WO2012154029A1 - Système détecteur de gaz - Google Patents

Système détecteur de gaz Download PDF

Info

Publication number
WO2012154029A1
WO2012154029A1 PCT/MY2012/000093 MY2012000093W WO2012154029A1 WO 2012154029 A1 WO2012154029 A1 WO 2012154029A1 MY 2012000093 W MY2012000093 W MY 2012000093W WO 2012154029 A1 WO2012154029 A1 WO 2012154029A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
sensing system
micro
channel
diffuser
Prior art date
Application number
PCT/MY2012/000093
Other languages
English (en)
Inventor
Hing Wah Lee
Bin Othman Masuri
Wahab Bin Abdullah Abdul
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Publication of WO2012154029A1 publication Critical patent/WO2012154029A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS

Definitions

  • the present invention relates to a gas sensing system and more particularly to a miniaturized gas sensing system that draws gas sample from an environment in multiple directions for gas detection.
  • a gas sensing system requires good contact of gas particles with a sensing element.
  • a gas sensing system often draws a gas sample from an environment by either allowing the gas sample naturally flow towards the sensing element or pumping the gas sample from the environment in a single direction to the sensing element. Examples of such gas sensing system are disclosed in US Patent Application No. 2009/0151429 and US Patent No. 7,495,300.
  • US Pat. Appln. No. 2009/0151429 relates to a micro gas sensor which includes: a substrate; an open cavity and electrode pad separation grooves formed on the substrate; a plurality of electrode pads formed on an upper portion of the substrate and electrically insulated from each other by the electrode pad separation grooves; a micro heater connected to a plurality of the electrode pads by a bridge structure and suspended on the open cavity; a plurality of sensing electrodes formed on the same plane between the micro heater and a plurality of the electrode pads in a cantilever array and suspended on the open cavity; and a gas sensing film formed to be hung down between microelectrode finger spacings of a plurality of the sensing electrodes to represent changes in characteristics according to a gas concentration by contacting surfaces of the micro heater and a plurality of the sensing electrodes.
  • the micro gas sensor can have low power consumption, a rapid heating and cooling time, high durability, high sensitivity characteristics, and a capability of easily forming a gas sensing film by using various materials.
  • the micro gas sensor can be miniaturized and mass-produced at low cost in a simple structure using only a single pattern mask.
  • US Patent No. 7,495,300 relates to a gas-sensing semiconductor device that is fabricated on a silicon substrate having a thin silicon oxide insulating layer in which a resistive heater made of a CMOS compatible high temperature metal is embedded.
  • the high temperature metal is tungsten.
  • the device includes at least one sensing area provided with a gas-sensitive layer separated from the heater by an insulating layer.
  • the substrate is back- etched so as to form a thin membrane in the sensing area.
  • all other layers, including the tungsten resistive heater are made using a CMOS process employing tungsten metallisation.
  • the device can be monolithically integrated with the drive, control and transducing circuitry using low cost CMOS processing.
  • the heater, the insulating layer and other layers are made within the CMOS sequence and they do not require extra masks or processing.
  • the gas sampling device includes a chamber assembly formed of a chamber base having a chamber top mounted thereto.
  • a gas sensor is mounted to the chamber base in fluid communication with a gas flow passage therethrough.
  • a motor is mounted to the lower surface of the chamber base and has a shaft extending through the chamber base.
  • a fan is mounted onto the motor shaft within the chamber housing.
  • An inlet flow passage extends through the chamber top above the centre of the fan and an outlet flow passage extends through the chamber top above the gas flow passage.
  • the fan and the chamber top are provided with a particular configuration to provide for efficient and smooth flows of gas through the housing and to the sensor.
  • the present invention relates to a gas sensing system (100) for detecting a particular gas from an environment.
  • the gas sensing system (100) is characterized by a micropump device (110) to push gas sample in a pumping chamber (123) to a gas sensor (140); a diffuser (120) to draw gas sample from the environment, wherein the diffuser (120) is disposed underneath the micropump device (110); a micro- channel (130) to channel gas sample from the pumping chamber (123) to the gas sensor (140), wherein the micro-channel (130) is disposed underneath the diffuser (120); the gas sensor (140) to detect a particular gas, wherein the gas sensor (140) includes at least two electrical contact pads for connection with external circuit, and wherein the gas sensor (140) is disposed underneath the micro-channel (130); and an exhaust micro-channel (150) to expel gas sample from the gas sensor (140) to the environment, wherein the exhaust micro-channel (130) is disposed underneath the gas sensor (140), and wherein the exhaust micro-
  • the gas sensor (140), and the exhaust micro-channel (150) are fabricated on different substrates by either using micro-fabrication techniques for silicon substrate or using micro-moulding techniques and thereon, bonded together through wafer bonding process.
  • the diffuser (120) comprises of four parts (121a) arranged into a substantially rectangular shaped structure with each part (121a) defining a corner of the rectangular shaped structure, and wherein each space in between two parts forms a gas inlet (122a), and wherein the space widens towards the centre of the diffuser (120a) to form the pumping chamber (123).
  • the diffuser (120) suitably includes four secondary parts (124), and wherein each secondary part (124) is arranged at the middle of each gas inlet (122c) to divide the gas inlet (122c) into two channels to flow gas sample from the environment to the pumping chamber (123).
  • the diffuser (120) comprises of eight prism shaped parts (121b) arranged into a substantially rectangular shaped structure, and wherein the prism shaped parts (121 b) are spaced apart from each other to form eight gas inlets (12 b) all around the diffuser (120) and a pumping chamber (123) in the centre of the diffuser (120).
  • the micropump device (110) is a diaphragm micropump actuated by means of a piezoelectric (111), thermo-pneumatic, electrostatic or shape memory alloy.
  • the gas sensing system (200) further includes microfluidic filters (260) at each gas inlet (122) to block unwanted gas particles flow into the gas sensing system (200).
  • the gas sensing system (300) further includes a micro check valve
  • a method of detecting a particular gas in the environment by using the gas sensing system (100) comprises the steps of actuating the micropump device (110) to move the diaphragm (112) of the micropump device (110) upwardly and drawing the gas sample from the environment through the gas inlets (122) of the diffuser (120); actuating the micropump device (110) to move the diaphragm (112) of the micropump device (110) downwardly; detecting gas sample flowing to the gas sensor (140); transmitting measurement data of the gas sample to an external circuit; and expelling the gas sample out of the gas sensing system (100) through the exhaust micro-channel (150).
  • FIG. 1(a) shows a vertical sectional view of a gas sensing system (100) according to a first embodiment of the present invention.
  • FIG. 1(b) shows a top view of the gas sensing system (100) of FIG. 1(a).
  • FIG. 1(c) shows a perspective view of the gas sensing system ( 00) of FIG. 1(a).
  • FIG. 1(d) shows an exploded perspective view of the gas sensing system (100) of FIG. 1(a).
  • FIG. 2(a) shows a top view of a first example of a diffuser (120a) of the gas sensing system (100) of FIGS. 1.
  • FIG. 2(b) shows a top view of a second example of a diffuser (120b) of the gas sensing system (100) of FIGS. 1.
  • FIG. 2(c) shows a top view of a third example of a diffuser (120c) of the gas sensing system (100) of FIGS. 1.
  • FIG. 3 shows a flow chart of a method for operating the gas sensing system (100) of FIGS. 1.
  • FIG. 4(a) shows a top view of a micropump device (110) drawing gas sample (10) from an environment.
  • FIG. 4(b) shows a vertical sectional view of a micropump device (110) drawing gas sample (10) from an environment.
  • FIG. 5(a) shows a top view of a micropump device (110) pumping gas sample (10) to a gas sensor (140).
  • FIG. 5(b) shows a vertical sectional view of a micropump device (110) pumping gas sample (10) to a gas sensor (140).
  • FIG. 6 shows a vertical sectional view of a gas sensing system (200) according to a second embodiment of the present invention.
  • FIG. 7 shows a vertical sectional view of a gas sensing system (300) according to a third embodiment of the present invention.
  • FIGS. 1(a-d) A gas sensing system (100) according to a first embodiment of the present invention is shown in FIGS. 1(a-d).
  • the gas sensing system (100) is a miniaturized gas sensing system that is capable of drawing gas sample from a particular environment in multiple directions for gas detection.
  • the gas sensing system (100) comprises of a micropump device (110), a diffuser (120), a micro- channel (130), a gas sensor (140), and an exhaust micro-channel (150).
  • the micropump device (110), the diffuser (120), the micro-channel (130), the gas sensor (140), and the exhaust micro-channel (150) are fabricated on different substrates by either using micro-fabrication techniques for silicon substrate or using micro-moulding techniques such as, but not limited to Polydimethylsiloxane (PDMS), polymethylmethacrylate (PMMA), polyimide or SU-8. Those substrates are stacked on top of each other and thereon, bonded together through wafer bonding process.
  • PDMS Polydimethylsiloxane
  • PMMA polymethylmethacrylate
  • SU-8 polyimide
  • the diffuser (120a) decreases speed of gas sample flowing into the gas sensing system (100) while it increases pressure of the gas sample while in the gas sensing system (100).
  • the diffuser (120) is sandwiched in between the micropump device (110) and the micro-channel (130).
  • the diffuser (120a) comprises of four parts (121a) arranged into a substantially rectangular shaped structure with each part (121a) defining a corner of the rectangular shaped structure and thus, forming a gas inlet ( 22a) at each side of the diffuser (120a).
  • Each gas inlet (122a) is a space in between two parts (121a) and the space widens towards the centre of the diffuser which forms a pumping chamber (123) that traps the gas sample before being directed to the gas sensor (140). Therefore, the diffuser (120a) enables gas sample to flow into the gas sensing system (100) through the gas inlets (122a) of the diffuser (120a) located at the sidewalls of the gas sensing system (100) and traps the gas sample in the pumping chamber (123) to flow it towards the gas sensor (140).
  • the diffuser (120) can be designed to allow more than four gas inlets (122a) to draw gas sample from the environment.
  • FIG. 2(b) shows a top view of a second example of the diffuser (120b) of the gas sensing system (100) of FIGS. 1.
  • the diffuser (120b) comprises of eight prism shaped parts (121b) arranged into a substantially rectangular shaped structure.
  • the prism shaped parts (121b) are spaced apart from each other to form eight gas inlets (122b) all around the diffuser (120b) and a pumping chamber (123) in the centre of the diffuser (120b).
  • the diffuser (120b) enables the gas sample to flow into the gas sensing system (100) through the gas inlets (122b) which are part of the sidewalls of the gas sensing system (100) and traps the gas sample in the pumping chamber (123) to flow it towards the gas sensor (140).
  • FIG. 2(c) A third example of the diffuser (120c) of the gas sensing system (100) of FIGS. 1 is shown in FIG. 2(c).
  • the diffuser (120c) comprises of four primary parts (121c) and four secondary parts (124).
  • the primary parts (121c) are arranged into a substantially rectangular shaped structure with each part (121c) defining a corner of the rectangular shaped structure and thus, forming a gas inlet (122c) at each side of the diffuser (120c).
  • Each gas inlet (122c) is a space in between two parts (121c) and the space widens towards the centre of the diffuser (120c) which forms a pumping chamber (123) that traps the gas sample before being directed to the gas sensor (140).
  • Each secondary part (124) is provided at the middle of each gas inlet (122c) so as to divide the gas inlet (122c) into two channels to flow the gas sample from the environment to the pumping chamber (123). Therefore, the diffuser (120c) enables the gas sample to flow into the gas sensing system (100) through the gas inlets (122c) which are part of the sidewalls of the gas sensing system (100) and traps the gas sample in the pumping chamber (123) to flow it towards the gas sensor (140).
  • the micropump device ( 10) is used to pump the gas sample trapped in the pumping chamber (123) to the gas sensor (140) through the micro-channel (130).
  • the gas sample is channelled to the gas sensor (140) in an accelerated flow and thus, increases the concentration of the gas sample for detection.
  • the micropump device (110) is a diaphragm micropump actuated by means of a piezoelectric (111).
  • the micropump device (110) is disposed on top of the diffuser (120).
  • the diaphragm (112) of the micropump device (110) When the micropump device (110) is actuated, the diaphragm (112) of the micropump device (110) is displaced upwardly and thus, expanding the pumping chamber (123) and lowering the pressure within the pumping chamber (123) to allow gas sample from the environment to flow into pumping chamber (123). Thereon, the diaphragm (112) is displaced downwardly and thus, pushing the gas sample in the pumping chamber (123) towards the gas sensor (140).
  • the microchannel (130) is disposed underneath the diffuser (120).
  • the microchannel (130) is suitably a hollow substrate that functions to channel gas sample from the pumping chamber (123) to the gas sensor (140) for detection.
  • the gas sensor (140) is disposed below the micro-channel (130) and it includes at least two electrical contact pads for connection with external circuit to transmit measurement data of the gas detection.
  • the gas sensor (140) is shielded from the environment through bonding of the substrates and thus, preventing the gas sensor (140) from being exposed to the environment which reduces the degradation of a sensing membrane of the gas sensor (140).
  • Examples of the gas sensor (140) include, but not limited to, a thin film type gas sensor, diode type gas sensor and field-effect transistor (FET) type gas sensor, quartz crystal microbalance (QCM) gas sensor, surface acoustic wave (SAW) gas sensor and silicon beam resonator (SBR) gas sensor.
  • the exhaust micro-channel (150) is a hollow substrate that functions to expel the gas sample from the gas sensing system (100) to the environment.
  • the hollow structure of the exhaust micro-channel (150) is aligned and connected to the hollow structure of the micro-channel (130).
  • FIG. 3 there is shown a flowchart of the gas sensing system (100) in detecting gas sample.
  • the micropump device (110) is actuated by using the piezoelectric (111) and thus, causing the diaphragm (112) to move upward.
  • the micropump device (110) expands the pumping chamber (123) and thus, lowering the gas pressure within the pumping chamber (123). This causes the gas sample to flow into the pumping chamber (123) due to higher gas pressure of the environment.
  • the gas sample is drawn from the environment into the pumping chamber (123) through the gas inlets (122) and the gas sample is then trapped in the pumping chamber (123) as in step 1002.
  • FIGS. 4 show the gas sample (10) being drawn into the gas sensing system (100) through the gas inlets (122) as the diaphragm (112) of the micropump device (110) moves upwardly.
  • step 1003 the diaphragm (112) of the micropump device (110) moves downwardly and thus, the gas sample in the pumping chamber (123) is pushed towards the gas sensor (140) through the micro-channel (130) as shown in FIGS. 5.
  • a high concentration of gas sample flows to the gas sensor (140) as the gas sample (10) is being pushed in an accelerated flow by the micropump device ( 10).
  • step 1004 the gas sample comes into contact with the gas sensor (140) for gas detection.
  • the gas sensor (140) detects the concentration of a particular gas and transmits the measurement data to an external circuit for further processing as in step 1005.
  • step 1006 the gas sample is expelled out of the gas sensing system (100) through the exhaust micro-channel once it has passed through the gas sensor (140).
  • FIG. 6 shows a gas sensing system (200) according to a second embodiment of the present invention.
  • the gas sensing system (200) is similar to the gas sensing system (100) as shown in FIGS. 1 which comprises of a diffuser (220), a micropump device (210), a micro-channel (230), a gas sensor (240) and an exhaust micro- channel (250). Additionally, the gas sensing system (200) is provided with microfluidic filters (260) at the gas inlets (222) to block unwanted particles so that only the desired gas particles are allowed to flow into the gas sensing system (200) for detection. This is to reduce degradation of the sensing membrane of the gas sensor (240) and also to avoid disruptions and errors during detection.
  • FIG. 7 shows a gas sensing system (300) according to a third embodiment of the present invention.
  • the gas sensing system (300) is similar to the gas sensing system (100) as shown in FIG. 1 which comprises of a diffuser (320), a micropump device (310), a micro-channel (330), a gas sensor (340) and an exhaust micro- channel (350). Additionally, the gas sensing system (300) includes a micro check valve (370) provided in the micro-channel (330). The micro check valve (370) functions to prevent the gas sample from flowing in reverse direction once it resides within a sensing region of the gas sensor (340). This ensures that the gas sample flows to the gas sensor (340) and expels out of the gas sensing system (300) through the exhaust micro-channel (350).
  • the parts (121) can be arranged into any other shape that corresponds to the overall structural shape of the gas sensing system (100, 200, 300) to draw gas sample into the gas sensing system (100, 200, 300) for gas detection.
  • micropump device 110, 210, 310
  • a piezoelectric 111
  • the micropump device 110, 210, 310
  • thermopneumatic, electrostatic, shape memory alloy or any other actuation means.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Reciprocating Pumps (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

La présente invention porte sur un système détecteur de gaz (100) destiné à détecter un gaz particulier dans un environnement. Le système détecteur de gaz (100) comprend un dispositif de micropompe (110), un diffuseur (120), un microcanal (130), un détecteur de gaz (140), et un microcanal de rejet (150). Le dispositif de micropompe (110), le diffuseur (120), le micro canal (130), le détecteur de gaz (140), et le microcanal de rejet (160), sont fabriqués sur différents substrats et sont empilés et collés l'un sur l'autre.
PCT/MY2012/000093 2011-05-12 2012-04-27 Système détecteur de gaz WO2012154029A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
MYPI2011700070A MY159118A (en) 2011-05-12 2011-05-12 A gas sensing system
MYPI2011700070 2011-05-12

Publications (1)

Publication Number Publication Date
WO2012154029A1 true WO2012154029A1 (fr) 2012-11-15

Family

ID=47139379

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/MY2012/000093 WO2012154029A1 (fr) 2011-05-12 2012-04-27 Système détecteur de gaz

Country Status (2)

Country Link
MY (1) MY159118A (fr)
WO (1) WO2012154029A1 (fr)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016102183A1 (fr) * 2014-12-22 2016-06-30 Robert Bosch Gmbh Procédé de fabrication d'un dispositif de détection de gaz pour détecter au moins un analyte gazeux dans un milieu de mesure ainsi que procédé et dispositif de détection d'au moins un analyte gazeux dans un milieu de mesure
CN109142446A (zh) * 2018-08-20 2019-01-04 长春工业大学 一种聚合物薄膜孔状立体有机气体传感器制备方法
CN109425707A (zh) * 2017-08-31 2019-03-05 研能科技股份有限公司 致动传感模块
CN109424589A (zh) * 2017-08-31 2019-03-05 研能科技股份有限公司 致动传感模块
EP3450971A1 (fr) * 2017-08-31 2019-03-06 Microjet Technology Co., Ltd Module d'actionnement et de détection microfluidique
EP3454036A1 (fr) * 2017-08-31 2019-03-13 Microjet Technology Co., Ltd Module d'actionnement et de détection
US20190178862A1 (en) * 2017-12-13 2019-06-13 Point Engineering Co., Ltd. Air quality measuring apparatus
JP2019148582A (ja) * 2018-02-27 2019-09-05 研能科技股▲ふん▼有限公司 ガス検出装置
EP3564663A3 (fr) * 2018-03-30 2019-11-13 Microjet Technology Co., Ltd Dispositif portable de type mince

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4633704A (en) * 1982-05-26 1987-01-06 City Technology Limited Gas sensor
US5018395A (en) * 1990-02-08 1991-05-28 Bacharach, Inc. Gas sampling device with improved mixed flow fan
US5741413A (en) * 1993-12-18 1998-04-21 Sem Corporation Gas sensors and method of using same
US20020092974A1 (en) * 2001-01-12 2002-07-18 Kouznetsov Andrian I. Gas sensor based on energy absorption

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4633704A (en) * 1982-05-26 1987-01-06 City Technology Limited Gas sensor
US5018395A (en) * 1990-02-08 1991-05-28 Bacharach, Inc. Gas sampling device with improved mixed flow fan
US5741413A (en) * 1993-12-18 1998-04-21 Sem Corporation Gas sensors and method of using same
US20020092974A1 (en) * 2001-01-12 2002-07-18 Kouznetsov Andrian I. Gas sensor based on energy absorption

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016102183A1 (fr) * 2014-12-22 2016-06-30 Robert Bosch Gmbh Procédé de fabrication d'un dispositif de détection de gaz pour détecter au moins un analyte gazeux dans un milieu de mesure ainsi que procédé et dispositif de détection d'au moins un analyte gazeux dans un milieu de mesure
US11002719B2 (en) 2017-08-31 2021-05-11 Microjet Technology Co., Ltd. Actuating and sensing module
CN109424589B (zh) * 2017-08-31 2021-05-11 研能科技股份有限公司 致动传感模块
CN109424589A (zh) * 2017-08-31 2019-03-05 研能科技股份有限公司 致动传感模块
EP3450971A1 (fr) * 2017-08-31 2019-03-06 Microjet Technology Co., Ltd Module d'actionnement et de détection microfluidique
EP3454036A1 (fr) * 2017-08-31 2019-03-13 Microjet Technology Co., Ltd Module d'actionnement et de détection
CN109425707A (zh) * 2017-08-31 2019-03-05 研能科技股份有限公司 致动传感模块
US11125224B2 (en) 2017-08-31 2021-09-21 Microjet Technology Co., Ltd. Actuating and sensing module
US20190178862A1 (en) * 2017-12-13 2019-06-13 Point Engineering Co., Ltd. Air quality measuring apparatus
US10955320B2 (en) 2018-02-27 2021-03-23 Microjet Technology Co., Ltd. Gas detecting device for monitoring air quality in a gas transportation device
EP3537148A1 (fr) * 2018-02-27 2019-09-11 Microjet Technology Co., Ltd Dispositif de détection de gaz
JP2019148582A (ja) * 2018-02-27 2019-09-05 研能科技股▲ふん▼有限公司 ガス検出装置
JP7026039B2 (ja) 2018-02-27 2022-02-25 研能科技股▲ふん▼有限公司 ガス検出装置
US10935529B2 (en) 2018-03-30 2021-03-02 Microjet Technology Co., Ltd. Portable device including a gas detecting module for monitoring environmental air conditions
EP3564663A3 (fr) * 2018-03-30 2019-11-13 Microjet Technology Co., Ltd Dispositif portable de type mince
CN109142446A (zh) * 2018-08-20 2019-01-04 长春工业大学 一种聚合物薄膜孔状立体有机气体传感器制备方法

Also Published As

Publication number Publication date
MY159118A (en) 2016-12-15

Similar Documents

Publication Publication Date Title
WO2012154029A1 (fr) Système détecteur de gaz
US6688158B2 (en) Flexural plate wave sensor and array
TW202134605A (zh) 熱流體流感測器
EP1746414A2 (fr) Capteur de détection de molécules, capteur de détection et pompe de transfert de gaz
KR101696665B1 (ko) 체적 음향 공진기 센서
US8276433B2 (en) Sensor for measuring properties of liquids and gases
EP0865824A1 (fr) Dispositif de pipetage micromécanique
JP2010117184A (ja) 検出センサ
Kallempudi et al. A new microfluidics system with a hand-operated, on-chip actuator for immunosensor applications
JP2008509422A (ja) 正および負の圧力センサ
JPH10318150A (ja) マイクロメカニカルピペット装置
Chang et al. Phase detection of the two-port FPW sensor for biosensing
Xia et al. An addressable electrowetting valve for centrifugal microfluidics
JP2021165730A (ja) 物質検出システム
JP2007517226A (ja) 改造した二重ダイヤフラム圧力センサ
KR101265236B1 (ko) 음파 감쇠를 이용한 마이크로 점도계 및 이를 생산하기 위한 제조방법
WO2021200066A1 (fr) Système de détection de substances
US9753027B2 (en) Cantilever sensor with slit and biosensor having the same
JP7278548B2 (ja) ガス測定器
JP2009062911A (ja) 反応検出装置
CN111939991A (zh) 一种微流控系统及其制备方法
US20220381739A1 (en) Device for detecting particulate and one or more gases in the air
JP2009216141A (ja) 流体ダイオード、ポンプ、分子検出センサ
US20210040942A1 (en) Thin MEMS Pump
KR101349796B1 (ko) 마이크로 점도계 및 이를 생산하기 위한 제조방법

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12782918

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 12782918

Country of ref document: EP

Kind code of ref document: A1