WO2012159625A3 - Quasi-monolithic polarization beam splitter assembly - Google Patents

Quasi-monolithic polarization beam splitter assembly Download PDF

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Publication number
WO2012159625A3
WO2012159625A3 PCT/DE2012/100152 DE2012100152W WO2012159625A3 WO 2012159625 A3 WO2012159625 A3 WO 2012159625A3 DE 2012100152 W DE2012100152 W DE 2012100152W WO 2012159625 A3 WO2012159625 A3 WO 2012159625A3
Authority
WO
WIPO (PCT)
Prior art keywords
beam splitter
polarization beam
splitter assembly
quasi
monolithic
Prior art date
Application number
PCT/DE2012/100152
Other languages
German (de)
French (fr)
Other versions
WO2012159625A2 (en
Inventor
Sven Laux
Jörg-Peter SCHMIDT
Original Assignee
Jenoptik Optical Systems Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Optical Systems Gmbh filed Critical Jenoptik Optical Systems Gmbh
Priority to DE112012002246.7T priority Critical patent/DE112012002246A5/en
Priority to EP12761882.5A priority patent/EP2715427A2/en
Publication of WO2012159625A2 publication Critical patent/WO2012159625A2/en
Publication of WO2012159625A3 publication Critical patent/WO2012159625A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/142—Coating structures, e.g. thin films multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/145—Beam splitting or combining systems operating by reflection only having sequential partially reflecting surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/1805—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Polarising Elements (AREA)
  • Optical Head (AREA)

Abstract

The invention relates to a quasi-monolithic polarization beam splitter assembly for splitting a UV beam into two partial beams, comprising two optical prisms (1) that form a polarization beam splitter (2) and a holding part (6) having no optically effective surfaces, which holding part is connected to the polarization beam splitter (2). The invention also relates to a method for producing such a polarization beam splitter assembly, which is characterized in that even after mounting the polarization beam splitter assembly in an optical mount, the partial beams passing therethrough undergo only a very slight wavefront deformation.
PCT/DE2012/100152 2011-05-26 2012-05-22 Quasi-monolithic polarization beam splitter assembly WO2012159625A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112012002246.7T DE112012002246A5 (en) 2011-05-26 2012-05-22 Quasimonolithic polarization beam splitter assembly
EP12761882.5A EP2715427A2 (en) 2011-05-26 2012-05-22 Quasi-monolithic polarization beam splitter assembly

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011050644.6 2011-05-26
DE102011050644 2011-05-26

Publications (2)

Publication Number Publication Date
WO2012159625A2 WO2012159625A2 (en) 2012-11-29
WO2012159625A3 true WO2012159625A3 (en) 2013-01-17

Family

ID=46888280

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2012/100152 WO2012159625A2 (en) 2011-05-26 2012-05-22 Quasi-monolithic polarization beam splitter assembly

Country Status (3)

Country Link
EP (1) EP2715427A2 (en)
DE (1) DE112012002246A5 (en)
WO (1) WO2012159625A2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4784469A (en) * 1986-09-17 1988-11-15 Matsushita Electric Industrial Co., Ltd. Beam splitter for color imaging equipment
US5339441A (en) * 1992-07-02 1994-08-16 Advanced Intervention Systems, Inc. Polarizing device with optically contacted thin film interface for high power density ultraviolet light
US20050162621A1 (en) * 2004-01-22 2005-07-28 Fujinon Corporation Projector

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3757962B2 (en) 2003-03-18 2006-03-22 コニカミノルタオプト株式会社 Optical pickup prism and optical pickup manufacturing method
DE102005060517A1 (en) 2005-12-12 2007-06-21 Carl Zeiss Smt Ag Prism polarizer e.g. Glan-Thompson polarizer, for e.g. micro lithography-projection illumination system, has prisms, where birefringent characteristics of prisms are independent of stress-induced birefringence in wavelength area of light

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4784469A (en) * 1986-09-17 1988-11-15 Matsushita Electric Industrial Co., Ltd. Beam splitter for color imaging equipment
US5339441A (en) * 1992-07-02 1994-08-16 Advanced Intervention Systems, Inc. Polarizing device with optically contacted thin film interface for high power density ultraviolet light
US20050162621A1 (en) * 2004-01-22 2005-07-28 Fujinon Corporation Projector

Also Published As

Publication number Publication date
WO2012159625A2 (en) 2012-11-29
DE112012002246A5 (en) 2014-03-13
EP2715427A2 (en) 2014-04-09

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