WO2012174768A1 - Method and apparatus for micro-nano particle implanting with laser shockwave induction - Google Patents

Method and apparatus for micro-nano particle implanting with laser shockwave induction Download PDF

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WO2012174768A1
WO2012174768A1 PCT/CN2011/077738 CN2011077738W WO2012174768A1 WO 2012174768 A1 WO2012174768 A1 WO 2012174768A1 CN 2011077738 W CN2011077738 W CN 2011077738W WO 2012174768 A1 WO2012174768 A1 WO 2012174768A1
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micro
tube
laser
nanoparticles
raphael
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PCT/CN2011/077738
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French (fr)
Chinese (zh)
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张永康
李应红
戴峰泽
任旭东
汪诚
楚维
何卫峰
周鑫
阮亮
皇甫喁卓
张田
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江苏大学
中国人民解放军空军工程大学
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/02—Coating starting from inorganic powder by application of pressure only
    • C23C24/04—Impact or kinetic deposition of particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/14—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas designed for spraying particulate materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/144—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing particles, e.g. powder
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles
    • B23K26/1464—Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476—Features inside the nozzle for feeding the fluid stream through the nozzle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/16—Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/34—Laser welding for purposes other than joining
    • B23K26/342—Build-up welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment

Definitions

  • the invention relates to a method and a device for surface modification of a metal material, in particular to a method and a device for implanting micro-nano particles based on laser shock wave, It is especially suitable for occasional surface strengthening on complex workpiece surfaces.
  • Micro-nanoparticle reinforced metal composites have a series of features that can greatly improve the friction and wear properties, and generate micro-nanoparticle reinforced composites in situ on the metal surface.
  • Materials have always been hotspots in materials science research. Commonly used methods include friction stir welding and laser cladding. These methods involve high-temperature melting processes, which cause defects such as pores and cracks on the metal surface, or cause the original surface state. Variety. Therefore, the development of a new type of metal surface in-situ particle-reinforced composites has important significance and broad application prospects.
  • the principle is that the high repetition rate high-energy ultrashort pulse laser interacts with the micro-nano particles sprayed by the dusting system, causing the micro-nano particles to break down to form a plasma, and the plasma explosion forms a shock wave (the plasma can generate several internals) GPa
  • the pressure wave pushes a part of the micro-nano particles to move at a high speed along the axis of the Lafar tube.
  • the subsequent high-repetition frequency pulsed laser continuously irradiates the micro-nanoparticle flow. Due to the Rafael effect, the shock wave generated in the Lafar tube The micro-nano particles moving forward are constantly accelerating, and finally hit the surface of the metal to be treated at a very high speed, so that the metal surface material is sputtered, and the micro-nano particles are implanted into the surface of the metal to be treated.
  • the high-repetition high-energy ultrashort pulse laser can be focused to break down the working medium, and the repetition frequency can reach several tens of hertz.
  • the Raphael tube has an axis in a horizontal position to prevent the micro-nano particles from scattering from the nozzle; the tube wall has a small roughness to facilitate the acceleration of the micro-nano particles along the tube wall; the Raphael tube is installed at a larger diameter end There is an optical glass seal for transmitting the laser beam so that the micro-nano particles are not scattered in the environment; the Raphael tube wall is equipped with a nozzle, and the nozzle sprays compressed air to protect the optical glass from micro-nano particles.
  • the Rafael tube wall is provided with a local depression feature, so that the unsprayed micro-nanoparticles are concentrated at the bottom of the local depression feature; the smaller diameter end of the Raphael tube is open and points to the surface of the metal to be treated, and the tube wall is installed.
  • a dusting system is installed at the wall of the powder recovery system (7)
  • the powder recovery system is installed at the bottom of the partial concave feature to facilitate recovery of the unsprayed micro-nanoparticles; the powder recovery system also provides a certain negative pressure to the inside of the Lafar tube, so that the micro-nano particles with insufficient initial velocity are under negative pressure. It is recovered under the action, and the micro-nano particles with sufficient speed move in the axial direction.
  • the dusting system is installed on the wall of the powder recovery system for spraying micro-nano particles.
  • the micro-nano particles include hard particles such as tungsten carbide, silicon carbide, and aluminum oxide, and the scale thereof is 1 to 100 nm or 0.1 to 100 ⁇ m.
  • the shock wave energy generated by the laser plasma is extremely high, which can push the micro-nano particles to move at a very high speed.
  • micro-nano particles with insufficient speed have a certain screening effect, so that the micro-nano particles with sufficient kinetic energy can strike the metal surface to be treated.
  • Micro-nanoparticle implantation can be performed on any surface of a complex workpiece surface.
  • FIG. 1 is a schematic view showing the structure of a laser shock wave-induced micro-nanoparticle implanting device according to the present invention
  • FIG. 2 is a plan view of FIG.
  • the Lafar tube 4 is in a transverse state; the nozzle 9 ejects compressed air; the dusting system 5 ejects the micro-nanoparticles 6, and the powder recovery system 7 is at the partially recessed feature 41 of the Lafarne tube 4.
  • the unsprayed micro-nanoparticles 6 are recovered; the laser 1 emits a high repetition rate high-energy ultrashort pulse laser, which is focused by the focusing lens 2, passes through the optical glass 3, and interacts with the micro-nanoparticle stream 6 to cause the micro-nanoparticles 6 to strike Wearing, generating a plasma shock wave (the pressure inside the plasma can generate several GPa), the shock wave pushes a part of the micro-nanoparticle 6 to move at a high speed along the Raphael tube 4, and the subsequent pulsed laser acts on the micro-nanoparticle 6 to generate a pulsed laser shock wave.
  • a plasma shock wave the pressure inside the plasma can generate several GPa
  • the front micro-nanoparticles 6 are continuously pushed forward, and under the action of the Rafael effect, the front micro-nanoparticles 6 are continuously accelerated, and finally the surface of the metal to be treated 8 is struck at a very high speed, and the material of the metal surface 8 to be treated is splashed.
  • the micro-nanoparticles 6 are implanted on the surface of the metal 8 to be treated to form a micro-nanoparticle surface strengthening layer.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Powder Metallurgy (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
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Abstract

An apparatus for micro-nano particle implanting with laser shockwave induction comprises a laser (1), a focusing lens (2), a piece of optical glass (3), a Laval tube (4), a powder spraying system (5), a powder recycle system (7), and a nozzle (9). The laser (1) is aligned with the focusing lens (2). The optical glass (3) is mounted on the Laval tube (4) and the focal point thereof is located at the end with the larger diameter in the tube. The end with the smaller diameter of the Laval tube (4) is opened. The tube wall at the end with the larger diameter of the Laval tube (4) is provided with a local recession (41), and the powder recycle system (7) is mounted at the bottom of the local recession. The powder spraying system (5) is mounted opposite to the tube wall of the powder recycle system (7). The nozzle (9) is mounted at a 90-degree position of the tube wall, and the nozzle (9) points to the optical glass (3).

Description

一种激光冲击波诱导的微纳米颗粒植入的方法和装置  Method and device for implanting micro-nanoparticles induced by laser shock wave 技术领域Technical field
本发明涉及一种金属材料表面改性的方法和装置，特指一种基于激光冲击波的微纳米颗粒植入的方法和装置, 特别适用于在复杂工件表面局部进行表面强化的场合。 The invention relates to a method and a device for surface modification of a metal material, in particular to a method and a device for implanting micro-nano particles based on laser shock wave, It is especially suitable for occasional surface strengthening on complex workpiece surfaces.
背景技术Background technique
金属的表面性能对于结构件的硬度、耐磨和耐腐蚀性能至关重要，微纳米颗粒增强金属复合材料具有一系列有点，可以大大提高摩擦磨损性能，在金属表面原位生成微纳米颗粒增强复合材料一直以来都是材料科学研究热点，常用的方法主要有搅拌摩擦焊和激光熔覆等，这些方法都涉及高温融化过程，会对金属表面造成气孔、裂纹等缺陷，或者造成原有表面状态的变化。因此，发展一种新型的金属表面原位生成颗粒增强复合材料的方法具有重要意义和广阔的应用前景。The surface properties of metals are critical to the hardness, wear resistance and corrosion resistance of structural members. Micro-nanoparticle reinforced metal composites have a series of features that can greatly improve the friction and wear properties, and generate micro-nanoparticle reinforced composites in situ on the metal surface. Materials have always been hotspots in materials science research. Commonly used methods include friction stir welding and laser cladding. These methods involve high-temperature melting processes, which cause defects such as pores and cracks on the metal surface, or cause the original surface state. Variety. Therefore, the development of a new type of metal surface in-situ particle-reinforced composites has important significance and broad application prospects.
技术问题technical problem
本发明的目的在于提供一种激光冲击波诱导的微纳米颗粒植入的方法和装置，实施本发明的装置包括激光器、聚焦透镜、拉法尔加速管、喷粉系统、粉末回收系统和待处理金属，其原理是：高重复频率高能量超短脉冲激光与喷粉系统喷出的微纳米颗粒相互作用，使微纳米颗粒击穿形成等离子体，等离子体爆炸形成冲击波（等离子体内部可产生数个 GPa 的压强），冲击波推动部分微纳米颗粒沿拉法尔管轴线方向高速运动，后续的高重复频率脉冲激光不断辐照微纳米颗粒流，由于拉法尔效应，其产生的冲击波在拉法尔管中对前方运动的微纳米粒子不断加速，最后以极高的速度撞击待处理金属表面，使金属表面材料溅射，使微纳米颗粒植入待处理金属表面。 It is an object of the present invention to provide a method and apparatus for laser shock wave induced micro-nanoparticle implantation, the apparatus embodying the invention comprising a laser, a focusing lens, a Rafael accelerating tube, a dusting system, a powder recovery system, and a metal to be treated The principle is that the high repetition rate high-energy ultrashort pulse laser interacts with the micro-nano particles sprayed by the dusting system, causing the micro-nano particles to break down to form a plasma, and the plasma explosion forms a shock wave (the plasma can generate several internals) GPa The pressure wave pushes a part of the micro-nano particles to move at a high speed along the axis of the Lafar tube. The subsequent high-repetition frequency pulsed laser continuously irradiates the micro-nanoparticle flow. Due to the Rafael effect, the shock wave generated in the Lafar tube The micro-nano particles moving forward are constantly accelerating, and finally hit the surface of the metal to be treated at a very high speed, so that the metal surface material is sputtered, and the micro-nano particles are implanted into the surface of the metal to be treated.
技术解决方案Technical solution
所述的高重复高能量超短脉冲激光器，其聚焦后能使工作介质击穿，重复频率能达到数十赫兹。The high-repetition high-energy ultrashort pulse laser can be focused to break down the working medium, and the repetition frequency can reach several tens of hertz.
所述的拉法尔管，其轴线处于水平位置，防止微纳米颗粒从管口散落；管壁具有较小粗糙度，以利于微纳米颗粒沿管壁加速；拉法尔管较大直径端安装有光学玻璃密封，用来透过激光束，使微纳米颗粒不会在散落在环境中；拉法尔管管壁安装有喷嘴，喷嘴喷出压缩空气，用来保护光学玻璃不受微纳米颗粒的污染；拉法尔管管壁开设有局部凹陷特征，使未喷出的微纳米颗粒集中于局部凹陷特征底部；拉法尔管较小直径端开放，并指向待处理金属表面，其管壁安装有喷粉系统和粉末回收系统。正对于粉末回收系统（7）的管壁处安装有喷粉系统The Raphael tube has an axis in a horizontal position to prevent the micro-nano particles from scattering from the nozzle; the tube wall has a small roughness to facilitate the acceleration of the micro-nano particles along the tube wall; the Raphael tube is installed at a larger diameter end There is an optical glass seal for transmitting the laser beam so that the micro-nano particles are not scattered in the environment; the Raphael tube wall is equipped with a nozzle, and the nozzle sprays compressed air to protect the optical glass from micro-nano particles. Contamination; the Rafael tube wall is provided with a local depression feature, so that the unsprayed micro-nanoparticles are concentrated at the bottom of the local depression feature; the smaller diameter end of the Raphael tube is open and points to the surface of the metal to be treated, and the tube wall is installed. There is a dusting system and a powder recycling system. A dusting system is installed at the wall of the powder recovery system (7)
所述的粉末回收系统，安装于局部凹陷特征底部，利于回收未喷出微纳米颗粒；粉末回收系统还对拉法尔管内部提供一定的负压，使初速度不够的微纳米颗粒在负压作用下被回收，而速度足够的微纳米颗粒沿轴线方向运动。The powder recovery system is installed at the bottom of the partial concave feature to facilitate recovery of the unsprayed micro-nanoparticles; the powder recovery system also provides a certain negative pressure to the inside of the Lafar tube, so that the micro-nano particles with insufficient initial velocity are under negative pressure. It is recovered under the action, and the micro-nano particles with sufficient speed move in the axial direction.
所述的喷粉系统，安装于正对粉末回收系统的管壁，用来喷出微纳米颗粒。The dusting system is installed on the wall of the powder recovery system for spraying micro-nano particles.
所述的微纳米颗粒，包括碳化钨、碳化硅、氧化铝等硬质颗粒，其尺度为1~100纳米或0.1~100微米。The micro-nano particles include hard particles such as tungsten carbide, silicon carbide, and aluminum oxide, and the scale thereof is 1 to 100 nm or 0.1 to 100 μm.
本发明的优点是：The advantages of the invention are:
1）激光等离子体产生的冲击波能量极高，能推动微纳米颗粒以很高速度运动。1) The shock wave energy generated by the laser plasma is extremely high, which can push the micro-nano particles to move at a very high speed.
2）由于拉法尔效应，管中前方运动的微纳米颗粒由后方经聚焦的冲击波不断加速，可以达到极高的速度。2) Due to the Rafael effect, the micro-nano particles moving in the front of the tube are accelerated by the focused shock wave at the rear, which can reach extremely high speed.
3）由于拉法尔管管路足够长，而沿管路方向始终有微纳米颗粒，因此，激光的利用率几乎为100%。3) Since the Lafar tube is long enough and there are always micro-nanoparticles along the pipeline, the utilization of the laser is almost 100%.
4）对速度不够的微纳米颗粒具有一定的筛选作用，从而获得动能足够的微纳米颗粒撞击待处理金属表面4) The micro-nano particles with insufficient speed have a certain screening effect, so that the micro-nano particles with sufficient kinetic energy can strike the metal surface to be treated.
5）可以对复杂工件表面任何区域进行微纳米颗粒植入。5) Micro-nanoparticle implantation can be performed on any surface of a complex workpiece surface.
附图说明DRAWINGS
下面结合附图对本发明作进一步说明：The present invention will be further described below in conjunction with the accompanying drawings:
图1为本发明激光冲击波诱导的微纳米颗粒植入装置的结构示意图，图2为图1的俯视图。1 is a schematic view showing the structure of a laser shock wave-induced micro-nanoparticle implanting device according to the present invention, and FIG. 2 is a plan view of FIG.
1-激光器2-聚焦透镜3-光学玻璃4-拉法尔管5-喷粉系统 6-微纳米颗粒7-粉末回收系统41-局部凹陷特征 8-待处理金属 9-喷嘴1-laser 2-focusing lens 3-optical glass 4-Rafal tube 5-dusting system 6-Micro-nanoparticle 7-Powder recovery system 41 - Partial depression feature 8 Metal to be treated 9-Nozzle
本发明的实施方式Embodiments of the invention
下面结合附图详细说明本发明提出的具体装置的细节和工作情况。The details and operation of the specific device proposed by the present invention will be described in detail below with reference to the accompanying drawings.
如图1所示，拉法尔管4处于横置状态；喷嘴9喷出压缩空气；喷粉系统5喷出微纳米颗粒6，粉末回收系统7在拉法尔管4的局部凹陷特征41处回收未喷出的微纳米颗粒6；激光器1发出高重复频率高能量超短脉冲激光，经聚焦透镜2聚焦，透过光学玻璃3，与微纳米颗粒流6相互作用，使微纳米颗粒6击穿，产生等离子冲击波（等离子体内部可产生数个GPa的压强），冲击波推动部分微纳米颗粒6沿拉法尔管4高速运动，后续的脉冲激光跟微纳米粒子6作用，产生脉冲激光冲击波，不断推动前方微纳米颗粒6向前运动，在拉法尔效应作用下，前方微纳米颗粒6得到不断加速，最后以极高的速度撞击待处理金属8表面，使待处理金属表面8的材料溅射，微纳米颗粒6植入到待处理金属8表面，形成微纳米颗粒表面强化层。As shown in Fig. 1, the Lafar tube 4 is in a transverse state; the nozzle 9 ejects compressed air; the dusting system 5 ejects the micro-nanoparticles 6, and the powder recovery system 7 is at the partially recessed feature 41 of the Lafarne tube 4. The unsprayed micro-nanoparticles 6 are recovered; the laser 1 emits a high repetition rate high-energy ultrashort pulse laser, which is focused by the focusing lens 2, passes through the optical glass 3, and interacts with the micro-nanoparticle stream 6 to cause the micro-nanoparticles 6 to strike Wearing, generating a plasma shock wave (the pressure inside the plasma can generate several GPa), the shock wave pushes a part of the micro-nanoparticle 6 to move at a high speed along the Raphael tube 4, and the subsequent pulsed laser acts on the micro-nanoparticle 6 to generate a pulsed laser shock wave. The front micro-nanoparticles 6 are continuously pushed forward, and under the action of the Rafael effect, the front micro-nanoparticles 6 are continuously accelerated, and finally the surface of the metal to be treated 8 is struck at a very high speed, and the material of the metal surface 8 to be treated is splashed. The micro-nanoparticles 6 are implanted on the surface of the metal 8 to be treated to form a micro-nanoparticle surface strengthening layer.

Claims (6)

  1. 一种激光冲击波诱导的微纳米颗粒植入的方法和装置，其特征为：包括激光器（1）、聚焦透镜（2）、光学玻璃（3）、拉法尔管（4）、喷粉系统（5）、微纳米颗粒（6）、粉末回收系统（7）、待处理金属（8）及喷嘴（9）；激光器（1）对准聚焦透镜（2）；光学玻璃（3）安装于拉法尔管，其焦点位于拉法尔管（4）内，（4）较大直径端，拉法尔管（4）较小直径端开放，并指向被处理金属（8）；拉法尔管（4）较大直径端管壁开设有局部凹陷特征（41），在局部凹陷特征底部安装有并且装有粉末回收系统（7），正对于粉末回收系统（7）的管壁处安装有喷粉系统（5），在管壁90度位置安装有喷嘴（9），喷嘴指向光学玻璃（3）；微纳米颗粒（6）从喷粉系统（5）喷出。 A laser shock wave-induced micro-nanoparticle implantation method and device, comprising: a laser (1), a focusing lens (2), an optical glass (3), a Lafar tube (4), a dusting system ( 5), micro-nanoparticles (6), powder recovery system (7), metal to be treated (8) and nozzle (9); laser (1) aligned with focusing lens (2); optical glass (3) mounted to Rafa Tube, the focus is located in the Raphael tube (4), (4) the larger diameter end, the smaller diameter end of the Raphael tube (4) is open, and points to the treated metal (8); Rafael tube ( 4) The larger diameter end pipe wall is provided with a partial recessed feature (41), which is installed at the bottom of the partially recessed feature and is equipped with a powder recovery system (7), which is installed on the wall of the powder recovery system (7). In the system (5), a nozzle (9) is mounted at a 90 degree position of the tube wall, the nozzle is directed to the optical glass (3), and the micro/nanoparticles (6) are ejected from the powder spraying system (5).
  2. 根据权利1所要求激光冲击波诱导的微纳米颗粒植入的方法和装置，其特征为：拉法尔管（4）轴线处于水平位置，防止微纳米颗粒从管口散落；拉法尔管（4）管壁具有较小粗糙度，以利于微纳米颗粒（6）沿管壁加速；拉法尔管（4）较大直径端安装有光学玻璃（3）密封，用来透过激光束，使微纳米颗粒（6）不会在散落在环境中；拉法尔管（4）管壁安装有喷嘴（9），喷嘴（9）喷出压缩空气，用来保护光学玻璃（3）不受微纳米颗粒（6）的污染；拉法尔管（4）管壁开设有局部凹陷特征（41），使未喷出的微纳米颗粒（6）集中于局部凹陷特征（41）底部；拉法尔管（4）较小直径端开放，并指向待处理金属（8）表面。A method and apparatus for laser shock wave induced micro-nanoparticle implantation according to claim 1, characterized in that the axis of the Lafar tube (4) is in a horizontal position to prevent the micro-nano particles from scattering from the nozzle; the Raphael tube (4) The wall has a small roughness to facilitate the acceleration of the micro-nanoparticles (6) along the tube wall; the larger diameter end of the Raphael tube (4) is fitted with an optical glass (3) seal for transmitting the laser beam to make the micro The nanoparticles (6) are not scattered in the environment; the nozzles (9) are installed on the wall of the Raphael tube (4), and the nozzle (9) ejects compressed air to protect the optical glass (3) from micro-nano Contamination of particles (6); the wall of the Raphael tube (4) is provided with a local depression feature (41), so that the unsprayed micro-nanoparticles (6) are concentrated at the bottom of the local depression feature (41); the Raphael tube (4) The smaller diameter end is open and points to the surface of the metal (8) to be treated.
  3. 根据权利2所要求拉法尔管（4），其特征为：拉法尔管（4）的长度足够长，在聚焦后的激光束前方始终有微纳米颗粒（6）存在，因此激光的利用率高。The Lafar tube (4) as claimed in claim 2, characterized in that the length of the Raphael tube (4) is sufficiently long, and micro-nano particles (6) are always present in front of the focused laser beam, so that the laser is utilized. The rate is high.
  4. 根据权利1所要求激光冲击波诱导的微纳米颗粒植入的方法和装置，其特征为：激光器（1）为高重复频率高能超短脉冲激光器；微纳米颗粒（5）包括碳化钨、碳化硅、氧化铝等硬质颗粒，其尺度为1~100纳米或0.1~100微米。A method and apparatus for implanting micro-nanoparticles induced by laser shock waves according to claim 1, wherein the laser (1) is a high repetition rate high-energy ultrashort pulse laser; the micro-nano particles (5) comprise tungsten carbide, silicon carbide, Hard particles such as alumina, which have a size of 1 to 100 nm or 0.1 to 100 μm.
  5. 根据权利1所要求的激光冲击波诱导的微纳米颗粒植入的方法和装置，其特征为：微纳米颗粒（6）在激光冲击波作用下，在拉法尔管（4）内由于拉法尔效应被不断加速，并高速冲向待处理金属（8）的表面，在撞击区域引起材料的溅射，使微纳米颗粒（6）焊接在工件表面，获得纳米颗粒植入强化层。A laser shock wave-induced micro-nanoparticle implantation method and apparatus as claimed in claim 1, characterized in that the micro-nanoparticles (6) are subjected to a Rafael effect in the Raphael tube (4) under the action of a laser shock wave It is continuously accelerated and rushed to the surface of the metal to be treated (8) at a high speed, causing sputtering of the material in the impact region, and welding the micro-nanoparticles (6) to the surface of the workpiece to obtain a nanoparticle-implanted strengthening layer.
  6. 根据权利1所要求激光冲击波诱导的微纳米颗粒植入的方法和装置，其特征为：粉末回收系统（7）对拉法尔管（4）内部提供一定的负压，使初速度不够的微纳米颗粒（6）在负压作用下被回收，而速度足够的微纳米颗粒沿轴线方向运动。粉末回收系统（7）安装于局部凹陷特征（41）底部，利于微纳米颗粒（6）的回收。A method and apparatus for implanting micro-nanoparticles induced by laser shock waves according to claim 1, characterized in that the powder recovery system (7) provides a certain negative pressure to the inside of the Raphael tube (4), so that the initial velocity is insufficient. The nanoparticles (6) are recovered under the action of a negative pressure, and the micro-nano particles having a sufficient speed are moved in the axial direction. The powder recovery system (7) is installed at the bottom of the partially recessed feature (41) to facilitate the recovery of the micro-nanoparticles (6).
PCT/CN2011/077738 2011-06-24 2011-07-28 Method and apparatus for micro-nano particle implanting with laser shockwave induction WO2012174768A1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110438333A (en) * 2019-09-19 2019-11-12 中国人民解放军空军工程大学 A kind of kHz low-energy laser scanning impact reinforcing method and its device
CN110904447A (en) * 2019-12-27 2020-03-24 浙江工业大学 Inner wall supersonic laser composite deposition device
CN114247992A (en) * 2021-12-14 2022-03-29 武汉大学 Laser hot stamping welding method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103264226A (en) * 2013-05-23 2013-08-28 广东工业大学 Method for implanting carbon nano tube based on laser cavitation
CN107523824A (en) * 2016-06-22 2017-12-29 中国科学院沈阳自动化研究所 It is a kind of using reiforcing laser impact technology workpiece surface prepares coating method
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CN109207910A (en) * 2018-10-25 2019-01-15 广东工业大学 A kind of method for carburizing based on laser-impact
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3756344A (en) * 1971-12-22 1973-09-04 Cornell Aeronautical Labor Inc Laser-driven shock tube
EP0549747B1 (en) * 1991-06-24 1996-08-28 Plasmainvent AG Nozzle for surface treatment of metallic workpieces
US6649866B2 (en) * 2001-05-07 2003-11-18 Jenoptik Automatisierungstechnik Gmbh Tool head for laser machining of materials
US6713716B1 (en) * 2003-05-30 2004-03-30 General Electric Company Reduced mist laser shock peening
CN101701282A (en) * 2009-10-30 2010-05-05 江苏大学 Method for strengthening complex surface based on laser shock wave technology and device thereof

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2205897C1 (en) * 2001-12-26 2003-06-10 Общество С Ограниченной Ответственностью Обнинский Центр Порошкового Напыления Coating method
DE102007001477B3 (en) * 2007-01-09 2008-01-31 Siemens Ag Cold gas spraying method for spraying the surface of a turbine blade comprises injecting particles of a first type in a first region of a stagnation chamber which lies closer to a nozzle than a second region

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3756344A (en) * 1971-12-22 1973-09-04 Cornell Aeronautical Labor Inc Laser-driven shock tube
EP0549747B1 (en) * 1991-06-24 1996-08-28 Plasmainvent AG Nozzle for surface treatment of metallic workpieces
US6649866B2 (en) * 2001-05-07 2003-11-18 Jenoptik Automatisierungstechnik Gmbh Tool head for laser machining of materials
US6713716B1 (en) * 2003-05-30 2004-03-30 General Electric Company Reduced mist laser shock peening
CN101701282A (en) * 2009-10-30 2010-05-05 江苏大学 Method for strengthening complex surface based on laser shock wave technology and device thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110438333A (en) * 2019-09-19 2019-11-12 中国人民解放军空军工程大学 A kind of kHz low-energy laser scanning impact reinforcing method and its device
CN110904447A (en) * 2019-12-27 2020-03-24 浙江工业大学 Inner wall supersonic laser composite deposition device
CN110904447B (en) * 2019-12-27 2024-03-26 浙江工业大学 Inner wall supersonic laser composite deposition device
CN114247992A (en) * 2021-12-14 2022-03-29 武汉大学 Laser hot stamping welding method

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