WO2015030404A1 - Touch sensing electrode and touch screen panel having same - Google Patents

Touch sensing electrode and touch screen panel having same Download PDF

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Publication number
WO2015030404A1
WO2015030404A1 PCT/KR2014/007629 KR2014007629W WO2015030404A1 WO 2015030404 A1 WO2015030404 A1 WO 2015030404A1 KR 2014007629 W KR2014007629 W KR 2014007629W WO 2015030404 A1 WO2015030404 A1 WO 2015030404A1
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Prior art keywords
pattern
metal
sensing
sensing electrode
touch
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PCT/KR2014/007629
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French (fr)
Korean (ko)
Inventor
하경수
김상수
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동우화인켐 주식회사
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Publication of WO2015030404A1 publication Critical patent/WO2015030404A1/en

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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04112Electrode mesh in capacitive digitiser: electrode for touch sensing is formed of a mesh of very fine, normally metallic, interconnected lines that are almost invisible to see. This provides a quite large but transparent electrode surface, without need for ITO or similar transparent conductive material

Definitions

  • the present invention relates to a touch sensing electrode and a touch screen panel having the same, and more particularly, to a touch sensing electrode having excellent electrical conductivity and visibility and a touch screen panel having the same.
  • the touch screen panel is a screen panel equipped with a special input device to receive the position when touched by hand.
  • the touch screen panel receives input data directly from the screen so that when a person's hand or an object touches a character or a specific location displayed on the screen without using a keyboard, the touch screen panel can identify the location and perform specific processing by the stored software. It is made possible by being laminated
  • a transparent touch sensing electrode In order to recognize the touched portion without degrading the visibility of the image displayed on the screen, the use of a transparent touch sensing electrode is essential, and typically, a sensing pattern formed in a predetermined pattern is used.
  • GFF glass-ITO film-ITO film
  • G1F glass-ITO film
  • G2 glass-only
  • a structure shown in FIG. 1 may be cited as a conventional transparent sensing electrode structure.
  • the transparent sensing electrode may be formed of the first sensing pattern 10 and the second sensing pattern 20.
  • the first sensing pattern 10 and the second sensing pattern 20 are disposed in different directions to provide information about the X and Y coordinates of the touched point. Specifically, when a human hand or an object contacts the transparent substrate, the capacitance according to the contact position toward the driving circuit side via the first sensing pattern 10, the second sensing pattern 20, and the metal wiring which is the position detecting line. The change is conveyed. Then, the contact position is grasped by the change of the capacitance converted into an electrical signal by the X and Y input processing circuit (not shown) or the like.
  • first sensing pattern 10 and the second sensing pattern 20 are formed on the same substrate, and each pattern must be electrically connected to sense a touched point.
  • first sensing patterns 10 are connected to each other, but the second sensing patterns 20 are separated from each other in an island form, a separate connection is required to electrically connect the second sensing patterns 20.
  • An electrode (bridge electrode) 50 is required.
  • the bridge electrode 50 should not be electrically connected to the first sensing pattern 10, the bridge electrode 50 should be formed on a different layer from the first sensing pattern 10. To show this structure, an enlarged view of a portion where the bridge electrode 50 is formed in the A-A 'cross section of FIG. 1 is shown in FIG.
  • sensing patterns 10 and 20 are formed on a substrate 100, and an insulating layer 30 and a bridge electrode 50 are formed thereon.
  • the first sensing pattern 10 and the second sensing pattern 20 are spaced apart from each other, and are separated from the bridge electrode 50 by the insulating layer 30 formed thereon.
  • the first sensing pattern 10 is electrically insulated from the bridge electrode 50, and as described above, since the second sensing pattern 20 needs to be electrically connected, the bridge electrode 50 is used. Is electrically connected.
  • a contact hole 40 may be formed on the insulating layer 30. There is a need.
  • the bridge electrode 50 is typically formed of a metal in order to increase the electrical conductivity, there is a problem that the pattern is visible due to the difference in reflectance with the sensing pattern.
  • the bridge electrode 50 is formed of a metal with a very narrow width
  • the visibility can be improved and the process can be simplified by forming with the metal wiring, but to form a narrow width
  • the electrical resistance is increased and the electrical conductivity is lowered, resulting in a slower detection speed. there is a problem.
  • Japanese Patent Application Laid-Open No. 2008-98169 proposes a transparent conductive film in which an undercoat layer composed of two layers having different refractive indices is formed between a transparent substrate and a transparent conductive layer.
  • Patent Document 1 Japanese Laid-Open Patent No. 2008-98169
  • An object of the present invention is to provide a touch sensing electrode having a high electrical conductivity and a touch screen panel having the same.
  • Another object of the present invention is to provide a touch sensing electrode having low visibility according to a difference in reflectance for each position, and a touch screen panel having the same.
  • Another object of the present invention is to provide a touch sensing electrode having a narrow bezel and a touch screen panel having the same.
  • Touch sensing electrode having a metal plating layer on top.
  • the sensing pattern other than the metal mesh structure is a transparent electrode pattern formed of a metal oxide, touch sensing electrode.
  • the thickness of the metal plating layer is 500 to 1,000nm, touch sensing electrode.
  • the touch sensing electrode according to 1 above formed on one surface of a cover window substrate or a display panel of the touch screen panel.
  • At least one of the sensing patterns are formed by forming a metal plating pattern on the upper surface of the metal mesh pattern after forming a metal mesh pattern, manufacturing method of the touch sensing electrode.
  • the sensing pattern other than the metal mesh pattern is formed of a metal oxide
  • the touch screen panel including the touch sensing electrode of any one of the above 1 to 7.
  • a display device comprising the above touch screen panel.
  • the touch sensing electrode of the present invention has a metal plating layer on top of the metal mesh electrode to increase the electrical conductivity of the metal mesh electrode, thereby exhibiting an excellent sensing speed.
  • the touch sensing electrode of the present invention may lower the visibility of the metal mesh electrode when the metal plating layer is used as a material having a low reflectance.
  • the touch sensing electrode of the present invention may include a metal plating layer on the metal wiring connecting the sensing pattern to the circuit, thereby maintaining a high electric conductivity even when the metal wiring is narrowed, thereby implementing a narrow bezel display device.
  • the touch sensing electrode of the present invention is disposed on different planes (upper and lower surface of the insulating layer) where the first sensing pattern and the second sensing pattern are different, so that there is no need for contact holes, and thus, the manufacturing process is simpler. .
  • 1 is a schematic plan view of a conventional touch sensing electrode.
  • FIG. 2 is a schematic vertical cross-sectional view of a conventional touch sensing electrode.
  • FIG 3 is a schematic plan view according to an embodiment of a touch sensing electrode according to the present invention.
  • FIG. 4 is a schematic vertical cross-sectional view of a portion of the touch sensing electrode of the present invention shown in FIG.
  • FIG. 5 is a schematic vertical cross-sectional view according to another embodiment of the touch sensing electrode according to the present invention.
  • FIG. 6 is a schematic vertical cross-sectional view of a portion of the touch sensing electrode of the present invention shown in FIG.
  • FIG. 7 is a view schematically showing an embodiment of a method of manufacturing a touch sensing electrode according to the present invention.
  • the present invention includes a first sensing pattern formed on a lower surface of an insulating layer and a second sensing pattern formed on an upper surface of an insulating layer, wherein at least one of the first sensing pattern and the second sensing pattern includes a metal mesh pattern.
  • the present invention relates to a touch sensing electrode having an electrical conductivity and a touch screen panel having the same by providing a metal plating layer thereon.
  • FIG 3 and 4 schematically show an embodiment of the touch sensing electrode of the present invention.
  • the touch sensing electrode of the present invention has a structure in which a first sensing pattern 10 is formed on a lower surface of the insulating layer 30 and a second sensing pattern 20 is formed on an upper surface of the touch sensing electrode, and the first sensing pattern 10 and the second sensing are detected. At least one of the patterns 20 is formed of a metal mesh pattern and has a metal plating layer 200 on an upper surface thereof. 3 illustrates a structure in which both the first sensing pattern and the second sensing pattern are formed of a metal mesh.
  • the first sensing pattern 10 and the second sensing pattern 20 are disposed in different directions to provide information about the X and Y coordinates of the touched point. Specifically, when a human hand or an object comes into contact with the transparent substrate, the capacitance of the capacitance according to the contact position is moved to the driving circuit via the first sensing pattern 10, the second sensing pattern 20, and the metal wiring 70. Change is communicated. Then, the contact position is grasped by the change of the capacitance converted into an electrical signal by the X and Y input processing circuit (not shown) or the like.
  • the first sensing pattern 10 and the second sensing pattern 20 are formed on the substrate 100, and each pattern must be electrically connected to detect a touched point.
  • the sensing patterns are formed on the same plane as illustrated in FIGS. 1 and 2, the first sensing pattern 10 is connected to each other, but the second sensing pattern 20 has an island pattern.
  • the structure is separated from each other, and thus, a separate bridge electrode 50 is required to electrically connect the second sensing pattern 20.
  • the touch sensing electrode of the present invention since the first sensing pattern 10 and the second sensing pattern 20 are formed on different planes of the insulating layer 30, there is no need for a conventional bridge electrode or contact hole forming process. . Therefore, the problem of the contact resistance and the process of generating the contact hole by the bridge electrode does not occur.
  • ITO indium tin oxide
  • metal has excellent electrical conductivity but high reflectance, which causes a problem of poor visibility when applied to a touch screen.
  • the present invention forms a sensing pattern with a metal but has a mesh structure pattern, thereby simultaneously achieving excellent electrical conductivity and visibility.
  • the metal forming the metal mesh pattern is not particularly limited as long as it is a metal having electrical conductivity, and examples thereof include silver (Ag), gold (Au), aluminum (Al), and molybdenum (Mo). have.
  • a material that can be formed together with the metal wiring 70 can be used, for example, molybdenum.
  • the specific form of the mesh structure is not particularly limited.
  • a rectangular rectangular mesh structure, a rhombus mesh structure, a hexagonal mesh structure, etc. may be mentioned, but it is not limited to this.
  • the thickness (height) of the bridge electrode 50 is not particularly limited, and may be, for example, 20 to 300 nm. If the thickness of the bridge electrode 30 is less than 20 nm, the electrical resistance may increase, and thus the touch sensitivity may be lowered.
  • the width of the metal mesh pattern is not particularly limited, and may be, for example, 2 to 30 ⁇ m, preferably 2 to 20 ⁇ m, but is not limited thereto. When the width of the metal mesh pattern is 2 to 30 mu m, the visibility of the pattern may be reduced and appropriate electrical resistance may be obtained.
  • the metal mesh pattern is not formed in a wide width. Since the electrical resistance is inversely proportional to the cross-sectional area of the charge travel path, the narrow width of the metal mesh pattern causes the cross-sectional area of the charge travel path to be small, which in turn limits the electrical conductivity. In order to solve this problem, simply forming the metal mesh pattern to have a high height, the accuracy of the pattern is lowered and the problem that the substrate 100 is bent occurs.
  • the present invention solves the above-described problem by providing a separate metal plating layer 200 on the sensing patterns 10 and 20 formed of the metal mesh pattern.
  • the metal plating layer 200 is formed on the sensing patterns 10 and 20 to widen the cross-sectional area of the movement path of the charge, thereby greatly improving the electrical conductivity of the sensing patterns 10 and 20.
  • the metal plating layer 200 is electrically conductive and may be used without particular limitation as long as it is a material capable of plating on the metal mesh pattern. For example, silver (Ag), gold (Au), copper (Cu), and the like, but are not limited thereto.
  • the metal plating layer 200 is formed on the metal mesh pattern, it is preferable to use a material having low reflectance in view of visibility. In that aspect, it is preferable to use copper (Cu).
  • the thickness of the metal plating layer 200 is not particularly limited, but is preferably 500 to 1,000 nm in terms of improving the electrical conductivity but not affecting the overall structure of the touch sensing electrode.
  • the other when only one of the first sensing pattern 10 and the second sensing pattern 20 is formed of a metal mesh pattern, the other may be formed of a conventional touch sensing pattern.
  • 5 and 6 illustrate a schematic structure of a touch sensing electrode in which the second sensing pattern 20 is formed in a metal mesh pattern.
  • the sensing pattern other than the metal mesh may be used without limitation in the material used in the art, and in order not to impair visibility of the image displayed on the screen, it is preferable to use a transparent material or formed in a fine pattern.
  • a transparent material or formed in a fine pattern include metal oxides such as indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium zinc tin oxide (IZTO), and cadmium tin oxide (CTO). These may be used alone or in combination of two or more, preferably indium tin oxide (ITO) may be used.
  • the insulating layer 30 functions to electrically insulate the first sensing pattern 10 and the second sensing pattern 20.
  • the insulating layer 30 may be formed using any material and method used in the art without particular limitation.
  • the metal line 70 transmits a change in capacitance sensed in the sensing patterns 10 and 20 to the driving circuit side.
  • the metal wire 70 may be formed of the same material as the metal mesh pattern, and therefore, the metal wire 70 may be formed at the same time when the metal mesh pattern is formed.
  • the metal wire 70 is disposed on the bezel portion of the display device.
  • the metal wire 70 is preferably formed with the minimum width possible.
  • the metal wiring 70 of the present invention may further include a metal plating layer 200 thereon.
  • the metal plating layer 200 on the upper portion of the metal wiring may be formed of the same material as the metal plating layer 200 formed on the bridge electrode 50, and may be formed at the same time.
  • the touch sensing electrode of the present invention is formed on the substrate 100.
  • the substrate 100 may be a material commonly used in the art without limitation, for example, glass, polyethersulphone (PES), polyacrylate (PAR, polyacrylate), polyether imide (PEI, polyetherimide, polyethylene naphthalate (PEN, polyethyelenen napthalate), polyethylene terephthalate (PET, polyethyelene terepthalate), polyphenylene sulfide (PPS), polyallylate, polyimide, polycarbonate ( PC, polycarbonate), cellulose tri acetate (TAC), cellulose acetate propionate (CAP), and the like.
  • PES polyethersulphone
  • PAR polyacrylate
  • PEI polyether imide
  • PEN polyethylene naphthalate
  • PET polyethyelene terepthalate
  • PPS polyphenylene sulfide
  • PC polycarbonate
  • TAC cellulose tri acetate
  • CAP cellulose acetate propionate
  • the substrate 100 may be one surface of a cover window substrate or a display panel forming an outermost surface of the touch screen panel.
  • the touch sensing electrode of the present invention may further include a transparent dielectric layer between the substrate 100 and the sensing pattern as necessary.
  • the transparent dielectric layer improves the optical uniformity of the touch screen panel by reducing the difference in optical characteristics due to positional structural differences according to the sensing pattern structure.
  • the transparent dielectric layer may be formed by mixing niobium oxide, silicon oxide, cerium oxide, indium oxide, or the like, alone or in combination of two or more thereof.
  • the formation method may be a vacuum deposition method, a sputtering method, an ion plating method, and the like, and may be easily manufactured in the form of a thin film through the above method.
  • the transparent dielectric layer may be formed of a plurality of layers.
  • each layer may be formed of different materials, and may have different refractive indices and thicknesses.
  • the touch sensing electrode of the present invention forms a sensing pattern formed in different directions on the lower and upper portions of the insulating layer, and at least one of the sensing patterns forms a metal mesh pattern and then a metal plating layer on an upper surface of the metal mesh pattern. It is prepared by forming a.
  • FIG. 7 schematically illustrates an example in which the first sensing pattern 10 and the second sensing pattern 20 are all formed of a metal mesh pattern as an embodiment of a method of manufacturing a touch sensing electrode.
  • description will be made based on this, but the present invention is not limited thereto.
  • the first sensing pattern 10 is formed on the substrate 100 using a metal mesh pattern.
  • the first sensing pattern is formed in the first direction, in which case the metal lines 70 may be formed together.
  • the metal mesh pattern may be applied without limitation by methods known in the art, and may be formed by various thin film deposition techniques such as physical vapor deposition (PVD) and chemical vapor deposition (CVD). For example, it may be formed by reactive sputtering, which is an example of physical vapor deposition. Or by using a photolithography method.
  • PVD physical vapor deposition
  • CVD chemical vapor deposition
  • the metal plating layer 200 is formed on the upper surface thereof.
  • the metal plating layer 200 may be formed by a conventional metal plating method. Although there is no particular limitation on the plating method, an electroplating method is preferable in view of precision to be formed only on the first sensing pattern 10.
  • the substrate is immersed in an electrolyte solution in which metal ions of the anode are present.
  • the metal plating layer 200 is formed on the upper surface of the first sensing pattern 10. If the metal wiring 70 is connected, the metal plating layer 200 is formed on the metal wiring 70.
  • the insulating layer 30 is formed.
  • the insulating layer 30 may be formed by using a method used in the art without particular limitation, and for example, the first sensing pattern including the photocurable or thermosetting insulating layer forming composition and the metal plating layer 200.
  • the substrate 10 may be formed by coating and curing the formed substrate 100.
  • a metal plating layer 200 is formed on the second sensing pattern 20 and the upper surface thereof in the same manner as the first sensing pattern 10 to form the touch sensing electrode of the present invention. It can manufacture.
  • the other sensing pattern may be manufactured by a conventional method using a metal oxide material.
  • a metal oxide material For example, it may be formed by various thin film deposition techniques such as physical vapor deposition (PVD) and chemical vapor deposition (CVD).
  • PVD physical vapor deposition
  • CVD chemical vapor deposition
  • it may be formed by reactive sputtering, which is one example of a physical vapor deposition method, but is not limited thereto. Another example is photolithography.
  • the touch sensing electrode of the present invention can form a touch screen panel through additional processes known in the art.
  • a display device used may include a liquid crystal display, an OLED, a flexible display, but is not limited thereto.
  • a metal mesh pattern and a metal wire having a thickness of 20 nm and a width of 5 ⁇ m and a metal wire were formed of molybdenum on a glass substrate (refractive index: 1.51) to electrically connect the metal mesh pattern and the metal wire.
  • a power supply is connected to the metal wiring, and the other side of the power supply is connected to a copper electrode, and then the substrate and the copper electrode are immersed in a copper electrolyte solution and electroplated to perform the metal mesh pattern and the metal wiring.
  • a copper plating layer was formed on the surface (first sensing pattern).
  • the metal mesh pattern and the metal plating layer are formed in the same manner except that the metal mesh pattern is formed in a different direction from the metal mesh pattern manufactured above (second sensing). Pattern) and a touch sensing electrode.
  • the refractive index and the extinction coefficient are described based on the light of 550nm wavelength.
  • a touch sensing electrode was manufactured in the same manner as in Example 1, except that the sensing pattern (first sensing pattern) under the insulating layer was formed of indium tin oxide (ITO) ( refractive index: 1.8).
  • ITO indium tin oxide
  • a touch sensing electrode was manufactured in the same manner as in Example 1, except that the copper plating layer was not formed and molybdenum was formed to have a thickness of 300 nm.
  • a touch sensing electrode was manufactured in the same manner as in Example 2, except that the copper plating layer was not formed and molybdenum was formed to have a thickness of 300 nm.
  • Reflectance means the average of reflectance in 400 nm-700 nm.
  • first sensing pattern 20 second sensing pattern
  • bridge electrode 200 metal plating layer

Abstract

The present invention relates to a touch sensing electrode and a touch screen panel having the same. More specifically, the present invention relates to a touch sensing electrode which has excellent electrical conductivity, and a touch screen panel having the same, the touch sensing electrode comprising: a first sensing pattern formed on the lower surface of an insulating layer; and a second sensing pattern formed on the upper surface of the insulating layer, wherein at least one of the first sensing pattern and the second sensing pattern has a metal mesh pattern and has a metal plating layer on the upper part thereof.

Description

터치 감지 전극 및 이를 구비하는 터치 스크린 패널Touch sensing electrode and touch screen panel having the same
본 발명은 터치 감지 전극 및 이를 구비하는 터치 스크린 패널에 관한 것으로서, 보다 상세하게는 전기 전도성 및 시인성이 우수한 터치 감지 전극 및 이를 구비하는 터치 스크린 패널에 관한 것이다.The present invention relates to a touch sensing electrode and a touch screen panel having the same, and more particularly, to a touch sensing electrode having excellent electrical conductivity and visibility and a touch screen panel having the same.
통상적으로 터치스크린 패널은 손으로 접촉(touch)하면 그 위치를 입력 받도록 하는 특수한 입력장치를 장착한 스크린 패널이다. 이러한 터치스크린 패널은 키보드를 사용하지 않고 스크린에 나타난 문자나 특정 위치에 사람의 손 또는 물체가 닿으면, 그 위치를 파악하여 저장된 소프트웨어에 의해 특정 처리를 할 수 있도록, 화면에서 직접 입력자료를 받을 수 있게 한 것으로 다층으로 적층되어 구성된다.In general, the touch screen panel is a screen panel equipped with a special input device to receive the position when touched by hand. The touch screen panel receives input data directly from the screen so that when a person's hand or an object touches a character or a specific location displayed on the screen without using a keyboard, the touch screen panel can identify the location and perform specific processing by the stored software. It is made possible by being laminated | stacked in multiple layers.
스크린에 표시되는 영상의 시인성을 저하시키지 않으면서 터치된 부분을 인식하기 위해서는 투명한 터치 감지 전극의 사용이 필수적이며, 통상적으로 소정의 패턴으로 형성된 감지 패턴이 사용된다.In order to recognize the touched portion without degrading the visibility of the image displayed on the screen, the use of a transparent touch sensing electrode is essential, and typically, a sensing pattern formed in a predetermined pattern is used.
터치 스크린 패널에 사용되는 투명 감지 전극 구조에는 여러가지가 소개되어 있으며, 예를 들면, GFF(Glass-ITO film-ITO film), G1F(Glass-ITO film), G2(Glass only) 구조 등을 들 수 있다.Various transparent sensing electrode structures used in the touch screen panel have been introduced. For example, glass-ITO film-ITO film (GFF), glass-ITO film (G1F), glass-only (G2) structures, etc. may be mentioned. have.
예를 들면, 종래 투명 감지 전극 구조로 도 1에 도시된 구조를 들 수 있다.For example, a structure shown in FIG. 1 may be cited as a conventional transparent sensing electrode structure.
투명 감지 전극은 제1 감지 패턴(10)과 제2 감지 패턴(20)으로 형성될 수 있다. 제1 감지 패턴(10)과 제2 감지 패턴(20)은 서로 다른 방향으로 배치되어, 터치되는 지점의 X 좌표 및 Y 좌표에 대한 정보를 제공하게 된다. 구체적으로는, 사람의 손 또는 물체가 투명 기판에 접촉되면, 제1 감지 패턴(10), 제2 감지 패턴(20) 및 위치 검출라인인 금속 배선을 경유하여 구동회로 측으로 접촉위치에 따른 정전용량의 변화가 전달된다. 그리고, X 및 Y 입력처리회로(미도시) 등에 의해 정전용량의 변화가 전기적 신호로 변환됨에 의해 접촉위치가 파악된다.The transparent sensing electrode may be formed of the first sensing pattern 10 and the second sensing pattern 20. The first sensing pattern 10 and the second sensing pattern 20 are disposed in different directions to provide information about the X and Y coordinates of the touched point. Specifically, when a human hand or an object contacts the transparent substrate, the capacitance according to the contact position toward the driving circuit side via the first sensing pattern 10, the second sensing pattern 20, and the metal wiring which is the position detecting line. The change is conveyed. Then, the contact position is grasped by the change of the capacitance converted into an electrical signal by the X and Y input processing circuit (not shown) or the like.
이와 관련하여, 제1 감지 패턴(10) 및 제2 감지 패턴(20)은 동일한 기판 상에 형성되며, 터치되는 지점을 감지하기 위해서는 각 패턴들은 전기적으로 연결되어야 한다. 그런데, 제1 감지 패턴(10)은 서로 연결된 형태이지만 제2 감지 패턴(20)은 섬(island) 형태로 분리된 구조로 되어 있으므로 제2 감지 패턴(20)을 전기적으로 연결하기 위해서는 별도의 연결 전극(브릿지 전극)(50)이 필요하다. In this regard, the first sensing pattern 10 and the second sensing pattern 20 are formed on the same substrate, and each pattern must be electrically connected to sense a touched point. However, since the first sensing patterns 10 are connected to each other, but the second sensing patterns 20 are separated from each other in an island form, a separate connection is required to electrically connect the second sensing patterns 20. An electrode (bridge electrode) 50 is required.
하지만, 상기 브릿지 전극(50)은 제1 감지 패턴(10)과 전기적으로 연결되어서는 안되므로, 제1 감지 패턴(10)과는 다른 층에 형성되어야 한다. 이러한 구조를 나타내기 위해, 도 1의 A-A' 단면 중 브릿지 전극(50)이 형성된 부분의 확대도를 도 2에 도시하였다.However, since the bridge electrode 50 should not be electrically connected to the first sensing pattern 10, the bridge electrode 50 should be formed on a different layer from the first sensing pattern 10. To show this structure, an enlarged view of a portion where the bridge electrode 50 is formed in the A-A 'cross section of FIG. 1 is shown in FIG.
도 2를 참고하면, 기판(100) 상에 감지 패턴(10, 20)이 형성되어 있고, 그 위에 절연층(30) 및 브릿지 전극(50)이 형성되어 있다. 제1 감지 패턴(10)과 제2 감지 패턴(20)은 서로 이격되어 있으며, 그 상부에 형성된 절연층(30)에 의해 브릿지 전극(50)과 구분되어 있다. 그 중 제1 감지 패턴(10)은 브릿지 전극(50)과 서로 전기적으로 절연되어 있는 상태이며, 전술한 바와 같이 제2 감지 패턴(20)은 전기적으로 연결될 필요가 있으므로 브릿지 전극(50)을 사용하여 전기적으로 연결된다. 섬 형태로 분리된 제2 감지 패턴(20)을 제1 감지 패턴(10)과는 전기적으로 차단되면서도 브릿지 전극(50)으로 연결하기 위해서는, 절연막(30) 상에 컨택홀(40)을 형성할 필요가 있다.Referring to FIG. 2, sensing patterns 10 and 20 are formed on a substrate 100, and an insulating layer 30 and a bridge electrode 50 are formed thereon. The first sensing pattern 10 and the second sensing pattern 20 are spaced apart from each other, and are separated from the bridge electrode 50 by the insulating layer 30 formed thereon. The first sensing pattern 10 is electrically insulated from the bridge electrode 50, and as described above, since the second sensing pattern 20 needs to be electrically connected, the bridge electrode 50 is used. Is electrically connected. In order to connect the second sensing pattern 20 separated in an island form to the bridge electrode 50 while being electrically disconnected from the first sensing pattern 10, a contact hole 40 may be formed on the insulating layer 30. There is a need.
그런데, 브릿지 전극(50)은 전기 전도도를 높이기 위해 통상적으로 금속으로 형성되는데, 감지 패턴과의 반사율 차이로 인해 패턴이 시인될 수 있는 문제가 있다.By the way, the bridge electrode 50 is typically formed of a metal in order to increase the electrical conductivity, there is a problem that the pattern is visible due to the difference in reflectance with the sensing pattern.
이러한 시인성 문제를 해결하기 위해, 브릿지 전극(50)을 금속으로 매우 좁은 폭으로 형성하는 경우 시인성을 개선할 수 있고 금속 배선과 함께 형성하여 공정을 단순화 할 수 있다는 장점이 있으나, 좁은 폭으로 형성하기 위한 고정밀도의 공정 설비를 요하고, 정교한 패턴 형성을 위해 시간이 소요되는 문제 외에도 전기 저항이 증가하여 전기 전도도가 저하되므로 감지 속도가 느려지는 문제가 발생하여, 시인성과 전기 전도도는 동시에 달성하기 어려운 문제가 있다.In order to solve this visibility problem, when the bridge electrode 50 is formed of a metal with a very narrow width, there is an advantage that the visibility can be improved and the process can be simplified by forming with the metal wiring, but to form a narrow width In addition to the high precision process equipment, and the time-consuming problem of forming a precise pattern, the electrical resistance is increased and the electrical conductivity is lowered, resulting in a slower detection speed. there is a problem.
또한, 최근 베젤의 폭을 좁힌 디스플레이에 대한 생산 및 연구가 진행되고 있는데, 베젤의 폭을 좁힐수록 베젤 부분에 숨겨진 금속 배선의 전기 저항이 증가하는 문제가 있다.In addition, the production and research of a display having a narrower bezel has been recently conducted. As the width of the bezel is narrowed, there is a problem in that electrical resistance of the metal wiring hidden in the bezel portion increases.
일본공개특허 제2008-98169호에는 투명 기재와 투명 도전층 사이에 굴절률이 상이한 2 개의 층으로 이루어지는 언더코트층을 형성한 투명 도전성 필름이 제안되어 있다.Japanese Patent Application Laid-Open No. 2008-98169 proposes a transparent conductive film in which an undercoat layer composed of two layers having different refractive indices is formed between a transparent substrate and a transparent conductive layer.
[선행기술문헌][Preceding technical literature]
[특허문헌][Patent Documents]
(특허문헌 1) 일본공개특허 제2008-98169호(Patent Document 1) Japanese Laid-Open Patent No. 2008-98169
본 발명은 높은 전기 전도도를 갖는 터치 감지 전극 및 이를 구비한 터치 스크린 패널을 제공하는 것을 목적으로 한다.An object of the present invention is to provide a touch sensing electrode having a high electrical conductivity and a touch screen panel having the same.
또한, 본 발명은 위치별 반사율 차이에 따른 시인성이 적은 터치 감지 전극 및 이를 구비한 터치 스크린 패널을 제공하는 것을 다른 목적으로 한다.Another object of the present invention is to provide a touch sensing electrode having low visibility according to a difference in reflectance for each position, and a touch screen panel having the same.
또한, 본 발명은 좁은 폭의 베젤을 구비할 수 있는 터치 감지 전극 및 이를 구비한 터치 스크린 패널을 제공하는 것을 또 다른 목적으로 한다.In addition, another object of the present invention is to provide a touch sensing electrode having a narrow bezel and a touch screen panel having the same.
1. 절연층의 하면에 형성되는 제1 감지 패턴과 절연층의 상면에 형성되는 제2 감지 패턴을 포함하며, 상기 제1 감지 패턴과 제2 감지 패턴은 중 적어도 하나는 금속 메쉬 패턴을 가지며 그 상부에 금속 도금층을 구비하는, 터치 감지 전극.1. A first sensing pattern formed on a lower surface of an insulating layer and a second sensing pattern formed on an upper surface of an insulating layer, wherein at least one of the first sensing pattern and the second sensing pattern has a metal mesh pattern. Touch sensing electrode having a metal plating layer on top.
2. 위 1에 있어서, 상기 제1 감지 패턴 및 상기 제2 감지 패턴을 구동 회로와 연결하는 금속배선 중 적어도 하나는 그 상면에 금속 도금층을 더 구비하는, 터치 감지 전극.2. The touch sensing electrode of 1 above, wherein at least one of the metal wires connecting the first and second sensing patterns with the driving circuit further includes a metal plating layer on an upper surface thereof.
3. 위 1에 있어서, 상기 금속 메쉬 구조가 아닌 감지 패턴은 금속 산화물로 형성된 투명 전극 패턴인, 터치 감지 전극.3. In the above 1, wherein the sensing pattern other than the metal mesh structure is a transparent electrode pattern formed of a metal oxide, touch sensing electrode.
4. 위 1에 있어서, 상기 금속 도금층은 전기 도금으로 형성된 것인, 터치 감지 전극.4. In the above 1, wherein the metal plating layer is formed by electroplating, touch sensing electrode.
5. 위 1에 있어서, 상기 금속 도금층은 구리로 형성된 것인, 터치 감지 전극.5. In the above 1, wherein the metal plating layer is formed of copper, touch sensing electrode.
6. 위 1에 있어서, 상기 금속 도금층의 두께는 500 내지 1,000nm인, 터치 감지 전극.6. In the above 1, the thickness of the metal plating layer is 500 to 1,000nm, touch sensing electrode.
7. 위 1에 있어서, 터치스크린 패널의 커버 윈도우 기판 또는 디스플레이 패널의 일면 상에 형성되는, 터치 감지 전극.7. The touch sensing electrode according to 1 above, formed on one surface of a cover window substrate or a display panel of the touch screen panel.
8. 절연층의 하부와 상부에 각각 서로 다른 방향으로 형성되는 감지 패턴을 형성하고,8. forming sensing patterns formed on the lower and upper portions of the insulating layer in different directions, respectively;
상기 감지 패턴 중 적어도 하나는 금속 메쉬 패턴을 형성한 후 상기 금속 메쉬 패턴의 상면에 금속 도금층을 형성하여 제조되는, 터치 감지 전극의 제조방법.At least one of the sensing patterns are formed by forming a metal plating pattern on the upper surface of the metal mesh pattern after forming a metal mesh pattern, manufacturing method of the touch sensing electrode.
9. 위 8에 있어서, 상기 금속 메쉬 패턴 형성 시에 금속 배선도 동시에 형성하는, 터치 감지 전극의 제조방법.9. In the above 8, wherein the metal wiring pattern is formed at the same time when the metal mesh pattern is formed, the manufacturing method of the touch sensing electrode.
10. 위 9에 있어서, 상기 금속 배선의 상면에 금속 도금층을 더 형성하는, 터치 감지 전극의 제조방법.10. In the above 9, wherein the metal plating layer is further formed on the upper surface of the metal wiring, manufacturing method of the touch sensing electrode.
11. 위 8에 있어서, 상기 금속 메쉬 패턴이 아닌 감지 패턴은 금속 산화물로 형성하는, 터치 감지 전극의 제조방법.11. In the above 8, wherein the sensing pattern other than the metal mesh pattern is formed of a metal oxide, manufacturing method of the touch sensing electrode.
12. 위 1 내지 7 중 어느 한 항의 터치 감지 전극을 포함하는 터치 스크린 패널.12. The touch screen panel including the touch sensing electrode of any one of the above 1 to 7.
13. 위 12의 터치 스크린 패널을 포함하는 디스플레이 장치.13. A display device comprising the above touch screen panel.
본 발명의 터치 감지 전극은 금속 메쉬 전극의 상부에 금속 도금층을 구비하여 금속 메쉬 전극의 전기 전도도를 높임으로써 우수한 감지 속도를 나타낸다.The touch sensing electrode of the present invention has a metal plating layer on top of the metal mesh electrode to increase the electrical conductivity of the metal mesh electrode, thereby exhibiting an excellent sensing speed.
또한, 본 발명의 터치 감지 전극은 금속 도금층을 반사율이 낮은 소재로 사용하는 경우 금속 메쉬 전극의 시인성을 낮출 수 있다.In addition, the touch sensing electrode of the present invention may lower the visibility of the metal mesh electrode when the metal plating layer is used as a material having a low reflectance.
또한, 본 발명의 터치 감지 전극은 감지 패턴을 회로에 연결하는 금속 배선에 금속 도금층을 구비함으로써, 금속 배선의 폭을 좁히더라도 높은 전기 전도도를 유지함으로써, 좁은 베젤의 디스플레이 장치를 구현할 수 있다.In addition, the touch sensing electrode of the present invention may include a metal plating layer on the metal wiring connecting the sensing pattern to the circuit, thereby maintaining a high electric conductivity even when the metal wiring is narrowed, thereby implementing a narrow bezel display device.
또한, 본 발명의 터치 감지 전극은 제1 감지 패턴과 제2 감지 패턴이 서로 다른 평면(절연층의 상면과 하면)에 배치되므로, 컨택홀이 필요 없어 접촉 저항 문제가 없으며 제조 공정이 보다 단순하다.In addition, the touch sensing electrode of the present invention is disposed on different planes (upper and lower surface of the insulating layer) where the first sensing pattern and the second sensing pattern are different, so that there is no need for contact holes, and thus, the manufacturing process is simpler. .
도 1은 종래 터치 감지 전극의 개략적인 평면도이다.1 is a schematic plan view of a conventional touch sensing electrode.
도 2는 종래 터치 감지 전극의 개략적인 수직 단면도이다.2 is a schematic vertical cross-sectional view of a conventional touch sensing electrode.
도 3은 본 발명에 따른 터치 감지 전극의 일 실시예에 따른 개략적인 평면도이다.3 is a schematic plan view according to an embodiment of a touch sensing electrode according to the present invention.
도 4는 도 3에 도시된 본 발명 터치 감지 전극의 일부분의 개략적인 수직 단면도이다.4 is a schematic vertical cross-sectional view of a portion of the touch sensing electrode of the present invention shown in FIG.
도 5는 본 발명에 따른 터치 감지 전극의 다른 일 실시예에 따른 개략적인 수직 단면도이다.5 is a schematic vertical cross-sectional view according to another embodiment of the touch sensing electrode according to the present invention.
도 6은 도 5에 도시된 본 발명 터치 감지 전극의 일부분의 개략적인 수직 단면도이다.FIG. 6 is a schematic vertical cross-sectional view of a portion of the touch sensing electrode of the present invention shown in FIG.
도 7은 본 발명에 따른 터치 감지 전극 제조방법의 일 실시예를 개략적으로 나타낸 도면이다.7 is a view schematically showing an embodiment of a method of manufacturing a touch sensing electrode according to the present invention.
본 발명은, 절연층의 하면에 형성되는 제1 감지 패턴과 절연층의 상면에 형성되는 제2 감지 패턴을 포함하며, 상기 제1 감지 패턴과 제2 감지 패턴은 중 적어도 하나는 금속 메쉬 패턴을 가지며 그 상부에 금속 도금층을 구비함으로써, 전기 전도도가 우수한 터치 감지 전극 및 이를 구비하는 터치 스크린 패널에 관한 것이다.The present invention includes a first sensing pattern formed on a lower surface of an insulating layer and a second sensing pattern formed on an upper surface of an insulating layer, wherein at least one of the first sensing pattern and the second sensing pattern includes a metal mesh pattern. The present invention relates to a touch sensing electrode having an electrical conductivity and a touch screen panel having the same by providing a metal plating layer thereon.
이하, 도면을 참고하여 본 발명을 보다 상세하게 설명하도록 한다. 다만, 본 명세서에 첨부되는 다음의 도면들은 본 발명의 바람직한 실시예를 예시하는 것이며, 전술한 발명의 내용과 함께 본 발명의 기술사상을 더욱 이해시키는 역할을 하는 것이므로, 본 발명은 그러한 도면에 기재된 사항에만 한정되어 해석되어서는 아니된다.Hereinafter, the present invention will be described in more detail with reference to the drawings. However, the following drawings attached to the present specification are intended to illustrate preferred embodiments of the present invention, and together with the contents of the present invention serves to further understand the technical spirit of the present invention, the present invention described in such drawings It should not be construed as limited to matters.
도 3 및 도 4에는 본 발명의 터치 감지 전극의 일 실시예가 개략적으로 도시되어 있다.3 and 4 schematically show an embodiment of the touch sensing electrode of the present invention.
본 발명의 터치 감지 전극은 절연층(30)의 하면에 제1 감지 패턴(10), 상면에 제2 감지 패턴(20)이 형성된 구조를 가지며, 상기 제1 감지 패턴(10) 및 제2 감지 패턴(20) 중 적어도 하나는 금속 메쉬 패턴으로 형성되고 그 상면에 금속 도금층(200)을 구비한다. 도 3에는 제1 감지 패턴과 제2 감지 패턴이 모두 금속 메쉬로 형성된 구조가 도시되어 있다.The touch sensing electrode of the present invention has a structure in which a first sensing pattern 10 is formed on a lower surface of the insulating layer 30 and a second sensing pattern 20 is formed on an upper surface of the touch sensing electrode, and the first sensing pattern 10 and the second sensing are detected. At least one of the patterns 20 is formed of a metal mesh pattern and has a metal plating layer 200 on an upper surface thereof. 3 illustrates a structure in which both the first sensing pattern and the second sensing pattern are formed of a metal mesh.
제1 감지 패턴(10)과 제2 감지 패턴(20)은, 서로 다른 방향으로 배치되어, 터치되는 지점의 X 좌표 및 Y 좌표에 대한 정보를 제공하게 된다. 구체적으로는, 사람의 손 또는 물체가 투명 기판에 접촉되면, 제1 감지 패턴(10), 제2 감지 패턴(20) 및 금속 배선(70)을 경유하여 구동회로 측으로 접촉위치에 따른 정전용량의 변화가 전달된다. 그리고, X 및 Y 입력처리회로(미도시) 등에 의해 정전용량의 변화가 전기적 신호로 변환됨에 의해 접촉위치가 파악된다.The first sensing pattern 10 and the second sensing pattern 20 are disposed in different directions to provide information about the X and Y coordinates of the touched point. Specifically, when a human hand or an object comes into contact with the transparent substrate, the capacitance of the capacitance according to the contact position is moved to the driving circuit via the first sensing pattern 10, the second sensing pattern 20, and the metal wiring 70. Change is communicated. Then, the contact position is grasped by the change of the capacitance converted into an electrical signal by the X and Y input processing circuit (not shown) or the like.
이와 관련하여, 제1 감지 패턴(10) 및 제2 감지 패턴(20)은 기판(100) 상에 형성되며, 터치되는 지점을 감지하기 위해서는 각 패턴들은 전기적으로 연결되어야 한다. 도 1 및 도 2에 도시된 바와 같이 감지 패턴들이 동일 평면 상에 형성되는 경우에는, 제1 감지 패턴(10)은 서로 연결된 형태이지만 제2 감지 패턴(20)은 단위 패턴이 섬(island) 형태로 분리된 구조가 될 수밖에 없고, 그에 따라 제2 감지 패턴(20)을 전기적으로 연결하기 위해서는 별도의 브릿지 전극(50)이 필요하다. In this regard, the first sensing pattern 10 and the second sensing pattern 20 are formed on the substrate 100, and each pattern must be electrically connected to detect a touched point. When the sensing patterns are formed on the same plane as illustrated in FIGS. 1 and 2, the first sensing pattern 10 is connected to each other, but the second sensing pattern 20 has an island pattern. Inevitably, the structure is separated from each other, and thus, a separate bridge electrode 50 is required to electrically connect the second sensing pattern 20.
그러나, 본 발명의 터치 감지 전극은 제1 감지 패턴(10)과 제2 감지 패턴(20)이 각각 절연층(30)의 서로 다른 평면에 형성되므로 종래의 브릿지 전극이나 컨택홀의 형성 공정도 필요 없다. 따라서, 브릿지 전극에 의한 접촉 저항 및 컨택홀의 생성 공정의 문제가 발생하지 않는다.However, in the touch sensing electrode of the present invention, since the first sensing pattern 10 and the second sensing pattern 20 are formed on different planes of the insulating layer 30, there is no need for a conventional bridge electrode or contact hole forming process. . Therefore, the problem of the contact resistance and the process of generating the contact hole by the bridge electrode does not occur.
한편, 종래 감지 패턴의 재료로 사용되는 인듐주석산화물(ITO)은 투명성은 우수하나 전기 전도도가 금속보다는 낮다. 그리고 금속은 전기 전도도는 우수하나 반사율이 높아 터치 스크린에 적용시 시인성이 좋지 않은 문제가 있다.Meanwhile, indium tin oxide (ITO), which is used as a material of a conventional sensing pattern, has excellent transparency but lower electrical conductivity than metal. In addition, metal has excellent electrical conductivity but high reflectance, which causes a problem of poor visibility when applied to a touch screen.
이에 본 발명은 금속으로 감지 패턴을 형성하되 메쉬 구조의 패턴을 구비함으로써, 우수한 전기 전도도 및 시인성을 동시에 달성한다. Accordingly, the present invention forms a sensing pattern with a metal but has a mesh structure pattern, thereby simultaneously achieving excellent electrical conductivity and visibility.
본 발명에 있어서 금속 메쉬 패턴을 형성하는 금속은 전기 전도도를 갖는 금속이라면 특별히 제한되지 않으며, 예를 들면, 은(Ag), 금(Au), 알루미늄(Al), 몰리브덴(Mo) 등을 들 수 있다. 바람직하게는 금속 배선(70)과 함께 형성할 수 있는 재료를 사용할 수 있으며, 예컨대 몰리브덴을 들 수 있다.In the present invention, the metal forming the metal mesh pattern is not particularly limited as long as it is a metal having electrical conductivity, and examples thereof include silver (Ag), gold (Au), aluminum (Al), and molybdenum (Mo). have. Preferably, a material that can be formed together with the metal wiring 70 can be used, for example, molybdenum.
본 발명에 있어서, 메쉬 구조의 구체적인 형태는 특별히 제한되지 않는다. 예를 들면, 직각 사각형 메쉬 구조, 마름모 메쉬 구조, 육각형 메쉬 구조 등을 들 수 있으나, 이에 한정되는 것은 아니다.In the present invention, the specific form of the mesh structure is not particularly limited. For example, a rectangular rectangular mesh structure, a rhombus mesh structure, a hexagonal mesh structure, etc. may be mentioned, but it is not limited to this.
브릿지 전극(50)의 두께(높이)는 특별히 한정되지 않으며, 예를 들면 20 내지 300nm일 수 있다. 브릿지 전극(30)의 두께가 20nm 미만이면 전기저항이 커져 터치 민감도가 저하될 수 있고, 300nm 초과이면 제조가 용이하지 않다.The thickness (height) of the bridge electrode 50 is not particularly limited, and may be, for example, 20 to 300 nm. If the thickness of the bridge electrode 30 is less than 20 nm, the electrical resistance may increase, and thus the touch sensitivity may be lowered.
금속 메쉬 패턴의 폭은 특별히 한정되지 않으며, 예를 들면 2 내지 30㎛일 수 있고, 바람직하게는 2 내지 20㎛일 수 있으나 이에 제한되는 것은 아니다. 금속 메쉬 패턴의 폭이 2 내지 30㎛일 경우에, 패턴의 시인성을 감소시키고 적정 전기 저항을 가질 수 있다.The width of the metal mesh pattern is not particularly limited, and may be, for example, 2 to 30 μm, preferably 2 to 20 μm, but is not limited thereto. When the width of the metal mesh pattern is 2 to 30 mu m, the visibility of the pattern may be reduced and appropriate electrical resistance may be obtained.
한편, 패턴의 시인성 문제로 인해 금속 메쉬 패턴은 넓은 폭으로 형성되지 않는 것이 바람직하다. 전기 저항은 전하의 이동 경로의 단면적에 반비례하므로, 금속 메쉬 패턴의 좁은 폭은 전하 이동 경로의 단면적을 작게 하는 원인이 되어 결국 전기 전도도에 제한이 생기게 된다. 이러한 문제를 해결하기 위해, 단순히 금속 메쉬 패턴을 높은 높이를 갖도록 형성하게 되면, 패턴의 정밀도가 저하되고 기판(100)이 휘게 되는 문제가 발생하게 된다.On the other hand, due to the visibility of the pattern, it is preferable that the metal mesh pattern is not formed in a wide width. Since the electrical resistance is inversely proportional to the cross-sectional area of the charge travel path, the narrow width of the metal mesh pattern causes the cross-sectional area of the charge travel path to be small, which in turn limits the electrical conductivity. In order to solve this problem, simply forming the metal mesh pattern to have a high height, the accuracy of the pattern is lowered and the problem that the substrate 100 is bent occurs.
이에 본 발명은 금속 메쉬 패턴으로 형성된 감지 패턴(10, 20) 상에 별도의 금속 도금층(200)을 구비하여 전술한 문제를 해결한다. 금속 도금층(200)은 감지 패턴(10, 20) 위에 형성되어 전하의 이동 경로의 단면적을 넓힘으로써 감지 패턴(10, 20)의 전기 전도도를 대폭적으로 향상시킨다. Accordingly, the present invention solves the above-described problem by providing a separate metal plating layer 200 on the sensing patterns 10 and 20 formed of the metal mesh pattern. The metal plating layer 200 is formed on the sensing patterns 10 and 20 to widen the cross-sectional area of the movement path of the charge, thereby greatly improving the electrical conductivity of the sensing patterns 10 and 20.
금속 도금층(200)은 전기 전도성이 있으며, 금속 메쉬 패턴 상에 도금이 가능한 재료라면 특별히 제한되지 않고 사용될 수 있다. 예를 들어, 은(Ag), 금(Au), 구리(Cu) 등을 들 수 있으나, 이에 한정되는 것은 아니다.The metal plating layer 200 is electrically conductive and may be used without particular limitation as long as it is a material capable of plating on the metal mesh pattern. For example, silver (Ag), gold (Au), copper (Cu), and the like, but are not limited thereto.
바람직하게는, 금속 도금층(200)은 금속 메쉬 패턴 상부에 형성되므로 반사율이 낮은 재료를 사용하는 것이 시인성 측면에서 좋다. 그러한 측면에서는 구리(Cu)를 사용하는 것이 바람직하다.Preferably, since the metal plating layer 200 is formed on the metal mesh pattern, it is preferable to use a material having low reflectance in view of visibility. In that aspect, it is preferable to use copper (Cu).
금속 도금층(200)의 두께는 특별히 제한되지는 않으나, 500 내지 1,000 nm인 것이 전기 전도성을 향상시키면서도 터치 감지 전극의 전체 구조에 영향을 미치지 않는 측면에서 바람직하다.The thickness of the metal plating layer 200 is not particularly limited, but is preferably 500 to 1,000 nm in terms of improving the electrical conductivity but not affecting the overall structure of the touch sensing electrode.
본 발명의 다른 실시예로서, 제1 감지 패턴(10)과 제2 감지 패턴(20) 중 어느 하나만 금속 메쉬 패턴으로 형성되는 경우에 다른 하나는 종래의 터치 감지 패턴으로 형성될 수 있다. 도 5 및 도 6에는 제2 감지 패턴(20)이 금속 메쉬 패턴으로 형성된 터치 감지 전극의 개략적인 구조가 도시되어 있다.As another embodiment of the present invention, when only one of the first sensing pattern 10 and the second sensing pattern 20 is formed of a metal mesh pattern, the other may be formed of a conventional touch sensing pattern. 5 and 6 illustrate a schematic structure of a touch sensing electrode in which the second sensing pattern 20 is formed in a metal mesh pattern.
이 경우 금속 메쉬가 아닌 감지 패턴은 당분야에서 사용되는 재료가 제한 없이 사용될 수 있으며, 스크린에 표시되는 영상의 시인성을 저해하지 않기 위해서는, 투명 소재를 사용하거나 또는 미세 패턴으로 형성되는 것이 바람직하다. 구체적인 예를 들면, 인듐주석산화물(ITO), 인듐아연산화물(IZO), 아연산화물(ZnO), 인듐아연주석산화물(IZTO), 카드뮴주석산화물(CTO) 등의 금속 산화물을 들 수 있다. 이들은 단독 또는 2종 이상 혼합하여 사용할 수 있으며, 바람직하게는 인듐주석산화물(ITO)이 사용될 수 있다.In this case, the sensing pattern other than the metal mesh may be used without limitation in the material used in the art, and in order not to impair visibility of the image displayed on the screen, it is preferable to use a transparent material or formed in a fine pattern. Specific examples thereof include metal oxides such as indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium zinc tin oxide (IZTO), and cadmium tin oxide (CTO). These may be used alone or in combination of two or more, preferably indium tin oxide (ITO) may be used.
절연층(30)은 제1 감지 패턴(10)과 제2 감지 패턴(20)을 전기적으로 절연시키는 기능을 한다. 절연층(30)은 당분야에서 사용되는 재료 및 방법을 특별한 제한 없이 사용하여 형성될 수 있다.The insulating layer 30 functions to electrically insulate the first sensing pattern 10 and the second sensing pattern 20. The insulating layer 30 may be formed using any material and method used in the art without particular limitation.
금속 배선(70)은 감지 패턴(10, 20)에서 감지된 용량의 변화를 구동 회로 측에 전달하는 기능을 한다. 금속 배선(70)은 금속 메쉬 패턴과 동일한 소재로 형성될 수 있으며, 그에 따라 금속 메쉬 패턴 형성 시 동시에 형성되는 것이 바람직하다.The metal line 70 transmits a change in capacitance sensed in the sensing patterns 10 and 20 to the driving circuit side. The metal wire 70 may be formed of the same material as the metal mesh pattern, and therefore, the metal wire 70 may be formed at the same time when the metal mesh pattern is formed.
한편, 금속 배선(70)은 디스플레이 장치의 베젤부에 배치되게 되는데, 전술한 바와 같이 베젤이 좁게 형성되는 경우에는, 가능한 최소한의 폭으로 형성되는 것이 바람직하다. 하지만, 금속 배선(70)이 좁게 형성되면 전기 전도도가 저하될 수 있으며, 단선의 위험까지 있을 수 있다. 따라서, 필요에 따라, 본 발명의 금속 배선(70)은 그 상부에 금속 도금층(200)을 더 구비할 수 있다.On the other hand, the metal wire 70 is disposed on the bezel portion of the display device. When the bezel is narrowly formed as described above, the metal wire 70 is preferably formed with the minimum width possible. However, when the metal wiring 70 is narrowly formed, electrical conductivity may be lowered, and there may be a risk of disconnection. Therefore, if necessary, the metal wiring 70 of the present invention may further include a metal plating layer 200 thereon.
금속 배선 상부의 금속 도금층(200)은 브릿지 전극(50) 상부에 형성된 금속 도금층(200)과 동일한 재료로 형성될 수 있으며, 바람직하게는 동시에 형성될 수 있다.The metal plating layer 200 on the upper portion of the metal wiring may be formed of the same material as the metal plating layer 200 formed on the bridge electrode 50, and may be formed at the same time.
본 발명의 터치 감지 전극은 기판(100) 상에 형성된다. The touch sensing electrode of the present invention is formed on the substrate 100.
기판(100)은 당 분야에서 통상적으로 사용되는 소재가 제한 없이 사용될 수 있으며, 예를 들면 유리, 폴리에테르술폰(PES, polyethersulphone), 폴리아크릴레이트(PAR, polyacrylate), 폴리에테르 이미드(PEI, polyetherimide), 폴리에틸렌 나프탈레이트(PEN, polyethyelenen napthalate), 폴리에틸렌 테레프탈레이트(PET, polyethyelene terepthalate), 폴리페닐렌 설파이드(polyphenylene sulfide: PPS), 폴리아릴레이트(polyallylate), 폴리이미드(polyimide), 폴리카보네이트(PC, polycarbonate), 셀룰로오스 트리 아세테이트(TAC), 셀룰로오스 아세테이트 프로피오네이트(cellulose acetate propionate,CAP) 등을 들 수 있다.The substrate 100 may be a material commonly used in the art without limitation, for example, glass, polyethersulphone (PES), polyacrylate (PAR, polyacrylate), polyether imide (PEI, polyetherimide, polyethylene naphthalate (PEN, polyethyelenen napthalate), polyethylene terephthalate (PET, polyethyelene terepthalate), polyphenylene sulfide (PPS), polyallylate, polyimide, polycarbonate ( PC, polycarbonate), cellulose tri acetate (TAC), cellulose acetate propionate (CAP), and the like.
상기 기판(100)은 터치스크린 패널의 최외면을 형성하는 커버 윈도우 기판 또는 디스플레이 패널의 일면일 수 있다.The substrate 100 may be one surface of a cover window substrate or a display panel forming an outermost surface of the touch screen panel.
상기 기판(100)이 커버 윈도우 기판인 경우에는, 본 발명의 터치 감지 전극은 필요에 따라 기판(100)과 감지 패턴 사이에 투명 유전층을 더 포함할 수 있다. 투명 유전층은 감지 패턴 구조에 따른 위치별 구조적 차이에 의한 광학적 특성의 차이를 감소시켜 터치스크린 패널의 광학적 균일도를 개선한다. When the substrate 100 is a cover window substrate, the touch sensing electrode of the present invention may further include a transparent dielectric layer between the substrate 100 and the sensing pattern as necessary. The transparent dielectric layer improves the optical uniformity of the touch screen panel by reducing the difference in optical characteristics due to positional structural differences according to the sensing pattern structure.
투명 유전층은 산화 니오븀, 산화 규소, 산화 세륨, 산화 인듐 등을 각각 단독으로 또는 2종 이상 혼합하여 형성할 수 있다. 형성 방법은 진공증착법, 스퍼터링법, 이온 플레이팅 법 등을 사용할 수 있으며, 상기와 같은 방법을 통해 박막 형태로 용이하게 제조될 수 있다.The transparent dielectric layer may be formed by mixing niobium oxide, silicon oxide, cerium oxide, indium oxide, or the like, alone or in combination of two or more thereof. The formation method may be a vacuum deposition method, a sputtering method, an ion plating method, and the like, and may be easily manufactured in the form of a thin film through the above method.
본 발명에 있어서, 필요에 따라, 투명 유전층은 복수의 층으로 형성될 수 있다. 이 경우 각 층은 서로 다른 소재로 형성될 수 있으며, 서로 다른 굴절률 및 두께를 가질 수 있다.In the present invention, if necessary, the transparent dielectric layer may be formed of a plurality of layers. In this case, each layer may be formed of different materials, and may have different refractive indices and thicknesses.
이하에서는, 본 발명의 터치 감지 전극의 제조방법에 대하여 보다 상세하게 설명하도록 한다.Hereinafter, a method of manufacturing the touch sensing electrode of the present invention will be described in more detail.
본 발명의 터치 감지 전극은 절연층의 하부와 상부에 각각 서로 다른 방향으로 형성되는 감지 패턴을 형성하고, 상기 감지 패턴 중 적어도 하나는 금속 메쉬 패턴을 형성한 후 상기 금속 메쉬 패턴의 상면에 금속 도금층을 형성하여 제조된다. The touch sensing electrode of the present invention forms a sensing pattern formed in different directions on the lower and upper portions of the insulating layer, and at least one of the sensing patterns forms a metal mesh pattern and then a metal plating layer on an upper surface of the metal mesh pattern. It is prepared by forming a.
도 7에는 본 발명의 터치 감지 전극의 제조방법의 일 실시예로서, 제1 감지 패턴(10)과 제2 감지 패턴(20)이 모두 금속 메쉬 패턴으로 형성되는 예시가 개략적으로 도시되어 있다. 이하 이를 기준으로 설명하나, 본 발명이 이에 한정되는 것은 아니다.FIG. 7 schematically illustrates an example in which the first sensing pattern 10 and the second sensing pattern 20 are all formed of a metal mesh pattern as an embodiment of a method of manufacturing a touch sensing electrode. Hereinafter, description will be made based on this, but the present invention is not limited thereto.
먼저, 기판(100) 상에 금속 메쉬 패턴으로 제1 감지 패턴(10)을 형성한다. 제1 감지 패턴은 제1 방향으로 형성되며, 이 경우 금속 배선(70)을 함께 형성할 수 있다.First, the first sensing pattern 10 is formed on the substrate 100 using a metal mesh pattern. The first sensing pattern is formed in the first direction, in which case the metal lines 70 may be formed together.
금속 메쉬 패턴은 당분야에 알려진 방법이 제한 없이 적용될 수 있으며, 예를 들면 물리적 증착법(Physical Vapor Deposition, PVD), 화학적 증착법(Chemical VaporDeposition, CVD)등 다양한 박막 증착 기술에 의하여 형성될 수 있다. 예를 들면, 물리적 증착법의 한 예인 반응성 스퍼터링(reactive sputtering)에 의하여 형성될 수 있다. 또는 포토리소그래피법을 사용하여 제조될 수도 있다.The metal mesh pattern may be applied without limitation by methods known in the art, and may be formed by various thin film deposition techniques such as physical vapor deposition (PVD) and chemical vapor deposition (CVD). For example, it may be formed by reactive sputtering, which is an example of physical vapor deposition. Or by using a photolithography method.
금속 메쉬 패턴인 제1 감지 패턴(10)이 형성된 후에는, 그 상면에 금속 도금층(200)을 형성한다.After the first sensing pattern 10, which is a metal mesh pattern, is formed, the metal plating layer 200 is formed on the upper surface thereof.
금속 도금층(200)은 통상적인 금속 도금법에 의해 형성될 수 있다. 도금법에 특별한 제한은 없으나, 제1 감지 패턴(10) 상에만 형성해야 하는 정밀성 측면에서 전기 도금법이 바람직하다.The metal plating layer 200 may be formed by a conventional metal plating method. Although there is no particular limitation on the plating method, an electroplating method is preferable in view of precision to be formed only on the first sensing pattern 10.
보다 구체적으로 설명하면, 금속 메쉬 패턴인 제1 감지 패턴(10)을 캐소드 전극으로 하고 도금층을 형성할 금속을 애노드 전극으로 한 후, 기판을 애노드 전극의 금속 이온이 존재하는 전해질 용액에 침지시킨 후 전원을 연결하여 전기를 흐르게 하면, 제1 감지 패턴(10)의 상면에 금속 도금층(200)이 형성되게 된다. 금속 배선(70)까지 연결되어 있다면 금속 배선(70) 상부에도 금속 도금층(200)이 형성된다.More specifically, after the first sensing pattern 10, which is a metal mesh pattern, is used as a cathode and the metal for forming the plating layer is used as an anode, the substrate is immersed in an electrolyte solution in which metal ions of the anode are present. When the power is connected to the power source, the metal plating layer 200 is formed on the upper surface of the first sensing pattern 10. If the metal wiring 70 is connected, the metal plating layer 200 is formed on the metal wiring 70.
금속 도금층(200)이 형성된 후에는 절연층(30)을 형성한다. 절연층(30)은 당분야에서 사용되는 방법이 특별한 제한 없이 사용되어 형성될 수 있으며, 예를 들면 광경화성 또는 열결화성 절연층 형성용 조성물 등을 금속 도금층(200)을 구비한 제1 감지 패턴(10)이 형성된 기판(100) 상에 도공하고 경화시켜 형성될 수 있다.After the metal plating layer 200 is formed, the insulating layer 30 is formed. The insulating layer 30 may be formed by using a method used in the art without particular limitation, and for example, the first sensing pattern including the photocurable or thermosetting insulating layer forming composition and the metal plating layer 200. The substrate 10 may be formed by coating and curing the formed substrate 100.
절연층(30)이 형성된 후에는, 상기 제1 감지 패턴(10)과 마찬가지의 방법으로 제2 감지 패턴(20) 및 그 상면에 금속 도금층(200)을 형성하여, 본 발명의 터치 감지 전극을 제조할 수 있다.After the insulating layer 30 is formed, a metal plating layer 200 is formed on the second sensing pattern 20 and the upper surface thereof in the same manner as the first sensing pattern 10 to form the touch sensing electrode of the present invention. It can manufacture.
본 발명의 제조 방법의 다른 실시예로서, 감지 패턴(10, 20) 중 어느 하나만 금속 메쉬 패턴으로 제조되는 경우에는, 다른 감지 패턴은 금속 산화물을 재료로 종래의 방법으로 제조될 수 있다. 예를 들면, 물리적 증착법(Physical Vapor Deposition, PVD), 화학적 증착법(Chemical Vapor Deposition, CVD)등 다양한 박막 증착 기술에 의하여 형성될 수 있다. 예를 들면, 물리적 증착법의 한 예인 반응성 스퍼터링(reactive sputtering)에 의하여 형성될 수 있으나, 이에 한정되는 것은 아니다. 다른 예로는 포토리소그래피를 들 수 있다.As another embodiment of the manufacturing method of the present invention, when only one of the sensing patterns 10 and 20 is made of a metal mesh pattern, the other sensing pattern may be manufactured by a conventional method using a metal oxide material. For example, it may be formed by various thin film deposition techniques such as physical vapor deposition (PVD) and chemical vapor deposition (CVD). For example, it may be formed by reactive sputtering, which is one example of a physical vapor deposition method, but is not limited thereto. Another example is photolithography.
본 발명의 터치 감지 전극은 당분야에 공지된 추가 공정을 통해 터치 스크린 패널을 형성할 수 있다. 이 경우 사용되는 디스플레이 장치로는 액정 디스플레이, OLED, 플렉서블 디스플레이 등을 들 수 있으나, 이에 한정되는 것은 아니다.The touch sensing electrode of the present invention can form a touch screen panel through additional processes known in the art. In this case, a display device used may include a liquid crystal display, an OLED, a flexible display, but is not limited thereto.
이하, 본 발명의 이해를 돕기 위하여 바람직한 실시예를 제시하나, 이들 실시예는 본 발명을 예시하는 것일 뿐 첨부된 특허청구범위를 제한하는 것이 아니며, 본 발명의 범주 및 기술사상 범위 내에서 실시예에 대한 다양한 변경 및 수정이 가능함은 당업자에게 있어서 명백한 것이며, 이러한 변형 및 수정이 첨부된 특허청구범위에 속하는 것도 당연한 것이다. Hereinafter, preferred examples are provided to aid the understanding of the present invention, but these examples are merely illustrative of the present invention and are not intended to limit the scope of the appended claims, which are within the scope and spirit of the present invention. It is apparent to those skilled in the art that various changes and modifications can be made to the present invention, and such modifications and changes belong to the appended claims.
실시예 1Example 1
유리기판(굴절률: 1.51) 상에 두께 20nm, 폭 5㎛의 금속 메쉬 패턴 및 금속 배선을 몰리브덴으로 형성하여 금속 메쉬 패턴과 금속 배선을 전기적으로 연결하였다.A metal mesh pattern and a metal wire having a thickness of 20 nm and a width of 5 μm and a metal wire were formed of molybdenum on a glass substrate (refractive index: 1.51) to electrically connect the metal mesh pattern and the metal wire.
다음으로, 상기 금속 배선에 전원을 연결하고, 상기 전원의 다른 편은 구리 전극에 연결한 후, 상기 기판 및 구리 전극을 구리 전해질 용액에 침지하고 전기 도금을 수행하여, 상기 금속 메쉬 패턴 및 금속 배선 상에 구리 도금층을 형성하였다(제1 감지 패턴).Next, a power supply is connected to the metal wiring, and the other side of the power supply is connected to a copper electrode, and then the substrate and the copper electrode are immersed in a copper electrolyte solution and electroplated to perform the metal mesh pattern and the metal wiring. A copper plating layer was formed on the surface (first sensing pattern).
다음으로, 상기 기판 상부 전체적으로 절연층을 형성한 후, 앞서 제조된 금속 메쉬 패턴과 다른 방향으로 금속 메쉬 패턴을 형성한 것을 제외하고는 동일한 방법으로 금속 메쉬 패턴 및 금속 도금층을 형성하여(제2 감지 패턴), 터치 감지 전극을 제조하였다.Next, after the insulating layer is formed over the entire substrate, the metal mesh pattern and the metal plating layer are formed in the same manner except that the metal mesh pattern is formed in a different direction from the metal mesh pattern manufactured above (second sensing). Pattern) and a touch sensing electrode.
참고로, 상기 굴절률과 소멸계수는 550nm 파장의 광을 기준으로 기재하였다.For reference, the refractive index and the extinction coefficient are described based on the light of 550nm wavelength.
실시예 2Example 2
절연층 하부의 감지 패턴(제1 감지 패턴)을 인듐주석산화물(ITO)(굴절률: 1.8)로 형성한 것을 제외하고는, 실시예 1과 동일한 방법으로 터치 감지 전극을 제조하였다.A touch sensing electrode was manufactured in the same manner as in Example 1, except that the sensing pattern (first sensing pattern) under the insulating layer was formed of indium tin oxide (ITO) ( refractive index: 1.8).
비교예 1Comparative Example 1
구리 도금층을 형성하지 않은 것과 몰리브덴을 300nm 두께로 형성한 것을 제외하고는, 실시예 1과 동일한 방법으로 터치 감지 전극을 제조하였다.A touch sensing electrode was manufactured in the same manner as in Example 1, except that the copper plating layer was not formed and molybdenum was formed to have a thickness of 300 nm.
비교예 2Comparative Example 2
구리 도금층을 형성하지 않은 것과 몰리브덴을 300nm 두께로 형성한 것을 제외하고는, 실시예 2와 동일한 방법으로 터치 감지 전극을 제조하였다.A touch sensing electrode was manufactured in the same manner as in Example 2, except that the copper plating layer was not formed and molybdenum was formed to have a thickness of 300 nm.
실험예Experimental Example
상기 제조된 터치 감지 전극의 반사율 및 전기 저항을 측정하여, 그 결과를 하기 표 2에 기재하였다. 반사율은 400nm~700nm에서의 반사율의 평균을 의미한다.The reflectance and electrical resistance of the manufactured touch sensing electrode were measured, and the results are shown in Table 2 below. Reflectance means the average of reflectance in 400 nm-700 nm.
표 1
Figure PCTKR2014007629-appb-T000001
Table 1
Figure PCTKR2014007629-appb-T000001
상기 표 1을 참고하면, 실시예들의 경우 비교예와 반사율은 거의 유사하면서도 금속 도금층을 형성하지 않은 비교예보다 전기 저항이 현저하게 작은 것을 알 수 있다.Referring to Table 1, it can be seen that in the case of the examples, the electrical resistance is significantly smaller than that of the comparative example and the comparative example, which is almost similar, but does not form the metal plating layer.
[부호의 설명][Description of the code]
100: 기판100: substrate
10: 제1 감지 패턴 20: 제2 감지 패턴10: first sensing pattern 20: second sensing pattern
30: 절연층 40: 컨택홀30: insulating layer 40: contact hole
50: 브릿지 전극 200: 금속 도금층50: bridge electrode 200: metal plating layer
70: 금속 배선70: metal wiring

Claims (13)

  1. 절연층의 하면에 형성되는 제1 감지 패턴과 절연층의 상면에 형성되는 제2 감지 패턴을 포함하며, 상기 제1 감지 패턴과 제2 감지 패턴은 중 적어도 하나는 금속 메쉬 패턴을 가지며 그 상부에 금속 도금층을 구비하는, 터치 감지 전극.And a first sensing pattern formed on a lower surface of the insulating layer and a second sensing pattern formed on an upper surface of the insulating layer, wherein at least one of the first sensing pattern and the second sensing pattern has a metal mesh pattern and is disposed on an upper portion thereof. A touch sensing electrode having a metal plating layer.
  2. 청구항 1에 있어서, 상기 제1 감지 패턴 및 상기 제2 감지 패턴을 구동 회로와 연결하는 금속배선 중 적어도 하나는 그 상면에 금속 도금층을 더 구비하는, 터치 감지 전극.The touch sensing electrode of claim 1, wherein at least one of the metal wires connecting the first sensing pattern and the second sensing pattern to a driving circuit further comprises a metal plating layer on an upper surface thereof.
  3. 청구항 1에 있어서, 상기 금속 메쉬 구조가 아닌 감지 패턴은 금속 산화물로 형성된 투명 전극 패턴인, 터치 감지 전극.The touch sensing electrode of claim 1, wherein the sensing pattern other than the metal mesh structure is a transparent electrode pattern formed of a metal oxide.
  4. 청구항 1에 있어서, 상기 금속 도금층은 전기 도금으로 형성된 것인, 터치 감지 전극.The touch sensing electrode of claim 1, wherein the metal plating layer is formed by electroplating.
  5. 청구항 1에 있어서, 상기 금속 도금층은 구리로 형성된 것인, 터치 감지 전극.The touch sensing electrode of claim 1, wherein the metal plating layer is formed of copper.
  6. 청구항 1에 있어서, 상기 금속 도금층의 두께는 500 내지 1,000nm인, 터치 감지 전극.The touch sensing electrode of claim 1, wherein the metal plating layer has a thickness of 500 nm to 1,000 nm.
  7. 청구항 1에 있어서, 터치스크린 패널의 커버 윈도우 기판 또는 디스플레이 패널의 일면 상에 형성되는, 터치 감지 전극.The touch sensing electrode of claim 1, wherein the touch sensing electrode is formed on one surface of the cover window substrate or the display panel of the touch screen panel.
  8. 절연층의 하부와 상부에 각각 서로 다른 방향으로 형성되는 감지 패턴을 형성하고,Forming sensing patterns respectively formed in different directions on the lower and upper portions of the insulating layer;
    상기 감지 패턴 중 적어도 하나는 금속 메쉬 패턴을 형성한 후 상기 금속 메쉬 패턴의 상면에 금속 도금층을 형성하여 제조되는, 터치 감지 전극의 제조방법.At least one of the sensing patterns are formed by forming a metal plating pattern on the upper surface of the metal mesh pattern after forming a metal mesh pattern, manufacturing method of the touch sensing electrode.
  9. 청구항 8에 있어서, 상기 금속 메쉬 패턴 형성 시에 금속 배선도 동시에 형성하는, 터치 감지 전극의 제조방법.The method of claim 8, wherein metal wires are simultaneously formed at the time of forming the metal mesh pattern.
  10. 청구항 9에 있어서, 상기 금속 배선의 상면에 금속 도금층을 더 형성하는, 터치 감지 전극의 제조방법.The method of claim 9, further comprising forming a metal plating layer on an upper surface of the metal wire.
  11. 청구항 8에 있어서, 상기 금속 메쉬 패턴이 아닌 감지 패턴은 금속 산화물로 형성하는, 터치 감지 전극의 제조방법.The method of claim 8, wherein the sensing pattern other than the metal mesh pattern is formed of a metal oxide.
  12. 청구항 1 내지 7 중 어느 한 항의 터치 감지 전극을 포함하는 터치 스크린 패널.A touch screen panel comprising the touch sensing electrode of claim 1.
  13. 청구항 12의 터치 스크린 패널을 포함하는 디스플레이 장치.A display device comprising the touch screen panel of claim 12.
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