WO2012007995A1

WO2012007995A1 - Transmission unit, supplementary member used for transmission unit, and test equipment

Info

Publication number: WO2012007995A1
Application number: PCT/JP2010/004583
Authority: WO
Inventors: 伸崎山
Original assignee: 株式会社アドバンテスト
Priority date: 2010-07-14
Filing date: 2010-07-14
Publication date: 2012-01-19
Also published as: KR101230297B1; KR20120073157A; JPWO2012007995A1; TWI429927B; TW201217803A

Abstract

Provided is a transmission unit transmitting an electrical signal and comprising: a signal transmission portion for transmitting an electrical signal; a reference potential portion provided in parallel with the signal transmission portion and provided with a reference potential; and a conductor electrically connected to the reference potential portion at at least two connection points provided apart from each other and extending to the upside of at least part of the region of the signal transmission portion in a second direction perpendicular to a first direction heading from the reference potential portion toward the signal transmission portion. The at least two connection points are formed on the conductor and make contact with the reference potential portion in a separable fashion.

Description

Transmission unit, additional member used in transmission unit and test device

The present invention relates to a transmission unit, an additional member used for the transmission unit, and a test apparatus.

A test apparatus for testing a device under test such as a semiconductor circuit is known. The test apparatus electrically connects a test board on which a test circuit is provided and a device board on which a device under test is placed via a connector (see, for example, Patent Document 1).
Patent Document 1 Japanese Patent Application Laid-Open No. 2008-224591

When the connector terminal length is long, the inductance component of the terminal cannot be ignored. Conventionally, a capacitance component that cancels out the inductance component is provided on a test board or the like, thereby matching the impedance of the transmission system to a predetermined value. However, since the capacitance component is provided on a test board or the like at the end of the transmission system and is not evenly distributed in the transmission system, when the signal transmitted through the transmission system becomes a high frequency, the inductance component and the capacitance component signal are converted. The effect of each appears.

In order to solve the above-described problems, according to an aspect of the present invention, a transmission unit that transmits an electric signal, the signal transmission unit that transmits the electric signal, and the signal transmission unit that is provided in parallel with the reference potential are provided. The reference potential unit is electrically connected to the reference potential unit at at least two connection points provided apart from each other, and at least a part of the signal transmission unit is connected to the signal transmission unit from the reference potential unit. And a conductor extending to the upper side in a second direction perpendicular to the first direction, and at least two connection points are formed in the conductor and provide a transmission unit that is detachably in contact with the reference potential portion To do.

Note that the above summary of the invention does not enumerate all the necessary features of the present invention. In addition, a sub-combination of these feature groups can also be an invention.

2 shows a configuration example of a test apparatus 100. An example of the side view of the transmission unit 50 is shown. An example of a top view of the transmission unit 50 is shown. An example of a cross-sectional view of the transmission unit 50 is shown. An example of the equivalent circuit of the transmission unit 50 is shown. The structural example of the conductor 60 is shown. An example of a cross-sectional view of the housing 80 that holds the conductor 60 in a state of being in contact with the reference potential portion 52 is shown. An example of a top view of the housing 80 is shown. An example of the side view of the partition wall 86 provided in the housing 80 is shown. An example of the perspective view of the housing 80 in which the reference electric potential part 52, the signal transmission part 54, and the conductor 60 were inserted is shown. An example of the side view of the reference | standard side parallel part 64 inserted in the reference | standard side area | region 82 is shown. An example of the side view of the signal side parallel part 68 inserted in the signal side area | region 84 is shown. A top view of another structural example of the conductor 60 is shown. Another structural example of the housing 80 is shown. The side view of the partition 86 in the housing 80 shown in FIG. 9 is shown. An arrangement example of a plurality of transmission units 50 is shown.

Hereinafter, the present invention will be described through embodiments of the invention. However, the following embodiments do not limit the invention according to the claims. In addition, not all the combinations of features described in the embodiments are essential for the solving means of the invention.

FIG. 1 shows a configuration example of the test apparatus 100. The test apparatus 100 is an apparatus for testing a device under test 200 such as a semiconductor circuit, and includes a test head 30, a motherboard 20, and a device board 10. The device board 10 mounts the device under test 200. The motherboard 20 electrically connects the device board 10 and the test head 30. For example, the motherboard 20 includes a terminal 14 that is electrically connected to the terminal 12 provided on the device board 10, and a terminal 16 that is electrically connected to the terminal 18 provided on the test head 30.

The test head 30 is electrically connected to the device under test 200 via the mother board 20 and the device board 10. The test head 30 supplies a test signal having a predetermined logic pattern, power supply power, and the like to the device under test 200. The test head 30 measures a signal output from the device under test 200.

Inside the test head 30 are stored a plurality of test boards 40 provided with a test circuit for generating a test signal or the like, or a test circuit for measuring a signal output from the device under test 200. Each test board 40 has a terminal 42. The terminal 42 is electrically connected to the corresponding terminal 18 of the test head 30 via the transmission unit 50. The transmission unit 50 transmits an electrical signal or power between the terminal 18 and the terminal 42.

FIG. 2A shows an example of a side view of the transmission unit 50. FIG. 2B shows an example of a top view of the transmission unit 50. FIG. 2C shows an example of a cross-sectional view of the transmission unit 50. The transmission unit 50 includes a reference potential unit 52, a signal transmission unit 54, and a conductor 60. The signal transmission unit 54 transmits an electrical signal between the terminal 42 and the terminal 18. The signal transmission unit 54 may be a transmission path in which the vicinity of both ends is electrically connected to the terminal 42 and the terminal 18.

The reference potential section 52 is provided between the terminal 42 and the terminal 18 in parallel with the signal transmission section 54, and is supplied with a reference potential. The reference potential may be a ground potential. A reference potential may be applied to the reference potential unit 52 from the terminal 42 or the terminal 18. The reference potential unit 52 is provided in the vicinity of the signal transmission unit 54. For example, the reference potential unit 52 may be provided at a distance of several mm from the signal transmission unit 54, and more preferably at a distance of 1 mm or less from the signal transmission unit 54. Moreover, the transmission unit 50 may have a connector part that detachably fixes the reference potential part 52 and the signal transmission part 54 to the terminal 18 and the terminal 42, respectively.

The conductor 60 is electrically connected to the reference potential portion 52 at at least two connection points 62 that are provided apart from each other. The conductor 60 of this example is electrically connected to the reference potential portion 52 at two connection points 62 provided near both ends. The conductor 60 extends to the upper side in the second direction perpendicular to the first direction from the reference potential unit 52 toward the signal transmission unit 54 with respect to at least a part of the signal transmission unit 54. As shown in FIG. 2B, the conductor 60 of this example includes a reference side parallel part 64, a signal side parallel part 68, and an extending part 66.

The reference side parallel part 64 is provided on the upper side in the second direction with respect to the reference potential part 52. The reference-side parallel part 64 is provided between the terminal 42 and the terminal 18 in parallel with the reference potential part 52. Further, the reference side parallel part 64 is electrically connected to the reference potential part 52 by two connection points 62 provided at both ends.

The two connection points 62 are formed integrally with the reference side parallel part 64 in the conductor 60. Each connection point 62 may contact the reference potential portion 52 in a separable manner. The transmission unit 50 may further include a housing that holds the conductor 60 in contact with the reference potential portion 52 via the connection point 62.

The signal side parallel part 68 is provided on the upper side in the second direction with respect to at least a part of the signal transmission part 54. The signal side parallel part 68 is provided between the terminal 42 and the terminal 18 in parallel with the at least part of the reference side parallel part 64 and the signal transmission part 54. The length of the signal side parallel part 68 may be the same as the length of the reference side parallel part 64.

The extending portion 66 is provided so as to extend from the reference side parallel portion 64 to the signal side parallel portion 68 in a partial region between the reference side parallel portion 64 and the signal side parallel portion 68. The side parallel part 68 is electrically connected. The extending portion 66 of this example is provided by extending so as to join one end of the reference side parallel portion 64 and one end of the signal side parallel portion 68. In addition, the area | region where the extending | stretching part 66 is provided is not limited to the said area | region. The extending portion 66 may be provided so as to extend both ends of the reference side parallel portion 64 and both ends of the signal side parallel portion 68. Further, the reference side parallel part 64, the signal side parallel part 68, and the extending part 66 may be formed in a single plate shape.

2B and 2C, the signal side parallel part 68 may be formed so as to cover the signal transmission part 54 in the second direction over a predetermined section of the signal transmission part 54. The section may occupy more than half of the section between the terminal 42 and the terminal 18. As shown in FIG. 2C, the distance between the signal side parallel part 68 and the signal transmission part 54 in the second direction may be smaller than the distance between the reference potential part 52 and the signal transmission part 54 in the first direction.

With the configuration as described above, a predetermined capacity component can be distributed to the signal transmission unit 54 over a predetermined section of the signal transmission unit 54. For this reason, even when the inductance component of the signal transmission unit 54 is relatively large, the impedance of the signal transmission unit 54 can be matched to a high-frequency signal.

FIG. 3 shows an example of an equivalent circuit of the transmission unit 50. The signal transmission unit 54 and the reference potential unit 52 have an inductance component 70 corresponding to the length thereof. On the other hand, by providing the conductor 60, the predetermined capacitance component 72 can be distributed over a predetermined section. For this reason, the inductance component 70 can be canceled by the capacitance component 72 even when a high-frequency signal is transmitted. The inductance component 74 indicates the inductance component of the conductor 60.

FIG. 4 shows a structural example of the conductor 60. In this example, both ends of the reference side parallel part 64 are formed to bend in the direction toward the reference potential part 52. Accordingly, both ends of the reference side parallel part 64 have elasticity in a direction toward the reference potential part 52. The curved portions at both ends of the reference side parallel part 64 function as the connection point 62 by being pressed in the direction toward the reference potential part 52.

The signal side parallel part 68 may have a substantially flat plate shape. When the signal transmission unit 54 and the reference potential unit 52 are curved, the signal side parallel unit 68 and the reference side parallel unit 68 may be curved along the signal transmission unit 54 and the reference potential unit 52.

Note that the shape of both ends of the reference potential portion 52 is not limited to the shape shown in FIG. In the example shown in FIG. 4, both ends of the reference potential portion 52 are folded back in the direction opposite to the extending direction of the reference potential portion 52. In other examples, both ends of the reference potential portion 52 are connected to the reference potential portion 52. It may be curved in the direction toward the reference potential section 52 without being folded back in the direction opposite to the extending direction. More specifically, the reference potential unit 52 may have a region in which the distance from the reference potential unit 52 becomes closer as approaching both ends.

FIG. 5A shows an example of a cross-sectional view of the housing 80 that holds the conductor 60 in contact with the reference potential portion 52. FIG. 5B shows an example of a top view of the housing 80. FIG. 5C shows an example of a side view of the partition wall 86 provided in the housing 80.

The housing 80 is fixed to the reference potential section 52 and the signal transmission section 54, and the conductor 60 is inserted to press and contact each connection point 62 to the reference potential section 52. The housing 80 has an insertion hole through which the reference potential portion 52 and the signal transmission portion 54 penetrate along the bottom surface, and the reference side parallel portion 64 and the signal side parallel portion 68 are inserted along the top surface. The insertion hole is separated into a reference side region 82 and a signal side region 84 by a partition wall 86.

In the reference side region 82, the reference potential portion 52 penetrates along the bottom surface, and the reference side parallel portion 64 is inserted along the top surface. In the signal side region 84, the signal transmission unit 54 penetrates along the bottom surface, and the signal side parallel portion 68 is inserted along the top surface.

The partition wall 86 is formed from the bottom surface to the top surface of the insertion hole substantially at the center of the insertion hole over the entire length of the housing 80. However, the partition wall 86 is not formed in the region where the extending portion 66 is inserted. That is, the partition wall 86 has a cutout portion 88 having substantially the same shape as the extending portion 66 in a region where the extending portion 66 is inserted. Accordingly, the partition wall 86 at one end of the insertion hole is formed with a gap with respect to the upper surface of the insertion hole.

FIG. 6 shows an example of a perspective view of the housing 80 in which the reference potential section 52, the signal transmission section 54, and the conductor 60 are inserted. As described above, the reference potential portion 52 penetrates the housing 80 along the bottom surface of the reference side region 82. The signal transmission unit 54 penetrates the housing 80 along the bottom surface of the signal side region 84.

The reference side parallel part 64 and the signal side parallel part 68 are inserted along the upper surfaces of the reference side region 82 and the signal side region 84. Further, the extending portion 66 is inserted into the notch 88 shown in FIG. 5C. The conductor 60 is inserted into the housing 80 from the side where the notch 88 is formed, starting from the end on the side where the extending portion 66 is not formed. With such a configuration, the reference side parallel part 64 and the signal side parallel part 68 connected by the extending part 66 can be inserted into the reference side region 82 and the signal side region 84.

FIG. 7A shows an example of a side view of the reference side parallel part 64 inserted into the reference side region 82. Except for the vicinity of both ends of the reference side parallel part 64, the reference side parallel part 64 is arranged along the upper surface of the reference side region 82. Further, the connection points 62 near both ends of the reference side parallel part 64 are pressed in the direction of the reference potential part 52 when the reference side parallel part 64 is inserted into the reference side region 82. For example, the height of the curvature at both ends of the reference side parallel part 64 is slightly larger than the height from the upper surface of the reference potential part 52 to the upper surface of the reference side region 82. Since the curved regions at both ends of the reference side parallel part 64 have elasticity in the height direction, the curved region is compressed in the height direction by inserting the reference side parallel part 64 into the reference side region 82, and the reference potential It is pressed in the direction of the part 52.

FIG. 7B shows an example of a side view of the signal side parallel part 68 inserted into the signal side region 84. The signal side parallel part 68 is disposed along the upper surface of the signal side parallel part 68. The signal side region 84 may be provided with a holding unit that holds the signal side parallel part 68 at a predetermined distance from the signal transmission unit 54. The holding portion may be a groove formed on the side surface of the signal side region 84. The signal transmission unit 54 is fixed by engaging the signal transmission unit 54 with the groove.

FIG. 8 shows a top view of another structure example of the conductor 60. In the conductor 60 of the present example, the extending portion 66 is provided so as to extend both ends of the reference side parallel portion 64 and both ends of the signal side parallel portion 68. In the region other than both ends of the reference side parallel portion 64 and the signal side parallel portion 68, the extending portion 66 may not be formed.

With such a configuration, the strength of the conductor 60 can be improved. Further, it is possible to prevent the signal side parallel portion 68 from becoming a stub shape and to reduce noise due to signal reflection or the like. However, when the extending portions 66 are provided at both ends of the conductor 60 as in this example, the conductor 60 cannot be inserted into the housing 80 shown in FIGS. 5A to 5C.

FIG. 9 shows another structural example of the housing 80. The housing 80 of this example holds the conductor 60 shown in FIG. The housing 80 of this example has a top member 90 and a bottom member 92.

In the upper surface member 90, the upper surfaces of the reference side region 82 and the signal side region 84 are formed. The bottom surface member 92 is formed with the bottom surface and side surfaces of the reference side region 82 and the signal side region 84. By combining the top member 90 and the bottom member 92, a closed space for the reference side region 82 and the signal side region 84 is formed. The top member 90 and the bottom member 92 are detachably provided.

FIG. 10 shows a side view of the partition wall 86 in the housing 80 shown in FIG. At both ends of the partition wall 86 in this example, cutout portions 88 having substantially the same shape as the extending portions 66 at both ends of the conductor 60 shown in FIG. 8 are formed. The partition wall 86 may be formed integrally with the bottom surface member 92.

First, the reference side parallel part 64 and the signal side parallel part 68 are arranged on the bottom surface member 92. Then, the conductor 60 is disposed on the bottom surface member 92 such that the extending portions 66 at both ends engage with the cutout portions 88. Then, the top member 90 is fitted to the bottom member 92. As a result, the connection point 62 of the reference side parallel part 64 is pressed against the reference potential part 52 by the upper surface member 90. With such a configuration, the conductor 60 shown in FIG. 8 can be stored in the housing 80.

FIG. 11 shows an arrangement example of a plurality of transmission units 50. As shown in FIG. 11, the signal side parallel part 68 of each transmission unit 50 is arranged between the signal transmission part 54 of its own transmission unit 50 and the signal transmission part 54 of any other transmission unit 50. May be. With this arrangement, the signal transmission unit 54 can be surrounded by the conductor 60 having the reference potential.

The conductor 60 and the housing 80 described with reference to FIGS. 1 to 11 may be additional members used in the transmission unit 50 including the signal transmission unit 54 and the reference potential unit 52. For example, the conductor 60 and the housing 80 are additional members used to improve the performance of the transmission unit 50 in the test apparatus 100 that is already in operation. Since at least two connection points 62 are detachably in contact with the reference potential unit 52, the conductor 60 and the housing 80 can be easily added to the transmission unit 50 that is already in operation. Therefore, it is possible to improve the performance of the transmission unit 50 at a lower cost than designing and manufacturing the transmission unit 50 anew.

Further, since the connection points 62 are provided apart from each other, the connection points 62 can be easily given elasticity. For this reason, even if the connection point 62 is detachably provided to the reference potential portion 52, it is possible to prevent the reliability of the electrical connection between the reference potential portion 52 and the reference side parallel portion 64 from being lowered.

Further, the number of connection points 62 in the conductor 60 is not limited to two. More connection points 62 may be provided. However, it is preferable that the connection points 62 are provided at least at both ends of the reference side parallel portion 64. The plurality of connection points 62 may be provided at substantially equal intervals.

As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

The execution order of each process such as operations, procedures, steps, and stages in the apparatus, system, program, and method shown in the claims, the description, and the drawings is particularly “before” or “prior”. It should be noted that they can be implemented in any order unless the output of the previous process is used in the subsequent process. Regarding the operation flow in the claims, the description, and the drawings, even if it is described using “first”, “next”, etc. for the sake of convenience, it means that it is essential to carry out in this order. is not.

DESCRIPTION OF SYMBOLS 10 ... Device board, 12, 14, 16, 18, 42 ... Terminal, 20 ... Motherboard, 30 ... Test head, 40 ... Test board, 50 ... Transmission unit, 52. ..Reference potential section, 54... Signal transmission section, 60... Conductor, 62 .. connection point, 64 .. reference side parallel section, 66. Parallel part, 70 ... inductance component, 72 ... capacitance component, 74 ... inductance component, 80 ... housing, 82 ... reference side region, 84 ... signal side region, 86 ... Bulkhead, 88 ... Notch, 90 ... Top member, 92 ... Bottom member, 100 ... Test device, 200 ... Device under test

Claims

A transmission unit for transmitting electrical signals,
A signal transmission unit for transmitting the electrical signal;
A reference potential unit provided in parallel with the signal transmission unit to which a reference potential is applied;
The reference potential unit is electrically connected to at least two connection points provided at a distance from each other, and at least a part of the signal transmission unit is directed from the reference potential unit to the signal transmission unit. A transmission unit comprising: a conductor extending to an upper side in a second direction perpendicular to the first direction.
The transmission unit according to claim 1, wherein the at least two connection points are formed on the conductor and are detachably contacted with the reference potential portion.
The conductor is
A reference side that is provided above the reference potential portion in the second direction in parallel with the reference potential portion and is electrically connected to the reference potential portion at the two connection points provided at both ends. Parallel parts;
A signal side parallel part provided in parallel with the reference side parallel part and the at least part of the signal transmission part above the at least part of the signal transmission part in the second direction;
In a part of the region between the reference side parallel part and the signal side parallel part, the reference side parallel part and the signal side parallel part are provided to extend from the reference side parallel part to the signal side parallel part. The transmission unit according to claim 2, further comprising: an extending portion that is electrically connected.
4. The transmission unit according to claim 3, wherein both ends of the reference side parallel portion are curved in a direction toward the reference potential portion and are pressed in a direction toward the reference potential portion to function as the connection points.
5. The transmission unit according to claim 4, wherein the extending portion connects one end of the reference side parallel portion and one end of the signal side parallel portion.
The transmission according to claim 5, further comprising a housing fixed to the reference potential unit and the signal transmission unit, and having the conductor inserted to press and contact the connection point to the reference potential unit. unit.
The housing is formed with an insertion hole through which the reference potential portion and the signal transmission portion penetrate along the bottom surface, and the reference side parallel portion and the signal side parallel portion are inserted along the top surface,
In the insertion hole, a partition wall that separates a reference side region into which the reference potential portion and the reference side parallel portion are inserted and a signal side region into which the signal transmission portion and the signal side parallel portion are inserted is the bottom surface. The transmission unit according to claim 6, wherein the partition is not formed in a region formed from the top to the top surface and into which the extending portion is inserted.
The partition at one end of the insertion hole is formed with a gap with respect to the upper surface,
The transmission unit according to claim 7, wherein the extending portion is inserted into the gap.
The transmission unit according to claim 7, wherein the housing is formed such that a top surface member including the top surface and a bottom surface member including the bottom surface are detachable.
An additional member used in a transmission unit including a signal transmission unit that transmits an electrical signal, and a reference potential unit that is provided in parallel with the signal transmission unit and to which a reference potential is applied,
The reference potential unit is electrically connected to at least two connection points provided at a distance from each other, and at least a part of the signal transmission unit is directed from the reference potential unit to the signal transmission unit. A conductor extending upward in a second direction perpendicular to the first direction;
An additional member comprising: a housing fixed to the reference potential section and the signal transmission section and having the conductor inserted to press and contact the connection point to the reference potential section.
A test apparatus for testing a device under test,
A test board provided with a test circuit for testing the device under test;
A device board on which the device under test is placed;
A test apparatus comprising: the transmission unit according to claim 1, which transmits an electrical signal between the test board and the device board.