WO2012157922A3 - Method for detecting a the flow and abnormal operation of a fluid dispensing system - Google Patents

Method for detecting a the flow and abnormal operation of a fluid dispensing system Download PDF

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Publication number
WO2012157922A3
WO2012157922A3 PCT/KR2012/003758 KR2012003758W WO2012157922A3 WO 2012157922 A3 WO2012157922 A3 WO 2012157922A3 KR 2012003758 W KR2012003758 W KR 2012003758W WO 2012157922 A3 WO2012157922 A3 WO 2012157922A3
Authority
WO
WIPO (PCT)
Prior art keywords
flow
pipe
dispensing system
fluid dispensing
basis
Prior art date
Application number
PCT/KR2012/003758
Other languages
French (fr)
Korean (ko)
Other versions
WO2012157922A2 (en
Inventor
김재달
김병섭
김용환
Original Assignee
주식회사 에이앤디코퍼레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 에이앤디코퍼레이션 filed Critical 주식회사 에이앤디코퍼레이션
Publication of WO2012157922A2 publication Critical patent/WO2012157922A2/en
Publication of WO2012157922A3 publication Critical patent/WO2012157922A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
    • G01F1/666—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters by detecting noise and sounds generated by the flowing fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/0092—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume for metering by volume
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)

Abstract

According to the present invention, an abnormal operating state and a flow supplied through a pipe are detected on the basis of an inherenta natural pipe frequency that occurs when a fluid dispensing system is driven normally, whereby the detection is used for semiconductor manufacturing processes or in the display device industry. To this endFor this purpose, in a teaching mode, a reference waveform range is set, which is normalized based on an output signal of a non-contact flow change detector installed on the outside of a pipe so as to detect a the flow without having to cut the pipe. In an operation mode, on the basis of the reference waveform range, the flow and various abnormal operations of a dispensed fluid are comprehensively analyzed for detection.
PCT/KR2012/003758 2011-05-16 2012-05-14 Method for detecting a the flow and abnormal operation of a fluid dispensing system WO2012157922A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020110045829A KR20120128176A (en) 2011-05-16 2011-05-16 Method for detecting flow and abnormal driving of fluid dispensing system
KR10-2011-0045829 2011-05-16

Publications (2)

Publication Number Publication Date
WO2012157922A2 WO2012157922A2 (en) 2012-11-22
WO2012157922A3 true WO2012157922A3 (en) 2013-01-24

Family

ID=47177463

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/003758 WO2012157922A2 (en) 2011-05-16 2012-05-14 Method for detecting a the flow and abnormal operation of a fluid dispensing system

Country Status (2)

Country Link
KR (1) KR20120128176A (en)
WO (1) WO2012157922A2 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002365031A (en) * 2001-06-12 2002-12-18 Kansai Electric Power Co Inc:The Measuring method for thickness of scale on inner surface of tube
JP2004271266A (en) * 2003-03-06 2004-09-30 Hitachi High-Technologies Corp Dispensing device and autoanalyzer using the same
KR100906922B1 (en) * 2008-12-30 2009-07-10 주식회사대한송유관공사 A flow leak detection method and system using compensated flow measuring
KR100961639B1 (en) * 2010-02-09 2010-06-09 자인테크놀로지(주) Automatic optimal frequency configuration method for clamp-on type ultrasonic flow meter
KR20110048000A (en) * 2009-10-30 2011-05-09 주식회사 에이앤디코퍼레이션 Uncut flow change detector and dispensing system including the same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002365031A (en) * 2001-06-12 2002-12-18 Kansai Electric Power Co Inc:The Measuring method for thickness of scale on inner surface of tube
JP2004271266A (en) * 2003-03-06 2004-09-30 Hitachi High-Technologies Corp Dispensing device and autoanalyzer using the same
KR100906922B1 (en) * 2008-12-30 2009-07-10 주식회사대한송유관공사 A flow leak detection method and system using compensated flow measuring
KR20110048000A (en) * 2009-10-30 2011-05-09 주식회사 에이앤디코퍼레이션 Uncut flow change detector and dispensing system including the same
KR100961639B1 (en) * 2010-02-09 2010-06-09 자인테크놀로지(주) Automatic optimal frequency configuration method for clamp-on type ultrasonic flow meter

Also Published As

Publication number Publication date
KR20120128176A (en) 2012-11-27
WO2012157922A2 (en) 2012-11-22

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