1 true WO2013112759A1 (fr) 2013-08-01

Family

ID=48873919

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/US2013/023020 WO2013112759A1 (fr) 2012-01-25 2013-01-24 Moteur planaire comprenant des ensembles d'aimants asymétriques
PCT/US2013/023023 WO2013112761A2 (fr) 2012-01-25 2013-01-24 Moteur plat à groupements de conducteurs asymétriques

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/US2013/023023 WO2013112761A2 (fr) 2012-01-25 2013-01-24 Moteur plat à groupements de conducteurs asymétriques

Country Status (1)

Country Link
WO (2) WO2013112759A1 (fr)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017076561A1 (fr) * 2015-11-05 2017-05-11 Asml Netherlands B.V. Réseau d'aimants, dispositif de bobine électrique, système de déplacement, procédé de fabrication d'appareil et de dispositif lithographique
US9778579B2 (en) 2011-11-10 2017-10-03 Nikon Corporation System and method for controlling a temperature of a reaction assembly
US10084364B2 (en) 2013-10-05 2018-09-25 Nikon Research Corporation Of America Power minimizing controller for a stage assembly
US10261419B2 (en) 2014-05-22 2019-04-16 Nikon Corporation Magnet array for moving magnet planar motor
WO2021105155A1 (fr) 2019-11-27 2021-06-03 B&R Industrial Automation GmbH Dispositif de transport
WO2021105165A1 (fr) * 2019-11-27 2021-06-03 B&R Industrial Automation GmbH Dispositif de transport
WO2022106555A1 (fr) * 2020-11-20 2022-05-27 Beckhoff Automation Gmbh Procédé de commande d'un système d'entraînement plan et système d'entraînement plan
US20220200385A1 (en) * 2016-02-12 2022-06-23 Asml Netherlands B.V. Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method
WO2022218952A3 (fr) * 2021-04-12 2023-01-19 Beckhoff Automation Gmbh Procédé de traitement d'un objet au moyen d'un système d'entraînement planaire
US11592756B2 (en) 2018-06-05 2023-02-28 Asml Netherlands B.V. Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014225317A1 (de) * 2014-12-09 2016-06-09 Robert Bosch Gmbh Elektromagnetbetriebene Fördervorrichtung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030209431A1 (en) * 2001-04-10 2003-11-13 Brown Jeffrey T. Magnetron sputtering source with improved target utilization and deposition rate
US7355308B2 (en) * 2003-08-21 2008-04-08 Nikon Corporation Mover combination with two circulation flows
WO2010041771A2 (fr) * 2008-10-09 2010-04-15 Nikon Corporation Moteur planaire à aimants cunéiformes et directions de magnétisation en diagonale
US20100167556A1 (en) * 2007-04-19 2010-07-01 Nikon Corporation Three degree of movement mover and method for controlling a three degree of movement mover

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US6768239B1 (en) * 2003-06-23 2004-07-27 Magnetic Power-Motion, Llc Electromotive devices using notched ribbon windings
JP2006149049A (ja) * 2004-11-18 2006-06-08 Denso Corp 車両用回転電機

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030209431A1 (en) * 2001-04-10 2003-11-13 Brown Jeffrey T. Magnetron sputtering source with improved target utilization and deposition rate
US7355308B2 (en) * 2003-08-21 2008-04-08 Nikon Corporation Mover combination with two circulation flows
US20100167556A1 (en) * 2007-04-19 2010-07-01 Nikon Corporation Three degree of movement mover and method for controlling a three degree of movement mover
WO2010041771A2 (fr) * 2008-10-09 2010-04-15 Nikon Corporation Moteur planaire à aimants cunéiformes et directions de magnétisation en diagonale

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KRONE ET AL.: "Investigation of the magnetization reversal of a magnetic dot array of Co/Pt multilayers.", J NANOPART RES, vol. 13, 2011, pages 5587 - 5593, XP019981737, Retrieved from the Internet <URL:http://www.lpn.cnrs.fr/Documents/Production/JNR-Krone2011iot.pdf> [retrieved on 20130331] *

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9778579B2 (en) 2011-11-10 2017-10-03 Nikon Corporation System and method for controlling a temperature of a reaction assembly
US11075573B2 (en) 2013-10-05 2021-07-27 Nikon Research Corporation Of America Power minimizing controller for a stage assembly
US10084364B2 (en) 2013-10-05 2018-09-25 Nikon Research Corporation Of America Power minimizing controller for a stage assembly
US10261419B2 (en) 2014-05-22 2019-04-16 Nikon Corporation Magnet array for moving magnet planar motor
WO2017076561A1 (fr) * 2015-11-05 2017-05-11 Asml Netherlands B.V. Réseau d'aimants, dispositif de bobine électrique, système de déplacement, procédé de fabrication d'appareil et de dispositif lithographique
US20220200385A1 (en) * 2016-02-12 2022-06-23 Asml Netherlands B.V. Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method
US11837931B2 (en) * 2016-02-12 2023-12-05 Asml Netherlands B.V. Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method
US11592756B2 (en) 2018-06-05 2023-02-28 Asml Netherlands B.V. Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly
US11860553B2 (en) 2018-06-05 2024-01-02 Asml Netherlands B.V. Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly
AT523217A1 (de) * 2019-11-27 2021-06-15 B & R Ind Automation Gmbh Transporteinrichtung
WO2021105165A1 (fr) * 2019-11-27 2021-06-03 B&R Industrial Automation GmbH Dispositif de transport
WO2021105155A1 (fr) 2019-11-27 2021-06-03 B&R Industrial Automation GmbH Dispositif de transport
WO2022106555A1 (fr) * 2020-11-20 2022-05-27 Beckhoff Automation Gmbh Procédé de commande d'un système d'entraînement plan et système d'entraînement plan
WO2022218952A3 (fr) * 2021-04-12 2023-01-19 Beckhoff Automation Gmbh Procédé de traitement d'un objet au moyen d'un système d'entraînement planaire

Also Published As

Publication number Publication date
WO2013112761A2 (fr) 2013-08-01
WO2013112761A3 (fr) 2015-06-18

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