WO2011161988A1

WO2011161988A1 - Radiological imaging device

Info

Publication number: WO2011161988A1
Application number: PCT/JP2011/054888
Authority: WO
Inventors: 勝己押田
Original assignee: コニカミノルタエムジー株式会社
Priority date: 2010-06-23
Filing date: 2011-03-03
Publication date: 2011-12-29
Also published as: JPWO2011161988A1

Abstract

Provided is a radiological imaging device capable of achieving a noise reduction effect that is stable over time. A radiological imaging device (1) is provided with scan line drive means (15) which is provided with a gate scan line drive unit (15b) for switching a voltage applied to a scan line (5) between an on-voltage and an off-voltage, and a power source circuit (15a) for supplying the on-voltage and the off-voltage to the gate scan line drive unit (15b) on the basis of power supplied from a power source unit (41); and reading means (16) which is provided with a reading IC (16b) for reading image data from a radioactivity detection element (7), and a power circuit (16a) for supplying power to the reading IC (16b) on the basis of the power supplied from the power source unit (41); wherein the ground terminal (151) of the scan line drive unit (15) and the ground terminal (161) of the reading means (16) are connected to a ground level of the radiological imaging device (1) and are directly connected electrically by way of connection means (50).

Description

Radiation imaging equipment

The present invention relates to a radiographic image capturing apparatus.

A so-called direct type radiographic imaging device that generates electric charges by a detection element in accordance with the dose of irradiated radiation such as X-rays and converts it into an electrical signal, or other radiation such as visible light with a scintillator or the like. Various types of so-called indirect radiographic imaging devices have been developed that convert charges into electromagnetic signals after they have been converted into electromagnetic waves of a wavelength, and then generated by photoelectric conversion elements such as photodiodes in accordance with the energy of the converted and irradiated electromagnetic waves. Yes. In the present invention, the detection element in the direct type radiographic imaging apparatus and the photoelectric conversion element in the indirect type radiographic imaging apparatus are collectively referred to as a radiation detection element.

This type of radiographic imaging device is known as an FPD (Flat Panel Detector) and has been conventionally formed integrally with a support base (or a bucky apparatus) (see, for example, Patent Document 1). A portable radiographic imaging device in which an element or the like is housed in a housing has been developed and put into practical use (see, for example, Patent Documents 2 and 3).

In such a radiographic apparatus, for example, as shown in FIG. 12, for example, a plurality of scanning lines 5 and a plurality of signal lines 6 are usually arranged on the detection part P of the substrate so as to cross each other. In each region partitioned by 5 and the signal line 6, the radiation detection elements 7 are respectively formed in a two-dimensional array (matrix). Each radiation detection element 7 is connected to a thin film transistor (Thin FilmTransistor, hereinafter referred to as TFT) 8 as a switching means, and a drain electrode of each TFT 8 (denoted as D in FIG. 12). Are connected to the signal line 6 respectively.

Each signal line 6 is connected to each readout circuit 17 provided with an amplification circuit 18 and the like formed in the readout IC 16b of the readout means 16, and the output side of each readout circuit 17 is connected via a multiplexer 21 and the like. The A / D converter 20 is connected. In many cases, the readout IC 16b is configured such that one A / D converter 20 is provided for every predetermined number of readout circuits 17 such as 1024.
In addition, a bias voltage is applied to each radiation detection element 7 from a bias power source 14 through a bias line 9 and a connection 10 that binds them.
The radiographic image capturing apparatus also includes a power source 41 that supplies power to each functional unit such as the bias power source 14, the scanning driving unit 15, and the reading unit 16.

In the image data read process for reading image data from each radiation detection element 7, an on-voltage is sequentially applied to each line L1 to Lx of the scan line 5 from the gate scan line drive unit 15b of the scan drive unit 15. The charge accumulated in each radiation detection element 7 is discharged to the signal line 6 through the TFT 8 in which the ON voltage is applied to the gate electrode (expressed as G in FIG. 12), and is supplied to each readout circuit 17. After being read out and converted into analog image data by charge-voltage conversion in the amplifier circuit 18 or the like, it is converted into digital image data (ie, so-called raw data) by the A / D converter 20, It is stored in the storage means 40.

Further, in the image processing on the raw data read out in this way, usually, after each of the raw data obtained from each radiation detection element 7 is subjected to correction processing such as offset correction and gain correction. The final image data for diagnosis or the like is created by performing logarithmic conversion processing or the like on the corrected image data.

Incidentally, an insulating layer is usually provided at an intersection where the scanning line 5 and the signal line 6 intersect to prevent a short circuit. Therefore, a capacitor-like structure is formed at the intersecting portion by the scanning line 5, the signal line 6, and an insulating layer therebetween.

The intersections between the scanning lines 5 and the signal lines 6 as described above are formed in a very large number of portions where the multiple scanning lines 5 (lines L1 to Lx) and the multiple signal lines 6 intersect. Yes.
When performing an image data reading process of reading image data from each radiation detection element 7 by sequentially applying an on-voltage from the gate scanning line driving unit 15b of the scanning driving unit 15 to the lines L1 to Lx of the scanning line 5, An ON voltage is applied to the scanning line 5, and an OFF voltage is applied to many other scanning lines 5.
Since noise is usually generated in the voltage (ON voltage or OFF voltage) applied from the gate scanning line driving unit 15b, in the image data reading process, the voltage applied from the gate scanning line driving unit 15b is temporally changed. Affected by random noise (fluctuation).

That is, in the image data reading process, the parasitic capacitance generated at the intersection due to the capacitor-like structure formed at the intersection between the scanning line 5 and the signal line 6 is applied from the gate scanning line driving unit 15b. Noise generated in the applied voltage is converted into charge noise, and the charge noise is superimposed on the true image data to be read from the radiation detection element 7.

In the image data reading process, an on-voltage is applied to any one of the scanning lines 5 from the gate scanning line driving unit 15b of the scanning driving unit 15, and an off-voltage is applied to the other scanning lines 5, so Image data is read from each radiation detection element 7 connected to the scanning line 5 to which the voltage is applied via the TFT 8, but image data from each radiation detection element 7 connected to the same scanning line 5. Are superimposed with the same charge noise.

However, when the scanning line 5 to which the ON voltage is applied is switched to the next scanning line 5, noise generated in the voltage applied from the gate scanning line driving unit 15b is randomly generated in time. The same charge noise is superimposed on the image data from each radiation detection element 7 connected to the scan line 5, and this charge noise is connected to the scan line 5 before switching. The value is different from the charge noise superimposed on the image data from each radiation detecting element 7.

Therefore, when a radiation image is generated based on the image data for each radiation detection element 7 read out in this way, a striped pattern extending in the scanning line direction (usually this direction is the lateral direction) is formed. The phenomenon of appearing occurs. The above-described noise that causes a striped pattern extending in the scanning line direction is generally called horizontal noise.

In order to efficiently reduce such horizontal noise, in Patent Document 1, a step of detecting incident radiation by a radiation detection unit (corresponding to the detection unit P in FIG. 12) and the radiation detection unit are arranged in a matrix. A step of reading out a detection signal from a radiation detection unit via a reading unit (corresponding to the scanning driving unit 15 and the reading unit 16 in FIG. 12) having a plurality of pixels arrayed, and correcting the read detection signal A correction step that corrects the detection signal based on the first correction value corresponding to the noise caused by the radiation detection unit, and the noise caused by the reading unit. And a second sub-step of correcting the detection signal based on the corresponding second correction value, wherein the second sub-step is executed before the first sub-step. It discloses a noise reduction method. Here, the first correction value is a correction value corresponding to the gain noise of the radiation detection unit and the horizontal noise of the radiation detection unit, and the second correction value is a correction value corresponding to the gain noise of the reading unit. .
Furthermore, in Patent Document 1, in order to acquire a highly accurate correction value, when acquiring reading unit gain noise or when acquiring detection unit gain noise, the reading unit is electrically separated from the radiation detection unit. This is also disclosed.

JP-A-9-73144 JP 2006-058124 A Japanese Patent Laid-Open No. 6-342099 JP 2001-99944 A

However, in the technique described in Patent Document 1, information on the readout unit gain noise is measured in advance at the initial manufacturing stage of the readout unit, or is acquired at the periodic inspection of the readout unit and stored in the correction unit. Further, the information on the detection unit gain noise is measured in advance at the initial manufacturing stage of the radiation detection unit, or is acquired during the periodic inspection of the radiation detection unit and stored in the correction unit.
In this case, depending on the operating state of the radiographic imaging device and the environmental temperature, the noise component may differ between when the correction value (noise information) is acquired and when the image data is read out. There is a problem that it is difficult to obtain a reduction effect.

Specifically, in the radiographic imaging apparatus, it is difficult to arrange the scanning drive unit 15 and the reading unit 16 closest to each other due to the configuration thereof, and the scanning driving unit 15 and the reading unit 16 are arranged apart from each other. There are many cases. At this time, in order to make the GND potential of the scanning drive unit 15 and the GND potential of the reading unit 16 the same, the ground terminal 151 of the scanning driving unit 15 and the ground terminal 161 of the reading unit 16 are connected to the ground GND of the power supply unit 41. Is connected to the ground level of the radiation imaging apparatus, but the impedance between the ground terminal 151 of the scanning drive means 15 and the ground GND of the power supply unit 41, the ground terminal 161 of the reading means 16 and the power supply In many cases, a difference occurs between the impedance of the portion 41 and the ground GND.
In such a case, in order to make the GND potential of the scanning drive unit 15 and the GND potential of the reading unit 16 the same, the ground terminal 151 of the scanning driving unit 15 and the ground terminal 161 of the reading unit 16 are connected to the ground of the radiation imaging apparatus. In spite of being connected to the level, a GND potential difference is caused between the scanning drive means 15 and the reading means 16 due to impedance.

Further, since the reading unit 16 has a larger current consumption than the scanning driving unit 15 and there is a difference between the consumption current of the scanning driving unit 15 and the consumption current of the reading unit 16, the scanning driving unit 15 and the reading unit 16 are different. In the meantime, a GND potential difference due to current is also generated.

Incidentally, fluctuations are usually generated in the GND potential of the scanning driving means 15 and the GND potential of the reading means 16 as shown in FIG. Specifically, as shown in FIG. 13, the readout means 16 having a larger current consumption has a larger amplitude of the waveform of fluctuation of the GND potential. FIG. 13 shows a waveform of fluctuation of the GND potential of the scanning drive means 15 (waveform shown by a broken line in FIG. 13) and a waveform of fluctuation of the GND potential of the reading means 16 (waveform shown by a solid line in FIG. 13). Although the case where the phase and frequency are the same is shown, these waveforms may have different phases and frequencies.

When fluctuations occur in the GND potential of the scanning drive means 15 and the GND potential of the readout means 16, the power supply from the power supply circuit 15a for the gate scanning line drive section 15b and the power supply circuit 16a for the readout IC 16b are accompanied by the fluctuation. The power supply fluctuates, and noise is superimposed on the true image data generated by radiation irradiation.

For example, the horizontal pulling noise described above is generated when the amount of charge accumulated in the parasitic capacitance generated at the intersection between the scanning line 5 and the signal line 6 varies with time. More specifically, charges are accumulated in the parasitic capacitance generated at the intersection between the scanning line 5 and the signal line 6 due to the difference between the voltage of the scanning line 5 and the voltage of the signal line 6, but the horizontal noise is caused by scanning. A relative fluctuation with respect to the voltage of the signal line 6 occurs in the voltage applied to the line 5, and the charge amount accumulated in the parasitic capacitance is caused by the time fluctuation due to the relative fluctuation.
Therefore, if the amount of charge accumulated in the parasitic capacitance is constant without time variation, that is, if the voltage applied to the scanning line 5 does not have a relative fluctuation with respect to the voltage of the signal line 6, Pulling noise does not occur.

In other words, as described above, a GND potential difference caused by impedance or a GND potential difference caused by current is generated between the scanning drive unit 15 and the reading unit 16. For this reason, the GND potential difference between the scanning drive unit 15 and the reading unit 16 as shown by the hatched area in FIG. 13 accompanying fluctuations in the GND potential of the scanning driving unit 15 and the GND potential of the reading unit 16. Will cause fluctuations.
Then, due to the fluctuation of the GND potential difference between the scanning driving unit 15 and the reading unit 16, the voltage applied to the scanning line 5 is relatively fluctuated with respect to the voltage of the signal line 6, and the horizontal pulling is performed. Noise will be generated.

With correction processing such as offset correction and gain correction, it is possible to remove noise components caused by fluctuations in the GND potential difference between the scanning drive unit 15 and the reading unit 16, specifically, horizontal noise components. . However, depending on the operating state of the radiographic imaging device, the environmental temperature, etc., the noise component due to fluctuations in the GND potential difference may differ between when the correction value is acquired and when the image data is read out. There is a problem that it is difficult to obtain a noise reduction effect.

Even if correction processing is performed, the noise component may not be completely removed unless a stable noise reduction effect is always obtained. In such a case, the image quality of the radiographic image is deteriorated. For example, if a diagnosis is performed using a radiographic image having a deteriorated image quality, a lesion is overlooked, or a normal part is mistaken for a lesion. There is a risk that inconveniences such as the occurrence of the Therefore, it is desired that the radiographic imaging device always obtains a stable noise reduction effect in order to always obtain a radiographic image with appropriate image quality.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a radiographic imaging apparatus capable of always obtaining a stable noise reduction effect.

In order to solve the above-described problem, the radiographic imaging device of the present invention includes:
In a radiographic imaging device that performs radiographic imaging,
A plurality of scanning lines and a plurality of signal lines arranged so as to cross each other, and a plurality of radiation detection elements arranged in a two-dimensional manner in each region partitioned by the plurality of scanning lines and the plurality of signal lines A detection unit comprising:
When each of the radiation detection elements is arranged and connected, the off-state is applied to the connected scanning line, and the on-state is applied when the on-voltage is applied to the connected scanning line. Then, the switch means for accumulating the charge generated in the radiation detection element in the radiation detection element, and releasing the charge from the radiation detection element to the signal line in the ON state,
A gate scanning line driving unit that switches a voltage applied to the scanning line between the on-voltage and the off-voltage, and a scanning driving power supply circuit that supplies the on-voltage and the off-voltage to the gate scanning line driving unit; Scanning drive means comprising:
A readout comprising: a readout unit that reads out the image data from the radiation detection element by converting the electric charges emitted from the radiation detection element into image data; and a readout power supply circuit that supplies power to the readout unit. Means,
A control unit for controlling operations of at least the scanning driving unit and the reading unit;
A power supply unit that supplies power to at least the scanning drive unit, the readout unit, and the control unit;
With
The power supply circuit for scanning drive supplies the on-voltage and the off-voltage to the gate scanning line driving unit based on the power supplied from the power supply unit,
The reading power supply circuit supplies power to the reading unit based on the power supplied from the power supply unit,
The ground terminal of the power supply circuit for scanning drive and the ground terminal of the power supply circuit for readout are connected to the ground level of the radiation imaging apparatus,
The power supply circuit further comprises connection means for directly and electrically connecting the ground terminal of the power supply circuit for scanning and the ground terminal of the power supply circuit for reading.

Moreover, the radiographic imaging device of the present invention is
In a radiographic imaging device that performs radiographic imaging,
A plurality of scanning lines and a plurality of signal lines arranged so as to cross each other, and a plurality of radiation detection elements arranged in a two-dimensional manner in each region partitioned by the plurality of scanning lines and the plurality of signal lines A detection unit comprising:
When each of the radiation detection elements is arranged and connected, the off-state is applied to the connected scanning line, and the on-state is applied when the on-voltage is applied to the connected scanning line. Then, the switch means for accumulating the charge generated in the radiation detection element in the radiation detection element, and releasing the charge from the radiation detection element to the signal line in the ON state,
A gate scanning line driving unit that switches a voltage applied to the scanning line between the on-voltage and the off-voltage, and a scanning driving power supply circuit that supplies the on-voltage and the off-voltage to the gate scanning line driving unit; Scanning drive means comprising:
A readout comprising: a readout unit that reads out the image data from the radiation detection element by converting the electric charge emitted from the radiation detection element into image data; and a readout power supply circuit that supplies electric power to the readout unit Means,
A control unit for controlling operations of at least the scanning driving unit and the reading unit;
A power supply unit that supplies power to at least the scanning drive unit, the readout unit, and the control unit;
With
The power supply circuit for scanning drive supplies the on-voltage and the off-voltage to the gate scanning line driving unit based on the power supplied from the power supply unit,
The reading power supply circuit supplies power to the reading unit based on the power supplied from the power supply unit,
The scanning drive power supply circuit and the readout power supply circuit are a common power supply circuit,
The ground terminal of the common power supply circuit is connected to a ground level of the radiation imaging apparatus.

According to the radiographic imaging apparatus of the present invention, the ground terminal of the scanning drive power supply circuit and the ground terminal of the readout power supply circuit are electrically connected to the ground of the power supply unit, and Connection means for directly and electrically connecting the ground terminal and the ground terminal of the read power supply circuit is provided. Alternatively, the scanning drive power supply circuit and the readout power supply circuit are a common power supply circuit, and the ground terminal of the common power supply circuit is electrically connected to the ground of the power supply unit.

Therefore, the fluctuation of the GND potential of the scanning drive unit and the fluctuation of the GND potential of the readout unit coincide with each other, and no GND potential difference is generated between the scanning drive unit and the readout unit. Noise due to fluctuations in the GND potential difference is not generated. Therefore, it is possible to read image data on which noise due to fluctuations in the GND potential difference between the scanning drive means and the reading means is not superimposed.

This makes it possible to always obtain a stable noise reduction effect that is not affected by changes in the operating state, environmental temperature, etc., and to always obtain a radiographic image with an appropriate image quality. Therefore, when making a diagnosis using such a radiographic image, it is possible to accurately inconvenience that a doctor or the like overlooks a lesioned part or misidentifies a normal part as a lesioned part, resulting in a misdiagnosis. Can be prevented.

It is a perspective view which shows the radiographic imaging apparatus which concerns on each embodiment. FIG. 2 is a cross-sectional view taken along line XX in FIG. It is a top view which shows the structure of a board | substrate. It is an enlarged view which shows the structure of the radiation detection element, TFT, etc. which were formed in the small area | region on the board | substrate of FIG. FIG. 5 is a cross-sectional view taken along line YY in FIG. It is a side view explaining the board | substrate with which COF, a PCB board | substrate, etc. were attached. It is a block diagram showing the equivalent circuit of the radiographic imaging apparatus which concerns on 1st Embodiment. It is a block diagram showing the equivalent circuit of the radiographic imaging apparatus which concerns on an example of the modification 1 of 1st Embodiment. It is a block diagram showing the equivalent circuit of the radiographic imaging apparatus which concerns on another example of the modification 1 of 1st Embodiment. It is a block diagram showing the equivalent circuit of the radiographic imaging apparatus which concerns on the modification 2 of 1st Embodiment. It is a block diagram showing the equivalent circuit of the radiographic imaging apparatus which concerns on 2nd Embodiment. It is a block diagram showing the equivalent circuit of the conventional radiographic imaging apparatus. It is a figure which shows the fluctuation | variation of the GND electric potential of a scanning drive means, and the fluctuation | variation of the GND electric potential of a reading means in the conventional radiographic imaging apparatus.

Hereinafter, an embodiment of a radiographic image capturing apparatus according to the present invention will be described with reference to the drawings. However, the present invention is not limited to the illustrated example.

In the present embodiment, the radiographic imaging device includes a scintillator or the like, converts the irradiated radiation into electromagnetic waves of other wavelengths such as visible light, and converts them into image data that is an electrical signal by the radiation detection element. The case of a so-called indirect radiographic imaging device will be described, but the present invention is not limited to that case, and the so-called direct radiographic imaging device that directly detects radiation with a radiation detection element without using a scintillator or the like. It is applicable to.
In the present embodiment, the case where the radiographic image capturing apparatus is portable is described. However, the present invention is not limited to this case. For example, the fixed radiographic image capturing apparatus integrally formed with the support base is used. It is applicable to.

[First Embodiment]
FIG. 1 is an external perspective view of the radiographic image capturing apparatus according to the present embodiment, and FIG. 2 is a cross-sectional view taken along line XX of FIG.
The radiographic image capturing apparatus 1 according to the present embodiment is configured as a portable (cassette type) apparatus in which a scintillator 3, a substrate 4, and the like are housed in a housing 2 as shown in FIGS. 1 and 2. . The radiographic image capturing apparatus 1 is used for radiographic image capturing, detects radiation, and generates and acquires image data corresponding to the radiation dose.

The housing 2 is formed of a material such as a carbon plate or plastic that transmits radiation at least on a surface R (hereinafter referred to as a radiation incident surface R) that receives radiation.
1 and 2 show a case in which the housing 2 is a so-called lunch box type formed by the frame plate 2A and the back plate 2B. However, the housing 2 is integrally formed in a rectangular tube shape. It is also possible to use a so-called monocoque type.

Further, as shown in FIG. 1, in this embodiment, a battery of a power switch 36, an indicator 37 composed of an LED or the like, and a power source 41 (see FIG. A lid member 38 that can be opened and closed for replacement or the like is disposed. In the present embodiment, an antenna device 39 that is a communication means for communicating with an external device in a wireless manner is embedded in the side surface of the lid member 38.

The installation position of the antenna device 39 is not limited to the side surface portion of the lid member 38, and the antenna device 39 can be installed at an arbitrary position of the radiographic image capturing apparatus 1.
The number of antenna devices 39 to be installed is not limited to one, and a plurality of antenna devices 39 may be provided.
Furthermore, it is also possible to communicate with an external device in a wired manner. In this case, for example, as a communication means, a connection terminal or the like for connection by inserting a cable or the like is used as the radiation imaging apparatus 1. It is provided on the side surface portion or the like.

As shown in FIG. 2, a base 31 is disposed on the lower side of the substrate 4 via a lead thin plate (not shown), and the electronic component 32 is disposed on the base 31. The PCB substrate 33, the buffer member 34, and the like are attached. In the present embodiment, a glass substrate 35 for protecting the substrate 4 and the scintillator 3 on the radiation incident surface R side is disposed.

The scintillator 3 is arranged in a state of facing a detection unit P described later of the substrate 4. The scintillator 3 is, for example, a phosphor whose main component is converted into an electromagnetic wave having a wavelength of 300 to 800 nm, that is, an electromagnetic wave centered on visible light when it receives radiation, and that is output.

In the present embodiment, the substrate 4 is formed of a glass substrate. As shown in FIG. 3, a plurality of scanning lines 5 and a plurality of signal lines are provided on a surface 4 a of the substrate 4 facing the scintillator 3. 6 are arranged so as to cross each other. A radiation detection element 7 is provided in each region r defined by the plurality of scanning lines 5 and the plurality of signal lines 6 on the surface 4 a of the substrate 4.

Thus, the entire region r in which the plurality of radiation detection elements 7 arranged in a two-dimensional manner are provided in each region r partitioned by the scanning lines 5 and the signal lines 6, that is, shown by a one-dot chain line in FIG. The region is a detection unit P.

In the present embodiment, a photodiode is used as the radiation detection element 7, but other than this, for example, a phototransistor or the like can also be used.
As shown in FIG. 4 which is an enlarged view of FIG. 3 and FIG. 3, each radiation detection element 7 is connected to the source electrode 8s of the TFT 8 functioning as a switch means. The drain electrode 8 d of the TFT 8 is connected to the signal line 6.

The TFT 8 is turned on when an on-voltage is applied to the connected scanning line 5 by the scanning driving means 15 described later, and is applied to the gate electrode 8g via the scanning line 5, thereby detecting radiation. Electric charges generated and accumulated in the element 7 are emitted from the radiation detection element 7 to the signal line 6.
The TFT 8 is turned off when an off voltage is applied to the connected scanning line 5 and applied to the gate electrode 8 g via the scanning line 5, and the TFT 8 is turned off from the radiation detection element 7 to the signal line 6. The emission of the charge is stopped, and the charge generated in the radiation detection element 7 is held and accumulated in the radiation detection element 7.

Here, the structure of the radiation detection element 7 and the TFT 8 in this embodiment will be briefly described with reference to a cross-sectional view shown in FIG. FIG. 5 is a sectional view taken along line YY in FIG.

A gate electrode 8g of a TFT 8 made of Al, Cr, or the like is formed on the surface 4a of the substrate 4 so as to be integrally laminated with the scanning line 5, and silicon nitride (laminated on the gate electrode 8g and the surface 4a). An upper portion of the gate electrode 8g on the gate insulating layer 81 made of SiNx) is connected to the first electrode 74 of the radiation detecting element 7 through a semiconductor layer 82 made of hydrogenated amorphous silicon (a-Si) or the like. The source electrode 8s and the drain electrode 8d formed integrally with the signal line 6 are laminated.

The source electrode 8s and the drain electrode 8d are divided by a first passivation layer 83 made of silicon nitride (SiNx) or the like, and the first passivation layer 83 covers both the

electrodes

8s and 8d from above. In addition, ohmic contact layers 84a and 84b formed in an n-type by doping hydrogenated amorphous silicon with a group VI element are stacked between the semiconductor layer 82 and the source electrode 8s and the drain electrode 8d, respectively. The TFT 8 is formed as described above.

In the radiation detection element 7, an auxiliary electrode 72 is formed by laminating Al, Cr or the like on an insulating layer 71 formed integrally with the gate insulating layer 81 on the surface 4 a of the substrate 4. A first electrode 74 made of Al, Cr, Mo, or the like is laminated on the auxiliary electrode 72 with an insulating layer 73 formed integrally with the first passivation layer 83 interposed therebetween. The first electrode 74 is connected to the source electrode 8 s of the TFT 8 through the hole H formed in the first passivation layer 83. Note that the auxiliary electrode 72 is not necessarily provided.

On the first electrode 74, an n layer 75 formed in an n-type by doping a hydrogenated amorphous silicon with a group VI element, an i layer 76 which is a conversion layer formed of hydrogenated amorphous silicon, and a hydrogenated amorphous A p layer 77 formed by doping a group III element into silicon and forming a p-type layer is formed by laminating sequentially from below.

And at the time of radiographic imaging, the radiation irradiated with respect to the radiographic imaging apparatus 1 injects from the radiation entrance surface R of the housing | casing 2, is converted into electromagnetic waves, such as visible light, with the scintillator 3, and the converted electromagnetic waves are illustrated. When irradiated from above, the electromagnetic wave reaches the i layer 76 of the radiation detection element 7, and electron-hole pairs are generated in the i layer 76. In this way, the radiation detection element 7 converts the electromagnetic waves irradiated from the scintillator 3 into electric charges (electron hole pairs).

Further, on the p layer 77, a second electrode 78 made of a transparent electrode such as ITO is laminated and formed so that the irradiated electromagnetic wave reaches the i layer 76 and the like. In the present embodiment, the radiation detection element 7 is formed as described above. The order of stacking the p layer 77, the i layer 76, and the n layer 75 may be reversed. Further, in the present embodiment, a case where a so-called pin-type radiation detection element formed by sequentially stacking the p layer 77, the i layer 76, and the n layer 75 as described above is used as the radiation detection element 7. However, it is not limited to this.

A bias line 9 for applying a bias voltage to the radiation detection element 7 is connected to the upper surface of the second electrode 78 of the radiation detection element 7 via the second electrode 78. The second electrode 78 and the bias line 9 of the radiation detection element 7, the first electrode 74 extended to the TFT 8 side, the first passivation layer 83 of the TFT 8, that is, the upper surfaces of the radiation detection element 7 and the TFT 8 are The upper side is covered with a second passivation layer 79 made of silicon nitride (SiNx) or the like.

As shown in FIGS. 3 and 4, in this embodiment, one bias line 9 is connected to a plurality of radiation detection elements 7 arranged in rows, and each bias line 9 is connected to a signal line 6. Are arranged in parallel with each other. In addition, each bias line 9 is bound to one connection 10 at a position outside the detection portion P of the substrate 4.

In this embodiment, as shown in FIG. 3, each scanning line 5, each signal line 6, and connection 10 of the bias line 9 are input / output terminals (also referred to as pads) provided near the edge of the substrate 4. 11 is connected. As shown in FIG. 6, each input / output terminal 11 has a flexible substrate COF (Chip On Film) on which a chip such as a gate IC 12a constituting a gate scanning line driving unit 15b of the scanning driving means 15 described later is incorporated on a film. ) 12 are connected via an anisotropic conductive adhesive material 13 such as an anisotropic conductive adhesive film (Anisotropic Conductive Film) or an anisotropic conductive paste (Anisotropic Conductive Paste).

The flexible substrate COF 12 is routed to the back surface 4b side of the substrate 4 and connected to the PCB substrate 33 on the back surface 4b side. Thus, the board | substrate 4 part of the radiographic imaging apparatus 1 is formed. In FIG. 6, illustration of the electronic component 32 and the like is omitted.

Here, the circuit configuration of the radiation image capturing apparatus 1 will be described. FIG. 7 is a block diagram showing an equivalent circuit of the radiation image capturing apparatus 1 according to this embodiment.

As described above, each radiation detection element 7 of the detection unit P of the substrate 4 has the bias line 9 connected to the second electrode 78, and each bias line 9 is bound to the connection 10 to the bias power supply 14. It is connected. The bias power supply 14 applies a bias voltage to the second electrode 78 of each radiation detection element 7 via the connection 10 and each bias line 9.

In the present embodiment, as can be seen from the fact that the bias line 9 is connected to the p-layer 77 side (see FIG. 5) of the radiation detection element 7 via the second electrode 78, the radiation from the bias power source 14 is detected. A voltage equal to or lower than the voltage applied to the first electrode 74 side of the radiation detection element 7 (that is, a so-called reverse bias voltage) is applied as a bias voltage to the second electrode 78 of the element 7 via the bias line 9.

In the present embodiment, as shown in FIG. 7, the bias power supply 14 is connected to the power supply unit 41 via a power supply circuit 16 a of the reading unit 16 and the control unit 22 via a wiring (power supply line). 22 and the power supply circuit 16 a of the reading means 16 are configured to be supplied with power from the power supply unit 41. The ground terminal 141 of the bias power supply 14 is connected to the ground terminal 161 of the power supply circuit 16a by wiring (GND line).
Further, in the present embodiment, as shown in FIG. 7, the bias power supply 14 is connected to the control unit 22 via the power supply circuit 16a of the reading means 16 and is connected to the control unit 22 via the power supply circuit 16a of the reading means 16. Although the control signal is input from the control unit 22, the present invention is not limited to this, and the bias power supply 14 is directly connected to the control unit 22 by wiring, and the control signal is directly transmitted from the control unit 22. You may comprise so that it may be input.

The first electrode 74 of each radiation detection element 7 is connected to the source electrode 8s (denoted as S in FIG. 7) of the TFT 8, and the gate electrode 8g of each TFT 8 (denoted as G in FIG. 7). Is connected to each scanning line 5 extending from a gate scanning line driving unit 15b of the scanning driving means 15 described later. Further, the drain electrode 8 d (denoted as D in FIG. 7) of each TFT 8 is connected to each signal line 6.

In this embodiment, the scanning drive unit 15 includes a power supply circuit 15a that functions as a scanning drive power supply circuit that supplies an on-voltage and an off-voltage to the gate scanning line driving unit 15b, and each scanning line 5, that is, each scanning line 5. A gate scanning line driving unit 15b that switches a voltage applied to the lines L1 to Lx between an on-voltage and an off-voltage.

The power supply circuit 15a of the scanning drive unit 15 gates on and off voltages to be applied to the gate electrode 8g of the TFT 8 via the lines L1 to Lx of the scanning line 5 based on the power supplied from the power supply unit 41. The scanning line driving unit 15b is configured to be supplied.
In the present embodiment, as shown in FIG. 7, the power supply circuit 15 a of the scan driving unit 15 is connected to the power supply unit 41 through the control unit 22 by wiring, and the power supply unit 41 through the control unit 22. It is comprised so that electric power may be supplied from. The ground terminal 151 of the scanning drive unit 15 (specifically, the ground terminal 151 of the power supply circuit 15a of the scan drive unit 15) is supplied with power via the noise suppression unit 51 (described later), the control unit 22 and the power supply unit 41. The ground GND of the radiographic imaging apparatus 1 is connected to the ground GND of the unit 41 by wiring and is electrically connected to the ground GND of the power source 41 via the noise suppression unit 51, the control unit 22, and the power source 41. Connected to level, ie grounded.

The gate scanning line driving unit 15b is formed by arranging a plurality of flexible substrates COF12 in which a gate IC 12a is incorporated on a film, and is applied to the gate electrode 8g of the TFT 8 via each line L1 to Lx of the scanning line 5. The voltage to be switched is switched between an on-voltage and an off-voltage, so that each TFT 8 is switched between an on state and an off state.
In the present embodiment, as shown in FIG. 7, the gate scanning line driving unit 15 b is connected to the control unit 22 via the power supply circuit 15 a of the scanning driving unit 15, and the power source of the scanning driving unit 15 is connected. The control signal is input from the control unit 22 via the circuit 15a. However, the present invention is not limited to this, and the gate scanning line driving unit 15b is directly connected to the control unit 22 by wiring. You may comprise so that a control signal may be input directly from the control part 22. FIG.

In the present embodiment, the reading unit 16 converts each radiation to a power supply circuit 16a that functions as a reading power supply circuit that supplies power to the reading IC 16b and converts the electric charges emitted from each radiation detection element 7 into image data. And a reading IC 16b that functions as a reading unit that reads image data from the detection element 7.
In this embodiment, it is assumed that the reading unit 16 is housed on a substrate different from the substrate on which the scanning driving unit 15 is housed, and is housed on the same substrate as the bias power source 14.

The power supply circuit 16 a of the reading unit 16 is configured to supply power to each unit constituting the read IC 16 b and the bias power supply 14 based on the power supplied from the power supply unit 41.
In the present embodiment, as shown in FIG. 7, the power supply circuit 16 a of the reading unit 16 is connected to the power supply unit 41 via the control unit 22 and is connected to the power supply unit 41 via the control unit 22. Electric power is supplied. The ground terminal 161 of the reading unit 16 (specifically, the ground terminal 161 of the power supply circuit 16a of the reading unit 16) is connected to the power supply unit 41 via the noise suppression unit 52 (described later), the control unit 22, and the power supply unit 41. Is connected to the ground GND of the radiographic imaging apparatus 1 by being electrically connected to the ground GND of the power supply unit 41 via the noise suppression means 52, the control unit 22, and the power supply unit 41. Connected, ie grounded.

The readout IC 16b includes a readout circuit 17, which includes an amplifier circuit 18, a correlated double sampling circuit 19, and the like, an analog multiplexer 21, and an A / D converter 20. In FIG. 7, the correlated double sampling circuit 19 is denoted as CDS.

As shown in FIG. 7, each signal line 6 is connected to each readout circuit 17 formed in the readout IC 16b. Each read IC 16b is provided with a predetermined number of read circuits 17, and by providing a plurality of read ICs 16b, the read circuits 17 corresponding to the number of signal lines 6 are provided.

For example, when radiation image capturing is performed, the radiation image capturing apparatus 1 is irradiated with radiation through the subject, and the scintillator 3 converts the radiation into electromagnetic waves of other wavelengths and is irradiated to the radiation detection element 7 immediately below the radiation. The Then, charges are generated according to the radiation dose (the amount of electromagnetic waves) irradiated by the radiation detection element 7.

In the image data reading process for reading image data from each radiation detection element 7, an on-voltage is applied to the gate electrode 8 g from the gate scanning line driving unit 15 b of the scanning driving unit 15 through the lines L 1 to Lx of the scanning line 5. The TFT 8 is turned on, and charges are emitted from the radiation detection element 7 to the signal line 6.
Then, a voltage value is output from the amplifier circuit 18 in accordance with the amount of charge emitted from the radiation detection element 7, and is correlated double-sampled by the correlated double sampling circuit 19, and analog value image data is input to the analog multiplexer 21. Is output. The image data sequentially output from the analog multiplexer 21 is sequentially converted into digital value image data by the A / D converter 20, output to the storage means 40, and sequentially stored.

In the present embodiment, as shown in FIG. 7, the read IC 16 b is connected to the control unit 22 via the power supply circuit 16 a of the read means 16 and is connected via the power supply circuit 16 a of the read means 16. The control signal is input from the unit 22 or the digital value image data is output to the control unit 22 via the power supply circuit 16a of the reading unit 16. However, the present invention is not limited to this. The read IC 16b may be directly connected to the control unit 22 by wiring so that a control signal is directly input from the control unit 22 or digital value image data is directly output to the control unit 22.

The control unit 22 includes a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), a RAM (Random Access Memory), an input / output interface connected to the bus, an FPGA (Field Programmable Gate Array), and the like. Has been. Note that the control unit 22 may be configured with a dedicated control circuit.

The control unit 22 controls the operation of each functional unit of the radiographic image capturing apparatus 1.
Specifically, for example, the control unit 22 controls the bias power supply 14 to control the reverse bias voltage applied to each radiation detection element 7 or the scan driving unit 15 to control the voltage applied to the scanning line 5. Image data read out from each radiation detection element 7 by switching between ON voltage and OFF voltage, or by reading out the image data from each radiation detection element 7 by controlling the readout means 16 Process.
Each image data read from each radiation detection element 7 is stored in an image storage area of the storage unit 40 by a memory controller (not shown) controlled by the control unit 22.

As shown in FIG. 7 and the like, the control unit 22 is connected to a storage means 40 and an antenna device 39 configured by a DRAM (Dynamic RAM) or the like. Further, although not shown in FIG. 36, an indicator 37, and the like are connected.
The control unit 22 is connected to a power supply unit 41 for supplying power to each functional unit of the radiographic imaging apparatus 1 such as the bias power supply 14, the scanning drive unit 15, the reading unit 16, and the control unit 22. ing.

As shown in FIG. 7, the power supply unit 41 supplies power to the scanning drive unit 15 (specifically, the power supply circuit 15 a of the scan drive unit 15) via the control unit 22, thereby It is configured to supply power to the scanning drive means 15 of each functional unit.
Further, as shown in FIG. 7, the power supply unit 41 supplies power to the reading unit 16 (specifically, the power supply circuit 16 a of the reading unit 16) via the control unit 22, so that the radiographic imaging device 1 It is configured to supply power to the reading means 16 and the bias power supply 14 among the functional units.

Here, the ground terminals of the functional units such as the scanning drive unit 15, the reading unit 16, and the control unit 22 are electrically connected to the ground GND of the power supply unit 41 in order to make the GND potential of each functional unit the same. As a result, the radiation image capturing apparatus 1 is connected to the ground level, that is, is grounded.
Specifically, for example, as shown in FIG. 7, the ground terminal 151 of the scanning drive unit 15 (that is, the ground terminal 151 of the power supply circuit 15 a of the scan driving unit 15) includes a noise suppression unit 51 (described later) and a control unit. 22 and the power supply unit 41 and are connected to the ground GND of the power supply unit 41 by wiring. The ground terminal 161 of the reading unit 16 (that is, the ground terminal 161 of the power supply circuit 16a of the reading unit 16) is connected to the ground GND of the power supply unit 41 via the noise suppression unit 52 (described later), the control unit 22, and the power supply unit 41. It is connected with wiring.

Further, the ground terminal 151 of the scanning driving unit 15 and the ground terminal 161 of the reading unit 16 are electrically connected directly by the connecting unit 50.
As the connecting means 50, as long as it can make a low impedance connection between the ground terminal 151 of the scanning driving means 15 and the ground terminal 161 of the reading means 16 as will be described later, the material and shape thereof are arbitrary. Specifically, metal fittings and wire rods are preferably used.

Further, as shown in FIG. 7, noise intrusion from the control unit 22 or the power supply unit 41 to the scanning drive unit 15 is caused between the ground terminal 151 of the scanning drive unit 15 and the control unit 22 and the power supply unit 41. A noise suppression unit 51 that functions as a scanning drive noise suppression unit is inserted. Similarly, between the ground terminal 161 of the reading unit 16 and the control unit 22 and the power supply unit 41, for reading, which suppresses intrusion of noise from the control unit 22 and the power supply unit 41 to the bias power supply 14 and the reading unit 16. A noise suppression means 52 that functions as a noise suppression means is inserted.
The noise suppression means 51 and 52 can be configured arbitrarily as long as noise from the control unit 22 or the power supply unit 41, specifically digital noise or noise due to current fluctuation, can be suppressed. Specifically, filters, FPC (Flexible Printed Circuits), ferrite beads, resistors, and the like are preferably used.

Next, the operation of the radiation image capturing apparatus 1 according to the present embodiment will be described.

First, in the radiographic image capturing, the control unit 22 acquires the charge generated by the radiation image capturing apparatus 1 by being irradiated with radiation and accumulated in each radiation detecting element 7, that is, image data as accurately as possible. Prior to the irradiation of radiation, a reset process is performed to reset each radiation detection element 7 by discharging excess charges remaining in each radiation detection element 7 from each radiation detection element 7.
This reset process can be realized by applying an on-voltage to the scanning line 5 from the scanning drive unit 15 and releasing extra charge from the radiation detecting element 7 to the signal line 6.

Next, the control unit 22 applies the off voltage to all the scanning lines 5, that is, all the lines L1 to Lx of the scanning line 5 from the gate scanning line driving unit 15b of the scanning driving unit 15 to turn off each TFT 8. Thus, a charge accumulation process for accumulating charges generated in each radiation detection element 7 due to radiation irradiation in each radiation detection element 7 is performed.

Next, the control unit 22 applies an ON voltage to the scanning line 5 from the scanning driving unit 15 to release the charge accumulated in the radiation detecting element 7 from the radiation detecting element 7 to the signal line 6. The image forming apparatus is configured to perform an image data reading process for reading image data from each radiation detection element 7 by converting the emitted charges into image data.

Furthermore, in the present embodiment, the control unit 22 is configured to acquire a correction dark image for correcting the radiographic image following the radiographic image capturing.

In each radiation detection element 7, so-called dark charges are constantly generated due to thermal excitation or the like due to heat of each radiation detection element 7 itself, and at the time of image data read processing for reading image data from each radiation detection element 7, In addition to the charges that are true image data generated by radiation irradiation, dark charges are also read from each radiation detection element 7, and image data on which offsets due to dark charges are superimposed is read.
Therefore, in order to subtract the offset due to dark charge from the read image data to obtain true image data, the control unit 22 acquires a correction dark image subsequent to the radiographic image capture, and performs radiographic image capture. After the radiation image capturing apparatus 1 is left in a state where no radiation is applied to the apparatus 1, the offset detection data (dark image data) due to dark charges is read from each radiation detection element 7 as an offset correction value. .

Specifically, for example, when the image data reading process at the time of radiographic image capture ends, the control unit 22 ends radiographic image capture at that time and starts acquiring a correction dark image. And first, the reset process which resets each radiation detection element 7 is performed similarly to the case of the reset process at the time of radiographic imaging.

Next, the control unit 22 performs a charge accumulation process for accumulating the charges generated in each radiation detection element 7 in each radiation detection element 7 in the same manner as the charge accumulation process at the time of radiographic image capturing. At this time, while the radiographic image capturing apparatus 1 is acquiring a correction dark image, the radiation image capturing apparatus 1 is not irradiated with radiation, and therefore, only the dark charge is accumulated in each radiation detection element 7. The

Next, the control unit 22 performs an image data read process for reading image data from each radiation detection element 7 in the same manner as the image data read process at the time of radiographic image capturing. At this time, since the charge accumulated in each radiation detection element 7 in the charge accumulation process at the time of acquisition of the correction dark image is a dark charge, each radiation detection element 7 in the image data reading process at the time of acquisition of the correction dark image. Dark image data is read out from.

Note that the correction dark image can be acquired before radiographic image capturing.
It is also possible to repeatedly execute reset processing, charge accumulation processing, and image data readout processing at the time of acquisition of a correction dark image, and adopt the average value of the dark image data obtained each time as formal dark image data. It is.

Then, the control unit 22 uses the image data of the radiation image obtained by the image data reading process at the time of radiographic image capturing and the dark image data obtained by the image data reading process at the time of obtaining the correction dark image to the antenna. The data is transmitted from the device 39 to the external device.
As a result, the external device performs offset correction on the image data of the radiation image based on the dark image data, that is, the offset correction value.
In addition, the external apparatus stores in advance a gain correction value for the radiographic image capturing apparatus 1, and the external apparatus performs gain correction on the image data of the radiographic image based on the gain correction value. It is configured.

In the present embodiment, the external device is configured to perform correction processing such as offset correction and gain correction. However, the present invention is not limited to this, and the radiographic imaging device 1 performs the correction processing. You may comprise so that the image data in which the correction process was performed may be transmitted to an external device.

Here, first, the above-described conventional radiographic imaging apparatus in which the ground terminal 151 of the scanning drive unit 15 and the ground terminal 161 of the reading unit 16 are not directly electrically connected will be described again.

In the radiographic image capturing apparatus, it is difficult to dispose the scanning drive unit 15 and the readout unit 16 closest to each other due to the configuration thereof, and the scanning drive unit 15 and the readout unit 16 are separated from each other as in the present embodiment. Often placed. Therefore, there may be a difference between the impedance between the ground terminal 151 of the scanning drive unit 15 and the ground GND of the power supply unit 41 and the impedance between the ground terminal 161 of the reading unit 16 and the ground GND of the power supply unit 41. Many.
In such a case, in order to make the GND potential of the scanning drive unit 15 and the GND potential of the reading unit 16 the same, the ground terminal 151 of the scanning driving unit 15 and the ground terminal 161 of the reading unit 16 are connected to the radiation imaging apparatus 1. In spite of being connected to the ground level, a GND potential difference due to impedance occurs between the scanning driving means 15 and the reading means 16.

By the way, the GND potential of the scanning drive means 15 (that is, the GND potential of the power supply circuit 15a of the scanning drive means 15) and the GND potential of the reading means 16 (namely, the GND potential of the power supply circuit 16a of the reading means 16) are usually used. As shown in FIG. 13, fluctuation occurs.
When fluctuations occur in the GND potential of the scanning drive means 15 and the GND potential of the reading means 16, the power supply (electric power) from the power supply circuit 15a for the gate scanning line driving section 15b and the power supply circuit for the readout IC 16b are accompanied with the fluctuation. The power source (electric power) from 16a fluctuates, and noise is superimposed on the true image data generated by radiation irradiation.

For example, the above-described lateral noise is generated when the amount of charge accumulated in the parasitic capacitance generated at the intersection of the scanning line 5 and the signal line 6 varies with time. More specifically, electric charges are accumulated in the parasitic capacitance generated at the intersection of the scanning line 5, the signal line 6, and the bias line due to the difference between the voltage of the scanning line 5 and the voltage of the signal line 6, but the lateral noise is The voltage applied to the scanning line 5 is caused by a relative fluctuation with respect to the voltage of the signal line 6, and the amount of charge accumulated in the parasitic capacitance is caused by the time fluctuation due to the relative fluctuation.
Therefore, if the amount of charge accumulated in the parasitic capacitance is constant without time variation, that is, if the voltage applied to the scanning line 5 does not have a relative fluctuation with respect to the voltage of the signal line 6, Pulling noise does not occur.
That is, even if the GND potential of the scanning driving unit 15 and the GND potential of the reading unit 16 fluctuate, these waveforms match and if the GND potential difference between the scanning driving unit 15 and the reading unit 16 does not fluctuate, Fluctuations are offset, the amount of charge accumulated in the parasitic capacitance is constant, and no lateral noise is generated.

However, if the ground terminal 151 of the scanning driving unit 15 and the ground terminal 161 of the reading unit 16 are not electrically connected directly, a GND potential difference caused by impedance, between the scanning driving unit 15 and the reading unit 16, Since a GND potential difference due to current is generated, the scan driving means 15 and the GND potential of the scanning driving means 15 and the GND potential of the reading means 16 are accompanied by fluctuations of the scanning driving means 15 as shown by the hatched area in FIG. A fluctuation in the GND potential difference with the reading means 16 occurs.

Further, for example, in order to remove noise generated in the power supply (power) from the power supply circuit 15a for the gate scanning line driving unit 15b and noise generated in the power supply (power) from the power supply circuit 16a for the readout IC 16b, Even if a filter or the like for removing noise is inserted between the power supply circuit 15a and the gate scanning line driving unit 15b, or between the power supply circuit 16a and the readout IC 16b, the power supply circuit 15a and the power supply circuit are connected with the filter. Although noise generated in 16a can be removed, noise due to fluctuations in the GND potential cannot be removed, so that fluctuations also occur in the GND potential difference between the scanning drive means 15 and the readout means 16.

On the other hand, in the present embodiment, the ground terminal 151 of the scanning driving unit 15 and the ground terminal 161 of the reading unit 16 are electrically directly connected by the connecting unit 50, so that the scanning driving unit 15 and the reading unit 16 are connected. In other words, the GND potential fluctuation waveform of the scanning drive means 15 and the fluctuation waveform of the GND potential fluctuation of the reading means 16 are made to coincide with each other. As a result, it is possible to read out image data on which noise caused by fluctuations in the GND potential difference, specifically noise caused by fluctuations in the voltage applied to the scanning line 5 (such as horizontal noise) is not superimposed. Become.

Therefore, as the connection means 50, the ground potential 151 between the scanning drive means 15 and the ground terminal 161 of the readout means 16 can be prevented to the extent that a GND potential difference can be prevented between the scan drive means 15 and the readout means 16. As long as it can be connected with low impedance, the material, shape, etc. are arbitrary.

Further, not only at the portion where the scanning line 5 and the signal line 6 intersect, but also at the portion where the bias line 9 or the connection line 10 and the signal line 6 intersect, the bias line 9 (or the connection line 10) and the signal line 6 and between them. A capacitor-like structure is formed by the insulating layer. Therefore, noise generated in the bias voltage is converted into charge noise by the parasitic capacitance generated at the intersection of the bias line 9 (or connection 10) and the signal line 6, and the charge noise is converted into the radiation detection element. 7 may be superimposed on the true image data to be read from the image data.
The radiation detection element 7 itself also has a capacitor-like structure in which an i layer 76 as a conversion layer is interposed between the first electrode 74 and the second electrode 78, and a bias voltage is applied to the second electrode 78. Applied. Therefore, the parasitic capacitance generated in the radiation detection element 7 itself having a capacitor-like structure, noise generated in the bias voltage is converted into charge noise, and the charge noise is a true image to be read from the radiation detection element 7. There is also the possibility of being superimposed on the data.

On the other hand, in the present embodiment, the ground terminal 151 of the scanning drive unit 15 and the ground terminal 161 of the readout unit 16 are electrically connected directly by the connection unit 50, and the ground terminal 141 of the bias power supply 14 and the readout unit are connected. 16 ground terminals 161 are configured to be electrically connected directly by the GND line, so that a GND potential difference does not occur between the bias power source 14, the scan driving means 15, and the reading means 16, that is, The waveform of the fluctuation of the GND potential of the bias power supply 14, the waveform of the fluctuation of the GND potential of the scanning drive unit 15, and the waveform of the fluctuation of the GND potential of the reading unit 16 are made to coincide. As a result, the amount of charge accumulated in the parasitic capacitance generated at the intersection of the bias line 9 (or connection 10) and the signal line 6 and the amount of charge accumulated in the parasitic capacitance generated in the radiation detection element 7 itself are constant. Thus, it is possible to read out image data on which noise caused by fluctuations in the GND potential difference, specifically noise caused by fluctuations in the bias voltage, etc. are not superimposed.
Specifically, for example, the ground terminal 141 of the bias power supply 14 is connected to the ground GND of the power supply unit 41 without passing through the ground terminal 161 of the reading unit 16 as in the radiographic imaging apparatus shown in FIG. Even if the ground terminal 151 of the scanning driving means 15 and the ground terminal 161 of the reading means 16 are electrically connected directly by the connecting means 50, the bias power supply 14, the scanning driving means 15 and the reading means are provided. Therefore, a GND potential difference is generated. Therefore, in the present embodiment, the ground terminal 151 of the scanning drive unit 15 and the ground terminal 161 of the reading unit 16 are electrically connected directly by the connecting unit 50, and the ground terminal 141 of the bias power supply 14 and the reading unit 16 are connected. The ground terminal 161 is configured to be electrically connected directly by the GND line, so that a GND potential difference is not generated among the bias power source 14, the scan driving unit 15, and the reading unit 16.

Further, as in the present embodiment, when the ground terminal 151 of the scanning drive unit 15 is connected to the ground GND of the power supply unit 41 via the control unit 22 or the power supply unit 41, the scanning drive unit 15 is controlled. There is a risk that noise may enter from the unit 22 or the power supply unit 41. Similarly, when the ground terminal 161 of the reading unit 16 is connected to the ground GND of the power supply unit 41 via the control unit 22 or the power supply unit 41 as in the present embodiment, the control is performed on the reading unit 16. There is a risk that noise may enter from the unit 22 or the power supply unit 41. Therefore, noise from the control unit 22 and the power supply unit 41 may be superimposed on the true image data to be read from the radiation detection element 7.

On the other hand, in the present embodiment, the noise suppression unit 51 is inserted between the ground terminal 151 of the scan driving unit 15 and the control unit 22 and the power supply unit 41, and the ground terminal 161 of the reading unit 16 and the control unit The noise suppression means 52 is inserted between the power supply section 41 and the power supply section 41 so as to suppress the intrusion of noise from the control section 22 and the power supply section 41 to the scanning drive means 15 and the readout means 16. As a result, it is possible to read image data in which noise superposition from the control unit 22 and the power supply unit 41 is suppressed.

In this case, if noise suppression means 51, 52 that can prevent the intrusion of noise from the control unit 22 or the power supply unit 41 is adopted, image data on which noise from the control unit 22 or the power supply unit 41 is not superimposed is obtained. It becomes possible to read out, which is more preferable.
Therefore, as the noise suppression means 51 and 52, the structure is arbitrary as long as the noise intrusion from the control unit 22 and the power supply unit 41 can be suppressed, and preferably the noise intrusion can be prevented.

In the present embodiment, the bias power supply 14 is connected to the power supply unit 41 via the power supply circuit 16a of the reading unit 16 by wiring, and power is supplied to the bias power supply 14 from the power supply unit 41 via the power supply circuit 16a of the reading unit 16. However, the present invention is not limited to this. For example, the bias power supply 14 is connected to the power supply unit 41 via the power supply circuit 15a of the scanning drive unit 15 by wiring, and the bias power supply 14 is connected. The power from the power supply unit 41 may be supplied via the power supply circuit 15a of the scan driving unit 15, or a power supply circuit for the bias power supply 14 is separately provided, and the bias power supply 14 is provided for the bias power supply 14. The power supply unit 41 is connected to the power supply unit 41 via a wiring, and the bias power supply 14 is supplied with power from the power supply unit 41 via the power supply circuit for the bias power supply 14. It may be sea urchin configuration.

When a power supply circuit for the bias power supply 14 is separately provided, a GND potential difference waveform is not generated between the bias power supply 14, the scanning drive means 15, and the reading means 16, that is, the GND potential fluctuation waveform. And the ground potential of the bias power supply 14 (specifically, for the bias power supply 14) in order to match the fluctuation waveform of the GND potential of the scanning drive means 15 and the fluctuation waveform of the GND potential of the reading means 16. The ground terminal of the power supply circuit) may be electrically connected directly to the ground terminal 151 of the scanning drive unit 15 and / or the ground terminal 161 of the reading unit 16.

In the case where a power supply circuit for the bias power supply 14 is separately provided, in order to suppress the entry of noise from the control unit 22 and the power supply unit 41 to the bias power supply 14 (preferably to prevent the intrusion of noise), A noise suppression unit may be inserted between the ground terminal of the power supply circuit and the control unit 22 and the power supply unit 41.

According to the radiographic imaging apparatus 1 in the first embodiment described above, the ground terminal 151 of the power supply circuit 15a of the scanning drive unit 15 and the ground terminal 161 of the power supply circuit 16a of the reading unit 16 are the same as those of the radiographic imaging apparatus. In addition to being connected to the ground level, the ground terminal 151 of the power supply circuit 15 a of the scanning drive means 15 and the ground terminal 161 of the power supply circuit 16 a of the reading means 16 are electrically connected directly by the connection means 50.

That is, the scanning drive unit 15 and the reading unit 16 are connected with low impedance. Therefore, the waveform of the GND potential fluctuation of the scanning drive unit 15 and the waveform of the GND potential fluctuation of the reading unit 16 coincide with each other, and no GND potential difference is generated between the scanning driving unit 15 and the reading unit 16. Noise due to fluctuations in the GND potential difference between the driving means 15 and the reading means 16, specifically noise (such as lateral pulling noise) caused by fluctuations in the voltage applied to the scanning line 5 occurs. There is no. Therefore, it is possible to read image data on which noise due to fluctuations in the GND potential difference between the scanning drive unit 15 and the reading unit 16 is not superimposed.
As a result, it is possible to always obtain a stable noise reduction effect that is not affected by changes in the operating state, environmental temperature, and the like, and it is possible to always obtain a radiographic image with an appropriate image quality. Therefore, when making a diagnosis using such a radiographic image, it is possible to accurately inconvenience that a doctor or the like overlooks a lesioned part or misidentifies a normal part as a lesioned part, resulting in a misdiagnosis. Can be prevented.

Moreover, according to the radiographic imaging device 1 in the first embodiment described above, the ground terminal 151 of the power supply circuit 15 a of the scanning drive unit 15 is connected to the power supply unit 41 via the control unit 22 and the power supply unit 41. By being electrically connected to the ground GND, it is connected to the ground level of the radiation imaging apparatus 1, and the ground terminal 161 of the power supply circuit 16 a of the reading unit 16 is connected to the power supply unit 41 via the control unit 22 and the power supply unit 41. It is connected to the ground level of the radiation imaging apparatus 1 by being electrically connected to the ground GND of the radiographic imaging apparatus 1 and is inserted between the ground terminal 151 of the power supply circuit 15a of the scanning drive means 15 and the control section 22 and the power supply section 41. The noise suppression means 51 for suppressing the intrusion of noise into the scanning drive means 15 and the power supply circuit 16a of the readout means 16 A terminal 161, is inserted between the control unit 22 and the power supply unit 41, and a suppressing noise suppression means 52 for noise intrusion to the read means 16, a.

That is, the impedance between the scanning drive unit 15 and the control unit 22 and the power supply unit 41 is increased, and the impedance between the reading unit 16 and the control unit 22 and the power supply unit 41 is increased. Accordingly, intrusion of noise from the control unit 22 and the power supply unit 41 to the scanning drive unit 15 and the reading unit 16 is suppressed, and therefore noise from the control unit 22 and the power supply unit 41, specifically, digital noise and current fluctuations. Image data in which superimposition of noise such as noise is suppressed can be read.
As a result, even if noise such as digital noise or noise due to current fluctuation occurs in the control unit 22 or the power supply unit 41, the influence of such noise is reduced, so that a stable noise reduction effect can be obtained. Become.

Further, according to the radiographic imaging apparatus 1 in the first embodiment described above, the bias detector 14 that applies a bias voltage to the radiation detection element 7 via the bias line 9 and the connection 10 is provided. The power supply circuit 16 a is configured to supply power to the bias power supply 14 based on the power supplied from the power supply unit 41.

Therefore, the fluctuation waveform of the GND potential of the bias power supply 14, the fluctuation waveform of the GND potential of the scanning drive means 15, and the fluctuation waveform of the GND potential of the reading means 16 coincide with each other. Since no GND potential difference occurs between the bias power supply 14 and the scanning drive means 15, noise caused by fluctuations in the GND potential difference between the bias power supply 14 and the scanning drive means 15, or the GND potential difference between the bias power supply 14 and the read means 16. It is possible to read out image data on which noise caused by fluctuations, specifically, noises caused by fluctuations in bias voltage and the like are not superimposed.
As a result, it is possible to always obtain a more stable noise reduction effect that is not affected by changes in the operating state or the environmental temperature.

<Modification 1>
Next, Modification 1 of the present embodiment will be described.
In the present embodiment, both the ground terminal 151 of the power supply circuit 15a of the scanning drive means 15 and the ground terminal 161 of the power supply circuit 16a of the readout means 16 are connected to the connection means 50 and the ground of the radiographic imaging apparatus 1 is connected. However, the present invention is not limited to this, and one of the ground terminal 151 and the ground terminal 161 may not be connected to the ground level of the radiation imaging apparatus 1.

Specifically, for example, as shown in FIG. 8, if the ground terminal 161 of the power supply circuit 16 a of the reading unit 16 is connected to the ground level of the radiation imaging apparatus 1, the power supply circuit of the scanning drive unit 15. The ground terminal 151 of 15a may not be connected to the ground level of the radiation image capturing apparatus 1.
In this case, the ground terminal 151 of the power supply circuit 15 a of the scanning drive unit 15 is electrically connected to the ground GND of the power supply unit 41 through the connection unit 50, the ground terminal 161 of the power supply circuit 16 a of the readout unit 16 and the power supply unit 41. By doing so, the radiation image capturing apparatus 1 is connected to the ground level.
In this case, the noise suppression means 52 inserted between the ground terminal 161 of the power supply circuit 16a of the reading means 16 and the control section 22 and the power supply section 41 is connected to the bias power supply 14, the scanning drive means 15, It functions as a noise suppression unit that suppresses noise intrusion into the unit 16.

Alternatively, for example, as shown in FIG. 9, if the ground terminal 151 of the power supply circuit 15 a of the scanning drive unit 15 is connected to the ground level of the radiation image capturing apparatus 1, the ground of the power supply circuit 16 a of the reading unit 16. The terminal 161 may not be connected to the ground level of the radiation image capturing apparatus 1.
In this case, the ground terminal 161 of the power supply circuit 16 a of the reading unit 16 is electrically connected to the ground GND of the power supply unit 41 through the connection unit 50, the ground terminal 151 of the power supply circuit 15 a of the scanning drive unit 15, and the power supply unit 41. By doing so, the radiation image capturing apparatus 1 is connected to the ground level.
Further, in this case, the noise suppression means 51 inserted between the ground terminal 151 of the power supply circuit 15a of the scan driving means 15 and the control section 22 and the power supply section 41 includes the bias power supply 14, the scan drive means 15, It functions as a noise suppression unit that suppresses noise intrusion into the reading unit 16.

In the case of this modification, the same operation and effect as in the case of the first embodiment can be obtained.

<Modification 2>
Next, a second modification of the present embodiment will be described.
In the present embodiment, both the scanning driving unit 15 and the reading unit 16 are configured to be directly connected to the control unit 22. However, the present invention is not limited to this, and at least one of the scanning driving unit 15 and the reading unit 16 is connected via the power supply unit 41. You may comprise so that it may connect with the control part 22. FIG.

Specifically, for example, as shown in FIG. 10, the scanning drive unit 15 is directly connected to the power supply unit 41 and is connected to the control unit 22 via the power supply unit 41, and the reading unit 16 is connected to the power supply unit. 41 may be connected directly to the control unit 22 via the power supply unit 41.

In this case, the input of the control signal from the control unit 22 to the scanning drive unit 15 is performed via the power supply unit 41.
Further, the ground terminal 151 of the power supply circuit 15 a of the scanning drive unit 15 is electrically connected to the ground GND of the power supply unit 41 via the noise suppression unit 51 and the power supply unit 41, so that the ground of the radiographic image capturing apparatus 1 can be obtained. Connected to the level. The noise suppression means 51 is inserted between the ground terminal 151 of the power supply circuit 15 a of the scan driving means 15 and the power supply section 41 to prevent noise from entering the scan drive means 15 from the control section 22 and the power supply section 41. It comes to suppress.

In this case, the control signal from the control unit 22 to the bias power supply 14 and the reading unit 16 and the image data from the reading unit 16 to the control unit 22 are input via the power supply unit 41.
In addition, the ground terminal 161 of the power supply circuit 16a of the reading unit 16 is electrically connected to the ground GND of the power supply unit 41 via the noise suppression unit 52 and the power supply unit 41, so that the ground level of the radiographic image capturing apparatus 1 is reached. It is connected to the. The noise suppression unit 52 is inserted between the power supply unit 41 and the ground terminal 161 of the power supply circuit 16 a of the reading unit 16, and noise from the control unit 22 and the power supply unit 41 with respect to the bias power supply 14 and the reading unit 16. Intrusion is suppressed.

In FIG. 10, both the scanning driving unit 15 and the reading unit 16 are configured to be directly connected to the power supply unit 41 and connected to the control unit 22 via the power supply unit 41. However, the present invention is not limited thereto. Rather, one of the scanning drive means 15 and the reading means 16 is directly connected to the power supply unit 41 and is connected to the control unit 22 via the power supply unit 41, and the other is directly connected to the control unit 22. The power supply unit 41 may be connected via the control unit 22.

[Second Embodiment]
Next, a radiographic image capturing apparatus according to the second embodiment will be described.
The radiographic image capturing apparatus 1 of the second embodiment has the same power supply circuit 15a of the scanning drive means 15 and power supply circuit 16a of the reading means 16 in that the radiographic image capturing of the first embodiment. Different from device 1. Therefore, below, only a different part from 1st Embodiment is demonstrated, and another common part attaches | subjects the same code | symbol and abbreviate | omits description.

Specifically, in the radiographic imaging device 1 of the present embodiment, the scanning drive unit 15 includes the gate scanning line driving unit 15b but does not include the power supply circuit 15a, and the reading unit 16 includes Although the read IC 16b is provided, the power supply circuit 16a is not provided. The bias power supply 14, the gate scanning line driving unit 15b, the readout IC 16b, and the like are housed in the same substrate, and are supplied with power from the power supply circuit 60, which is a common power supply circuit, The control unit 22 is configured to receive an input of a control signal.

That is, the power supply circuit 60 supplies power to each unit constituting the readout IC 16b and the bias power supply 14 based on the power supplied from the power supply unit 41, and via each line L1 to Lx of the scanning line 5. An ON voltage and an OFF voltage applied to the gate electrode 8g of the TFT 8 are configured to be supplied to the gate scanning line driving unit 15b.

The ground terminal 601 of the power supply circuit 60 is connected to the ground level of the radiographic imaging apparatus 1 by being electrically connected to the ground GND of the power supply unit 41 via the control unit 22 and the power supply unit 41, that is, grounding. Has been.
Further, between the ground terminal 601 of the power supply circuit 60 and the control unit 22 and the power supply unit 41, it functions as a noise suppression unit that suppresses intrusion of noise to the bias power supply 14, the scan driving unit 15, and the reading unit 16. Noise suppression means 61 is inserted.

In the present embodiment, as shown in FIG. 11, the gate scanning line driving unit 15 b is connected to the control unit 22 via the power supply circuit 60 by wiring, and is controlled from the control unit 22 via the power supply circuit 60. However, the present invention is not limited to this. If power is supplied from the power supply unit 41 via the power supply circuit 60 to the gate scanning line driving unit 15b, The gate scanning line driving unit 15b may be directly connected to the control unit 22 by wiring so that a control signal is directly input from the control unit 22.

In the present embodiment, as shown in FIG. 11, the readout IC 16 b is connected to the control unit 22 through the power supply circuit 60 by wiring, and a control signal is input from the control unit 22 through the power supply circuit 60. Or the image data is output to the control unit 22 via the power supply circuit 60. However, the present invention is not limited to this, and power is supplied from the power supply unit 41 to the readout IC 16b via the power supply circuit 60. Is connected directly to the control unit 22 by wiring, and the control signal is directly input from the control unit 22 or the image data is directly output to the control unit 22. May be.

In the present embodiment, as shown in FIG. 11, the bias power supply 14 is connected to the control unit 22 via the power supply circuit 60 by wiring, and a control signal is input from the control unit 22 via the power supply circuit 60. However, the present invention is not limited to this, and the bias power supply 14 may be directly connected to the control unit 22 by wiring so that a control signal is directly input from the control unit 22. .

Next, the operation of the radiation image capturing apparatus 1 according to this embodiment will be described.

In the present embodiment, by making the power supply circuit of the scanning drive unit 15 and the power supply circuit of the readout unit 16 common, no GND potential difference is generated between the scan drive unit 15 and the readout unit 16, that is, scan drive. The waveform of the fluctuation of the GND potential of the means 15 and the waveform of the fluctuation of the GND potential of the reading means 16 are made to coincide with each other. As a result, it is possible to read out image data on which noise caused by fluctuations in the GND potential difference, specifically noise caused by fluctuations in the voltage applied to the scanning line 5 (such as horizontal noise) is not superimposed. Become.

Since other points are the same as those shown in the first embodiment, the description thereof is omitted.

According to the radiographic imaging apparatus 1 in the second embodiment described above, the power supply circuit of the scanning drive means 15 and the power supply circuit of the readout means 16 are a common power supply circuit, that is, the power supply circuit 60.

Therefore, the waveform of the GND potential fluctuation of the scanning drive unit 15 and the waveform of the GND potential fluctuation of the reading unit 16 coincide with each other, and no GND potential difference is generated between the scanning driving unit 15 and the reading unit 16. Noise due to fluctuations in the GND potential difference between the driving means 15 and the reading means 16, specifically noise (such as lateral pulling noise) caused by fluctuations in the voltage applied to the scanning line 5 occurs. There is no. Therefore, it is possible to read image data on which noise due to fluctuations in the GND potential difference between the scanning drive unit 15 and the reading unit 16 is not superimposed.
As a result, it is possible to always obtain a stable noise reduction effect that is not affected by changes in the operating state, environmental temperature, and the like, and it is possible to always obtain a radiographic image with an appropriate image quality. Therefore, when making a diagnosis using such a radiographic image, it is possible to accurately inconvenience that a doctor or the like overlooks a lesioned part or misidentifies a normal part as a lesioned part, resulting in a misdiagnosis. Can be prevented.

Further, according to the radiographic imaging device 1 in the second embodiment described above, the ground terminal 601 of the common power supply circuit 60 is connected to the ground GND of the power supply unit 41 via the control unit 22 and the power supply unit 41. By being electrically connected, the radiation imaging apparatus 1 is connected to the ground level, and is inserted between the ground terminal 601 of the common power supply circuit 60, the control unit 22, and the power supply unit 41. And noise suppression means 61 that suppresses the intrusion of noise into the reading means 16.

Accordingly, intrusion of noise from the control unit 22 and the power supply unit 41 to the scanning drive unit 15 and the reading unit 16 is suppressed, and therefore noise from the control unit 22 and the power supply unit 41, specifically, digital noise and current fluctuations. Image data in which superimposition of noise such as noise is suppressed can be read.
As a result, even if noise such as digital noise or noise due to current fluctuation occurs in the control unit 22 or the power supply unit 41, the influence of such noise is reduced, so that a stable noise reduction effect can be obtained. Become.

Needless to say, the present invention is not limited to the above-described embodiment, and can be changed as appropriate.
Moreover, you may apply combining the structure of the above-mentioned embodiment and modification.

It may be used in the field of radiographic imaging (especially in the medical field).

DESCRIPTION OF SYMBOLS 1 Radiographic imaging device 5 Scanning line 6 Signal line 7 Radiation detection element 8 TFT (switch means)
9 Bias line 10 Connection (bias line)
14 Bias power supply 15 Scanning drive means 15a Power supply circuit (scanning drive power supply circuit)
15b Gate scanning line drive unit 16 Readout means 16a Power supply circuit (readout power supply circuit)
16b Read IC (read unit)
22 Control unit 41 Power supply unit 50 Connection unit 51 Noise suppression unit (scanning drive noise suppression unit)
52 Noise suppression means (Reading noise suppression means)
60 Power supply circuit (Common power supply circuit)
61 Noise suppression means 151 Ground terminal (Ground terminal of power supply circuit for scanning drive)
161 Ground terminal (ground terminal of power supply circuit for reading)
601 Ground terminal (common power circuit ground terminal)
GND ground (Power supply ground)
r region P detector

Claims

In a radiographic imaging device that performs radiographic imaging,
A plurality of scanning lines and a plurality of signal lines arranged so as to cross each other, and a plurality of radiation detection elements arranged in a two-dimensional manner in each region partitioned by the plurality of scanning lines and the plurality of signal lines A detection unit comprising:
When each of the radiation detection elements is arranged and connected, the off-state is applied to the connected scanning line, and the on-state is applied when the on-voltage is applied to the connected scanning line. Then, the switch means for accumulating the charge generated in the radiation detection element in the radiation detection element, and releasing the charge from the radiation detection element to the signal line in the ON state,
A gate scanning line driving unit that switches a voltage applied to the scanning line between the on-voltage and the off-voltage, and a scanning driving power supply circuit that supplies the on-voltage and the off-voltage to the gate scanning line driving unit; Scanning drive means comprising:
A readout comprising: a readout unit that reads out the image data from the radiation detection element by converting the electric charges emitted from the radiation detection element into image data; and a readout power supply circuit that supplies power to the readout unit. Means,
A control unit for controlling operations of at least the scanning driving unit and the reading unit;
A power supply unit that supplies power to at least the scanning drive unit, the readout unit, and the control unit;
With
The power supply circuit for scanning drive supplies the on-voltage and the off-voltage to the gate scanning line driving unit based on the power supplied from the power supply unit,
The reading power supply circuit supplies power to the reading unit based on the power supplied from the power supply unit,
A ground terminal of the scanning drive power supply circuit and a ground terminal of the readout power supply circuit are connected to a ground level of the radiographic image capturing apparatus,
The radiographic imaging apparatus further comprises a connection means for electrically directly connecting the ground terminal of the power supply circuit for scanning and the ground terminal of the power supply circuit for readout.
The ground terminal of the power supply circuit for scanning drive is connected to the ground level by electrically connecting with the ground of the power supply unit through at least the power supply unit.
The ground terminal of the power supply circuit for reading is connected to the ground level by being electrically connected to the ground of the power supply unit through at least the power supply unit.
A noise suppression means for scanning drive inserted between the ground terminal of the power supply circuit for scanning drive and at least the power supply unit, and suppressing noise intrusion to the scanning drive means;
Read noise suppression means that is inserted between the ground terminal of the read power supply circuit and at least the power supply unit, and suppresses noise intrusion to the read means;
The radiographic image capturing apparatus according to claim 1, further comprising:
The ground terminal of the power supply circuit for reading is connected to the ground level by electrically connecting to the ground of the power supply unit through at least the power supply unit.
The ground terminal of the power supply circuit for scanning drive is electrically connected to the ground of the power supply section through the connection means, the ground terminal of the power supply section for readout, and the power supply section. Connected to
A noise suppression unit that is inserted between the ground terminal of the power supply circuit for reading and at least the power supply unit, and that suppresses intrusion of noise to the scan driving unit and the reading unit. The radiographic imaging apparatus of item 1.
The ground terminal of the power supply circuit for scanning drive is connected to the ground level by electrically connecting with the ground of the power supply unit through at least the power supply unit.
The ground terminal of the power supply circuit for reading is electrically connected to the ground of the power supply section via the connection means, the ground terminal of the power supply circuit for scanning drive, and the power supply section, so that the ground level Connected to
A noise suppression unit that is inserted between the ground terminal of the scanning drive power supply circuit and at least the power supply unit, and that suppresses noise intrusion into the scan driving unit and the readout unit. The radiographic imaging device according to item 1.
In a radiographic imaging device that performs radiographic imaging,
A plurality of scanning lines and a plurality of signal lines arranged so as to cross each other, and a plurality of radiation detection elements arranged in a two-dimensional manner in each region partitioned by the plurality of scanning lines and the plurality of signal lines A detection unit comprising:
When each of the radiation detection elements is arranged and connected, the off-state is applied to the connected scanning line, and the on-state is applied when the on-voltage is applied to the connected scanning line. Then, the switch means for accumulating the charge generated in the radiation detection element in the radiation detection element, and releasing the charge from the radiation detection element to the signal line in the ON state,
A gate scanning line driving unit that switches a voltage applied to the scanning line between the on-voltage and the off-voltage, and a scanning driving power supply circuit that supplies the on-voltage and the off-voltage to the gate scanning line driving unit; Scanning drive means comprising:
A readout comprising: a readout unit that reads out the image data from the radiation detection element by converting the electric charges emitted from the radiation detection element into image data; and a readout power supply circuit that supplies power to the readout unit. Means,
A control unit for controlling operations of at least the scanning driving unit and the reading unit;
A power supply unit that supplies power to at least the scanning drive unit, the readout unit, and the control unit;
With
The power supply circuit for scanning drive supplies the on-voltage and the off-voltage to the gate scanning line driving unit based on the power supplied from the power supply unit,
The reading power supply circuit supplies power to the reading unit based on the power supplied from the power supply unit,
The scanning drive power supply circuit and the readout power supply circuit are a common power supply circuit,
The radiographic imaging apparatus characterized in that a ground terminal of the common power supply circuit is connected to a ground level of the radiographic imaging apparatus.
The ground terminal of the common power supply circuit is connected to the ground level by electrically connecting to the ground of the power supply unit through at least the power supply unit.
A noise suppression unit that is inserted between the ground terminal of the common power supply circuit and at least the power supply unit, and that suppresses noise intrusion into the scan driving unit and the readout unit. 6. A radiographic imaging apparatus according to item 5.
A bias power source for applying a bias voltage to the radiation detection element via a bias line;
The power supply circuit for scanning or the power supply circuit for readout supplies power to the bias power supply based on the power supplied from the power supply unit. The radiographic imaging apparatus as described in any one of Claims.