WO2012162704A3 - Method and apparatus for reconditioning a carrier wafer for reuse - Google Patents
Method and apparatus for reconditioning a carrier wafer for reuse Download PDFInfo
- Publication number
- WO2012162704A3 WO2012162704A3 PCT/US2012/039891 US2012039891W WO2012162704A3 WO 2012162704 A3 WO2012162704 A3 WO 2012162704A3 US 2012039891 W US2012039891 W US 2012039891W WO 2012162704 A3 WO2012162704 A3 WO 2012162704A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- reconditioning
- reuse
- deposition
- film
- solar cells
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 230000008021 deposition Effects 0.000 abstract 2
- 239000010408 film Substances 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000011888 foil Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1892—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof methods involving the use of temporary, removable substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Recrystallisation Techniques (AREA)
- Photovoltaic Devices (AREA)
Abstract
The disclosed subject matter pertains to deposition of thin film or thin foil materials in general, but more specifically to deposition of epitaxial monocrystalline or quasi-monocrystalline silicon film (epi film) for use in manufacturing of high efficiency solar cells. In operation, methods are disclosed which extend the reusable life and to reduce the amortized cost of a reusable substrate or template used in the manufacturing process of silicon and other semiconductor solar cells.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020137034593A KR101389030B1 (en) | 2011-05-26 | 2012-05-29 | Method and apparatus for reconditioning a carrier wafer for reuse |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161490562P | 2011-05-26 | 2011-05-26 | |
US61/490,562 | 2011-05-26 | ||
US13/209,390 US20120125256A1 (en) | 2007-10-06 | 2011-08-13 | Apparatus and method for repeatedly fabricating thin film semiconductor substrates using a template |
US13/209,390 | 2011-08-13 | ||
US13/341,976 US20120167819A1 (en) | 2007-10-06 | 2011-12-31 | Method for reconstructing a semiconductor template |
US13/341,976 | 2011-12-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2012162704A2 WO2012162704A2 (en) | 2012-11-29 |
WO2012162704A3 true WO2012162704A3 (en) | 2013-03-28 |
Family
ID=47218135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2012/039891 WO2012162704A2 (en) | 2011-05-26 | 2012-05-29 | Method and apparatus for reconditioning a carrier wafer for reuse |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR101389030B1 (en) |
MY (1) | MY167902A (en) |
WO (1) | WO2012162704A2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3027733B1 (en) * | 2014-10-27 | 2017-05-05 | Commissariat Energie Atomique | PROCESS FOR PRODUCING A PHOTOVOLTAIC CELL |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050082526A1 (en) * | 2003-10-15 | 2005-04-21 | International Business Machines Corporation | Techniques for layer transfer processing |
US20050170611A1 (en) * | 2003-01-07 | 2005-08-04 | Bruno Ghyselen | Recycling of a wafer comprising a multi-layer structure after taking-off a thin layer |
US20110021006A1 (en) * | 2006-10-09 | 2011-01-27 | Solexel, Inc. | Method for releasing a thin semiconductor substrate from a reusable template |
US20110030610A1 (en) * | 2009-05-05 | 2011-02-10 | Solexel, Inc. | High-productivity porous semiconductor manufacturing equipment |
-
2012
- 2012-05-29 KR KR1020137034593A patent/KR101389030B1/en not_active IP Right Cessation
- 2012-05-29 WO PCT/US2012/039891 patent/WO2012162704A2/en active Application Filing
- 2012-05-29 MY MYPI2013702563A patent/MY167902A/en unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050170611A1 (en) * | 2003-01-07 | 2005-08-04 | Bruno Ghyselen | Recycling of a wafer comprising a multi-layer structure after taking-off a thin layer |
US20050082526A1 (en) * | 2003-10-15 | 2005-04-21 | International Business Machines Corporation | Techniques for layer transfer processing |
US20110021006A1 (en) * | 2006-10-09 | 2011-01-27 | Solexel, Inc. | Method for releasing a thin semiconductor substrate from a reusable template |
US20110030610A1 (en) * | 2009-05-05 | 2011-02-10 | Solexel, Inc. | High-productivity porous semiconductor manufacturing equipment |
Also Published As
Publication number | Publication date |
---|---|
MY167902A (en) | 2018-09-26 |
KR101389030B1 (en) | 2014-04-29 |
WO2012162704A2 (en) | 2012-11-29 |
KR20140008534A (en) | 2014-01-21 |
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