WO2012038244A1 - Micro-dispositifs de détection à cantilever et membrane moulés par injection leur processus de fabrication - Google Patents

Micro-dispositifs de détection à cantilever et membrane moulés par injection leur processus de fabrication Download PDF

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Publication number
WO2012038244A1
WO2012038244A1 PCT/EP2011/065325 EP2011065325W WO2012038244A1 WO 2012038244 A1 WO2012038244 A1 WO 2012038244A1 EP 2011065325 W EP2011065325 W EP 2011065325W WO 2012038244 A1 WO2012038244 A1 WO 2012038244A1
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Prior art keywords
cantilever
membrane
foil
micro
stamp
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PCT/EP2011/065325
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English (en)
Inventor
Helmut Schift
Prabitha Urwyler
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Paul Scherrer Institut
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Publication of WO2012038244A1 publication Critical patent/WO2012038244A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17—Component parts, details or accessories; Auxiliary operations
    • B29C45/26—Moulds
    • B29C45/37—Mould cavity walls, i.e. the inner surface forming the mould cavity, e.g. linings
    • B29C45/372—Mould cavity walls, i.e. the inner surface forming the mould cavity, e.g. linings provided with means for marking or patterning, e.g. numbering articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14827—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles using a transfer foil detachable from the insert
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C2045/0094—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor injection moulding of small-sized articles, e.g. microarticles, ultra thin articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/756—Microarticles, nanoarticles

Definitions

  • the present invention relates to an injection molded micro- cantilever and membrane sensor devices and process for their fabrication .
  • a cantilever is typically an extended beam with an aspect ratio (length to thickness) in the range of 2 to 1000, which is fixed at the body at one side and free to oscillate at the other side.
  • a membrane is fixed at least on two sides and is able to oscillate between these fixations. Most common are membranes which are fixed into a frame, like a diaphragm for pressure sensing.
  • microcantilevers using injection molding
  • a symmetric set-up having the advantage that during demolding the device experimences minimum stress (US2004/0208788A1 ) . It is disadvantageous that the surface of the cantilever is barely accessible for
  • cantilevers also regarding the cost involved.
  • An additional molding of nanostructures is possible. Tips with pyramidal shape have been molded, to achieve a Scanning Force Microscopy (SFM) like cantilever with a sharp tip (probe) able to scan over surfaces and record reliefs and images.
  • SFM Scanning Force Microscopy
  • SU-8 is a
  • Polymeric microdevices are fabricated with a so-called LIGA process, or assembly. These processes resemble those already described. Thin polymeric membranes with nanoimprint lithography have been fabricated, but thin membranes are rather difficult to be fabricated with injection molding. Foil like elements in a hot embossing process have been fabricated.
  • LEGO bricks exhibit a surface pattern which is transferred to the LEGO brick.
  • Thin Nickel molds have been used in injection molding machines to add a nanopattern onto dispensing systems using polymeric syringes.
  • Compact Disc injection molding uses as a standard thin Nickel shims which can be exchanged very fast. In production, shim copies rather than the original are used, and are replaced by another copy when degradation sets in. Instead of fabricating stamp copies in the same hard material as the original, in a specific nanoimprint lithography process developed by Obducat, intermediate polymer stamps are fabricated for every single imprint. This process, called intermediate polymer stamp
  • IPS is a two-step process, in which hot embossing onto a hydrophobic polymer foil, such as Zeonor or Topas, transfers the surface relief of the silicon, nickel, or polycarbonate original.
  • a hydrophobic polymer foil such as Zeonor or Topas
  • STU thermal and UV nanoimprint
  • Inmold labelling is very common in injection molding: a foil is used to be integrated and backfilled into a macroscopic part. Feeder mechanisms need to align the foil with respect to the mold.
  • Sol-gel fabricated molds have been fabricated in a variety of ways, particularly interesting are hybrid molds which consist of a thin polymeric sol-gel relief in a resist on top of a metal backbone. The sol-gel relief is typically a few 10 nm thick up to several 100 ⁇ . Sol-gel materials used are
  • HQ hydrogen silsesquioxane
  • Ormocers so-called Ormocers .
  • nanostructures with different heights As a metal backbone nickel foils have been used with a thickness of a few 10 ⁇ to a few 100 ⁇ . Apart from metal, glass and polymer substrates can been used.
  • a surface corrugation is been used being based on stiffening of a membrane in a stencil setup, to enhance the stability of a perforated stencil agains deposition and stress.
  • Cell growth and implants with surface topography is well explored. Most interesting are surfaces which enhance cell growth or even control the diversificaton of stem cells.
  • a cantilever setup has been built which uses surfaces stress to enhance deflection of a beams. This setup will be used in the context of this patent application to detect the
  • micro-mechanical device that allows to implement an additional functionality in the cantilever- or membrane-like structure .
  • the specific achievement and invention is a micromechanical device such as a micro-cantilever array or a micro-membrane which is fabricated using polymer injection molding, and which is patterend on one side with a micro- and nanorelief in a controlled way.
  • the invention is based on the surface
  • the microdevice according to the present invention is an element which comprises a body element of a few mm size and a thin membrane or cantilever like element which gains
  • the device is fabricated by micro-in ection molding with a
  • microfabricated or micromachined mold cavity By using an additional foil-like mold, functionality is added to the microdevice without major modifications of its shape, outlines and volume.
  • mechanical and optical properties can be modified, simply by adding a device/element/ functionality (e.g. an optical diffraction grating, mechanical registration, ruler, fluidic channel, an tip or apex for profilometry) , a roughness (for controlling biological cell adhesion and growth) and selectivity (for selection by size, shape) .
  • mechanical performance can be modified by corrugations in the thin areas of the cantilevers or membranes. Due to the flexibility of the process,
  • the invention is based on the method for surface patterning of foils.
  • a device having surface patterns on one side of the membrane or cantilever with appropriate size, depth, orientation, to achieve a local thinning of the membrane or cantilever Either without post-processing or with a post-processing step as e.g. a homogeneous thinning of the cantilever and membrane area by reactive ion
  • the polymer in these depressions can be removed and holes or slits are created.
  • depressions to the surface of the molded element will result in holes after thinning, and the entire membrane can serve as a sieve.
  • a device having a substance or part or all of a foil transferred onto the cantilever surface which either serves as a permanent coating (metal, chemical, sol-gel, polymer, oxide or nitride) , or a temporary sealing, protective coating of the surface, a carrier on which the device is temporarily or permanently fixed.
  • This can be done by delamination of a part of the foil stamp, or by transfer of the entire foil onto the device.
  • a specific case is that of a selectively dissolvable stamp, i.e. a material as stamp which is dissolved in a solvent while the material of the cantilever stays unaltered. This enables to remove a stamp structure from the cantilever after opening of the molding machine and possibly also after demolding of the entire device.
  • the aim is that structures can be demolded from the fragile cantilever without or with a reduced mechanical force, e.g. high aspect ratio structures.
  • the cantilever is modified by the foil on one side, which is coated with a silane etc., then due to transfer or diffusion during mold filling, a chemical surface modification can be achieved; e.g. a hydrophobic property can be achieved simply by applying a surfactant on the foil; in the same way, nanoparticles can be transferred, e.g. Si02 containing Ag for
  • mirror unit the opposite part is called “mold insert unit”; in the present case, the mirror side is identical with the “injection side” of the molding tool, the opposite part is called or “clamping side”; the foil has to be positioned along the outlines of the cantilever beams or membranes;
  • patterns can be selectively placed on two neighboring cantilevers with distance of 250 ⁇ (micrometers) . Smaller and larger distances are possible (50 to 5000 ⁇ ) , according to this, the needed accuracy is defined.
  • the method comprising the mirror unit to contain an additional mold insert into which a foil stamp can be pressed by stretching; this is either done before closing the molding tool (using heating and pressure by air or mechanical pressure), or during injection;
  • the mold is ready for the next injection step (from (iv) to (vii); here either the first foil stamp is used or a next is placed on the mirror side as described in (iii) .
  • a metallization can be generated, e.g. if gold is transferred from a carrier foil to the cantilever by delamination, no coating will be necessary; in the same way, electronic wires could be transferred;
  • thermoplastic or UV-curable foil with a micro- and/or nanostructured stamp with a stamp original in a thermal or UV- or combined thermal and UV-imprint processs; this structured foil is called "foil stamp";
  • injection molding sides but is free in the area of the cavity to enable the melt to flow onto it;
  • the mold is ready for the next injection step (from (iv) to (vii); here either the first foil stamp is used or a next is placed on the mirror side as described in (iii) .
  • Said foil can be a PC (polycarbonate) foil or
  • thermoplastic polymer foil typically thickness 10 to 250 ⁇
  • PSU polysulfone
  • COC cyclic olephine copolymer
  • PEEK poly ( etheretherketone )
  • poly (propylene ) PP
  • polyoxymethylene copolymers POM
  • cyclic olefin copolymers COC
  • PVDF polyvinylidenfluoride
  • LCP liquid crystal polymer
  • ETFE poly ( ethylene- alt-tetrafluoroethylene)
  • PVA polyvinylalcohol
  • the material can be a hybrid polymer such as sol- gel, Ormocer material;
  • the material can be a UV-cured and cross-linked
  • polymer such as expoxy (SU-8), polyimide (PI);
  • the material can be a non-thermoplastic polymer such as polytetrafluorethene (PTFE) ; polydimethylsiloxane (PDMS) , rubber;
  • PTFE polytetrafluorethene
  • PDMS polydimethylsiloxane
  • the material can be a photoresist on a carrier foil
  • backbone containing PMMA, SU-8, HSQ and sol-gel materials
  • the backbone may be made from metal (e.g. nickel, steel, aluminium, titanium, copper) , or polymer (COC, PI);
  • the material can be a thin metal film on a carrier foil (backbone) containing PMMA, SU-8, HSQ and sol-gel materials;
  • the backbone may be made from metal (e.g. nickel, steel, aluminium, titanium, copper) , or polymer (COC, PI); or any other type of hybrid stamp where the backbone is flexible and the surface pattern hard against the polymer melt;
  • the material can be Si02, Si, Si3N4, A1203, diamond, graphite on a carrier foil (backbone) ;
  • the foil stamp can be already prepatterned by laser
  • the foil stamp can be pressed into a calotte on the
  • Both sides of the foil stamp are patterned, inducing a defined bending of the polymer stamp during injection.
  • the foil stamp can be composed of two materials with
  • the mirror unit or the mold insert unit can provide non- flat surfaces, which fit will into each other; the main issue of this patent is that a tight closing is
  • the mirror unit can contain an additional mold insert into which a foil stamp can be pressed by stretching; this is either done before closing the molding tool (using heating and pressure by air or mechanical pressure), or during injection;
  • Preferred coatings and layers are the following:
  • the foil stamp can be generated by extrusion
  • the foil stamp can be coated by dispensing of
  • the foil stamp can be patterned in a topological way by hot embossing
  • the foil stamp can be patterned in a topological way by casting
  • the foil stamp can be patterned in a topological way by patterning with photolithography or electron beam lithography;
  • the foil stamp can be patterned in a topological way by etching, evaporation and lift-off, electroplating;
  • the foil stamp can be patterned in a chemical way by etching, evaporation and lift-off, electroplating, e.g. by using silanes or other materials chancing the wetting behaviour of the surface;
  • the photoresist can be a polymer plate and foil or thin film, which is laminated, e.g. by so-called
  • the photoresist has a thickness with different resist heights from 30nm to 50 ⁇ ;
  • Preferred methods for the foil stamp handling are: i) The foil stamp can be placed on the mirror unit, by gluing, lamination, clamping;
  • the foil stamp can be placed on the mirror unit, by spanning with a feeder (reel to reel) mechanism;
  • the foil stamp can be placed onto the cavity onto the mold insert unit before injection, by spanning with a feeder (reel to reel) mechanism;
  • the foil stamp can be placed onto the cavity onto the mold insert unit before injection, by lamination (from a substrate foil, e.g. provided by reel-to-reel) ; Preferred methods for injection molding are: i) The foil can be used to enhance the "tightening"
  • the temperature of the mold can be
  • the temperature of the mold can be chosen below the glass transition temperature of the foil stamp to avoid gluing and remelting/degradation of the stamp structures; iv) The temperature of the mold (mirror unit) can be alternatively chosen in the range or above the glass transition temperature of the foil stamp to enhance gluing and pattern transfer;
  • the temperature of the mold can be alternatively chosen in the range or above the glass transition temperature of the foil stamp to enhance gluing and pattern transfer;
  • the softness of the foil can be used for different purposes: Small details can be molded at the borders of the cantilever, i.e. the injection pressure of the melt is so high that the polymer can be squeezed into the structures which are between the flat surfaces of the mold units; thus surface structures can be generated which enlarge the cantilever area; furthermore this effect can be enhanced because the film is compressed and gaps can be generated in which thin films can be generated;
  • the softness of the foil can be used for different purposes: Small details can be molded at the borders of the cantilever, i.e. the injection pressure of the melt is so high that the polymer can be squeezed into the structures which are between the flat surfaces of the mold units; soft molds can be deformed during molding, smaller structures with undercuts possible; this use of
  • defects can be even further enhanced if instead of a softened foil a flexible, elastic (rubber-like) foil is used .
  • Preferred methods for the pattern transfer are:
  • a part of the foil stamp can be transferred by pattern transfer onto the injection molded part (e. the cantilever) as a transfer layer; this can be a coating, or a metallization, or surface topography, or microchannels for fluidics;
  • a coating of the foil e.g. a laminated surface
  • pattern or a patterned resist/metal) stamp can be transferred by pattern transfer onto the injection molded part, i.e. the cantilever or body of the
  • the gluing of the foils can be used for different purposes: a peeling during demolding due the flexibility of the foil stamp can enable better demolding which results in less damage, even with critital structures with undercuts or high aspect ratios; the foil stamps may stay sticking in molded part, which may help for sealing the surface of the final product or for
  • a metallization can be generated, e.g. if gold is transferred from a carrier foil to the cantilever by delamination, no coating will be necessary; in the same way, electronic wires could be transferred;
  • a chemical surface modification can be achieved; e.g. a hydrophobic property can be achieved simply by applying a surfactant on the foil; in the same way, nanoparticles can be transferred, e.g. Si02 containing Ag for sterilization purposes (see HeiQ) ; in the same way, coatings or chemical agents could be transferred which enable a reaction with the polymer melt or with chemicals applied after molding; also chemicals for surface activation, crosslinking; Typical process size ranges are: i) Polymeric cantilever normally have the following
  • the cantilevers have lengths between 10 ⁇ and 2000 ⁇ , widths of 1 to 200 ⁇ , thicknesses of 1 to 100 ⁇ ; the property which characterises a cantilever most is the aspect ratio, i.e. the ratio between its length and thickness (or sometimes width) .
  • Cantilevers normally are defined a long beam with constant thickness and width over the entire length, emanating from the body to the tip.
  • the cantilevers are normally fixed at a larger body.
  • the body has a length between 1 to 10 mm, widths of 1 to 10 mm, thicknesses of 0.2 to 1 mm; it is a macrocopic part which serves as a holder; in injection molding it is the part which will determine the amount of material to be used for the filling of the cavity; its surface normally contains electronics or other mechanical properties;
  • Macroscopic surface corrugations i.e. ridges with depths and widths in the range of a fraction of the cantilever thickness or width will have influence of the mechanical properties of the cantilever; e.g. 1 to 5 ⁇ deep trenches in 10 to 50 ⁇ thick cantilevers;
  • Micro- and nanoscopic surface corrugations i.e.
  • cantilever e.g. lOOnm to 1 ⁇ deep trenches in 10 to 50 ⁇ thick cantilevers; however, they can be used to modify the selectivity of the cantilever surfaces or by generating a specific optical function like by
  • membranes can be patterned in the same way as cantilevers. In contrast to
  • membranes are composed of a thin entity which spans between at least two points of a body. This is either a bridge (a
  • cantilever with two fixed ends), or a large area of a thin films which is fixed at different locations of a body.
  • This patent applies for all possible forms of membranes, as long as the presented process can be applied.
  • membranes are spanning over much larger areas, i.e. from 1 ⁇ to 20 mm.
  • Preferred applications of the cantilevers are: i) Polymeric cantilevers, patterning of beam surface and surface of body for modification of mechanical stability; longitudinal (along the beam) deep line-like trenches or ridges will stabilize the cantilever beam; trenches and ridges orthogonal/perpendicular to the cantilever beam will make it less stiff; at least one trench or ridge will be patterned;
  • Polymeric cantilevers patterning of beam surface and surface of body with a pattern suitable for cell engineering; small (shallow) micro- and nanopatterns (line gratings, hole and pillars, pyramides, sawtooth structures, channels) will generate a defined surface roughness and enable, enhance or decrease growth of biological cells; measure cell force;
  • Polymeric cantilevers patterning of beam surface and surface of body with posts used as spacers; a convex pattern providing antiadhesive properties (avoiding gluing, as it can be seen for flat surfaces);
  • Polymeric cantilevers patterning of beam surface; lens-like structures i.e. lenses with different shapes and profiles, e.g. aspherical lenses; convex and concave shapes, phase correction elements; combination of diffractive and refractive optics, mirrors will enable to direct light and split light;
  • lens-like structures i.e. lenses with different shapes and profiles, e.g. aspherical lenses; convex and concave shapes, phase correction elements; combination of diffractive and refractive optics, mirrors will enable to direct light and split light;
  • gratings will serve as calibration structures for AFM
  • cantilever is patterned or many, also the body with an array of cantilevers (1 to 20 is included);
  • Polymeric membranes patterning of membrane surface and surface of body for modification of mechanical stability; longitudinal (along the beam) deep line-like trenches or ridges will stabilize the cantilever beam; trenches and ridges orthogonal/perpendicular to the cantilever beam will make it less stiff; at least one trench or ridge will be patterned;
  • Polymeric membranes, patterning of membrane surface and surface of body with a pattern suitable for cell engineering; small (shallow) micro- and nanopatterns (line gratings, hole and pillars, pyramides, sawtooth structures, channels) will generate a defined surface roughness and enable, enhance or decrease growth of biological cells; measure cell force;
  • Figure 1 shows a molding tool (handy mold) with two sides (left side) .
  • the mirror side contains the gate (top) and the location, where the patterned foil is placed (shown
  • the clamping unit contains the mold insert (right side) with two mold cavities.
  • Figure 2 shows a top SEM micrograph with an array of eight laser ablated cantilever cavities in the steel mold insert.
  • the cavity width varies from 80 to 130 ⁇ .
  • the scale bar corresponds to 200 ⁇ .
  • the SEM micrograph on the bottom is an image of an in ection-molded PP micro-cantilever array. Small tips at the cantilever end demonstrate the complete filling up to the venting channels.
  • Figure 4 shows a real-time monitoring of injection-molded PVDF micro-cantilever deflection in static mode. Formation of mercaptohexanol self-assembled monolayers on gold-coated 60 ⁇ -thick iCs .
  • Figure 5 illustrates in part (a) an optical micrograph of a replicated line grating patterns on 100 ⁇ -thick PC foil (period 10 ⁇ , depth 5 ⁇ ) used as foil stamp, (b) and (c) SEM micrographs of the line pattern transferred during the ⁇ process from foil to the surface of molded micro- cantilevers.
  • the surface patterned beams are slightly (10%) wider due to high injection pressure, the softness of the PC foil, and particularly because of the orientation of the grooves in the foil stamp.
  • Figure 6 shows SEM micrographs of PP micro-cantilevers with 1 ⁇ deep line corrugations (a) along, (b) perpendicular to micro-cantilever beams. In (b) different periods (period 4 and 10 ⁇ ) are realized in adjacent beams. Rounding at the beam end is due to the fact that the venting channel at the end of the mold cavity is clogged in both cases.
  • a modular injection molding tool has been developed that comprises a quality steel cylinder (Polmax Uddeholm) 30 mm in diameter as mold insert with two internal resistive heating cartridges (Watlow Firerod, 230 V, 180 W, 49 W/cm 2 ) fixed in the three-plate molding tool x handy mold' with ejector pins (see Fig. 1, left side) .
  • This setup enables us to proceed the vario-thermal heating scheme with short heating-up times to temperatures as high as 320 C in the vicinity of the mold cavities.
  • the tool is installed in the clamping unit of an Arburg 320 Allrounder (Arburg, Lossburg, Germany) with a maximum clamping force of 600 kN.
  • the present mold system comprises only one cavity located on the closing side.
  • the other side is free for mirror plates with designed micro- or nano-features .
  • the two parallel mold cavities (see Fig. 1, right side) were fabricated using laser ablation, and placed into the central part of the flat end of the cylinder. They are connected to the injection gate via a large plate-like cavity through 2.5 mm-wide gates for filling.
  • the cantilever chip was designed with outlines of a micro-machined 500 ⁇ -thick silicon cantilever with a 3.5 x 2.5 mm 2 large body. It has eight 80 to 130 ⁇ -wide cantilever beams with a 500 ⁇ pitch on one side. The thickness chosen was usually in the range between 20 and 40 ⁇ . To guarantee fast and complete filling also molds with 60 ⁇ depth were applied (see Fig. 2, top micrograph) . For the venting, at the end of each beam cavity thin, 5 mm-long, 10 x 10 m 2 -wide channels were
  • each micro-cantilever beam has a polished finish (see Fig. 2, bottom micrograph) later used for laser beam reflection.
  • Surface patterned beams require, thus, an additional mold insert with a micro- and nano- relief to be introduced at the mirror side.
  • a thin, patterned polymer foil see Fig.l, left side
  • This foil prepared by hot embossing typically 25 to 100 ⁇ thick, forms the interface between the two units of the IM machine and is subjected to related pressure and heat.
  • the mold temperatures and pressures have to be low enough to enable a sufficient number of replications without degradation of the surface relief.
  • the main advantage of the method lies in the simple integration of gratings with different sizes and orientations. It is particularly useful for test series. Even for mass
  • the polymers used are different grades of
  • PVDF Kynar 720 Arkema
  • LCP Vectra A 390
  • the injection-molded micro-cantilevers were coated on the mirror side with 20 nm-thin gold films using a thermal evaporator (Balzers BAE250) .
  • This film guarantees sufficient laser beam reflectivity to use the Cantisens ® research system (Concentris GmbH, Basel, Switzerland) for measuring the deflection and the resonance frequency of the micro- cantilever .
  • the ⁇ iCs reveal the expected thermal behavior as demonstrated in the diagram in Fig. 3 for the gold-coated PVDF micro-cantilever under atmospheric conditions, i.e. in air, and in liquid (water) .
  • the heat tests included a temperature cycle with an increase from 25 to 35°C and a subsequent decrease back to 25°C within a time of about four minutes. The heat tests prove the sensitivity of the micro-cantilevers that
  • PVDF iCs in air corresponds to (95 ⁇ 16) nm and (55 ⁇ 5) nm for thicknesses of 30 ⁇ and 40 ⁇ , respectively. In water, these values should be similar but gave higher values, namely (127 ⁇ 17) nm and (154 ⁇ 55) nm) . Note the larger scattering of the data in liquid, which indicates less stable experimental conditions and reduced reproducibility in liquid compared to air.
  • the Cantisens ® Research system permits the experimental determination of resonance frequencies f res and quality factors Q for the polymeric micro-cantilevers.
  • Table 2 summarizes the mean values and related standard deviations of the resonance frequency measurements for the micro- cantilevers in air and water. The deviations of the
  • Stripe patterns in the beam cavities of the injection- molding tool have been applied to enhance the stability of the cantilevers and their stiffness against torsion.
  • these corrugations need to be deep with respect to the cantilever thickness of 30 and 40 ⁇ , similar to stabilized membranes for stenciling.
  • 5 ⁇ -wide, 5 ⁇ -deep stripes as presented in Figs. 5 and 6 were tested. Due to the orientation of the stripes, different effects were observed.
  • For deep

Abstract

Le micro-dispositif selon la présente invention est un élément qui comprend un élément corps d'une taille de quelques millimètres et un élément du type cantilever ou membrane mince qui acquiert une fonctionnalité supplémentaire grâce à l'incorporation d'un micro-motif or nano-motif (modification chimique ou topographie) sur un côté de la pièce du type cantilever ou membrane. Le dispositif est fabriqué par moulage par micro-injection avec une cavité de moule micro-fabriquée ou micro-usinée. L'utilisation d'un moule supplémentaire du type à feuille permet d'ajouter une fonctionnalité au micro-dispositif sans modification importante de sa forme, de ses contours et de son volume. On peut ainsi modifier les propriétés mécaniques et optiques, simplement par l'ajout d'un dispositif/élément supplémentaire (un réseau de diffraction optique), une rugosité (pour commander l'adhérence et la croissance de biopiles) et une sélectivité (pour une sélection par taille, forme). Les performances mécaniques (rigidité, fréquence de résonance) peuvent être également modifiées par des ondulations placées dans les zones minces des cantilevers ou membranes. En raison de la flexibilité du processus, on peut facilement effectuer des modifications de réglage sans trop d'effort, c'est-à-dire sans fabriquer un nouveau moule. L'invention se base sur le procédé destiné à modeler la surface de feuilles.
PCT/EP2011/065325 2010-09-23 2011-09-05 Micro-dispositifs de détection à cantilever et membrane moulés par injection leur processus de fabrication WO2012038244A1 (fr)

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EP10178991 2010-09-23
EP10178991.5 2010-09-23

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Cited By (4)

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CN110186377A (zh) * 2019-07-03 2019-08-30 长春禹衡光学有限公司 一种光栅尺及其尺壳
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CN110186377A (zh) * 2019-07-03 2019-08-30 长春禹衡光学有限公司 一种光栅尺及其尺壳
WO2021197599A1 (fr) * 2020-04-01 2021-10-07 Ev Group E. Thallner Gmbh Dispositif et procédé de moulage par injection

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