WO2013100264A1 - 바이오 센서 및 그 제조방법 - Google Patents
바이오 센서 및 그 제조방법 Download PDFInfo
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- WO2013100264A1 WO2013100264A1 PCT/KR2012/002444 KR2012002444W WO2013100264A1 WO 2013100264 A1 WO2013100264 A1 WO 2013100264A1 KR 2012002444 W KR2012002444 W KR 2012002444W WO 2013100264 A1 WO2013100264 A1 WO 2013100264A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/28—Electrolytic cell components
- G01N27/30—Electrodes, e.g. test electrodes; Half-cells
- G01N27/308—Electrodes, e.g. test electrodes; Half-cells at least partially made of carbon
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/28—Electrolytic cell components
- G01N27/30—Electrodes, e.g. test electrodes; Half-cells
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/28—Electrolytic cell components
- G01N27/30—Electrodes, e.g. test electrodes; Half-cells
- G01N27/327—Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
- G01N27/3275—Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction
- G01N27/3278—Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction involving nanosized elements, e.g. nanogaps or nanoparticles
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
Definitions
- the present invention relates to a biosensor and a method for manufacturing the same, and more particularly, to a biosensor for sensing a specific biomaterial through a superposed carbon micro / nanostructure and a method for manufacturing the same.
- electrochemical sensors or optical sensors are mainly used for bio sensing.
- the optical sensor has a disadvantage in that the reaction speed is faster than other sensors, and the sensitivity is high, but the size is large, so that space utilization is inferior and inconvenient to use.
- the disadvantage of the optical sensor can be overcome by using an electrochemical sensor, which measures the current flowing to an external circuit by electrochemically oxidizing or reducing a target material, or a gas dissolved or ionized in an electrolyte solution or a solid. It uses the electromotive force generated by the ions of the phase acting on the ion electrode, which is small in size, but has a very slow reaction speed and low sensitivity.
- an electrochemical sensor for measuring the concentration of an analyte is placed in a reaction zone in an electrochemical cell including two electrodes having an impedance for proper current measurement. Measure the concentration of the component to be analyzed.
- the component to be analyzed reacts directly or indirectly with the redox agent to form an oxidizable or reducible substance in an amount corresponding to the concentration of the component to be analyzed.
- the amount of oxidizable or reducible material present is then measured electrochemically.
- the method requires sufficient isolation between the electrodes so that the electrolysis product does not touch other electrodes and does not interfere with the reaction at the next electrode while it is measurable, and the manufacturing cost is expensive and the manufacturing process is complicated.
- An object of the present invention is to provide a biosensor and a method of manufacturing the same, by improving the structure of the biosensor, reducing its size and improving the sensing sensitivity of the sensor.
- the present invention can freely control the shape, number, structure, etc. of the carbon micro / nanowires, the production cost of the nano-wire-based sensor is low, the production cost of the biosensor manufacturing method that can significantly increase productivity and significantly increase the productivity
- the purpose is to provide a biosensor used.
- a biosensor manufacturing method includes: (a) forming an insulating layer on an electrode region including a first electrode region and a plurality of second electrode regions on an upper side of a substrate; (b) coating a primary photoresist on the insulating layer; (c) first exposing the first electrode region through a first photomask; (d) developing and removing the remaining portions except the first electrode region; (e) coating a second photoresist on the first electrode region and the insulating layer after step (d); (f) secondarily exposing the second electrode region through a secondary photomask; (g) tertiary exposure of the photoresist between the second electrode regions in the form of a micro sized wire connecting the second electrode regions through a photomask in the form of a wire; (h) developing and removing the photoresist in the remaining portions except the portions exposed in the steps (c), (f) and (g); And (i) pyrolyzing the first and second electrode regions and the wire to form a carbon electrode
- the method provides a biosensor with overlapping carbon nanostructures with improved sensitivity and reduced size and volume.
- the first electrode region may be formed under the wire connecting the second electrode region.
- the first electrode region thus formed may serve as an anode, and the second electrode region and carbon wire may serve as a cathode.
- the first electrode region may serve as a reduction electrode, and the second electrode region and carbon wire may serve as an anode.
- the carbon wire may be formed in a mesh shape or a honey comb shape. Since the oxidation and reduction reactions of the biomaterial repeatedly occur between the carbon wire and the secondary electrode and the primary electrode formed as described above, the sensitivity of the biosensor may be improved.
- the width of the carbon wire may be 30 nm to 900 ⁇ m
- the height from the substrate may be 100 nm to 900 ⁇ m
- the length may be 1 ⁇ m to 900 ⁇ m.
- the carbon wire may be formed through the pyrolysis process in step (i), and the volume of the photoresist is reduced through the pyrolysis process. Therefore, the photoresist wire structure in micro units is converted into carbon wires of various sizes according to the time, temperature, heating rate, cooling rate, gas, etc. of the pyrolysis process.
- the biosensor manufacturing method comprises the steps of (a) preparing a substrate comprising a first electrode region, a plurality of second electrode regions, made of an insulating material; (b) coating a primary photoresist on the substrate; (c) first exposing the first electrode region through a first photomask; (d) developing and removing the remaining portions except the first electrode region; (e) coating a second photoresist on the first electrode region and the substrate after step (d); (f) secondarily exposing the second electrode region through a secondary photomask; (g) tertiary exposure of the photoresist between the second electrode regions in the form of a micro sized wire connecting the second electrode regions through a photomask in the form of a wire; (h) developing and removing the photoresist in the remaining portions except the portions exposed in the steps (c), (f) and (g); And (i) pyrolyzing the first and second electrode regions and the wire to form a carbon electrode and
- the present invention is the first carbon electrode portion provided on the silicon substrate; A second carbon electrode part spaced apart from the first carbon electrode part by a predetermined interval and provided along an outer periphery of the first carbon electrode part; And a carbon wire connected to an upper portion of the second carbon electrode portion, and provided on an upper portion of the first carbon electrode portion.
- the configuration reduces the size of the sensor and improves the sensing sensitivity.
- the biosensor according to the present invention and its manufacturing method have the following effects.
- the carbon wire and the carbon electrode in the overlapped form can be produced in a simple low-cost batch process through the first and second to third exposure and development removal process.
- the carbon wire is formed in an overlapping type, the efficiency of the repeated reaction of the oxidation and reduction reactions of the biomaterial may be increased, thereby improving the sensitivity of the biosensor.
- the redox material can be smoothly supplied to the electrode region through the empty space between the carbon wires.
- the shape of the carbon wire is determined by the shape of the photomask, the amount of exposure energy, and the pyrolysis process, and the gap between the carbon wire and the substrate is determined by the height of the photoresist and the pyrolysis process.
- the structure can be freely formed.
- the carbon electrode-based sensor manufactured by the present method may be widely used for sensing not only biomaterials but also oxidizable and reducible materials.
- the carbon structure is formed by reducing the volume during the thermal decomposition of the photoresist, the volume of the upper end portion of the second carbon electrode may be reduced so that tension may be applied to the carbon wire connecting both ends of the second carbon electrode portion. This tension can prevent the carbon wire from collapsing or adhering to the substrate due to the surface tension that occurs when the carbon wire is used in the liquid phase.
- FIG. 1 is a flowchart illustrating a method of manufacturing a biosensor according to an embodiment of the present invention.
- FIG. 2 is a diagram illustrating a process of manufacturing the biosensor of FIG. 1.
- FIG. 3 is an enlarged view of the biosensor of FIG. 1.
- FIG. 4 is a diagram illustrating a biosensor according to the thermal decomposition conditions of FIG. 1.
- FIG. 1 is a flowchart illustrating a biosensor manufacturing method according to an exemplary embodiment of the present invention
- FIG. 2 is a diagram illustrating a biosensor manufacturing method process of FIG. 1
- FIG. 3 is a superposed carbon micro / nano structure of FIG. 1.
- 4 is an enlarged view of a biosensor
- FIG. 4 is a diagram illustrating before and after pyrolysis of a biosensor having a superposed carbon micro / nano structure.
- an insulating layer is formed in an electrode region including a first electrode region and a plurality of second electrode regions on an upper side of a silicon substrate.
- Step S110 coating a first photoresist on the insulating layer (S120), first exposing the first electrode region through a first photomask (S130), except for the first electrode region.
- the primary insulating layer 120 is formed on the entire upper surface of the silicon substrate 110.
- the primary insulating layer is made of an insulating material such as silicon dioxide or silicon nitride.
- a substrate made of a silicon material is used, but as long as the material can form an insulating layer on the substrate, it is also possible to use a substrate formed of a material other than the silicon material.
- the insulating layer is formed on the silicon substrate, but the step of forming the insulating layer may be omitted and the substrate material may be formed of an insulating material.
- a first coating step (S120) is performed on the insulating side 120 using photoresist. Thereafter, the primary exposure is performed to form the first electrode region by exposing the photoresist 130 to ultraviolet rays through the primary photomask (S130).
- the first electrode region 135 may be formed by curing the photoresist in the shape of an electrode on the primary insulation. In this case, the exposed light energy should be sufficient to allow the photoresist to cure from the top of the photoresist to just above the primary insulating layer.
- the remaining portions except for the first electrode region may be developed and removed (S140).
- the second photoresist 140 may be coated on the first electrode region and the second electrode region (S150).
- the second electrode region is secondarily exposed through the secondary photomask to form a second electrode region (S160).
- the energy of ultraviolet light absorbed by the photoresist in the second exposure step S160 should be sufficient to be cured from the top of the photoresist 140 to just above the primary insulating layer.
- tertiary exposure of the upper photoresist between the second electrode regions in the form of a micro sized wire connecting the second electrode regions through a photomask in the form of a wire (S170).
- Perform The third exposure allows only the top of the photoresist to be cured with less energy than the first and second exposures.
- a portion of the photoresist connecting the second electrode region 145 is cured into a wire shape through the third exposure to form a micro photoresist wire 150 connecting the second electrode region.
- the first electrode region 135 may be formed under the wire 150 connecting the second electrode region 145, and the first electrode region 135 and the wire 150 may be spaced apart from each other by a predetermined interval. Can be formed.
- the step of developing and removing the photoresist except for the portion exposed in the first and second to third exposure step is performed (S180), and the first and second to third
- the photoresist of the unexposed portion is developed and removed in the next exposure step
- the photoresist is developed and removed in the region between the first electrode region and the wire 150 (S180).
- the photoresist may be a negative photoresist including a SU-8 photoresist in the first and second to third exposure steps, and the present invention is limited or limited by the type of photoresist. It doesn't happen.
- the first electrode region 135, the second electrode region 145, and the wire 150 may be formed of a carbon structure having a micro or nano size through pyrolysis (S190). To this end, it can be pyrolyzed at high temperatures of 800 ° C or higher in a vacuum or inert gas environment. Through the pyrolysis, the first electrode region 135, the second electrode region 145, and the wire 150 are formed of the carbon wire 250, the first carbon electrode portion 230, and the first carbon electrode portion ( The second carbon electrode unit 240 may accommodate the second carbon electrode unit 240.
- the biosensor formed by the biosensor manufacturing method includes a first carbon electrode unit 230, a second carbon electrode unit 240, and a carbon wire 250.
- the biosensor formed through pyrolysis may have a width of 30 nm to 10 ⁇ m, a height from a substrate of 100 nm to 10 ⁇ m, and a length of 1 ⁇ m to 900 ⁇ m.
- the volume of the wire may be reduced, thereby reducing the size of the photoresist wire to nanometers.
- the carbon wire 250 may be formed in a mesh shape or a honey comb shape. As the carbon wire 250 is formed in a mesh or honeycomb shape as described above, the supply of the biomaterial to the first carbon electrode part 230 and the second carbon electrode part is facilitated, and the area of the redox reaction is increased. Increasing the efficiency of the redox repeat reaction can increase the sensitivity of the biosensor.
- the carbon wire 250 and the second carbon electrode portion 240 may act as an oxidation electrode for oxidizing the biomaterial, and the first carbon electrode portion 230 may serve as a reduction electrode for reducing the biomaterial. have.
- the carbon wire 250 and the second carbon electrode unit 240 may serve as a reduction electrode for reducing the biomaterial, and the first carbon electrode unit 230 may also serve as an oxidation electrode for oxidizing the biomaterial. .
- the carbon wire structure is formed due to the volume reduction through thermal decomposition of the micro-unit photoresist, it is possible to produce the nanostructure at low cost without expensive nanoprocessing equipment.
- the shape of the carbon structure may be changed according to the thermal decomposition conditions in the pyrolysis process. That is, referring to FIG. 4, if the interval between the carbon wires 250 forming a diagonal line is 2 ⁇ , the shape of the final carbon wire may be changed according to the change of the interval of ⁇ according to the thermal decomposition condition.
- ⁇ may be between 10 ° and 70 °, and as the size of ⁇ increases, the shape of the mesh may be closer to a circle.
- the oxidation and reduction of the biomaterial is controlled to adjust the sensitivity of the biosensor, and the oxidation and reduction are repeated by adjusting the gap between the carbon wire and the first carbon electrode part. You can choose to increase or decrease the number of repetitions of the reaction.
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Abstract
Description
Claims (7)
- (a) 기판 상측의 제1 전극영역 및 복수의 제2 전극영역을 포함하는 전극영역에 절연층을 형성하는 단계;(b) 상기 절연층 상에 1차 포토레지스트를 코팅하는 단계;(c) 1차 포토마스크를 통하여 상기 제1 전극영역을 1차 노광하는 단계;(d) 상기 제1 전극영역을 제외한 나머지 부분을 현상하여 제거하는 단계;(e) 상기 (d) 단계 후 상기 제1 전극영역 및 상기 절연층 상부에 2차 포토레지스트를 코팅하는 단계;(f) 상기 제2 전극영역을 2차 포토마스크를 통하여 2차 노광하는 단계;(g) 상기 제2 전극영역 사이의 포토레지스트 상부를 와이어 형태의 포토마스크를 통하여 상기 제2 전극영역을 연결하는 마이크로 사이즈의 와이어 형태로 3차 노광하는 단계;(h) 상기 (c), (f) 및 (g) 단계에 노광된 부분을 제외한 나머지 부분의 포토레지스트를 현상 제거하는 단계; 및(i) 상기 제1 및 제2 전극영역 및 상기 와이어를 열분해하여 탄소 전극과 탄소 와이어를 형성하는 단계를 포함하는 바이오 센서 제조 방법.
- 청구항 1에 있어서,상기 (g) 단계는,상기 제1 전극영역은 상기 제2 전극영역을 연결하는 상기 와이어 하부에 형성되는 바이오 센서 제조 방법.
- 청구항 1에 있어서,상기 (i) 단계에서 상기 탄소 와이어는 메시(mesh)형상 또는 허니콤(honey comb)형상인 바이오 센서 제조 방법.
- 청구항 1에 있어서,상기 포토레지스트는, SU-8 인 바이오 센서 제조 방법.
- 청구항 1에 있어서,상기 (i) 단계에서 상기 탄소 와이어의 폭은 30nm ~ 10㎛이고, 상기 기판으로부터의 높이는 100nm ~ 10㎛이며, 길이는 1㎛ ~ 900㎛으로 형성되는 것을 특징으로 하는 바이오 센서 제조 방법.
- (a) 제1 전극영역, 복수의 제2 전극영역을 포함하며, 절연 물질로 이루어진 기판을 준비하는 단계;(b) 상기 기판 상에 1차 포토레지스트를 코팅하는 단계;(c) 1차 포토마스크를 통하여 상기 제1 전극영역을 1차 노광하는 단계;(d) 상기 제1 전극영역을 제외한 나머지 부분을 현상하여 제거하는 단계;(e) 상기 (d) 단계 후 상기 제1 전극영역 및 상기 기판 상부에 2차 포토레지스트를 코팅하는 단계;(f) 상기 제2 전극영역을 2차 포토마스크를 통하여 2차 노광하는 단계;(g) 상기 제2 전극영역 사이의 포토레지스트 상부를 와이어 형태의 포토마스크를 통하여 상기 제2 전극영역을 연결하는 마이크로 사이즈의 와이어 형태로 3차 노광하는 단계;(h) 상기 (c), (f) 및 (g) 단계에 노광된 부분을 제외한 나머지 부분의 포토레지스트를 현상 제거하는 단계; 및(i) 상기 제1 및 제2 전극영역 및 상기 와이어를 열분해하여 탄소 전극과 탄소 와이어를 형성하는 단계를 포함하는 바이오 센서 제조 방법.
- 절연층을 포함하는 기판 상측에 구비되는 제1 탄소 전극부;상기 제1 탄소 전극부와 소정 간격 이격되되 상기 제1 탄소 전극부의 외주변을 따라 구비되는 제2 탄소 전극부; 및상기 제2 탄소 전극부 상부를 연결하되 상기 제1 탄소 전극부 상부에 구비되는 탄소 와이어를 포함하는 바이오 센서.
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US14/369,199 US9671360B2 (en) | 2011-12-29 | 2012-04-02 | Biosensor and method for manufacturing same |
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KR1020110146152A KR101371824B1 (ko) | 2011-12-29 | 2011-12-29 | 바이오 센서 제조방법 |
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US9513555B2 (en) * | 2013-03-29 | 2016-12-06 | Sk Innovation Co., Ltd. | Method for manufacturing a suspended single carbon nanowire and piled nano-electrode pairs |
KR102125278B1 (ko) * | 2013-09-02 | 2020-06-22 | 에스케이이노베이션 주식회사 | 가스센서 및 그 제조방법 |
KR102131412B1 (ko) * | 2013-08-30 | 2020-08-05 | 에스케이이노베이션 주식회사 | 가스센서 및 그 제조방법 |
KR102347669B1 (ko) * | 2014-03-28 | 2022-01-07 | 에스케이이노베이션 주식회사 | 이중 전극쌍을 이용한 전기화학 바이오 센서 |
KR101927975B1 (ko) * | 2016-05-17 | 2019-02-26 | 주식회사 아이센스 | 와이어 전극 제조방법 및 와이어 전극 제조용 포토마스크 |
KR102616229B1 (ko) * | 2021-08-02 | 2023-12-20 | 서울대학교산학협력단 | 샘플 고정용 장치 및 그 제조 방법 |
KR102691993B1 (ko) * | 2022-04-05 | 2024-08-05 | 연세대학교 산학협력단 | 탄소 전극의 제조방법, 이에 의해 제조된 탄소전극 및 탄소전극을 구비하는 바이오 측정 장치 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5632085A (en) * | 1994-11-09 | 1997-05-27 | Pacesetter Ab | Method for making an electrical contact for a vitreous carbon electrode |
US20020179434A1 (en) * | 1998-08-14 | 2002-12-05 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotube devices |
US20040100269A1 (en) * | 2002-11-26 | 2004-05-27 | Honeywell International Inc. | Nanotube sensor |
JP2009288080A (ja) * | 2008-05-29 | 2009-12-10 | Nippon Telegr & Teleph Corp <Ntt> | 細胞外マイクロ電極及びその製造方法 |
US7682659B1 (en) * | 2006-04-10 | 2010-03-23 | The Regents Of The University Of California | Fabrication of suspended carbon micro and nanoscale structures |
-
2011
- 2011-12-29 KR KR1020110146152A patent/KR101371824B1/ko active IP Right Grant
-
2012
- 2012-04-02 US US14/369,199 patent/US9671360B2/en active Active
- 2012-04-02 WO PCT/KR2012/002444 patent/WO2013100264A1/ko active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5632085A (en) * | 1994-11-09 | 1997-05-27 | Pacesetter Ab | Method for making an electrical contact for a vitreous carbon electrode |
US20020179434A1 (en) * | 1998-08-14 | 2002-12-05 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotube devices |
US20040100269A1 (en) * | 2002-11-26 | 2004-05-27 | Honeywell International Inc. | Nanotube sensor |
US7682659B1 (en) * | 2006-04-10 | 2010-03-23 | The Regents Of The University Of California | Fabrication of suspended carbon micro and nanoscale structures |
JP2009288080A (ja) * | 2008-05-29 | 2009-12-10 | Nippon Telegr & Teleph Corp <Ntt> | 細胞外マイクロ電極及びその製造方法 |
Also Published As
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US9671360B2 (en) | 2017-06-06 |
KR20130077440A (ko) | 2013-07-09 |
US20140353152A1 (en) | 2014-12-04 |
KR101371824B1 (ko) | 2014-03-11 |
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