WO2013103198A1 - Particle recovery apparatus having liquid filter part - Google Patents

Particle recovery apparatus having liquid filter part Download PDF

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Publication number
WO2013103198A1
WO2013103198A1 PCT/KR2012/010455 KR2012010455W WO2013103198A1 WO 2013103198 A1 WO2013103198 A1 WO 2013103198A1 KR 2012010455 W KR2012010455 W KR 2012010455W WO 2013103198 A1 WO2013103198 A1 WO 2013103198A1
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WO
WIPO (PCT)
Prior art keywords
liquid
unit
particles
filter unit
particle recovery
Prior art date
Application number
PCT/KR2012/010455
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French (fr)
Korean (ko)
Inventor
이상로
김윤환
김기훈
이원준
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(주)에스이피
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Publication of WO2013103198A1 publication Critical patent/WO2013103198A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
    • B01D47/021—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath by bubbling the gas through a liquid bath
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2247/00—Details relating to the separation of dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D2247/08—Means for controlling the separation process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2247/00—Details relating to the separation of dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D2247/10—Means for removing the washing fluid dispersed in the gas or vapours
    • B01D2247/107—Means for removing the washing fluid dispersed in the gas or vapours using an unstructured demister, e.g. a wire mesh demister

Definitions

  • the present invention relates to a particle recovery device having a liquid filter unit, and more particularly, to a particle recovery device that is easy to replace the filter unit, minimizes the maintenance cost, and significantly improved particle recovery rate.
  • the particle recovery device is a device for recovering the particles used during the process, and is installed in a state connected with a process chamber in which a coating process using metal or ceramic powder is typically performed.
  • the process is performed after the process chamber is processed. It is used to recover (for recycling or disposal) particles in powder form that are discharged out of the chamber.
  • Such a particle recovery device requires a configuration of a filter unit for filtering the particles to be recovered.
  • a replaceable type network filter was used as the configuration of the filter unit.
  • Particle recovery apparatus having a liquid filter unit according to an embodiment of the present invention, it is a problem to be able to replace the conventional network filter used for particle recovery.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention is to make it easy to replace the filter unit for collecting the particles.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention by using a liquid such as water (H 2 O) to recover the particles can significantly lower the maintenance cost of the particle recovery device. To make it work.
  • a liquid such as water (H 2 O)
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention, as a problem to be able to significantly improve the recovery rate of particles compared to conventional filters.
  • a particle recovery device having a liquid filter unit according to an embodiment of the present invention is to solve the problem that it is possible to remarkably improve the recovery rate of the particles by continuously forming a plurality of liquid filter unit.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention, it is a problem to be able to select the type of liquid used for the recovery of particles according to the type of particles to be recovered.
  • the liquid filter unit for receiving a liquid for filtering the particles (filtering);
  • An inlet pipe for introducing particles into the liquid in a state in which a portion of the liquid is accommodated in the liquid filter unit;
  • a recovery unit for recovering the liquid contained in the liquid filter unit;
  • a pump connection part for connecting the vacuum pump to the liquid filter part.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention, while the inside of the liquid filter unit is maintained in a vacuum through the pump connection portion, the particles are introduced into the liquid from the inlet pipe. It is done.
  • the particle recovery device having a liquid filter unit is characterized in that the pump connection portion comprises a liquid check valve or a liquid trap to prevent the liquid from being transferred to the vacuum pump.
  • the particle recovery device having a liquid filter unit is connected to the recovery unit, characterized in that it further comprises a particle extraction unit for extracting the particles from the liquid delivered through the recovery unit do.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention, the liquid filter unit, the liquid supply unit for supplying the liquid; And it characterized in that it comprises a liquid heating unit for heating the liquid.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention, the liquid filter unit, the liquid storage unit for storing a plurality of liquids; A liquid selection unit for selecting a liquid suitable for particles to be filtered out of the plurality of liquids; A liquid amount measuring unit measuring an amount of the liquid supplied therein; And a control unit for controlling the liquid supply unit, the liquid storage unit, the liquid selection unit, and the liquid amount measuring unit.
  • the particle recovery device having a liquid filter unit is characterized in that the inlet pipe includes a liquid trap or a liquid check valve for preventing the liquid from being transferred to the reverse.
  • the particle recovery device having a liquid filter unit is characterized in that the particles are powder particles having a size of 0.01 to 100 micrometers ( ⁇ m).
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention
  • the inlet pipe is characterized in that the particles are delivered from the process chamber.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention is characterized in that a plurality of the liquid filter unit is formed.
  • the liquid filter unit includes a first liquid filter unit, a second liquid filter unit and a filter connecting portion for connecting the first and second liquid filter unit
  • the inlet pipe is partially immersed in the liquid of the first liquid filter part
  • the filter connecting pipe is immersed in the liquid of the second liquid filter part without being immersed in the liquid of the first liquid filter part. It is done.
  • Particle recovery device having a liquid filter unit according to an embodiment of the present invention, it is possible to replace the conventional network filter used for particle recovery, in particular installed between the process chamber and the vacuum pump for particle recovery in the process chamber It can replace the expensive network filter.
  • the particle recovery device having a liquid filter unit can facilitate replacement of the filter unit for collecting the particles.
  • disassembly or separation of the device is not necessary as in the replacement of the conventional network filter, and the effect of replacing the filter unit may be obtained only by replacing the liquid serving as the filter.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention, by using a liquid such as water (H 2 O) rather than an expensive network filter to maintain the particle recovery device The cost can be significantly lowered.
  • a liquid such as water (H 2 O)
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention can significantly improve the recovery rate of particles compared to the conventional filters, it can exhibit an effect close to 100% recovery rate. Therefore, the particle recovery rate can be maximized, and when the particle recovery device is installed in the vacuum equipment, the pump can be completely protected by preventing the particles from being introduced into the vacuum pump during the recovery process.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention may further improve the recovery rate of particles by constituting a plurality of liquid filter units continuously.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention, since the type of the liquid used for the recovery of particles can be selected according to the type of particles to be recovered, it performs an efficient function for a variety of particles can do.
  • the particle recovery device having a liquid filter unit may further include a configuration for heating the liquid serving as a filter to prevent the occurrence of condensation.
  • FIG. 1 is a view showing the configuration of a particle recovery device having a liquid filter according to an embodiment of the present invention.
  • FIG. 2 is a view showing the configuration of a particle recovery device having a liquid filter according to another embodiment of the present invention.
  • FIG 3 is a view showing that the particle recovery device is installed in connection with the process chamber and the vacuum pump according to an embodiment of the present invention.
  • FIG. 4 is a view showing the configuration of a particle recovery device having a plurality of liquid filters according to an embodiment of the present invention.
  • FIGS. 1 to 2 a particle recovery apparatus including a liquid filter unit according to embodiments of the present invention will be described with reference to FIGS. 1 to 2.
  • a particle recovery apparatus including a liquid filter may include a liquid filter unit 100 accommodating a liquid for filtering particles, and the liquid filter unit accommodated in the liquid filter unit.
  • a liquid filter unit 100 accommodating a liquid for filtering particles
  • the liquid filter unit accommodated in the liquid filter unit In a state in which a part is submerged in the liquid, an inlet pipe 200 for introducing particles into the liquid, a recovery part 300 for recovering the liquid of the liquid filter part, and connected to the recovery part, and are transferred through the recovery part.
  • It may include a particle extraction unit 400 for extracting the particles from the liquid, the pump connection unit 510 for connecting a vacuum pump to the liquid filter unit.
  • the liquid filter unit 100 is configured to filter particles introduced from the inlet pipe 200 and is configured to accommodate a liquid 110 serving as a filter. .
  • the liquid filter unit 100 is used to filter the particles introduced by using the liquid 110, preferably serves as a filter (filter) through the action of precipitating the incoming particles in the liquid (110). Can be done.
  • the liquid 110 may be variously configured according to the type of particles to be introduced, in particular, in consideration of the solubility or specific gravity of the particles to be introduced, may be composed of a liquid 110 that can precipitate the particles. have.
  • the incoming particles are particles such as aluminum oxide (Al 2 O 3 ) or silica (silica) used in the coating process
  • the liquid (110) as water (H 2 O) having a specific gravity less than these particles. ) So that the particles can be precipitated.
  • the liquid filter unit 100 may be configured to include a liquid supply unit 120 for supplying the liquid 110, wherein the liquid The supply unit 120 is a component for supplying the liquid 110 for filtering the particles into the liquid filter unit 100. Therefore, through the liquid supply unit 120, the liquid filter unit can receive a new liquid for each new process, the effect of filter replacement is achieved by this liquid replacement operation.
  • the liquid filter unit 100 may further include a liquid heating unit 111 such as a heater for heating the liquid 110.
  • the liquid heating unit 111 may include the liquid 110. Heating serves to prevent condensation that may occur in the liquid filter unit 100. Specifically, when low temperature air or gas is introduced through the inlet pipe 200, the liquid 110 is cooled, and condensation may occur on the outer wall of the liquid filter unit 100. The heating unit 111 heats the liquid 110 to prevent such condensation.
  • the inflow pipe 200 refers to a configuration for introducing particles to be recovered into the liquid filter unit 100.
  • the inlet pipe 200 is preferably configured to be connected to the process chamber 600 (also connected to other devices), the process chamber 600 through the connection with the process chamber 600 Particles generated according to the process of) can be delivered to the liquid filter unit 100.
  • particles generated in the process of coating, deposition, etc. may be delivered to the liquid filter unit 100, preferably, the powder particles of 0.01 to 100 micrometers ( ⁇ m) size is the liquid filter unit 100 Can be delivered to.
  • the inlet pipe 200 may be preferably configured to be partially locked to the liquid 110 included in the liquid filter unit 100, and through this configuration, the liquid 110 serving as a filter. To deliver the particles directly.
  • the inlet pipe 200 may include a configuration of the liquid trap 210 or the liquid check valve 220 inside the inlet pipe 200, and through the above configuration, the liquid of the liquid filter unit 100 may be configured.
  • the liquid trap 210 blocks the movement of the liquid and passes only air and gas, and the liquid check valve 220 is To prevent backflow of the liquid).
  • the back of the liquid 110 through the liquid trap 210 made of a material for blocking the liquid check valve 220 and the liquid 110 to selectively block the inlet pipe 200
  • the liquid check valve 220 may be selectively opened and closed to prevent reverse transmission of the water.
  • the liquid trap 210 may be made of a moisture barrier material such as a network filter or a cold filter (cold trap) to secondarily block the reverse transfer of water.
  • the inlet pipe 200 may be configured in various forms in addition to the shape of Figure 1, the material of the inlet pipe 200 is not limited to a particular kind.
  • the configuration of the external connection portion is not limited as shown in the drawings, variously in a position and method easy for those skilled in the art Can be connected.
  • the recovery unit 300 is a configuration for recovering the liquid 110 of the liquid filter unit 100, and means a configuration for recovering the liquid 110 in which particles are precipitated by filtering.
  • the recovery unit 300 may be preferably configured in the form of a drain connected to the liquid filter unit 100 in the direction of gravity. Through such a configuration, the liquid may be used without a separate device or energy. The liquid 110 inside the filter unit 100 may be recovered.
  • the particle extraction unit 400 is connected to the recovery unit 300 receives the liquid 110 recovered through the recovery unit 300, and separates and extracts particles from the liquid 110 in which particles are precipitated. Means a configuration to recover.
  • the liquid 110 is water (H 2 O)
  • water may be removed by a drying process, and the particles precipitated through the drying process may be recovered and recycled.
  • the pump connection part 510 is configured to make a connection with the vacuum pump 500, and allows the vacuum pump 500 and the liquid filter part 100 to be connected to vacuum the inside of the liquid filter part 100. It is the configuration that plays the role of maintaining it.
  • the pump connection part 510 may be preferably configured to be not immersed in the liquid 110. In this state, the pump connection part 510 is connected to the vacuum pump 500 to maintain the inside of the liquid filter part 100 in a vacuum. To be possible.
  • the pump connection portion 510 may allow particles to be introduced from the inlet pipe 200 according to the pump operation of the vacuum pump 500.
  • the vacuum pump 500 is the liquid filter unit 100 As the air or gas inside the gas is sucked to form a vacuum state, the pressure of pressing the liquid 110 is lowered. Accordingly, suction force is induced in the inlet pipe 200 immersed in the liquid 110 so that the particles are introduced into the liquid ( It will flow into 110).
  • the pump connection part 510 may include a configuration of a liquid trap 520 or a liquid check valve (not shown) inside the pump connection part 510, through the configuration of the liquid filter part 100.
  • the liquid 110 may be prevented from being transferred to the vacuum pump 500 through the pump connection part 510.
  • the liquid check valve (not shown) capable of selectively blocking the pump connection part 510 and the liquid trap 520 made of a material blocking the liquid 110, the transfer of the liquid 110
  • the liquid check valve may be selectively blocked to open and close the transfer of water, and the liquid trap may be blocked.
  • 520 may be made of a moisture barrier material such as dry silica, sulfuric acid, calcium, and the like to secondarily block the transfer of water.
  • the pump connection portion 510 may be configured in various forms in addition to the embodiment of Figure 1, the formation position of the pump connection portion 510 itself may be variously configured.
  • the liquid filter unit 100 the liquid storage unit 140 for storing various types of liquid 110
  • the various types of Liquid selector 150 for selecting a liquid 110 suitable for particles to be filtered out of the liquid 110
  • a liquid amount measuring unit 132 for measuring the amount of liquid supplied into the liquid filter unit 100 and the liquid
  • the liquid storage unit 140 is configured to store a liquid 110 that can be used as a filter.
  • the liquid filter unit 100 stores various kinds of liquids 110 so that various types of liquids can be used. It may be made of a liquid (110).
  • the liquid selection unit 150 means a configuration for selecting a liquid 110 suitable for the target particles among the various types of filtering liquid 110 stored in the liquid storage unit 140, specifically, the liquid The liquid 110 suitable for filtering is selected from the storage 140, and the selected liquid 110 is transferred to the liquid supply part 120 to be supplied into the liquid filter part 100.
  • the selection of the filtering liquid 110 by the liquid selection unit 150 is determined in consideration of the solubility, specific gravity, and the like of the target particles and the liquid 110. 110). For example, when the incoming particles are particles such as aluminum oxide (Al 2 O 3 ) or silica (silica) used in the coating process, water (H 2 O) is selected as the liquid 110 to form particles. Can be precipitated.
  • the liquid amount measuring unit 132 is a component for measuring the amount of the liquid 110 supplied into the liquid filter unit 100, and may include a configuration of a visual display unit for visually providing the measured information. Can be.
  • control unit 130 is a configuration that can control the liquid supply unit, the liquid selection unit 150, the liquid storage unit 140, the liquid amount measuring unit 132, the configuration according to the selection It can be implemented in the form of a main controller for controlling them electronically, in this embodiment the configuration is controlled remotely integrated.
  • FIG. 3 looks at an example in which the particle recovery device according to an embodiment of the present invention operates.
  • Particle recovery apparatus having a liquid filter unit 100 may be installed between the process chamber 600 and the vacuum pump 500 as part of the vacuum equipment to perform the particle recovery operation.
  • the particle recovery device may be installed and operated between the process chamber 600 and the vacuum holding the finned vacuum pump 500 to perform a process such as deposition, coating, as shown in FIG.
  • the recovery device recovers particles generated during the deposition and coating processes of the process chamber 600.
  • the connection of the respective components, the inlet pipe 200 included in the particle recovery device according to an embodiment of the present invention is connected to the process chamber 600 and the inlet pipe 200 Is formed in a state submerged in the liquid 110 of the liquid filter unit 100.
  • a vacuum pump 500 is connected to the pump connection part 510 included in the particle recovery device, and the operation of the vacuum pump 500 directly affects the inside of the liquid filter part 100.
  • the air inside the liquid filter unit 100 is the vacuum pump 500.
  • the suction of the air by the vacuum pump 500 changes the inside of the liquid filter unit 100 to a vacuum and reduces the air pressure, accordingly inside the inlet pipe 200 contained in the liquid 110 Suction power is induced. Therefore, particles existing in the process chamber 600 are introduced into the liquid 110 through the inlet pipe 200, and the liquid 110 precipitates these particles to operate as a filter.
  • the particle recovery apparatus because the particles generated in the process chamber 600 is filtered through the liquid 110 can significantly increase the recovery rate of the particles.
  • the liquid 110 may be dried to recover particles close to 90 to 100%, thereby increasing the efficiency of particle recycling according to a significant increase in the recovery rate.
  • the number of particles flowing through the filter into the vacuum pump 500 may be significantly reduced to reduce the possibility of failure of the vacuum pump 500.
  • the liquid filter unit 100 may further include the liquid heating unit 111 for heating the liquid 110, and the condensation may be caused by the liquid heating unit 111. The phenomenon is prevented.
  • Particle recovery apparatus may include a plurality (two or more) of the liquid filter unit. Specifically, it may include a plurality of continuously connected liquid filter unit, it is possible to further improve the recovery rate of the particles by increasing the filterability of the particles through the plurality of liquid filter unit.
  • the particle recovery apparatus is connected to the first liquid filter unit 160, the second liquid filter unit 180 and the first, second liquid filter unit It may include a filter connecting portion 170 to.
  • the inlet pipe 200 for introducing the particles present in the process chamber 600 is connected to the first liquid filter unit 160, and preferably the inlet pipe to the liquid 162 of the first liquid filter unit. A part of the 200 may be configured to be locked.
  • the first liquid filter unit 160 and the second liquid filter unit 180 are connected through the filter connecting unit 170, the filter connecting unit 170 is the liquid 162 of the first liquid filter unit It is preferable that the liquid is immersed in the liquid 182 of the second liquid filter unit.
  • the second liquid filter unit 180 is connected to the vacuum pump 500 through the pump connection unit 510, in which the pump connection unit 510 is not immersed in the liquid 182 of the second liquid filter unit.
  • the configuration of the inlet pipe 200, the filter connecting portion 170, the pump connecting portion 510 is not limited to the embodiment of Figure 4, within the range easy to those skilled in the art. It can be configured in various forms.
  • the air of the second liquid filter unit 180 is sucked through the pump connection unit 510, the second liquid in accordance with this suction
  • suction force is induced to the filter connection unit 170.
  • the suction force induced in the filter connection unit 170 sucks the air of the first liquid filter unit 160 to change the inside of the first liquid filter unit 160 to a vacuum state, and thus the inflow.
  • Suction force is induced in the pipe (200).
  • particles are introduced from the process chamber 600 through the suction force induced in the inlet pipe 200, and the introduced particles are formed in the first liquid filter unit 160 or the second liquid filter unit 180. Filtering takes place through the process.
  • the number of the liquid filter unit that can be included in the particle recovery device according to an embodiment of the present invention is not limited to two as shown in the embodiment of Figure 4, it is also configured in the form of connecting three or more liquid filter unit continuously Can be.
  • the above-described salping, particle recovery device having a liquid filter unit according to an embodiment of the present invention can replace the conventional network filter used for particle recovery, in particular for the process of particle recovery in the process chamber 600 It is possible to replace the expensive network filter installed between the chamber 600 and the vacuum pump 500.
  • the particle recovery device having a liquid filter unit can facilitate replacement of the filter unit for collecting the particles. Specifically, it is not necessary to disassemble or separate the device as in the conventional network filter replacement, and the effect of replacing the filter unit may be obtained only by replacing the liquid serving as the filter.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention, by using a liquid such as water (H 2 O) rather than an expensive network filter to maintain the particle recovery device The cost can be significantly lowered.
  • a liquid such as water (H 2 O)
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention can significantly improve the recovery rate of particles compared to the conventional filters, it can exhibit an effect close to 100% recovery rate. Therefore, the particle recovery rate can be maximized, and when the particle recovery device is installed in the vacuum equipment, the pump can be protected by completely blocking the particles from flowing into the vacuum pump 500 during the recovery process.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention may further improve the recovery rate of particles by constituting a plurality of liquid filter units continuously.
  • the particle recovery apparatus having a liquid filter unit according to one of the present invention can select the type of liquid used for the recovery of particles according to the type of particles to be recovered, thereby performing an efficient function for various particles. Can be.
  • the particle recovery device having a liquid filter unit may further include a configuration for heating the liquid serving as a filter to prevent the occurrence of condensation.
  • liquid filter unit 110 liquid
  • liquid heating part 120 liquid supply part
  • control unit 132 liquid amount measurement unit
  • liquid storage unit 150 liquid selection unit
  • first liquid filter unit 162 liquid of the first liquid filter unit
  • filter connection 171 liquid trap

Abstract

The present invention relates to a particle recovery apparatus having a liquid filter part. The particle recovery apparatus according to the present invention includes: a liquid filter part receiving liquid for filtering particles; an inflow tube introducing the particles into the liquid in a state where a portion of the inflow tube is immersed within the liquid contained in the liquid filter part; a recovery part recovering the liquid contained in the liquid filter part; and a pump connection part connecting a vacuum pump to the liquid filter part.

Description

액체필터부를 구비한 입자회수장치Particle recovery device with liquid filter
본 발명은 액체필터부를 구비한 입자회수장치에 관한 것으로서, 더욱 상세하게는 필터부의 교체가 용이하고, 유지비용이 최소화되며, 입자 회수율도 현저하게 향상된 입자회수장치에 관한 것이다. The present invention relates to a particle recovery device having a liquid filter unit, and more particularly, to a particle recovery device that is easy to replace the filter unit, minimizes the maintenance cost, and significantly improved particle recovery rate.
입자회수장치란 공정 중에 사용된 입자를 회수하기 위한 장치로서, 대표적으로 금속이나 세라믹 분말을 사용하는 코팅 공정이 수행되는 공정챔버와 연결된 상태로 설치되며, 바람직하게는 공정챔버의 공정이 진행된 뒤에 공정챔버 밖으로 배출되는 분말 형태의 입자들을 회수(재활용 혹은 처분을 위해)하기 위해 사용된다. The particle recovery device is a device for recovering the particles used during the process, and is installed in a state connected with a process chamber in which a coating process using metal or ceramic powder is typically performed. Preferably, the process is performed after the process chamber is processed. It is used to recover (for recycling or disposal) particles in powder form that are discharged out of the chamber.
따라서 이러한 입자회수장치에는 회수할 입자를 필터링(filter)하기 위한 필터부의 구성이 필요한데, 종래에는 이러한 필터부의 구성으로서 교체 가능한 형태의 망 필터가 사용되었다. Therefore, such a particle recovery device requires a configuration of a filter unit for filtering the particles to be recovered. In the past, a replaceable type network filter was used as the configuration of the filter unit.
하지만, 이러한 종래의 망 필터는 지속적인 필터의 교체가 필요하여 장치의 유지 관리를 어렵게 하는 요인으로 작용하였으며, 망 필터 자체의 비용도 비교적 고가여서 입자회수장치의 유지에 많은 비용이 소모되었다. 또한, 망 필터를 통한 입자의 회수율 자체도 10 내지 20% 수준에 머물러서, 효율적인 입자회수 기능을 제공하지 못한다는 문제점도 있었다. However, such a conventional network filter needs to be replaced by a continuous filter, making it difficult to maintain the device. The cost of the network filter itself is also relatively high, and a large amount of cost is required to maintain the particle recovery system. In addition, the recovery rate of particles through the network filter itself is also at the level of 10 to 20%, there was also a problem that does not provide an efficient particle recovery function.
따라서, 입자회수장치 분야에 있어서, 교체가 용이하고, 유지비용이 최소화되며, 입자 회수율도 현저하게 향상된 필터부의 개발이 요구되고 있다. Therefore, in the field of particle recovery apparatus, there is a demand for the development of a filter part which is easy to replace, minimizes maintenance costs, and has remarkably improved particle recovery rate.
본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 입자회수를 위해 사용되던 종래의 망 필터를 대체할 수 있게 하는 것을 해결과제로 한다. Particle recovery apparatus having a liquid filter unit according to an embodiment of the present invention, it is a problem to be able to replace the conventional network filter used for particle recovery.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 입자를 회수하는 필터부의 교체를 용이하게 할 수 있게 하는 것을 해결과제로 한다.In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention is to make it easy to replace the filter unit for collecting the particles.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 물(H2O) 등의 액체를 사용하여 입자를 회수할 수 있도록 하여 입자회수장치의 유지비용을 현저하게 낮출 수 있게 하는 것을 해결과제로 한다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention, by using a liquid such as water (H 2 O) to recover the particles can significantly lower the maintenance cost of the particle recovery device. To make it work.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 종래의 필터들에 비해 입자의 회수율을 현저하게 향상시킬 수 있게 하는 것을 해결과제로 한다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention, as a problem to be able to significantly improve the recovery rate of particles compared to conventional filters.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 복수 개의 액체필터부를 연속적으로 구성하여 입자의 회수율을 현저하게 향상시킬 수 있게 하는 것을 해결과제로 한다. In addition, a particle recovery device having a liquid filter unit according to an embodiment of the present invention is to solve the problem that it is possible to remarkably improve the recovery rate of the particles by continuously forming a plurality of liquid filter unit.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 입자의 회수에 사용되는 액체의 종류를 회수 대상 입자의 종류에 따라 선택할 수 있게 하는 것을 해결과제로 한다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention, it is a problem to be able to select the type of liquid used for the recovery of particles according to the type of particles to be recovered.
상기와 같은 과제를 해결하기 위한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 입자를 필터링(filtering) 하기 위한 액체를 수용하는 액체필터부; 상기 액체필터부에 수용되는 액체에 일부분이 잠긴 상태에서, 상기 액체 내부에 입자를 유입시키기 위한 유입관; 상기 액체필터부에 수용되는 액체를 회수하기 위한 회수부; 및 상기 액체필터부에 진공펌프를 연결하기 위한 펌프연결부를 포함하는 것을 특징으로 한다. Particle recovery apparatus provided with a liquid filter unit according to an embodiment of the present invention for solving the above problems, the liquid filter unit for receiving a liquid for filtering the particles (filtering); An inlet pipe for introducing particles into the liquid in a state in which a portion of the liquid is accommodated in the liquid filter unit; A recovery unit for recovering the liquid contained in the liquid filter unit; And a pump connection part for connecting the vacuum pump to the liquid filter part.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 상기 펌프연결부를 통해 상기 액체필터부 내부가 진공으로 유지되면서, 상기 유입관으로부터 상기 액체에 상기 입자가 유입되는 것을 특징으로 한다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention, while the inside of the liquid filter unit is maintained in a vacuum through the pump connection portion, the particles are introduced into the liquid from the inlet pipe. It is done.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 상기 펌프연결부가 상기 액체가 상기 진공펌프로 전달되는 것을 방지하는 액체체크밸브 또는 액체트랩을 포함하는 것을 특징으로 한다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention is characterized in that the pump connection portion comprises a liquid check valve or a liquid trap to prevent the liquid from being transferred to the vacuum pump.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 상기 회수부와 연결되며, 상기 회수부를 통해 전달된 상기 액체로부터 상기 입자를 추출하는 입자추출부를 더 포함하는 것을 특징으로 한다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention, is connected to the recovery unit, characterized in that it further comprises a particle extraction unit for extracting the particles from the liquid delivered through the recovery unit do.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 상기 액체필터부가, 상기 액체를 공급하는 액체공급부; 및 상기 액체를 가열하는 액체가열부를 포함하는 것을 특징으로 한다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention, the liquid filter unit, the liquid supply unit for supplying the liquid; And it characterized in that it comprises a liquid heating unit for heating the liquid.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 상기 액체필터부가, 복수 개의 액체를 저장하고 있는 액체저장부; 상기 복수 개의 액체 중 필터링할 입자에 적합한 액체를 선택하는 액체선택부; 내부에 공급된 액체량을 측정하는 액체량측정부; 및 상기 액체공급부, 상기 액체저장부, 상기 액체선택부, 상기 액체량측정부를 제어하는 제어부를 더 포함하는 것을 특징으로 한다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention, the liquid filter unit, the liquid storage unit for storing a plurality of liquids; A liquid selection unit for selecting a liquid suitable for particles to be filtered out of the plurality of liquids; A liquid amount measuring unit measuring an amount of the liquid supplied therein; And a control unit for controlling the liquid supply unit, the liquid storage unit, the liquid selection unit, and the liquid amount measuring unit.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 상기 유입관이 상기 액체가 역으로 전달되는 것을 방지하는 액체트랩 또는 액체체크밸브를 포함하는 것을 특징으로 한다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention is characterized in that the inlet pipe includes a liquid trap or a liquid check valve for preventing the liquid from being transferred to the reverse.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 상기 입자가 0.01 내지 100 마이크로미터(μm) 크기의 분말입자인 것을 특징으로 한다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention is characterized in that the particles are powder particles having a size of 0.01 to 100 micrometers (μm).
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 상기 유입관이 공정챔버로부터 전달되는 입자를 유입시키는 것을 특징으로 한다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention, the inlet pipe is characterized in that the particles are delivered from the process chamber.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 상기 액체필터부가 복수 개로 형성되는 것을 특징으로 한다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention is characterized in that a plurality of the liquid filter unit is formed.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 상기 액체필터부가 제1액체필터부, 제2액체필터부 및 상기 제1, 2액체필터부를 연결시키는 필터연결부를 포함하고, 상기 유입관은 상기 제1액체필터부의 액체에 일부분이 잠기며, 상기 필터연결관은 상기 제1액체필터부의 액체에는 잠기지 않고, 상기 제2액체필터부의 액체에는 잠긴 상태로 구성되는 것을 특징으로 한다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention, the liquid filter unit includes a first liquid filter unit, a second liquid filter unit and a filter connecting portion for connecting the first and second liquid filter unit And the inlet pipe is partially immersed in the liquid of the first liquid filter part, and the filter connecting pipe is immersed in the liquid of the second liquid filter part without being immersed in the liquid of the first liquid filter part. It is done.
본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 입자회수를 위해 사용되던 종래의 망 필터를 대체할 수 있는데, 특히 공정챔버 내의 입자회수를 위해 공정챔버와 진공펌프 사이에 설치되던 고가의 망 필터를 대체할 수 있다. Particle recovery device having a liquid filter unit according to an embodiment of the present invention, it is possible to replace the conventional network filter used for particle recovery, in particular installed between the process chamber and the vacuum pump for particle recovery in the process chamber It can replace the expensive network filter.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 입자를 회수하는 필터부의 교체를 용이하게 할 수 있다. 구체적으로 종래의 망 필터의 교체와 같이 장치의 분해나 분리가 필요하지 않으며, 필터의 역할을 하는 액체의 교체만으로 필터부 교체의 효과를 얻을 수 있다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention can facilitate replacement of the filter unit for collecting the particles. Specifically, disassembly or separation of the device is not necessary as in the replacement of the conventional network filter, and the effect of replacing the filter unit may be obtained only by replacing the liquid serving as the filter.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 고가의 망 필터가 아닌 물(H2O) 등의 액체를 사용하여 입자를 회수할 수 있도록 하여 입자회수장치의 유지비용을 현저하게 낮출 수 있다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention, by using a liquid such as water (H 2 O) rather than an expensive network filter to maintain the particle recovery device The cost can be significantly lowered.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 종래의 필터들에 비해 입자의 회수율을 현저하게 향상시킬 수 있으며, 회수율 100%에 가까운 효과를 발휘할 수 있다. 따라서, 입자 회수율을 극대화시킬 수 있으며, 상기 입자회수장치가 진공장비에 설치되는 경우에는, 회수 과정에서 입자가 진공펌프 속으로 유입되는 것을 완전하게 차단하여 펌프를 보호할 수 있다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention can significantly improve the recovery rate of particles compared to the conventional filters, it can exhibit an effect close to 100% recovery rate. Therefore, the particle recovery rate can be maximized, and when the particle recovery device is installed in the vacuum equipment, the pump can be completely protected by preventing the particles from being introduced into the vacuum pump during the recovery process.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 복수 개의 액체필터부를 연속적으로 구성하여 입자의 회수율을 더욱 현저하게 향상시킬 수도 있다.In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention may further improve the recovery rate of particles by constituting a plurality of liquid filter units continuously.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 입자의 회수에 사용되는 액체의 종류를 회수 대상 입자의 종류에 따라 선택할 수 있으므로, 다양한 입자들에 대해서 효율적인 기능을 수행할 수 있다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention, since the type of the liquid used for the recovery of particles can be selected according to the type of particles to be recovered, it performs an efficient function for a variety of particles can do.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 필터 역할을 하는 액체를 가열시키는 구성을 더 포함하여 결로현상 발생을 방지할 수 있다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention may further include a configuration for heating the liquid serving as a filter to prevent the occurrence of condensation.
도 1 은 본 발명의 일 실시예에 따른 액체필터를 구비한 입자회수장치의 구성을 나타내는 도면이다.1 is a view showing the configuration of a particle recovery device having a liquid filter according to an embodiment of the present invention.
도 2는 본 발명의 다른 실시예에 따른 액체필터를 구비한 입자회수장치의 구성을 나타내는 도면이다. 2 is a view showing the configuration of a particle recovery device having a liquid filter according to another embodiment of the present invention.
도 3은 본 발명의 일 실시예에 따른 입자회수장치가 공정챔버 및 진공펌프와 연결되어 설치된 것을 나타내는 도면이다. 3 is a view showing that the particle recovery device is installed in connection with the process chamber and the vacuum pump according to an embodiment of the present invention.
도 4는 본 발명의 일 실시예에 따른 복수 개의 액체필터부가 구비된 입자회수장치의 구성을 나타내는 도면이다. 4 is a view showing the configuration of a particle recovery device having a plurality of liquid filters according to an embodiment of the present invention.
이하, 첨부된 도면들을 참조하여 본 발명의 일 실시예에 따른 액체필터를 구비한 입자회수장치를 설명한다. 설명하는 실시 예들은 본 발명의 기술 사상을 당업자가 용이하게 이해할 수 있도록 제공되는 것으로 이에 의해 본 발명이 한정되지 않는다. 또한, 첨부된 도면에 표현된 사항들은 본 발명의 실시 예들을 쉽게 설명하기 위해 도식화된 도면으로 실제로 구현되는 형태와 상이할 수 있다.Hereinafter, a particle recovery apparatus having a liquid filter according to an embodiment of the present invention will be described with reference to the accompanying drawings. The described embodiments are provided to enable those skilled in the art to easily understand the technical spirit of the present invention, and the present invention is not limited thereto. In addition, matters represented in the accompanying drawings may be different from the form actually embodied in the schematic drawings in order to easily explain the embodiments of the present invention.
이하, 도 1 내지 도 2를 참조하여 본 발명의 실시예들에 따른 액체필터부를 구비한 입자회수장치를 설명한다. Hereinafter, a particle recovery apparatus including a liquid filter unit according to embodiments of the present invention will be described with reference to FIGS. 1 to 2.
도 1을 참조하면, 본 발명의 일 실시예에 따른 액체필터를 구비한 입자회수장치는, 입자를 필터링(filtering) 하기 위한 액체를 수용하는 액체필터부(100), 상기 액체필터부에 수용되는 액체에 일부분이 잠긴 상태에서, 상기 액체 내부에 입자를 유입시키기 위한 유입관(200), 상기 액체필터부의 액체를 회수하기 위한 회수부(300), 상기 회수부와 연결되며, 상기 회수부를 통해 전달된 상기 액체로부터 상기 입자를 추출하는 입자추출부(400), 상기 액체필터부에 진공펌프를 연결하기 위한 펌프연결부(510)를 포함할 수 있다. Referring to FIG. 1, a particle recovery apparatus including a liquid filter according to an embodiment of the present invention may include a liquid filter unit 100 accommodating a liquid for filtering particles, and the liquid filter unit accommodated in the liquid filter unit. In a state in which a part is submerged in the liquid, an inlet pipe 200 for introducing particles into the liquid, a recovery part 300 for recovering the liquid of the liquid filter part, and connected to the recovery part, and are transferred through the recovery part. It may include a particle extraction unit 400 for extracting the particles from the liquid, the pump connection unit 510 for connecting a vacuum pump to the liquid filter unit.
상기 액체필터부(100)는, 상기 유입관(200)으로부터 유입되는 입자를 필터링(filtering)하기 위한 구성이며, 필터(filter) 역할을 수행하는 액체(110)를 수용할 수 있는 형태로 구성된다. The liquid filter unit 100 is configured to filter particles introduced from the inlet pipe 200 and is configured to accommodate a liquid 110 serving as a filter. .
이러한 상기 액체필터부(100)는 상기 액체(110)를 사용하여 유입되는 입자를 필터링하게 되는데, 바람직하게는 유입되는 입자를 상기 액체(110)에 침전시키는 작용을 통해 필터(filter)로서의 역할을 수행할 수 있다. The liquid filter unit 100 is used to filter the particles introduced by using the liquid 110, preferably serves as a filter (filter) through the action of precipitating the incoming particles in the liquid (110). Can be done.
또한, 상기 액체(110)는 유입되는 입자의 종류에 따라 다양하게 구성될 수 있는데, 구체적으로 유입되는 입자의 용해도나 비중을 고려하여, 해당 입자를 침전시킬 수 있는 액체(110)로 구성될 수 있다. 예를 들어, 유입되는 입자가 코팅 공정에 사용되는 산화알루미늄(Al2O3)이나 실리카(silica) 등의 입자라고 할 때, 이들 입자보다 비중이 적은 물(H2O)로서 상기 액체(110)를 구성하여 입자들이 침전될 수 있도록 구성할 수 있다. In addition, the liquid 110 may be variously configured according to the type of particles to be introduced, in particular, in consideration of the solubility or specific gravity of the particles to be introduced, may be composed of a liquid 110 that can precipitate the particles. have. For example, when the incoming particles are particles such as aluminum oxide (Al 2 O 3 ) or silica (silica) used in the coating process, the liquid (110) as water (H 2 O) having a specific gravity less than these particles. ) So that the particles can be precipitated.
한편, 상기 액체필터부(100)의 구성을 좀 더 상세하게 살펴보면, 상기 액체필터부(100)는 상기 액체(110)를 공급하는 액체공급부(120)를 포함하여 구성될 수 있는데, 여기서 상기 액체공급부(120)는 입자의 필터링을 위한 상기 액체(110)를 상기 액체필터부(100) 내부에 공급하기 위한 구성이다. 따라서, 이러한 액체공급부(120)를 통해 상기 액체필터부는 새로운 공정마다 새로운 액체를 수용할 수 있으며, 이러한 액체 교체 동작에 의해 필터 교체의 효과가 달성된다. On the other hand, looking at the configuration of the liquid filter unit 100 in more detail, the liquid filter unit 100 may be configured to include a liquid supply unit 120 for supplying the liquid 110, wherein the liquid The supply unit 120 is a component for supplying the liquid 110 for filtering the particles into the liquid filter unit 100. Therefore, through the liquid supply unit 120, the liquid filter unit can receive a new liquid for each new process, the effect of filter replacement is achieved by this liquid replacement operation.
또한, 상기 액체필터부(100)는, 상기 액체(110)를 가열하기 위한 히터 등의 액체가열부(111)를 더 포함할 수 있는데, 이러한 상기 액체가열부(111)는 상기 액체(110) 가열시켜 상기 액체필터부(100)에 발생할 수 있는 결로현상을 방지하는 역할을 수행한다. 구체적으로, 상기 유입관(200)을 통해 저온의 공기나 가스가 유입되는 경우에 상기 액체(110)가 냉각되어 상기 액체필터부(100)의 외벽에 결로현상이 발생될 수 있는데, 이러한 상기 액체가열부(111)가 상기 액체(110)를 가열하여 이러한 결로현상을 방지하게 된다. In addition, the liquid filter unit 100 may further include a liquid heating unit 111 such as a heater for heating the liquid 110. The liquid heating unit 111 may include the liquid 110. Heating serves to prevent condensation that may occur in the liquid filter unit 100. Specifically, when low temperature air or gas is introduced through the inlet pipe 200, the liquid 110 is cooled, and condensation may occur on the outer wall of the liquid filter unit 100. The heating unit 111 heats the liquid 110 to prevent such condensation.
상기 유입관(200)은, 상기 액체필터부(100) 내부에 회수할 입자를 유입시키는 구성을 의미한다. The inflow pipe 200 refers to a configuration for introducing particles to be recovered into the liquid filter unit 100.
여기서 상기 유입관(200)은, 바람직하게는 공정챔버(600)와 연결(다른 장치들과의 연결도 가능하다)될 수 있도록 구성되는데, 이러한 공정챔버(600)와의 연결을 통해 공정챔버(600)의 공정에 따라 발생되는 입자들을 상기 액체필터부(100)에 전달할 수 있게 된다. 구체적으로, 코팅, 증착 등의 공정에서 발생되는 입자들이 상기 액체필터부(100)에 전달될 수 있으며, 바람직하게는 0.01 내지 100 마이크로미터(μm) 크기의 분말입자들이 상기 액체필터부(100)에 전달될 수 있다. In this case, the inlet pipe 200 is preferably configured to be connected to the process chamber 600 (also connected to other devices), the process chamber 600 through the connection with the process chamber 600 Particles generated according to the process of) can be delivered to the liquid filter unit 100. Specifically, particles generated in the process of coating, deposition, etc. may be delivered to the liquid filter unit 100, preferably, the powder particles of 0.01 to 100 micrometers (μm) size is the liquid filter unit 100 Can be delivered to.
또한, 상기 유입관(200)은 바람직하게는 상기 액체필터부(100)가 포함하는 상기 액체(110)에 일부분이 잠긴 상태로 구성될 수 있는데, 이러한 구성을 통해 필터 역할을 하는 상기 액체(110)에 직접적으로 입자들을 전달할 수 있게 된다. In addition, the inlet pipe 200 may be preferably configured to be partially locked to the liquid 110 included in the liquid filter unit 100, and through this configuration, the liquid 110 serving as a filter. To deliver the particles directly.
그리고, 상기 유입관(200)은 상기 유입관(200) 내부에 액체트랩(210) 또는 액체체크밸브(220)의 구성을 포함할 수 있는데, 이러한 구성들을 통해 상기 액체필터부(100)의 액체(110)가 상기 유입관(200)을 통해 외부로 전달되는 것을 방지(참고로, 상기 액체트랩(210)는 액체의 이동을 차단하고 공기와 가스만을 통과시키며, 상기 액체체크밸브(220)는 액체가 역류하는 것을 방지하는 역할을 한다)할 수 있다. 구체적으로 상기 유입관(200)을 선택적으로 차단시킬 수 있는 상기 액체체크밸브(220)와 상기 액체(110)를 차단시키는 물질로 구성된 액체트랩(210)을 통해, 상기 액체(110)의 역 전달을 이중으로 차단할 수 있는데, 한가지 예로 상기 액체(110)가 물(H2O)인 경우를 살펴보면, 상기 액체체크밸브(220) 선택적인 개폐를 통해 상기 물의 역 전달을 1차적으로 저지할 수 있으며, 상기 액체트랩(210)을 망 필터 또는 저온 필터(Cold Trap) 등의 수분차단물질로 구성하여 상기 물의 역 전달을 2차적으로 차단할 수 있다. In addition, the inlet pipe 200 may include a configuration of the liquid trap 210 or the liquid check valve 220 inside the inlet pipe 200, and through the above configuration, the liquid of the liquid filter unit 100 may be configured. Prevent the 110 from being transmitted to the outside through the inlet pipe 200 (for reference, the liquid trap 210 blocks the movement of the liquid and passes only air and gas, and the liquid check valve 220 is To prevent backflow of the liquid). Specifically, the back of the liquid 110 through the liquid trap 210 made of a material for blocking the liquid check valve 220 and the liquid 110 to selectively block the inlet pipe 200 As an example, if the liquid 110 is water (H 2 O), the liquid check valve 220 may be selectively opened and closed to prevent reverse transmission of the water. In addition, the liquid trap 210 may be made of a moisture barrier material such as a network filter or a cold filter (cold trap) to secondarily block the reverse transfer of water.
한편, 상기 유입관(200)은 도 1의 형상 이외에도 다양한 형태로 구성될 수 있으며, 상기 유입관(200)의 재질도 특별한 종류로 한정되지 않는다. 또한, 상기 유입관(200)이 공정챔버(600) 등의 다른 장치와 연결되는 경우에도, 이러한 외부 연결 부분의 구성이 도면들처럼 한정되지 않으며, 통상의 기술자에게 용이한 위치와 방법으로 다양하게 연결될 수 있다. On the other hand, the inlet pipe 200 may be configured in various forms in addition to the shape of Figure 1, the material of the inlet pipe 200 is not limited to a particular kind. In addition, even when the inlet pipe 200 is connected to other devices such as the process chamber 600, the configuration of the external connection portion is not limited as shown in the drawings, variously in a position and method easy for those skilled in the art Can be connected.
상기 회수부(300)는, 상기 액체필터부(100)의 액체(110)를 회수하기 위한 구성으로서, 필터링에 의해 입자들이 침전되어 있는 액체(110)를 회수하는 구성을 의미한다. The recovery unit 300 is a configuration for recovering the liquid 110 of the liquid filter unit 100, and means a configuration for recovering the liquid 110 in which particles are precipitated by filtering.
이러한 상기 회수부(300)는 바람직하게는 상기 액체필터부(100)와 중력방향으로 연결된 배수구(drain)의 형태로 구성될 수 있는데, 이러한 구성을 통해 별도의 장치나 에너지를 사용하지 않고도 상기 액체필터부(100) 내부의 액체(110)를 회수할 수 있다. The recovery unit 300 may be preferably configured in the form of a drain connected to the liquid filter unit 100 in the direction of gravity. Through such a configuration, the liquid may be used without a separate device or energy. The liquid 110 inside the filter unit 100 may be recovered.
상기 입자추출부(400)는, 상기 회수부(300)와 연결되어 상기 회수부(300)를 통해 회수된 액체(110)를 전달받으며, 입자들이 침전되어 있는 액체(110)에서 입자를 분리 추출하여 회수하는 구성을 의미한다. The particle extraction unit 400 is connected to the recovery unit 300 receives the liquid 110 recovered through the recovery unit 300, and separates and extracts particles from the liquid 110 in which particles are precipitated. Means a configuration to recover.
한가지 예로 상기 액체(110)가 물(H2O)인 경우를 살펴보면, 건조과정에 의해 수분을 제거할 수 있으며, 이러한 건조과정을 통해 침전되어 있는 입자들을 다시 회수하여 재활용할 수 있다. As an example, when the liquid 110 is water (H 2 O), water may be removed by a drying process, and the particles precipitated through the drying process may be recovered and recycled.
상기 펌프연결부(510)는, 진공펌프(500)와 연결을 이루기 위한 구성으로서, 상기 진공펌프(500)와 상기 액체필터부(100)가 연결될 수 있도록 하여 상기 액체필터부(100) 내부를 진공으로 유지시키는 역할을 하는 구성이다. The pump connection part 510 is configured to make a connection with the vacuum pump 500, and allows the vacuum pump 500 and the liquid filter part 100 to be connected to vacuum the inside of the liquid filter part 100. It is the configuration that plays the role of maintaining it.
이러한 상기 펌프연결부(510)는 바람직하게는 상기 액체(110)에 잠기지 않는 상태로 구성될 수 있는데, 이러한 상태로 상기 진공펌프(500)와 연결되어서 상기 액체필터부(100) 내부가 진공으로 유지될 수 있게 한다. 또한, 상기 펌프연결부(510)는 상기 진공펌프(500)의 펌프 동작에 따라 상기 유입관(200)으로부터 입자들이 유입되도록 할 수 있는데, 구체적으로 상기 진공펌프(500)가 상기 액체필터부(100) 내부의 공기 또는 가스를 흡입하여 진공상태를 형성함에 따라 액체(110)를 누르는 기압이 낮아지고, 이에 따라 상기 액체(110)에 잠긴 유입관(200)에 흡입력이 유도되어 입자들이 상기 액체(110)속으로 유입되게 된다. The pump connection part 510 may be preferably configured to be not immersed in the liquid 110. In this state, the pump connection part 510 is connected to the vacuum pump 500 to maintain the inside of the liquid filter part 100 in a vacuum. To be possible. In addition, the pump connection portion 510 may allow particles to be introduced from the inlet pipe 200 according to the pump operation of the vacuum pump 500. Specifically, the vacuum pump 500 is the liquid filter unit 100 As the air or gas inside the gas is sucked to form a vacuum state, the pressure of pressing the liquid 110 is lowered. Accordingly, suction force is induced in the inlet pipe 200 immersed in the liquid 110 so that the particles are introduced into the liquid ( It will flow into 110).
그리고, 상기 펌프연결부(510)는 상기 펌프연결부(510) 내부에 액체트랩(520) 또는 액체체크밸브(미도시)의 구성을 포함할 수 있는데, 이러한 구성들을 통해 상기 액체필터부(100)의 액체(110)가 상기 펌프연결부(510)를 통해 진공펌프(500)로 전달되는 것을 방지할 수 있다. 구체적으로 상기 펌프연결부(510)를 선택적으로 차단시킬 수 있는 상기 액체체크밸브(미도시)와 상기 액체(110)를 차단시키는 물질로 구성된 액체트랩(520)을 통해, 상기 액체(110)의 전달을 이중으로 차단할 수 있는데, 한가지 예로 상기 액체(110)가 물(H2O)인 경우를 살펴보면, 상기 액체체크밸브 선택적인 개폐를 통해 상기 물의 전달을 1차적으로 저지할 수 있으며, 상기 액체트랩(520)을 드라이 실리카, 황산, 칼슘 등의 수분차단물질로 구성하여 상기 물의 전달을 2차적으로 차단할 수 있다. In addition, the pump connection part 510 may include a configuration of a liquid trap 520 or a liquid check valve (not shown) inside the pump connection part 510, through the configuration of the liquid filter part 100. The liquid 110 may be prevented from being transferred to the vacuum pump 500 through the pump connection part 510. Specifically, the liquid check valve (not shown) capable of selectively blocking the pump connection part 510 and the liquid trap 520 made of a material blocking the liquid 110, the transfer of the liquid 110 As an example, when the liquid 110 is water (H 2 O), the liquid check valve may be selectively blocked to open and close the transfer of water, and the liquid trap may be blocked. 520 may be made of a moisture barrier material such as dry silica, sulfuric acid, calcium, and the like to secondarily block the transfer of water.
한편, 상기 펌프연결부(510)는 도 1의 실시예 이외에도 다양한 형태로 구성될 수 있으며, 상기 펌프연결부(510)의 형성위치 자체도 다양하게 구성될 수 있다. On the other hand, the pump connection portion 510 may be configured in various forms in addition to the embodiment of Figure 1, the formation position of the pump connection portion 510 itself may be variously configured.
도 2를 참조하여 본 발명의 다른 실시예에 따른 입자회수장치를 살펴보면, 상기 액체필터부(100)는, 여러 종류의 액체(110)를 저장하고 있는 액체저장부(140), 상기 여러 종류의 액체(110) 중 필터링할 입자에 적합한 액체(110)를 선택하는 액체선택부(150), 상기 액체필터부(100) 내부에 공급된 액체량을 측정하는 액체량측정부(132) 및 상기 액체공급부(120), 상기 액체저장부(140), 상기 액체선택부(150), 상기 액체측정부를 제어할 수 있는 제어부(130)를 더 포함할 수 있다. Referring to the particle recovery apparatus according to another embodiment of the present invention with reference to FIG. 2, the liquid filter unit 100, the liquid storage unit 140 for storing various types of liquid 110, the various types of Liquid selector 150 for selecting a liquid 110 suitable for particles to be filtered out of the liquid 110, a liquid amount measuring unit 132 for measuring the amount of liquid supplied into the liquid filter unit 100 and the liquid The supply unit 120, the liquid storage unit 140, the liquid selection unit 150, and may further include a control unit 130 for controlling the liquid measuring unit.
여기서 상기 액체저장부(140)는, 필터로서 사용될 수 있는 액체(110)를 저장하고 있는 구성인데, 바람직하게는 여러 종류의 액체(110)를 저장하여 상기 액체필터부(100)가 다양한 종류의 액체(110)로 구성될 수 있도록 할 수 있다. Here, the liquid storage unit 140 is configured to store a liquid 110 that can be used as a filter. Preferably, the liquid filter unit 100 stores various kinds of liquids 110 so that various types of liquids can be used. It may be made of a liquid (110).
또한, 상기 액체선택부(150)는, 상기 액체저장부(140)에 저장된 여러 종류의 필터링용 액체(110) 중에 대상 입자에 적합한 액체(110)를 선택하는 구성을 의미하는데, 구체적으로 상기 액체저장부(140)로부터 필터링에 적합한 액체(110)를 선택하며, 선택된 액체(110)를 상기 액체공급부(120)로 전달하여 상기 액체필터부(100) 내부에 공급될 수 있도록 한다. 이러한 상기 액체선택부(150)에 의한 필터링용 액체(110)의 선택은, 대상 입자와 액체(110)의 용해도, 비중 등을 고려하여 결정되는데, 바람직하게는 대상 입자가 침전될 수 있는 액체(110)로 선택될 수 있다. 예를 들어, 유입되는 입자가 코팅 공정에 사용되는 산화알루미늄(Al2O3)이나 실리카(silica) 등의 입자라고 할 때, 상기 액체(110)로서 물(H2O)을 선택하여 입자들이 침전시킬 수 있다. In addition, the liquid selection unit 150 means a configuration for selecting a liquid 110 suitable for the target particles among the various types of filtering liquid 110 stored in the liquid storage unit 140, specifically, the liquid The liquid 110 suitable for filtering is selected from the storage 140, and the selected liquid 110 is transferred to the liquid supply part 120 to be supplied into the liquid filter part 100. The selection of the filtering liquid 110 by the liquid selection unit 150 is determined in consideration of the solubility, specific gravity, and the like of the target particles and the liquid 110. 110). For example, when the incoming particles are particles such as aluminum oxide (Al 2 O 3 ) or silica (silica) used in the coating process, water (H 2 O) is selected as the liquid 110 to form particles. Can be precipitated.
그리고, 상기 액체량측정부(132)는 상기 액체필터부(100) 내부에 공급되는 액체(110)의 양을 측정하기 위한 구성인데, 측정한 정보를 시각적으로 제공하는 시각표시부의 구성을 포함할 수 있다. In addition, the liquid amount measuring unit 132 is a component for measuring the amount of the liquid 110 supplied into the liquid filter unit 100, and may include a configuration of a visual display unit for visually providing the measured information. Can be.
마지막으로, 상기 제어부(130)는 상기 액체공급부, 상기 액체선택부(150), 상기 액체저장부(140), 상기 액체량측정부(132)를 제어할 수 있는 구성으로서, 선택에 따라 상기 구성들을 전자적으로 제어하는 메인컨트롤러의 형태로 구현될 수 있으며, 이러한 실시예상에서는 상기 구성들을 원격에서 통합적으로 제어하게 된다. Finally, the control unit 130 is a configuration that can control the liquid supply unit, the liquid selection unit 150, the liquid storage unit 140, the liquid amount measuring unit 132, the configuration according to the selection It can be implemented in the form of a main controller for controlling them electronically, in this embodiment the configuration is controlled remotely integrated.
이하, 도 3을 참조하여, 본 발명의 일 실시예에 따른 입자회수장치가 동작하는 예를 살펴본다.Hereinafter, with reference to FIG. 3, looks at an example in which the particle recovery device according to an embodiment of the present invention operates.
본 발명의 일 실시예에 따른 액체필터부(100)를 구비한 입자회수장치는 진공장비의 일부로서 공정챔버(600)와 진공펌프(500) 사이에 설치되어 입자회수 동작을 수행할 수 있다. 구체적으로 상기 입자회수장치는 도 3과 같이 증착, 코팅 등의 공정을 수행하는 공정챔버(600)와 진공유지를 유한 진공펌프(500) 사이에 설치되어 동작할 수 있는데, 이러한 구성에 의해 상기 입자회수장치는 상기 공정챔버(600)의 증착, 코팅 공정 중에서 생긴 입자들을 회수하게 된다. Particle recovery apparatus having a liquid filter unit 100 according to an embodiment of the present invention may be installed between the process chamber 600 and the vacuum pump 500 as part of the vacuum equipment to perform the particle recovery operation. Specifically, the particle recovery device may be installed and operated between the process chamber 600 and the vacuum holding the finned vacuum pump 500 to perform a process such as deposition, coating, as shown in FIG. The recovery device recovers particles generated during the deposition and coating processes of the process chamber 600.
먼저, 도 3을 참조하여 각 구성들의 연결을 검토하면, 본 발명의 일 실시예에 따른 입자회수장치가 포함하는 유입관(200)은 공정챔버(600)와 연결되어 있고 상기 유입관(200)은 액체필터부(100)의 액체(110)에 잠긴 상태로 형성된다. 또한, 상기 입자회수장치가 포함하는 펌프연결부(510)에는 진공펌프(500)가 연결되어 있으며, 이러한 상기 진공펌프(500)의 동작이 상기 액체필터부(100) 내부에 직접 영향을 미치게 된다. First, referring to FIG. 3, the connection of the respective components, the inlet pipe 200 included in the particle recovery device according to an embodiment of the present invention is connected to the process chamber 600 and the inlet pipe 200 Is formed in a state submerged in the liquid 110 of the liquid filter unit 100. In addition, a vacuum pump 500 is connected to the pump connection part 510 included in the particle recovery device, and the operation of the vacuum pump 500 directly affects the inside of the liquid filter part 100.
다음으로, 도 3을 참조하여 본 발명의 일 실시예에 따른 입자회수장치의 동작을 살펴보면, 상기 진공펌프(500)의 동작에 따라 상기 액체필터부(100) 내부의 공기가 상기 진공펌프(500)로 흡입되며, 공기의 흡입에 따라 상기 액체필터부(100) 내부는 점차 진공상태로 변화하게 된다. 한편, 이러한 상기 진공펌프(500)에 의한 공기의 흡입은 상기 액체필터부(100) 내부를 진공으로 변화시키고 기압을 감소시키게 되는데, 이에 따라 상기 액체(110)에 담겨있는 유입관(200) 내부에 흡입력이 유도된다. 따라서, 상기 공정챔버(600) 내에 존재하는 입자들이 상기 유입관(200)을 통해 상기 액체(110)로 유입되게 되고, 상기 액체(110)가 이러한 입자들을 침전시켜서 필터로서 동작하게 된다. Next, referring to FIG. 3, the operation of the particle recovery device according to the exemplary embodiment of the present invention will be described. In accordance with the operation of the vacuum pump 500, the air inside the liquid filter unit 100 is the vacuum pump 500. ) Is sucked into the air, and the inside of the liquid filter part 100 gradually changes to a vacuum state according to the suction of air. On the other hand, the suction of the air by the vacuum pump 500 changes the inside of the liquid filter unit 100 to a vacuum and reduces the air pressure, accordingly inside the inlet pipe 200 contained in the liquid 110 Suction power is induced. Therefore, particles existing in the process chamber 600 are introduced into the liquid 110 through the inlet pipe 200, and the liquid 110 precipitates these particles to operate as a filter.
이러한 상기 입자회수장치는, 공정챔버(600)에서 발생되는 입자들을 액체(110)를 통과시켜서 필터링하기 때문에 입자의 회수율을 현저하게 높일 수 있다. The particle recovery apparatus, because the particles generated in the process chamber 600 is filtered through the liquid 110 can significantly increase the recovery rate of the particles.
구체적으로, 회수율이 10 내지 20%에 머무르던 종래의 망 필터와 달리 액체(110)를 건조하여 90 내지 100%에 가까운 입자들을 회수할 수 있는데, 이러한 회수율의 현저한 증가에 따라 입자 재활용의 효율을 높일 수 있으며, 필터를 통과하여 상기 진공펌프(500)에 유입되는 입자의 수를 현저하게 감소시켜 진공펌프(500) 고장 가능성을 감소시킬 수 있다. Specifically, unlike the conventional network filter, which has a recovery rate of 10 to 20%, the liquid 110 may be dried to recover particles close to 90 to 100%, thereby increasing the efficiency of particle recycling according to a significant increase in the recovery rate. The number of particles flowing through the filter into the vacuum pump 500 may be significantly reduced to reduce the possibility of failure of the vacuum pump 500.
한편, 상기 공정챔버(600) 내부의 공기나 가스가 단열팽창 효과에 의하여 급냉동됨에 따라, 상기 유입관(200)을 통해 저온의 공기나 가스가 유입될 수 있는데, 이러한 저온의 공기나 가스는 상기 액체(110)를 냉각시켜서 상기 액체필터부(100) 외벽에 결로현상을 발생시킬 수 있다. 따라서, 이러한 결로현상을 방지하기 위하여 상기 액체필터부(100)는 상기 액체(110)를 가열하는 상기 액체가열부(111)를 더 포함할 수 있으며, 이러한 상기 액체가열부(111)에 의해 결로현상이 방지되게 된다.On the other hand, as the air or gas in the process chamber 600 is rapidly cooled by the adiabatic expansion effect, low-temperature air or gas may be introduced through the inlet pipe 200, such low-temperature air or gas By cooling the liquid 110, condensation may be generated on the outer wall of the liquid filter unit 100. Accordingly, in order to prevent such condensation, the liquid filter unit 100 may further include the liquid heating unit 111 for heating the liquid 110, and the condensation may be caused by the liquid heating unit 111. The phenomenon is prevented.
이하, 도 4를 참조하여 본 발명의 일 실시예에 따른 복수 개의 액체필터부를 구비한 입자회수장치를 설명한다. Hereinafter, a particle recovery apparatus including a plurality of liquid filter units according to an embodiment of the present invention will be described with reference to FIG. 4.
본 발명의 일 실시예에 따른 입자회수장치는 복수 개(2개 이상의)의 액체필터부를 포함할 수 있다. 구체적으로, 연속적으로 연결된 복수 개의 액체필터부를 포함할 수 있는데, 이러한 복수 개의 액체필터부를 통해 입자의 필터링 가능성을 높여서 입자의 회수율을 더욱 향상시킬 수 있다. Particle recovery apparatus according to an embodiment of the present invention may include a plurality (two or more) of the liquid filter unit. Specifically, it may include a plurality of continuously connected liquid filter unit, it is possible to further improve the recovery rate of the particles by increasing the filterability of the particles through the plurality of liquid filter unit.
도 4를 참조하여 일 실시예를 살펴보면, 본 발명의 일 실시예에 따른 입자회수장치는 제1액체필터부(160), 제2액체필터부(180) 및 상기 제1, 2액체필터부를 연결시키는 필터연결부(170)를 포함할 수 있다. Looking at an embodiment with reference to Figure 4, the particle recovery apparatus according to an embodiment of the present invention is connected to the first liquid filter unit 160, the second liquid filter unit 180 and the first, second liquid filter unit It may include a filter connecting portion 170 to.
여기서 상기 제1액체필터부(160)에는 공정챔버(600)에 존재하는 입자를 유입시키기 위한 유입관(200)이 연결되며, 바람직하게는 상기 제1액체필터부의 액체(162)에 상기 유입관(200)의 일부가 잠긴 상태로 구성될 수 있다. 또한, 상기 제1액체필터부(160)와 상기 제2액체필터부(180)는 상기 필터연결부(170)를 통해 연결되는데, 상기 필터연결부(170)는 상기 제1액체필터부의 액체(162)에는 잠기지 않고, 상기 제2액체필터부의 액체(182)에는 잠긴 상태로 구성되는 것이 바람직하다. 그리고, 상기 제2액체필터부(180)는 펌프연결부(510)를 통해 진공펌프(500)와 연결되는데, 상기 펌프연결부(510)가 상기 제2액체필터부의 액체(182)에 잠기지 않는 상태로 구성되는 것이 바람직하다.(참고로, 상기 유입관(200), 필터연결부(170), 펌프연결부(510)의 구성은 도 4의 실시예에 한정되지 않으며, 통상의 기술자에게 용이한 범위 내에서 다양한 형태로 구성될 수 있다.)Here, the inlet pipe 200 for introducing the particles present in the process chamber 600 is connected to the first liquid filter unit 160, and preferably the inlet pipe to the liquid 162 of the first liquid filter unit. A part of the 200 may be configured to be locked. In addition, the first liquid filter unit 160 and the second liquid filter unit 180 are connected through the filter connecting unit 170, the filter connecting unit 170 is the liquid 162 of the first liquid filter unit It is preferable that the liquid is immersed in the liquid 182 of the second liquid filter unit. In addition, the second liquid filter unit 180 is connected to the vacuum pump 500 through the pump connection unit 510, in which the pump connection unit 510 is not immersed in the liquid 182 of the second liquid filter unit. It is preferable that the configuration of the inlet pipe 200, the filter connecting portion 170, the pump connecting portion 510 is not limited to the embodiment of Figure 4, within the range easy to those skilled in the art. It can be configured in various forms.)
이러한 본 발명의 일 실시예에 따른 입자회수장치의 동작을 살펴보면, 먼저, 상기 펌프연결부(510)를 통해 상기 제2액체필터부(180)의 공기가 흡입되고, 이러한 흡입에 따라 상기 제2액체필터부(180) 내부가 진공상태로 변화하면서 상기 필터연결부(170)에 흡입력이 유도된다. 다음으로, 이러한 상기 필터연결부(170)에 유도된 흡입력은 상기 제1액체필터부(160)의 공기를 흡입하여 상기 제1액체필터부(160) 내부를 진공상태로 변화시키는데, 이에 따라 상기 유입관(200)에 흡입력이 유도된다. 결국, 이러한 상기 유입관(200)에 유도된 흡입력을 통해 상기 공정챔버(600)로부터 입자가 유입되며, 유입된 입자들이 상기 제1액체필터부(160) 또는 제2액체필터부(180)를 거치면서 필터링이 이루어지게 된다. Looking at the operation of the particle recovery device according to an embodiment of the present invention, first, the air of the second liquid filter unit 180 is sucked through the pump connection unit 510, the second liquid in accordance with this suction As the inside of the filter unit 180 changes to a vacuum state, suction force is induced to the filter connection unit 170. Next, the suction force induced in the filter connection unit 170 sucks the air of the first liquid filter unit 160 to change the inside of the first liquid filter unit 160 to a vacuum state, and thus the inflow. Suction force is induced in the pipe (200). As a result, particles are introduced from the process chamber 600 through the suction force induced in the inlet pipe 200, and the introduced particles are formed in the first liquid filter unit 160 or the second liquid filter unit 180. Filtering takes place through the process.
한편, 본 발명의 일 실시예에 따른 입자회수장치가 포함할 수 있는 액체필터부의 개수는 도 4의 실시예와 같이 2개로 한정되지 않으며, 3개 이상의 액체필터부를 연속적으로 연결한 형태로도 구성될 수 있다. On the other hand, the number of the liquid filter unit that can be included in the particle recovery device according to an embodiment of the present invention is not limited to two as shown in the embodiment of Figure 4, it is also configured in the form of connecting three or more liquid filter unit continuously Can be.
이상에서 살핀, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 입자회수를 위해 사용되던 종래의 망 필터를 대체할 수 있는데, 특히 공정챔버(600) 내의 입자회수를 위해 공정챔버(600)와 진공펌프(500) 사이에 설치되던 고가의 망 필터를 대체할 수 있다. The above-described salping, particle recovery device having a liquid filter unit according to an embodiment of the present invention, can replace the conventional network filter used for particle recovery, in particular for the process of particle recovery in the process chamber 600 It is possible to replace the expensive network filter installed between the chamber 600 and the vacuum pump 500.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 입자를 회수하는 필터부의 교체를 용이하게 할 수 있다. 구체적으로 종래의 망 필터의 교체와 같이 장치의 분해나 분리가 필요 없으며, 필터의 역할을 하는 액체의 교체만으로 필터부 교체의 효과를 얻을 수 있다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention can facilitate replacement of the filter unit for collecting the particles. Specifically, it is not necessary to disassemble or separate the device as in the conventional network filter replacement, and the effect of replacing the filter unit may be obtained only by replacing the liquid serving as the filter.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 고가의 망 필터가 아닌 물(H2O) 등의 액체를 사용하여 입자를 회수할 수 있도록 하여 입자회수장치의 유지비용을 현저하게 낮출 수 있다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention, by using a liquid such as water (H 2 O) rather than an expensive network filter to maintain the particle recovery device The cost can be significantly lowered.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 종래의 필터들에 비해 입자의 회수율을 현저하게 향상시킬 수 있으며, 회수율 100%에 가까운 효과를 발휘할 수 있다. 따라서, 입자 회수율을 극대화시킬 수 있으며, 상기 입자회수장치가 진공장비에 설치되는 경우에는, 회수 과정에서 입자가 진공펌프(500) 속으로 유입되는 것을 완전하게 차단하여 펌프를 보호할 수 있다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention can significantly improve the recovery rate of particles compared to the conventional filters, it can exhibit an effect close to 100% recovery rate. Therefore, the particle recovery rate can be maximized, and when the particle recovery device is installed in the vacuum equipment, the pump can be protected by completely blocking the particles from flowing into the vacuum pump 500 during the recovery process.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 복수 개의 액체필터부를 연속적으로 구성하여 입자의 회수율을 더욱 현저하게 향상시킬 수도 있다.In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention may further improve the recovery rate of particles by constituting a plurality of liquid filter units continuously.
또한, 본 발명의 일 실싱에 따른 액체필터부를 구비한 입자회수장치는, 입자의 회수에 사용되는 액체의 종류를 회수 대상 입자의 종류에 따라 선택할 수 있으므로, 다양한 입자들에 대해서 효율적인 기능을 수행할 수 있다. In addition, the particle recovery apparatus having a liquid filter unit according to one of the present invention can select the type of liquid used for the recovery of particles according to the type of particles to be recovered, thereby performing an efficient function for various particles. Can be.
또한, 본 발명의 일 실시예에 따른 액체필터부를 구비한 입자회수장치는, 필터 역할을 하는 액체를 가열시키는 구성을 더 포함하여 결로현상 발생을 방지할 수 있다. In addition, the particle recovery device having a liquid filter unit according to an embodiment of the present invention may further include a configuration for heating the liquid serving as a filter to prevent the occurrence of condensation.
[부호의 설명][Description of the code]
100 : 액체필터부 110 : 액체100: liquid filter unit 110: liquid
111 : 액체가열부 120 : 액체공급부 111: liquid heating part 120: liquid supply part
130 : 제어부 132 : 액체량측정부130: control unit 132: liquid amount measurement unit
140 : 액체저장부 150 : 액체선택부140: liquid storage unit 150: liquid selection unit
160 : 제1액체필터부 162 : 제1액체필터부의 액체160: first liquid filter unit 162: liquid of the first liquid filter unit
170 : 필터연결부 171 : 액체트랩170: filter connection 171: liquid trap
180 : 제2액체필터부 182 : 제2액체필터부의 액체180: second liquid filter unit 182: liquid of the second liquid filter unit
200 : 유입관 210 : 액체트랩200: inlet 210: liquid trap
220 : 액체체크밸브 300 : 회수부220: liquid check valve 300: recovery unit
400 : 입자추출부 500 : 진공펌프400: particle extraction unit 500: vacuum pump
510 : 펌프연결부 520 : 액체트랩510: pump connection 520: liquid trap
600 : 공정챔버600: process chamber

Claims (11)

  1. 입자를 필터링(filtering) 하기 위한 액체를 수용하는 액체필터부;A liquid filter part containing a liquid for filtering the particles;
    상기 액체필터부에 수용되는 액체에 일부분이 잠긴 상태에서, 상기 액체 내부에 입자를 유입시키기 위한 유입관;An inlet pipe for introducing particles into the liquid in a state in which a portion of the liquid is accommodated in the liquid filter unit;
    상기 액체필터부에 수용되는 액체를 회수하기 위한 회수부; 및A recovery unit for recovering the liquid contained in the liquid filter unit; And
    상기 액체필터부에 진공펌프를 연결하기 위한 펌프연결부;A pump connection part for connecting a vacuum pump to the liquid filter part;
    를 포함하는 입자회수장치.Particle recovery apparatus comprising a.
  2. 제 1 항에 있어서, The method of claim 1,
    상기 펌프연결부를 통해 상기 액체필터부 내부가 진공으로 유지되면서, 상기 유입관으로부터 상기 액체에 상기 입자가 유입되는 것을 특징으로 하는 입자회수장치.Particle recovery apparatus characterized in that the particles are introduced into the liquid from the inlet pipe while the inside of the liquid filter unit is maintained in a vacuum through the pump connection.
  3. 제 1 항에 있어서, The method of claim 1,
    상기 펌프연결부는 상기 액체가 상기 진공펌프로 전달되는 것을 방지하는 액체체크밸브 또는 액체트랩을 포함하는 것을 특징으로 하는 입자회수장치. And the pump connection part includes a liquid check valve or a liquid trap to prevent the liquid from being transferred to the vacuum pump.
  4. 제 1 항에 있어서,The method of claim 1,
    상기 회수부와 연결되며, 상기 회수부를 통해 전달된 상기 액체로부터 상기 입자를 추출하는 입자추출부;A particle extraction unit connected to the recovery unit and extracting the particles from the liquid transferred through the recovery unit;
    를 더 포함하는 것을 특징으로 하는 입자회수장치. Particle recovery apparatus characterized in that it further comprises.
  5. 제 1 항에 있어서, The method of claim 1,
    상기 액체필터부는, The liquid filter unit,
    상기 액체를 공급하는 액체공급부; 및A liquid supply unit supplying the liquid; And
    상기 액체를 가열시키는 액체가열부를 포함하는 것을 특징으로 하는 입자회수장치.Particle recovery apparatus comprising a liquid heating unit for heating the liquid.
  6. 제 5 항에 있어서,The method of claim 5,
    상기 액체필터부는, The liquid filter unit,
    복수 개의 액체를 저장하고 있는 액체저장부;A liquid storage unit for storing a plurality of liquids;
    상기 복수 개의 액체 중 필터링할 입자에 적합한 액체를 선택하는 액체선택부; A liquid selection unit for selecting a liquid suitable for particles to be filtered out of the plurality of liquids;
    내부에 공급된 액체량을 측정하는 액체량측정부; 및 A liquid amount measuring unit measuring an amount of the liquid supplied therein; And
    상기 액체공급부, 상기 액체저장부, 상기 액체선택부, 상기 액체량측정부를 제어하는 제어부;A control unit for controlling the liquid supply unit, the liquid storage unit, the liquid selection unit, and the liquid amount measuring unit;
    를 더 포함하는 것을 특징으로 하는 입자회수장치. Particle recovery apparatus characterized in that it further comprises.
  7. 제 1 항에 있어서, The method of claim 1,
    상기 유입관은, The inlet pipe,
    상기 액체가 역으로 전달되는 것을 방지하는 액체트랩 또는 액체체크밸브를 포함하는 것을 특징으로 하는 입자회수장치. Particle recovery apparatus comprising a liquid trap or a liquid check valve to prevent the liquid from being transferred back.
  8. 제 1 항에 있어서, The method of claim 1,
    상기 입자는 0.01 내지 100 마이크로미터(μm) 크기의 분말입자인 것을 특징으로 하는 입자회수장치. The particle recovery device, characterized in that the powder particles of 0.01 to 100 micrometers (μm) size.
  9. 제 8 항에 있어서, The method of claim 8,
    상기 유입관은 공정챔버로부터 전달되는 입자를 유입시키는 것을 특징으로 하는 입자회수장치.The inlet pipe is a particle recovery device, characterized in that for introducing the particles delivered from the process chamber.
  10. 제 1 항에 있어서, The method of claim 1,
    상기 액체필터부는 복수 개로 형성되는 것을 특징으로 하는 입자회수장치. Particle recovery apparatus characterized in that the liquid filter unit is formed of a plurality.
  11. 제 10 항에 있어서, The method of claim 10,
    상기 액체필터부는 제1액체필터부, 제2액체필터부 및 상기 제1, 2액체필터부를 연결시키는 필터연결부를 포함하고, The liquid filter unit includes a first liquid filter unit, a second liquid filter unit, and a filter connecting unit connecting the first and second liquid filter units,
    상기 유입관은 상기 제1액체필터부의 액체에 일부분이 잠기며, The inlet pipe is partially submerged in the liquid of the first liquid filter part,
    상기 필터연결부는 상기 제1액체필터부의 액체에는 잠기지 않고, 상기 제2액체필터부의 액체에는 잠긴 상태로 구성되는 것을 특징으로 하는 입자회수장치.And the filter connecting part is configured to be immersed in the liquid of the second liquid filter part without being immersed in the liquid of the first liquid filter part.
PCT/KR2012/010455 2012-01-05 2012-12-05 Particle recovery apparatus having liquid filter part WO2013103198A1 (en)

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