WO2012017976A1 - Dispositif de séparation en continu d'une substance étrangère d'avec une solution - Google Patents

Dispositif de séparation en continu d'une substance étrangère d'avec une solution Download PDF

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Publication number
WO2012017976A1
WO2012017976A1 PCT/JP2011/067571 JP2011067571W WO2012017976A1 WO 2012017976 A1 WO2012017976 A1 WO 2012017976A1 JP 2011067571 W JP2011067571 W JP 2011067571W WO 2012017976 A1 WO2012017976 A1 WO 2012017976A1
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WO
WIPO (PCT)
Prior art keywords
standing wave
foreign substances
fushi
fluid
contained
Prior art date
Application number
PCT/JP2011/067571
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English (en)
Japanese (ja)
Inventor
光男 村田
Original Assignee
Murata Mitsuo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Mitsuo filed Critical Murata Mitsuo
Publication of WO2012017976A1 publication Critical patent/WO2012017976A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0073—Degasification of liquids by a method not covered by groups B01D19/0005 - B01D19/0042
    • B01D19/0078—Degasification of liquids by a method not covered by groups B01D19/0005 - B01D19/0042 by vibration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D21/00—Separation of suspended solid particles from liquids by sedimentation
    • B01D21/28—Mechanical auxiliary equipment for acceleration of sedimentation, e.g. by vibrators or the like
    • B01D21/283—Settling tanks provided with vibrators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D49/00—Separating dispersed particles from gases, air or vapours by other methods
    • B01D49/006—Separating dispersed particles from gases, air or vapours by other methods by sonic or ultrasonic techniques

Definitions

  • Non-Patent Document 1 filtration, activated carbon, ion exchange resin, membrane separation, reverse osmosis, etc. are the mainstream methods for purifying high-purity fluids (water, air, etc.).
  • the present invention solves the problems of items [0006] and [0007] by means of items [0009] to [0011].
  • the [0009] term and the [0010] term are basic actions for realizing the present invention
  • the [0011] term is a device for realizing the action.
  • Non-Patent Document 1 As a means for capturing the contained foreign matter, a method using a standing wave fist is adopted. It is known that standing wave fushi has the ability to capture lightweight objects and has already been utilized. (See Non-Patent Document 1 and Non-Patent Document 2)
  • the contained foreign matter is separated from the fluid to be treated.
  • a device for realizing continuous separation of contained foreign substances in the fluid to be treated a device composed of the following vibrator system and control device is introduced. Select a set of transducers arranged at regular intervals and deviated from each other by the same amount, and a transducer to be excited from the transducer group, and excite the selected transducers for a predetermined time, and control to switch sequentially A device consisting of devices.
  • the ability of a standing wave fushi to capture an object increases as the object becomes finer and lighter.
  • This characteristic is the opposite of the characteristics of the existing methods listed in the section [0002], and the standing wave fushi method becomes more effective as the required level to be removed becomes lighter. That is, by adopting the standing wave fushi method as the principle of capturing the contained foreign matter, the problem [0006] is completely solved, and as a result, the back-washing step of the problem [0007] is not required at the same time.
  • the contained foreign substances are continuously separated and discharged from the fluid to be treated, and it becomes possible to continuously purify the high-purity clean fluid.
  • Table 1 shows the overall configuration of the present invention.
  • the present invention comprises the following two elements.
  • the basic function software for realizing the present invention
  • Means for realizing the basic function
  • Intermittent movement of fushi Oscillator system Two elements of the controller.
  • the basic operation (software) of the present invention is further divided into the following two elements.
  • adopting the standing wave fushi method is two elements of repeating the intermittent movement of the standing wave fushi.
  • the hardware that establishes the present invention is a vibrator system control device.
  • the standing wave fushi has the following two effects. That is, The action of trapping contained foreign substances in the fluid is one of two actions that retains the trapped contained foreign substances and does not release them.
  • FIG. 1 schematically shows a standing wave.
  • the situation where the standing wave S appears inside the container V is shown.
  • the intersection of the standing wave S is the fushi N.
  • Fushi N is a portion that does not vibrate (that is, the amplitude is 0).
  • FIG. 2 shows a mode in which the contained foreign matter in the fluid is sucked into the flies.
  • the standing wave S in the figure partially illustrates a part of the standing wave in FIG.
  • the contained foreign substance F (indicated by symbol ⁇ ) in the fluid is excited by the action of the standing wave S at the existence location, reaches the nearest fushi N, and the vibration and movement are finished and stopped.
  • the arrow ( ⁇ ) in the figure schematically shows the path through which the contained foreign matter is sucked and captured by the flies. This term is the action described above in the paragraph [0022] in which the standing wave flies capture the contained foreign matter.
  • FIG. 3 shows a mode in which the foreign matter once captured by the fusible N is re-sucked by the fusible N even if it is separated from the fusible N for some reason. That is, even if the foreign matter F is displaced from the fushi N, it is subjected to the action of the previous item [0024] at that place and eventually attracted to N. This is the latter action of the standing wave fushi described in [0022].
  • the action of the standing wave fist trapping foreign matter is caused by the vibration action of the standing wave, that is, the mechanical action, as described in the section [0024]. Therefore, the action to be captured is greater as the weight of the object to be captured is lighter. This is the basis of the contents described in the item [0012] of the invention. That is, when the standing wave fushi method is adopted as a method for capturing the contained foreign substances, the light weight limit built in the existing method can be substantially completely cleared.
  • FIG. 4 is essentially the same content as FIG. 1 (showing the appearance of standing waves), but the necessary content has been added to the following description. That is, the fluid to be processed flows in the direction of MF inside the container V. VI and VO are mutually opposing inflow and outflow vibrators, and their vibration characteristics are exactly the same. A standing wave S is generated in the fluid to be treated by the action of VI and VO.
  • the FO is a dedicated discharge pipe FO disposed on the outflow side for discharging separated contained foreign substances.
  • Ni, Ni + 1; and Nn are fushi on the standing wave S. Of these, Nn is the fistula closest to the front end of the dedicated discharge pipe FO.
  • FIG. 5A shows a state in which a pair of transducers VI and VO are excited for a certain time from a certain time to generate a standing wave in the container V.
  • FIG. 5B shows a state in which the following situation has been created after the standing wave S appears stably in FIG. That is, The excitation of VI and VO is stopped, and at the same time, the vibrators of VI ′ and VO ′ are vibrated.
  • VI ′ and VO ′ are inflow and outflow side vibrators, respectively, and exist at positions separated from the VI and VO by a distance h in the direction MF of the fluid to be treated.
  • the vibration characteristics of VI ′ and VO ′ are exactly the same as those of VI and VO, respectively. ,
  • the waveform of the standing wave S ′ generated is S (FIG. 5 ( It is congruent with a)) and exists at a position advanced by h in the MF direction from S. That is, when the position of the vibrator is deviated by h, the standing wave is deviated by h in the same direction without changing the waveform.
  • FIG. 6 (a) shows the transition state of the fushi by the arrow ( ⁇ ) by taking out the fistula Ni and the end Fushi Nn from FIG. 5 (c) in order to clarify the transition state of the fushi. . That is, both fushi Ni and fushi Nn have advanced by h in the MF direction. It should be noted that the vibrators VI and VO, standing wave S, fushi Ni and fushi Nn, etc. shown in the figure are in the initial state (the state shown in FIG. 5A).
  • the standing wave S moves by h in the MF direction for each operation, and is chopped through q operations. (Distance h), and after q operations, the initial standing wave appears to be reproduced.
  • the realization means is a group of devices (hardware) for realizing the basic operation (software) of the present invention.
  • the realization means is composed of the following three elements. That is, the device main body, the vibrator system, and the control device.
  • the content of the combination of the vibrator system and the control device is claim 2.
  • FIG. 7 shows the configuration of the apparatus main body.
  • the numbers used include the same numbers used in the previous figures. In the following explanation, the numbers in this section are used. The correspondence is clearly indicated by ⁇ ,>.
  • Reference numeral 1 denotes an outer box of the apparatus having a cylindrical shape, and shows a state in which it is placed horizontally.
  • ⁇ V (container) in FIGS. 1 and 4> 2 is an inlet 3 of the fluid to be treated containing the foreign matter to be removed, 3 is an outlet 4 of the clean fluid from which the contained foreign matter is separated and removed, and 4 is a dedicated discharge pipe for discharging the contained foreign matter.
  • FO exhaust pipe for contained foreign matter
  • FO exhaust pipe for contained foreign matter
  • an imaginary line 6 penetrating the center of both ends of the container 1 of the apparatus indicates the direction of the flow of the fluid to be processed inside the apparatus 1
  • Direction of flow) 7 indicates the direction of the flow of the fluid to be treated at the inlet 2
  • 8 indicates the direction of the flow of the clean fluid at the outlet 3
  • 9 indicates the direction of the flow of the contained foreign matter through the dedicated discharge pipe 4.
  • 10 and 11 are vibration substrates provided with vibrators
  • 10 is a vibration substrate on the inflow side of the fluid to be processed
  • ⁇ VI inflow side vibrator
  • 11 is a vibration substrate on the outflow side of the fluid to be treated ⁇ VO (outflow side vibrator) in FIG. 4>
  • the vibration substrate is constituted by one piece on each of the inflow side and the outflow side.
  • the vibrator system is a plurality of vibrator groups that constitute the vibration substrates 10 and 11.
  • Reference numeral 12 denotes a control device 13 for exciting the vibrators arranged on the vibration substrates 10 and 11 in a predetermined order for a predetermined time.
  • the control device 13 is a lead wire that couples the control device 12 and each vibrator.
  • One lead wire for connecting the vibrator and the control device 12 is required for each vibrator on the entry / exit side, but in the figure, both the entry / exit sides are represented by a single line.
  • FIG. 8 is a photograph of a paper model of the vibration substrate 10.
  • the structure and shape of the sector base piece are stepped. All the treads have the same shape. Moreover, all the height differences of the adjacent footboards in the sector base piece are set to be the same.
  • a plate-like vibrator having the same specification in both vibration characteristics and shape is attached to each tread board.
  • the vibrator is not displayed on the tread of FIG.
  • the expression “tread board” means “tread board with a vibrator attached”.
  • All the vibration surfaces of the vibrator are installed perpendicular to the shaft 5.
  • the direction of vibration generated by the vibrator is on the inflow side, that is, the direction of vibration of the vibrator disposed on the inflow-side vibration substrate 10 is the same as the flow direction 6 of the fluid to be processed.
  • On the inflow side the direction of flow of the fluid to be treated is opposite to the direction 6.
  • the direction of the height of the tread plate is clockwise as viewed from the flow direction 6 of the fluid to be treated so that the staircase rises on the inflow side vibration substrate 10 and the staircase descends on the outflow side vibration substrate 10. Install.
  • the numbering of the vibrators is on the inflow side, that is, for the vibrators in the fan-shaped base piece on the inflow-side vibration substrate 10, the bottom step is set to 1, and the tread plate is sequentially moved up by one step in the clockwise direction. The number is incremented by 1, 2, 3,... On the outflow side, the uppermost stage is set to 1, and the number is incremented by 1, 2, 3,...
  • the symbol [j] is used to specify the vibrator having the number j.
  • the symbol ⁇ i>-[j] is designated to specify the j th transducer on the i th sector base piece.
  • the vibrators having the same number exist on a plane perpendicular to the axis 5.
  • the vibration planes of all the vibrators are perpendicular to the axis 5.
  • the difference in height between adjacent footboards is the same (h). Therefore, each of the p transducers [j] having the same number j exists in one plane perpendicular to the axis 5 on the inflow side and the outflow side.
  • a plane perpendicular to the axis 5 created by the transducer [j] is denoted as “[j]”.
  • a subscript I or O is added to the surface “[j] I”, the surface “ [J] O ”.
  • the contents of the [0051] term are expressed by the symbols introduced so far as follows. For all j The oscillator [j] I exists on the same plane “[j] I”, The vibrator [j] O exists on the same plane “[j] O”.
  • the relative positions of the surface “[j] I” and the surface “[j] O” in each of the vibration substrates 10 and 11 on the inflow side and the outflow side are the same. That is, the plane “[j] I” is offset from the plane “[1] I”, and the plane “[j] O” is offset from the plane “[1] O” by a distance h * (j ⁇ 1). This means that for all j, the distance between the surface “[j] I” and the surface “[j] O” is the same (denoted as D).
  • the positional relationship in the direction along the axis 5 of the surface “[j] O” of “I” is schematically shown.
  • the horizontal direction indicates the direction of the axis 5.
  • the thick line at the center indicates the stepped cross section of the sector base piece ⁇ i>.
  • FIG. 10 illustrates that each transducer system creates the following phenomenon. That is, for all j, the p number of transducers [j] groups existing on the inflow side and the outflow side respectively are planes perpendicular to the axis 5: plane “[j] I” and plane “[j] O”. And the distance between the surface “[j] I” and the surface “[j] O” in the direction of the axis 5 is the same distance (D) for all j.
  • the control contents of the control device will be described.
  • the control content is to stably realize the next event described in the basic operation. That is, It is to generate a standing wave and move it while maintaining the waveform of the standing wave.
  • control content is to faithfully realize the action described in the items [0027] to [0037].
  • FIG. 5A appears. That is, the standing wave S is generated inside the fluid to be processed.
  • VI is read as “[1] I” and “VO” is read as “[1] O”.
  • FIG. 5B appears. That is, when viewed from the outside, it seems as if the standing wave S is deviated (advanced) by h.
  • control can be summarized as follows. That is, The same number is selected and excited for a predetermined time. After excitation for a predetermined time, the excitation of the vibrator is stopped, and at the same time, a vibrator having a larger number is vibrated. Repeat this operation. However, the number returns to 1 after the number q. ,
  • the length L of the apparatus main body in the direction of the axis 5 is determined based on the following concept. That is, It is set so that there are at least about 10 fuzzy integral multiples of the half wave of the standing wave.
  • L nc / 2f L: device length n: positive integer (approximately 10 is a guide)
  • c speed of sound in solvent f: vibration frequency of vibrator
  • the vibration frequency f of the vibrator is determined in consideration of the following factors. The higher the frequency, the stronger the directivity. The higher the frequency, the smaller the device can be. Therefore, the higher the frequency, the better. In addition to availability, requirements for downsizing the equipment, and ease of installation in the installation location, the standard is MHz if the solvent is water and KHz if the solvent is air. For solvents other than water and air, the above concept is applied.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

[Problème] Les problèmes suivants existent dans un procédé utilisé en pratique pour éliminer les substances étrangères dans de l'eau et de l'air de pureté élevée utilisés en environnement industriel et dans la vie quotidienne. Précisément, la norme exigée de substances étrangères incluses est d'autant plus difficile à atteindre que les substances étrangères sont légères et fines. Un processus de nettoyage inverse est nécessaire, ce qui rend les exploitations en continu impossibles. [Solution] Les substances étrangères sont séparées en continu de la solution à traiter en capturant les substances étrangères contenues dans un nœud d'onde stationnaire puis en exécutant de façon répétée une opération qui déplace ce nœud vers un nœud adjacent. Pour obtenir le mouvement continu des nœuds, la présente invention inclut un équipement comprenant un système oscillant formé d'une multitude de groupes oscillants disposés à intervalles fixes décalés les uns des autres d'une quantité égale et un dispositif de contrôle dont la fonction est d'exécuter une commutation séquentielle après sélection d'un oscillateur à faire osciller et de faire osciller l'oscillateur choisi pendant une durée prédéterminée.
PCT/JP2011/067571 2010-08-02 2011-07-25 Dispositif de séparation en continu d'une substance étrangère d'avec une solution WO2012017976A1 (fr)

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JP2010-200309 2010-08-02

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017148747A (ja) * 2016-02-25 2017-08-31 東芝メモリ株式会社 集塵装置および基板処理システム
WO2017216864A1 (fr) * 2016-06-14 2017-12-21 株式会社日立製作所 Dispositif, système et procédé de distribution et de séparation d'un liquide trouble

Citations (8)

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JPS61500278A (ja) * 1983-10-31 1986-02-20 ブリティッシュ・テクノロジー・グループ・リミテッド 液体媒質中の粒状物質の分離方法及び装置
US5036944A (en) * 1986-03-24 1991-08-06 Intersonics Incorporated Method and apparatus for acoustic levitation
JPH11197491A (ja) * 1998-01-13 1999-07-27 Hitachi Ltd 微粒子処理方法および微粒子処理装置
US6065949A (en) * 1998-06-29 2000-05-23 The United States Of America As Represented By The Secretary Of The Navy Bubble manipulating system and method of using same to produce a solid mass with imbedded voids
JP2004024959A (ja) * 2002-06-21 2004-01-29 National Institute Of Advanced Industrial & Technology 超音波を用いた非接触フィルタリング方法及び装置
JP2006297333A (ja) * 2005-04-25 2006-11-02 Matsushita Electric Ind Co Ltd 成分分離デバイスおよびこれを用いた成分の分離方法
JP2007136271A (ja) * 2005-11-15 2007-06-07 Koike Seisakusho:Kk 水油分離装置
JP2007229557A (ja) * 2006-02-28 2007-09-13 Keio Gijuku 浮遊微粒子の連続的分離方法及び装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61500278A (ja) * 1983-10-31 1986-02-20 ブリティッシュ・テクノロジー・グループ・リミテッド 液体媒質中の粒状物質の分離方法及び装置
US5036944A (en) * 1986-03-24 1991-08-06 Intersonics Incorporated Method and apparatus for acoustic levitation
JPH11197491A (ja) * 1998-01-13 1999-07-27 Hitachi Ltd 微粒子処理方法および微粒子処理装置
US6065949A (en) * 1998-06-29 2000-05-23 The United States Of America As Represented By The Secretary Of The Navy Bubble manipulating system and method of using same to produce a solid mass with imbedded voids
JP2004024959A (ja) * 2002-06-21 2004-01-29 National Institute Of Advanced Industrial & Technology 超音波を用いた非接触フィルタリング方法及び装置
JP2006297333A (ja) * 2005-04-25 2006-11-02 Matsushita Electric Ind Co Ltd 成分分離デバイスおよびこれを用いた成分の分離方法
JP2007136271A (ja) * 2005-11-15 2007-06-07 Koike Seisakusho:Kk 水油分離装置
JP2007229557A (ja) * 2006-02-28 2007-09-13 Keio Gijuku 浮遊微粒子の連続的分離方法及び装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017148747A (ja) * 2016-02-25 2017-08-31 東芝メモリ株式会社 集塵装置および基板処理システム
US10290490B2 (en) 2016-02-25 2019-05-14 Toshiba Memory Corporation Dust collecting apparatus, substrate processing system, and method of manufacturing semiconductor device
WO2017216864A1 (fr) * 2016-06-14 2017-12-21 株式会社日立製作所 Dispositif, système et procédé de distribution et de séparation d'un liquide trouble
JPWO2017216864A1 (ja) * 2016-06-14 2018-07-26 株式会社日立製作所 混濁液送液分離装置、システム、及び方法
US10625182B2 (en) 2016-06-14 2020-04-21 Hitachi, Ltd. Suspension flow-through separation apparatus, system and method

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