WO2013110474A9 - Dispositif et procédé de dosage de liquides - Google Patents

Dispositif et procédé de dosage de liquides Download PDF

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Publication number
WO2013110474A9
WO2013110474A9 PCT/EP2013/000247 EP2013000247W WO2013110474A9 WO 2013110474 A9 WO2013110474 A9 WO 2013110474A9 EP 2013000247 W EP2013000247 W EP 2013000247W WO 2013110474 A9 WO2013110474 A9 WO 2013110474A9
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WO
WIPO (PCT)
Prior art keywords
liquid
pressure
cavity
tube
liquid container
Prior art date
Application number
PCT/EP2013/000247
Other languages
German (de)
English (en)
Other versions
WO2013110474A1 (fr
Inventor
Robert BEIKLER
Original Assignee
Munich Metrology Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Munich Metrology Gmbh filed Critical Munich Metrology Gmbh
Priority to EP13704546.4A priority Critical patent/EP2806973B1/fr
Publication of WO2013110474A1 publication Critical patent/WO2013110474A1/fr
Publication of WO2013110474A9 publication Critical patent/WO2013110474A9/fr

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02Burettes; Pipettes
    • B01L3/021Pipettes, i.e. with only one conduit for withdrawing and redistributing liquids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02Burettes; Pipettes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/14Process control and prevention of errors
    • B01L2200/143Quality control, feedback systems
    • B01L2200/146Employing pressure sensors

Definitions

  • the present application relates to a device and a method for dosing liquids.
  • a metering device for fluids is known from DE 35 31 241 C2.
  • liquid is forced through a cannula with the aid of a pressure transducer.
  • a pressure sensor measures the pressure of the liquid in the cannula, the measurement result is fed to a control device for controlling the pressure transducer.
  • a device for dosing liquids with a liquid container, a discharge device and a pressure measuring device having a cavity and a pressure sensor for detecting a pressure in the cavity.
  • a first tube device is configured to direct liquid from the liquid container through the interior of the first tube device to the cavity and a second tube device to direct liquid from the cavity through the interior of the second tube device to the discharge device.
  • the device is set up such that all liquid flowing from the liquid container to the discharge device flows through the cavity.
  • a tube device may include tubing or tubing or a combination of tubing or tubing and may also include valves and complex branches.
  • the two paths, one to and one from the cavity, have the advantage that the cavity can be flushed by allowing liquid to flow through the cavity from one path and liquid from the cavity through the other path.
  • Air bubbles have the disadvantage that from the measured pressure difference can not be reliably determined on the amount of discharged liquid.
  • gas must not be dosed, otherwise the target volume is not maintained. Air and other gases are usually compressible, so that pressure changes initially cause a deformation of the gas bubbles. Holes in tube devices that are not flushed carry the risk of air bubbles accumulating in them. This is particularly critical for metering devices with very high accuracy requirements.
  • the structure of the device should therefore be as simple as possible, the surfaces through which the liquid flows, be as smooth as possible. There should be no or the smallest possible dead volumes for the liquid.
  • the structure should be robust, reliable and safe, so that repeatable without correction by users, for example, for days or weeks, can be dosed. Thus, there is an excellent suitability for automation.
  • the device can also be used to set a period of time in which liquid is conveyed from the liquid container into the tube device. From the multiplication of the time period times the volume drained by the discharge device per time, the total drained volume can be determined. However, this determination is only correct if there are no air bubbles in the tube system. The presence of air bubbles can at least be detected with the device according to the application. If air bubbles were detected during the dosing process, the metered quantity can be destroyed and the dosing process repeated. Thus, ultra-accurate metering operations can be carried out with the device according to the application.
  • the device can thus also be used in particular in mixing processes in which ultra-purity is important, and in particular in mixing processes in which ultra-aggressive fluids are used.
  • the device according to the application can also be referred to as a form of liquid handling monitoring.
  • the liquid container is filled with liquid.
  • a gas cushion is fundamentally compressible and therefore makes it difficult to control the discharge based on the measured pressure.
  • a gas cushion increases the risk of gas bubbles entering the liquid.
  • Gas cushions or separation gaps require mechanical, moving brackets or injectors. This results in high costs, space requirements and contamination sources. Separation gaps are gas bubbles that are located above the liquid to be dispensed.
  • the first tube device includes a tube that opens into the cavity.
  • This hose can be flexibly guided by the pressure measuring device and thus be guided directly into the cavity as simply as possible. This simplifies the assembly of the device.
  • the device when the discharge device has a downwardly open tip with an opening cross-section of less than 0.4 mmm is particularly suitable.
  • the small orifice cross-section provides a high resistance to the liquid so that the pressure in the tube device becomes relatively high even at low dosing speed, and provides a small interface between the liquid and the air at the vent, which improves the accuracy of dosing elevated.
  • the pressure difference between the state in which the device is at rest, and a state in which the device discharges liquid is thus relatively high, with which high-precision monitoring and measurements are possible.
  • the draining device has no moving parts, the number of components in the device is reduced because each additional component contains other materials that could cause soiling. For complex systems, the space requirement would be enormous, they would then not be feasible with reasonable effort.
  • a switch is provided between the tube device and the pressure measuring device, by means of which the paths are spatially separated from one another be separated. This switch allows for easy separation between the paths so that they can easily be connected to the different ports of the switch to allow flushing of the cavity.
  • the pressure sensor includes a piezoelectric element. With such a pressure changes can be easily converted into electrical signals.
  • the detected signals are interpreted electronically in an evaluation unit and error messages are output according to the signal curves, it is possible to output warnings and to send them to an operator without having to constantly observe the signal progressions.
  • the evaluation preferably takes place with the aid of a Fourier transformation. With such a complex signal waveforms can be interpreted quickly, so that a quick error message is possible. This allows an operator to intervene immediately when needed.
  • a pressure-increasing device for example a piston that is hydraulically driven, is provided to increase the pressure in the fluid. With such a dosing speed can be increased.
  • the pressure-increasing device may also include means for increasing the gas pressure in a cylinder containing the liquid and a gas.
  • the application also relates to a method for dosing liquid with a device according to the application, wherein the device additionally comprises a switch for switchably connecting the liquid container with a liquid storage.
  • the method comprises the steps
  • a multi-way valve is provided at the end of the first tube device, so that it is possible to switch over between a plurality of second tube devices, each of which opens into its own outlet device.
  • a multi-way valve is not switched while being drained. This allows a good control of the process by means of a pressure measurement during the discharge process.
  • the step of increasing the pressure is performed at least twice, wherein in a first pass the first tube device and the second tube device are flushed and in a second passage a predetermined amount of liquid is metered out.
  • the application also relates to a method for dosing liquid in a container with a device according to the application.
  • the method includes a step of applying a pressure to the liquid to drain the liquid.
  • the pressure is measured by the pressure sensor and the measured pressure is shown on the display.
  • the device can be monitored for increased pressures. If these pressures become too great, there is a risk of bursting tubes or hoses. Especially at aggressive and toxic media such as hydrofluoric acid end up bursting hoses surrounding people. Thus, with the method, the safety can be increased.
  • a step of venting the liquid is made prior to the step of applying pressure to the liquid.
  • a step of venting the liquid is made prior to the step of applying pressure to the liquid.
  • a lot of liquid is drained off before the actual dosing process.
  • liquids are metered into a container, a device according to the application being used.
  • the method comprises a step of exerting pressure on the liquid for discharging the liquid, the pressure being measured by the pressure sensor and the measured pressure being examined for defect images by means of an electronic evaluation.
  • the automatic electronic evaluation is provided so that an operator gets the errors reported, for example by short message (SMS) on his mobile phone.
  • SMS short message
  • the application also relates to a method of dosing liquids with a device including a liquid container completely filled with liquid, a discharge device and a tube device for passing liquids from the liquid container to the discharge device.
  • a pressure measuring device is provided for measuring the pressure of a liquid inside the tube device, the pressure measuring device having a cavity connected to the interior of the tube device and a pressure sensor for detecting a pressure in the cavity.
  • the method comprises the steps of increasing the pressure on a liquid in the tube device to drain liquid from the discharge device and observing the pressure in the liquid by means of the pressure measuring device.
  • one or more steps of draining the liquid are performed before the actual dosing operation. These steps can be used to check the presence of air in the system using pressure measurement.
  • a drop hanging on the discharge device is blown off.
  • An embodiment of the method includes the following steps:
  • FIG. 1 shows a device for dosing liquid.
  • FIG. 2 shows a switch, which is part of the Vornchtung of Figure 1.
  • Figure 3 shows the switch of Figure 2 in unit with a pressure sensor.
  • Figure 4 shows an embodiment of a pressure measuring device for use in a
  • FIG. 5 to 9 show waveforms of signals from pressure sensors in devices according to
  • Figure 1 are detected during several dosing.
  • FIG. 1 shows a device 20 for dosing liquids.
  • the device 20 includes a cylinder 23, a pressure measuring device 25, a first tube device 24, a second tube device 241, which opens into a discharge device 28, and a cup 29.
  • the tube devices 24 and 241 are formed as tubes.
  • the device includes a switch 500 and a liquid storage 501.
  • the cup 29 can be changed manually or automatically or it can be used as a stationary vessel, which is rinsed automatically after use.
  • the discharge device 28 is designed as a tip having an opening diameter of less than 0.4 mm.
  • the discharge device has no moving parts. If the pressure in the liquid 31 does not exceed a certain value, hydrostatic forces in the liquid cause no liquid to fall from the tube devices out of the tip. At elevated pressure, however, gravitational force and the force caused by the pressure exceed the hydrostatic forces, so that liquid emerges from the tip in the form of drops or in the form of a jet. Moving parts in the outlet device would mean the introduction of other materials, so that the other materials are the liquid
  • the cylinder 23 includes a housing 22 and an externally operable piston rod 21, by means of which a piston surface 222 can be moved in the interior of the housing 22.
  • the interior of the housing 22 is thereby divided into two separate rooms.
  • the space bounded by the surface of the piston surface 222 which has no piston rod is referred to as a liquid container 32 and is connected to the interior of the hose 24.
  • the tube 24 is also referred to as a first tube device and the tube 241 as a second tube device. In an alternative embodiment, the tubes 24 and 241 are replaced by tubes.
  • the liquid container 32 is also connected to a changeover switch 500. This is switchable so that either the liquid container
  • the interior 35 of the tube 24 and the tube 241 and the liquid container 32 of the cylinder 23 are filled with a liquid 31, e.g. with a highly reactive liquid such as hydrofluoric HF.
  • the tube 24 leads to the pressure measuring device 25, specifically into a cavity 27, against which a diaphragm, not shown in this figure, of a pressure sensor 26 rests.
  • the tube 24 is completely filled with the liquid 31, from cavity 27, a second tube 241 leads to the tip 28, which is open at the bottom. Below the tip 28 is the cup 29, in which the liquid 31 is metered filled.
  • a first cup 29 is first led under the tip 28, preferably automatically. Then, the device must be filled with liquid 31 by filling the liquid container 32 and the tubes 24 and 241 with liquid.
  • the switch 500 is actuated so that the liquid container 32 is connected to the liquid storage 501 such that liquid 31 can flow between the two vessels.
  • the liquid reservoir 501 had previously been filled from the outside with liquid, for example hydrofluoric acid.
  • the piston rod 21 is moved downwards, which is repeated several times in succession. By this movement, some liquid is discharged into the cup 29, with air or other gas, which is located in the liquid 21, from the hoses 24 and 241 and the cavity 27 is pushed out.
  • the pressure is not increased so much that the liquid atomises. In the case of atomization, there is the possibility that partially drained liquid will not end up in the cup 29.
  • the device is ready for the actual dosing process, in which liquid is discharged into the now located under the top 28 cup 29.
  • the dosage is used, for example, for mixing solutions that are used in the chemical industry for high-precision etching and / or examining floating surfaces.
  • the device is particularly suitable for mixing ultra-trace solutions where the amount of contaminants is close to the detection limit.
  • Air in liquid is basically compressible. Pressure changes in the liquid can therefore not be detected as accurately as changes in pressure of pure liquid in the presence of air. The more air bubbles are in the liquid, the more compressible volume is in the liquid and changes the course of pressure changes.
  • the piston rod 21 is pressed down, for example by means of a stepping motor or a magnetic actuator.
  • the pressure in the liquid 31 increases, so that a portion of the liquid 31 exits through the tip 28 down, after which this part falls into the cup 29.
  • the tip 28 is so fine that it has a diameter of 0.3 mm in a round cross section.
  • the pressure within the liquid 31, for example by 0.2 bar increases due to the resistance formed by the tip and the hose line.
  • This change in pressure is detected by the pressure sensor 26 and output, for example, to a display unit, not shown in this figure, on which the course of the pressure over time is displayed.
  • the signal curve of the measured pressure is analyzed electronically in an evaluation device by means of a fast Fourier transformation. For example, it can be clearly seen on the signal course if there is a blockage in the tube 241 in the flow direction behind the pressure measuring device 25. In this case, the pressure of the liquid increases very strongly, which can be detected by means of the pressure sensor 26.
  • the dual paths to the cavity 27 through the tubes 24 and 241 serve to flush the cavity 27. Possibly occurring gas bubbles or impurities, resulting for example by detached particles of the hose can not collect in the cavity 27, since they are flushed out of this cavity 27 out.
  • the detached particles may be contaminated by surface contaminants in the production of the Material or from deposition. If the cavity were not rinsed, the contaminants would accumulate in the dead volume and could eventually be flushed out suddenly.
  • a flow direction of the liquid should be provided by the two paths. Characterized in that all the liquid 31 flows from the liquid container 32, which is to flow to the Abass device 28, through the cavity 27 with a predetermined direction, it is ensured that a flushing takes place.
  • a pressure sensor which is only connected by a path to a conduit between the liquid container 32 and the discharge device 28, contains a dead volume in which contaminants and in particular air bubbles can be deposited. This would also be the case if there were two paths but they did not define a direction of flow.
  • voids are also avoided in the tube devices 24 and 241, for example, by rounding corners.
  • the impurities are discharged through the tip 28 from the tubing, preferably, of course, into a cup 29 which serves not to mix but to clean the tubing.
  • FIG 2 shows a switch 1, which is part of the pressure measuring device 25 of Figure 1.
  • the switch 1 is shown in Figure 2 a plan view, in a sectional view and in an oblique view.
  • the switch 1 includes a first nipple 6, a second nipple 7 and third nipple 8.
  • the switch 1 also includes a switch housing 2.
  • the nipples 6, 7 and 8 are each screwed into the housing by means of a respective thread 18. Inside the switch housing 2 is a cavity 15, which opens into the connections of the nipple 6, 7 and 8, respectively.
  • the nipples 6, 7 and 8 each have cylindrical inner cavities, so that the cavity of the nipple 8 is connected via the cavity 15 of the switch housing 2 both with the cavity of the nipple 6 and with the cavity of the nipple 7.
  • Hoses can be connected to the nipples 6, 7 and 8 from the outside or hoses can be inserted into the cavities of the nipples 6, 7 and 8.
  • FIG. 3 shows the pressure measuring device 25 with the switch 1 and the pressure sensor 26. Between the pressure sensor 26 and the switch 1, a hose 9 is provided which connects these two components, the switch 1 and the pressure sensor 26 with each other.
  • the pressure measuring device 5 includes a housing 4, inside which the cavity 27 is located.
  • the housing 4 has a hollow cylindrical extension 41.
  • the cavity 27 is thus connected via the interior 441 of the extension 41 to the interior 442 of the tube 9.
  • a membrane 19 is connected, which is provided between the cavity 27 and a pressure chamber 13 and which bends depending on the pressure in the cavity 27.
  • This is measured in the pressure chamber 31 by means of a piezoelectric sensor not shown in this figure. At this piezoelectric sensor are connected by electrical lines 14, which lead to an evaluation unit 33.
  • the electrical voltage between the two terminals of the lines 14 increases or decreases.
  • This electrical voltage is converted in the evaluation unit 33 into a value for the pressure.
  • the calculated pressure is plotted on a display unit 34 over time.
  • the course of the pressure is stored in a memory 38.
  • the measured pressure is output to a regulator 35 for controlling the movement of the piston rod 21 shown in FIG.
  • the tube 241 is connected.
  • the tube 24 which is shown in FIG. 3, for the sake of clarity, partly as a single line, is introduced.
  • the tube 24 extends through the cavity of the switch housing 2, the interior of the nipple 8, the interior of the tube 9 to the cavity 27 of the pressure sensor 26th
  • the liquid thus flows from the tube 24 into the cavity 27 and from there into the tube 241. This results in a movement of the liquid in the cavity 27, which causes liquid to pass through the interior 442 of the tube 9, through the cavity 15 of the Switch body 2, flows through the nipple 7 to the tube 241, after which it to the top 28th flows and is drained there.
  • an O-ring is also provided, which presses below the nipple 8 from the outside against the hose 9, so that it is sealed.
  • FIG. 4 shows a further exemplary embodiment of a pressure measuring device 25.
  • This has a cavity 27, to which the inside of the hose 24 is connected from a first side and to the other side of which the inside of the hose 241 is connected.
  • the cavity 27 is flowed through by the liquid from bottom to top.
  • the cavity 27 is shaped so that it has no corners, since deposits can form in corners for impurities.
  • a pressure sensor 26 is provided laterally between the inlets for the tubes 24 and 241.
  • FIG. 5 shows an example of the pressure variation during a dosing process.
  • a metering device with two liquid containers, two tube devices, two pressure measuring devices and eight cups 29 is used.
  • Each of the liquid containers is connectable via a multiplexer to each of the eight cups, which means that an 8 to 1 multiplexer is provided downstream of the pressure measuring device so that one of the eight cups can be filled from each liquid container.
  • the curve marked with the triangle denotes a dosing process from the first liquid container and the curve marked with a square indicates a second dosing process from the second liquid container.
  • the pressure in millibars is plotted over the time in seconds.
  • the two curves show the two different metering operations, which are independent of each other but occur simultaneously.
  • the baseline of the two curves is slightly different, this is because the absolute values of the sensor were calibrated differently, which was left in favor of a better representation.
  • the curve marked with a triangle shows a dosing process that is inconspicuous, from which it is concluded that there was no error.
  • the pressure inside hoses 24 and 241 increases by about 100 mbar. This should actually be done in the device whose pressure curve is marked with a rectangle. However, it is noticeable that the pressure in the first discharge increases by more than 200 millibars. From this it can be concluded that there was a blockage in the discharge device leading to a higher resistance for the liquid and thus to an increased pressure leads. In subsequent draining operations this blocking is no longer visible.
  • FIG. 6 shows the course of a further dosing operation as in FIG. 5, after the hose which had been blocked was exchanged. It is noticeable that the pressure on the curve marked with the rectangle only increases slowly. This is due to the fact that there was air in the hose and that the liquid flow rate in the hoses increases only slowly. This means that the capillaries have filled only during this dosing. The same would result if the metering device is moved up during the dumping process.
  • FIG. 7 shows the course of the pressure in the interior of the liquid of the tube device during a deaeration process.
  • the curve drawn with the rectangle shows how the pressure increases in two phases and then decreases again.
  • there are two more of these phases whereby before each of these phases a short pressure pulse can be seen in each case upwards.
  • the piston rod is guided down in the cylinder and thus increases the pressure in the liquid.
  • the pressure increases only slowly, i. over a period of about 40 seconds. This is because there are air bubbles in the fluid that are compressible.
  • a device which, in addition to the device shown in Figure 1, has a filling vessel and a valve.
  • a valve is adjustable so that the liquid container is connected either to the contents of the filling vessel or to the interior of the tube 24.
  • the liquid container For filling the liquid container, it is connected to the interior of the filling vessel, wherein the piston rod is lifted.
  • the liquid container is connected to the interior of the tube 24 and the piston rod is lowered.
  • the valve on the piston is switched so that the liquid container is no longer connected to the liquid in the tube device, but with the liquid inside the filling vessel. Subsequently, the piston is lifted, so that again liquid flows from the filling vessel into the liquid container of the cylinder.
  • the valve is switched so that the liquid container of the cylinder is reconnected to the interior of the tube device. Subsequently, the piston is lowered again, so that the pressure in the liquid is increased. At time 780 seconds, a short peak is seen. This is because the piston is driven briefly down to its normal working range from top to bottom, before being completely lowered at 785 seconds. It can therefore be seen that the increase in pressure in the fluid is very fast, much faster than in the pressure increases at 250 and at 450 seconds. The curve from 980 seconds approximately corresponds to the curve from 780 seconds. From the print runs, the user was able to learn that with the given device, three venting operations were needed to vent the cylinder and hoses. Depending on the severity of the procedure, four or five venting operations may be required.
  • FIG. 8 shows a further course of pressure signals in a group of metering operations. It turns out that the pressure changes that are supposed to take place every 10,000 seconds do not occur any longer from the time of 6,000 seconds on the curve marked with the triangle. This was due to the fact that a clutch to control the piston of the cylinder was broken and thus no liquid was drained. Such serious errors can be detected with the help of the printing device.
  • FIG. 9 shows the pressure curve during a complete dosing process with rinsing and venting.
  • several liquids are simultaneously discharged into a cup, each with different cylinders and with different tube devices.
  • time 520 seconds one peak can be seen downwards.
  • the piston is driven slightly upwards at this time in order to avoid that drops that can form after a drop of a drop due to minimal fluctuations in the further course of time and still fall.
  • liquid is drawn back into the tube by means of negative pressure at the discharge device. This prevents changes in the concentration of the mixture in the cup due to unintentional discharge in stationary vessels for extended periods of time.

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  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)

Abstract

L'invention concerne un dispositif de dosage de liquides. Le dispositif contient un récipient de liquide, un dispositif de vidange et un dispositif de mesure de pression (25) qui présente une cavité (27) et un capteur de pression (26) destiné à détecter une pression dans la cavité (27). Un premier ensemble de tubes (24) est conçu pour faire passer le liquide du récipient de liquide (22) vers la cavité (27) via l'intérieur (35) du premier ensemble de tubes (24, 241) et un deuxième ensemble de tubes (241) est conçu pour faire passer le liquide de la cavité (27) vers le dispositif de vidange (28) via l'intérieur (35) du deuxième ensemble de tubes (241). Le dispositif est configuré de sorte que tout le liquide qui s'écoule du récipient de liquide (22) vers le dispositif de vidange (28) passe par la cavité (27).
PCT/EP2013/000247 2012-01-26 2013-01-28 Dispositif et procédé de dosage de liquides WO2013110474A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP13704546.4A EP2806973B1 (fr) 2012-01-26 2013-01-28 Dispositif et methode de dosage d'un liquide

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012001438.4 2012-01-26
DE102012001438A DE102012001438A1 (de) 2012-01-26 2012-01-26 Vorrichtung und Verfahren zum Dosieren von Flüssigkeiten

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WO2013110474A1 WO2013110474A1 (fr) 2013-08-01
WO2013110474A9 true WO2013110474A9 (fr) 2013-12-12

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EP2806973B1 (fr) 2019-09-18
WO2013110474A1 (fr) 2013-08-01
DE102012001438A1 (de) 2013-08-01
EP2806973A1 (fr) 2014-12-03

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