WO2013055700A1 - Wafer level applied rf shields - Google Patents

Wafer level applied rf shields Download PDF

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Publication number
WO2013055700A1
WO2013055700A1 PCT/US2012/059387 US2012059387W WO2013055700A1 WO 2013055700 A1 WO2013055700 A1 WO 2013055700A1 US 2012059387 W US2012059387 W US 2012059387W WO 2013055700 A1 WO2013055700 A1 WO 2013055700A1
Authority
WO
WIPO (PCT)
Prior art keywords
wafer
chip
metal layer
back side
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2012/059387
Other languages
French (fr)
Inventor
David Clark
Theodore G. Tessier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FlipChip International LLC
Original Assignee
FlipChip International LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FlipChip International LLC filed Critical FlipChip International LLC
Priority to CN201280049911.2A priority Critical patent/CN103858227A/en
Priority to KR1020147012477A priority patent/KR20140081859A/en
Priority to DE112012004285.9T priority patent/DE112012004285T5/en
Publication of WO2013055700A1 publication Critical patent/WO2013055700A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W42/00—Arrangements for protection of devices
    • H10W42/20—Arrangements for protection of devices protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/63—Vias, e.g. via plugs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/0198—Manufacture or treatment batch processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/29—Bond pads specially adapted therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/851—Dispositions of multiple connectors or interconnections
    • H10W72/874—On different surfaces
    • H10W72/877—Bump connectors and die-attach connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL

Definitions

  • Wafer Level Applied RF Shields the disclosure of which is incorporated by reference herein in its entirety.
  • the present disclosure generally relates to formation of semiconductor chips and more particularly to a structure and method for the creation of on-chip RF shielding for active, passive or discrete components for embedded die packages.
  • EMI Electro-Magnetic Interference
  • Spurious sources of EMI can lead to overall system or integrated circuit performance degradation, for example, through noise, cross talk and reduced signal-to-noise ratios. EMI is particularly problematic in mixed signal circuits.
  • EMI issues are typically solved by Radio Frequency (RF) shielding, whereby, the circuitry in question is capped by a dedicated metallic RF shield.
  • a conductive and grounded shield also known as a Faraday shield
  • PWB system printed wiring board
  • SMT Surface Mount Technology
  • an entire PWB layer may be dedicated to provide a digital or analog ground plane thus providing further EMI protection to the component. Dedicating an entire PWB layer to EMI protection can be a costly solution and such a layer further inhibits routing to be placed in the EMI protected zone.
  • One embodiment of a method of forming an on-chip RF shield on an integrated circuit chip in accordance with the present disclosure includes providing a wafer level integrated circuit component wafer having a front side and a back side before singulation; applying a resin metal layer on a back side of the wafer; and then separating the wafer into discrete RF shielded components. It is this resin metal layer on the back side that acts effectively as the RF shield for the components on the wafer.
  • the resin metal layer preferably includes a metal foil and may also have a planar copper foil on an outer surface of the layer.
  • Another embodiment in accordance with the present disclosure is an integrated circuit chip cut from a wafer level integrated circuit component wafer having a front side and a back side and a resin metal layer formed on at least the back side of the wafer.
  • the wafer may also have a resin metal layer over components on the front side of the wafer.
  • the resin metal layer preferably includes a metal foil.
  • This metal foil preferably is a copper foil on an outer surface thereof.
  • the metal layer on the chip may be a resin copper foil (RCF) layer.
  • the RCF layer is a conductive paste applied on the back side of the wafer over at least one component on the wafer. This conductive paste may also be applied on the front side of the wafer over another component on the wafer.
  • FIG. 1 is a schematic cross sectional view of a typical EMI protected printed wiring board (PWB).
  • PWB printed wiring board
  • FIG. 2a is a schematic cross sectional view of an embeddable
  • FIG. 2b is a schematic cross section view of the electronic component shown in Fig. 2a in a wafer level chip scale package format in accordance with the present disclosure.
  • FIG. 3 is a schematic cross sectional view through an embedded chip packaging configuration in accordance with the present disclosure.
  • This disclosure provides a low cost method for wafer level application of RF shielding for use in multiple electronic packaging formats and applications. This method is particularly useful in embedded die package applications to provide high yielding wafer level applied RF shielding.
  • FIG. 1 illustrates a typical EMI shielding system on a printed wiring board (PWB).
  • PWB printed wiring board
  • Single or multiple active and/or passive components 100 together with surface mounted discrete components 110 may be used to form an electronic system.
  • the components are mounted on a typical printed circuit or wiring board 120. Electrical connectivity between the components is made using standard PWB through vias 130 and redistribution tracks 140.
  • a typical SMT board mount RF shield 150 covers the system components and is connected through the PWB circuitry to electrical ground 160.
  • the RF shield is typically either soldered or glued to the PWB around the periphery of the components 170.
  • FIG. 2a illustrates an embeddable electronic integrated circuit
  • the component wafer 200 after wafer level fabrication and prior to singulation, i.e. before separation into discrete components in accordance with the present disclosure.
  • the component wafer 200 includes a plurality of integrated circuit components and also contains integrated circuitry of the front side 210 with defined pads 220 for electronic connectivity to a printed wiring board.
  • the process in accordance with the present disclosure includes operations of (1 ) providing a wafer level component wafer prior to singulation from a wafer foundry; (2) applying a resin metal foil layer to at least the back side of the wafer thus forming a shielded wafer; (3) then separating the shielded wafer into discrete componentry.
  • the foil layer is preferably copper.
  • other electrically conductive metals may alternatively be used such as gold, silver, silver alloy, or a copper alloy.
  • FIG. 2b illustrates an electronic component 200 in a wafer level chip scale package format with the wafer level applied RF shield formed on the component back side as in FIG. 2a.
  • a copper paste filled through via 250 provides an electrical ground connection between the RF shield layer and the bulk semiconductor substrate.
  • FIG. 3 illustrates an embedded die package configuration 250
  • the EMI shielded component 300 incorporating the EMI shielded component 300 produced as is shown in FIG. 2.
  • Active, passive or discrete component(s) 300 as shown are embedded within the PWB substrate 310.
  • the package 250 also has surface mounted active or passive ICs 320 and accompanying discrete components 330. Electrical connectivity between the embedded component 300 and surface mounted components 320 and 330 is made using conventional through vias 340 and redistribution lines 350.
  • the embedded component 300 includes a backside RCF layer 360 forming the on-chip RF shielding.
  • the on-chip RF shield is connected via existing PWB circuitry to the system ground plane 370.
  • a wafer level RF shield in accordance with the present disclosure can be used for a variety of wafer level RF shielding solutions, designs, thickness and geometries without adding significant process complexity or cost.
  • the EMI protective resin copper foil (RCF) layer may also be applied, in some applications, to the front side of the wafer level wafer to thus fully encapsulate the component.
  • the RCF layer may utilize other metal alloys than copper which are also electrically conductive so as to provide RF shielding.
  • the individual component after singulation, contains dedicated RF shielding features for use in localized EMI protection.
  • the resin copper foil layer is used to conduct induced noise currents from EMI sources to the system electrical ground.
  • An RF shielded component constructed in accordance with the present disclosure is particularly applicable, but not limited to a variety of final component packaging formats, including flipchip packages, system-in-package, embedded die packages and other multi-die, multi-discrete 3D packages. This method is particularly desirable for embedded die packages.
  • the method described here-in improves component adhesion within embedded die packages and improves outgassing from the integrated circuit layers within embedded die applications.
  • the RCF EMI shield layer maybe a conformal layer or pattern layer suitable for specific RF frequency filtering requirements.
  • the resin layer may be chosen with a high-k material property to aid with reducing capacitively coupled EMI sources.
  • This method offers a lower cost solution compared to state-of-art electroplated on-chip alternatives and which can also aid with thermal dissipation.
  • the on-chip RF shield in accordance with the present disclosure eliminates potential overall package warpage that may otherwise occur with use of externally applied RF shields.
  • the on-chip RF shield can be used in a surface mount configuration whereby the ground signal is provided by way of backside wirebond attach. All of these alternatives and features exemplify modifications that can be made which are within the meaning and broad scope of the disclosure and exemplified in the following claims.

Landscapes

  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

An embodiment of a method of forming an on-chip RF shield on an integrated circuit chip in accordance with the present disclosure includes providing a wafer level integrated circuit component wafer having a front side and a back side before singulation; applying a resin metal layer on a back side of the wafer; and then separating the wafer into discrete RF shielded components. It is this resin metal layer on the back side that acts effectively as the RF shield, after singulation, i.e. separation of the wafer, into discrete RF shielded components.

Description

WAFER LEVEL APPLIED RF SHIELDS
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This application claims the benefit of priority of United States
Provisional Patent Application No. 61/546,862, filed October 13, 201 1 , entitled
Wafer Level Applied RF Shields, the disclosure of which is incorporated by reference herein in its entirety.
FIELD
[0002] The present disclosure generally relates to formation of semiconductor chips and more particularly to a structure and method for the creation of on-chip RF shielding for active, passive or discrete components for embedded die packages.
BACKGROUND
[0003] In certain electronic packaging applications, it is imperative to protect the device and system circuitry from sources of Electro-Magnetic Interference (EMI). It is also important to ensure that said device or system circuitry does not transmit EMI radiation to systems external to it. Hereby, ensuring the ability of such systems to operate as intended within a specific electromagnetic environment.
[0004] Spurious sources of EMI can lead to overall system or integrated circuit performance degradation, for example, through noise, cross talk and reduced signal-to-noise ratios. EMI is particularly problematic in mixed signal circuits.
[0005] EMI issues are typically solved by Radio Frequency (RF) shielding, whereby, the circuitry in question is capped by a dedicated metallic RF shield. A conductive and grounded shield (also known as a Faraday shield) between the EMI signal source and the system circuitry will eliminate this noise, by routing the EMI induced displacement currents directly to ground. [0006] Such RF shields are normally mounted onto the system printed wiring board (PWB) by Surface Mount Technology (SMT) and may enclose a single or multiple components such as active, passive or discrete devices.
[0007] In embedded die packaging applications, RF shielding is particularly challenging. Use of traditional surface mounted RF shields may impose PWB routing design limitations and may impose keep out zones above or near EMI sensitive components.
[0008] In embedded die applications, it would be highly preferable if the PWB external surface area directly above the embedded component(s) was available for further component population and integration. It is not desirable to consume this valuable surface area real estate with low value add RF shielding components.
[0009] In some PWB designs, an entire PWB layer may be dedicated to provide a digital or analog ground plane thus providing further EMI protection to the component. Dedicating an entire PWB layer to EMI protection can be a costly solution and such a layer further inhibits routing to be placed in the EMI protected zone.
[0010] Surface mounted PWB, or other RF shields are typically connected to the system electrical ground plane through the existing PWB circuitry.
[0011] Surface mounted RF shields typically form the highest point on the PWB surface. Therefore the RF shield can often limit the total package or product thickness.
[0012] Surface mounted RF shields completely encapsulate sensitive components with contact to the PWB made around the periphery of the shield and thus tending to increase component or system footprint. In addition, surface mount RF shields can generate warpage of the overall chip package shape.
SUMMARY OF THE DISCLOSURE
[0013] The method according to the present disclosure addresses the above noted deficiencies. One embodiment of a method of forming an on-chip RF shield on an integrated circuit chip in accordance with the present disclosure includes providing a wafer level integrated circuit component wafer having a front side and a back side before singulation; applying a resin metal layer on a back side of the wafer; and then separating the wafer into discrete RF shielded components. It is this resin metal layer on the back side that acts effectively as the RF shield for the components on the wafer. The resin metal layer preferably includes a metal foil and may also have a planar copper foil on an outer surface of the layer.
[0014] Another embodiment in accordance with the present disclosure is an integrated circuit chip cut from a wafer level integrated circuit component wafer having a front side and a back side and a resin metal layer formed on at least the back side of the wafer. The wafer may also have a resin metal layer over components on the front side of the wafer. The resin metal layer preferably includes a metal foil. This metal foil preferably is a copper foil on an outer surface thereof. The metal layer on the chip may be a resin copper foil (RCF) layer. In such an embodiment the RCF layer is a conductive paste applied on the back side of the wafer over at least one component on the wafer. This conductive paste may also be applied on the front side of the wafer over another component on the wafer.
BRIEF DESCRIPTION OF THE DRAWINGS
[0015] For a more complete understanding of the present disclosure, reference is now made to the following figures in which:
[0016] FIG. 1 is a schematic cross sectional view of a typical EMI protected printed wiring board (PWB).
[0017] FIG. 2a is a schematic cross sectional view of an embeddable
electronic integrated circuit component in accordance with the present disclosure.
[0018] FIG. 2b is a schematic cross section view of the electronic component shown in Fig. 2a in a wafer level chip scale package format in accordance with the present disclosure.
[0019] FIG. 3 is a schematic cross sectional view through an embedded chip packaging configuration in accordance with the present disclosure. DETAILED DESCRIPTION
[0020] This disclosure provides a low cost method for wafer level application of RF shielding for use in multiple electronic packaging formats and applications. This method is particularly useful in embedded die package applications to provide high yielding wafer level applied RF shielding.
[0021] FIG. 1 illustrates a typical EMI shielding system on a printed wiring board (PWB). Single or multiple active and/or passive components 100 together with surface mounted discrete components 110 may be used to form an electronic system. The components are mounted on a typical printed circuit or wiring board 120. Electrical connectivity between the components is made using standard PWB through vias 130 and redistribution tracks 140. A typical SMT board mount RF shield 150 covers the system components and is connected through the PWB circuitry to electrical ground 160. The RF shield is typically either soldered or glued to the PWB around the periphery of the components 170.
[0022] FIG. 2a illustrates an embeddable electronic integrated circuit
component wafer 200 after wafer level fabrication and prior to singulation, i.e. before separation into discrete components in accordance with the present disclosure. The component wafer 200 includes a plurality of integrated circuit components and also contains integrated circuitry of the front side 210 with defined pads 220 for electronic connectivity to a printed wiring board. A layer of resin 230 with copper foil 240, called an RCF layer, is applied at wafer level thus forming an on-chip ready RF shield prior to device singulation.
[0023] The process in accordance with the present disclosure includes operations of (1 ) providing a wafer level component wafer prior to singulation from a wafer foundry; (2) applying a resin metal foil layer to at least the back side of the wafer thus forming a shielded wafer; (3) then separating the shielded wafer into discrete componentry. The foil layer is preferably copper. However other electrically conductive metals may alternatively be used such as gold, silver, silver alloy, or a copper alloy.
[0024] FIG. 2b illustrates an electronic component 200 in a wafer level chip scale package format with the wafer level applied RF shield formed on the component back side as in FIG. 2a. In the chip scale package (CSP) format shown, a copper paste filled through via 250 provides an electrical ground connection between the RF shield layer and the bulk semiconductor substrate.
[0025] FIG. 3 illustrates an embedded die package configuration 250
incorporating the EMI shielded component 300 produced as is shown in FIG. 2. Active, passive or discrete component(s) 300 as shown are embedded within the PWB substrate 310. The package 250 also has surface mounted active or passive ICs 320 and accompanying discrete components 330. Electrical connectivity between the embedded component 300 and surface mounted components 320 and 330 is made using conventional through vias 340 and redistribution lines 350. The embedded component 300 includes a backside RCF layer 360 forming the on-chip RF shielding. The on-chip RF shield is connected via existing PWB circuitry to the system ground plane 370.
[0026] A wafer level RF shield in accordance with the present disclosure can be used for a variety of wafer level RF shielding solutions, designs, thickness and geometries without adding significant process complexity or cost.
[0027] The EMI protective resin copper foil (RCF) layer may also be applied, in some applications, to the front side of the wafer level wafer to thus fully encapsulate the component. The RCF layer may utilize other metal alloys than copper which are also electrically conductive so as to provide RF shielding. Thus in accordance with the present disclosure, the individual component, after singulation, contains dedicated RF shielding features for use in localized EMI protection. The resin copper foil layer is used to conduct induced noise currents from EMI sources to the system electrical ground.
[0028] An RF shielded component constructed in accordance with the present disclosure is particularly applicable, but not limited to a variety of final component packaging formats, including flipchip packages, system-in-package, embedded die packages and other multi-die, multi-discrete 3D packages. This method is particularly desirable for embedded die packages.
[0029] The method described here-in improves component adhesion within embedded die packages and improves outgassing from the integrated circuit layers within embedded die applications. The RCF EMI shield layer maybe a conformal layer or pattern layer suitable for specific RF frequency filtering requirements. The resin layer may be chosen with a high-k material property to aid with reducing capacitively coupled EMI sources.
[0030] This method offers a lower cost solution compared to state-of-art electroplated on-chip alternatives and which can also aid with thermal dissipation. In addition the on-chip RF shield in accordance with the present disclosure eliminates potential overall package warpage that may otherwise occur with use of externally applied RF shields. Furthermore, the on-chip RF shield can be used in a surface mount configuration whereby the ground signal is provided by way of backside wirebond attach. All of these alternatives and features exemplify modifications that can be made which are within the meaning and broad scope of the disclosure and exemplified in the following claims.

Claims

Claims
1 . A method of forming an on-chip RF shield on an integrated circuit chip comprising:
providing a wafer level integrated circuit component wafer having a front side and a back side; applying a resin metal layer on at least a back side of the wafer; and separating the wafer into discrete RF shielded components.
2. The method of claim 1 wherein the resin metal layer includes a metal foil thereon.
3. The method of claim 1 wherein the resin metal layer includes a planar copper foil on an outer surface thereof.
4. The method of claim 1 wherein the resin metal layer is selected from a group consisting of copper, gold, silver, gold alloy and copper alloy.
5. The method of claim 1 wherein the resin metal layer is applied as a paste.
6. An integrated circuit chip comprising: a wafer level integrated circuit component wafer having a front side and a back side; and a resin metal layer formed on at least the back side of the wafer.
7. The chip of claim 6 wherein the resin metal layer includes a metal foil.
8. The chip of claim 7 wherein the metal foil has a copper foil on an outer surface thereof.
9. The chip of claim 6 wherein the metal layer is a resin copper foil (RCF) layer.
10. The chip of claim 9 wherein the RCF layer is a paste on the back side of the wafer over at least one component on the wafer.
PCT/US2012/059387 2011-10-13 2012-10-09 Wafer level applied rf shields Ceased WO2013055700A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201280049911.2A CN103858227A (en) 2011-10-13 2012-10-09 Wafer level applied RF shields
KR1020147012477A KR20140081859A (en) 2011-10-13 2012-10-09 Wafer level applied rf shields
DE112012004285.9T DE112012004285T5 (en) 2011-10-13 2012-10-09 Wafer level applied RF shields

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161546862P 2011-10-13 2011-10-13
US61/546,862 2011-10-13

Publications (1)

Publication Number Publication Date
WO2013055700A1 true WO2013055700A1 (en) 2013-04-18

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US (1) US20130093067A1 (en)
KR (1) KR20140081859A (en)
CN (1) CN103858227A (en)
DE (1) DE112012004285T5 (en)
TW (1) TW201318138A (en)
WO (1) WO2013055700A1 (en)

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CN103415136B (en) * 2013-07-19 2016-12-28 广东威创视讯科技股份有限公司 A kind of circuit board of electromagnetism interference
US11195787B2 (en) 2016-02-17 2021-12-07 Infineon Technologies Ag Semiconductor device including an antenna
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US11183460B2 (en) 2018-09-17 2021-11-23 Texas Instruments Incorporated Embedded die packaging with integrated ceramic substrate
US11031332B2 (en) 2019-01-31 2021-06-08 Texas Instruments Incorporated Package panel processing with integrated ceramic isolation
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KR20140081859A (en) 2014-07-01
US20130093067A1 (en) 2013-04-18
CN103858227A (en) 2014-06-11
TW201318138A (en) 2013-05-01
DE112012004285T5 (en) 2014-07-31

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