WO2012026293A1

WO2012026293A1 - Transfer device

Info

Publication number: WO2012026293A1
Application number: PCT/JP2011/067645
Authority: WO
Inventors: 孝広吉野; 吾郷　健二; 裕利中尾
Original assignee: 株式会社アルバック
Priority date: 2010-08-24
Filing date: 2011-08-02
Publication date: 2012-03-01
Also published as: JPWO2012026293A1; CN103053017A; CN103053017B; KR20130041326A; KR101431460B1; JP5286451B2

Abstract

A transfer device that has two arm units (20L₁ and 20R₁), each provided with a hand having a simple shape, and can simultaneously transfer two substrates at the same height. Each arm unit has: a primary active arm (21L₁ or 21R₁) that rotates about a primary active rotation axis (O); a secondary active arm (23L₁ or 23R₁) that rotates about a secondary active rotation axis (S_L or S_R) that passes through the tip of that primary active arm; and a hand (26L₁ or 26R₁) that rotates about a hand active rotation axis (P_L or P_R) that passes through the tip of that secondary active arm. Placement parts (27L₁ and 27R₁) are disposed at the same height as each other. Each arm unit has the same primary active rotation axis (O). Each placement part is disposed at a separation from the central axis of the arm unit on which said placement part is provided. For each arm unit, the line segment that connects that secondary active rotation axis (S_L or S_R) with that hand active rotation axis (P_L or P_R) is made shorter than the line segments that connect the primary active rotation axis (O) with the secondary active rotation axes (S_L and S_R).

Description

Transport device

The present invention relates to a transfer device for transferring a semiconductor substrate, a glass substrate, or the like.

Currently, when a semiconductor substrate, a glass substrate, or the like is transported to a processing chamber that performs various processing processes, a transport device having an arm portion that expands and contracts is used. In order to improve the throughput of substrate conveyance, a conveyance device having a plurality of arms has been developed.

FIG. 10 shows a plan view of a conventional transfer device 110 having two arms.
The transport device 110 includes a left drive shaft 112L, a right drive shaft 112R, a left arm portion 120L, and a right arm portion 120R that are arranged to be independently rotatable about the same vertical main active rotation axis A.
The left arm portion 120L and the right arm portion 120R have a left main active arm 121L and a right main active arm 121R, a left sub active arm 123L, and a right sub active arm 123R, respectively.

One end of each of the left main active arm 121L and the right main active arm 121R is fixed to the left drive shaft 112L and the right drive shaft 112R, respectively, and a left regulating member 125L and a right regulation member are attached to the ends of the left main active arm 121L and the right main active arm 121R. Each member 125R is disposed. Left main active arm 121L, the right main active arm 121R is configured to be rotatable around the left regulating member 125L, the right regulating member 125R to vertically left provided secondary active rotational axis B _L, a right auxiliary active rotational axis B _R ing.

Left sub active arms 123L, are rotatably arranged right sub active arm 123R left sub active rotational axis B _L, about the right sub active rotational axis B _R.
When the left main active arm 121L and the right main active arm 121R are rotated by the rotation of the left drive shaft 112L and the right drive shaft 112R around the main active rotation axis A, the left sub active arm 123L and the right sub active arm 123R are respectively left The main active arm 121L and the right main active arm 121R rotate in the opposite direction, that is, the left arm portion 120L and the right arm portion 120R are configured to expand and contract, respectively.

The left hand 126L and the right hand 126R are disposed at the tips of the left sub-active arm 123L and the right sub-active arm 123R so as to be rotatable about the left hand active rotation axis C _L and the right hand active rotation axis C _R , respectively. A left placement portion 127L and a right placement portion 127R are fixed to the hand 126L and the right hand 126R, respectively.

The length of the line segment connecting the main active rotation axis A and the left sub active rotation axis _BL and the length of the line segment connecting the left sub active rotation axis _BL and the left hand active rotation axis C _L are the same. the length of a line connecting the main active rotational axis a and the right sub-active rotational axis B _R, length of a line connecting the right secondary active rotary axis B _R and the right hand the active axis of rotation C _R is is the same Yes.

Accordingly, when the left arm portion 120L and the right arm portion 120R are expanded and contracted, the substrates placed on the left placement portion 127L and the right placement portion 127R move linearly in the horizontal plane, respectively.
When the transport destination pass lines that are simultaneously transported by the left arm portion 120L and the right arm portion 120R are located at the same height, the left placement portion 127L and the right placement portion 127R must be disposed at the same height. .
Therefore, in order to prevent the left placement portion 127L and the right placement portion 127R from colliding with each other, it is necessary to form the left hand 126L and the right hand 126R in a crank shape.

However, in this case, since the shapes of the left hand 126L and the right hand 126R are complicated, there is a problem that the manufacturing cost is high.
Further, if the shapes of the left hand 126L and the right hand 126R are complicated and the weight increases, the amount of deflection of the left arm part 120L and the right arm part 120R increases. When the left arm portion 120L and the right arm portion 120R are bent, the amount of variation at the tips of the left arm portion 120L and the right arm portion 120R is large. Therefore, when the left placement portion 127L and the right placement portion 127R are taken in and out of the processing chamber, each placement portion is placed. There is a high risk that the substrates placed on the

portions

127L and 127R come into contact with the opening of the chamber of the processing chamber, and the difficulty of teaching work is high.

International Publication No. 2009/034795

The present invention has been created in order to solve the above-described disadvantages of the prior art, and its purpose is to have two arms with a hand having a simple shape, and two substrates at the same height. An object of the present invention is to provide a transport device that can transport simultaneously.

In order to solve the above-mentioned problem, the present invention is a transport device that transports a substrate with two arms, and one arm is vertically spaced apart at a position passing through a horizontal central axis. A main active rotation axis, a main driven rotation axis, the main active rotation axis passing through a predetermined position at one end, rotating around the main active rotation axis, and the main driven rotation axis at a predetermined position at one end Passing through, a main driven arm that rotates around the main driven rotation axis, and is vertically disposed, passing through a predetermined position at the other end of the main active arm and a predetermined position at the other end of the main driven arm, A sub-active rotation axis, a sub-driven rotation axis, and the sub-active rotation axis and the sub-driven rotation axis pass through predetermined positions, respectively, and are configured to be rotatable around the sub-active rotation axis and the sub-driven rotation axis. And the sub-active rotation axis at a predetermined position at one end. A secondary active arm that rotates about the secondary active rotation axis, a secondary driven arm that rotates about the secondary driven rotation axis, and the secondary driven rotation axis that passes through the secondary driven rotation axis at a predetermined position at one end, and is disposed vertically. A hand active rotation axis, a hand driven rotation axis, a hand active rotation axis, and a hand driven rotation axis that pass through a predetermined position at the other end of the sub active arm and a predetermined position at the other end of the sub driven arm, respectively. Each of which passes through a predetermined position and is configured to be rotatable about the hand active rotation axis and the hand driven rotation axis, and is provided with a placement portion on which a substrate is placed. The active rotation axis and the hand driven rotation axis are disposed closer to the central axis than the sub active rotation axis and the sub driven rotation axis, and are arranged between the main active rotation axis and the sub active rotation axis. Connecting line segment A line segment connecting the main driven rotation axis and the sub driven rotation axis is parallel and has the same first length, and a line segment connecting the sub active rotation axis and the hand active rotation axis A line segment connecting the sub driven rotation axis and the hand driven rotation axis is parallel and has the same second length, and the sub active arm is rotated in the opposite direction with respect to the rotation of the main active arm. The arm portions are configured to rotate at an angle, the mounting portions described above of the two arm portions are arranged at the same height, the main active rotation axes of the two arm portions are the same, and the two arm portions Each of the placement units is the transfer device that is spaced apart from the central axis of the arm portion provided with the placement unit, and the second length is the first length. This is a conveying device that is shorter than the above.
This invention is a conveying apparatus, Comprising: The said main driven rotation axis of two said arm parts is a conveying apparatus arrange | positioned in a mutually different position.
The present invention is a transfer device, wherein the main driven rotation axis of the two arm portions is configured to be rotatable about the main active rotation axis.

Since the shape of the hand can be simplified, the manufacturing cost can be reduced.
Further, since the shape of the hand can be simplified, the weight of the hand is reduced and the amount of deflection of the arm portion is reduced.
The teaching work can be simplified by reducing the amount of deflection of the arm.

The top view of the conveyance apparatus of the 1st example of this invention The side view of the conveyance apparatus of the 1st example of this invention (A) (b) The typical top view of the vacuum processing apparatus using the conveying apparatus of the 1st example of this invention Internal configuration diagram of the first left regulating member of the first example Internal configuration diagram of the first left regulating member of the second example Sectional view taken along line AA of the first left regulating member of the second example The top view of the conveyance apparatus of the 2nd example of this invention Side view of the transport device of the second example of the present invention (A) (b) The typical top view of the vacuum processing apparatus using the conveying apparatus of the 2nd example of this invention Plan view of a conventional transfer device

FIG. 1 is a plan view of a transfer device 10 according to a first example of the present invention, and FIG. 2 is a side view thereof. In FIG. 2, a first left main driven arm 22L ₁ , a first right main driven arm 22R ₁ , a first left sub driven arm 24L ₁ , and a first right sub driven arm 24R _{1 described later} are illustrated. Omitted.
The transport device 10 has two arms, that is, a first left arm 20L ₁ and a first right arm 20R ₁ .
Referring to FIG. 2, the first left arm portion 20L ₁ and the first right arm portion 20R ₁ each have a first left drive shaft 12L ₁ and a first right drive shaft 12R ₁ .

The first left drive shaft 12L ₁ and the first right drive shaft 12R ₁ are arranged vertically and concentrically, and have the same main active rotation axis O that is the central axis of each drive shaft 12L ₁ , 12R _1. It is configured to be able to rotate independently at the center.
Further, the first left arm portion 20L ₁ and the first right arm portion 20R ₁ have a left rotating member 16L and a right rotating member 16R, respectively. The left rotating member 16L and the right rotating member 16R are configured to be able to rotate independently about the main active rotation axis O, respectively.

Referring to FIG. 1, the first left arm portion 20L ₁ and the first right arm portion 20R ₁ include a first left main link 31L ₁ , a first right main link 31R _1, and a first left sub link 32L _1. And the first right sub-link 32R ₁ .
The first left main link 31L ₁ and the first right main link 31R ₁ include a first left main active arm 21L ₁ , a first right main active arm 21R ₁ , a first left main driven arm 22L ₁ , Each has a _first right main follower arm 22R1.

One ends of the _first left main active arm 21L ₁ and the first right main active arm 21R ₁ are fixed to the first left drive shaft 12L ₁ and the first right drive shaft 12R ₁ , respectively.
Here, with reference to FIG. 2, the first right drive shaft 12R ₁ is arranged at a position higher than the first left drive shaft 12L _1, the first right main one end of the active arm 21R ₁ the first left main active It is fixed at a position higher than one end of the arm 21L ₁ , and a portion between one end and the other end of the first right main active arm 21R ₁ is bent downward in an “L” shape to form the first right The other end of the main active arm 21R _{1 and} the other end of the first left main active arm 21L ₁ are arranged at the same height.
If the other end of the first right main active arm 21R _{1 and} the other end of the first left main active arm 21L ₁ are arranged at the same height, the first right main active arm 21R ₁ of from a portion between the one end and the other end can have be bent downwardly in a curved shape, portions between the first end and the other end of the left main active arm 21L ₁ is "L" shaped Alternatively, it may be bent upward in a curved shape.
Further, from the first left drive shaft 12L ₁ is disposed at a position higher than the first left drive shaft 12R _1, the first left main one end of the active arm 21L ₁ is a first right main active arm 21R ₁ end It is fixed at a high position, and a portion between one end and the other end of the first left main active arm 21L ₁ is bent downward in an “L” shape or a curved shape, or the first right main active arm A portion between one end and the other end of 21R ₁ is bent upward in an “L” shape or a curved shape so that the other end of the first right main active arm 21R ₁ and the first left main active arm 21L ₁ A configuration in which the other end of the two is disposed at the same height is also included in the present invention.
Referring to FIG. 1, when the first left drive shaft 12L ₁ rotates, the first left main active arm 21L ₁ rotates with the first left drive shaft 12L ₁ at the same angle and in the same direction in the horizontal plane. It is configured. Further, when the first right drive shaft 12R ₁ rotates, the first right main active arm 21R ₁ is configured to rotate in the same angle and the same direction in the horizontal plane together with the first right drive shaft 12R ₁ . .

The left main driven rotation axis _RL is vertically provided at a position separated from the main rotation axis O of the left rotation member 16L, and the right main driven rotation axis is disposed at a position separated from the main rotation axis O of the right rotation member 16R. R _R is provided vertically. That is, the left main driven rotation axis _RL and the right main driven rotation axis _RR are arranged at different positions.

Here, a concave portion provided at one end of the first left main driven arm 22L ₁ is fitted to a convex portion that is erected vertically around the left main driven rotation axis _RL of the left rotating member 16L. One left main driven arm 22L ₁ is disposed so as to be rotatable in a horizontal plane around the left main driven rotation axis _RL . The recess provided in the first end of the right master-slave Doude 22R _1, fitted to a convex portion which is vertically erected around the right main driven rotational axis R _R of the right rotating members 16R, first The right main driven arm 22R ₁ is arranged to be rotatable in a horizontal plane around the right main driven rotation axis R _R.

The present invention, first the left master-slave Doude 22L _1, the first right master-slave Doude 22R ₁ left main driven rotation axis each R _L, rotatably disposed in a horizontal plane around the right main driven rotation axis R _R If so, the connection structure between the first left main driven arm 22L ₁ and the left rotation member 16L and the connection structure between the first right main driven arm 22R ₁ and the right rotation member 16R are not limited to the above-described configuration. The first vertical left driven arm 22L ₁ has a vertical projection vertically fitted to one of the left main driven rotation axis _RL of the left rotating member 16L. right master-slave Doude protrusion which is vertically erected on one end of 22R ₁ may also be fitted in a recess provided around the right main driven rotational axis R _R of the right rotary member 16R.

A first left restricting member 25L ₁ is disposed at the tip of the first left main active arm 21L _{1 and} the tip of the first left main driven arm 22L ₁ , and the tip of the first right main active arm 21R ₁ and the first A first right restricting member 25R ₁ is arranged at the tip of _one right main driven arm 22R ₁ .

The first left main active arm 21L ₁ and the first left main driven arm 22L ₁ have a vertical left sub active rotation axis S _L and a left sub driven rotation axis T _L provided on the first left regulating member 25L _1. The first right main active arm 21R ₁ and the first right main driven arm 22R ₁ are each configured as a vertical right sub active rotation provided on the first right regulating member 25R _1. about an axis S _R and right driven rotation axis T _R are respectively rotatably configured.

The first left sub-link 32L ₁ and the first right sub-link 32R ₁ include a first left sub-active arm 23L ₁ , a first right sub-active arm 23R ₁ , a first left sub-driven arm 24L ₁ , The first right sub driven arm 24R ₁ is provided.

The first left sub-active arm 23L ₁ is disposed so as to be rotatable about the left sub-active rotation axis S _L , and the first left sub-driven arm 24L ₁ is rotatable about the left sub-driven rotation axis T _L. Is arranged. The first right sub active arm 23R ₁ is arranged to be rotatable about a right sub active axis of rotation S _R, the first right sub driven arm 24R ₁ is rotated around the right sub driven rotary axis T _R Arranged to be possible.
The first left restricting member 25L ₁ and the first right restricting member 25R ₁ have the same structure, and the first left restricting member 25L ₁ will be described as a representative.

FIG. 4 shows an internal configuration diagram of the first left regulating member 25L ₁ of the first example. Here, the first left regulating member 25L ₁ has a first gear 41 and a second gear 42 that mesh with each other with the same number of teeth. The first gear 41 and the second gear 42 are arranged so as to be rotatable about a vertical left sub active rotation axis S _L and a left sub driven rotation axis T _L , respectively. of is fixed to the distal end of the left main active arm 21L _1, the second gear 42 is fixed to the first left tip of the sub driven arm 24L _1.

In a state where both the first left drive shaft 12L ₁ and the left rotation member 16L are stationary, both the first left main active arm 21L ₁ and the first left sub driven arm 24L ₁ are stationary.
When the first left drive shaft 12L ₁ rotates and the first left main active arm 21L ₁ rotates while the left rotating member 16L is stationary, the first gear 41 is moved to the first left main active arm. The second gear 42 meshed with 21L ₁ rotates in the same angle and in the same direction, and rotates in the opposite direction in the same angle. Therefore, the first left secondary driven arm 24L ₁ fixed to the second gear 42 rotates about the left secondary driven rotation axis T _L in the opposite direction to the first left main active arm 21L ₁ .

Here, the vertical rotation shaft of the first gear 41 is protruded from the surface facing the upper side of the first left restricting member 25L ₁ and is fitted in the recess provided at the tip of the first left sub-active arm 23L _1. is engaged, the first left sub active arm 23L ₁ is configured to be rotatable around a left sub active rotation axis S _L. Also, vertical axis of rotation of the second gear 42 is protrusively provided from the surface facing downward of the first left regulating member 25L _1, fitted in a recess provided in the first distal end of the left master-slave Doude 22L ₁ The first left main driven arm 22L ₁ is configured to be rotatable about the left sub driven rotation axis T _L.
In the above embodiment, the first gear 41 and the second gear 42 are used to connect the first left main link 31L ₁ and the first left sub link 32L ₁ , but the present invention is limited to this. Instead, two belts may be used in place of the gears.

FIG. 5 is an internal configuration diagram of the first left restricting member 25L ₁ of the second example, and FIG. 6 is a cross-sectional view taken along line AA.
In the first left restricting member 25L ₁ , the first pulley 45 and the second pulley 46 having the same diameter can rotate around the vertical left auxiliary active rotation axis S _L and the left auxiliary driven rotation axis T _L , respectively. The first pulley 45 is fixed to the tip of the first left main active arm 21L ₁ , and the second pulley 46 is fixed to the tip of the first left sub driven arm 24L ₁ .

Two

pulleys

47 and 48 are overlaid on both

pulleys

45 and 46, and respective end portions are fixed to the

pulleys

45 and 46. Instead of the two

belts

47 and 48, one belt may be wound around in the shape of "8".

When the first left drive shaft 12L ₁ rotates and the first left main active arm 21L ₁ rotates while the left rotating member 16L is stationary, the first pulley 45 is moved to the first left main active arm 21L. ₁ and the second pulley 46 connected to this via

belts

47 and 48 rotate in the opposite direction of the same angle. Accordingly, the first left secondary driven arm 24L ₁ fixed to the second pulley 46 rotates about the left secondary driven rotation axis T _L in the opposite direction to the first left primary active arm 21L ₁ .

Referring to FIG. 1, a first left hand 26L ₁ is arranged at the tip of the first left sub-active arm 23L _{1 and} the tip of the first left sub-driven arm 24L ₁ . A first right hand 26R ₁ is disposed at the tip of the first right auxiliary active arm 23R _{1 and} the tip of the first right auxiliary driven arm 24R ₁ .

Here, the concave portions provided at one ends of the first left sub-active arm 23L ₁ and the first left sub-driven arm 24L ₁ are the left hand active rotation axis P _{L of} the first left hand 26L ₁ and the left hand driven, respectively. each is fitted to the convex portion which is vertically erected around the rotation axis Q _L, the first left sub active arm 23L ₁ and the first left sub driven arm 24L ₁ is the first left hand 26L ₁ The vertical left hand active rotation axis P _L and the left hand driven rotation axis Q _L are respectively configured to be rotatable in a horizontal plane.

Further, where the first right sub active arm 23R _1, a concave portion which are provided on the first right sub driven end of the arm 24R ₁ is a first right hand 26R ₁ right hand active rotation axis P _R, right hand driven rotation axis Q _R centered respectively fitted to the convex portion which is vertically erected on a first right sub active arm 23R ₁ and the first right sub driven arm 24R _1, the first right hand 26R It is rotatably configured in each horizontal plane to _one vertical right hand active rotation axis P _R and the center of the right hand driven rotation axis Q _R.

In the present invention, if the first left sub active arm 23L ₁ and the first left sub driven arm 24L ₁ are configured to be rotatable about the left hand active rotation axis P _L and the left hand driven rotation axis Q _L. For example, the first left sub-active arm 23L ₁ and the first left sub-driven arm 24L ₁ are respectively provided with projections that are erected vertically on the left hand active rotation axis P _{L of} the first left hand 26L _1. The left hand driven rotation axis Q _L may be fitted in a recess provided around the center. Further, the first right sub active arm 23R _1, if the first right sub driven arm 24R ₁ is configured to be rotatable around right hand active rotation axis P _R, a right hand driven rotation axis Q _R, the first right sub active arm 23R _1, convex portions which are vertically erected respectively on the first right sub driven arm one end of 24R ₁ is a first right hand 26R ₁ right hand active rotation axis P _R, right a recess provided around the hand driven rotation axis Q _R may be fitted, respectively.

Hereinafter, a horizontal straight line passing through the main active rotation axis O and the left main driven rotation axis _RL is referred to as a left center axis, and a horizontal straight line passing through the main active rotation axis O and the right main driven rotation axis _RR is set to the right. Called the central axis.
The left hand active rotation axis P _L and the left hand driven rotation axis Q _L are disposed closer to the left center axis than the left sub active rotation axis S _L and the left sub driven rotation axis T _L , and the right hand active rotation axis P _R and the right hand driven rotation axis Q _R are disposed closer to the right center axis than the right sub active rotation axis S _R and the right sub driven rotation axis T _R.

A line segment OS _L that horizontally connects the main active rotation axis O and the left sub-active rotation axis S _L and a line that horizontally connects the left main driven rotation axis R _L and the left sub-driven rotation axis T _L. The minutes R _L T _L are parallel and have the same left first length M _L.
And the line segment S _L P _L further connecting between the left auxiliary active rotation axis S _L and the left hand the active rotation axis P _L horizontally between the left sub driven rotation axis T _L and the left hand driven rotation axis Q _L Horizontally connecting line segments T _L Q _L are parallel and have the same left second length N _L.

That is, the first left arm portion 20L ₁ is formed by horizontally connecting the main active rotation axis O, the left main driven rotation axis R _L , the left sub active rotation axis S _L, and the left sub driven rotation axis T _L. The distance between the axes is set so that the quadrangle OR _L T _L S _L is a parallelogram.

Further, a quadrangle S _L T _L Q formed by horizontally connecting the rotation axes of the left auxiliary active rotation axis S _L , the left auxiliary driven rotation axis T _L , the left hand active rotation axis P _L , and the left hand driven rotation axis Q _L. _L P _L is such that the parallelogram, the distance between the axes is set.
When the first left drive shaft 12L ₁ rotates while the left rotating member 16L is stationary, each of the squares OR _L T _L S _L and S _L T _L Q _L P _L is maintained while maintaining a parallelogram. Deform.

Hereinafter, a line segment OR _L connecting the main active rotational axis O and the left main driven rotation axis R _L horizontally, the line segment OS _L connecting the main active rotational axis O and the left auxiliary active rotation axis S _L horizontally line segment S _L T _L and a left auxiliary active rotation axis S _L and the left hand the active rotation axis P _L but connecting the angle alpha _L, the left and auxiliary active rotational axis S _L and the left auxiliary active rotational axis T _L horizontally An angle formed by a line segment S _L P _L that connects the two lines horizontally is called β _L.

When the first left drive shaft 12L ₁ rotates while the left rotation member 16L is stationary, and the first left main active arm 21L ₁ rotates in a direction to reduce the angle α _L , the first left sub active arm 23L ₁ rotates in a direction to reduce the angle β _L , and here, the first left arm portion 20L ₁ extends.

Further, by rotating the first left drive shaft 12L ₁ in a state where the left rotary member 16L is stationary, the first left main active arm 21L ₁ is rotated in a direction to increase the angle alpha _L, the first left sub The active arm 23L ₁ rotates in a direction to increase the angle β _L , and here, the first left arm portion 20L ₁ is contracted.

On the other hand, connecting the line segment OS _R connecting between the main active rotational axis O and the right sub-active rotational axis S _R horizontally between the right main driven rotation axis R _R and the right sub driven rotary axis T _R horizontally The line segment R _R T _R is parallel and has the same right first length M _R.

And the line segment S _R P _R further connecting between the right auxiliary active rotational axis S _R and the right hand the active rotational axis P _R horizontally between the right sub driven rotary axis T _R and the right hand driven rotation axis Q _R The horizontally connecting line segment T _R Q _R is parallel and has the same right second length N _R.

That is, the first right arm portion 20R ₁ is formed by horizontally connecting the main active rotation axis O, the right main driven rotation axis R _R , the right sub active rotation axis S _R, and the right sub driven rotation axis T _R. The distance between the axes is set so that the quadrangle OR _R T _R S _R is a parallelogram.

Further, a square is formed right sub active axis of rotation S _R, right sub driven rotary axis T _R, right hand active rotation axis P _R, right hand and the driven axis of rotation Q _R connects horizontally S _{_{_{_R}}} T _R Q _R P _R The distance between the axes is set so as to be a parallelogram.
When the first right drive shaft 12R ₁ is rotated in a state in which the right rotary member 16R is stationary, the square OR _{_{_R}} T _R S _R, while maintaining that each S _{_{_{_R}}} T _R Q _R P _R parallelograms Deform.

Hereinafter, a line segment OR _R connecting the main active rotational axis O and the right main driven rotational axis R _R horizontally, the line segment OS _R connecting the main and active rotational axis O and the right sub-active rotational axis S _R horizontally segment S _R T _R and the right sub active rotational axis S _R and the right hand the active rotational axis P _R but connecting the angle alpha _R, and a right sub-active rotational axis S _R and the right sub-active rotary axis T _R horizontally the angle between the line segment S _R P _R connecting the door horizontally is referred to as beta _R.

When the first right drive shaft 12R ₁ rotates while the right rotation member 16R is stationary, and the first right main active arm 21R ₁ rotates in a direction to decrease the angle α _R , the first right sub active arm 23R ₁ rotates in a direction to decrease the angle β _R , and here, the first right arm 20R ₁ is contracted.

Further, when the first right drive shaft 12R ₁ rotates while the right rotation member 16R is stationary, and the first right main active arm 21R ₁ rotates in the direction of increasing the angle α _R , the first right sub-axis The active arm 23R ₁ rotates in a direction to increase the angle β _R , and here, the first right arm portion 20R ₁ extends.

A first left placement portion 27L ₁ and a first right placement portion 27R ₁ configured to be able to place a substrate are fixed to the first left hand 26L ₁ and the first right hand 26R ₁ , respectively. ing. Reference numerals 30L ₁ and 30R ₁ denote substrates placed on the first left placement part 27L ₁ and the first right placement part 27R ₁ , respectively.

When the first left drive shaft 12L ₁ is rotated while the left rotation member 16L is stationary and the first left arm portion 20L ₁ is expanded and contracted in the horizontal plane, the first left placement portion 27L ₁ alpha _L is separated from the left the central axis toward the 90 °, the angle alpha _L is moved along a horizontal arc curve approaches the left center axis moves away from 90 °.

When the first right drive shaft 12R ₁ is rotated while the right rotation member 16R is stationary, and the first right arm portion 20R ₁ is expanded and contracted in the horizontal plane, the first right placement portion 27R ₁ is As the angle α _R approaches 90 °, it moves away from the right center axis, and as the angle α _R moves away from 90 °, it moves along a horizontal arc curve that approaches the right center axis.

When the first left drive shaft 12L ₁ and the left rotation member 16L are rotated together at the same angle and in the same direction around the main active rotation axis O, the first left arm portion 20L ₁ has large angles α _L and β _L. The first right drive shaft 12L ₁ and the right rotation member 16R are rotated together around the main active rotation axis O in the same angle and in the same direction around the main active rotation axis O while maintaining the thickness. Then, the first right arm portion 20R ₁ rotates around the main active rotation axis O while maintaining the magnitudes of the angles α _R and β _R.

With reference to FIG. 2, in the transfer device 10 of the present invention, the first left placement portion 27 </ b> L ₁ and the first right placement portion 27 </ b> R ₁ are disposed at the same height.
Further, referring to FIG. 1, the above-mentioned left second length N _L is shorter than the left first length ML, and the right second length N _R is the right first length N _L. It is shorter than the length M _R of.

Therefore, when the angle alpha _L is 0 ° greater than 180 ° less than the above-described left central axis line P _L Q _L connecting the left hand active rotation axis P _L and the left hand driven rotation axis Q _L horizontally spaced apart from, when the angle alpha _R is 0 ° greater than 180 ° smaller than, the line segment P _R Q _R connecting the right hand the active rotational axis P _R and the right hand driven rotation axis Q _R horizontally It is spaced apart from the right central axis.
Sum (W _L + N _L ) of the distance W _L between the edge of the first left hand 26L ₁ near the left central axis and the line segment P _L Q _L and the second length N _L on the left is shorter than the first length M _L of the left. Further, the sum (W _R + N) of the distance W _R between the edge of the first right hand 26R _{1 on} the side close to the right center axis and the line segment P _R Q _R and the second length N _R on the right _R) is shorter than the first length M _R of the right. Therefore, even when the angles α _L and α _R are 90 °, the first left hand 26L ₁ and the first right hand 26R ₁ do not collide with each other.

The angles α _R and α _L when the substrates 30L ₁ and 30R ₁ mounted on the first left mounting unit 27L ₁ and the first right mounting unit 27R ₁ collide with each other are respectively determined by the respective substrates 30L ₁ , 30R ₁ diameter, left first length M _L , second length N _L , right first length M _R , second length N _R, and first left mounting The distance between the center of the substrate 30L ₁ placed on the portion 27L ₁ and the extended line of the line segment P _L Q _L , and the center of the substrate 30R ₁ placed on the first right placement portion 27R ₁ The distance between the line segment P _R Q _{R and} the extended line can be calculated in advance.

In a state where the left rotating member 16L and the right rotating member 16R are stationary, the first left drive shaft 12L ₁ and the first right drive shaft 12R ₁ are rotated within a predetermined angle range, and the first left arm When the portion 20L ₁ and the first right arm portion 20R ₁ expand and contract, respectively, the first left placement portion 27L ₁ and the first right placement portion 27R ₁ are arranged apart from the left center axis and the right center axis, respectively. The first left placement unit 27L ₁ and the substrates 30L ₁ and 30R ₁ placed on the first right placement unit 27R ₁ can move so as not to collide with each other.

Therefore, the first left hand 26L ₁ and the first right hand 26R ₁ can be formed in a simpler shape than before, and the manufacturing cost of each hand 26L ₁ , 26R ₁ can be reduced as compared with the prior art.
Furthermore, since the first left hand 26L ₁ and the first right hand 26R ₁ can be formed in a simpler shape than before, each hand 26L ₁ , 26R ₁ becomes lighter than before and the first left arm 20L ₁ , the amount of deflection of the first right arm portion 20R ₁ is reduced as compared with the prior art.

Here, the left first length M _L and the right first length M _R are set to the same length, and the left second length N _L and the right second length N _R are also set to each other. Are the same length.
Accordingly, it is possible to easily calculate the respective positions of the first placement portion 27L ₁ and the second placement portion 27R ₁ when the first left arm portion 20L ₁ and the first right arm portion 20R ₁ are expanded and contracted. It has become.

Reference numeral 50 in FIGS. 3A and 3B is a schematic plan view of a vacuum processing apparatus using the transfer apparatus 10 of the present invention.
The vacuum processing apparatus 50 includes a transfer chamber 51 and one or a plurality of process chambers 52 to 59 connected to the transfer chamber 51, respectively.

The transfer device 10 is disposed inside the transfer chamber 51.
Referring to FIG. 3A, the first left arm 20L ₁ and the first right arm 20R ₁ are contracted, and the first left drive shaft 12L ₁ , the first right drive shaft 12R ₁ and the left When the rotating member 16L and the right rotating member 16R are rotated together at the same angle and in the same direction, the first left arm portion 20L ₁ and the first right arm portion 20R ₁ rotate together around the main active rotation axis O, The first left placement unit 27L ₁ and the first right placement unit 27R ₁ can be directed to the processing chambers 52 to 59, respectively.

The first left mounting portion 27L ₁ and the first right mounting portion 27R ₁ are directed to the

processing chambers

56 and 57 here, respectively, and then the left rotating member 16L and the right rotating member 16R are stationary. When the first left drive shaft 12L ₁ and the first right drive shaft 12R ₁ are rotated to extend the first left arm portion 20L ₁ and the first right arm portion 20R ₁ , respectively, refer to FIG. The same height in each of the

processing chambers

56 and 57 without causing the substrates 30L ₁ and 30R ₁ placed on the first left placement part 27L ₁ and the first right placement part 27R ₁ to collide with each other. At the same time.

Further, the first left hand 26L ₁ and the first right hand 26R ₁ are lighter than the conventional _one , and the deflection amounts of the first left arm portion 20L ₁ and the first right arm portion 20R ₁ are smaller than the conventional ones. , when the substrate is carried into 30L _1, 30R ₁ to 57, the first left mounting portion 27L _1, the first right mounting substrate 30L ₁ held in the portion 27R _1, 30R ₁ each treatment chamber 56, The possibility of colliding with the 57 openings is reduced as compared with the prior art.

When the first left drive shaft 12L ₁ and the left rotation member 16L are rotated together at the same angle and in the same direction while the first right drive shaft 12R ₁ and the right rotation member 16R are stationary, the first left mount The placement portion 27L ₁ is rotated and moved independently of the first right placement portion 27R ₁ so that the substrate 30L ₁ placed on the first left placement portion 27L ₁ can be aligned in the processing chamber 56. It has become. Further, when the first right drive shaft 12R ₁ and the right rotation member 16R are rotated together in the same direction and in the same direction while the first left drive shaft 12L ₁ and the left rotation member 16L are stationary, the first angle The right placement unit 27R ₁ is rotated and moved independently of the first left placement unit 27L _1, and the substrate 30R ₁ placed on the first right placement unit 27R ₁ can be aligned in the processing chamber 57. It is like that.

With the left rotating member 16L and the right rotating member 16R being stationary, the first left drive shaft 12L ₁ and the first right drive shaft 12R ₁ are rotated to turn the first left arm portion 20L ₁ and the first right arm, respectively. When the portion 20R ₁ is contracted, the first left placement portion 27L ₁ and the first right placement portion 27R ₁ can be pulled out from the

processing chambers

56 and 57 to the transfer chamber 51 without colliding with each other ( (See FIG. 3 (a)).

By combining each of the above steps, the first left mounting portion 27L _1, each of the processing chambers 52 to the first right mounting portion 27R substrate 30L ₁ placed respectively in _1, 30R ₁ the conveying chamber 51 On the other hand, it can be carried into 59, and conversely, it can be carried out from the processing chambers 52 to 59 to the transfer chamber 51.

FIG. 7 shows a plan view of a second example of the conveying apparatus of the present invention, and FIG. 8 shows a side view thereof.
The transport device 10 ′ of the second example has a second left arm portion 20L ₂ and a second right arm portion 20R ₂ in addition to the transport device 10 of the above embodiment.

Second left arm portion 20L _2, the structure of the second right arm portion 20R ₂ is the same as the first left arm portion 20L _1, the first right arm portion 20R ₁ structure, the second left arm portion 20L _2, the second The right arm portion 20R ₂ is disposed above the first left arm portion 20L ₁ and the first right arm portion 20R ₁ , respectively.

However, here, the second left arm 20L ₂ shares the first right arm 20R ₁ and the right rotating member 16R, and the second right arm 20R ₂ shares the first left arm 20L ₁ and the left rotating member 16L. is doing. That is, the second of the second left master-detail Doude 22L ₂ of the left arm 20L ₂ is rotatably arranged around the right main driven rotation axis R _R, the second right arm portion 20R ₂ second right main driven The arm 22R ₂ is disposed so as to be rotatable about the left main driven rotation axis _RL .

Accordingly, when the first left drive shaft 12L ₁ , the second right drive shaft 12R ₂ and the left rotation member 16L rotate together around the main rotation axis O in the same angle and the same direction, the first left arm portion 20L ₁ And the second right arm 20R ₂ are configured to rotate together around the main active rotation axis O while maintaining their respective shapes. When the first right drive shaft 12R ₁ , the second left drive shaft 12L ₂ and the right rotation member 16R rotate together around the main rotation axis O in the same angle and direction, the first right arm portion 20R ₁ And the second left arm 20L ₂ are configured to rotate together around the main active rotation axis O while maintaining their respective shapes.

In the present invention, the second left arm portion 20L ₂ shares the first left arm portion 20L ₁ and the left rotation member 16L, and the second right arm portion 20R ₂ shares the first right arm portion 20R ₁ and the right rotation member 16R. The structure to be included is included. In this case, the second left master-detail Doude 22L ₂ is rotatably arranged around the right main driven rotation axis R _R, the second right master-detail Doude 22R ₂ is rotated around the left main driven rotation axis R _L Although the second left main driven arm 22L ₂ is arranged to be rotatable about the left main driven rotation axis _RL , the second right main driven arm 22R ₂ is arranged to be the right main driven rotation axis R. Arranged to be rotatable around _R.

Accordingly, when the first left drive shaft 12L ₁ , the second left drive shaft 12L ₂ and the left rotation member 16L rotate together around the main active rotation axis O at the same angle and in the same direction, the first left arm portion 20L _{The first} left arm 20L ₂ and the second left arm 20L ₂ rotate together around the main active rotation axis O while maintaining their respective shapes, and the first right drive shaft 12R ₁ , the second right drive shaft 12R ₂ and the right rotation member 16R. Together rotate around the main active rotation axis O at the same angle and in the same direction, the first right arm portion 20R ₁ and the second right arm portion 20L ₂ move together around the main active rotation axis O while maintaining their shapes. It is configured to rotate.

Here, with reference to FIG. 8, the first left arm portion 20L _1, first the first left sub link 32L ₁ of the right arm 20R _1, the first right sub link 32R _1, the first left main link 31L _1, is arranged above the first right main link 31R _1, the second left arm portion 20L _2, the second right arm portion second left sub link 32L ₂ of 20R _2, a second right sub link 32R ₂ are arranged below the second left main link 31L ₂ and the second right main link 31R ₂ , respectively.

Therefore, the difference between the heights of the second left placement portion 27L ₂ and the second right placement portion 27R _{2 and} the heights of the first left placement portion 27L ₁ and the first right placement portion 27R ₁ is The first left sub-link 32L ₁ and the first right sub-link 32R ₁ are respectively disposed below the first left main link 31L ₁ and the first right main link 31R ₁ , The left arm portion 20L ₂ , the second left sub link 32L ₂ of the second right arm portion 20R ₂ , and the second right sub link 32R ₂ are connected to the second left main link 31L ₂ and the second right main link 31R ₂ . The substrates placed on the second left placement part 27L ₂ and the second right placement part 27R ₂ are smaller than the case where they are respectively arranged on the upper side, the first left placement part 27L ₁ , the first It is adapted to be transported at approximately the same height as the right mounted on the mounting portion 27R ₁ to substrates.

Reference numeral 50 ′ in FIGS. 9A and 9B is a schematic plan view of a vacuum processing apparatus using the transport apparatus 10 ′ of the second example of the present invention.
This vacuum processing apparatus 50 ′ has a transfer chamber 51 ′ and one or a plurality of process chambers 52 ′ to 59 ′ connected to the transfer chamber 51 ′, as in the vacuum processing apparatus 50. .
The transfer apparatus 10 ′ is disposed inside the transfer chamber 51 ′.

Referring to FIG. 9A, here, it is assumed that the substrates are vacuum processed in the processing chambers denoted by reference numerals 56 'and 57'. With the arms 20L ₁ , 20L ₂ , 20R ₁ , and 20R ₂ contracted, the first left drive shaft 12L ₁ , the second left drive shaft 12L ₂ , the first right drive shaft 12R ₁ , the second The right drive shaft 12R ₂ , the left rotation member 16L, and the right rotation member 16R are rotated together at the same angle in the same direction, and the respective arm portions 20L ₁ , 20L ₂ , 20R ₁ , 20R ₂ are rotated to The left placement portion 27L ₁ and the second left placement portion 27L ₂ are directed to one processing chamber 56 ′, and the first right placement portion 27R ₁ and the second right placement portion 27R ₂ are treated as the other processing. Turn to chamber 57 '.

Referring to FIG. 9B, unprocessed substrates are placed one by _one on the first left placement unit 27L ₁ and the first right placement unit 27R ₁ , and the second left placement unit 27L. _2, when the second right mounting portion 27R ₂ substrate not placed, the second left arm portion 20L _2, the second right arm portion 20R ₂ processing chamber 56 ', 57' respectively in the The processed substrate is stretched and placed on the second left placement portion 27L ₂ and the second right placement portion 27R ₂ , and the second left arm portion 20L ₂ and the second right arm portion 20 _R are contracted to obtain the substrate. Is carried out to the transfer chamber 51 '.

Next, the first left arm portion 20L ₁ and the first right arm portion 20R ₁ are extended, and the unprocessed substrates placed on the first left placement portion 27L ₁ and the first right placement portion 27R ₁ are removed. The first left arm 20L ₁ and the first right arm 20R ₁ are shrunk into the processing chambers 56 ′ and 57 ′, and the first left arm 27L ₁ and the first right arm 27R are contracted. Pull ₁ into the transfer chamber 51 '. Next, the substrate carried into the processing chambers 56 ′ and 57 ′ is vacuum processed.

In the transfer apparatus 10 ′ of the second example, immediately after the processed substrate is unloaded from the processing chambers 56 ′ and 57 ′, another unprocessed substrate can be loaded into the processing chambers 56 ′ and 57 ′. The throughput of substrate processing can be improved as compared with the transfer apparatus 10 of the first example.

10, 10 '.... conveying device _{_{_{20L 1, 20R 1, 20L 2}}} , 20R 2 ...... arms 21L _1, 21R ₁ ... main active arm _{_{_{22L 1, 22R 1, 22L 2}}} , 22R 2 ...... master-slave Doude 23L ₁ , 23R ₁ …… Sub active arm 24L ₁ , 24R ₁ ...... Sub driven arm 25L ₁ , 25R ₁ ...... Regulating member 26L ₁ , 26R ₁ …… Hand 27L ₁ , 27R ₁ …… Place O …… Main Active rotation axis M _L , M _R ...... First length N _L , N _R ...... Second length R _L , R _R ...... Main driven rotation axis S _L , S _R ...... Sub active rotation axis T _L , T _R …… Sub driven rotation axis P _L , P _R …… Hand active rotation axis Q _L , Q _R …… Hand driven rotation axis

Claims

A transport device that transports a substrate with two arms,
One arm is
A main active rotation axis that is vertically spaced apart at a position passing through a horizontal central axis, and a main driven rotation axis;
A main active arm that passes through the main active rotation axis at a predetermined position at one end and rotates around the main active rotation axis;
A main driven arm that passes through the main driven rotation axis at a predetermined position at one end and rotates around the main driven rotation axis;
A sub active rotation axis and a sub driven rotation axis, which are arranged vertically and pass through a predetermined position of the other end of the main active arm and a predetermined position of the other end of the main driven arm, respectively.
A regulating member configured to rotate about the sub-active rotation axis and the sub-driven rotation axis, the sub-active rotation axis and the sub-driven rotation axis passing through predetermined positions, respectively;
A sub-active arm that passes through the sub-active rotation axis at a predetermined position at one end and rotates about the sub-active rotation axis;
A secondary driven arm that passes through the secondary driven rotational axis at a predetermined position at one end and rotates around the secondary driven rotational axis;
A hand active rotation axis and a hand driven rotation axis, which are arranged vertically and pass through a predetermined position of the other end of the auxiliary active arm and a predetermined position of the other end of the auxiliary driven arm, respectively.
The hand active rotation axis and the hand driven rotation axis pass through predetermined positions, respectively, are configured to be rotatable about the hand active rotation axis and the hand driven rotation axis, and a placement unit for placing the substrate thereon With the hand provided,
Have
The hand active rotation axis and the hand driven rotation axis are disposed closer to the central axis than the sub active rotation axis and the sub driven rotation axis,
A line segment connecting the main active rotation axis and the sub active rotation axis and a line segment connecting the main driven rotation axis and the sub driven rotation axis are parallel and have the same first length,
A line segment connecting between the secondary active rotation axis and the hand active rotation axis and a line segment connecting between the secondary driven rotation axis and the hand driven rotation axis are parallel and have the same second length,
The sub active arm is configured to rotate at the same angle in the opposite direction with respect to the rotation of the main active arm,
The above-mentioned mounting portions of the two arm portions are arranged at the same height,
The main active rotation axes of the two arm portions are the same, and the placement portions of the two arm portions are spaced apart from the central axis of the arm portion provided with the placement portion, respectively. Said transport device, comprising:
The transport device in which the second length is shorter than the first length.
2. The transfer device according to claim 1, wherein the main driven rotation axes of the two arm portions are arranged at different positions.
3. The transport device according to claim 1, wherein the main driven rotation axis of the two arm portions is configured to be rotatable about the main active rotation axis. 4.