WO2012117887A1

WO2012117887A1 - Airtightness inspection apparatus

Info

Publication number: WO2012117887A1
Application number: PCT/JP2012/054076
Authority: WO
Inventors: 文男小川; 健太郎朝長; 雅俊山下
Original assignee: 株式会社ｏｎｅＡ
Priority date: 2011-03-01
Filing date: 2012-02-21
Publication date: 2012-09-07
Also published as: KR101765774B1; KR20140005970A; CN103392119A; CN103392119B; JP5050139B1; JPWO2012117887A1

Abstract

The present invention addresses the problem of providing an apparatus for inspecting airtightness of a subject to be inspected, said apparatus being capable of performing airtightness inspection in a short time. This airtightness inspection apparatus is characterized in being provided with a storing container (2) for storing a subject to be inspected (X), a suction means (3) that sucks a gas inside of the storing container (2), and a gas detection means (4) that is capable of detecting a gaseous subject to be detected, said subject having leaked from the subject to be inspected (X). The airtightness inspection apparatus is also characterized in that the suction means (3) performs suction through a suction port (22c), which is capable of guiding the gas at the periphery of the subject to be inspected (X) to the gas detection means (4) that is disposed in the storing container (2), and which is provided at a position inside of the storing container (2).

Description

Airtightness inspection device

The present invention relates to an airtightness inspection device having a sealed container, and more particularly to an airtightness inspection device for an inspection object such as a secondary battery.

Conventionally, in a manufacturing process of a lithium ion battery, an airtightness inspection for inspecting that the airtightness is sufficiently maintained has been performed. In general, a lithium ion battery includes a sealed container in which an electrolyte such as an organic electrolyte is sealed. If there are defects such as pinholes in this sealed container, the hermeticity of the sealed container is insufficient. And possibility that the electrolyte solution enclosed inside this sealed container will leak increases.

Therefore, an airtightness inspection as disclosed in Patent Document 1 is performed. An airtightness inspection apparatus for performing this airtightness inspection includes a sealed container that can accommodate a battery therein, and a vacuum exhaust pipe connected to the sealed container. The vacuum exhaust pipe includes a vacuum pump, a switching valve, and a hydrogen concentration sensor. And the vacuum pump, the vacuum pump, the switching valve, and the hydrogen concentration sensor are connected in series from the sealed container. And when the vacuum pump is operated, the inside of the sealed container is depressurized. At that time, the gas in the sealed container discharged from the vacuum pump is released into the atmosphere by the switching valve. When the inside of the sealed container reaches a predetermined condition, the switching valve is switched. And the gas discharged | emitted from a vacuum pump is sent to a hydrogen concentration sensor. The hydrogen concentration sensor measures the concentration of hydrogen contained in the gas. This airtightness inspection apparatus compares the measurement result with the hydrogen concentration in the atmosphere. The airtightness inspection apparatus determines whether or not airtightness is maintained.

Japanese Unexamined Patent Publication No. 2001-236986

Usually, lithium-ion batteries are produced in large quantities by the production line method. The airtightness inspection is required to be performed according to the production speed of the production line. This is not limited to lithium ion batteries. This is also a problem common to inspection objects that are other secondary batteries and primary batteries. However, in the above-described airtightness inspection, a (hydrogen concentration) sensor is provided on the outlet side of the vacuum pump. Therefore, this sensor cannot directly detect the hydrogen concentration contained in the gas. Therefore, in such an airtightness inspection, the airtightness of the inspection object cannot be inspected in a short time according to the production speed of the production line.

Therefore, in view of such circumstances, an object of the present invention is to provide an airtightness inspection apparatus capable of inspecting an airtightness in a short time.

An airtightness inspection apparatus according to the present invention includes a storage container for storing an inspection object, suction means for sucking a gas inside the storage container, and a gaseous detection object leaked from the inspection object. A gas detection means capable of detecting the gas tightness, wherein the gas detection means is installed inside the containment vessel, and the suction means detects the gas around the object to be detected. A suction port that can be guided to the means, wherein suction is performed from a suction port provided at a position in the storage container in order to suck the gas around the inspection object.

According to such a configuration, the gas detection means is installed inside the containment vessel for storing the inspection object. When a gaseous detection target is leaking from the inspection target, the gas inside the containment vessel is sucked from the suction port by the suction means, so that the detection target as well as the gas around the inspection target are It is guided to the gas detection means. In this way, the gas detection means can detect the detection object. Therefore, the airtightness inspection apparatus of the present invention can detect whether or not the detection object leaks from the inspection object inside the containment vessel. And an airtightness inspection apparatus can test | inspect the airtightness of a test target object in a short time.

According to the present invention, the storage container is a first storage unit that stores the inspection object, and a second storage unit that can circulate gas inside the first storage unit, wherein the suction port is the first storage unit. It is preferable to include a second storage portion provided so as to be in a position where the gas flowing from the first storage portion can be sucked to the outside.

According to this configuration, the inspection object is stored in the first storage unit. The gaseous detection object leaking from the inspection object is discharged into the first storage unit. A suction port is provided in the second storage unit. The gas inside the second storage portion is sucked into the suction port by sucking the suction means. Subsequently, the gas inside the first storage unit is sucked into the suction port. The detection object leaked from the inspection object is guided to the gas detection means together with the gas around the inspection object from the first storage part by sucking the gas inside the second storage part from the suction port by the suction means. Is done. In this way, the gas detection means can detect the detection object. Therefore, the airtightness inspection apparatus of the present invention can detect whether or not the detection object leaks from the inspection object inside the containment vessel. And an airtightness inspection apparatus can test | inspect the airtightness of a test target object in a short time.

According to the present invention, it is preferable that the suction means includes a communication port for sucking the gas inside the first storage part into the second storage part.

According to such a configuration, the communication port can be arranged at a position close to the first storage unit in which the inspection object is stored. This communication port can suck the gas around the inspection object at high speed.

According to the present invention, it is preferable that the suction means includes an adjustment means capable of adjusting a flow rate of gas for sucking the gas inside the storage container from the suction port.

According to such a configuration, the gas inside the containment vessel is guided to the gas detection means. The adjusting means can be adjusted so that the gas detecting means has a flow rate suitable for detecting the detection target.

According to the present invention, the gas detection unit is configured to detect the detection target, a guide path for guiding the gas inside the storage container to the detection section, and guide the gas to the detection section through the guide path. It is preferable to provide an exhaust hole provided at a position intersecting with the gas flow.

According to such a configuration, the gas inside the containment vessel is sucked by the suction means. And this gas is guided to a detection part via a guide way. When this gas is exhausted from the exhaust hole, the flow of this gas is bent by the detector and decelerated. This gas detection means has a structure capable of decelerating the flow rate of the sucked gas. For this reason, the gas detection means can improve the sensitivity which detects a detection target object.

An airtightness inspection apparatus according to the present invention includes a storage container for storing an inspection object, suction means for sucking a gas inside the storage container, and a gaseous detection object leaked from the inspection object. A gas detection means capable of detecting an object, wherein the gas detection means is installed inside the containment vessel, and the suction means removes gas around the inspection object. A suction port that can be guided to a gas detection means, and sucks from a suction port provided at a position in the storage container in order to suck the gas around the inspection object, and the storage container is the inspection object A first storage part for storing the gas and a second storage part capable of circulating the gas inside the first storage part, wherein the suction port can suck the gas flowing from the first storage part to the outside A second storage provided to be The suction means includes a communication port for sucking the gas inside the first storage unit into the second storage unit, and a lid that closes the communication port, and the lid includes the second storage unit. It is a flow hole which can pass the gas attracted | sucked to a part, Comprising: The opening area of this flow hole is smaller than the opening area of the said communicating port, It is characterized by the above-mentioned.

Also, the lid can limit the opening area of the communication port by the flow hole. Therefore, the flow hole can restrict the flow rate of the gas passing through the communication port.

As described above, the airtightness inspection apparatus according to the present invention has an excellent effect that the airtightness inspection can be performed in a short time.

FIG. 1 is an overall overview diagram of an airtightness testing apparatus according to the first embodiment. (A) shows a front view. (B) shows a side view. FIG. 2 is a storage container used in the airtightness inspection apparatus according to the embodiment. (A) shows a front view. (B) shows a top view. (C) shows a side view. FIG. 3 shows a cross-sectional view of the storage container used in the airtightness inspection apparatus according to the embodiment. FIG. 4 is a gas flow diagram showing a gas flow in the airtightness inspection apparatus according to the embodiment. FIG. 5 shows gas detection means used in the airtightness inspection apparatus according to the embodiment. (A) And (b) shows a longitudinal cross-sectional view. (C) shows a bottom view. FIG. 6 is a diagram related to a detection unit of a gas detection unit used in the airtightness inspection apparatus according to the embodiment. (A) shows the operating characteristic figure at the time of gas pressure reduction. (B) shows an equivalent circuit diagram. FIG. 7 shows a control block diagram of the airtightness inspection apparatus according to the embodiment. FIG. 8 shows a control flow diagram of the airtightness inspection apparatus according to the embodiment. FIG. 9 shows a control flow diagram of the airtightness inspection apparatus according to the embodiment. FIG. 10 shows the sensor output voltage of the detection part of the gas detection means of the airtightness inspection apparatus according to the embodiment. FIG. 11 is a diagram of an airtightness inspection apparatus according to the second embodiment. (A) shows a general overview. (B) shows the front view of the inside of a containment vessel. FIG. 12 is a cross-sectional view of an airtightness inspection apparatus according to the third embodiment. FIG. 13 is a lid of the airtightness inspection apparatus according to the embodiment. (A) shows sectional drawing. (B) shows a bottom view. FIG. 14 is an overall schematic diagram of an airtightness inspection apparatus according to another embodiment.

The airtightness inspection apparatus according to the first embodiment of the present invention will be described with reference to the drawings. First, the configuration of the airtightness inspection apparatus according to the embodiment will be described in detail with reference to FIGS.

The airtightness inspection apparatus according to the embodiment is an inspection apparatus that inspects the airtightness of an inspection object by detecting leakage of the detection object enclosed in the inspection object. In this embodiment, an airtight inspection of a lithium ion battery will be described as an example of the inspection object. In a lithium ion battery, an electrolyte solution (electrolyte) such as an aqueous solution such as dilute sulfuric acid or an alcohol-based organic electrolyte solution is enclosed in a sealed container, along with a positive electrode and a negative electrode. If there is a defect such as a pinhole or a crack in the sealed container, the electrolyte leaks from the defective part of the sealed container. Therefore, in this airtightness inspection apparatus for a lithium ion battery, the organic electrolyte that has become gaseous due to leakage from the sealed container during the inspection process is detected as a detection target. And in this airtightness test | inspection apparatus, the quality of the airtightness of the sealed container is judged. In the present embodiment, such an inspection of an airtightness inspection apparatus for a lithium ion battery will be described.

The airtightness inspection apparatus 1 sucks the storage container 2 for storing the inspection object X and the gas inside the storage container 2 as shown in the overall overview of FIGS. 1 (a) and 1 (b). The suction means 3, the gas detection means 4 capable of detecting the gaseous detection object leaked from the inspection object X, the control means 5 for controlling the suction means 3 and the gas detection means 4, and these devices are integrated. A casing 6 for storage.

The containment vessel 2 is divided into two rooms as shown in detail in FIGS. 2 (a) to 2 (c) and FIG. The storage container 2 includes a first storage unit 21 that stores the inspection target X, and a second storage unit 22 through which the gas inside the first storage unit 21 can flow. The first storage portion 21 and the second storage portion 22 are fixed to the protruding portion 20a by a bolt and a nut, and protruded inwardly in the middle in the height direction inside the storage container 2. The first storage unit 21 and the second storage unit 22 are partitioned by a wall 20b that is sealed so that gas cannot flow.

The first storage unit 21 stores the first chamber 21a that is in a reduced pressure atmosphere by sucking out the internal gas, and the inspection object X (specifically, a lithium ion battery) inside the first chamber 21a. Storage means 21b for opening, atmospheric release means 21c for releasing the decompressed gas inside the first chamber 21a to the outside, and inspection means for checking the status of the inspection object X and the like inside the first chamber 21a 21d and a pressure gauge 21e (see FIG. 3) for measuring the pressure inside the first chamber 21a.

The first chamber 21 a has a sealed structure in which the inspection object X is placed and can be isolated from the outside of the first storage unit 21. Further, the first chamber 21 a has a sealed structure that can be isolated from the adjacent second storage portion 22. Therefore, when the gas inside the first chamber 21a is sucked to the outside, the inside becomes a reduced pressure atmosphere or a vacuum. That is, the first chamber 21a is a device for reducing the oxygen concentration inside.

The storage means 21b is a storage door having a function capable of being isolated from the outside so that the first chamber 21a is sealed from the outside when closed. Furthermore, the storage means 21b is also used when the inspection object X is taken out from the inside of the first chamber 21a after the inside of the first chamber 21a is decompressed. Naturally, when the storage means 21b is opened, the gas inside the first chamber 21a is released to the outside.

The atmosphere release means 21c includes an atmosphere release valve in the middle or at the end. Therefore, the air release means 21 c is a communication pipe that can communicate the inside and the outside of the first storage unit 21. The air release means 21c is provided to return the pressure inside the first chamber 21a to atmospheric pressure after depressurizing the inside of the first chamber 21a.

The inspection means 21d is provided in the storage means 21b. The inspection means 21d is an inspection window that allows the inside of the first chamber 21a to be viewed from the outside.

The pressure gauge 21e is connected to the control means 5. The pressure gauge 21e has a transmitter capable of digitally or analogly outputting the measured internal pressure of the first chamber 21a.

The second storage unit 22 includes a first chamber 21a and a second chamber 22a that are brought into a reduced pressure atmosphere by sucking out the internal gas, and the first chamber 21a and the second chamber 22a so that the gas can flow between the first chamber 21a and the second chamber 22a. A communication port 22b that communicates with the second chamber 22a, a suction port 22c that is provided at a position where the gas flowing from the first chamber 21a can be sucked to the outside (of the first storage unit 21 and the second storage unit 22), An inspection means 22d for attaching and inspecting a device such as the gas detection means 4 attached inside the second chamber 22a, and a pressure gauge 22e (see FIG. 3) for measuring the pressure in the second chamber 22a are provided. .

The second chamber 22 a has a sealed structure in which the inspection object X is placed and can be isolated from the outside of the second storage unit 22. Further, the second chamber 22 a has a sealed structure that can be isolated from the adjacent first storage portion 21. Therefore, when the gas inside the second chamber 22a is sucked to the outside, the inside becomes a reduced pressure atmosphere or a vacuum. That is, the second chamber 22a is a device for sucking the gas inside the first chamber 21a and making the inside of the first chamber 21a a reduced pressure atmosphere or a vacuum.

The communication port 22b is an opening through which gas is circulated in the present embodiment. Furthermore, the communication port 22b has a structure in which a device for controlling the gas flow can be attached. This communication port 22b is provided in two places on the wall 20b. The adjusting means 32 is attached to one communication port 22b (hereinafter referred to as “first communication port 22b1”, see FIG. 3). The first circulation port 22b1 is disposed at a position where the gas inside the first storage unit 21 is efficiently sucked to the outside through the second storage unit 22. Therefore, the first communication port 22b1 is arranged closer to the suction port 22c than the other communication port 22b.

In addition, the gas detection means 4 is attached to the other communication port 22b (hereinafter referred to as “second communication port 22b2”, see FIG. 3). The second communication port 22b2 is disposed at an efficient position for sucking the gas around the inspection object X to the outside through the suction port 22c. More specifically, the second communication port 22b2 collects most of the gas around the inspection target X (if the detection target flows out from the inspection target X, this detection target). It is provided at an easy position.

The suction port 22c is provided at a position where the gas around the inspection object X can be guided to the gas detection means 4 installed in the storage container 2. The suction port 22c stores the gas around the inspection object X, that is, the gas inside the first storage unit 21, from the first communication port 22b1 and / or the second communication port 22b2 into the second storage. In order to make the part 22 suck, it is provided at a position where the gas is easily sucked.

Inspection means 22d is provided on the top surface of the second chamber 22a. The inspection means 22d is an inspection lid having a structure in which the second chamber 22a can be sealed by being tightened and closed on the top surface with bolts and nuts.

The pressure gauge 22e is connected to the control means 5. The pressure gauge 22e has a transmitter capable of digitally or analogly outputting the measured internal pressure of the second chamber 22a.

As shown in FIGS. 3 and 4, the suction means 3 sucks from the suction port 22c. The suction port 22c is provided at a position in the storage container 2 where the gas around the inspection object X can be guided to the gas detection means 4 installed inside the second storage unit 22. The suction means 3 is guided to the gas detection means 4 from the suction device 31 (see FIGS. 1A and 1B and FIG. 3) for sucking the gas inside the storage container 2 and the periphery of the inspection object X. In order to adjust the gas flow rate, the switching means 32 that can switch between the plurality of communication ports 22b1 and 22b2, and the adjustment means 33 that can adjust the flow rate of the gas that sucks the gas inside the storage container 2 from the suction port 22c ( 4).

As shown in FIG. 4, the suction device 31 is connected to the storage container 2 (specifically, the suction port 22 c of the second storage unit 22) via the adjusting means 33. The suction device 31 is a vacuum pump that sucks the gas inside the storage container 2.

As shown in FIGS. 3 and 4, the adjusting means 32 adjusts the flow rate flowing through the two communication ports 22 b 1 and 22 b 2 of the second storage portion 22, thereby adjusting the flow rate of the gas guided to the gas detection means 4. adjust. The adjusting means 32 according to the present embodiment is a gas cutoff valve 32a attached to one of the communication ports 22b1 and 22b2 and the one communication port 22b (first communication port 22b1). The gas detection means 4 is attached to the other communication port 22b (second communication port 22b2). Hereinafter, the flow passage through which the gas inside the first storage portion 21 passes through the gas shutoff valve 32a from the first communication port 22b1 and flows to the second storage portion 22 will be referred to as a first flow passage Ra-1. . Further, the flow passage through which the gas inside the first storage portion 21 passes through the gas detection means 4 from the second communication port 22b2 and flows to the second storage portion 22 will be referred to as a second flow passage Ra-2. .

The adjusting means 32 shuts off the gas shut-off valve 32a, so that the first flow passage Ra-1 is shut off, and the gas inside the first storage portion 21 is not supplied with a shut-off mechanism. -2 is allowed to pass through to the second storage unit 22 only. That is, the flow rate of the gas to the gas detection means 4 provided in the second flow path Ra-2 can be the total amount of gas flowing from the first storage unit 21 to the second storage unit 22.

Further, the adjusting means 32 opens the gas cutoff valve 32a, thereby allowing the gas inside the first storage portion 21 to pass through both the first flow path Ra-1 and the second flow path Ra-2. 2 Pass through the storage unit 22. The first communication port 22b1 is closer to the suction port 22c than the second communication port 22b2, and is arranged at a position where it can be easily sucked. Therefore, most of the gas sucked from the first storage unit 21 to the second storage unit 22 flows into the first flow path Ra-1, and substantially flows into the second flow path Ra-2. Absent.

The second flow rate adjusting means 33 includes a first suction route Rb-1 for sucking the gas inside the second storage unit 22 from the suction port 22c at the (maximum) suction flow rate of the suction device 31, and the suction flow rate of the suction device 31. The flow rate to be sucked is adjusted by switching between the second suction route Rb-2 for sucking at a reduced flow rate and reducing the flow velocity.

The second flow rate adjusting means 33 is connected to the first pipe 33a for guiding the gas inside the second storage portion 22 from the suction port 33c, and the first pipe 33a, and the first suction route Rb-1 A flow path switching valve (flow path switching means) 33b for switching between the second suction route Rb-2 and a pipe constituting the first suction route Rb-1, up to the junction with the second suction route Rb-2 A second pipe 33c for guiding the gas and a pipe constituting the second suction route Rb-2, the third pipe 33d for guiding the gas to the junction with the first suction route Rb-1, A flow rate adjusting valve (flow rate adjusting means) 33e provided in the third pipe 33d and capable of adjusting the flow rate of the gas passing through the pipe, and the first suction route Rb-1 and the second suction route Rb-2 merge. Pipe 33f for guiding the gas from the head to the suction device 31 , Comprising a.

As shown in FIGS. 5 (a) to 5 (c), the gas detection means 4 includes a detection unit 41 that detects a detection target, and a detection unit that detects the gas inside the first storage unit 21 from the second communication port 22b2. And a holder 42 for guiding to 41.

The detection unit 41 is a semiconductor type gas sensor that can detect an organic solvent that is a detection target. The detection part 41 demonstrates the example which used the tin oxide semiconductor gas sensor in this embodiment. This semiconductor-type gas sensor uses the fact that the electrical conductivity changes due to the detection object adhering to the surface of the metal oxide semiconductor element. By measuring the electrical conductivity, the presence or absence of the detection object is detected. Is detected. The gas sensor further detects the amount of leakage of the detection object.

First, the operating characteristics of this gas sensor will be described with reference to FIG. First, FIG. 6A shows the operating characteristics of the gas sensor when the gas pressure is reduced. In FIG. 6A, the horizontal axis represents the pressure reduction level [kPa] / [Torr] at which the inside of the storage container is decompressed. In FIG. 6A, the vertical axis represents the oxygen concentration [%] and the sensor output [mV] of this gas sensor. The oxygen concentration is a line indicated by a dotted line. The sensor output of the gas sensor is a b line indicated by a solid line. The sensor output of this gas sensor is the value of the voltage VRL across the load resistor RL connected in series with the semiconductor element 41a, as shown in the equivalent circuit of the gas sensor in FIG. 6B.

As shown in the result of FIG. 6A, when the decompression level is increased, naturally, the oxygen concentration (dotted line a) inside the containment vessel decreases, and along with the decrease, the sensor output (load) of this gas sensor The voltage VRL across the resistor, the solid line b) increases in proportion to the oxygen concentration. That is, the sensor resistance RS decreases in proportion to the oxygen concentration (since the circuit voltage VC is constant). From this, it can be seen that this gas sensor can withstand use even when the inside of the containment vessel is depressurized to 93.3 [kPa] (= 700 [Torr]) corresponding to a vacuum state.

As shown in FIGS. 5A to 5C, the holder 42 includes a holder main body 42a that holds the detection unit 41, a guide path 42b that guides the gas inside the first storage unit 21 to the detection unit 41, And an exhaust hole 42c provided at a position intersecting with the flow of gas guided to the detection unit 41 by the guide path 42b. 5A is a cross-sectional view taken along the line AA in FIG. 5C. The vertical cross-sectional view of FIG. 5B is a cross-sectional view taken along the line BB in FIG.

The holder main body 42a includes a mounting unit 44 that can mount the holder 42 to the second communication port 22b2, and a holding unit 45 that holds the detection unit 41.

A female screw is formed on the inner peripheral surface of the second communication port 22b2. In the mounting means 44, a male screw that is screwed into the female screw of the second communication port 22b2 is formed on the lower peripheral surface of the holder body 42a. Therefore, the mounting means 44 has a structure that is detachably mounted to the second communication port 22b2. When the holder main body 42a is attached to the second communication port 22b2, the guide path 42b is disposed at a position where the gas inside the first storage portion 21 can be sucked from the first storage portion 21 side. The holder main body 42a is disposed at a position where the exhaust hole 32c can exhaust the gas inside the first storage portion 21 on the second storage portion 22 side.

The holding means 45 is arranged so that the detection surface 41b of the detection unit 41 is orthogonal to the flow of gas flowing through the guide path 42b. The holding means 45 is configured to prevent the gas flowing in the guide path 42b from flowing backward (upward in FIGS. 5A and 5B) from the detection surface 43 of the detection unit 41 (detection surface 43 of the detection unit 41). So that there is no gap between them.

The guide path 42b is straight from the suction port 46 provided at the lower end of the holder main body 42a (the lower side in FIGS. 5A and 5B) toward the detection surface 43 of the detection unit 41a held by the holder main body 42a. It is the flow path extended in a shape.

The exhaust hole 42c is a hole penetrating the side surface of the holder main body 42a between the outer peripheral surface and the guide path 42b. More specifically, the exhaust hole 42c is a long hole whose length in the width direction of the holder body 42a is a long side and whose length in the axial direction is a short side. When the holder main body 42a is attached to the communication port 22b of the second storage part 22, the exhaust hole 42c is disposed at a position that communicates at least with the second storage part 22 side. Preferably, the exhaust hole 42c is disposed in the immediate vicinity of the detection unit 41.

In this way, the exhaust hole 42c bends the gas flow guided by the guide path 42b orthogonally at the detection surface 43 of the detection unit 41 to the side so that the gas does not pass through the detection unit 41 in this way. It can be discharged to the second storage unit 22 side. The gas flowing in the guide path 42b is bent at a right angle on the detection surface 43 of the detection unit 41, so that the flow velocity is reduced. Therefore, since the detection part 41 can detect after reducing the flow velocity of gas with the detection surface 43, it can suppress the temperature fall of the heater incorporated. The sensor resistance is prevented from increasing due to a decrease in the temperature of the built-in heater, and the detection unit 41 can operate normally.

As shown in the control block diagram of FIG. 7, the control means 5 includes an operation unit 51 that is operated by an inspection person engaged in an airtightness inspection, the storage container 2, the suction means 3, and the gas detection means 4. An input / output unit 52 for inputting / outputting signals, a control unit 53 for controlling the suction means 3 and the like based on a signal input from the input / output unit 52, and an informing unit 54 for informing a test result and the like of the control unit 53 And comprising.

The operation unit 51 is connected to the control unit 53. The operation unit 51 includes an inspection start switch for instructing the apparatus to start an airtightness inspection by the person to be inspected, a power switch for supplying power to each apparatus, and the like.

The input / output unit 52 is connected to the pressure gauge 21e of the first storage unit 21, the pressure gauge 22e of the second storage unit 22, and the detection unit 41 of the gas detection unit 4, and supplies these power sources. Accepts various signals. A measurement signal obtained by measuring the pressure inside the first storage unit 21 is input from the pressure gauge 21 e of the first storage unit 21. Similarly, a measurement signal obtained by measuring the pressure inside the second storage unit 22 is input from the pressure gauge 22e of the second storage unit 22. A sensor output is input from the detector 41 of the gas detector 4.

The input / output unit 52 is further connected to the suction device 31, the gas cutoff valve 32 a of the switching unit 32, the flow path switching valve 33 b of the adjusting unit 33, and the atmosphere release valve 21 c of the first storage unit 21. The input / output unit 52 supplies power and outputs various signals. The suction device 31 is supplied with power for driving the pump. A cutoff signal is output to the gas cutoff valve 32a. A flow path switching signal is output to the flow path switching valve 33b.

The control unit 53 performs various arithmetic processes with a ROM that is a non-volatile memory that stores a control program related to an airtightness test, a RAM that is a volatile memory that stores an input / output signal from the input / output unit 52, and the like. And an arithmetic unit.

The control unit 53 controls the suction device 31, the gas cutoff valve 32 a, the flow path switching valve 33 b and the atmosphere release valve 21 c to control the gas pressure inside the storage container 2, and the first storage unit 21. A state monitoring unit 53b for monitoring the internal state of the containment vessel 2 based on the measurement signals from the pressure gauge 21e and the pressure gauge 22e of the second storage unit 22, and the airtightness of the test object from the internal pressure of the containment vessel 2 An airtightness determining unit 53c for determining

The notification unit 54 includes a first pressure indicator 54 a that displays the pressure of the gas inside the first storage unit 21, a second pressure display meter 54 b that displays the pressure of the gas inside the second storage unit 22, and an airtight And a determination display unit (display panel, alarm lamp, alarm buzzer) 54c that notifies the determination result of the airtightness of the inspection object by the sex determination unit 53c.

The casing 6 is provided with a caster on the bottom surface so that the storage container 2, the suction means 3, the control means 5 and the like can be accommodated and transported. Various instruments and operation switches of the control means 5 are attached to the front surface of the casing 6.

Next, the operation of the airtightness inspection apparatus according to the present embodiment will be described in detail with reference to FIGS. First, it demonstrates in order along the control flow of FIG. First, when inspecting the airtightness of the inspection object X, the inspection object X is stored in the first storage unit 21. The inspection door (inspection means) 21d is closed, and the first storage portion 21 is sealed (S1). Then, when the operation start switch of the operation unit 51 is operated and the airtightness inspection is started (S2), the airtightness inspection is performed in such a condition that the detection object can be leaked from the inspection object X. Whether the test object X is airtight or not is determined from a decompression stage in which the storage unit 21 is depressurized to a predetermined pressure and a sensor output signal of the detection unit 41 that detects the detection target object from the gas inside the first storage unit 21. The process is divided into a determination stage and a determination stage.

In the pressure reduction stage of the airtightness test, the pressure control unit 53a of the control unit 5 controls the switching unit 32 so that the gas inside the first storage unit 21 mainly passes from the first flow path Ra-1 to the second storage unit. It adjusts so that 22 may be attracted | sucked. That is, the pressure control unit 53a opens the gas cutoff valve 32a (S3).

The pressure control unit 53a controls the adjustment unit 33 so that the gas inside the second storage unit 22 is sucked from the first suction route Rb-1. That is, the pressure control unit 53a switches the flow path switching valve 33b to the first suction route Rb-1 side (S4).

When the flow path for sucking the gas inside the first storage unit 21 to the suction device 31 is selected in this way (after S3 and S4), the pressure control unit 53a sucks the suction device 31 to drive it. A drive signal for driving the device 31 is output to the input / output unit 52 (S5). The suction device 31 starts to be driven by the input of a drive signal from the input / output unit 52. Then, the suction device 31 sucks the gas inside the second storage unit 22. Further, the suction device 31 mainly sucks the gas inside the first storage portion 21 from the first flow path Ra-1. In this way, the first storage unit 21 starts to be depressurized.

The state monitoring unit 53b monitors the gas pressure inside the

storage containers

21 and 22 based on measurement signals input from the pressure gauge 21e of the first storage unit 21 and the pressure gauge 22e of the second storage unit 22. And the state monitoring part 53b is outputting the measurement signal which measured the pressure of the gas inside the pressure control part 53a and the alerting | reporting part 54. FIG. The notification unit 54 displays the measurement signal (pressure signal) input from the state monitoring unit 53b on the first pressure display meter 54a and the second pressure display meter 54b in order to notify the operator.

When the pressure control unit 53 determines that the pressure in the first storage unit 21 has reached a predetermined pressure based on the pressure signal input from the state monitoring unit 53b (YES in S6), the airtightness test is detected from the test object. Since the target object is in a condition that allows leakage, the process moves to the detection stage. In addition, the predetermined pressure here is a pressure required to leak the detection target from the inspection target X. Hereinafter, this pressure is referred to as “determination start pressure”. In the present embodiment, this determination start pressure is 93.3 [kPa] / 700 [Torr].

In the detection step S4, as shown in the control flow diagram of FIG. 9, the pressure control unit 53a of the control unit 5 controls the adjustment unit 33 so that the gas inside the second storage unit 22 is second suctioned. Switch so as to be sucked from route Rb-2. That is, the pressure control unit 53a switches the flow path switching valve 33b to the second suction route Rb-2 side (S7).

The pressure control unit 53a further controls the switching means 32 to adjust the gas inside the first storage unit 21 so that the gas is sucked into the second storage unit 22 from the second flow path Ra-2. That is, the pressure control unit 53a shuts off the gas shutoff valve 32a (S8).

In this way, when a flow path for sucking the gas inside the first storage unit 21 to the suction device 31 is selected (after S7 and S8), the detection unit 41 of the gas detection means 4 is connected to the detection unit 41 of the first storage unit 21. A large amount of gas flows in. As shown in FIG. 10, the airtightness determination unit 53c accepts the input of the sensor output signal of the detection unit 41 of the gas detection unit 4 (decompression of the storage container 2 is started when the inspection time is about 4 seconds. However, about 12 seconds after reaching the determination start pressure, if there is a pinhole or the like, the sensor output voltage (signal) starts to rise.

The airtightness determination unit 53c determines that the sensor output voltage of the detection unit 41 is equal to or lower than the predetermined voltage when a predetermined time has elapsed after the gas pressure in the first storage unit 21 reaches the determination start pressure (YES in S9). Whether or not the detection target is airtight is determined based on whether or not there is (S10).

It should be noted that the predetermined time referred to here is a time required for the detection unit 41 to leak the detection target to a threshold at which the airtightness can be determined in the airtightness determination. This predetermined time is hereinafter referred to as “leakage detection time”. Specifically, as shown in FIG. 10, if the inspection object X has a pinhole, the sensor output voltage (one-dot chain line b other than solid line a, two-dot chain line c, three-dot chain line d) The voltage reaches at least 1.6 V within about 4 seconds after reaching the determination start pressure (after about 12 seconds of the inspection time). If it is about 4 seconds, it can be determined whether or not the inspection object X has a pinhole. Therefore, in this embodiment, the leakage detection time is about 4 seconds (inspection time is about 12 to 16 seconds) after reaching the determination start pressure.

Further, the predetermined voltage referred to here is a sensor output voltage serving as a threshold value for determining whether the airtightness is good or not when the leakage detection time is reached from the determination start pressure. This predetermined voltage is hereinafter referred to as “airtightness determination voltage”. The voltage value of the airtightness determination voltage varies depending on the scale (size) of the pinhole formed in the inspection object X. For example, when the pinhole diameter is detected to 0.020 mm, the airtightness determination voltage is 2.1V. When the pinhole diameter is detected to 0.010 mm, the airtightness determination voltage is set to 2.0V. When the pinhole diameter is detected to 0.005 mm, the airtightness determination voltage is set to 1.6V. In addition, the continuous line a of FIG. 10 shows sensor output voltage [V] when there is no pinhole. An alternate long and short dash line b indicates the sensor output voltage [V] when the pinhole diameter is 0.020 mm. A two-dot chain line c represents the sensor output voltage [V] when the pinhole diameter is 0.010 mm. A three-dot chain line d indicates the sensor output voltage [V] when the pinhole diameter is 0.005 mm.

When the sensor output voltage is equal to or lower than the airtightness determination voltage, the airtightness determining unit 52 determines that there is no abnormality in the airtightness and that the airtightness is maintained (YES in S10, S11). On the other hand, when the sensor output voltage exceeds the airtightness determination voltage, the airtightness determining unit 52 determines that the airtightness is abnormal and the airtightness is not sufficiently maintained (NO in S10, S12). The airtightness determination unit 52 outputs these determination results (determination result signals) to the notification unit 54 (S13). In the notification unit 54, the determination display unit 54c notifies the result.

When the determination result is obtained and the airtightness inspection is completed, the pressure control unit 53a opens the atmosphere release valve 21c to release the storage container 2 to the atmosphere so that the object to be inspected can be taken out. Return to atmospheric pressure (S14). When the pressure in the containment vessel 2 returns to atmospheric pressure, the inspection person opens the inspection door 21d, takes out the inspection object X, and completes the inspection.

In this way, the gas detection means 4 is installed inside the storage container 2 for storing the inspection object X. When the gaseous detection target is leaking from the inspection target X, the gas inside the storage container 2 is sucked from the suction port 22c by the suction means 3, so that along with the gas around the inspection target X, The detection object X is also guided to the gas detection means 4. In this way, the gas detection means 4 can detect the detection object.

In particular, the inspection object X is stored in the first storage unit 21. The gaseous detection target leaked from the inspection target X is discharged into the first storage unit 21. The second storage unit 22 is provided with a suction port 22c. The gas inside the second storage portion 22 is sucked into the suction port 22c by sucking the suction means 3. Subsequently, the gas inside the first storage unit 21 is sucked into the suction port 22c. The detection object leaked from the inspection object X is sucked together with the gas around the inspection object X from the first storage part 21 by sucking the gas inside the second storage part 22 from the suction port 22c by the suction means 3. , Guided to the gas detection means 4. In this way, the gas detection means 4 can detect the detection object X. Therefore, the airtightness inspection apparatus 1 according to the present embodiment can detect whether or not the detection target is leaking from the inspection target X inside the storage container 2. And the airtightness inspection apparatus 1 can test | inspect the airtightness of the test target object X in a short time.

The communication ports 22b1 and 22b2 can be arranged at positions close to the first storage unit 21 in which the inspection object X is stored. The communication ports 22b1 and 22b2 can suck the gas around the inspection object X at high speed.

The gas inside the containment vessel 2 is guided to the gas detection means 4. The adjusting unit 33 can adjust the flow rate so that the gas detecting unit 4 can detect the detection target.

The gas inside the containment vessel 2 is sucked by the suction means 3. And this gas is guided to the detection part 41 via the guide path 42b. When this gas is discharged from the exhaust hole 42c, the flow of this gas is bent by the detection unit 41 and decelerated. The gas detection means 4 has a structure capable of decelerating the flow rate of the sucked gas. For this reason, the gas detection means 4 can improve the sensitivity which detects a detection target object.

Even after the sensor output (voltage) of the detection unit 41 exceeds the airtightness determination voltage, the detection target attached to the surface of the semiconductor element can be obtained by simply returning the pressure inside the storage container 2 to atmospheric pressure. Leaves. For this reason, as shown in FIG. 10, the sensor output (voltage) of the detection unit 41 can be returned to the initial voltage of the test, and can be returned to the sensor output voltage before the determination. Therefore, according to the airtightness inspection apparatus of the present invention, even if the airtightness inspection is continuously performed, the detection accuracy does not decrease.

Next, an airtightness inspection apparatus according to a second embodiment of the present invention will be described with reference to FIG. In addition, about the same structure as the airtightness inspection apparatus 1 which concerns on 1st Embodiment, while using the same code | symbol, the description is abbreviate | omitted.

First, the airtightness inspection apparatus 100 according to the present embodiment includes a storage container 102, a suction means 3, a gas detection means 4, a control means 5, and a casing 6, as in the first embodiment.

The storage container 102 includes a first storage unit 121 and a second storage unit 122 as shown in FIG. However, the first storage part 121 and the second storage part 122 are not partitioned so as to be hermetically sealed, and a protruding part 120 a provided to protrude inward in the middle in the height direction inside the storage container 102. A wall 120b is placed on the wall. That is, the wall 120b can be detached from the storage container 102 by sliding forward. The first storage unit 121 can store a plurality of trays 121f to inspect a large number of inspection objects at the same time. By sliding the tray 121f forward, the first storage part 121 is provided with a protruding part 121g, which can be detachably held from the storage container 102.

It is assumed that the second storage unit 122 simultaneously inspects a large number of inspection objects according to the present embodiment. Therefore, the volume of the first storage unit 121 is large, and the flow rate of the gas sucked from the first storage unit 121 is naturally large. Therefore, a plurality of communication ports 122b,... Are provided. In addition, the suction port 122 c is provided in the upper part of the storage container 102. Therefore, the suction port 122c is disposed at a position where the gas inside the storage container 102 can be efficiently sucked. .. Are attached to the communication ports 122b,... According to the volume of the first storage part 121.

Thus, each of the first storage unit 121 and the second storage unit 122 is not completely sealed. For example, even if the gas inside the first storage part 121 can be circulated from the joint part between the projecting part 120a and the wall 120b, most of the gas inside the first storage part 121 has a large number of communication ports 122b, Circulate to the second storage unit 122 via. For this reason, it is possible to detect a detection target object by the gas detection means 4, ... attached to this communication port 122b, ....

In addition, even when the volume of the inspection object increases, there is no problem in detecting the detection object by increasing the number of communication ports 122b,. Further, by providing a plurality of communication ports 122b,..., A plurality of gas detection means 4,. However, the storage container 102 according to the present embodiment is configured such that the wall 120b can be removed, so that maintenance can be easily performed. In addition, the flow rate of the gas that can be sucked from the first storage unit 121 increases, and the inside of the first storage unit 121 can be reduced to a predetermined pressure (compared to the case of suction from one place) in a short time. it can. In addition, you may make it acquire the same effect by enlarging the opening area of one communicating port.

Next, an airtightness inspection apparatus according to a third embodiment of the present invention will be described with reference to FIGS. 1 to 4, 12, and 13.

As shown in detail in FIGS. 2 (a) to 2 (c) and FIG. 3, the storage container 2 has a first storage unit 21 for storing the inspection object X and a gas inside the first storage unit 21 flowing therethrough. A second storage unit 22 that is possible. The first storage unit 21 and the second storage unit 22 are partitioned by a wall 20b sealed between the first storage unit 21 and the second storage unit 22 so that gas cannot flow.

The first storage unit 21 is decompressed by a first chamber 21a that is in a reduced pressure atmosphere by sucking out the internal gas, and storage means 21b for storing the inspection object X inside the first chamber 21a. An air release means 21c for releasing the gas inside the first chamber 21a to the outside, an inspection means 21d for checking the state of the inspection object X and the like inside the first chamber 21a, and an inside of the first chamber 21a And a pressure gauge 21e (see FIG. 3) for measuring pressure.

The second storage unit 22 includes a first chamber 21a and a second chamber 22a that are brought into a reduced pressure atmosphere by sucking out the internal gas, and the first chamber 21a and the second chamber 22a so that the gas can flow between the first chamber 21a and the second chamber 22a. A communication port 22b that communicates with the second chamber 22a, a lid 322f that can be indirectly closed to the communication port 22b via a mounting portion 347 (see FIG. 12), and a gas that flows from the first chamber 21a to the outside A suction port 22c provided at a position where suction is possible, an inspection means 22d for attaching and inspecting a device such as the gas detection means 4 attached inside the second chamber 22a, and a pressure in the second chamber 22a are measured. And a pressure gauge 22e (see FIG. 3).

Further, the communication port 22b is provided in order for the gas inside the first chamber 21a (first storage unit 21) to be sucked into the second chamber 22a (second storage unit 22) by the suction means 3. That is, the communication port 22 b also functions as a part of the suction unit 3.

The communication port 22b is provided in two places on the wall 20b. The adjusting means 32 is attached to one communication port 22b (hereinafter referred to as “first communication port 22b1”, see FIG. 3). The gas detection means 4 is attached to the other communication port 22b (hereinafter referred to as “second communication port 22b2”, see FIG. 3).

As shown in FIGS. 12, 13A, and 13B, the lid 322f includes a lid body 322f1 that can indirectly close the communication port 22b via a mounting portion 347, and a second chamber 22a (second 2 storage part 22) and a flow hole 322f2 through which the gas sucked can be passed. The lid 322f2 is preferably attached to the second communication port 22b2 among the plurality of communication ports 22b. FIG. 12 is a partial cross-sectional view around the second communication port 22b2. FIG. 13A is a longitudinal sectional view of the lid 322f. FIG. 13B is a bottom view of the lid 322f.

The lid body 322f1 is formed in a bottomed cylindrical shape, and includes a plate-like base portion 322f3 that closes the communication port 22b, and a cylindrical portion 322f4 that extends from one surface of the base portion 322f3. . The base portion 322f3 is formed in a disc shape having an outer diameter larger than that of the communication port 22b. And the edge of the one part arc of the base part 322f3 is formed in linear form. The cylindrical portion 322f4 includes a male screw 322f5 on its outer peripheral surface so that the communication port 22b can be detachably attached. The male screw 322f5 is screwed into a female screw 347b provided in the attachment portion 347. Therefore, the lid 322f is structured to be detachably attached to the attachment portion 347. The cylindrical portion 322f4 is formed in a cylindrical shape so that the inner peripheral surface thereof flows the gas that has passed through the flow hole 322f2 to the communication port 22b.

The distribution hole 322f2 is composed of one or a plurality of holes. The flow hole 322f2 according to the present embodiment is composed of four holes. The total opening area of the four flow holes 322f2,... Is smaller than the opening area of the communication port 22b. The flow hole 322f2 is provided through the base portion 322f3 of the lid body 322f1. The flow hole 322f2 is disposed on the inner side of the inner peripheral surface of the cylindrical portion 322f4 so that the gas flows inside the cylindrical portion 322f4.

As shown in FIG. 12, the gas detection means 4 includes a detection unit 41 for detecting a detection target and a holder for guiding the gas inside the first storage unit 21 from the second communication port 22b2 to the detection unit 41. 42 and an attachment portion 347 for attaching the holder 42 to the wall 20b in a detachable manner.

The detection unit 41 is a semiconductor type gas sensor that can detect an organic solvent that is a detection target.

As shown in FIG. 12, the holder 42 includes a holder main body 42a for holding the detection unit 41, a guide path 42b for guiding the gas inside the first storage unit 21 to the detection unit 41, and a detection unit by the guide path 42b. And an exhaust hole 42 c provided at a position intersecting with the flow of gas guided to 41.

The mounting means 44 includes a cylindrical portion 344a formed in a cylindrical shape and a male screw 344b formed on the outer peripheral surface of the cylindrical portion 344a. The cylindrical portion 344 a has an outer diameter that can be inserted into the attachment portion 347. The male screw 344b is screwed into a female screw 347b provided in the attachment portion 347. Therefore, the mounting means 44 has a structure that is detachably mounted on the mounting portion 347.

The holding means 45 is arranged so that the detection surface 41b of the detection unit 41 is orthogonal to the flow of gas flowing through the guide path 42b. Since the holding means 45 makes it difficult for the gas flowing in the guide path 42b to flow backward (upward in FIG. 12) from the detection surface 43 of the detection unit 41, there is no gap between the holding unit 45 and the detection unit 41 (the detection surface 43). To be held.

The mounting portion 347 is disposed through the communication port 22b. The attachment portion 347 is provided such that one end side is located on the first storage portion 21 side and the other end side is located on the second storage portion 22 side. And the attaching part 347 is being fixed to the wall 20b. The attachment portion 347 includes a cylindrical portion 347a formed in a cylindrical shape, and a female screw 347b formed on the inner peripheral surface from one end side to the other end side in the cylindrical core direction of the cylindrical portion 347a.

The female screw 347b of the mounting portion 347 is provided so that the holder main body 42a can be screwed from one end side in the cylinder core direction and the lid 322f can be screwed from the other side. The female screw 347b of the attachment portion 347 according to the present embodiment is formed long enough so that a gap is opened between the respective tip portions in a state where the holder main body 42a and the lid 322f are screwed to the attachment portion 347. Yes.

Also, the flow hole 322f2 of the lid 322f can limit the gas flow rate so as to be suitable for detection of the detection target by the gas detection means 4. And since the flow rate of the gas which passes the detection surface 43 is restrict | limited to the optimal flow volume, the detection part 41 can suppress the temperature fall of the built-in heater. Since the detector 41 can prevent an increase in sensor resistance, it can operate normally.

It should be noted that the airtightness inspection apparatus according to the present invention is not limited to the above-described embodiment, and it is needless to say that various modifications can be made without departing from the gist of the present invention.

The airtightness inspection apparatus 1,100 according to the above embodiment has been described as being applied to a lithium ion battery, but is not limited to this application. For example, the airtightness inspection apparatus according to the present invention is a secondary battery (so-called rechargeable battery) that can be recharged and repeatedly used after discharge, such as a nickel metal hydride battery other than a lithium ion battery, an alkaline dry battery, or manganese. The present invention can also be applied to a battery such as a primary battery such as a dry battery. Moreover, it can apply also to the test object which has the container of a sealing structure similarly to these batteries. For example, the electrolytic capacitor can also be applied to an inspection object having an anode electrode, a cathode electrode, and an electrolytic solution permeated between the electrodes. This inspection object has the same problem as a lithium ion battery, and the same problem can be achieved by performing an airtight inspection using the airtightness inspection apparatus according to the present invention.

In the

airtightness inspection devices

1 and 100 according to the above embodiment, the example in which the detection unit 41 is a tin oxide semiconductor gas sensor has been described, but the present invention is not limited to this. The detection unit selects a detection target in accordance with the inspection target X to be inspected by the airtightness inspection apparatus of the present invention, and any sensor can be used as long as the sensor is suitable for detection of the detection target. Good. In addition, the characteristic of the detection part disclosed by the said embodiment is an example. It goes without saying that the characteristics of the detection unit must be appropriately checked according to the characteristics of the sensor selected according to the object to be detected, and control suitable for each sensor must be performed.

In the

airtightness inspection apparatus

1 and 100 according to the above-described embodiment, the example in which the inspection object X is stored in the

storage container

2 and 102 by the person in charge of the inspection has been described, but the present invention is not limited to this. For example, as shown in FIG. 14, the airtightness inspection apparatus 200 is installed on the production line Y of the inspection object X, is automatically stored in the storage container 202, performs the airtightness inspection, and then automatically You may be comprised so that it may return on the production line Y. In this case, the airtightness inspection apparatus 200 transmits the inspection result obtained by performing the airtightness inspection to the production line facility so that the inspection object X that is not airtight is automatically removed from the production line Y. In addition, an external output terminal capable of outputting the inspection result may be provided in the production line facility.

In the airtightness inspection apparatus 1 according to the above embodiment, the example in which the first communication port 22b1 is disposed on the suction port 22c side with respect to the second communication port 22b2 has been described. By combining these methods, the gas inside the first storage unit 21 may be efficiently configured to be sucked outside through the second storage unit 22. For example, the first communication port 22b1 may be more efficiently distributed by setting it larger than the opening area of the second communication port 22b2. The first communication port 22b1 may be more efficiently distributed by providing a plurality of second communication ports 22b2 with respect to one first communication port 22b2.

In the

airtightness inspection apparatuses

1 and 100 according to the above embodiment, the example in which the exhaust hole 42c is provided at a position where the holder main body 42a intersects the gas flow guided to the detection unit 41 by the guide path 42b has been described. It is not limited to this. For example, the holder main body is provided with an exhaust hole at a position on the extension line of the gas flow guided to the detection unit 41 by the guide path 42b so that the gas to be detected by the detection unit 41 passes through the detection unit 41. Also good. In this case, since the sensor output of the detection unit may decrease, in order to restore the sensor output, a recovery time (about 20 seconds) is provided after gas detection, It is preferable to maintain the sensitivity.

In the

airtightness inspection devices

1 and 100 according to the above embodiment, the example in which the gas shut-off valve 32a is provided on the first communication port 22b1 side as the switching unit 32 has been described, but the present invention is not limited to this. For example, this switching means is attached to the second communication port 22b2 side to which the gas detection means 4 is attached, and the flow rate of the gas sucked from the first storage portion 21 to the second storage portion 22 is adjusted. Also good. In this case, preferably, a gas shut-off valve is attached to the outlet side of the gas detection means, and the gas shut-off valve is shut off during the decompression stage, so that the gas flows to the first communication port 22b1 side during decompression. Then, by opening the gas shut-off valve only at the determination stage, the gas flows through both the first communication port 22b1 and the second communication port 22b2, and the gas is included in the gas flowing through the second communication port 22b2. You may make it detect a detection target object. Therefore, since the flow rate of the gas flowing through the second communication port 22b2 is lower than that of the present embodiment, it is preferable to secure the gas flow rate by extending the measurement time.

Although the airtightness test |

inspection apparatuses

1 and 100 which concern on the said embodiment demonstrated the example in which the storage container 2 was divided into two of the 1st storage part 21 and the 2nd storage part 22, it is limited to this is not. For example, if the gas inside the first storage unit does not prevent the gas from flowing through the first communication port and the second communication port of the second storage unit, the first storage unit and the second storage unit respectively There is no need for a completely sealed structure, and there is no need for two sections. That is, if the suction port is provided at a position in the containment vessel capable of guiding the gas around the test object to the gas detection means installed in the containment container, the detection target leaked from the test object Objects can be guided to the gas detection means and detected. However, since the gas cannot be intensively guided to the gas detection means, it goes without saying that the configuration according to the above embodiment is most preferable. In addition, if the airtightness is not required to be high, the amount of the detection target (concentration contained in the gas) leaking from the gas detection unit is naturally increased until the configuration according to the above embodiment is obtained. In such a case, it is preferable to adopt such a configuration because it can be detected without any problem and can be manufactured at low cost.

In the

airtightness inspection devices

1 and 100 according to the above-described embodiment, the example in which the exhaust hole 42c is provided at one place on the side surface of the holder body 42a has been described, but the present invention is not limited to this. For example, two exhaust holes may be provided. The positional relationship between the exhaust holes provided at two locations may be provided at positions facing each other with respect to the radial direction of the holder main body 42a. Moreover, the exhaust hole may be provided in three or more places.

In the

airtightness inspection devices

1 and 100 according to the above embodiment, the example in which the flow rate for sucking the gas inside the storage container 2 is adjusted by the adjusting unit 33 while the suction capability of the suction unit 31 is kept constant has been described. It is not limited to. For example, the suction means may be a vacuum pump capable of adjusting the suction capacity or switching in multiple stages to adjust the gas flow rate, or a vacuum pump equipped with a controller capable of adjusting the suction capacity or switching in multiple stages. That is, the adjusting means may be integrated with the suction means to adjust the flow rate for sucking the gas inside the storage container.

In the

airtightness inspection apparatus

1 and 100 according to the above embodiment, the example in which the lid 322f can indirectly close the communication port 22b via the attachment portion 347 has been described, but the present invention is not limited to this. For example, the lid may be capable of directly closing the communication port 22b without using an attachment portion.

Although the airtightness inspection apparatus 1,100 according to the above embodiment has been described with an example in which there are a plurality of flow holes 322f2, the present invention is not limited thereto. For example, the number of through holes may be one. The circulation hole is a circular hole and preferably has an outer diameter smaller than the inner diameter of the communication port 22b. Further, the flow hole is not limited to a circular opening. For example, the through hole may be a hole formed in a polygonal shape with respect to the base part of the lid body of the lid, or may be a hole formed in an elliptical shape.

DESCRIPTION OF SYMBOLS 1 ... Air tightness inspection apparatus, 2 ... Storage container, 20a ... Projection part, 20b ... Wall, 21 ... 1st storage part, 21a ... 1st chamber, 21b ... Storage means, 21c ... Air release means, 21d ... Inspection means ( Inspection door), 21e ... pressure gauge, 22 ... second storage unit, 22a ... second chamber, 22b ... communication port, 22b1 ... first communication port, 22b2 ... second communication port, 22c ... suction port, 22d ... Inspection means (inspection lid), 22e ... pressure gauge, 3 ... suction means, 31 ... suction device, 32 ... switching means, 32a ... gas cutoff means (gas cutoff valve), 33 ... adjustment means, 33a ... first piping, 33b: Channel switching means (channel switching valve), 33c: Second pipe, 33d: Third pipe, 33e: Flow rate adjusting means (flow rate adjusting valve), 33f: Fourth pipe, 4: Gas detecting means, 41 ... Detector, 41a ... Semiconductor element, 42 ... Holder 42a ... holder body, 42b ... guide path, 43 ... detection surface, 44 ... mounting means, 45 ... holding means, 46 ... suction port, 42c ... exhaust hole, 5 ... control means, 51 ... operation part, 52 ... input / output 53, control unit, 53a, pressure control unit, 53b, state monitoring unit, 53c, airtightness determination unit, 54, notification unit, 54a, first pressure indicator, 54b, second pressure indicator, 54c, determination. Display unit, 6 ... casing, 100 ... air tightness inspection device, 102 ... storage container, 120a ... projection, 120b ... wall, 121 ... first storage, 121g ... projection, 121f ... tray, 122 ... second storage 122b ... Communication port, 122c ... Suction port, 200 ... Air tightness inspection device, 202 ... Storage container, 322f ... Lid, 322f1 ... Lid body, 322f2 ... Through hole, 322f3 ... Base part, 322f4 ... Cylindrical part, 322f5 ... Male Screw 344a ... Cylinder portion, 344b ... Male screw, 347 ... Mounting portion, 347a ... Cylinder portion, 347b ... Female screw, Ra-1 ... First flow passage, Ra-2 ... Second flow passage, Rb-1 ... First Suction route, Rb-2 ... second suction route, X ... test object, Y ... production line

Claims

A storage container for storing an inspection object, a suction means for sucking a gas inside the storage container, and a gas detection means capable of detecting a gaseous detection object leaked from the inspection object. An airtightness inspection device,
The gas detection means is installed inside the containment vessel,
The suction means is a suction port capable of guiding the gas around the inspection object to the gas detection means, and is provided at a position in the storage container for sucking the gas around the inspection object. An airtightness inspection apparatus characterized by suctioning from a suction port.
The storage container is a first storage unit that stores the inspection object, and a second storage unit that can circulate the gas inside the first storage unit, and the suction port is circulated from the first storage unit. A gas tightness inspection apparatus according to claim 1, further comprising: a second storage portion provided so as to be in a position where the gas to be sucked to the outside can be provided.
3. The airtightness inspection apparatus according to claim 2, wherein the suction means includes a communication port for sucking the gas inside the first storage part into the second storage part.
The airtightness inspection apparatus according to any one of claims 1 to 3, wherein the suction means includes an adjustment means capable of adjusting a flow rate of a gas that sucks the gas inside the storage container from the suction port.
The gas detection means includes: a detection unit that detects the detection target; a guide path that guides the gas inside the storage container to the detection unit; and a gas flow guided to the detection unit by the guide path. The airtightness inspection apparatus according to any one of claims 1 to 4, further comprising an exhaust hole provided at a position intersecting with the exhaust hole.
A storage container for storing an inspection object, a suction means for sucking a gas inside the storage container, and a gas detection means capable of detecting a gaseous detection object leaked from the inspection object. An airtightness inspection device,
The gas detection means is installed inside the containment vessel,
The suction means is a suction port capable of guiding the gas around the inspection object to the gas detection means, and is provided at a position in the storage container for sucking the gas around the inspection object. Suction from the suction port,
The storage container is a first storage unit that stores the inspection object, and a second storage unit that can circulate gas inside the first storage unit, and the suction port circulates from the first storage unit. A second storage portion provided to be in a position where the gas to be sucked to the outside can be provided,
The suction means includes a communication port for sucking the gas inside the first storage unit into the second storage unit, and a lid for closing the communication port,
The lid is a flow hole through which the gas sucked into the second storage part can pass, and an opening area of the flow hole is smaller than an opening area of the communication port.