WO2012151790A1 - 激光诱导连续爆轰冲击波作用获得纳米涂层方法及装置 - Google Patents

激光诱导连续爆轰冲击波作用获得纳米涂层方法及装置 Download PDF

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Publication number
WO2012151790A1
WO2012151790A1 PCT/CN2011/077734 CN2011077734W WO2012151790A1 WO 2012151790 A1 WO2012151790 A1 WO 2012151790A1 CN 2011077734 W CN2011077734 W CN 2011077734W WO 2012151790 A1 WO2012151790 A1 WO 2012151790A1
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Prior art keywords
laser
workpiece
shock wave
resistant glass
glass pipe
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PCT/CN2011/077734
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English (en)
French (fr)
Inventor
任旭东
汪诚
皇甫喁卓
楚维
李应红
何卫峰
周鑫
阮亮
张永康
戴峰泽
张田
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Jiangsu University
Air Force Engineering University of PLA
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Jiangsu University
Air Force Engineering University of PLA
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Priority to US14/239,153 priority Critical patent/US9327313B2/en
Publication of WO2012151790A1 publication Critical patent/WO2012151790A1/zh
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
    • C23C24/082—Coating starting from inorganic powder by application of heat or pressure and heat without intermediate formation of a liquid in the layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B05D3/141—Plasma treatment
    • B05D3/145—After-treatment
    • B05D3/148—After-treatment affecting the surface properties of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

Definitions

  • the invention relates to the field of laser technology and surface strengthening technology, and particularly relates to a method and a device for realizing nano-metal surface by the action of laser-induced continuous detonation strong shock wave.
  • nano-structured surface layer of a certain thickness on the surface of the material can improve the overall mechanical properties and environmental service behavior of the material.
  • surface coating or deposition surface self-nanocrystallization
  • hybrid nanocrystallization There are three main ways to obtain a nanostructured surface layer on a metal surface: surface coating or deposition, surface self-nanocrystallization, and hybrid nanocrystallization.
  • the prepared nanometer-sized particles are consolidated on the surface of the material, and a nanostructure surface layer having the same chemical composition or different composition is formed on the surface of the base material.
  • common coating and deposition methods include physical vapor deposition (PVD), chemical vapor deposition (CVD), sputtering, electroplating, and electrolytic deposition. The focus of these techniques is to achieve a strong bond between the surface nanoparticles and the substrate.
  • the method for obtaining a nano-coating can overcome the above disadvantages, and obtain a nanostructure coating layer simply and quickly with good effect and small pollution.
  • the invention utilizes a high-density short-pulse intense laser-induced continuous detonation shock wave to embed nano powder particles in the surface layer of the metal material to produce a dense nano-protective layer, thereby improving the corrosion resistance, wear resistance and oxidation resistance of the material. Sex and its fatigue life.
  • the high pressure resistant glass pipe designed in the method can cause the black lacquer plasma to circulate continuously, greatly increasing the speed and size of the detonation wave.
  • the invention designs a high pressure resistant glass pipe to induce a detonation wave caused by a continuous ionization explosion of the energy absorbing material and to restrict the diffusion attenuation of the detonation wave.
  • the high-pressure resistant glass pipe is made of K9 glass and has a snake-shaped foldback shape with a rounded right corner.
  • the inner diameter of the upper port is the same as the pulsed laser spot. Because the spot is adjustable, the high pressure resistant pipe is designed in a series of specifications.
  • the inner diameter of the lower port is 3 mm smaller than the inner diameter of the upper port.
  • the lower end of the upper end is sealed, the thickness is 6 mm, the total length of the pipe is 400 mm, and the pipe is too long.
  • the shock wave attenuation is large, and the pipeline is too short and the chain detonation shock wave does not reach the required value.
  • the inner wall of the pipe is a laser mirror for reflecting the laser light absorbed by the energy absorbing material to prevent energy loss.
  • the mirror surface reflects the laser at each corner, providing intermediate energy support for the serial explosion process.
  • the reflector on the inner wall of the pipe is coated with a layer of energy absorbing material (black lacquer, aluminum powder, etc.) to ensure that each bend is coated with energy absorbing material.
  • the glass tube is packaged in a rectangular glass case for easy gripping by the robot.
  • the coated particles When a high power density, short pulse strong laser strikes the surface of the energy absorbing coating on the port of the high pressure resistant glass pipe, the coated particles absorb a part of the energy of the high energy laser, instantaneous combustion gasification, breakdown, ionization, plasma generation, plasma
  • the body is subjected to subsequent laser radiation, accumulates energy rapidly, induces expansion and explosion, forms an initial plasma detonation shock wave, and propagates in a high-pressure glass conduit; the generated plasma temperature and energy are extremely high, and the rapid excitation induces the occurrence of adjacent coating particles.
  • the energy absorbing coating strip on the inner wall of the high pressure resistant glass pipe repeats such a process to form a plasma cloud, and the detonation shock wave continuously re-emphasizes the overlap, and the reaction time is extremely short (nanosecond order), and the shock wave attenuation is small, reaching The shock wave pressure at the lower port is significantly increased (up to 103 ⁇ 105GPa).
  • the high pressure resistant glass pipe acts to increase the shock wave pressure.
  • the powerful shock wave generated in this chain process embeds the nanoparticles on the surface of the alloy material to form a nanoparticle coating.
  • the peak pressure of the shock wave reaching the workpiece is higher than the dynamic yield limit of the metal material, and the surface has strong plastic strain and large density dislocations, and a large residual compressive stress is generated on the surface layer, thereby effectively improving the resistance of the material. Fatigue performance.
  • the device of the invention comprises: high power laser, three degree of freedom manipulator, infrared positioning calibrator, 45° full mirror, focusing lens, positioning clamping block on workpiece, workpiece, workpiece clamping device controller, workpiece side positioning clamping Block, XY axis workpiece support plate, workbench, computer, high pressure glass pipe.
  • the oxide layer on the surface of the workpiece is removed by sandpaper, and the oil on the surface of the workpiece is cleaned with anhydrous alcohol; the workpiece is mounted on a workpiece support plate that can be moved along the XY axis; the nano powder is uniformly applied to the workpiece using a metal powder binder.
  • the machined surface is naturally air-dried; a black lacquer tape is applied to the inner wall of the high-pressure resistant glass pipe and the bottom of the upper port by a crimpable rubber band with a cotton head, and after being naturally dried, it is clamped on a three-degree-of-freedom robot; the infrared locator is opened, Move the manipulator horizontally so that the infrared light hits the black paint on the port on the high pressure resistant glass pipe, then move the XY axis workpiece support plate so that the lower port of the high pressure resistant glass pipe is aligned with the area to be processed, and then move the manipulator vertically to make the high voltage resistant The lower port of the glass pipe is 5-15mm away from the machined surface.
  • the laser is started, and the power density, spot diameter, energy, pulse width and other parameters of the laser are set to perform three impacts; by moving the workpiece support plate, Perform single point impact and lap impact on different parts; after the end of the impact, remove the workpiece, properly sand, and finally clear wash.
  • the invention uses a spiral high pressure resistant glass pipe, and the principle of superposition explosion, gasification, ionization and shock wave propagation superposition can obtain a more powerful detonation shock wave than a general black paint coating.
  • the method used in the invention has a simple process and a high processing speed, and can quickly embed the nanoparticles on the surface of the substrate.
  • the black lacquer used in the present invention has no other chemicals, is environmentally friendly, and is a green processing method.
  • the method of the present invention is cold-processed or nearly cold-worked for the base material, and does not affect some properties of the workpiece due to high temperature.
  • the peak pressure of the shock wave is higher than the dynamic yield limit of the metal material, strong plastic strain and large density dislocation occur under the action of high strain rate, and a large residual compressive stress is generated on the surface layer, against Fatigue damage performance and its effectiveness.
  • Figure 1 Process and schematic of the formation of a laser induced shock wave.
  • Figure 2 is a diagram of a device for preparing a surface nanocoating.
  • Figure 3 is a schematic view of a spiral inverted conical high pressure resistant glass pipe.
  • Figure 4 is a schematic plan view of a spiral inverted conical high pressure resistant glass pipe.
  • Figure 5 is a schematic view of the side surface glass tube of the block workpiece.
  • 1 laser beam, 2 inner surface is laser mirror surface, 3 black lacquer strip, 4 initial detonation shock wave, 5 Final detonation shock wave, 6 nanometer powder particles, 7 black paint particles, 8 high power lasers, 9 three degree of freedom manipulator, 10 infrared positioning calibrator, 11 laser beams, 12 full mirrors, 13 focusing lenses, 14 Positioning clamping block on workpiece, 15 workpiece, 16 workpiece clamping device controller, 17 workpiece side positioning clamping block, 18 XY axis workpiece support plate, 19 table, 20 computer, 21 high pressure glass pipe, 22 Pre-coated nano-powder on the surface of the workpiece.
  • the following are specific examples of the invention, but are not intended to limit the invention.
  • the invention includes a control system, a light guiding system, a table control system, and an auxiliary system.
  • the details and operation of the specific device proposed by the present invention will be described in detail below with reference to the accompanying drawings.
  • the process and principle of the laser continuous induced detonation shock wave formation are as shown in FIG. 1.
  • the high power density, short pulse strong laser 1 is irradiated onto the black lacquer surface of the port on the high pressure resistant glass pipe 21, and the black lacquer particles 7 absorb the laser light.
  • the reaction time is extremely short, the shock wave attenuation is small, and the high-pressure resistant glass pipe acts to increase the shock wave pressure.
  • the powerful shock wave 5 generated in this chain process is output from the lower port, and the nanoparticles are embedded on the surface of the alloy material to form Nanoparticle coating.
  • the peak pressure of the shock wave reaching the workpiece is higher than the dynamic yield limit of the metal material, and the surface has strong plastic strain and large density dislocations, and a large residual compressive stress is generated on the surface layer, thereby effectively improving the resistance of the material. Fatigue performance.
  • FIG. 2 is a device for obtaining a nano-coating on a surface of a material according to the method of the present invention, and a specific implementation method thereof: using a sandpaper to derust, polish, and polish a surface to be treated of the workpiece 16, and then degreasing and cleaning the workpiece using anhydrous alcohol;
  • the workpiece is mounted on a workpiece support plate 18 movable along the XY axis, clamped; the nano powder 22 is uniformly applied to the surface to be processed of the workpiece using a metal powder binder, and naturally dried; and a crimpable rubber tape with a cotton head is used.
  • the laser 8 passes through the 45° full mirror 12 and the focusing lens 13 to the black paint on the port on the high pressure resistant glass tube.
  • the black paint absorbs the laser energy and generates a continuous gasification ionization in the pipeline to form a plasma cloud, and a powerful shock wave to the nanometer.
  • the particles are injected into the surface layer material of the workpiece to form a dense nano-coating layer, which improves the overall corrosion resistance, wear resistance, oxidation resistance and fatigue life of the material.
  • Example 1 The pretreated 7050 aluminum alloy workpiece is fixedly clamped on the workpiece support plate 18; then the SiC nanopowder 22 is uniformly coated on the 7050 aluminum alloy pre-machined surface 15 using a metal powder binder; The inner wall of the pipe 21 and the bottom of the upper port are brushed with a black lacquer strip, naturally air-dried, and then the high-pressure resistant glass pipe is clamped on the robot 9; the infrared locator 10 is opened, and the manipulator is horizontally moved to make the infrared light hit the high-pressure resistant glass pipe.
  • the black paint gasification ionization produces a high-temperature and high-energy plasma, and the black paint plasma causes a serial explosion in the high-pressure resistant glass pipe to generate a strong detonation wave at the lower port. 5 (up to 103 ⁇ 105GPa), injecting SiC nanoparticles into the surface layer of 7050 aluminum alloy.
  • the nano-hardening of the entire processing area is accomplished by moving the workpiece support plate and multiple overlapping impacts.
  • a high pressure resistant glass pipe for inducing a chain explosion may be a spiral inverted cone as shown in Figs. 3 and 4, the pitch of which is 20 mm, and the inner diameter of the spiral tube has a series of diameters according to the laser spot (6 mm, 8 mm, 10 mm).
  • Etc. the lower end of the upper end is open, the inner wall is a laser mirror, the inner wall is coated with black lacquer energy absorbing material, the laser impacts the black paint on the upper port, gasification and ionization, and a series of detonation occurs in the pipeline, forming a huge detonation wave.
  • a high pressure resistant glass conduit for inducing a chain detonation shock wave may be in the shape of FIG. 5, capable of horizontally outputting a laser beam induced shock wave level for processing a side surface of a block-shaped workpiece.
  • the inner diameter of the pipe has different values according to the diameter of the laser spot.
  • the diameter of the elbow is 15mm.
  • the inner wall is a laser mirror surface coated with energy absorbing material. One end is open at one end and the inner end is coated with an energy absorbing material. The sealed end receives laser irradiation to generate plasma.
  • the energy absorbing material at the body and the elbow can absorb the residual laser gasification ionization, generate plasma, and provide intermediate energy support and shock wave support for the chain detonation.

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Description

激光诱导连续爆轰冲击波作用获得纳米涂层方法及装置 技术领域
本发明涉及激光技术和表面强化技术领域，特指一种通过激光诱导的连续爆轰强冲击波的作用实现金属表面纳米化的方法与装置。
 背景技术
材料的各种破坏往往起于其表面，如腐蚀、磨损、氧化、疲劳破坏等，表层材料的结构、特性对材料的综合性能的影响颇深。在材料的表面制备出一定厚度的纳米结构表层，可以提高材料的整体力学性能和环境服役行为。在金属表面获得纳米结构表层主要由三种途径：表面涂敷或沉积法、表面自身纳米化和混合纳米化方法。
对于表面涂敷或沉积法，是将制备出的具有纳米尺度的颗粒固结在材料的表面，在基体材料表面形成一个化学成分相同或不同的纳米结构表层。目前，常见的涂敷和沉积方法有物理气相沉积（PVD）、化学气相沉积（CVD）、溅射、电镀和电解沉积等，这些技术的重点在于实现表层纳米颗粒与基体间的牢固结合。东华大学申请的专利号CN100362128C——大气压平面放电化学气相沉积纳米颗粒膜方法及装置的发明专利，使用大气压平面放电方法在各种材料表面均匀地沉积具有相同成分并且具有一定结晶特征的纳米颗粒膜，但该方法的缺点是基材温度较高，沉积速率较低，基材难以局部沉积，过程中会生成有害气体。吉林大学申请的专利CN101298677——镁合金表面耐磨耐腐蚀纳米复合镀层的制备方法，其将经过化学镀的镁合金试样放进纳米复合镀液中，进行电沉积纳米复合镀，制备镁合金表面纳米复合镀层，但其镀层厚度不够均匀，且工艺过程较复杂，需要配备多种化学溶液，不够清洁。
常规激光冲击利用高功率密度、短脉冲强激光冲击金属表面，金属表面涂层吸收激光能量而气化、电离、膨胀爆炸，形成向金属内部传播的等离子体冲击波，但是一般工艺产生的冲击力不足以使纳米颗粒嵌入到金属表层。
 技术问题
本发明提出的获得纳米涂层的方法，可以克服上述缺点，简单、快速获得纳米结构涂层且效果好、污染小。本发明利用高功率密度短脉冲强激光诱导的连续爆轰冲击波将纳米粉末颗粒嵌入到金属材料的表层，使其产生致密的纳米保护层，提高材料的抗腐蚀性、耐磨损性、抗氧化性及其疲劳寿命。相对于常规激光冲击强化工艺，本方法中设计的耐高压玻璃管道可使黑漆等离子体连环爆炸，极大程度地提高爆轰波的速度和大小。
 技术解决方案
本发明的设计了耐高压玻璃管道，以诱导能量吸收物质连环电离爆炸产生爆轰波，并约束爆轰波扩散衰减。耐高压玻璃管道使用K9玻璃制作，形状为蛇形折返式，其折返处为圆直角。上端口内径与脉冲激光光斑相同，因为光斑是可调的，所以耐高压管道设计成一系列规格，下端口内径比上端口内径小3mm，上端密封下端开口，厚度6mm，管道总长400mm，管道太长冲击波衰减大，管道太短连环爆轰冲击波达不到所需值。管道内壁是激光反射镜，用于反射未被能量吸收物质吸收激光，防止能量的损失，每个拐角处的反射镜面反射激光，对连环爆炸过程提供中间能量支持。管道内壁的反射镜上涂一层能量吸收物质（黑漆、铝粉等）带，保证每个折弯处涂有能量吸收物质。玻璃管道封装于矩形玻璃盒内，便于机械手夹持。
在高功率密度、短脉冲强激光冲击到耐高压玻璃管道上端口的能量吸收涂层表面时，涂层粒子吸收高能激光的一部分能量，瞬时燃烧气化、击穿、电离，产生等离子体，等离子体受后续激光辐射，迅速积累能量，引发膨胀爆炸，形成初始等离子体爆轰冲击波，在耐高压玻璃导管中传播；产生的等离子体温度、能量都极高，迅速激发诱导临近涂层粒子发生同样的燃烧气化、电离、膨胀爆炸的过程，高能激光未被吸收的部分在耐高压玻璃管道内壁反射，反射到涂层上则气化电离涂层物质，为持续连环爆炸提供能量支持，沿着耐高压玻璃管道内壁上的能量吸收涂层条带一直重复着这样的过程，形成等离子云，爆轰冲击波不断递进重重叠加，且反应时间极短（纳秒级），冲击波衰减较小，到达下端口冲击波压力明显跃升（达到103~105GPa）。耐高压玻璃管道起到了增大冲击波压力的作用，这个连环过程中产生的强大冲击波把纳米颗粒嵌入到合金材料表面，形成纳米颗粒涂层。在获得纳米涂层的同时，到达工件的冲击波的峰值压力高于金属材料的动态屈服极限，表层发生强塑性应变和大密度位错，在其表层产生了大幅残余压应力，有效提高材料的抗疲劳性能。
本发明的装置包括：大功率激光器，三自由度机械手，红外定位校准器，45°全反镜，聚焦透镜，工件上定位夹紧块，工件，工件夹紧装置控制器，工件侧定位夹紧块，XY轴工件支撑板，工作台，计算机，耐高压玻璃管道。计算机控制激光器、XY轴工件支撑板和三自由度机械手；机械手位于工作台上；耐高压玻璃导管由机械手夹持，玻璃导管上端密封、下端为倒锥形开口；工件夹紧装置控制器控制工件定位夹紧块的移动和施力。
用砂纸磨除工件表面的氧化层，无水酒精清洗工件表面的油污；工件安装在可沿XY轴移动的工件支撑板上夹紧；使用金属粉末粘结剂把纳米粉末均匀涂敷在工件待加工表面自然风干；用带棉花头的可卷曲橡胶带在耐高压玻璃管道的内壁和上端口的底部刷一条黑漆带，自然风干后，夹持在三自由度机械手上；打开红外定位器，水平移动机械手，使红外光射到耐高压玻璃管道上端口的黑漆上，然后移动XY轴工件支撑板，使耐高压玻璃管道的下端口对准待加工区域，再垂直移动机械手，使耐高压玻璃管道下端口距离加工表面5-15mm，最后固定工件支撑板和锁紧机械手；启动激光器，设置激光的功率密度、光斑直径、能量、脉冲宽度等参数，进行三次冲击；通过移动工件支撑板，进行不同部位的单点冲击和搭接冲击；冲击结束后，取下工件，适当打磨，最后清洗。
本发明的优点：
1，本发明使用了螺旋耐高压玻璃管道，由连环爆炸、气化、电离、冲击波传播叠加原理，可获得比一般黑漆涂层更强大的爆轰冲击波。
2，相比沉积法或电镀固结纳米粒子到基体材料的方法，本发明所使用的方法，工艺过程简单，加工速度快，可迅速把纳米粒子嵌入到基材表面。
3，本发明除了使用的黑漆没有其他的化学物质，清洁环保，是一个绿色加工方法。
4，相对其他方法，本发明方法对基体材料来说属于冷加工或近似冷加工，不会因为高温而影响工件的一些性能。
5，在获得纳米涂层的同时，冲击波的峰值压力高于金属材料的动态屈服极限，在高应变率作用下发生强塑性应变和大密度位错，在其表层产生了大幅残余压应力，对抗疲劳破坏性能及其有效。
 附图说明
图1激光诱导的冲击波的形成的过程和原理图。
图2制备表面纳米涂层的装置图。
图3螺旋倒锥形耐高压玻璃管道示意图。
图4螺旋倒锥形耐高压玻璃管道俯视示意图。
图5块状工件的侧表面玻璃管道示意图。
图中：1 激光束，2 内表面为激光反射镜面，3 黑漆条带，4 起始爆轰冲击波，5 最终爆轰冲击波，6纳米粉末颗粒，7黑漆粒子，8大功率激光器，9 三自由度机械手，10 红外定位校准器，11激光束，12全反镜，13 聚焦透镜，14 工件上定位夹紧块，15 工件，16 工件夹紧装置控制器，17 工件侧定位夹紧块，18 XY轴工件支撑板，19 工作台，20 计算机，21 耐高压玻璃管道，22 预涂工件表面的纳米粉末。
 本发明的实施方式
以下为本发明的具体实施例，但不用来限制本发明。本发明包括控制系统、导光系统、工作台控制系统和辅助系统。下面结合图详细说明本发明提出的具体装置的细节和工作情况。
本发明关于激光连续诱导爆轰冲击波形成的过程及原理如图1所示，高功率密度、短脉冲强激光1，照射到耐高压玻璃管道21上端口的黑漆表面，黑漆粒子7吸收激光能量，瞬时气化、击穿、电离，产生等离子体，等离子受后续激光辐射，迅速积累能量，引发膨胀爆炸，形成初始等离子体爆轰冲击波4，在耐高压玻璃导管21中传播，耐高压玻璃导管21为蛇形折返式，其折返处为圆直角；高温高能等离子体迅速激发诱导相邻黑漆粒子发生同样的瞬时气化、电离、膨胀的过程，再次产生冲击波，沿着黑漆条带一直重复着这样的过程，形成等离子云，爆轰冲击波不断递进重重叠加，到达下端口冲击波压力5明显跃升。本过程中反应时间极短，冲击波衰减较小，耐高压玻璃管道起到了增大冲击波压力的作用，这个连环过程中产生的强大冲击波5从下端口输出，将纳米颗粒嵌入到合金材料表面，形成纳米颗粒涂层。在获得纳米涂层的同时，到达工件的冲击波的峰值压力高于金属材料的动态屈服极限，表层发生强塑性应变和大密度位错，在其表层产生了大幅残余压应力，有效提高材料的抗疲劳性能。
如图2用于本发明的方法获得材料表面纳米涂层的装置及其具体实施方法：使用砂纸对工件16待处理表面进行除锈、打磨抛光，然后使用无水酒精对工件除油、清洗；把工件安装在可沿XY轴移动的工件支撑板18上，夹紧；使用金属粉末粘结剂把纳米粉末22均匀涂敷在工件待加工表面，自然干燥；使用带棉花头的可卷曲橡胶带在耐高压玻璃管道的内壁和上端口的底部刷一条黑漆带，自然风干后，夹持在三自由度机械手9上；打开红外定位器10，水平移动机械手，使红外光射到耐高压玻璃管道上端口的黑漆上，然后移动XY轴工件支撑板，使耐高压玻璃管道21的下端口对准待加工区域，再垂直移动机械手，使耐高压玻璃管道下端口距离加工表面5-15mm，最后固定工件支撑板和锁紧机械手；启动激光器8，设置激光的功率密度、光斑直径、能量、脉冲宽度等参数，激发的激光11经过45°全反镜12和聚焦透镜13射到耐高压玻璃导管上端口的黑漆上，黑漆吸收激光能量在管道内发生连环气化电离，形成等离子云，强大的冲击波把纳米粒子注入到工件表层材料中，形成致密的纳米涂层，提高材料整体的抗腐蚀性、耐磨损性、抗氧化性和提高其疲劳寿命。
实例一：把预处理好的7050铝合金工件固定夹紧在工件支撑板18上；然后使用金属粉末粘结剂把SiC纳米粉末22均匀涂敷在7050铝合金预加工表面15；在耐高压玻璃管道21的内壁和上端口的底部刷一条黑漆带，自然风干，再把耐高压玻璃管道夹持在机械手9上；打开红外定位器10，水平移动机械手，使红外光射到耐高压玻璃管道上端口的黑漆上，关闭红外定位器，然后移动XY轴工件支撑板，使耐高压玻璃管道的下端口对准待加工区域，再垂直方向移动机械手，使耐高压玻璃管道下端口距离加工表面10mm，最后固定工件支撑板和锁紧机械手；启动钕玻璃调Q激光器8，设置基本参数为：激光脉冲宽度10ns，波长是1.054μm，脉冲能量是45J，光斑直径是12mm。高能短脉冲激光冲击到耐高压玻璃管道上端口的黑漆7，黑漆气化电离产生高温高能等离子体，黑漆等离子体在耐高压玻璃管道内发生连环爆炸，在下端口产生强大的爆轰波5（达到103~105GPa），将SiC纳米粒子注入7050铝合金表层。通过移动工件支撑板，多次搭接冲击来完成整个加工区域的纳米强化。
实例二：一种用于诱导连环爆炸的耐高压玻璃管道可以为如图3、4所示的螺旋倒锥形，其螺距为20mm，螺旋管内径根据激光光斑有一系列直径（6mm，8mm，10mm等），上端封口下端开口，内壁是激光反射镜，内壁上涂有黑漆能量吸收物质，激光冲击到上端口的黑漆，气化电离，管道内发生连环爆轰，形成的巨大爆轰波在下端口输出，作用到工件的加工表面。
实例三：一种用于诱导连环爆轰冲击波的耐高压玻璃导管可以为如图5的形状，能够把垂直激光束诱导的冲击波水平输出，用来加工块状工件的侧表面。管道内径跟据激光光斑直径有不同值，弯管处直径为15mm，内壁是激光反射镜面，其上涂有能量吸收材料，一端开口一端封口，内侧涂能量吸收物质的封口端接收激光照射产生等离子体，弯管处的能量吸收材料可吸收剩余激光气化电离，产生等离子体，为连环爆轰提供中间能量支持和冲击波支持。

Claims (6)

  1. 一种激光诱导连续爆轰冲击波作用获得纳米涂层方法，其特征在于，高功率密度、短脉冲强激光（1），照射到耐高压玻璃管道（21）上端口的黑漆表面，黑漆粒子（7）吸收激光能量，瞬时气化、击穿、电离，产生等离子体，等离子受后续激光辐射，迅速积累能量，引发膨胀爆炸，形成初始等离子体爆轰冲击波（4），在耐高压玻璃导管中传播；高温高能等离子体迅速激发诱导相邻黑漆粒子（7）发生同样的瞬时气化、电离、膨胀的过程，再次产生冲击波，沿着黑漆条带一直重复着这样的过程，形成等离子云，爆轰冲击波不断递进重重叠加，到达下端口冲击波压力（5）明显跃升；输出的巨大冲击波压力将预涂工件表面的纳米颗粒（22）嵌入工件（25）表面，形成纳米涂层。
  2. 根据权利要求1所述的一种激光诱导连续爆轰冲击波作用获得纳米涂层方法，其特征在于，具体步骤为：
    （A） 用砂纸对工件（25）待处理表面进行除锈、打磨抛光，然后使用无水酒精对工件（25）除油、清洗；
    （B） 工件安装在可沿XY轴移动的工件支撑板上（18），夹紧；使用金属粉末粘结剂把纳米粉末均匀涂敷在工件（25）待加工表面，自然干燥；
    （C） 用带棉花头的可卷曲橡胶带在耐高压玻璃管道（21）的内壁和上端口的底部刷一条黑漆粒子带，自然风干后，夹持在三自由度机械手（9）上；
    （D） 打开红外定位器（10），水平移动机械手，使红外光射到耐高压玻璃管道（21）上端口的黑漆上，然后移动XY轴工件支撑板（18），使耐高压玻璃管道（21）的下端口对准待加工区域，再垂直移动机械手，使耐高压玻璃管道（21）下端口距离加工表面3-5mm，固定工件支撑板并锁紧机械手；
    （E） 启动激光器（8），设置激光的功率密度、光斑直径、能量、脉冲宽度参数，进行三次冲击；通过移动工件支撑板，可进行不同部位的单点冲击和搭接冲击；冲击结束后，取下工件（15），适当打磨，最后清洗。
  3. 实施权利要求1所述的一种激光诱导连续爆轰冲击波作用获得纳米涂层方法的装置，其特征在于：包括大功率激光器（8），三自由度机械手（9），红外定位校准器（10），45°全反镜（12），聚焦透镜（13），工件上定位夹紧块（14），工件（15），工件夹紧装置控制器（16），工件侧定位夹紧块（17），XY轴工件支撑板（18），工作台（19），计算机（20），耐高压玻璃管道（21）；计算机（20）实时控制激光器、XY轴工件支撑板（18）和三自由度机械手（9）；机械手位于工作台（19）上；耐高压玻璃导管由机械手夹持，玻璃导管上端密封下端为倒锥形开口；工件夹紧装置控制器（16）控制工件定位夹紧块（14）的移动和施力。
  4. 根据权利要求3所述的一种激光诱导连续爆轰冲击波作用获得纳米涂层装置，其特征在于：所述耐高压玻璃导管上端密封下端为倒锥形开口，下端口内径比上端口内径小3mm，厚度6mm，管道总长400mm，内壁为激光反射镜面，在其内壁上刷一层能量吸收物质，诱导的等离子体在导管内部发生连环爆炸。
  5. 根据权利要求3所述的一种激光诱导连续爆轰冲击波作用获得纳米涂层装置，其特征在于：所述耐高压玻璃导管为蛇形折返式，其折返处为圆直角。
  6. 根据权利要求3所述的一种激光诱导连续爆轰冲击波作用获得纳米涂层装置，其特征在于：所述耐高压玻璃导管为螺旋倒锥形，其螺距为20mm。
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