WO2012050363A3 - 레이저 시스템에서 버스트 발진 방법 및 이를 위한 장치 - Google Patents

레이저 시스템에서 버스트 발진 방법 및 이를 위한 장치 Download PDF

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Publication number
WO2012050363A3
WO2012050363A3 PCT/KR2011/007586 KR2011007586W WO2012050363A3 WO 2012050363 A3 WO2012050363 A3 WO 2012050363A3 KR 2011007586 W KR2011007586 W KR 2011007586W WO 2012050363 A3 WO2012050363 A3 WO 2012050363A3
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WO
WIPO (PCT)
Prior art keywords
light sources
outputs
laser system
pulse light
pulse
Prior art date
Application number
PCT/KR2011/007586
Other languages
English (en)
French (fr)
Other versions
WO2012050363A2 (ko
Inventor
신우진
노영철
유봉안
이영락
Original Assignee
광주과학기술원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 광주과학기술원 filed Critical 광주과학기술원
Priority to US13/703,695 priority Critical patent/US9077147B2/en
Priority to EP11832750.1A priority patent/EP2629380A4/en
Publication of WO2012050363A2 publication Critical patent/WO2012050363A2/ko
Publication of WO2012050363A3 publication Critical patent/WO2012050363A3/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2308—Amplifier arrangements, e.g. MOPA
    • H01S3/2316—Cascaded amplifiers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
    • H01S5/06209—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes in single-section lasers
    • H01S5/06216—Pulse modulation or generation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0092—Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2375—Hybrid lasers

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Semiconductor Lasers (AREA)
  • Lasers (AREA)

Abstract

레이저 시스템에서 광 펄스의 첨두 출력을 제어하여 버스트 모드를 발진하는 버스트 모드 발진 방법이 개시된다. 서로 다른 펄스폭을 가지는 전기적 입력 신호를 수신하고, 수신된 전기적 입력 신호에 따라 출력 광원의 펄스폭 및 출력 크기를 변조하여 변조된 펄스 광원을 출력하는 씨앗빔 발생기, 변조된 펄스 광원를 증폭하여 증폭된 펄스 광원을 출력하는 증폭기 및 증폭된 펄스 광원의 펄스폭에 따른 첨두 출력 크기가 상이함에 따라 파장 변환 출력 광원의 제어가 가능한 비선형 파장 변환기를 포함하여 구성될 수 있다.
PCT/KR2011/007586 2010-10-13 2011-10-12 레이저 시스템에서 버스트 발진 방법 및 이를 위한 장치 WO2012050363A2 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US13/703,695 US9077147B2 (en) 2010-10-13 2011-10-12 Burst oscillation method in laser system and apparatus for same
EP11832750.1A EP2629380A4 (en) 2010-10-13 2011-10-12 Burst oscillation method in laser system and apparatus for same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100099914A KR101145683B1 (ko) 2010-10-13 2010-10-13 레이저 시스템에서 버스트 모드 발진 방법 및 이를 위한 장치
KR10-2010-0099914 2010-10-13

Publications (2)

Publication Number Publication Date
WO2012050363A2 WO2012050363A2 (ko) 2012-04-19
WO2012050363A3 true WO2012050363A3 (ko) 2012-07-26

Family

ID=45938802

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/007586 WO2012050363A2 (ko) 2010-10-13 2011-10-12 레이저 시스템에서 버스트 발진 방법 및 이를 위한 장치

Country Status (4)

Country Link
US (1) US9077147B2 (ko)
EP (1) EP2629380A4 (ko)
KR (1) KR101145683B1 (ko)
WO (1) WO2012050363A2 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101304424B1 (ko) * 2013-05-31 2013-09-05 광주과학기술원 버스트 모드 레이저 발생 장치 및 방법
WO2015042842A1 (zh) * 2013-09-26 2015-04-02 华为技术有限公司 光发射系统
WO2016121090A1 (ja) * 2015-01-30 2016-08-04 ギガフォトン株式会社 固体レーザシステム
US20170179675A1 (en) * 2015-11-17 2017-06-22 Newport Corporation Homogeneous Laser Light Source for Area Processing Applications
WO2023166583A1 (ja) * 2022-03-02 2023-09-07 ギガフォトン株式会社 レーザ装置、スペクトル線幅の計測方法、及び電子デバイスの製造方法

Citations (4)

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US20040032887A1 (en) * 2001-12-17 2004-02-19 Nima Ahmadvand system and method for generating multi-wavelength laser source using highly nonlinear fiber
JP2010003771A (ja) * 2008-06-18 2010-01-07 Nikon Corp 種光発生装置、光源装置及びその調整方法、光照射装置、露光装置、並びにデバイス製造方法
KR20100017857A (ko) * 2007-05-18 2010-02-16 지에스아이 그룹 코포레이션 전도성 링크의 레이저 처리
US20100128744A1 (en) * 2008-11-21 2010-05-27 Institut National D'optique Spectrally tailored pulsed fiber laser oscillator

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US5880877A (en) * 1997-01-28 1999-03-09 Imra America, Inc. Apparatus and method for the generation of high-power femtosecond pulses from a fiber amplifier
US7924892B2 (en) * 2004-08-25 2011-04-12 Kla-Tencor Technologies Corporation Fiber amplifier based light source for semiconductor inspection
US7508853B2 (en) * 2004-12-07 2009-03-24 Imra, America, Inc. Yb: and Nd: mode-locked oscillators and fiber systems incorporated in solid-state short pulse laser systems
US7529281B2 (en) * 2006-07-11 2009-05-05 Mobius Photonics, Inc. Light source with precisely controlled wavelength-converted average power
US8009705B2 (en) * 2007-07-05 2011-08-30 Mobius Photonics, Inc. Fiber MOPA system without stimulated brillouin scattering
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GB0800936D0 (en) * 2008-01-19 2008-02-27 Fianium Ltd A source of optical supercontinuum generation having a selectable pulse repetition frequency
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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040032887A1 (en) * 2001-12-17 2004-02-19 Nima Ahmadvand system and method for generating multi-wavelength laser source using highly nonlinear fiber
KR20100017857A (ko) * 2007-05-18 2010-02-16 지에스아이 그룹 코포레이션 전도성 링크의 레이저 처리
JP2010003771A (ja) * 2008-06-18 2010-01-07 Nikon Corp 種光発生装置、光源装置及びその調整方法、光照射装置、露光装置、並びにデバイス製造方法
US20100128744A1 (en) * 2008-11-21 2010-05-27 Institut National D'optique Spectrally tailored pulsed fiber laser oscillator

Non-Patent Citations (1)

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Title
See also references of EP2629380A4 *

Also Published As

Publication number Publication date
WO2012050363A2 (ko) 2012-04-19
US20130215494A1 (en) 2013-08-22
EP2629380A2 (en) 2013-08-21
EP2629380A4 (en) 2018-01-24
KR101145683B1 (ko) 2012-05-24
US9077147B2 (en) 2015-07-07
KR20120038260A (ko) 2012-04-23

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