WO2012169665A1 - Appareil pour commander des bobines d'alignement numérique de tem pour une analyse ped et appareil pour afficher une vitesse de rotation et un angle de rotation d'un faisceau électronique - Google Patents

Appareil pour commander des bobines d'alignement numérique de tem pour une analyse ped et appareil pour afficher une vitesse de rotation et un angle de rotation d'un faisceau électronique Download PDF

Info

Publication number
WO2012169665A1
WO2012169665A1 PCT/KR2011/004130 KR2011004130W WO2012169665A1 WO 2012169665 A1 WO2012169665 A1 WO 2012169665A1 KR 2011004130 W KR2011004130 W KR 2011004130W WO 2012169665 A1 WO2012169665 A1 WO 2012169665A1
Authority
WO
WIPO (PCT)
Prior art keywords
unit
signal
current
tem
coil
Prior art date
Application number
PCT/KR2011/004130
Other languages
English (en)
Korean (ko)
Inventor
정종만
김윤중
권희석
Original Assignee
한국기초과학지원연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한국기초과학지원연구원 filed Critical 한국기초과학지원연구원
Priority to PCT/KR2011/004130 priority Critical patent/WO2012169665A1/fr
Publication of WO2012169665A1 publication Critical patent/WO2012169665A1/fr

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/15—Means for deflecting or directing discharge
    • H01J2237/1506—Tilting or rocking beam around an axis substantially at an angle to optical axis
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/15—Means for deflecting or directing discharge
    • H01J2237/152—Magnetic means

Definitions

  • the present invention is a three-dimensional structure analysis using a diffraction pattern (DP) used to analyze the internal structure of the material in three dimensions by using a transmission electron microscope (TEM), that is, the diffraction phenomenon of the electron beam Digital adjustment coil control device for PED (precession electron diffraction) analysis of TEM which enables to control the electron beam rotation speed and rotation angle digitally and display the control state, and the electron beam rotation speed and rotation angle display unit using the same It is about.
  • TEM transmission electron microscope
  • TEM is a type of electron microscope that uses an electron beam and an electron lens that perform similar functions instead of a light source and a light source lens.
  • the TEM consists of a plurality of electron lenses and cameras, such as an electron gun, a focusing lens, a sample stage, an objective lens, and an intermediate lens, and the operation process is as follows:
  • the electron beam is emitted from the electron gun, the electron beam is converged by the condenser lens and irradiated onto the sample.
  • the electron beam passing through the sample is magnified several hundred times by the objective lens to form a first image directly on the intermediate lens. Part of the first image is enlarged by the intermediate lens and the projection lens to form an image on the fluorescent plate of the camera room.
  • the focus is adjusted by adjusting the excitation current of the objective lens, and the magnification may be adjusted by adjusting the current flowing through the intermediate lens or the projection lens. Since the electron beam is formed of small electron particles and is disturbed by the gas particles, the inside of the TEM maintains a high vacuum of 10 -7 torr or less.
  • FIG. 1 exemplarily shows positions of two electron lenses and eight adjusting coils in a general TEM. Each of these sets of electronic lenses and adjustment coils is simultaneously controlled in conjunction with one signal output from the lens control unit for each pair of adjustment coils facing each other.
  • the electron beam In order to observe the specimen in the TEM, the electron beam must first be aligned so that the electron beam is focused on the specimen stage along the central axis.
  • the adjusting process is performed by interlocking and controlling the currents flowing through the pair of adjusting coils facing each other. That is, by adjusting the pair of adjustment coils facing each other by the lens control unit to adjust the electron beam to match the central axis.
  • the lens control unit receives the predetermined predetermined frequency and current to the adjustment coil, thereby ultimately rotating the rotation angle and rotation of the electron beam.
  • the speed will fluctuate.
  • the present invention is a TEM digital adjustment coil control device that facilitates repeated experiments and can be used as an objective analysis data by quantifying the control value for controlling the power supplied to the adjustment coil in the process of analyzing the PED pattern using the TEM
  • the purpose is to provide.
  • the present invention for achieving the above object is a device for PED analysis in the TEM, (A) in response to the electron beam rotation speed and rotation angle control command input through the external input unit of the current applied for driving the individual adjustment coil An operation unit for calculating the digital frequency generation signal and the current control signal for the individual adjustment coils for controlling the frequency value and the current value and outputting the calculated signal synchronization unit and the current amplifier unit, respectively; (B) a signal synchronizing unit for synchronizing the frequency generation signal for the individual adjustment coil inputted from the calculating unit to the reference frequency of the TEM and outputting the same to the current amplifier; And (C) converting the digital current control signal for the individual adjustment coil inputted from the calculating unit into an analog current control signal, and adjusting the analog current control signal according to the synchronized frequency generation signal inputted from the signal synchronization unit. It relates to a digital control coil control device of the TEM for PED analysis , including; a current amplifier for converting the drive current to apply to the corresponding individual control coil.
  • the digital adjustment coil control apparatus is connected to the conventional TEM by a circuit so that the output of the current amplification unit is applied to the individual adjustment coil to utilize for PED analysis.
  • the frequency generation signal is a signal for generating a frequency for controlling the rotational speed of the electron beam.
  • the rotation speed of the electron beam is determined according to the frequency width.
  • the current control signal is a signal for determining a current value for adjusting the incident angle to the sample by tilting the electron beam.
  • the electron beam is inclined at an angle on the optical axis and is incident by the difference in the intensity of the current applied to each of the adjustment coils.
  • the reference frequency is the basic driving frequency set for driving the TEM. Therefore, the device according to the invention must also be synchronized to the reference frequency of the TEM to be mounted.
  • the adjustment coil control apparatus may be to replace the function of the lens control unit of the existing TEM completely (controlling the replacement coil), the lens control unit is normally operated and transferred from the lens control unit to each adjustment coil.
  • the control coil may be controlled (complementary) in such a manner as to deform the control signal.
  • the alternative type and the complementary type have the same basic principle, and there is only a small difference that can be easily understood by those skilled in the art in the circuit configuration and operation method. However, the present invention does not exclude complementary forms.
  • controlling the power supplied to the control coil or controlling the control coil means controlling the current and / or frequency of the control coil power.
  • Equipped with a digital adjustment coil control device according to the present invention in the conventional TEM more precisely control the electron beam rotation speed and rotation angle of the TEM ultimately easier and faster to analyze the three-dimensional structure (PED analysis) of the material consisting of a composite structure To let them do it.
  • PED analysis three-dimensional structure
  • the control information obtained in the process of controlling the adjusting coil by the adjusting coil control device may be used as information for controlling the adjusting coil when observing the same sample or observing another sample.
  • the calculation unit in the device according to the present invention further includes a function for calculating the electron beam rotation speed and rotation angle corresponding to the output control signal (frequency generation signal and current control signal), the device includes the electron beam rotation calculated by the calculation unit It is preferable to further include a display unit for displaying the speed and the rotation angle.
  • the adjusting coil control device is preferably a computer on which a control program is installed.
  • the present invention has the effect of finely adjusting the rotational speed and the rotation angle of the electron beam by finely adjusting the power supplied to the adjustment coil by the adjustment coil control device.
  • the present invention in the DP analysis process using the TEM, it is possible to check in real time the control value of the power control signal supplied to the adjustment coil corresponding to the rotational speed and the rotation angle of the TEM electron beam currently in operation, and in the subsequent analysis process By making it available again, you can increase the efficiency and accuracy of your research.
  • FIG. 1 is a conceptual diagram showing the spatial position of the electron lens (2) and the adjustment coil (8) and the sample in the conventional TEM
  • FIG. 2 is a conceptual diagram showing that the control coil pair facing each other in the conventional TEM is controlled in conjunction with,
  • FIG. 3 is a conceptual diagram showing PED analysis in TEM
  • FIG. 4 is a conceptual configuration diagram of an example of an apparatus according to the present invention.
  • FIG. 5 is a wiring diagram of an example of an apparatus according to the present invention.
  • the rotational speed and the rotation angle of the electron beam In order to analyze the three-dimensional structure of the material using TEM, the rotational speed and the rotation angle of the electron beam must be controlled.
  • the rotation angle of the electron beam changes according to the current of the power supplied to the adjustment coil, and the rotation speed changes according to the frequency of the power supplied to the adjustment coil. Therefore, for efficient three-dimensional structural analysis, the frequency of the power supplied to the individual adjustment coil All currents must be controlled.
  • the present invention more precisely controls the frequency and current of the power supplied to the adjustment coil installed in the lens of the TEM to adjust the frequency and current of the power supplied to the individual adjustment coil so that the rotation speed and the rotation angle of the electron beam can be precisely adjusted.
  • the adjusting coil control apparatus 100 for controlling essentially includes an operation unit 1, a signal synchronization unit 2, and a current amplifier 3. 4 illustrates a configuration in which a conceptual coil control apparatus according to the present invention is connected to a TEM in a circuit.
  • the calculation unit 1 controls the frequency value and current value of the current applied for driving the individual adjustment coil in response to the electron beam rotation speed and rotation angle control command input through the external input unit, and the digital frequency for the individual adjustment coil. It calculates the generated signal and the current control signal and serves to output to the signal synchronization unit and the current amplifier, respectively.
  • the external input unit that receives a control command from an external (user) may be included in the apparatus according to the present invention or may be an external input unit of a TEM to be mounted. In the former case, the external input unit may be a conventional computer having an input / output device or a control device having a control knob of a variable resistance type.
  • the signal synchronization unit 2 functions to synchronize the frequency generation signal for the individual adjustment coil inputted from the calculation unit to the reference frequency of the TEM and output the same to the current amplifier.
  • the reference frequency may be automatically recognized the reference frequency of the TEM to be mounted, or may be input separately to the reference frequency information of the TEM to be mounted.
  • the current amplifier 3 converts the digital current control signal for the individual adjustment coil input from the calculator into an analog current control signal, and controls the analog current according to the synchronized frequency generation signal input from the signal synchronization unit.
  • the signal is converted into a current capable of driving the adjusting coil and applied to the corresponding individual adjusting coil.
  • the current control signal output from the calculator 1 is a digital signal, it can be converted into an analog signal by using the D / A converter 11 so that the current amplifier 3 can be subsequently connected.
  • the A converter 11 may be physically independent of the current amplifier 3 and may be encompassed as an internal function of the current amplifier 3.
  • the rotation angle and rotation speed of the electron beam change correspondingly.
  • the user cannot confirm the correspondence between the input control command and the rotation angle of the electron beam and the rotational speed change amount. Therefore, the user controls the electron beam by repeatedly inputting a control command several times after inputting an arbitrary control command. There is a problem that takes a lot of time and effort to control the electron beam.
  • the calculation unit 1 further includes a function of calculating an electron beam rotation speed and a rotation angle corresponding to the output control signal (frequency generation signal and current control signal), and the electron beam rotation speed calculated by the calculation unit. And a display portion 4 for displaying the rotation angle.
  • the display unit 4 may use a monitor provided in a computer which is one of the external input units described above.
  • a method of detecting a control signal for adjusting the rotation speed and the rotation angle of the electron beam may vary depending on the configuration of the adjustment coil control device 100.
  • a detection terminal 31 is installed at a control signal output terminal output from the adjustment coil control device to detect a control signal.
  • the control signal detected by the sensing terminal 31 is an analog signal, the control signal is converted into a digital signal using the A / D converter 12 and transmitted to the operation unit.
  • the control signal is generated by the calculation unit 1, and thus the control signal is directly calculated at the electron beam rotation speed and rotation angle. Just do it.
  • the electron beam rotation speed and the rotation angle calculated by the calculation unit are preferably stored in a predetermined memory device to be used as reference information when controlling the electron beam for a new sample analysis.
  • control coil control device 100 is not only complicated system when manufactured by the analog circuit as shown in Figure 5 but also to change the circuit to apply to other TEM. Therefore, the adjustment coil control apparatus according to the present invention may be a computer, and the functions of the operation unit, the signal synchronization unit, and the current amplifier unit may be mounted in a program form.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

La présente invention concerne un appareil pour une analyse PED à partir d'un TEM, pour commander la vitesse de rotation et l'angle de rotation d'un faisceau électronique pour une analyse structurale tridimensionnelle à l'aide d'une diffraction du faisceau électronique, et pour afficher la quantité de commande de façon à être confirmée par un utilisateur. La présente invention concerne l'appareil pour commander des bobines d'alignement numérique du TEM pour l'analyse PED : A) une unité de calcul pour calculer un signal de génération de fréquence numérique et un signal de commande de courant pour chaque bobine d'alignement individuelle, qui commande une valeur de fréquence d'un courant et une valeur de courant qui est appliquée pour actionner les bobines d'alignement individuelles, en correspondance avec la vitesse de rotation et la rotation du faisceau électronique, qui est entrée par l'intermédiaire d'une unité d'entrée externe, et pour transmettre le signal de génération de fréquence numérique et le signal de commande de courant à une unité de synchronisation de signal et à une unité d'amplification de courant, respectivement ; B) l'unité de synchronisation de signal pour synchroniser le signal de génération de fréquence, par rapport à chacune des bobines d'alignement qui est entrée à partir de l'unité de calcul, avec une fréquence de référence du TEM, et émettre celui-ci à l'unité d'amplification de courant ; et C) l'unité d'amplification de courant pour convertir les signaux de commande de courant numériques par rapport à chacune des bobines d'alignement, qui sont entrées à partir de la partie de calcul, en des signaux de commande de courant analogiques, et pour convertir les signaux de commande de courant analogiques en courant pour actionner la bobine d'alignement, conformément au signal de génération de fréquence synchronisé qui est entré à partir de l'unité de synchronisation de signal, et appliquer le courant à chacune des bobines d'alignement correspondantes.
PCT/KR2011/004130 2011-06-07 2011-06-07 Appareil pour commander des bobines d'alignement numérique de tem pour une analyse ped et appareil pour afficher une vitesse de rotation et un angle de rotation d'un faisceau électronique WO2012169665A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/KR2011/004130 WO2012169665A1 (fr) 2011-06-07 2011-06-07 Appareil pour commander des bobines d'alignement numérique de tem pour une analyse ped et appareil pour afficher une vitesse de rotation et un angle de rotation d'un faisceau électronique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2011/004130 WO2012169665A1 (fr) 2011-06-07 2011-06-07 Appareil pour commander des bobines d'alignement numérique de tem pour une analyse ped et appareil pour afficher une vitesse de rotation et un angle de rotation d'un faisceau électronique

Publications (1)

Publication Number Publication Date
WO2012169665A1 true WO2012169665A1 (fr) 2012-12-13

Family

ID=47296210

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/004130 WO2012169665A1 (fr) 2011-06-07 2011-06-07 Appareil pour commander des bobines d'alignement numérique de tem pour une analyse ped et appareil pour afficher une vitesse de rotation et un angle de rotation d'un faisceau électronique

Country Status (1)

Country Link
WO (1) WO2012169665A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104730584A (zh) * 2013-12-20 2015-06-24 中国科学院上海微系统与信息技术研究所 瞬变电磁接收机

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06132002A (ja) * 1992-10-15 1994-05-13 Hitachi Ltd 走査電子顕微鏡
JPH11250843A (ja) * 1998-02-26 1999-09-17 Seiko Instruments Inc 集束イオンビーム装置
JP2006059513A (ja) * 2004-07-22 2006-03-02 Kuresutetsuku:Kk 電子ビーム照射装置および描画装置
JP2006179504A (ja) * 2006-03-28 2006-07-06 Hitachi High-Technologies Corp 収差補正器付電子線装置
KR20110076844A (ko) * 2009-12-29 2011-07-06 한국기초과학지원연구원 Ｔｅｍ의 3차원 회절패턴분석을 위한 정밀 제어용 전자빔의 회전각도 및 회전속도 제어-표시 시스템

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06132002A (ja) * 1992-10-15 1994-05-13 Hitachi Ltd 走査電子顕微鏡
JPH11250843A (ja) * 1998-02-26 1999-09-17 Seiko Instruments Inc 集束イオンビーム装置
JP2006059513A (ja) * 2004-07-22 2006-03-02 Kuresutetsuku:Kk 電子ビーム照射装置および描画装置
JP2006179504A (ja) * 2006-03-28 2006-07-06 Hitachi High-Technologies Corp 収差補正器付電子線装置
KR20110076844A (ko) * 2009-12-29 2011-07-06 한국기초과학지원연구원 Ｔｅｍ의 3차원 회절패턴분석을 위한 정밀 제어용 전자빔의 회전각도 및 회전속도 제어-표시 시스템

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104730584A (zh) * 2013-12-20 2015-06-24 中国科学院上海微系统与信息技术研究所 瞬变电磁接收机

Similar Documents

Publication Publication Date Title
JP2017194700A5 (fr)
WO2015030271A1 (fr) Étage d'échantillon pour imagerie tridimensionnelle multiusage et dispositif de commande de précision d'un porte-échantillon dans un microscope électronique à transmission
WO2014038871A1 (fr) Microscope et son procédé de commande
WO2023027227A1 (fr) Système pour inspection de défaut dans une structure à l'aide de rayons x, procédé pour commande de sortie de rayons x de système d'inspection, et procédé pour calcul de profondeur de défaut
CN1201273C (zh) 显微－实验室装置
WO2012169665A1 (fr) Appareil pour commander des bobines d'alignement numérique de tem pour une analyse ped et appareil pour afficher une vitesse de rotation et un angle de rotation d'un faisceau électronique
CN107121137A (zh) 一种光学设备十字丝精确瞄准的装置和方法
WO2016052776A1 (fr) Dispositif de support triaxial de microscope électronique à structure simple
WO2021132824A1 (fr) Procédé d'affichage d'image tridimensionnelle dans un système de microscope d'imagerie intégré et système de microscope d'imagerie intégré pour sa mise en œuvre
KR101167565B1 (ko) Ｔｅｍ의 3차원 회절패턴분석을 위한 정밀 제어용 전자빔의 회전각도 및 회전속도 제어-표시 시스템
CN108871198A (zh) 数字同轴显微全息装置及记录距离与再现距离标定方法
JP2007052972A (ja) 荷電粒子線装置システム
WO2020111810A1 (fr) Appareil de commande d'un robot de nettoyage et son procédé de commande
WO2010143866A2 (fr) Appareil d'alignement de lumière et procédé correspondant
WO2020105978A1 (fr) Appareil et procédé de mesure de forme de surface incurvée libre tridimensionnelle
WO2012141396A1 (fr) Appareil combiné de microscope électronique à balayage et de spectroscopie des rayons x à dispersion d'énergie
JP4456962B2 (ja) 試料表示装置、試料表示装置の操作方法、試料表示装置操作プログラムおよびコンピュータで読み取り可能な記録媒体又は記録した機器
JPH04130713A (ja) 荷電粒子露光装置
WO2023121414A1 (fr) Dispositif de conversion de résolution bimode pour microscope à rayons x tridimensionnel
JP4531925B2 (ja) 光ファイバ、光部品の観測装置
CN220795056U (zh) 便携式脱落细胞发现仪
WO2023177017A1 (fr) Procédé et appareil d'acquisition d'image basée sur un microscope à champ lumineux
WO2013062158A1 (fr) Microscope électronique à balayage qui présente une fonction d'alignement des faisceaux électroniques et procédé permettant de commander un filtre de wien pour un microscope électronique à balayage
WO2023204423A1 (fr) Dispositif et procédé de mesure de longueur focale
JPH0393140A (ja) 走査電子顕微鏡像と光学顕微鏡像の対応装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11867276

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 11867276

Country of ref document: EP

Kind code of ref document: A1