WO2012132580A1 - Photosensitive composition, photosensitive film, photosensitive laminate, permanent pattern formation method, and printed substrate - Google Patents

Photosensitive composition, photosensitive film, photosensitive laminate, permanent pattern formation method, and printed substrate Download PDF

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Publication number
WO2012132580A1
WO2012132580A1 PCT/JP2012/053127 JP2012053127W WO2012132580A1 WO 2012132580 A1 WO2012132580 A1 WO 2012132580A1 JP 2012053127 W JP2012053127 W JP 2012053127W WO 2012132580 A1 WO2012132580 A1 WO 2012132580A1
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WIPO (PCT)
Prior art keywords
group
photosensitive
acid
ethylenically unsaturated
photosensitive composition
Prior art date
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PCT/JP2012/053127
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French (fr)
Japanese (ja)
Inventor
保田 貴康
英美 磯部
有岡 大輔
林 利明
Original Assignee
富士フイルム株式会社
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Application filed by 富士フイルム株式会社 filed Critical 富士フイルム株式会社
Priority to KR1020137027869A priority Critical patent/KR101660574B1/en
Priority to CN201280010307.9A priority patent/CN103403619B/en
Publication of WO2012132580A1 publication Critical patent/WO2012132580A1/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/02Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
    • C08F290/06Polymers provided for in subclass C08G
    • C08F290/067Polyurethanes; Polyureas
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0041Photosensitive materials providing an etching agent upon exposure
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions

Definitions

  • the present invention relates to a photosensitive composition suitable as a solder resist material for a flexible substrate, a photosensitive film using the photosensitive composition, a photosensitive laminate, a method for forming a permanent pattern, and a printed board.
  • a photosensitive film having a photosensitive layer formed by applying a photosensitive composition on a support and drying it has been used.
  • a method for forming a permanent pattern such as a solder resist for example, a photosensitive film is laminated on a substrate such as a copper-clad laminate on which a permanent pattern is formed to form a laminate, and the photosensitive layer in the laminate is formed.
  • a method of forming a permanent pattern by performing exposure on the substrate, developing the photosensitive layer after the exposure to form a pattern, and then performing a curing process or the like.
  • urethane resin (A) having a carboxyl group and an ethylenically unsaturated group and a phosphinic acid salt (B) having a volume average particle diameter in the range of 0.1 ⁇ m to 1 ⁇ m are added to 100 parts by mass of the urethane resin (A).
  • a photosensitive flame retardant resin composition containing 5 to 50 parts by mass has been proposed (see Patent Document 1).
  • the carboxyl group in the carboxyl group-containing urethane prepolymer (a) is reacted with the epoxy group or oxetane group in the compound (b) having an epoxy group or oxetane group and an ethylenically unsaturated group.
  • a urethane resin obtained by reacting the hydroxyl group in the hydroxyl group-containing urethane prepolymer (c) and the acid anhydride group in the polybasic acid anhydride (d) is used.
  • Photosensitivity containing (A) a novolac acid-modified vinyl group-containing epoxy resin having a biphenyl skeleton, (B) a phosphinic acid salt, (C) a photopolymerizable compound, and (D) a photopolymerization initiator.
  • Resin compositions have been proposed (see Patent Documents 2 and 3).
  • A a novolac acid-modified vinyl group-containing epoxy resin having a biphenyl skeleton
  • B a polyurethane resin
  • C a phosphinic acid salt
  • D at least one ethylenically unsaturated group in the molecule.
  • the photosensitive resin composition containing the photopolymerizable compound which has and (E) photoinitiator is proposed (refer patent document 4).
  • a polyurethane resin that is a reaction product of an epoxy acrylate compound having an ethylenically unsaturated group and two or more hydroxyl groups, a diisocyanate compound, and a diol compound having a carboxyl group is used.
  • Examples of flame retardants other than phosphinates that can be used in the photosensitive composition include phosphazene compounds, condensed phosphate esters, and cyclic phosphorus compounds. However, when these flame retardants are used, there is a problem that plating resistance is lowered.
  • an object of the present invention is to achieve the following object. That is, the present invention is a photosensitive composition excellent in flame retardancy, folding resistance, and plating resistance, and a photosensitive film, a photosensitive laminate, a permanent pattern forming method using the photosensitive composition, And to provide a printed circuit board.
  • Means for solving the problems are as follows. ⁇ 1> An acid-modified ethylenically unsaturated group-containing polyurethane resin, a phosphoric acid metal salt represented by the following general formula (1), a polymerizable compound, and a photopolymerization initiator,
  • the acid-modified ethylenically unsaturated group-containing polyurethane resin has a structural unit represented by the following general formula (G),
  • the photosensitive composition whose average particle diameter of the phosphoric acid metal salt represented by this General formula (1) is 1.0 micrometer or less.
  • a P and B P are each independently any one of a linear alkyl group having 1 to 6 carbon atoms, a branched alkyl group having 1 to 6 carbon atoms, and an aryl group.
  • M represents any of Mg, Ca, Al, Sb, Sn, Ge, Ti, Zn, Fe, Zr, Ce, Bi, Sr, Mn, Li, Na, and K.
  • m represents an integer of 1 to 4.
  • R 1 to R 3 each independently represents a hydrogen atom or a monovalent organic group.
  • A represents a divalent organic group.
  • X represents one of an oxygen atom, a sulfur atom, and —N (R 4 ) —.
  • R 4 represents a hydrogen atom or a monovalent organic group.
  • ⁇ 4> The photosensitive composition according to ⁇ 2> or ⁇ 3>, wherein a mass ratio of the polymer diol residue in the acid-modified ethylenically unsaturated group-containing polyurethane resin is 10 to 60%.
  • ⁇ 5> The photosensitive composition according to any one of ⁇ 1> to ⁇ 4>, wherein the acid-modified ethylenically unsaturated group-containing polyurethane resin has an aromatic group.
  • the acid-modified ethylenically unsaturated group-containing polyurethane resin has at least one skeleton selected from bisphenol A type, bisphenol F type, biphenyl type, naphthalene type, phenanthrene type, and anthracene type ⁇ 1> to The photosensitive composition of any one of ⁇ 5>.
  • ⁇ 8> The photosensitive composition according to any one of ⁇ 1> to ⁇ 7>, further containing a thermal crosslinking agent.
  • a photosensitive film comprising a photosensitive layer containing the photosensitive composition according to any one of ⁇ 1> to ⁇ 8> on a support.
  • a photosensitive laminate having a photosensitive layer containing the photosensitive composition according to any one of ⁇ 1> to ⁇ 8> on a substrate.
  • a method for forming a permanent pattern comprising at least exposing a photosensitive layer formed of the photosensitive composition according to any one of ⁇ 1> to ⁇ 8>.
  • ⁇ 12> A printed board on which a permanent pattern is formed by the method for forming a permanent pattern according to ⁇ 11>.
  • the above object can be achieved, and a photosensitive composition excellent in all of flame retardancy, folding resistance, and plating resistance, and a photosensitive film and a photosensitive laminate using the photosensitive composition.
  • a body, a method for forming a permanent pattern, and a printed circuit board can be provided.
  • the photosensitive composition of the present invention contains at least an acid-modified ethylenically unsaturated group-containing polyurethane resin, a metal phosphate, a polymerizable compound, and a photopolymerization initiator, and, if necessary, a crosslinking agent. Contains other ingredients such as.
  • the acid-modified ethylenically unsaturated group-containing polyurethane resin is a polyurethane resin having an acid group and an ethylenically unsaturated group, and has a structural unit represented by the following general formula (G).
  • G a structural unit represented by the following general formula (G).
  • a carboxyl group is mentioned.
  • a vinyl group is mentioned.
  • Examples of the functional group having an ethylenically unsaturated group include acryloyl group, methacryloyl group, acrylamide group, methacrylamide group, vinylphenyl group, vinyl ester group, vinyl ether group, allyl ether group, and allyl ester group. .
  • R 1 to R 3 each independently represents a hydrogen atom or a monovalent organic group.
  • A represents a divalent organic group.
  • X represents one of an oxygen atom, a sulfur atom, and —N (R 4 ) —.
  • R 4 represents a hydrogen atom or a monovalent organic group.
  • the monovalent organic group in R 1 to R 3 and R 4 includes a halogen atom, an alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, a cycloalkenyl group, an aryl group, a heterocyclic group, an alkoxy group, Aryloxy group, alkylthio group, arylthio group, amino group, alkylamino group, arylamino group, acylamino group, sulfonamido group, alkyl or arylsulfonyl group, alkyl or arylsulfinyl group, alkoxycarbonyl group, aryloxycarbonyl group, acyl Groups, acyloxy groups, carbamoyl groups, sulfamoyl groups, hydroxyl groups, mercapto groups, cyano groups, nitro groups, carboxyl groups, sulfo groups, ureido groups, a
  • the same group is mentioned for the monovalent organic group and substituent in each of the following general formulas.
  • the photosensitive composition containing a metal phosphate is usually not sufficiently folding-resistant
  • the acid-modified ethylenically unsaturated group-containing polyurethane resin has a structural unit represented by the general formula (G). The present inventors have found that folding resistance is unexpectedly excellent by having it.
  • the monovalent organic group for R 1 in the general formula (G) is preferably an alkyl group that may have a substituent.
  • R 1 in the general formula (G) is preferably a hydrogen atom or a methyl group.
  • the monovalent organic group of R 2 and R 3 in the general formula (G) is preferably an alkyl group that may have a substituent.
  • R ⁇ 2 > and R ⁇ 3 > in the said general formula (G) a hydrogen atom is preferable.
  • a in the general formula (G) is not particularly limited as long as it is a divalent organic residue, and can be appropriately selected according to the purpose.
  • an alkylene group which may have a substituent In the alkylene chain of the alkylene group, —O—, —S—, —N (R A1 ) —, —OCONH—, —OCONH—Z A1 —NHCOO—, —O—Z A1 —O—, —OCO—Z And groups having A1 Z—COO— and —SZ A1 —S—.
  • R A1 represents a hydrogen atom or a monovalent organic group
  • Z A1 represents an alkylene group, a cycloalkylene group, an arylene group or a divalent heterocyclic group.
  • X in the general formula (G) is preferably an oxygen atom.
  • the monovalent organic group represented by R 4 in the general formula (G) is preferably an alkyl group that may have a substituent, and more preferably a methyl group, an ethyl group, or an isopropyl group.
  • the method for introducing the structural unit represented by the general formula (G) into the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the purpose. And a method of reacting a diisocyanate compound with a compound represented by the following general formula (G-1).
  • the acid-modified ethylenically unsaturated group-containing polyurethane resin preferably has an aromatic group. Further, it preferably has at least one skeleton selected from bisphenol A type, bisphenol F type, biphenyl type, naphthalene type, phenanthrene type, and anthracene type.
  • aromatic refers to a conventional concept of aromatics as defined in the literature, particularly Jerry MARCH, MARCH'S Advanced Organic Chemistry, 5th edition, John Wiley and Sons, 2001, page 37 and below. means.
  • Examples of the skeleton having the aromatic group in the acid-modified ethylenically unsaturated group-containing polyurethane resin include groups represented by the following general formula (I).
  • X 1 represents a direct bond, —CH 2 —, —C (CH 3 ) 2 —, —SO 2 —, —S—, —CO—, or —O—.
  • R 5 , R 6 , R 7 , and R 8 may be the same as or different from each other, and each represents a hydrogen atom, a monovalent organic group, a halogen atom, —OR 9 , —N ( R 10 ) (R 11 ), or —SR 12 , and R 9 , R 10 , R 11 , and R 12 represent a hydrogen atom or a monovalent organic group.
  • X 1 is preferably —CH 2 — or —O—, particularly preferably —CH 2 —, from the viewpoint of developability.
  • the monovalent organic group in R 5 , R 6 , R 7 , R 8 , R 9 , R 10 , R 11 , and R 12 is not particularly limited and may be appropriately selected depending on the purpose.
  • Examples of the halogen atom include fluorine, chlorine, bromine and the like.
  • R 5 , R 6 , R 7 , and R 8 are preferably a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, or —OR 13 from the viewpoint of resolution, and particularly preferably a hydrogen atom.
  • the acid-modified ethylenically unsaturated group-containing polyurethane resin is a structural unit represented by a reaction product of a compound having an alcohol group, which may be monofunctional or polyfunctional, and 4,4′-diphenylmethane diisocyanate (MDI). It is preferable that it is a polyurethane resin containing.
  • the mass composition ratio of the MDI in the acid-modified ethylenically unsaturated group-containing polyurethane resin is preferably 30% by mass or more, more preferably 30% by mass to 70% by mass, still more preferably 33% by mass to 70% by mass, 35% by mass to 70% by mass is particularly preferable. If the mass composition ratio of the MDI is less than 30% by mass, the hardness may decrease.
  • the acid-modified ethylenically unsaturated group-containing polyurethane resin comprises at least one diisocyanate compound represented by the following general formula (i) and at least one diol compound represented by the following general formula (ii). It is preferable that the polyurethane resin has a structure represented by the general formula (G) while the structural unit represented by the reaction product is a basic skeleton.
  • X 0 and Y 0 each independently represent a divalent organic group.
  • X 0 may have another functional group that does not react with an isocyanate group, such as an ester, urethane, amide, or ureido group.
  • Examples of the diisocyanate compound represented by the general formula (i) include 2,4-tolylene diisocyanate, dimer of 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, and p-xylylene diisocyanate.
  • Aromatic diisocyanate compounds such as m-xylylene diisocyanate, 4,4′-diphenylmethane diisocyanate (MDI), 1,5-naphthylene diisocyanate, 3,3′-dimethylbiphenyl-4,4′-diisocyanate; Aliphatic diisocyanate compounds such as methylene diisocyanate, trimethylhexamethylene diisocyanate, lysine diisocyanate, dimer diisocyanate; isophorone diisocyanate, 4,4'-methylenebis (cyclohexyl isocyanate), methyl Cycloaliphatic-2,4 (or 2,6) diisocyanate, 1,3- (isocyanatomethyl) cyclohexane and other alicyclic diisocyanate compounds; adducts of 1 mol of 1,3-butylene glycol and 2 mol of tolylene diisocyanate, etc.
  • MDI 4,4′-
  • a diisocyanate compound which is a reaction product of a diol and a diisocyanate.
  • MDI 4,4′-diphenylmethane diisocyanate
  • a diisocyanate compound represented by the said general formula (i) for example, it is obtained by addition-reacting a triisocyanate compound and 1 equivalent of monofunctional alcohol or monofunctional amine compound which has an ethylenically unsaturated group. Products to be obtained.
  • the triisocyanate compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraphs [0034] to [0035] of JP-A-2005-250438. .
  • the monofunctional alcohol having an ethylenically unsaturated group or the monofunctional amine compound is not particularly limited and may be appropriately selected depending on the intended purpose. For example, paragraphs of JP 2005-250438 A [ And the compounds described in [0037] to [0040].
  • These diisocyanate compounds may be used individually by 1 type, and may use 2 or more types together.
  • -Diol compound represented by general formula (ii)- There is no restriction
  • the polyether diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraphs [0068] to [0076] of JP-A-2005-250438. It is done.
  • the polyester diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include paragraphs [0077] to [0079] and paragraphs [0083] to [0085] of JP-A-2005-250438. No. 1-No. 8 and no. 13-No. 18 and the like.
  • the polycarbonate diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. For example, in the paragraphs [0080] to [0081] and paragraph [0084] of JP-A-2005-250438, No. 9-No. 12 and the like.
  • diol compound having a carboxyl group examples include those represented by the following formulas (X) to (Z).
  • R 15 represents a hydrogen atom, a substituent ⁇ for example, a cyano group, a nitro group, a halogen atom such as —F, —Cl, —Br, —I, etc., —CONH 2 , — COOR 16 , —OR 16 , —NHCONHR 16 , —NHCOOR 16 , —NHCOR 16 , —OCONHR 16 (wherein R 16 represents an alkyl group having 1 to 10 carbon atoms or an aralkyl group having 7 to 15 carbon atoms). Each group is included.
  • An alkyl group that may have a substituent an aralkyl group that may have a substituent, an aryl group that may have a substituent, an alkoxy group that may have a substituent,
  • an aryloxy group which may have the above-mentioned substituent there is no particular limitation, and it can be appropriately selected according to the purpose, but a hydrogen atom, an alkyl group having 1 to 8 carbon atoms, An aryl group having 6 to 15 carbon atoms is preferred.
  • L 9 , L 10 and L 11 may be the same or different from each other, and may be a single bond, a substituent (for example, an alkyl group, an aralkyl group, an aryl group).
  • a substituent for example, an alkyl group, an aralkyl group, an aryl group.
  • it represents a divalent aliphatic or aromatic hydrocarbon group that may have an alkyl group, and an alkoxy group and a halogen atom are not particularly limited, and can be appropriately selected depending on the purpose.
  • an alkylene group having 1 to 20 carbon atoms and an arylene group having 6 to 15 carbon atoms are preferable, and an alkylene group having 1 to 8 carbon atoms is more preferable.
  • the L 9 to L 11 may have other functional groups that do not react with isocyanate groups, such as carbonyl, ester, urethane, amide, ureido, ether, and other groups and bonds.
  • you may form a ring by two or three of said R ⁇ 15 >, L ⁇ 9 >, L ⁇ 10 >, L ⁇ 11 >.
  • Ar is not particularly limited as long as it represents a trivalent aromatic hydrocarbon group which may have a substituent, and can be appropriately selected according to the purpose. However, an aromatic group having 6 to 15 carbon atoms is preferred.
  • the diol compound having a carboxyl group represented by the formulas (X) to (Z) is not particularly limited and may be appropriately selected depending on the intended purpose.
  • the diol compound containing an ethylenically unsaturated group in the side chain is not particularly limited and may be appropriately selected depending on the purpose.
  • a commercially available product such as trimethylolpropane monoallyl ether may be used.
  • compounds such as halogenated diol compounds, triol compounds, aminodiol compounds, and compounds containing ethylenically unsaturated groups, such as carboxylic acids, acid chlorides, isocyanates, alcohols, amines, thiols, alkyl halide compounds, etc. It may be a compound produced by the reaction.
  • a diol compound having a substituent that does not react with an isocyanate group may be used in combination.
  • the diol compound having a substituent that does not react with the isocyanate group is not particularly limited and may be appropriately selected depending on the intended purpose. For example, in paragraphs [0087] to [0088] of JP-A-2005-250438 And the compounds described.
  • a compound obtained by ring-opening a tetracarboxylic dianhydride with a diol compound can be used in combination for the synthesis of the acid-modified ethylenically unsaturated group-containing polyurethane resin.
  • the compound obtained by ring-opening the tetracarboxylic dianhydride with a diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. For example, paragraph [0095] to JP 2005-250438 A And the compounds described in [0101].
  • the acid-modified ethylenically unsaturated group-containing polyurethane resin used in the present invention is, for example, from the viewpoint of improving compatibility with other components in the polymerizable composition and improving storage stability.
  • a diol compound other than a diol compound containing an ethylenically unsaturated group or a diol compound containing a carboxyl group can be copolymerized, and in the present invention, it is particularly preferable to copolymerize such a diol compound.
  • Such a diol compound is not particularly limited and can be appropriately selected according to the purpose.
  • a low-molecular diol compound or a polymer diol compound such as a polyether diol compound, a polyester diol compound, a polycarbonate diol compound, Mention may be made of polycarbonate compounds of m-dihydroxybenzene.
  • Such a diol compound is represented by the following general formula (U) and, when incorporated as a polyurethane resin, is represented by a partial structure represented by the following general formula (U1).
  • L U1 represents a divalent linking group that does not contain an ethylenically unsaturated group and a carboxyl group.
  • L U1 includes, for example, an alkylene group, an arylene group, and a divalent heterocyclic group, and the alkylene group includes —O—, —OCOO—, a phenylene group, and a carbon-carbon double bond in the chain of the alkylene group. And a carbon-carbon triple bond, —OCO—Z L1 —COO— (Z L1 represents an alkylene group, an alkenylene group or an arylene group).
  • the low molecular weight diol compound preferably has a mass average molecular weight of less than 400, and is described, for example, in paragraph [0048] of JP-A-2007-2030. And the like.
  • a polymer diol compound is preferable and will be described in detail below.
  • polymer diol compound is not particularly limited and may be appropriately selected depending on the intended purpose.
  • Polyether diols such as coalesced polytetramethylene glycol, block copolymer or random copolymer of tetramethylene glycol and neopentyl glycol; polyhydric alcohol or polyether diol and maleic anhydride, maleic acid, fumaric acid, Polyester diols that are condensates of polybasic acids such as itaconic anhydride, itaconic acid, adipic acid, terephthalic acid, isophthalic acid; reaction of glycol or bisphenol with carbonate Alternatively, polycarbonate diols obtained by reacting phosgene with glycol or bisphenol in the presence of an alkali; caprolactone-
  • L U1 in the general formulas (U) and (U1) is — (CH 2 CH 2 O) n U1 CH 2 CH 2 —, — [CH 2 CH (CH 3 ) O] n U1 —CH 2 CH (CH 3 ) —, — (CH 2 CH 2 CH 2 O) n U1 —CH 2 CH 2 CH 2 —, a structure represented by the following general formula (LL1), It is a polybutadienediol residue represented by the structure represented by the formula (LL2) or the following general formula (LL3).
  • R LL1 and R LL2 each independently represent a divalent chain hydrocarbon group or a divalent cyclic hydrocarbon group.
  • n U1 to n U4 each independently represents a number of 1 or more.
  • n U1 to n U4 are usually 1000 or less, preferably 500 or less, more preferably 100 or less.
  • an alkylene group, an alkenylene group or an alkynylene group is preferable. These may have a branched or substituted group. More preferable carbon number is 2 to 8, ethylene group, trimethylene group, propylene group, tetramethylene group, 2-methyl-tetramethylene group, pentamethylene group, hexamethylene group, octamethylene group, 2-butenylene group, A 2-butynylene group is a preferred example.
  • the divalent cyclic hydrocarbon group is preferably a 5-membered ring, a 6-membered ring or a 7-membered ring, more preferably a 5-membered ring or a 6-membered ring, and even more preferably a 6-membered ring.
  • a single ring or a condensed ring may be used, and a single ring is preferable. Either an aromatic ring or an aliphatic ring may be used.
  • preferred examples of the aromatic ring include a benzene ring and a naphthalene ring
  • preferred examples of the aliphatic ring include a cyclohexane ring and a bicyclo [2.2.2] octane ring.
  • the polymer diol compound preferably has a mass average molecular weight of 400 to 8,000, more preferably 500 to 5,000, still more preferably 600 to 3,000, and 800 to 2,000. It is particularly preferred that If the mass average molecular weight is less than 400, sufficient folding resistance may not be obtained, and if it exceeds 8,000, the glass transition temperature (Tg) of the resulting polyurethane resin is too low. Reliability may be reduced.
  • the mass average molecular weight is determined using, for example, a high-speed GPC apparatus (manufactured by Toyo Soda Co., Ltd., HLC-802A), a 0.5 mass% THF solution as a sample solution, and a column of one TSKgel HZM-M. 200 ⁇ L of sample is injected, eluted with the THF solution, and measured at 25 ° C. with a refractive index detector or UV detector (detection wavelength 254 nm).
  • the mass ratio of the polymer diol residue in the acid-modified ethylenically unsaturated group-containing polyurethane resin is preferably 10 to 60%, more preferably 20 to 60%, and more preferably 25 to 55%. More preferably, the content is 30 to 50%.
  • the mass ratio is less than 10%, it may be difficult to suppress warping after curing, and when it exceeds 60%, the sensitivity of photocuring may be excessively lowered and resolution may be deteriorated.
  • the acid-modified ethylenically unsaturated group-containing polyurethane resin those having at least one carboxyl group at the end of the polymer main chain are also preferable in terms of excellent developability of non-image areas with an alkaline developer. Used. It has at least one carboxyl group at the terminal of the polymer main chain and preferably has 2 or more and 5 or less carboxyl groups, and having two carboxyl groups is excellent in developability and has a fine pattern forming property. Is particularly preferable.
  • the acid-modified ethylenically unsaturated group-containing polyurethane resin has two main chain ends, but preferably has at least one carboxyl group at one end, and has at least one carboxyl group at both ends. You may do it.
  • a terminal chain of the acid-modified ethylenically unsaturated group-containing polyurethane resin has a structure represented by the following general formula (II).
  • L 1 represents an (n + 1) -valent organic linking chain
  • n represents an integer of 1 or more, preferably 1 to 5, and particularly preferably 2.
  • the organic linking group represented by L 1 includes one or more atoms selected from a carbon atom, a hydrogen atom, an oxygen atom, a nitrogen atom, and a sulfur atom.
  • the organic linking group is represented by L 1.
  • the number of atoms constituting the main skeleton of the organic linking group is preferably 1 to 30, more preferably 1 to 25, still more preferably 1 to 20, and particularly preferably 1 to 10.
  • the “main skeleton of the organic linking group” means an atom or an atomic group used only for linking the main chain of the polyurethane resin and the terminal COOH, and when there are a plurality of linking paths, The atom or atomic group which comprises the path
  • the method for introducing at least one carboxyl group into the terminal of the main chain of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose.
  • polyurethane Examples of the raw material for resin production include a method using a carboxylic acid compound having at least one carboxyl group.
  • Examples of the carboxylic acid compound include a monocarboxylic acid compound having one carboxyl group, a dicarboxylic acid compound having two carboxyl groups, a tricarboxylic acid compound having three carboxyl groups, a tetracarboxylic acid compound having four carboxyl groups, and a carboxyl group.
  • Examples thereof include pentacarboxylic acid compounds having five groups.
  • a dicarboxylic acid compound having two carboxyl groups is particularly preferable in terms of excellent developability and fine pattern formability.
  • the carboxylic acid compound is not particularly limited as long as it has at least one carboxyl group, and can be appropriately selected according to the purpose.
  • a compound represented by the following general formula (III) is preferable.
  • L 1 and n represent the same meaning as in the general formula (I).
  • Y represents a divalent or higher valent atom.
  • L 2 represents a single bond or an alkylene group which may have a substituent.
  • Y represents a divalent or higher valent atom.
  • the divalent or higher atom include an oxygen atom, a nitrogen atom, a carbon atom, and a silicon atom. Among these, a nitrogen atom and a carbon atom are particularly preferable.
  • the atom represented by Y is divalent or more means that at least Y has two bonds in which the terminal —COOH is bonded via L 1 and L 2. May further have a hydrogen atom or a substituent.
  • Examples of the substituent that can be introduced into Y include a substituent including an atom selected from a hydrogen atom, an oxygen atom, a sulfur atom, a nitrogen atom, and a halogen atom.
  • a hydrocarbon group having 1 to 50 carbon atoms is preferable, a hydrocarbon group having 1 to 40 carbon atoms is more preferable, and a hydrocarbon group having 1 to 30 carbon atoms is particularly preferable.
  • L 2 in the general formula (III) represents a single bond or an alkylene group which may have a substituent.
  • the alkylene group an alkylene group having 1 to 20 carbon atoms is preferable, and an alkylene group having 2 to 10 carbon atoms is more preferable.
  • the substituent that can be introduced into the alkylene group include a halogen atom (F, Br, Cl, I), an alkyl group that may have a substituent, and the like.
  • the carboxylic acid compound represented by the general formula (III) is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include lactic acid, malic acid, hydroxyhexanoic acid, citric acid, and a diol compound. Examples include a reaction product of an acid anhydride. These may be used individually by 1 type and may use 2 or more types together. Among these, malic acid is particularly preferable.
  • the method for producing the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose.
  • the diisocyanate compound and the diol compound, and if necessary, the ethylenically unsaturated group may be selected.
  • the molar ratio of diisocyanate and diol compound used in the synthesis (M a : M b ) is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 1: 1 to 1.2: 1.
  • a product having desired physical properties such as molecular weight or viscosity is synthesized in a form in which no isocyanate group remains finally.
  • the amount of the ethylenically unsaturated group in the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose. 0.05 mmol / g to 3.0 mmol / g is preferable, 0.5 mmol / g to 2.7 mmol / g is more preferable, and 0.75 mmol / g to 2.4 mmol / g is particularly preferable.
  • the ethylenically unsaturated group equivalent can be determined, for example, by measuring the bromine number. The bromine number can be measured, for example, according to JIS K2605.
  • the ethylenically unsaturated equivalent is typically a vinyl group equivalent, and the number of grams of bromine (Br 2 ) added to 100 g of the resin to be measured obtained by the bromine number (gBr 2 / 100 g) is converted to the number of moles of added bromine (Br 2 ) per 1 g of resin.
  • the mass average molecular weight of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably from 3,000 to 50,000, and from the viewpoint of developability. To 3,000 to 30,000 is more preferable.
  • the acid value (solid acid value) of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 20 mgKOH / g to 120 mgKOH / g. 30 mg KOH / g to 110 mg KOH / g is more preferable, and 35 mg KOH / g to 100 mg KOH / g is particularly preferable. If the acid value is less than 20 mgKOH / g, the developability may be insufficient, and if it exceeds 120 mgKOH / g, the development speed may be too high, and the development control may be difficult. In addition, the said acid value can be measured based on JISK0070, for example. However, if the sample does not dissolve, dioxane or tetrahydrofuran is used as the solvent.
  • the content of the acid-modified ethylenically unsaturated group-containing polyurethane resin in the solid content of the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose. % Is preferable, and 30% by mass to 60% by mass is more preferable. When the content is 5% by mass or more, developability and exposure sensitivity are good, and when the content is 80% by mass or less, the adhesiveness of the photosensitive layer can be prevented from becoming too strong.
  • the metal phosphate is a metal phosphate represented by the following general formula (1).
  • AP and BP are each independently a linear alkyl group having 1 to 6 carbon atoms, a branched alkyl group having 1 to 6 carbon atoms, or an aryl group.
  • M represents any of Mg, Ca, Al, Sb, Sn, Ge, Ti, Zn, Fe, Zr, Ce, Bi, Sr, Mn, Li, Na, and K.
  • m represents an integer of 1 to 4.
  • a linear alkyl group having 1 to 6 carbon atoms is preferable, a methyl group, an ethyl group, or an n-propyl group is more preferable, and an ethyl group is particularly preferable.
  • Al is preferable.
  • the m is preferably 3.
  • the metal phosphate represented by the general formula (1) can be used as the metal phosphate represented by the general formula (1).
  • Examples of the commercially available products include Exolite OP-935, Exolite OP-930, Exolite OP1230, Exolite OP-1240, and Exolite OP-1312 (all manufactured by Clariant Japan), which are aluminum phosphinates.
  • the average particle diameter of the metal phosphate represented by the general formula (1) is 1.0 ⁇ m or less, preferably 0.5 ⁇ m or less, and more preferably 0.1 ⁇ m or less. When the average particle diameter exceeds 1.0 ⁇ m, folding resistance is lowered and folding resistance becomes insufficient. There is no restriction
  • the maximum particle diameter of the metal phosphate represented by the general formula (1) is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 5 ⁇ m or less, more preferably 3 ⁇ m or less, and 2 ⁇ m.
  • the average particle size and the maximum particle size can be measured using, for example, a concentrated particle size analyzer (trade name FPAR1000, manufactured by Otsuka Electronics Co., Ltd.). Specifically, the measurement principle is a dynamic light scattering method, and the size distribution analysis method is a cumulant method and / or a histogram method.
  • the average particle size is defined as a particle size with an integrated value of 50% when expressed as an integrated (cumulative) mass percentage, and is defined as d50 (D50) or the like.
  • the maximum particle size is defined as a particle size having an integrated value of 100% and is defined as d100 (D100) or the like.
  • the method for setting the metal phosphate represented by the general formula (1) to the average particle size and the maximum particle size is not particularly limited and can be appropriately selected according to the purpose. Examples thereof include a method using a three-roll mill, a two-roll mill, a sand mill, a kneader, and an attritor.
  • the content of the metal phosphate of the general formula (1) in the solid content of the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose. 40 parts by mass is preferable, and 5 to 25 parts by mass is more preferable. If the content is less than 5 parts by mass, sufficient flame retardancy may not be obtained, and if it exceeds 40 parts by mass, folding resistance may be reduced.
  • the polymerizable compound is a compound different from the binder resin described above, and is preferably a monomer or oligomer having a molecular weight of 1000 or less, for example.
  • Examples of the functional group having an ethylenically unsaturated group include acryloyl group, methacryloyl group, acrylamide group, methacrylamide group, vinylphenyl group, vinyl ester group, vinyl ether group, allyl ether group, and allyl ester group. .
  • the compound having one or more ethylenically unsaturated groups is not particularly limited and may be appropriately selected depending on the intended purpose. However, at least one selected from monomers having a (meth) acryloyl group is preferable.
  • a monomer which has the said (meth) acryloyl group there is no restriction
  • trimethylolpropane tri (meth) acrylate pentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, dipentaerythritol penta (meth) acrylate, dicyclopentane dimethylol di (meth) acrylate, Polyfunctional acrylates and methacrylates such as tricyclodecane dimethanol (meth) acrylate and epoxy acrylates which are reaction products of epoxy resin and (meth) acrylic acid are more preferable.
  • polyfunctional acrylates and methacrylates such as those having two or more acryloyloxy groups and methacryloyloxy groups, and epoxy acrylates which are reaction products of an epoxy resin and (meth) acrylic acid are particularly preferable.
  • the content of the polymerizable compound in the solid content of the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 5% by mass to 50% by mass, and preferably 10% by mass to 40 mass% is more preferable. When the content is 5% by mass or more, developability and exposure sensitivity are good, and when the content is 50% by mass or less, the adhesiveness of the photosensitive layer can be prevented from becoming too strong.
  • the photopolymerization initiator is not particularly limited as long as it has the ability to initiate the polymerization of the polymerizable compound, and can be appropriately selected according to the purpose. Those having photosensitivity are preferable, and may be an activator that generates an active radical by causing some action with a photoexcited sensitizer, and is an initiator that initiates cationic polymerization according to the type of monomer. May be.
  • the photopolymerization initiator preferably contains at least one component having a molecular extinction coefficient of at least about 50 within a wavelength range of about 300 nm to 800 nm. The wavelength is more preferably 330 nm to 500 nm.
  • a neutral photoinitiator is preferable.
  • the other photoinitiator may be included as needed.
  • the neutral photopolymerization initiator is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably a compound having at least an aromatic group, such as (bis) acylphosphine oxide or an ester thereof. More preferred are acetophenone compounds, benzophenone compounds, benzoin ether compounds, ketal derivative compounds, and thioxanthone compounds. Two or more neutral photopolymerization initiators may be used in combination.
  • Examples of the photopolymerization initiator include (bis) acylphosphine oxide or esters thereof, acetophenone compounds, benzophenone compounds, benzoin ether compounds, ketal derivative compounds, thioxanthone compounds, oxime derivatives, organic peroxides, thiols, and the like. Compound etc. are mentioned. Among these, from the viewpoints of the sensitivity and storage stability of the photosensitive layer and the adhesion between the photosensitive layer and the printed wiring board forming substrate, oxime derivatives, (bis) acylphosphine oxide or esters thereof, acetophenone compounds, benzophenone Of these compounds, benzoin ether compounds, ketal derivative compounds, and thioxanthone compounds are preferred.
  • Examples of the (bis) acylphosphine oxide, the acetophenone compound, the benzophenone compound, the benzoin ether compound, the ketal derivative compound, and the thioxanthone compound include, for example, paragraph [0042] of JP-A-2010-256399. Examples thereof include (bis) acylphosphine oxides, acetophenone compounds, benzophenone compounds, benzoin ether compounds, ketal derivative compounds, and thioxanthone compounds.
  • Examples of the oxime derivative include oxime derivatives described in paragraphs [0043] to [0059] of JP 2010-256399 A.
  • the said photoinitiator may be used individually by 1 type, and may use 2 or more types together.
  • the content of the photopolymerization initiator in the solid content of the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 0.1% by mass to 30% by mass, More preferably, the content is 5% by mass to 20% by mass, and particularly preferably 0.5% by mass to 15% by mass.
  • the thermal crosslinking agent is not particularly limited and may be appropriately selected depending on the purpose.
  • Epoxy compounds for example, epoxy compounds having at least two oxirane groups in one molecule
  • oxetane compounds having at least two oxetanyl groups in one molecule can be used, and are described in JP-A-2007-47729.
  • a melamine derivative can be used as the thermal crosslinking agent.
  • the melamine derivative include methylol melamine, alkylated methylol melamine (a compound obtained by etherifying a methylol group with methyl, ethyl, butyl or the like). These may be used individually by 1 type and may use 2 or more types together.
  • alkylated methylol melamine is preferable and hexamethylated methylol melamine is particularly preferable in that it has good storage stability and is effective in improving the surface hardness of the photosensitive layer or the film strength itself of the cured film.
  • Examples of the epoxy compound include epoxy compounds described in paragraphs [0071] to [0073] of JP2010-256399A.
  • oxetane compound examples include oxetane compounds described in paragraph [0074] of JP2010-256399A.
  • polyisocyanate compound examples include the polyisocyanate compounds described in paragraph [0075] of JP2010-256399A.
  • Examples of the blocked polyisocyanate compound include compounds described in paragraph [0076] of JP-A No. 2010-256399.
  • oxazoline derivative examples include 1,3-bis (4,5-dihydro-2-oxazolyl) benzene, 1,4-bis (4,5-dihydro-2-oxazolyl) benzene, and 2,2′-bis. (2-oxazoline) and the like.
  • Examples of the melamine derivative include the melamine derivatives described in paragraph [0077] of JP 2010-256399 A.
  • the content of the thermal crosslinking agent in the solid content of the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 1% by mass to 50% by mass, and preferably 3% by mass to 30 mass% is more preferable. When the content is 1% by mass or more, the film strength of the cured film is improved, and when the content is 50% by mass or less, developability and exposure sensitivity are improved.
  • ⁇ Other ingredients> there is no restriction
  • adhesion promoters to the substrate surface and other auxiliaries for example, conductive particles, fillers, antifoaming agents, flame retardants, leveling agents, peeling accelerators, antioxidants, fragrances, surface tensions
  • properties such as the stability, photographic properties, and film properties of the intended photosensitive film can be adjusted.
  • Examples of the filler include paragraphs [0098] to [00099] of JP-A-2008-250074. However, in the present invention, it is preferable not to contain inorganic fine particles which are inorganic fillers in the photosensitive composition. Even if it is contained, the solid content ratio of the photosensitive composition is less than 10% by mass, more preferably 1% by mass. Is less than.
  • Examples of the thermal polymerization inhibitor include paragraphs [0101] to [0102] of JP-A-2008-250074.
  • Examples of the thermosetting accelerator include paragraph [0093] of JP-A-2008-250074.
  • Examples of the plasticizer include paragraphs [0103] to [0104] of JP-A-2008-250074.
  • Examples of the colorant include paragraphs [0105] to [0106] of JP-A-2008-250074.
  • Examples of the adhesion promoter include paragraphs [0107] to [0109] of JP-A-2008-250074.
  • the photosensitive film of the present invention has at least a support and a photosensitive layer containing the photosensitive composition of the present invention on the support, and further has other layers as necessary.
  • the support is not particularly limited and may be appropriately selected depending on the intended purpose. However, it is preferable that the photosensitive layer is peelable and has good light transmittance, and further has a smooth surface. Is more preferable.
  • the support is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include the support described in paragraphs [0115] to [0117] of JP-A-2008-250074.
  • the said photosensitive layer is a layer containing the said photosensitive composition of this invention, there will be no restriction
  • the number of laminated photosensitive layers is not particularly limited and may be appropriately selected depending on the purpose. For example, it may be one layer or two or more layers.
  • a photosensitive composition solution is prepared by dissolving, emulsifying or dispersing the photosensitive composition of the present invention in water or a solvent on the support.
  • coating directly and drying is mentioned.
  • the solvent used for the photosensitive composition solution is not particularly limited and may be appropriately selected depending on the intended purpose.
  • the application method is not particularly limited and may be appropriately selected depending on the intended purpose. For example, using a spin coater, slit spin coater, roll coater, die coater, curtain coater, etc. The method of apply
  • the drying conditions vary depending on each component, the type of solvent, the use ratio, and the like, but are usually 60 ° C. to 110 ° C. for about 30 seconds to 15 minutes.
  • the thickness of the photosensitive layer is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 1 ⁇ m to 100 ⁇ m, more preferably 2 ⁇ m to 50 ⁇ m, and particularly preferably 4 ⁇ m to 30 ⁇ m.
  • the other layer is not particularly limited and may be appropriately selected depending on the intended purpose.
  • a protective film a thermoplastic resin layer, a barrier layer, a release layer, an adhesive layer, a light absorption layer, a surface protective layer, etc.
  • the said photosensitive film may have these layers individually by 1 type, and may have 2 or more types.
  • the photosensitive film may form a protective film on the photosensitive layer.
  • a protective film there is no restriction
  • the protective film as described in Paragraph [0118] of Unexamined-Japanese-Patent No. 2008-250074 etc. are mentioned.
  • the combination of the protective film and the support is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include the combination described in paragraph [0118] of JP-A-2008-250074. It is done.
  • the static friction coefficient between the support and the protective film is preferably 0.3 to 1.4, more preferably 0.5 to 1.2. If the static friction coefficient is 0.3 or more, it is possible to prevent the occurrence of winding misalignment when it is made into a roll shape due to excessive slip, and if it is 1.4 or less, it can be wound into a good roll shape. .
  • the length and storage method of the photosensitive film are not particularly limited and may be appropriately selected depending on the purpose.
  • the length and storage described in paragraph [0120] of JP-A-2008-250074 are disclosed. The method etc. are mentioned.
  • the protective film may be surface-treated to adjust the adhesion between the protective film and the photosensitive layer.
  • an undercoat layer made of a polymer such as polyorganosiloxane, fluorinated polyolefin, polyfluoroethylene, or polyvinyl alcohol is formed on the surface of the protective film.
  • the undercoat layer can be formed by applying the polymer coating solution to the surface of the protective film and then drying at 30 ° C. to 150 ° C. for 1 to 30 minutes.
  • the drying temperature is particularly preferably 50 ° C to 120 ° C.
  • the photosensitive laminate of the present invention comprises at least a substrate and a photosensitive layer on the substrate, and further laminates other layers as necessary.
  • the photosensitive layer is a layer containing the photosensitive composition of the present invention.
  • the photosensitive layer is, for example, transferred from the photosensitive film produced by the above-described manufacturing method, and has the same configuration as described above.
  • the substrate is a substrate to be processed on which a photosensitive layer is formed, or a substrate to which at least the photosensitive layer of the photosensitive film of the present invention is transferred, and is not particularly limited, and is appropriately selected depending on the purpose.
  • a material having a high surface smoothness to a material having an uneven surface can be arbitrarily selected, but a plate-like substrate, that is, a so-called substrate is preferable.
  • Specific examples include a known printed wiring board production substrate (printed substrate), a glass plate (soda glass plate, etc.), a synthetic resin film, paper, a metal plate, etc.
  • a polyimide film is used. Particularly preferred.
  • the method for producing the photosensitive laminate is not particularly limited and may be appropriately selected depending on the intended purpose. For example, at least one of heating and pressing at least the photosensitive layer in the photosensitive film of the present invention is performed. For example, a method of transferring and stacking can be used.
  • An example of the manufacturing method of the said photosensitive laminated body is the method of laminating
  • the said photosensitive film has the said protective film, it is preferable to peel this protective film and to laminate
  • the heating temperature is not particularly limited and may be appropriately selected depending on the intended purpose. For example, 15 ° C. to 180 ° C. is preferable, and 60 ° C. to 140 ° C. is more preferable.
  • the pressurizing pressure is not particularly limited and may be appropriately selected depending on the intended purpose. For example, 0.1 MPa to 1.0 MPa is preferable, and 0.2 MPa to 0.8 MPa is more preferable.
  • the apparatus for performing at least one of the heating is not particularly limited and may be appropriately selected depending on the purpose.
  • a laminator for example, Taisei Laminator, VP-II, Nichigo Morton, VP130
  • Taisei Laminator, VP-II, Nichigo Morton, VP130 is preferable.
  • the photosensitive film and the photosensitive laminate of the present invention can be widely used for forming a high-definition permanent pattern in the field of electronic materials, and can be particularly suitably used for forming a permanent pattern on a printed circuit board.
  • the permanent pattern forming method of the present invention includes at least an exposure step, and further includes other steps as necessary.
  • the exposure step is not particularly limited as long as it is a step of exposing the photosensitive layer formed of the photosensitive composition of the present invention, and can be appropriately selected according to the purpose.
  • the process etc. which expose with respect to the photosensitive layer in the said photosensitive laminated body are mentioned.
  • the subject of the exposure is not particularly limited as long as it is the photosensitive layer, and can be appropriately selected according to the purpose, but while performing at least one of heating and pressurizing the photosensitive film on the substrate. It is preferable to be performed on a laminated body formed by laminating.
  • the exposure is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include digital exposure and analog exposure.
  • the developing step is a step of removing an unexposed portion of the photosensitive layer.
  • the developer is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include the developers described in paragraphs [0171] to [0173] of JP-A-2008-250074.
  • the curing treatment step is a step of performing a curing treatment on the photosensitive layer in the formed pattern after the development step is performed.
  • limiting in particular as said hardening process Although it can select suitably according to the objective, For example, a whole surface exposure process, a whole surface heat processing, etc. are mentioned suitably.
  • the method for the whole surface exposure treatment and the whole surface heat treatment is not particularly limited and may be appropriately selected depending on the purpose.
  • paragraphs [0176] to [0177] of JP-A-2008-250074 The method of description is mentioned.
  • the permanent pattern forming method is a permanent pattern forming method for forming at least one of a protective film, an interlayer insulating film, and a solder resist pattern
  • the permanent pattern is formed on a printed circuit board by the permanent pattern forming method.
  • soldering can be performed as follows. That is, by the development, a hardened layer that is the permanent pattern is formed, and the metal layer is exposed on the surface of the printed board. Gold plating is performed on the portion of the metal layer exposed on the surface of the printed wiring board, and then soldering is performed. Then, a semiconductor or a component is mounted on the soldered portion.
  • the permanent pattern by the hardened layer exhibits a function as a protective film, an insulating film (interlayer insulating film), or a solder resist, and prevents external impact and conduction between adjacent electrodes.
  • the printed circuit board of the present invention includes at least a substrate and a permanent pattern formed by the permanent pattern forming method, and further includes other members appropriately selected as necessary.
  • the acid value and mass average molecular weight in the preparation examples were measured by the following methods.
  • a 0.5 mass% THF (tetrahydrofuran) solution was used as a sample solution, a column using one TSKgel HZM-M, a 200 ⁇ L sample was injected, eluted with the THF solution, and a refractive index at 25 ° C. Measured with a detector.
  • the mass average molecular weight was determined from the molecular weight distribution curve calibrated with standard polystyrene.
  • ⁇ Equivalent ethylenically unsaturated group> The ethylenically unsaturated group equivalent was determined by measuring the bromine number according to JIS K2605.
  • the concentration was adjusted with cyclohexanone to obtain an acid-modified ethylenically unsaturated group-containing polyurethane resin (U2) solution having a solid concentration of 40% by mass.
  • the obtained acid-modified ethylenically unsaturated group-containing polyurethane resin had a mass average molecular weight of 7000, a solid content acid value of 46 mgKOH / g, and an ethylenically unsaturated group equivalent of 1.1 mmol / g.
  • the obtained acid-modified ethylenically unsaturated group-containing polyurethane resin had a mass average molecular weight of 8000, a solid content acid value of 69 mgKOH / g, and an ethylenically unsaturated group equivalent of 1.82 mmol / g.
  • the obtained acid-modified ethylenically unsaturated group-containing polyurethane resin had a mass average molecular weight of 8,600, a solid content acid value of 54 mgKOH / g, and an ethylenically unsaturated group equivalent of 1 mmol / g.
  • the solid content concentration was 40% by mass in the same manner as in Preparation Example 1 except that the combination was changed.
  • An acid-modified ethylenically unsaturated group-containing polyurethane resin (U4) solution was synthesized.
  • the obtained acid-modified ethylenically unsaturated group-containing polyurethane resin had a mass average molecular weight of 8,800, a solid content acid value of 54 mgKOH / g, and an ethylenically unsaturated group equivalent of 1 mmol / g.
  • R 11 represents an epoxy acrylate residue
  • R 12 represents a diisocyanate residue
  • R 13 represents an alkyl group having 1 to 5 carbon atoms
  • R 14 represents a hydrogen atom or a methyl group.
  • a residue means the structure of the part remove
  • the average particle size and the maximum particle size were measured by the following methods.
  • a solution obtained by diluting the flame retardant dispersion by a factor of 50 was measured using a dense particle size analyzer (trade name FPAR1000, manufactured by Otsuka Electronics Co., Ltd.).
  • the measurement principle was a dynamic light scattering method, and the size distribution analysis method was measured as a cumulant method and / or a histogram method.
  • the average particle size is defined as a particle size of an integrated value of 50% when expressed as an integrated (cumulative) mass percentage, and is defined as d50 (D50), and the maximum particle size is an integrated value of 100%. And is defined as d100 (D100) or the like.
  • Preparation Example 10 ⁇ Preparation of flame retardant dispersions b, c, d> A flame retardant was prepared in the same manner as the preparation of flame retardant dispersion a-1 in Preparation Example 9 (ie, dispersion time 0 minutes) except that the flame retardant in Preparation Example 9 was replaced with the flame retardant listed in Table 2. Dispersions b, c and d were prepared.
  • the flame retardants in Table 2 are as follows. Phosphazene compound: SPS-100, manufactured by Otsuka Chemical Co., Ltd. Condensed phosphate ester: CR-741, manufactured by Daihachi Chemical Co., Ltd. Cyclic phosphorus compound: SANKO-BCA, manufactured by Sanko Co., Ltd.
  • Example 1 Provide of photosensitive film- A photosensitive composition solution having the following composition was applied on a polyethylene terephthalate film (16FB50, manufactured by Toray Industries, Inc.) having a thickness of 16 ⁇ m as a support, and dried to form a photosensitive layer having a thickness of 38 ⁇ m on the support. did. On the photosensitive layer, a 20 ⁇ m-thick polypropylene film (manufactured by Oji Specialty Paper Co., Ltd., Alphan E-200) was laminated as a protective layer to produce a photosensitive film.
  • a 20 ⁇ m-thick polypropylene film manufactured by Oji Specialty Paper Co., Ltd., Alphan E-200
  • a substrate was prepared by subjecting the surface of a copper-clad laminate (no through-holes, copper thickness 18 ⁇ m) to an acid cleaning treatment.
  • a vacuum laminator manufactured by Nichigo Morton Co., Ltd., VP130 was used on the copper-clad laminate while peeling off the protective film from the photosensitive film so that the photosensitive layer of the photosensitive film was in contact with the copper-clad laminate.
  • a photosensitive laminate was prepared in which the copper-clad laminate, the photosensitive layer, and the polyethylene terephthalate film (support) were laminated in this order.
  • the pressure bonding conditions were as follows: a vacuuming time of 40 seconds, a pressure bonding temperature of 70 ° C., a pressure bonding pressure of 0.2 MPa, and a pressure time of 10 seconds.
  • the resist pattern was formed with the evaluation method shown below.
  • a predetermined pattern can be obtained from the polyethylene terephthalate film (support) side with respect to the photosensitive layer in the prepared photosensitive laminate using a blue-violet laser exposure pattern having a predetermined pattern by an ultrahigh pressure mercury lamp. In this way, an energy amount of 200 mJ / cm 2 was irradiated and exposed to cure a part of the photosensitive layer.
  • ⁇ Flame retardance> Etching a substrate for flexible printed wiring boards (made by Nippon Steel Chemical Co., Ltd., trade name “ESPANEX” M series), which is made by laminating a copper foil (copper foil thickness 12 ⁇ m) on a polyimide substrate (polyimide thickness 12.5 ⁇ m), and removing the copper foil As a result, a polyimide substrate having a thickness of 12.5 ⁇ m was obtained. The photosensitive layer (thickness 38 ⁇ m) of the produced photosensitive film was adhered to both surfaces of this polyimide substrate by lamination.
  • a composite sample was obtained by cutting the polyimide base material on which the cured photosensitive layer obtained above was formed into a size of 20 cm ⁇ 5 cm.
  • the obtained composite sample was wound around a cylindrical rod having a diameter of 1 cm ⁇ 20 cm, and the position of 12.5 cm from the end of the composite sample was fixed with heat-resistant tape, and then the rod was removed to obtain a length of 20 cm and a diameter of 1 cm.
  • a flame retardant test sample was obtained.
  • the obtained flame retardant test sample was hung with a clamp, and a flame test was conducted by indirect flame with a 3 cm flame for 3 seconds.
  • a laminate for evaluation was obtained by increasing the strength.
  • the obtained laminate for evaluation was cut into a 5 mm ⁇ 10 cm square, bent 180 ° in the long side direction with the line pattern side outside, and a predetermined weight was placed on the bent portion for 3 seconds, and the folding resistance was evaluated according to the following criteria. did. ⁇ Evaluation criteria ⁇ ⁇ : No crack at 400 g ⁇ : No crack at 200 g ⁇ : No crack at 10 g less than 10% of the length of the bent side ⁇ : 200 g of crack length is the length of the bent side More than 10%
  • ⁇ Bleed out> The surface layer (permanent pattern) of the test plate on which the permanent pattern was formed was left at 40 ° C. for one week, was observed with a microscope (magnification: 200 times), and evaluated according to the following evaluation criteria.
  • X Any of whitening of the surface, tackiness, precipitation of crystalline substances, and exudation of a liquid substance is observed.
  • the photosensitive laminate was allowed to stand at 55% RH for 10 minutes at room temperature (23 ° C.). Use the pattern forming device to obtain the optimal light energy so that round holes with a diameter of 50 to 200 ⁇ m can be formed on the polyethylene terephthalate film (support) of the resulting photosensitive laminate using a round hole pattern. Exposure was carried out in a quantity. After standing at room temperature for 10 minutes, the polyethylene terephthalate film (support) was peeled off from the photosensitive laminate. The entire surface of the photosensitive layer on the copper clad laminate is sprayed with a 1% by weight sodium carbonate aqueous solution at 30 ° C.
  • the polyethylene terephthalate film (support) is peeled off from the photosensitive layer of the laminate, and a 1 mass% sodium carbonate aqueous solution at 30 ° C is sprayed at a pressure of 0.15 MPa over the entire surface of the photosensitive layer on the copper clad laminate.
  • the time required from the start of spraying of the aqueous sodium carbonate solution until the photosensitive layer on the copper clad laminate was dissolved and removed was measured, and this was taken as the shortest development time.
  • the optimum amount of light energy was determined by the following method.
  • the support was peeled off from the photosensitive laminate, and a copper-clad laminate (flexible print) 2% to 3 times the shortest development time with a 1 mass% sodium carbonate aqueous solution at 30 ° C. at a spray pressure of 0.15 MPa on the entire surface of the photosensitive layer on the wiring substrate). Time (or 40 seconds to 60 seconds) and spray development, to dissolve away the uncured regions.
  • the whole surface exposure was further performed with the ultrahigh pressure mercury lamp at 1,000 mJ / cm ⁇ 2 >, and the soldering resist pattern (permanent pattern) was formed.
  • the cured resin pattern (permanent pattern) was immersed in an acidic degreasing solution (Sulcup ACL-007, manufactured by Uemura Kogyo Co., Ltd.) at 50 ° C. for 5 minutes and then washed with water.
  • an activator solution KAT-450, Uemura at 22 ° C. for 90 seconds in a soft etch solution at 22 ° C.
  • the cured resin pattern (permanent pattern) after the plating test was subjected to a peel test with reference to JIS K5600-5-6, and evaluated according to the following criteria. ⁇ : No abnormality after peel test ⁇ : Peeling observed during peel test
  • Example 2 to 3 Comparative Examples 1 to 5
  • Example 1 the photosensitive composition, the photosensitive film, etc. were obtained like Example 1 except having replaced the flame retardant dispersion liquid with the flame retardant dispersion liquid of Table 3. Evaluation similar to Example 1 was performed. The results are shown in Table 3.
  • Example 4 Comparative Examples 6 to 9
  • Example 1 the photosensitive composition, the photosensitive film, etc. were obtained like Example 1 except having replaced the flame retardant dispersion liquid and resin with the flame retardant dispersion liquid and resin of Table 4. Evaluation similar to Example 1 was performed. The results are shown in Table 4.
  • the photosensitive compositions of Examples 1 to 6 were excellent in flame retardancy, folding resistance, and plating resistance, further free from bleed out, and excellent in resolution. Further, the photosensitive compositions of Examples 3 to 6 were excellent in folding resistance as compared with Examples 1 and 2.
  • the photosensitive compositions of Comparative Examples 1 and 2 using a metal phosphate having an average particle diameter exceeding 1.0 ⁇ m as a flame retardant had insufficient folding resistance.
  • the photosensitive compositions of Comparative Examples 3 to 5 using a flame retardant other than the metal phosphate had insufficient plating resistance.
  • the photosensitive compositions of Comparative Examples 6 to 9 using a resin different from the acid-modified ethylenically unsaturated group-containing polyurethane resin had insufficient folding resistance.
  • the photosensitive composition of the present invention is excellent in all of flame retardancy, folding resistance and plating resistance, it can be suitably used for flexible printed boards and the like.

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Abstract

A photosensitive composition comprising: a polyurethane resin containing an acid-modified ethylenically unsaturated group, which has a structural unit represented by general formula (G); a specific organic phosphoric acid metal salt having an average particle diameter of 1.0 μm or less; and a polymerizable compound. In general formula (G), R1 - R3 independently represent a hydrogen atom or a univalent organic group; A represents a bivalent organic group; X represents an oxygen atom, a sulfur atom or -N(R4)-; and R4 represents a hydrogen atom or a univalent organic group.

Description

感光性組成物、感光性フィルム、感光性積層体、永久パターン形成方法、及びプリント基板Photosensitive composition, photosensitive film, photosensitive laminate, permanent pattern forming method, and printed circuit board
 本発明は、フレキシブル基板用ソルダーレジスト材料として好適な感光性組成物、並びに、該感光性組成物を用いた感光性フィルム、感光性積層体、永久パターン形成方法、及びプリント基板に関する。 The present invention relates to a photosensitive composition suitable as a solder resist material for a flexible substrate, a photosensitive film using the photosensitive composition, a photosensitive laminate, a method for forming a permanent pattern, and a printed board.
 従来より、ソルダーレジスト等の永久パターンを形成するに際して、支持体上に感光性組成物を塗布し、乾燥することにより感光層を形成した感光性フィルムが用いられてきている。ソルダーレジスト等の永久パターンを形成する方法としては、例えば、永久パターンが形成される銅張積層板等の基体上に、感光性フィルムを積層させて積層体を形成し、該積層体における感光層に対して露光を行い、該露光後、感光層を現像してパターンを形成させ、その後硬化処理等を行うことにより永久パターンを形成する方法等が知られている。 Conventionally, when forming a permanent pattern such as a solder resist, a photosensitive film having a photosensitive layer formed by applying a photosensitive composition on a support and drying it has been used. As a method for forming a permanent pattern such as a solder resist, for example, a photosensitive film is laminated on a substrate such as a copper-clad laminate on which a permanent pattern is formed to form a laminate, and the photosensitive layer in the laminate is formed. There is known a method of forming a permanent pattern by performing exposure on the substrate, developing the photosensitive layer after the exposure to form a pattern, and then performing a curing process or the like.
 前記ソルダーレジストに用いる感光性組成物において難燃性の向上を図ることは重要な課題の一つであり、種々の検討がなされている。 Improvement of flame retardancy in the photosensitive composition used for the solder resist is one of important issues, and various studies have been made.
 例えば、カルボキシル基とエチレン性不飽和基とを有するウレタン樹脂(A)と、体積平均粒子径が0.1μm~1μmの範囲であるホスフィン酸塩(B)をウレタン樹脂(A)100質量部に対して、5質量部~50質量部含む感光性難燃樹脂組成物が提案されている(特許文献1参照)。
 この提案の技術では、カルボキシル基含有ウレタンプレポリマー(a)中のカルボキシル基と、エポキシ基又はオキセタン基とエチレン性不飽和基とを有する化合物(b)中のエポキシ基又はオキセタン基と、を反応してなる水酸基含有ウレタンプレポリマー(c)中の水酸基と、多塩基酸無水物(d)中の酸無水物基と、を反応させてなるウレタン樹脂が用いられている。
For example, a urethane resin (A) having a carboxyl group and an ethylenically unsaturated group and a phosphinic acid salt (B) having a volume average particle diameter in the range of 0.1 μm to 1 μm are added to 100 parts by mass of the urethane resin (A). On the other hand, a photosensitive flame retardant resin composition containing 5 to 50 parts by mass has been proposed (see Patent Document 1).
In this proposed technique, the carboxyl group in the carboxyl group-containing urethane prepolymer (a) is reacted with the epoxy group or oxetane group in the compound (b) having an epoxy group or oxetane group and an ethylenically unsaturated group. A urethane resin obtained by reacting the hydroxyl group in the hydroxyl group-containing urethane prepolymer (c) and the acid anhydride group in the polybasic acid anhydride (d) is used.
 また、(A)ビフェニル骨格を有するノボラック型酸変性ビニル基含有エポキシ樹脂と、(B)ホスフィン酸塩と、(C)光重合性化合物と、(D)光重合開始剤とを含有する感光性樹脂組成物が提案されている(特許文献2、及び3参照)。 Photosensitivity containing (A) a novolac acid-modified vinyl group-containing epoxy resin having a biphenyl skeleton, (B) a phosphinic acid salt, (C) a photopolymerizable compound, and (D) a photopolymerization initiator. Resin compositions have been proposed (see Patent Documents 2 and 3).
 また、(A)ビフェニル骨格を有するノボラック型酸変性ビニル基含有エポキシ樹脂と、(B)ポリウレタン樹脂と、(C)ホスフィン酸塩と、(D)分子内に少なくとも一つのエチレン性不飽和基を有する光重合性化合物と、(E)光重合開始剤とを含有する感光性樹脂組成物が提案されている(特許文献4参照)。
 この提案の技術では、エチレン性不飽和基及び2つ以上の水酸基を有するエポキシアクリレート化合物と、ジイソシアネート化合物と、カルボキシル基を有するジオール化合物との反応生成物であるポリウレタン樹脂が用いられている。
And (A) a novolac acid-modified vinyl group-containing epoxy resin having a biphenyl skeleton, (B) a polyurethane resin, (C) a phosphinic acid salt, and (D) at least one ethylenically unsaturated group in the molecule. The photosensitive resin composition containing the photopolymerizable compound which has and (E) photoinitiator is proposed (refer patent document 4).
In this proposed technique, a polyurethane resin that is a reaction product of an epoxy acrylate compound having an ethylenically unsaturated group and two or more hydroxyl groups, a diisocyanate compound, and a diol compound having a carboxyl group is used.
 しかし、これらの提案の技術では、求められる難燃性は得られるものの、耐折性が十分ではないという問題がある。 However, these proposed technologies have the problem that the required flame resistance is obtained, but the folding resistance is not sufficient.
 感光性組成物に使用可能なホスフィン酸塩以外の難燃剤としては、フォスファゼン化合物、縮合リン酸エステル、環状リン化合物などが挙げられる。
 しかし、これらの難燃剤を用いると、めっき耐性が低下するという問題がある。
Examples of flame retardants other than phosphinates that can be used in the photosensitive composition include phosphazene compounds, condensed phosphate esters, and cyclic phosphorus compounds.
However, when these flame retardants are used, there is a problem that plating resistance is lowered.
特開2010-117452号公報JP 2010-117452 A 特開2010-169810号公報JP 2010-169810 A 特許4586922号公報Japanese Patent No. 4586922 特開2009-251585号公報JP 2009-251585 A
 本発明は、このような状況を鑑み、以下の目的を達成することを課題とする。即ち、本発明は、難燃性、耐折性、及びめっき耐性の全てが優れる感光性組成物、並びに、該感光性組成物を用いた感光性フィルム、感光性積層体、永久パターン形成方法、及びプリント基板の提供を目的とする。 In view of such a situation, an object of the present invention is to achieve the following object. That is, the present invention is a photosensitive composition excellent in flame retardancy, folding resistance, and plating resistance, and a photosensitive film, a photosensitive laminate, a permanent pattern forming method using the photosensitive composition, And to provide a printed circuit board.
 前記課題を解決するための手段としては、以下の通りである。
<1>酸変性エチレン性不飽和基含有ポリウレタン樹脂と、下記一般式(1)で表されるリン酸金属塩と、重合性化合物と、光重合開始剤とを含有し、
 該酸変性エチレン性不飽和基含有ポリウレタン樹脂が、下記一般式(G)で表される構造単位を有し、
 該一般式(1)で表されるリン酸金属塩の平均粒子径が、1.0μm以下である感光性組成物。
Means for solving the problems are as follows.
<1> An acid-modified ethylenically unsaturated group-containing polyurethane resin, a phosphoric acid metal salt represented by the following general formula (1), a polymerizable compound, and a photopolymerization initiator,
The acid-modified ethylenically unsaturated group-containing polyurethane resin has a structural unit represented by the following general formula (G),
The photosensitive composition whose average particle diameter of the phosphoric acid metal salt represented by this General formula (1) is 1.0 micrometer or less.
Figure JPOXMLDOC01-appb-C000003
Figure JPOXMLDOC01-appb-C000003
 一般式(1)中、A及びBは、それぞれ独立に、直鎖状の炭素数1~6のアルキル基、分岐状の炭素数1~6のアルキル基、及びアリール基のいずれかを表す。Mは、Mg、Ca、Al、Sb、Sn、Ge、Ti、Zn、Fe、Zr、Ce、Bi、Sr、Mn、Li、Na、及びKのいずれかを表す。mは、1~4の整数を表す。 In general formula (1), A P and B P are each independently any one of a linear alkyl group having 1 to 6 carbon atoms, a branched alkyl group having 1 to 6 carbon atoms, and an aryl group. To express. M represents any of Mg, Ca, Al, Sb, Sn, Ge, Ti, Zn, Fe, Zr, Ce, Bi, Sr, Mn, Li, Na, and K. m represents an integer of 1 to 4.
Figure JPOXMLDOC01-appb-C000004
Figure JPOXMLDOC01-appb-C000004
 一般式(G)中、R~Rは、それぞれ独立に、水素原子、及び1価の有機基のいずれかを表す。Aは、2価の有機基を表す。Xは、酸素原子、硫黄原子、及び-N(R)-のいずれかを表す。前記Rは、水素原子、及び1価の有機基のいずれかを表す。
<2>酸変性エチレン性不飽和基含有ポリウレタン樹脂が、ポリマージオール残基を繰り返し単位として含む<1>に記載の感光性組成物。
<3>前記ポリマージオール残基の質量平均分子量が400~8,000である<2>に記載の感光性組成物。
<4>酸変性エチレン性不飽和基含有ポリウレタン樹脂中における前記ポリマージオール残基の質量比率が10~60%である<2>または<3>に記載の感光性組成物。
<5>酸変性エチレン性不飽和基含有ポリウレタン樹脂が、芳香族基を有する<1>~<4>のいずれか1項に記載の感光性組成物。
<6>酸変性エチレン性不飽和基含有ポリウレタン樹脂が、ビスフェノールA型、ビスフェノールF型、ビフェニル型、ナフタレン型、フェナントレン型、及びアントラセン型から選択される少なくともいずれかの骨格を有する<1>~<5>のいずれか1項に記載の感光性組成物。
<7>一般式(1)で表されるリン酸金属塩の最大粒子径(d100)が、5μm以下である<1>~<6>のいずれか1項に記載の感光性組成物。
<8>更に、熱架橋剤を含有する<1>~<7>のいずれか1項に記載の感光性組成物。
<9><1>~<8>のいずれか1項に記載の感光性組成物を含む感光層を支持体上に有してなる感光性フィルム。
<10>基体上に、<1>~<8>のいずれか1項に記載の感光性組成物を含む感光層を有する感光性積層体。
<11><1>~<8>のいずれか1項に記載の感光性組成物により形成された感光層に対して露光を行うことを少なくとも含む永久パターン形成方法。
<12><11>に記載の永久パターン形成方法により永久パターンが形成されるプリント基板。
In general formula (G), R 1 to R 3 each independently represents a hydrogen atom or a monovalent organic group. A represents a divalent organic group. X represents one of an oxygen atom, a sulfur atom, and —N (R 4 ) —. R 4 represents a hydrogen atom or a monovalent organic group.
<2> The photosensitive composition according to <1>, wherein the acid-modified ethylenically unsaturated group-containing polyurethane resin contains a polymer diol residue as a repeating unit.
<3> The photosensitive composition according to <2>, wherein the polymer diol residue has a mass average molecular weight of 400 to 8,000.
<4> The photosensitive composition according to <2> or <3>, wherein a mass ratio of the polymer diol residue in the acid-modified ethylenically unsaturated group-containing polyurethane resin is 10 to 60%.
<5> The photosensitive composition according to any one of <1> to <4>, wherein the acid-modified ethylenically unsaturated group-containing polyurethane resin has an aromatic group.
<6> The acid-modified ethylenically unsaturated group-containing polyurethane resin has at least one skeleton selected from bisphenol A type, bisphenol F type, biphenyl type, naphthalene type, phenanthrene type, and anthracene type <1> to The photosensitive composition of any one of <5>.
<7> The photosensitive composition according to any one of <1> to <6>, wherein the maximum particle diameter (d100) of the metal phosphate represented by the general formula (1) is 5 μm or less.
<8> The photosensitive composition according to any one of <1> to <7>, further containing a thermal crosslinking agent.
<9> A photosensitive film comprising a photosensitive layer containing the photosensitive composition according to any one of <1> to <8> on a support.
<10> A photosensitive laminate having a photosensitive layer containing the photosensitive composition according to any one of <1> to <8> on a substrate.
<11> A method for forming a permanent pattern comprising at least exposing a photosensitive layer formed of the photosensitive composition according to any one of <1> to <8>.
<12> A printed board on which a permanent pattern is formed by the method for forming a permanent pattern according to <11>.
 本発明により、前記目的を達成することができ、難燃性、耐折性、及びめっき耐性の全てが優れる感光性組成物、並びに、該感光性組成物を用いた感光性フィルム、感光性積層体、永久パターン形成方法、及びプリント基板を提供することができる。 According to the present invention, the above object can be achieved, and a photosensitive composition excellent in all of flame retardancy, folding resistance, and plating resistance, and a photosensitive film and a photosensitive laminate using the photosensitive composition. A body, a method for forming a permanent pattern, and a printed circuit board can be provided.
 本発明の上記及び他の特徴及び利点は、下記の記載からより明らかになるであろう。 The above and other features and advantages of the present invention will become more apparent from the following description.
(感光性組成物)
 本発明の感光性組成物は、酸変性エチレン性不飽和基含有ポリウレタン樹脂と、リン酸金属塩と、重合性化合物と、光重合開始剤とを少なくとも含有し、更に必要に応じて、架橋剤などのその他の成分を含有する。
(Photosensitive composition)
The photosensitive composition of the present invention contains at least an acid-modified ethylenically unsaturated group-containing polyurethane resin, a metal phosphate, a polymerizable compound, and a photopolymerization initiator, and, if necessary, a crosslinking agent. Contains other ingredients such as.
<酸変性エチレン性不飽和基含有ポリウレタン樹脂>
 前記酸変性エチレン性不飽和基含有ポリウレタン樹脂は、酸基及びエチレン性不飽和基を有するポリウレタン樹脂であって、下記一般式(G)で表される構造単位を有する。
 前記酸基としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、カルボキシル基が挙げられる。
 前記エチレン性不飽和基としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ビニル基が挙げられる。
 前記エチレン性不飽和基を有する官能基としては、例えば、アクリロイル基、メタクリロイル基、アクリルアミド基、メタクリルアミド基、ビニルフェニル基、ビニルエステル基、ビニルエーテル基、アリルエーテル基、アリルエステル基などが挙げられる。
<Acid-modified ethylenically unsaturated group-containing polyurethane resin>
The acid-modified ethylenically unsaturated group-containing polyurethane resin is a polyurethane resin having an acid group and an ethylenically unsaturated group, and has a structural unit represented by the following general formula (G).
There is no restriction | limiting in particular as said acid group, According to the objective, it can select suitably, For example, a carboxyl group is mentioned.
There is no restriction | limiting in particular as said ethylenically unsaturated group, According to the objective, it can select suitably, For example, a vinyl group is mentioned.
Examples of the functional group having an ethylenically unsaturated group include acryloyl group, methacryloyl group, acrylamide group, methacrylamide group, vinylphenyl group, vinyl ester group, vinyl ether group, allyl ether group, and allyl ester group. .
Figure JPOXMLDOC01-appb-C000005
Figure JPOXMLDOC01-appb-C000005
 一般式(G)中、R~Rは、それぞれ独立に、水素原子、及び1価の有機基のいずれかを表す。Aは、2価の有機基を表す。Xは、酸素原子、硫黄原子、及び-N(R)-のいずれかを表す。前記Rは、水素原子、及び1価の有機基のいずれかを表す。ここで、R~RやRにおける1価の有機基としては、ハロゲン原子、アルキル基、アルケニル基、アルキニル基、シクロアルキル基、シクロアルケニル基、アリール基、ヘテロ環基、アルコキシ基、アリールオキシ基、アルキルチオ基、アリールチオ基、アミノ基、アルキルアミノ基、アリールアミノ基、アシルアミノ基、スルホンアミド基、アルキルもしくはアリールスルホニル基、アルキルもしくはアリールスルフィニル基、アルコキシカルボニル基、アリールオキシカルボニル基、アシル基、アシルオキシ基、カルバモイル基、スルファモイル基、ヒドロキシル基、メルカプト基、シアノ基、ニトロ基、カルボキシル基、スルホ基、ウレイド基、ウレタン基などが挙げられ、これらの基はさらにこれらの置換基で置換されていてもよい。なお、以降の各一般式における1価の有機基、置換基も同様の基が挙げられる。
 リン酸金属塩を含有する感光性組成物は、通常、耐折性が十分ではないが、前記酸変性エチレン性不飽和基含有ポリウレタン樹脂が、前記一般式(G)で表される構造単位を有することにより、予想外に耐折性が優れることを、本発明者らは見出した。
In general formula (G), R 1 to R 3 each independently represents a hydrogen atom or a monovalent organic group. A represents a divalent organic group. X represents one of an oxygen atom, a sulfur atom, and —N (R 4 ) —. R 4 represents a hydrogen atom or a monovalent organic group. Here, the monovalent organic group in R 1 to R 3 and R 4 includes a halogen atom, an alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, a cycloalkenyl group, an aryl group, a heterocyclic group, an alkoxy group, Aryloxy group, alkylthio group, arylthio group, amino group, alkylamino group, arylamino group, acylamino group, sulfonamido group, alkyl or arylsulfonyl group, alkyl or arylsulfinyl group, alkoxycarbonyl group, aryloxycarbonyl group, acyl Groups, acyloxy groups, carbamoyl groups, sulfamoyl groups, hydroxyl groups, mercapto groups, cyano groups, nitro groups, carboxyl groups, sulfo groups, ureido groups, urethane groups, etc., and these groups are further substituted with these substituents. Has been May be. In addition, the same group is mentioned for the monovalent organic group and substituent in each of the following general formulas.
Although the photosensitive composition containing a metal phosphate is usually not sufficiently folding-resistant, the acid-modified ethylenically unsaturated group-containing polyurethane resin has a structural unit represented by the general formula (G). The present inventors have found that folding resistance is unexpectedly excellent by having it.
 前記一般式(G)中のRの1価の有機基としては、置換基を有してもよいアルキル基が好ましい。前記一般式(G)中のRとしては、水素原子、メチル基が好ましい。
 前記一般式(G)中のR、及びRの1価の有機基としては、置換基を有してもよいアルキル基が好ましい。
 前記一般式(G)中のR、及びRとしては、水素原子が好ましい。
 前記一般式(G)中のAとしては、2価の有機残基であれば、特に制限はなく、目的に応じて適宜選択することができ、例えば、置換基を有してもよいアルキレン基、アルキレン基のアルキレン鎖中に-O-、-S-、―N(RA1)-、-OCONH-、-OCONH-ZA1-NHCOO-、-O-ZA1-O-、-OCO-ZA1Z-COO-、-S-ZA1-S-を有する基が挙げられる。ここで、RA1は水素原子、1価の有機基を表し、ZA1はアルキレン基、シクロアルキレン基、アリーレン基、2価のヘテロ環基を表す。具体的には、例えば、メチレン基、エチレン基、プロピレン基、ブチレン基などが挙げられる。これらの中でもメチレン基が好ましい。
 前記一般式(G)中のXとしては、酸素原子が好ましい。
 前記一般式(G)中のRの1価の有機基としては、置換基を有してもよいアルキル基が好ましく、メチル基、エチル基、イソプロピル基がより好ましい。
The monovalent organic group for R 1 in the general formula (G) is preferably an alkyl group that may have a substituent. R 1 in the general formula (G) is preferably a hydrogen atom or a methyl group.
The monovalent organic group of R 2 and R 3 in the general formula (G) is preferably an alkyl group that may have a substituent.
As R < 2 > and R < 3 > in the said general formula (G), a hydrogen atom is preferable.
A in the general formula (G) is not particularly limited as long as it is a divalent organic residue, and can be appropriately selected according to the purpose. For example, an alkylene group which may have a substituent In the alkylene chain of the alkylene group, —O—, —S—, —N (R A1 ) —, —OCONH—, —OCONH—Z A1 —NHCOO—, —O—Z A1 —O—, —OCO—Z And groups having A1 Z—COO— and —SZ A1 —S—. Here, R A1 represents a hydrogen atom or a monovalent organic group, and Z A1 represents an alkylene group, a cycloalkylene group, an arylene group or a divalent heterocyclic group. Specific examples include a methylene group, an ethylene group, a propylene group, and a butylene group. Among these, a methylene group is preferable.
X in the general formula (G) is preferably an oxygen atom.
The monovalent organic group represented by R 4 in the general formula (G) is preferably an alkyl group that may have a substituent, and more preferably a methyl group, an ethyl group, or an isopropyl group.
 前記酸変性エチレン性不飽和基含有ポリウレタン樹脂に、前記一般式(G)で表される構造単位を導入する方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ジイソシアネート化合物と、下記一般式(G-1)で表される化合物とを反応させる方法などが挙げられる。 The method for introducing the structural unit represented by the general formula (G) into the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the purpose. And a method of reacting a diisocyanate compound with a compound represented by the following general formula (G-1).
Figure JPOXMLDOC01-appb-C000006
Figure JPOXMLDOC01-appb-C000006
 一般式(G-1)中、R~R、A、及びXは、前記一般式(G)中のR~R、A、及びXと同じである。 In the general formula (G-1), R 1 ~ R 3, A, and X, R 1 ~ R 3 in the general formula (G), A, and is the same as X.
 前記一般式(G-1)で表される化合物の具体例を以下に示す。 Specific examples of the compound represented by the general formula (G-1) are shown below.
Figure JPOXMLDOC01-appb-C000007
Figure JPOXMLDOC01-appb-C000007
Figure JPOXMLDOC01-appb-C000008
Figure JPOXMLDOC01-appb-C000008
Figure JPOXMLDOC01-appb-C000009
Figure JPOXMLDOC01-appb-C000009
 前記酸変性エチレン性不飽和基含有ポリウレタン樹脂は、芳香族基を有することが好ましい。また、ビスフェノールA型、ビスフェノールF型、ビフェニル型、ナフタレン型、フェナントレン型、及びアントラセン型から選択される少なくともいずれかの骨格を有することが好ましい。
 ここで、前記芳香族という用語は、文献、特にJerry MARCH,MARCH’S Advanced Organic Chemistry,第5版,John Wiley and Sons,2001,37頁以下に定義されているような芳香族の慣用概念を意味する。
The acid-modified ethylenically unsaturated group-containing polyurethane resin preferably has an aromatic group. Further, it preferably has at least one skeleton selected from bisphenol A type, bisphenol F type, biphenyl type, naphthalene type, phenanthrene type, and anthracene type.
Here, the term “aromatic” refers to a conventional concept of aromatics as defined in the literature, particularly Jerry MARCH, MARCH'S Advanced Organic Chemistry, 5th edition, John Wiley and Sons, 2001, page 37 and below. means.
 前記酸変性エチレン性不飽和基含有ポリウレタン樹脂における前記芳香族基を有する骨格としては、例えば、下記一般式(I)で表される基などが挙げられる。 Examples of the skeleton having the aromatic group in the acid-modified ethylenically unsaturated group-containing polyurethane resin include groups represented by the following general formula (I).
Figure JPOXMLDOC01-appb-C000010
Figure JPOXMLDOC01-appb-C000010
 一般式(I)中、Xは、直接結合、-CH-、-C(CH-、-SO-、-S-、-CO-、又は-O-を表す。R、R、R、及びRは、互いに同一であってもよいし、異なっていてもよく、それぞれ、水素原子、一価の有機基、ハロゲン原子、-OR、―N(R10)(R11)、又は-SR12を表し、R、R10、R11、及びR12は、水素原子、又は一価の有機基を表す。
 Xとしては、現像性の観点で、-CH-、-O-が好ましく、-CH-が特に好ましい。
 R、R、R、R、R、R10、R11、及びR12における一価の有機基としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、炭素数1~20のアルキル基、炭素数1~20のアルケニル基、-OR13(ただし、R13は一価の有機基を表す)、アリール基、アリールオキシ基、アリールアミノ基、ジアリールアミノ基などが挙げられる。
 ハロゲン原子としては、例えば、フッ素、塩素、臭素などが挙げられる。
 R、R、R、及びRとしては、解像性の観点から、水素原子、炭素数1~20のアルキル基、-OR13が好ましく、水素原子が特に好ましい。
In formula (I), X 1 represents a direct bond, —CH 2 —, —C (CH 3 ) 2 —, —SO 2 —, —S—, —CO—, or —O—. R 5 , R 6 , R 7 , and R 8 may be the same as or different from each other, and each represents a hydrogen atom, a monovalent organic group, a halogen atom, —OR 9 , —N ( R 10 ) (R 11 ), or —SR 12 , and R 9 , R 10 , R 11 , and R 12 represent a hydrogen atom or a monovalent organic group.
X 1 is preferably —CH 2 — or —O—, particularly preferably —CH 2 —, from the viewpoint of developability.
The monovalent organic group in R 5 , R 6 , R 7 , R 8 , R 9 , R 10 , R 11 , and R 12 is not particularly limited and may be appropriately selected depending on the purpose. , An alkyl group having 1 to 20 carbon atoms, an alkenyl group having 1 to 20 carbon atoms, —OR 13 (wherein R 13 represents a monovalent organic group), an aryl group, an aryloxy group, an arylamino group, a diarylamino Groups and the like.
Examples of the halogen atom include fluorine, chlorine, bromine and the like.
R 5 , R 6 , R 7 , and R 8 are preferably a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, or —OR 13 from the viewpoint of resolution, and particularly preferably a hydrogen atom.
 また、前記酸変性エチレン性不飽和基含有ポリウレタン樹脂は、単官能でも多官能でもよいアルコール基を有する化合物と、4,4’-ジフェニルメタンジイソシアネート(MDI)との反応生成物で表される構造単位を含有するポリウレタン樹脂であることが好ましい。
 前記酸変性エチレン性不飽和基含有ポリウレタン樹脂中の前記MDIの質量組成比率は、30質量%以上が好ましく、30質量%~70質量%がより好ましく、33質量%~70質量%が更に好ましく、35%質量%~70質量%が特に好ましい。
 前記MDIの質量組成比率が、30質量%未満であると、硬度が低下してしまうことがある。
The acid-modified ethylenically unsaturated group-containing polyurethane resin is a structural unit represented by a reaction product of a compound having an alcohol group, which may be monofunctional or polyfunctional, and 4,4′-diphenylmethane diisocyanate (MDI). It is preferable that it is a polyurethane resin containing.
The mass composition ratio of the MDI in the acid-modified ethylenically unsaturated group-containing polyurethane resin is preferably 30% by mass or more, more preferably 30% by mass to 70% by mass, still more preferably 33% by mass to 70% by mass, 35% by mass to 70% by mass is particularly preferable.
If the mass composition ratio of the MDI is less than 30% by mass, the hardness may decrease.
 前記酸変性エチレン性不飽和基含有ポリウレタン樹脂は、下記一般式(i)で表されるジイソシアネート化合物の少なくとも1種と、下記一般式(ii)で表されるジオール化合物の少なくとも1種と、の反応生成物で表される構造単位を基本骨格としつつ、前記一般式(G)で表される構造を有するポリウレタン樹脂であることが好ましい。 The acid-modified ethylenically unsaturated group-containing polyurethane resin comprises at least one diisocyanate compound represented by the following general formula (i) and at least one diol compound represented by the following general formula (ii). It is preferable that the polyurethane resin has a structure represented by the general formula (G) while the structural unit represented by the reaction product is a basic skeleton.
  OCN-X-NCO ・・・ 一般式(i)
  HO-Y-OH ・・・ 一般式(ii)
OCN-X 0 -NCO General formula (i)
HO—Y 0 —OH... General formula (ii)
 一般式(i)及び(ii)中、X及びYは、それぞれ独立に2価の有機基を表す。 In general formulas (i) and (ii), X 0 and Y 0 each independently represent a divalent organic group.
-一般式(i)で表されるジイソシアネート化合物-
 前記一般式(i)で表されるジイソシアネート化合物としては、特に制限はなく、目的に応じて適宜選択することができる。
 前記一般式(i)中、Xは、イソシアネート基と反応しない他の官能基、例えば、エステル、ウレタン、アミド、ウレイド基などを有していてもよい。
 前記一般式(i)で表されるジイソシアネート化合物としては、例えば、2,4-トリレンジイソシアネート、2,4-トリレンジイソシアネートの二量体、2,6-トリレンジイソシアネート、p-キシリレンジイソシアネート、m-キシリレンジイソシアネート、4,4’-ジフェニルメタンジイソシアネート(MDI)、1,5-ナフチレンジイソシアネート、3,3’-ジメチルビフェニル-4,4’-ジイソシアネート等のような芳香族ジイソシアネート化合物;ヘキサメチレンジイソシアネート、トリメチルヘキサメチレンジイソシアネート、リジンジイソシアネート、ダイマー酸ジイソシアネート等の脂肪族ジイソシアネート化合物;イソホロンジイソシアネート、4,4’-メチレンビス(シクロヘキシルイソシアネート)、メチルシクロヘキサン-2,4(又は2,6)ジイソシアネート、1,3-(イソシアネートメチル)シクロヘキサン等の脂環族ジイソシアネート化合物;1,3-ブチレングリコール1モルとトリレンジイソシアネート2モルとの付加体等のジオールとジイソシアネートとの反応物であるジイソシアネート化合物;などが挙げられる。これらの中でも、硬度の観点から4,4’-ジフェニルメタンジイソシアネート(MDI)が特に好ましい。
-Diisocyanate compound represented by formula (i)-
There is no restriction | limiting in particular as a diisocyanate compound represented by the said general formula (i), According to the objective, it can select suitably.
In the general formula (i), X 0 may have another functional group that does not react with an isocyanate group, such as an ester, urethane, amide, or ureido group.
Examples of the diisocyanate compound represented by the general formula (i) include 2,4-tolylene diisocyanate, dimer of 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, and p-xylylene diisocyanate. , Aromatic diisocyanate compounds such as m-xylylene diisocyanate, 4,4′-diphenylmethane diisocyanate (MDI), 1,5-naphthylene diisocyanate, 3,3′-dimethylbiphenyl-4,4′-diisocyanate; Aliphatic diisocyanate compounds such as methylene diisocyanate, trimethylhexamethylene diisocyanate, lysine diisocyanate, dimer diisocyanate; isophorone diisocyanate, 4,4'-methylenebis (cyclohexyl isocyanate), methyl Cycloaliphatic-2,4 (or 2,6) diisocyanate, 1,3- (isocyanatomethyl) cyclohexane and other alicyclic diisocyanate compounds; adducts of 1 mol of 1,3-butylene glycol and 2 mol of tolylene diisocyanate, etc. And a diisocyanate compound which is a reaction product of a diol and a diisocyanate. Among these, 4,4′-diphenylmethane diisocyanate (MDI) is particularly preferable from the viewpoint of hardness.
 また、前記一般式(i)で表されるジイソシアネート化合物としては、例えば、トリイソシアネート化合物と、エチレン性不飽和基を有する単官能のアルコール又は単官能のアミン化合物1当量とを付加反応させて得られる生成物などが挙げられる。
 前記トリイソシアネート化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落〔0034〕~〔0035〕に記載された化合物などが挙げられる。
 前記エチレン性不飽和基を有する単官能のアルコール又は前記単官能のアミン化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落〔0037〕~〔0040〕に記載された化合物などが挙げられる。
 これらのジイソシアネート化合物は、1種単独で使用してもよいし、2種以上を併用してもよい。
Moreover, as a diisocyanate compound represented by the said general formula (i), for example, it is obtained by addition-reacting a triisocyanate compound and 1 equivalent of monofunctional alcohol or monofunctional amine compound which has an ethylenically unsaturated group. Products to be obtained.
The triisocyanate compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraphs [0034] to [0035] of JP-A-2005-250438. .
The monofunctional alcohol having an ethylenically unsaturated group or the monofunctional amine compound is not particularly limited and may be appropriately selected depending on the intended purpose. For example, paragraphs of JP 2005-250438 A [ And the compounds described in [0037] to [0040].
These diisocyanate compounds may be used individually by 1 type, and may use 2 or more types together.
-一般式(ii)で表されるジオール化合物-
 前記一般式(ii)で表されるジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ポリエーテルジオール化合物、ポリエステルジオール化合物、ポリカーボネートジオール化合物、カルボキシル基を有するジオール化合物、側鎖にエチレン性不飽和基を含有するジオール化合物などが挙げられる。
 これらは、1種単独で使用してもよいし、2種以上を併用してもよい。
-Diol compound represented by general formula (ii)-
There is no restriction | limiting in particular as a diol compound represented by the said general formula (ii), According to the objective, it can select suitably, For example, it has a polyether diol compound, a polyester diol compound, a polycarbonate diol compound, and a carboxyl group Examples thereof include diol compounds and diol compounds containing an ethylenically unsaturated group in the side chain.
These may be used individually by 1 type and may use 2 or more types together.
 前記ポリエーテルジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落〔0068〕~〔0076〕に記載された化合物などが挙げられる。
 前記ポリエステルジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落〔0077〕~〔0079〕、段落〔0083〕~〔0085〕におけるNo.1~No.8及びNo.13~No.18に記載された化合物などが挙げられる。
The polyether diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraphs [0068] to [0076] of JP-A-2005-250438. It is done.
The polyester diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include paragraphs [0077] to [0079] and paragraphs [0083] to [0085] of JP-A-2005-250438. No. 1-No. 8 and no. 13-No. 18 and the like.
 前記ポリカーボネートジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落〔0080〕~〔0081〕及び段落〔0084〕におけるNo.9~No.12で記載された化合物などが挙げられる。 The polycarbonate diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. For example, in the paragraphs [0080] to [0081] and paragraph [0084] of JP-A-2005-250438, No. 9-No. 12 and the like.
 前記カルボキシル基を有するジオール化合物としては、例えば、以下の式(X)~(Z)に示すものが含まれる。 Examples of the diol compound having a carboxyl group include those represented by the following formulas (X) to (Z).
Figure JPOXMLDOC01-appb-C000011
Figure JPOXMLDOC01-appb-C000011
 式(X)~(Z)中、R15としては、水素原子、置換基{例えば、シアノ基、ニトロ基、-F、-Cl、-Br、-I等のハロゲン原子、-CONH、-COOR16、-OR16、-NHCONHR16、-NHCOOR16、-NHCOR16、-OCONHR16(ここで、前記R16は、炭素数1~10のアルキル基、又は炭素数7~15のアラルキル基を表す。)などの各基が含まれる。}を有していてもよいアルキル基、前記置換基を有していてもよいアラルキル基、前記置換基を有していてもよいアリール基、前記置換基を有していてもよいアルコキシ基、前記置換基を有していてもよいアリールオキシ基を表すものである限り、特に制限はなく、目的に応じて適宜選択することができるが、水素原子、炭素数1~8個のアルキル基、炭素数6~15個のアリール基が好ましい。前記式(X)~(Z)中、L、L10、L11は、それぞれ同一でもよいし、相違していてもよく、単結合、置換基(例えば、アルキル基、アラルキル基、アリール基、アルコキシ基、ハロゲン原子が好ましい。)を有していてもよい2価の脂肪族又は芳香族炭化水素基を表すものである限り、特に制限はなく、目的に応じて適宜選択することができるが、炭素数1~20個のアルキレン基、炭素数6~15個のアリーレン基が好ましく、炭素数1~8個のアルキレン基がより好ましい。また必要に応じ、前記L~L11中にイソシアネート基と反応しない他の官能基、例えば、カルボニル、エステル、ウレタン、アミド、ウレイド、エーテルなどの基や結合を有していてもよい。なお、前記R15、L、L10、L11のうちの2個又は3個で環を形成してもよい。
 前記式(Y)中、Arとしては、置換基を有していてもよい3価の芳香族炭化水素基を表すものである限り、特に制限はなく、目的に応じて適宜選択することができるが、炭素数6~15個の芳香族基が好ましい。
In the formulas (X) to (Z), R 15 represents a hydrogen atom, a substituent {for example, a cyano group, a nitro group, a halogen atom such as —F, —Cl, —Br, —I, etc., —CONH 2 , — COOR 16 , —OR 16 , —NHCONHR 16 , —NHCOOR 16 , —NHCOR 16 , —OCONHR 16 (wherein R 16 represents an alkyl group having 1 to 10 carbon atoms or an aralkyl group having 7 to 15 carbon atoms). Each group is included. }, An alkyl group that may have a substituent, an aralkyl group that may have a substituent, an aryl group that may have a substituent, an alkoxy group that may have a substituent, As long as it represents an aryloxy group which may have the above-mentioned substituent, there is no particular limitation, and it can be appropriately selected according to the purpose, but a hydrogen atom, an alkyl group having 1 to 8 carbon atoms, An aryl group having 6 to 15 carbon atoms is preferred. In the above formulas (X) to (Z), L 9 , L 10 and L 11 may be the same or different from each other, and may be a single bond, a substituent (for example, an alkyl group, an aralkyl group, an aryl group). As long as it represents a divalent aliphatic or aromatic hydrocarbon group that may have an alkyl group, and an alkoxy group and a halogen atom are not particularly limited, and can be appropriately selected depending on the purpose. However, an alkylene group having 1 to 20 carbon atoms and an arylene group having 6 to 15 carbon atoms are preferable, and an alkylene group having 1 to 8 carbon atoms is more preferable. If necessary, the L 9 to L 11 may have other functional groups that do not react with isocyanate groups, such as carbonyl, ester, urethane, amide, ureido, ether, and other groups and bonds. In addition, you may form a ring by two or three of said R < 15 >, L < 9 >, L < 10 >, L < 11 >.
In the formula (Y), Ar is not particularly limited as long as it represents a trivalent aromatic hydrocarbon group which may have a substituent, and can be appropriately selected according to the purpose. However, an aromatic group having 6 to 15 carbon atoms is preferred.
 前記式(X)~(Z)で表されるカルボキシル基を有するジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、3,5-ジヒドロキシ安息香酸、2,2-ビス(ヒドロキシメチル)プロピオン酸、2,2-ビス(2-ヒドロキシエチル)プロピオン酸、2,2-ビス(3-ヒドロキシプロピル)プロピオン酸、ビス(ヒドロキシメチル)酢酸、ビス(4-ヒドロキシフェニル)酢酸、2,2-ビス(ヒドロキシメチル)酪酸、4,4-ビス(4-ヒドロキシフェニル)ペンタン酸、酒石酸、N,N-ジヒドロキシエチルグリシン、N,N-ビス(2-ヒドロキシエチル)-3-カルボキシ-プロピオンアミドなどが挙げられる。これらは、1種単独で使用してもよいし、2種以上を併用してもよい。 The diol compound having a carboxyl group represented by the formulas (X) to (Z) is not particularly limited and may be appropriately selected depending on the intended purpose. For example, 3,5-dihydroxybenzoic acid, 2, 2-bis (hydroxymethyl) propionic acid, 2,2-bis (2-hydroxyethyl) propionic acid, 2,2-bis (3-hydroxypropyl) propionic acid, bis (hydroxymethyl) acetic acid, bis (4-hydroxy Phenyl) acetic acid, 2,2-bis (hydroxymethyl) butyric acid, 4,4-bis (4-hydroxyphenyl) pentanoic acid, tartaric acid, N, N-dihydroxyethylglycine, N, N-bis (2-hydroxyethyl) -3-Carboxy-propionamide and the like. These may be used individually by 1 type and may use 2 or more types together.
 前記側鎖にエチレン性不飽和基を含有するジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、トリメチロールプロパンモノアリルエーテルのように市販されているものでもよいし、ハロゲン化ジオール化合物、トリオール化合物、アミノジオール化合物等の化合物と、エチレン性不飽和基を含有する、カルボン酸、酸塩化物、イソシアネート、アルコール、アミン、チオール、ハロゲン化アルキル化合物等の化合物との反応により製造される化合物であってもよい。
 また、特開2005-250438号公報の段落〔0057〕~〔0060〕に記載された化合物、前記一般式(G-1)で表される化合物などが挙げられる。これらの中でも、前記一般式(G-1)で表される化合物が、前記一般式(G)で表される構造単位を前記酸変性のエチレン性不飽和基含有ポリウレタン樹脂に容易に導入できる点で好ましい。
The diol compound containing an ethylenically unsaturated group in the side chain is not particularly limited and may be appropriately selected depending on the purpose. For example, a commercially available product such as trimethylolpropane monoallyl ether may be used. Or compounds such as halogenated diol compounds, triol compounds, aminodiol compounds, and compounds containing ethylenically unsaturated groups, such as carboxylic acids, acid chlorides, isocyanates, alcohols, amines, thiols, alkyl halide compounds, etc. It may be a compound produced by the reaction.
In addition, compounds described in paragraphs [0057] to [0060] of JP-A-2005-250438, compounds represented by the general formula (G-1), and the like can be given. Among these, the compound represented by the general formula (G-1) can easily introduce the structural unit represented by the general formula (G) into the acid-modified ethylenically unsaturated group-containing polyurethane resin. Is preferable.
 前記酸変性のエチレン性不飽和基含有ポリウレタン樹脂を得る際には、上述したジオール化合物の他に、イソシアネート基と反応しない置換基を有するジオール化合物を併用することもできる。
 前記イソシアネート基と反応しない置換基を有するジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落〔0087〕~〔0088〕に記載された化合物などが挙げられる。
When obtaining the acid-modified ethylenically unsaturated group-containing polyurethane resin, in addition to the diol compound described above, a diol compound having a substituent that does not react with an isocyanate group may be used in combination.
The diol compound having a substituent that does not react with the isocyanate group is not particularly limited and may be appropriately selected depending on the intended purpose. For example, in paragraphs [0087] to [0088] of JP-A-2005-250438 And the compounds described.
 また、前記酸変性のエチレン性不飽和基含有ポリウレタン樹脂の合成には、上述したジオール化合物の他に、テトラカルボン酸二無水物をジオール化合物で開環させた化合物を併用することもできる。
 前記テトラカルボン酸二無水物をジオール化合物で開環させた化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落〔0095〕~〔0101〕に記載された化合物などが挙げられる。
In addition to the diol compound described above, a compound obtained by ring-opening a tetracarboxylic dianhydride with a diol compound can be used in combination for the synthesis of the acid-modified ethylenically unsaturated group-containing polyurethane resin.
The compound obtained by ring-opening the tetracarboxylic dianhydride with a diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. For example, paragraph [0095] to JP 2005-250438 A And the compounds described in [0101].
 本発明で使用する酸変性のエチレン性不飽和基含有ポリウレタン樹脂は、例えば、重合性組成物中の他の成分との相溶性を向上させ、保存安定性を向上させるといった観点から、前記側鎖にエチレン性不飽和基を含有するジオール化合物やカルボキシル基を含有するジオール化合物以外のジオール化合物を共重合させることができ、本発明においては、このようなジオール化合物を共重合させることが特に好ましい。
 このようなジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、低分子のジオール化合物やポリマージオール化合物であるポリエーテルジオール化合物、ポリエステルジオール化合物、ポリカーボネートジオール化合物、m-ジヒドロキシベンゼンのポリカーボネート化合物などを挙げることできる。
The acid-modified ethylenically unsaturated group-containing polyurethane resin used in the present invention is, for example, from the viewpoint of improving compatibility with other components in the polymerizable composition and improving storage stability. A diol compound other than a diol compound containing an ethylenically unsaturated group or a diol compound containing a carboxyl group can be copolymerized, and in the present invention, it is particularly preferable to copolymerize such a diol compound.
Such a diol compound is not particularly limited and can be appropriately selected according to the purpose. For example, a low-molecular diol compound or a polymer diol compound such as a polyether diol compound, a polyester diol compound, a polycarbonate diol compound, Mention may be made of polycarbonate compounds of m-dihydroxybenzene.
 このようなジオール化合物は、下記一般式(U)として表され、ポリウレタン樹脂として組み込まれると、下記一般式(U1)で表される部分構造で表される。 Such a diol compound is represented by the following general formula (U) and, when incorporated as a polyurethane resin, is represented by a partial structure represented by the following general formula (U1).
Figure JPOXMLDOC01-appb-C000012
Figure JPOXMLDOC01-appb-C000012
 一般式(U)及び(U1)において、LU1はエチレン性不飽和基およびカルボキシル基を含まない2価の連結基を表す。 In the general formulas (U) and (U1), L U1 represents a divalent linking group that does not contain an ethylenically unsaturated group and a carboxyl group.
 LU1は、例えば、アルキレン基、アリーレン基、2価のヘテロ環基が挙げられ、該アルキレン基は、アルキレン基の鎖中に-O-、-OCOO-、フェニレン基、炭素-炭素二重結合、炭素-炭素三重結合、-OCO-ZL1-COO-(ZL1はアルキレン基、アルケニレン基、アリーレン基を表す。)を含んでもよい。 L U1 includes, for example, an alkylene group, an arylene group, and a divalent heterocyclic group, and the alkylene group includes —O—, —OCOO—, a phenylene group, and a carbon-carbon double bond in the chain of the alkylene group. And a carbon-carbon triple bond, —OCO—Z L1 —COO— (Z L1 represents an alkylene group, an alkenylene group or an arylene group).
 一般式(U)で表されるジオール化合物のうち、低分子のジオール化合物としては、質量平均分子量が400未満のものが好ましく、例えば、特開2007-2030号公報の段落〔0048〕に記載された化合物、などが挙げられる。
 本発明においては、ポリマージオール化合物が好ましく、以下に詳細に説明する。
Of the diol compounds represented by the general formula (U), the low molecular weight diol compound preferably has a mass average molecular weight of less than 400, and is described, for example, in paragraph [0048] of JP-A-2007-2030. And the like.
In the present invention, a polymer diol compound is preferable and will be described in detail below.
-ポリマージオール化合物-
 前記ポリマージオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えばポリエチレングリコール、ポリプロピレングリコール、ポリエチレンオキサイド、ポリプロピレンオキサイド、エチレンオキサイド/プロピレンオキサイドのブロック共重合体又はランダム共重合体、ポリテトラメチレングリコール、テトラメチレングリコールとネオペンチルグリコールとのブロック共重合体又はランダム共重合体等のポリエーテルジオール類;多価アルコール又はポリエーテルジオールと無水マレイン酸、マレイン酸、フマル酸、無水イタコン酸、イタコン酸、アジピン酸、テレフタル酸、イソフタル酸等の多塩基酸との縮合物であるポリエステルジオール類;グリコール又はビスフェノールと炭酸エステルとの反応、あるいは、グリコール又はビスフェノールにアルカリの存在下でホスゲンを作用させる反応などで得られるポリカーボネートジオール類;カプロラクトン変性ポリテトラメチレンジオール等のカプロラクトン変性ポリマージオール、ポリオレフィン系ポリマージオール、水添ポリブタジエンジオール等のポリブタジエン系ポリマージオール、シリコーン系ポリマージオールなどが挙げられる。これらは、1種単独で使用してもよいし、2種以上を併用してもよい。
-Polymer diol compound-
The polymer diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. For example, polyethylene glycol, polypropylene glycol, polyethylene oxide, polypropylene oxide, ethylene oxide / propylene oxide block copolymer or random copolymer Polyether diols such as coalesced polytetramethylene glycol, block copolymer or random copolymer of tetramethylene glycol and neopentyl glycol; polyhydric alcohol or polyether diol and maleic anhydride, maleic acid, fumaric acid, Polyester diols that are condensates of polybasic acids such as itaconic anhydride, itaconic acid, adipic acid, terephthalic acid, isophthalic acid; reaction of glycol or bisphenol with carbonate Alternatively, polycarbonate diols obtained by reacting phosgene with glycol or bisphenol in the presence of an alkali; caprolactone-modified polymer diols such as caprolactone-modified polytetramethylene diol, polybutadiene-based polymers such as polyolefin-based polymer diols and hydrogenated polybutadiene diols Examples thereof include polymer diols and silicone polymer diols. These may be used individually by 1 type and may use 2 or more types together.
 なお、本発明において好ましい化合物や部分構造は前記一般式(U)、(U1)におけるLU1が、-(CHCHO)nU1CHCH-、-〔CHCH(CH)O〕nU1-CHCH(CH)-、-(CHCHCHO)nU1-CHCHCH-、下記一般式(LL1)で表される構造、下記一般式(LL2)で表される構造または下記一般式(LL3)で表されるポリブタジエンジオール残基である。 In the present invention, preferred compounds and partial structures are such that L U1 in the general formulas (U) and (U1) is — (CH 2 CH 2 O) n U1 CH 2 CH 2 —, — [CH 2 CH (CH 3 ) O] n U1 —CH 2 CH (CH 3 ) —, — (CH 2 CH 2 CH 2 O) n U1 —CH 2 CH 2 CH 2 —, a structure represented by the following general formula (LL1), It is a polybutadienediol residue represented by the structure represented by the formula (LL2) or the following general formula (LL3).
Figure JPOXMLDOC01-appb-C000013
Figure JPOXMLDOC01-appb-C000013
 ここで、RLL1およびRLL2は各々独立に2価の鎖状炭化水素基または2価の環状炭化水素基を表す。nU1~nU4は各々独立に1以上の数を表す。nU1~nU4は通常には1000以下の数であり、好ましくは500以下、より好ましくは100以下の数である。 Here, R LL1 and R LL2 each independently represent a divalent chain hydrocarbon group or a divalent cyclic hydrocarbon group. n U1 to n U4 each independently represents a number of 1 or more. n U1 to n U4 are usually 1000 or less, preferably 500 or less, more preferably 100 or less.
 2価の鎖状炭化水素基としては、アルキレン基、アルケニレン基又はアルキニレン基が好ましい。これらは分岐又は置換基を有していてもよい。より好ましい炭素数としては2~8であり、エチレン基、トリメチレン基、プロピレン基、テトラメチレン基、2-メチル-テトラメチレン基、ペンタメチレン基、ヘキサメチレン基、オクタメチレン基、2-ブテニレン基、2-ブチニレン基が好適な例として挙げられる。
 2価の環状炭化水素基としては、5員環、6員環又は7員環であることが好ましく、5員環又は6員環であることがより好ましく、6員環であることがさらに好ましい。単環でも縮合環でもよく、単環が好ましい。芳香族環、脂肪族環のいずれでもよい。このうち、芳香族環としては、ベンゼン環、ナフタレン環が好ましい例として挙げられ、脂肪族環としては、シクロヘキサン環、ビシクロ[2.2.2]オクタン環が好ましい例として挙げられる。
As the divalent chain hydrocarbon group, an alkylene group, an alkenylene group or an alkynylene group is preferable. These may have a branched or substituted group. More preferable carbon number is 2 to 8, ethylene group, trimethylene group, propylene group, tetramethylene group, 2-methyl-tetramethylene group, pentamethylene group, hexamethylene group, octamethylene group, 2-butenylene group, A 2-butynylene group is a preferred example.
The divalent cyclic hydrocarbon group is preferably a 5-membered ring, a 6-membered ring or a 7-membered ring, more preferably a 5-membered ring or a 6-membered ring, and even more preferably a 6-membered ring. . A single ring or a condensed ring may be used, and a single ring is preferable. Either an aromatic ring or an aliphatic ring may be used. Among these, preferred examples of the aromatic ring include a benzene ring and a naphthalene ring, and preferred examples of the aliphatic ring include a cyclohexane ring and a bicyclo [2.2.2] octane ring.
 前記ポリマージオール化合物の質量平均分子量は、400~8,000であることが好ましく、500~5,000であることがより好ましく、600~3,000であることがさらに好ましく、800~2,000であることが特に好ましい。前記質量平均分子量が、400未満であると、耐折性が十分に得られないことがあり、8,000を超えると、得られるポリウレタン樹脂のガラス転移温度(Tg)が低下しすぎるため、絶縁信頼性が低下してしまうことがある。
 ここで、前記質量平均分子量は、例えば高速GPC装置(東洋曹達株式会社製、HLC-802A)を使用して、0.5質量%のTHF溶液を試料溶液とし、カラムはTSKgel HZM-M 1本を使用し、200μLの試料を注入し、前記THF溶液で溶離して、25℃で屈折率検出器あるいはUV検出器(検出波長254nm)により測定することができる。
The polymer diol compound preferably has a mass average molecular weight of 400 to 8,000, more preferably 500 to 5,000, still more preferably 600 to 3,000, and 800 to 2,000. It is particularly preferred that If the mass average molecular weight is less than 400, sufficient folding resistance may not be obtained, and if it exceeds 8,000, the glass transition temperature (Tg) of the resulting polyurethane resin is too low. Reliability may be reduced.
Here, the mass average molecular weight is determined using, for example, a high-speed GPC apparatus (manufactured by Toyo Soda Co., Ltd., HLC-802A), a 0.5 mass% THF solution as a sample solution, and a column of one TSKgel HZM-M. 200 μL of sample is injected, eluted with the THF solution, and measured at 25 ° C. with a refractive index detector or UV detector (detection wavelength 254 nm).
 前記酸変性のエチレン性不飽和基含有ポリウレタン樹脂中における前記ポリマージオール残基の質量比率は10~60%であることが好ましく、20~60%であることがより好ましく、25~55%であることがさらに好ましく、30~50%であることが特に好ましい。前記質量比率が10%未満であると硬化後の反り抑制が困難になることがあり、60%を超えると光硬化の感度が低下しすぎて解像性が悪化してしまうことがある。 The mass ratio of the polymer diol residue in the acid-modified ethylenically unsaturated group-containing polyurethane resin is preferably 10 to 60%, more preferably 20 to 60%, and more preferably 25 to 55%. More preferably, the content is 30 to 50%. When the mass ratio is less than 10%, it may be difficult to suppress warping after curing, and when it exceeds 60%, the sensitivity of photocuring may be excessively lowered and resolution may be deteriorated.
-主鎖の末端のカルボキシル基-
 また、前記酸変性のエチレン性不飽和基含有ポリウレタン樹脂としては、ポリマー主鎖の末端に、少なくとも1つのカルボキシル基を有するものも、アルカリ性現像液による非画像部の現像性に優れる点で好適に用いられる。ポリマー主鎖の末端に、少なくとも1つのカルボキシル基を有し、2つ以上5つ以下のカルボキシル基を有することが好ましく、2つのカルボキシル基を有することが現像性に優れ、微細パターン形成性の点で特に好ましい。
 なお、前記酸変性のエチレン性不飽和基含有ポリウレタン樹脂における主鎖の末端は、2つあるが、片末端に少なくとも1つのカルボキシル基を有することが好ましく、両末端に少なくとも1つのカルボキシル基を有していてもよい。
-Carboxyl group at the end of the main chain-
In addition, as the acid-modified ethylenically unsaturated group-containing polyurethane resin, those having at least one carboxyl group at the end of the polymer main chain are also preferable in terms of excellent developability of non-image areas with an alkaline developer. Used. It has at least one carboxyl group at the terminal of the polymer main chain and preferably has 2 or more and 5 or less carboxyl groups, and having two carboxyl groups is excellent in developability and has a fine pattern forming property. Is particularly preferable.
The acid-modified ethylenically unsaturated group-containing polyurethane resin has two main chain ends, but preferably has at least one carboxyl group at one end, and has at least one carboxyl group at both ends. You may do it.
 前記酸変性のエチレン性不飽和基含有ポリウレタン樹脂の主鎖の末端に、下記一般式(II)で表される構造を有することが好ましい。 It is preferable that a terminal chain of the acid-modified ethylenically unsaturated group-containing polyurethane resin has a structure represented by the following general formula (II).
  -L-(COOH) ・・・ 一般式(II) -L 1- (COOH) n ... General formula (II)
 一般式(II)中、Lは、(n+1)価の有機連結鎖を表し、nは1以上の整数を示し、1~5が好ましく、2が特に好ましい。
 Lで表される有機連結基は、炭素原子、水素原子、酸素原子、窒素原子、及び硫黄原子から選択される1以上の原子を含んで構成され、具体的には、Lで表される有機連結基の主骨格を構成する原子数は、1~30が好ましく、1~25がより好ましく、1~20が更に好ましく、1~10が特に好ましい。
 なお、前記「有機連結基の主骨格」とは、前記ポリウレタン樹脂の主鎖と末端COOHとを連結するためのみに使用される原子又は原子団を意味し、連結経路が複数ある場合には、使用される原子数が最も少ない経路を構成する原子又は原子団を指す。
In general formula (II), L 1 represents an (n + 1) -valent organic linking chain, n represents an integer of 1 or more, preferably 1 to 5, and particularly preferably 2.
The organic linking group represented by L 1 includes one or more atoms selected from a carbon atom, a hydrogen atom, an oxygen atom, a nitrogen atom, and a sulfur atom. Specifically, the organic linking group is represented by L 1. The number of atoms constituting the main skeleton of the organic linking group is preferably 1 to 30, more preferably 1 to 25, still more preferably 1 to 20, and particularly preferably 1 to 10.
The “main skeleton of the organic linking group” means an atom or an atomic group used only for linking the main chain of the polyurethane resin and the terminal COOH, and when there are a plurality of linking paths, The atom or atomic group which comprises the path | route with the fewest number of atoms used is pointed out.
 前記酸変性のエチレン性不飽和基含有ポリウレタン樹脂の主鎖の末端に、少なくとも1つのカルボキシル基を導入する方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ポリウレタン樹脂製造の原料として、少なくとも1つのカルボキシル基を有するカルボン酸化合物を用いる方法などが挙げられる。 The method for introducing at least one carboxyl group into the terminal of the main chain of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose. For example, polyurethane Examples of the raw material for resin production include a method using a carboxylic acid compound having at least one carboxyl group.
 前記カルボン酸化合物としては、カルボキシル基を1つ有するモノカルボン酸化合物、カルボキシル基を2つ有するジカルボン酸化合物、カルボキシル基を3つ有するトリカルボン酸化合物、カルボキシル基を4つ有するテトラカルボン酸化合物、カルボキシル基を5つ有するペンタカルボン酸化合物などが挙げられる。これらの中でも、カルボキシル基を2つ有するジカルボン酸化合物が、現像性に優れ、微細パターン形成性の点で特に好ましい。 Examples of the carboxylic acid compound include a monocarboxylic acid compound having one carboxyl group, a dicarboxylic acid compound having two carboxyl groups, a tricarboxylic acid compound having three carboxyl groups, a tetracarboxylic acid compound having four carboxyl groups, and a carboxyl group. Examples thereof include pentacarboxylic acid compounds having five groups. Among these, a dicarboxylic acid compound having two carboxyl groups is particularly preferable in terms of excellent developability and fine pattern formability.
 前記カルボン酸化合物としては、少なくとも1つのカルボキシル基を有すれば特に制限はなく、目的に応じて適宜選択することができるが、下記一般式(III)で表される化合物が好適である。 The carboxylic acid compound is not particularly limited as long as it has at least one carboxyl group, and can be appropriately selected according to the purpose. However, a compound represented by the following general formula (III) is preferable.
  H-O-L-Y-L-(COOH)       一般式(III) HO—L 2 —YL 1 — (COOH) Formula (III)
 一般式(III)中、L及びnは、前記一般式(I)と同じ意味を表す。
Yは、2価以上の原子を表す。Lは、単結合又は置換基を有していてもよいアルキレン基を表す。
 前記一般式(III)において、Yは、2価以上の原子を表す。前記2価以上の原子としては、例えば、酸素原子、窒素原子、炭素原子、ケイ素原子、などが挙げられる。これらの中でも、窒素原子、炭素原子が特に好ましい。ここで、Yで表される原子が2価以上であるとは、少なくともYが、L、及びLを介して末端-COOHが結合する2つの結合手を有することを意味するが、Yは、更に水素原子、又は置換基を有していてもよい。
 Yに導入可能な置換基としては、水素原子、酸素原子、硫黄原子、窒素原子及びハロゲン原子から選択される原子を含んで構成される置換基が挙げられる。これらの中でも、炭素原子数1~50の炭化水素基が好ましく、炭素原子数1~40の炭化水素基がより好ましく、炭素原子数1~30の炭化水素基が特に好ましい。
In the general formula (III), L 1 and n represent the same meaning as in the general formula (I).
Y represents a divalent or higher valent atom. L 2 represents a single bond or an alkylene group which may have a substituent.
In the general formula (III), Y represents a divalent or higher valent atom. Examples of the divalent or higher atom include an oxygen atom, a nitrogen atom, a carbon atom, and a silicon atom. Among these, a nitrogen atom and a carbon atom are particularly preferable. Here, the atom represented by Y is divalent or more means that at least Y has two bonds in which the terminal —COOH is bonded via L 1 and L 2. May further have a hydrogen atom or a substituent.
Examples of the substituent that can be introduced into Y include a substituent including an atom selected from a hydrogen atom, an oxygen atom, a sulfur atom, a nitrogen atom, and a halogen atom. Among these, a hydrocarbon group having 1 to 50 carbon atoms is preferable, a hydrocarbon group having 1 to 40 carbon atoms is more preferable, and a hydrocarbon group having 1 to 30 carbon atoms is particularly preferable.
 前記一般式(III)におけるLは、単結合又は置換基を有していてもよいアルキレン基を表す。前記アルキレン基としては、炭素原子数1~20のアルキレン基が好ましく、炭素原子数2~10のアルキレン基がより好ましい。前記アルキレン基に導入可能な置換基としては、例えばハロゲン原子(F、Br、Cl、I)、置換基を有していてもよいアルキル基、などが挙げられる。 L 2 in the general formula (III) represents a single bond or an alkylene group which may have a substituent. As the alkylene group, an alkylene group having 1 to 20 carbon atoms is preferable, and an alkylene group having 2 to 10 carbon atoms is more preferable. Examples of the substituent that can be introduced into the alkylene group include a halogen atom (F, Br, Cl, I), an alkyl group that may have a substituent, and the like.
 前記一般式(III)で表されるカルボン酸化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、乳酸、リンゴ酸、ヒドロキシへキサン酸、クエン酸、ジオール化合物と酸無水物の反応物などが挙げられる。これらは、1種単独で使用してもよいし、2種以上を併用してもよい。これらの中でも、リンゴ酸が特に好ましい。 The carboxylic acid compound represented by the general formula (III) is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include lactic acid, malic acid, hydroxyhexanoic acid, citric acid, and a diol compound. Examples include a reaction product of an acid anhydride. These may be used individually by 1 type and may use 2 or more types together. Among these, malic acid is particularly preferable.
-酸変性のエチレン性不飽和基含有ポリウレタン樹脂の製造方法-
 前記酸変性のエチレン性不飽和基含有ポリウレタン樹脂の製造方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、上記ジイソシアネート化合物及びジオール化合物、必要に応じ、エチレン性不飽和基やカルボキシル基を有さないジオール化合物、特に好ましくはポリマージオール化合物を、非プロトン性溶媒中、それぞれの反応性に応じた活性の公知の触媒を添加し、加熱することにより合成する方法などが挙げられる。合成に使用されるジイソシアネート及びジオール化合物のモル比(M:M)としては、特に制限はなく、目的に応じて適宜選択することができるが、1:1~1.2:1が好ましく、アルコール類又はアミン類等で処理することにより、分子量あるいは粘度といった所望の物性の生成物が、最終的にイソシアネート基が残存しない形で合成される。
-Method for producing acid-modified ethylenically unsaturated group-containing polyurethane resin-
The method for producing the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose. For example, the diisocyanate compound and the diol compound, and if necessary, the ethylenically unsaturated group may be selected. A method of synthesizing a diol compound having no saturated group or carboxyl group, particularly preferably a polymer diol compound, by adding a known catalyst having an activity corresponding to the reactivity in an aprotic solvent and heating the mixture. Is mentioned. The molar ratio of diisocyanate and diol compound used in the synthesis (M a : M b ) is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 1: 1 to 1.2: 1. By treatment with alcohols or amines, a product having desired physical properties such as molecular weight or viscosity is synthesized in a form in which no isocyanate group remains finally.
 前記酸変性のエチレン性不飽和基含有ポリウレタン樹脂におけるエチレン性不飽和基の量としては、特に制限はなく、目的に応じて適宜選択することができるが、エチレン性不飽和基当量としては、0.05mmol/g~3.0mmol/gが好ましく、0.5mmol/g~2.7mmol/gがより好ましく、0.75mmol/g~2.4mmol/gが特に好ましい。
 ここで、エチレン性不飽和基当量は、例えば、臭素価を測定することにより求めることができる。前記臭素価は、例えば、JIS K2605に準拠して測定することができる。
 なお、ここで、エチレン性不飽和当量は、代表的にはビニル基当量であり、上記臭素価で得られた測定する樹脂100gに対して付加した臭素(Br)のグラム数(gBr/100g)から、樹脂1g当たりの付加した臭素(Br)のモル数に変換した値である。
The amount of the ethylenically unsaturated group in the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose. 0.05 mmol / g to 3.0 mmol / g is preferable, 0.5 mmol / g to 2.7 mmol / g is more preferable, and 0.75 mmol / g to 2.4 mmol / g is particularly preferable.
Here, the ethylenically unsaturated group equivalent can be determined, for example, by measuring the bromine number. The bromine number can be measured, for example, according to JIS K2605.
Here, the ethylenically unsaturated equivalent is typically a vinyl group equivalent, and the number of grams of bromine (Br 2 ) added to 100 g of the resin to be measured obtained by the bromine number (gBr 2 / 100 g) is converted to the number of moles of added bromine (Br 2 ) per 1 g of resin.
 前記酸変性のエチレン性不飽和基含有ポリウレタン樹脂の質量平均分子量としては、特に制限はなく、目的に応じて適宜選択することができるが、3,000~50,000が好ましく、現像性の観点から3,000~30,000がより好ましい。 The mass average molecular weight of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably from 3,000 to 50,000, and from the viewpoint of developability. To 3,000 to 30,000 is more preferable.
 前記酸変性のエチレン性不飽和基含有ポリウレタン樹脂の酸価(固形分酸価)としては、特に制限はなく、目的に応じて適宜選択することができるが、20mgKOH/g~120mgKOH/gが好ましく、30mgKOH/g~110mgKOH/gがより好ましく、35mgKOH/g~100mgKOH/gが特に好ましい。前記酸価が、20mgKOH/g未満であると、現像性が不十分となることがあり、120mgKOH/gを超えると、現像速度が高すぎるため現像のコントロールが難しくなることがある。
 なお、前記酸価は、例えば、JIS K0070に準拠して測定することができる。ただし、サンプルが溶解しない場合は、溶媒としてジオキサン又はテトラヒドロフランなどを使用する。
The acid value (solid acid value) of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 20 mgKOH / g to 120 mgKOH / g. 30 mg KOH / g to 110 mg KOH / g is more preferable, and 35 mg KOH / g to 100 mg KOH / g is particularly preferable. If the acid value is less than 20 mgKOH / g, the developability may be insufficient, and if it exceeds 120 mgKOH / g, the development speed may be too high, and the development control may be difficult.
In addition, the said acid value can be measured based on JISK0070, for example. However, if the sample does not dissolve, dioxane or tetrahydrofuran is used as the solvent.
 前記酸変性のエチレン性不飽和基含有ポリウレタン樹脂の前記感光性組成物固形分中の含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、5質量%~80質量%が好ましく、30質量%~60質量%がより好ましい。前記含有量が、5質量%以上であれば、現像性、露光感度が良好となり、80質量%以下であれば、感光層の粘着性が強くなりすぎることを防止できる。 The content of the acid-modified ethylenically unsaturated group-containing polyurethane resin in the solid content of the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose. % Is preferable, and 30% by mass to 60% by mass is more preferable. When the content is 5% by mass or more, developability and exposure sensitivity are good, and when the content is 80% by mass or less, the adhesiveness of the photosensitive layer can be prevented from becoming too strong.
<リン酸金属塩>
 前記リン酸金属塩は、下記一般式(1)で表されるリン酸金属塩である。
<Metallic phosphates>
The metal phosphate is a metal phosphate represented by the following general formula (1).
Figure JPOXMLDOC01-appb-C000014
Figure JPOXMLDOC01-appb-C000014
 ただし、前記一般式(1)中、A及びBは、それぞれ独立に、直鎖状の炭素数1~6のアルキル基、分岐状の炭素数1~6のアルキル基、及びアリール基のいずれかを表す。Mは、Mg、Ca、Al、Sb、Sn、Ge、Ti、Zn、Fe、Zr、Ce、Bi、Sr、Mn、Li、Na、及びKのいずれかを表す。mは、1~4の整数を表す。
 前記A及びBとしては、直鎖状の炭素数1~6のアルキル基が好ましく、メチル基、エチル基、n-プロピル基がより好ましく、エチル基が特に好ましい。
 前記Mとしては、Alが好ましい。
 前記mとしては、3が好ましい。
However, in the general formula (1), AP and BP are each independently a linear alkyl group having 1 to 6 carbon atoms, a branched alkyl group having 1 to 6 carbon atoms, or an aryl group. Represents either. M represents any of Mg, Ca, Al, Sb, Sn, Ge, Ti, Zn, Fe, Zr, Ce, Bi, Sr, Mn, Li, Na, and K. m represents an integer of 1 to 4.
As the AP and BP , a linear alkyl group having 1 to 6 carbon atoms is preferable, a methyl group, an ethyl group, or an n-propyl group is more preferable, and an ethyl group is particularly preferable.
As said M, Al is preferable.
The m is preferably 3.
 前記一般式(1)で表されるリン酸金属塩としては、市販品を用いることができる。該市販品としては、例えば、ホスフィン酸アルミニウムであるエクソリットOP-935、エクソリットOP-930、エクソリットOP1230、エクソリットOP-1240、エクソリットOP-1312(いずれもクラリアントジャパン社製)などが挙げられる。 Commercially available products can be used as the metal phosphate represented by the general formula (1). Examples of the commercially available products include Exolite OP-935, Exolite OP-930, Exolite OP1230, Exolite OP-1240, and Exolite OP-1312 (all manufactured by Clariant Japan), which are aluminum phosphinates.
 前記一般式(1)で表されるリン酸金属塩の平均粒子径は、1.0μm以下であり、0.5μm以下が好ましく、0.1μm以下がより好ましい。前記平均粒子径が、1.0μmを超えると、耐折性が低下し、耐折性が不十分となる。前記平均粒子径の下限値としては、特に制限はなく、目的に応じて適宜選択することができるが、0.01μm以上が好ましい。
 前記一般式(1)で表されるリン酸金属塩の最大粒子径としては、特に制限はなく、目的に応じて適宜選択することができるが、5μm以下が好ましく、3μm以下がより好ましく、2μm以下が特に好ましい。前記最大粒子径の下限値としては、特に制限はなく、目的に応じて適宜選択することができるが、1μm以上が好ましい。
 前記平均粒子径及び前記最大粒子径は、例えば、濃厚系粒径アナライザー(商品名FPAR1000、大塚電子社製)を用いて測定することができる。具体的には、測定原理を動的光散乱法とし、サイズ分布解析手法をキュムラント法及び/又はヒストグラム法として測定する。
 前記平均粒子径とは、積算(累積)質量百分率で表したときの積算値50%の粒度で定義されるものでd50(D50)などと定義されるものである。
 前記最大粒子径とは、積算値100%の粒度で定義されるものでd100(D100)などと定義されるものである。
The average particle diameter of the metal phosphate represented by the general formula (1) is 1.0 μm or less, preferably 0.5 μm or less, and more preferably 0.1 μm or less. When the average particle diameter exceeds 1.0 μm, folding resistance is lowered and folding resistance becomes insufficient. There is no restriction | limiting in particular as a lower limit of the said average particle diameter, Although it can select suitably according to the objective, 0.01 micrometer or more is preferable.
The maximum particle diameter of the metal phosphate represented by the general formula (1) is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 5 μm or less, more preferably 3 μm or less, and 2 μm. The following are particularly preferred: There is no restriction | limiting in particular as a lower limit of the said maximum particle diameter, Although it can select suitably according to the objective, 1 micrometer or more is preferable.
The average particle size and the maximum particle size can be measured using, for example, a concentrated particle size analyzer (trade name FPAR1000, manufactured by Otsuka Electronics Co., Ltd.). Specifically, the measurement principle is a dynamic light scattering method, and the size distribution analysis method is a cumulant method and / or a histogram method.
The average particle size is defined as a particle size with an integrated value of 50% when expressed as an integrated (cumulative) mass percentage, and is defined as d50 (D50) or the like.
The maximum particle size is defined as a particle size having an integrated value of 100% and is defined as d100 (D100) or the like.
 前記一般式(1)で表されるリン酸金属塩を、前記平均粒子径、及び前記最大粒子径にする方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、三本ロールミル、二本ロールミル、サンドミル、ニーダー、アトライター等により分散する方法などが挙げられる。 The method for setting the metal phosphate represented by the general formula (1) to the average particle size and the maximum particle size is not particularly limited and can be appropriately selected according to the purpose. Examples thereof include a method using a three-roll mill, a two-roll mill, a sand mill, a kneader, and an attritor.
 前記一般式(1)で表されるリン酸金属塩の前記感光性組成物固形分中の含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、5質量部~40質量部が好ましく、5質量部~25質量部がより好ましい。前記含有量が、5質量部未満であると、十分な難燃性が得られないことがあり、40質量部を超えると、耐折性が低下することがある。 The content of the metal phosphate of the general formula (1) in the solid content of the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose. 40 parts by mass is preferable, and 5 to 25 parts by mass is more preferable. If the content is less than 5 parts by mass, sufficient flame retardancy may not be obtained, and if it exceeds 40 parts by mass, folding resistance may be reduced.
<重合性化合物>
 前記重合性化合物としては、特に制限はなく、目的に応じて適宜選択することができるが、エチレン性不飽和基を1つ以上有する化合物が好ましい。なお、この重合性化合物は、先に説明したバインダー樹脂とは異なる化合物で、例えば分子量が1000以下のモノマーもしくはオリゴマーであることが好ましい。
<Polymerizable compound>
There is no restriction | limiting in particular as said polymeric compound, Although it can select suitably according to the objective, The compound which has one or more ethylenically unsaturated groups is preferable. The polymerizable compound is a compound different from the binder resin described above, and is preferably a monomer or oligomer having a molecular weight of 1000 or less, for example.
 前記エチレン性不飽和基を有する官能基としては、例えば、アクリロイル基、メタクリロイル基、アクリルアミド基、メタクリルアミド基、ビニルフェニル基、ビニルエステル基、ビニルエーテル基、アリルエーテル基、アリルエステル基などが挙げられる。 Examples of the functional group having an ethylenically unsaturated group include acryloyl group, methacryloyl group, acrylamide group, methacrylamide group, vinylphenyl group, vinyl ester group, vinyl ether group, allyl ether group, and allyl ester group. .
 前記エチレン性不飽和基を1つ以上有する化合物としては、特に制限はなく、目的に応じて適宜選択することができるが、(メタ)アクリロイル基を有するモノマーから選択される少なくとも1種が好ましい。 The compound having one or more ethylenically unsaturated groups is not particularly limited and may be appropriately selected depending on the intended purpose. However, at least one selected from monomers having a (meth) acryloyl group is preferable.
 前記(メタ)アクリロイル基を有するモノマーとしては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ポリエチレングリコールモノ(メタ)アクリレート、ポリプロピレングリコールモノ(メタ)アクリレート、フェノキシエチル(メタ)アクリレート等の単官能アクリレートや単官能メタクリレート;ポリエチレングリコールジ(メタ)アクリレート、ポリプロピレングリコールジ(メタ)アクリレート、ジシクロペンタンジメチロールジ(メタ)アクリレート、トリメチロールエタントリアクリレート、トリメチロールプロパントリアクリレート、トリメチロールプロパンジアクリレート、ネオペンチルグリコールジ(メタ)アクリレート、ペンタエリトリトールテトラ(メタ)アクリレート、ペンタエリトリトールトリ(メタ)アクリレート、ジペンタエリトリトールヘキサ(メタ)アクリレート、ジペンタエリトリトールペンタ(メタ)アクリレート、ヘキサンジオールジ(メタ)アクリレート、トリメチロールプロパントリ(アクリロイルオキシプロピル)エーテル、トリ(アクリロイルオキシエチル)イソシアヌレート、トリ(アクリロイルオキシエチル)シアヌレート、グリセリントリ(メタ)アクリレート;トリメチロールプロパン、グリセリン、ビスフェノール等の多官能アルコールに、エチレンオキサイドやプロピレンオキサイドを付加反応した後で(メタ)アクリレート化したもの;エポキシ樹脂と(メタ)アクリル酸の反応生成物であるエポキシアクリレート類等の多官能アクリレートやメタクリレートなどが挙げられる。これらの中でも、トリメチロールプロパントリ(メタ)アクリレート、ペンタエリトリトールテトラ(メタ)アクリレート、ジペンタエリトリトールヘキサ(メタ)アクリレート、ジペンタエリトリトールペンタ(メタ)アクリレート、ジシクロペンタンジメチロールジ(メタ)アクリレート、トリシクロデカンジメタノール(メタ)アクリレート、エポキシ樹脂と(メタ)アクリル酸の反応生成物であるエポキシアクリレート類等の多官能アクリレートやメタクリレートがより好ましい。
 重合性化合物としては、アクリロイルオキシ基、メタクリロイルオキシ基を2個以上有するものやエポキシ樹脂と(メタ)アクリル酸の反応生成物であるエポキシアクリレート類等の多官能アクリレートやメタクリレートが特に好ましい。
There is no restriction | limiting in particular as a monomer which has the said (meth) acryloyl group, According to the objective, it can select suitably, For example, polyethyleneglycol mono (meth) acrylate, polypropylene glycol mono (meth) acrylate, phenoxyethyl (meta) ) Monofunctional acrylates and monofunctional methacrylates such as acrylates; polyethylene glycol di (meth) acrylate, polypropylene glycol di (meth) acrylate, dicyclopentane dimethylol di (meth) acrylate, trimethylol ethane triacrylate, trimethylol propane triacrylate , Trimethylolpropane diacrylate, neopentyl glycol di (meth) acrylate, pentaerythritol tetra (meth) acrylate, pentaerythritol Tri (meth) acrylate, dipentaerythritol hexa (meth) acrylate, dipentaerythritol penta (meth) acrylate, hexanediol di (meth) acrylate, trimethylolpropane tri (acryloyloxypropyl) ether, tri (acryloyloxyethyl) isocyanate Nurate, tri (acryloyloxyethyl) cyanurate, glycerin tri (meth) acrylate; a polyfunctional alcohol such as trimethylolpropane, glycerin, bisphenol and (meth) acrylate after addition reaction of ethylene oxide or propylene oxide; Examples thereof include polyfunctional acrylates and methacrylates such as epoxy acrylates which are reaction products of an epoxy resin and (meth) acrylic acid. Among these, trimethylolpropane tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, dipentaerythritol penta (meth) acrylate, dicyclopentane dimethylol di (meth) acrylate, Polyfunctional acrylates and methacrylates such as tricyclodecane dimethanol (meth) acrylate and epoxy acrylates which are reaction products of epoxy resin and (meth) acrylic acid are more preferable.
As the polymerizable compound, polyfunctional acrylates and methacrylates such as those having two or more acryloyloxy groups and methacryloyloxy groups, and epoxy acrylates which are reaction products of an epoxy resin and (meth) acrylic acid are particularly preferable.
 前記重合性化合物の前記感光性組成物固形分中の含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、5質量%~50質量%が好ましく、10質量%~40質量%がより好ましい。前記含有量が、5質量%以上であれば、現像性、露光感度が良好となり、50質量%以下であれば、感光層の粘着性が強くなりすぎることを防止できる。 The content of the polymerizable compound in the solid content of the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 5% by mass to 50% by mass, and preferably 10% by mass to 40 mass% is more preferable. When the content is 5% by mass or more, developability and exposure sensitivity are good, and when the content is 50% by mass or less, the adhesiveness of the photosensitive layer can be prevented from becoming too strong.
<光重合開始剤>
 前記光重合開始剤としては、前記重合性化合物の重合を開始する能力を有する限り、特に制限はなく、目的に応じて適宜選択することができるが、例えば、紫外線領域から可視の光線に対して感光性を有するものが好ましく、光励起された増感剤と何らかの作用を生じ、活性ラジカルを生成する活性剤であってもよく、モノマーの種類に応じてカチオン重合を開始させるような開始剤であってもよい。
 また、前記光重合開始剤は、波長約300nm~800nmの範囲内に少なくとも約50の分子吸光係数を有する成分を少なくとも1種含有していることが好ましい。前記波長は330nm~500nmがより好ましい。
 前記光重合開始剤としては、中性の光重合開始剤が好ましい。また、必要に応じてその他の光重合開始剤を含んでいてもよい。
<Photopolymerization initiator>
The photopolymerization initiator is not particularly limited as long as it has the ability to initiate the polymerization of the polymerizable compound, and can be appropriately selected according to the purpose. Those having photosensitivity are preferable, and may be an activator that generates an active radical by causing some action with a photoexcited sensitizer, and is an initiator that initiates cationic polymerization according to the type of monomer. May be.
The photopolymerization initiator preferably contains at least one component having a molecular extinction coefficient of at least about 50 within a wavelength range of about 300 nm to 800 nm. The wavelength is more preferably 330 nm to 500 nm.
As said photoinitiator, a neutral photoinitiator is preferable. Moreover, the other photoinitiator may be included as needed.
 前記中性の光重合開始剤としては、特に制限はなく、目的に応じて適宜選択することができるが、少なくとも芳香族基を有する化合物であることが好ましく、(ビス)アシルホスフィンオキシド又はそのエステル類、アセトフェノン系化合物、ベンゾフェノン系化合物、ベンゾインエーテル系化合物、ケタール誘導体化合物、チオキサントン化合物であることがより好ましい。前記中性の光重合開始剤は、2種以上を併用してもよい。 The neutral photopolymerization initiator is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably a compound having at least an aromatic group, such as (bis) acylphosphine oxide or an ester thereof. More preferred are acetophenone compounds, benzophenone compounds, benzoin ether compounds, ketal derivative compounds, and thioxanthone compounds. Two or more neutral photopolymerization initiators may be used in combination.
 前記光重合開始剤としては、例えば、(ビス)アシルホスフィンオキシド又はそのエステル類、アセトフェノン系化合物、ベンゾフェノン系化合物、ベンゾインエーテル系化合物、ケタール誘導体化合物、チオキサントン化合物、オキシム誘導体、有機過酸化物、チオ化合物などが挙げられる。これらの中でも、感光層の感度、保存性、及び感光層とプリント配線板形成用基板との密着性等の観点から、オキシム誘導体、(ビス)アシルホスフィンオキシド又はそのエステル類、アセトフェノン系化合物、ベンゾフェノン系化合物、ベンゾインエーテル系化合物、ケタール誘導体化合物、チオキサントン化合物が好ましい。 Examples of the photopolymerization initiator include (bis) acylphosphine oxide or esters thereof, acetophenone compounds, benzophenone compounds, benzoin ether compounds, ketal derivative compounds, thioxanthone compounds, oxime derivatives, organic peroxides, thiols, and the like. Compound etc. are mentioned. Among these, from the viewpoints of the sensitivity and storage stability of the photosensitive layer and the adhesion between the photosensitive layer and the printed wiring board forming substrate, oxime derivatives, (bis) acylphosphine oxide or esters thereof, acetophenone compounds, benzophenone Of these compounds, benzoin ether compounds, ketal derivative compounds, and thioxanthone compounds are preferred.
 前記(ビス)アシルホスフィンオキシド、前記アセトフェノン系化合物、前記ベンゾフェノン系化合物、前記ベンゾインエーテル系化合物、前記ケタール誘導体化合物、前記チオキサントン化合物としては、例えば、特開2010-256399号公報の段落〔0042〕に記載された(ビス)アシルホスフィンオキシド、アセトフェノン系化合物、ベンゾフェノン系化合物、ベンゾインエーテル系化合物、ケタール誘導体化合物、チオキサントン化合物などが挙げられる。 Examples of the (bis) acylphosphine oxide, the acetophenone compound, the benzophenone compound, the benzoin ether compound, the ketal derivative compound, and the thioxanthone compound include, for example, paragraph [0042] of JP-A-2010-256399. Examples thereof include (bis) acylphosphine oxides, acetophenone compounds, benzophenone compounds, benzoin ether compounds, ketal derivative compounds, and thioxanthone compounds.
 前記オキシム誘導体としては、例えば、特開2010-256399号公報の段落〔0043〕~〔0059〕に記載されたオキシム誘導体などが挙げられる。 Examples of the oxime derivative include oxime derivatives described in paragraphs [0043] to [0059] of JP 2010-256399 A.
 前記光重合開始剤は、1種単独で使用してもよいし、2種以上を併用してもよい。
 前記光重合開始剤の前記感光性組成物固形分中の含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、0.1質量%~30質量%が好ましく、0.5質量%~20質量%がより好ましく、0.5質量%~15質量%が特に好ましい。
The said photoinitiator may be used individually by 1 type, and may use 2 or more types together.
The content of the photopolymerization initiator in the solid content of the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 0.1% by mass to 30% by mass, More preferably, the content is 5% by mass to 20% by mass, and particularly preferably 0.5% by mass to 15% by mass.
<熱架橋剤>
 前記熱架橋剤としては、特に制限はなく、目的に応じて適宜選択することができ、感光層の硬化後の膜強度を改良するために、現像性等に悪影響を与えない範囲で、例えば、エポキシ化合物(例えば、1分子内に少なくとも2つのオキシラン基を有するエポキシ化合物)、1分子内に少なくとも2つのオキセタニル基を有するオキセタン化合物を用いることができ、特開2007-47729号公報に記載されているようなオキシラン基を有するエポキシ化合物、β位にアルキル基を有するエポキシ化合物、オキセタニル基を有するオキセタン化合物、ポリイソシアネート化合物、ポリイソシアネート又はその誘導体のイソシアネート基にブロック剤を反応させて得られる化合物(ブロック化ポリイソシアネート化合物)、オキサゾリン誘導体などが挙げられる。
<Thermal crosslinking agent>
The thermal crosslinking agent is not particularly limited and may be appropriately selected depending on the purpose.In order to improve the film strength after curing of the photosensitive layer, in a range that does not adversely affect developability, for example, Epoxy compounds (for example, epoxy compounds having at least two oxirane groups in one molecule), oxetane compounds having at least two oxetanyl groups in one molecule can be used, and are described in JP-A-2007-47729. A compound obtained by reacting a blocking agent with an isocyanate group of an epoxy compound having an oxirane group, an epoxy compound having an alkyl group at the β-position, an oxetane compound having an oxetanyl group, a polyisocyanate compound, a polyisocyanate or a derivative thereof ( Blocked polyisocyanate compound), oxazoline derivative And the like.
 また、前記熱架橋剤として、メラミン誘導体を用いることができる。該メラミン誘導体としては、例えば、メチロールメラミン、アルキル化メチロールメラミン(メチロール基を、メチル、エチル、ブチル等でエーテル化した化合物)などが挙げられる。これらは1種単独で使用してもよいし、2種以上を併用してもよい。これらの中でも、保存安定性が良好で、感光層の表面硬度あるいは硬化膜の膜強度自体の向上に有効である点で、アルキル化メチロールメラミンが好ましく、ヘキサメチル化メチロールメラミンが特に好ましい。 Moreover, a melamine derivative can be used as the thermal crosslinking agent. Examples of the melamine derivative include methylol melamine, alkylated methylol melamine (a compound obtained by etherifying a methylol group with methyl, ethyl, butyl or the like). These may be used individually by 1 type and may use 2 or more types together. Among these, alkylated methylol melamine is preferable and hexamethylated methylol melamine is particularly preferable in that it has good storage stability and is effective in improving the surface hardness of the photosensitive layer or the film strength itself of the cured film.
 前記エポキシ化合物としては、例えば、特開2010-256399号公報の段落〔0071〕~〔0073〕に記載されたエポキシ化合物などが挙げられる。 Examples of the epoxy compound include epoxy compounds described in paragraphs [0071] to [0073] of JP2010-256399A.
 前記オキセタン化合物としては、例えば、特開2010-256399号公報の段落〔0074〕に記載されたオキセタン化合物などが挙げられる。 Examples of the oxetane compound include oxetane compounds described in paragraph [0074] of JP2010-256399A.
 前記ポリイソシアネート化合物としては、例えば、特開2010-256399号公報の段落〔0075〕に記載されたポリイソシアネート化合物などが挙げられる。 Examples of the polyisocyanate compound include the polyisocyanate compounds described in paragraph [0075] of JP2010-256399A.
 前記ブロック化ポリイソシアネート化合物としては、例えば、特開2010-256399号公報の段落〔0076〕に記載された化合物などが挙げられる。 Examples of the blocked polyisocyanate compound include compounds described in paragraph [0076] of JP-A No. 2010-256399.
 前記オキサゾリン誘導体としては、例えば、1,3-ビス(4,5-ジヒドロ-2-オキサゾリル)ベンゼン、1,4-ビス(4,5-ジヒドロ-2-オキサゾリル)ベンゼン、2,2’-ビス(2-オキサゾリン)などが挙げられる。 Examples of the oxazoline derivative include 1,3-bis (4,5-dihydro-2-oxazolyl) benzene, 1,4-bis (4,5-dihydro-2-oxazolyl) benzene, and 2,2′-bis. (2-oxazoline) and the like.
 前記メラミン誘導体としては、例えば、特開2010-256399号公報の段落〔0077〕に記載されたメラミン誘導体などが挙げられる。 Examples of the melamine derivative include the melamine derivatives described in paragraph [0077] of JP 2010-256399 A.
 前記熱架橋剤の前記感光性組成物固形分中の含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、1質量%~50質量%が好ましく、3質量%~30質量%がより好ましい。前記含有量が、1質量%以上であれば、硬化膜の膜強度が向上され、50質量%以下であれば、現像性、露光感度が良好となる。 The content of the thermal crosslinking agent in the solid content of the photosensitive composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 1% by mass to 50% by mass, and preferably 3% by mass to 30 mass% is more preferable. When the content is 1% by mass or more, the film strength of the cured film is improved, and when the content is 50% by mass or less, developability and exposure sensitivity are improved.
<その他の成分>
 前記その他の成分としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、フィラー、熱硬化促進剤、熱重合禁止剤、可塑剤、着色剤(着色顔料あるいは染料)などが挙げられ、更に基材表面への密着促進剤及びその他の助剤類(例えば、導電性粒子、充填剤、消泡剤、難燃剤、レベリング剤、剥離促進剤、酸化防止剤、香料、表面張力調整剤、連鎖移動剤など)を併用してもよい。
 これらの成分を適宜含有させることにより、目的とする感光性フィルムの安定性、写真性、膜物性などの性質を調整することができる。
 前記フィラーについては、例えば特開2008-250074号公報の段落〔0098〕~〔0099〕などが挙げられる。
 ただし、本発明においては、感光性組成物中に無機フィラーである無機微粒子を含有しないことが好ましく、含有したとしても感光性組成物の固形分比で10質量%未満、より好ましくは1質量%未満である。
 前記熱重合禁止剤については、例えば特開2008-250074号公報の段落〔0101〕~〔0102〕などが挙げられる。
 前記熱硬化促進剤については、例えば特開2008-250074号公報の段落〔0093〕などが挙げられる。
 前記可塑剤については、例えば特開2008-250074号公報の段落〔0103〕~〔0104〕などが挙げられる。
 前記着色剤については、例えば特開2008-250074号公報の段落〔0105〕~〔0106〕などが挙げられる。
 前記密着促進剤については、例えば特開2008-250074号公報の段落〔0107〕~〔0109〕などが挙げられる。
<Other ingredients>
There is no restriction | limiting in particular as said other component, According to the objective, it can select suitably, For example, a filler, a thermosetting accelerator, a thermal-polymerization inhibitor, a plasticizer, a coloring agent (coloring pigment or dye) etc. Furthermore, adhesion promoters to the substrate surface and other auxiliaries (for example, conductive particles, fillers, antifoaming agents, flame retardants, leveling agents, peeling accelerators, antioxidants, fragrances, surface tensions) You may use together a regulator, a chain transfer agent, etc.).
By appropriately containing these components, properties such as the stability, photographic properties, and film properties of the intended photosensitive film can be adjusted.
Examples of the filler include paragraphs [0098] to [00099] of JP-A-2008-250074.
However, in the present invention, it is preferable not to contain inorganic fine particles which are inorganic fillers in the photosensitive composition. Even if it is contained, the solid content ratio of the photosensitive composition is less than 10% by mass, more preferably 1% by mass. Is less than.
Examples of the thermal polymerization inhibitor include paragraphs [0101] to [0102] of JP-A-2008-250074.
Examples of the thermosetting accelerator include paragraph [0093] of JP-A-2008-250074.
Examples of the plasticizer include paragraphs [0103] to [0104] of JP-A-2008-250074.
Examples of the colorant include paragraphs [0105] to [0106] of JP-A-2008-250074.
Examples of the adhesion promoter include paragraphs [0107] to [0109] of JP-A-2008-250074.
(感光性フィルム)
 本発明の感光性フィルムは、少なくとも、支持体と、該支持体上に本発明の感光性組成物を含む感光層とを有し、更に必要に応じて、その他の層を有する。
(Photosensitive film)
The photosensitive film of the present invention has at least a support and a photosensitive layer containing the photosensitive composition of the present invention on the support, and further has other layers as necessary.
<支持体>
 前記支持体としては、特に制限はなく、目的に応じて適宜選択することができるが、前記感光層を剥離可能であり、かつ光の透過性が良好であるものが好ましく、更に表面の平滑性が良好であることがより好ましい。
<Support>
The support is not particularly limited and may be appropriately selected depending on the intended purpose. However, it is preferable that the photosensitive layer is peelable and has good light transmittance, and further has a smooth surface. Is more preferable.
 前記支持体としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2008-250074号公報の段落〔0115〕~〔0117〕に記載の支持体などが挙げられる。 The support is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include the support described in paragraphs [0115] to [0117] of JP-A-2008-250074.
<感光層>
 前記感光層は、本発明の前記感光性組成物を含む層であれば、特に制限はなく、目的に応じて適宜選択することができる。
 また、前記感光層の積層数としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、1層であってもよいし、2層以上であってもよい。
<Photosensitive layer>
If the said photosensitive layer is a layer containing the said photosensitive composition of this invention, there will be no restriction | limiting in particular, According to the objective, it can select suitably.
Further, the number of laminated photosensitive layers is not particularly limited and may be appropriately selected depending on the purpose. For example, it may be one layer or two or more layers.
 前記感光層の形成方法としては、例えば、前記支持体の上に、本発明の前記感光性組成物を、水又は溶剤に溶解、乳化又は分散させて感光性組成物溶液を調製し、該溶液を直接塗布し、乾燥させることにより積層する方法などが挙げられる。 As the method for forming the photosensitive layer, for example, a photosensitive composition solution is prepared by dissolving, emulsifying or dispersing the photosensitive composition of the present invention in water or a solvent on the support. The method of laminating | stacking by apply | coating directly and drying is mentioned.
 前記感光性組成物溶液に用いる溶剤としては、特に制限はなく、目的に応じて適宜選択することができる。 The solvent used for the photosensitive composition solution is not particularly limited and may be appropriately selected depending on the intended purpose.
 前記塗布の方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、スピンコーター、スリットスピンコーター、ロールコーター、ダイコーター、カーテンコーター等を用いて、前記支持体に直接塗布する方法などが挙げられる。
 前記乾燥の条件としては、各成分、溶媒の種類、使用割合等によっても異なるが、通常60℃~110℃の温度で30秒間~15分間程度である。
The application method is not particularly limited and may be appropriately selected depending on the intended purpose. For example, using a spin coater, slit spin coater, roll coater, die coater, curtain coater, etc. The method of apply | coating etc. are mentioned.
The drying conditions vary depending on each component, the type of solvent, the use ratio, and the like, but are usually 60 ° C. to 110 ° C. for about 30 seconds to 15 minutes.
 前記感光層の厚みとしては、特に制限はなく、目的に応じて適宜選択することができるが、1μm~100μmが好ましく、2μm~50μmがより好ましく、4μm~30μmが特に好ましい。 The thickness of the photosensitive layer is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 1 μm to 100 μm, more preferably 2 μm to 50 μm, and particularly preferably 4 μm to 30 μm.
<その他の層>
 前記その他の層としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、保護フィルム、熱可塑性樹脂層、バリア層、剥離層、接着層、光吸収層、表面保護層等の層が挙げられる。前記感光性フィルムは、これらの層を1種単独で有していてもよいし、2種以上を有していてもよい。
<Other layers>
The other layer is not particularly limited and may be appropriately selected depending on the intended purpose. For example, a protective film, a thermoplastic resin layer, a barrier layer, a release layer, an adhesive layer, a light absorption layer, a surface protective layer, etc. Layer. The said photosensitive film may have these layers individually by 1 type, and may have 2 or more types.
-保護フィルム-
 前記感光性フィルムは、前記感光層上に保護フィルムを形成してもよい。
 前記保護フィルムとしては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2008-250074号公報の段落〔0118〕に記載の保護フィルムなどが挙げられる。
 前記保護フィルムと前記支持体との組合せとしては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2008-250074号公報の段落〔0118〕に記載の組合せなどが挙げられる。
-Protective film-
The photosensitive film may form a protective film on the photosensitive layer.
There is no restriction | limiting in particular as said protective film, According to the objective, it can select suitably, For example, the protective film as described in Paragraph [0118] of Unexamined-Japanese-Patent No. 2008-250074 etc. are mentioned.
The combination of the protective film and the support is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include the combination described in paragraph [0118] of JP-A-2008-250074. It is done.
 また、前記支持体と前記保護フィルムとの静摩擦係数は、0.3~1.4が好ましく、0.5~1.2がより好ましい。
 前記静摩擦係数が、0.3以上であれば、滑り過ぎによって、ロール状にした場合に巻ズレが発生することを防止でき、1.4以下であれば、良好なロール状に巻くことができる。
The static friction coefficient between the support and the protective film is preferably 0.3 to 1.4, more preferably 0.5 to 1.2.
If the static friction coefficient is 0.3 or more, it is possible to prevent the occurrence of winding misalignment when it is made into a roll shape due to excessive slip, and if it is 1.4 or less, it can be wound into a good roll shape. .
 前記感光性フィルムの長さ、保管方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2008-250074号公報の段落〔0120〕に記載の長さ、保管方法などが挙げられる。 The length and storage method of the photosensitive film are not particularly limited and may be appropriately selected depending on the purpose. For example, the length and storage described in paragraph [0120] of JP-A-2008-250074 are disclosed. The method etc. are mentioned.
 前記保護フィルムは、前記保護フィルムと前記感光層との接着性を調整するために表面処理してもよい。前記表面処理は、例えば、前記保護フィルムの表面に、ポリオルガノシロキサン、弗素化ポリオレフィン、ポリフルオロエチレン、ポリビニルアルコール等のポリマーからなる下塗層を形成させる。該下塗層の形成は、前記ポリマーの塗布液を前記保護フィルムの表面に塗布した後、30℃~150℃で1分間~30分間乾燥させることにより形成させることができる。前記乾燥の際の温度は50℃~120℃が特に好ましい。 The protective film may be surface-treated to adjust the adhesion between the protective film and the photosensitive layer. In the surface treatment, for example, an undercoat layer made of a polymer such as polyorganosiloxane, fluorinated polyolefin, polyfluoroethylene, or polyvinyl alcohol is formed on the surface of the protective film. The undercoat layer can be formed by applying the polymer coating solution to the surface of the protective film and then drying at 30 ° C. to 150 ° C. for 1 to 30 minutes. The drying temperature is particularly preferably 50 ° C to 120 ° C.
(感光性積層体)
 本発明の感光性積層体は、少なくとも基体と、前記基体上に感光層とを有してなり、更に必要に応じて、その他の層を積層してなる。
 前記感光層は、本発明の前記感光性組成物を含む層である。
 前記感光層は、例えば、上述の製造方法で作製された前記感光性フィルムから転写されたものであり、上述と同様の構成を有する。
(Photosensitive laminate)
The photosensitive laminate of the present invention comprises at least a substrate and a photosensitive layer on the substrate, and further laminates other layers as necessary.
The photosensitive layer is a layer containing the photosensitive composition of the present invention.
The photosensitive layer is, for example, transferred from the photosensitive film produced by the above-described manufacturing method, and has the same configuration as described above.
<基体>
 前記基体は、感光層が形成される被処理基体、又は本発明の感光性フィルムの少なくとも感光層が転写される被転写体となるもので、特に制限はなく、目的に応じて適宜選択することができ、例えば、表面平滑性の高いものから凸凹のある表面を持つものまで任意に選択できるが、板状の基体、いわゆる基板が好ましい。具体的には、公知のプリント配線板製造用の基板(プリント基板)、ガラス板(ソーダガラス板など)、合成樹脂性のフィルム、紙、金属板などが挙げられ、本発明においてはポリイミドフイルムが特に好ましい。
<Substrate>
The substrate is a substrate to be processed on which a photosensitive layer is formed, or a substrate to which at least the photosensitive layer of the photosensitive film of the present invention is transferred, and is not particularly limited, and is appropriately selected depending on the purpose. For example, a material having a high surface smoothness to a material having an uneven surface can be arbitrarily selected, but a plate-like substrate, that is, a so-called substrate is preferable. Specific examples include a known printed wiring board production substrate (printed substrate), a glass plate (soda glass plate, etc.), a synthetic resin film, paper, a metal plate, etc. In the present invention, a polyimide film is used. Particularly preferred.
<感光性積層体の製造方法>
 前記感光性積層体の製造方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、本発明の感光性フィルムにおける少なくとも感光層を加熱及び加圧の少なくともいずれかを行いながら転写して積層する方法などが挙げられる。
<Method for producing photosensitive laminate>
The method for producing the photosensitive laminate is not particularly limited and may be appropriately selected depending on the intended purpose. For example, at least one of heating and pressing at least the photosensitive layer in the photosensitive film of the present invention is performed. For example, a method of transferring and stacking can be used.
 前記感光性積層体の製造方法の一例は、前記基体の表面に本発明の感光性フィルムを加熱及び加圧の少なくともいずれかを行いながら積層する方法である。なお、前記感光性フィルムが前記保護フィルムを有する場合には、該保護フィルムを剥離し、前記基体に前記感光層が重なるようにして積層するのが好ましい。
 前記加熱温度としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、15℃~180℃が好ましく、60℃~140℃がより好ましい。
 前記加圧の圧力としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、0.1MPa~1.0MPaが好ましく、0.2MPa~0.8MPaがより好ましい。
An example of the manufacturing method of the said photosensitive laminated body is the method of laminating | stacking the photosensitive film of this invention on the surface of the said base | substrate, performing at least any one of a heating and pressurization. In addition, when the said photosensitive film has the said protective film, it is preferable to peel this protective film and to laminate | stack so that the said photosensitive layer may overlap with the said base | substrate.
The heating temperature is not particularly limited and may be appropriately selected depending on the intended purpose. For example, 15 ° C. to 180 ° C. is preferable, and 60 ° C. to 140 ° C. is more preferable.
The pressurizing pressure is not particularly limited and may be appropriately selected depending on the intended purpose. For example, 0.1 MPa to 1.0 MPa is preferable, and 0.2 MPa to 0.8 MPa is more preferable.
 前記加熱の少なくともいずれかを行う装置としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ラミネータ(例えば、大成ラミネータ株式会社製、VP-II、ニチゴーモートン株式会社製、VP130)などが好適に挙げられる。 The apparatus for performing at least one of the heating is not particularly limited and may be appropriately selected depending on the purpose. For example, a laminator (for example, Taisei Laminator, VP-II, Nichigo Morton, VP130) is preferable.
 本発明の感光性フィルム及び前記感光性積層体は、電子材料分野における高精細な永久パターンの形成用として広く用いることができ、特に、プリント基板の永久パターン形成用に好適に用いることができる。 The photosensitive film and the photosensitive laminate of the present invention can be widely used for forming a high-definition permanent pattern in the field of electronic materials, and can be particularly suitably used for forming a permanent pattern on a printed circuit board.
(永久パターン形成方法)
 本発明の永久パターン形成方法は、露光工程を少なくとも含み、更に必要に応じて、その他の工程を含む。
(Permanent pattern forming method)
The permanent pattern forming method of the present invention includes at least an exposure step, and further includes other steps as necessary.
<露光工程>
 前記露光工程は、本発明の感光性組成物により形成された感光層に対して露光を行う工程であれば、特に制限はなく、目的に応じて適宜選択することができ、例えば、本発明の前記感光性積層体における感光層に対して露光を行う工程などが挙げられる。
<Exposure process>
The exposure step is not particularly limited as long as it is a step of exposing the photosensitive layer formed of the photosensitive composition of the present invention, and can be appropriately selected according to the purpose. The process etc. which expose with respect to the photosensitive layer in the said photosensitive laminated body are mentioned.
 前記露光の対象としては、前記感光層である限り、特に制限はなく、目的に応じて適宜選択することができるが、基材上に感光性フィルムを加熱及び加圧の少なくともいずれかを行いながら積層して形成した積層体に対して行われることが好ましい。 The subject of the exposure is not particularly limited as long as it is the photosensitive layer, and can be appropriately selected according to the purpose, but while performing at least one of heating and pressurizing the photosensitive film on the substrate. It is preferable to be performed on a laminated body formed by laminating.
 前記露光としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、デジタル露光、アナログ露光などが挙げられる。 The exposure is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include digital exposure and analog exposure.
<その他の工程>
 前記その他の工程としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、基材の表面処理工程、現像工程、硬化処理工程、ポスト露光工程などが挙げられる。
<Other processes>
There is no restriction | limiting in particular as said other process, According to the objective, it can select suitably, For example, the surface treatment process of a base material, a development process, a hardening process process, a post exposure process etc. are mentioned.
-現像工程-
 前記現像工程は、前記感光層の未露光部分を除去する工程である。
 前記露光部分の除去方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、現像液を用いて除去する方法などが挙げられる。
-Development process-
The developing step is a step of removing an unexposed portion of the photosensitive layer.
There is no restriction | limiting in particular as a removal method of the said exposed part, According to the objective, it can select suitably, For example, the method etc. which remove using a developing solution are mentioned.
 前記現像液としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2008-250074号公報の段落〔0171〕~〔0173〕に記載の現像液などが挙げられる。 The developer is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include the developers described in paragraphs [0171] to [0173] of JP-A-2008-250074.
-硬化処理工程-
 前記硬化処理工程は、前記現像工程が行われた後、形成されたパターンにおける感光層に対して硬化処理を行う工程である。
 前記硬化処理工程としては、特に制限はなく、目的に応じて適宜選択することができるが、例えば、全面露光処理、全面加熱処理などが好適に挙げられる。
-Curing process-
The curing treatment step is a step of performing a curing treatment on the photosensitive layer in the formed pattern after the development step is performed.
There is no restriction | limiting in particular as said hardening process, Although it can select suitably according to the objective, For example, a whole surface exposure process, a whole surface heat processing, etc. are mentioned suitably.
 前記全面露光処理、及び前記全面加熱処理の方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2008-250074号公報の段落〔0176〕~〔0177〕に記載の方法などが挙げられる。 The method for the whole surface exposure treatment and the whole surface heat treatment is not particularly limited and may be appropriately selected depending on the purpose. For example, in paragraphs [0176] to [0177] of JP-A-2008-250074 The method of description is mentioned.
 前記永久パターンの形成方法が、保護膜、層間絶縁膜、及びソルダーレジストパターンの少なくともいずれかを形成する永久パターン形成方法である場合には、プリント基板上に前記永久パターン形成方法により、永久パターンを形成し、更に、以下のように半田付けを行うことができる。
 即ち、前記現像により、前記永久パターンである硬化層が形成され、前記プリント基板の表面に金属層が露出される。該プリント配線板の表面に露出した金属層の部位に対して金メッキを行った後、半田付けを行う。そして、半田付けを行った部位に、半導体や部品などを実装する。このとき、前記硬化層による永久パターンが、保護膜あるいは絶縁膜(層間絶縁膜)、ソルダーレジストとしての機能を発揮し、外部からの衝撃や隣同士の電極の導通が防止される。
When the permanent pattern forming method is a permanent pattern forming method for forming at least one of a protective film, an interlayer insulating film, and a solder resist pattern, the permanent pattern is formed on a printed circuit board by the permanent pattern forming method. Then, soldering can be performed as follows.
That is, by the development, a hardened layer that is the permanent pattern is formed, and the metal layer is exposed on the surface of the printed board. Gold plating is performed on the portion of the metal layer exposed on the surface of the printed wiring board, and then soldering is performed. Then, a semiconductor or a component is mounted on the soldered portion. At this time, the permanent pattern by the hardened layer exhibits a function as a protective film, an insulating film (interlayer insulating film), or a solder resist, and prevents external impact and conduction between adjacent electrodes.
(プリント基板)
 本発明のプリント基板は、少なくとも基体と、前記永久パターン形成方法により形成された永久パターンと、を有してなり、更に、必要に応じて適宜選択した、その他の部材を有する。
 その他の部材としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、基材と前記永久パターン間に、更に絶縁層が設けられたビルドアップ基板などが挙げられる。本発明においては、特にフレキシブル配線基板に使用するのが好ましい。
(Printed board)
The printed circuit board of the present invention includes at least a substrate and a permanent pattern formed by the permanent pattern forming method, and further includes other members appropriately selected as necessary.
There is no restriction | limiting in particular as another member, According to the objective, it can select suitably, For example, the buildup board | substrate etc. in which the insulating layer was further provided between the base material and the said permanent pattern are mentioned. In the present invention, it is particularly preferable to use it for a flexible wiring board.
 以下、実施例を挙げて本発明をより具体的に説明するが、本発明は、これらの実施例に何ら制限されるものではない。なお、実施例中の「部」は「質量部」を表す。 Hereinafter, the present invention will be described more specifically with reference to examples. However, the present invention is not limited to these examples. In the examples, “part” represents “part by mass”.
 なお、調製例における酸価、質量平均分子量は、以下の方法により測定した。
<酸価>
 前記酸価は、JIS K0070に準拠して測定した。ただし、サンプルが溶解しない場合は、溶媒としてジオキサン又はテトラヒドロフランなどを使用した。
<質量平均分子量>
 前記質量平均分子量は、高速GPC装置(東洋曹達社製HLC-802A)を使用して測定した。即ち、0.5質量%のTHF(テトラヒドロフラン)溶液を試料溶液とし、カラムはTSKgel HZM-M 1本を使用し、200μLの試料を注入し、前記THF溶液で溶離して、25℃で屈折率検出器により測定した。次に、標準ポリスチレンで較正した分子量分布曲線より質量平均分子量を求めた。
<エチレン性不飽和基当量>
 エチレン性不飽和基当量は臭素価をJIS K2605に準拠して測定することにより求めた。
In addition, the acid value and mass average molecular weight in the preparation examples were measured by the following methods.
<Acid value>
The acid value was measured according to JIS K0070. However, when the sample did not dissolve, dioxane or tetrahydrofuran was used as a solvent.
<Mass average molecular weight>
The mass average molecular weight was measured using a high-speed GPC apparatus (HLC-802A manufactured by Toyo Soda Co., Ltd.). That is, a 0.5 mass% THF (tetrahydrofuran) solution was used as a sample solution, a column using one TSKgel HZM-M, a 200 μL sample was injected, eluted with the THF solution, and a refractive index at 25 ° C. Measured with a detector. Next, the mass average molecular weight was determined from the molecular weight distribution curve calibrated with standard polystyrene.
<Equivalent ethylenically unsaturated group>
The ethylenically unsaturated group equivalent was determined by measuring the bromine number according to JIS K2605.
(調製例1)
<酸変性エチレン性不飽和基含有ポリウレタン樹脂U2の合成>
 コンデンサー、及び撹拌機を備えた1Lの3つ口丸底フラスコに、2,2-ビス(ヒドロキシメチル)酪酸(DMBA)11.11g(0.075モル)、グリセロールモノメタクリレート(GLM)35.44g(0.221モル)、ポリプロピレングリコール(分子量1000)(PPG1000)78.75g(0.079モル)及びリンゴ酸6.03g(0.045モル)をシクロヘキサノン300mLに溶解した。これに、4,4-ジフェニルメタンジイソシアネート(MDI)23.46g(0.094モル)、ヘキサメチレンジイソシアネート(HMDI)47.30g(0.281モル)、2,6-ジ-t-ブチルヒドロキシトルエン0.6g、及び触媒として、商品名:ネオスタンU-600(日東化成社製、無機ビスマス)0.6gを添加し、75℃にて、5時間加熱撹拌した。室温まで冷却後、シクロヘキサノンで濃度調整して、固形分濃度40質量%の酸変性エチレン性不飽和基含有ポリウレタン樹脂(U2)溶液を得た。得られた酸変性エチレン性不飽和基含有ポリウレタン樹脂の質量平均分子量は7000であり、固形分酸価は46mgKOH/gであり、エチレン性不飽和基当量は1.1mmol/gであった。
(Preparation Example 1)
<Synthesis of acid-modified ethylenically unsaturated group-containing polyurethane resin U2>
To a 1 L three-necked round bottom flask equipped with a condenser and a stirrer was added 11.11 g (0.075 mol) of 2,2-bis (hydroxymethyl) butyric acid (DMBA) and 35.44 g of glycerol monomethacrylate (GLM). (0.221 mol), 78.75 g (0.079 mol) of polypropylene glycol (molecular weight 1000) (PPG1000) and 6.03 g (0.045 mol) of malic acid were dissolved in 300 mL of cyclohexanone. To this, 23.46 g (0.094 mol) of 4,4-diphenylmethane diisocyanate (MDI), 47.30 g (0.281 mol) of hexamethylene diisocyanate (HMDI), 2,6-di-t-butylhydroxytoluene 0 0.6 g and 0.6 g of a trade name: Neostan U-600 (manufactured by Nitto Kasei Co., Ltd., inorganic bismuth) were added as a catalyst, and the mixture was heated and stirred at 75 ° C for 5 hours. After cooling to room temperature, the concentration was adjusted with cyclohexanone to obtain an acid-modified ethylenically unsaturated group-containing polyurethane resin (U2) solution having a solid concentration of 40% by mass. The obtained acid-modified ethylenically unsaturated group-containing polyurethane resin had a mass average molecular weight of 7000, a solid content acid value of 46 mgKOH / g, and an ethylenically unsaturated group equivalent of 1.1 mmol / g.
(調製例2)
<酸変性エチレン性不飽和基含有ポリウレタン樹脂U1の合成>
 調製例1において、2,2-ビス(ヒドロキシメチル)酪酸(DMBA)11.11g(0.075モル)、グリセロールモノメタクリレート(GLM)35.44g(0.221モル)、ポリプロピレングリコール(分子量1000)(PPG1000)78.75g(0.079モル)及びリンゴ酸6.03g(0.045モル)の組み合わせを、2,2-ビス(ヒドロキシメチル)酪酸(DMBA)14.45g(0.098モル)、グリセロールモノメタクリレート(GLM)44.45g(0.278モル)及びリンゴ酸6.03g(0.045モル)との組合せに代え、4,4-ジフェニルメタンジイソシアネート(MDI)23.46g(0.094モル)、ヘキサメチレンジイソシアネート(HMDI)47.30g(0.281モル)の組み合わせを、4,4-ジフェニルメタンジイソシアネート(MDI)75.08g(0.300モル)、ヘキサメチレンジイソシアネート(HMDI)12.61g(0.075モル)の組み合わせに代えたこと以外は、調製例1と同様にして、固形分濃度40質量%の酸変性エチレン性不飽和基含有ポリウレタン樹脂(U1)溶液を合成した。得られた酸変性エチレン性不飽和基含有ポリウレタン樹脂の質量平均分子量は8000であり、固形分酸価は69mgKOH/gであり、エチレン性不飽和基当量は1.82mmol/gであった。
(Preparation Example 2)
<Synthesis of acid-modified ethylenically unsaturated group-containing polyurethane resin U1>
In Preparation Example 1, 11.11 g (0.075 mol) of 2,2-bis (hydroxymethyl) butyric acid (DMBA), 35.44 g (0.221 mol) of glycerol monomethacrylate (GLM), polypropylene glycol (molecular weight 1000) (PPG1000) 78.75 g (0.079 mol) and 6.03 g (0.045 mol) malic acid were combined with 14.45 g (0.098 mol) 2,2-bis (hydroxymethyl) butyric acid (DMBA). Instead of a combination of 44.45 g (0.278 mol) of glycerol monomethacrylate (GLM) and 6.03 g (0.045 mol) of malic acid, 23.46 g (0.094) of 4,4-diphenylmethane diisocyanate (MDI) Mol), 47.30 g of hexamethylene diisocyanate (HMDI) (0. 81 mol) was replaced with a combination of 75.08 g (0.300 mol) of 4,4-diphenylmethane diisocyanate (MDI) and 12.61 g (0.075 mol) of hexamethylene diisocyanate (HMDI), In the same manner as in Preparation Example 1, an acid-modified ethylenically unsaturated group-containing polyurethane resin (U1) solution having a solid content concentration of 40% by mass was synthesized. The obtained acid-modified ethylenically unsaturated group-containing polyurethane resin had a mass average molecular weight of 8000, a solid content acid value of 69 mgKOH / g, and an ethylenically unsaturated group equivalent of 1.82 mmol / g.
(調製例3)
<酸変性エチレン性不飽和基含有ポリウレタン樹脂U3の合成>
 調製例1において、2,2-ビス(ヒドロキシメチル)酪酸(DMBA)11.11g(0.075モル)、グリセロールモノメタクリレート(GLM)35.44g(0.221モル)、ポリプロピレングリコール(分子量1000)(PPG1000)78.75g(0.079モル)及びリンゴ酸6.03g(0.045モル)の組み合わせを、2,2-ビス(ヒドロキシメチル)酪酸(DMBA)15.00g(0.101モル)、グリセロールモノメタクリレート(GLM)31.83g(0.199モル)、ポリテトラメチレングリコール(分子量1000)(PTMG1000)75g(0.075モル)及びリンゴ酸6.03g(0.045モル)との組合せに代えたこと以外は、調製例1と同様にして、固形分濃度40質量%の酸変性エチレン性不飽和基含有ポリウレタン樹脂(U3)溶液を合成した。得られた酸変性エチレン性不飽和基含有ポリウレタン樹脂の質量平均分子量は8600であり、固形分酸価は54mgKOH/gであり、エチレン性不飽和基当量は1mmol/gであった。
(Preparation Example 3)
<Synthesis of acid-modified ethylenically unsaturated group-containing polyurethane resin U3>
In Preparation Example 1, 11.11 g (0.075 mol) of 2,2-bis (hydroxymethyl) butyric acid (DMBA), 35.44 g (0.221 mol) of glycerol monomethacrylate (GLM), polypropylene glycol (molecular weight 1000) (PPG1000) 78.75 g (0.079 mol) and 6.03 g (0.045 mol) of malic acid were combined into 15.00 g (0.101 mol) of 2,2-bis (hydroxymethyl) butyric acid (DMBA). , 31.83 g (0.199 mol) of glycerol monomethacrylate (GLM), 75 g (0.075 mol) of polytetramethylene glycol (molecular weight 1000) (PTMG1000) and 6.03 g (0.045 mol) of malic acid The solid content concentration is 40 quality in the same manner as in Preparation Example 1 except that % Acid modified ethylene unsaturated group-containing polyurethane resin (U3) solution was synthesized. The obtained acid-modified ethylenically unsaturated group-containing polyurethane resin had a mass average molecular weight of 8,600, a solid content acid value of 54 mgKOH / g, and an ethylenically unsaturated group equivalent of 1 mmol / g.
(調製例4)
<酸変性エチレン性不飽和基含有ポリウレタン樹脂U4の合成>
 調製例1において、2,2-ビス(ヒドロキシメチル)酪酸(DMBA)11.11g(0.075モル)、グリセロールモノメタクリレート(GLM)35.44g(0.221モル)、ポリプロピレングリコール(分子量1000)(PPG1000)78.75g(0.079モル)及びリンゴ酸6.03g(0.045モル)の組み合わせを、2,2-ビス(ヒドロキシメチル)酪酸(DMBA)15.00g(0.101モル)、グリセロールモノメタクリレート(GLM)31.83g(0.199モル)、ETERNACOL UH-100(宇部興産製、分子量1000)75g(0.075モル)及びリンゴ酸6.03g(0.045モル)との組合せに代えたこと以外は、調製例1と同様にして、固形分濃度40質量%の酸変性エチレン性不飽和基含有ポリウレタン樹脂(U4)溶液を合成した。得られた酸変性エチレン性不飽和基含有ポリウレタン樹脂の質量平均分子量は8800であり、固形分酸価は54mgKOH/gであり、エチレン性不飽和基当量は1mmol/gであった。
(Preparation Example 4)
<Synthesis of acid-modified ethylenically unsaturated group-containing polyurethane resin U4>
In Preparation Example 1, 11.11 g (0.075 mol) of 2,2-bis (hydroxymethyl) butyric acid (DMBA), 35.44 g (0.221 mol) of glycerol monomethacrylate (GLM), polypropylene glycol (molecular weight 1000) (PPG1000) 78.75 g (0.079 mol) and 6.03 g (0.045 mol) of malic acid were combined into 15.00 g (0.101 mol) of 2,2-bis (hydroxymethyl) butyric acid (DMBA). Glycerol monomethacrylate (GLM) 31.83 g (0.199 mol), ETERNACOL UH-100 (manufactured by Ube Industries, molecular weight 1000) 75 g (0.075 mol) and malic acid 6.03 g (0.045 mol) The solid content concentration was 40% by mass in the same manner as in Preparation Example 1 except that the combination was changed. An acid-modified ethylenically unsaturated group-containing polyurethane resin (U4) solution was synthesized. The obtained acid-modified ethylenically unsaturated group-containing polyurethane resin had a mass average molecular weight of 8,800, a solid content acid value of 54 mgKOH / g, and an ethylenically unsaturated group equivalent of 1 mmol / g.
(調製例5)
<樹脂U5の合成>
 撹拌機、還流冷却管、窒素導入管、導入管、及び温度計を備えた4口フラスコに、ポリテトラメチレングリコール(PTG1000SN:保土ヶ谷化学社製:水酸基価=110mgKOH/g、Mw=1,020)156質量部、ジメチロールブタン酸(日本化成社製)129質量部、及び溶剤としてシクロヘキサノン375質量部を仕込み、窒素気流下、攪拌しながら60℃まで昇温し、均一に溶解させた。続いてこのフラスコに、イソホロンジイソシアネート215質量部を投入し、90℃で8時間攪拌し、ウレタン化の反応を行った。少量サンプリングを行い、ポリスチレン換算の質量平均分子量が13,000、実測によるポリマー不揮発分の酸価が98mgKOH/gであるカルボキシル基含有ウレタンプレポリマー溶液を得た。
(Preparation Example 5)
<Synthesis of Resin U5>
In a four-necked flask equipped with a stirrer, a reflux condenser, a nitrogen inlet pipe, an inlet pipe, and a thermometer, polytetramethylene glycol (PTG1000SN: manufactured by Hodogaya Chemical Co., Ltd .: hydroxyl value = 110 mgKOH / g, Mw = 1,020) 156 parts by mass, 129 parts by mass of dimethylolbutanoic acid (manufactured by Nippon Kasei Co., Ltd.), and 375 parts by mass of cyclohexanone as a solvent were added, and the mixture was heated to 60 ° C. with stirring in a nitrogen stream and dissolved uniformly. Subsequently, 215 parts by mass of isophorone diisocyanate was added to the flask and stirred at 90 ° C. for 8 hours to carry out a urethanization reaction. A small amount of sampling was performed to obtain a carboxyl group-containing urethane prepolymer solution having a polystyrene-equivalent mass average molecular weight of 13,000 and an actually measured polymer non-volatile acid value of 98 mgKOH / g.
 次に、このフラスコの窒素導入管からの窒素を停止し、乾燥空気の導入に切り替え、攪拌しながらグリシジルメタクリレート111質量部、ジメチルベンジルアミン6質量部、更に重合禁止剤としてヒドロキノン0.3質量部を投入し、90℃のまま8時間反応させた。 Next, the nitrogen from the nitrogen inlet tube of this flask was stopped, switched to introduction of dry air, 111 parts by mass of glycidyl methacrylate, 6 parts by mass of dimethylbenzylamine with stirring, and 0.3 parts by mass of hydroquinone as a polymerization inhibitor Was allowed to react at 90 ° C. for 8 hours.
 次に、このフラスコに無水コハク酸63質量部を投入し、乾燥空気雰囲気下、90℃のまま更に6時間反応させた。FT-IR測定にて酸無水物基の吸収が消失しているのを確認後、室温まで冷却した。次いでこの溶液にシクロヘキサノンを加えて、固形分が40質量%になるように調整した。 Next, 63 parts by mass of succinic anhydride was added to the flask, and the mixture was further reacted for 6 hours at 90 ° C. in a dry air atmosphere. After confirming the disappearance of the acid anhydride group absorption by FT-IR measurement, the mixture was cooled to room temperature. Subsequently, cyclohexanone was added to this solution, and it adjusted so that solid content might be 40 mass%.
(調製例6)
<樹脂U6の調製>
 ZCR-1569H(日本化薬社製、ビフェニル骨格を有するノボラック型酸変性エチレン性不飽和基含有エポキシ樹脂)をシクロヘキサノンで希釈して固形分濃度40質量%に調整し、樹脂U6として用いた。
(Preparation Example 6)
<Preparation of resin U6>
ZCR-1569H (manufactured by Nippon Kayaku Co., Ltd., novolac acid-modified ethylenically unsaturated group-containing epoxy resin having a biphenyl skeleton) was diluted with cyclohexanone to adjust the solid content concentration to 40% by mass, and used as resin U6.
(調製例7)
<樹脂U7の調製>
 ZCR-1569H(日本化薬社製)とUXE-3024(日本化薬社製、下記一般式で表される構造のポリウレタン樹脂)を、固形分比率でZCR-1569H:UXE-3024=20:45に混合したものを、シクロヘキサノンで希釈して固形分濃度40質量%に調整し、樹脂U7として用いた。
(Preparation Example 7)
<Preparation of resin U7>
ZCR-1569H (manufactured by Nippon Kayaku Co., Ltd.) and UXE-3024 (manufactured by Nippon Kayaku Co., Ltd., polyurethane resin having a structure represented by the following general formula) were mixed at a solid content ratio of ZCR-1569H: UXE-3024 = 20: 45. Was mixed with cyclohexanone to adjust the solid concentration to 40% by mass, and used as the resin U7.
Figure JPOXMLDOC01-appb-C000015
Figure JPOXMLDOC01-appb-C000015
 ここで、一般式中、R11はエポキシアクリレートの残基、R12はジイソシアネートの残基、R13は炭素数1~5のアルキル基、R14は水素原子又はメチル基を示す。なお、残基とは、原料成分から結合に供された官能基を除いた部分の構造をいう。 Here, in the general formula, R 11 represents an epoxy acrylate residue, R 12 represents a diisocyanate residue, R 13 represents an alkyl group having 1 to 5 carbon atoms, and R 14 represents a hydrogen atom or a methyl group. In addition, a residue means the structure of the part remove | excluding the functional group used for the coupling | bonding from the raw material component.
(調製例8)
<樹脂U8の調製>
 アクリル樹脂(メタクリル酸、メタクリル酸メチル、及びアクリル酸ブチルの共重合体;メタクリル酸:メタクリル酸メチル:アクリル酸ブチル=17質量%:62質量%:21質量%で質量平均分子量10,0000、酸価110mgKOH/g)とUXE-3024(日本化薬社製)を、固形分比率でアクリル樹脂:UXE-3024=30:40に混合したものを、シクロヘキサノンで希釈して固形分濃度40質量%に調整し、樹脂U8として用いた。
(Preparation Example 8)
<Preparation of resin U8>
Acrylic resin (a copolymer of methacrylic acid, methyl methacrylate, and butyl acrylate; methacrylic acid: methyl methacrylate: butyl acrylate = 17% by mass: 62% by mass: 21% by mass and a mass average molecular weight of 10,000,000 acids 110 mg KOH / g) and UXE-3024 (manufactured by Nippon Kayaku Co., Ltd.) in a solid content ratio of acrylic resin: UXE-3024 = 30: 40, diluted with cyclohexanone to a solid content concentration of 40% by mass It adjusted and used as resin U8.
(調製例9)
<難燃剤分散液(a-1~a-5及びA-1~A-7)の調製>
 リン酸金属塩3.64質量部(商品名:OP-935、クラリアントジャパン社製)と、各樹脂溶液(固形分濃度40質量%)19.97質量部と、分散剤0.18質量部(商品名:BYK-W903、ビックケミージャパン社製)と、シクロヘキサノン3.26質量部を秤量して、直径0.65mmのジルコニアビーズが充填されたモーターミルM-50(アイガー社製)分散機を用いて分散し、難燃剤分散液a-1~5とA-1~7を得た。
 分散時間と難燃剤分散液の粒子径の関係を表1に示す。
(Preparation Example 9)
<Preparation of flame retardant dispersions (a-1 to a-5 and A-1 to A-7)>
3.64 parts by mass of metal phosphate (trade name: OP-935, manufactured by Clariant Japan), 19.97 parts by mass of each resin solution (solid content concentration 40% by mass), 0.18 parts by mass of dispersant ( (Product name: BYK-W903, manufactured by Big Chemie Japan) and 3.26 parts by mass of cyclohexanone were weighed, and a motor mill M-50 (manufactured by Eiger) dispersed with zirconia beads having a diameter of 0.65 mm was used. To obtain flame retardant dispersions a-1 to 5 and A-1 to 7.
Table 1 shows the relationship between the dispersion time and the particle size of the flame retardant dispersion.
Figure JPOXMLDOC01-appb-T000016
Figure JPOXMLDOC01-appb-T000016
 なお、平均粒子径、及び最大粒子径は以下の方法で測定した。
 上記難燃剤分散液を50倍に希釈したものを、濃厚系粒径アナライザー(商品名FPAR1000、大塚電子社製)を用いて測定した。測定原理は動的光散乱法とし、サイズ分布解析手法をキュムラント法及び/又はヒストグラム法として測定した。
 平均粒子径は、積算(累積)質量百分率で表したときの積算値50%の粒度で定義されるものでd50(D50)などと定義されるものであり、最大粒子径は、積算値100%の粒度で定義されるものでd100(D100)などと定義されるものである。
The average particle size and the maximum particle size were measured by the following methods.
A solution obtained by diluting the flame retardant dispersion by a factor of 50 was measured using a dense particle size analyzer (trade name FPAR1000, manufactured by Otsuka Electronics Co., Ltd.). The measurement principle was a dynamic light scattering method, and the size distribution analysis method was measured as a cumulant method and / or a histogram method.
The average particle size is defined as a particle size of an integrated value of 50% when expressed as an integrated (cumulative) mass percentage, and is defined as d50 (D50), and the maximum particle size is an integrated value of 100%. And is defined as d100 (D100) or the like.
(調製例10)
<難燃剤分散液b、c、dの調製>
 調製例9において、難燃剤を、表2に記載の難燃剤に代えた以外は、調製例9の難燃剤分散液a-1の調製方法と同様(即ち分散時間0分間)にして、難燃剤分散液b、c、dを調製した。
(Preparation Example 10)
<Preparation of flame retardant dispersions b, c, d>
A flame retardant was prepared in the same manner as the preparation of flame retardant dispersion a-1 in Preparation Example 9 (ie, dispersion time 0 minutes) except that the flame retardant in Preparation Example 9 was replaced with the flame retardant listed in Table 2. Dispersions b, c and d were prepared.
Figure JPOXMLDOC01-appb-T000017
Figure JPOXMLDOC01-appb-T000017
 表2中の難燃剤は以下のとおりである。
 フォスファゼン化合物:SPS-100、大塚化学社製
 縮合リン酸エステル:CR-741、大八化学社製
 環状リン化合物:SANKO-BCA、三光社製
The flame retardants in Table 2 are as follows.
Phosphazene compound: SPS-100, manufactured by Otsuka Chemical Co., Ltd. Condensed phosphate ester: CR-741, manufactured by Daihachi Chemical Co., Ltd. Cyclic phosphorus compound: SANKO-BCA, manufactured by Sanko Co., Ltd.
(調製例11)
<顔料分散液の調製>
 ブルー顔料(BASF社製、HELIOGEN BLUE D7086)を0.018質量部と、イエロー顔料(BASF社製、Pariotol Yellow D0960)を0.005質量部と、メラミン(メラミン、和光純薬工業社製)0.548質量部と、シクロヘキサノン69.29質量部を秤量し、直径0.65mmのジルコニアビーズが充填されたモーターミルM-50(アイガー社製)分散機を用いて90分間分散し、顔料分散液を得た。
(Preparation Example 11)
<Preparation of pigment dispersion>
0.018 parts by mass of a blue pigment (manufactured by BASF, HELIOGEN BLUE D7086), 0.005 parts by mass of yellow pigment (manufactured by BASF, Pariotol Yellow D0960), and melamine (melamine, manufactured by Wako Pure Chemical Industries, Ltd.) 0 548 parts by mass and 69.29 parts by mass of cyclohexanone were weighed and dispersed for 90 minutes using a motor mill M-50 (Eiger) disperser filled with zirconia beads having a diameter of 0.65 mm. Got.
(実施例1)
-感光性フィルムの製造-
 支持体としての厚み16μmのポリエチレンテレフタレートフィルム(東レ社製、16FB50)上に、下記の組成からなる感光性組成物溶液を塗布し、乾燥させて、前記支持体上に厚み38μmの感光層を形成した。前記感光層上に、保護層として、厚み20μmのポリプロピレンフィルム(王子特殊紙社製、アルファンE-200)を積層し、感光性フィルムを製造した。
Example 1
-Production of photosensitive film-
A photosensitive composition solution having the following composition was applied on a polyethylene terephthalate film (16FB50, manufactured by Toray Industries, Inc.) having a thickness of 16 μm as a support, and dried to form a photosensitive layer having a thickness of 38 μm on the support. did. On the photosensitive layer, a 20 μm-thick polypropylene film (manufactured by Oji Specialty Paper Co., Ltd., Alphan E-200) was laminated as a protective layer to produce a photosensitive film.
-感光性組成物溶液の組成-
 ・調製例9の難燃剤分散液a-3・・・・・・・・・・27.06質量部
 ・調製例11の顔料分散液・・・・・・・・・・・・・・4.26質量部
 ・調製例1の酸変性エチレン性不飽和基含有ポリウレタン樹脂U1溶液(固形分濃度40%に調整)・・・・・・・・・・・・・・・6.66質量部
 ・光重合開始剤(IRGACURE 907、チバ・ジャパン社製)
             ・・・・・・・・・・・・・・0.50質量部
 ・光重合開始剤(DETX-S、日本化薬社製)・・0.0047質量部
 ・光重合開始剤(EAB-F、保土谷化学社製)・・0.0166質量部
 ・重合性化合物(リポキシVR-60、昭和電工社製)・4.57質量部
 ・界面活性剤(B1176(3%希釈)、DIC社製)・1.94質量部
 ・架橋剤(エポトートYDF-170、東都化成社製、ビスフェノールF型エポキシ樹脂)・・・・・・・・・・・・・・・・・・・4.98質量部
 ・溶剤(シクロヘキサノン)・・・・・・・・・・・・・2.80質量部
-Composition of photosensitive composition solution-
-Flame retardant dispersion a-3 of Preparation Example 9 ... 27.06 parts by mass-Pigment dispersion of Preparation Example 11 ... 4 .26 parts by mass-Acid-modified ethylenically unsaturated group-containing polyurethane resin U1 solution of Preparation Example 1 (adjusted to a solid concentration of 40%) ... 6.66 parts by mass -Photopolymerization initiator (IRGACURE 907, manufactured by Ciba Japan)
・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ 0.50 parts by mass ・ Photoinitiator (DETX-S, Nippon Kayaku Co., Ltd.) ・ ・ 0.0047 parts by mass ・ Photoinitiator (EAB-) F, manufactured by Hodogaya Chemical Co., Ltd.) 0.0167 parts by mass Polymerizable compound (Lipoxy VR-60, manufactured by Showa Denko) 4.57 parts by mass Surfactant (B1176 (3% dilution), DIC) 1.94 parts by mass Crosslinking agent (Epototo YDF-170, manufactured by Tohto Kasei Co., Ltd., bisphenol F type epoxy resin) ... 4.98 Mass part ・ Solvent (Cyclohexanone) ... 2.80 parts by mass
-基体への積層-
 銅張積層板(スルーホールなし、銅厚み18μm)の表面に酸洗浄処理を施して基体を調製した。該銅張積層板上に、前記感光性フィルムの感光層が前記銅張積層板に接するようにして前記感光性フィルムにおける保護フィルムを剥がしながら、真空ラミネータ(ニチゴーモートン株式会社製、VP130)を用いて積層させ、前記銅張積層板と、前記感光層と、前記ポリエチレンテレフタレートフィルム(支持体)とがこの順に積層された感光性積層体を調製した。
 圧着条件は、真空引きの時間40秒間、圧着温度70℃、圧着圧力0.2MPa、加圧時間10秒間とした。
 前記得られた感光性積層体について、以下に示す評価方法で、レジストパターンを形成した。
-Lamination on substrate-
A substrate was prepared by subjecting the surface of a copper-clad laminate (no through-holes, copper thickness 18 μm) to an acid cleaning treatment. A vacuum laminator (manufactured by Nichigo Morton Co., Ltd., VP130) was used on the copper-clad laminate while peeling off the protective film from the photosensitive film so that the photosensitive layer of the photosensitive film was in contact with the copper-clad laminate. Thus, a photosensitive laminate was prepared in which the copper-clad laminate, the photosensitive layer, and the polyethylene terephthalate film (support) were laminated in this order.
The pressure bonding conditions were as follows: a vacuuming time of 40 seconds, a pressure bonding temperature of 70 ° C., a pressure bonding pressure of 0.2 MPa, and a pressure time of 10 seconds.
About the obtained photosensitive laminated body, the resist pattern was formed with the evaluation method shown below.
-露光工程-
 前記調製した感光性積層体における感光層に対し、ポリエチレンテレフタレートフィルム(支持体)側から、所定のパターンを有する青紫色レーザ露光によるパターン形成装置を用いて、超高圧水銀灯により所定のパターンが得られるようにエネルギー量200mJ/cmを照射し露光し、前記感光層の一部の領域を硬化させた。
-Exposure process-
A predetermined pattern can be obtained from the polyethylene terephthalate film (support) side with respect to the photosensitive layer in the prepared photosensitive laminate using a blue-violet laser exposure pattern having a predetermined pattern by an ultrahigh pressure mercury lamp. In this way, an energy amount of 200 mJ / cm 2 was irradiated and exposed to cure a part of the photosensitive layer.
-現像工程-
 室温にて10分間静置した後、前記感光性積層体からポリエチレンテレフタレートフィルム(支持体)を剥がし取り、銅張積層板上の感光層の全面に、アルカリ現像液として、1質量%炭酸ナトリウム水溶液を用い、30℃にて60秒間、0.18MPa(1.8kgf/cm)の圧力でスプレー現像し、未露光の領域を溶解除去した。その後、水洗し、乾燥させ、永久パターンを形成した。
-Development process-
After standing at room temperature for 10 minutes, the polyethylene terephthalate film (support) is peeled off from the photosensitive laminate, and a 1% by mass sodium carbonate aqueous solution is used as an alkaline developer on the entire surface of the photosensitive layer on the copper clad laminate. Was spray-developed at 30 ° C. for 60 seconds at a pressure of 0.18 MPa (1.8 kgf / cm 2 ) to dissolve and remove unexposed areas. Thereafter, it was washed with water and dried to form a permanent pattern.
-硬化処理工程-
 前記永久パターンの全面に対して、160℃で1時間、加熱処理を施した後、エネルギー量1,000mJ/cmを照射し露光することで永久パターンの表面を硬化し、膜強度を高め、試験板を作製した。
-Curing process-
The entire surface of the permanent pattern is subjected to heat treatment at 160 ° C. for 1 hour, and then the surface of the permanent pattern is cured by irradiating with an energy amount of 1,000 mJ / cm 2 to increase the film strength. A test plate was prepared.
 以下の評価に供した。結果を表3に示す。 Supplied for the following evaluation. The results are shown in Table 3.
<難燃性>
 ポリイミド基材(ポリイミド厚み12.5μm)に銅箔(銅箔厚み12μm)を積層したフレキシブルプリント配線板用基板(新日鉄化学社製、商品名「エスパネックス」Mシリーズ)をエッチングし銅箔を取り除くことにより、厚み12.5μmのポリイミド基材を得た。
 このポリイミド基材の両面に、作製した感光性フィルムの前記感光層(厚み38μm)をラミネートにより接着した。室温にて10分間静置した後、超高圧水銀灯によりエネルギー量150mJ/cmを照射し露光し、前記感光層を硬化させ、160℃で1時間、加熱処理を施した後、エネルギー量1,000mJ/cmを照射し露光することで、感光層を硬化し、膜強度を高めた。
 上記より得られた硬化された前記感光層が形成されたポリイミド基材を20cm×5cmの大きさにカットすることにより、複合体サンプルを得た。得られた複合体サンプルを直径1cm×20cmの円筒状棒に巻きつけ、複合体サンプルの端部から12.5cmの位置を耐熱テープでとめた後、棒を抜くことで長さ20cm、径1cmの難燃性試験用サンプルを得た。
 得られた難燃性試験用サンプルをクランプで吊るし、3cmの炎を3秒間接炎することにより難燃性の試験を行った。
〔評価基準〕
  ○:UL94 VTM-0を満たすもの
  ×:UL94 VTM-0を満たさないもの
<Flame retardance>
Etching a substrate for flexible printed wiring boards (made by Nippon Steel Chemical Co., Ltd., trade name “ESPANEX” M series), which is made by laminating a copper foil (copper foil thickness 12 μm) on a polyimide substrate (polyimide thickness 12.5 μm), and removing the copper foil As a result, a polyimide substrate having a thickness of 12.5 μm was obtained.
The photosensitive layer (thickness 38 μm) of the produced photosensitive film was adhered to both surfaces of this polyimide substrate by lamination. After standing at room temperature for 10 minutes, an exposure was performed by irradiating with an ultra high pressure mercury lamp with an energy amount of 150 mJ / cm 2 , the photosensitive layer was cured, and after heat treatment at 160 ° C. for 1 hour, an energy amount of 1, The photosensitive layer was cured by irradiating with 000 mJ / cm 2 to increase the film strength.
A composite sample was obtained by cutting the polyimide base material on which the cured photosensitive layer obtained above was formed into a size of 20 cm × 5 cm. The obtained composite sample was wound around a cylindrical rod having a diameter of 1 cm × 20 cm, and the position of 12.5 cm from the end of the composite sample was fixed with heat-resistant tape, and then the rod was removed to obtain a length of 20 cm and a diameter of 1 cm. A flame retardant test sample was obtained.
The obtained flame retardant test sample was hung with a clamp, and a flame test was conducted by indirect flame with a 3 cm flame for 3 seconds.
〔Evaluation criteria〕
○: Meets UL94 VTM-0 ×: Meets UL94 VTM-0
<耐折性>
 ポリイミド基材(ポリイミド厚み25μm)に銅箔(銅箔厚み18μm)を積層したフレキシブルプリント配線板用基板(新日鉄化学社製、商品名「エスパネックス」Mシリーズ)にドライフィルムレジストをラミネートし、18mJ/cmで露光した後、0.15MPa/40sの条件で現像することにより、L/S=100/100μmのラインパターンを作製した。前記ドライフィルムレジストのラインパターンを施したフレキシブルプリント配線板用基板をエッチング処理した後、3質量%水酸化ナトリウム水溶液/0.1MPa/120sでドライフィルムレジストを剥離することで、L/S=100/100μmの銅箔ラインパターンを作成した。
 そこで得られた銅箔ラインパターン付きポリイミドに、作製した感光性フィルムの感光層を銅箔ラインパターン側にラミネートし、室温にて10分静置した後、超高圧水銀灯により、エネルギー量150mJ/cmを照射し露光し、前記感光層を硬化させ、160℃で1時間、加熱処理を施した後、エネルギー量1,000mJ/cmを照射し露光することで、感光層を硬化し、膜強度を高めることにより評価用積層体を得た。
 得られた評価用積層体を5mm×10cm角に裁断し、ラインパターン側を外側にして長辺方向180°折り曲げ、折り曲げた部分に所定のおもりを3秒間載せ、下記基準で耐折性を評価した。
〔評価基準〕
  ◎:400gでクラックがないもの
  ○:200gでクラックがないもの
  △:200gでクラック長さが折り曲げ辺の長さの10%以下であるもの
  ×:200gでクラック長さが折り曲げ辺の長さの10%を超えるもの
<Folding resistance>
A dry film resist is laminated on a substrate for flexible printed wiring boards (trade name “Espanex” M series, manufactured by Nippon Steel Chemical Co., Ltd.), which is made by laminating a copper foil (copper foil thickness 18 μm) on a polyimide base material (polyimide thickness 25 μm), and 18 mJ After exposure at / cm 2 , development was performed under the condition of 0.15 MPa / 40 s to produce a line pattern of L / S = 100/100 μm. After etching the flexible printed wiring board substrate having the dry film resist line pattern, the dry film resist is peeled off by 3% by mass sodium hydroxide aqueous solution / 0.1 MPa / 120 s, so that L / S = 100 A copper foil line pattern of / 100 μm was created.
Then, the obtained photosensitive film photosensitive layer was laminated on the copper foil line pattern side to the obtained copper foil line pattern polyimide, and allowed to stand at room temperature for 10 minutes, and then with an ultra-high pressure mercury lamp, the energy amount was 150 mJ / cm. 2 is exposed to light, the photosensitive layer is cured, and after heat treatment at 160 ° C. for 1 hour, the photosensitive layer is cured by irradiating with an energy amount of 1,000 mJ / cm 2 to expose the film. A laminate for evaluation was obtained by increasing the strength.
The obtained laminate for evaluation was cut into a 5 mm × 10 cm square, bent 180 ° in the long side direction with the line pattern side outside, and a predetermined weight was placed on the bent portion for 3 seconds, and the folding resistance was evaluated according to the following criteria. did.
〔Evaluation criteria〕
◎: No crack at 400 g ○: No crack at 200 g Δ: No crack at 10 g less than 10% of the length of the bent side ×: 200 g of crack length is the length of the bent side More than 10%
<ブリードアウト>
 永久パターンが形成された試験板を40℃で一週間放置したものの表面層(永久パターン)を顕微鏡(倍率:200倍)で観察し、下記評価基準で評価した。
〔評価基準〕
  ○:表面が白化しておらず、タック性がみられず、かつ結晶物の析出や液状物質の染み出しが観察されない。
  ×:表面の白化、タック性、結晶物の析出、及び液状物質の染み出しのいずれかが観察される。
<Bleed out>
The surface layer (permanent pattern) of the test plate on which the permanent pattern was formed was left at 40 ° C. for one week, was observed with a microscope (magnification: 200 times), and evaluated according to the following evaluation criteria.
〔Evaluation criteria〕
◯: The surface is not whitened, tackiness is not observed, and no crystallized precipitates or liquid material exudation are observed.
X: Any of whitening of the surface, tackiness, precipitation of crystalline substances, and exudation of a liquid substance is observed.
<解像性>
 前記感光性積層体を室温(23℃)で55%RHにて10分間静置した。得られた感光性積層体のポリエチレンテレフタレートフィルム(支持体)上から、丸穴パターンを用い、丸穴の直径の幅50μm~200μmの丸穴が形成できるよう、パターン形成装置を用いて最適光エネルギー量で露光を行った。
 室温にて10分間静置した後、前記感光性積層体からポリエチレンテレフタレートフィルム(支持体)を剥がし取った。
 銅張積層板上の感光層の全面に、現像液として30℃の1質量%炭酸ナトリウム水溶液をスプレー圧0.15MPaにて前記最短現像時間の2倍の時間スプレーし、未硬化領域を溶解除去した。
 このようにして得られた硬化樹脂パターン付き銅張積層板の表面を光学顕微鏡で観察し、パターン部の捲くれ乃至剥がれなどの異常が無く、かつスペース形成可能な最小の丸穴パターン幅を測定し、これを解像度とし、下記基準で評価した。
〔評価基準〕
  ○:直径100μm以下の丸穴が解像可能で、解像性が良好である
  ×:直径100μm以下の丸穴が解像不可で、解像性が劣る
 なお、最短現像時間は、以下の方法により求めた。
 前記積層体の感光層からポリエチレンテレフタレートフィルム(支持体)を剥がし取り、銅張積層板上の前記感光層の全面に30℃の1質量%炭酸ナトリウム水溶液を0.15MPaの圧力にてスプレーし、炭酸ナトリウム水溶液のスプレー開始から銅張積層板上の感光層が溶解除去されるまでに要した時間を測定し、これを最短現像時間とした。
 また、最適光エネルギー量は、以下の方法により求めた。
 前記感光性積層体の感光層表面に、INPREX IP-3000(富士フイルム株式会社製、ピクセルピッチ=1.0μm)を用いて、L/S(ライン/スペース)=50μm/50μmのパターンデータを0.5mJ/cmから21/2倍間隔で500mJ/cmまでの光エネルギー量の異なる光を照射して露光し、L/S(ライン/スペース)=50μm/50μmのラインパターンを硬化させた。室温にて10分間静置した後、前記感光性積層体から前記支持体を剥がし取り、銅張積層板上の感光層の全面に、30℃の1質量%炭酸ナトリウム水溶液をスプレー圧0.15MPaにて最短現像時間の2倍~3倍の時間スプレー現像し、未硬化の領域を溶解除去した。このようにして得られたL=50μmのパターンの線幅を、レーザ顕微鏡(VK-9500、キーエンス社製、対物レンズ50倍)を用いて測定し、線幅が50μmとなる光エネルギー量を求め、それを最適光エネルギー量とした。
<Resolution>
The photosensitive laminate was allowed to stand at 55% RH for 10 minutes at room temperature (23 ° C.). Use the pattern forming device to obtain the optimal light energy so that round holes with a diameter of 50 to 200 μm can be formed on the polyethylene terephthalate film (support) of the resulting photosensitive laminate using a round hole pattern. Exposure was carried out in a quantity.
After standing at room temperature for 10 minutes, the polyethylene terephthalate film (support) was peeled off from the photosensitive laminate.
The entire surface of the photosensitive layer on the copper clad laminate is sprayed with a 1% by weight sodium carbonate aqueous solution at 30 ° C. as a developer at a spray pressure of 0.15 MPa for twice the shortest development time to dissolve and remove uncured areas. did.
The surface of the copper-clad laminate with a cured resin pattern obtained in this way is observed with an optical microscope, and the minimum round hole pattern width that can form a space without any abnormalities such as curling or peeling of the pattern portion is measured. This was taken as the resolution and evaluated according to the following criteria.
〔Evaluation criteria〕
○: A round hole with a diameter of 100 μm or less can be resolved, and the resolution is good. ×: A round hole with a diameter of 100 μm or less cannot be resolved, and the resolution is inferior. Determined by
The polyethylene terephthalate film (support) is peeled off from the photosensitive layer of the laminate, and a 1 mass% sodium carbonate aqueous solution at 30 ° C is sprayed at a pressure of 0.15 MPa over the entire surface of the photosensitive layer on the copper clad laminate. The time required from the start of spraying of the aqueous sodium carbonate solution until the photosensitive layer on the copper clad laminate was dissolved and removed was measured, and this was taken as the shortest development time.
The optimum amount of light energy was determined by the following method.
On the surface of the photosensitive layer of the photosensitive laminate, pattern data of L / S (line / space) = 50 μm / 50 μm is set to 0 using INPREX IP-3000 (manufactured by FUJIFILM Corporation, pixel pitch = 1.0 μm). exposed by irradiating light of different light energy from .5MJ / cm 2 to 500 mJ / cm 2 at 2 1/2 times the interval, curing the L / S (line / space) = 50 [mu] m / 50 [mu] m line pattern It was. After standing at room temperature for 10 minutes, the support was peeled off from the photosensitive laminate, and a 1 mass% sodium carbonate aqueous solution at 30 ° C. was sprayed on the entire surface of the photosensitive layer on the copper-clad laminate with a spray pressure of 0.15 MPa. Spray development was performed for 2 to 3 times the shortest development time, and the uncured area was dissolved and removed. The line width of the L = 50 μm pattern obtained in this way was measured using a laser microscope (VK-9500, manufactured by Keyence Corporation, objective lens 50 times), and the amount of light energy at which the line width was 50 μm was determined. This is the optimum amount of light energy.
<めっき耐性の評価>
 ポリイミド基材(ポリイミド厚み25μm)に銅箔(銅箔厚み18μm)を積層したフレキシブルプリント配線板用基板(新日鉄化学社製、商品名「エスパネックス」Mシリーズ)の表面に酸洗浄処理を施したものを使用したこと以外は、前記感光性積層体と同様にして作製された感光性積層体の感光層表面に、INPREX IP-3000(富士フイルム社製、ピクセルピッチ=1.0μm)を用いて、最適光エネルギー量にて30μm~1,000μmまでの独立細線パターンを形成し、室温にて10分間静置した後、前記感光性積層体から支持体を剥がし取り、銅張積層板(フレキシブルプリント配線用基板)上の感光層の全面に、30℃の1質量%炭酸ナトリウム水溶液をスプレー圧0.15MPaにて前記最短現像時間の2倍~3倍の時間(または40秒間~60秒間)スプレー現像し、未硬化の領域を溶解除去した。その後、160℃で1時間加熱処理(ポストベーク)をした後、さらに超高圧水銀灯により1,000mJ/cmで全面露光を行い、ソルダーレジストパターン(永久パターン)を形成した。
 前記硬化樹脂パターン(永久パターン)を、50℃の酸性脱脂液(スルカップACL-007、上村工業株式会社製)に5分間浸漬した後、水洗した。次いで、22℃のソフトエッチ液(ペルオキソ二硫酸ナトリウム125g/L、硫酸18g/L)に90秒間、22℃の10%硫酸水溶液中に120秒間、22℃のアクチベーター液(KAT-450,上村工業株式会社製)に120秒間、22℃の10%硫酸水溶液中に60秒間浸漬させた。なお、ここまでの各工程間で水洗を行なった。この後、85℃で35分間、無電解Niめっき(ニムデンNDF-2、上村工業株式会社製)を行い、水洗後、次いで、75℃の金めっき液(奥野製薬工業社製、OPCムデンゴール、pH12~13、厚付け金めっき0.3μm)に4分間浸漬し、無電解金めっきを行った後、流水中に3分間浸漬して水洗した後、更に、60℃の温水で3分間浸漬して十分に水洗後、乾燥し、無電解金めっきした試験基板を得た。
 めっき試験後の硬化樹脂パターン(永久パターン)に対して、JIS K5600-5-6を参考にしてピール試験を行い、以下の基準で評価した。
  ○:ピール試験後も全く異常が無いもの
  ×:ピール試験時に剥がれが観られたもの
<Evaluation of plating resistance>
The surface of a substrate for flexible printed wiring boards (manufactured by Nippon Steel Chemical Co., Ltd., trade name “ESPANEX” M series) in which a copper foil (copper foil thickness 18 μm) is laminated on a polyimide base material (polyimide thickness 25 μm) was subjected to an acid cleaning treatment. Except for using one, INPREX IP-3000 (manufactured by FUJIFILM Corporation, pixel pitch = 1.0 μm) was used on the surface of the photosensitive layer of the photosensitive laminate produced in the same manner as the photosensitive laminate. After forming an independent fine line pattern of 30 μm to 1,000 μm with an optimal amount of light energy and allowing to stand at room temperature for 10 minutes, the support was peeled off from the photosensitive laminate, and a copper-clad laminate (flexible print) 2% to 3 times the shortest development time with a 1 mass% sodium carbonate aqueous solution at 30 ° C. at a spray pressure of 0.15 MPa on the entire surface of the photosensitive layer on the wiring substrate). Time (or 40 seconds to 60 seconds) and spray development, to dissolve away the uncured regions. Then, after heat-processing (post-baking) at 160 degreeC for 1 hour, the whole surface exposure was further performed with the ultrahigh pressure mercury lamp at 1,000 mJ / cm < 2 >, and the soldering resist pattern (permanent pattern) was formed.
The cured resin pattern (permanent pattern) was immersed in an acidic degreasing solution (Sulcup ACL-007, manufactured by Uemura Kogyo Co., Ltd.) at 50 ° C. for 5 minutes and then washed with water. Next, an activator solution (KAT-450, Uemura at 22 ° C. for 90 seconds in a soft etch solution at 22 ° C. (sodium peroxodisulfate 125 g / L, sulfuric acid 18 g / L), 120 seconds in a 10% sulfuric acid aqueous solution at 22 ° C. (Manufactured by Kogyo Co., Ltd.) for 120 sec. In addition, it washed with water between each process so far. Thereafter, electroless Ni plating (Nimden NDF-2, manufactured by Uemura Kogyo Co., Ltd.) is performed at 85 ° C. for 35 minutes. ~ 13, thick gold plating (0.3 μm) for 4 minutes, after electroless gold plating, immersed in running water for 3 minutes and washed with water, then further immersed in warm water at 60 ° C for 3 minutes. After sufficiently washing with water, it was dried and an electroless gold-plated test substrate was obtained.
The cured resin pattern (permanent pattern) after the plating test was subjected to a peel test with reference to JIS K5600-5-6, and evaluated according to the following criteria.
○: No abnormality after peel test ×: Peeling observed during peel test
(実施例2~3、比較例1~5)
 実施例1において、難燃剤分散液を表3に記載の難燃剤分散液に代えた以外は、実施例1と同様にして、感光性組成物、感光性フィルムなどを得た。
 実施例1と同様の評価を行った。結果を表3に示す。
(Examples 2 to 3, Comparative Examples 1 to 5)
In Example 1, the photosensitive composition, the photosensitive film, etc. were obtained like Example 1 except having replaced the flame retardant dispersion liquid with the flame retardant dispersion liquid of Table 3.
Evaluation similar to Example 1 was performed. The results are shown in Table 3.
Figure JPOXMLDOC01-appb-T000018
Figure JPOXMLDOC01-appb-T000018
(実施例4~6、比較例6~9)
 実施例1において、難燃剤分散液及び樹脂を表4に記載の難燃剤分散液及び樹脂に代えた以外は、実施例1と同様にして、感光性組成物、感光性フィルムなどを得た。
 実施例1と同様の評価を行った。結果を表4に示す。
(Examples 4 to 6, Comparative Examples 6 to 9)
In Example 1, the photosensitive composition, the photosensitive film, etc. were obtained like Example 1 except having replaced the flame retardant dispersion liquid and resin with the flame retardant dispersion liquid and resin of Table 4.
Evaluation similar to Example 1 was performed. The results are shown in Table 4.
Figure JPOXMLDOC01-appb-T000019
Figure JPOXMLDOC01-appb-T000019
 実施例1~6の感光性組成物は、難燃性、耐折性、及びめっき耐性に優れ、更にブリードアウトがなく、解像性にも優れていた。また、実施例3~6の感光性組成物は、実施例1,2に比べ耐折性に優れていた。
 平均粒子径が1.0μmを超えるリン酸金属塩を難燃剤として用いた比較例1、2の感光性組成物は、耐折性が不十分であった。リン酸金属塩以外の難燃剤を用いた比較例3~5の感光性組成物は、めっき耐性が不十分であった。酸変性エチレン性不飽和基含有ポリウレタン樹脂とは異なる樹脂を用いた比較例6~9の感光性組成物は、耐折性が不十分であった。
The photosensitive compositions of Examples 1 to 6 were excellent in flame retardancy, folding resistance, and plating resistance, further free from bleed out, and excellent in resolution. Further, the photosensitive compositions of Examples 3 to 6 were excellent in folding resistance as compared with Examples 1 and 2.
The photosensitive compositions of Comparative Examples 1 and 2 using a metal phosphate having an average particle diameter exceeding 1.0 μm as a flame retardant had insufficient folding resistance. The photosensitive compositions of Comparative Examples 3 to 5 using a flame retardant other than the metal phosphate had insufficient plating resistance. The photosensitive compositions of Comparative Examples 6 to 9 using a resin different from the acid-modified ethylenically unsaturated group-containing polyurethane resin had insufficient folding resistance.
 本発明の感光性組成物は、難燃性、耐折性、及びめっき耐性の全てが優れるため、フレキシブルプリント基板などに好適に用いることができる。 Since the photosensitive composition of the present invention is excellent in all of flame retardancy, folding resistance and plating resistance, it can be suitably used for flexible printed boards and the like.
 本発明をその実施態様とともに説明したが、我々は特に指定しない限り我々の発明を説明のどの細部においても限定しようとするものではなく、添付の請求の範囲に示した発明の精神と範囲に反することなく幅広く解釈されるべきであると考える。 While this invention has been described in conjunction with its embodiments, we do not intend to limit our invention in any detail of the description unless otherwise specified and are contrary to the spirit and scope of the invention as set forth in the appended claims. I think it should be interpreted widely.
 本願は、2011年3月25日に日本国で特許出願された特願2011-068626に基づく優先権を主張するものであり、これらはここに参照してその内容を本明細書の記載の一部として取り込む。 This application claims priority based on Japanese Patent Application No. 2011-068626 filed in Japan on March 25, 2011, which is hereby incorporated herein by reference. Capture as part.

Claims (12)

  1.  酸変性エチレン性不飽和基含有ポリウレタン樹脂と、下記一般式(1)で表されるリン酸金属塩と、重合性化合物と、光重合開始剤とを含有し、
     該酸変性エチレン性不飽和基含有ポリウレタン樹脂が、下記一般式(G)で表される構造単位を有し、
     該一般式(1)で表されるリン酸金属塩の平均粒子径が、1.0μm以下であることを特徴とする感光性組成物。
    Figure JPOXMLDOC01-appb-C000001
     一般式(1)中、A及びBは、それぞれ独立に、直鎖状の炭素数1~6のアルキル基、分岐状の炭素数1~6のアルキル基、及びアリール基のいずれかを表す。Mは、Mg、Ca、Al、Sb、Sn、Ge、Ti、Zn、Fe、Zr、Ce、Bi、Sr、Mn、Li、Na、及びKのいずれかを表す。mは、1~4の整数を表す。
    Figure JPOXMLDOC01-appb-C000002
     一般式(G)中、R~Rは、それぞれ独立に、水素原子、及び1価の有機基のいずれかを表す。Aは、2価の有機基を表す。Xは、酸素原子、硫黄原子、及び-N(R)-のいずれかを表す。前記Rは、水素原子、及び1価の有機基のいずれかを表す。
    An acid-modified ethylenically unsaturated group-containing polyurethane resin, a phosphoric acid metal salt represented by the following general formula (1), a polymerizable compound, and a photopolymerization initiator,
    The acid-modified ethylenically unsaturated group-containing polyurethane resin has a structural unit represented by the following general formula (G),
    The photosensitive composition characterized by the average particle diameter of the metal phosphate represented by the general formula (1) being 1.0 μm or less.
    Figure JPOXMLDOC01-appb-C000001
    In general formula (1), A P and B P are each independently any one of a linear alkyl group having 1 to 6 carbon atoms, a branched alkyl group having 1 to 6 carbon atoms, and an aryl group. To express. M represents any of Mg, Ca, Al, Sb, Sn, Ge, Ti, Zn, Fe, Zr, Ce, Bi, Sr, Mn, Li, Na, and K. m represents an integer of 1 to 4.
    Figure JPOXMLDOC01-appb-C000002
    In general formula (G), R 1 to R 3 each independently represents a hydrogen atom or a monovalent organic group. A represents a divalent organic group. X represents one of an oxygen atom, a sulfur atom, and —N (R 4 ) —. R 4 represents a hydrogen atom or a monovalent organic group.
  2.  前記酸変性エチレン性不飽和基含有ポリウレタン樹脂が、ポリマージオール残基を繰り返し単位として含む請求項1に記載の感光性組成物。 The photosensitive composition according to claim 1, wherein the acid-modified ethylenically unsaturated group-containing polyurethane resin contains a polymer diol residue as a repeating unit.
  3.  前記ポリマージオール残基の質量平均分子量が400~8,000である請求項2に記載の感光性組成物。 The photosensitive composition according to claim 2, wherein the polymer diol residue has a mass average molecular weight of 400 to 8,000.
  4.  前記酸変性エチレン性不飽和基含有ポリウレタン樹脂中における前記ポリマージオール残基の質量比率が10~60%である請求項2または3に記載の感光性組成物。 4. The photosensitive composition according to claim 2, wherein a mass ratio of the polymer diol residue in the acid-modified ethylenically unsaturated group-containing polyurethane resin is 10 to 60%.
  5.  前記酸変性エチレン性不飽和基含有ポリウレタン樹脂が、芳香族基を有する請求項1~4のいずれか1項に記載の感光性組成物。 The photosensitive composition according to any one of claims 1 to 4, wherein the acid-modified ethylenically unsaturated group-containing polyurethane resin has an aromatic group.
  6.  前記酸変性エチレン性不飽和基含有ポリウレタン樹脂が、ビスフェノールA型、ビスフェノールF型、ビフェニル型、ナフタレン型、フェナントレン型、及びアントラセン型から選択される少なくともいずれかの骨格を有する請求項1~5のいずれか1項に記載の感光性組成物。 The acid-modified ethylenically unsaturated group-containing polyurethane resin has at least one skeleton selected from bisphenol A type, bisphenol F type, biphenyl type, naphthalene type, phenanthrene type, and anthracene type. The photosensitive composition of any one of Claims 1.
  7.  前記一般式(1)で表されるリン酸金属塩の最大粒子径(d100)が、5μm以下である請求項1~6のいずれか1項に記載の感光性組成物。 The photosensitive composition according to any one of claims 1 to 6, wherein the maximum particle diameter (d100) of the metal phosphate represented by the general formula (1) is 5 µm or less.
  8.  更に、熱架橋剤を含有する請求項1~7のいずれか1項に記載の感光性組成物。 The photosensitive composition according to any one of claims 1 to 7, further comprising a thermal crosslinking agent.
  9.  請求項1~8のいずれか1項に記載の感光性組成物を含む感光層を支持体上に有してなることを特徴とする感光性フィルム。 A photosensitive film comprising a photosensitive layer containing the photosensitive composition according to any one of claims 1 to 8 on a support.
  10.  基体上に、請求項1~8のいずれか1項に記載の感光性組成物を含む感光層を有することを特徴とする感光性積層体。 A photosensitive laminate comprising a photosensitive layer containing the photosensitive composition according to any one of claims 1 to 8 on a substrate.
  11.  請求項1~8のいずれか1項に記載の感光性組成物により形成された感光層に対して露光を行うことを少なくとも含むことを特徴とする永久パターン形成方法。 A method for forming a permanent pattern comprising at least exposing a photosensitive layer formed of the photosensitive composition according to any one of claims 1 to 8.
  12.  請求項11に記載の永久パターン形成方法により永久パターンが形成されることを特徴とするプリント基板。 A printed circuit board, wherein a permanent pattern is formed by the method for forming a permanent pattern according to claim 11.
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