WO2013065796A1 - 観察装置 - Google Patents
観察装置 Download PDFInfo
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- WO2013065796A1 WO2013065796A1 PCT/JP2012/078362 JP2012078362W WO2013065796A1 WO 2013065796 A1 WO2013065796 A1 WO 2013065796A1 JP 2012078362 W JP2012078362 W JP 2012078362W WO 2013065796 A1 WO2013065796 A1 WO 2013065796A1
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- fourier transform
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- lens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/365—Control or image processing arrangements for digital or video microscopes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02041—Interferometers characterised by particular imaging or detection techniques
- G01B9/02043—Imaging of the Fourier or pupil or back focal plane, i.e. angle resolved imaging
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02041—Interferometers characterised by particular imaging or detection techniques
- G01B9/02045—Interferometers characterised by particular imaging or detection techniques using the Doppler effect
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
- G02B21/08—Condensers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/361—Optical details, e.g. image relay to the camera or image sensor
Definitions
- the present invention relates to an apparatus for observing an image of an object.
- Non-Patent Document 1 As a technique for observing an image of an object and obtaining a three-dimensional image of the object, one using a phase shift method described in Non-Patent Document 1 or Non-Patent Document 2 is known.
- the light of wavelength ⁇ output from the light source is branched into two, one branched light is transmitted through the object as object light, and the other branched light is used as reference light.
- a two-dimensional image is captured by the interference between the object light and the reference light.
- the optical path length of the reference light is changed by ⁇ / 4 to obtain four two-dimensional images, and a predetermined calculation is performed on the four two-dimensional images to obtain a two-dimensional complex amplitude.
- a three-dimensional amplitude image and a three-dimensional phase image of the object are obtained from the plurality of complex amplitude images obtained for each direction of light incident on the object.
- Non-Patent Document 3 As a technique for obtaining a complex amplitude image from one captured image, the Hilbert transform method described in Non-Patent Document 3 is known.
- Non-Patent Document 1 and Non-Patent Document 2 it is necessary that the object is stationary while obtaining four two-dimensional images.
- a photo detector capable of high-speed imaging with a high frame rate is used to obtain four two-dimensional images in a period during which it can be considered that the object is stationary. It is necessary to get.
- a photodetector capable of high-speed imaging is expensive, or has a small number of pixels and poor spatial resolution.
- the image quality is inferior and the sensitivity is poor in terms of SN.
- the spatial resolution is reduced to about 1/4, and the image quality is reduced.
- the present invention has been made to solve the above problems, and can obtain an image of a moving object even when a photodetector having a low readout speed per pixel is used.
- An object of the present invention is to provide an observation device that can be used.
- the observation apparatus In the observation apparatus according to the present invention, among the light source unit that irradiates light to the moving object from multiple directions and the scattered light generated from the object by the light irradiation by the light source unit, scattered light having the same scattering angle is detected.
- the first direction is the direction perpendicular to the moving direction of the object and the second direction is the direction parallel to the moving direction of the object
- the respective planes on the predetermined plane are incident on the same position.
- a detector that outputs data that changes with time at a frequency corresponding to the Doppler shift amount of light reaching the position at each time for each position in the first direction and the second direction; and a first direction on a predetermined plane.
- a one-dimensional Fourier transform is performed on the time variable for the data having the position, the position in the second direction, and the time as variables, and data having the same incident angle with respect to the object is extracted from the data after the Fourier transform based on the Doppler effect.
- Performance And the light output from the light source unit is input, the input light is divided into two at the front stage of the object to be the first light and the second light, and the first light or the second light is And an optical system that causes heterodyne interference between the first light and the second light on a predetermined plane after being modulated by the modulator.
- the moving object is irradiated with light from multiple directions by the light source unit to generate scattered light.
- the scattered light undergoes an amount of Doppler shift corresponding to the scattering direction.
- scattered light having the same scattering angle is received at the same position on the detection unit.
- Data that changes with time at a frequency corresponding to the Doppler shift amount of the light reaching each position on the predetermined plane is output from the detection unit at each time for each position in the first direction and the second direction.
- the arithmetic unit Based on the Doppler effect from the data after the Fourier transform, the arithmetic unit performs a one-dimensional Fourier transform on the time variable for the data in which the position in the first direction, the position in the second direction, and the time are variables on a predetermined plane. Data having the same incident angle with respect to the object is extracted. According to this configuration, since data having the same incident angle with respect to the object can be extracted using the Doppler effect, the object is imaged a plurality of times within a period in which it can be considered that the object is stationary. There is no need. Therefore, an image of a moving object can be obtained even when a photodetector having a low readout speed per pixel is used.
- the calculation unit may extract plane data satisfying the following formula (1) from the data after Fourier transform.
- ⁇ is the time frequency of the data after the Fourier transform
- ⁇ is the modulation frequency
- y is the position of the detector in the second direction
- ⁇ 0 is the incident angle.
- ⁇ and ⁇ are constants.
- data having the same incident angle with respect to the object can be extracted from the data after the one-dimensional Fourier transform regarding the time variable based on the Doppler effect.
- the above formula (1) indicates that the Doppler effect is generated by the object moving at the velocity V, and the time frequency ⁇ and the position y have a predetermined relationship based on the Doppler effect.
- a condensing lens disposed between the object and the detection unit may be further provided, and the calculation unit may extract surface data satisfying the following formula (2) from the data after Fourier transform.
- ⁇ is the time frequency of the data after the Fourier transform
- ⁇ is the modulation frequency of the modulator
- V is the moving speed of the object
- ⁇ is the light source unit.
- the apparatus further comprises a condensing lens disposed between the object and the detection unit, and the light receiving surface of the detection unit is a surface on which a Fresnel diffraction image of the object is formed in the first direction by the condensing lens, A first Fourier transform unit that is arranged on a surface on which a franphofer diffraction image of the object is formed in the second direction and in which the calculation unit performs a one-dimensional Fourier transform on a time variable, and a one-dimensional Fourier transform on the first direction 2 divided by a second phase that is a value determined by a position where the detection unit is arranged, and a second cutting unit that extracts data having the same incident angle with respect to the object based on the Doppler effect. And a next phase division unit. In this case, a complex amplitude image depending on the incident angle can be obtained appropriately.
- the apparatus further includes a condensing lens disposed between the object and the detection unit, and the light receiving surface of the detection unit is a surface on which the franphophor diffraction image of the object is formed in the first direction by the condensing lens.
- a first Fourier transform unit that is arranged on a surface on which a franphofer diffraction image of the object is formed in the second direction, and the calculation unit performs one-dimensional Fourier transform on the time variable, and the object based on the Doppler effect And an oblique cut portion for extracting data having the same incident angle to. In this case, a complex amplitude image depending on the incident angle can be obtained appropriately.
- the apparatus further includes a condensing lens disposed between the object and the detection unit, and the light receiving surface of the detection unit is an imaging surface on which an image of the object is formed in the first direction by the condensing lens,
- a first Fourier transform unit that performs a one-dimensional Fourier transform with respect to a time variable and a one-dimensional Fourier transform with respect to a first direction are arranged on a surface on which a francophor diffraction image of an object is formed in the second direction.
- the 2nd Fourier-transform part to perform and the diagonal cutting part which extracts the data with the same incident angle with respect to a target object based on the Doppler effect may be included. In this case, a complex amplitude image depending on the incident angle can be obtained appropriately.
- the apparatus further includes a condensing lens arranged between the object and the detection unit, the condensing lens is an f ⁇ lens, and the arithmetic unit obtains data of a surface satisfying the following expression (3) from the data after Fourier transform. It may be extracted.
- Equation (3) ⁇ is the time frequency of the data after Fourier transform, ⁇ is the modulation frequency of the modulator, V Y is the moving speed of the object in the second direction, and ⁇ is the light source unit (The wavelength of the light to irradiate, y is the position in the second direction of the detector, f Y is the focal length of the condenser lens in the second direction, and ⁇ 0 is the incident angle.)
- data having the same incident angle with respect to the object can be more strictly extracted from the data after the one-dimensional Fourier transform related to the time variable based on the Doppler effect.
- the illumination lens which is arrange
- the object can be irradiated with light from multiple directions.
- the apparatus further includes a speed detection unit that detects the moving speed of the object, and the calculation unit performs the one-dimensional Fourier transform on the time variable based on the speed of the object detected by the speed detection unit. You may correct
- the light irradiation to the object may be an optical arrangement of transmitted illumination, and the light irradiation to the object may be an optical arrangement of reflected illumination.
- the light source unit may be a light source that generates light in a single longitudinal mode, or the light source unit may be a light source that generates broadband light. Furthermore, the light source unit may be a mode-locked laser.
- an image of a moving object can be obtained even when a photodetector having a low readout speed per pixel is used.
- (A) is a diagram for explaining the incidence angle of the incident light L 0 is a diagram for explaining a (b) is the scattering angle of the scattered light caused by the object 2 theta.
- the incident light L 0 is a view of the manner in which scattered from ⁇ axially by the object 2. It is a figure which shows the procedure which acquires an incident angle dependence complex amplitude image by the phase shift method which is a prior art. It is a figure which shows the procedure of acquisition of the incident angle dependence complex amplitude image in the observation apparatus 1 which concerns on 1st Embodiment.
- FIG. 6 is a diagram schematically showing light incident on a detection unit 50 via a condenser lens 30. It is the figure which showed typically a mode that the scattered light by the incident light with three incident angles injects into the detection part. It is a block diagram which shows the structure of the calculating part 60 of the 1st arrangement example.
- a frequency-dependent complex amplitude image a is schematically shown. It is the figure which looked at the schematic diagram of FIG. 13 from the X-axis direction. It is a figure which shows the structure of the condensing lens 30A of the 2nd example of arrangement
- the observation apparatus of the present embodiment uses a Doppler shift effect that occurs when light is irradiated to a moving object, and in particular, between the incident direction of incident light incident on the object and the Doppler shift amount.
- An image of an object is acquired by utilizing the existence of a certain relationship.
- FIG. 1 is a diagram for explaining the principle of acquisition of an image of an object by the observation apparatus of the present embodiment.
- This figure shows the ⁇ coordinate system, the xy coordinate system, and the uv coordinate system.
- the ⁇ , ⁇ , x, y, u, and v axes are all perpendicular to the optical axis of the condenser lens 30.
- the ⁇ axis and the x axis are parallel to each other.
- the ⁇ axis and the y axis are parallel to each other.
- the object 2 to be observed exists on the ⁇ plane.
- the condenser lens 30 exists on the xy plane. Further, the rear focal plane of the condenser lens 30 coincides with the uv plane.
- the distance between the ⁇ plane and the xy plane is d.
- the distance between the xy plane and the uv plane coincides with the focal length f of the condenser lens 30.
- the ⁇ -axis direction, the x-axis direction, the X-axis direction, and the first direction are parallel to each other, and the ⁇ -axis direction, the y-axis direction, the Y-axis direction, and the second direction are parallel to each other. is there.
- the object 2 is moving in the - ⁇ direction on the ⁇ plane, and the object 2 is irradiated with light L 0 having various incident angles.
- Scattered light L 1 to L 3 generated by irradiating the object 2 with light L 0 travels in various directions and undergoes a Doppler shift due to the movement of the object 2.
- Scattered light L 1 having a scattering direction vector component in the same direction as the moving direction of the object 2, the optical frequency increases.
- the scattered light L 2 that does not have the scattering direction vector component in the moving direction of the object 2 does not change the optical frequency.
- the scattered light L3 having the scattering direction vector component in the direction opposite to the moving direction of the object 2 has a low optical frequency.
- FIG. 2A is a diagram for explaining the incident angle of the incident light L 0
- FIG. 2B is a diagram for explaining the scattering angle of the scattered light L generated by the object 2.
- FIG. 2A in order to express the incident angle of the incident light L 0 , it is necessary to describe with two variables of an elevation angle ⁇ 0 and an azimuth angle ⁇ 0 , respectively.
- the point light source virtually arranged in the object 2 is set as the origin of the ⁇ coordinate system.
- the angle formed by the incident direction vector of the incident light L 0 and the ⁇ axis with respect to the origin is defined as the elevation angle ⁇ 0, and the angle formed by the projection vector of the incident direction vector on the ⁇ plane and the ⁇ axis is defined as the azimuth angle.
- ⁇ 0 an angle formed between the projection vector of the incident light L 0 on the ⁇ plane and the ⁇ axis.
- the angle formed by the direction vector of the scattered light L from the point light source and the ⁇ axis is an elevation angle ⁇
- the projection vector of the scattered direction vector on the ⁇ plane and the ⁇ axis Is defined as an azimuth angle ⁇ .
- an angle between the projection vector of the scattered light L on the ⁇ plane and the ⁇ axis is ⁇ ′.
- FIG. 3 is a view of the state in which the incident light L 0 is scattered by the object 2 as viewed from the ⁇ -axis direction.
- the incident unit vector of the incident light L 0 is represented as s
- the scattered unit vector of the scattered light L is represented as s.
- Equation (4) indicates that the Doppler shift amount ⁇ d is proportional to the inner product of (s ⁇ s 0 ) and the velocity vector V of the moving object.
- incident light having an incident vector component in the same direction as the moving direction of the object 2 has a low optical frequency of scattered light generated by the object 2 due to the first Doppler effect.
- incident light having an incident vector component in a direction opposite to the moving direction of the object 2 has a higher optical frequency of scattered light generated by the object 2 due to the first Doppler effect.
- Incident light that does not have an incident vector component in a direction parallel to the moving direction of the object 2 does not cause the first Doppler effect, and the optical frequency of scattered light generated by the object 2 does not change.
- the scattered light having the scattering direction vector component in the same direction as the moving direction of the object 2 has a higher optical frequency of the scattered light due to the second Doppler effect.
- the scattered light having the scattering direction vector component in the direction opposite to the moving direction of the object 2 has a low optical frequency of the scattered light due to the second Doppler effect.
- the scattered light that does not have the scattering direction vector component in the direction parallel to the moving direction of the object 2 does not cause the second Doppler effect, and the optical frequency of the scattered light does not change.
- a three-dimensional amplitude image and a three-dimensional phase image can be obtained from a complex amplitude image having an incident angle ⁇ 0 as a variable (hereinafter also referred to as “incident angle-dependent complex amplitude image”) using an X-ray CT algorithm or a diffraction tomography algorithm. It is known. Therefore, if an incident angle-dependent complex amplitude image can be obtained, a three-dimensional amplitude image and a three-dimensional phase of the object can be obtained.
- the procedure for acquiring the incident angle dependent complex amplitude image in the observation apparatus according to one embodiment of the present invention is described as the acquisition of the incident angle dependent complex amplitude image by the phase shift method. This will be described in comparison with the procedure.
- FIG. 4 is a diagram showing a procedure for acquiring an incident angle-dependent complex amplitude image by the phase shift method which is a conventional technique.
- the vertical axis of the upper graph in FIG. 4 indicates the position of the object, and the horizontal axis indicates time.
- the arrows shown in the upper part of FIG. 4 indicate the imaging timing. It is assumed that the object is moving at a constant speed in a predetermined direction.
- the phase shift method with respect to the object to be moved at time t 1, and a plurality captures an image of the object within the time object may deemed not moving, obtaining a plurality of interference intensity image To do.
- the interference intensity image is caused to interfere with the reference light whose optical path length is different by ⁇ / 4 to obtain a complex amplitude image having the position of the object as a variable (hereinafter referred to as “position-dependent complex”). Also referred to as an “amplitude image”). Since the object is moving at a constant speed, the position-dependent complex amplitude image is also a complex amplitude image with time as a variable. Such a position-dependent complex amplitude image is acquired a plurality of times at predetermined time intervals (t 1 , t 2 , t 3 in FIG. 4).
- a position-dependent complex amplitude image obtained at each time is subjected to a one-dimensional Fourier transform with respect to a time variable t, whereby a complex amplitude image having a frequency as a variable (hereinafter, “frequency-dependent complex amplitude image”). Also called). Thereafter, an incident angle dependent complex amplitude image is obtained by utilizing a predetermined relationship between the frequency ⁇ and the incident angle ⁇ 0 .
- a plurality of objects are imaged within a time when it can be considered that the object is not moving with respect to the moving object, and a plurality of interference intensity images are acquired.
- the phase shift method needs to obtain an interference intensity image using a two-dimensional detector having a frame rate of about 100 MHz.
- FIG. 5 is a diagram illustrating a procedure for acquiring an incident angle-dependent complex amplitude image in the observation apparatus according to the embodiment of the present invention. Similar to FIG. 4, the vertical axis of the upper graph in FIG. 5 indicates the position of the object, and the horizontal axis indicates time. The arrows shown in the upper part of FIG. 5 indicate the imaging timing. It is assumed that the object is moving at a constant speed in a predetermined direction. In the observation apparatus according to the present embodiment, only one object is imaged within a time when it can be considered that the object is not moving with respect to the object moving at time t 1 . Get a statue.
- Such an interference intensity image is acquired a plurality of times at predetermined time intervals (t 1 , t 2 , t 3 in FIG. 5). Thereafter, without performing an operation of calculating a position-dependent complex amplitude image from the position-dependent interference intensity image, the interference intensity image obtained at each time is subjected to a one-dimensional Fourier transform with respect to the time variable t to obtain a frequency-dependent complex amplitude image. Thereafter, an incident angle-dependent complex amplitude image is obtained from the frequency-dependent complex amplitude image using the fact that there is a predetermined relationship between the Doppler shift frequency ⁇ and the incident angle ⁇ 0 .
- FIG. 6 is a diagram illustrating a configuration of the observation apparatus 1 according to the first embodiment.
- the observation apparatus 1 of the present embodiment includes a light source unit 10, an illumination lens 20, a beam splitter HM1, a condenser lens 30, a beam splitter HM2, a modulation unit 40, a mirror M1, a mirror M2, and a detection unit 50. And an arithmetic unit 60.
- the light source unit 10 irradiates light from multiple directions so that a Doppler effect occurs on an object moving through the illumination lens 20.
- the light source unit 10 is, for example, a HeNe laser light source, and outputs light (optical frequency ⁇ 0 ) to be irradiated on the object 2 as parallel light.
- the beam splitter HM1 inputs light output from the light source unit 10 before the object 2 and divides the light into two to form first light and second light, of which the first light is an illumination lens. 20, and the second light is output to the modulation unit 40.
- the illumination lens 20 receives the light output from the beam splitter HM1, and irradiates the object 2 with light having various directions in the Y-axis direction and having a certain direction in the X-axis direction.
- a cylindrical lens is used as the illumination lens 20 .
- FIG. 7 is a diagram illustrating an example of the illumination lens 20
- FIG. 7A is a side view of the illumination lens 20 viewed from the Y-axis direction
- FIG. 7B is a diagram illustrating the illumination lens 20 viewed from the X-axis direction.
- FIG. A dotted line shown in FIG. 7 represents a state of image formation of light in the illumination lens 20.
- F LS2 in FIG. 7 indicates the focal length of the illumination lens 20. As shown in FIG.
- a surface having a curvature is disposed in parallel to the Y-axis direction, and a surface having no curvature is disposed in parallel to the X-axis direction.
- the object 2 is irradiated with light having parallel light in the X-axis direction and convergent light in the Y-axis direction. That is, the object 2 is irradiated with light from multiple directions in the Y-axis direction.
- a cylindrical lens having a convex lens is shown as the illumination lens 20, but a cylindrical lens having a concave lens may be used.
- the object 2 is irradiated with light having parallel light in the X-axis direction and diverging light in the Y-axis direction.
- the incident vectors s 0 of the convergent light or divergent light output by the illumination lens 20 are preferably present in the same plane S 0 .
- the plane S 0 is a plane formed by the optical axis ⁇ and the moving direction of the object 2.
- the observation apparatus 1 of the present embodiment may not include the illumination lens 20 and may be irradiated from the light source unit 10 with light whose X-axis direction is parallel light and whose Y-axis direction is convergent light or divergent light.
- the modulation unit 40 includes a first modulator 41 and a second modulator 42.
- the first modulator 41 and the second modulator 42 are, for example, acousto-optic elements.
- the first modulator 41 diffracts the light output from the light source unit 10 using the first modulation signal, and outputs the diffracted light to the second modulator 42.
- the second modulator 42 diffracts the light output from the first modulator 41 by the second modulation signal, and outputs the diffracted light to the mirror M1.
- the light output from the second modulator 42 is sequentially reflected by the mirrors M1 and M2 and output to the beam splitter HM2.
- the modulation unit 40 may be disposed on the optical path of the first light.
- the frequency of the first modulation signal applied to the first modulator 41 and the frequency of the second modulation signal applied to the second modulator 42 are slightly different.
- the first modulation frequency is 40 MHz
- the second modulation frequency is 40.000010 MHz
- the difference ⁇ between them is 10 Hz.
- Each of the first modulation signal and the second modulation signal is a sine wave.
- the modulation unit 40 does not necessarily need to be composed of the first modulator 41 and the second modulator 42. That is, the modulator 40 only needs to play a role of changing the frequency of light by a predetermined frequency ⁇ (hereinafter referred to as modulation frequency ⁇ ), and the modulation unit 40 may be composed of one modulator. Alternatively, three or more modulators may be provided.
- the condenser lens 30 inputs scattered waves generated by the object 2 by irradiation of the light output from the illumination lens 20, and the X-axis direction is a Fresnel diffraction image on the light-receiving surface of the detection unit 50, and the Y-axis direction. Forms an image which is a Franforfer diffraction image.
- the condenser lens 30 outputs such light to the beam splitter HM2.
- FIG. FIG. 8A is a side view of the condenser lens 30 viewed from the Y-axis direction
- FIG. 8B is a side view of the condenser lens 30 viewed from the X-axis direction.
- a dotted line shown in FIG. 8 represents a state of image formation of light in the condenser lens 30.
- the condensing lens 30 is composed of four lenses: a lens OB, a lens LS1, a lens LS2, and a lens LS3.
- the rear focal plane of the lens OB is FP.
- the lens LS1 is a lens having no curvature in the X-axis direction and having a curvature in the Y-axis direction.
- the lens LS2 is a lens having a curvature in the X-axis direction and no curvature in the Y-axis direction.
- the lens LS3 is a lens having no curvature in the X-axis direction and having a curvature in the Y-axis direction.
- the Y direction of the lens LS1 and the lens LS3 forms a 4f optical system.
- the 4f optical system is an optical system in which the rear focal plane of the lens LS1 coincides with the front focal plane of the lens LS3, and an image of the front focal plane of the lens LS1 is formed on the rear focal plane of the lens LS3.
- the lens LS2 is disposed on a surface different from the rear focal plane of the lens LS1 and different from the front focal plane of the lens LS3.
- the condensing lens 30 causes the light output from the lens OB in the X-axis direction to be reflected on the light receiving surface of the detection unit 50 by the lens LS2 instead of the Franforfer diffraction image surface.
- a Fresnel diffraction image plane that is not an image plane is formed. Further, as shown in FIG.
- the condenser lens 30 causes the light output from the rear focal plane FP of the lens OB to be parallel light by the lens LS1 and converged by the lens LS3 in the Y-axis direction.
- a franc forfer diffraction image surface is formed on the light receiving surface of the detection unit 50.
- the beam splitter HM2 causes light (object light) that has arrived from the condenser lens 30 and light (reference light) that has arrived from the modulation unit 40 via the mirrors M1 and M2 to enter the light receiving surface of the detection unit 50, and Both lights cause heterodyne interference on the light receiving surface of the detection unit 50.
- the frequency of the light output from the modulation unit 40 and incident on the light receiving surface of the detection unit 50 is ⁇ 0 + ⁇ .
- ⁇ is a difference frequency between the first modulation frequency and the second modulation frequency.
- the detection unit 50 is arranged on a predetermined plane where scattered light having the same scattering angle is incident on the same position, and temporally changes at a frequency corresponding to the Doppler shift amount of the light reaching each position on the predetermined plane. Data is output at each time for each position in the first direction and the second direction.
- the detection unit 50 detects light reaching the light receiving surface of the detection unit 50 by a pixel structure arranged in parallel in the X-axis direction and the Y-axis direction, and outputs a signal corresponding to the detected light. It is a vessel.
- the light receiving surface of the detection unit 50 is a surface on which the Fresnel diffraction image of the object 2 is formed in the first direction by the condenser lens 30, and the francophor diffraction image of the object 2 is formed in the second direction. Placed on the surface.
- An axis perpendicular to the X axis and the Y axis is taken as a Z axis.
- FIG. 9 is a diagram schematically showing light incident on the detection unit 50 via the condenser lens 30.
- the object 2 is disposed on the front focal plane of the condenser lens 30 in the Y-axis direction, and the light receiving surface of the detection unit 50 is disposed on the rear focal plane of the condenser lens 30.
- These scattered lights L 1 to L 3 reach the positions P 1 to P 3 of the detection unit 50 through the condenser lens 30, respectively.
- a signal that is frequency-shifted by the frequency ⁇ d is observed as an interference beat signal due to the Doppler effect of the scattered light L 1 to L 3 with respect to the frequency ⁇ .
- the interference beat signal is recorded over a predetermined period, and the amplitude and phase (that is, complex amplitude value) of each scattering angle are obtained by calculating the amplitude and phase of the interference beat signal.
- Scattered light having various scattering angles ⁇ ′ is generated for each incident angle ⁇ 0
- FIG. 10 illustrates scattered light L 1 to L 3 having a specific scattering angle ⁇ ′.
- Scattered light L 1 to L 3 having the same scattering angle ⁇ ′ reaches the same position P 2 via the condenser lens 30. Since these scattered lights L 1 to L 3 have different incident angles ⁇ 0 , they undergo different frequency transitions due to the Doppler effect. That is, the frequencies of the scattered lights L 1 to L 3 are different from each other.
- the scattered light due to the incident light having a different incident angle ⁇ 0 reaches the same pixel of the detection unit 50, but the signal for each incident angle is obtained by frequency discrimination from the frequency transition of the scattered light by a technique such as Fourier transform. Can be extracted.
- the light having a different incident angle ⁇ 0 and the same scattering angle ⁇ ′ out of the scattered light from the object 2 by the condenser lens 30 is one point (x, gather in y).
- the point (x, y) is the coordinates of the pixels of the detection unit 50 arranged in two dimensions. That is, the scattering angle ⁇ of the scattered light observed at the point (x, y) is a fixed value.
- scattered light generated by the object 2 since the cause frequency transition frequency omega d by the equation (4), the optical heterodyne interference measurement, interference intensity detected at the point (x, y) is the frequency omega It will fluctuate with d .
- the maximum Doppler shift frequency B W can be expressed by Equation (6).
- ⁇ is the wavelength of the incident light
- V is the velocity of the object. Therefore, the Doppler shift frequency band becomes 2B W.
- the projection incident angle ⁇ 0 ′ on the YZ plane coincides with the incident angle ⁇ 0 . If the incident unit vector s 0 has an X-axis component, ⁇ 0 in equation (5) may be replaced with the projected incident angle ⁇ 0 ′.
- the calculation unit 60 performs a one-dimensional Fourier transform on the time variable with respect to data having the position in the first direction, the position in the second direction, and the time on the predetermined plane acquired by the detection unit 50 as variables. Data with the same incident angle is extracted from the data based on the Doppler effect.
- the calculation unit 60 includes a first Fourier transform unit 61, an oblique cut unit 62 (extraction unit), a second Fourier transform unit 64, and a secondary phase division unit 63.
- the first Fourier transform unit 61 performs a one-dimensional Fourier transform on the time variable for the interference intensity image acquired by the detection unit 50.
- the oblique cutting unit 62 extracts data having the same incident angle from the data subjected to the one-dimensional Fourier transform by the first Fourier transform unit 61 based on the Doppler effect.
- the second Fourier transform unit 64 performs a one-dimensional Fourier transform on the variable x for the data output from the oblique cut unit 62.
- the secondary phase division unit 63 divides the data output from the second Fourier transform unit 64 by the secondary phase H (x).
- the first Fourier transform unit 61, the oblique cut unit 62, the second Fourier transform unit 64, and the secondary phase division unit 63 are as long as the secondary phase division unit 63 is arranged at the subsequent stage of the second Fourier transform unit 64. , They may be arranged in any order with each other.
- the interference intensity image acquired by the detection unit 50 is represented as i (x, y; ⁇ ).
- FIG. 12 shows an example of the interference intensity image i (x, y; ⁇ ) acquired by the detection unit 50.
- a circular opening having a diameter of 25 ⁇ m moved at a speed of 10 ⁇ m / second is used as the object 2.
- the detection unit 50 is a CCD camera that outputs 180 images of 640 ⁇ 128 pixels per second with a pixel size of 7.4 ⁇ 7.4 ⁇ m.
- the interference fringe interval changes from number 1 to number 7.
- the interference intensity image i (x, y; ⁇ ) can be expressed as i (t, x, y).
- the first Fourier transform unit 61 obtains a frequency-dependent complex amplitude image a ( ⁇ , x, y) by performing Fourier transform on the time variable t on the interference intensity image i (t, x, y).
- ⁇ is a time frequency.
- FIG. 13 schematically shows a frequency-dependent complex amplitude image a ( ⁇ , x, y) obtained by Fourier transform.
- FIG. 14 is a view of FIG.
- the frequency-dependent complex amplitude image a has the XY plane arranged in parallel in the paper plane direction in the X-axis direction. This will be described in two dimensions on the ⁇ -Y plane.
- the scattering angle ⁇ ′ in the equation (5) is a value that is determined based on the physical arrangement of the object 2, the condenser lens 30, and the detection unit 50, and is a value that is constant during measurement. Assuming that the focal length of the condenser lens 30 in the Y-axis direction is f Y , when the rear focal plane of the condenser lens 30 in the Y-axis direction coincides with the light receiving surface of the detection unit 50, the scattering angle ⁇ ′ It is represented by the formula (7) with a focal length f Y and the light-receiving surface coordinate of the converging lens 30 (x, y).
- the scattering angle ⁇ ′ is a projected scattering angle determined only by the variable y.
- the time frequency ⁇ output by the first Fourier transform unit 61 is expressed by the following equation (8).
- the oblique cutting unit 62 extracts a plane satisfying the expression (1) from the frequency-dependent complex amplitude image a ( ⁇ , x, y).
- the image extracted by the oblique cut section 62 is the incident angle dependent complex amplitude image A ( ⁇ 0 , x, y).
- 13 and 14 schematically show this mathematical operation.
- an oblique surface drawn by a broken line is an incident angle dependent complex amplitude image A ( ⁇ 0 , x, y) extracted by the oblique cut unit 62.
- This incident angle-dependent complex amplitude image A ( ⁇ 0 , x, y) is extracted so as to cross the frequency ⁇ direction and the Y-axis direction with respect to a plurality of complex amplitude images a ( ⁇ , x, y).
- the element data of the incident angle dependent complex amplitude image A ( ⁇ 0 , x, y) is element data on a linear linear function in the ⁇ -Y plane as shown in Expression (1). .
- this approximate value can be brought close to a true value by using an f ⁇ lens in the Y-axis direction of the condenser lens 30.
- the focal length is f
- the incident light having an angle ⁇ from the front focal point reaches the position y on the rear focal plane of the lens
- the oblique cut unit 62 extracts a plane satisfying the expression (3) from the frequency-dependent complex amplitude image a ( ⁇ , x, y).
- the light receiving surface of the detection unit 50 is arranged on the surface where the X-axis direction is the Fresnel diffraction image of the object 2 and the Y-axis direction is the surface on which the Franforfer diffraction image of the object 2 is formed. Yes.
- a secondary phase H (x) appears as image blur. Therefore, in this arrangement example, the secondary phase H (x) appears in the X-axis direction.
- the secondary phase division unit 63 divides the incident angle dependent complex amplitude image A ( ⁇ 0 , x, y) obtained in the oblique cutting unit 62 by the secondary phase H (x) after the one-dimensional Fourier transform on the variable x.
- the light receiving surface of the detection unit 50 is a franphophor diffraction image of the object 2 in the X-axis direction and the franphophore of the object 2 in the Y-axis direction.
- the same complex amplitude image as that obtained when the diffraction image is formed is obtained.
- the secondary phase H (x) is a value determined by the position where the detection unit 50 is disposed.
- the secondary phase H (x) is expressed by Equation (9). In equation (9), ⁇ is a constant.
- the second-order phase division unit 63 performs a one-dimensional Fourier transform on the incident angle-dependent complex amplitude image A ( ⁇ 0 , x, y) obtained by Expression (1) with respect to the variable x, and then obtains the second-order phase H of Expression (9). By dividing by (x), an incident angle dependent complex amplitude image A without blur is obtained. As described above, the observation device 1 of this arrangement example obtains the incident angle dependent complex amplitude image A.
- the light receiving surface of the detection unit 50 is a surface on which the X-axis direction is a francophor diffraction image of the target object 2 and the Y-axis direction is a surface on which the franc forfer diffraction image of the target object 2 is formed. Be placed.
- a condenser lens 30A instead of the condenser lens 30 of the first arrangement example, a condenser lens 30A is provided instead of the condenser lens 30 of the first arrangement example.
- a calculation unit 60A is provided instead of the calculation unit 60 in the first arrangement example.
- Other configurations are the same as those in the first arrangement example.
- only differences from the first arrangement example will be described, and description of points that may be considered the same as the first arrangement example will be omitted.
- FIG. 15 shows a condensing lens 30A employed in this arrangement example.
- the condensing lens 30 ⁇ / b> A inputs scattered waves generated by the object 2 by irradiation of the light output from the illumination lens 20, and the X axis direction on the light receiving surface of the detection unit 50 is a Franforfer diffraction image, An image whose axial direction is a Franforfer diffraction image is formed.
- FIG. 15A is a side view of the condenser lens 30A viewed from the Y-axis direction
- FIG. 15B is a side view of the condenser lens 30A viewed from the X-axis direction.
- a dotted line shown in FIG. 15 represents a state of image formation of light in the condensing lens 30A.
- the condensing lens 30A includes three lenses, a lens OB, a lens LS1, and a lens LS3.
- the rear focal plane of the lens OB is FP.
- the lens LS1 is a lens having a curvature in the X-axis direction and the Y-axis direction.
- the lens LS3 is a lens having a curvature in the X-axis direction and the Y-axis direction.
- the condensing lens 30A converts the light output from the back focal plane of the lens OB into parallel light by the lens LS1 and converges it by the lens LS3 in the X-axis direction.
- a Franforfer diffraction image is formed on 50 light-receiving surfaces.
- FIG. 15A the condensing lens 30A converts the light output from the back focal plane of the lens OB into parallel light by the lens LS1 and converges it by the lens LS3 in the X-axis direction.
- a Franforfer diffraction image is formed
- the condensing lens 30A makes light output from the rear focal plane of the lens OB parallel light by the lens LS1 and converges it by the lens LS3 in the Y-axis direction.
- a Franforfer diffraction image is formed on the light receiving surface of the detector 50.
- the detection unit 50 is arranged on a predetermined plane where scattered light having the same scattering angle ⁇ ′ is incident on the same position by the condensing lens 30A, and corresponds to the Doppler shift amount of the light reaching each position on the predetermined plane. Data that changes with time at a certain frequency is output at each time for each position in the first direction and the second direction.
- the arithmetic unit 60A of the present arrangement example includes a first Fourier transform unit 61 and an oblique cut unit 62, but does not include a second Fourier transform unit 64 and a secondary phase division unit 63.
- the light receiving surface of the detection unit 50 is arranged on the surface on which the X-axis direction is the francforfer diffraction image of the object 2 and the Y-axis direction is the surface on which the francophor diffraction image of the object 2 is formed. Has been.
- a one-dimensional Fourier transform related to the variable x is optically performed by a lens action having a curvature in the X direction included in the lenses LS1 and LS3 constituting the lens 30A.
- the secondary phase H (x) is 1. Therefore, in this arrangement example, it is not necessary to perform a one-dimensional Fourier transform on the variable x by the second Fourier transform unit 64. Further, it is not necessary to divide the secondary phase H (x) by the secondary phase division unit 63.
- Angle of incidence obtained in the present exemplary arrangement dependent complex amplitude images A ( ⁇ 0, x, y) is the angle of incidence obtained by Equation (1) in the first arrangement example dependent complex amplitude images A ( ⁇ 0, x, y ) Is divided by the secondary phase H (x) of Equation (9) and is the same image as the incident angle dependent complex amplitude image A without blur. That is, in the second arrangement example, the same effect as that of the secondary phase division unit 63 is obtained by the optical action of the condensing lens 30A. Conversely, in the first arrangement example, it can be said that the secondary phase division unit 63 realizes the optical action of the lens 30A of the second arrangement example by calculation.
- the light receiving surface of the detection unit 50 is arranged on the surface on which the X-axis direction is the imaging surface of the object 2 and the Y-axis direction is the surface on which the Franforfer diffraction image of the object 2 is formed.
- a condenser lens 30B is provided instead of the condenser lens 30 in the first arrangement example and the condenser lens 30A in the second arrangement example.
- a calculation unit 60B is provided instead of the calculation unit 60 in the first arrangement example and the calculation unit 60A in the second arrangement example.
- FIG. 17 shows a condensing lens 30B employed in this arrangement example.
- the condensing lens 30B inputs a scattered wave generated by the object 2 by irradiation of the light output from the illumination lens 20, and is an object image of the object 2 in the X-axis direction on the light receiving surface of the detection unit 50, A Francophor diffraction image of the object 2 is formed in the Y-axis direction.
- FIG. 17A is a side view of the condenser lens 30B viewed from the Y-axis direction
- FIG. 17B is a side view of the condenser lens 30B viewed from the X-axis direction.
- a dotted line shown in FIG. 17 represents a state of image formation of light in the condensing lens 30B.
- the condensing lens 30B includes four lenses: a lens OB, a lens LS1, a lens LS2, and a lens LS3.
- the lens OB is an objective lens having a numerical aperture NA corresponding to 20 times of 0.45.
- the rear focal plane of the lens OB is FP.
- the lens LS1 is a lens having no curvature in the X-axis direction and having a curvature in the Y-axis direction.
- the lens LS2 is a lens having a curvature in the X-axis direction and no curvature in the Y-axis direction.
- the lens LS3 is a lens having no curvature in the X-axis direction and having a curvature in the Y-axis direction.
- the lens LS2 is a rear focal plane of the lens LS1 and is disposed on the front focal plane of the lens LS3. As shown in FIG.
- the condensing lens 30B converts the light output from the rear focal plane of the lens OB into parallel light by the lens LS2 in the X-axis direction, Form. Further, as shown in FIG. 17B, the condenser lens 30B causes the light output from the rear focal plane of the lens OB to be parallel light by the lens LS1 and converged by the lens LS3 in the Y-axis direction. Then, a Franforfer diffraction image surface is formed on the light receiving surface of the detection unit 50.
- a condensing lens 30B between the object 2 and the detection unit 50, light having different incident angles ⁇ 0 and the same scattering angle ⁇ ′ is detected from the scattered light from the object 2. The light is condensed at one point on the light receiving surface of the unit 50.
- the arithmetic unit 60 ⁇ / b> B of the present arrangement example further includes a second Fourier transform unit 64 in addition to the first Fourier transform unit 61 and the oblique cut unit 62.
- the second Fourier transform unit 64 performs a one-dimensional Fourier transform on the variable x for the data output from the first Fourier transform unit.
- the functions of the first Fourier transform unit 61 and the oblique cut unit 62 are the same as those in the first arrangement example.
- the 1st Fourier-transform part 61 and the 2nd Fourier-transform part 64 may be mutually replaced
- 19 to 21 show complex amplitude images acquired by the observation apparatus of this arrangement example.
- 19 to 21 a circular opening having a diameter of 25 ⁇ m moved at a speed of 10 ⁇ m / second was used as the object 2.
- the detection unit 50 is a CCD camera that outputs 180 images of 640 ⁇ 128 pixels per second with a pixel size of 7.4 ⁇ 7.4 ⁇ m.
- FIG. 19 shows the amplitude image of the frequency-dependent complex amplitude image a ( ⁇ , x, y) calculated by the calculation unit 60B for each frequency (numbers 1 to 6).
- FIG. 20 shows the phase images of the frequency-dependent complex amplitude image a ( ⁇ , x, y) acquired by the calculation unit 60B for each frequency (numbers 1 to 6).
- the horizontal axis is the X axis and the vertical axis is the Y axis.
- FIG. 21 shows an incident angle dependent complex amplitude image obtained by extracting the frequency dependent complex amplitude image a ( ⁇ , x, y) of FIGS. 19 and 20 with a plane satisfying the expression (1) by the oblique cut section 62.
- the left figure shows an amplitude image of the incident angle dependent complex amplitude image A
- the right figure shows a phase image of the incident angle dependent complex amplitude image A.
- the horizontal axis is the X axis
- the vertical axis is the Y axis.
- the moving object 2 is irradiated with light from multiple directions by the light source unit 10 and the illumination lens 20 to generate scattered light.
- the scattered light undergoes an amount of Doppler shift corresponding to the scattering angle ⁇ ′.
- scattered light having the same scattering angle ⁇ ′ is received at the same position on the detection unit 50.
- the data time-varying Doppler shift frequency omega d of light reaching the respective positions of the light receiving surface is output for each position of the first and second directions to each time.
- the calculation unit 60 performs a one-dimensional Fourier transform on the time variable for the data in which the position in the first direction, the position in the second direction, and the time on the predetermined plane are variables, and based on the Doppler effect from the data after the Fourier transform
- data having the same incident angle ⁇ 0 with respect to the object is extracted.
- data having the same incident angle ⁇ 0 with respect to the object can be extracted using the Doppler effect, so that the object 2 is detected a plurality of times within a period in which it can be considered that the object 2 is stationary. There is no need to take an image. Therefore, an image of the moving object 2 can be obtained even when the detection unit 50 having a low readout speed per pixel is used.
- the oblique cut section 62 extracts a plane satisfying the expression (1) to obtain the incident angle dependent complex amplitude image A ( ⁇ 0 , x, y).
- the surface which the diagonal cut part 62 extracts differs, and other points are the same. In the following, differences from the first embodiment will be mainly described, and description of points that are the same as those of the first embodiment will be omitted.
- equations (1) and (8) derived from equations (5) and (7), sin ⁇ ′ is approximated to ⁇ ′, and ⁇ ′ is approximated to y / f Y.
- the incident angle dependent complex amplitude image A ( ⁇ 0 , x, y) becomes a plane.
- Expressions (1) and (8) are expressions that are established for the condenser lenses 30, 30A, and 30B that satisfy the sine condition in the Y-axis direction. For this reason, when the condensing lenses 30, 30A, and 30B that satisfy the sine condition are used instead of performing the above approximation, the incident angle-dependent complex amplitude image A ( ⁇ 0 , x, y) is a plane.
- the expression (2) that is an exact expression is not a linear linear function, unlike the expressions (1) and (8) that are approximate expressions. However, by extracting the incident angle dependent complex amplitude image A ( ⁇ 0 , x, y) on the surface S satisfying the expression (2), the highly accurate incident angle dependent complex amplitude image A can be obtained.
- the observation apparatus 1 of the present embodiment when the speed of the object 2 changes, frequency modulation occurs in the Doppler signal, and the finally obtained image of the object 2 expands and contracts in the flow direction.
- the observation apparatus 1 of the present embodiment further includes a speed detection unit that detects the moving speed of the object 2.
- the calculating part 60 it is suitable for the calculating part 60 to correct
- the photographing timing of the detection unit 50 may be achieved based on the speed of the object 2 detected by the speed detection unit.
- the speed detection unit may detect a part of the light directed from the beam splitter HM2 to the detection unit 50 on the Fourier plane, or may detect a part of the light receiving surface of the detection unit 50. It may include pixels provided independently. The size of the pixel, it is preferable to have an area with a resolution of the moving speed derived from the relationship between the moving speed V and the Doppler frequency omega d of the object 2.
- the observation device 1 of the present embodiment in the second embodiment, light (0th-order light) that is not scattered by the object 2 out of the light L0 irradiated to the object 2 is collected at one point of the detection unit 50. Lighted. When the zero-order light reaches the light receiving surface of the detection unit 50, the quality of the signal obtained by the detection unit 50 deteriorates. Therefore, a neutral density filter for attenuating the 0th-order light may be provided so that all of the 0th-order light does not reach the light receiving surface of the detection unit 50. Or you may irradiate the target object 2 with the light which has a beam cross section so that generation
- the embodiment in which the image of the object of the light source is mainly acquired by the transmitted illumination is shown.
- the image may be acquired by the reflected (epi-illumination) illumination or the ultra-illumination.
- the light source it is preferable to use light of a single longitudinal mode, but it is not limited to this.
- information on the depth of the phase object can be acquired by using broadband light.
- a mode-locked laser can be used as such a light source.
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Abstract
Description
この場合、上記式(1)により、時刻変数に関する1次元フーリエ変換後のデータからドップラー効果に基づいて対象物に対する入射角が同一のデータを抽出することができる。上記式(1)は、対象物が速度Vで移動することによりドップラー効果が生じ、そのドップラー効果に基づいて、時間周波数ωと位置yに所定の関係があることを示している。
この場合、上記式(2)により、時刻変数に関する1次元フーリエ変換後のデータからドップラー効果に基づいて対象物に対する入射角が同一のデータを正確に抽出することができる。
この場合、上記式(3)により、時刻変数に関する1次元フーリエ変換後のデータからドップラー効果に基づいて対象物に対する入射角が同一のデータをより厳密に抽出することができる。
(第1配置例)
本実施形態の観察装置1は、以上で説明した原理に基づいて、対象物2の入射角依存複素振幅像を取得するものである。図6は、第1実施形態の観察装置1の構成を示す図である。本実施形態の観察装置1は、図6に示すように、光源部10、照明レンズ20、ビームスプリッタHM1、集光レンズ30、ビームスプリッタHM2、変調部40、ミラーM1、ミラーM2、検出部50及び演算部60を備えている。
次に、本実施形態の第2配置例について説明する。第2配置例では、検出部50の受光面が、X軸方向が対象物2のフランフォーファー回折像であって、Y軸方向が対象物2のフランフォーファー回折像が形成される面に配置される。このため、本配置例では、第1配置例の集光レンズ30に代えて、集光レンズ30Aを備えている。また、本配置例では、第1配置例の演算部60に代えて、演算部60Aを備えている。その他の構成は第1配置例と同じである。以下では、第1配置例との相違点についてのみ説明し、第1配置例と同一と見做し得る点については説明を省略する。
次に、本実施形態の第3配置例について説明する。第3配置例では、検出部50の受光面が、X軸方向が対象物2の結像面であって、Y軸方向が対象物2のフランフォーファー回折像が形成される面に配置される。このため、本配置例では、第1配置例の集光レンズ30、第2配置例の集光レンズ30Aに代えて、集光レンズ30Bを備えている。また、本配置例では、第1配置例の演算部60、第2配置例の演算部60Aに代えて、演算部60Bを備えている。その他の構成は第1配置例及び第2配置例と同じである。以下では、第1配置例及び第2配置例との相違点についてのみ説明し、第1配置例及び第2配置例と同一と見做し得る点については説明を省略する。
第1実施形態では、斜め切り部62が、式(1)を満たす平面を抽出して入射角依存複素振幅像A(θ0,x,y)を得た。第2実施形態では、斜め切り部62が抽出する面が異なり、それ以外の点は同じである。以下では、主に第1実施形態と異なる点について説明し、第1実施形態と同一である点については説明を省略する。
本実施形態の観察装置1では、対象物2の速度が変化するとドップラー信号に周波数変調が生じて、最終的に得られる対象物2の像が流れ方向に伸縮する。このような伸縮を補正するために、本実施形態の観察装置1は、対象物2の移動速度を検出する速度検出部を更に備えるのが好適である。そして、演算部60は、速度検出部により検出された対象物2の速度に基づいて、時間方向の1次元フーリエ変換の際に対象物2の速度変化に関する補正を行うのが好適である。または、速度検出部より検出された対象物2の速度に基づいて、検出部50の撮影タイミングを図ってもよい。
Claims (17)
- 移動している対象物へ光を多方向から照射する光源部と、
前記光源部による光照射により前記対象物で生じた散乱光のうち、同一の散乱角を有する散乱光が同一の位置に入射する所定平面に配置され、前記対象物の移動方向に垂直な方向を第1方向とし、前記対象物の移動方向に平行な方向を第2方向としたときに、前記所定平面上の各位置に到達した光のドップラーシフト量に応じた周波数で時間的に変化するデータを、前記第1方向及び前記第2方向の各位置について各時刻に出力する検出部と、
前記所定平面上の前記第1方向の位置、前記第2方向の位置、及び時刻を変数とするデータについて時刻変数に関する1次元フーリエ変換を行い、このフーリエ変換後のデータからドップラー効果に基づいて前記対象物に対する入射角が同一のデータを抽出する演算部と、
前記光源部から出力された光を入力して、その入力した光を前記対象物の前段で2分割して第1の光及び第2の光とし、前記第1の光又は第2の光を変調器で変調した後に前記所定平面上で、前記第1の光と前記第2の光とをヘテロダイン干渉させる光学系と、を備える観察装置。 - 前記対象物と前記検出部の間に配置される集光レンズを更に備え、
前記検出部の受光面が、前記集光レンズにより前記第1方向において前記対象物のフレネル回折像が形成される面であって、前記第2方向において前記対象物のフランフォーファー回折像が形成される面に配置され、
前記演算部が、前記時刻変数に関する1次元フーリエ変換を行う第1フーリエ変換部と、前記第1方向に関する1次元フーリエ変換を行う第2フーリエ変換部と、ドップラー効果に基づいて前記対象物に対する入射角が同一のデータを抽出する抽出部と、前記検出部が配置される位置により定まる値である2次位相で除する2次位相除算部とを含む、請求項1又は2に記載の観察装置。 - 前記対象物と前記検出部の間に配置される集光レンズを更に備え、
前記検出部の受光面が、前記集光レンズにより前記第1方向において前記対象物のフランフォーファー回折像が形成される面であって、前記第2方向において前記対象物のフランフォーファー回折像が形成される面に配置され、
前記演算部が、前記時刻変数に関する1次元フーリエ変換を行う第1フーリエ変換部と、ドップラー効果に基づいて前記対象物に対する入射角が同一のデータを抽出する抽出部とを含む、請求項1又は2に記載の観察装置。 - 前記対象物と前記検出部の間に配置される集光レンズを更に備え、
前記検出部の受光面が、前記集光レンズにより前記第1方向において前記対象物の像が形成される結像面であって、前記第2方向において前記対象物のフランフォーファー回折像が形成される面に配置され、
前記演算部が、前記時刻変数に関する1次元フーリエ変換を行う第1フーリエ変換部と、前記第1方向に関する1次元フーリエ変換を行う第2フーリエ変換部と、ドップラー効果に基づいて前記対象物に対する入射角が同一のデータを抽出する抽出部とを含む、請求項1又は2に記載の観察装置。 - 前記検出部の受光面が、前記集光レンズにより前記第1方向において前記対象物のフレネル回折像が形成される面であって、前記第2方向において前記対象物のフランフォーファー回折像が形成される面に配置され、
前記演算部が、前記時刻変数に関する1次元フーリエ変換を行う第1フーリエ変換部と、前記第1方向に関する1次元フーリエ変換を行う第2フーリエ変換部と、ドップラー効果に基づいて前記対象物に対する入射角が同一のデータを抽出する抽出部と、前記検出部が配置される位置により定まる値である2次位相で除する2次位相除算部とを含む、請求項3に記載の観察装置。 - 前記検出部の受光面が、前記集光レンズにより前記第1方向において前記対象物のフランフォーファー回折像が形成される面であって、前記第2方向において前記対象物のフランフォーファー回折像が形成される面に配置され、
前記演算部が、前記時刻変数に関する1次元フーリエ変換を行う第1フーリエ変換部と、ドップラー効果に基づいて前記対象物に対する入射角が同一のデータを抽出する抽出部とを含む、請求項3に記載の観察装置。 - 前記検出部の受光面が、前記集光レンズにより前記第1方向において前記対象物の像が形成される結像面であって、前記第2方向において前記対象物のフランフォーファー回折像が形成される面に配置され、
前記演算部が、前記時刻変数に関する1次元フーリエ変換を行う第1フーリエ変換部と、前記第1方向に関する1次元フーリエ変換を行う第2フーリエ変換部と、ドップラー効果に基づいて前記対象物に対する入射角が同一のデータを抽出する抽出部とを含む、請求項3に記載の観察装置。 - 前記光源部と前記対象物との間に配置され、前記光源部から照射される光を受光して、前記第2方向に収束又は発散する光を前記対象物に照射する照明レンズを更に備える、請求項1~10の何れか一項に記載の観察装置。
- 前記対象物の移動速度を検出する速度検出部を更に備え、
前記演算部が、前記速度検出部により検出された前記対象物の速度に基づいて、前記時刻変数に関する1次元フーリエ変換の際に前記対象物の速度変化に関する補正を行う、請求項1~11の何れか1項に記載の観察装置。 - 前記対象物への光の照射が、透過照明の光学配置によって行われる請求項1~12の何れか1項に記載の観察装置。
- 前記対象物への光の照射が、反射照明の光学配置によって行われる請求項1~12の何れか1項に記載の観察装置。
- 前記光源部が、単一縦モードの光を生成する光源である請求項1~14の何れか1項に記載の観察装置。
- 前記光源部が、広帯域の光を生成する光源である請求項1~14の何れか1項に記載の観察装置。
- 前記光源部が、モードロックレーザーである請求項16に記載の観察装置。
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JP2017078645A (ja) * | 2015-10-20 | 2017-04-27 | 国立大学法人北海道大学 | 光断層計測装置および光断層計測方法 |
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EP3454042A1 (en) | 2017-09-06 | 2019-03-13 | Hamamatsu Photonics K.K. | Cell observation system and cell observation method |
WO2021256202A1 (ja) * | 2020-06-18 | 2021-12-23 | 浜松ホトニクス株式会社 | 観察装置および観察方法 |
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