WO2012144597A1 - Ink-jet head - Google Patents

Ink-jet head Download PDF

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Publication number
WO2012144597A1
WO2012144597A1 PCT/JP2012/060716 JP2012060716W WO2012144597A1 WO 2012144597 A1 WO2012144597 A1 WO 2012144597A1 JP 2012060716 W JP2012060716 W JP 2012060716W WO 2012144597 A1 WO2012144597 A1 WO 2012144597A1
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WO
WIPO (PCT)
Prior art keywords
channel
row
wiring
electrode
head chip
Prior art date
Application number
PCT/JP2012/060716
Other languages
French (fr)
Japanese (ja)
Inventor
光 高松
渡辺 英生
Original Assignee
コニカミノルタIj株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by コニカミノルタIj株式会社 filed Critical コニカミノルタIj株式会社
Priority to EP12774310.2A priority Critical patent/EP2700506B1/en
Priority to JP2013511055A priority patent/JP5846201B2/en
Publication of WO2012144597A1 publication Critical patent/WO2012144597A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14209Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14491Electrical connection

Definitions

  • the present invention relates to an ink jet head, and more particularly, to an ink jet head having a head chip in which drive channels and dummy channels are alternately arranged, and capable of increasing the density of the channels.
  • the drive wall By applying a drive signal of a predetermined voltage to the drive electrode formed on the drive wall that partitions the channel, the drive wall is subjected to shear deformation, and ink in the channel is ejected from the nozzle by using the pressure generated at that time.
  • a shear mode type ink jet head one having a so-called harmonica type head chip in which opening portions of channels are respectively arranged on the front surface and the rear surface is known.
  • the drive electrode faces the channel and is not exposed to the outside, the problem is how to electrically connect each drive electrode to the drive circuit.
  • the channel row located outside forms a connection electrode that is electrically connected to the drive electrode from each channel to the end of the head chip using the rear surface of the head chip. It is easy to make an electrical connection with an FPC or the like at the end of the head chip.
  • the drive signal is applied to the drive electrodes of the channel rows located on the inner side from the end of the head chip, the connection electrodes that are electrically connected to the drive electrodes extend beyond the outer channel row to the end of the head chip. There is a problem that it has to be formed.
  • Patent Document 1 discloses that four channel rows are arranged by shifting the channel pitch by 1 ⁇ 4, and driving electrodes in each channel are arranged on the rear side of the head chip. An electrical contact is formed by being exposed to the periphery of each of the openings, a flexible substrate having a wiring electrode formed on one side of the rear surface of the head chip, and a wiring electrode forming surface facing the rear surface of the head chip, It is disclosed that a drive signal can be applied from one side of the head chip to each drive electrode of all channel rows by bonding so as to cover the entire rear surface.
  • through holes are formed at positions corresponding to the respective channels, and ink can be supplied to the respective channels through the through holes.
  • a wiring electrode is formed which is electrically connected to the electrical contacts of the channel row located on the inner side.
  • Patent Document 1 by shifting the pitch by 1 ⁇ 4 between the four channel columns, a maximum of three wiring electrodes pass between the channels. Since each wiring electrode passes between adjacent through holes, the wiring electrodes are arranged so as to be within the range of the width (thickness) of the drive wall when viewed from the direction along the ink ejection direction.
  • each channel in the channel row is divided into a drive channel that discharges ink and a dummy channel that does not discharge ink, and the channel row is configured by alternately arranging these channels.
  • connection electrode that is electrically connected to a drive electrode in each channel is formed on the rear surface of such an independent drive type harmonica type head chip, and is positioned inside a plurality of juxtaposed channel rows.
  • the connection electrode of the channel row to be used is formed on the rear surface of the head chip on the rear surface of the head chip by using a flexible substrate having a wiring electrode formed on one side so as to have a narrow width equal to the width of the wiring electrode. Pulling out to the end is disclosed.
  • the flexible substrate on which the wiring electrode is formed is provided so as to close the opening on the rear surface side of the dummy channel when crossing the outer channel row. Since the surface opposite to the wiring electrode formation surface faces the rear surface of the head chip, the flexible substrate may cause a short circuit with the drive electrode or connection electrode exposed in or near the opening of the dummy channel. Is prevented. In addition, since the flexible substrate is provided so as to close the opening on the rear surface side of the dummy channel, there is an advantage that it is easy to cope with the higher density of the channel.
  • harmonica type head chips are supplied with ink from the rear side to each channel. For this reason, if the wiring electrode is exposed on the rear surface side of the head chip as described in Patent Document 2, the wiring electrode comes into direct contact with the ink, and there is a problem of electrode corrosion.
  • a protective film is formed on the surface of the electrode.
  • the protective film may penetrate, From the viewpoint of avoiding corrosion of steel, there are still problems to be solved.
  • the wiring electrode when the wiring electrode is disposed so as to face the rear surface of the head chip, the wiring electrode can be prevented from coming into direct contact with the ink, but is wired beyond the channel row.
  • the wiring electrode When viewed from the direction along the ink ejection direction, the wiring electrode passes over the driving wall between the channels, so the width of the driving wall becomes narrower as the channel becomes higher in density, making it difficult to achieve high density. There is a problem.
  • the present invention is such that the substrate having the wiring electrode is bonded to the rear surface of the independent drive type harmonica type head chip having a plurality of channel rows so that the wiring electrode is on the rear surface side of the head chip.
  • An object is to provide an inkjet head in which wiring electrodes can be arranged with high density and can easily cope with high density of channels.
  • Channels and drive walls made of piezoelectric elements are alternately arranged, and a plurality of channel rows in which drive electrodes are formed on the drive wall facing the channel are arranged side by side, and openings of the channels are respectively provided on the front surface and the rear surface.
  • a connecting electrode that is electrically connected to the driving electrode in the channel is formed on the rear surface, and the channel row is alternately arranged with a driving channel that ejects ink and a dummy channel that does not eject ink.
  • a head chip A wiring board that covers the plurality of channel rows with respect to the rear surface of the head chip and is bonded so as to protrude to the side of the head chip; By electrically connecting the wiring electrodes formed on the surface of the wiring board on the side bonded to the head chip to the connection electrodes, each of the connection electrodes is electrically drawn to the end of the wiring board.
  • An inkjet head that discharges ink in the drive channel from a nozzle by applying a voltage to the drive electrode via the wiring electrode and the connection electrode;
  • through holes for supplying ink are formed only at positions corresponding to the openings of the drive channels, and at least one of the plurality of through hole rows corresponding to the channel rows.
  • At least one of the wiring electrodes passes through and extends to the end of the wiring board that protrudes to the side of the head chip, At least one of the wiring electrodes passing between the through holes is not in contact with the opening of the dummy channel and overlaps the opening of the dummy channel when viewed from the ink discharge direction.
  • An inkjet head An inkjet head.
  • the head chip has two channel rows of A rows and B rows, One wiring corresponding to the drive channel of the B row among the wiring electrodes electrically connected to the connection electrode of the channel row of the B row is provided between the through holes of one A row. 3.
  • the ink jet head according to claim 1 or 2 wherein a total of two wiring electrodes of the electrode and one wiring electrode corresponding to the dummy channel in the B row adjacent to the driving channel pass therethrough.
  • the head chip has three channel rows of A row, B row and C row, Among the wiring electrodes electrically connected to the connection electrode of the channel row of the C row, between the through holes of one B row, one wiring corresponding to the drive channel of the C row A total of the two wiring electrodes of the electrode and one wiring electrode corresponding to the dummy channel in the C row adjacent to the driving channel pass through, One wiring corresponding to the drive channel of the B row among the wiring electrodes electrically connected to the connection electrode of the channel row of the B row is provided between the through holes of one A row.
  • the substrate having the wiring electrode is joined to the rear surface of the independently driven harmonica type head chip having a plurality of channel rows so that the wiring electrode is on the rear surface side of the head chip, It is possible to provide an inkjet head in which wiring electrodes can be arranged with high density and can easily cope with high density of channels.
  • FIG. 1 is an exploded perspective view of an inkjet head according to the present invention.
  • Partial rear view of a head chip according to the present invention Partial rear view showing the bonding state between the head chip and the wiring board Sectional view along line (iv)-(iv) in FIG. Sectional view along line (v)-(v) in FIG.
  • the head chip in the present invention has a plurality of parallel channel rows in which channels and drive walls made of piezoelectric elements are alternately arranged.
  • the head chip is arranged with channel openings facing the front and rear surfaces, respectively.
  • Each channel is formed in a straight shape whose cross-sectional shape does not change from the rear opening (channel inlet) to the front opening (channel outlet), and a drive electrode is formed on the surface of the drive wall facing each channel. Is done.
  • Such a head chip is a hexagonal so-called shear mode harmonica type head chip, and by applying a drive signal of a predetermined voltage to each drive electrode on both sides of the drive wall, the drive wall is shear-deformed, A change in pressure for ejection is applied to the ink supplied into the channel, and the ink is ejected as an ink droplet from a nozzle disposed on the front surface of the head chip.
  • a surface on which nozzles are arranged and ink is ejected is defined as a “front surface”, and a surface on the opposite side is defined as a “rear surface”.
  • a direction parallel to the front surface or the rear surface of the head chip and away from the head chip is defined as “side” of the head chip.
  • the channel row in the present invention is an independently driven head chip in which drive channels and dummy channels are alternately arranged.
  • connection electrodes that are electrically connected to the drive electrodes in the drive channel and the dummy channel are individually formed and arranged on the rear surface of the head chip at the same pitch as the corresponding drive channel or dummy channel.
  • the drive channel is a channel that ejects ink from the nozzles according to image data during image recording
  • the dummy channel is a channel that does not always eject ink regardless of the image data. Since the dummy channel does not need to eject ink, generally, ink is not filled or a nozzle corresponding to the dummy channel is not formed on the nozzle plate.
  • the wiring board bonded to the rear surface of the head chip by an adhesive is an intermediate wiring member that connects between the head chip and the drive circuit.
  • the electrical connection between the head chip and the electric wiring member from the drive circuit is relayed to facilitate electrical connection with the electric wiring member.
  • This wiring board electrically draws out each drive electrode to the side orthogonal to the channel row of the head chip via the corresponding connection electrode.
  • the wiring board according to the present invention is bonded to the rear surface of the head chip so as to cover all the channel rows opened in the rear surface and to have the end portion protruding to the side perpendicular to the channel row in the head chip. .
  • This wiring board has a through hole for enabling ink supply in the driving channel only at a position corresponding to the driving channel of the head chip. Therefore, the opening on the rear surface side of the dummy channel is closed by the wiring board.
  • the opening means a portion where the dummy channel is opened flush with the rear surface of the head chip.
  • a wiring electrode that is electrically connected to each connection electrode arranged on the rear surface of the head chip is formed on a surface (hereinafter referred to as a surface) of the wiring substrate that is bonded to the head chip.
  • each wiring electrode has one end electrically connected to the corresponding connection electrode and the other end protruding to the side of the head chip. It extends to the end.
  • At least one wiring electrode passes between the adjacent through holes in at least one through hole row.
  • the wiring electrode passing between the through holes is a wiring electrode that is electrically connected to the connection electrode of another channel row.
  • At least one wiring electrode passing between the through holes is in non-contact with the opening of the dummy channel in a state where the wiring substrate is bonded to the rear surface of the head chip via an adhesive, and When viewed from the ink ejection direction, it overlaps the opening of the dummy channel. That is, the wiring electrode passing between the through holes is not in contact with the rear surface of the head chip other than in contact with the connection electrode to which the wiring electrode is to be conducted.
  • the wiring electrode is in contact with the rear surface of the head chip other than the connection electrode of the corresponding channel. Therefore, occurrence of crosstalk and short circuit can be prevented.
  • at least one wiring electrode passing between the through holes passes over the opening of the dummy channel, even if the space between the channels is narrow, it is between adjacent through holes including the opening of the dummy channel. Since all of the space can be used, high-density wiring is possible without particularly reducing the width of the wiring electrode, and the channel density can be increased.
  • an electric wiring member having a wiring electrically connected to the wiring electrode is joined to an end portion of the wiring substrate protruding to the side of the head chip.
  • the electric wiring member is connected to the drive circuit, and a voltage from the drive circuit is applied to the drive electrode via the wiring electrode and the connection electrode of the wiring board.
  • the ink in a drive channel can be discharged from a nozzle.
  • a flexible printed circuit board hereinafter referred to as FPC
  • the substrate material is preferably one of glass, silicon, and ceramics.
  • the rigidity is higher than that of the resin material having the same thickness, the wiring board can be made thinner by that amount, and the flow path resistance of the through hole can be suppressed.
  • FIG. 1 is an exploded perspective view of an inkjet head
  • FIG. 2 is a partial rear view of the head chip.
  • 1 is a shear mode type harmonica head chip
  • 2 is a nozzle plate
  • 3 is a wiring board
  • 4 is an FPC.
  • the head chip 1 has two channel rows, A row and B row.
  • the lower channel row in FIG. 2 is the A row
  • the upper channel row is the B row.
  • drive channels 11A and 11B and dummy channels 12A and 12B are alternately arranged.
  • Drive walls 13A and 13B made of piezoelectric elements are formed between the drive channels 11A and 11B and the adjacent dummy channels 12A and 12B.
  • Each drive channel 11A, 11B and each dummy channel 12A, 12B are opened to the front surface 1a and the rear surface 1b of the head chip 1, respectively, and the drive electrode 14 is formed in close contact with the inner surface by plating, vapor deposition, sputtering, or the like. Has been.
  • the drive channel 11A and the dummy channel 12A of the channel row of the A row and the drive channel 11B and the dummy channel 12B of the channel row of the B row are arranged so as to be shifted from each other by one pitch. That is, when viewed in a direction parallel to the rear surface 1b of the head chip 1 and orthogonal to the channel row, the A-channel drive channel 11A and the B-row dummy channel 12B are positioned on the same straight line, and the A-row dummy channel The channel 12A and the drive channel 11B in the B row are located on the same straight line.
  • connection electrodes 15A and 15B that are electrically connected to the drive electrodes 14 of the drive channels 11A and 11B and the dummy channels 12A and 12B are formed by plating, vapor deposition, sputtering, or the like.
  • One end of each connection electrode 15A, 15B is electrically connected to the drive electrode 14 in the corresponding drive channel 11A, 11B or dummy channel 12A, 12B.
  • the other end of each connection electrode 15A corresponding to the drive channel 11A and the dummy channel 12A in the A row is formed from the inside of each channel 11A, 12A to one end edge 1c (lower end edge in FIG. 2) of the head chip 1.
  • connection electrode 15B corresponding to the drive channel 11B and the dummy channel 12B in the B row, the connection electrodes 15B extend from the channels 11B and 12B toward the A row side and before the channel row in the A row. Is formed. Accordingly, all of the connection electrodes 15A and 15B extend from the channels 11A, 11B, 12A, and 12B in the same direction (direction of the edge 1c).
  • the nozzle plate 2 is bonded to the front surface 1a of the head chip 1 with an adhesive.
  • nozzles 21 are opened only at positions corresponding to the drive channels 11A and 11B.
  • the wiring board 3 is a flat board that is larger than the outer shape of the rear surface 1 b of the head chip 1.
  • the wiring board 3 is joined to the rear surface 1b of the head chip 1, it is preferably difficult to bend, and glass, silicon, and ceramics are preferably used. In this embodiment, a glass substrate is used.
  • the bonding region 31 (the region indicated by the alternate long and short dash line in FIG. 1) 31 that is bonded to the rear surface 1b of the head chip 1, only the positions corresponding to the drive channels 11A and 11B opened on the rear surface 1b of the head chip 1 are not present.
  • Through holes 32A and 32B for individually supplying ink into the drive channels 11A and 11B from the illustrated common ink chamber are individually opened.
  • the opening areas of the through holes 32A and 32B are the same as or slightly larger than the opening areas of the drive channels 11A and 11B.
  • the thickness of the wiring board 3 is preferably 0.3 mm to 0.8 mm from the viewpoint of ensuring appropriate rigidity while suppressing the flow resistance of the through holes 32A and 32B.
  • wiring electrodes 33A and 33B that are electrically connected in a one-to-one correspondence with the connection electrodes 15A and 15B arranged on the rear surface 1b of the head chip 1 are provided on the wiring board.
  • 3 is formed by plating, vapor deposition, sputtering, or the like so as to extend in a direction crossing the channel row of the head chip 1 on the surface of 3.
  • each wiring electrode 33A corresponding to the connection electrode 15A drawn from each channel 11A, 12A in the A row is located in the vicinity corresponding to each channel 11A, 12A in the A row in the bonding region 31, and the other end is , Extending from the bonding region 31 toward a side perpendicular to the channel row of the head chip 1, protruding from the bonding region 31 and reaching the end 3 a of the wiring substrate 3.
  • each wiring electrode 33B corresponding to the connection electrode 15B drawn from each channel 11B, 12B in the B row is located in the vicinity corresponding to each channel 11B, 12B in the B row in the junction region 31.
  • the end extends in the same direction as the wiring electrode 33A, passes between adjacent through holes 32A in the A row, protrudes from the bonding region 31, reaches the end portion 3a of the wiring board 3, and alternates with the wiring electrodes 33A. It is arranged to be.
  • the wiring board 3 is positioned so that the wiring electrodes 33A and 33B are electrically connected to the connection electrodes 15A and 15B of the corresponding head chip 1, and bonded to the rear surface 1b of the head chip 1 by an adhesive.
  • an adhesive an anisotropic conductive adhesive containing conductive particles can be used, but it is preferable to use an adhesive containing no conductive particles in order to increase the reliability of short circuit prevention. .
  • FIG. 3 is a partial rear view of the state in which the wiring board 3 is bonded to the rear surface 1b of the head chip 1 as viewed from the back side of the wiring board 3.
  • FIG. 4 is a line (iv)-(iv) in FIG.
  • FIG. 5 is a sectional view taken along line (v)-(v) in FIG.
  • These wiring electrodes 33B 1 and 33B 2 extend between the adjacent through holes 32A and 32A in the A row to the end portion 3a of the wiring board 3.
  • Wiring electrodes 33B 2 having one end connected to the connecting electrodes 15B and electrically dummy channel 12B of the B column, the other end side of the through hole 32A of the A column from a connection portion between said connection electrode 15B, wire toward between 32A substrate 3 passes through the opening 120A so as to partially cover the edge 121a of the opening 120A of the dummy channel 12A in the A row located between the through holes 32A and 32A. Bends on the surface of the wiring board 3 toward the space between adjacent connection electrodes 15A and 15A in row A so as not to contact the connection electrode 15A of the dummy channel 12A, and is electrically connected to the connection electrodes 15A and 15A. It extends to the end portion 3a so as to be parallel to the wiring electrodes 33A and 33A.
  • the wiring electrodes 33B 1 whose one end is connected to the connection electrode 15B and the electrically driven channel 11B of row B, the other end is positioned between the through holes 32A, 32A of the A column from a connection portion between said connection electrode 15B on the opening 120A of the dummy channels 12A of the a column, after passing through the opening upper 120A so as to cover a portion to the wiring electrodes 33B 2 faces the edge portion 121a which is overlaying edges on 121b, the dummy so as not to contact with the connection electrodes 15A of the channel 12A, bent to the connection electrodes 15A of adjacent a column, and the wiring electrodes 33B 2 on the surface of the wiring board 3 toward between 15A opposite the connection electrodes 15A, It extends to the end 3a so as to be parallel to the wiring electrodes 33A and 33A electrically connected to 15A.
  • edges 121a and 121b of the opening 120A of the dummy channel 12A are drive electrodes formed on the opposing drive wall 13 among the four edges forming the periphery of the opening 120A of the dummy channel 12A.
  • 14 is the edge portion on the opening side.
  • the wiring electrodes 33B 1 and 33B 2 corresponding to the B-row channel row adjacent to the A-row channel row located on the outermost side of the head chip 1 are arranged.
  • the through holes 32A and 32A in the A row not only in the space on the drive walls 13A and 13A in the A row on the rear surface 1b of the head chip 1, but also in the opening 120A of the dummy channel 12A from this space
  • a part protrudes by the amount of protrusion c.
  • the wiring electrodes 33B 1 and 33B 2 are arranged so as to partially overlap the edges 121a and 121b of the opening 120A of the dummy channel 12A when viewed in the ink ejection direction (from the top to the bottom in FIG. 4). Has been.
  • these wiring electrodes 33B 1 and 33B 2 are both formed in close contact with the surface of the wiring substrate 3, they are not in contact with the opening 120A of the dummy channel 12A, that is, the rear surface 1b of the head chip 1. Since the gap S corresponding to the thickness of the connection electrodes 15A and 15B + the thickness of the wiring electrodes 33A and 33B is formed between the head chip 1 and the wiring board 3, as shown in FIGS. The surfaces of the wiring electrodes 33B 1 and 33B 2 are separated from the rear surface 1b of the head chip 1 by a distance corresponding to the thickness of the connection electrodes 15A and 15B at a portion other than the connection portion with the connection electrode 15B.
  • the surface of the wiring electrodes 33B 1 and 33B 2 and the rear surface 1b of the head chip 1 are insulated by being filled with the adhesive 50. Therefore, even if the wiring electrodes 33B 1 and 33B 2 are arranged so as to overlap the opening 120A, the wiring electrodes 33B 1 and 33B 2 do not come into contact with the driving electrode 14 exposed in the opening 120A, and there is a risk of crosstalk or short circuit. Absent.
  • the wiring space of the wiring electrodes 33B 1 and 33B 2 is not limited to the space corresponding to the thickness of the drive wall 13A, and a wide area extending between the through holes 32A and 32A can be used. Therefore, the wiring electrodes 33B 1 33B 2 can be formed wide. Therefore, an increase in the electrical resistance of the wiring electrodes 33B 1 and 33B 2 can be suppressed.
  • the wiring electrodes 33B 1 and 33B 2 passing over the opening 120A of the dummy channel 12A in the A column are wired so as to overlap the opening 120A of the dummy channel 12A, and then connected to the dummy channel 12A. It is bent so as to avoid the portion of the connection electrode 15A so as not to contact 15A, and is parallel to the wiring electrode 33A at the end 3a of the wiring board 3.
  • the head chip 1 is exemplified as having two channel rows of A row and B row, but the number of channel rows may be three or more.
  • an ink jet head using a head chip 1 ′ having three channel rows of A row, B row and C row will be described.
  • FIG. 6 is a partial rear view of the state in which the wiring board 3 ′ is bonded to the rear surface 1b of the head chip 1 ′ as viewed from the back side of the wiring board 3 ′
  • FIG. 7 is (vii)-(vii) in FIG. FIG.
  • the channel rows A and B have the same configuration as that of the head chip 1 including the two channel rows described above, and thus the description thereof is omitted here.
  • 3 and 4 are parts having the same configuration, and detailed description thereof is omitted.
  • the C columns are arranged such that the arrangement pitch of the drive channels 11C and the dummy channels 12C is the same as the arrangement pitch of the drive channels 11A and the dummy channels 12A of the A columns.
  • two wiring electrodes 33C that pass between adjacent through holes 32B, 32B in the B row of the wiring board 3 ′ that is, wiring that is electrically connected to the connection electrode 15C of the drive channel 11C in the C row.
  • the electrode 33C 1 and the wiring electrode 33C 2 electrically connected to the connection electrode 15C of the dummy channel 12C in the C row pass so as to overlap with the opening 120B of the dummy channel 12B in the B row, and are described above. It has the same configuration as the wiring electrodes 33B 1 and 33B 2 that pass between the through holes 32A and 32A in the A row in the embodiment of the two channel rows. In this case, A in the code is read as B, and B is read as C.
  • the wiring electrodes 33B 1 and 33B 2 that are electrically connected to the connection electrodes 15B in the B row, and the wiring electrodes that are electrically connected to the connection electrodes 15C in the C row are arranged.
  • the wiring electrodes 33B 1 and 33C 1 located on the inner side of the opening 120A are overlapped with the openings 120A of the dummy channels 12A in the A row when viewed from the ink discharge direction.
  • the wiring electrodes 33B 2 and 33C 2 located on the outer side are respectively disposed within the thickness range of the drive wall 13A.
  • Each of the wiring electrodes 33B 1 , 33B 2 , 33C 1 , 33C 2 is not in contact with the rear surface 1b of the head chip 1, and the adhesive 50 is filled between the rear surfaces 1b.
  • the head chip 1 having two channel rows shown in FIGS. 1 to 5 is configured so that the lead-out directions of the wiring electrodes 33A and 33B on the surface of the wiring board 3 are on both ends with the head chip interposed therebetween.
  • the two head chips 1 can be arranged in parallel to form a head chip having four channel rows.
  • a head chip having six channel rows can be similarly formed.
  • the drive wall thickness is 59 ⁇ m
  • the channel width is 82 ⁇ m
  • the through hole width is 102 ⁇ m.
  • the distance a1 between the wiring electrode and the adjacent through hole, and the opening between the wiring electrode and the dummy channel In this case, the width of each wiring electrode is 9 ⁇ m at the maximum. Wiring with a width of 20 ⁇ m or less is highly difficult to manufacture, and even if it can be manufactured, the wiring thickness must be reduced in proportion to the wiring width. It is expected to adversely affect the ink ejection.
  • the channel density up to about 120 dpi is the limit as shown in Table 1.
  • the width of the wiring electrode can be a maximum of 46 ⁇ m, and 1/3 of the distance b in FIG. The width that can be passed.
  • a distance b of 1/7 can pass through the wiring electrode, and can be realized if the channel density is 180 dpi.
  • Head chip 1a Front surface 1b: Rear surface 1c: Edges 11A, 11B, 11C: Drive channels 12A, 12B, 12C: Dummy channels 120A, 120B: Openings 121a, 121b: Edges 13A, 13B: Drive walls 14: driving electrodes 15A, 15B: connection electrode 2: nozzle plate 21: nozzle 3,3 ': wiring board 3a: end 31: junction regions 32A, 32B, 32C: through holes 33A, 33B, 33B 1, 33B 2 , 33C 1 , 33C 2 : Wiring electrode 4: FPC 50: Adhesive

Abstract

The purpose of the present invention is to provide an ink-jet head which enables the disposition of wiring electrodes at high density and can easily support an increased density of channels. An ink-jet head comprises a head chip (1) in which drive channels and dummy channels are alternately disposed, and a wiring substrate (3), and is characterized in that in the wiring substrate (3), through-holes for supplying ink are formed only at positions corresponding to openings of the drive channels, at least one wiring electrode passes between adjacent through-holes in at least one row of through-holes among a plurality of rows of through-holes corresponding to channel rows and extends to an end of the wiring substrate projecting sideways from the head chip, and at least one wiring electrode passing between the through-holes is not in contact with an opening of the dummy channel and overlaps with the opening of the dummy channel as seen from an ink discharge direction.

Description

インクジェットヘッドInkjet head
 本発明はインクジェットヘッドに関し、詳しくは、駆動チャネルとダミーチャネルとが交互に配置されたヘッドチップを有し、チャネルの高密度化を図り得るインクジェットヘッドに関する。 The present invention relates to an ink jet head, and more particularly, to an ink jet head having a head chip in which drive channels and dummy channels are alternately arranged, and capable of increasing the density of the channels.
 チャネルを区画する駆動壁に形成された駆動電極に所定電圧の駆動信号を印加することにより駆動壁をせん断変形させ、そのとき発生する圧力を利用してチャネル内のインクをノズルから吐出させるようにしたせん断モード型のインクジェットヘッドとして、前面及び後面にそれぞれチャネルの開口部が配置されたいわゆるハーモニカ型のヘッドチップを有するものが知られている。 By applying a drive signal of a predetermined voltage to the drive electrode formed on the drive wall that partitions the channel, the drive wall is subjected to shear deformation, and ink in the channel is ejected from the nozzle by using the pressure generated at that time. As such a shear mode type ink jet head, one having a so-called harmonica type head chip in which opening portions of channels are respectively arranged on the front surface and the rear surface is known.
 ハーモニカ型のヘッドチップは、駆動電極がチャネル内に臨んでいて外部に露出していないため、如何にして各駆動電極と駆動回路との電気的接続を行うかが課題である。ヘッドチップに複数並設されるチャネル列のうち、外側に位置するチャネル列は、ヘッドチップの後面を利用して各チャネルからヘッドチップの端部にかけて駆動電極と導通する接続電極を形成することで、このヘッドチップの端部においてFPC等との電気的接続を行うことが容易である。しかし、内側に位置するチャネル列の駆動電極に対する駆動信号の印加もヘッドチップの端部から行なおうとする場合、各駆動電極と導通する接続電極を外側のチャネル列を越えてヘッドチップの端部まで形成しなくてはならないという問題がある。 In the harmonica type head chip, since the drive electrode faces the channel and is not exposed to the outside, the problem is how to electrically connect each drive electrode to the drive circuit. Among the channel rows arranged in parallel on the head chip, the channel row located outside forms a connection electrode that is electrically connected to the drive electrode from each channel to the end of the head chip using the rear surface of the head chip. It is easy to make an electrical connection with an FPC or the like at the end of the head chip. However, when the drive signal is applied to the drive electrodes of the channel rows located on the inner side from the end of the head chip, the connection electrodes that are electrically connected to the drive electrodes extend beyond the outer channel row to the end of the head chip. There is a problem that it has to be formed.
 従来、このような問題を解決するため、特許文献1には、4列のチャネル列を、チャネルのピッチを1/4ずつずらして配置すると共に、各チャネル内の駆動電極をヘッドチップの後面側の開口部の周辺に露出することでそれぞれ電気的接点を形成し、このヘッドチップの後面に対し、片面に配線電極を形成したフレキシブル基板を、配線電極形成面をヘッドチップの後面に対面させ、該後面の全面を覆うように接合することで、全てのチャネル列の各駆動電極に対し、ヘッドチップの一側方から駆動信号を印加できるようにすることが開示されている。 Conventionally, in order to solve such a problem, Patent Document 1 discloses that four channel rows are arranged by shifting the channel pitch by ¼, and driving electrodes in each channel are arranged on the rear side of the head chip. An electrical contact is formed by being exposed to the periphery of each of the openings, a flexible substrate having a wiring electrode formed on one side of the rear surface of the head chip, and a wiring electrode forming surface facing the rear surface of the head chip, It is disclosed that a drive signal can be applied from one side of the head chip to each drive electrode of all channel rows by bonding so as to cover the entire rear surface.
 このフレキシブル基板には、各チャネルに対応する位置に貫通穴が形成され、この貫通穴を通して各チャネルへのインク供給を可能としている。同一チャネル列における隣接する貫通穴の間には、それよりも内側に位置するチャネル列の電気的接点と電気的に接続される配線電極が形成される。特許文献1では、4列のチャネル列相互でピッチを1/4ずつずらすことで、チャネル間には、最大で3本分の配線電極が通ることになる。各配線電極は隣接する貫通穴の間を通るため、インク吐出方向に沿う方向から見た場合、駆動壁の幅(厚み)の範囲内に収まるように配設される。 In the flexible substrate, through holes are formed at positions corresponding to the respective channels, and ink can be supplied to the respective channels through the through holes. Between adjacent through-holes in the same channel row, a wiring electrode is formed which is electrically connected to the electrical contacts of the channel row located on the inner side. In Patent Document 1, by shifting the pitch by ¼ between the four channel columns, a maximum of three wiring electrodes pass between the channels. Since each wiring electrode passes between adjacent through holes, the wiring electrodes are arranged so as to be within the range of the width (thickness) of the drive wall when viewed from the direction along the ink ejection direction.
 ところで、せん断モード型のインクジェットヘッドには、チャネル列内の各チャネルを、インク吐出を行う駆動チャネルとインク吐出を行わないダミーチャネルとに分け、これらを交互に配置することによってチャネル列を構成した独立駆動タイプのヘッドチップを有するインクジェットヘッドがある。駆動チャネルとダミーチャネルとを交互に配置することにより、全ての駆動チャネルから同時にインクを吐出することが可能である。 By the way, in the shear mode type ink-jet head, each channel in the channel row is divided into a drive channel that discharges ink and a dummy channel that does not discharge ink, and the channel row is configured by alternately arranging these channels. There is an ink jet head having an independently driven type head chip. By alternately arranging the drive channels and the dummy channels, it is possible to simultaneously eject ink from all the drive channels.
 特許文献2には、このような独立駆動タイプのハーモニカ型のヘッドチップの後面に、各チャネル内の駆動電極と導通する接続電極を形成し、複数並設されるチャネル列のうちの内側に位置するチャネル列の接続電極を、ヘッドチップの後面において、片面に配線電極を形成したフレキシブル基板を該配線電極の幅と同幅の細幅状に用いて、外側のチャネル列を越えてヘッドチップの端部まで引き出すことが開示されている。 In Patent Document 2, a connection electrode that is electrically connected to a drive electrode in each channel is formed on the rear surface of such an independent drive type harmonica type head chip, and is positioned inside a plurality of juxtaposed channel rows. The connection electrode of the channel row to be used is formed on the rear surface of the head chip on the rear surface of the head chip by using a flexible substrate having a wiring electrode formed on one side so as to have a narrow width equal to the width of the wiring electrode. Pulling out to the end is disclosed.
 配線電極を形成したフレキシブル基板は、外側のチャネル列を越える際、ダミーチャネルの後面側の開口部を塞ぐように設けられている。フレキシブル基板は、配線電極形成面と反対側の面をヘッドチップの後面に対面させているため、ダミーチャネルの開口部内やその近傍に露出している駆動電極や接続電極とのショートを引き起こすことが防止される。しかも、ダミーチャネルの後面側の開口部を塞ぐようにフレキシブル基板を設けるので、チャネルの高密度化にも対応し易い利点がある。 The flexible substrate on which the wiring electrode is formed is provided so as to close the opening on the rear surface side of the dummy channel when crossing the outer channel row. Since the surface opposite to the wiring electrode formation surface faces the rear surface of the head chip, the flexible substrate may cause a short circuit with the drive electrode or connection electrode exposed in or near the opening of the dummy channel. Is prevented. In addition, since the flexible substrate is provided so as to close the opening on the rear surface side of the dummy channel, there is an advantage that it is easy to cope with the higher density of the channel.
特開2002-178509号公報JP 2002-178509 A 特開2008-143167号公報JP 2008-143167 A
 通常、ハーモニカ型のヘッドチップは、後面側から各チャネルにインクが供給される。このため、特許文献2に記載のようにヘッドチップの後面側に配線電極が露出していると、配線電極がインクと直に接触してしまい、電極の腐食の問題がある。 Normally, harmonica type head chips are supplied with ink from the rear side to each channel. For this reason, if the wiring electrode is exposed on the rear surface side of the head chip as described in Patent Document 2, the wiring electrode comes into direct contact with the ink, and there is a problem of electrode corrosion.
 電極がインクと直に接触することを回避する場合、一般に、電極表面に保護膜を形成することが知られているが、使用するインクによっては保護膜を浸透してしまう可能性があり、電極の腐食を回避する観点からは依然解決すべき課題を有している。 In order to prevent the electrode from coming into direct contact with the ink, it is generally known that a protective film is formed on the surface of the electrode. However, depending on the ink used, the protective film may penetrate, From the viewpoint of avoiding corrosion of steel, there are still problems to be solved.
 特許文献1に記載のように、配線電極がヘッドチップの後面と対向するように配置する場合、配線電極がインクと直に接触することを防ぐことができるが、チャネル列を越えて配線される配線電極は、インク吐出方向に沿う方向から見た場合、チャネル間の駆動壁上を通るようにしているため、チャネルが高密度になるにつれて駆動壁の幅が狭小となり、高密度化を図り難いという問題がある。 As described in Patent Document 1, when the wiring electrode is disposed so as to face the rear surface of the head chip, the wiring electrode can be prevented from coming into direct contact with the ink, but is wired beyond the channel row. When viewed from the direction along the ink ejection direction, the wiring electrode passes over the driving wall between the channels, so the width of the driving wall becomes narrower as the channel becomes higher in density, making it difficult to achieve high density. There is a problem.
 すなわち、特許文献1に記載の技術では、チャネルが高密度になって配線電極を通過させるべきチャネル間のスペース(駆動壁の幅)が狭小となるにつれ、配線電極をより細幅に形成しなくてはならなくなる。しかし、配線電極を細幅にすると電気抵抗の増大化を招く結果となり、細幅化にも自ずと限界がある。 That is, in the technique described in Patent Document 1, as the channels become denser and the space between the channels through which the wiring electrodes should pass (the width of the drive wall) becomes narrower, the wiring electrodes are not formed narrower. It must not be. However, if the wiring electrode is made narrow, the electrical resistance is increased, and there is a limit to the narrowing of the wiring electrode.
 そこで、本発明は、複数のチャネル列を有する独立駆動タイプのハーモニカ型ヘッドチップの後面に対して、配線電極を有する基板を該配線電極がヘッドチップの後面側となるように接合しても、高密度に配線電極を配置することができ、チャネルの高密度化にも容易に対応可能なインクジェットヘッドを提供することを課題とする。 Therefore, the present invention is such that the substrate having the wiring electrode is bonded to the rear surface of the independent drive type harmonica type head chip having a plurality of channel rows so that the wiring electrode is on the rear surface side of the head chip. An object is to provide an inkjet head in which wiring electrodes can be arranged with high density and can easily cope with high density of channels.
 本発明の他の課題は、以下の記載により明らかとなる。 Other problems of the present invention will become apparent from the following description.
 上記課題は、以下の各発明によって解決される。 The above problems are solved by the following inventions.
1.チャネルと圧電素子からなる駆動壁とが交互に配置されると共に前記チャネル内に臨む前記駆動壁に駆動電極が形成されたチャネル列が複数並設され、前面及び後面にそれぞれ前記チャネルの開口部が配置され、該後面に、前記チャネル内の前記駆動電極と導通する接続電極がそれぞれ形成され、前記チャネル列がインク吐出を行う駆動チャネルとインク吐出を行わないダミーチャネルとが交互に配置されて構成されてなるヘッドチップと、
 前記ヘッドチップの後面に対して複数の前記チャネル列を覆うと共に該ヘッドチップの側方へ張り出すように接合される配線基板とを有し、
 前記配線基板における前記ヘッドチップと接合される側の面に形成された配線電極を前記接続電極と電気的に接続させることによって、該接続電極の各々を前記配線基板の端部まで電気的に引き出し、前記配線電極及び前記接続電極を介して前記駆動電極に電圧を印加することによって、前記駆動チャネル内のインクをノズルから吐出させるインクジェットヘッドであって、
 前記配線基板は、前記駆動チャネルの開口部に対応する位置のみにインク供給用の貫通穴がそれぞれ形成されていると共に、前記チャネル列に対応する複数の前記貫通穴の列のうち、少なくとも1つの前記貫通穴の列における隣接する該貫通穴の間には、少なくとも1本の前記配線電極が通って前記ヘッドチップの前記側方へ張り出した前記配線基板の端部まで延びており、
 前記貫通穴の間を通る少なくとも1本の前記配線電極は、前記ダミーチャネルの開口部とは非接触であり、且つ、インク吐出方向から見て前記ダミーチャネルの開口部に重なっていることを特徴とするインクジェットヘッド。
1. Channels and drive walls made of piezoelectric elements are alternately arranged, and a plurality of channel rows in which drive electrodes are formed on the drive wall facing the channel are arranged side by side, and openings of the channels are respectively provided on the front surface and the rear surface. A connecting electrode that is electrically connected to the driving electrode in the channel is formed on the rear surface, and the channel row is alternately arranged with a driving channel that ejects ink and a dummy channel that does not eject ink. A head chip,
A wiring board that covers the plurality of channel rows with respect to the rear surface of the head chip and is bonded so as to protrude to the side of the head chip;
By electrically connecting the wiring electrodes formed on the surface of the wiring board on the side bonded to the head chip to the connection electrodes, each of the connection electrodes is electrically drawn to the end of the wiring board. An inkjet head that discharges ink in the drive channel from a nozzle by applying a voltage to the drive electrode via the wiring electrode and the connection electrode;
In the wiring board, through holes for supplying ink are formed only at positions corresponding to the openings of the drive channels, and at least one of the plurality of through hole rows corresponding to the channel rows. Between the adjacent through-holes in the row of through-holes, at least one of the wiring electrodes passes through and extends to the end of the wiring board that protrudes to the side of the head chip,
At least one of the wiring electrodes passing between the through holes is not in contact with the opening of the dummy channel and overlaps the opening of the dummy channel when viewed from the ink discharge direction. An inkjet head.
2.前記配線基板は、ガラス、シリコン、セラミックスのいずれかからなることを特徴とする前記1記載のインクジェットヘッド。 2. 2. The inkjet head according to 1, wherein the wiring board is made of any one of glass, silicon, and ceramics.
3.前記ヘッドチップは、A列及びB列の2列のチャネル列を有し、
 一つのA列の前記貫通穴の間には、前記B列のチャネル列の前記接続電極と電気的に接続する前記配線電極のうち、該B列の前記駆動チャネルに対応する1本の前記配線電極と、該駆動チャネルに隣接するB列の前記ダミーチャネルに対応する1本の前記配線電極の合計2本の前記配線電極が通っていることを特徴とする前記1又は2記載のインクジェットヘッド。
3. The head chip has two channel rows of A rows and B rows,
One wiring corresponding to the drive channel of the B row among the wiring electrodes electrically connected to the connection electrode of the channel row of the B row is provided between the through holes of one A row. 3. The ink jet head according to claim 1 or 2, wherein a total of two wiring electrodes of the electrode and one wiring electrode corresponding to the dummy channel in the B row adjacent to the driving channel pass therethrough.
4.前記ヘッドチップは、A列、B列及びC列の3列のチャネル列を有し、
 一つのB列の前記貫通穴の間には、前記C列のチャネル列の前記接続電極と電気的に接続する前記配線電極のうち、該C列の前記駆動チャネルに対応する1本の前記配線電極と、該駆動チャネルに隣接するC列の前記ダミーチャネルに対応する1本の前記配線電極の合計2本の前記配線電極が通っており、
 一つのA列の前記貫通穴の間には、前記B列のチャネル列の前記接続電極と電気的に接続する前記配線電極のうち、該B列の前記駆動チャネルに対応する1本の前記配線電極と、該駆動チャネルに隣接するB列の前記ダミーチャネルに対応する1本の前記配線電極の2本と、前記C列の前記駆動チャネルに対応する1本の前記配線電極と、該駆動チャネルに隣接するC列の前記ダミーチャネルに対応する1本の前記配線電極の2本との合計4本の前記配線電極が通っていることを特徴とする前記1又は2記載のインクジェットヘッド。
4). The head chip has three channel rows of A row, B row and C row,
Among the wiring electrodes electrically connected to the connection electrode of the channel row of the C row, between the through holes of one B row, one wiring corresponding to the drive channel of the C row A total of the two wiring electrodes of the electrode and one wiring electrode corresponding to the dummy channel in the C row adjacent to the driving channel pass through,
One wiring corresponding to the drive channel of the B row among the wiring electrodes electrically connected to the connection electrode of the channel row of the B row is provided between the through holes of one A row. An electrode, two of the wiring electrodes corresponding to the dummy channel in the B row adjacent to the driving channel, one wiring electrode corresponding to the driving channel in the C row, and the driving channel 4. The inkjet head according to claim 1, wherein a total of four wiring electrodes including two of the one wiring electrode corresponding to the dummy channel in the C row adjacent to the C row pass.
 本発明によれば、複数のチャネル列を有する独立駆動タイプのハーモニカ型ヘッドチップの後面に対して、配線電極を有する基板を該配線電極がヘッドチップの後面側となるように接合しても、高密度に配線電極を配置することができ、チャネルの高密度化にも容易に対応可能なインクジェットヘッドを提供することができる。 According to the present invention, even if the substrate having the wiring electrode is joined to the rear surface of the independently driven harmonica type head chip having a plurality of channel rows so that the wiring electrode is on the rear surface side of the head chip, It is possible to provide an inkjet head in which wiring electrodes can be arranged with high density and can easily cope with high density of channels.
本発明に係るインクジェットヘッドの分解斜視図1 is an exploded perspective view of an inkjet head according to the present invention. 本発明に係るヘッドチップの部分背面図Partial rear view of a head chip according to the present invention ヘッドチップと配線基板との接合状態を示す部分背面図Partial rear view showing the bonding state between the head chip and the wiring board 図3の(iv)-(iv)線に沿う断面図Sectional view along line (iv)-(iv) in FIG. 図3の(v)-(v)線に沿う断面図Sectional view along line (v)-(v) in FIG. 3列のチャネル列を備えたヘッドチップと配線基板との接合状態を示す部分背面図Partial rear view showing a bonding state between a head chip having three channel rows and a wiring board 図6の(vii)-(vii)線に沿う断面図Sectional view along line (vii)-(vii) in FIG. 比較例を示すインクジェットヘッドの部分断面図Partial sectional view of an inkjet head showing a comparative example
 本発明におけるヘッドチップは、チャネルと圧電素子からなる駆動壁とが交互に配置されてなるチャネル列を複数平行に有している。ヘッドチップは、前面及び後面にそれぞれチャネルの開口部が対向して配置される。各チャネルは、後面の開口部(チャネルの入口)から前面の開口部(チャネルの出口)にかけて断面形状が変化しないストレート状に形成され、各チャネル内に臨む駆動壁の表面には駆動電極が形成される。 The head chip in the present invention has a plurality of parallel channel rows in which channels and drive walls made of piezoelectric elements are alternately arranged. The head chip is arranged with channel openings facing the front and rear surfaces, respectively. Each channel is formed in a straight shape whose cross-sectional shape does not change from the rear opening (channel inlet) to the front opening (channel outlet), and a drive electrode is formed on the surface of the drive wall facing each channel. Is done.
 このようなヘッドチップは、六面体からなるいわゆるせん断モード型のハーモニカ型ヘッドチップであり、駆動壁両面の各駆動電極に所定電圧の駆動信号を印加することによって該駆動壁をせん断変形させることによって、チャネル内に供給されたインクに吐出のための圧力変化を与え、ヘッドチップの前面に配置されたノズルからインク滴として吐出させる。 Such a head chip is a hexagonal so-called shear mode harmonica type head chip, and by applying a drive signal of a predetermined voltage to each drive electrode on both sides of the drive wall, the drive wall is shear-deformed, A change in pressure for ejection is applied to the ink supplied into the channel, and the ink is ejected as an ink droplet from a nozzle disposed on the front surface of the head chip.
 本発明では、このような六面体のハーモニカ型のヘッドチップにおいて、ノズルが配置されてインクが吐出される側の面を「前面」、その反対側の面を「後面」と定義する。また、ヘッドチップの前面又は後面と平行な方向であって該ヘッドチップから離れる方向をヘッドチップの「側方」と定義する。 In the present invention, in such a hexahedral harmonica type head chip, a surface on which nozzles are arranged and ink is ejected is defined as a “front surface”, and a surface on the opposite side is defined as a “rear surface”. A direction parallel to the front surface or the rear surface of the head chip and away from the head chip is defined as “side” of the head chip.
 本発明におけるチャネル列は、駆動チャネルとダミーチャネルとが交互に配置される独立駆動型のヘッドチップである。ヘッドチップの後面には、駆動チャネル及びダミーチャネル内の各駆動電極と導通する接続電極がそれぞれ個別に形成され、対応する駆動チャネル又はダミーチャネルと同ピッチでヘッドチップの後面に配列される。 The channel row in the present invention is an independently driven head chip in which drive channels and dummy channels are alternately arranged. On the rear surface of the head chip, connection electrodes that are electrically connected to the drive electrodes in the drive channel and the dummy channel are individually formed and arranged on the rear surface of the head chip at the same pitch as the corresponding drive channel or dummy channel.
 駆動チャネルとは、画像記録時に画像データに応じてノズルからインク吐出を行うチャネルであり、ダミーチャネルとは、画像データに関わらず、常にインク吐出を行わないチャネルである。ダミーチャネルはインク吐出を行う必要がないため、一般にインクが充填されないか、ノズルプレートにダミーチャネルに対応するノズルが形成されない。 The drive channel is a channel that ejects ink from the nozzles according to image data during image recording, and the dummy channel is a channel that does not always eject ink regardless of the image data. Since the dummy channel does not need to eject ink, generally, ink is not filled or a nozzle corresponding to the dummy channel is not formed on the nozzle plate.
 ヘッドチップの後面に接着剤によって接合される配線基板は、ヘッドチップと駆動回路との間をつなぐ中間配線部材である。好ましくは、ヘッドチップと駆動回路からの電気配線部材との間を中継し、該電気配線部材との電気的接続の容易化を図る。この配線基板は、各駆動電極をそれに対応する接続電極を介してヘッドチップのチャネル列と直交する側方に電気的に引き出す。 The wiring board bonded to the rear surface of the head chip by an adhesive is an intermediate wiring member that connects between the head chip and the drive circuit. Preferably, the electrical connection between the head chip and the electric wiring member from the drive circuit is relayed to facilitate electrical connection with the electric wiring member. This wiring board electrically draws out each drive electrode to the side orthogonal to the channel row of the head chip via the corresponding connection electrode.
 本発明における配線基板は、ヘッドチップの後面に対して、該後面に開口する全てのチャネル列を覆うと共に、端部が該ヘッドチップにおけるチャネル列と直交する側方へ張り出すように接合される。 The wiring board according to the present invention is bonded to the rear surface of the head chip so as to cover all the channel rows opened in the rear surface and to have the end portion protruding to the side perpendicular to the channel row in the head chip. .
 この配線基板は、ヘッドチップの駆動チャネルに対応する位置のみに、該駆動チャネル内にインク供給を可能とするための貫通穴を有している。従って、ダミーチャネルの後面側の開口部は、この配線基板によって塞がれる。 This wiring board has a through hole for enabling ink supply in the driving channel only at a position corresponding to the driving channel of the head chip. Therefore, the opening on the rear surface side of the dummy channel is closed by the wiring board.
 なお、この開口部とは、ダミーチャネルがヘッドチップの後面と面一状に開口している部分をいう。 The opening means a portion where the dummy channel is opened flush with the rear surface of the head chip.
 配線基板のヘッドチップと接合される側の面(以下、表面という。)には、ヘッドチップの後面に配列される各接続電極とそれぞれ電気的に接続される配線電極が形成される。この配線基板がヘッドチップの後面と接合された状態で、配線電極の各々は、その一端が、対応する接続電極と電気的に接続され、他端が、ヘッドチップの側方へ張り出した配線基板の端部まで延びている。 A wiring electrode that is electrically connected to each connection electrode arranged on the rear surface of the head chip is formed on a surface (hereinafter referred to as a surface) of the wiring substrate that is bonded to the head chip. In a state where the wiring substrate is bonded to the rear surface of the head chip, each wiring electrode has one end electrically connected to the corresponding connection electrode and the other end protruding to the side of the head chip. It extends to the end.
 ヘッドチップのチャネル列に対応する配線基板の複数の貫通穴の列のうち、少なくとも1つの貫通穴の列における隣接する該貫通穴の間には、少なくとも1本の配線電極が通っている。この貫通穴の間を通る配線電極は、他のチャネル列の接続電極と電気的に接続される配線電極である。 Among the plurality of through hole rows of the wiring substrate corresponding to the channel row of the head chip, at least one wiring electrode passes between the adjacent through holes in at least one through hole row. The wiring electrode passing between the through holes is a wiring electrode that is electrically connected to the connection electrode of another channel row.
 この貫通穴の間を通る少なくとも1本の配線電極は、配線基板がヘッドチップの後面に接着剤を介して接合された状態で、ダミーチャネルの開口部とは非接触となっており、且つ、インク吐出方向から見て、ダミーチャネルの開口部に重なっている。すなわち、この貫通穴の間を通る配線電極は、当該配線電極が導通すべき接続電極と接触する以外、ヘッドチップの後面には接触していない。 At least one wiring electrode passing between the through holes is in non-contact with the opening of the dummy channel in a state where the wiring substrate is bonded to the rear surface of the head chip via an adhesive, and When viewed from the ink ejection direction, it overlaps the opening of the dummy channel. That is, the wiring electrode passing between the through holes is not in contact with the rear surface of the head chip other than in contact with the connection electrode to which the wiring electrode is to be conducted.
 これにより、配線電極がヘッドチップの後面側となるように配線基板をヘッドチップの後面全面に対して接合しても、配線電極は対応するチャネルの接続電極以外、ヘッドチップの後面に接触することはないため、クロストーク及びショートの発生を防止できる。しかも、貫通穴の間を通る少なくとも1本の配線電極はダミーチャネルの開口部上を通るため、チャネル間のスペースが狭小であっても、ダミーチャネルの開口部上を含む隣接する貫通穴の間のスペースを全て利用することができるため、配線電極を殊更細幅にしなくても高密度な配線が可能であり、チャネルの高密度化にも対応できる。 As a result, even if the wiring board is bonded to the entire rear surface of the head chip so that the wiring electrode is on the rear surface side of the head chip, the wiring electrode is in contact with the rear surface of the head chip other than the connection electrode of the corresponding channel. Therefore, occurrence of crosstalk and short circuit can be prevented. In addition, since at least one wiring electrode passing between the through holes passes over the opening of the dummy channel, even if the space between the channels is narrow, it is between adjacent through holes including the opening of the dummy channel. Since all of the space can be used, high-density wiring is possible without particularly reducing the width of the wiring electrode, and the channel density can be increased.
 このようなインクジェットヘッドには、ヘッドチップの側方へ張り出した配線基板の端部に、配線電極と電気的に接続される配線を有する電気配線部材が接合される。電気配線部材は駆動回路とつながっており、配線基板の配線電極及び接続電極を介して駆動電極に駆動回路からの電圧が印加される。これにより駆動チャネル内のインクをノズルから吐出させることができる。電気配線部材としては、フレキシブルプリント基板(以下、FPCという。)が好ましく用いられる。 In such an ink jet head, an electric wiring member having a wiring electrically connected to the wiring electrode is joined to an end portion of the wiring substrate protruding to the side of the head chip. The electric wiring member is connected to the drive circuit, and a voltage from the drive circuit is applied to the drive electrode via the wiring electrode and the connection electrode of the wiring board. Thereby, the ink in a drive channel can be discharged from a nozzle. As the electrical wiring member, a flexible printed circuit board (hereinafter referred to as FPC) is preferably used.
 本発明における配線基板は、基板材料がガラス、シリコン、セラミックスのいずれかであることが好ましい。これらを用いた場合、同じ厚みの樹脂材料に比べて剛性が高く、それだけ配線基板を薄くすることができ、貫通穴の流路抵抗を抑えることができる。 In the wiring board according to the present invention, the substrate material is preferably one of glass, silicon, and ceramics. When these are used, the rigidity is higher than that of the resin material having the same thickness, the wiring board can be made thinner by that amount, and the flow path resistance of the through hole can be suppressed.
 以下、本発明の実施の形態について図面を用いて説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
 図1はインクジェットヘッドの分解斜視図、図2はそのヘッドチップの部分背面図である。 FIG. 1 is an exploded perspective view of an inkjet head, and FIG. 2 is a partial rear view of the head chip.
 図中、1はせん断モード型のハーモニカ型ヘッドチップ、2はノズルプレート、3は配線基板、4はFPCである。 In the figure, 1 is a shear mode type harmonica head chip, 2 is a nozzle plate, 3 is a wiring board, and 4 is an FPC.
 このヘッドチップ1は、A列、B列の2列のチャネル列を有している。ここでは、図2中の下側のチャネル列をA列、上側のチャネル列をB列とする。各チャネル列は、それぞれ駆動チャネル11A、11Bとダミーチャネル12A、12Bとが交互に配置されている。駆動チャネル11A、11Bと隣接するダミーチャネル12A、12Bとの間は圧電素子からなる駆動壁13A、13Bとなっている。各駆動チャネル11A、11Bと各ダミーチャネル12A、12Bは、ヘッドチップ1の前面1aと後面1bとにそれぞれ開口しており、その内面には駆動電極14がめっき、蒸着又はスパッタリング等によってそれぞれ密着形成されている。 The head chip 1 has two channel rows, A row and B row. Here, the lower channel row in FIG. 2 is the A row, and the upper channel row is the B row. In each channel row, drive channels 11A and 11B and dummy channels 12A and 12B are alternately arranged. Drive walls 13A and 13B made of piezoelectric elements are formed between the drive channels 11A and 11B and the adjacent dummy channels 12A and 12B. Each drive channel 11A, 11B and each dummy channel 12A, 12B are opened to the front surface 1a and the rear surface 1b of the head chip 1, respectively, and the drive electrode 14 is formed in close contact with the inner surface by plating, vapor deposition, sputtering, or the like. Has been.
 なお、ヘッドチップ1は、A列のチャネル列の駆動チャネル11A及びダミーチャネル12Aと、B列のチャネル列の駆動チャネル11B及びダミーチャネル12Bとが互いに1ピッチずつずれて配置されている。すなわち、ヘッドチップ1の後面1bと平行且つチャネル列と直交する方向に沿って見た場合、A列の駆動チャネル11AとB列のダミーチャネル12Bとが同一直線上に位置し、A列のダミーチャネル12AとB列の駆動チャネル11Bとが同一直線上に位置している。 In the head chip 1, the drive channel 11A and the dummy channel 12A of the channel row of the A row and the drive channel 11B and the dummy channel 12B of the channel row of the B row are arranged so as to be shifted from each other by one pitch. That is, when viewed in a direction parallel to the rear surface 1b of the head chip 1 and orthogonal to the channel row, the A-channel drive channel 11A and the B-row dummy channel 12B are positioned on the same straight line, and the A-row dummy channel The channel 12A and the drive channel 11B in the B row are located on the same straight line.
 ヘッドチップ1の後面1bには、駆動チャネル11A、11B及びダミーチャネル12A、12Bの各駆動電極14と導通する接続電極15A、15Bがめっき、蒸着又はスパッタリング等によってそれぞれ形成されている。各接続電極15A、15Bの一端は、対応する駆動チャネル11A、11B又はダミーチャネル12A、12B内の駆動電極14と導通している。他端は、A列の駆動チャネル11A及びダミーチャネル12Aに対応する各接続電極15Aにおいては、各チャネル11A、12A内からヘッドチップ1の一方の端縁1c(図2中の下端縁)にかけて形成されているが、B列の駆動チャネル11B及びダミーチャネル12Bに対応する各接続電極15Bにおいては、各チャネル11B、12B内からA列側に向けて延び、該A列のチャネル列の手前までにかけて形成されている。従って、接続電極15A、15Bのいずれも、各チャネル11A、11B、12A、12Bから同一方向(端縁1c方向)に向けて延びている。 On the rear surface 1b of the head chip 1, connection electrodes 15A and 15B that are electrically connected to the drive electrodes 14 of the drive channels 11A and 11B and the dummy channels 12A and 12B are formed by plating, vapor deposition, sputtering, or the like. One end of each connection electrode 15A, 15B is electrically connected to the drive electrode 14 in the corresponding drive channel 11A, 11B or dummy channel 12A, 12B. The other end of each connection electrode 15A corresponding to the drive channel 11A and the dummy channel 12A in the A row is formed from the inside of each channel 11A, 12A to one end edge 1c (lower end edge in FIG. 2) of the head chip 1. However, in each connection electrode 15B corresponding to the drive channel 11B and the dummy channel 12B in the B row, the connection electrodes 15B extend from the channels 11B and 12B toward the A row side and before the channel row in the A row. Is formed. Accordingly, all of the connection electrodes 15A and 15B extend from the channels 11A, 11B, 12A, and 12B in the same direction (direction of the edge 1c).
 ノズルプレート2は、ヘッドチップ1の前面1aに接着剤によって接合されている。ノズルプレート2には、各駆動チャネル11A、11Bに対応する位置のみにノズル21が開設されている。 The nozzle plate 2 is bonded to the front surface 1a of the head chip 1 with an adhesive. In the nozzle plate 2, nozzles 21 are opened only at positions corresponding to the drive channels 11A and 11B.
 配線基板3は、ヘッドチップ1の後面1bの外形形状よりも大判な平板状の基板である。配線基板3には、ヘッドチップ1の後面1bに接合した際、撓み難いことが好ましく、ガラス、シリコン、セラミックスが好ましく用いられる。本実施形態ではガラス基板を用いた。 The wiring board 3 is a flat board that is larger than the outer shape of the rear surface 1 b of the head chip 1. When the wiring board 3 is joined to the rear surface 1b of the head chip 1, it is preferably difficult to bend, and glass, silicon, and ceramics are preferably used. In this embodiment, a glass substrate is used.
 ヘッドチップ1の後面1bと接合する接合領域(図1中の一点鎖線で示される領域)31内には、ヘッドチップ1の後面1bに開口する駆動チャネル11A、11Bに対応する位置のみに、不図示の共通インク室から各駆動チャネル11A、11B内にインクを供給するための貫通穴32A、32Bが個別に開設されている。貫通穴32A、32Bの開口面積は、駆動チャネル11A、11Bの開口面積と同一又はやや大きく形成されている。 In the bonding region 31 (the region indicated by the alternate long and short dash line in FIG. 1) 31 that is bonded to the rear surface 1b of the head chip 1, only the positions corresponding to the drive channels 11A and 11B opened on the rear surface 1b of the head chip 1 are not present. Through holes 32A and 32B for individually supplying ink into the drive channels 11A and 11B from the illustrated common ink chamber are individually opened. The opening areas of the through holes 32A and 32B are the same as or slightly larger than the opening areas of the drive channels 11A and 11B.
 配線基板3の厚みは、貫通穴32A、32Bの流路抵抗を抑えつつ、適度な剛性を確保する観点から、0.3mm~0.8mmとすることが好ましい。 The thickness of the wiring board 3 is preferably 0.3 mm to 0.8 mm from the viewpoint of ensuring appropriate rigidity while suppressing the flow resistance of the through holes 32A and 32B.
 また、配線基板3の表面には、ヘッドチップ1の後面1bに配列されている各接続電極15A、15Bと1対1に対応して電気的に接続される配線電極33A、33Bが、配線基板3の表面上においてヘッドチップ1のチャネル列と交叉する方向に延びるように、めっき、蒸着又はスパッタリング等によって形成されている。 Further, on the surface of the wiring board 3, wiring electrodes 33A and 33B that are electrically connected in a one-to-one correspondence with the connection electrodes 15A and 15B arranged on the rear surface 1b of the head chip 1 are provided on the wiring board. 3 is formed by plating, vapor deposition, sputtering, or the like so as to extend in a direction crossing the channel row of the head chip 1 on the surface of 3.
 A列の各チャネル11A、12Aから引き出される接続電極15Aに対応する各配線電極33Aは、一端が、接合領域31内のA列の各チャネル11A、12Aに対応する近傍に位置し、他端が、該接合領域31からヘッドチップ1のチャネル列と直交する側方に向けて延び、接合領域31からはみ出して配線基板3の端部3aに至っている。 One end of each wiring electrode 33A corresponding to the connection electrode 15A drawn from each channel 11A, 12A in the A row is located in the vicinity corresponding to each channel 11A, 12A in the A row in the bonding region 31, and the other end is , Extending from the bonding region 31 toward a side perpendicular to the channel row of the head chip 1, protruding from the bonding region 31 and reaching the end 3 a of the wiring substrate 3.
 一方、B列の各チャネル11B、12Bから引き出される接続電極15Bに対応する各配線電極33Bは、一端が、接合領域31内のB列の各チャネル11B、12Bに対応する近傍に位置し、他端が、配線電極33Aと同一方向に向けて延び、A列において隣接する貫通穴32Aの間を通って、接合領域31からはみ出して配線基板3の端部3aに至り、配線電極33Aと交互になるように配列されている。 On the other hand, one end of each wiring electrode 33B corresponding to the connection electrode 15B drawn from each channel 11B, 12B in the B row is located in the vicinity corresponding to each channel 11B, 12B in the B row in the junction region 31. The end extends in the same direction as the wiring electrode 33A, passes between adjacent through holes 32A in the A row, protrudes from the bonding region 31, reaches the end portion 3a of the wiring board 3, and alternates with the wiring electrodes 33A. It is arranged to be.
 配線基板3は、各配線電極33A、33Bが対応するヘッドチップ1の各接続電極15A、15Bと電気的に接続するように位置合わせされ、接着剤によって該ヘッドチップ1の後面1bに貼り合わされている。接着剤としては、導電性粒子を含む異方性導電性接着剤を使用することもできるが、ショート防止の確実性を高めるためにも、導電性粒子を含まない接着剤を使用することが好ましい。 The wiring board 3 is positioned so that the wiring electrodes 33A and 33B are electrically connected to the connection electrodes 15A and 15B of the corresponding head chip 1, and bonded to the rear surface 1b of the head chip 1 by an adhesive. Yes. As the adhesive, an anisotropic conductive adhesive containing conductive particles can be used, but it is preferable to use an adhesive containing no conductive particles in order to increase the reliability of short circuit prevention. .
 次に、図3~図5を用いてA列の貫通穴32A、32A間を通る配線電極33Bの詳細について更に説明する。 Next, details of the wiring electrode 33B passing between the through holes 32A and 32A in the A row will be further described with reference to FIGS.
 図3は、ヘッドチップ1の後面1bに配線基板3を接合した状態を該配線基板3の背面側から見た部分背面図、図4は、図3中の(iv)-(iv)線に沿う断面図、図5は図3の(v)-(v)線に沿う断面図である。 3 is a partial rear view of the state in which the wiring board 3 is bonded to the rear surface 1b of the head chip 1 as viewed from the back side of the wiring board 3. FIG. 4 is a line (iv)-(iv) in FIG. FIG. 5 is a sectional view taken along line (v)-(v) in FIG.
 B列の各接続電極15Bと導通する配線電極は、B列の駆動チャネル11Bの接続電極15Bと電気的に接続される配線電極33Bと、B列のダミーチャネル12Bの接続電極15Bと電気的に接続される配線電極33Bとからなる。これら配線電極33B、33Bは、A列において隣接する貫通穴32A、32Aの間を通って、配線基板3の端部3aまで延びている。配線基板3の表面におけるA列の貫通穴32A、32A間には、B列において隣接する1つの駆動チャネル11Bの接続電極15Bと電気的に接続する1本の配線電極33Bと、1つのダミーチャネル12Bの接続電極15Bに対して電気的に接続する1本の配線電極33Bとの合計2本が配置されている。 Wiring electrodes electrically connected to the connection electrodes 15B for row B, B and the drive channel connection electrode 15B and the wiring electrode 33B 1 that is electrically connected to 11B of the column, the connection electrode 15B electrically dummy channel 12B of row B consisting wiring connected electrodes 33B 2 Metropolitan to. These wiring electrodes 33B 1 and 33B 2 extend between the adjacent through holes 32A and 32A in the A row to the end portion 3a of the wiring board 3. A row of through holes 32A in the surface of the wiring board 3, between 32A, B 1 present between the wiring electrodes 33B 1 for connecting electrode 15B electrically adjacent one drive channel 11B connected in sequence, one dummy total two is arranged between the wiring electrodes 33B 2 for one electrically connected to the connection electrode 15B of channel 12B.
 一端がB列のダミーチャネル12Bの接続電極15Bと電気的に接続する配線電極33Bは、他端側が該接続電極15Bとの接続部位からA列の貫通穴32A、32A間に向けて配線基板3の表面上で屈曲し、該貫通穴32A、32A間に位置するA列のダミーチャネル12Aの開口部120Aの縁部121a上に一部被さるように該開口部120A上を通過した後、該ダミーチャネル12Aの接続電極15Aと接触しないように、A列の隣接する接続電極15A、15A間に向けて配線基板3の表面上で屈曲し、該接続電極15A、15Aと電気的に接続される配線電極33A、33Aと並列するように端部3aまで延びている。 Wiring electrodes 33B 2 having one end connected to the connecting electrodes 15B and electrically dummy channel 12B of the B column, the other end side of the through hole 32A of the A column from a connection portion between said connection electrode 15B, wire toward between 32A substrate 3 passes through the opening 120A so as to partially cover the edge 121a of the opening 120A of the dummy channel 12A in the A row located between the through holes 32A and 32A. Bends on the surface of the wiring board 3 toward the space between adjacent connection electrodes 15A and 15A in row A so as not to contact the connection electrode 15A of the dummy channel 12A, and is electrically connected to the connection electrodes 15A and 15A. It extends to the end portion 3a so as to be parallel to the wiring electrodes 33A and 33A.
 また、一端がB列の駆動チャネル11Bの接続電極15Bと電気的に接続する配線電極33Bは、他端側が該接続電極15Bとの接続部位からA列の貫通穴32A、32A間に位置するA列のダミーチャネル12Aの開口部120A上の、前記配線電極33Bが被さっている縁部121aと対向する縁部121b上に一部被さるように該開口部120A上を通過した後、該ダミーチャネル12Aの接続電極15Aと接触しないように、A列の隣接する接続電極15A、15A間に向けて配線基板3の表面上で前記配線電極33Bと反対側に屈曲し、該接続電極15A、15Aと電気的に接続される配線電極33A、33Aと並列するように端部3aまで延びている。 The wiring electrodes 33B 1 whose one end is connected to the connection electrode 15B and the electrically driven channel 11B of row B, the other end is positioned between the through holes 32A, 32A of the A column from a connection portion between said connection electrode 15B on the opening 120A of the dummy channels 12A of the a column, after passing through the opening upper 120A so as to cover a portion to the wiring electrodes 33B 2 faces the edge portion 121a which is overlaying edges on 121b, the dummy so as not to contact with the connection electrodes 15A of the channel 12A, bent to the connection electrodes 15A of adjacent a column, and the wiring electrodes 33B 2 on the surface of the wiring board 3 toward between 15A opposite the connection electrodes 15A, It extends to the end 3a so as to be parallel to the wiring electrodes 33A and 33A electrically connected to 15A.
 なお、ダミーチャネル12Aの開口部120Aの縁部121a、121bとは、ダミーチャネル12Aの開口部120Aの周縁を形成する4つの辺縁のうち、対向する駆動壁13にそれぞれ形成されている駆動電極14の開口側の辺縁の部分のことである。 Note that the edges 121a and 121b of the opening 120A of the dummy channel 12A are drive electrodes formed on the opposing drive wall 13 among the four edges forming the periphery of the opening 120A of the dummy channel 12A. 14 is the edge portion on the opening side.
 このように、本発明に係るインクジェットヘッドは、ヘッドチップ1の最外側に位置するA列のチャネル列を跨ぐように、それに隣接するB列のチャネル列に対応する配線電極33B、33Bが、A列の貫通穴32A、32A間を通過する際、ヘッドチップ1の後面1bにおけるA列の駆動壁13A、13A上のスペース内だけでなく、このスペースからダミーチャネル12Aの開口部120A内に向けて、図4に示すように、はみ出し量cの分だけ一部はみ出している。そして、各配線電極33B、33Bは、インク吐出方向(図4の上から下方向)に見た場合、ダミーチャネル12Aの開口部120Aの縁部121a、121b上に一部重なるように配置されている。 As described above, in the inkjet head according to the present invention, the wiring electrodes 33B 1 and 33B 2 corresponding to the B-row channel row adjacent to the A-row channel row located on the outermost side of the head chip 1 are arranged. When passing between the through holes 32A and 32A in the A row, not only in the space on the drive walls 13A and 13A in the A row on the rear surface 1b of the head chip 1, but also in the opening 120A of the dummy channel 12A from this space On the other hand, as shown in FIG. 4, a part protrudes by the amount of protrusion c. The wiring electrodes 33B 1 and 33B 2 are arranged so as to partially overlap the edges 121a and 121b of the opening 120A of the dummy channel 12A when viewed in the ink ejection direction (from the top to the bottom in FIG. 4). Has been.
 これら配線電極33B、33Bは、いずれも配線基板3の表面に密着形成されているため、ダミーチャネル12Aの開口部120A、すなわちヘッドチップ1の後面1bとは接触していない。ヘッドチップ1と配線基板3との間には、図4、図5に示すように、接続電極15A、15Bの厚み+配線電極33A、33Bの厚みに相当する隙間Sが形成されているため、配線電極33B、33Bの表面は、接続電極15Bとの接続部位以外の部位では、ヘッドチップ1の後面1bに対して、接続電極15A、15Bの厚みに相当する距離だけ離間している。配線電極33B、33Bの表面とヘッドチップ1の後面1bとの間は、接着剤50が満たされることで絶縁されている。従って、配線電極33B、33Bは、開口部120A上と重なるように配置されても、該開口部120Aに露出している駆動電極14と接触することはなく、クロストークやショートのおそれはない。 Since these wiring electrodes 33B 1 and 33B 2 are both formed in close contact with the surface of the wiring substrate 3, they are not in contact with the opening 120A of the dummy channel 12A, that is, the rear surface 1b of the head chip 1. Since the gap S corresponding to the thickness of the connection electrodes 15A and 15B + the thickness of the wiring electrodes 33A and 33B is formed between the head chip 1 and the wiring board 3, as shown in FIGS. The surfaces of the wiring electrodes 33B 1 and 33B 2 are separated from the rear surface 1b of the head chip 1 by a distance corresponding to the thickness of the connection electrodes 15A and 15B at a portion other than the connection portion with the connection electrode 15B. The surface of the wiring electrodes 33B 1 and 33B 2 and the rear surface 1b of the head chip 1 are insulated by being filled with the adhesive 50. Therefore, even if the wiring electrodes 33B 1 and 33B 2 are arranged so as to overlap the opening 120A, the wiring electrodes 33B 1 and 33B 2 do not come into contact with the driving electrode 14 exposed in the opening 120A, and there is a risk of crosstalk or short circuit. Absent.
 また、各配線電極33B、33Bの配線スペースは、駆動壁13Aの厚み分のスペースに限られず、貫通穴32A、32A間に亘る広い面積を利用することができるため、各配線電極33B、33Bを幅広に形成することができる。従って、配線電極33B、33Bの電気抵抗の増大化を抑制することができる。 Further, the wiring space of the wiring electrodes 33B 1 and 33B 2 is not limited to the space corresponding to the thickness of the drive wall 13A, and a wide area extending between the through holes 32A and 32A can be used. Therefore, the wiring electrodes 33B 1 33B 2 can be formed wide. Therefore, an increase in the electrical resistance of the wiring electrodes 33B 1 and 33B 2 can be suppressed.
 なお、A列のダミーチャネル12Aの開口部120A上を通過する各配線電極33B、33Bは、該ダミーチャネル12Aの開口部120Aと重なるように配線された後、該ダミーチャネル12Aの接続電極15Aとは接触しないように、該接続電極15Aの部位を避けるように屈曲し、配線基板3の端部3aにおいて配線電極33Aと並列している。 The wiring electrodes 33B 1 and 33B 2 passing over the opening 120A of the dummy channel 12A in the A column are wired so as to overlap the opening 120A of the dummy channel 12A, and then connected to the dummy channel 12A. It is bent so as to avoid the portion of the connection electrode 15A so as not to contact 15A, and is parallel to the wiring electrode 33A at the end 3a of the wiring board 3.
 以上の実施形態では、ヘッドチップ1にA列、B列の2列のチャネル列を備えるものを例示したが、チャネル列数は3列以上であってもよい。 In the above embodiment, the head chip 1 is exemplified as having two channel rows of A row and B row, but the number of channel rows may be three or more.
 図6、図7に、A列、B列及びC列の3列のチャネル列を備えるヘッドチップ1’を用いたインクジェットヘッドについて説明する。 6 and 7, an ink jet head using a head chip 1 ′ having three channel rows of A row, B row and C row will be described.
 図6は、ヘッドチップ1’の後面1bに配線基板3’を接合した状態を該配線基板3’の背面側から見た部分背面図、図7は、図6中の(vii)-(vii)線に沿う断面図である。なお、このヘッドチップ1’において、A列及びB列の各チャネル列は、以上説明した2列のチャネル列を備えるヘッドチップ1と同一構成であるため、ここでの説明は省略する。また、図3、図4と同一符号の部位は同一構成の部位であるため詳細な説明は省略する。 6 is a partial rear view of the state in which the wiring board 3 ′ is bonded to the rear surface 1b of the head chip 1 ′ as viewed from the back side of the wiring board 3 ′, and FIG. 7 is (vii)-(vii) in FIG. FIG. In this head chip 1 ′, the channel rows A and B have the same configuration as that of the head chip 1 including the two channel rows described above, and thus the description thereof is omitted here. 3 and 4 are parts having the same configuration, and detailed description thereof is omitted.
 C列のチャネル列は、駆動チャネル11Cとダミーチャネル12Cの配列ピッチが、A列のチャネルの駆動チャネル11Aとダミーチャネル12Aの配列ピッチと同一となるように配列されている。 The C columns are arranged such that the arrangement pitch of the drive channels 11C and the dummy channels 12C is the same as the arrangement pitch of the drive channels 11A and the dummy channels 12A of the A columns.
 この実施形態において、配線基板3’のB列において隣接する貫通穴32B、32B間を通過する2本の配線電極33C、すなわち、C列の駆動チャネル11Cの接続電極15Cと電気的に接続する配線電極33C、及び、C列のダミーチャネル12Cの接続電極15Cと電気的に接続する配線電極33Cは、B列のダミーチャネル12Bの開口部120B上と重なるように通過しており、上述した2列のチャネル列の実施形態におけるA列の貫通穴32A、32A間を通過する配線電極33B、33Bと同一構成となっている。この場合、符号中のAはBに、BはCに読み替えられる。 In this embodiment, two wiring electrodes 33C that pass between adjacent through holes 32B, 32B in the B row of the wiring board 3 ′, that is, wiring that is electrically connected to the connection electrode 15C of the drive channel 11C in the C row. The electrode 33C 1 and the wiring electrode 33C 2 electrically connected to the connection electrode 15C of the dummy channel 12C in the C row pass so as to overlap with the opening 120B of the dummy channel 12B in the B row, and are described above. It has the same configuration as the wiring electrodes 33B 1 and 33B 2 that pass between the through holes 32A and 32A in the A row in the embodiment of the two channel rows. In this case, A in the code is read as B, and B is read as C.
 一方、A列における貫通穴32A、32A間では、B列の各接続電極15Bと電気的に接続する配線電極33B、33Bと、C列の各接続電極15Cと電気的に接続する配線電極33C、33Cの合計4本が配置されている。 On the other hand, between the through holes 32A and 32A in the A row, the wiring electrodes 33B 1 and 33B 2 that are electrically connected to the connection electrodes 15B in the B row, and the wiring electrodes that are electrically connected to the connection electrodes 15C in the C row. A total of four of 33C 1 and 33C 2 are arranged.
 このとき、図7に示すように、内側に位置する配線電極33B、33Cは、インク吐出方向から見た場合、A列のダミーチャネル12Aの開口部120Aと重なるように該開口部120A内に配置され、外側に位置する配線電極33B、33Cは、それぞれ駆動壁13Aの厚みの範囲内に配置されている。各配線電極33B、33B、33C、33Cは、いずれもヘッドチップ1の後面1bとは非接触であり、該後面1bとの間には接着剤50が満たされている。 At this time, as shown in FIG. 7, the wiring electrodes 33B 1 and 33C 1 located on the inner side of the opening 120A are overlapped with the openings 120A of the dummy channels 12A in the A row when viewed from the ink discharge direction. The wiring electrodes 33B 2 and 33C 2 located on the outer side are respectively disposed within the thickness range of the drive wall 13A. Each of the wiring electrodes 33B 1 , 33B 2 , 33C 1 , 33C 2 is not in contact with the rear surface 1b of the head chip 1, and the adhesive 50 is filled between the rear surfaces 1b.
 このように、本発明によれば、貫通穴32A、32A間の全スペースを利用することで、合計4本の配線電極33B、33B、33C、33Cを配置することも可能であり、高密度化にも対応可能である。 Thus, according to the present invention, it is possible to arrange a total of four wiring electrodes 33B 1 , 33B 2 , 33C 1 , 33C 2 by using the entire space between the through holes 32A, 32A. It is possible to cope with higher density.
 なお、図1~図5に示す2列のチャネル列を有するヘッドチップ1は、配線基板3表面の配線電極33A、33Bの引き出し方向をヘッドチップを挟んで両端側となるように構成することで、該ヘッドチップ1を2つ並列させて4列のチャネル列を有するヘッドチップとすることができる。また、図6、図7に示す3列のチャネル列を有するヘッドチップ1’の場合は、同様にして6列のチャネル列を有するヘッドチップとすることができる。 The head chip 1 having two channel rows shown in FIGS. 1 to 5 is configured so that the lead-out directions of the wiring electrodes 33A and 33B on the surface of the wiring board 3 are on both ends with the head chip interposed therebetween. The two head chips 1 can be arranged in parallel to form a head chip having four channel rows. In the case of the head chip 1 ′ having three channel rows shown in FIGS. 6 and 7, a head chip having six channel rows can be similarly formed.
 2列のチャネル列を備えたヘッドチップにおいて、図3~図5に示したように配線基板表面の配線電極を形成した場合(本発明)と、図8に示したように、隣接する貫通穴間の2本の配線電極がダミーチャネルの開口部と重ならないように、駆動壁上にそれぞれ形成した場合(比較例)とで、配線可能となるチャネル密度について検証した。 In a head chip having two channel rows, when the wiring electrodes on the surface of the wiring board are formed as shown in FIGS. 3 to 5 (the present invention), and as shown in FIG. The channel density at which wiring is possible was verified in the case where each of the two wiring electrodes was formed on the drive wall so as not to overlap the opening of the dummy channel (comparative example).
 チャネル密度が180dpi(dot per inch)の場合、表1に示すように、駆動壁厚:59μm、チャネル幅:82μm、貫通穴の幅:102μmとなる。 When the channel density is 180 dpi (dot per inch), as shown in Table 1, the drive wall thickness is 59 μm, the channel width is 82 μm, and the through hole width is 102 μm.
 ここで、加工精度やヘッドチップと配線基板との貼り合わせ位置精度を考慮すると、比較例の場合、配線電極と近接する貫通穴との距離a1と、該配線電極とダミーチャネルの開口部との距離a2は、それぞれ20μm以上を確保する必要がある。この場合、各配線電極の幅は最大でも9μmとなってしまう。20μm以下の幅となる配線は製造難易度が高く、また、仮に製造できたとしても、配線幅に比例して配線厚みを薄くしなければいけないので、電気抵抗の上昇で、駆動電圧の上昇等のインク吐出に悪影響を及ぼすことが予想される。 Here, in consideration of the processing accuracy and the bonding position accuracy between the head chip and the wiring board, in the case of the comparative example, the distance a1 between the wiring electrode and the adjacent through hole, and the opening between the wiring electrode and the dummy channel, The distances a2 must be 20 μm or more. In this case, the width of each wiring electrode is 9 μm at the maximum. Wiring with a width of 20 μm or less is highly difficult to manufacture, and even if it can be manufactured, the wiring thickness must be reduced in proportion to the wiring width. It is expected to adversely affect the ink ejection.
 従って、この比較例の場合では、実用可能な配線幅を実現するには、表1に示すように120dpi程度までのチャネル密度が限界となる。
Figure JPOXMLDOC01-appb-T000001
Therefore, in the case of this comparative example, in order to realize a practical wiring width, the channel density up to about 120 dpi is the limit as shown in Table 1.
Figure JPOXMLDOC01-appb-T000001
 これに対し、本発明の場合、表2に示すように、180dpiのチャネル密度としても、配線電極の幅は最大46μmとすることができ、図4中の距離bの1/3が配線電極を通過させ得る幅となる。 On the other hand, in the case of the present invention, as shown in Table 2, even when the channel density is 180 dpi, the width of the wiring electrode can be a maximum of 46 μm, and 1/3 of the distance b in FIG. The width that can be passed.
 2列のチャネル列の場合は、300dpiとしても22μmの配線幅を確保することが可能となり、比較例よりも高密度化を図ることができることがわかる。 In the case of two channel rows, it can be seen that a wiring width of 22 μm can be secured even at 300 dpi, and a higher density can be achieved than in the comparative example.
 また、本発明の場合は、3列のチャネル列としても、距離bは1/7が配線電極を通過可能となり、180dpiのチャネル密度であれば実現可能である。
Figure JPOXMLDOC01-appb-T000002
In the case of the present invention, even if three channel rows are used, a distance b of 1/7 can pass through the wiring electrode, and can be realized if the channel density is 180 dpi.
Figure JPOXMLDOC01-appb-T000002
 1、1’:ヘッドチップ
  1a:前面
  1b:後面
  1c:端縁
  11A、11B、11C:駆動チャネル
  12A、12B、12C:ダミーチャネル
  120A、120B:開口部
  121a、121b:縁部
  13A、13B:駆動壁
  14:駆動電極
  15A、15B:接続電極
 2:ノズルプレート
  21:ノズル
 3、3’:配線基板
  3a:端部
  31:接合領域
  32A、32B、32C:貫通穴
  33A、33B、33B、33B、33C、33C:配線電極
 4:FPC
 50:接着剤
 
1, 1 ': Head chip 1a: Front surface 1b: Rear surface 1c: Edges 11A, 11B, 11C: Drive channels 12A, 12B, 12C: Dummy channels 120A, 120B: Openings 121a, 121b: Edges 13A, 13B: Drive walls 14: driving electrodes 15A, 15B: connection electrode 2: nozzle plate 21: nozzle 3,3 ': wiring board 3a: end 31: junction regions 32A, 32B, 32C: through holes 33A, 33B, 33B 1, 33B 2 , 33C 1 , 33C 2 : Wiring electrode 4: FPC
50: Adhesive

Claims (4)

  1.  チャネルと圧電素子からなる駆動壁とが交互に配置されると共に前記チャネル内に臨む前記駆動壁に駆動電極が形成されたチャネル列が複数並設され、前面及び後面にそれぞれ前記チャネルの開口部が配置され、該後面に、前記チャネル内の前記駆動電極と導通する接続電極がそれぞれ形成され、前記チャネル列がインク吐出を行う駆動チャネルとインク吐出を行わないダミーチャネルとが交互に配置されて構成されてなるヘッドチップと、
     前記ヘッドチップの後面に対して複数の前記チャネル列を覆うと共に該ヘッドチップの側方へ張り出すように接合される配線基板とを有し、
     前記配線基板における前記ヘッドチップと接合される側の面に形成された配線電極を前記接続電極と電気的に接続させることによって、該接続電極の各々を前記配線基板の端部まで電気的に引き出し、前記配線電極及び前記接続電極を介して前記駆動電極に電圧を印加することによって、前記駆動チャネル内のインクをノズルから吐出させるインクジェットヘッドであって、
     前記配線基板は、前記駆動チャネルの開口部に対応する位置のみにインク供給用の貫通穴がそれぞれ形成されていると共に、前記チャネル列に対応する複数の前記貫通穴の列のうち、少なくとも1つの前記貫通穴の列における隣接する該貫通穴の間には、少なくとも1本の前記配線電極が通って前記ヘッドチップの前記側方へ張り出した前記配線基板の端部まで延びており、
     前記貫通穴の間を通る少なくとも1本の前記配線電極は、前記ダミーチャネルの開口部とは非接触であり、且つ、インク吐出方向から見て前記ダミーチャネルの開口部に重なっていることを特徴とするインクジェットヘッド。
    Channels and drive walls made of piezoelectric elements are alternately arranged, and a plurality of channel rows in which drive electrodes are formed on the drive wall facing the channel are arranged side by side, and openings of the channels are respectively provided on the front surface and the rear surface. A connecting electrode that is electrically connected to the driving electrode in the channel is formed on the rear surface, and the channel row is alternately arranged with a driving channel that ejects ink and a dummy channel that does not eject ink. A head chip,
    A wiring board that covers the plurality of channel rows with respect to the rear surface of the head chip and is bonded so as to protrude to the side of the head chip;
    By electrically connecting the wiring electrodes formed on the surface of the wiring board on the side bonded to the head chip to the connection electrodes, each of the connection electrodes is electrically drawn to the end of the wiring board. An inkjet head that discharges ink in the drive channel from a nozzle by applying a voltage to the drive electrode via the wiring electrode and the connection electrode;
    In the wiring board, through holes for supplying ink are formed only at positions corresponding to the openings of the drive channels, and at least one of the plurality of through hole rows corresponding to the channel rows. Between the adjacent through-holes in the row of through-holes, at least one of the wiring electrodes passes through and extends to the end of the wiring board that protrudes to the side of the head chip,
    At least one of the wiring electrodes passing between the through holes is not in contact with the opening of the dummy channel and overlaps the opening of the dummy channel when viewed from the ink discharge direction. An inkjet head.
  2.  前記配線基板は、ガラス、シリコン、セラミックスのいずれかからなることを特徴とする請求項1記載のインクジェットヘッド。 2. The ink jet head according to claim 1, wherein the wiring board is made of any one of glass, silicon, and ceramics.
  3.  前記ヘッドチップは、A列及びB列の2列のチャネル列を有し、
     一つのA列の前記貫通穴の間には、前記B列のチャネル列の前記接続電極と電気的に接続する前記配線電極のうち、該B列の前記駆動チャネルに対応する1本の前記配線電極と、該駆動チャネルに隣接するB列の前記ダミーチャネルに対応する1本の前記配線電極の合計2本の前記配線電極が通っていることを特徴とする請求項1又は2記載のインクジェットヘッド。
    The head chip has two channel rows of A rows and B rows,
    One wiring corresponding to the drive channel of the B row among the wiring electrodes electrically connected to the connection electrode of the channel row of the B row is provided between the through holes of one A row. 3. The ink jet head according to claim 1, wherein a total of the two wiring electrodes of the electrode and one wiring electrode corresponding to the dummy channel in the B row adjacent to the driving channel pass therethrough. .
  4.  前記ヘッドチップは、A列、B列及びC列の3列のチャネル列を有し、
     一つのB列の前記貫通穴の間には、前記C列のチャネル列の前記接続電極と電気的に接続する前記配線電極のうち、該C列の前記駆動チャネルに対応する1本の前記配線電極と、該駆動チャネルに隣接するC列の前記ダミーチャネルに対応する1本の前記配線電極の合計2本の前記配線電極が通っており、
     一つのA列の前記貫通穴の間には、前記B列のチャネル列の前記接続電極と電気的に接続する前記配線電極のうち、該B列の前記駆動チャネルに対応する1本の前記配線電極と、該駆動チャネルに隣接するB列の前記ダミーチャネルに対応する1本の前記配線電極の2本と、前記C列の前記駆動チャネルに対応する1本の前記配線電極と、該駆動チャネルに隣接するC列の前記ダミーチャネルに対応する1本の前記配線電極の2本との合計4本の前記配線電極が通っていることを特徴とする請求項1又は2記載のインクジェットヘッド。
     
     
    The head chip has three channel rows of A row, B row and C row,
    Among the wiring electrodes electrically connected to the connection electrode of the channel row of the C row, between the through holes of one B row, one wiring corresponding to the drive channel of the C row A total of the two wiring electrodes of the electrode and one wiring electrode corresponding to the dummy channel in the C row adjacent to the driving channel pass through,
    One wiring corresponding to the drive channel of the B row among the wiring electrodes electrically connected to the connection electrode of the channel row of the B row is provided between the through holes of one A row. An electrode, two of the wiring electrodes corresponding to the dummy channel in the B row adjacent to the driving channel, one wiring electrode corresponding to the driving channel in the C row, and the driving channel 3. The inkjet head according to claim 1, wherein a total of four wiring electrodes including two of the one wiring electrode corresponding to the dummy channel in the C row adjacent to the C line pass.

PCT/JP2012/060716 2011-04-22 2012-04-20 Ink-jet head WO2012144597A1 (en)

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EP2700506B1 (en) 2017-07-19

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