WO2012126376A1 - 液压往复随动控制装置 - Google Patents

液压往复随动控制装置 Download PDF

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Publication number
WO2012126376A1
WO2012126376A1 PCT/CN2012/072767 CN2012072767W WO2012126376A1 WO 2012126376 A1 WO2012126376 A1 WO 2012126376A1 CN 2012072767 W CN2012072767 W CN 2012072767W WO 2012126376 A1 WO2012126376 A1 WO 2012126376A1
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Prior art keywords
hydraulic
reciprocating
valve
servo
mechanical
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PCT/CN2012/072767
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English (en)
French (fr)
Inventor
张宏军
郑金传
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宁夏银川大河数控机床有限公司
北京机械工业自动化研究所
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Application filed by 宁夏银川大河数控机床有限公司, 北京机械工业自动化研究所 filed Critical 宁夏银川大河数控机床有限公司
Publication of WO2012126376A1 publication Critical patent/WO2012126376A1/zh

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B9/00Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member
    • F15B9/02Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type
    • F15B9/08Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type controlled by valves affecting the fluid feed or the fluid outlet of the servomotor
    • F15B9/10Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type controlled by valves affecting the fluid feed or the fluid outlet of the servomotor in which the controlling element and the servomotor each controls a separate member, these members influencing different fluid passages or the same passage

Definitions

  • the present invention relates to a hydraulic control device, and more particularly to a hydraulic reciprocating follow-up control device for controlling a reciprocating motion of a hydraulic cylinder.
  • the hydraulic reversing system consisting of hydraulic reversing valve and hydraulic cylinder is one of the more common devices for reciprocating motion.
  • the device has the characteristics of simple structure and convenient control.
  • the requirements for hydraulic reversing systems are getting higher and higher.
  • the technology of reciprocating digital control of honing machine spindles is the core manufacturing technology of honing machine tools, which determines the honing machine tool. Grade and level of honing process.
  • the reciprocating motion of the spindle of the high-end honing machine has been numerically controlled.
  • One is the electro-hydraulic composed of the electro-hydraulic servo proportional valve and the spindle displacement sensor.
  • Position closed loop, through the electrical interface of the electro-hydraulic servo proportional valve controller, realizes the CNC of the spindle reversing drive;
  • it uses a special honing special rotary valve to convert the reciprocating linear motion of the honing machine tool into the rotation of the control part inside the valve.
  • the pilot control part of the valve rotates under the motor drive, and the rotation generated by the reciprocating linear motion of the main shaft constitutes a closed loop of the rotary machine liquid through a special mechanism, and then the electrical interface of the rotary valve controller realizes the numerical control of the spindle reversing drive.
  • the electro-hydraulic servo proportional valve and the spindle displacement sensor constitute an electro-hydraulic position closed-loop control drive system
  • the electro-hydraulic servo proportional valve is expensive and harsh in use conditions, and is specially used for special honing.
  • the reversing control drive system of the rotary valve needs to convert the linear motion of the main shaft into a rotary motion and a complex rotary machine liquid position closed-loop system, which greatly increases the production cost of the commutation control drive system, and also enables the system to be debugged and maintained. Very cumbersome.
  • the two reversing control drive systems for the reciprocating motion of the above-mentioned high-end honing machine are controlled by foreign grinding machine manufacturers.
  • the cost of importing the reversing control drive system is quite high, which has seriously restricted the development of China's high-end honing machine tools.
  • the object of the present invention is to overcome the above drawbacks of the prior art and provide a control device using a numerical control device.
  • the action of the mechanical hydraulic servo valve realizes the control of the speed, position and commutation of the hydraulic cylinder, that is, the closed position of the hydraulic position composed of the numerical control mechanical position closed loop and the linear mechanical hydraulic servo valve, which realizes the speed, position and commutation of the hydraulic cylinder.
  • a hydraulic reciprocating follow-up numerical control driving device comprising a hydraulic driving system and a control system, characterized in that the hydraulic driving system comprises a hydraulic cylinder and a mechanical hydraulic servo valve for controlling the reciprocating movement of the hydraulic cylinder, and the mechanical hydraulic servo valve
  • the valve body is fixedly connected to the piston rod in the hydraulic cylinder through a connecting mechanism, one end of the connecting member is connected with the valve core in the mechanical hydraulic servo valve, and the other end is connected with the reciprocating driving mechanism, and the reciprocating driving mechanism is controlled by the digital control system.
  • the connecting mechanism of the valve body in the mechanical hydraulic servo valve and the piston rod in the hydraulic cylinder is composed of a moving member fixedly mounted on the piston rod, and the moving member is fixedly connected with the valve body in the mechanical hydraulic servo valve.
  • the reciprocating drive mechanism is a servo motor, an active toothed pulley mounted at the output end of the servo motor, a passive toothed pulley corresponding to the active toothed pulley, and a movable toothed pulley and a passive toothed pulley.
  • the toothed belt is composed of one end of the connecting piece connected to the valve core in the mechanical hydraulic servo valve, and the other end is fixed on the toothed belt, and the servo motor is controlled by the control system.
  • the reciprocating drive mechanism is composed of a servo motor, a driving sprocket mounted at the output end of the servo motor, a passive sprocket corresponding to the driving sprocket, and a chain installed between the driving sprocket and the passive sprocket, and one end of the connecting member is The valve core of the mechanical hydraulic servo valve is connected, the other end is fixed on the chain, and the servo motor is controlled by the control system.
  • the reciprocating drive mechanism is composed of a servo motor, a lead screw installed at the output end of the servo motor, and a nut matched with the screw.
  • One end of the connecting member is connected to the valve core in the mechanical hydraulic servo valve, and the other end is connected to the nut, and the servo motor passes The control system controls.
  • the reciprocating drive mechanism is composed of a linear motor, one end of the connecting member is connected to the spool in the mechanical hydraulic servo valve, and the other end is connected to the linear moving member in the linear motor, and the linear motor is controlled by the control system.
  • the invention has the following features: 1.
  • the invention controls the action of the mechanical hydraulic servo valve by using the numerical control device, realizes the controllable speed, position and commutation of the hydraulic cylinder, that is, the hydraulic position composed of the numerical control mechanical position closed loop and the linear mechanical hydraulic servo valve. Closed loop, the speed, position and commutation of the hydraulic cylinder can be controlled.
  • the numerical control device widely used in the machine tool for detecting and setting linear displacement is used as the pilot control unit, and the mechanical hydraulic servo valve with linear mechanical characteristics is used as the follow-up unit to form a brand new The hydraulic system reciprocating CNC reversing drive.
  • the mechanical hydraulic servo valve with linear mechanical characteristics is controlled as the hydraulic position closed-loop system of the follower unit, and the hydraulic system reciprocating CNC is realized.
  • the invention does not need an expensive and relatively demanding electro-hydraulic servo proportional valve, and splits the current electro-hydraulic position closed-loop into a numerical control mechanical position closed loop and a linear hydraulic servo.
  • the closed position of the hydraulic position of the valve is to split the closed loop of a complicated position into two relatively simple position closed loops, which makes the debugging of the system simple, improves the reliability of the system work, reduces the technical requirements for the users and the system.
  • the cost of the composition is to split the closed loop of a complicated position into two relatively simple position closed loops, which makes the debugging of the system simple, improves the reliability of the system work, reduces the technical requirements for the users and the system. The cost of the composition.
  • the linear motion of the honing spindle directly forms a closed loop with the linear position of the spool, because the linear mechanical hydraulic servo valve is used instead of the honing special rotary valve.
  • the linear mechanical hydraulic servo valve is used instead of the honing special rotary valve.
  • the working principle, driving and feedback mode, mechanical structure, etc. are completely different, and the mechanical hydraulic servo valve has a simple structure and is reduced. It constitutes the cost of the system and improves the convenience of system maintenance.
  • a mechanical hydraulic servo valve with good linear performance is used as a mechanical force amplifying mechanism, which can drive a large load, and the application range is not limited to the spindle reciprocating drive control of the honing machine tool, and is also applicable to other numerical control and hydraulic pressures. Drive a variety of occasions.
  • the mechanical hydraulic servo valve can be used as a double slide valve or a four-sided slide valve.
  • the digitally controlled reversing drive device of the present invention has the same position control precision and commutation response speed, and the price is only 1/3-1/ of the imported electro-hydraulic servo proportional valve and the special reversing rotary valve. 5.
  • the high-grade hydraulic reversing CNC drive device with high technical requirements such as position control accuracy and reversing response speed, it provides a hydraulic reciprocating motion with simple structure, reliable control, low price, easy adjustment, operation and maintenance. Dynamic CNC drive.
  • Embodiment 1 is a schematic structural view of Embodiment 1 of the present invention.
  • Figure 2 is a schematic structural view of Embodiment 2 of the present invention.
  • Figure 3 is a schematic structural view of Embodiment 3 of the present invention.
  • Figure 4 is a schematic view showing the structure of Embodiment 4 of the present invention.
  • Example 1 As shown in Fig. 1, 1 is a digital controller, 2 is a servo drive, 8 is a servo motor, and the digital controller, servo drive and servo motor are connected by a cable, and are set by a digital controller according to the displacement of the hydraulic cylinder 10
  • the pressure of the hydraulic system is supplied by the hydraulic pump 9.
  • the servo drive issues a command to rotate the servo motor clockwise, through the active toothed pulley 7 mounted on the output shaft of the servo motor, and the passive toothed pulley matched with the active toothed pulley.
  • a reciprocating drive mechanism composed of a toothed belt 4 mounted between the active toothed pulley and the passive toothed pulley, and a connecting member 5 fixed on the toothed belt, converting the rotary motion of the servo motor into the connecting member 5
  • the linear motion causes the spool 14 in the mechanical hydraulic servo valve connected to the connecting member to move downward, and the downward passage of the hydraulic cylinder is turned on to move the piston rod 11 in the hydraulic cylinder downward. While the piston rod 11 is moving downward, the valve body 12 in the mechanical hydraulic servo valve is driven to move downward by connecting the piston rod and the connecting mechanism 13 of the valve body 12 in the mechanical hydraulic servo valve, and the valve body is driven to follow the spool direction. Move down.
  • the digital controller When moving to the set position, the digital controller issues a command to rotate the servo motor counterclockwise by the servo driver, causing the spool 14 in the mechanical hydraulic servo valve to move upward, and the upward passage of the hydraulic cylinder is turned on, so that the piston rod is reversed.
  • the valve body Moving upwards, the valve body follows the valve core to move upwards, thereby forming a hydraulic reciprocating follower system composed of a servo motor, a valve core, a piston rod and a valve body.
  • the reciprocating drive mechanism composed of the toothed belt mounted on the output shaft of the servo motor is changed into a reciprocating drive mechanism of a chain, that is, a drive chain is mounted on the output shaft of the servo motor.
  • the other parts are the same as in the first embodiment.
  • the reciprocating drive mechanism composed of the toothed belt mounted on the output shaft of the servo motor is changed into a reciprocating drive mechanism composed of a screw and a nut, that is, mounted on the output shaft of the servo motor.
  • the lead screw 18 and the lead screw nut 19 are fixedly connected to the connecting member 5, one end of the connecting member 5 is connected to the valve core in the mechanical hydraulic servo valve, and the other end is connected to the nut, and the other portions are the same as in the first embodiment.
  • Embodiment 1 On the basis of Embodiment 1, it will be mounted on the output shaft of the servo motor.
  • the reciprocating drive mechanism with the composition becomes the linear motor 20, one end of the connecting member 5 is connected to the spool in the mechanical hydraulic servo valve, and the other end is connected to the linear moving member 21 in the linear motor, and the linear motor passes through the digital controller 1 and the servo The drive 2 controls.
  • the mechanical hydraulic servo valve described above is the machine fluid servo in the prior art.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Transmission Devices (AREA)

Description

说 明 书 液压往复随动控制装置
所属技术领域
本发明涉及一种液压控制装置, 特别是控制液压缸往复运动过程中的 液压往复随动控制装置。
背景技术
通过液压换向阀和液压缸组成的液压换向系统, 是实现往复运动较为 经典的常用装置之一, 该装置具有结构简单、 控制方便等特点。 但随着技 术的发展, 对液压换向系统的要求越来越高, 特别是对于珩磨机行业来说, 珩磨机床主轴往复数字控制的技术是珩磨机床的核心制造技术, 它决定了 珩磨机床的档次以及珩磨工艺水平的高低。
目前, 高档的珩磨机床的主轴往复运动已经实现数控, 其主轴往复运 动液压缸的换向控制驱动系统的控制方法有两种, 其一是采用电液伺服比 例阀和主轴位移传感器组成的电液位置闭环, 通过电液伺服比例阀控制器 的电器接口, 实现主轴换向驱动的数控; 其二是采用特殊的珩磨专用转阀, 将珩磨机床的主轴往复直线运动转换成阀内控制部件的旋转运动, 阀的先 导控制部分在电机驱动下转动, 与主轴往复直线运动产生的转动通过特殊 的机构构成旋转机液位置闭环, 再由转阀控制器的电器接口, 实现主轴换 向驱动的数控。
上述两种主轴换向控制驱动系统中, 电液伺服比例阀和主轴位移传感 器组成的电液位置闭环控制驱动系统, 其电液伺服比例阀昂贵且对使用条 件较苛刻, 而采用特殊的珩磨专用转阀的换向控制驱动系统, 其需要将主 轴的线性运动转变成旋转运动和复杂的旋转机液位置闭环系统, 使换向控 制驱动系统的生产成本大大提高, 同时也使得系统的调试、 维护非常繁琐。
上述高档珩磨机床的主轴往复运动的两种换向控制驱动系统均由国外 磨机床生产企业所控制, 进口该换向控制驱动系统的费用相当高, 已严重 制约了我国高档珩磨机床的发展。
发明内容
本发明的目的是克服上述现有技术的缺陷, 提供一种利用数控装置控 制机械液压伺服阀的动作, 实现液压缸的速度、 位置、 换向可控, 即采用 数控机械位置闭环和线性机械液压伺服阀组成的液压位置闭环, 实现液压 缸的速度、 位置、 换向可控的往复运动的液压往复随动数控驱动装置。
本发明的技术方案: 一种液压往复随动数控驱动装置, 包括液压驱动 系统和控制系统, 其特征在于液压驱动系统包括液压缸和控制液压缸往复 移动的机械液压伺服阀, 机械液压伺服阀中的阀体通过连接机构与液压缸 中的活塞杆固定相连, 连接件的一端与机械液压伺服阀中的阀芯相连, 另 一端与往复驱动机构相连, 往复驱动机构通过数字控制系统进行控制。
上述机械液压伺服阀中的阀体与液压缸中的活塞杆相连的连接机构是 由固定安装在活塞杆上的移动件组成, 移动件与机械液压伺服阀中的阀体 固定相连。
上述往复驱动机构是由伺服电机、 安装在伺服电机输出端的主动齿形 带轮、 与主动齿形带轮相对应的被动齿形带轮及安装在主动齿形带轮、 被 动齿形带轮之间的齿形皮带组成, 连接件的一端与机械液压伺服阀中的阀 芯相连, 另一端固定在齿形皮带上, 伺服电机通过控制系统进行控制。
上述往复驱动机构是由伺服电机、 安装在伺服电机输出端的主动链轮、 与主动链轮相对应的被动链轮及安装在主动链轮、 被动链轮之间的链条组 成, 连接件的一端与机械液压伺服阀中的阀芯相连, 另一端固定在链条上, 伺服电机通过控制系统进行控制。
上述往复驱动机构是由伺服电机、 安装在伺服电机输出端的丝杠和与 丝杠相配的螺母组成, 连接件的一端与机械液压伺服阀中的阀芯相连, 另 一端与螺母相连, 伺服电机通过控制系统进行控制。
上述往复驱动机构是由直线电机组成, 连接件的一端与机械液压伺服 阀中的阀芯相连, 另一端与直线电机中的直线移动件相连, 直线电机通过 控制系统进行控制。
本发明的特点是: 1、本发明利用数控装置控制机械液压伺服阀的动作, 实现液压缸的速度、 位置、 换向可控, 即采用数控机械位置闭环和线性机 械液压伺服阀组成的液压位置闭环, 实现液压缸的速度、位置、换向可控。
2、 采用机床中广泛使用的检测和设定直线位移的数控装置作为先导控 制单元, 将具有线性机械特性的机械液压伺服阀作为随动单元, 组成全新 的液压系统往复数控换向驱动装置。 通过伺服电机、 传动装置和液压缸组 成的直线位移检测和设定的数控机械位置闭环系统, 控制具有线性机械特 性的械液压伺服阀作为随动单元的液压位置闭环系统, 实现液压系统往复 数控换向功能。
与现有高档的往复运动数控装置相比, 本发明不需要昂贵且对使用条 件较苛刻的电液伺服比例阀, 且将目前一个电液位置闭环拆分成数控机械 位置闭环以及线性机液伺服阀组成的液压位置闭环, 即将一个复杂的位置 闭环拆分成两个相对简单的位置闭环, 使系统的调试变得简单, 提高了系 统工作的可靠性, 降低了对使用人员的技术要求以及系统的组成成本。
与采用特殊的珩磨专用转阀的数控方法相比, 由于才用较常用的线性 机械液压伺服阀代替了珩磨专用转阀, 珩磨主轴的线性运动直接与阀芯的 线性运动构成随动位置闭环, 不需要将主轴的线性运动转变成旋转运动, 更不需要复杂的旋转机液位置闭环, 其工作原理、 驱动和反馈方式、 机械 结构等完全不同, 并且由于机械液压伺服阀的结构简单, 降低了构成系统 的成本, 并提高了系统维护保养的方便性。
3、 本发明中采用线性性能好的机械液压伺服阀作为机械力的放大机 构, 可以驱动较大负载, 应用范围也不仅仅局限于珩磨机床的主轴往复驱 动控制, 还适用于其他需要数控和液压驱动的各种场合。 配用的机械液压 伺服阀可以是双边滑阀也可以是四边滑阀。
4、 本发明的数字控制换向驱动装置在同样的位置控制精度和换向响应 速度等技术条件下, 其价格只有进口的电液伺服比例阀和专用换向转阀的 1/3-1/5, 同时为位置控制精度和换向响应速度等技术条件要求高的高档 液压换向数控驱动装置, 提供了一种结构简单、 控制可靠、 价格低廉、 便 于调整、 操作和维护的液压往复运动随动数控驱动装置。
附图说明
附图 1为本发明实施例 1的结构示意图;
附图 2为本发明实施例 2的结构示意图;
附图 3为本发明实施例 3的结构示意图;
附图 4为本发明实施例 4的结构示意图。
具体实施方式
实施例 1: 如图 1所示, 1为数字控制器、 2为伺服驱动器、 8为伺服电机, 数字 控制器、伺服驱动器和伺服电机通过电缆相连,根据液压缸 10的位移需要, 通过数字控制器进行设定, 液压系统的压力是通过液压泵 9提供。 工作时, 根据所设定的程序, 伺服驱动器发出指令使伺服电机顺时针旋转, 通过安 装在伺服电机输出轴上的主动齿形带轮 7、与主动齿形带轮配套的被动齿形 带轮 3和安装在主动齿形带轮、 被动齿形带轮之间的齿形皮带 4组成的往 复驱动机构和固定在齿形带上的连接件 5,将伺服电机的旋转运动转变为连 接件 5的直线运动, 从而带动与连接件相连的机械液压伺服阀中的阀芯 14 向下移动, 接通液压缸的向下通路, 使液压缸中的活塞杆 11向下移动。 在 活塞杆 11向下移动的同时,通过连接活塞杆和机械液压伺服阀中的阀体 12 的连接机构 13, 带动机械液压伺服阀中的阀体 12向下移动, 带动阀体跟随 阀芯向下移动。 当移动到设定位置时, 数字控制器发出指令, 通过伺服驱 动器使伺服电机逆时针转动, 带动机械液压伺服阀中的阀芯 14向上移动, 接通液压缸的向上通路, 使活塞杆换向向上移动, 带动阀体跟随阀芯向上 移动, 从而构成了由伺服电机、 阀芯、 活塞杆、 阀体组成的液压往复随动 系统。
为保证连接件 5上下移动的稳定性, 连接件可以安装在线轨 6上。 实施例 2 :
如图 2所示, 在实施例 1 的基础上, 将安装在伺服电机输出轴上齿形 带组成的往复驱动机构变为链条成的往复驱动机构, 即在伺服电机输出轴 上安装有主动链轮 17、与主动链轮相对应的被动链轮 15及安装在主动链轮、 被动链轮之间的链条 16组成的往复驱动机构, 连接件 5的一端与机械液压 伺服阀中的阀芯 14相连,另一端固定在链条上。其他部分与实施例 1相同。
实施例 3 :
如图 3所示, 在实施例 1 的基础上, 将安装在伺服电机输出轴上齿形 带组成的往复驱动机构变为丝杠、 螺母组成的往复驱动机构, 即在伺服电 机输出轴上安装有丝杠 18, 丝杠螺母 19与连接件 5固定相连, 连接件 5的 一端与机械液压伺服阀中的阀芯相连, 另一端与螺母相连, 其他部分与实 施例 1相同。
实施例 4:
如图 4所示, 在实施例 1的基础上, 将安装在伺服电机输出轴上齿形 带组成的往复驱动机构变为直线电机 20,连接件 5的一端与机械液压伺服 阀中的阀芯相连,另一端与直线电机中的直线移动件 21相连,直线电机通 过数字控制器 1和伺服驱动器 2进行控制。
上述机械液压伺服阀就是现有技术中的机液伺服阔。

Claims

权 利 要 求 书
1. 一种液压往复随动控制装置, 包括液压驱动系统和控制系统, 其 特征在于液压驱动系统包括液压缸 (10) 和控制液压缸往复移动的机械液 压伺服阀, 机械液压伺服阀中的阀体 (12) 通过连接机构与液压缸中的活 塞杆(11)固定相连, 连接件(5)的一端与机械液压伺服阀中的阀芯(14) 相连, 另一端与往复驱动机构相连, 往复驱动机构通过数字控制系统进行 控制。
2. 根据权利要求 1 所述的液压往复随动控制装置, 其特征在于上述 机械液压伺服阀中的阀体 (12) 与液压缸中的活塞杆 (11) 相连的连接机 构是由安装在活塞杆上的移动件 (13) 组成, 移动件与机械液压伺服阀中 的阀体固定相连。
3. 根据权利要求 1或 2所述的液压往复随动控制装置, 其特征在于 上述往复驱动机构是由伺服电机 (8) 、 安装在伺服电机输出端的主动齿 形带轮 (7) 、 与主动齿形带轮相对应的被动齿形带轮 (3) 及安装在主动 齿形带轮、 被动齿形带轮之间的齿形皮带 (4) 组成, 连接件 (5) 的一端 与机械液压伺服阀中的阀芯 (14) 相连, 另一端固定在齿形皮带上, 伺服 电机 (8) 通过控制系统进行控制。
4. 根据权利要求 1或 2所述的液压往复随动数控驱动装置, 其特征 在于上述往复驱动机构是由伺服电机 (8) 、 安装在伺服电机输出端的主 动链轮 (18) 、 与主动链轮相对应的被动链轮 (16) 及安装在主动链轮、 被动链轮之间的链条 (17) 组成, 连接件 (5) 的一端与机械液压伺服阀 中的阀芯 (14) 相连, 另一端固定在链条上, 伺服电机 (8) 通过控制系 统进行控制。
5. 根据权利要求 1或 2所述的液压往复随动控制装置, 其特征在于 上述往复驱动机构是由伺服电机(8)、安装在伺服电机输出端的丝杠(19) 和与丝杠相配的螺母 (20) 组成, 连接件 (5) 的一端与机械液压伺服阀 中的阀芯 (14) 相连, 另一端与螺母相连, 伺服电机通过控制系统进行控 制。
6. 根据权利要求 1或 2所述的液压往复随动控制装置, 其特征在于 上述往复驱动机构是由直线电机 (21 ) 组成, 连接件 (5 ) 的一端与机械 液压伺服阀中的阀芯(14)相连, 另一端与直线电机中的直线移动件(22 ) 相连, 直线电机通过控制系统进行控制。
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