WO2013029406A1

WO2013029406A1 - Umbrella valve dedicated for use in piezoelectric pump

Info

Publication number: WO2013029406A1
Application number: PCT/CN2012/076630
Authority: WO
Inventors: 杨竹君; 胡军
Original assignee: Yang Zhujun; Hu Jun
Priority date: 2011-08-31
Filing date: 2012-06-08
Publication date: 2013-03-07
Also published as: CN102287365A

Abstract

An umbrella valve dedicated for use in a piezoelectric pump. Among micropump pump valves are actuation source-less valve, piezoelectrically actuated valve, thermally actuated valve, memory alloy valve, and piezoelectric valve, all of which have a certain shortcoming, for instance, the valves have complex structures and increased manufacturing costs, some provide a product with poor consistency and poor air-tightness. The umbrella valve dedicated for use in the piezoelectric pump structurally consists of the umbrella valve (A1) and a valve frame (A3). A valve rod of the umbrella valve is passed through and arranged at a central through hole of the valve frame. Distributed around the central through hole of the valve frame is a flow-pass through hole (6). The flow-pass through hole correspondingly matches the opening and closing of the umbrella valve that is opened. The umbrella valve is provided with characteristics of a simple structure, increased sensitivity, great sealing effect, reduced manufacturing costs, and great operational performance, and is applicable in the fields and scenarios of various fluids, comprising gases, water, and specifically liquids, such as in water processing, chemical engineering analysis, medical equipment, biomedicine, and automatic control.

Description

Umbrella valve for piezoelectric pumps

[Technical Field]

The utility model relates to a micro pump pump valve, in particular to an umbrella valve dedicated to a piezoelectric pump. 【Background technique】

BACKGROUND OF THE INVENTION Micropump pump valves include, no excitation source valve (passive valve), piezoelectric excitation valve, thermal excitation valve, electrostatic excitation valve, magnetic excitation valve, electromagnetic/electrostatic excitation valve, memory alloy valve, piezoelectric valve Wait.

The characteristics of the above valves are:

1. No excitation source valve: It can be divided into two types: cantilever beam check valve and double door valve type. The working principle of this kind of valve is that when the cantilever beam is opened by the positive pressure, liquid or gas enters the pump cavity, the cantilever beam is closed by the reverse pressure, and the liquid or gas is directed and squeezed under the action of the one-way valve. discharge.

The valve is machined by electrochemical selective doping, KOH etching and anisotropic deep etching (EDP), and the entire chip is finally cut into individual valve bodies. Each valve cantilever has a size of 600um*300um*10um and 800 valves on a 25.4*25.4mm chip. The main features of this valve are fast response, small size, and small dead volume.

Double-door type micro-valve, which forms two identical-sized sliding doors on the silicon wafer in opposite directions. The two blades of each door are 54.74 degrees with the surface of the silicon wafer, and the gap between the blades is normally open. State, slit width 25um. The working principle of this kind of valve is that when the forward pressure acts on the diaphragm, the two doors on it are deformed in different ways; the left door is open and the right door is closed, if the direction of pressure is changed, the situation It will be the opposite. The valve is processed by boron ion diffusion, anisotropic etching, anodic welding and oxide removal. The size of the valve door is 780*1580*2um. It is mainly suitable for controlling the flow system with a particle size of 25um or less.

2. Piezoelectric excitation valve: It can be divided into normally closed, normally open and three-way. The structure of the normally closed piezoelectric valve is composed of a heat-resistant glass base, a flexible diaphragm having a mesa structure, a vent pipe, and a piezoelectric actuator. The working principle of the valve is that under normal conditions, the silicon table is connected to the air outlet to be closed; after energizing the actuator, the diaphragm is concave, the table is separated from the air outlet, and the valve is opened. The valve is processed in all directions Processes such as isotropic etching of silicon, isotropic etching of glass, and discharge drilling. The area of the valve table is 50um ² . The structure of the normally open piezoelectric valve differs from the normally closed valve in that the mesa on the flexible silicon diaphragm has a gap between the outlet and the outlet under normal conditions, and the fluid can pass through when the piezoelectric actuator is energized. When the table is convex upward, the air outlet is cut off and the valve is closed.

The structure of the three-way valve is that its silicon diaphragm has two central and annular mesas. The center table is normally open and the toroidal table is normally closed. This valve works on the principle that under normal conditions fluid can be output from the right valve port. When the piezoelectric actuator is energized, the center table is convex, the annular table is recessed, and the fluid can flow from the left valve port into the middle valve port.

3, thermal excitation valve: usually composed of exciter (heating element), deformed beam or diaphragm and valve body. A thermoelectric valve made by the principle of bimetal deformation, thermal expansion and heat conduction, which is composed of a double crystal cantilever beam, a convex diaphragm and a valve body. The bimorph cantilever is a three-layer structure in which a heating resistor is formed of an n-type epitaxial layer, p-type SI, and metallized AI. The valve works on the principle that, in the absence of energization, the fluid can be directed onto the convex diaphragm and create a downward pressure that closes the valve outlet. When the heating resistor is energized, the cantilever beam is bent downward due to the difference in thermal expansion coefficients of the SI and AI materials, and the inlet of the valve is enlarged, and the fluid is injected into the lower portion of the convex diaphragm to generate a pressure which causes the diaphragm to be convex. Open the valve outlet to allow fluid to flow out. The valve is processed by chemical etching, epitaxial growth, direct bonding of silicon wafers and anodized soldering. The external dimensions are 14.5*8.5*1.45mm, and the working frequency of the cantilever beam can reach 1ΚΗζ.

4. Electrostatic excitation valve: The structure consists of a top and bottom conductive polymer shell and a three-layer diaphragm structure. The top and bottom shells serve as excitation electrodes, and the diaphragm consists of two layers of polyimide and a layer of gold placed between them. The working principle of this kind of valve is that when the voltage is applied to the excitation electrode, the flexible diaphragm will be convex and concave according to the direction and magnitude of the voltage, so that the pulse pressure of the corresponding direction and size in the resonant cavity is opened or closed. Valve inlet and outlet. The valve is machined by surface machining, molding, etching, drilling and LIGA. The diaphragm has a diameter of 3. 3 mm and a thickness of 25 μm.

5. Magnetic excitation valve: The structure of the magnetic excitation valve is composed of upper and lower valve seat, valve and magnetic actuator. The shutter is made of polysilicon and magnetic material. This valve works on the magnetic field generated by the exciter. Under the action, the valve located in the magnetic circuit is forced to move upward or downward to move the input fluid upward or downward. The valve is processed by processes such as thermal oxidation, epitaxial growth, etching, and LPCVD. The size of the valve is 40*40* lum, and the total area of the valve is less than 100*100um. Its main features are small size, large driving force and suitable for the transport of conductive liquids.

6. Electromagnetic / (or) electrostatic excitation valve: It is a micro-valve that combines electromagnetic and electrostatic excitation methods. It consists of a _7- j long magnet and two silicon wafers placed between the magnets. The upper silicon wafer has a tapered gas flow inlet and a top electrode; the lower silicon wafer holds the flexible diaphragm coated with the metal electrode with four cantilever beams and forms a flat cavity with the inlet. The valve works by using the Lorentz force generated by the pulse voltage U1 applied between the diaphragm electrodes and the pulse voltage U2 applied between the diaphragm and the reverse top electrode to generate Coulomb force to deform the diaphragm. Open or close the valve port; in practice, the pulse of U1 is designed to be short and the duration of U2 is long, so when U1 positive pulse closes the valve port, U2 closes the valve port and keeps it after U1 disappears. The valve is closed for a period of time until the second U1 negative pulse opens the valve port and U2 simultaneously switches and continues for a period of time until the next U1 positive pulse. U1 starts the state transition function, and U2 starts to function. The valve is processed by standard IC and LPCVD, anisotropic etching, etc. The chip size is 8*2*3mm.

7. Memory alloy valve: The memory alloy valve (SMA) is fired into a certain shape at high temperature. It can be used as a sensitive or actuator after cooling. When it is heated to a certain temperature, it will recover or partially recover. Shaped force. An SMA beam type conventional valve made of this characteristic is composed of an SMA beam, a polyimide diaphragm, a spacer, a valve seat, and a vent pipe. The valve works by the fact that when the SMA beam is energized, its deformation is transmitted to the diaphragm through the spacer, causing the diaphragm to be recessed downwardly to block the vent tube, thereby closing the valve. The valve is processed by laser cutting, electrolytic lithography, spin coating, etc. The SMA beam is NiT material, and the inner and outer diameters of the valve seat are 0.5mm and lmm respectively. The diaphragm has a thickness of 3 um. The on-off valve has a response time of 0.5-1.2 s.

8. Piezo Valve: Piezo valve is a new technology that introduces piezoelectric technology into pneumatic valves. The tension, compressive stress or shear stress applied in the crystal structure, in addition to the corresponding deformation, will also induce a dielectric or electric field in the crystal. This phenomenon is called the positive piezoelectric effect; on the contrary, if in this crystal When an electric field is applied to cause the crystal to be polarized, the crystal will also have strain or stress at the same time, which is the inverse piezoelectric effect. Both are known as the piezoelectric effect. Piezoelectric valves are developed using piezoelectric inverse effects.

The piezoelectric valve is a proportional pressure regulating valve developed by utilizing the fact that the amount of deformation of the piezoelectric material is proportional to the electric field strength applied thereto. Since the piezoelectric valve piece is not subjected to mechanical friction during deformation and has a fast response speed, it can meet the application requirements of high-speed systems; compared with the above-mentioned micro-pump valve, it has low power consumption, fast response, and no electromagnetic interference. Long life and no heat.

Summary:

The above-mentioned non-excited source valve (passive valve) has a relatively simple structure and no excitation device, and can be processed in batches, and is suitable for use in a micro pump or a micro system;

The above various excitation source valves are easy to integrate and have excellent dynamic characteristics, are suitable for integration with silicon heat flow sensors, have good pneumatic sealing performance, low modulus of elasticity, and are compatible with IC processes; Static electricity and solenoid valves control the direction of flow and have low power consumption;

The above-mentioned memory alloy valve can output high force value or large displacement amount in a small space, and is suitable for directly matching with micro system actuator components;

The above-mentioned piezoelectric valve has high sensitivity and fast response speed, and can meet the application requirements of high-speed systems; compared with the above-mentioned micro-pump valve, it has the advantages of low power consumption, fast response, no electromagnetic interference, long life and no heat generation. . It has broad application prospects in the field of industrial and process automation control.

However, although the above background technology has many advantages, there are still various disadvantages and disadvantages: the above various valve bodies have complicated structures, many processing steps, exquisite process requirements, high manufacturing cost, and high price, and pressure. The electric pump products have strict conditions and requirements for conveying (medium) liquids, and the assembly process is complicated, the comprehensive cost is high, the supporting ability of the products is poor, and the market is difficult to promote and popularize.

In the background patent technology, the inventor of the patent has patented the invention: "Ultra-miniature electronic pump"

ZL 01128771.3; "An ultra-miniature hydraulic electronic pump and its manufacturing process" ZL 02114467.2;

"Ultra-miniature hydraulic electronic pump" ZL 02114470.2; "A piezoelectric ceramic sheet and a helium-type air pump for the manufacture of micro-pumps" ZL 200510012575.6; "Piezoelectric ceramic pumps for electronic products and CPU cooling systems" ZL200910109281. 3 describes various types (shapes), different material structures, Processing cartridges, low-cost metal and silicone membrane single cantilever beam valves, spring silicone diaphragm valves, spring silicone ball valves, rectangular elastic diaphragm valves, needle valves, these valve bodies not only have many advantages of background technology, but also have background technology Unparalleled price advantage and manufacturing cost advantage, the reason is that the radial tension and deformation generated when the periphery of the piezoelectric vibrator is clamped and fixed, and the axial mechanical motion that restricts the piezoelectric vibrator to only convex upward deformation The pump inlet of the pump valve can effectively improve the sensitivity and freedom of the opening and closing of the pump valve, and can use the low-cost production of a one-way valve with a good performance and a simple structure, and the manufacture of such a one-way valve is only a few cents. The micro pump pump valve of the prior art described above requires several tens of dollars, or even several hundred yuan. The patented technology of the patent inventor and the micro pump pump valve of the above background technology have no excitation source valve (passive valve). ), piezoelectric excitation valve, thermal excitation valve, electrostatic excitation valve, magnetic excitation valve, electromagnetic / electrostatic excitation valve, memory alloy valve, piezoelectric valve, manufacturing cost is the original miniature One thousandth of the pump valve, even one in ten thousand.

Although the above-mentioned background patent technology has many advantages and characteristics, in the industrialization and mass production, the consistency of the product and the poor airtightness still occur, resulting in a high secondary rework rate of the product, which is difficult. Improve work efficiency. The main reasons are:

1. Metal, single cantilever beam valves made of different shapes and different structures are difficult to use the process tool to ensure the flatness of the installed valve body and the appropriateness of the fixed pump valve strength, thus resulting in poor consistency of the pump valve and air tightness. , affecting the overall performance of the pump.

2. In addition, during long-term work, due to the influence of the medium in the fluid (such as water), certain impurities or dirt will accumulate slowly, and the cantilever beam support will be lifted up, so that the valve body gasket can not be reset, resulting in pressure relief and Air leakage, reducing pump performance.

3. The fixed end of the metal and single cantilever beam valve is prone to tearing, deformation and displacement caused by high-frequency motion, which causes pressure and air leakage at the seal of the valve membrane, affecting the self-priming effect of the piezoelectric pump and reducing the pressure. The overall working performance of the electric pump, and the fluid (gas) movement speed and transmission efficiency.

[Summary of the Invention]

The purpose of the utility model is to overcome the deficiencies of the prior art mentioned above, and to invent a pressure for matching The high efficiency check valve of the electric pump, that is, the development of an umbrella valve dedicated to a (fluid) piezoelectric pump. The utility model is characterized in that: the valve body has the characteristics of over-flowing characteristics of overall opening, simple structure, convenient and practical, easy opening and closing, high sensitivity, fast response, good sealing effect, low manufacturing cost and good working performance, and completely solves the problem. The problems associated with the existing tooling process for the production and assembly of piezoelectric pump valves are suitable for industrial production.

The purpose of the utility model is to design the pump valve structure, the design of the pump valve fixing bracket is reasonable, the assembly process of the pump valve is improved, the pump cavity is optimized, the opening force of the pump valve is uniform, the cut-off performance is good, and the self-suction capability is good. . Through testing, the work efficiency is increased by 30%-100% compared with the pump valve of the above background.

The utility model has the characteristics that the structure is simple, the response speed is fast, the volume is small, the weight is light, the noise is not strong, the pressure is large, the pressure is not lax, the anti-reverse effect is good, and the installation is convenient. It can be used for different types of piezoelectric pump products, suitable for scientific research, water treatment sampling, instrumentation, chemical analysis, medical equipment, medical and health, biomedicine, bioengineering, automatic control, water treatment, precision. Various fluids such as metering, experimental testing, microflow dispensing, micro total analysis systems, lab-on-a-chip and PCR chips, including gas, water, and especially liquid fields and applications.

In order to achieve the above object, the technical solution of the present invention is as follows: In order to better explain and understand the technical content, the following description of the components is carried out with the reference numerals in the parentheses, so that the drawings and the descriptions are referred to at the same time.

1. The umbrella valve dedicated to the piezoelectric pump is characterized in that: the utility model comprises: an umbrella valve and a valve frame, wherein the valve handle of the umbrella valve passes through and is located in the central through hole of the valve frame, and the valve frame is distributed around the central through hole An over-flow hole (6) that can be opened and closed as a whole, and the over-flow hole (6) corresponds to the opening and closing cooperation of the opened umbrella valve umbrella.

2. The umbrella valve dedicated to the piezoelectric pump is characterized in that: the umbrella valve is an umbrella valve A 1 , and a limited boss (5 ) on the valve handle, the open umbrella shape The raised surface of the open umbrella is a plane as a mating surface with the fluid inlet and outlet of the valve frame through the flow hole (6).

3. The above-mentioned umbrella valve dedicated to a piezoelectric pump, characterized in that: the umbrella valve is an umbrella valve B 2, and a limited boss (5) on the valve handle, an open umbrella shape In the plane, the open umbrella has a downward circular slope or a circular arc surface as a mating surface for the fluid inlet and outlet of the valve frame through the flow hole (6). 4. The umbrella valve dedicated to the piezoelectric pump is characterized in that: the umbrella valve has a finite boss (5) on the valve handle, and the open umbrella shape is convex or flat, Zhang The open umbrella has an upward circular slope or a circular arc surface as a mating surface for the fluid inlet and outlet of the valve frame through the flow hole (6).

5. Any of the above-mentioned umbrella valves dedicated to piezoelectric pumps, characterized in that: the umbrella valve is a one-way valve of an umbrella structure, the material of which is silicone rubber, and the specific gravity of the valve body is 0.95 - 1. 4 g Between /m ³ , the thickness is between 0.30 and 0.8 mm, and the Shore hardness is between 48 and 56 degrees, and any one of the above values is also included.

6. Any of the above-mentioned umbrella valves dedicated to piezoelectric pumps, characterized in that: the umbrella valve is a one-way valve of an umbrella structure, the material of which is silicone rubber, and the specific gravity of the valve body is 1.1 - 1.2g / Between m ³ , the thickness is between 0.45 and 0.55 mm, and the Shore hardness is between 49 and 52 degrees, and any one of the above values is also included.

7. An umbrella valve dedicated to a piezoelectric pump as described above, characterized in that: methyl silicone oil is applied to the mating surface of the umbrella valve and the valve frame.

In other words, the technical solutions, advantages and effects of the present invention are:

1. Design and manufacture an umbrella-shaped one-way valve, which is characterized in that it can produce various kinds of umbrella-shaped one-way valves of different types mentioned above without changing the size. ; Can be used for a variety of different types of piezoelectric pump products.

2. Design a one-way valve with an umbrella structure. The main technical features of the one-way valve are: The valve plate is made of silicone rubber, and the valve body specific gravity, thickness, and Shore hardness have a range of values, according to the working pressure of the load. Need to adjust the specific gravity, softness and thickness of the pump valve material, and adapt to the follow-up and cooperation of the pump valve and the piezoelectric ceramic transducer sheet to improve the pump valve sealing effect and working performance of the pressure electric pump.

3. Design a pump valve fixing bracket, which has the characteristics of simple structure and convenient installation and use. The fixing bracket is characterized in that: the fixing bracket is an important component of the connection in the pump chamber, and can be fixed bracket By increasing or decreasing the size of the seal 圏, the pump chamber volume can be changed to increase or decrease the pressure.

4. The utility model has the advantages and characteristics of single, practical, compact and low manufacturing cost.

5. The utility model completely changes the shortcomings and disadvantages of the background art, that it does not need a background The technically complicated processing technology and processing process, but using the over-current characteristics of the integral opening valve and the technical features of the utility model, a uniform pressure difference is generated on the inlet and outlet surfaces of the valve body, thereby automatically and stably opening and Close the work and reach the role of the check valve. Compared with the above-mentioned background micro-pump pump valve, the umbrella-shaped check valve of the present invention has obvious cost-effective comprehensive characteristics; compared with the manufacturing cost of the above-mentioned background micro-pump pump valve, it is one thousandth of the manufacturing cost thereof. , even one in ten thousand.

6. In order to test the parameters of the umbrella-shaped check valve structure, the theoretical flow rate and over-flow area formula are derived by finite element simulation. At the same time, combined with the experimental data, the structure design, performance comparison, over-current characteristics, Tests such as leakage and pressure resistance, optimize the pump cavity structure, solve the structural design between the disk area of the pump valve fixing bracket and the liquid inlet and discharge flow area, and optimize the ratio of each other to improve the compliance of the pump valve. The overall working efficiency of the piezoelectric pump. Stable performance, safe and reliable.

7. In order to reduce the working noise caused by the mechanical friction in the overall opening of the umbrella check valve, and to enhance the opening and closing strength of the pump valve, the silicone oil is applied on the mating surface of the umbrella valve and the valve frame. The process of selling various types of methyl silicone oil can be). It should be noted that methyl silicone oil has excellent high temperature resistance, low temperature resistance, excellent electrical insulation, good aging resistance, low surface tension, non-toxic and tasteless physiological inertia, low viscosity coefficient, and compression. Higher, low volatility, good lubricity, etc. Therefore, the overall open umbrella check valve has low noise, easy opening and closing, high sensitivity and fast response, especially the umbrella check valve can prevent its deviation during the movement, improve the sealing performance and stability of the pump valve. Self-priming ability.

The structure of the present invention includes, but is not limited to, the above structure.

[Description of the Drawings]

1(a) is a schematic structural view of an umbrella valve A according to Embodiment 1 of the present invention; FIG. 1(b) is a schematic structural view of an umbrella valve B of Embodiment 2 of the present invention; FIG. 2(a) is FIG. a) a schematic cross-sectional view of the working principle of the embodiment 1; Fig. 2 (b) is a schematic cross-sectional view of the working principle of the embodiment 2 in Fig. 1 (b); Fig. 3 is a view of the valve frame A of the embodiment 1 of the present invention FIG. 4 is a cross-sectional view taken along line AA of FIG. 3; FIG. 5 is a second structural view of the valve holder A in the first embodiment of the present invention, and FIG. 5 is a cross-sectional view of the valve frame A of the first embodiment of the present invention, FIG. 8 is a cross-sectional view taken along line CC of FIG. 7, and FIG. 9 is a valve frame B of the second embodiment of the present invention. FIG. 10 is a cross-sectional view of the DD of FIG. 9; FIG. 11 is a second structural view of the valve frame B of the second embodiment of the present invention, and FIG. 12 is a cross-sectional view of the EE of FIG. A third structural schematic view of the valve frame B of the new embodiment 2, FIG. 14 is a cross-sectional view of the FF of FIG. 13, and FIG. 15 is a structural schematic view of the two valve inlet and outlet of the valve frame of the present invention.

The above figures indicate: 1. Umbrella valve A, 2. Umbrella valve B, 3. Valve frame A, 4. Valve frame B, 5, Limit boss, 6, Through flow hole.

【detailed description】

Referring to Figure 1 (a), this is an umbrella valve, the shank of the valve handle (the umbrella handle or the handle) is limited. The limit boss 5 has a "one" shape and a "cross" shape. "Three-point" shape, "circle" shape, etc.; the open umbrella shape is convex, and the open umbrella shape is a plane as a surface that cooperates with the fluid inlet and outlet of the valve frame through the flow hole 6. This structure can be called For the "umbrella valve Α Γ.

Referring to Fig. 1 (b), the umbrella valve is basically the same as the above structure, the difference is that the upper surface of the open umbrella is a flat surface, and the lower surface is a downward inclined surface (illustrated), which acts as a fluid with the valve frame through the flow hole 6. One side of the import and export cooperation, this structure can be called "umbrella valve Β 2".

Embodiment 1: Referring to Fig. 2 (a), this is a structure in which the umbrella valve A 1 is coupled with the valve frame A 3 , and the handle of the umbrella valve A 1 passes (or passes through) and is located on the valve frame A 3 The hole in the center, the limit boss 5 on the handle of the umbrella is stuck outside the through hole of the valve frame A 3 , and the pressure of the fluid on the lower side of the umbrella surface of the umbrella valve A 1 is different, so that the umbrella valve A 1 is opened. The umbrella-shaped plane can reciprocate up and down, just like the flying butterfly wings move up and down, the umbrella-shaped lower plane of the umbrella valve A 1 and the fluid inlet and outlet of the valve frame A 3 open and close through the circulation hole 6 The through hole 6 has an integral opening and closing characteristic. There is also a vertical movement mode, when the limit boss 5 on the handle of the umbrella valve A 1 is stuck farther outside the through hole of the valve frame A 3 , if there is a distance of 0.3-1 mm, the umbrella shape The valve A 1 can be reciprocated up and down as a whole; or the umbrella valve A 1 and the canopy can be reciprocated up and down together; in general, the umbrella-shaped lower plane of the umbrella valve A 1 and the fluid flow on the valve frame A 3 are realized. Export through the circulation hole 6 for overall opening and closing Hehe.

Embodiment 2: Referring to Fig. 2 (b), basically the same as Fig. 2 (a), the difference is that the umbrella valve in Fig. 2 (b) is the umbrella valve B 2, which is an umbrella valve B 2 and valve A cross-sectional view of the B 4 phase connection, the upper and lower umbrella valve B 2 passes through and is located in the central hole of the valve frame B 4 , and the limit boss 5 on the handle is caught on the valve frame B 4 Outside the through hole, due to the different pressures of the fluid acting on the lower side of the umbrella surface of the umbrella valve, the umbrella-shaped lower inclined surface of the umbrella valve B 2 and the fluid inlet and outlet of the valve frame B 4 are opened and opened. Closed fit, for better cooperation, the umbrella-shaped lower slope of the umbrella valve B 2 corresponds to the inclined surface above the valve frame B 4 and serves as a mating surface of each other, and the through-flow hole 6 is located on the valve frame B 4 Above the slope.

Embodiment 3: It is a combination of the above two embodiments, that is, the umbrella valve has a finite boss 5 on the valve handle, and the opened umbrella has a convex or flat surface, and the open umbrella shape is below. It is an upward circular slope or a circular curved surface, which serves as a mating surface for the fluid inlet and outlet of the valve frame through the flow hole (6).

Referring to Figures 3 and 4, the valve frame A 3 is used as a first structural schematic view, and the central through hole is used to pass through the valve handle of the umbrella valve, and the center through hole is uniformly distributed with three sections having an arc-shaped groove. Hole 6, used as a passage for fluid to pass through.

Referring to Fig. 5 and Fig. 6, the valve frame A 3 is taken as the second structural schematic diagram, which is basically the same as Fig. 3 and Fig. 4, except that the four through sections of the central through hole of the valve frame A 3 are uniformly distributed with curved grooves. Hole 6.

Referring to Fig. 7 and Fig. 8, the valve frame A 3 is taken as a third structural schematic diagram, which is basically the same as Fig. 3 and Fig. 4, except that the three through sections of the central through hole of the valve frame A 3 are uniformly distributed in the shape of a circular through hole. 6. Of course, the through-flow hole 6 can also have 2, 4, 5, 6 and the like.

Referring to Figures 9 and 10, the valve frame B 4 is used as a first structural schematic view, and the central through hole is used as a valve stem through the umbrella valve. The center through hole is uniformly distributed with three arcuate grooves in cross section. Hole 6, used as a passage for fluid to pass through. It is basically the same as FIG. 3 and FIG. 4, and the difference is the valve frame B 4 used. In FIG. 10, the bottom surface of the valve frame B 4 has a circular curved surface (circular arc surface) or a circular inclined surface as the umbrella valve B 2 . The mating surface of the opening and closing. As seen from Fig. 10: The bottom surface of the valve frame B 4 has a circular arc line, which is a concave spherical surface (circular curved surface) from a three-dimensional perspective.

Referring to Figures 11 and 12, the valve frame B 4 is taken as a second structural schematic, substantially the same as Figure 9 and Figure 10, The difference is that the through-holes 6 of the arc-shaped grooves are uniformly distributed around the central through-hole of the valve frame B 4 . Referring to Fig. 13 and Fig. 14, the valve frame B 4 is a third structural schematic diagram, substantially the same as Fig. 9 and Fig. 10, except that the three through holes of the circular cross section are uniformly distributed around the central through hole of the valve frame B 4 . 6. Of course, the through-holes 6 can have 2, 4, 5, 6 and the like.

Referring to Figure 15, two valve assemblies A 1 , one for positive and one reverse, are mounted on the valve frame A 3 to serve as a valve for entering and leaving the fluid. This is also a schematic diagram of the working state of each of the above-mentioned umbrella valves on the valve frame.

It should be noted:

1. The above-mentioned valve frame A 3 and the valve frame B 4 have different cross-sections 6 of different cross-sections, which belong to the fluid passages, and are all equipped with the umbrella-shaped open umbrella surface as the fluid inlet and outlet. surface.

2. The umbrella-shaped open umbrella shape is a flat surface or a downward circular inclined surface or a downward circular curved surface. The umbrella-shaped open umbrella shape may also be an upward circular inclined surface or The circular arc surface can be used as a mating surface with the fluid inlet and outlet of the valve frame through the flow hole (6).

3. The umbrella valve is a one-way valve with an umbrella structure. The material is silicone rubber. The valve body has a specific gravity of 0.95 - 1. 4 g/m ³ , a thickness of 0.30-0.8 mm, and a Shore hardness of 48-56. Between degrees, including any one of the above values, such as valve body specific gravity of 0.96, 0.97, 0.98, 0.99, 1.00, 1.01, 1.02, 1.03, 1.04, 1.05, 1.06, 1.07, 1.10, 1.11, 1.12 1.13, 1.14, 1.15, 1.16, 1.17, 1.18, 1.19, 1.20, 1.25, 1.30, 1.35, 1.38, 1.39, 1. 4, etc. g/m ³ ; if the valve body thickness is 0.31, 0.32, 0.33, 0.34, 0.35 — 0.4, 0.50, 0.60, 0.65, 0.70, 1.75, 0.78, 0.79, 0.8, etc.; such as the valve body Shore hardness at 48, 49, 50, 51, 52, 53, 54, 55, 56 degrees. According to the test: the valve body of the umbrella valve is between 1.1 - 1.2g / m ³ , the thickness is between 0.45 - 0.55 mm, and the Shore hardness is between 49-52 degrees, the effect is better.

4. The above is only the preferred embodiment of the present invention, but it does not limit the scope of the present invention, that is, the equivalent changes and modifications made without departing from the claims of the present invention, and still belong to the protection of the present invention. range.

Claims

Rights request

2. The umbrella valve dedicated to a piezoelectric pump according to claim 1, wherein: the umbrella valve is an umbrella valve (A1) having a finite boss (5) on the valve handle, The open umbrella has a convex surface, and the open umbrella has a flat surface as a mating surface with the fluid inlet and outlet of the valve frame through the flow hole (6).

3. The umbrella valve dedicated to a piezoelectric pump according to claim 1, wherein: the umbrella valve is an umbrella valve (B2) having a finite boss (5) on the valve handle, The open umbrella has a flat surface, and the open umbrella has a downward circular slope or a circular curved surface as a mating surface for fluid inlet and outlet with the valve frame through the flow hole (6).

4. The umbrella valve dedicated to a piezoelectric pump according to claim 1, wherein: the umbrella valve has a finite boss (5) on the valve handle, and the opened umbrella has a convex surface. Or the plane, the open umbrella shape is an upward circular slope or a circular arc surface, as a mating surface of the fluid inlet and outlet with the valve frame through the flow hole (6).

The umbrella valve dedicated to the piezoelectric pump according to any one of claims 1 to 4, characterized in that: the umbrella valve is a one-way valve of an umbrella structure, the material of which is silicone rubber, and the specific gravity of the valve body is 0.95. - 1. 4 g/m ^{3 ,} between 0.30 and 0.8 mm thick, and Shore hardness between 48 and 56 degrees, including any one of the above values.

The umbrella valve dedicated to the piezoelectric pump according to any one of claims 1 to 4, characterized in that: the umbrella valve is a one-way valve of an umbrella structure, the material of which is silicone rubber, and the specific gravity of the valve body is Between 1.1 and 1.2g/m ³ , the thickness is between 0.45 and 0.55 mm, and the Shore hardness is between 49 and 52 degrees, including any one of the above values.

7. An umbrella valve dedicated to a piezoelectric pump according to any one of claims 1 to 4, characterized in that the silicone oil is applied to the mating surface of the umbrella valve and the valve frame.