KR20110048000A - Uncut flow change detector and dispensing system including the same - Google Patents

Abstract

PURPOSE: A non-cutting flow-rate sensor and a dispensing system comprising the same are provided to sense the flow of fluid by vibration applied to a pipe in a state the sensor does not make contact with the fluid. CONSTITUTION: A non-cutting flow-rate sensor(100) comprises a sensor(110), an amplifying unit(120), and an abnormal-waveform analyzing unit(130). The sensor is located outside a pipe. The sensor senses the vibration according to the flow of fluid in the pipe to convert it to an electrical signal. The amplifying unit amplifies the electrical signal. The abnormal-waveform analyzing unit receives the amplified electrical signal from the amplifying unit and analyzes at least one of the change of the amount of fluid or the flow of the fluid. The abnormal-waveform analyzing unit analyzes the amount of the fluid, the pressure of the fluid, the generation of bubble, or the flow of the fluid.

Description

Non-cutting Type Flow-rate Detector And Dispensing System Including The Same}

The present invention relates to a non-cutting flow rate change detector and a dispensing system including the same. Specifically, a non-cutting flow rate change detector which is installed outside the pipe without cutting the pipe and detects an abnormality of the flow rate and the fluid flow, and the same A dispensing system is included.

Referring to Korean Patent Laid-Open Publication No. 10-2009-0047052, the flow rate change detector is installed directly on a flow path through which a fluid flows to detect a flow rate. As such, when the flow rate change detector is installed inside the pipe and configured to detect the flow of the fluid, there are problems such as corrosion of the detection sensor by the fluid and contamination of the fluid by the detection sensor.

In addition, in order to install the sensor inside the pipe, it is necessary to cut the pipe and install the sensor inside the pipe, or connect the pipes again after installing the sensor in the pipe that has already been cut. The installation process is very cumbersome.

The technical problem to be achieved by the present invention is installed outside the pipe without cutting the pipe, non-cutting flow sensing sensor for detecting the flow of the fluid by the vibration applied to the pipe in a non-contact state with the fluid and dispensing having the same It is to provide a system.

Non-cutting flow rate change sensor according to the present invention for achieving the technical problem is located on the outside of the pipe, the sensing sensor 110 for detecting the vibration according to the flow of the fluid inside the pipe to convert into an electrical signal; And an amplifier 120 for amplifying the electrical signal.

Non-cutting flow rate change sensor according to the present invention comprises a buffer layer that receives the vibration of the pipe in contact with the pipe from the outside of the pipe; A pickup in contact with the buffer layer to convert vibrations received from the buffer layer into an electrical signal; And an amplifier configured to receive and amplify the electrical signal.

The dispensing system according to the present invention includes a pump 320 for pumping fluid from a storage vessel 310; A filter 330 for removing contaminants from the fluid; A valve 340 for adjusting the amount of fluid; And a flow rate change detector 100 which detects an amount of flow of the fluid by contacting the pipe 350 through which the fluid flows, and detects an abnormal operation of the pump, the filter, or the valve.

The flow rate change sensor according to the present invention does not come into contact with the fluid and is installed outside the pipe to prevent corrosion of the flow rate change sensor or contamination of the fluid generated in the prior art, so that the detection characteristics of the sensor are improved, It has the effect of increasing the lifespan.

In addition, the present invention is constructed by constructing and modeling the data on the characteristics of the pipe oscillation when the fluid flows in advance and then modeling and comparing the real-time vibration to the flow rate, the pressure of the fluid, the presence of bubbles and the configuration that the pipe passes Not only can you measure, check, or predict the abnormal operation of parts, but you can also know the position of the pipe with abnormality only by looking at the waveform outputted to the abnormal waveform analysis unit. It can work.

In addition, the dispensing system including the flow rate change sensor according to the present invention can determine whether there is an abnormality by comparing the pump operation, valve operation, filter clogging and the like with the modeled normal waveform.

In addition, the present invention is provided with an alarm sound generating device has the effect that the user can immediately determine whether the abnormal flow of the fluid even if the user hears only the alarm sound in the proximity of the dispensing system.

1 illustrates an embodiment of an uncut flow rate change detector according to the present invention.
2a to 2i show the three-dimensional shape of the sensor shown in FIG.
3A to 3F show the three-dimensional shape of the second embodiment of the sensor shown in FIG. 1.
4A to 4C illustrate waveform graphs observed in the abnormal waveform analyzer shown in FIG. 1.
5A to 5E illustrate another waveform graph observed in the abnormal waveform analyzer shown in FIG. 1.
Figure 6 illustrates one embodiment of a dispensing system to which a non-cutting flow change detector according to the present invention is applied.

Hereinafter, with reference to the accompanying drawings to describe the present invention in more detail.

1 illustrates an embodiment of an uncut flow rate change detector according to the present invention.

The non-cut flow rate change detector shown in FIG. 1 includes a detection sensor 110, an amplifier 120, and an abnormal waveform analyzer 130.

In the present invention, the term non-cutting means a method of installing a flow rate change detector without cutting a pipe. In addition, the term non-contact in the present invention means that the fluid moving in the pipe and the flow rate changer installed outside the pipe does not directly contact each other.

In the present invention, the fluid includes a liquid and a gas. Examples of the semiconductor process include photoresist (PR), thinner, flowable oxide (FOX), and nitrogen gas (N2).

The detection sensor 110 is located outside of the pipe without cutting the pipe, and detects the vibration according to the flow of the fluid inside the pipe and converts it into an electrical signal.

For example, the sensing sensor 110 may use a piezoelectric element (piezo sensor), an infrared sensor, or the like shown in FIG. 1, and means a means capable of detecting vibration and converting it into an electrical signal.

The material of the pipe is, for example, polymer, plastic, metal, rubber, or the like.

The amplification unit 120 amplifies and outputs the abnormal waveform analysis unit 130 because the magnitude of the electric signal transmitted from the detection sensor is weak.

The abnormal waveform analysis unit 130 receives the electrical signal transmitted from the amplification unit 120 and analyzes the data with the pre-modeled data to determine the position of the pipe in which there is an abnormality in the flow of the fluid, the presence of bubbles, the flow rate and the fluid. Pressure can be sensed.

Although not shown in FIG. 1, an interface board is installed between the amplifier 120 and the abnormal waveform analyzer 130. The main board controls the interface board with a solenoid valve trigger signal, thereby storing the interface board. Only when the chemical is dispensed to the wafer through the pipe, the abnormal waveform analyzer 130 may perform the waveform analysis operation as described above.

4A to 4C, the anomaly waveform analyzer 130 data-processes a plurality of measurement results according to various conditions, and models or processes data of a waveform range that is an extracted reference. Includes features The abnormal waveform analysis unit 130 compares and analyzes the electric signal input from the amplifier 120 in real time with a reference waveform range in real time, the flow rate flowing through the pipe, the pressure of the fluid, the presence of bubbles or clogging of the pipe Or the position of the abnormal pipe is derived.

The abnormal waveform analysis unit 130 extracts a mean waveform and a reference waveform range having no abnormality in the flow of the fluid from values measured several times in the normal state of the fluid flow, and a signal input in real time exceeds or falls short of the reference range. The apparatus may further include an abnormal signal notification device for notifying that the abnormal state.

The reference waveform range allows a predetermined deviation voltage (ΔV) or a predetermined deviation time (Δt) at which the flow of the fluid is determined to be normal from a value obtained by accumulating and averaging the waveforms for detecting the flow of the flow rate.

Here, the deviations are, for example, the peak voltage of the waveform, a time delay from a normal waveform, or the like.

In addition, the flow rate change sensor according to the present invention may be provided with an elastic member for mitigating the impact transmitted to the detection sensor 110, the elastic member may be a plurality of (151, 152).

The first elastic member 151 has a form surrounding the detection sensor 110 and the pipe. The second elastic member 152 is positioned to face the first elastic member 151 and has a form surrounding the detection sensor 110 and the pipe. The first elastic member 151 and the second elastic member 152 may be any material having an elastic material that surrounds the sensing sensor 110 to mitigate impact and appropriately transmit vibration of the pipe.

In addition, the present invention may further include a load control unit 160 is attached to the opposite side of the portion of the second elastic member 152 in contact with the pipe to adjust the intensity of vibration transmitted to the detection sensor 110. have. The load adjusting unit 160 may adjust the pressure applied to the pipe and the detection sensor by, for example, a screw or a spring.

In addition, the flow rate change detector according to the present invention includes an upper cover 172 and a lower cover 171, which are outer cases of the detection sensor 110, the first elastic member 151, and the second elastic member 152. Equipped. The upper cover 172 and the lower cover 171 are fastened by a screw 170. The flow rate change sensor according to the present invention can be easily detached from the pipe by the screw 170.

In the above example, the first elastic member and the second elastic member are separated while facing each other, but they may be joined together to surround at least a part of the pipe.

2A to 2G illustrate three-dimensional shapes in multiple angles of the sensor shown in FIG. 1.

The sensing sensor illustrated in FIGS. 2A to 2G includes a piezoelectric element 110, a first elastic member 151, a second elastic member 152, an upper cover 172, a lower cover 171, and a load adjuster 160. ) And screw 170. For a description of each component, refer to the detailed description of FIG. 1.

2H and 2I illustrate an example in which the upper cover 172 and the lower cover 171 are fastened with fasteners and fastening protrusions, and fasteners 174 having fastening grooves formed at both sides of the top cover 172. And a fastening protrusion 175 coupled to the fastening groove of the fastener 174 on both side surfaces of the bottom cover 171. The fastener 174 and the fastening protrusion 175 are fastened as shown in FIG. 2I by lightly pressing the inner surfaces of the upper cover 172 and the lower cover 171. The number of installation of the fastener 174 and the fastening protrusion 175 is not particularly limited, and the present embodiment shows an example in which four are installed on each side. The fasteners 174 and the fastening protrusions 175 may be formed of a material (eg, plastics) that does not easily break and has a slight elastic force.

3A to 3F show the three-dimensional shape of the second embodiment of the sensing sensor shown in FIG. 1.

The sensing sensor illustrated in FIGS. 3A to 3F includes a buffer layer 191, a pickup 192, an elastic member 153, and a cover 173, which is an outer case.

The buffer layer 191 protects the pipe 140 and transmits vibrations of the pipe 140 to the pickup 192. As shown in FIG. 3A, the buffer layer 191 preferably has a shape surrounding at least a portion of the pipe 140. In addition, the buffer layer 191 may be implemented with a hard material such as metal or plastic.

The pick-up 192 (pickup) is formed in the shape of a pointed tip like a needle and in contact with the buffer layer 191, converts the vibration received from the buffer layer 191 into an electrical signal.

The elastic member 153 supports the pickup 192 and appropriately controls the vibration from the pipe and mitigates the impact. The elastic member 153 may be any elastic material.

The cover surrounds the elastic member 153 to form an outer case.

Compared to FIG. 1, the sensing sensor illustrated in FIGS. 3A to 3F is different in that the sensing sensor 110 of FIG. 1 is replaced with the buffer layer 191 and the pickup 192.

The electrical signal is transferred to an amplification unit (not shown in FIGS. 3A to 3F, see FIG. 1) through the lead wire 181 and amplified. After that, the waveform is analyzed by the abnormal waveform analysis unit (not shown in FIGS. 3A to 3F, see FIG. 1), and the flow rate flowing into the pipe 140, the pressure of the fluid, the presence or absence of bubbles, and the Detect the position of the pipe 140 is clogged or abnormal.

4A to 4C show waveforms observed in the present invention as shown in FIG. 1 and will be described in detail below.

FIG. 4A is a waveform observed when a fluid flow is steady-state, for example, in a pipe.

FIG. 4B shows the waveform of FIG. 4A superimposed on the waveform when abnormal flow of fluid is observed, and then only the peak portion is enlarged. Several waveforms in a steady state are accumulated. Such abnormal waveforms are observed when an abnormal situation occurs such as bubbles in the pipe or a flow of fluid in the pipe is momentarily interrupted. The abnormal waveform always deviates from the accumulated waveform in the steady state, which can be recognized by the difference in peak voltage or the delay of the voltage waveform itself. For example, as shown in FIG. 4B, the peak value of the waveform accumulated in the steady state is about 4V, but the peak value of the abnormal waveform is about 4.5V, and the difference is about 0.5V. This difference is large enough to readily indicate that the fluid flow in the piping is abnormal.

On the other hand, even in the time axis, the steady state accumulation waveform and the abnormal state waveform are different from each other. For example, a steady-state waveform slightly exceeds 160ms at the point of crossing 2.0V. However, the non-steady waveform has a time value of about 165 ms at the 2.0 V intersection point, which is also large enough to easily indicate that the fluid flow in the pipe is abnormal.

Naturally, such a voltage difference or time difference may vary depending on how much the vibration transmitted from the sensor is properly amplified, and also depends on the type of abnormality occurring in the pipe.

On the other hand, it was found by the researchers of the present invention that even when the steady-state flow rate in the pipe is different, it is shown by way of example in Figure 4c. 4C is a waveform observed when a flow rate of about 0.8 cc to 1.2 cc per second is flowed in a pipe with a difference of 0.2 cc. The entire section is a high pulse wave section (①) having a relatively large amplitude and an impulse shape, a flat section (②) without a pulse wave, and a low pulse wave section having a predetermined time difference between pulses with a relatively small amplitude (③). ). The low pulse wave section ③ is a flow rate change section by a suck back valve operation, and in each case where the flow rate changes, it can be seen that the waveform is also delayed along the time axis when the flow rate increases. In the present invention, the low pulse wave section ③ is subdivided, and these are compared with the initial teaching value to obtain a delay amount, and the flow rate is calculated based on the delay amount and converted into cc. For reference, each pulse of the low pulse wave section ③ may be based on one of a minimum waveform, a maximum waveform, and an average waveform, but is preferably based on an average waveform. It was set as. On the basis of the waveform of the low pulse wave section ③, the flow rate can be measured even without directly contacting the pipe, and it becomes the basis for determining the abnormality even when the flow rate gradually changes.

A detailed example of the abnormal waveform analysis unit 130 determining an abnormal state of a fluid flow in a pipe based on an electrical signal input through the path will be described below with reference to FIGS. 5A to 5E.

FIG. 5A illustrates a teaching waveform under a normal condition, and it can be seen that the waveform is similar to that of FIG. 4C. Based on this waveform, when the waveforms included in the preset management upper limit and the management lower limit are input, it is determined as a normal state.

FIG. 5B shows a waveform that completely deviates from the teaching waveform of the normal condition of FIG. 5A. When such a waveform is input, it is determined that a bubble is generated.

FIG. 5C illustrates a waveform for determining whether a pump is idle in a state in which a photoresist PR is not supplied to a pump in-let, and FIG. 5D shows an enlarged high pulse wave section in FIG. 5C. It is displayed. That is, when the amplitude of the waveform of the high pulse wave section of the waveform of the electrical signal input through the path under the above conditions is determined to be a predetermined value or more, it is determined that the pump is rotating in a normal state. However, when the amplitude of the waveform of the high pulse wave section is much smaller than a predetermined value, it is determined that the pump is idle.

Fig. 5E is a waveform diagram showing a suck back valve abnormal state. That is, when a waveform of a shape such as noise is mixed in the low pulse wave section, it is determined that the fluid flow is abnormal due to abnormal seat back valve.

Figure 6 illustrates one embodiment of a dispensing system to which the flow rate change sensor 100 according to the present invention is applied.

The dispensing system shown in FIG. 6 is comprised of a chemical vessel 310, a pump 320, a flow rate change detector 100, a filter 330, a valve 340, and a pipe 350.

The pump 320 pumps the chemical until the chemical stored in the chemical container 310 is dispensed to the wafer through the pipe 350, the filter 330 for removing contaminants from the chemical, and a valve for controlling the amount of chemical. Pass 340. If there is a blockage in one of the pump 320, the filter 330, and the valve 340, a problem may occur in the flow of the chemical.

This may determine which part of the pump 320, the filter 330 or the valve 340 is abnormal according to the shape of the waveform output to the abnormal waveform analysis unit of the present invention.

 Of course, when the abnormality of each component occurs, the vibration waveform transmitted to the pipe is measured and modeled in advance.

For example, a difference between the first waveform when a part of the filter 330 is cut off and other components are normal and the second waveform when a part of the valve 340 is cut off and other components are normal. It is possible to know whether there is a blockage in the filter 330 or a blockage in the valve 340. This difference appears more accurately as the waveform of the steady state detected by the pipe 350 is repeatedly measured several times.

Although the flow rate change detector shown in FIG. 6 is provided at one end of the valve 340, the flow rate change sensor according to the present invention is not limited thereto, and may be provided at an appropriate position.

As described above, the flow rate change sensor according to the present invention can not only prevent the contamination of the flow rate change sensor or the contamination of the fluid by contacting the pipe surrounding the fluid without directly contacting the fluid. The detection characteristic of the is improved, and the life of the flow change detector is increased.

In addition, the present invention can predict the magnitude of the flow rate flowing through the pipe by making the data by modeling having a database of the flow rate, the pressure of the fluid, the presence of bubbles or the abnormal operation of the components passing through the pipe, etc. Since the position of the pipe can be seen only by looking at the waveform output to the abnormal waveform analysis unit 130, there is an effect that can quickly derive the cause when a problem of fluid flow occurs.

In addition, the present invention is provided with an alarm sound generating device has the effect that the user can immediately determine whether the abnormal flow of the fluid even if the user hears only the alarm sound in the proximity of the dispensing system.

The technical spirit of the present invention has been described above with reference to the accompanying drawings, but the present invention has been described by way of example and is not intended to limit the present invention. In addition, it is obvious that any person skilled in the art to which the present invention pertains can make various modifications and imitations without departing from the scope of the technical idea of the present invention.

Claims (19)

Located in the outside of the pipe, the sensing sensor 110 for detecting the vibration according to the flow of the fluid inside the pipe to convert into an electrical signal; And
Non-cutting flow rate change detector having an amplifier for amplifying the electrical signal (120).
The method of claim 1,
Non-cutting flow rate change, characterized in that it further comprises an abnormal waveform analysis unit 130 for receiving at least one of the change in the amount of the fluid or the flow of the fluid received the amplified electrical signal from the amplification unit sensor.
The method of claim 2,
The abnormal waveform analysis unit 130,
By comparing and analyzing the steady state waveform and the electrical signal input from the amplifying unit in real time from the collection of data which is the result of repeatedly measuring the vibration of the fluid in the pipe, the amount of the fluid, the pressure of the fluid, and the bubble Non-cutting flow rate change detector, characterized in that the analysis of the occurrence or abnormality of the flow of the fluid.
The method of claim 3, wherein
The abnormal waveform analysis unit 130,
Non-cutting flow rate change detector, characterized in that the delay amount of the pulse in the low pulse wave section of the electrical signal input from the amplification unit based on the initial teaching value, the flow rate is calculated based on the delay amount.
The method of claim 3, wherein
The abnormal waveform analysis unit 130,
And a non-cut flow rate change detector which determines that bubbles are generated when the waveform of the electrical signal input from the amplifier in real time deviates from the upper and lower management limits of the teaching waveform.
The method of claim 3, wherein
The abnormal waveform analysis unit 130,
If the amplitude of the waveform of the high pulse wave section of the electrical signal input in real time from the amplifying unit in a state where the photoresist is not supplied to the pump inlet is much smaller than a certain value, it is determined that the pump is idle. Non-cutting flow change sensor.
The method of claim 3, wherein
The abnormal waveform analysis unit 130,
Non-cutting flow rate change detector, characterized in that it is determined that the abnormal flow flow occurs when the waveform of the shape, such as noise is mixed in the low pulse wave section of the electrical signal input in real time from the amplifier.
The method of claim 3, wherein
The abnormal waveform analysis unit 130,
Non-cutting flow change detector, which operates only when the chemical stored in the chemical container is dispensed to the wafer through the pipe under the control of the main equipment.
The method of claim 1,
Non-cutting flow rate change sensor further comprises a load control unit for adjusting the transmission degree of the vibration transmitted from the pipe to the detection sensor.
The method of claim 1,
Non-cutting flow rate change sensor further comprises an elastic member for appropriately adding or subtracting vibration transmitted to the detection sensor.
The method of claim 10,
The elastic member includes a first elastic member in close contact with the detection sensor; And
Non-cut flow rate sensor, characterized in that provided with a second elastic member provided to face the first elastic member.
The method of claim 11,
A bottom cover forming an outer case surrounding the first elastic member; And
And a top cover to form an outer case surrounding the second elastic member.
The method of claim 12,
And a screw for fixing the top cover and the bottom cover. The method of claim 12,
Non-cutting flow change detector further comprises a fastener and a fastening protrusion for fixing the top cover and the bottom cover. A buffer layer in contact with the pipe from the outside of the pipe to receive the vibration of the pipe;
A pickup in contact with the buffer layer to convert vibrations received from the buffer layer into an electrical signal; And
Non-cutting flow rate change detector having an amplifier for receiving and amplifying the electrical signal.
The method of claim 15,
The non-cutter type analysis unit further includes an abnormal waveform analysis unit 130 which receives the electrical signal amplified from the amplification unit and analyzes at least one or more of the change in the flow of the fluid or the abnormal flow of the fluid. Flow change detector.
The method of claim 15,
And an elastic member (153) for supporting the pickup to mitigate the impact transmitted to the pickup.
A pump 320 for pumping fluid from the storage vessel 310;
A filter 330 for removing contaminants from the fluid;
A valve 340 for adjusting the amount of fluid; And
Dispensing, characterized in that it comprises a flow rate change detector 100 for detecting the amount of flow of the fluid in contact with the fluid flow pipe 350, the abnormal operation of the pump, the filter or the valve system.
The method of claim 18,
The flow rate change detector 100,
The amount of the fluid, the pressure of the fluid, by comparing and analyzing the electrical signal input from the amplifier in real time with the steady-state waveform modeled from the collection of data that is the result of repeatedly measuring the vibration of the fluid flow in the pipe; Dispensing system, characterized in that detecting the presence of bubbles or abnormal flow of the fluid.

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