WO2012159625A2 - Ensemble quasi-monolitique séparateur de faisceau de polarisation - Google Patents

Ensemble quasi-monolitique séparateur de faisceau de polarisation Download PDF

Info

Publication number
WO2012159625A2
WO2012159625A2 PCT/DE2012/100152 DE2012100152W WO2012159625A2 WO 2012159625 A2 WO2012159625 A2 WO 2012159625A2 DE 2012100152 W DE2012100152 W DE 2012100152W WO 2012159625 A2 WO2012159625 A2 WO 2012159625A2
Authority
WO
WIPO (PCT)
Prior art keywords
beam splitter
polarization beam
layer
joining
holding part
Prior art date
Application number
PCT/DE2012/100152
Other languages
German (de)
English (en)
Other versions
WO2012159625A3 (fr
Inventor
Sven Laux
Jörg-Peter SCHMIDT
Original Assignee
Jenoptik Optical Systems Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Optical Systems Gmbh filed Critical Jenoptik Optical Systems Gmbh
Priority to EP12761882.5A priority Critical patent/EP2715427A2/fr
Priority to DE112012002246.7T priority patent/DE112012002246A5/de
Publication of WO2012159625A2 publication Critical patent/WO2012159625A2/fr
Publication of WO2012159625A3 publication Critical patent/WO2012159625A3/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/142—Coating structures, e.g. thin films multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/145—Beam splitting or combining systems operating by reflection only having sequential partially reflecting surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/1805—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

Definitions

  • the invention relates to a quasi-monolithic polarization beam splitter assembly comprising at least one polarization beam splitter having a polarizing beam splitter layer for ultraviolet (UV) radiation.
  • a generic polarization beam splitter is known from US 5,339,441.
  • a polarization beam splitter divides an incident beam into two mutually perpendicularly polarized partial beams, wherein a loss of intensity and wavefront deformation of the beam when passing through the polarization beam splitter should be avoided as much as possible.
  • the latter can also be caused by the capture of the polarization beam splitter in an optical socket.
  • a polarization beam splitter according to US Pat. No. 5,339,441 comprises a first and a second straight prism (optical prism), each having a base area formed by a triangle and a rectangle adjoining the shorter catheter thereof.
  • the two prisms are made of the same glass with a low refractive index and high quality. They each have a joining surface (hypotenuse surface), via which the prisms are connected to each other and form a cuboid polarization beam splitter, with an entrance surface for the beam and two exit surfaces, for a reflected and a transmitted partial beam (Sp. 2, Z. 9-36 ).
  • the joining surfaces enclose an angle, in this case 56 °, with the exit surface for the reflected partial beam.
  • a multilayer beam splitter layer is introduced between the joining surfaces. It may have been applied prior to joining proportionally to both joining surfaces or preferably to only one of the joining surfaces (Sp. 2, Z. 50-63).
  • the multilayered Beam splitter layer includes alternating layers of high refractive index material and low refractive index material (Sp.2, Z. 65-69).
  • suitable materials for this purpose are specified in US Pat. No. 5,339,441, with which a polarizing beam splitting for UV radiation with a wavelength of 308 nm can take place.
  • the applied to a joint surface multilayer beam splitter layer is completed by a cover layer, made of a material having a low refractive index, said cover layer should have a thickness equal to the wavelength of the radiation so that it has no optical effect.
  • the layers which delimit the multilayer beam splitter layer on both sides should have the same refractive index as the prisms (Sp. 4, lines 1 to 7).
  • the optical component or the optical assembly in an optical version may be a so-called prism chair, be caught.
  • the surfaces over which the socket is in direct contact with the optical component or the optical assembly are to be understood below as contact surfaces.
  • the optical components or optical assemblies are inevitably mechanically and thermally connected to the socket. This compound has an effect on the quality of the optical component or the. Due to resulting stresses between the socket and the captured optical component or the optical assembly optical assembly, so also on the wavefront deformation of the optical component or the optical assembly passing beam. The extent of the effects also depends on where the contact surfaces are relative to the optically active surfaces of the optical component or the optical assembly.
  • a stress-resistant polarization beam splitter (there called a prism polarizer) is disclosed, in which the peculiarity with respect to generic polarization beam splitters in the material selection for the two prisms forming the polarization beam splitter.
  • a polarization splitter plate is arranged between the hypotenuse surfaces of the two prisms, on each of which a spacer ring is applied by vapor deposition.
  • the indirectly pressed together in the assembly over the polarization divider plate prisms are arranged within a metallic or ceramic socket arrangement having on one side spring elements which cause an axial compression of the prisms in the installed state with a predetermined force by the spring force.
  • the socket is thus connected via contact surfaces with the polarization beam splitter, which are located on the same sides of the polarization beam splitter as well as optically active surfaces, whereby mechanical and thermal stresses are registered by the socket directly on the polarization beam splitter.
  • the polarization beam splitter also disclosed in US 2004/0184167 A1 beam splitter assembly comprises a plurality of prisms, which are connected to one another via beam-splitting surfaces. Each of the prisms has optically effective surfaces, so that the beam splitter assembly must be forced over the side surfaces of one of the prisms.
  • mechanical or thermal stresses are transmitted directly to the provided on the prism optically effective surface.
  • the invention is based on the object to provide a polarization beam splitter assembly, which can be taken in an optical version that by their connection with the socket, an increase in the wavefront deformation, which experiences a beam when passing through the polarization beam splitter, at least almost impossible.
  • the invention also relates to a method for producing such a polarization beam splitter.
  • the polarization beam splitter assembly comprises two optical prisms of quartz glass, which together form a cuboid polarization beam splitter and an optically ineffective, cuboid holding part.
  • the side surfaces of the polarization beam splitter comprise three optically active surfaces, namely an entrance surface for a UV beam, which is split at a splitter layer into two sub-beams, an occurrence surface for the partial beam reflected at the splitter layer and an exit surface for the sub-beam transmitted through the splitter layer.
  • the exit surfaces are coated with an antireflection coating.
  • the Hypotenuse lake of the two optical prisms each represent a joint surface, wherein on one of the two joining surfaces, the multi-layer divider layer is applied, which terminates with a covering layer of Si0 2 .
  • the polarization beam splitter group consists of a polarization beam splitter which fulfills the optical function of the polarization beam splitter group and consists of a holding part which has no optical function but is to provide free side surfaces over which the polarization beam splitter group can be picked up. Within these free side surfaces contact surfaces are provided, via which an optical socket can be directly mechanically connected to the polarization beam splitter assembly.
  • the holding part communicates with the polarization beam splitter via a non-optically effective side surface by means of a UV-resistant adhesive and at least one of the exit surfaces of the polarization beam splitter is polished so that a sub-beam passing through the polarization beam splitter experiences at most a maximum predetermined wavefront deformation which is caused by the Addition of the wavefront deformations of the optically effective for the sub-beam surfaces results.
  • the holding part in addition to the polarization beam splitter and other beam splitter, over which a beam splitting, be recognized.
  • the object of a method for producing a polarization splitter group according to the invention is achieved as follows.
  • Two optical prisms made of quartz glass, each with one joining surface, are made available, which together form a cuboid polarization beam splitter via their joining surfaces.
  • the joining surfaces are polished and on one of the two joining surfaces, a multilayer divider layer is applied with a covering layer of Si0 2 , which is polished.
  • the free joining surface is blasted to the joint surface coated with the splitter layer, whereby the polarization beam splitter is formed.
  • a holding part made of quartz glass is provided and the polarization beam splitter is connected via one of its optically ineffective side surfaces by means of a UV-resistant adhesive to the holding part.
  • at least one of the side surfaces acting as exit surfaces is polished until a passing part beam passes at most a maximum predetermined Wavefront deformation experiences, which results from the addition of the wavefront deformations of the optically effective for the sub-beam surfaces.
  • This step of polishing is mandatory after the connection of the holding part with the polarization beam splitter, to thereby additionally caused by a wave front deformation due to the entry of voltages with.
  • an antireflection coating is applied to the exit surface and the entrance surface.
  • the polarization beam splitter assembly is explained in more detail below by way of example with reference to the drawing.
  • Fig. 1 a shows a first embodiment of a polarization beam splitter assembly in perspective view
  • FIG. 1 b shows a polarization beam splitter assembly according to FIG. 1 a in FIG
  • Fig. 1 c shows a second embodiment of a polarization beam splitter assembly in perspective view
  • a polarization beam splitter subassembly according to the invention for a UV beam according to a first exemplary embodiment comprises two optical prisms 1 made of quartz glass, which together form a cuboid polarization beam splitter 2, and a cuboid holding part 6.
  • a fourth side surface 3.4 forms an entrance surface, via which a UV beam to be split is coupled into the cuboid
  • a fifth side surface 3.5 forms a step surface for one at a splitter layer 4 reflected sub-beam
  • a sixth side surface 3.6 forms an exit surface for a transmitted through the splitter layer 4 partial beam, wherein the entrance surface 3.4 and the exit surfaces 3.6 are coated with an anti-reflection layer.
  • the two prisms 1 each have a joining surface 5 which encloses an angle ⁇ with the entry surface 3.4 or the exit surface 3.6.
  • the multi-layer divider layer 4 is applied on one of the two joining surfaces 5, the multi-layer divider layer 4 is applied. It consists of a plurality of alternating layers of low refractive and high refractive index materials which are expertly selected depending on the wavelength of the UV beam to be split.
  • the angle ⁇ can also have a different value, in particular if only the transmitting partial beam is of interest.
  • the splitter layer 4 terminates with a cover layer of SiO 2 , to which the free joining surface 5 is sprinkled.
  • the surfaces to be connected must not only be highly level, but their surface should also have only the lowest possible roughness. In principle, both are achieved by the production, in particular the optical polishing of the joining surfaces 5.
  • the application of the splitter layer 4, which is usually done by vapor deposition, but leads to changes, in particular to increase the predetermined by the surface of the joint surface 5 roughness profile, z. B. when the splitter layer 4 comprises fluoridic layers, by the polycrystalline layer growth.
  • the cover layer is polished until the height of the thus reducing roughness profile is below a predetermined tolerance limit.
  • a resulting, indeterminate thickness of the cover layer has no optical effect, since the prism 1, which is blasted on its joining surface 5 to this cover layer, from the same material as the cover layer, so no media transition is present.
  • the roughness is checked with the measures known to a person skilled in the art, eg. B. by white light interferometry, by a method using an AFM (atomic force microscope) or with Tastroughhabilit.
  • the polarization beam splitter 2 formed by the assembled prisms 1, as shown in Fig. 1 a, with a holding part 6, also made of quartz glass, connected via one of the optically non-effective side surface 3 by means of a UV-resistant adhesive.
  • a polarization beam splitter assembly is created, which achieves a higher compared to the state of the art quality of beam splitting after recording in an optical version, as an additional and undefined wave deformation by the direct introduction of mechanical or thermal stresses on the socket in the polarization beam splitter 2 is avoided.
  • the polarization beam splitter assembly is brought into contact with the socket via the free side surfaces of the holding part, which serve as contact surfaces, and voltages are transmitted at most slightly to the polarization beam splitter 2 and thus to the optically active surfaces.
  • further beam splitters via which a beam splitting takes place, can be attached to the holding part 6.
  • Fig. 1 c shows a second embodiment of a polarization beam splitter assembly, in which at the opposite ends of an elongated rectangular support member 6 on the one polarizing beam splitter 2 and on the other another beam splitter, which must be no polarization beam splitter 2, attached.
  • z. B. for beam splitting of beams of different wavelength z. B. 193 nm and any other wavelength are designed or both for only one wavelength z. B. 193 nm with different Division ratios
  • the polarization beam splitter assembly can be used for two different applications by the polarization beam splitter 2 and the other beam splitter are inserted alternatively in the beam path of an optical system.
  • the polarization beam splitter 2 is a polarization beam splitter for UV rays, however, the effort that would be justified with the described method for polarization beam splitter, which are not intended for the UV range, would not be justified. It is understood that if necessary, the adhesive then also does not have to be UV-resistant.
  • the embodiment of the holding member 6 in the form of a cuboid, and as shown in the figures, with a same cross-sectional size, is advantageous but not mandatory.
  • the cross section could also be chosen smaller than the adjacent cross section of the polarization beam splitter 2.
  • a socket for the polarization beam splitter assembly will in any case be mechanically connected thereto via the free side surfaces of the holding part 6.
  • two optical prisms 1 made of quartz glass, each with a joining surface 5 are provided, which together form a cuboid polarization beam splitter 2 via their joining surfaces.
  • the dimensioning of the dimensions is determined by the beam cross section of the beam to be divided, so that it is neither limited nor that the optically effective surfaces are much larger than necessary.
  • the polarization beam splitter 2 is a cube, with which the optical prisms 1 are half-cube prisms.
  • the hypotenuse surface, which forms the joining surface, then encloses an angle of 45 ° with an adjacent side surface.
  • the optical prisms 1 are polished at their joining surfaces and the optically effective side surfaces and a non-optically effective side surface, via which a connection to a holding part is to be produced. It is at Repeated interferometric test polishes until a predetermined output tolerance of the flatness is reached.
  • a multilayer divider layer is applied to one of the two prepared joining surfaces, which ends with a covering layer of Si0 2 .
  • the layers consist alternately of a material of high and low refractive index transparent to the wavelength of the beam to be split.
  • the ratio of reflected and transmitted radiation can also be set via the layer design of the splitter layer 4.
  • the application of the divider layer 4 is usually carried out by vapor deposition of the individual layers in succession.
  • the covering layer is expertly machined by a suitable technology. With the processing, the contact connection between the two optical prisms 1 is significantly improved.
  • the optical prism 1 not provided with the splitter layer 4 is blasted over its joining surface to the prism 1 provided with the splitter layer 4, more precisely to the covering layer.
  • the two optical prisms 1 now form a polarization beam splitter 2 in the form of a quasi-monolithic cuboid.
  • a holding part 6 made of quartz glass is provided and connected to the polarization beam splitter 2 via an optically non-effective side surface by means of a UV-resistant adhesive.
  • both or only one of the side surfaces acting as exit surfaces 3.5, 3.6 edited to reduce a wavefront deformation of a passing partial beam.
  • it is expertly determined via an interferometric test, which local areas of the exit surfaces 3.5, 3.6 must be reworked to a wavefront deformation less than or equal to a predetermined maximum To ensure wavefront deformation and process them with local polish or an ion beam.
  • the wavefront deformation at the exit surfaces 3.5, 3.6 results from the addition of the wavefront deformations to areas preceding in the direction of transmission and optically effective in each case for the partial beams.
  • the polishing after the connection with the holding part 6 has the effect of compensating for the deterioration of the wavefront deformation due to the strain caused by the connection of the holding part 6 to the polarization beam splitter 2 in the polarization beam splitter 2.
  • an antireflection coating is applied to the exit surfaces 3.5, 3.6 and the entrance surface 3.4.
  • the result is a polarization beam splitter assembly that provides less and more defined wavefront transformation as compared to a prior art UV beam polarization beam splitter, which is held directly in a socket for insertion into the beam path of an optical system ,

Abstract

L'invention concerne un ensemble quasi-monolitique séparateur de faisceau de polarisation, destiné à diviser un rayon UV en deux rayons partiels et comportant deux prismes (1) optiques qui forment un séparateur de faisceau de polarisation (2) et un élément support (6) relié au séparateur de faisceau de polarisation (2) et dépourvu de surfaces optiquement actives. L'invention porte également sur un procédé de fabrication d'un ensemble séparateur de faisceau de polarisation de ce type qui est caractérisé en ce les rayons partiels traversant ne subissent qu'une très faible déformation de front d'onde, même lorsque l'ensemble séparateur de faisceau de polarisation est enchâssé dans une monture optique.
PCT/DE2012/100152 2011-05-26 2012-05-22 Ensemble quasi-monolitique séparateur de faisceau de polarisation WO2012159625A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP12761882.5A EP2715427A2 (fr) 2011-05-26 2012-05-22 Ensemble quasi-monolitique séparateur de faisceau de polarisation
DE112012002246.7T DE112012002246A5 (de) 2011-05-26 2012-05-22 Quasimonolithische Polarisationsstrahlteilerbaugruppe

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011050644.6 2011-05-26
DE102011050644 2011-05-26

Publications (2)

Publication Number Publication Date
WO2012159625A2 true WO2012159625A2 (fr) 2012-11-29
WO2012159625A3 WO2012159625A3 (fr) 2013-01-17

Family

ID=46888280

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2012/100152 WO2012159625A2 (fr) 2011-05-26 2012-05-22 Ensemble quasi-monolitique séparateur de faisceau de polarisation

Country Status (3)

Country Link
EP (1) EP2715427A2 (fr)
DE (1) DE112012002246A5 (fr)
WO (1) WO2012159625A2 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5339441A (en) 1992-07-02 1994-08-16 Advanced Intervention Systems, Inc. Polarizing device with optically contacted thin film interface for high power density ultraviolet light
US20040184167A1 (en) 2003-03-18 2004-09-23 Konica Minolta Opto, Inc. Method for fabricating a prism and method for fabricating an optical system
DE102005060517A1 (de) 2005-12-12 2007-06-21 Carl Zeiss Smt Ag Belastungsfester Prismenpolarisator

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0660963B2 (ja) * 1986-09-17 1994-08-10 松下電器産業株式会社 色分解プリズム
JP4569113B2 (ja) * 2004-01-22 2010-10-27 富士フイルム株式会社 プロジェクタ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5339441A (en) 1992-07-02 1994-08-16 Advanced Intervention Systems, Inc. Polarizing device with optically contacted thin film interface for high power density ultraviolet light
US20040184167A1 (en) 2003-03-18 2004-09-23 Konica Minolta Opto, Inc. Method for fabricating a prism and method for fabricating an optical system
DE102005060517A1 (de) 2005-12-12 2007-06-21 Carl Zeiss Smt Ag Belastungsfester Prismenpolarisator

Also Published As

Publication number Publication date
DE112012002246A5 (de) 2014-03-13
WO2012159625A3 (fr) 2013-01-17
EP2715427A2 (fr) 2014-04-09

Similar Documents

Publication Publication Date Title
DE102012103076B4 (de) Linsensystem für ein Kameramodul mit Infrarotfilter und Kameramodul mit einem Linsensystem sowie Verfahren zur Herstellung eines Linsensystems
DE3446726A1 (de) Optische anordnung mit einem konkavspiegel oder konkavgitter
DE202017105560U1 (de) Kollimator für optische Leitungsvermittlung
DE102016014802A1 (de) Anordnung und Verfahren zur robusten Single-shot-Interferometrie
DE10328938A1 (de) Korrektureinrichtung zur Kompensation von Störungen der Polarisationsverteilung sowie Projektionsobjektiv für die Mikrolithografie
DE102016110351B4 (de) Verfahren zur Herstellung eines optischen Elements
DE102010060558B3 (de) Optisches Element zum Verteilen von Licht
EP1852401A1 (fr) Corps formé en verre ou vitrocéramique et son procédé de fabrication
WO2012159625A2 (fr) Ensemble quasi-monolitique séparateur de faisceau de polarisation
EP1018053B1 (fr) Systeme optique d'injection d'un rayonnement laser dans une fibre optique et son procede de fabrication
WO2019238885A1 (fr) Guide d'onde optique pour dispositif d'affichage
DE102009047471A1 (de) Verfahren zur Herstellung monolithischer Kompositbauteile
DE202011109941U1 (de) Quasimonolithische Polarisationsstrahlteilergruppe
DE4429194A1 (de) Beidseitig telezentrisches optisches Umbildesystem
DE102012018483B4 (de) Nichtpolarisierender Strahlteiler
DE102013103282A1 (de) Polarisatoranordnung zum räumlichen Trennen von Polarisationszuständen eines Lichtstrahlenbündels
WO1998020383A1 (fr) Composant optique et son procede de fabrication
DE102020133528B3 (de) Verfahren zur Herstellung einer optischen Komponente mit innerer, beschichteter Struktur und danach hergestellte optische Komponente
EP2492739B1 (fr) Séparateur de faisceau non polarisant avec couche métallique
DE69531832T2 (de) Grin-linse und ihr herstellungsverfahren
DE102010012467A1 (de) Vorrichtung zur Abbildung einer linienförmigen Lichtverteilung, Laservorrichtung mit einer derartigen Vorrichtung sowie Verfahren zur Herstellung einer derartigen Vorrichtung
DE102020105201A1 (de) Kompaktes Teleobjektiv mit diffraktivem optischen Element
DE102014118880A1 (de) Optische Einrichtung zur Modulation der spektralen Phase von Laserpulsen
DE102010029062B4 (de) Optisches System, Datenübertragungssystem und System zur Akquisition elektromagnetischer Strahlung
DE102021118034A1 (de) Vorrichtung zur Strahlformung eines einfallenden Laserstrahls

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12761882

Country of ref document: EP

Kind code of ref document: A2

WWE Wipo information: entry into national phase

Ref document number: 112012002246

Country of ref document: DE

Ref document number: 1120120022467

Country of ref document: DE

ENP Entry into the national phase in:

Ref document number: 13325

Country of ref document: GE

Kind code of ref document: P

REG Reference to national code

Ref country code: DE

Ref legal event code: R225

Ref document number: 112012002246

Country of ref document: DE

Effective date: 20140313