WO2013004829A1 - Insulated gate bipolar transistor - Google Patents
Insulated gate bipolar transistor Download PDFInfo
- Publication number
- WO2013004829A1 WO2013004829A1 PCT/EP2012/063303 EP2012063303W WO2013004829A1 WO 2013004829 A1 WO2013004829 A1 WO 2013004829A1 EP 2012063303 W EP2012063303 W EP 2012063303W WO 2013004829 A1 WO2013004829 A1 WO 2013004829A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- base layer
- conductivity type
- well
- emitter
- Prior art date
Links
- 239000002019 doping agent Substances 0.000 claims description 28
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 13
- 230000002829 reductive effect Effects 0.000 description 8
- 230000000903 blocking effect Effects 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000009825 accumulation Methods 0.000 description 3
- 238000012856 packing Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 230000001413 cellular effect Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical class O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
- H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
- H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66325—Bipolar junction transistors [BJT] controlled by field-effect, e.g. insulated gate bipolar transistors [IGBT]
- H01L29/66333—Vertical insulated gate bipolar transistors
- H01L29/66348—Vertical insulated gate bipolar transistors with a recessed gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
Definitions
- the invention relates to the field of power semiconductor devices. It relates to a Insulated Gate Bipolar according to the preamble of claim 1 .
- FIG. 1 shows a prior art IGBT 120 with planar gate electrodes.
- the IGBT 120 is a device with a four-layer structure, which layers are arranged between an emitter electrode 2 on an emitter side 1 1 and a collector electrode 25 on a collector side 15, which is arranged opposite of the emitter side 1 1 .
- An (n-) doped drift layer 8 is arranged between the emitter side 1 1 and the collector side 15.
- a p doped base layer 4 is arranged between the drift layer 8 and the emitter electrode 2, which base layer 4 is in direct electrical contact to the emitter electrode 2.
- An n- doped source region 7 is arranged on the emitter side 1 1 embedded into the planar base layer 4 and contacts the emitter electrode 2.
- a planar gate electrode 31 is arranged on top of the emitter side 1 1 .
- the planar gate electrode 31 is electrically insulated from the base layer 4, the first source region 7 and the drift layer 8 by a first insulating layer 34.
- a collector layer 9 is arranged between the drift layer 8 and the collector electrode 25.
- planar MOS cell design exhibits a number of disadvantages when applied to BiMOS type switch concepts.
- the device has high on-state losses due to a plurality of effects.
- the planar design offers a lateral MOS channel which suffers from carrier spreading (also called JFET effect) near the cell. Therefore the planar cells show low carrier enhancement.
- the planar design suffers also from the hole drain effect (PNP effect) due to the lateral electron spreading out of the MOS channel.
- PNP effect hole drain effect
- the region between the cells offers strong charge enhancement for the PiN diode part.
- This PiN effect can only show a positive impact in high voltage devices with low cell packing densities (a low number of cells within an area). In order to achieve reduced channel resistance the planar devices are made with less cell packing density, and this can only be compensated with narrow pitches (distance between two cells), thereby reducing the PiN effect.
- planar design provides good blocking capability due to low peak fields in the cells and between the cells.
- planar design can have a large MOS accumulation region below the gate electrode and large associated capacitance. Nevertheless, the device shows good controllability due to the application of a field oxide type layer between the cells for miller capacitance reduction. Therefore, good controllability and low switching losses can be achieved for planar design.
- prior art IGBTs 130 having trench MOS cell designs as shown in FIG. 2 have been introduced, in which a trench gate electrode 3 is electrically insulated from a base layer 4, a first source region 7 and the drift layer 8 by a first insulating layer 34.
- the trench gate electrode 3 is arranged in the same plane and lateral to the base layer 4 and extends deeper into the drift layer 8 than the base layer 4.
- the on-state losses are lower, because the trench design offers a vertical MOS channel, which provides enhanced injection of electrons in the vertical direction and suffers from no drawbacks from charge spreading (so called JFET effect) near the cell. Therefore the trench cells show much improved carrier enhancement for lower losses. Due to the vertical channel design, the trench offers also less hole drain effect (PNP effect) due to the improved electron spreading out of the MOS channel. At the bottom of the trench there is an accumulation layer, which offers strong charge enhancement for the PIN diode part. Hence wide and/or deep trenches show optimum performance. The trench design offers large cell packing density for reduced channel resistance. The trench design, however, suffer from lower blocking capability near the bottom corners of the trenches due to high peak electric fields.
- the trench design has a large MOS accumulation region and associated capacitance with difficulty to apply field oxide type layers in the trench for miller capacitance reduction. Therefore, the device results in bad controllability and high switching losses. Furthermore, the high cell densities in trench designs will result in high short circuit currents.
- the trench gate electrodes have been made wide and deep, whereas the cells have to be made narrow, so that losses are reduced and short circuit current can be kept low.
- such trenches are difficult to process and will still suffer from bad controllability.
- IGBTs 140 having a pitched- trench gate electrode 300 design has been applied, in which a MOS area is inserted between the cells.
- the two trench gate electrodes 3 are connected by a layer made of the same material as the trench gate electrodes, thereby forming an area below, in which a part of the base layer is arranged, but no source region or contact of the base layer to the emitter electrode is available in this MOS area.
- such devices result in bad blocking properties and high switching losses due to slow field spreading from the pitched area during switching (FIG 3).
- dummy trench cells 1 10 have been introduced into another prior art IGBT 150, in which active cells 100 and dummy cells 1 10 are arranged in an alternating manner.
- the base layer 4 and first source regions 7 do not have a contact to the emitter electrode 2 in the dummy cell 1 10,
- n doped enhancement layers may be introduced between the drift layer 8 and the base layer 4 in order to reduce on-state losses.
- JP 201 1 -40586 another prior art IGBT 160 having trench gate electrodes is described.
- the deep p base layer 4 is connected to the active trenches 3, which has a negative impact on the device turn-on behaviour in terms of controllability.
- the problem is solved by the semiconductor device with the characteristics of claim 1 .
- the inventive Insulated gated bipolar transistor has layers between an emitter electrode on an emitter side and a collector electrode on a collector side opposite to the emitter side, comprising:
- collector layer of the second conductivity type different than the first conductivity type which is arranged between the drift layer and the collector electrode and which electrically contacts the collector electrode
- a base layer of a second conductivity type which is arranged between the drift layer and the emitter electrode, which base layer is in direct electrical contact to the emitter electrode
- first source region of the first conductivity type having a higher doping concentration than the drift layer, which first source region is arranged on the base layer towards the emitter side and contacts the emitter electrode, - a or at least two trench gate electrodes, which is arranged lateral to the base layer and extends deeper into the drift layer than the base layer and which trench gate electrode is separated from the base layer, the first source region and the drift layer by a first insulating layer, wherein a channel is formable between the emitter electrode, the first source region, the base layer and the drift layer,
- a third insulating layer which is arranged on the emitter side on top of the trench gate electrode, the electrically conductive layer and those parts of the base layer, the enhancement layer and the drift layer lying between the trench gate electrode and the well, and which has a recess on top of the electrically conducting layer such that the electrically conducting layer electrically contacts the emitter electrode.
- This structure combines the positive effects of the prior art devices by having the deep well between two active cells, which ensures good blocking performance, improved controllability and low switching losses. Furthermore, the deep well is separated from the base layer by the enhancement layer for better turn-on behavior.
- the enhancement layer itself also has the advantage that the on-state losses are reduced. As the electrically conductive layer is on the potential of the emitter electrode, it does not play a negative role by adding a capacitive effect in the gate circuit and hence, improved switching is obtained with lower losses and good controllability.
- inventive IGBT For the creation of the inventive IGBT no complicated steps like trenches having different depths are used.
- the inventive IGBT has good electrical properties for both the static and dynamic characteristics.
- the device is easy to manufacture, because the inventive design can be manufactured based on a self-aligned process for the base layer and the enhancement layer between the well and the gate and if present for a second source region with the potential of applying the inventive emitter sided structure also on other IGBT device types like reverse conducting designs in a number of possible combinations.
- the inventive design is suitable for full or part stripes but can also be implemented in cellular designs.
- the electrically conductive layer is used as a mask for the creation of the enhancement layer and the base layer (self alignment), which is advantageous, because no mask alignment is needed (as it is the case for a mask, that is only applied for the creation of these layers and removed afterwards) and the mask does not have to be removed for finalizing the device.
- FIG. 1 shows a IGBT with a planar gate electrode according to the prior art
- FIG. 2 shows an IGBT with a trench gate electrode according to the prior art
- FIG. 3 shows another IGBT with a pitched trench gate electrode according to the prior art
- FIG. 4 shows another IGBT with a dummy cell according to the prior art
- FIG. 5 shows another IGBT with a pitched trench gate electrode according to the prior art
- FIG. 6 shows a first exemplary embodiment of an IGBT according to the
- FIG. 7 to 12 show other exemplary embodiments of IGBTs according to the invention.
- FIG. 6 shows a first embodiment of an inventive power semiconductor device 1 in form of an insulated gate bipolar transistor (IGBT) with a four-layer structure (pnpn).
- the layers are arranged between an emitter electrode 2 on an emitter side and a collector electrode 25 on a collector side 15, which is arranged oppositehe emitter side 1 1.
- the IGBT comprises the following layers:
- An (n-) lowly doped drift layer 8 is arranged between the emitter side 1 1 and the collector side 15. Examplarily, the drift layer has a constant, uniform low doping concentration.
- a p doped collector layer 9 is arranged between the drift layer 8 and the collector electrode 25.
- the collector layer is arranged adjacent to and electrically contacts the collector electrode 25.
- a p doped base layer 4 is arranged between the drift layer 8 and the emitter electrode 2.
- the base layer 4 is in direct electrical contact to the emitter electrode 2.
- n doped first source region 7 is arranged on the base layer 4 towards the emitter side 1 1 and contacts the emitter electrode 2.
- the first source region 7 has a higher doping concentration than the drift layer 8.
- the first source region 7 is arranged on top of the base layer 4, it is meant that the first source region 7 is arranged at the surface at the emitter side 1 1.
- the first source region 7 may be embedded in the base layer 4 such that both layer have a common surface on the emitter side 1 1 .
- the trench gate electrodes 3 are arranged in the same plane (which plane lies parallel to the emitter side 1 1 ) and lateral to the base layer 4 and extends deeper into the drift layer 8 from the emitter side 1 1 than the base layer 4.
- the trench gate electrode 3 is separated from the base layer 4, the first source region 7 and the drift layer 8 by a first insulating layer 34.
- a channel is formable between the emitter electrode 2, the first source region 7, the base layer 4 and the drift layer 8.
- the trench gate electrodes may have any design well-known to the experts like cellular design, full or part stripes.
- a p doped well 5 is arranged in the same plane and lateral to the base layer 4 and extends deeper into the drift layer 8 than the base layer 4.
- the p well 5 is not connected to the p base layer 4.
- the enhancement layer 6 is shallower than the well 5.
- an electrically conducting layer 32 is arranged on the emitter side 1 1 , which covers the well 5 (FIG. 12). Additionally the electrically conductive layer 32 may cover such part of the enhancement layer 6, which is arranged between the well 5 and the base layer 4, and extends to a region above the base layer 4. If the drift layer extends to the surface on the emitter side 1 1 , the drift layer 8 is also covered by the electrically conductive layer 32 in this embodiment.
- the second electrically insulating layer 36 and/or the electrically conductive layer 32 can be used as a mask, therefore simplifying the manufacturing.
- the electrically conductive layer 32 can be made of any suitable electrically conductive material, exemplarily polysilicon or metal.
- a second electrically insulating layer 36 separates the electrically
- This second insulating layer 36 can be chosen as thin as 50 to 150 nm, which is much thinner than the insulating layers 38 used in prior art devices like those shown in FIG. 3 and 4, which have a third insulating layer 38 in form of a silicon oxide layer with a thickness of 500 to 1500 nm.
- a third insulating layer 38 is arranged on the emitter side 1 1 on top of the trench gate electrode 3, the electrically conductive layer 32 and those parts of the base layer 4, the enhancement layer 6 and the drift layer 8, which extend to the emitter side 1 1 between a trench gate electrode 3 and the well 5.
- the third insulating layer 38 has a recess 39 on top of the electrically conducting layer 32, i.e. on such a side of the layer 32 which lies opposite to the second insulating layer 38, such that the electrically conducting layer 32 is in electrical contact to the emitter electrode 2.
- “Lateral” shall mean in this description that two layers/regions are arranged in a same plane, which plane lies parallel to the emitter side. Within that plane the layers are arranged lateral (neighboured, side to side) or adjacent to each other, whereas the layers may have a distance from each other, i.e. another layer may be arranged between the two layers, but they may also be directly adjacent to each other, i.e. in touch to each other. "Lateral sides” of a layer shall be the sides of an object perpendicular to the emitter side 1 1.
- IGBTs similar to the one shown in FIG. 6 are disclosed, but these IGBTs comprise additional features as explained below in more detail.
- a second n doped source region 75 is arranged at the emitter side 1 1 on the base layer 4 between the trench gate electrode 3 and the well 5, wherein the second source region 75 exemplarily extends from the first electrically insulating layer 34 at least to a border of the electrically conductive layer 32.
- the second source region 75 is exemplarily created together with the first source region 7, thus reducing the masking steps during manufacturing.
- the second source region 75 has a higher doping concentration than the drift layer 8.
- FIG. 8 shows another inventive IGBT comprising an n doped buffer layer 85 having a higher doping concentration than the drift layer 8, which is arranged between the drift layer 8 and the collector layer 9.
- the inventive emitter sided design can also be applied to a reverse conducting IGBT, in which in the same plane as the collector layer 9 (i.e. on the collector side 15 and lateral to the collector layer 9), an n doped first region 95 is arranged as shown in FIG. 9.
- the first region 95 is thus arranged alternating to the collector layer 9.
- the first region 95 has a higher doping concentration than the drift layer 8.
- the electrically conductive layer 32 may be made of the same material as the trench gate electrode 3. By its contact to the emitter electrode 2 the electrically conductive layer 32 is on the same potential as the emitter electrode 2. This layer is not controllable as a gate electrode. Thus, it has no negative impact on the switching performance due to an increased capacitive effect on the gate.
- the inventive IGBT comprises a p well 5, which extends deeper into the drift layer 8 than the trench gate electrode 3. This will provide improved blocking performance and lower switching losses.
- the enhancement layer 6 adjoins the well 5 directly.
- the drift layer 8 may extend to the insulation layer 36 in an area between the well 5 and the enhancement layer 6.
- the drift layer 8 extends to the surface of the wafer so that the enhancement layer 6 and the well 5 are separated from each other by the drift layer 8. On state losses may be reduced by such an arrangement.
- the second insulating layer 36 and the electrically conductive layer 32 are used as a mask for the creation of the base layer 4 and the enhancement layer 6.
- the inventive semiconductor devices can comprise a gate electrode design with a different numbers of trench gate electrodes 3 than electrically conductive layers 32.
- the inventive semiconductor devices can comprise a gate electrode design with a different numbers of trench gate electrodes 3 than electrically conductive layers 32.
- more than one p wells 5 are arranged between the active trenches, wherein the wells 5 may be arranged below a common electrically conductive layer or the wells 5 may be arranged below separate electrically conductive layers 32, wherein the layers 32 are separated by the third insulating layer 38. Between two wells 5, the structure with the base layer 4 surrounded by the enhancement layer 6 may be repeated.
- the inventive IGBT 1 comprises a p doped bar having a higher doping concentration than the base layer 4.
- the bar is arranged at the emitter side 1 1 in a plane perpendicular to the perspective shown in the FIG.s 6 to 12.
- the source regions 7, 75, base layer 4 and the enhancement layer 6 terminate.
- the bar extends to the surface of the wafer.
- the bar extends in a plane parallel to the emitter side perpendicular to the direction, in which the first source regions 7 attach the trench gate electrodes 3.
- the well 5 may extend to the bar 45 or, alternatively it may be terminated such that no contact to the bar 45 is achieved.
- the enhancement layer 6 or the base layer 4 or both of these layers may be arranged between the well 5 and the bar 45.
- the connection between the well and the bar will result in a non floating well which will increase the static losses and worsen the switching performance.
- the conductivity types are switched, i.e. all layers of the first conductivity type are p type (e.g. the drift layer 8, the first and second source region 7, 75) and all layers of the second conductivity type are n type (e.g. base layer 4, well 5).
- the inventive IGBT 1 is manufactured by the following method. A lowly (n-) doped wafer having an emitter side and a collector side is provided. The wafer has a uniform, constant doping concentration. The wafer may be made on a basis of a silicon or GaN or SiC wafer. Part of the wafer having unamended low doping in the finalized insulated gated bipolar transistor 1 forms a drift layer 8.
- a mask is applied and a first p dopant is introduced for forming a well 5.
- a trench recess is introduced on the emitter side 1 1 , which is coated with a first insulating layer 34.
- the coated trench recess is then filled with an electrically conductive material like a heavily doped polysilicon or a metal like aluminum. By this step the trench gete electrode 3 is formed.
- a second insulating layer 36 which covers the well 5, is formed.
- an electrically conductive layer 32 is formed on top of this second insulating layer 36.
- This electrically conductive layer 32 may be formed of the same material as the trench gate electrode 3, but also other electrically conductive materials ban be used.
- the electrically conductive layer 32 covers the well 5 and may extend laterally (i.e. in a plane parallel to the emitter side 1 1 ) beyond the well 5 so that the well is covered by the electrically conductive layer 32, but insulated from it by the second insulation layer 36.
- the electrically conductive layer 32 may exemplarily extend outside the well 5 by 1 to 10 ⁇ , in another exemplary embodiment by 1 to 5 ⁇ or by 5 to 10 ⁇ .
- As the second insulating layer 36 insulates the electrically conductive layer 32 from the wafer, it extends laterally at least to the lateral sides of the electrically conductive layer 32 or even beyond its lateral sides.
- an enhancement layer 6 is formed by introducing an n second dopant on the emitter side 1 1 , which is diffused into the wafer using the electrically conductive layer 32 as a mask.
- a base layer 4 is formed by introducing a p third dopant on the emitter side 1 1 , using the electrically conductive layer 32 as a mask.
- the p third dopant is diffused into the wafer from the emitter side 1 1 to a lower depth, than the depth, into which the second dopant has been diffused so that the base layer 5 is embedded in the enhancement layer 6.
- the embodiments shown in the fig. 6 (enhancement layer 6 extending to the p well 5, but separating the p well 5 from the base layer 4) or in fig. 12, in which the enhancement layer 6 still separates the base layer 4 from the drift layer 8, but is separated from the p well 5 by the drift layer 8.
- the third dopant is not laterally diffused so far as to reach the p well 5.
- a collector layer 9 is then formed by introducing a p fourth dopant on the collector side 15, which is diffused into the wafer.
- the collector layer 9 may also be made at another manufacturing step.
- a buffer layer 85 is created (see fig. 8), the buffer layer 85 has to be created before the collector layer 9.
- the buffer layer 85 is exemplarily created by introducing an n dopant on the collector side 15.
- the buffer layer 85 always has higher doping concentration than the drift layer 8.
- a third insulating layer 38 is applied on top of the electrically conductive layer 32, which laterally extends to the trench gate electrode 3.
- the third insulating layer 38 is made with a recess 39 on the electrically conductive layer 32 for a contact of the electrically conductive layer 32 to the emitter electrode 2 and with a contact opening of the emitter electrode 2 to the base layer 4.
- the recess and contact opening are exemplarily made by partial removal of the third insulating layer 38 on top of the base layer and electrically conductive layer, respectively.
- a n fifth dopant is introduced using the third insulating layer 38 and the electrically conductive layer 32 as a mask for forming first source regions 7. Examplarily the fifth dopant is activated afterwards.
- the electrically conductive layer 32 may be used as a mask for introducing the n fifth dopant.
- first source regions between two trench gate electrodes 3 and second source regions 75 between a trench gate electrode 3 and a p well 5 are created.
- the third insulating layer 38 may then be applied after the creation of the source regions 7, 75.
- the third insulating layer 38 covers the second source region 75, the electrically conductive layer 32 besides the recess 39 and leaves open a contact opening between two trench gate elctrodes 3.
- An etch step is exemplarily performed in order to etch through a first source region 7 for the contact of the base layer 5 to the emitter electrode 2 (not shown in the figures; by this method the contact opening of the base layer 5 to the emitter electrode 2 is arranged in a plane below the emitter side 1 1.
- the emitter side 1 1 of the wafer shall be the most outer plane, in which layers or regions are arranged in the wafer parallel at the side, at which the emitter electrode 2 is arranged.
- source regions are created with a mask, which covers a central area between two trench gate electrodes 3 for the contact of the base layer 5 to the emitter electrode 3. Finally an emitter electrode 2 and a collector electrode 25 are made.
- the dopants can be introduced by any appropriate method like implantation or deposition. Diffusion steps can be made directly after the introducing of the corresponding dopant, but can also be perfomed at a later stage, e.g. for the base layer 4, the p well 5 being made with a diffusion step, their doping profile decreases from a maximum value steadily to the maximum diffusion depth of the dopant (which depends on the dopant sort and the diffusion conditions like diffusion time and temperature).
- the term “comprising” does not exclude other elements or steps and that the indefinite article "a” or “an” does not exclude the plural. Also elements described in association with different embodiments may be combined. It should also be noted that reference signs in the claims shall not be construed as limiting the scope of the claims.
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
- Thin Film Transistor (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014517832A JP5985624B2 (en) | 2011-07-07 | 2012-07-06 | Insulated gate transistor and method of manufacturing the same |
GB1400075.6A GB2506075B (en) | 2011-07-07 | 2012-07-06 | Insulated gate bipolar transistor |
KR1020147003224A KR101840903B1 (en) | 2011-07-07 | 2012-07-06 | Insulated gate bipolar transistor |
DE112012002823.6T DE112012002823B4 (en) | 2011-07-07 | 2012-07-06 | Insulated-gate bipolar transistor and method of making such a bipolar transistor |
CN201280033829.0A CN103650148B (en) | 2011-07-07 | 2012-07-06 | Igbt |
US14/149,412 US9105680B2 (en) | 2011-07-07 | 2014-01-07 | Insulated gate bipolar transistor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP11173059.4 | 2011-07-07 | ||
EP11173059 | 2011-07-07 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/149,412 Continuation US9105680B2 (en) | 2011-07-07 | 2014-01-07 | Insulated gate bipolar transistor |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2013004829A1 true WO2013004829A1 (en) | 2013-01-10 |
Family
ID=44802583
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2012/063303 WO2013004829A1 (en) | 2011-07-07 | 2012-07-06 | Insulated gate bipolar transistor |
Country Status (7)
Country | Link |
---|---|
US (1) | US9105680B2 (en) |
JP (1) | JP5985624B2 (en) |
KR (1) | KR101840903B1 (en) |
CN (1) | CN103650148B (en) |
DE (1) | DE112012002823B4 (en) |
GB (1) | GB2506075B (en) |
WO (1) | WO2013004829A1 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014160720A (en) * | 2013-02-19 | 2014-09-04 | Sanken Electric Co Ltd | Semiconductor device |
JP2015153854A (en) * | 2014-02-13 | 2015-08-24 | 住友電気工業株式会社 | silicon carbide semiconductor device |
JP2016048734A (en) * | 2014-08-27 | 2016-04-07 | 富士電機株式会社 | Semiconductor device |
EP3471147A1 (en) | 2017-10-10 | 2019-04-17 | ABB Schweiz AG | Insulated gate bipolar transistor |
GB2602663A (en) * | 2021-01-11 | 2022-07-13 | Mqsemi Ag | Semiconductor device |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5985624B2 (en) * | 2011-07-07 | 2016-09-06 | アーベーベー・テヒノロギー・アーゲー | Insulated gate transistor and method of manufacturing the same |
KR101933244B1 (en) * | 2011-07-14 | 2018-12-27 | 에이비비 슈바이쯔 아게 | Insulated gate bipolar transistor |
CN103943673B (en) * | 2014-05-04 | 2017-02-01 | 常州中明半导体技术有限公司 | Trench bipolar transistor provided with non-continuous trench |
US20170309704A1 (en) * | 2015-01-14 | 2017-10-26 | Mitsubishi Electric Corporation | Semiconductor device and manufacturing method therefor |
EP3251153B1 (en) * | 2015-01-27 | 2018-06-20 | ABB Schweiz AG | Insulated gate power semiconductor device and method for manufacturing such a device |
JP6729999B2 (en) * | 2015-02-16 | 2020-07-29 | 富士電機株式会社 | Semiconductor device |
KR101748141B1 (en) | 2015-02-17 | 2017-06-19 | 전남대학교산학협력단 | Insulated gate bipolar transistor |
JP5925928B1 (en) * | 2015-02-26 | 2016-05-25 | 日本航空電子工業株式会社 | Electrical connection structure and electrical connection member |
CN105047706B (en) * | 2015-08-28 | 2019-02-05 | 国网智能电网研究院 | A kind of low on-state loss IGBT and its manufacturing method |
US10367085B2 (en) | 2015-08-31 | 2019-07-30 | Littelfuse, Inc. | IGBT with waved floating P-Well electron injection |
US9780202B2 (en) * | 2015-08-31 | 2017-10-03 | Ixys Corporation | Trench IGBT with waved floating P-well electron injection |
CN109768080B (en) * | 2019-01-23 | 2021-03-30 | 电子科技大学 | IGBT device with MOS control hole access |
GB2592927B (en) * | 2020-03-10 | 2024-06-12 | Mqsemi Ag | Semiconductor device with fortifying layer |
US11610987B2 (en) * | 2021-05-18 | 2023-03-21 | Pakal Technologies, Inc | NPNP layered MOS-gated trench device having lowered operating voltage |
US20230021169A1 (en) * | 2021-07-13 | 2023-01-19 | Analog Power Conversion LLC | Semiconductor device with deep trench and manufacturing process thereof |
US11935923B2 (en) | 2021-08-24 | 2024-03-19 | Globalfoundries U.S. Inc. | Lateral bipolar transistor with gated collector |
US11935928B2 (en) | 2022-02-23 | 2024-03-19 | Globalfoundries U.S. Inc. | Bipolar transistor with self-aligned asymmetric spacer |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1032047A2 (en) * | 1999-02-17 | 2000-08-30 | Hitachi, Ltd. | Semiconductor device and power converter using the same |
US20070108468A1 (en) * | 2005-11-14 | 2007-05-17 | Mitsubishi Electric Corporation | Semiconductor device and method of manufacturing the same |
EP1895595A2 (en) * | 1996-10-18 | 2008-03-05 | Hitachi, Ltd. | Semiconductor device and electric power conversion apparatus therewith |
WO2010109596A1 (en) * | 2009-03-24 | 2010-09-30 | トヨタ自動車株式会社 | Semiconductor device |
JP2011040586A (en) | 2009-08-12 | 2011-02-24 | Hitachi Ltd | Trench gate type semiconductor device |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5679966A (en) * | 1995-10-05 | 1997-10-21 | North Carolina State University | Depleted base transistor with high forward voltage blocking capability |
JP4310017B2 (en) * | 1999-02-17 | 2009-08-05 | 株式会社日立製作所 | Semiconductor device and power conversion device |
JP4799829B2 (en) * | 2003-08-27 | 2011-10-26 | 三菱電機株式会社 | Insulated gate transistor and inverter circuit |
US20070063269A1 (en) * | 2005-09-20 | 2007-03-22 | International Rectifier Corp. | Trench IGBT with increased short circuit capability |
JP5235443B2 (en) * | 2008-02-13 | 2013-07-10 | 株式会社日立製作所 | Trench gate type semiconductor device |
JP4688901B2 (en) * | 2008-05-13 | 2011-05-25 | 三菱電機株式会社 | Semiconductor device |
JP4644730B2 (en) * | 2008-08-12 | 2011-03-02 | 株式会社日立製作所 | Semiconductor device and power conversion device using the same |
JP5963385B2 (en) * | 2008-11-26 | 2016-08-03 | 富士電機株式会社 | Semiconductor device |
TWI404205B (en) * | 2009-10-06 | 2013-08-01 | Anpec Electronics Corp | Igbt with fast reverse recovery time rectifier and manufacturing method thereof |
JP5452195B2 (en) * | 2009-12-03 | 2014-03-26 | 株式会社 日立パワーデバイス | Semiconductor device and power conversion device using the same |
JP5492225B2 (en) * | 2010-01-04 | 2014-05-14 | 株式会社日立製作所 | Semiconductor device and power conversion device using the same |
JP5694505B2 (en) * | 2010-03-23 | 2015-04-01 | アーベーベー・テヒノロギー・アーゲー | Power semiconductor devices |
JP5985624B2 (en) * | 2011-07-07 | 2016-09-06 | アーベーベー・テヒノロギー・アーゲー | Insulated gate transistor and method of manufacturing the same |
KR101933244B1 (en) * | 2011-07-14 | 2018-12-27 | 에이비비 슈바이쯔 아게 | Insulated gate bipolar transistor |
CN104145342B (en) * | 2012-03-16 | 2017-05-24 | 富士电机株式会社 | Semiconductor device |
CN104221152B (en) * | 2012-07-18 | 2017-10-10 | 富士电机株式会社 | The manufacture method of semiconductor device and semiconductor device |
-
2012
- 2012-07-06 JP JP2014517832A patent/JP5985624B2/en active Active
- 2012-07-06 KR KR1020147003224A patent/KR101840903B1/en active IP Right Grant
- 2012-07-06 CN CN201280033829.0A patent/CN103650148B/en active Active
- 2012-07-06 GB GB1400075.6A patent/GB2506075B/en active Active
- 2012-07-06 WO PCT/EP2012/063303 patent/WO2013004829A1/en active Application Filing
- 2012-07-06 DE DE112012002823.6T patent/DE112012002823B4/en active Active
-
2014
- 2014-01-07 US US14/149,412 patent/US9105680B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1895595A2 (en) * | 1996-10-18 | 2008-03-05 | Hitachi, Ltd. | Semiconductor device and electric power conversion apparatus therewith |
EP1032047A2 (en) * | 1999-02-17 | 2000-08-30 | Hitachi, Ltd. | Semiconductor device and power converter using the same |
US20070108468A1 (en) * | 2005-11-14 | 2007-05-17 | Mitsubishi Electric Corporation | Semiconductor device and method of manufacturing the same |
WO2010109596A1 (en) * | 2009-03-24 | 2010-09-30 | トヨタ自動車株式会社 | Semiconductor device |
JP2011040586A (en) | 2009-08-12 | 2011-02-24 | Hitachi Ltd | Trench gate type semiconductor device |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014160720A (en) * | 2013-02-19 | 2014-09-04 | Sanken Electric Co Ltd | Semiconductor device |
JP2015153854A (en) * | 2014-02-13 | 2015-08-24 | 住友電気工業株式会社 | silicon carbide semiconductor device |
JP2016048734A (en) * | 2014-08-27 | 2016-04-07 | 富士電機株式会社 | Semiconductor device |
EP3471147A1 (en) | 2017-10-10 | 2019-04-17 | ABB Schweiz AG | Insulated gate bipolar transistor |
US10629714B2 (en) | 2017-10-10 | 2020-04-21 | Abb Schweiz Ag | Insulated gate bipolar transistor |
GB2602663A (en) * | 2021-01-11 | 2022-07-13 | Mqsemi Ag | Semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
CN103650148B (en) | 2016-06-01 |
KR20140046018A (en) | 2014-04-17 |
US20140124829A1 (en) | 2014-05-08 |
DE112012002823T5 (en) | 2014-08-21 |
JP2014523122A (en) | 2014-09-08 |
JP5985624B2 (en) | 2016-09-06 |
CN103650148A (en) | 2014-03-19 |
KR101840903B1 (en) | 2018-03-21 |
GB201400075D0 (en) | 2014-02-19 |
GB2506075B (en) | 2015-09-23 |
GB2506075A (en) | 2014-03-19 |
US9105680B2 (en) | 2015-08-11 |
DE112012002823B4 (en) | 2017-09-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9105680B2 (en) | Insulated gate bipolar transistor | |
EP2732471B1 (en) | Insulated gate bipolar transistor and method of production thereof | |
US8294235B2 (en) | Edge termination with improved breakdown voltage | |
US8872264B2 (en) | Semiconductor device having a floating semiconductor zone | |
US10629714B2 (en) | Insulated gate bipolar transistor | |
US7999343B2 (en) | Semiconductor component with a space-saving edge termination, and method for production of such component | |
JP5865618B2 (en) | Semiconductor device | |
US11075285B2 (en) | Insulated gate power semiconductor device and method for manufacturing such a device | |
JP2011204711A (en) | Semiconductor device and method of manufacturing the same | |
CN113690301B (en) | Semiconductor device and method for manufacturing the same | |
KR20230017755A (en) | Vertical insulated gate power switch with isolated base contact regions |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 12732679 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 1400075 Country of ref document: GB Kind code of ref document: A Free format text: PCT FILING DATE = 20120706 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1400075.6 Country of ref document: GB |
|
ENP | Entry into the national phase |
Ref document number: 2014517832 Country of ref document: JP Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1120120028236 Country of ref document: DE Ref document number: 112012002823 Country of ref document: DE |
|
ENP | Entry into the national phase |
Ref document number: 20147003224 Country of ref document: KR Kind code of ref document: A |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 12732679 Country of ref document: EP Kind code of ref document: A1 |