TWI429927B - A transfer unit, an additional member for the transport unit, and a test device - Google Patents

Description

Additional unit and test device for transfer unit and transfer unit

The present invention relates to an additional member and a test device for a transport unit and a transport unit.

A test apparatus for testing a test element such as a semiconductor circuit is known. The test apparatus electrically connects the test board provided with the test circuit and the element board on which the test element is mounted via a connector. (For example, refer to Patent Document 1)

Patent Document 1: Japanese Patent Laid-Open Publication No. 2008-224591

In the case where the length of the terminal of the connector is long, the inductance component of the terminal becomes non-negligible. In the past, a capacitance component was placed on a test board or the like for offsetting the inductance component, thereby matching the impedance of the transmission system to a predetermined value. However, the capacitance component is a test board or the like disposed at the end of the transmission system, and is not evenly distributed in the transmission system. Therefore, if the signal transmitted in the transmission system becomes a high frequency, the inductance component and the capacitance component are respectively. The signal has an effect.

In order to solve the above problems, in an aspect of the present invention, a transmission unit is provided, which is a transmission unit for transmitting an electrical signal, comprising: a signal transmission unit that transmits an electrical signal; and a reference potential portion that is set to Parallel to the signal transmission portion and given a reference potential; and a conductor that is electrically connected to the reference potential portion by at least two connection points that are provided separately from each other, and extends to at least a portion of the signal transmission portion to In the upper side of the second direction, the second direction is perpendicular to the first direction, wherein the first direction is a direction in which the reference potential portion faces the signal transmission portion; wherein at least two connection points are formed on the conductor, and The reference potential portion is in contact with each other in a separable manner.

Further, the above summary of the invention is not intended to enumerate all the essential features of the invention, and a sub-combination of these features can also be used as an invention.

Hereinafter, the present invention will be described by way of embodiments of the invention, but the following embodiments are not intended to limit the scope of the invention, and not all combinations of features described in the embodiments are the means of the invention.

FIG. 1 is a view showing an example of the configuration of the test apparatus 100. The test apparatus 100 is a device for testing a device under test 200 such as a semiconductor circuit, and includes a test head 30, a mother board 20, and an element board 10. The element board 10 is for placing the object under test 200. The motherboard 20 is used to electrically connect the component board 10 and the test head 30. For example, the motherboard 20 has a terminal 14 to be electrically connected to the terminal 12 that has been disposed on the component board 10, and a terminal 16 that is electrically connected to the terminal 18 that has been disposed on the test head 30. .

The test head 30 is electrically connected to the device under test 200 via the mother board 20 and the element board 10. The test head 30 supplies a test signal of a predetermined logic pattern, power supply power, and the like to the device under test 200. Further, the test head 30 measures the signal output from the test element 200.

Inside the test head 30, a plurality of test boards 40 are housed, and the test boards 40 are provided with a test circuit for generating a test signal or the like, or a test circuit for measuring a signal output from the test element 200. Each test board 40 has a terminal 42. The terminal 42 is electrically connected to the corresponding terminal 18 of the test head 30 via the transfer unit 50. The transfer unit 50 transmits an electrical signal or power between the terminal 18 and the terminal 42.

FIG. 2A is an example of a side view showing the transfer unit 50. FIG. 2B is an example of a plan view showing the transfer unit 50. FIG. 2C is an example of a cross-sectional view showing the transfer unit 50. The transmission unit 50 includes a reference potential unit 52, a signal transmission unit 54, and a conductor 60. The signal transmission unit 54 transmits an electrical signal between the terminal 42 and the terminal 18. The signal transmission unit 54 may be a transmission path, and is electrically connected to the terminal 42 and the terminal 18 in the vicinity of both ends.

The reference potential portion 52 is set in parallel with the signal transmission portion 54 between the terminal 42 and the terminal 18, and is given a reference potential. The reference potential can also be the ground potential. The reference potential portion 52 can also be given a reference potential from the terminal 42 or the terminal 18. Further, the reference potential portion 52 is provided in the vicinity of the signal transmission portion 54. For example, the reference potential portion 52 can also be disposed at a distance of several mm from the signal transmission portion 54. Preferably, it is disposed at a distance of 1 mm or less from the signal transmission portion 54. Further, the transfer unit 50 may have a connection portion that fixes the reference potential portion 52 and the signal transmission portion 54 so as to be detachably attachable to the respective terminals 18 and 42.

The conductor 60 is electrically connected to the reference potential portion 52 by at least two connection points 62 which are provided separately from each other. The conductor 60 of this example is electrically connected to the reference potential portion 52 by two connection points 62 provided near both ends thereof. The conductor 60 extends to at least an upper portion of the second direction with respect to at least a portion of the signal transmission portion 54 that is perpendicular to the first direction, and the first direction is directed by the reference potential portion 52 toward the signal transmission portion 54. direction. As shown in FIG. 2B, the conductor 60 has a reference side parallel portion 64, a signal side parallel portion 68, and an extension portion 66.

The reference side parallel portion 64 is provided on the upper side in the second direction with respect to the reference potential portion 52. Further, the reference side parallel portion 64 is provided in parallel with the reference potential portion 52 between the terminal 42 and the terminal 18. Further, the reference side parallel portion 64 is electrically connected to the reference potential portion 52 by two connection points 62 provided at both ends thereof.

The two connection points 62 are integrally formed with the reference side parallel portion 64 in the conductor 60. Each of the connection points 62 may be in contact with the reference potential portion 52 so as to be separable. The transfer unit 50 can also be further provided with a housing that holds the conductor 60 in a state in which the conductor 60 contacts the reference potential portion 52 via the connection point 62.

The signal side parallel portion 68 is provided on the upper side in the second direction with respect to at least a part of the signal transmitting portion 54. Further, the signal side parallel portion 68 is provided between the terminal 42 and the terminal 18 so as to be parallel to the reference side parallel portion 64 and the at least a portion of the signal transmission portion 54. The length of the signal side parallel portion 68 can also be the same as the length of the reference side parallel portion 64.

The extension portion 66, in a partial region between the reference side parallel portion 64 and the signal side parallel portion 68, is provided to extend from the reference side parallel portion 64 to the signal side parallel portion 68 such that the reference side parallel portion 64 and the signal side The parallel portions 68 are electrically connected. The extension portion 66 of this example is provided so as to extend one end of the reference side parallel portion 64 and one end of the signal side parallel portion 68. In addition, the area where the extending portion 66 is provided is not limited to this area. The extending portion 66 may be provided so as to extend both ends of the reference side parallel portion 64 and both ends of the signal side parallel portion 68. Further, the reference side parallel portion 64, the signal side parallel portion 68, and the extending portion 66 can also form a single plate.

As shown in FIGS. 2B and 2C, the signal side parallel portion 68 can be formed so as to cover the signal transmission portion 54 in a predetermined interval across the signal transmission portion 54. This section can also occupy more than half of the section between the terminal 42 and the terminal 18. Further, as shown in FIG. 2C, the distance between the signal side parallel portion 68 and the signal transmission portion 54 in the second direction can be made smaller than the distance between the reference potential portion 52 and the signal transmission portion 54 in the first direction.

With the above configuration, a predetermined capacitance component can be distributed across a predetermined section of the signal transmission unit 54 with respect to the signal transmission unit 54. Therefore, even when the inductance component of the signal transmission portion 54 is relatively large, the impedance of the signal transmission portion 54 can be matched with respect to the signal of the high frequency.

FIG. 3 shows an example of an equivalent circuit of the transfer unit 50. The signal transfer portion 54 and the reference potential portion 52 have an inductance component 70 corresponding to the length thereof. On the other hand, by providing the conductor 60, the predetermined capacitance component 72 can be distributed across a predetermined section. Therefore, even in the case of transmitting a high frequency signal, the capacitance component 72 can be utilized to offset the inductance component 70. In addition, the inductance component 74 represents the inductance component of the conductor 60.

Fig. 4 is a view showing an example of the structure of the conductor 60. In this example, both ends of the reference side parallel portion 64 are formed to be curved in the direction of the reference potential portion 52. Thereby, both ends of the reference side parallel portion 64 have elasticity toward the direction of the reference potential portion 52. The curved portion at both ends of the reference-side parallel portion 64 is pressed in the direction toward the reference potential portion 52, thereby functioning as the connection point 62.

The signal side parallel portion 68 can also have a shape almost flat. Further, when the signal transmission portion 54 and the reference potential portion 52 are curved, the signal side parallel portion 68 and the reference side parallel portion 64 can be bent along the signal transmission portion 54 and the reference potential portion 52.

Further, the shape of both ends of the reference side parallel portion 64 is not limited to the shape shown in Fig. 4 . In the example shown in FIG. 4, both ends of the reference side parallel portion 64 are folded back in the opposite direction to the direction in which the reference potential portion 52 extends. However, in other examples, the shapes of both ends of the reference side parallel portion 64 are It is also possible to bend back in the direction opposite to the direction in which the reference potential portion 52 is folded without being folded back in the direction opposite to the extending direction of the reference potential portion 52. More specifically, the reference side parallel portion 64 may have a region closer to the reference potential portion 52 as it approaches both ends thereof.

5A is an example of a cross-sectional view showing the outer casing 80 that holds the conductor 60 in a state in which the conductor 60 is brought into contact with the reference potential portion 52. FIG. 5B is an example of a plan view showing the outer casing 80. FIG. 5C is an example of a side view showing the partition wall 86 provided in the outer casing 80.

The outer casing 80 is fixed to the reference potential portion 52 and the signal transmission portion 54, and each of the connection points 62 is pressed and brought into contact with the reference potential portion 52 by the insertion of the conductor 60. An insertion hole is formed in the outer casing 80, and the reference potential portion 52 and the signal transmission portion 54 penetrate the insertion hole along the bottom surface of the insertion hole, and the reference side parallel portion 64 and the signal side parallel portion 68 are along the top surface of the insertion hole. insert. The insertion hole is separated into the reference side region 82 and the signal side region 84 by the partition wall 86.

In the reference side region 82, the reference potential portion 52 penetrates along the bottom surface, and the reference-side parallel portion 64 is inserted along the top surface. Further, in the signal side region 84, the signal transmitting portion 54 penetrates along the bottom surface, and is inserted along the top surface by the signal side parallel portion 68.

The partition wall 86, which spans the entire length of the outer casing 80, is formed at approximately the center of the insertion hole from the bottom surface of the insertion hole to the top surface. However, the partition wall 86 is not formed in the region to be inserted into the extension portion 66. That is, the partition wall 86 has a notch portion 88 having the same shape as the extension portion 66 in the region to be inserted into the extension portion 66. Thereby, the partition wall 86 is formed with a gap in one end of the insertion hole with respect to the top surface of the insertion hole.

Fig. 6 is a view showing an example of a perspective view of the outer casing 80 in which the reference potential portion 52, the signal transmission portion 54, and the conductor 60 are inserted. As described above, the reference potential portion 52 penetrates the outer casing 80 along the bottom surface of the reference side region 82. Further, the signal transmission unit 54 penetrates the casing 80 along the bottom surface of the signal side region 84.

The reference side parallel portion 64 and the signal side parallel portion 68 are inserted along the top surfaces of the reference side region 82 and the signal side region 84. Further, the extending portion 66 is inserted into the notch portion 88 as shown in Fig. 5C. Further, the conductor 60 is inserted into the outer casing 80 from the side on which the side of the extending portion 66 is not formed, as the front end, and the side on which the notch portion 88 is formed. With this configuration, the reference side parallel portion 64 and the signal side parallel portion 68 which are connected by the extending portion 66 can be inserted into the reference side region 82 and the signal side region 84.

FIG. 7A is an example of a side view showing the reference-side parallel portion 64 inserted into the reference side region 82. The vicinity of both ends of the reference side parallel portion 64 is disposed along the top surface of the reference side region 82. Further, the connection point 62 near the both ends of the reference side parallel portion 64 is inserted into the reference side region 82 by the reference side parallel portion 64, and is pressed in the direction of the reference potential portion 52. For example, the bending height at both ends of the reference side parallel portion 64 is slightly larger than the height from the top surface of the reference potential portion 52 to the top surface of the reference side region 82. The curved region in both ends of the reference side parallel portion 64 is elastic in the height direction, so that the reference side parallel portion 64 can be inserted into the reference side region 82 to compress the curved region in the height direction. The direction toward the reference potential portion 52 is pressed.

Fig. 7B is a view showing an example of a side view of the signal side parallel portion 68 inserted into the signal side region 84. The signal side parallel portion 68 is disposed along the top surface of the signal side region 84. In the signal side region 84, a holding portion that holds the signal side parallel portion 68 at a predetermined distance from the signal transmission portion 54 can also be provided. The holding portion may be a groove formed on the side surface of the signal side region 84. The signal transmission unit 54 is engaged to the groove, whereby the signal transmission unit 54 is fixed.

Fig. 8 is a plan view showing another structural example of the conductor 60. The conductor 60 of this example has an extending portion 66 extending in order to join both ends of the reference side parallel portion 64 and both ends of the signal side parallel portion 68. The region other than the both ends of the reference side parallel portion 64 and the signal side parallel portion 68 may be formed without forming the extending portion 66.

With this configuration, the strength of the conductor 60 can be improved. Further, it is possible to prevent the signal side parallel portion 68 from becoming a stub shape, and it is possible to reduce noise caused by reflection of signals or the like. However, as in the case of the present embodiment, when the extending portions 66 are provided at both ends of the conductor 60, the conductor 60 cannot be inserted into the casing 80 as shown in Figs. 5A to 5C.

Fig. 9 is a view showing another configuration example of the outer casing 80. The outer casing 80 of this example is for holding the conductor 60 as shown in FIG. The outer casing 80 of this example has a top surface member 90 and a bottom surface member 92.

The top member 90 is configured to form a top surface of the reference side region 82 and the signal side region 84. Further, the bottom member 92 is for forming the bottom surface and the side surface of the reference side region 82 and the signal side region 84. The closed space of the reference side region 82 and the signal side region 84 is formed by a combination of the top member 90 and the bottom member 92. The top member 90 and the bottom member 92 are provided to be freely attached and detached.

Fig. 10 is a side view showing the partition wall 86 in the outer casing 80 shown in Fig. 9. At both ends of the partition wall 86 of this example, the notch portion 88 having the same shape as the extending portion 66 of both ends of the conductor 60 shown in Fig. 8 is formed. The partition wall 86 can also be integrally formed with the bottom member 92.

First, the reference side parallel portion 64 and the signal side parallel portion 68 are to be disposed on the bottom surface member 92. Further, the conductor 60 is disposed on the bottom member 92 such that the extending portions 66 at both ends thereof are in contact with the notch portion 88. Then, the top member 90 is fitted to the bottom member 92. Thereby, the connection point 62 of the reference side parallel portion 64 is pressed to the reference potential portion 52 by the top surface member 90. With this configuration, the conductor 60 as shown in Fig. 8 can be housed in the casing 80.

Fig. 11 is a diagram showing an example of the arrangement of a plurality of transfer units 50. As shown in Fig. 11, the signal side parallel portion 68 of each of the transfer units 50 can also be disposed between the signal transfer portion 54 of the own transfer unit 50 and the signal transfer portion 54 of any other transfer unit 50. With this arrangement, the periphery of the signal transmission portion 54 can be surrounded by the conductor 60 of the reference potential.

Further, the conductor 60 and the casing 80 described with reference to FIGS. 1 to 11 may be additional members used in the transmission unit 50 including the signal transmission portion 54 and the reference potential portion 52. For example, the conductor 60 and the outer casing 80 are additional components for enhancing the performance of the transfer unit 50 in the test apparatus 100 that has actually been operated. Since at least two connection points 62 can be attached to the reference potential portion 52 so as to be detachable, the conductor 60 and the outer casing 80 can be easily added to the already-operated transfer unit 50. Therefore, the transfer unit 50 can be improved in performance more inexpensively than the design and manufacture of the new transfer unit 50.

Also, since the connection points 62 are separately provided, the connection points 62 can easily maintain elasticity. Therefore, even if the connection point 62 is designed to be detachably attached to the reference potential portion 52, the reliability of electrical contact between the reference potential portion 52 and the reference side parallel portion 64 can be prevented from being lowered.

Also, the number of connection points 62 on the conductor 60 is not limited to two. More points can be set by connecting the points 62. However, it is preferable to provide the connection point 62 at least at both ends of the reference side parallel portion 64. It is also possible to arrange a plurality of connection points 62 to be spaced apart by approximately equal intervals.

The present invention has been described above using the embodiments, but the technical scope of the present invention is not limited to the scope described in the above embodiments. It is understood that various changes or improvements can be applied to the above embodiments. It is understood from the description of the scope of the patent application that the form in which such changes or improvements are applied can also be included in the technical scope of the present invention.

The order of execution of the processes, procedures, steps, and stages in the devices, systems, programs, and methods shown in the claims, the description, and the drawings is not specifically stated as "before" or "before" Etc., or if the previously processed output is not used for later processing, it should be noted that it can be implemented in any order. The operation flow in the patent application scope, the specification, and the drawings is described using "first", "continued", etc., in convenience, but it does not mean that it must be implemented in this order.

10. . . Component board

12. . . Terminal

14. . . Terminal

16. . . Terminal

18. . . Terminal

20. . . motherboard

30. . . Test head

40. . . Test board

42. . . Terminal

50. . . Transfer unit

52. . . Reference potential section

54. . . Signal transmission department

60. . . Conductor

62. . . Junction

64. . . Reference side parallel

66. . . Extension

68. . . Signal side parallel

70. . . Inductance component

72. . . Capacitance component

74. . . Inductance component

80. . . shell

82. . . Reference side area

84. . . Signal side area

86. . . Partition wall

88. . . Notch

90. . . Top member

92. . . Bottom member

100. . . Test device

200. . . Tested component

FIG. 1 is a view showing an example of the configuration of the test apparatus 100.

FIG. 2A is an example of a side view showing the transfer unit 50.

FIG. 2B is an example of a plan view showing the transfer unit 50.

FIG. 2C is an example of a cross-sectional view showing the transfer unit 50.

FIG. 3 shows an example of an equivalent circuit of the transfer unit 50.

Fig. 4 is a view showing an example of the structure of the conductor 60.

5A is an example of a cross-sectional view showing the outer casing 80 that holds the conductor 60 in a state in which the conductor 60 is brought into contact with the reference potential portion 52.

FIG. 5B is an example of a plan view showing the outer casing 80.

FIG. 5C is an example of a side view showing the partition wall 86 provided in the outer casing 80.

Fig. 6 is a view showing an example of a perspective view of the outer casing 80 in which the reference potential portion 52, the signal transmission portion 54, and the conductor 60 are inserted.

FIG. 7A is an example of a side view showing the reference-side parallel portion 64 inserted into the reference side region 82.

Fig. 7B is a view showing an example of a side view of the signal side parallel portion 68 inserted into the signal side region 84.

Fig. 8 is a plan view showing another structural example of the conductor 60.

Fig. 9 is a view showing another configuration example of the outer casing 80.

Fig. 10 is a side view showing the partition wall 86 in the outer casing 80 shown in Fig. 9.

Fig. 11 is a diagram showing an example of the arrangement of a plurality of transfer units 50.

18. . . Terminal

40. . . Test board

42. . . Terminal

50. . . Transfer unit

52. . . Reference potential section

60. . . Conductor

62. . . Junction

Claims (16)

A transmission unit is a transmission unit for transmitting an electrical signal, comprising: a signal transmission unit that transmits the electrical signal; and a reference potential portion that is disposed in parallel with the signal transmission portion and is given a reference potential; And a conductor that is electrically connected to the reference potential portion by at least two connection points that are provided separately from each other, and that extends to at least a portion of the second direction with respect to at least a portion of the signal transmission portion, the second The direction is perpendicular to the first direction, and the first direction is a direction in which the reference potential portion faces the signal transmission portion, and the capacitance component is distributed so as to straddle a predetermined interval of the signal transmission portion. The transfer unit according to claim 1, wherein the at least two connection points are formed on the conductor and are in contact with the reference potential portion in a detachable manner. The transfer unit according to claim 2, wherein the conductor has a reference side parallel portion which is provided on the upper side of the second direction with respect to the reference potential portion, and is parallel to the reference potential portion, and is utilized Two aforementioned connection points provided at both ends thereof are electrically connected to the reference potential portion; the signal side parallel portion is opposite to at least one of the signal transmission portions a sub-region disposed on an upper side of the second direction and parallel to the reference-side parallel portion and the at least a portion of the signal transmission portion; and an extension portion in the reference-side parallel portion and the signal-side parallel portion A part of the intermediate portion is provided to extend from the reference side parallel portion to the signal side parallel portion such that the reference side parallel portion and the signal side parallel portion are electrically connected. The transmission unit according to claim 3, wherein both ends of the reference side parallel portion are formed to be curved toward the reference potential portion, and are pressed toward the reference potential portion, thereby serving as the connection point. Play the function. The transmission unit according to claim 4, wherein the extension portion is configured to connect one end of the reference side parallel portion and one end of the signal side parallel portion. The transmission unit according to claim 5, further comprising: a casing to be fixed to the reference potential portion and the signal transmission portion, and the connection point is pressed and contacted by the insertion of the conductor Reference potential section. The transfer unit according to claim 6, wherein: the outer casing is formed with an insertion hole, the reference potential portion and the aforementioned letter The number transmitting portion penetrates the insertion hole along a bottom surface of the insertion hole, and the reference side parallel portion and the signal side parallel portion are inserted along a top surface of the insertion hole; in the insertion hole, the bottom surface spans to the foregoing The top surface is formed with a partition wall for separating the reference side region and the signal side region to be inserted by the reference potential portion and the reference side parallel portion, the signal side region being subjected to the aforementioned signal The conveying portion and the signal side parallel portion are inserted, and the partition wall is not formed in the region to be inserted into the aforementioned extending portion. The transfer unit according to claim 7, wherein the partition wall has a gap formed at one end of the insertion hole with respect to the top surface, and the extending portion is inserted into the gap. The transfer unit according to claim 7, wherein the outer casing includes a top surface member of the top surface and a bottom surface member including the bottom surface, and is formed to be detachable. An additional member is an additional member used in a transmission unit including a signal transmission unit and a reference potential unit, and the signal transmission unit transmits an electrical signal, and the reference potential portion is provided in parallel with the signal transmission unit and is Providing a reference potential, wherein the additional member includes: a conductor that is electrically connected to the reference potential portion by at least two connection points that are provided separately from each other, and is opposite to the signal transmission portion At least a portion of the region extending to an upper side in the second direction perpendicular to the first direction, the first direction being a direction in which the reference potential portion faces the signal transmission portion, and a casing to be fixed to the foregoing In the reference potential portion and the signal transmission portion, the connection point is pressed and brought into contact with the reference potential portion by the insertion of the conductor. A test device for testing a component to be tested, comprising: a test board provided with a test circuit for testing the test component; a component board carrying the test component; and The transfer unit according to any one of 1 to 9, which transmits an electrical signal between the aforementioned test board and the aforementioned element plate. A transmission unit is a transmission unit for transmitting an electrical signal, comprising: a signal transmission unit that transmits the electrical signal; and a reference potential portion that is disposed in parallel with the signal transmission portion and is given a reference potential; The conductor is electrically connected to the reference potential portion by at least two connection points provided separately from each other, and extends to at least a portion of the second direction with respect to at least a portion of the signal transmission portion, the second direction Vertically perpendicular to the first direction, the first direction is from the aforementioned reference potential portion toward the letter And a casing that is fixed to the reference potential portion and the signal transmission portion, and the connection point is pressed and brought into contact with the reference potential portion by the insertion of the conductor. The transfer unit according to claim 12, wherein the outer casing is formed with an insertion hole, and the reference potential portion and the signal transmission portion penetrate the insertion hole along a bottom surface of the insertion hole, and the reference side parallel portion and the signal a side parallel portion is inserted along a top surface of the insertion hole; in the insertion hole, a cross wall is formed from the bottom surface to the top surface, and a partition wall is formed for separating the reference side region and the signal side region, the reference The side region is to be inserted by the reference potential portion and the reference side parallel portion, and the signal side region is to be inserted by the signal transmitting portion and the signal side parallel portion, and is not formed in the region to be inserted into the extending portion. The aforementioned partition wall. The transfer unit according to claim 13, wherein the partition wall has a gap formed at one end of the insertion hole with respect to the top surface, and the extending portion is inserted into the gap. The transfer unit according to claim 13, wherein the outer casing includes a top surface member of the top surface and a bottom surface member including the bottom surface, and is formed to be detachable. A test device for testing a component to be tested, comprising: a test board provided with a test circuit for testing the test component; a component board carrying the test component; and The transfer unit of any one of 12 to 15, which transmits an electrical signal between the aforementioned test board and the aforementioned element board.