KR20120128176A - Method for detecting flow and abnormal driving of fluid dispensing system - Google Patents

Abstract

PURPOSE: A flow rate and abnormal operation detecting method of a fluid dispense system is provided to comprehensively analyze a flow rate and various kinds of abnormal operation states of a fluid being dispensed and to inform an analysis result to a system controlling unit or user, thereby enhancing a product quality. CONSTITUTION: A flow rate and abnormal operation detecting method of a fluid dispense system is as follows. When recording teaching wave data by monitoring output signals of a flow variation sensor installed in a fluid flowing a pipe as a non-contact type in a teaching mode(S401,S402,S405), the teaching wave data being input until reaching to a preset synchronous signal section is negated. When a recording section of the teaching wave data reaches the preset synchronous signal section, the teaching wave data is recorded until an accumulated sampling value is reached a preset value and this step; recording operation of sampling learning data is repeated until reaching to a preset number of occurrence(S407). Collected sampling values are statistically analyzed by recording the teaching wave data and a reliable range is modeled so that a reference waveform range is set(S409). Detection signals of the flow rate variation sensor are detected and the detection result is compared and analyzed with the reference waveform range. A flow rate discontinuously supplied through a pipe is detected or the abnormality existence of a flow rate path is determined based on the comparative analysis result so that an alarm is generated(S411). [Reference numerals] (AA) Start; (BB) No(operation mode); (CC,EE,II,JJ,HH) Yes; (DD,FF,KK,GG) No; (LL) End; (S401) Teaching mode?; (S402) Real time basis monitoring; (S403) Trigger ON?; (S404) Recording data=0; (S405) Teaching wave data recording; (S406) ICV=limitaion value?; (S407) Repeat count=N times; (S408) Searching a maximum and minimum value; (S409) Setting reference wave form range; (S410) Alerting generation condition?; (S411) Alerting generation

Description

METHODS FOR DETECTING FLOW AND ABNORMAL DRIVING OF FLUID DISPENSING SYSTEM}

The present invention relates to a technology for detecting the flow rate and abnormal operation state in the fluid dispensing system used in the semiconductor manufacturing process or the display device industry, in particular a non-contact flow rate installed outside the pipe to detect the fluid flow without cutting the pipe A method of detecting the flow rate and abnormal operation of a fluid dispense system that sets a normalized reference waveform range based on the output signal of the change detector and analyzes and detects the flow rate of the dispensed fluid and various abnormal operation conditions based on the normalized waveform range. It is about.

Dispenser is a device (or system) that injects (or discharges) the flow of fluid based on precise control technology. It dispenses the desired amount of liquid in a discontinuous form rather than in a continuous flow form. . In such a system, a flow rate sensing technique is applied and a flow rate sensing technique for detecting an abnormality in a discharged flow rate and a fluid flow state and informing a main control device or a user is applied.

However, in the conventional contact flow sensing technology, the flow rate is detected using a contact flow rate change sensor installed directly on a flow path in a fluid flowing pipe, as in Korean Patent Application Publication No. 10-2009-0047052. As such, in the case of a fluid dispensing system in which the flow change detector is installed in contact with the fluid in the pipe and configured to detect the flow of the fluid, the flow change detector is concerned about the corrosion of the flow change detector due to the fluid. Problems such as contamination of the fluid by the fluid may occur.

Furthermore, in order to install the flow change detector in the pipe, the pipe must be cut and then the flow change detector must be installed, or the flow change detector must be installed in the already cut pipe, and then the other pipes are connected again. There is a point.

In addition, the conventional flow rate change detector merely detects the flow rate, but it is an abnormal operation such as the flow of discontinuous micro flow rate, incorrect operation of components (pump, filter, valve, piping) on the flow path, bubble generation or mixing, etc. There is a problem that can not detect the operation.

Accordingly, an object of the present invention is to install a flow rate change sensor in a non-contact structure outside the pipe without cutting the pipe in the fluid dispensing system used in the semiconductor manufacturing process or display device industry to output the output signal thereof. Based on the steady state learning, the normalized reference waveform range is set, and the reference waveform range is used to detect the flow rate discontinuously supplied through the pipe in the operation mode, or the abnormal state of the fluid flow can be comprehensively modeled. It is to analyze by (three-dimensional) and to inform the main control system of the result (error state such as alarm) or to apply it to the outside.

The first embodiment of the present invention for achieving the above object, (a) in the teaching mode, by monitoring the output signal of the flow rate change sensor installed in a non-contact structure to the fluid discontinuously supplied in the pipe to teach the teaching wave data A validity judging step of, upon recording, invalidating the input data as invalid teaching wave data until the recording interval of the teaching wave data reaches a preset synchronization signal section; (b) When the recording section of the teaching wave data enters a preset synchronization signal section, the teaching wave data is recorded until a cumulative sampling value reaches a preset value, and the recording operation of the sampling learning data is preset. Learning to repeat until the number of repetitions is reached; (c) a reference waveform range setting step of statistically analyzing a sampling value collected through the teaching wave data recording operation and modeling a reliable range to set a reference waveform range (upper and lower limit allowable range); (d) In the operation mode, detects the output signal of the non-contact flow rate change detector and compares the detected result with the reference waveform range set in the reference waveform range setting step, and discontinuously through the pipe based on the comparison analysis result. And generating an alarm or a control output signal by detecting a flow rate supplied thereto or determining an abnormality in a fluid flow path.

The second embodiment of the present invention for achieving the above object is applied to a PAL (photoresist) dispense device of Trek equipment, which is a semiconductor manufacturing process equipment, (a) in the teaching mode, the fluid is discontinuously supplied Detects the output signal of the flow rate changer installed in a non-contact structure, and displays the teaching wave of the entire section including the signal invalid (pre-wet) determination section and the signal valid (photoresist) section for the first teaching wave. A synchronization interval setting step of allowing a user to designate a teaching wave start index (starting point) point on the teaching wave of the entire interval; (b) When the teaching wave data inputted from the flow rate change detector passes the waveform validity test, the teaching wave data is recorded until the cumulative index count value reaches a preset limit value. A sampling step of repeating the recording operation until the preset repeat count is reached; (c) a reference waveform range setting step of statistically analyzing the sampling values collected by the sampling collection step and modeling a reliable range to set a reference waveform range (upper and lower limit allowable range); (d) In the operation mode, the output signal of the flow rate change sensor is monitored to compare and measure the teaching wave data according to the reference waveform range data, and to detect the flow rate based on the comparison measurement result or to check for abnormality in the fluid flow path. Alarm generation step of determining and generating an alarm or a control output signal.

The third embodiment of the present invention for achieving the above object, (a) in the teaching mode, when collecting the output signal of the non-cutting flow rate change detector, the data input until entering the preset synchronization signal section A validity determining step of invalidating and starting to record the teaching wave data input as valid data thereafter; (b) recording the teaching wave data which is determined as valid data in the validity determining step until the cumulative index count value reaches a preset limit value, and records the learning operation of the teaching wave data at a predetermined number of repetitions; Learning to repeat until it is reached; (c) a reference waveform range setting step of statistically analyzing the sampling values collected through the learning step and modeling a reliable range to set a reference waveform range (upper and lower limit allowable range); (d) In the operation mode, detect the output signal of the flow rate change detector and compare and analyze the teaching wave data according to the reference waveform range data, and detect the flow rate or determine an alarm occurrence condition based on the result and generate an alarm. Alarm generation step occurs.

The present invention is a fluid dispensing system used in semiconductor manufacturing process or display device (e.g. LED) industry that requires high precision control, and is an output of a non-contact flow change detector installed at the outside of the pipe without cutting the pipe to sense the flow rate. Set the normalized reference waveform range based on the signal and analyze the flow rate of the dispensing fluid and various abnormal operation conditions comprehensively and inform the system controller or user of the analysis result to improve the product quality. It can be effective.

In addition, there is a convenience that can be easily installed and used without cutting the pipe in the existing equipment operating the fluid dispense system according to the present invention.

1 is a schematic diagram of a dispensing apparatus to which a flow rate and fluid abnormality motion detection method according to the present invention is applied.
FIG. 2 is a schematic diagram of the flow rate change detector of FIG. 1.
3 is an overall block diagram of a flow rate and fluid anomaly detection system of the present invention.
4 is a signal flowchart of a first embodiment of a method for detecting a flow rate and fluid abnormal operation according to the present invention.
FIG. 5 is a waveform diagram illustrating synchronization of an output waveform and a trigger on period of a flow change detector.
6 is a signal flowchart of a second embodiment of a method for detecting a flow rate and fluid abnormal operation according to the present invention.
FIG. 7 is a waveform diagram illustrating receiving a teaching wave start index point from a user in the second embodiment of the present invention.
8 is an explanatory diagram of an abnormal motion detection waveform of the fluid abnormal motion detection system according to the third embodiment of the present invention.
9 is a signal flowchart of a third embodiment of a method for detecting a flow rate and fluid abnormal operation according to the present invention.
10 is a waveform diagram showing the total time required to stop at the start point of the flow flow in the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The term non-contact in the present invention refers to the manner of installing the flow rate change detector without cutting the pipe. In addition, the term non-contact in the present invention means that the fluid moving in the pipe and the flow rate changer installed outside the pipe does not directly contact each other. In the present invention, the fluid includes a liquid and a gas. Examples of the semiconductor process include photoresist (PR), thinner, flowable oxide (FOX), and nitrogen gas (N2).

1 is a schematic diagram of a dispensing apparatus to which an abnormal motion detection method according to the present invention is applied, and as shown therein, a chemical container 110, a pump 120, a filter 130, a valve 140, and a flow fluid change It consists of a detector 100 and a pipe 150.

Referring to FIG. 1, the chemical stored in the chemical (solution) container 110 is pumped by the pumping operation of the pump 120 to filter 130, the valve 140, the flow rate change sensor 100, and the pipe 150. It is dispensed into the wafer through the wafer, not in a continuous manner, but in a non-flammable form, such as an intermittent pulse. At this time, the filter 130 removes the foreign matter contained in the chemical discharged to the pipe 150, the valve 140 to control the discharged chemical supply on, off and prevent the fluid ?? force phenomenon at the end of the nozzle Suckback operation for

When any one of the pump 120, the filter 130, the valve 140 is clogged or a small change (for example, a minute pressure or vibration change) that may affect the fluid flow occurs, as shown in FIG. The flow rate change detector 100 having the structure detects the small change.

2 is a schematic view showing the structure of the flow rate change sensor 100, and as shown therein, the fluid sensor 160, the first elastic member 171 and the lower cover 181 on one side of the pipe 150 is provided. The other side of the pipe 150 is provided with a second elastic member 172 and an upper cover 182, and the upper cover 182 and the lower cover 181 are fastened by screws 183.

Referring to FIG. 2, the first elastic member 171 surrounds the fluid sensor 160 and the pipe 150. The second elastic member 172 is positioned to face the first elastic member 171 and has a form surrounding the sensing fluid sensor 110 and the pipe 150. The first elastic member 171 and the second elastic member 172 may be any material that is elastic to wrap the fluid sensor 110, alleviate the impact and properly transmit the vibration of the pipe 150.

In the above example, the first elastic member 171 and the second elastic member 172 are separated while facing each other, but they may be joined together to cover at least a portion of the pipe 150.

The load adjusting unit 184 is attached to the opposite side of the portion of the second elastic member 172 which is in contact with the pipe 150 to control the intensity of vibration transmitted to the fluid sensor 110. The load adjusting unit 184 may adjust the pressure applied to the pipe 150 and the fluid sensor 110 by, for example, a screw or a spring.

The fluid sensor 110 is located on the outside of the pipe 150 without cutting the pipe 150 and detects a vibration caused by the flow of the fluid inside the pipe 150 and converts it into an electrical signal. The fluid sensor 110 detects the vibration of the pipe 150 and the micro pressure transmitted through the pipe 150 and converts the electric signal into an electric signal. The piezoelectric device may be a piezo sensor or a vibration sensor. Can be implemented.

3 is a block diagram of a dispensing system to which a method for detecting and analyzing a flow rate and various abnormal operation states is applied based on the output signal of the flow rate change detector. 200, the interface board 300, and the abnormal operation analysis unit 400.

Referring to FIG. 3, the flow rate change detector 100 is installed outside the pipe as described in FIG. 2 to detect vibration of the pipe and output a signal accordingly.

The amplifying unit 200 amplifies and outputs a weak electric signal output from the flow rate change sensor 100 to a level suitable for processing.

The interface board 300 converts the output signal of the amplifier 200 into a digital signal suitable for processing by the abnormal operation analyzer 400 and outputs the digital signal.

The abnormal motion analysis unit 400 teaches a plurality of measurement results under various conditions based on the output signal of the interface board 300 and models it to set a reference waveform range (upper and lower limit allowable range), and then an operation mode. By comparing and analyzing the waveform range of the input signal in real time with each other, the position of the pipe having flow rate, the pressure of the fluid, the presence or absence of bubbles, or the blockage or abnormality of the pipe is derived.

Meanwhile, a method for detecting an abnormality in a flow rate of a pipe and a path of a fluid flow according to the present invention based on the same as in FIG. 3 will be described below.

4 is a process flowchart showing the first embodiment of the flow and fluid abnormality operation method of the present invention.

Referring to FIG. 4, if the current mode is a teaching mode for setting a reference waveform range, and it is determined that the teaching mode is selected, the microscopic vibration transmitted by the flow rate change sensor 100 installed in the pipe is detected, and the detection accordingly. The signal is output (S401, S402).

If it is determined that the waveform output from the flow rate change sensor 100 belongs to a preset synchronization signal section (Trigger on), if it is determined to belong to the synchronization signal section, it is determined to be a valid waveform, but if it does not belong to the synchronization signal section It is determined as an invalid waveform (eg, a noise signal) (S403 and S404).

As shown in FIG. 5, it can be seen that a series of waveforms are input before the start of the trigger-on period Ton. Since the waveforms are input before the chemical injection for the photoresist PR, the unnecessary period is not selected. As described above, the invalidation process is performed in a section other than the trigger-on section Ton. As an example of the invalidation process, the data is recorded as '0'.

There may be various types of waveforms input before the synchronization signal section Ton starts, which may include waveforms by pre-wet. Here, the pre-wet refers to a process of dissolving and removing waste gas such as ignitable gas and toxic gas generated in the manufacturing process of a semiconductor or a display device (eg, LED, LCD, etc.) by dissolving ammonia that is well dissolved in water.

In FIG. 5, the first waveform section W1 before the synchronization signal section Ton is a waveform section at pre-wet injection on, and the second waveform section W2 is a waveform section at pre-wet injection off. In FIG. 5, the first waveform section W3 in the trigger on section Ton is a waveform section when the photoresist injection is on, and the second waveform section W4 is a waveform section when the photoresist injection is off. As a result, as shown in FIG. 5, the pre-wet injection section and the actual photoresist injection section can be distinguished by ignoring the waveform before synchronization using the synchronization signal.

Subsequently, when the section of the waveform (signal) input in real time from the flow rate change sensor 100 enters the synchronization signal section Ton, the input waveform is recorded as learning (hereinafter, 'teaching') wave data. do. However, in general, since the waveform is not input immediately after entering the synchronization signal section Ton as shown in FIG. 5, but begins to be input after some time elapses, recording is started as teaching wave data from that time ( S405).

The teaching wave data is a value corresponding to the amplitude value (Y-axis value) of the waveform at the corresponding point in time, and the teaching is performed until the cumulative index count value (ICV) (the X-axis time axis value) reaches a preset limit value. The wave data recording operation is continued (S406).

Accordingly, all data for a series of teaching waves to be learned are recorded until the cumulative index count value ICV reaches a preset limit value.

Repeat the operation of recording the teaching wave data until the cumulative index count value reaches the preset value until the preset number of repetitions (N) is reached, and the teaching wave data recorded in this manner is analyzed in statistical analysis. By applying it, it is possible to increase the reliability of the teaching wave data (S407).

Thereafter, the sampling values of the teaching wave collected through the above process are statistically analyzed, the confidence interval is modeled, and the reference waveform range is set based on the modeling result, and this is used as a modeling measurement waveform (S408, S409).

Thus, if it is determined that the current mode is the teaching mode for setting the reference waveform range, and it is determined that the teaching mode is not the teaching mode, the current mode is determined as the operation (operation) mode, and the fluid flow state currently transmitted from the flow rate change detector 100 is determined. The waveform is compared with the reference waveform range, and an alarm for notifying occurrence of abnormal operation is output or a control signal is output based on the comparison result (S410 and S411).

Examples of the abnormal operation occurrence include flow rate, abnormal flow of fluid, abnormal operation of pumps, filters, valves, and the like, and bubble generation.

There may be various methods for determining the abnormal operation occurrence condition. As a first embodiment for determining the occurrence of the abnormal operation, the actual wave data input after recognizing the synchronization signal are compared with the reference waveform range data, respectively, and the mismatch value (mismatch rate MMC) is calculated as follows. 1], and if the value is more than the reference value, it is determined that an abnormal operation occurs.

Where MMR: Miss Match Rate (MMR)

Miss Match Count (MMC) means that the actual wave data does not belong to the reference waveform range of the corresponding modeling measurement.

The actual flow rate calculation is as follows:

  Flow rate (Rf) = standard flow rate (ref) * T2 / T1

    Rf: current actual flow, ref: standard flow learned

    T1: Total time spent trained (modeled) (measured at the beginning of the flow flow (M1)

        Time to stage M2 (time 1))

    T2: The actual flow signal waveform to be modeled and measured, at the beginning of the flow flow (M1).

        Total travel time up to stage M2 (see Figure 10)

In order to more accurately determine the occurrence of the abnormal condition condition operation, the first waveform section W3 in the synchronization signal section Ton is divided into the actual dispense waveform by utilizing various variables detected through the writing process of the teaching wave data. A process of checking for a match may be added.

As a first embodiment of the matching check process, the number of mounts of the currently detected waveform is counted and compared with the number of mounts of the reference waveform stored in the teaching mode. As a result of the comparison, if the currently detected waveform is determined to be part of the dispense waveform (waveform related to the intermittent flow rate), the corresponding waveform is matched with the mount of the reference waveform to compare the waveform.

As a second embodiment of the matching check process, with respect to the currently detected waveform and the reference waveform, the start of the first waveform section W3 and the second waveform section W4 in the synchronization signal section Ton, respectively. The distance value to the end is compared, and the pre-wet (invalid waveform) section and the photoresist injection section (effective waveform) for the currently detected waveform are distinguished based on the comparison result. The second waveform section shows an example of the last waveform section of the reference waveform. The second waveform section is not limited to the second waveform section and can be extended to more waveform sections.

As a third embodiment of the matching check process, comparing the currently detected waveform with the reference waveform, if it is determined that the next waveform of the first waveform section (W3) is shifted, and shifted by the corresponding distance in the opposite direction shifted It converts into injection volume cc as much as it shifted.

6 is a signal flowchart illustrating a second embodiment of a method for detecting a flow rate and fluid abnormal operation according to the present invention.

Referring to FIG. 6, if it is determined that the current mode is a teaching mode for setting a reference waveform range, and the teaching mode is determined, teaching output modeling of the output signal of the flow rate change detector 100 is performed in real time (S601 and S602).

In this embodiment, rather than using a preset synchronization signal (T-on) section as in the first embodiment, the user is to designate the synchronization section directly.

To this end, the teaching wave data of the entire section including the invalid (pre-wet) section and the valid (photoresist) section is recorded for the first teaching wave, and the teaching wave of the entire section is displayed as shown in FIG. In operation S603, the user may designate a teaching wave start index point on the teaching wave of the entire interval.

Subsequently, the second teaching wave data to be input is subjected to waveform validity checking and passes to the next step (S607) if it passes, and proceeds to the second step (S602) if it does not pass (S604-S606).

There may be various types of the waveform validation. As a first example of the waveform validity check, a period of the first teaching wave is examined to select a teaching wave of one period (eg, a positive period) from among the teaching waves inputted as a positive period and a negative period.

As a second example of the waveform validity check, the number of mounts of the waveform section (section A in FIG. 8) first appearing from the teaching wave start index point is detected and compared with the number of mounts of the corresponding section of the first teaching wave. The validity of the waveform is determined based on the comparison result.

As a third example of the waveform validation, the interval between the first waveform section (section A in FIG. 8) and the second waveform section (section C in FIG. 8) appearing from the teaching wave start index point (section B in FIG. 8) ) Is compared with the distance of the corresponding section of the first teaching wave to determine the validity.

As a fourth example of the waveform validity check, the number of mounts of the second waveform section (C section in FIG. 8) that appears from the teaching wave start index point is detected and compared with the number of mounts of the corresponding section of the first teaching wave, The validity of the waveform is determined based on the comparison result.

Thereafter, the start point Sn and the end point En of each waveform section are searched and the number of mounts is counted, and the teaching wave currently input is synchronized with the first teaching wave based on the search result and the count number. (S607, S608).

Subsequently, the teaching wave data arranged as described above is recorded until the cumulative index count value reaches a preset limit value, and the recording operation of the teaching wave data is recorded at a preset repetition frequency (eg, N = 10 times). By repeating until it reaches, it is possible to secure the reliability of the teaching wave data (S604, S606-S609).

When the above-described writing operation of the teaching wave data is completed, the maximum and minimum values of the teaching wave data in the same index are searched, and the reference waveform range is set (modeled) based on the search result (S610, S611).

Thereafter, various comparison variables for use in an operation mode in which the fluid dispense system is actually operated are detected (S612).

,

),(

,

)의 인덱스 평균치 등이 있다. As an example of the various comparison variables, the average value of each waveform section (A, B, C section in Fig. 8) appearing after the teaching wave start index point, the average value of the index of each mount, the first appearing after the teaching wave start index point The average number of mounts of the first waveform section A and the second waveform section B, and the start and end points of the respective waveform sections (A and C sections in FIG.

,

), (

,

Index mean value).

However, it is determined whether the current mode is the teaching mode for setting the reference waveform range, and the operating mode is determined if the current mode is not the teaching mode. When the comparison result is an alarm generation condition, an alarm is generated so that the user can take appropriate measures (S613, S614).

Examples of the abnormal operation occurrence conditions include occurrence of abnormal flow rate, fluid flow, abnormal operation of a pump, a filter, a valve, and the like.

There may be various methods for determining the abnormal operation occurrence condition, and an embodiment thereof may include the method of the first embodiment.

In addition, in order to more accurately determine the abnormal operation occurrence condition, the first waveform in the trigger-on period (Ton) by using various variables detected through the writing process of the teaching wave data as in the first embodiment The process of checking whether the section W3 matches the actual dispensing (pulse flow rate) waveform may be included.

9 is a signal flowchart illustrating a third embodiment of a method for detecting a flow rate and fluid abnormal operation according to the present invention.

The third embodiment of the present invention is to allow the user to easily set and operate the reference waveform range when the environment of the operation mode is different from that of the teaching mode after the product is sold and the accuracy of alarm occurrence is low. .

In comparison with FIG. 9, in FIG. 6, in step S603 of FIG. 6, the teaching wave of the entire section is displayed and the user designates the teaching wave start index point on the teaching wave of the entire section. In step 3 (S903) of 9, as shown in step 3 (S403) of FIG. 4, if it is determined that the current real-time monitoring section belongs to a preset trigger on section, and is determined not to belong to the sync signal section, it is currently input. The difference is that the teaching wave data is 'invalidated' and enters the synchronization signal section, and then proceeds to the next step to determine the teaching wave data input as valid.

Although the preferred embodiment of the present invention has been described in detail above, the scope of the present invention is not limited thereto, and may be implemented in various embodiments based on the basic concept of the present invention defined in the following claims. Such embodiments are also within the scope of the present invention.

100: flow rate change detector 200: amplifier
300: interface board 400: abnormal operation analysis unit

Claims (20)

(a) In teaching mode, when writing the teaching wave data by monitoring the output signal of the flow change detector installed in a non-contact structure to the fluid flowing in the pipe, invalidating the teaching wave data input until the preset synchronization signal section is reached. Determining the validity of the step;
(b) When the recording section of the teaching wave data enters the preset synchronization signal section, the teaching wave data is recorded until a cumulative sampling value reaches a preset value, and the recording operation of the sampling learning data is previously recorded. Learning to repeat until the set number of repetitions is reached;
a reference waveform range setting step of statistically analyzing a sampling value collected through the teaching wave data recording operation, modeling a reliable range, and setting the reference waveform range as a reference waveform range;
(d) in the operation mode, detects the output signal of the flow rate change detector and compares the detection result with the reference waveform range, and detects the flow rate discontinuously supplied through the pipe based on the comparison analysis result; Alarm generation step of generating an alarm by determining whether there is an abnormality on the fluid flow path; Flow rate and abnormal operation detection method of the fluid dispense system comprising a.
The method of claim 1, wherein the step immediately preceding the synchronization signal section in step (a) includes an invalid (pre-wet injection) section.
The method of claim 1, wherein the flow rate change detector comprises a piezoelectric sensor that detects a vibration state caused by a minute fluid flow in a pipe.
2. The fluid dispense of claim 1, wherein the teaching wave data recorded in step (b) until the cumulative sampling value reaches a preset value includes all data for a series of teaching waves to be taught. How to detect flow and abnormal operation of the system.
The method of claim 1, wherein the condition for generating the alarm in step (d) includes at least one or more of a flow rate, an abnormal occurrence of a fluid flow, an abnormal operation such as a pump, a filter, a valve, and the like. Method for detecting the flow rate and abnormal operation of the fluid dispense system.

The method for detecting a flow rate and abnormal operation of a fluid dispense system according to claim 1, wherein in the step (d), the following equation is used to determine whether there is an abnormality in the fluid flow path.

Here, MMR: mismatch rate, MMC: the number of times the actual wave data does not belong to the reference waveform range.
The method of claim 1, wherein step (d) further comprises a step of checking whether the first waveform section in the synchronization signal section matches the output waveform of the actual flow rate change detector. Abnormal operation detection method.
The method of claim 7, wherein the checking of whether the first waveform section in the synchronization signal section matches the output waveform of the actual flow rate change detector comprises counting the number of mounts of the currently detected waveform to determine the reference waveform stored in the teaching mode. Comparing the number of mounts, and comparing the corresponding mounts with the mounts of the reference waveform if the current detected waveform is determined to be a part of the output waveform of the flow change detector. How to detect the flow rate and abnormal operation of the dispense system.
The method of claim 7, wherein the checking whether the first waveform section in the synchronization signal section matches the waveform of the actual flow rate change detector comprises: the first waveform section in the trigger-on section with respect to the currently detected waveform and the reference waveform. Comparing the distance values from the beginning of the signal to the end of the second waveform section, and distinguishing the invalid (pre-wet) section and the effective (photoresist) injection section for the currently detected waveform based on the comparison result. Flow rate and abnormal operation detection method of the fluid dispensing system comprising a.
The method of claim 7, wherein the checking of whether the first waveform section in the synchronization signal section matches the output waveform of the actual flow rate change detector comprises: comparing the currently detected waveform with a reference waveform to the next waveform section. If it is found to be shifted, shifting by the corresponding distance in the shifted opposite direction and converting it to injection capacity as shifted.
(a) In the teaching mode, the output signal of the flow change detector installed in a non-contact structure to the fluid flowing in the pipe is collected, and the signal invalid (pre-wet) determination section and the signal valid (photoresist) section are performed for the first series of teaching waves. A synchronization section setting step of displaying a teaching wave of the entire section including a and allowing a user to designate a teaching wave start index (starting point) point on the teaching wave of the entire section;
(b) When the teaching wave data inputted from the flow rate change detector passes the waveform validity test, the teaching wave data is recorded until the cumulative index count value reaches a preset limit value. A sampling step of repeating the recording operation until the preset repeat count is reached;
(c) a reference waveform range setting step of statistically analyzing the sampling values collected by the sampling collection step and modeling a reliable range to set the reference waveform range ;
(d) In the operation mode, the output signal of the flow rate change sensor is monitored to compare and measure the teaching wave data according to the reference waveform range data, and to detect the flow rate or determine whether there is an abnormality in the fluid flow path based on the comparison measurement result. Alarm generation step of generating an alarm by determining; flow rate and abnormal operation detection method of the fluid dispensing system comprising a.
12. The method of claim 11, wherein the phase flow rate change detector in step (a) is a detector installed outside the pipe to detect vibration of the pipe and output a signal according to the phase flow change detector. .

12. The method of claim 11, wherein step (b) searches for a start point and an end point of each waveform section and counts the number of mounts, and a teaching wave currently input based on the search result and the count number is the first teaching wave. And aligning in synchronization with the flow rate and abnormal operation of the fluid dispense system.
12. The method of claim 11, wherein when performing the waveform validity test of step (b), selecting a teaching wave of one of the teaching waves inputted as the positive period and the negative period by inspecting the period of the first teaching wave. A method for detecting flow rate and abnormal operation of a fluid dispense system.
12. The method of claim 11, wherein when performing the waveform validity test of step (b), the distance between the first waveform section and the second waveform section that appears from the teaching wave start index point is determined by the corresponding section of the first teaching wave. The flow rate and abnormal operation detection method of the fluid dispensing system, characterized in that for determining the validity compared to the distance.
12. The method of claim 11, wherein when performing the waveform validity test of step (b), the number of mounts of the second appearing waveform section is detected from the teaching wave start index point and compared with the number of mounts of the corresponding section of the first teaching wave. And detecting the validity of the waveform based on the comparison result.
12. The method of claim 11, wherein step (c) is a comparison variable to be used in the operation mode, wherein an average value of each waveform section after the teaching wave start index point, an average value of each mount index, and a first waveform appearing after the teaching wave start index point are generated. And obtaining at least one of an average number of mounts of the interval and the second waveform interval, and an index average value of the start point and the end point of each waveform interval.
12. The fluid dispensing according to claim 11, wherein the alarm generation condition of step (d) includes at least one of a flow rate, an abnormal flow of a fluid, an abnormal operation of a pump, a filter, a valve, and the like, and a bubble is generated. How to detect flow and abnormal operation of the system.
12. The method for detecting a flow rate and abnormal operation of a fluid dispense system according to claim 11, wherein the following [mathematical formula] is used to determine an alarm occurrence condition in step (d).

Where MMR: Miss Match Rate (MMR)
Miss Match Count (MMC): Inconsistent count value
(a) In the teaching mode, when collecting the output signal of the flow rate changer installed in a non-contact structure to the fluid flowing in the pipe, invalidating the input data until entering the preset synchronization signal section, and then input the teaching wave data A validity judgment step of starting to record the data as valid data;
(b) recording the teaching wave data which is determined to be valid data and inputting until the cumulative index count value reaches a preset limit value, and the learning operation of the teaching wave data data reaches a preset number of repetitions; Repeating learning;
(c) a reference waveform range setting step of statistically analyzing sampling values collected through the learning step, modeling a confidence interval, and setting a reference waveform range based on this;
(d) In the operation mode, detect the output signal of the flow rate change detector and compare and analyze the teaching wave data according to the reference waveform range data, and detect the flow rate or determine an alarm occurrence condition based on the result and generate an alarm. Alarm generation step of generating; flow rate and abnormal operation detection method of the fluid dispensing system comprising a.

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