WO2012175079A3 - Verfahren zur herstellung durchkontaktierter solarzellen - Google Patents

Verfahren zur herstellung durchkontaktierter solarzellen Download PDF

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Publication number
WO2012175079A3
WO2012175079A3 PCT/DE2012/100185 DE2012100185W WO2012175079A3 WO 2012175079 A3 WO2012175079 A3 WO 2012175079A3 DE 2012100185 W DE2012100185 W DE 2012100185W WO 2012175079 A3 WO2012175079 A3 WO 2012175079A3
Authority
WO
WIPO (PCT)
Prior art keywords
solar cell
cell substrate
emitter
dopant
produce
Prior art date
Application number
PCT/DE2012/100185
Other languages
English (en)
French (fr)
Other versions
WO2012175079A2 (de
Inventor
Franck Delahaye
Original Assignee
Rena Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rena Gmbh filed Critical Rena Gmbh
Publication of WO2012175079A2 publication Critical patent/WO2012175079A2/de
Publication of WO2012175079A3 publication Critical patent/WO2012175079A3/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
    • H01L31/02245—Electrode arrangements specially adapted for back-contact solar cells for metallisation wrap-through [MWT] type solar cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Energy (AREA)
  • Sustainable Development (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)

Abstract

Verfahren zur Herstellung einer durchkontaktierten Solarzelle (70) aufweisend Verfahrensschritte des Einbringens (10; 30) von Kontaktlöchern (54) in ein Solarzellensubstrat (52), des Eindiffundierens (14) von Dotierstoff in das Solarzellensubstrat (52) zum Zwecke des Ausbildens eines Emitters (82) auf einer Vorderseite des Solarzellensubstrats (52) und des Aufbringens (18) einer dielektrischen Beschichtung (88) auf eine Rückseite des Solarzellensubstrats (52) zum Zwecke der Passivierung dieser Rückseite, bei welchem bei dem Eindiffundieren (14) von Dotierstoff in das Solarzellensubstrat (52) zum Zwecke des Ausbildens eines Emitters (82) auf der Vorderseite des Solarzellensubstrats (52) auf zumindest einem Teil der Rückseite des Solarzellensubstrats (52) Dotierstoff in das Solarzellensubstrat (52) eindiffundiert wird (14) und in dieser Weise der Emitter zum Teil auf der Rückseite des Solarzellensubstrats (52) ausgebildet wird (14) und bei welchem der Emitter von der Rückseite des Solarzellensubstrats (52) vollständig entfernt wird (16), bevor die dielektrische Beschichtung (88) auf die Rückseite aufgebracht wird (18), sowie das Eindiffundieren (14) von Dotierstoff in das Solarzellensubstrat (52) zum Zwecke des Ausbildens des Emitters (82) in einem einzigen Diffusionsschritt erfolgt.
PCT/DE2012/100185 2011-06-24 2012-06-22 Verfahren zur herstellung durchkontaktierter solarzellen WO2012175079A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011051307.8 2011-06-24
DE102011051307A DE102011051307A1 (de) 2011-06-24 2011-06-24 Verfahren zur Herstellung durchkontaktierter Solarzellen

Publications (2)

Publication Number Publication Date
WO2012175079A2 WO2012175079A2 (de) 2012-12-27
WO2012175079A3 true WO2012175079A3 (de) 2013-05-30

Family

ID=46548167

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2012/100185 WO2012175079A2 (de) 2011-06-24 2012-06-22 Verfahren zur herstellung durchkontaktierter solarzellen

Country Status (3)

Country Link
DE (1) DE102011051307A1 (de)
TW (1) TW201316541A (de)
WO (1) WO2012175079A2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI648863B (zh) * 2017-05-05 2019-01-21 長生太陽能股份有限公司 太陽能電池及其製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100243040A1 (en) * 2009-03-25 2010-09-30 Jong-Hwan Kim Solar cell and fabrication method thereof
US20110036398A1 (en) * 2009-08-12 2011-02-17 Solarworld Innovations Gmbh Method for manufacturing a semiconductor component

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009088406A (ja) * 2007-10-02 2009-04-23 Sanyo Electric Co Ltd 太陽電池及びその製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100243040A1 (en) * 2009-03-25 2010-09-30 Jong-Hwan Kim Solar cell and fabrication method thereof
US20110036398A1 (en) * 2009-08-12 2011-02-17 Solarworld Innovations Gmbh Method for manufacturing a semiconductor component

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
BENJAMIN THAIDIGSMANN ET AL: "HIP-MWT: A simplified structure for metal wrap through solar cells with passivated rear surface", ENERGY PROCEDIA, vol. 8, 20 April 2011 (2011-04-20), pages 498 - 502, XP028263114, ISSN: 1876-6102, [retrieved on 20110812], DOI: 10.1016/J.EGYPRO.2011.06.172 *

Also Published As

Publication number Publication date
DE102011051307A1 (de) 2012-12-27
WO2012175079A2 (de) 2012-12-27
TW201316541A (zh) 2013-04-16

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