WO2012096429A1

WO2012096429A1 - Cylindrical mould assembly for forming a nano/micro pattern

Info

Publication number: WO2012096429A1
Application number: PCT/KR2011/003648
Authority: WO
Inventors: 채주현; 허지원
Original assignee: (주)뉴옵틱스
Priority date: 2011-01-13
Filing date: 2011-05-17
Publication date: 2012-07-19
Also published as: KR20120082124A; KR101186993B1

Abstract

The present invention relates to a cylindrical mould assembly for forming a nano/micro pattern, and more specifically the invention relates to a cylindrical mould assembly for forming a nano/micro pattern, wherein end boss caps adapted to play the role of a shaft are inserted into side-surface parts on both sides of a cylindrical mould adapted to form a nano- or micro pattern, such that an internal space is formed in the cylindrical mould, thereby making it possible to reduce the weight of the cylindrical mould assembly and to prevent coating solution from penetrating via the side surface parts of the cylindrical mould and contaminating the main rivet holes or bolt taps. A feature of the cylindrical mould assembly for forming a nano pattern of the present invention is that it is a cylindrical mould assembly for forming a nano/micro pattern, wherein the assembly comprises a cylindrical mould having a through-hole mutually passing through the side surfaces on both sides and comprises two end boss caps comprising shaft parts formed with a bumpy (convex) shape for insertion into the through hole, and wherein the cylindrical mould and the end boss caps are made of an aluminium material.

Description

Cylindrical mold assembly for nano / micro pattern formation

The present invention relates to a cylindrical mold assembly for forming a nano / micro pattern, and more particularly to insert an end boss cap for the role of a shaft on both sides of the cylindrical mold for forming a nano or micro pattern to form an internal space in the cylindrical mold The present invention relates to a cylindrical mold assembly for forming a nano / micro pattern, thereby lowering the weight of the cylindrical mold assembly and preventing penetration of the plating liquid through the side surface of the cylindrical mold, and contamination of the main rivet hole or the bolt tab.

As a general exposure process in semiconductors and displays, not only the basic processes such as deposition, exposure (mask), development, and etching have to be repeated several times or dozens of times, but also ultra-precision printing in nanometers cannot be realized. In order to print, the plate was imprinted on a small substrate using a flat die engraved with a nano pattern through a flat plate imprint process.

When the flat printing process is applied to a large area, a problem arises in that the uniformity of the pattern and the manufacturing cost increase, and a nano printing process using a cylindrical mold is currently applied. Therefore, the nano printing process using the cylindrical mold is easy to secure the uniformity of the pattern when applying a large area, there is an advantage in large area using the seamless cylindrical mold.

1 is an assembly and configuration of a cylindrical mold according to the prior art. As shown in FIG. 1, (a) shows a conventional cylindrical mold 110 and a shaft 120 inserted into the conventional cylindrical mold 110.

Both end boss portions of the conventional cylindrical mold 110 are formed to protrude in a step shape with a diameter smaller than the diameter of the conventional cylindrical mold 110, and inserted into the interior of the conventional cylindrical mold 110 on the outer circumferential surface of both end boss portions. One or more rivet holes 111 for fixing the shaft 120 are formed. That is, in the conventional cylindrical mold 110, the shaft 120 is inserted through both side portions, and the inserted shaft 120 has at least one rivet hole 111 formed at both end boss portions of the conventional cylindrical mold 110. The shaft 120 may be fixed by inserting a rivet or a bolt into the rivet.

(b) shows the state in which the shaft 120 is inserted into the conventional cylindrical mold 110. The shaft 120 inserted into the conventional cylindrical mold 110 is fixed by inserting a rivet or bolt into one or more rivet holes 111.

(c) inserts a rivet or bolt into one or more rivet holes 111 formed in both end boss portions of the conventional cylindrical mold 110 after the shaft 120 is inserted into the conventional cylindrical mold 110. Thus, the shaft 120 is fixed and the masking 112 is formed in the rivet hole 111 in both end boss portions. Masking 112 of the end boss portion is preferably treated with taping or silicon.

The assembly of the conventional cylindrical mold 110 for forming the nano-pattern is inserted into the shaft 120 in the conventional cylindrical mold 110 and after processing the masking 112 of the end boss portion, the plating solution on the side of both end boss portion In order to prevent the penetration of the back, but masked with silicon, etc., the side of the end boss portion is difficult to complete the silicon sealing work, the plating liquid can penetrate inside, there is a problem that rework is difficult when the silicon work is wrong.

In addition, after the plating of the assembly of the conventional cylindrical mold 110 is completed, there is a problem that it is difficult to completely remove the silicon sealed on the end boss portion side.

In addition, the conventional cylindrical mold 110 assembly, the shaft 120 is inserted into the conventional cylindrical mold 110, when the plating is performed by hand due to the heavy weight using a stainless material, the worker is easy to work There is a difficult problem.

The present invention devised to solve the problems of the prior art as described above, without inserting the shaft in the cylindrical mold, by inserting and fixing the end boss caps on both end boss portions of the cylindrical mold, respectively, for forming a nano or micro pattern It is an object to reduce the weight of the mold assembly to facilitate the plating operation of the cylindrical mold and the like.

In addition, the present invention has another object of making the cylindrical mold and the end boss cap inserted into both end boss portions of the cylindrical mold made of aluminum to reduce the overall weight of the cylindrical mold assembly to facilitate the plating operation of the cylindrical mold. .

In addition, another object of the present invention is to easily prevent the plating solution from penetrating into the cylindrical mold by inserting and fixing the end boss caps to both end boss portions of the cylindrical mold without inserting the shaft in the cylindrical mold. have.

In addition, the present invention is to complete the cylindrical mold assembly through a simple working process of inserting and fixing the end boss cap to both end boss portions of the cylindrical mold, respectively, and completing the cylindrical mold assembly by taping or siliconizing the end boss portion. Another goal is to shorten the working time for this.

In addition, the present invention has another object that can prevent the insertion of impurities such as silicon in the plating liquid by inserting and fixing the end boss cap to each end boss portion of the cylindrical mold.

In addition, the present invention has another object to eliminate the inconvenience, such as conventional silicon removal work by inserting and fixing the end boss cap to each end boss portion of the cylindrical mold.

In addition, the present invention has another object to prevent the contamination or breakage of the rivet holes, bolt tabs and the like provided on both end boss portions by inserting and fixing the end boss caps on both end boss portions of the cylindrical mold.

The object of the present invention is a cylindrical mold assembly for forming a nano-pattern, comprising a cylindrical mold having a through-hole penetrating both sides and a shaft portion formed in a concave-convex shape to be inserted into the through-hole Comprising two end boss caps, the cylindrical mold and the material of the end boss cap is achieved by a cylindrical mold assembly for forming a nano pattern, characterized in that the aluminum material.

Therefore, the cylindrical mold assembly for forming a nano-pattern of the present invention is a cylindrical mold assembly for forming a nano or micro pattern by inserting and fixing the end boss caps on both end boss portions of the cylindrical mold, respectively, without inserting a shaft into the cylindrical mold. By reducing the weight of the light and there is an effect that can facilitate the plating operation of the cylindrical mold.

In addition, the present invention is made of an aluminum material of the cylindrical mold and the end boss cap inserted into both end boss portions of the cylindrical mold made of aluminum material to reduce the overall weight of the cylindrical mold assembly to facilitate the plating operation of the cylindrical mold, etc. There is.

In addition, the present invention is another effect that can easily prevent the plating liquid penetrates into the cylindrical mold by inserting and fixing the end boss caps on both side end boss portions of the cylindrical mold without inserting the shaft in the cylindrical mold. There is.

In addition, the present invention is to complete the cylindrical mold assembly through a simple working process of inserting and fixing the end boss cap to both end boss portions of the cylindrical mold, respectively, and completing the cylindrical mold assembly by taping or siliconizing the end boss portion. There is another effect that can reduce the working time for.

In addition, the present invention has another effect that can prevent the insertion of impurities such as silicon in the plating liquid by inserting and fixing the end boss cap to each end boss portion of the cylindrical mold.

In addition, the present invention has another effect that can eliminate the inconvenience, such as conventional silicon removal work by inserting and fixing the end boss cap to each end boss portion of the cylindrical mold.

In addition, the present invention has another effect that can prevent the contamination or damage of rivet holes, bolt tabs, etc. provided on both end boss portion by inserting and fixing the end boss cap to each end boss portion of the cylindrical mold. .

1 is an assembly and configuration of the cylindrical mold according to the prior art,

2 is a detailed configuration diagram of a cylindrical mold assembly according to the present invention;

3 is an exploded view of the assembly of the cylindrical mold assembly according to the present invention;

Figure 4 is a configuration of the mirror surface of the cylindrical mold assembly according to an embodiment of the present invention.

The terms or words used in this specification and claims are not to be construed as being limited to their ordinary or dictionary meanings, and the inventors may appropriately define the concept of terms in order to best describe their invention. It should be interpreted as meaning and concept corresponding to the technical idea of the present invention based on the principle that the present invention.

Therefore, the embodiments described in the specification and the drawings shown in the drawings are only the most preferred embodiment of the present invention and do not represent all of the technical idea of the present invention, various modifications that can be replaced at the time of the present application It should be understood that there may be equivalents and variations.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a detailed block diagram of a cylindrical mold assembly according to the present invention. As shown in FIG. 2, (a) shows a cylindrical mold 210 and two endboss caps 220-a and 220-b constituting the cylindrical mold assembly 200. The cylindrical mold assembly 200 consists of a cylindrical mold 210 and two end boss caps 220-a and 220-b, a cylindrical mold 210 and two end boss caps 220-a and 220-b. ) Is preferably formed of aluminum to reduce the overall weight of the cylindrical mold assembly 200.

Both end boss portions 211-a and 211-b of the cylindrical mold 210 are formed in an uneven shape with a diameter smaller than the diameter of the cylindrical mold 210 and are integrally formed with the cylindrical mold 210.

In addition, the two end boss caps 220-a and 220-b are provided with shaft portions 221-a and 221-b, respectively, which are formed in an uneven shape. At least one fastening hole 212 is formed on an outer circumferential surface of the 211-b) to fix the shaft portions 221-a and 221-b inserted into the cylindrical mold 210. That is, the cylindrical mold 210 is inserted into the shaft portion (221-a, 221-b) provided in each of the two end boss caps (220-a, 220-b) through both side portions, each end inserted The boss caps 220-a and 220-b are fixed by inserting rivets or bolts into one or more fastening holes 212 formed in both end boss portions 211-a and 211-b of the cylindrical mold 210. . Meanwhile, the two end boss caps 220-a and 220-b and the shaft parts 221-a and 221-b provided in the respective end boss caps 220-a and 220-b are integrally formed. desirable.

The end boss portions 211-a and 211-b of both sides of the cylindrical mold 210 form a through hole therein, and each shaft portion 221-a and 221-b is formed through the formed through hole. Can be inserted. The shaft portions 221-a and 221-b serve as conventional shafts, but the shaft portions (through the through-holes of the end boss portions 211-a and 211-b formed on both sides of the cylindrical mold 210). When 221-a and 221-b are inserted, a closed space is created inside the cylindrical mold 210. By forming such a sealed space, the overall weight of the cylindrical mold assembly 200 can be reduced in weight.

(b) shows one side view of the cylindrical mold 210, and both end boss portions 211-a and 211-b of the cylindrical mold 210 have a diameter shorter than a diameter of the cylindrical mold 210. The convex and concave shape is formed, and at least one fastening hole 212 is drilled in the outer circumferential surface of both end boss portions 211-a and 211-b. The fastening holes 212 are rivets or bolts, etc. to fix the respective shaft portions 221-a and 221-b inserted into the cylindrical mold 210 through both end boss portions 211-a and 211-b. Combine the respective shaft portion (221-a, 221-b) provided in the cylindrical mold 210 and the end boss cap (220-a, 220-b) using.

(c) shows one side view of the end boss caps 220-a and 220-b, and the end boss caps 220-a and 220-b are both end boss portions 211-a of the cylindrical mold 210. And each shaft portion 221-a and 221-b formed in a concave-convex shape so as to be inserted into 211-b. The shaft portions 221-a and 221-b inserted into both end boss portions 211-a and 211-b of the cylindrical mold 210 may have both end boss portions 211-a and 211 of the cylindrical mold 210. -b) is a cylindrical shape formed of a diameter that can be inserted into the through-hole penetrating to each other, the overall diameter of the end boss cap (220-a, 220-b) is formed to be the same as the diameter of the cylindrical mold (210) It is desirable to be.

3 is an exploded view of the assembly of the cylindrical mold assembly according to the present invention. As shown in (a) of FIG. 3, both end boss portions 211-a and 211-b of the cylindrical mold 210 penetrate each other to form through holes, and both ends of the cylindrical mold 210 are formed. The shafts 221-a and 221-b provided in the two end boss caps 220-a and 220-b are inserted into the through holes of the bosses 211-a and 211-b, respectively.

Both end boss portions of the cylindrical mold 210 are formed on the outer circumferential surfaces of the uneven shaft portions 221-a and 221-b inserted into the through holes in the respective end boss caps 220-a and 220-b. Fastening grooves 222 corresponding to the fastening holes 211 formed at 211-a and 211-b are formed. That is, the shaft portions 221-a and 221-b inserted into the through holes of both end boss portions 211-a and 211-b of the cylindrical mold 210 are end boss portions 211-a and 211-b. The fastening part 213 is inserted into the fastening hole 212 provided in at least one) and is coupled with the fastening groove 222 provided in the shaft parts 221-a and 221-b. At this time, the fastening part 213 is composed of a rivet or bolt, it is preferable that the fastening hole 212 is inserted into the fastening groove 222 is located to match.

(b) is a shaft portion (221-a, 221) provided in the end boss cap (220-a, 220-b) in the through-holes of the cylindrical mold (210) and both end boss portions (211-a, 211-b). -b) is inserted, and the fastening hole 212 and the fastening groove 222 are shown coupled to the fastening portion 213.

The fastening holes 212 and the fastening grooves 222 provided to be parallel to the fastening holes 212 provided in at least one end boss portion 211-a and 211-b on both sides of the cylindrical mold 210 are mutual holes. The groove and the groove are preferably matched, and the shaft portion 221 inserted into the cylindrical mold 210 and the both end boss portions 211-a and 211-b by inserting the coupling portion 213 through the coupling hole 212. -a, 221-b).

(c) the respective end boss caps 220-a and 220-b are coupled to both end boss portions 211-a and 211-b of the cylindrical mold 210, and then both end boss portions 211-2 are combined. The sealing part 230 which seal-sealed the fastening hole 212 or the fastening part 213 etc. which were exposed to the outer peripheral surface of a, 211-b) is shown.

The sealing portions 230 of both end boss portions 211-a and 211-b of the cylindrical mold 210 may be treated with tape or silicon, and the surface of the sealing portion 230 may be formed of the cylindrical mold 210. It is preferable to form the same height as the outer circumferential surface or lower than the outer circumferential surface of the cylindrical mold 210.

Figure 4 is a configuration of the mirror surface of the cylindrical mold assembly according to an embodiment of the present invention. As shown in FIG. 4, the cylindrical mold assembly 200 uses a cylindrical mold having a diameter of 100 to 300 mm and a length of 300 to 1,200 mm, but may vary in size depending on an object for forming a nano or micro pattern. It is not limited to this.

The cylindrical mold of aluminum material having the above specifications is subjected to heat treatment after electroless nickel plating so that a nickel (Ni) layer having a phosphorus (P) content of 8 to 20wt% is formed on the surface, and then heat treatment is performed. It is preferable that the surface hardness of the cylindrical mold is 600 to 950 Hv.

On the other hand, the nickel (Ni) -phosphorus (P) film thickness of the electroless nickel plated cylindrical mold is preferably maintained at 100 to 300㎛.

The mirror surface treatment step is carried out divided into lapping process and polishing process, each process is performed in the machine tool, the lapping process of the alumina (AL203) lapping film 500 having a size of 30㎛ to 1㎛ size 5 to 7 kinds of different particle size alumina (AL203) wrapping film 500 is selected and carried out in three to eight steps in order of smallest particle size.

In addition, the polishing process selects three to five kinds of different particle size diamond suspensions 600 among diamond suspensions 600 having a particle size of 3 μm to 0.05 μm, respectively, from 25 to 25 in order of decreasing particle size. Step by step for 35 minutes.

Mirror processing of the cylindrical mold assembly 200 may be performed in a lapping process and a polishing process. The end boss caps coupled to the left and right ends of the cylindrical mold assembly 200 may include the spindle 300 and the rotation center 400 of the machine tool. The cylindrical mold assembly 200 is rotated by the spindle in a state of being clad in each of the), and the lapping film 500 of the lapping process and the diamond suspension 600 of the polishing process are cylindrical molds using the fixing member 700. The process is performed by linearly reciprocating the left and right while being in close contact with the surface of the.

The alumina (AL203) lapping film 500 used in the lapping process and the diamond suspension 600 used in the polishing process may all be regarded as one type of polishing pad.

Meanwhile, aluminum, which is a material of the cylindrical mold assembly, is preferably used to pursue the weight reduction of the material by using any one selected from material symbols AL6061-0, AL6061-T4, AL6061-T6, AL7050-0, and AL7050-T6. The larger the size, the lighter the material can provide the greater expected effect.

In the present invention, the cutting oil supply method and the number of revolutions of the spindle 300 in the plating thickness and mirror processing stages may be obtained by repeating the process by obtaining the best method by any person having ordinary machine tool operating knowledge according to the working conditions. can do.

Although the present invention has been shown and described with reference to the preferred embodiments as described above, it is not limited to the above embodiments and those skilled in the art without departing from the spirit of the present invention. Various changes and modifications will be possible.

Claims

A cylindrical mold assembly for nano / micro pattern formation,

A cylindrical mold having a through hole penetrating both sides; And

Two end boss cap including a shaft portion formed in the concave-convex shape for insertion into the through hole

It is configured to include, the cylindrical mold and the cylindrical mold assembly for forming a nano / micro pattern, characterized in that the material of the end boss cap is an aluminum material.
The method of claim 1,

Both sides of the cylindrical mold includes an end boss portion formed in a concave-convex shape having a diameter smaller than a diameter of the cylindrical mold, and the cylindrical mold and the end boss portion are formed in one nano / micro pattern. Cylindrical mold assembly.
The method of claim 2,

Nano / micro pattern formation on the outer circumferential surface of the end boss portion includes one or more fastening holes penetrating the inside of the end boss portion in the direction of the central axis of the cylindrical mold to couple the end boss cap to the cylindrical mold. Cylindrical mold assembly.
The method of claim 3, wherein

At least one fastening hole secures the shaft part to the cylindrical mold by using a fastening part, wherein the fastening part is a rivet or a bolt.
The method of claim 1,

The shaft portion of the end boss cap is inserted into the through hole, the cylindrical mold assembly for forming a nano-micro pattern, characterized in that the outer peripheral surface of the shaft portion includes one or more fastening groove for coupling with the cylindrical mold.
The method of claim 1,

When the cylindrical mold and the end boss cap is coupled, the cylindrical mold assembly for forming a nano / micro pattern, characterized in that it further comprises a sealing portion for filling both end boss portions exposed from the cylindrical mold.
The method of claim 6,

The cylindrical mold assembly for forming a nano / micro pattern, characterized in that the sealing portion is tape or silicon.
The method of claim 1,

The end boss cap and the shaft portion is a cylindrical mold assembly for forming a nano / micro pattern, characterized in that formed in one piece.
The method of claim 1,

Surface of the cylindrical mold is a cylindrical mold assembly for nano / micro pattern formation, characterized in that the electroless nickel plating treatment to form a nickel (Ni) layer having a phosphorus (P) content of 8 to 20 wt%.
The method of claim 9,

Nickel (Ni) -phosphorus (P) film thickness of the surface of the cylindrical mold electroless nickel plated is about 100 to 300㎛ cylindrical mold assembly for nano / micro pattern formation.
The method of claim 9,

And performing heat treatment so that the surface hardness of the electroless nickel plated cylindrical mold becomes 600 to 950 Hv.