CN102287365A - Umbrella-shaped valve special for piezoelectric pump - Google Patents

Umbrella-shaped valve special for piezoelectric pump Download PDF

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Publication number
CN102287365A
CN102287365A CN2011102557035A CN201110255703A CN102287365A CN 102287365 A CN102287365 A CN 102287365A CN 2011102557035 A CN2011102557035 A CN 2011102557035A CN 201110255703 A CN201110255703 A CN 201110255703A CN 102287365 A CN102287365 A CN 102287365A
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China
Prior art keywords
valve
umbrella
umbrella valve
piezoelectric pump
vavle shelf
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胡军
杨竹君
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Individual
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Priority to CN2011102557035A priority Critical patent/CN102287365A/en
Publication of CN102287365A publication Critical patent/CN102287365A/en
Priority to PCT/CN2012/076630 priority patent/WO2013029406A1/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10Valves; Arrangement of valves
    • F04B53/1037Flap valves
    • F04B53/1047Flap valves the valve being formed by one or more flexible elements
    • F04B53/106Flap valves the valve being formed by one or more flexible elements the valve being a membrane
    • F04B53/1065Flap valves the valve being formed by one or more flexible elements the valve being a membrane fixed at its centre
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10Valves; Arrangement of valves
    • F04B53/1037Flap valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00Check valves
    • F16K15/14Check valves with flexible valve members
    • F16K15/148Check valves with flexible valve members the closure elements being fixed in their centre

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Reciprocating Pumps (AREA)

Abstract

The invention relates to an umbrella-shaped valve special for a piezoelectric pump. A micro pump valve in the background technology such as an excitation source-free valve, a piezoelectric excitation valve, a thermal excitation valve, a memory alloy valve, a piezoelectric valve and the like all have certain defects. For example, various valve bodies have complex structures and high manufacturing costs, and the phenomena of poor consistency and poor air tightness of certain products occur. The invention aims to develop an umbrella-shaped valve special for a piezoelectric pump, which consists of an umbrella-shaped valve and a valve frame, wherein a valve handle of the umbrella-shaped valve passes through and is positioned in a central through hole in the valve frame; and overflowing through holes are distributed at the periphery of the central through hole of the valve frame, and are opened and closed corresponding to the opened umbrella-shaped valve. The umbrella-shaped valve has the advantages of simple structure, high sensitivity, good sealing effect, low manufacturing cost and high working performance, and has the function of suitability for being applied to the fields and occasions of multiple fluids including gas, water and particularly liquid in water treatment, chemical analysis, medical appliances, biological medicine, automatic control and the like.

Description

Be exclusively used in the umbrella valve of piezoelectric pump
One, technical field
The present invention relates to a kind of micropump pump valve, refer in particular to a kind of umbrella valve that is exclusively used in piezoelectric pump.
Two, background technique
Micropump pump valve in the background technique has, no excitation source valve (passive valves), piezoelectric excitation valve, thermal excitation valve, static excitation valve, magnetic pumping valve, electromagnetism/static excitation valve, memory alloy valve, piezo electric valve etc.
The characteristic of above-mentioned valve is:
1, no excitation source valve: can be divided into two kinds on overhang one-way valve and bivalve door type valve.The working principle of this valve is, when overhang be subjected to positive pressure in opened condition, liquid or gas enters pump chamber, overhang is subjected to backpressure and is closed condition, liquid or gas are directed extruding and discharge under the one-way valve effect.
The processing of this valve adopts electrochemistry to select to mix, and the dark etching of KOH etching and anisotropy technologies such as (EDP) becomes single valve body with the monoblock chip cutting at last.Each valve overhang is of a size of 600um*300um*10um, can obtain 800 valves on a 25.4*25.4mm chip.The main feature of this valve is that response is fast, size is little, dead space volume is little.
Bivalve door type miniature valve, it is formed on two identical fan doors of size on the silicon chip in the opposite direction, and two flabellums of every fan door become 54.74 degree with silicon chip surface, and the slit between the flabellum is normally open, stitches wide 25um.The working principle of this valve is after positive pressure affacts on the diaphragm, to make the distortion by different way of the fan of two on it door; Left-hand door in opened condition, right door is closed condition, if change the pressure action direction, situation can be opposite.The processing of this valve adopts boron ionic diffusion, anisotropic etching, anode to weld and remove technologies such as oxide layer, and valve fan door is of a size of 780*1580*2um).Be applicable to that mainly the control media particle diameter is that 25um is with interior fluid system.
2, piezoelectric excitation valve: can be divided into forms such as normally closed, Chang Kai and threeway.The structure of Normally closed type piezo electric valve partly is made up of thermal glass base, pliability diaphragm, breathing pipe and the piezoelectric actuator etc. that are mesa structure.The working principle of this valve is that under normal circumstances silicon mesa links to each other with the air outlet and is closed condition; After the actuator energising, make diaphragm that recessed change take place, table top leaves the air outlet, and valve is in opened condition.Technologies such as anisotropic etching silicon, isotropic etching glass and discharge punching are adopted in the processing of this valve.The area of valve table top is 50um 2
The structure of piezo electric valve open in usual and normally close valve difference are, a gap is under normal circumstances arranged between the daylight opening DLO air outlet on the pliability silicon diaphragm, can pass through, when the piezoelectric actuator energising makes the convex change of table top for fluid, the air outlet is cut off, and valve is in closed condition.
The structure of three-way valve is that center and two table tops of annular are arranged on its silicon diaphragm.The center table top is normally open, and circular table is normally off.The working principle of this valve is that under normal circumstances fluid can valve port output from right valve port input.After to the piezoelectric actuator energising, center table top epirelief, circular table is recessed, and fluid can flow out by valve port from left valve port flows into.
3, thermal excitation valve: partly form by actuator (heating element), variable shaped beam or diaphragm and valve body etc. usually.The thermoelectric valve that utilizes principles such as bimetal deformation, thermal expansion and transmission of heat to make, it partly is made up of twin crystal overhang, convex diaphragm and valve body etc.The twin crystal overhang is a three-decker that is made of heating resistor n type SI epitaxial layer, p type SI and metallization AI.The working principle of this valve is that under not energising situation, fluid can directly be mapped on the convex diaphragm and produce a downward pressure, makes the outlet of valve close tightlyer.After the heating resistor energising, owing to SI, two kinds of material coefficient of thermal expansion coefficients of AI difference are bent downwardly overhang, with the inlet increasing of valve, fluid is injected convex diaphragm bottom pressure of generation and is made the diaphragm epirelief again, thereby open valve export fluid is gushed out.Technologies such as chemical etching, epitaxial growth, silicon direct bonding and anodization welding are adopted in the processing of this valve, and boundary dimension is 14.5*8.5*1.45mm, and the frequency of okperation of overhang can reach 1KHz.
4, static excitation valve: structure is made up of top, end conducting polymer shell and a trilamellar membrane chip architecture.The top drain pan is as exciting electrode, and diaphragm is made up of two strata phthalimides and one deck gold that is placed on their centres.The working principle of this valve is, when giving exciting electrode in addition behind the voltage, the pliability diaphragm will and vary in size according to the direction of voltage, produce convex-concave deformation, produces the gateway that respective direction and the pulsating pressure of size open or close valve in the resonant cavity thereby make.Technologies such as surperficial little processing, mold pressing, etching, boring and LIGA are adopted in the processing of this valve.The diameter 3.3mm of diaphragm, thick 25um.
5, magnetic pumping valve: the structure of magnetic pumping valve partly is made up of last lower valve base, valve and magnetic pumping device etc.Valve is made of polysilicon and magnetic material.The working principle of this valve is, under the action of a magnetic field that actuator produces, is arranged in the stressed motion up or down of valve of magnetic circuit, and the fluid of input is moved up or down.Technologies such as thermal oxidation, epitaxial growth, etching and LPCVD are adopted in the processing of this valve.Valve is of a size of 40*40*1um, and the gross area of valve is less than 100*100um.Its main feature is that size is little, driving force is big, and is applicable to the conveying of conducting liquid.
6, electromagnetism/(or) the static excitation valve: it is that electromagnetism, two kinds of energisation modes of static are combined and make miniature valve, and it is made up of permanent magnet and two silicon chips being placed between the magnet.Top silicon chip has conical flow inlet and top electrode; Below silicon chip with 4 overhangs the surface is scribbled the pliability diaphragm picking-up of metal film, and with go into flat resonant cavity of interruption-forming.The working principle of this valve is, utilizes the Lorentz force that the pulsed voltage U1 that adds between the membrance electrode produces and adds to diaphragm and the reverse generation of the pulsed voltage U2 between top electrode Coulomb force makes diaphragm deformation to open or close valve port; Watching during with the pulse persistance of U1 in the reality designs very shortly, and the endurance of U2 is longer, therefore when U1 positive pulse close port, U2 simultaneously close port also keeps closing of a period of time valve in the U1 back that disappears, and U2 changes and keeps again a period of time simultaneously and changes during to next U1 positive pulse when the 2nd U1 negative impulse opened valve port.U1 plays the state exchange effect, and U2 plays state maintenance effect.IC standard and technologies such as LPCVD, anisotropic etching are adopted in the processing of this valve, and chip size is 8*2*3mm.
7, memory alloy valve: memory alloy valve (SMA) is at high temperature to be fired into definite shape, can be used as sensitivity or executive component after the cooling, and when energising is heated to uniform temperature with it, it will produce the power of recovering or partly recovering original shape.The normal worker's valve of the SMA beam type that utilizes this specific character to make, it partly is made up of SMA beam, poly-imines diaphragm, cushion block, valve seat and breathing pipe etc.The working principle of this valve is, after giving the energising of SMA beam, its deformation is passed to diaphragm by cushion block, makes diaphragm live breathing pipe to recessed variable block, thus throttle down.Technologies such as laser beam cutting, electrolytic photoetching, spin plated film are adopted in the processing of this valve, and the SMA beam is the NiT material, and the inside and outside diameter of valve seat is respectively 0.5mm and 1mm.Diaphragm thickness is 3um.The response time of switch valve is 0.5-1.2s.
8, piezo electric valve: piezo electric valve is that piezo technology is incorporated into a new technology in the pneumatic valve.The tension force that applies in crystal structure, pressure stress or shearing stress except producing corresponding distortion, also will induce dielectric polarization or electric field in crystal.This phenomenon is called as direct piezoelectric effect; Otherwise, if on this crystal, add electric field, thereby make this crystal produce electric polarization, then crystal also strain or stress, inverse piezoelectric effect that Here it is will occur simultaneously.Both are commonly referred to as piezoelectric effect.Piezo electric valve promptly utilizes the piezoelectric inverse effect and develops.
Piezo electric valve is the amount of deformation direct ratio and these characteristics of electric field strength that apply thereon, a proportional dump valve of exploitation that utilizes piezoelectric material.Because the piezoelectricity valve block is not subjected to mechanical friction power in deformation process, and has the fast characteristics of speed of response, can satisfy the application requirements of High Speed System; With respect to above-mentioned miniature pump valve, have advantages such as low in energy consumption, that response is fast, do not have electromagnetic interference, the life-span is long and can not generate heat.
Brief summary:
Above-mentioned no excitation source valve (passive valves) structure is comparatively simple, no exciting bank, can batch process, be suitable in micropump or the microsystem;
The above-mentioned various excitation source valve that has is easy to integrated and has good dynamic characteristic, is suitable for and the incorporate application of silicon heat-flow sensor, characteristics such as pneumostop is good, and Young's modulus is low and with the IC process compatible;
Above-mentioned static and solenoid valve direction that can control flow rate and low in energy consumption;
Above-mentioned memory alloy valve can be exported high-tensile strength value or big displacement quantity in short space, be suitable for directly and the microsystem executive component supporting;
That above-mentioned piezo electric valve has is highly sensitive, speed of response is fast, can satisfy the application requirements of High Speed System; With respect to above-mentioned miniature pump valve, it has advantages such as low in energy consumption, that response is fast, do not have electromagnetic interference, the life-span is long and can not generate heat.In industry and process automation control field, have broad application prospects.
Though but the above-mentioned background technology has many advantages, but also there is shortcoming and defect in various degree: above-mentioned various valve bodies, the structure more complicated, manufacturing procedure is many, the technological requirement exquisiteness, manufacture cost is high, and price is luxuriant and rich with fragrance right, and is supporting to carrying (medium) liquid to have exacting terms and requirement with the piezoelectric pump product, and assembly technology complexity, the overall cost height, the ability to provide the auxiliary items of product is relatively poor, and market is difficult to popularize.
In the background patents technology, the patent of invention that the inventor herein was once authorizing: " superminiature electronic pump " ZL01128771.3; " a kind of miniaturized hydraulic electronic pump and preparation process and method thereof " ZL 02114467.2; " miniaturized hydraulic electronic pump " ZL 02114470.2; " a kind of piezoelectric ceramic and micro air pump that is used to make micropump " ZL200510012575.6; It is different that " piezoelectric ceramic pump that is used for electronic product and CPU heat radiation cooling system " ZL200910109281.3 described multiple type (shape) shape, the unlike material structure, processing is simple, cheap metal and pellosil single cantilever beam valve, spring pellosil plate valve, spring silica gel ball valve, rectangle elastic membrane plate valve, needle-valve, these valve bodies not only have the plurality of advantages of background technique, and have unrivaled price advantage of background technique and a manufacture cost advantage, its reason is that the periphery when piezoelectric vibrator is held radially drawing of fixing back generation and stretches and be out of shape, the restriction piezoelectric vibrator can only upwards swell and produce the axial mechanical motion that convex-concave is out of shape, the pump valve liquid entering hole that is provided with, can effectively improve the sensitivity of pump valve folding and property freely, and can utilize low-cost production functional, simple and practical one-way valve, make this one-way valve and need only several sharing money, and the micropump pump valve of foregoing background technique needs dozens of yuan, or even hundreds of unit, the micropump pump valve of inventor herein's patented technology and above-mentioned background technology---no excitation source valve (passive valves), the piezoelectric excitation valve, the thermal excitation valve, the static excitation valve, the magnetic pumping valve, electromagnetism/static excitation valve, the memory alloy valve, piezo electric valve is compared, manufacture cost is a thousandth of original micropump pump valve, or even ten thousand/.
Although the above-mentioned background patented technology has many advantages and characteristic, in industrialization and producing in enormous quantities, the relatively poor phenomenon of consistency of product and tightness still can appear, and cause the secondary rework rate of product higher thus, be difficult to improve work efficiency.Its main cause is:
1, with difformity, the metal that different structure is made, single cantilever beam valve are difficult to guarantee with technology and pattern assembly the flatness of installation valve body, and the fixing appropriate degree of pump valve intensity, thereby cause pump valve conformity and tightness weak effect phenomenon, influence the integral working of pump.
2, in this external working long hours, because the influence of the attachment of fluid (as water) medium, can accumulate gradually certain impurity or dirt are erected the overhang pad, the valve seal pad can not be resetted cause pressure release and gas leak phenomenon, reduce the service behaviour of pump.
3, the phenomenon of tearing, be out of shape and be shifted that high frequency motion causes very easily appears in its metal, single cantilever beam valve fixed end, cause place's pressure release of valve film phonograph seal and gas leak phenomenon, influence the integral working of piezoelectric pump self-priming effect, reduction piezoelectric pump, and fluid (gas) movement velocity and the quick-acting rates of biography.
Three, summary of the invention
The objective of the invention is to overcome the deficiency that above prior art exists, invent a kind of high-efficient single direction valve that is used for supporting piezoelectric pump, just develop the umbrella valve of a kind of being exclusively used in (fluid) piezoelectric pump.Be characterized in: this valve body have whole open cross properties of flow, have simple in structure, convenient and practical, folding freely, highly sensitive, speed of response fast, good sealing effect, low cost of manufacture, the good characteristics of service behaviour, thoroughly solved piezoelectric pump pump valve production assembling existing frock technology with problem, and suitability for industrialized production.
The objective of the invention is by the pump valve structural design, pump valve fixed support design cooperates rationally, improves the assembly technology of pump valve, optimizes pump chamber, and the unlatching that reaches pump valve is stressed evenly, cutoff performance is good, the purpose that suction capacity is good.By test, working efficiency is compared with above-mentioned background technology pump valve, improves more than the 30%-100%.
That the present invention has is simple in structure, speed of response is fast, volume is little, in light weight, noise free, pressure greatly, do not rush down pressure, non-return characteristics such as effective, easy to install.Can be different model, various piezoelectric pump products are supporting, be applicable to multiple fluid such as scientific research, water treatment sampling, instrument and apparatus, chemical analysis, medical apparatus, medical and health, biomedicine, bioengineering, control automatically, water treatment, delicate metering, experiment detection, micrometeor dispensing, micro-total analysis system, chip lab and pcr chip, comprise gas, water, particularly liquid field and occasion.
To achieve these goals, technical solution of the present invention is as follows: in order to illustrate better and to understand technology contents, below be with label in the described component unquote, so tired simultaneously referring to accompanying drawing and label declaration.
1, is exclusively used in the umbrella valve of piezoelectric pump, it is characterized in that: form by umbrella valve and vavle shelf, the valve handle of umbrella valve passes and is positioned at the vavle shelf central through bore, be distributed with around this vavle shelf central through bore can whole opening and closing cross opening (6), this crosses cooperation corresponding that opening (6) and open umbrella valve umbrella are done opening and closing.
2, the described umbrella valve that is exclusively used in piezoelectric pump, it is characterized in that: described umbrella valve is umbrella valve A 1, positive stop lug boss (5) is arranged on its valve handle, projection above the open umbrella shape, below the open umbrella shape for the plane as and vavle shelf cross the fitting surface of opening (6) fluid inlet and outlet.
3, the described umbrella valve that is exclusively used in piezoelectric pump, it is characterized in that: described umbrella valve is umbrella valve B 2, positive stop lug boss (5) is arranged on its valve handle, it above the open umbrella shape plane, below the open umbrella shape downward circular sloped surface or circular cambered surface, as crossing the fitting surface of opening (6) fluid inlet and outlet with vavle shelf.
4, the described umbrella valve that is exclusively used in piezoelectric pump, it is characterized in that: positive stop lug boss (5) is arranged on its valve handle of described umbrella valve, above the open umbrella shape projection or plane, be upwards circular sloped surface or circular cambered surface below the open umbrella shape, as crossing the fitting surface of opening (6) fluid inlet and outlet with vavle shelf.
5, above-mentioned described any one is exclusively used in the umbrella valve of piezoelectric pump, it is characterized in that: umbrella valve is the one-way valve of beveled structure, and its material is a silicone rubber, valve body proportion 0.95-1.4g/m 3Between, between the thickness 0.30-0.8 millimeter, shore hardness also comprises any one number wherein between the above-mentioned numerical value between the 48-56 degree.
6, above-mentioned described any one is exclusively used in the umbrella valve of piezoelectric pump, it is characterized in that: umbrella valve is the one-way valve of beveled structure, and its material is a silicone rubber, and valve body proportion is at 1.1-1.2g/m 3Between, thickness is between the 0.45-0.55 millimeter, and shore hardness also comprises any one number wherein between the above-mentioned numerical value between the 49-52 degree.
7, above-mentioned described any one is exclusively used in the umbrella valve of piezoelectric pump, it is characterized in that: the umbrella valve that is exclusively used in piezoelectric pump according to claim 1 is characterized in that: application methyl-silicone oil on umbrella valve and vavle shelf are worked in coordination face.
Change an angle, technical solution of the present invention and advantage and effect are:
1, designing and producing a kind of beveled structure. one-way valve is characterized in: can be the one-way valve that benchmark is made the various beveled structures of above-mentioned different model with this part under not varying sized situation; Applicable to be different model, various piezoelectric pump products are supporting.
2, the one-way valve of a kind of beveled structure of design, these one-way valve major technique characteristics are: the valve block material is a silicone rubber, valve body proportion, thickness, shore hardness all have a span, needs according to loaded work piece pressure, adjust proportion, hardness and the thickness of pump valve material, and adapt to following and cooperating the pump valve sealing effect and the service behaviour of raising piezoelectricity air pump of pump valve and piezoelectric constant transducing sheet.
3, a kind of pump valve fixed support of design, this fixed support has characteristics simple in structure, easy to install, these support bracket fastened characteristics are: fixed support promptly is an important component part that is connected in the pump chamber, can or reduce the seal diameter size at support bracket fastened periphery, increase and can change pump chamber, pressure is increased or reduce.
4, the present invention have simply, practical, compact, advantage of low manufacturing cost and characteristic.
5, the present invention has thoroughly changed the shortcoming and defect that background technique exists and is, it does not need the processing technology and the manufacturing procedure of background technique complexity, but utilize whole open valve cross properties of flow and technical characterstic of the present invention, make valve body on both ends of the surface, produce uniform pressure difference, thereby automatically stable realization opening and closing work reaches the effect of one-way valve.Umbrella shape one-way valve of the present invention is compared with above-mentioned background technique micropump pump valve, has tangible cost performance comprehensive characteristics; Comparing with above-mentioned background technology micropump pump valve manufacture cost, is a thousandth of its manufacture cost, or even ten thousand/.
6, test for parameters such as one-way valve structures umbrella shape, by finite element simulation derive its theoretical delivery and area of passage formula, simultaneously in conjunction with laboratory data to the design of umbrella shape one-way valve structures, performance comparison, cross properties of flow, leakage, characteristic such as withstand voltage is tested, optimize the pump chamber structure, solve structural design and mutual rational proportion thereof between pump valve fixed support disk area and feed liquor, the discharge opeing area of passage, improve the property followed of pump valve and the whole work efficiency of piezoelectric pump.Stable performance, safe and reliable.
7, in order to reduce the whole operating noise that mechanical friction brings in the motion of umbrella shape one-way valve of opening, strengthen the folding intensity of pump valve simultaneously, adopted the technology of application methyl-silicone oil on umbrella valve and vavle shelf are worked in coordination face (methyl-silicone oil of commercially available various models all can).Need to prove that methyl-silicone oil has remarkable heat-resisting quantity, lower temperature resistance, excellent electric insulation, good ageing resistance, have low surface tension, have nonpoisonous and tasteless physiology inertia, viscosity-temperature coefficient is low, compressibility is higher, and volatility is low, and lubricity is better etc.Thereby whole open that umbrella shape one-way valve operating noise is low, folding freely, highly sensitive, speed of response soon, especially the umbrella shape one-way valve can prevent its skew in movement process, the sealing, stable work in work, the suction capacity that improve pump valve are good
Structure of the present invention includes but not limited to said structure.
Four, description of drawings
Fig. 1 (a) is the structural representation of embodiments of the invention 1 umbrella valve A; The structural representation of Fig. 1 (b) embodiments of the invention 2 umbrella valve B; Fig. 2 (a) is the working principle cross-sectional schematic of embodiment 1 among Fig. 1 (a); Fig. 2 (b) is the working principle cross-sectional schematic of embodiment 2 among Fig. 1 (b); Fig. 3 is the first kind of structural representation of vavle shelf A in the embodiments of the invention 1, and Fig. 4 is the A-A sectional view of Fig. 3; Fig. 5 is the second kind of structural representation of vavle shelf A in the embodiments of the invention 1, and Fig. 6 is the B-B sectional view of Fig. 5; Fig. 7 is the third structural representation of vavle shelf A in the embodiments of the invention 1, and Fig. 8 is the C-C sectional view of Fig. 7; Fig. 9 is the first kind of structural representation of vavle shelf B in the embodiments of the invention 2, and Figure 10 is the D-D sectional view of Fig. 9; Figure 11 is second kind of structural representation of embodiments of the invention 2 vavle shelf B, and Figure 12 is the E-E sectional view of Figure 11; Figure 13 is the third structural representation of embodiments of the invention 2 vavle shelf B, and Figure 14 is the F-F sectional view of Figure 13; Figure 15 is two structural representations into and out of umbrella valve of assembling on the vavle shelf of the present invention.
Above-mentioned number in the figure explanation: 1. umbrella valve A, 2. umbrella valve B, 3. vavle shelf A, 4. vavle shelf B, 5, positive stop lug boss, 6, cross opening.
Five, embodiment
Referring to Fig. 1 (a), this is a umbrella valve, on the valve handle (handle of umbrella or be called handgrip) positive stop lug boss 5 is arranged, and these positive stop lug boss 5 cross sections are shapes such as " one " font, " cross " shape, " 3 points " shape, " circle " shape; Cross the face that opening 6 fluid inlet and outlets cooperate for the plane conduct with vavle shelf below the projection above the open umbrella shape, open umbrella shape, this structure can be described as " umbrella valve A 1 ".
Referring to Fig. 1 (b), this umbrella valve and said structure are basic identical, and difference is to be the plane to be downward inclined-plane (diagram) below on open umbrella shape, as crossing the face that opening 6 fluid inlet and outlets cooperate with vavle shelf, this structure can be described as " umbrella valve B 2 ".
Embodiment 1: referring to Fig. 2 (a), this is the structure that a umbrella valve A 1 is connected with vavle shelf A 3 and cooperates, umbrella handle is by (passing in other words) and be positioned at the hole at vavle shelf A 3 centers among the umbrella valve A 1, positive stop lug boss 5 on its umbrella handle is stuck in outside vavle shelf A 3 through holes, because fluid acts on the umbrella valve A 1 umbrella cover pressure difference of both sides up and down, umbrella valve A 1 open umbrella shape plane can be pumped, just as the butterfly's wing that circles in the air moves up and down, this umbrella valve A 1 open umbrella shape lower plane is crossed opening 6 with the fluid inlet and outlet above the vavle shelf A 3 and is done cooperating of opening and closing, and this crosses the characteristic that opening 6 has whole opening and closing.Also have a kind of mode that moves up and down in addition, place far away outside the positive stop lug boss on the umbrella handle among the umbrella valve A 15 is stuck in vavle shelf A 3 through holes, if any the 0.3-1 millimeter at a distance, then umbrella valve A 1 integral body can pump; Perhaps umbrella valve A 1 integral body and umbrella cover can pump jointly; Realize that in a word fluid inlet and outlet above umbrella valve A 1 open umbrella shape lower plane and the vavle shelf A 3 crosses opening 6 and do cooperating of whole opening and closing.
Embodiment 2: referring to Fig. 2 (b), basic identical with Fig. 2 (a), difference is that the umbrella valve among Fig. 2 (b) is umbrella valve B 2, this is the cross-sectional schematic that a umbrella valve B 2 is connected with vavle shelf B 4 and cooperates, among the up and down umbrella valve B 2 umbrella handle by and be arranged in the center hole of vavle shelf B 4, positive stop lug boss 5 on its umbrella handle is stuck in vavle shelf B 4 through holes outside, because fluid acts on the umbrella valve umbrella cover pressure difference of both sides up and down, make umbrella valve B 2 open umbrella shape lower inclined planes cross opening 6 and do cooperating of opening and closing with the fluid inlet and outlet above the vavle shelf B 4, better for what cooperate, umbrella valve B 2 open umbrella shape lower inclined planes and conduct each other fitting surface corresponding with the inclined-plane above the vavle shelf B 4 crossed opening 6 and is positioned at above this vavle shelf B4 inclined-plane.
Embodiment 3: two embodiments' above being exactly is comprehensive, be on its valve handle of described umbrella valve positive stop lug boss 5 to be arranged, it above the open umbrella shape projection or for the plane, be upwards circular sloped surface or circular cambered surface below the open umbrella shape, as crossing the fitting surface of opening (6) fluid inlet and outlet with vavle shelf.
Referring to Fig. 3 and Fig. 4, vavle shelf A 3 is as first kind of structural representation, and central through bore is as passing the umbrella valve valve handle, and the opening 6 excessively of uniform three curved grooves in cross section is used as the duct that fluid passes through around this central through bore.
Referring to Fig. 5 and Fig. 6, vavle shelf A 3 is as second kind of structural representation, and substantially with Fig. 3 and Fig. 4, difference is the opening 6 excessively of uniform four curved grooves in cross section around vavle shelf A 3 central through bores.
Referring to Fig. 7 and Fig. 8, vavle shelf A 3 is as the third structural representation, and substantially with Fig. 3 and Fig. 4, difference is the opening 6 excessively that uniform three cross sections are garden shape around vavle shelf A 3 central through bores.Certainly be somebody's turn to do opening 6 also can have 2,4,5,6 etc. uniform.
Referring to Fig. 9 and Figure 10, vavle shelf B 4 is as first kind of structural representation, and central through bore is as passing the umbrella valve valve handle, and the opening 6 excessively of uniform three curved grooves in cross section is used as the duct that fluid passes through around this central through bore.Basic identical with Fig. 3 and Fig. 4, difference is the vavle shelf B 4 that adopts, among Figure 10 rounded cambered surfaces of vavle shelf B 4 bottom surfaces (arc surface) or rounded inclined-plane as with the fitting surface of the opening and closing of umbrella valve B 2.From Figure 10: vavle shelf B 4 bottom surface sections are circular arc line, see it is a recessed garden sphere (circular cambered surface) from three-dimensional viewpoin.
Referring to Figure 11 and Figure 12, vavle shelf B 4 is as second kind of structural representation, and substantially with Fig. 9 and Figure 10, difference is the opening 6 excessively of uniform four curved grooves in cross section around this vavle shelf B 4 central through bores.
Referring to Figure 13 and Figure 14, vavle shelf B 4 is as the third structural representation, and substantially with Fig. 9 and Figure 10, difference is the rounded opening 6 excessively in uniform three cross sections around this vavle shelf B 4 central through bores.Certainly be somebody's turn to do opening 6 can have 2,4,5,6 etc. uniform.
Referring to Figure 15, two one positive one anti-umbrella valve A 1 of assembling can be used as the valve into and out of fluid on vavle shelf A 3.This also is the working state schematic representation of above-mentioned each umbrella valve on vavle shelf.
Need to prove:
1, the various cross sections on above-mentioned vavle shelf A 3, the vavle shelf B 4 different, quantity is different crosses the passage that openings 6 all belong to fluid, all be with the open umbrella shape face of umbrella valve as the fluid inlet and outlet fitting surface.
2, be the plane below the open umbrella shape of umbrella valve or be downward circular sloped surface or downward circular cambered surface, can also be circular sloped surface or circular cambered surface upwards below the open umbrella shape of umbrella valve, all can be used as the fitting surface of crossing opening (6) fluid inlet and outlet with vavle shelf.
3, umbrella valve is the one-way valve of beveled structure, and its material is a silicone rubber, valve body proportion 0.95-1.4g/m 3Between, between the thickness 0.30-0.8 millimeter, shore hardness is between the 48-56 degree, also comprising between the above-mentioned numerical value any one number wherein, is g/m such as 0.96,0.97,0.98,0.99,1.00,1.01,1.02,1.03,1.04,1.05,1.06,1.07,1.10,1.11,1.12,1.13,1.14,1.15,1.16,1.17,1.18,1.19,1.20,1.25,1.30,1.35,1.38,1.39,1.4 as valve body proportion 3As valve body thickness be 0.31,0.32,0.33,0.34,0.35...0.4,0.50,0.60,0.65,0.70,1.75,0.78,0.79, millimeter such as 0.8; Spend 48,49,50,51,52,53,54,55,56 as valve body shore hardness.According to test: the valve body proportion of umbrella valve is at 1.1-1.2g/m 3Between, thickness is between the 0.45-0.55 millimeter, and shore hardness is between the 49-52 degree time, and it is better that effect seems.
4, abovely only be the present invention's preferred embodiment, but it does not limit practical range of the present invention, the equivalent variations and the modification that promptly do not depart from claim of the present invention and done must belong to the present invention's protection domain.

Claims (7)

1. be exclusively used in the umbrella valve of piezoelectric pump, it is characterized in that: form by umbrella valve and vavle shelf, the valve handle of umbrella valve passes and is positioned at the vavle shelf central through bore, be distributed with around this vavle shelf central through bore can whole opening and closing cross opening (6), this crosses cooperation corresponding that opening (6) and open umbrella valve umbrella are done opening and closing.
2. the umbrella valve that is exclusively used in piezoelectric pump according to claim 1, it is characterized in that: described umbrella valve is umbrella valve A 1, positive stop lug boss (5) is arranged on its valve handle, cross the fitting surface of opening (6) fluid inlet and outlet below the projection above the open umbrella shape, open umbrella shape for plane conduct and vavle shelf.
3. the umbrella valve that is exclusively used in piezoelectric pump according to claim 1, it is characterized in that: described umbrella valve is umbrella valve B 2, positive stop lug boss (5) is arranged on its valve handle, it above the open umbrella shape plane, below the open umbrella shape downward circular sloped surface or circular cambered surface, as crossing the fitting surface of opening (6) fluid inlet and outlet with vavle shelf.
4. the umbrella valve that is exclusively used in piezoelectric pump according to claim 1, it is characterized in that: positive stop lug boss (5) is arranged on its valve handle of described umbrella valve, above the open umbrella shape projection or plane, be upwards circular sloped surface or circular cambered surface below the open umbrella shape, as crossing the fitting surface of opening (6) fluid inlet and outlet with vavle shelf.
5. be exclusively used in the umbrella valve of piezoelectric pump according to described any one of claim 1-4, it is characterized in that: umbrella valve is the one-way valve of beveled structure, and its material is a silicone rubber, valve body proportion 0.95-1.4g/m 3Between, between the thickness 0.30-0.8 millimeter, shore hardness also comprises any one number wherein between the above-mentioned numerical value between the 48-56 degree.
6. be exclusively used in the umbrella valve of piezoelectric pump according to described any one of claim 1-4, it is characterized in that: umbrella valve is the one-way valve of beveled structure, and its material is a silicone rubber, and valve body proportion is at 1.1-1.2g/m 3Between, thickness is between the 0.45-0.55 millimeter, and shore hardness also comprises any one number wherein between the above-mentioned numerical value between the 49-52 degree.
7. be exclusively used in the umbrella valve of piezoelectric pump according to described any one of claim 1-4, it is characterized in that: the umbrella valve that is exclusively used in piezoelectric pump according to claim 1 is characterized in that: application methyl-silicone oil on umbrella valve and vavle shelf are worked in coordination face.
CN2011102557035A 2011-08-31 2011-08-31 Umbrella-shaped valve special for piezoelectric pump Pending CN102287365A (en)

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CN102536756A (en) * 2012-01-13 2012-07-04 厦门坤锦电子科技有限公司 Miniature liquid pump
WO2013029406A1 (en) * 2011-08-31 2013-03-07 Yang Zhujun Umbrella valve dedicated for use in piezoelectric pump
CN105858222A (en) * 2016-05-25 2016-08-17 镇江市电站辅机厂有限公司 Positive pressure and negative pressure integrated pneumatic ash conveying system and method
CN106194652A (en) * 2016-04-15 2016-12-07 宁波新邦工具有限公司 A kind of inflator pump using taper valve block
CN106855143A (en) * 2015-12-08 2017-06-16 北京谊安医疗系统股份有限公司 A kind of diaphragm check valve
CN108561295A (en) * 2018-02-08 2018-09-21 深圳垦拓流体控制有限公司 It is a kind of to reduce remaining pump body structure
CN110345304A (en) * 2018-04-05 2019-10-18 艾福迈精密部件公司 Valve and valve gear
CN112309150A (en) * 2020-12-07 2021-02-02 江西崇政科技有限公司 Movable traffic signal lamp
CN113941381A (en) * 2015-02-20 2022-01-18 文塔纳医疗系统公司 Assembly for storing and transporting tissue samples immersed in a fluid
CN114727726A (en) * 2021-11-09 2022-07-08 广州凡而芳香日用品有限公司 Underlying high-capacity foam generating device with single air pump
CN114962225A (en) * 2022-05-17 2022-08-30 宁波捷尔天电气有限公司 Small-size high pressure diaphragm pump
CN115003944A (en) * 2020-03-17 2022-09-02 万通集团公司 Valve with a valve body

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WO2013029406A1 (en) * 2011-08-31 2013-03-07 Yang Zhujun Umbrella valve dedicated for use in piezoelectric pump
CN102536756B (en) * 2012-01-13 2015-05-13 厦门坤锦电子科技有限公司 Miniature liquid pump
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CN106855143A (en) * 2015-12-08 2017-06-16 北京谊安医疗系统股份有限公司 A kind of diaphragm check valve
CN106194652A (en) * 2016-04-15 2016-12-07 宁波新邦工具有限公司 A kind of inflator pump using taper valve block
CN105858222A (en) * 2016-05-25 2016-08-17 镇江市电站辅机厂有限公司 Positive pressure and negative pressure integrated pneumatic ash conveying system and method
CN108561295A (en) * 2018-02-08 2018-09-21 深圳垦拓流体控制有限公司 It is a kind of to reduce remaining pump body structure
CN110345304A (en) * 2018-04-05 2019-10-18 艾福迈精密部件公司 Valve and valve gear
CN115003944A (en) * 2020-03-17 2022-09-02 万通集团公司 Valve with a valve body
CN112309150B (en) * 2020-12-07 2021-12-28 吉安市永安交通设施有限公司 Movable traffic signal lamp
CN112309150A (en) * 2020-12-07 2021-02-02 江西崇政科技有限公司 Movable traffic signal lamp
CN114727726A (en) * 2021-11-09 2022-07-08 广州凡而芳香日用品有限公司 Underlying high-capacity foam generating device with single air pump
CN114962225A (en) * 2022-05-17 2022-08-30 宁波捷尔天电气有限公司 Small-size high pressure diaphragm pump

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