WO2012080381A1 - Piézoactionneur - Google Patents

Piézoactionneur Download PDF

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Publication number
WO2012080381A1
WO2012080381A1 PCT/EP2011/072855 EP2011072855W WO2012080381A1 WO 2012080381 A1 WO2012080381 A1 WO 2012080381A1 EP 2011072855 W EP2011072855 W EP 2011072855W WO 2012080381 A1 WO2012080381 A1 WO 2012080381A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric actuator
metal coating
wire
coatings
layer
Prior art date
Application number
PCT/EP2011/072855
Other languages
German (de)
English (en)
Inventor
Alexander Hedrich
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2012080381A1 publication Critical patent/WO2012080381A1/fr

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/03—Assembling devices that include piezoelectric or electrostrictive parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H10N30/063—Forming interconnections, e.g. connection electrodes of multilayered piezoelectric or electrostrictive parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure

Definitions

  • the invention relates to a piezoelectric actuator, as used in particular for the placement of valves and other movable elements in automotive technology.
  • the piezoelectric actuator When used in a control valve of a fuel injection valve that includes a with a movable valve member, the piezoelectric actuator must be able to perform a certain minimum stroke. Since the stroke of the piezoelectric actuator is usually not more than one to two parts per thousand of the total length of the piezoelectric crystal, a relatively long piezoelectric actuator must be used. However, for the optimum deflection, it is then necessary to apply a relatively high electrical voltage, since the mechanical expansion of the piezoelectric actuator increases substantially linearly with the electrical voltage. In order to achieve the required electric field strengths within the piezoelectric actuator, without the electrical voltage is too high, the piezoelectric actuator is usually composed of several layers.
  • a layer electrode that is to say a metallic electrode, is present. layer
  • the layer electrodes are mutually contacted electrically and applied an opposite electrical voltage, so that between each two adjacent layer electrodes, an electric field is formed, which penetrates the intervening piezoelectric layer and thus leads to an expansion.
  • a piezoelectric actuator which consists of a plurality of ceramic layers with layer electrodes arranged therebetween.
  • the outer electrodes have in addition to a metal coating a plurality of longitudinal wires extending in the longitudinal direction of the actuator body and a plurality of weft wires, wherein a
  • Weft wire is guided through the longitudinal wires, that a part of the longitudinal wires above and another part of the longitudinal wires extends below the weft wire.
  • a piezoelectric actuator is also known, in which the piezoelectric actuator to be contacted is inserted into a mounting receptacle and this mounting unit then with an electrically conductive Wire is wound. Subsequently, the wire is connected to pins, so that an electrical connection is made to the piezo stack.
  • a piezoelectric actuator which has a contact lug for electrically contacting an electrode of an actuator body.
  • the mechanical stress occurring in the contact lug by the expansions and contractions of the piezoelectric actuator is minimized by providing a deformation material in the form of a wire mesh in the contact.
  • the known solutions have the disadvantage that the metal coating which is to be applied to the piezoelectric actuator is relatively large and, moreover, the wire electrode or tissue electrode for contacting the metal coating is also large in order to ensure the electrical contacting of the entire metal coating.
  • Both the metallic coatings and the woven electrodes are made of high-quality materials, which considerably increases the cost of the piezoelectric actuator.
  • the piezoelectric actuator according to the invention has the advantage that the contacting of the layer electrodes takes place in a relatively inexpensive and less expensive manner.
  • the piezoelectric actuator has an outer electrode for contacting the layer electrodes, wherein the outer electrode comprises a metal coating and the metal coating consists of at least two partial coatings, which are electrically connected to one another by electrically conductive wires.
  • the wires that run between the two part coatings thereby allowing a very large flexibility, so that a secure connection of the entire metal coating with the electrical connections of the piezoelectric actuator and thus with the layer electrodes is always ensured.
  • the formation of the metal coating in the form of two partial coatings reduces the coating area necessary for contacting, so that the costs drop correspondingly. Due to the high flexibility of the electrically conductive wires between the two part coatings can about In addition, a relatively cheap material can be used, which further reduces the cost.
  • both external electrodes which contact the layer electrodes are formed in the manner according to the invention.
  • Particularly advantageous here is the formation of the partial coatings in the form of two metallic strips, which run perpendicular to the piezoelectric layers and are applied to the surface of the piezoelectric actuator.
  • the part coatings are connected by a plurality of electrically conductive wires, so that even with many cracks in the metallic coating by the movement of the piezoelectric actuator each layer electrode is connected to the lead wires.
  • Layer electrode which are electrically connected in alternation with a first or a second outer electrode, the production in a first step by providing the piezo stack with a plurality of piezo layers, each with a layer electrode between the individual piezo layers.
  • a second step two partial coatings are applied to the surface of the piezoactuator, wherein the layer electrodes are mutually connected to the partial coatings, and finally in a final step to establish an electrical connection between the two partial coatings by electrically conductive wires extending between the partial coatings.
  • the process step of producing an electrical connection between the two sub-layers by electrically conductive wires is advantageously achieved in that the piezoelectric actuator is clamped in a centering unit and thereby fixed, being attached to the centering unit form elements for guiding a wire, inserting a wire into the former and rotating the piezoactuator about an axis such that the wire wraps around the piezoactuator while being guided by the mold members, the wire contacting the metal coatings. Establishing an electrical connection between the wire and the metal coating and finally cutting the wire such that only one electrical connection exists between the wire and the metal coating. see the partial coatings of the metal coating remains.
  • the piezoelectric actuator can be produced inexpensively and quickly, with a high production reliability is achieved.
  • the electrical connection between the wire and the partial coating is advantageously produced by a soldering process, for example by thermode or
  • the drawing shows a piezoactuator according to the invention and an illustration of the production method according to the invention. It shows
  • FIG. 1 shows a piezoelectric actuator, as is known from the prior art, Figure 2a to
  • FIG. 2d shows the production process steps and a finished piezoactuator according to the inventive method
  • FIG. 3 c shows various embodiments of piezoactuators according to the invention.
  • FIG. 1 shows a piezoactuator, as known from the prior art.
  • the piezoelectric actuator 1 comprises a piezo stack, which is composed of a plurality of piezo layers 3. Between each two piezo layers 3 is a layer electrode 5, which consists of a thin metal layer, while the piezoelectric layers themselves consist of a piezoactive material, preferably a ceramic.
  • the layer electrodes 5 are mutually guided on the surface of the piezo stack, in the example shown here alternately on the right front side and the opposite, not shown in the drawing page of the piezoelectric actuator.
  • a first outer electrode 4 is applied to the surface of the piezo stack, and a second outer electrode 4 'is applied to the opposite side of the piezo stack.
  • the outer electrode 4 consists of a metal coating 7, which is applied directly to the piezo stack and the electrical contact to the layer electrodes 5, which are guided on this side of the piezo stack to the surface, produces.
  • the metal coating 7 consists of a highly electrically conductive metallic alloy, but has only a small thickness, so that the movement of the piezoelectric actuator is not limited thereby.
  • tissue electrode 10 is additionally necessary for electrical contacting with electrical connections 8, 9. This consists of a wire mesh, which is connected to the electrical terminals 8, 9 and is connected by soldering or by another connection electrically connected to the metal coating 7.
  • the tissue electrode 10 in this case has sufficient flexibility to follow the movement of the piezoelectric actuator 1 during contraction and expansion.
  • an electrical voltage is applied to the electrical connections 8, 9.
  • one half of the layer electrodes 5 are connected to one of the electrical connections 8, 9 via the fabric electrodes 10, 10 'and the outer electrodes 4, 4', so that between each two adjacent layer electrodes 5 an electrical voltage prevails.
  • an inventive manufacturing method and an inventive piezoelectric actuator 1 is shown in Figure 2a to 2d, in which the metal coating 7 is minimized, without affecting the reliability is impaired.
  • the piezo stack is provided with two partial coatings 17, which have a strip-like shape and extend parallel to one another, as shown in FIG. 2a.
  • the partial coatings 17 produce the electrical contact with the respective layer electrodes, which are not shown in FIG. 2a for the sake of clarity.
  • the piezoactuator 1 is clamped in a centering unit 12.
  • the centering unit 12 has guide elements 14 which are mounted on the outside of the centering unit 12 and which serve to guide a wire, via which the electrical connection is made.
  • the wire is threaded into the guide element 14 and the centering unit 12 is subsequently rotated about a longitudinal axis 13.
  • the centering unit 12 is moved in accordance with the direction of movement 22 of FIG. 2 b, so that the wire 20 wraps around the piezoactuator 1.
  • the wire 20 In a subsequent process step, the wire 20 must be electrically connected to the partial coatings 17. This is done for example via a soldering process, such as by Termodenlöten, laser soldering or other soldering processes, through which an electrical connection between the wire 20 and the partial coatings 17 can be made. Once this has been done, the wire 20 is severed so that only the electrical connections between the partial coatings 17 remain. Thus, both the partial coatings 17 with each other, as well as the various parts of the partial coatings 17, which arise during operation of the piezoelectric actuator by inevitably occurring cracks, electrically connected to each other. This is performed on both sides of the piezoelectric actuator, as shown in Figure 2d, so that ultimately two outer electrodes 4, 4 'are formed.
  • the wire may be wound more tightly in a connection region 21 so as to facilitate the attachment of the electrical connection.
  • this area is shown in the lower part of the piezoelectric actuator 1, where the wires are wound particularly tightly.
  • FIG. 3 a shows a first possibility of how the wire 20 can be wound around the piezoactuator in order ultimately to establish the electrical connection between the partial coatings 17. In this case, the wire 20 is stretched in relatively large distances between the partial coatings 17.
  • FIG. 3b shows a further exemplary embodiment in which the wires 20 are wound more tightly and
  • FIG. 3c shows a further exemplary embodiment in which the wires are wound even closer around the piezoactuator in order to ensure secure connection of the partial coatings to the electrical connection to reach.
  • the wire 20 which is used to connect the sub-electrodes 17, must be electrically conductive and may for example consist of steel, brass, copper or Invar. In particular Invar is advantageous in this case since its thermal expansion coefficient has the smallest deviation from the thermal expansion coefficient of the typical piezoceramics.
  • the wire may also be provided with various coatings, e.g. As copper or tin, wherein also various tin alloys, for. As SnAg, can be used.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

L'invention concerne un piézoactionneur (1) ayant une pluralité de couches piézoélectriques (3) entre lesquelles est chaque fois disposée une électrode de couche (5). Ces électrodes de couche sont électriquement reliées en alternance soit avec une première électrode extérieure (4) soit avec une deuxième électrode extérieure (4'), une tension électrique pouvant être appliquée sur les électrodes de couche (5) par l'intermédiaire des électrodes extérieures (4; 4'). Les électrodes extérieures (4; 4') comportent un revêtement métallique (7) qui est appliqué sur la surface du piézoactionneur (1), le revêtement métallique (7; 7') d'au moins une électrode extérieure (4) comportant au moins deux revêtements partiels (17) qui sont électriquement reliés l'un à l'autre par des fils électroconducteurs (20). Dans un procédé pour fabriquer le piézoactionneur (1), celui-ci est pourvu des revêtements partiels (17) et les fils entre les revêtements partiels (17) sont fabriqués par enroulement du fil (20) autour du piézoactionneur, le fil (20) étant brasé avec les revêtements partiels (17) et ensuite sectionné afin que seules les liaisons entre les revêtements partiels (17) demeurent.
PCT/EP2011/072855 2010-12-17 2011-12-15 Piézoactionneur WO2012080381A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010063385A DE102010063385A1 (de) 2010-12-17 2010-12-17 Piezoaktor
DE102010063385.2 2010-12-17

Publications (1)

Publication Number Publication Date
WO2012080381A1 true WO2012080381A1 (fr) 2012-06-21

Family

ID=45406724

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2011/072855 WO2012080381A1 (fr) 2010-12-17 2011-12-15 Piézoactionneur

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DE (1) DE102010063385A1 (fr)
WO (1) WO2012080381A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018031898A2 (fr) 2016-08-12 2018-02-15 Apple Inc. Système de surveillance de signes vitaux
WO2018217585A1 (fr) 2017-05-22 2018-11-29 Apple Inc. Capteurs piézoélectriques à éléments multiples destinés à des mesures physiologiques
CN109087622B (zh) * 2018-10-12 2024-04-16 广州博创乐器有限公司 一种便携式电木鼓

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61272984A (ja) * 1985-05-28 1986-12-03 Nec Corp 電歪効果素子
US5523645A (en) * 1991-05-09 1996-06-04 Nec Corporation Electrostrictive effect element and methods of producing the same
DE19930585A1 (de) 1998-08-06 2000-02-10 Siemens Matsushita Components Piezoaktor mit verbesserter elektrischer Kontaktierung und Verwendung eines derartigen Piezoaktors
DE102004012284A1 (de) * 2003-03-13 2004-12-09 Denso Corp., Kariya Piezoelektrisches Schichtelement
WO2005035971A1 (fr) 2003-10-14 2005-04-21 Siemens Aktiengesellschaft Actionneur piezoelectrique et procede de production associe
WO2005048365A1 (fr) * 2003-11-12 2005-05-26 Siemens Aktiengesellschaft Dispositif de mise en contact pour actionneur, et procede de production correspondant
US20060232172A1 (en) * 2005-04-18 2006-10-19 Denso Corporation Laminated-type piezoelectric element
DE102006026643A1 (de) 2006-06-08 2007-12-13 Robert Bosch Gmbh Piezoelekterischer Aktor
US20080007144A1 (en) * 2006-03-31 2008-01-10 Shodo Takei Piezoelectric Actuator
DE102009029571A1 (de) * 2009-09-18 2011-03-24 Robert Bosch Gmbh Piezoaktor mit einem multifunktionalen Innenelektrodenaufbau

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61272984A (ja) * 1985-05-28 1986-12-03 Nec Corp 電歪効果素子
US5523645A (en) * 1991-05-09 1996-06-04 Nec Corporation Electrostrictive effect element and methods of producing the same
DE19930585A1 (de) 1998-08-06 2000-02-10 Siemens Matsushita Components Piezoaktor mit verbesserter elektrischer Kontaktierung und Verwendung eines derartigen Piezoaktors
DE102004012284A1 (de) * 2003-03-13 2004-12-09 Denso Corp., Kariya Piezoelektrisches Schichtelement
WO2005035971A1 (fr) 2003-10-14 2005-04-21 Siemens Aktiengesellschaft Actionneur piezoelectrique et procede de production associe
WO2005048365A1 (fr) * 2003-11-12 2005-05-26 Siemens Aktiengesellschaft Dispositif de mise en contact pour actionneur, et procede de production correspondant
US20060232172A1 (en) * 2005-04-18 2006-10-19 Denso Corporation Laminated-type piezoelectric element
US20080007144A1 (en) * 2006-03-31 2008-01-10 Shodo Takei Piezoelectric Actuator
DE102006026643A1 (de) 2006-06-08 2007-12-13 Robert Bosch Gmbh Piezoelekterischer Aktor
DE102009029571A1 (de) * 2009-09-18 2011-03-24 Robert Bosch Gmbh Piezoaktor mit einem multifunktionalen Innenelektrodenaufbau

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