WO2013077396A1 - プラズマ発生装置 - Google Patents
プラズマ発生装置 Download PDFInfo
- Publication number
- WO2013077396A1 WO2013077396A1 PCT/JP2012/080282 JP2012080282W WO2013077396A1 WO 2013077396 A1 WO2013077396 A1 WO 2013077396A1 JP 2012080282 W JP2012080282 W JP 2012080282W WO 2013077396 A1 WO2013077396 A1 WO 2013077396A1
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- Prior art keywords
- plasma
- dielectric film
- dielectric
- plasma generator
- electrode
- Prior art date
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32559—Protection means, e.g. coatings
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2441—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes characterised by the physical-chemical properties of the dielectric, e.g. porous dielectric
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L9/00—Disinfection, sterilisation or deodorisation of air
- A61L9/14—Disinfection, sterilisation or deodorisation of air using sprayed or atomised substances including air-liquid contact processes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
- F25D17/04—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating air, e.g. by convection
- F25D17/042—Air treating means within refrigerated spaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D2317/00—Details or arrangements for circulating cooling fluids; Details or arrangements for circulating gas, e.g. air, within refrigerated spaces, not provided for in other groups of this subclass
- F25D2317/04—Treating air flowing to refrigeration compartments
- F25D2317/041—Treating air flowing to refrigeration compartments by purification
- F25D2317/0415—Treating air flowing to refrigeration compartments by purification by deodorizing
Definitions
- the present invention relates to a plasma generator.
- the conventional technology aiming at air quality control in the living environment is generally physical control represented by a filter.
- Physical control can capture relatively large dust and dirt floating in the air, and bacteria and viruses depending on the size of the filter hole. Furthermore, when there are innumerable adsorption sites such as activated carbon, malodorous odor molecules can be captured. However, in order to capture these substances, it is necessary to pass the air in the controlled space evenly through the filter, which increases the size of the device and increases the maintenance costs such as filter replacement. Is not effective. Therefore, as a means for enabling sterilization and deodorization of the deposit, it is possible to release chemically active species into a space where sterilization or deodorization is desired.
- Plasma generator see, for example, Patent Document 1
- the active species generated by the plasma generator is discharged into a closed space (for example, a living room, a toilet, a passenger car, etc.) having a volume larger than that of (1), and the active species, airborne bacteria and odor So-called active-type plasma generator that reacts by causing collision (see, for example, Patent Document 2)
- the advantage of the passive plasma generator (1) is that high concentration of active species is generated by generating plasma in a small volume, so that a high bactericidal effect and deodorizing effect are expected.
- the disadvantage is that airborne bacteria and odors need to be introduced into the device, which increases the size of the device, and easily generates ozone harmful to the human body as a byproduct of plasma generation. In order to prevent leakage, it is necessary to install a filter for adsorption or decomposition.
- the advantage of the active plasma generator of (2) is that the device can be made relatively small.
- bacteria attached to the surface of clothing and household goods hereinafter referred to as , Sterilization of adhering bacteria
- decomposition of odor adsorbed on the surface bacteria attached to the surface of clothing and household goods
- the disadvantage is that active species are diffused in a very large closed space compared to the volume of the device, so the concentration is low, so that only active species with a long life expectation of sterilization and deodorizing effects can be expected. It is a point that cannot be obtained. As a result, a deodorizing effect can hardly be expected in a space with a high odor concentration (a concentration about 10,000 times higher than the active species concentration).
- the passive plasma generator (1) the effect is limited only to airborne bacteria and odors contained in the air flow flowing into the apparatus, while in the active plasma generator (2), the concentration is limited. Can only be expected to have low airborne bacteria, adherent bacteria, and odor. That is, what can be realized by using the prior art is limited to either “sterilization and deodorization of planktonic bacteria” or “sterilization of low-concentration planktonic bacteria, adherent bacteria and deodorization of adherent odor”. .
- a porous dielectric film is often used at the plasma generation site of the electrode, and therefore, under high humidity, the dielectric film itself absorbs moisture due to its hygroscopic action. The characteristics change and the generation of plasma is hindered.
- the dielectric film itself of the electrode tends to condense, the generation of plasma stops, and the sterilization and deodorization performance deteriorates. Therefore, it is difficult to maintain sterilization performance when the inside of the refrigerator remains in a high humidity state.
- the present invention is intended to provide a plasma generator having high safety and excellent sterilization performance and deodorization performance.
- the inventors have adjusted the relative dielectric constant of the dielectric film formed on the electrode to be within a specific range, thereby suppressing ozone generation, while the ions and radicals are suppressed. As a result, it succeeded in improving the sterilization performance and deodorizing performance of the plasma generator safely.
- the present invention has been completed based on such findings.
- the plasma generator according to the present invention includes a pair of electrodes having a dielectric film formed on at least one of the opposing surfaces, and a plasma generator that discharges plasma by applying a predetermined voltage between the electrodes.
- the dielectric film has a relative dielectric constant of 20 to 200.
- dielectric film examples include those formed from a mixture containing a dielectric material and a glass material.
- the content of the glass material in the mixture is preferably 0.2 to 10 times the content of the dielectric material in the mixture in terms of mass.
- the dielectric material a material containing at least one element selected from the group consisting of Ba, Ti, Ca, Zr, Sr, Y, Mg, and Si as a constituent element is preferably used.
- a dielectric material for example, at least one compound selected from the group consisting of oxides, carbides, nitrides, and borides is used.
- the glass material a material containing at least one element selected from the group consisting of Si, Bi, B, Zr, Na, K, Ca, and Mg as the constituent element is suitably used.
- the surface roughness of the dielectric film is preferably 0.1 to 100 ⁇ m.
- the present invention it is possible to increase the generation amount of active species such as ions and radicals while suppressing ozone generation, and to safely improve the sterilization performance and deodorization performance of the plasma generator. . Furthermore, since the dielectric film is formed from a mixture of a dielectric material and a glass material, the denseness of the dielectric film is improved, so that the dielectric film has improved water resistance in addition to voltage resistance. As a result, deterioration in sterilization performance and deodorization performance under high humidity is also suppressed. For this reason, the plasma generator according to the present invention can be used even in a high humidity environment such as the inside of a refrigerator, a washing machine, a dishwasher or the like.
- the plasma generator according to the present invention includes a pair of electrodes having a dielectric film formed on at least one of the opposing surfaces, and a plasma is discharged by applying a predetermined voltage between the electrodes.
- An example of such a plasma generator is that shown in FIG.
- the plasma generator 100 is used for home appliances such as a refrigerator, a washing machine, a dishwasher, a clothes dryer, a vacuum cleaner, an air conditioner, an air cleaner, and the like. It deodorizes the air inside or outside the product and sterilizes airborne or adherent bacteria inside or outside the product.
- the plasma generator 100 includes a plasma electrode unit 2 that generates active species such as ions and radicals by microgap plasma (Micro Gap Plasma), and a plasma electrode unit 2 outside the plasma electrode unit 2.
- a blower mechanism 3 that is provided and forcibly sends air (air flow) to the plasma electrode unit 2 and a voltage applying unit 4 that applies a predetermined voltage to the plasma electrode unit 2 to cause plasma discharge are provided.
- the plasma electrode unit 2 includes a pair of electrodes 21 provided with dielectric films 21b and 22b on opposite surfaces of the substrates 21a and 22a, and provided with insulator films 21c and 22c on the opposite surfaces. 22 and a predetermined voltage is applied between the electrodes 21 and 22 by the voltage applying means 4 to cause plasma discharge.
- Each of the electrodes 21 and 22 has a substantially rectangular shape in plan view (when viewed from the direction of the face plate of the electrodes 21 and 22), and voltage application means is provided at the edges of the electrodes 21 and 22 of the electrode portion 2.
- An application terminal 2T to which a voltage from 4 is applied is formed.
- the substrates 21a and 22a are made of, for example, austenitic, ferritic, martensitic, or other stainless steel, or conductors such as iron, copper, and aluminum, while the insulator films 21c and 22c are made of, for example, an oxide. And carbides, nitrides, borides, glass, epoxy resins, polyester resins, polyethersulfone (PES) resins, fluororesins, and the like.
- PES polyethersulfone
- Each of the electrodes 21 and 22 is provided with fluid flow holes 21d and 22d at the corresponding positions of the electrodes 21 and 22, respectively, so that these communicate with each other and penetrate as a whole.
- the blower mechanism 3 is disposed so as to face the electrode 22 of the plasma electrode unit 2, and forcibly sends wind toward the fluid circulation holes 21 d and 22 d (completely open portions) formed in the plasma electrode unit 2. It has a blower fan.
- the voltage application means 4 includes a power source 41 and a drive circuit unit 42 that converts the voltage from the power source 41 into a pulse voltage and applies each voltage.
- the plasma generating apparatus 100 generates plasma in a gap between two opposed electrodes 21 and 22, sends air to the fluid circulation holes 21 d and 22 d by the blower mechanism 3, and deodorizes in the vicinity of the electrodes 21 and 22.
- the active species generated in the plasma are released into the closed space to sterilize the attached bacteria.
- the dielectric film has a relative dielectric constant of 20 to 200.
- the relative dielectric constant is preferably 30 to 110, more preferably 50 to 90.
- the dielectric film having such a relative dielectric constant can be formed from, for example, a mixture containing a dielectric material and a glass material.
- the relative permittivity can be adjusted within the above range, so that the generation of active species such as ions and radicals can be increased while suppressing the generation of ozone. it can.
- the density of the dielectric film is improved, so that the dielectric film has improved water resistance in addition to voltage resistance.
- the resilience is also improved, and the plasma generator can be used in a high humidity environment such as the inside of a refrigerator, a washing machine, a dishwasher or the like.
- the glass material functions as a binder, and the binding property of the dielectric film to the substrate Will also improve.
- a dielectric material for example, a material containing Ba, Ti, Ca, Zr, Sr, Y, Mg, Si or the like as a constituent element is used.
- the dielectric material containing these elements include oxides, carbides, nitrides, borides, and the like. More specifically, BaO, TiO 2 , CaO, ZrO, Sr 2 O 3 , Y 2 are included.
- glass material for example, a material containing Si, Bi, B, Zr, Na, K, Ca, Mg or the like as a constituent element is used.
- glass materials containing these elements include B 2 O 3 —ZnO—La 2 O 3 , P 2 O 5 —B 2 O 3 —R ′ 2 O—R ′′ O—TiO 2 —Nb 2 O 5— WO 3 —Bi 2 O 3 system (wherein R ′ represents an alkali metal, R ′′ represents an alkaline earth metal, the same shall apply hereinafter), TeO 2 —ZnO system, B 2 O 3 —Bi 2 O 3 system, B 2 O 3 —ZnO—Bi 2 O 3 system, SiO 2 —Bi 2 O 3 system, SiO 2 —ZnO system, B 2 O 3 —ZnO system, P 2 O 5 —ZnO system, SiO 2 System, R ′ 2 O—R ′′ O—SiO 2 system,
- the content of the glass material is preferably 0.2 to 10 times the content of the dielectric material in terms of mass.
- the relative dielectric constant of the dielectric film can be set to 20 to 200.
- a more preferable content ratio (glass material / dielectric material) is 0.5 to 3.0 times, and more preferably 0.8 to 2.0 times.
- the surface roughness (calculated average roughness Ra) of the dielectric film is preferably 0.1 to 100 ⁇ m. If the planar roughness of the dielectric film is within this range, a gap can be formed between the opposing surfaces just by overlapping the electrodes, and plasma can be generated in the gap. A spacer for forming the formation gap becomes unnecessary.
- the surface roughness of the dielectric film can be controlled by, for example, a printing method.
- an electrode in the present invention for example, (1) First, the substrate is pressed, etched, etc., and an opening is formed in the substrate. (2) Next, an insulator film is formed on the back surface (anti-opposing surface) of the substrate by vacuum deposition, sputtering, electroplating, printing, or the like. Note that this step is performed last when the insulator film is formed of a resin. (3) Further, a mixture of a dielectric material and a glass material is prepared. At this time, mixing is performed so that the mass of the glass material is 0.2 to 10 times the mass of the dielectric material so that the dielectric constant of the dielectric film is 20 to 200.
- the mass of the glass powder is adjusted to 0.5 to 3.0 times the mass of the BaTiO 3 powder. It is preferable to do this.
- a dielectric film is formed on the surface (opposing surface) of the substrate by vacuum deposition, sputtering, thermal spraying, printing, or the like.
- an electrode is obtained by firing.
- the present invention configured as described above, it is possible to improve sterilization and deodorizing power while ensuring safety by generating active species such as ions and radicals while suppressing generation of ozone as compared with the prior art. Is possible.
- active species such as ions and radicals
- the conventional plasma generator cannot be used under high humidity or dew condensation conditions, but the plasma generator according to the present invention is not limited to a refrigerator, and there is moisture in a washing machine, a dishwasher, etc. It can be used even in an environment where
- the electrode used for each evaluation test was produced as follows.
- insulator film (1) Formation of insulator film First, a SUS substrate (manufactured by SUS304, thickness 1.0 mm) was pressed to form an opening in the substrate. Next, a glass paste (manufactured by Asahi Glass Co., Ltd.) having a composition of SiO 2 —ZnO—RO (where R represents an alkaline earth metal (Mg, Ca, Sr, Ba)) is formed on the back surface of the substrate on which the opening is formed. AP5700C) was printed using a screen printing machine (LS-150, manufactured by Neurong Seimitsu Kogyo) to insulate the back side of the substrate. Thereafter, the film was dried at 120 ° C. for 20 minutes with a dryer (Espec Corp., PVC-212) to form an insulating film having a thickness of about 30 to 40 ⁇ m after drying.
- a dryer Espec Corp., PVC-212
- the obtained binder-containing mixture was stirred using a three-roll mill (manufactured by Nagase Screen Printing Laboratory, EXAKT M-80S), and then diluted to a viscosity that facilitates printing with a solvent (manufactured by Kanto Chemical Co., Ltd., ⁇ -terpineol).
- a dielectric paste was prepared.
- the obtained dielectric paste was printed on the surface of the SUS substrate using a screen printer (manufactured by Neurong Seimitsu Kogyo Co., Ltd., LS-150), and then dried at 120 ° C. for 20 minutes using a dryer (manufactured by ESPEC, PVC-212). After drying, a dielectric film having a thickness of about 100 to 200 ⁇ m was formed after drying.
- a SUS substrate having a dielectric film formed on the front surface and an insulator film formed on the back surface was subjected to a muffle furnace (manufactured by Denken, S90) at 850 ° C. for 10 minutes, 5 ° C./minute.
- the electrode was fabricated by raising and lowering the temperature and firing.
- MMP Methyl mercaptan
- Steps (1) to (6) are repeated for a conventional plasma generator on which a dielectric film is formed by thermal spraying. The obtained results are shown in the graph of FIG.
- the product of the present invention has improved moisture resistance (recovery performance from the dew condensation state) by about 5 times compared to the conventional product. Since the same tendency was observed for all of the plasma generators used in Test 1, it is considered that the dielectric film was densely formed due to the glass in the film and the moisture resistance was improved.
- the BaTiO 3 and B 2 O 3 —ZnO—Bi 2 O 3 -based glass have a mixing ratio (glass / BaTiO 3 (mass conversion)) of 0.2 or more. It was revealed that the voltage resistance of the dielectric film was significantly improved by adding the glass to No. 3 .
- the generation amount of active species such as ion and a radical
- the plasma generator which improved the disinfection performance and the deodorizing performance safely can be provided.
- the dielectric film is formed from a mixture of a dielectric material and a glass material, the denseness of the dielectric film is improved, so that the dielectric film has improved water resistance in addition to voltage resistance. As a result, a decrease in sterilization performance and deodorization performance under high humidity is also suppressed. For this reason, the plasma generator according to the present invention can be used even in a high humidity environment such as the inside of a refrigerator, a washing machine, a dishwasher or the like.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
Abstract
Description
(1)大気中に浮遊する菌やウィルス(以下、浮遊菌という。)、又は、悪臭物質(以下、臭気という。)を装置内の限られた容積内で活性種と反応させる、いわゆる受動型のプラズマ発生装置(例えば、特許文献1参照)
(2)プラズマ発生部で生成された活性種を(1)よりも容積の大きな閉空間(例えば、居室、トイレ、乗用車の車内等)へ放出し、大気中で活性種と浮遊菌や臭気とを衝突させ反応させる、いわゆる能動型のプラズマ発生装置(例えば、特許文献2参照)
21・・・一方の電極
22・・・他方の電極
21b、22b・・・誘電体膜
以下のようにして各評価試験に供する電極を作製した。
まず、SUS基板(SUS304製、厚み1.0mm)をプレスして、当該基板に開口部を形成した。次いで、開口部を形成した基板の裏面に、SiO2-ZnO-RO(式中、Rはアルカリ土類金属(Mg、Ca、Sr、Ba)を表す。)の組成を有するガラスペースト(旭硝子製、AP5700C)を、スクリーン印刷機(ニューロング精密工業製、LS-150)を用いて印刷し、基板の裏面を絶縁した。その後、乾燥機(エスペック製、PVC-212)により120℃で20分間乾燥し、乾燥後の膜厚が30~40μm程度の絶縁体膜を形成した。
BaTiO3粉末とB2O3-ZnO-Bi2O3系ガラス粉末とを、下記表1に示す比率(質量換算)で混合し、更に、得られた混合物とバインダー(日進化成製、EC100-FTP)とを、当該混合物の質量がバインダーの質量に対し20質量%となるように混合し、撹拌機(シンキー製、ARE-310)により10分間撹拌した。
表面に誘電体膜が形成され、裏面に絶縁体膜が形成されたSUS基板を、マッフル炉(デンケン製、S90)を用いて、850℃で10分間、5℃/分で昇降温させて焼成し、電極を作製した。
得られた電極を用いて図1に示すようなプラズマ発生装置を組み立て、当該プラズマ発生装置を用いて、以下のような手順で試験を行った。
(1)プラズマ発生装置の電極を通過する風速が1~2m/sとなるように、送風機構を調整する。
(2)電極から10mmの距離でのオゾン濃度が0.02ppmとなるように印加電圧を調節する。
(3)100Lの樹脂製密閉容器内にプラズマ発生装置を設置する。
(4)メチルメルカプタン(MMP)のガス(30ppm、130mL)を前記容器内に注入する。
(5)検知管にて臭気濃度を測定し、得られた値を初期値とする。
(6)プラズマ発生装置を動作させる。
(7)2時間経過後、前記容器内の臭気濃度を測定し、初期濃度と比較し、脱臭率を求める。
(8)比誘電率の異なる誘電体膜が形成された電極を備えたプラズマ発生装置に対し、手順(1)~(7)を繰り返す。
得られた結果は図5のグラフに示した。
以下のような手順で試験を行った。
(1)試験1で用いたプラズマ発生装置のうち、誘電体膜の比誘電率が67であるプラズマ発生装置を本発明品として用いて、プラズマ発生装置の電極を通過する風速が1~2m/sとなるように、送風機構を調整する。
(2)電極から10mmの距離でのオゾン濃度が0.02ppmとなるように印加電圧を調節する。
(3)電極から100mmの距離での空気イオン数(負イオン数)を測定し、得られた値を初期値とする。
(4)温度2~3℃、湿度60~80%の冷蔵庫内で15分間動作させる(電極の冷却)。
(5)冷蔵庫からプラズマ発生装置を動作させたまま取り出し(結露発生)、手順(3)と同様に空気イオン数の測定を開始する。
(6)イオン数が初期値の90%に回復する時間を測定する。
(7)溶射法により誘電体膜が形成された従来品のプラズマ発生装置に対し、手順(1)~(6)を繰り返す。
得られた結果は図6のグラフに示した。
BaTiO3とB2O3-ZnO-Bi2O3系ガラスとの混合比率(ガラス/BaTiO3(質量換算))を変えた誘電体膜が形成された各種電極を用いて、IS C 2110-1記載の絶縁破壊の強さの測定を、商用周波数交流の電圧を印加し行った。絶縁破壊は瞬間的に1A以上の電流が流れた時に生じたとして、その電圧が破壊電圧であるとした。得られた結果は図7のグラフに示した。
Claims (7)
- 対向面の少なくとも一方に誘電体膜が形成された一対の電極を備え、それら電極間に所定電圧が印加されてプラズマ放電するプラズマ発生装置であって、
前記誘電体膜の比誘電率が、20~200であることを特徴とするプラズマ発生装置。 - 前記誘電体膜が、誘電体材料とガラス材料とを含有する混合物から形成されてなるものである請求項1記載のプラズマ発生装置。
- 前記混合物における前記ガラス材料の含有量が、質量換算で、前記混合物における前記誘電体材料の含有量の0.2~10倍である請求項2記載のプラズマ発生装置。
- 前記誘電体材料が、その構成元素として、Ba、Ti、Ca、Zr、Sr、Y、Mg、及び、Siからなる群より選択される少なくとも1つの元素を含むものである請求項2記載のプラズマ発生装置。
- 前記誘電体材料が、酸化物、炭化物、窒化物、及び、ホウ化物からなる群より選択される少なくとも1種の化合物である請求項2記載のプラズマ発生装置。
- 前記ガラス材料が、その構成元素として、Si、Bi、B、Zr、Na、K、Ca、及び、Mgからなる群より選択される少なくとも1つの元素を含むものである請求項2記載のプラズマ発生装置。
- 前記誘電体膜の表面粗さが、0.1~100μmである請求項1記載のプラズマ発生装置。
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CN201280057892.8A CN103988587A (zh) | 2011-11-24 | 2012-11-22 | 等离子体产生装置 |
EP12852319.8A EP2785151A4 (en) | 2011-11-24 | 2012-11-22 | PLASMA PRODUCING DEVICE |
US14/360,106 US20140306597A1 (en) | 2011-11-24 | 2012-11-22 | Plasma generating apparatus |
KR1020137026364A KR20130135338A (ko) | 2011-11-24 | 2012-11-22 | 플라즈마 발생 장치 |
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JP2002224211A (ja) | 2000-05-18 | 2002-08-13 | Sharp Corp | 殺菌方法、イオン発生装置及び空気調節装置 |
JP2003079714A (ja) | 2001-09-14 | 2003-03-18 | Matsushita Electric Works Ltd | 空気清浄機 |
JP2009081134A (ja) * | 2007-09-09 | 2009-04-16 | Kazuo Shimizu | プラズマ電極 |
JP2009245646A (ja) * | 2008-03-28 | 2009-10-22 | Ngk Insulators Ltd | マイクロプラズマジェット反応器、及びマイクロプラズマジェット発生装置 |
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JP2005123034A (ja) * | 2003-10-16 | 2005-05-12 | Ngk Insulators Ltd | プラズマ発生電極及びプラズマ反応器 |
JP2006205085A (ja) * | 2005-01-28 | 2006-08-10 | Ngk Insulators Ltd | プラズマ処理装置 |
JP4863743B2 (ja) * | 2006-03-24 | 2012-01-25 | 日本碍子株式会社 | プラズマ発生電極、プラズマ反応器及び排ガス浄化装置 |
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JP2002224211A (ja) | 2000-05-18 | 2002-08-13 | Sharp Corp | 殺菌方法、イオン発生装置及び空気調節装置 |
JP2003079714A (ja) | 2001-09-14 | 2003-03-18 | Matsushita Electric Works Ltd | 空気清浄機 |
JP2009081134A (ja) * | 2007-09-09 | 2009-04-16 | Kazuo Shimizu | プラズマ電極 |
JP2009245646A (ja) * | 2008-03-28 | 2009-10-22 | Ngk Insulators Ltd | マイクロプラズマジェット反応器、及びマイクロプラズマジェット発生装置 |
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EP2785151A1 (en) | 2014-10-01 |
KR20130135338A (ko) | 2013-12-10 |
CN103988587A (zh) | 2014-08-13 |
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