KR100731997B1 - Magnetic levitaing transfer equipment and workpiece processing system using the same - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic levitation conveying apparatus for carrying and transporting a substrate in a non-contact manner with a magnetic force, and a magnetic levitation conveying apparatus comprising: a guide rail provided in a transfer chamber and disposed along a conveying path; A movable body installed in the transfer chamber and installed to be movable along the guide rail by being magnetically non-contacted with the guide rail; A linear driving device installed outside the transfer chamber to generate a linear force; And it may include a transmission means for transmitting the advance force generated by the linear drive device to the movable body by a magnetic force. The conveying apparatus of the above-described configuration is suitable for substrate transfer in a chamber (clean room) that requires cleanliness because the substrate transfers the substrate while the carrier is floating on the guide rail due to the magnetic levitation.

Substrate, Cassette, Process Chamber, Magnetic Levitation

Description

Magnetic levitation conveying apparatus and substrate processing system using the same {MAGNETIC LEVITAING TRANSFER EQUIPMENT AND WORKPIECE PROCESSING SYSTEM USING THE SAME}

1 is a perspective view schematically showing a substrate processing apparatus of the present invention.

2 is a plan view schematically showing a substrate processing apparatus of the present invention.

3 is a front sectional view schematically showing the substrate processing equipment of the present invention.

4 to 6 are diagrams showing the process of taking over the substrate to the susceptor in the magnetic levitation conveying device.

7 is a view showing a modified magnetic levitation conveying device.

Explanation of symbols on the main parts of the drawings

102 index 116 transfer unit

110: process unit 112: transfer chamber

116 process chamber 120 susceptor

130: magnetic levitation conveying device 150: drive member

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate processing apparatus, and more particularly, to a magnetic levitation conveying apparatus for carrying a substrate by non-contact support with magnetic force and a substrate processing apparatus using the same.

In general, a substrate transfer apparatus used in a substrate processing facility has a first arm pivotably connected to a base, a second arm pivotably connected to a first arm, and a handler (substrate) at the end of the second arm. The blade to be placed is made of a frog-leg type frog, which is rotatably connected to each other so as to rotate relative to each other. The complexity of this substrate transfer device has many problems in terms of device inefficiency, high cost, and maintenance due to frequent failures. In particular, such a substrate transfer device has a very high incidence of noise, dust (particles), etc. in the process of transferring the substrate, which is not suitable for the substrate transfer method in a clean room requiring cleanliness, and the cost for maintaining the cleanliness is increased. Problems arise.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object thereof is to provide a magnetic levitation conveying apparatus suitable for substrate transfer in a clean room requiring high cleanliness, and to increase work efficiency, and a substrate processing equipment using the same. have.

According to one aspect of the present invention for achieving the above object, a magnetic levitation conveying device for conveying a substrate in a transfer chamber is provided in the transfer chamber, the guide rail disposed along a conveying path; A movable body installed in the transfer chamber and installed to be movable along the guide rail by being magnetically non-contacted with the guide rail; A linear driving device installed outside the transfer chamber to generate a linear force; And it may include a transmission means for transmitting the advance force generated by the linear drive device to the movable body by a magnetic force.

According to one embodiment of the invention, the transmission means is disposed adjacent to the outer wall surface of the transfer chamber is a first transfer member moving in the direction of the transport path by the linear force of the linear drive device; And a second transfer member installed in the movable body so as to face the first transfer member within the transfer chamber and installed to be linearly movable with the movable body.

According to one embodiment of the invention, the linear drive device and the motor; A ball screw rotated by the motor; And a ball nut connected to the first transfer member and fastened to the ball screw and linearly moved by the rotation of the ball screw.

According to an embodiment of the present invention, the linear drive device includes a hydraulic cylinder having a rod operated in the conveying path direction; The rod may be connected to the first transfer member.

According to one embodiment of the invention, the movable body is a body portion which is magnetically non-contact support to the guide rail; And a support part installed on the body part and on which the substrate is placed.

According to one embodiment of the invention, the guide rails are installed side by side with a first floating magnetic material and spaced apart from each other; When facing each other has a moving groove in which the body portion is located; The body portion of the movable body may be formed in a plate shape having both ends that are fitted in the movable grooves formed in the two guide rails, respectively, and the second floating magnetic body is installed.

According to an embodiment of the present invention, the support portion passes the substrate to the first entry passage through which the transport robot of the first chamber can enter and the substrate loading portion of the second chamber to receive the substrate from the first chamber. To this end, it may have a second entry path through which lift pins of the substrate loading part of the second chamber may enter.

According to one embodiment of the invention, the support portion further comprises a substrate holder for supporting the edge of the substrate at a position higher than the body portion; The substrate holder may have openings formed at a predetermined width before and after moving to transfer the substrate.

A semiconductor substrate processing system for achieving the above object includes a process chamber having at least one susceptor on which a substrate is placed; A transfer chamber connected to the process chamber; A magnetic levitation conveying apparatus installed in the transfer chamber and conveying a substrate to a susceptor of the process chamber in a magnetic levitation manner; And a transfer arm for exchanging a substrate with the substrate transfer apparatus outside the transfer chamber; The magnetic levitation conveying apparatus may further include a guide rail, a movable body moving along the guide rail in a magnetically floating state on the guide rail, and a driving member for applying a driving force to the movable body.

According to one embodiment of the invention, the drive member is a first magnet installed in the movable body; A second magnet positioned outside the transfer chamber so that the first magnet and the attraction force act; And a linear driving device for moving the second magnet in the substrate conveyance direction.

According to one embodiment of the invention, the linear drive device and the motor; A ball screw rotated by the motor; And a ball nut connected to the first transfer member and fastened to the ball screw and linearly moved by the rotation of the ball screw.

According to an embodiment of the present invention, the linear drive device includes a hydraulic cylinder having a rod operated in the conveying path direction; The rod may be connected to the first transfer member.

According to one embodiment of the invention, the movable body is a body portion which is magnetically non-contact support to the guide rail; And it may include a support that is installed on the body portion and the substrate is raised.

According to one embodiment of the invention, the guide rail is installed in parallel with each other on both side walls of the transfer chamber and facing each other has a moving groove in which the body portion is located; The body portion of the movable body may be formed in a plate shape having both ends that are fitted to each of the moving grooves formed in the two guide rails.

According to an embodiment of the present invention, the support part includes a first entry path through which the carrier arm can enter to take over the substrate, and lift pins of the susceptor to pass the substrate to the susceptor of the process chamber. It may have a second entry path into which it can enter.

For example, embodiments of the present invention may be modified in various forms, and the scope of the present invention should not be construed as being limited by the embodiments described below. This embodiment is provided to more completely explain the present invention to those skilled in the art. Accordingly, the shape of the elements in the drawings and the like are exaggerated to emphasize a clearer description.

(Example)

An embodiment of the present invention will be described in detail with reference to FIGS. 1 to 7. In addition, in the drawings, the same reference numerals are denoted together for components that perform the same function.

The basic intention of the present invention is to provide a conveying apparatus suitable for transporting a substrate in a clean room requiring high cleanliness. In order to achieve this, the present inventors use a linear driving device installed outside the chamber in a state where the carrier supporting the substrate is floated in a magnetic levitation manner to move the carrier.

1 to 3 are a perspective view, a plan view and a front sectional view schematically showing the substrate processing equipment of the present invention.

1 to 3, the substrate processing facility 100 has an index 102 in front. The index 102 includes a FOUP opener on which two FOUPs 104 (also known as carriers) on which the substrates w are loaded are seated and which open and close the lids of the pools. The pull 104 is a common lot carrier for production, and is seated on the index 102 by a logistics automation system (eg OHT, AGV, RGV, etc.). This index 102 is provided to be connected to a transfer section 106 having a space required for substrate transfer.

The transfer unit 106 is an interface called an equipment front end module (EFEM) in which the transfer unit transfers the substrate between the two pulls 104 and the processing unit 110 seated at the index 102. A substrate transfer robot 108 that can operate is installed. The substrate transfer robot 108 transfers the substrate between the index 102 and the process processor 110. In other words, the substrate transfer robot 108 carries out two substrates in one operation from the two pulls 104 placed at the index 102 and carries them into the processing unit 110, respectively. The substrate transfer robot 108 installed in the transfer unit 106 may be a variety of robots that are typically used in the semiconductor manufacturing process.

1 to 3, the process processor 110 is disposed behind the transfer unit 106. The process processor 110 includes a transfer chamber 112 and a process chamber 116. The transfer chamber 112 is disposed adjacent to the transfer unit 106, and the process chamber 116 is connected to the rear of the transfer chamber 112. Is placed. The front surface of the transfer chamber 112 has a substrate inlet / outlet 114 through which the substrate is drawn in / out, and the substrate inlet / outlet 114 is opened and closed by a normal gate valve 114a. The gate valve 114a seals the transfer chamber 112 from the transfer part 106 so that the transfer chamber 112 can be evacuated. A substrate entrance 118 is opened and closed between the transfer chamber 112 and the process chamber 116 by the gate valve 118a. The gate valve 118a seals the process chamber 116 from the transfer chamber 112 so that the transfer chamber 112 can be vented to atmospheric pressure without obstruction of the process chamber 116. The transfer chamber 112 typically serves as a buffer space between two or more different environments, for example an atmospheric pressure environment at room temperature and a vacuum environment at elevated temperatures, and may be used as a substrate (or in a process chamber) for processing in the process chamber 116. The processed substrate) is temporarily waiting.

Two susceptors 120 (also called substrate chucks) disposed in the process chamber 116 are arranged side by side at a predetermined distance from the inside of the process chamber 116. Although not shown, the susceptor 120 has several basic functions, that is, the function of taking over or taking over the substrate from the magnetically levitated conveying device 130 (typically by a lift pin assembly installed in the susceptor), during processing. It is obvious to have a function of holding the substrate, a function of providing the substrate with a uniform thermal environment depending on the processing temperature, and the like.

The process chamber 116 here may be configured to perform various substrate processing operations. For example, the process chamber may be an ashing chamber that removes the photoresist using plasma to remove the photoresist, the process chamber may be a CVD chamber configured to deposit an insulating film, and the process chamber may be interconnected. An etch chamber configured to etch apertures or openings in the insulating film to form structures, the process chamber may be a PVD chamber configured to deposit a barrier film, and the process chamber may be deposited to deposit a metal film. It may be a configured PVD chamber. Multiple processing systems may be required to perform all the processes required for complete fabrication of integrated circuits or chips.

On the other hand, the transfer chamber 112 is a magnetic levitation conveying device 130 having a special structure for taking over the substrate received from the substrate transfer robot 108 of the transfer unit 106 on the susceptor 120 in the process chamber 116 ) Two are installed side by side.

1 to 3, the magnetically levitated conveying device 130 takes over a substrate conveyed by the substrate transport robot 108 of the conveyance unit 106, also known as a susceptor (aka substrate chuck) of the process chamber 116. It is a unit to take over the substrate (120) (or take over the substrate from the susceptor of the process chamber and take over to the substrate transfer robot of the transfer unit).

The magnetic levitation conveying device 130 is capable of driving a support part (also called a blade or a hand) on which a substrate is placed on the guide rail in a completely non-contact manner without generating noise, vibration, and dust, and is disposed along the conveying path. And a guide rail 132 to be magnetically non-contacted to the guide rail 132 and installed to be movable along the guide rail, and a driving member 150 to impart a driving force to the movable body.

The guide rail 132 has a first floating magnetic material 136 and is positioned at both sides 112a of the transfer chamber 112. The guide rail 132 has a moving groove 133 in which a part of the body portion 142 is located, and the first magnetic material for lifting 136 is installed above and below with the moving groove 133 therebetween. .

The movable body 140 is divided into a plate-shaped body portion 142 and a support portion 146. The body portion 142 is a portion that is magnetically non-contactedly supported by the guide rail 132, and the support portion 146 is a substrate (W). It has a substrate holder 147 supporting the edge of.

The body portion 142 has both ends positioned in the moving grooves 133 formed on the guide rails 132, respectively. At both ends, the second floating magnetic material 144 is provided on the upper and lower surfaces facing the first floating magnetic material 136, respectively. Thus, the first and second magnetic injuries 136 and 144 are installed on each of the upper and lower ends of the conveying body 140, respectively, so as to magnetically float the conveying body 140, the height of the moving body 140 is raised constant Not only can it be maintained, but there is an advantage that can prevent the left and right shake phenomenon.

The moving body 140 is substantially attracted by the suction action between the second floating magnetic material 144 and the first floating magnetic material 136 installed on the guide rail 132 so that the magnetic injured state is achieved. Will be. In the present invention, the first floating magnetic body 136 installed on the guide rail 132 has been described as a suction type in which the floating force to pull the second floating magnetic material 144 of the moving body 140, which is one embodiment Only, the floating method of the moving body 140 may be used a variety of floating methods such as permanent magnet repulsion method, phase conduction suction control method, induced repulsion method.

The substrate holder 147 of the support part 146 is positioned higher than the body part, and an opening is formed at a predetermined width L in front and rear. In this case, the width L should be wider than the blade of the substrate transfer robot 108 and should be wider than the lift pins of the susceptor, but the substrate takeover / takeover is smooth. The opening of the substrate holder 147 is a first entry passage 147a through which the blade of the substrate transfer robot 108 can enter to pass the substrate, and to pass the substrate to the susceptor 120 of the process chamber. The lift pins 122 of the acceptor 120 have a second entry path 147b into which they can enter. If there is no substrate holder having the first and second entry paths, a collision occurs between the substrate holder and the substrate transfer robot while the substrate transfer robot takes over the substrate holder of the transfer body, or the substrate holder of the transfer body is lifted. A collision with the lift pins can occur when the substrate is taken over and returned to the pins. For example, the substrate holder of the support may be manufactured in a suitable shape according to the position of the substrate takeover and the shape of the blade of the substrate transfer robot so that interference does not occur during substrate takeover / takeover.

On the other hand, the conveying body 140 is a standby position (shown in FIG. 4) waiting in the transfer chamber 112 by the driving force of the drive member and the upper position of the susceptors 120 of the process chamber 116 (FIG. 5). The substrate is transferred while linearly moving.

On the other hand, the drive member 150 has a linear drive device 156 for generating a linear force. The linear driving device 156 is installed on the outer side 112a of the transfer chamber 112, and the linear force generated by the linear driving device 156 is transmitted to the moving body 140 by the transmission means.

The transmission means includes a first magnet 152 that is a first transfer member and a second magnet 154 that is a second transfer member. In more detail, the first magnet 152 is positioned to be linearly movable on the outer wall surface 112a of the transfer chamber 112 in the same line as the moving groove 133. In addition, the second magnet 154 is installed to face the first magnet 152 and the attraction force at one end of the body portion 142 near the outer wall surface 112a of the transfer chamber 112. In particular, the wall surface 112a of the transfer chamber 112 blocking the first magnet 152 and the second magnet 154 is as thin as possible so that the magnetic force between the first magnet 152 and the second magnet 154 acts. And it is preferable to form a material that does not affect the magnetic force.

The linear driving device 156 is a guide for guiding linear movement of the ball nut 159 and the ball nut 159 connected to the first magnet 152 and the ball screw 158 rotated by the motor 157. Rod 160. The ball nut 159 is fastened to the ball screw 158 and is linearly moved by the rotation of the ball screw 158.

As such, in the exemplary embodiment of the present invention, since the linear driving device 156 of the driving member 150 is installed outside the transfer chamber 112, workability due to maintenance of the linear driving device 156 is remarkably improved. In particular, there is an advantage that can prevent in advance the contamination of the transfer chamber 112 due to particles generated during the power transmission process.

As such, the magnetic levitation conveying device 130 applied to the substrate processing facility 100 of the present invention can prevent the complexity, maintenance cost, and contamination of the transfer chamber 112 by removing the joint parts of the existing complicated conveying device. have.

The substrate transfer process between the magnetic levitation conveying device 130 and the susceptor 120 is shown in detail in FIGS. 4 to 6.

4 to 6 illustrate a step-by-step process in which the substrate is turned over to the susceptor 120 in the magnetic levitation conveying device 130.

As shown in the figures, the substrate w enters the transfer chamber 112 by the substrate transfer robot 108 of the transfer unit 106 and is placed in the substrate holder 147 of the transfer body 140 (FIG. 4). At this time, the blade of the substrate transfer robot 108 is exited to the first entry passage 147a of the substrate holder 147. The substrate w is linearly moved above the susceptor 120 of the process chamber 116 in a state where the substrate w is placed on the substrate holder 147 of the transfer body 140 (FIG. 5). Movement of the conveying body 140 is performed by the first magnet 152 is moved by the operation of the linear drive device 156, the second magnet 154 is moved by the magnetic force of the first magnet. Meanwhile, when the substrate holder 147 of the transfer body 140 is positioned above the susceptor 120, the lift pins 122 are raised to lift the substrate w from the substrate holder 147. In that state, the conveyance body 140 is moved to the standby position of the transfer chamber 112 (FIG. 6). At this time, the lift pins 122 pass through the second entry passage 147b of the substrate holder 147, so that collision with the lift pins 122 does not occur. When the transfer body 140 is returned to the transfer chamber 112 in this manner, the lift pins 122 are lowered to place the substrate w on the susceptor 120 surface.

As described above, the substrate processing facility 100 of the present invention is a noise, vibration, and the like due to the transfer of the substrate between the transfer chamber 112 and the process chamber 116 through the magnetic levitation conveying device 130 installed in the transfer chamber 112 By preventing dust, it has a special effect to minimize the contamination and maintenance costs of the transfer chamber.

(Variation of Magnetic Flotation Type Transfer Device)

7 is a view showing a modified magnetic levitation conveying device.

The magnetic levitation conveying apparatus 130a shown in FIG. 7 has a guide rail 132, a movable body 140, a driving member, etc., which have substantially the same configuration and function as the magnetic levitation conveying apparatus 130 in FIG. Since the description thereof has been described in detail above, this embodiment will be omitted.

However, in the present modification, the linear drive device 150a for generating a linear force has a feature of a cylinder device. That is, the linear driving device 150a includes a hydraulic cylinder 151 having a rod 151a operated in the conveying path direction. The first magnet 152 is connected to the rod 151a.

In the present invention, a ball screw method or a cylinder method has been disclosed as a configuration for linear movement of the moving body, but it is obvious that various methods may be applied in addition to the method.

In the above, the configuration and operation of the substrate processing equipment according to the present invention has been shown in accordance with the above description and drawings, but this is merely an example, and various changes and modifications can be made without departing from the technical spirit of the present invention. Of course.

As described above, the substrate processing equipment of the present invention is suitable for substrate transfer in a chamber (clean room) that requires cleanliness, because the substrate is transferred in a state where the carrier is floated on the guide rail due to magnetic levitation, thereby improving work efficiency. There is an advantage to this.

Claims (16)

In a magnetic levitation conveying apparatus for conveying substrates in a transfer chamber: A guide rail 132 installed in the transfer chamber 112 and disposed along a transport path; A movable body 140 installed in the transfer chamber and installed to be movable along the guide rail by being magnetically non-contacted with the guide rail; A linear driving device 156 installed outside the transfer chamber to generate a linear force; And And a transmission means for transmitting the straight line force generated by the linear drive device to the movable body by magnetic force. The method of claim 1, The delivery means A first transfer member 152 disposed adjacent to an outer wall of the transfer chamber and moving in a conveying path direction by a linear force of the linear drive device; And And a second transfer member (154) installed in the movable body so as to face the first transfer member within the transfer chamber and installed to be linearly movable together with the movable body. The method of claim 1, The linear drive device A motor 157; A ball screw 158 rotated by the motor; And a ball nut (159) connected to the first transfer member and fastened to the ball screw and linearly moved by the rotation of the ball screw. The method of claim 1, The linear drive device A hydraulic cylinder 151 having a rod operated in the conveying path direction; Maglev conveying apparatus, characterized in that the first transfer member is connected to the rod. The method according to any one of claims 2 to 4, The moving body is A body portion 142 which is magnetically contactlessly supported by the guide rail; And Maglev conveying apparatus, characterized in that it comprises a support portion 146 is installed on the body portion and the substrate is placed. The method of claim 5, The guide rails are installed side by side with the first floating magnetic material 136 and spaced apart from each other; When facing each other has a moving groove 133 in which the body portion is located; Body portion of the movable body It is made of a plate shape having both ends fitted to the moving grooves formed in the two guide rails and the second magnetic material for the second buoy, it is possible that both ends of the movable body can be moved in a state stably magnetically wound by the guide rail Maglev conveying device characterized in that. The method of claim 5, The support portion A first entry passage 147a through which the transfer robot of the first chamber can enter to take over the substrate from the first chamber, and a substrate loading portion of the second chamber to pass the substrate to the substrate loading portion of the second chamber; Maglev conveying apparatus, characterized in that it has a second entry cylinder (147b) path that the lift pins can enter. The method of claim 5, The support portion Further comprising a substrate holder (147) for supporting the edge of the substrate at a position higher than the body portion; The substrate holder is a magnetic levitation conveying device, characterized in that the opening is formed in a predetermined width before and after moving for transporting the substrate. delete In a semiconductor substrate processing system, A process chamber 116 having at least one susceptor on which the substrate is placed; A transfer chamber 112 connected to the process chamber; A magnetic levitation conveying apparatus (130) installed in the transfer chamber and conveying a substrate to a susceptor of the process chamber in a magnetic levitation manner; And a transfer arm for exchanging a substrate with the substrate transfer apparatus outside the transfer chamber; The magnetic levitation conveying device is: A guide rail 132; A movable body 140 that is moved along the guide rail in a magnetically floating state on the guide rail; The first magnet installed in the movable body, the second magnet 154 located outside the transfer chamber so that the attraction force with the first magnet 152, and a linear drive for moving the second magnet in the substrate transfer direction And a drive member (150) for imparting a thrust force to said moving body, including an apparatus (156). The method of claim 10, The linear drive device A motor 157; A ball screw 158 rotated by the motor; And a ball nut (159) connected to the first transfer member and fastened to the ball screw and linearly moved by the rotation of the ball screw. The method of claim 10, The linear drive device A hydraulic cylinder 151 having a rod operated in the conveying path direction; The first floating member 152 is connected to the rod, the magnetic levitation conveying apparatus, characterized in that. The method according to claim 11 or 12, wherein The moving body is A body portion 142 which is magnetically contactlessly supported by the guide rail; And And a support portion 146 installed on the body portion and having a substrate raised thereon. The method of claim 13, The guide rail Installed on both side walls of the transfer chamber side by side and facing each other has a moving groove 133 in which the body portion is located; Body portion of the movable body A semiconductor substrate processing system comprising a plate shape having both end portions respectively fitted into moving grooves formed in the two guide rails, wherein both ends of the movable body are movable in a state in which magnetic levitation is stably caused by the guide rails. The method of claim 13, The support portion A first entry path 147a through which the carrier arm can enter to take over the substrate, and a second entry path through which lift pins of the susceptor can enter to pass the substrate to the susceptor of the process chamber; (147b), characterized in that the semiconductor substrate processing system. The method of claim 13, The support portion Further comprising a substrate holder (147) for supporting the edge of the substrate at a position higher than the body portion; The substrate holder is a semiconductor substrate processing system, characterized in that the opening is formed in a predetermined width before and after moving for transporting the substrate.

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