WO2012098160A1 - Protection jetable pour dispositifs micro-usinés - Google Patents
Protection jetable pour dispositifs micro-usinés Download PDFInfo
- Publication number
- WO2012098160A1 WO2012098160A1 PCT/EP2012/050715 EP2012050715W WO2012098160A1 WO 2012098160 A1 WO2012098160 A1 WO 2012098160A1 EP 2012050715 W EP2012050715 W EP 2012050715W WO 2012098160 A1 WO2012098160 A1 WO 2012098160A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- protection structure
- functional structure
- substrate
- micromachined
- anchoring mechanism
- Prior art date
Links
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N1/00—Electrotherapy; Circuits therefor
- A61N1/02—Details
- A61N1/04—Electrodes
- A61N1/05—Electrodes for implantation or insertion into the body, e.g. heart electrode
- A61N1/0526—Head electrodes
- A61N1/0529—Electrodes for brain stimulation
- A61N1/0531—Brain cortex electrodes
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N1/00—Electrotherapy; Circuits therefor
- A61N1/02—Details
- A61N1/04—Electrodes
- A61N1/05—Electrodes for implantation or insertion into the body, e.g. heart electrode
- A61N1/0551—Spinal or peripheral nerve electrodes
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/02—Details of sensors specially adapted for in-vivo measurements
- A61B2562/028—Microscale sensors, e.g. electromechanical sensors [MEMS]
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements
- A61B2562/125—Manufacturing methods specially adapted for producing sensors for in-vivo measurements characterised by the manufacture of electrodes
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0046—Solid microneedles
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0053—Methods for producing microneedles
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- Heart & Thoracic Surgery (AREA)
- Veterinary Medicine (AREA)
- Biomedical Technology (AREA)
- Public Health (AREA)
- Neurology (AREA)
- Neurosurgery (AREA)
- Radiology & Medical Imaging (AREA)
- Medical Informatics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Cardiology (AREA)
- Hematology (AREA)
- Dermatology (AREA)
- Anesthesiology (AREA)
- Psychology (AREA)
- Orthopedic Medicine & Surgery (AREA)
- Physics & Mathematics (AREA)
- Biophysics (AREA)
- Pathology (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Micromachines (AREA)
Abstract
L'invention concerne un dispositif (100) comprenant une structure fonctionnelle (101) qui doit être partiellement exposée et donc mécaniquement non protégée pendant son utilisation. La structure fonctionnelle exposée fait partie d'un dispositif micro-usiné comprenant également une partie qui est montée et protégée par un boîtier électronique (102). Une structure de protection micro-usinée (103) est fixée à la structure fonctionnelle via au moins un mécanisme d'ancrage (104). La structure de protection (103) peut être détachée par rupture du mécanisme d'ancrage (104). L'invention concerne également un procédé de fabrication dudit dispositif (100).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161433847P | 2011-01-18 | 2011-01-18 | |
US61/433,847 | 2011-01-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2012098160A1 true WO2012098160A1 (fr) | 2012-07-26 |
Family
ID=45562977
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2012/050715 WO2012098160A1 (fr) | 2011-01-18 | 2012-01-18 | Protection jetable pour dispositifs micro-usinés |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2012098160A1 (fr) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2535602A1 (fr) * | 1982-11-05 | 1984-05-11 | Stallergenes Lab | Dispositif scarificateur |
US5591139A (en) | 1994-06-06 | 1997-01-07 | The Regents Of The University Of California | IC-processed microneedles |
US6010461A (en) * | 1998-09-01 | 2000-01-04 | Sitek, Inc. | Monolithic silicon intra-ocular pressure sensor and method therefor |
US20080167601A1 (en) * | 2006-08-30 | 2008-07-10 | Franz Laermer | Microneedles to be placed in the skin for the transdermal application of pharhmaceuticals |
DE102008057822A1 (de) * | 2008-11-18 | 2010-05-20 | HSG-IMIT-Institut für Mikro- und Informationstechnik der Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Vorrichtung zur Aufbewahrung und dermalen Verabreichung einer Substanz |
WO2010140760A2 (fr) * | 2009-06-02 | 2010-12-09 | Miti Systems Inc. | Système de timbre à micro-aiguilles, souple et procédé de fabrication correspondant |
-
2012
- 2012-01-18 WO PCT/EP2012/050715 patent/WO2012098160A1/fr active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2535602A1 (fr) * | 1982-11-05 | 1984-05-11 | Stallergenes Lab | Dispositif scarificateur |
US5591139A (en) | 1994-06-06 | 1997-01-07 | The Regents Of The University Of California | IC-processed microneedles |
US6010461A (en) * | 1998-09-01 | 2000-01-04 | Sitek, Inc. | Monolithic silicon intra-ocular pressure sensor and method therefor |
US20080167601A1 (en) * | 2006-08-30 | 2008-07-10 | Franz Laermer | Microneedles to be placed in the skin for the transdermal application of pharhmaceuticals |
DE102008057822A1 (de) * | 2008-11-18 | 2010-05-20 | HSG-IMIT-Institut für Mikro- und Informationstechnik der Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Vorrichtung zur Aufbewahrung und dermalen Verabreichung einer Substanz |
WO2010140760A2 (fr) * | 2009-06-02 | 2010-12-09 | Miti Systems Inc. | Système de timbre à micro-aiguilles, souple et procédé de fabrication correspondant |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7338836B2 (en) | Method for integrating pre-fabricated chip structures into functional electronic systems | |
CN105632985B (zh) | 元件的转移方法 | |
EP2871455B1 (fr) | Capteur de pression | |
EP1167281A3 (fr) | Assemblage à l'échelle d'une puce pour montage en surface pour des dispositifs électroniques et des MEMS | |
EP1776313B1 (fr) | Procede de production d'un dispositif a microsysteme electromecanique | |
TW201027641A (en) | Electronic device package and fabrication method thereof | |
US20110031565A1 (en) | Micromachined devices and fabricating the same | |
US8087152B2 (en) | Manufacturing method of an electromechanical transducer | |
JP2009515338A5 (fr) | ||
WO2004035461A2 (fr) | Procedes de fabrication et dispositifs a systemes mecaniques microelectriques ou a micro-usinage emballe hermetiquement ou sous vide formes a partir des procedes de fabrication et possedant des trous d'interconnexion sensiblement verticaux | |
WO2010068515A2 (fr) | Dispositifs électroniques incluant des circuits électriques flexibles et procédés connexes | |
US20040256686A1 (en) | Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained | |
EP2446478A2 (fr) | Enveloppe biocompatible | |
US20090085194A1 (en) | Wafer level packaged mems device | |
WO2014022558A1 (fr) | Procédé de fabrication de dispositifs flexibles, pliables et étirables | |
US20180233470A1 (en) | Handling thin wafer during chip manufacture | |
EP2202791B1 (fr) | Procédé de fabrication des "deep through vias" dans un composant semi-conducteur | |
US9209047B1 (en) | Method of producing encapsulated IC devices on a wafer | |
US20090313808A1 (en) | Electromechanical transducer and fabrication method of electromechanical transducing apparatus | |
CN108117034B (zh) | Mems组件及其制造方法 | |
WO2012098160A1 (fr) | Protection jetable pour dispositifs micro-usinés | |
US7323355B2 (en) | Method of forming a microelectronic device | |
WO2018227308A1 (fr) | Dispositifs inertiels à intégration au niveau de la galette de masses étalons à densité supérieure et procédé de fabrication | |
US20090139749A1 (en) | Method For The Preparation Of A Flexible Transducer Unit, The Flexible Transducer Unit So Prepared And An Array Containing Such Flexible Transducer Units | |
CN105378910A (zh) | 用于形成晶片的背面处理的对准特征的装置和方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 12702453 Country of ref document: EP Kind code of ref document: A1 |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 12702453 Country of ref document: EP Kind code of ref document: A1 |