WO2012115386A2

WO2012115386A2 - Wireless-charging pressure sensor and a production method therefor

Info

Publication number: WO2012115386A2
Application number: PCT/KR2012/001166
Authority: WO
Inventors: 최범규; 김종현
Original assignee: 서강대학교산학협력단
Priority date: 2011-02-23
Filing date: 2012-02-16
Publication date: 2012-08-30
Also published as: WO2012115386A3; KR20120096776A; KR101248185B1

Abstract

The present invention relates to a pressure sensor capable of wireless charging and to a method for producing such a pressure sensor. The present wireless-charging pressure sensor comprises: a wireless-charging unit having a magnetoelectric composite (ME composite) for generating a voltage in accordance with a magnetic field acting from the outside; and a pressure sensor unit having a pressure sensor which senses pressure and is driven in accordance with supply of the voltage. In the present invention, a wireless charging system is fused with an electrical means for measuring pressure, thereby making it possible to measure pressure in a relatively straightforward and smooth fashion in various industrial fields including the biomedical, disaster prevention, transportation, automotive and power plant industries.

Description

Wireless charging pressure sensor and its manufacturing method

The present invention relates to a pressure sensor capable of wireless charging and a method of manufacturing such a pressure sensor.

In the field of biomedical research, sensors for measuring the pressure of a specific part of the human body are being studied. Invasive sensors can measure pressure more precisely than non-invasive sensors, but invasive sensors are inserted directly inside the human body, so that sensors located inside the human body are continuously powered for their operation. There is a problem that is difficult to supply.

Consider using a wired power supply system or a regular battery replacement. However, this method does not provide a minimally invasive sensor device, which limits the social activities of patients. have.

For example, in patients with bladder dysfunction due to spinal cord injury, it is important to measure micropressure inside the bladder. In order to measure the micro pressure more accurately, the sensor should be located inside the bladder.However, connecting power to the sensor located inside the bladder from the outside by wire or periodically changing the battery of the sensor is difficult due to its locational characteristics. And pain may persist in the patient even after the procedure.

Meanwhile, the pressure sensor is applied to various fields such as transportation industry, disaster prevention, power plant, automobile, etc. in addition to the biomedical field. In order to further expand the area to which the pressure sensor is applied in various fields, it is necessary to escape the limitations due to the conventional wired or battery powered method. For example, a large number of pressure sensors can be applied to the transportation industry, and the work of periodically replacing the battery or connecting power by wires for each pressure sensor has limitations in consideration of workability, efficiency, and economy. .

The present invention was created to solve the problems described above, the problem to be solved by the present invention can be more convenient and smooth pressure measurement in a variety of industries, such as biomedical, disaster prevention, transportation industry, automobiles, power plants, It is to provide a wireless charging pressure sensor and a method of manufacturing the same that can be secured manufacturability and economy.

Wireless charging pressure sensor according to an embodiment of the present invention for achieving the above object is a wireless charging unit having a magnetic composite (ME composite) for generating a voltage in accordance with a magnetic field acting from the outside, and senses the pressure It includes a pressure sensor unit having a pressure sensor driven in accordance with the supply of the voltage.

The pressure sensor may include a diaphragm that is bent in accordance with the pressure, and a lower plate having an electrode on the upper side thereof and arranged to be spaced downward from the diaphragm.

The magnetoelectric composite is a magnetostrictive material for converting magnetic energy according to the magnetic field acting from the outside into strain energy, and the magnetostrictive material is synthesized to generate the voltage through the strain energy. It may comprise a piezoelectric material (piezoelectric material).

The wireless charging unit and the pressure sensor unit may be manufactured through a semiconductor process technology and combined with each other.

The wireless charging unit may further include a charging unit for charging the voltage generated by the magnetoelectric composite and supplying the charged voltage to the pressure sensor.

The pressure sensor unit may further include an upper plate disposed on an upper side of the pressure sensor and having a hole formed in an up and down direction, wherein the pressure sensor may sense a pressure acting through the hole.

The wireless charging unit may be disposed between the upper plate and the pressure sensor.

The wireless charging unit may include a corresponding hole formed at a position corresponding to the hole in a plane.

The magnetoelectric composite may be provided inside the corresponding hole in a shape such that pressure acting through the hole may be transmitted to the diaphragm.

The magnetoelectric composite may be provided in the shape of a cantilever extending inward from the circumference of the corresponding hole.

The magnetoelectric composite may be provided in the form of a bridge across the corresponding hole.

The hole may be formed so that the cross section cut in the vertical direction has a trapezoidal shape with a short upper side.

On the other hand, the method of manufacturing a wireless charging pressure sensor according to an embodiment of the present invention to prepare a wireless charging unit having a magnetic composite (ME composite) for generating a voltage according to the magnetic field acting from the outside, the hole in the vertical direction The manufacturing of the upper plate is formed, combining the upper plate and the wireless charging unit to abut the upper surface of the wireless charging unit on the lower surface of the upper plate, the pressure acting through the hole in the lower side of the wireless charging unit Manufacturing a diaphragm that is bent along, manufacturing a lower plate having an electrode on the upper side, and coupling the diaphragm and the lower plate such that the electrode is spaced downward from the diaphragm.

The manufacturing of the wireless charging unit may include bonding a piezoelectric material to an upper surface of a silicon wafer, thinning the piezoelectric material to include a piezoelectric material part, and synthesizing the upper surface of the piezoelectric material part. Patterning the electrode for electrode, depositing a magnetostrictive material on an upper surface of the patterned portion of the synthesis electrode and an exposed top surface of the piezoelectric material part to provide a magnetostrictive material part, and the piezoelectric material The etching method may include etching the patterned portion of the synthesis electrode and the magnetostrictive material portion to be combined with each other and provided in a cantilever shape or a bridge shape.

The etching of the cantilever shape or the bridge shape may include etching the piezoelectric material portion and the synthesis electrode along a circumference of the portion where the magnetostrictive material portion is deposited, and depositing the magnetostrictive material portion of the silicon wafer. And etching the portion disposed below the portion.

The manufacturing of the upper plate may include forming a silicon oxide film (SiO ₂ ) on an upper surface and a lower surface of the upper plate, and the position of the magnetoelectric composite corresponding to the size of the hole in the silicon oxide film on the lower surface of the upper plate. Etching the silicon oxide film so that a cavity pattern corresponding to the cavity pattern is formed, wetting the upper plate in the shape of a hole according to the cavity pattern, and removing the silicon oxide film. .

The manufacturing of the upper plate may further include performing double-side polishing (DSP) of the upper plate, and etching the upper plate to form an alignment pattern on the upper plate.

Removing the silicon oxide layer may include depositing titanium / gold (Ti / Au) on the lower surface of the upper plate.

Coupling the upper plate and the wireless charging unit is a step of placing the wireless charging unit on the lower side of the upper plate so as to be placed in a position corresponding to the hole on the plane planar bonding to each other (bonding) Can be.

The manufacturing of the diaphragm may include bonding a wafer SOI having a silicon single crystal layer on an insulating layer to be spaced apart from the magnetoelectric composite on a lower surface of the wireless charging unit, and leaving the silicon single crystal layer as the diaphragm. Separating the insulating layer may include.

The manufacturing of the diaphragm may further include etching the diaphragm so that an alignment pattern is formed on a bottom surface of the diaphragm.

The manufacturing of the lower plate may include forming a groove having a bottom spaced apart from the diaphragm by etching a portion corresponding to the hole in a plane on the upper surface of the lower plate, and forming the lower plate and the upper surface of the groove. Forming an electrode in may include.

The forming of the electrode may include depositing chromium / gold (Cr / Au) on an upper surface of the lower plate and the groove.

The manufacturing of the lower plate may further include depositing upper and lower surfaces of the lower plate with polysilicon (P-Si) before the groove is formed.

The coupling of the diaphragm and the lower plate may be a step of bonding the lower plate to the lower side of the diaphragm so that the electrode is disposed at a portion corresponding to the hole in a plane.

According to the present invention, by combining the magnetoelectric composite and the pressure sensor organically, the wireless charging system is fused to the electrical means for measuring the pressure is more convenient in various industries such as biomedical, disaster prevention, transportation industry, automobiles, power plants Smooth pressure measurements can be made.

In addition, by providing the magneto-electric composite in the shape of the cantilever, it is possible to smoothly transmit pressure to the diaphragm through the hole formed in the upper plate, so that the function of the magneto-electric composite and the function of the pressure sensor unit can be optimally maintained. Can be.

In addition, by manufacturing and combining the wireless charging unit and the pressure sensor unit through the semiconductor process technology, manufacturability and economical efficiency can be secured.

1 is a schematic cross-sectional view of a wireless charging pressure sensor according to an embodiment of the present invention.

2 is an overall flowchart of a method of manufacturing a wireless charging pressure sensor according to an embodiment of the present invention.

3 is a flowchart of a step of manufacturing a wireless charging unit of the wireless charging pressure sensor manufacturing method of FIG.

Figure 4 is a flow chart of the step of manufacturing the upper plate of the wireless charging pressure sensor manufacturing method of Figure 2 and the step of combining the upper plate and the wireless charging unit.

5 is a flowchart of a step of manufacturing a diaphragm of the method for manufacturing a wireless charging pressure sensor of FIG. 2.

6 is a flow chart of the step of manufacturing the bottom plate of the wireless charging pressure sensor manufacturing method of Figure 2 and the step of combining the bottom plate and the diaphragm.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

First, the wireless charging pressure sensor 100 according to an embodiment of the present invention (hereinafter referred to as 'the present wireless charging pressure sensor') is first examined, and then the wireless charging pressure sensor manufacturing method according to an embodiment of the present invention (S100). (Hereinafter referred to as 'the method for manufacturing the wireless charging pressure sensor').

For reference, terms related to the direction (upper, lower, upper, lower, upward, downward, etc.) in the description of the present invention is the present wireless charging pressure sensor 100 and the method of manufacturing the wireless charging pressure sensor shown in the drawing (S100). It is based on the arrangement | positioning state on each structural structure in ()). That is, in various application examples of the present wireless charging pressure sensor 100 or the method of manufacturing the wireless charging pressure sensor (S100), the direction to measure the pressure such that the upper surface is directed downward or the vertical direction is directed to the left and right directions According to the wireless charging pressure sensor 100 may be arranged in various directions.

For example, even if described as a lower side with reference to the drawings, if the wireless charging pressure sensor 100 is disposed upside down on the inner wall of the bladder of the human body can be understood as the upper side, the wireless charging pressure sensor 100 If is inclined to the left side of the bladder inner wall of the human body may be understood to the left side.

1 is a schematic cross-sectional view of a wireless charging pressure sensor according to an embodiment of the present invention. Referring to FIG. 1, the wireless charging pressure sensor 100 includes a wireless charging unit 1, and a pressure sensor unit 2.

First, look at the configuration of the wireless charging unit (1).

Referring to FIG. 1, the wireless charging unit 1 includes a ME composite 11 that generates a voltage according to a magnetic field acting from the outside.

The magnetoelectric composite 11 may include a magnetostrictive material 111 and a piezoelectric material 112. The magnetostrictive material part 111 may convert magnetic energy according to a magnetic field acting from the outside into strain energy, and the piezoelectric material part 112 may be combined with the magnetostrictive material part 111 to be described above. Voltage can be generated through For example, since the magnetostrictive material part 111 and the piezoelectric material part 112 may generate a voltage by a Helmholtz coil, the magnetoelectric composite body 11 may be applied to a medical charging system. .

For reference, the magnetostrictive material of the magnetostrictive material portion 111 may include Terfenol-D, Metglas, and the like, and the piezoelectric material of the piezoelectric material part 112 may be PZT, PMN-PT, or the like.

In addition, the wireless charging unit 1 may further include a charging unit (not shown) for charging the voltage generated by the magnetoelectric composite 11 and supplying the charged voltage to the pressure sensor 21 to be described later. Since the voltage generated in the magnetoelectric composite 11 cannot always be used immediately, the wireless charging unit 1 preferably includes a charging unit.

For example, the charging unit may include a capacitor (or a battery) and a charging circuit. For example, the voltage generated in the magnetoelectric composite 11 by the Helmholtz coil is stored in the capacitor, and may be supplied when the pressure sensor 21 to be described later needs a voltage.

In addition, the wireless charging unit 1 may be disposed between the upper plate 22 and the pressure sensor 21, as shown in Figure 1, the magnetoelectric composite 11 is provided in the shape of a cantilever (cantilever) Can be. This will be described later in more detail while looking at the configuration of the pressure sensor unit 2.

Next, look at the configuration of the pressure sensor unit (2).

Referring to FIG. 1, the pressure sensor unit 2 includes a pressure sensor 21 that senses pressure and is driven according to the above-described supply of voltage. The above-described voltage means a voltage generated by the magnetoelectric composite body 11 according to the magnetic field acting from the outside of the wireless charging unit 1.

As described above, a charging unit may be provided to enable supply of such a voltage to the pressure sensor 21 as needed. The charging unit may be provided in the wireless charging unit 1, but may also be provided in the pressure sensor unit 2.

More specifically, referring to FIG. 1, the pressure sensor 21 includes a diaphragm 211 bent according to pressure, and an electrode 2121 on the upper side thereof, and the electrode 2121 is disposed to be spaced downward from the diaphragm 211. It may include a lower plate (212).

As such, the pressure sensor 21 including the diaphragm 211 and the lower plate 212 on which the electrode 2121 is disposed may be a capacitive pressure sensor. The capacitive pressure sensor is a pressure sensor using a change in capacitance depending on a distance between two objects (electrodes). For example, in FIG. 1, when pressure is applied downwardly from the top of the diaphragm 211, the diaphragm 211 bends according to the pressure to approach the electrode 2121 provided above the lower plate 212. That is, the distance between the diaphragm 211 and the electrode 2121 changes according to the pressure to change the capacitance, thereby measuring the pressure.

In addition, referring to FIG. 1, the pressure sensor unit 2 may further include an upper plate 22 disposed above the pressure sensor 21 and having holes 221 formed in the vertical direction.

When the pressure sensor unit 2 includes the upper plate 22 in which the hole 221 is formed as described above, the pressure sensor 21 may be arranged to detect the pressure acting through the hole 221. As shown in FIG. 1, the electrode 2121 of the lower plate 212 may be disposed in accordance with a portion where the hole 221 of the upper plate 22 is formed. For example, when viewed in a plan view, the electrode 2121 may be included or overlapped in an area where the hole 221 is formed.

At this time, the wireless charging unit 1 may be disposed between the upper plate 22 and the pressure sensor 21 as shown in Figure 1 in the vertical direction. Through this arrangement, the connection between the wireless charging unit 1 and the pressure sensor 21 can be facilitated, and the upper plate 22 or the pressure sensor 21 covers the upper or lower side of the wireless charging unit 1. It can play a role to protect the wireless charging unit 1, in particular the magnetoelectric composite 11, it is possible to minimize the size of the entire device.

However, when the wireless charging unit 1 is disposed between the upper plate 22 and the pressure sensor 21 in this way, when the wireless charging unit 1 obstructs the hole 221 in the middle, the upper plate 22 The pressure acting downward from the top through the hole 221 of the may not be transmitted to the diaphragm 211. Accordingly, even when the wireless charging unit 1 is disposed between the upper plate 22 and the pressure sensor 21, the hole 221 and the plane may transmit the pressure acting on the hole 221 to the diaphragm 211 below. It may include a corresponding hole 12 formed at a position corresponding to the image.

In addition, the magnetoelectric composite 11 of the wireless charging unit 1 may be provided inside the corresponding hole 12 in a shape in which pressure acting through the hole 221 may be transmitted to the diaphragm 211. By arranging the magnetoelectric composite 11 inside the corresponding hole 12 in this manner, it is possible to protect the magnetoelectric composite 11, which is usually provided with a thickness of several um from external direct or indirect contact, without breaking.

For example, when a force is applied to the upper end of the upper plate 22, the force is not directly applied to the wireless charging unit 1, but the force is indirectly transmitted to the upper portion of the wireless charging unit 1 in contact with the upper plate 22. At this time, if the magnetoelectric composite 11 is provided inside the corresponding hole 12 which is not in direct contact with the upper plate 22 as described above, since such a force can hardly be received, such an arrangement may be achieved. Through the magnetoelectric composite 11 can be more stably protected.

In addition, the magnetoelectric composite body 11 may be provided in the shape of a cantilever extending inward from the circumference of the corresponding hole 12. In the magnetoelectric composite 11, a voltage can be generated with such a slight shake of the cantilever shape.

For reference, the shape of the cantilever means that only one end of both ends of the member becomes a fixed end and the other end is left in a free end state, which may be referred to as the shape of the cantilever beam or the inner beam. As shown in FIG. 1, the magnetoelectric composite body 11 is in the shape of a cantilever in which only the left end is fixed and the right end is not fixed.

Since the pressure acting through the hole 221 is generally a pressure applied while the fluid (gas or liquid) enters the inside of the hole 221 while being at a high pressure or exits from the inside of the hole 221 while being at a low pressure, the magnetoelectric Only one point of the composite 11 does not act in the form of a momentary concentrated load. Therefore, in the initial stage when the pressure due to such a fluid starts to act, although the displacement may occur somewhat in the magnetoelectric composite 11 as a whole, the magnetoelectric composite 11 has a cantilever shape, so that the pressure acting through the displacement is applied. It can be easily spilled, and eventually the fluid can reach the diaphragm 211 and transmit its pressure to the diaphragm 211.

In addition, the magnetoelectric composite 11 of the wireless charging unit 1 may be provided in the shape of a bridge across the corresponding hole 12. For reference, the shape of the bridge may be referred to as the shape of the beam on which both ends are supported. As such, when the magnetoelectric composite body 11 is provided in the shape of a bridge, it may not be easily shaken or may be formed in a small width as compared with the case in which the magnetoelectric composite 11 is provided in the shape of a cantilever.

That is, since the magnetoelectric composite 11 can generate a voltage if it can be shaken like a cantilever or a bridge, the magnetoelectric composite 11 is optimal in consideration of the material, thickness, length, etc. used in each configuration of the magnetoelectric composite 11. It is preferable that the magnetoelectric composite body 11 is provided in a shape capable of generating a vibration capable of generating a voltage.

In addition, the hole 221 of the upper plate 22 may be formed so that the cross section cut in the vertical direction is in the shape of a trapezoid with a short upper side. By forming the holes 221 narrowly above, the magnetoelectric composite body 11 may be exposed in a cantilever shape to a wider area than the top of the holes 221 at the bottom of the holes 221. In addition, it can further prevent the foreign matter penetrates into the hole of the wireless charging pressure sensor 100 through this. Particularly, if the wireless charging pressure sensor 100 is manufactured and utilized in a very small size to measure the micro pressure inside the human body, the entrance of the narrowed hole 221 may be a very narrow gap, the hole 221 The

components

11 and 211 located inside of C can be more stably protected.

In an effective aspect, the wireless charging pressure sensor 100 organically combines the magnetoelectric composite 11 and the pressure sensor 21 in one device, the wireless charging system is fused to the electrical means for measuring pressure. It can be used in various industrial fields such as biomedical, disaster prevention, transportation industry, automobile, and power plant. For example, a medical charging system based on a Helmholtz coil can be used to charge an implantable pressure sensor located inside the patient's body without a separate power supply. For reference, when the wireless charging pressure sensor 100 is inserted into the human body and the like, it is preferable to consider a configuration such as a package of a biocompatible material.

In addition, the above-described wireless charging unit 1 and the pressure sensor unit 2 may be manufactured through a semiconductor process technology and combined with each other. Partial manufacturing is possible using the semiconductor process and can be combined with each other, there is an advantage that it is easy to ensure the manufacturability or economical efficiency. In this regard also in the wireless charging pressure sensor manufacturing method (S100).

Below is a look at the wireless charging pressure sensor manufacturing method (S100). However, in the description of the method for manufacturing the wireless charging pressure sensor (S100), for a configuration similar or overlapping with the configuration mentioned in the present wireless charging pressure sensor 100, the same reference numeral used in FIG. 1 is used. The description is briefly omitted or omitted.

Referring to Figure 2, the present wireless charging pressure sensor manufacturing method (S100) is simply, to manufacture the wireless charging unit 1 and the upper plate 22 (S1, S2), respectively, bonding these (1, 22) After bonding (S3) through the (bonding) or the like, the diaphragm 211 is manufactured to be coupled to the bottom of the wireless charging unit 1 (S4), and the lower plate 212 is manufactured (S5), these 211, It relates to a method of manufacturing a wireless charging pressure sensor, such as the wireless charging pressure sensor 100 by bonding (S6) by bonding 212).

More specifically, the method for manufacturing a wireless charging pressure sensor (S100) is a step of manufacturing a wireless charging unit 1 having a magnetoelectric composite (ME composite) 11 for generating a voltage in accordance with a magnetic field acting from the outside (S1), the step of manufacturing the upper plate 22 in which the holes 221 are formed in the vertical direction (S2), the upper plate 22 so that the upper surface of the wireless charging unit 1 abuts on the lower surface of the upper plate 22. Combining the wireless charging unit 1 with (S3), the step of manufacturing a diaphragm 211 bent according to the pressure acting through the hole 221 in the lower side of the wireless charging unit (S4), the electrode (on the upper side) Manufacturing a lower plate 212 having 2121 (S5), and coupling the diaphragm 211 and the lower plate 212 such that the electrode 2121 is spaced downward from the diaphragm 211. .

First, look at the step (S1) to manufacture the wireless charging unit (1).

Referring to FIG. 3, the step S1 of manufacturing the wireless charging unit 1 may include bonding the piezoelectric material 112 to the top surface of the silicon wafer 13 (S11). Thinning the step (112) to provide a piezoelectric material portion 112 (S12), patterning (S13) for the synthesis electrode 113 on the upper surface of the piezoelectric material portion (112), for synthesis Depositing the magnetostrictive material 111 on the upper surface of the patterned portion of the electrode 113 and the exposed upper surface of the piezoelectric material portion 112 to provide the magnetostrictive material portion 111 (S14), and The piezoelectric material portion 112, the patterned portion of the electrode 113 for synthesis, and the magnetostrictive material portion 111 is coupled to each other etching (etching) to be provided in a cantilever shape or a bridge shape (S15) Can be.

Here, PMN-PT may be applied to the piezoelectric material 112. Lead zirconatetitanate (PZT), which has been used as a piezoelectric material for a long time, has not been greatly improved in its properties at this time. PMN-PT is a new material that improves the properties of PZT reaching its limit, and is a solid solution single crystal of relaxor magnesium niobate (PMN) and piezoelectric lead titanate (PT), and shows excellent piezoelectric properties.

In addition, in the step S12 of thinning the piezoelectric material 112 to include the piezoelectric material part 112, a process of polishing and polishing the upper surface of the piezoelectric material part 112 may be performed. The Au IDT electrode may be used as the synthesis electrode 113.

In operation S14 having the magnetostrictive material part 111, the magnetostrictive material 111 may be deposited by sputtering. In addition, terfenol-D may be applied as the magnetostrictive material 111. It is very energy efficient and can be applied to a wide range of applications.

In addition, as shown in Figure 3, the step of etching to be provided in a cantilever shape or a bridge shape (S15) is a piezoelectric material portion 112 and the electrode for synthesis along the circumference of the portion where the magnetostrictive material portion 111 is deposited ( 113 may be etched, and step S152 of etching the portion of the silicon wafer S13 disposed under the portion on which the magnetostrictive material portion 111 is deposited. For example, in order to be etched to have a cantilever shape, the planar shape of the cantilever may be set through step S151, and the silicon wafer may be removed through step S152 to complete the shape of the cantilever.

Next, look at the step (S2) to manufacture the upper plate (22).

Referring to FIG. 4, the manufacturing of the upper plate 22 (S2) includes forming a silicon oxide film (SiO ₂ ) 222 on the upper and lower surfaces of the upper plate 22 (S23) and the upper plate 22. Etching the silicon oxide film 222 such that a cavity pattern corresponding to the size of the hole 221 and corresponding to the position of the magnetoelectric composite 11 is formed in the silicon oxide film 222 of the bottom surface of the bottom surface of the silicon oxide film 222 ( S24), wetting the upper plate 22 into the shape of the hole 221 according to the cavity pattern (S25), and removing the silicon oxide film 222 (S26).

In addition, referring to FIG. 4, the step S2 of manufacturing the upper plate 22 may include a step S21 of double-side polishing (DSP) the upper plate 22. In addition, the manufacturing of the upper plate 22 (S2) may include etching the upper plate 22 to form an alignment pattern on the upper plate 22 (S22). Here, the etching for forming the alignment pattern is a dry etching, it may be made through ICP (Inductively Coupled Plasma).

In addition, in step S24 of etching the silicon oxide layer 222 to form a cavity pattern, dry etching may be performed through RIE (reactive ion etching).

As shown in FIG. 4, the removing of the silicon oxide layer 222 (S26) may include depositing titanium / gold (Ti / Au) on the lower surface of the upper plate 22 (S261). Referring to FIG. 4, the lower surface of the upper plate 22 is a portion contacting with the unpatterned portion of the synthesis electrode 113 of the upper surface of the wireless charging unit 1. The lower surface of the upper plate 22 is mainly used in precision devices and is deposited 223 through titanium having excellent corrosion resistance and harmless to the human body and gold having electrical conductivity, thereby lowering the upper plate 22 and the wireless charging unit 1. The bonding in the bonding S3 of the upper surface, the electrical conductivity of the electrode 113 for synthesis, and the like can be secured.

Next, look at the step (S3) for coupling the upper plate 22 and the wireless charging unit (1).

Referring to FIG. 4, in operation S3, the upper plate 22 and the wireless charging unit 1 may be coupled to each other so that the magnet composite body 11 is positioned at a position corresponding to the hole 221 in plan view. It may be a step of bonding (bonding) after placing the wireless charging unit 1 on the lower side of 22). In addition, the bonding of the upper plate 22 and the wireless charging unit 1 is, for example, as described above, for example, the electrode 113 for synthesizing the titanium / gold deposition unit 223 and the wireless charging unit 1 of the upper plate 22. It can be made by conjugation with. Such bonding may be achieved through eutectic bonding, which is a direct thermal compression method.

Next, look at the step (S4) for manufacturing the diaphragm 211.

Referring to FIG. 5, in operation S4 of manufacturing the diaphragm 211, a wafer (SOI) 200 having a silicon single crystal layer 210 formed on the insulating layer 220 may be placed on the bottom surface of the wireless charging unit 1. Bonding to be spaced apart from the electrical composite (11) (S41), and leaving the silicon single crystal layer 210 as a diaphragm 211, and separating the insulating layer 220 (S42). In this case, such bonding may be performed through an anodic bonding method.

In addition, the step (S4) of manufacturing the diaphragm 211 may further include the step (S43) of etching the diaphragm 211 so that the alignment pattern is formed on the lower surface of the diaphragm 211.

Next, look at the step (S5) to manufacture the lower plate (212).

Referring to FIG. 6, in operation S5 of manufacturing the lower plate 212, the bottom portion spaced apart from the diaphragm 211 may be etched by etching a portion corresponding to the hole 221 in a plane on the upper surface of the lower plate 212. The method may include forming a groove 2122 having an upper surface (S52), and forming an electrode 2121 on an upper surface of the lower plate 212 and the groove 2122 (S53). Here, the lower plate 212 may be provided of a pyrex material.

The forming of the electrode 2121 (S53) may include depositing chromium / gold (Cr / Au) on the upper surfaces of the lower plate 212 and the groove 2122 (S531). Since the electrode 2121 made of only gold has a low deposition force on a surface which is usually glass or silicon, it is possible to use adhesive chromium during deposition.

In addition, in the manufacturing of the lower plate 212 (S5), depositing the upper and lower surfaces of the lower plate 212 with polysilicon (P-Si) 2123 before the grooves 2122 are formed (S51). It may further include.

Since the polysilicon serves to protect the portion that should not be etched from the HF solution or the like (etch stop), the portion to be etched in the step S52 of forming the groove 2122 after the polysilicon 2123 is deposited. Can be removed by patterning. For example, if the lower plate 212 is Pyrex, only the portion without polysilicon may be etched by immersing the lower plate 212 in the HF solution in step S52 of forming the groove 2122. In addition, after the step S52 of forming the grooves 2122 is finished, the step S53 of forming the electrode 2121 after removing all remaining polysilicon may be performed.

Next, look at the step (S6) for coupling the diaphragm 211 and the lower plate 212.

Referring to FIG. 6, in operation S6 of combining the diaphragm 211 and the lower plate 212, the electrode 2121 may be disposed at a lower portion of the diaphragm 211 in a portion corresponding to the hole 221 in plan view. The lower plate 212 may be disposed and then bonded to each other. In this case, such bonding may be performed through an anodic bonding method.

Although the embodiments of the present invention have been described above, the scope of the present invention is not limited thereto, and the present invention is easily changed and equivalent to those of ordinary skill in the art to which the present invention pertains. Includes all changes and modifications to the scope of the matter.

The present invention relates to a wireless charging pressure sensor can be applied to pressure sensors in various fields, such as the medical field, automotive field, there is industrial applicability.

Claims

Wireless charging unit having a ME composite that generates a voltage according to the magnetic field acting from the outside, and

Wireless charging pressure sensor comprising a pressure sensor unit for detecting the pressure and having a pressure sensor driven in accordance with the supply of the voltage.
In claim 1,

The pressure sensor

A diaphragm bent according to the pressure, and

Wireless charging pressure sensor having an electrode on the upper side and a lower plate disposed so that the electrode is spaced downward from the diaphragm.
In claim 1,

The magnetoelectric composite is

A magnetostrictive material unit for converting magnetic energy according to the magnetic field acting from the outside into strain energy, and

And a piezoelectric material portion synthesized with the magnetostrictive material portion to generate the voltage through the strain energy.
In claim 1,

The wireless charging unit and the pressure sensor unit is a wireless charging pressure sensor manufactured through a semiconductor process technology and coupled to each other.
In claim 1,

The wireless charging unit further comprises a charging unit for charging the voltage generated by the magnetoelectric composite and supplying the charged voltage to the pressure sensor.
The method according to any one of claims 1 to 5,

The pressure sensor unit further comprises an upper plate which is disposed on the upper side of the pressure sensor and the hole is formed in the vertical direction,

The pressure sensor is a wireless charging pressure sensor for sensing the pressure acting through the hole.
In claim 6,

The wireless charging unit is a wireless charging pressure sensor disposed between the upper plate and the pressure sensor.
In claim 7,

The wireless charging unit is a wireless charging pressure sensor including a corresponding hole formed in a position corresponding to the plane in the plane.
In claim 8,

The magnetoelectric composite is a wireless charging pressure sensor is provided on the inside of the corresponding hole in the shape that the pressure acting through the hole can be transmitted to the diaphragm.
In claim 9,

The magnetoelectric composite is a wireless charging pressure sensor provided in the shape of a cantilever (cantilever) extending inward from the circumference of the corresponding hole.
In claim 9,

The magnetoelectric composite is a wireless charging pressure sensor provided in the shape of a bridge (cross) across the corresponding hole.
In claim 6,

The hole is a wireless charging pressure sensor is formed so that the cross-section cut in the vertical direction is short trapezoidal shape of the upper side.
Manufacturing a wireless charging unit having a ME composite that generates a voltage according to a magnetic field acting from the outside,

Manufacturing an upper plate in which holes are formed in the vertical direction;

Coupling the upper plate and the wireless charging unit to abut the upper surface of the wireless charging unit on a lower surface of the upper plate;

Manufacturing a diaphragm that is bent under pressure acting through the hole at the lower side of the wireless charging unit;

Manufacturing a lower plate having an electrode thereon, and

And coupling the diaphragm and the lower plate such that the electrode is spaced downward from the diaphragm.
In claim 13,

The step of manufacturing the wireless charging unit

Bonding a piezoelectric material to a top surface of a silicon wafer;

Thinning the piezoelectric material to provide a piezoelectric material portion;

Patterning a synthesis electrode on an upper surface of the piezoelectric material portion;

Depositing a magnetostrictive material on an upper surface of the patterned portion of the synthesis electrode and an exposed top surface of the piezoelectric material portion to provide a magnetostrictive material portion; and

And etching the piezoelectric material portion, the patterned portion of the synthesis electrode, and the magnetostrictive material portion to be coupled to each other to be provided in a cantilever shape or a bridge shape.
The method of claim 14,

Etching so as to have a cantilever shape or a bridge shape

Etching the piezoelectric material portion and the synthesis electrode along a circumference of the portion where the magnetostrictive material portion is deposited; and

And etching the portion of the silicon wafer disposed under the portion in which the magnetostrictive material portion is deposited.
In claim 13,

The manufacturing of the upper plate

Forming a silicon oxide film (SiO 2 ) on the top and bottom surfaces of the upper plate;

Etching the silicon oxide film so that a cavity pattern corresponding to the size of the hole and corresponding to the position of the magnetoelectric composite is formed in the silicon oxide film on the lower surface of the upper plate;

Wetting the upper plate in the shape of a hole according to the cavity pattern, and

Wireless charging pressure sensor manufacturing method comprising the step of removing the silicon oxide film.
The method of claim 16,

The manufacturing of the upper plate

Polishing the upper plate on both sides (DSP), and

And etching the upper plate such that an alignment pattern is formed on the upper plate.
The method of claim 16,

Removing the silicon oxide film is a wireless charging pressure sensor manufacturing method comprising the step of depositing a titanium / gold (Ti / Au) on the lower surface of the upper plate.
19. The method of any of claims 13-18,

Coupling the upper plate and the wireless charging unit is a step of placing the wireless charging unit on the lower side of the upper plate so as to be placed in a position corresponding to the hole on the plane planar bonding to each other (bonding) Wireless charging pressure sensor manufacturing method.
In claim 13,

The step of manufacturing the diaphragm

Bonding a wafer (SOI) having a silicon single crystal layer on an insulating layer to be spaced apart from the magnetoelectric composite on the bottom surface of the wireless charging unit, and

Leaving the silicon single crystal layer as the diaphragm and separating the insulating layer.
The method of claim 20,

The step of manufacturing the diaphragm

And etching the diaphragm so that an alignment pattern is formed on the bottom surface of the diaphragm.
In claim 13,

The manufacturing of the lower plate

Forming a groove having a bottom spaced apart from the diaphragm by etching a portion corresponding to the hole in a plane on an upper surface of the lower plate, and

Wireless charging pressure sensor manufacturing method comprising the step of forming an electrode on the upper surface of the lower plate and the groove.
The method of claim 22,

Forming the electrode comprises a step of depositing chromium / gold (Cr / Au) on the upper surface of the lower plate and the groove.
The method of claim 22,

The manufacturing of the lower plate further comprises depositing the upper and lower surfaces of the lower plate with polysilicon (P-Si) before the groove is formed.
The method according to any one of claims 13 and 20 to 24,

Coupling the diaphragm and the lower plate is a wireless charging pressure sensor that is the step of placing the lower plate on the lower side of the diaphragm so as to arrange the electrode in a portion corresponding to the hole and the plane and bonding (bonding) to each other. Manufacturing method.