WO2012047014A2 - Electrostatic capacity-type touch panel device and method for manufacturing same - Google Patents

Electrostatic capacity-type touch panel device and method for manufacturing same Download PDF

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Publication number
WO2012047014A2
WO2012047014A2 PCT/KR2011/007366 KR2011007366W WO2012047014A2 WO 2012047014 A2 WO2012047014 A2 WO 2012047014A2 KR 2011007366 W KR2011007366 W KR 2011007366W WO 2012047014 A2 WO2012047014 A2 WO 2012047014A2
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Prior art keywords
sensing
sensing pattern
touch panel
panel device
film
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PCT/KR2011/007366
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French (fr)
Korean (ko)
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WO2012047014A3 (en
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경충현
안희철
임우빈
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네오뷰코오롱 주식회사
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Publication of WO2012047014A2 publication Critical patent/WO2012047014A2/en
Publication of WO2012047014A3 publication Critical patent/WO2012047014A3/en

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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0445Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

Definitions

  • the present invention relates to a capacitive touch panel device and a method of manufacturing the same, and more specifically, by forming an insulating film locally, the transmittance of the panel device can be improved, and the sensing pattern is formed on the upper and lower sides.
  • the present invention relates to a touch panel device having excellent stability and improved durability and a method of manufacturing the same.
  • a touch screen is an input device that can be easily used by anyone, men and women, by interactively and intuitively manipulating various multiplayers such as a computer and a mobile phone by simply touching a button displayed on a display with a finger.
  • Such a touch screen is a resistive method, a capacitive method, an infrared method, an ultrasonic method, and the like, and the resistive method is generally used in the current method, and the capacitive method is used to minimize the thickness thereof. .
  • the capacitive touch screen has an indium tin oxide (ITO) structure having a conductive floodlight plate, an electrode portion formed of silver (Ag) powder on the edge of the ITO, and an insulation of a lower portion of the electrode It is generally composed of an insulating coating.
  • ITO indium tin oxide
  • the ITO is composed of an ITO film made of a light-transmissive resin, and an ITO coating layer having a conductive material coated thereon.
  • each electrode provided at four sides according to a change in capacitance through the finger detects the touch position, thereby detecting the touch position.
  • FIG. 1 is a plan view 100 of a conventional capacitive touch panel device
  • FIG. 2 is a cross-sectional view of the touch panel device 100 of FIG. 1 cut along the direction AA ′.
  • the X-axis sensing pattern 110 and the Y-axis sensing pattern 120 are formed of one layer formed on the substrate 160.
  • the Y-axis detection pattern 120 is connected to each other in the longitudinal direction, and in the case of the X-axis detection pattern 110, they are spaced apart from each other and do not contact with the Y-axis detection pattern 120, the X In order to connect the axis sensing patterns 110, a separate contact hole 140 and a bridge 130 pattern for connecting the contact holes 140 to each other were necessary.
  • an insulating film 150 is formed on both the upper surface of the X-axis sensing pattern 110 and the inside of the bridge 130. .
  • the transmittance is lowered due to the insulating film 150, and as a result, the overall resolution of the display device is deteriorated. .
  • the bridge 130 is made of the same material as the sensing patterns 110 and 120. As described above, when the insulating film 150 is provided only in a couple, the same material may not be used. It was.
  • the bridge 130 and the sensing patterns 110 and 120 are made of different materials, and the bridge 130 is also visually identified. It acted as a problem of reducing the overall transmittance of the panel 100.
  • the sensing pattern is provided in two layers, so that the sensing sensitivity is improved to ensure operational stability, and a passivation layer is provided to further improve the durability of the touch panel device and its manufacturing method. It is done.
  • a method of manufacturing a capacitive touch panel device including preparing a transparent substrate, depositing a first conductive transparent film having a predetermined thickness on one surface of the substrate, and forming an upper portion of the first conductive transparent film.
  • the transparent substrate uses any one selected from the group consisting of polyethylene terephthalate (PET), polyimide (PI), acryl (Acryl), polyethylene naphthalate (PEN), and glass.
  • PET polyethylene terephthalate
  • PI polyimide
  • Acryl acryl
  • PEN polyethylene naphthalate
  • the transparent substrate is in the form of a film.
  • the first and second conductive transparent films may include indium tin oxide (ITO), indium zinc oxide (IZO), AZO (Al-dopedZnO), carbon nanotubes (CNT), and conductive polymers (PEDOT; poly). (3,4-ethylenedioxythiophene)), silver (Ag) and copper (Cu) is made of any one selected from the group consisting of a transparent ink, the first and second conductive transparent film is 15nm thick using a sputter (sputter) Is deposited.
  • ITO indium tin oxide
  • IZO indium zinc oxide
  • AZO Al-dopedZnO
  • CNT carbon nanotubes
  • PEDOT conductive polymers
  • the metal film is copper (Cu), nickel (Ni), aluminum (Al), chromium (Cr), molybdenum (Mo), silver (Ag), gold (Au), and molybdenum (Mo) / aluminum (Al).
  • Molybdenum (Mo) is made of any one selected from the group consisting of a multilayer film, the metal film is deposited to a thickness of 300nm using a sputter (sputter).
  • the first sensing pattern overlaps the fourth sensing pattern
  • the second sensing pattern is formed to overlap the third sensing pattern
  • the first sensing pattern is composed of a plurality of triangular or rectangular sensing pads, each sensing pad is connected in a lateral direction, and the second sensing pattern is a plurality of triangular or square sensing pads spaced apart from each other.
  • the first sensing pattern is arranged so as to be orthogonal to the sensing pad connection portion of the first sensing pattern.
  • the third sensing pattern includes a plurality of triangular or rectangular sensing pads, each sensing pad is connected in a longitudinal direction, and the fourth sensing pattern is a plurality of triangular or rectangular sensing pads spaced apart from each other.
  • the second sensing pattern is arranged to be orthogonal to the sensing pad connection portion of the third sensing pattern.
  • the insulating film is formed to 3 ⁇ m or less.
  • a passivation layer is further provided on the upper surfaces of the third and fourth sensing patterns.
  • the present invention has the following excellent effects.
  • the touch panel device and the method of manufacturing the same according to the present invention can maintain a high transmittance by locally forming the insulating film only in the necessary portion.
  • the sensing pattern is provided in two layers, the sensing sensitivity is improved, and thus operational stability is secured, and a passivation layer is provided to further improve durability.
  • FIG. 1 is a plan view of a conventional capacitive touch panel device.
  • FIG. 2 is a cross-sectional view of the touch panel device of FIG. 1 taken along the line AA ′.
  • 3 is an overall manufacturing process of the capacitive touch panel device according to an embodiment of the present invention.
  • FIG. 4 illustrates an electrode wiring, a first sensing pattern, and a second sensing pattern according to an embodiment of the present invention.
  • FIG. 5 illustrates a third sensing pattern and a fourth sensing pattern according to an embodiment of the present invention.
  • FIG. 6 illustrates a state in which first to fourth sensing patterns overlap with each other according to an embodiment of the present invention.
  • FIG. 7 is a cross-sectional view of the overlapping sensing pattern illustrated in FIG. 6 taken along the direction B-B '.
  • FIG. 8 is a cross-sectional view of the overlapping sensing pattern illustrated in FIG. 6 taken in the direction of CC ′.
  • Figure 3 is an overall manufacturing process of the capacitive touch panel device according to an embodiment of the present invention.
  • a method of manufacturing a capacitive touch panel device may include preparing a transparent substrate (S100), in which case the substrate used is an insulating substrate made of a transparent material. It is not greatly restricted in kind.
  • the transparent substrate may use any one selected from the group consisting of polyethylene terephthalate (PET), polyimide (PI), acryl (Acryl), polyethylene naphthalate (PEN), and glass.
  • PET polyethylene terephthalate
  • PI polyimide
  • Acryl acryl
  • PEN polyethylene naphthalate
  • a glass substrate in the form of a film was prepared.
  • a sputter was used and deposited at 15 nm.
  • the deposition thickness is not necessarily limited to 15 nm, of course, can be variously adjusted according to the use state.
  • the first conductive transparent film may use various materials, in an embodiment of the present invention, indium tin oxide (ITO), indium zinc oxide (IZO), AZO (Al-dopedZnO), and carbon nanotubes ( CNT), a conductive polymer (PEDOT; poly (3,4-ethylenedioxythiophene)), silver (Ag) and copper (Cu) transparent ink may be used.
  • ITO indium tin oxide
  • IZO indium zinc oxide
  • AZO Al-dopedZnO
  • CNT carbon nanotubes
  • PEDOT polymer
  • silver (Ag) and copper (Cu) transparent ink may be used.
  • the first conductive transparent film uses indium tin oxide (ITO).
  • ITO indium tin oxide
  • the metal film is the same as the deposition method of the first conductive transparent film described above.
  • the metal film may be deposited using metals of various materials, but in one embodiment of the present invention, copper (Cu), nickel (Ni), aluminum (Al), chromium (Cr), molybdenum (Mo), and silver Deposition was carried out using any one of (Ag), gold (Au), and molybdenum (Mo) / aluminum (Al) / molybdenum (Mo) multilayer film.
  • an electrode wiring is formed by exposing or etching the deposited metal film (S400), and the electrode wiring is connected to first and second sensing patterns, which will be described later.
  • the method of forming the electrode wiring can be formed through a variety of methods, in one embodiment of the present invention used a general photolithography (Photolithography).
  • the first conductive transparent film is exposed or etched to form a first sensing pattern and a second sensing pattern (S500).
  • the first and second sensing patterns serve to sense a touched part of the touch panel device of the capacitance type and to determine a touched position.
  • the first and second sensing patterns may be patterned in various forms, but in a preferred embodiment of the present invention, the first sensing pattern is composed of a plurality of triangular or rectangular sensing pads, and each sensing pad is horizontal. Connected in the direction.
  • the second sensing pattern includes a plurality of triangular or rectangular sensing pads spaced apart from each other, and is arranged to form orthogonal to the sensing pad connection portion of the first sensing pattern between the first sensing patterns.
  • the method of forming the first and second winding patterns may be formed through various methods.
  • general photolithography is used.
  • the insulating film is preferably made of a transparent material to increase the transmittance of the touch panel device.
  • the insulating film is not limited in kind as long as it is a material capable of ensuring insulation of a transparent material.
  • the thickness to be formed is not significantly limited, but in the preferred embodiment of the present invention, the thickness is formed to be 3 ⁇ m or less, which is intended to reduce the overall thickness of the touch panel device to reduce the thickness of the panel device. .
  • the insulating film according to a preferred embodiment of the present invention is characterized in that the portion of the first sensing pattern or the second sensing pattern, that is, is formed locally, through the touch panel device as before.
  • the third and fourth sensing patterns are formed by exposing or etching the second conductive transparent layer (S800), and the method of forming the third and fourth sensing patterns is formed using various methods.
  • the general photolithography is used in the same manner as the first and second sensing patterns.
  • the third sensing pattern and the fourth sensing pattern may be patterned in various shapes.
  • the third sensing pattern includes a plurality of triangular or rectangular sensing pads. The sensing pads are connected in the longitudinal direction.
  • the fourth sensing pattern includes a plurality of triangular or rectangular sensing pads spaced apart from each other, and is arranged so as to be orthogonal to the sensing pad connection portion of the third sensing pattern between the third sensing patterns.
  • the first sensing pattern overlaps the fourth sensing pattern
  • the second sensing pattern overlaps the third sensing pattern
  • the first sensing pattern connected in the lateral direction and the fourth sensing pattern overlapping the first sensing pattern serve to determine the position in the horizontal axis direction when the panel element is touched, and the first sensing pattern connected in the longitudinal direction.
  • the second sensing pattern overlapping the third sensing pattern and the third sensing pattern serves to determine the position in the longitudinal direction when the touch is performed, and as a result, the touch position of the touch panel device is determined through the first to fourth sensing patterns. You can decide.
  • the insulating film described above is locally formed only at the intersection of the first sensing pattern and the third sensing pattern, and as a result, there is no need to form an insulating film on the entire surface of the panel element as in the prior art, thereby improving transmittance of the panel element. Can be improved.
  • a passivation layer may be further provided on the upper surfaces of the third and fourth sensing patterns S900 to protect the panel device, thereby improving durability of the panel device.
  • FIG. 4 is a diagram illustrating an electrode wiring, a first sensing pattern, and a second sensing pattern according to an embodiment of the present invention
  • FIG. 5 is a third sensing pattern and a fourth sensing pattern according to an embodiment of the present invention. To show.
  • the electrode wirings 220 formed by the metal film are formed on the periphery of the first sensing pattern 230a and the second sensing pattern 230b, respectively, and the first sensing pattern 230a is provided.
  • the second sensing pattern 230b includes a plurality of triangular or rectangular sensing pads spaced apart from each other, and forms an orthogonal shape with a sensing pad connection portion of the first sensing pattern 230a between the first sensing patterns. Are arranged.
  • the third sensing pattern 240b is the second sensing pattern 230b.
  • the third sensing pattern 240b is connected to each other in the longitudinal direction, unlike the second sensing pattern 230b.
  • the fourth sensing pattern 240a has the same position and the same shape as the first sensing pattern 230a, but the first sensing pattern 230a is different from each other.
  • the third and fourth sensing patterns may be formed on the first and second sensing patterns 230a and 230b. 240a and 240b overlap.
  • the fourth sensing pattern 240a overlaps the upper portion of the first sensing pattern 230a
  • the third sensing pattern 240b overlaps the upper portion of the second sensing pattern 230b.
  • the fourth sensing patterns 240a are spaced apart from each other, the fourth sensing patterns 240a are also connected in the lateral direction by overlapping the first sensing patterns 230a connected in the lateral direction.
  • the second sensing patterns 230b are spaced apart from each other, but overlap with the third sensing patterns 240b connected in the longitudinal direction, so that the second sensing patterns 230b are also connected to each other in the longitudinal direction.
  • the first to fourth sensing patterns overlap each other at the connecting portion of the first sensing pattern 230a and the connecting portion of the third sensing pattern 240b, the capacitive touch panel device according to the present invention In order to prevent this, an insulating film 250 is formed locally at the connection portion.
  • FIG. 7 is a cross-sectional view cut along the overlapping sensing pattern shown in FIG. 6 in the B-B 'direction
  • FIG. 8 is a cross-sectional view cut in the C-C' direction.
  • the insulating layer 250 has only an intersection point between the first sensing pattern 230a connected in the lateral direction and the third sensing pattern 240b connected in the longitudinal direction. It can be seen that it is formed locally.
  • the present invention does not need to form the insulating film 250 in the entire panel device, unlike the prior art, thereby maximizing the transmittance of the panel device.
  • a contact hole and a bridge which are essential components of the prior art, may be provided. Since the manufacturing process is simple, economical, and each sensing pattern performs the role of the bridge and the sensor at the same time, the sensing sensitivity is excellent.
  • the present invention can be used as a touch panel device of a touch screen provided in a computer or a mobile phone, in particular, a capacitive touch panel device, improves the transmittance and durability of the touch panel device and excellent in operation stability, It is possible to provide a touch panel device that can simplify the manufacturing process and reduce the production cost.

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  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
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Abstract

The present invention relates to an electrostatic capacity-type touch panel device and a method for manufacturing same, and more specifically, to a method for manufacturing comprising: a step for preparing a transparent substrate; a step for evaporating a first conductive transparent film having a fixed thickness on one surface of the substrate; a step for evaporating a metal film having a fixed thickness on the top portion of the first conductive transparent film; a step for forming an electrode wiring by exposing or etching the metal film; a step for forming a first sensing pattern and a second sensing pattern by exposing or etching the first conductive transparent film; a step for forming an insulation film on a part of the top portion of the first sensing pattern or the second sensing pattern; a step for evaporating a second conductive transparent film on the top portion of the insulation film, the first sensing pattern, and the second sensing pattern; and a step for forming a third sensing pattern and a fourth sensing pattern by exposing or etching the second conductive transparent film, and to a touch panel device manufactured thereby.

Description

정전용량방식 터치 패널 소자 및 이의 제조방법Capacitive touch panel device and manufacturing method thereof
본 발명은 정전용량방식의 터치 패널 소자 및 이의 제조방법에 관한 것으로, 보다 구체적으로는 절연막을 국부적으로 형성함으로써, 상기 패널 소자의 투과도를 향상시킬 수 있으며, 감지 패턴을 상·하부에 형성함으로써 동작안정성이 우수하고, 내구성이 향상된 터치 패널 소자 및 이의 제조방법에 관한 것이다.The present invention relates to a capacitive touch panel device and a method of manufacturing the same, and more specifically, by forming an insulating film locally, the transmittance of the panel device can be improved, and the sensing pattern is formed on the upper and lower sides. The present invention relates to a touch panel device having excellent stability and improved durability and a method of manufacturing the same.
일반적으로, 터치스크린은 디스플레이에 표시되어 있는 버튼을 손가락으로 접촉하는 것만으로 컴퓨터, 핸드폰 등 각종 멀티 플레이어를 대화적, 직감적으로 조작함으로써 남녀노소 누구나 쉽게 사용할 수 있는 입력장치이다.In general, a touch screen is an input device that can be easily used by anyone, men and women, by interactively and intuitively manipulating various multiplayers such as a computer and a mobile phone by simply touching a button displayed on a display with a finger.
이와 같은 터치스크린은 저항막 방식과 정전용량 방식, 적외선 방식, 초음파 방식 등이 사용되고 있으며, 현재 사용되는 방식에 있어서 저항막 방식이 대세를 이루고 있고, 그 두께를 최소화함에 있어서는 정전용량 방식이 사용되고 있다.Such a touch screen is a resistive method, a capacitive method, an infrared method, an ultrasonic method, and the like, and the resistive method is generally used in the current method, and the capacitive method is used to minimize the thickness thereof. .
한편, 상기 정전용량 방식의 터치스크린은 그 구조가 도전 투광판으로 이루어진 ITO(Indium Tin Oxide)와, 상기 ITO의 테두리에 은(Ag) 분 페인트로 형성한 전극부와, 상기 전극의 하부를 절연하는 절연 코팅부로 구성되는 것이 일반적이다.On the other hand, the capacitive touch screen has an indium tin oxide (ITO) structure having a conductive floodlight plate, an electrode portion formed of silver (Ag) powder on the edge of the ITO, and an insulation of a lower portion of the electrode It is generally composed of an insulating coating.
그리고 상기 ITO는 투광성 수지로 이루어진 ITO필름과, 상기 ITO필름의 하부에 도전성 물질이 코팅 형성된 ITO코팅층으로 구성된다.The ITO is composed of an ITO film made of a light-transmissive resin, and an ITO coating layer having a conductive material coated thereon.
상기한 바와 같은 종래의 정전용량 방식의 터치스크린은 손가락으로 ITO의 상면을 터치하게 되면 손가락을 통하여 정전용량의 변동에 따라 4 변에 구비된 각 전극이 이를 감지함으로써 터치 위치를 감지할 수 있도록 하는 것이다.In the conventional capacitive touch screen as described above, when the upper surface of the ITO is touched by a finger, each electrode provided at four sides according to a change in capacitance through the finger detects the touch position, thereby detecting the touch position. will be.
그러나, 종래의 정전용량 방식의 터치스크린 패널의 제조 공정에서 다음과 같은 문제점들이 발생한다.However, the following problems occur in the manufacturing process of the conventional capacitive touch screen panel.
이하에서는 도 1 내지 도 2 를 참조하여 종래 터치 패널 소자의 문제점에 대해 상세히 설명한다.Hereinafter, the problems of the conventional touch panel device will be described in detail with reference to FIGS. 1 and 2.
먼저, 도 1 은 종래 정전용량방식 터치 패널 소자의 평면도(100)이며, 도 2 는 도 1의 터치 패널 소자(100)를 A-A'방향으로 절단한 단면도이다.First, FIG. 1 is a plan view 100 of a conventional capacitive touch panel device, and FIG. 2 is a cross-sectional view of the touch panel device 100 of FIG. 1 cut along the direction AA ′.
도 1 을 참조하면, 종래의 정전용량방식 터치 패널 소자(100)는 X축 감지패턴(110) 및 Y축 감지패턴(120)이 기판(160) 상부에 형성된 하나의 층으로 이루어져 있다.Referring to FIG. 1, in the conventional capacitive touch panel device 100, the X-axis sensing pattern 110 and the Y-axis sensing pattern 120 are formed of one layer formed on the substrate 160.
이때, 상기 Y축 감지패턴(120)은 서로 종 방향으로 연결되어 있으며, 상기 X축 감지패턴(110)의 경우, 서로 이격 되어 있어 이를 상기 Y축 감지패턴(120)과 접하지 않고, 상기 X축 감지패턴(110)들끼리 연결하기 위해 별도의 컨텍트 홀(contact hole)(140) 및 상기 컨텍트 홀(140)을 서로 연결하기 위한 브릿지(brideg)(130) 패턴이 필수적으로 필요하였다. At this time, the Y-axis detection pattern 120 is connected to each other in the longitudinal direction, and in the case of the X-axis detection pattern 110, they are spaced apart from each other and do not contact with the Y-axis detection pattern 120, the X In order to connect the axis sensing patterns 110, a separate contact hole 140 and a bridge 130 pattern for connecting the contact holes 140 to each other were necessary.
따라서, 종래의 정전용량방식 터치 패널 소자(100)의 경우, 상기 별도의 컨텍트 홀(140) 및 브릿지(130)를 구비하여야 하므로 그만큼 제조공정이 복잡하고 이로 인한 패널의 생산 단가가 상승하는 문제점이 있었다. Therefore, in the case of the conventional capacitive touch panel device 100, since the separate contact hole 140 and the bridge 130 must be provided, the manufacturing process is complicated and the production cost of the panel increases accordingly. there was.
또한, 도 2 에 도시된 바와 같이, 종래의 정전용량방식 터치 패널 소자(100)의 경우, X축 감지패턴(110) 상부 표면 및 상기 브릿지(130) 내부 모두에 절연막(150)이 형성되어 있다. In addition, as shown in FIG. 2, in the conventional capacitive touch panel device 100, an insulating film 150 is formed on both the upper surface of the X-axis sensing pattern 110 and the inside of the bridge 130. .
따라서, 전체적으로 형성된 절연막(150)을 구비한 종래의 정전용량방식 터치 패널 소자(100)의 경우, 상기 절연막(150)으로 인하여 투과도가 저하되고, 결과적으로 디스플레이 장치의 전체적인 해상도를 떨어트리는 문제가 있었다. Therefore, in the case of the conventional capacitive touch panel device 100 having the insulating film 150 formed as a whole, the transmittance is lowered due to the insulating film 150, and as a result, the overall resolution of the display device is deteriorated. .
이를 어느 정도 해결하고자, 상기 절연막(150)을 상기 브릿지(130) 하부에만 일 부분만 형성하고자 하는 노력이 있었다. In order to solve this to some extent, there was an effort to form only a portion of the insulating film 150 only under the bridge 130.
그러나 일반적으로 상기 브릿지(130)는 상기 감지패턴(110)(120)과 동일한 물질로 구비되는데, 상술한 바와 같이 일 부부에만 절연막(150)을 구비하는 경우에는 동일 물질을 사용할 수 없는 문제가 발생하였다.However, in general, the bridge 130 is made of the same material as the sensing patterns 110 and 120. As described above, when the insulating film 150 is provided only in a couple, the same material may not be used. It was.
이는 포토리소그래피(photolithography) 공정에 있어서, 동일 물질은 같이 에칭되기 때문이다. This is because in a photolithography process, the same materials are etched together.
따라서, 일 부분에만 절연막(150)을 구비하고자 하는 경우, 상기 브릿지(130)와 상기 감지패턴(110)(120)은 서로 다른 물질로 이루어져 하는데, 이 역시 상기 브릿지(130)가 육안으로 식별되어 전체적인 패널(100)의 투과도를 감소시키는 문제로 작용하였다.Therefore, when the insulating film 150 is to be provided in only one portion, the bridge 130 and the sensing patterns 110 and 120 are made of different materials, and the bridge 130 is also visually identified. It acted as a problem of reducing the overall transmittance of the panel 100.
본 발명의 상술한 바와 같은 문제점을 해결하기 위해 창안된 것으로, Invented to solve the above problems of the present invention,
먼저, 절연막을 필요한 부분에만 국부적으로 형성함으로써 투과도가 향상된 터치 패널 소자 및 이의 제조방법 제공을 일 목적으로 한다.First, it is an object of the present invention to provide a touch panel device having improved transmittance and a method of manufacturing the same by locally forming an insulating film only in a necessary portion.
또한, 감지패턴을 2 층으로 구비함으로써 센싱(sensing) 감도가 향상되어 동작 안정성이 확보되고, 페시베이션 레이어(Passivation layer)를 구비하여 더욱 향상된 내구성을 갖는 터치 패널 소자 및 이의 제조방법 제공을 다른 목적으로 한다.In addition, the sensing pattern is provided in two layers, so that the sensing sensitivity is improved to ensure operational stability, and a passivation layer is provided to further improve the durability of the touch panel device and its manufacturing method. It is done.
아울러, 별도의 컨텍트 홀 및 브릿지를 형성할 필요가 없어 제조 공정이 단순하고, 생산 비용이 절감된 터치 패널 소자 및 이의 제조방법 제공을 또 다른 목적으로 한다.In addition, it is another object of the present invention to provide a touch panel device and a method of manufacturing the same, which require simple contact holes and bridges, and thus simplify the manufacturing process and reduce production costs.
한편, 본 발명의 목적들은 이상에서 언급한 목적들로 제한되지 않으며, 언급되지 않은 또 다른 목적들은 아래의 기재로부터 당업자에게 명확하게 이해될 수 있을 것이다.On the other hand, the objects of the present invention are not limited to the above-mentioned objects, other objects that are not mentioned will be clearly understood by those skilled in the art from the following description.
상기 목적들을 달성하기 위한 본 발명에 따른 정전용량방식 터치 패널 소자의 제조방법은 투명 기판을 준비하는 단계, 상기 기판 일면에 일정 두께의 제 1 전도성 투명막을 증착하는 단계, 상기 제 1 전도성 투명막의 상부에 일정 두께의 금속막을 증착하는 단계, 상기 금속막을 노광 또는 에칭하여 전극배선을 형성하는 단계, 상기 제 1 전도성 투명막을 노광 또는 에칭하여 제 1 감지패턴 및 제 2 감지패턴을 형성하는 단계, 상기 제 1 감지패턴 또는 상기 제 2 감지패턴 상부의 일부분에 절연막을 형성하는 단계, 상기 절연막, 상기 제 1 및 제 2 감지패턴 상부에 제 2 전도성 투명막을 증착하는 단계 및 상기 제 2 전도성 투명막을 노광 또는 에칭하여 제 3 감지패턴 및 제 4 감지패턴을 형성하는 단계를 포함한다.According to an aspect of the present invention, there is provided a method of manufacturing a capacitive touch panel device, including preparing a transparent substrate, depositing a first conductive transparent film having a predetermined thickness on one surface of the substrate, and forming an upper portion of the first conductive transparent film. Depositing a metal film having a predetermined thickness on the substrate, exposing or etching the metal film to form electrode wiring, and exposing or etching the first conductive transparent film to form a first sensing pattern and a second sensing pattern; Forming an insulating film on a portion of the first sensing pattern or the second sensing pattern, depositing a second conductive transparent film on the insulating film, the first and second sensing patterns, and exposing or etching the second conductive transparent film. Forming a third sensing pattern and a fourth sensing pattern.
바람직하게는 상기 투명 기판은 PET(Polyethylene Terephthalate), PI(polyimide), 아크릴(Acryl), PEN(Polyethylene Naphthalate) 및 글라스(Glass)로 이루어진 군에서 선택된 어느 하나를 이용한다.Preferably, the transparent substrate uses any one selected from the group consisting of polyethylene terephthalate (PET), polyimide (PI), acryl (Acryl), polyethylene naphthalate (PEN), and glass.
바람직하게는 상기 투명 기판은 필름(film)형태로 이루어진다.Preferably, the transparent substrate is in the form of a film.
바람직하게는 상기 제 1 및 제 2 전도성 투명막은 인듐-틴-옥사이드(ITO), 인듐-징크-옥사이드(IZO), AZO(Al-dopedZnO), 탄소나노튜브(CNT), 전도성 고분자(PEDOT;poly(3,4-ethylenedioxythiophene)), 은(Ag) 및 구리(Cu) 투명잉크로 이루어진 군에서 선택된 어느 하나로 이루어지며, 상기 제 1 및 제 2 전도성 투명막은 스퍼터(sputter)를 이용하여 15㎚ 두께로 증착된다.Preferably, the first and second conductive transparent films may include indium tin oxide (ITO), indium zinc oxide (IZO), AZO (Al-dopedZnO), carbon nanotubes (CNT), and conductive polymers (PEDOT; poly). (3,4-ethylenedioxythiophene)), silver (Ag) and copper (Cu) is made of any one selected from the group consisting of a transparent ink, the first and second conductive transparent film is 15nm thick using a sputter (sputter) Is deposited.
바람직하게는 상기 금속막은 구리(Cu), 니켈(Ni), 알루미늄(Al), 크롬(Cr), 몰리브덴(Mo), 은(Ag), 금(Au) 및 몰리브덴(Mo)/알루미늄(Al)/몰리브덴(Mo) 다층막으로 이루어진 군에서 선택된 어느 하나로 이루어지며, 상기 금속막은 스퍼터(sputter)를 이용하여 300㎚ 두께로 증착된다.Preferably, the metal film is copper (Cu), nickel (Ni), aluminum (Al), chromium (Cr), molybdenum (Mo), silver (Ag), gold (Au), and molybdenum (Mo) / aluminum (Al). / Molybdenum (Mo) is made of any one selected from the group consisting of a multilayer film, the metal film is deposited to a thickness of 300nm using a sputter (sputter).
바람직하게는 상기 제 1 감지패턴은 제 4 감지패턴과 중첩되고, 제 2 감지패턴은 제 3 감지패턴과 중첩되도록 형성된다.Preferably, the first sensing pattern overlaps the fourth sensing pattern, and the second sensing pattern is formed to overlap the third sensing pattern.
바람직하게는 상기 제 1 감지패턴은 복 수개의 삼각형 또는 사각형 센싱패드로 이루어져 있으며, 각각의 센싱패드는 횡 방향으로 연결되며, 상기 제 2 감지패턴은 서로 이격된 복 수개의 삼각형 또는 사각형 센싱패드로 이루어져 있으며, 상기 제 1 감지패턴 사이에서 상기 제 1 감지패턴의 센싱패드 연결부분과 직교형태를 이루도록 배열된다.Preferably, the first sensing pattern is composed of a plurality of triangular or rectangular sensing pads, each sensing pad is connected in a lateral direction, and the second sensing pattern is a plurality of triangular or square sensing pads spaced apart from each other. The first sensing pattern is arranged so as to be orthogonal to the sensing pad connection portion of the first sensing pattern.
바람직하게는 상기 제 3 감지패턴은 복 수개의 삼각형 또는 사각형 센싱패드로 이루어져 있으며, 각각의 센싱패드는 종 방향으로 연결되며, 상기 제 4 감지패턴은 서로 이격된 복 수개의 삼각형 또는 사각형 센싱패드로 이루어져 있으며, 상기 제 3 감지패턴 사이에서 상기 제 3 감지패턴의 센싱패드 연결부분과 직교형태를 이루도록 배열된다.Preferably, the third sensing pattern includes a plurality of triangular or rectangular sensing pads, each sensing pad is connected in a longitudinal direction, and the fourth sensing pattern is a plurality of triangular or rectangular sensing pads spaced apart from each other. The second sensing pattern is arranged to be orthogonal to the sensing pad connection portion of the third sensing pattern.
바람직하게는 상기 절연막은 3㎛ 이하로 형성된다.Preferably, the insulating film is formed to 3㎛ or less.
바람직하게는 상기 제 3 및 제 4 감지패턴의 상부 표면에는 페시베이션 레이어(Passivation layer)가 더 구비된다.Preferably, a passivation layer is further provided on the upper surfaces of the third and fourth sensing patterns.
본 발명은 다음과 같은 우수한 효과가 있다.The present invention has the following excellent effects.
먼저, 본 발명에 따른 터치 패널 소자 및 이의 제조방법은 절연막을 필요한 부분에만 국부적으로 형성함으로써 높은 투과도를 유지할 수 있다.First, the touch panel device and the method of manufacturing the same according to the present invention can maintain a high transmittance by locally forming the insulating film only in the necessary portion.
또한, 감지패턴을 2 층으로 구비함으로써 센싱(sensing) 감도가 향상되어 동작 안정성이 확보되고, 페시베이션 레이어(Passivation layer)를 구비하여 더욱 향상된 내구성을 갖을 수 있다.In addition, since the sensing pattern is provided in two layers, the sensing sensitivity is improved, and thus operational stability is secured, and a passivation layer is provided to further improve durability.
아울러, 별도의 컨텍트 홀 및 브릿지를 형성할 필요가 없어 제조 공정이 단순하고, 생산 비용이 절감되는 우수한 효과가 있다.In addition, there is no need to form a separate contact hole and bridge, the manufacturing process is simple, there is an excellent effect that the production cost is reduced.
도 1 은 종래의 정전용량방식 터치 패널 소자의 평면도다.1 is a plan view of a conventional capacitive touch panel device.
도 2 는 도 1 의 터치 패널 소자를 A-A'방향으로 절단한 단면도다.FIG. 2 is a cross-sectional view of the touch panel device of FIG. 1 taken along the line AA ′. FIG.
도 3 은 본 발명의 일실시 예에 따른 정전용량방식 터치 패널 소자의 전체 제조 공정도다.3 is an overall manufacturing process of the capacitive touch panel device according to an embodiment of the present invention.
도 4 는 본 발명의 일실시 예에 따른 전극배선, 제 1 감지패턴 및 제 2 감지패턴을 나타낸 도다.4 illustrates an electrode wiring, a first sensing pattern, and a second sensing pattern according to an embodiment of the present invention.
도 5 는 본 발명의 일실시 예에 따른 제 3 감지패턴 및 제 4 감지패턴을 나타낸 도다.5 illustrates a third sensing pattern and a fourth sensing pattern according to an embodiment of the present invention.
도 6 은 본 발명의 일실시 예에 따른 제 1 내지 제 4 감지패턴이 중첩된 상태를 나타낸 도다.6 illustrates a state in which first to fourth sensing patterns overlap with each other according to an embodiment of the present invention.
도 7 은 도 6 에 도시된 중첩된 감지패턴을 B-B'방향으로 절단한 단면도다.FIG. 7 is a cross-sectional view of the overlapping sensing pattern illustrated in FIG. 6 taken along the direction B-B '.
도 8 은 도 6 에 도시된 중첩된 감지패턴을 C-C'방향으로 절단한 단면도다.FIG. 8 is a cross-sectional view of the overlapping sensing pattern illustrated in FIG. 6 taken in the direction of CC ′.
본 발명에서 사용되는 용어는 가능한 현재 널리 사용되는 일반적인 용어를 선택하였으나, 특정한 경우는 출원인이 임의로 선정한 용어도 있는데 이 경우에는 단순한 용어의 명칭이 아닌 발명을 실시하기 위한 구체적인 내용에 기재되거나 사용된 의미를 고려하여 그 의미가 파악되어야 할 것이다. The terms used in the present invention are selected as general terms that are widely used at present, but in certain cases, the term is arbitrarily selected by the applicant. In this case, the meanings described or used in the specific contents for carrying out the invention are not simply names. Considering this, the meaning should be grasped.
이하, 첨부한 도면에 도시된 바람직한 실시 예들을 참조하여 본 발명의 기술적 구성을 상세하게 설명한다.Hereinafter, with reference to the preferred embodiments shown in the accompanying drawings will be described in detail the technical configuration of the present invention.
먼저, 도 3 은 본 발명의 일실시 예에 따른 정전용량방식 터치 패널 소자의 전체 제조 공정도다.First, Figure 3 is an overall manufacturing process of the capacitive touch panel device according to an embodiment of the present invention.
도 3을 참조하여 설명하면, 본 발명의 일실시 예에 따른 정전용량방식 터치 패널 소자의 제조방법은 먼저, 투명기판을 준비하는 단계(S100)로 이때 사용되는 기판은 투명한 재질의 절연성 기판이라면 그 종류에 있어서 크게 제한받지 아니한다.Referring to FIG. 3, a method of manufacturing a capacitive touch panel device according to an exemplary embodiment of the present invention may include preparing a transparent substrate (S100), in which case the substrate used is an insulating substrate made of a transparent material. It is not greatly restricted in kind.
다만, 본 발명의 일실시 예에 있어서 상기 투명기판은 PET(Polyethylene Terephthalate), PI(polyimide), 아크릴(Acryl), PEN(Polyethylene Naphthalate) 및 글라스(Glass)로 이루어진 군에서 선택된 어느 하나를 이용할 수 있으나, 본 발명의 바람직한 실시 예에 있어서는 필름(film) 형태의 글라스 기판을 이용하여 준비하였다.However, in one embodiment of the present invention, the transparent substrate may use any one selected from the group consisting of polyethylene terephthalate (PET), polyimide (PI), acryl (Acryl), polyethylene naphthalate (PEN), and glass. However, in the preferred embodiment of the present invention, a glass substrate in the form of a film was prepared.
다음으로 상기 투명기판의 일면에 일정 두께의 제 1 전도성 투명막을 증착하는 단계(S200)로, 상기 제 1 전도성 투명막의 증착 방법은 PVD(Physical Vapour Deposition), CVD(Chemical Vapor Deposition), PECVD(Plasma Enhanced Chemical Vapor Deposition) 등의 스퍼터링(Sputtering) 공정, 스크린 프린팅(Screen Printing), 그라이버(Gravure), 그라이버 오프셋(Gravure Offset) 또는 잉크젯(Intjet) 등의 다이렉트 프린팅(Direct Printing), 코팅(Coating) 공정, 습식 또는 건식도금 공정 등을 이용하여 증착할 수 있다.Next, a step of depositing a first conductive transparent film having a predetermined thickness on one surface of the transparent substrate (S200), the deposition method of the first conductive transparent film is PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition), PECVD (Plasma) Sputtering process such as Enhanced Chemical Vapor Deposition, Screen Printing, Gravure, Gravure Offset or Direct Printing, Coating (Intjet), etc. E) process, wet or dry plating process can be used.
그러나 본 발명의 바람직한 실시 예에 있어서는 스퍼터(sputter)를 이용하였으며, 15㎚로 증착하였다.However, in the preferred embodiment of the present invention, a sputter was used and deposited at 15 nm.
다만, 증착 두께는 반드시 15㎚로 한정되는 것은 아니며, 사용상태에 따라 다양하게 조절 가능함은 물론이다. However, the deposition thickness is not necessarily limited to 15 nm, of course, can be variously adjusted according to the use state.
그리고 상기 제 1 전도성 투명막은 다양한 소재를 이용할 수 있으나, 본 발명의 실시 예에 있어서는 인듐-틴-옥사이드(ITO), 인듐-징크-옥사이드(IZO), AZO(Al-dopedZnO), 탄소나노튜브(CNT), 전도성 고분자(PEDOT;poly(3,4-ethylenedioxythiophene)), 은(Ag) 및 구리(Cu) 투명잉크 중 어느 하나를 이용할 수 있다. In addition, although the first conductive transparent film may use various materials, in an embodiment of the present invention, indium tin oxide (ITO), indium zinc oxide (IZO), AZO (Al-dopedZnO), and carbon nanotubes ( CNT), a conductive polymer (PEDOT; poly (3,4-ethylenedioxythiophene)), silver (Ag) and copper (Cu) transparent ink may be used.
본 발명의 바람직한 실시 예에 있어서는 상기 제 1 전도성 투명막은 인듐-틴-옥사이드(ITO)를 이용하였다. In a preferred embodiment of the present invention, the first conductive transparent film uses indium tin oxide (ITO).
다음으로 증착된 상기 제 1 전도성 투명막의 상부에 일정 두께의 금속막을 증착하는 단계(S300)로, 상기 금속막은 상술한 제 1 전도성 투명막의 증착 방법과 동일하다.Next, in the step (S300) of depositing a metal film having a predetermined thickness on the deposited first conductive transparent film, the metal film is the same as the deposition method of the first conductive transparent film described above.
그리고 상기 금속막은 다양한 소재의 금속을 이용하여 증착될 수 있으나, 본 발명의 일실시 예에 있어서는 구리(Cu), 니켈(Ni), 알루미늄(Al), 크롬(Cr), 몰리브덴(Mo), 은(Ag), 금(Au) 및 몰리브덴(Mo)/알루미늄(Al)/몰리브덴(Mo) 다층막 중 어느 하나를 이용하여 증착하였다.The metal film may be deposited using metals of various materials, but in one embodiment of the present invention, copper (Cu), nickel (Ni), aluminum (Al), chromium (Cr), molybdenum (Mo), and silver Deposition was carried out using any one of (Ag), gold (Au), and molybdenum (Mo) / aluminum (Al) / molybdenum (Mo) multilayer film.
다만, 본 발명의 바람직한 실시 예에 있어서는 크롬(Cr)을 이용하여 300㎚의 두께로 증착하였으나, 반드시 이에 한정되는 것은 아니며 필요에 따라 다양한 두께로 증착될 수 있음은 물론이다. However, in the preferred embodiment of the present invention, but deposited to a thickness of 300nm using chromium (Cr), but is not necessarily limited to this may be deposited to a variety of thickness as necessary.
다음은 증착된 상기 금속막을 노광 또는 에칭하여 전극배선을 형성(S400)하였으며, 상기 전극배선은 후술할 제 1 및 제 2 감지패턴과 각각 연결된다.Next, an electrode wiring is formed by exposing or etching the deposited metal film (S400), and the electrode wiring is connected to first and second sensing patterns, which will be described later.
한편, 상기 전극배선의 형성방법은 다양한 방법을 통해 형성될 수 있으나, 본 발명의 일실시 예에 있어서는 일반적인 포토리소그래피(Photolithography)를 이용하였다.On the other hand, the method of forming the electrode wiring can be formed through a variety of methods, in one embodiment of the present invention used a general photolithography (Photolithography).
이후에는 상기 제 1 전도성 투명막을 노광 또는 에칭하여 제 1 감지 패턴 및 제 2 감지패턴을 형성(S500)한다.Thereafter, the first conductive transparent film is exposed or etched to form a first sensing pattern and a second sensing pattern (S500).
상기 제 1 및 제 2 감지패턴은 정정용량 방식의 터치 패널 소자에서 터치 되는 부분을 센싱(sensing)하고, 터치 된 위치를 결정하는 역할을 수행한다.The first and second sensing patterns serve to sense a touched part of the touch panel device of the capacitance type and to determine a touched position.
이때, 상기 제 1 및 제 2 감지패턴은 다양한 형태로 패턴화 될 수 있으나, 본 발명의 바람직한 실시 있어서는 상기 제 1 감지패턴은 복 수개의 삼각형 또는 사각형 센싱패드로 이루어져 있으며, 각각의 센싱패드는 횡 방향으로 연결된다.In this case, the first and second sensing patterns may be patterned in various forms, but in a preferred embodiment of the present invention, the first sensing pattern is composed of a plurality of triangular or rectangular sensing pads, and each sensing pad is horizontal. Connected in the direction.
그리고 상기 제 2 감지패턴은 서로 이격된 복 수개의 삼각형 또는 사각형 센싱패드로 이루어져 있으며, 상기 제 1 감지패턴 사이에서 상기 제 1 감지패턴의 센싱패드 연결부분과 직교형태를 이루도록 배열되어 있다.The second sensing pattern includes a plurality of triangular or rectangular sensing pads spaced apart from each other, and is arranged to form orthogonal to the sensing pad connection portion of the first sensing pattern between the first sensing patterns.
한편, 상기 제 1 및 제 2 감기패턴의 형성방법은 다양한 방법을 통해 형성될 수 있음은 물론이나, 본 발명의 일실시 예에 있어서는 일반적인 포토리소그래피(Photolithography)를 이용하였다.The method of forming the first and second winding patterns may be formed through various methods. In one embodiment of the present invention, general photolithography is used.
한편, 상기 제 1 및 제 2 감지패턴에 대한 자세한 형태 및 배열 상태는 첨부된 도면을 참고하여 후술하도록 한다.Meanwhile, a detailed shape and arrangement state of the first and second sensing patterns will be described later with reference to the accompanying drawings.
다음은 상기 제 1 감지패턴 또는 제 2 감지패턴 상부의 일 부분에 절연막을 형성하는 단계(S600)로, 상기 절연막은 터치 패널 소자의 투과도를 높이기 위해 투명한 재질로 이루어지는 것이 바람직하다.Next, forming an insulating film on a portion of the first sensing pattern or the second sensing pattern (S600), the insulating film is preferably made of a transparent material to increase the transmittance of the touch panel device.
아울러, 본 발명의 일실시 에에 있어서 상기 절연막은 투명한 소재의 절연성을 확보할 수 있는 소재라면 그 종류에 있어서 크게 제한받지 아니한다.In addition, in one embodiment of the present invention, the insulating film is not limited in kind as long as it is a material capable of ensuring insulation of a transparent material.
그리고 상기 절연막의 경우, 형성되는 두께 역시 크게 제한되지 아니하나, 본 발명의 바람직한 실시 예에 있어서는 3㎛이하로 형성하였으며, 이는 터치 패널 소자의 전제적인 두께를 줄여 상기 패널 소자의 박막화를 꾀하기 위함이다. In addition, in the case of the insulating film, the thickness to be formed is not significantly limited, but in the preferred embodiment of the present invention, the thickness is formed to be 3 μm or less, which is intended to reduce the overall thickness of the touch panel device to reduce the thickness of the panel device. .
한편, 상술한 바와 같이 본 발명의 바람직한 실시 예에 따른 상기 절연막은 상기 제 1 감지패턴 또는 제 2 감지패턴의 일 부분 즉, 국부적으로 형성되는 것을 특징으로 하는데 이를 통해 종래와 같이 터치 패널 소자 전면에 절연막을 형성하는 것보다 패널 소자의 투과도를 매우 향상시킬 수 있는 장점이 있다.On the other hand, as described above, the insulating film according to a preferred embodiment of the present invention is characterized in that the portion of the first sensing pattern or the second sensing pattern, that is, is formed locally, through the touch panel device as before There is an advantage that the transmittance of the panel element can be greatly improved rather than forming the insulating film.
이와 관련하여 상기 절연막이 형성되는 구체적인 위치에 대해서는 첨부된 도면을 참조하여 후술하도록 한다.In this regard, a specific position where the insulating film is formed will be described later with reference to the accompanying drawings.
다음으로 상기 절연막, 상기 제 1 및 제 2 감지패턴 상부 표면 전체에 제 2 전도성 투명막을 증착하는 단계(S700)로, 상기 제 2 전도성 투명막의 증착 방법, 소재, 두께 등은 상술한 상기 제 1 전도성 투명막과 동일하므로 이하에서는 이에 대한 구체적인 설명은 생략하도록 한다.Next, in operation S700 of depositing a second conductive transparent film on the entire surface of the insulating film and the first and second sensing patterns, the deposition method, material, thickness, etc. of the second conductive transparent film may be described in detail. Since the same as the transparent film, a detailed description thereof will be omitted below.
마지막으로 상기 제 2 전도성 투명막을 노광 또는 에칭하여 제 3 감지패턴 및 제 4 감지패턴을 형성하는 단계(S800)로, 상기 제 3 감지패턴 및 제 4 감지패턴의 형성방법은 다양한 방법을 이용하여 형성할 수 있으나, 본 발명의 일실시 예에 있어서는 상기 제 1 및 제 2 감지패턴의 형성방법과 동일하게 일반적인 포토리소그래피를 이용하였다. Finally, the third and fourth sensing patterns are formed by exposing or etching the second conductive transparent layer (S800), and the method of forming the third and fourth sensing patterns is formed using various methods. However, in the exemplary embodiment of the present invention, the general photolithography is used in the same manner as the first and second sensing patterns.
한편, 상기 제 3 감지패턴 및 제 4 감지패턴은 다양한 형상으로 패턴화 될 수 있으나, 본 발명의 바람직한 실시 예에 있어서 상기 제 3 감지패턴은 복 수개의 삼각형 또는 사각형 센싱패드로 이루어져 있으며, 각각의 센싱패드는 종 방향으로 연결되어 있다.Meanwhile, the third sensing pattern and the fourth sensing pattern may be patterned in various shapes. However, in the preferred embodiment of the present invention, the third sensing pattern includes a plurality of triangular or rectangular sensing pads. The sensing pads are connected in the longitudinal direction.
그리고 상기 제 4 감지패턴은 서로 이격된 복 수개의 삼각형 또는 사각형 센싱패드로 이루어져 있으며, 상기 제 3 감지패턴 사이에서 상기 제 3 감지패턴의 센싱패드 연결부분과 직교형태를 이루도록 배열되어 있다.The fourth sensing pattern includes a plurality of triangular or rectangular sensing pads spaced apart from each other, and is arranged so as to be orthogonal to the sensing pad connection portion of the third sensing pattern between the third sensing patterns.
한편, 상기 제 1 내지 제 4 감지패턴의 경우, 상기 제 1 감지패턴은 상기 제 4 감지패턴과 중첩되고, 상기 제 2 감지패턴은 상기 제 3 감지패턴과 중첩되도록 위치한다.In the case of the first to fourth sensing patterns, the first sensing pattern overlaps the fourth sensing pattern, and the second sensing pattern overlaps the third sensing pattern.
즉, 횡 방향으로 연결된 상기 제 1 감지패턴 및 상기 제 1 감지패턴과 중첩되는 상기 제 4 감지패턴은 패널 소자의 터치시 횡 축 방향의 위치를 결정하는 역할을 수행하며, 종 방향으로 연결된 상기 제 3 감지패턴 및 상기 제 3 감지패턴과 중첩되는 상기 제 2 감지패턴은 터치시 종 방향의 위치를 결정하는 역할을 수행하여 결과적으로 상기 제 1 내지 제 4 감지패턴을 통해 터치 패널 소자의 터치 위치를 결정할 수 있다. That is, the first sensing pattern connected in the lateral direction and the fourth sensing pattern overlapping the first sensing pattern serve to determine the position in the horizontal axis direction when the panel element is touched, and the first sensing pattern connected in the longitudinal direction. The second sensing pattern overlapping the third sensing pattern and the third sensing pattern serves to determine the position in the longitudinal direction when the touch is performed, and as a result, the touch position of the touch panel device is determined through the first to fourth sensing patterns. You can decide.
한편, 상술한 상기 절연막은 상기 제 1 감지패턴과 상기 제 3 감지패턴이 교차하는 부분에만 국부적으로 형성되며, 결과적으로 종래 기술과 같이 패널 소자 전면에 절연막을 형성할 필요가 없어 패널 소자의 투과도를 향상시킬 수 있다.On the other hand, the insulating film described above is locally formed only at the intersection of the first sensing pattern and the third sensing pattern, and as a result, there is no need to form an insulating film on the entire surface of the panel element as in the prior art, thereby improving transmittance of the panel element. Can be improved.
한편, 상기 제 3 및 제 4 감지패턴의 상부 표면에는 패널 소자를 보호하기 위한 페시베이션 레이어(Passivation layer)가 더 구비(S900)될 수 있으며, 이를 통해 상기 패널 소자의 내구성을 향상시킬 수 있다.Meanwhile, a passivation layer may be further provided on the upper surfaces of the third and fourth sensing patterns S900 to protect the panel device, thereby improving durability of the panel device.
이하에서는 첨부된 도면을 통하여 본 발명의 일실시 예에 따른 정전용량방식 터치 패널 소자의 구성을 좀 더 상세히 설명하도록 한다.Hereinafter, the configuration of the capacitive touch panel device according to an embodiment of the present invention will be described in more detail with reference to the accompanying drawings.
먼저, 도 4 는 본 발명의 일실시 예에 따른 전극배선, 제 1 감지패턴 및 제 2 감지패턴을 나타낸 도이며, 도 5 는 본 발명의 일실시 예에 따른 제 3 감지패턴 및 제 4 감지패턴을 나타낸 도다.First, FIG. 4 is a diagram illustrating an electrode wiring, a first sensing pattern, and a second sensing pattern according to an embodiment of the present invention, and FIG. 5 is a third sensing pattern and a fourth sensing pattern according to an embodiment of the present invention. To show.
도 4를 참조하면, 상기 금속막에 의해 형성되는 전극배선(220)은 상기 제 1 감지패턴(230a) 및 상기 제 2 감지패턴(230b)의 외곽에 각각 형성되며, 상기 제 1 감지패턴(230a)은 복 수개의 삼각형 또는 사각형 센싱패드로 이루어질 수 있으며, 각각의 센싱패드는 횡 방향으로 연결되어 있다.Referring to FIG. 4, the electrode wirings 220 formed by the metal film are formed on the periphery of the first sensing pattern 230a and the second sensing pattern 230b, respectively, and the first sensing pattern 230a is provided. ) May consist of a plurality of triangular or rectangular sensing pads, each sensing pad being connected in a lateral direction.
그리고 상기 제 2 감지패턴(230b)은 서로 이격된 복 수개의 삼각형 또는 사각형 센싱패드로 이루어져 있으며, 상기 제 1 감지패턴 사이에서 상기 제 1 감지패턴(230a)의 센싱패드 연결부분과 직교형태를 이루도록 배열된다.The second sensing pattern 230b includes a plurality of triangular or rectangular sensing pads spaced apart from each other, and forms an orthogonal shape with a sensing pad connection portion of the first sensing pattern 230a between the first sensing patterns. Are arranged.
한편, 본 발명의 일실시 예에 따른 제 3 감지패턴(240b) 및 제 4 감지패턴(240a)을 나타낸 도 5를 참조하면, 상기 제 3 감지패턴(240b)은 상기 제 2 감지패턴(230b)과 동일 위치 및 동일 형상으로 이루어져 있으나, 상기 제 3 감지패턴(240b)은 상기 제 2 감지패턴(230b)과는 달리 서로 종 방향으로 연결되어 있다. Meanwhile, referring to FIG. 5 illustrating a third sensing pattern 240b and a fourth sensing pattern 240a according to an embodiment of the present invention, the third sensing pattern 240b is the second sensing pattern 230b. The third sensing pattern 240b is connected to each other in the longitudinal direction, unlike the second sensing pattern 230b.
그리고 상기 제 4 감지패턴(240a)은 상기 제 1 감지패턴(230a)과 동일 위치 및 동일 형상으로 이루어져 있으나, 상기 제 1 감지패턴과(230a)는 달리 서로 이격되어 있는 차이가 있다. The fourth sensing pattern 240a has the same position and the same shape as the first sensing pattern 230a, but the first sensing pattern 230a is different from each other.
한편, 상기 제 1 내지 제 4 감지패턴이 중첩된 상태를 나타낸 도 6를 참조하면, 상술한 바와 같이 상기 제 1 및 제 2 감지패턴(230a)(230b) 위에 상기 제 3 및 제 4 감지패턴(240a)(240b)은 중첩된다.Meanwhile, referring to FIG. 6, in which the first to fourth sensing patterns overlap each other, as described above, the third and fourth sensing patterns may be formed on the first and second sensing patterns 230a and 230b. 240a and 240b overlap.
보다 구체적으로는 상기 제 1 감지패턴(230a)의 상부에는 상기 제 4 감지패턴(240a)이 중첩되고, 상기 제 2 감지패턴(230b)의 상부에는 상기 제 3 감지패턴(240b)이 중첩되게 된다.More specifically, the fourth sensing pattern 240a overlaps the upper portion of the first sensing pattern 230a, and the third sensing pattern 240b overlaps the upper portion of the second sensing pattern 230b. .
비록 상기 제 4 감지패턴(240a)은 서로 이격되어 있으나, 횡 방향으로 연결된 상기 제 1 감지패턴(230a)과 중첩됨으로써 상기 제 4 감지패턴(240a) 역시 횡 방향으로 연결된다.Although the fourth sensing patterns 240a are spaced apart from each other, the fourth sensing patterns 240a are also connected in the lateral direction by overlapping the first sensing patterns 230a connected in the lateral direction.
그리고 상기 제 2 감지패턴(230b)의 경우 서로 이격되어 있으나, 종 방향으로 연결된 상기 제 3 감지패턴(240b)과 중첩됨으로써, 상기 제 2 감지패턴(230b) 역시 서로 간에 종 방향으로 연결된다.In addition, the second sensing patterns 230b are spaced apart from each other, but overlap with the third sensing patterns 240b connected in the longitudinal direction, so that the second sensing patterns 230b are also connected to each other in the longitudinal direction.
한편, 상기 제 1 내지 4 감지패턴의 중첩으로 상기 제 1 감지패턴(230a)의 연결부분과 상기 제 3 감지패턴(240b)의 연결부분에서 서로 교차 되는데, 본 발명에 따른 정전용량방식 터치 패널 소자의 경우 이를 막기 위해 상기 연결부분에 국부적으로 절연막(250)을 형성되어 있다.On the other hand, the first to fourth sensing patterns overlap each other at the connecting portion of the first sensing pattern 230a and the connecting portion of the third sensing pattern 240b, the capacitive touch panel device according to the present invention In order to prevent this, an insulating film 250 is formed locally at the connection portion.
이에 대해 도 7 및 도 8를 참조하여 상세히 설명한다.This will be described in detail with reference to FIGS. 7 and 8.
먼저, 도 7 은 도 6 에 도시된 중첩된 감지패턴을 B-B'방향으로 절단한 단면도이며, 도 8 은 C-C'방향으로 절단한 단면도다.First, FIG. 7 is a cross-sectional view cut along the overlapping sensing pattern shown in FIG. 6 in the B-B 'direction, and FIG. 8 is a cross-sectional view cut in the C-C' direction.
도 7 및 도 8에 도시된 바와 같이 본 발명의 일실시 예에 따른 상기 절연막(250)은 횡 방향으로 연결된 제 1 감지패턴(230a) 및 종 방향으로 연결된 제 3 감지패턴(240b)의 교차점만 국부적으로 형성됨을 알 수 있다. As shown in FIGS. 7 and 8, the insulating layer 250 according to an embodiment of the present invention has only an intersection point between the first sensing pattern 230a connected in the lateral direction and the third sensing pattern 240b connected in the longitudinal direction. It can be seen that it is formed locally.
이를 통해 본 발명은 종래기술과 달리 상기 절연막(250)을 패널 소자 전체에 형성할 필요가 없어 상기 패널 소자의 투과도를 극대화할 수 있으며, 아울러, 종래기술에 필수구성인 컨텍트 홀 및 브릿지를 구비할 필요가 없어 제조공정이 단순하고, 경제적이며, 각각의 감지패턴들이 상기 브릿지 역할 및 센서의 역할을 동시에 수행함으로써 센싱(sensing)감도가 우수하다.As a result, the present invention does not need to form the insulating film 250 in the entire panel device, unlike the prior art, thereby maximizing the transmittance of the panel device. In addition, a contact hole and a bridge, which are essential components of the prior art, may be provided. Since the manufacturing process is simple, economical, and each sensing pattern performs the role of the bridge and the sensor at the same time, the sensing sensitivity is excellent.
아울러 별도의 페시베이션 레이어(도시되지 않음)를 구비하여 패널 소자의 내구성을 향상시킬 수 있는 우수한 효과가 있다 할 것이다.In addition, by having a separate passivation layer (not shown) will have an excellent effect to improve the durability of the panel element.
이상에서 살펴본 바와 같이 본 발명은 바람직한 실시 예를 들어 도시하고 설명하였으나, 상기한 실시 예에 한정되지 아니하며 본 발명의 정신을 벗어나지 않는 범위 내에서 당해 발명이 속하는 기술분야에서 통상의 지식을 가진 자에 의해 다양한 변경과 수정이 가능하다 할 것이다. As described above, the present invention has been illustrated and described with reference to preferred embodiments, but is not limited to the above-described embodiments, and is provided to those skilled in the art without departing from the spirit of the present invention. Various changes and modifications are possible by this.
본 발명은 컴퓨터 또는 핸드폰에 구비되는 터치스크린의 터치 패널 소자로 사용될 수 있으며, 특히, 정전용량방식의 터치 패널 소자이고, 상기 터치 패널 소자의 투과도 및 내구성을 향상시키고 동작안정성이 우수하며, 또한, 제조 공정의 단순화 및 생산비용을 절감시킬 수 있는 터치 패널 소자를 제공할 수 있다.The present invention can be used as a touch panel device of a touch screen provided in a computer or a mobile phone, in particular, a capacitive touch panel device, improves the transmittance and durability of the touch panel device and excellent in operation stability, It is possible to provide a touch panel device that can simplify the manufacturing process and reduce the production cost.

Claims (15)

  1. 정전용량방식 터치 패널 소자의 제조방법에 있어서,In the method of manufacturing a capacitive touch panel device,
    투명 기판을 준비하는 단계;Preparing a transparent substrate;
    상기 기판 일면에 일정 두께의 제 1 전도성 투명막을 증착하는 단계;Depositing a first conductive transparent film having a predetermined thickness on one surface of the substrate;
    상기 제 1 전도성 투명막의 상부에 일정 두께의 금속막을 증착하는 단계;Depositing a metal film having a predetermined thickness on the first conductive transparent film;
    상기 금속막을 노광 또는 에칭하여 전극배선을 형성하는 단계;Exposing or etching the metal film to form electrode wiring;
    상기 제 1 전도성 투명막을 노광 또는 에칭하여 제 1 감지패턴 및 제 2 감지패턴을 형성하는 단계;Exposing or etching the first conductive transparent film to form a first sensing pattern and a second sensing pattern;
    상기 제 1 감지패턴 또는 상기 제 2 감지패턴 상부의 일부분에 절연막을 형성하는 단계;Forming an insulating film on a portion of the first sensing pattern or the second sensing pattern;
    상기 절연막, 상기 제 1 및 제 2 감지패턴 상부에 제 2 전도성 투명막을 증착하는 단계; 및Depositing a second conductive transparent film on the insulating film, the first and second sensing patterns; And
    상기 제 2 전도성 투명막을 노광 또는 에칭하여 제 3 감지패턴 및 제 4 감지패턴을 형성하는 단계;를 포함하는 것을 특징으로 하는 정전용량방식 터치 패널 소자의 제조방법.And exposing or etching the second conductive transparent layer to form a third sensing pattern and a fourth sensing pattern.
  2. 제 1 항에 있어서,The method of claim 1,
    상기 투명 기판은 PET(Polyethylene Terephthalate), PI(polyimide), 아크릴(Acryl), PEN(Polyethylene Naphthalate) 및 글라스(Glass)로 이루어진 군에서 선택된 어느 하나를 이용하는 것을 특징으로 하는 정전용량방식 터치 패널 소자의 제조방법.The transparent substrate may be any one selected from the group consisting of polyethylene terephthalate (PET), polyimide (PI), acrylic (acryl), polyethylene naphthalate (PEN), and glass (glass). Manufacturing method.
  3. 제 2 항에 있어서,The method of claim 2,
    상기 투명 기판은 필름(film)형태로 이루어진 것을 특징으로 하는 정전용량방식 터치 패널 소자의 제조방법.The transparent substrate is a method of manufacturing a capacitive touch panel device, characterized in that consisting of a film (film).
  4. 제 1 항에 있어서,The method of claim 1,
    상기 제 1 및 제 2 전도성 투명막은 인듐-틴-옥사이드(ITO), 인듐-징크-옥사이드(IZO), AZO(Al-dopedZnO), 탄소나노튜브(CNT), 전도성 고분자(PEDOT;poly(3,4-ethylenedioxythiophene)), 은(Ag) 및 구리(Cu) 투명잉크로 이루어진 군에서 선택된 어느 하나로 이루어진 것을 특징으로 하는 정전용량방식 터치 패널 소자의 제조방법.The first and second conductive transparent films may include indium tin oxide (ITO), indium zinc oxide (IZO), AZO (Al-dopedZnO), carbon nanotubes (CNT), conductive polymers (PEDOT; poly (3, 4-ethylenedioxythiophene)), silver (Ag) and copper (Cu) A method for manufacturing a capacitive touch panel device, characterized in that made of any one selected from the group consisting of transparent ink.
  5. 제 4 항에 있어서,The method of claim 4, wherein
    상기 제 1 및 제 2 전도성 투명막은 스퍼터(sputter)를 이용하여 15㎚ 두께로 증착되는 것을 특징으로 하는 정전용량방식 터치 패널 소자의 제조방법.The first and second conductive transparent film is a method of manufacturing a capacitive touch panel device, characterized in that deposited by a thickness of 15nm using a sputter (sputter).
  6. 제 1 항에 있어서,The method of claim 1,
    상기 금속막은 구리(Cu), 니켈(Ni), 알루미늄(Al), 크롬(Cr), 몰리브덴(Mo), 은(Ag), 금(Au) 및 몰리브덴(Mo)/알루미늄(Al)/몰리브덴(Mo) 다층막으로 이루어진 군에서 선택된 어느 하나로 이루어진 것을 특징으로 하는 정전용량방식 터치 패널 소자의 제조방법.The metal film is copper (Cu), nickel (Ni), aluminum (Al), chromium (Cr), molybdenum (Mo), silver (Ag), gold (Au) and molybdenum (Mo) / aluminum (Al) / molybdenum ( Mo) A method of manufacturing a capacitive touch panel device, characterized in that it is made of any one selected from the group consisting of a multilayer film.
  7. 제 6 항에 있어서,The method of claim 6,
    상기 금속막은 스퍼터(sputter)를 이용하여 300㎚ 두께로 증착되는 것을 특징으로 하는 정전용량방식 터치 패널 소자의 제조방법.The metal film is a method of manufacturing a capacitive touch panel device, characterized in that to deposit a 300nm thickness using a sputter (sputter).
  8. 제 1 항에 있어서,The method of claim 1,
    상기 제 1 감지패턴은 제 4 감지패턴과 중첩되고, 제 2 감지패턴은 제 3 감지패턴과 중첩되도록 형성되는 것을 특징으로 하는 정전용량방식 터치 패널 소자의 제조방법.The first sensing pattern overlaps the fourth sensing pattern, and the second sensing pattern is formed to overlap the third sensing pattern.
  9. 제 8 항에 있어서,The method of claim 8,
    상기 제 1 감지패턴은 복 수개의 삼각형 또는 사각형 센싱패드로 이루어져 있으며, 각각의 센싱패드는 횡 방향으로 연결되는 것을 특징으로 하는 정전용량방식 터치 패널 소자의 제조방법.The first sensing pattern comprises a plurality of triangular or rectangular sensing pads, each sensing pad is connected in a lateral direction.
  10. 제 9 항에 있어서,The method of claim 9,
    상기 제 2 감지패턴은 서로 이격된 복 수개의 삼각형 또는 사각형 센싱패드로 이루어져 있으며, 상기 제 1 감지패턴 사이에서 상기 제 1 감지패턴의 센싱패드 연결부분과 직교형태를 이루도록 배열되는 특징으로 하는 정전용량방식 터치 패널 소자의 제조방법.The second sensing pattern is composed of a plurality of triangular or rectangular sensing pads spaced apart from each other, and the capacitance is characterized in that arranged between the first sensing pattern to form orthogonal to the sensing pad connection portion of the first sensing pattern Method for manufacturing a touch panel device.
  11. 제 8 항에 있어서,The method of claim 8,
    상기 제 3 감지패턴은 복 수개의 삼각형 또는 사각형 센싱패드로 이루어져 있으며, 각각의 센싱패드는 종 방향으로 연결되는 것을 특징으로 하는 정전용량방식 터치 패널 소자의 제조방법.The third sensing pattern is composed of a plurality of triangular or rectangular sensing pad, each sensing pad is a manufacturing method of the capacitive touch panel device, characterized in that connected in the longitudinal direction.
  12. 제 11 항에 있어서,The method of claim 11,
    상기 제 4 감지패턴은 서로 이격된 복 수개의 삼각형 또는 사각형 센싱패드로 이루어져 있으며, 상기 제 3 감지패턴 사이에서 상기 제 3 감지패턴의 센싱패드 연결부분과 직교형태를 이루도록 배열되는 특징으로 하는 정전용량방식 터치 패널 소자의 제조방법.The fourth sensing pattern includes a plurality of triangular or rectangular sensing pads spaced apart from each other, and the capacitive capacitor is arranged to form orthogonal to the sensing pad connection portion of the third sensing pattern between the third sensing patterns. Method of manufacturing a touch panel device.
  13. 제 1 항에 있어서,The method of claim 1,
    상기 절연막은 3㎛ 이하로 형성되는 것을 특징으로 하는 정전용량방식 터치 패널 소자의 제조방법.The insulating film is a method of manufacturing a capacitive touch panel device, characterized in that formed in 3㎛ or less.
  14. 제 1 항에 있어서,The method of claim 1,
    상기 제 3 및 제 4 감지패턴의 상부 표면에는 페시베이션 레이어(Passivation layer)가 더 구비되는 것을 특징으로 하는 정전용량방식 터치 패널 소자의 제조방법.A passivation layer is further provided on upper surfaces of the third and fourth sensing patterns.
  15. 제 1 항 내지 제 14 항 중 어느 한 항으로 제조되는 정전용량방식 터치 패널 소자.The capacitive touch panel device manufactured by any one of claims 1 to 14.
PCT/KR2011/007366 2010-10-05 2011-10-05 Electrostatic capacity-type touch panel device and method for manufacturing same WO2012047014A2 (en)

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