WO2011114832A1

WO2011114832A1 - Electron generation method

Info

Publication number: WO2011114832A1
Application number: PCT/JP2011/053422
Authority: WO
Inventors: 浩一畑; 綾介藪下; 知幸岡田
Original assignee: 国立大学法人三重大学; 浜松ホトニクス株式会社
Priority date: 2010-03-15
Filing date: 2011-02-17
Publication date: 2011-09-22
Also published as: JP5742059B2; JPWO2011114832A1

Abstract

The disclosed electron generation method is provided with: a first introduction step for introducing argon to the inside of a housing (10); an evacuation step for evacuating the inside of the housing (10); and an electron discharge step for causing the discharge of an electron beam (E) from liquid lithium (liquid metal cathode (11)) covering the surface of a solid electrode disposed within the housing (10). As a result, the electron generation method that uses liquid lithium as an electron discharge source can stabilize discharge amperage.

Description

Electron generation method

The present invention relates to an electron generation method.

Patent Document 1 describes a charged particle beam generator. The charged particle beam generator includes a divided extraction electrode and an electrode tip that faces the gap in the center of the extraction electrode. A high voltage is applied between each of the extraction electrodes and the tip, thereby controlling the emission direction of the charged particle beam. Liquid metal (lithium) is disposed on the surface of the electrode tip.

Japanese Patent Laid-Open No. 1-289057

Generally, when generating an electron beam, the periphery of the electron emission electrode is evacuated to a vacuum state. However, it is difficult to achieve a complete vacuum, and normally atmospheric components such as nitrogen, water, carbon dioxide, and oxygen remain around the electron emission electrode.

On the other hand, as in the apparatus described in Patent Document 1 described above, a liquid metal electron source, for example, liquid lithium may be used as the electron emission source. However, liquid lithium easily reacts with residual nitrogen even in a vacuum state. When liquid lithium reacts with nitrogen, lithium changes from a liquid phase to a solid phase. As the solidification of lithium progresses, it becomes affected by sputtering due to residual gas molecules, which causes a problem that the amount of current released is not stable.

The present invention has been made in view of such problems, and an object of the present invention is to stabilize the amount of emission current in an electron generation method using liquid lithium as an electron emission source.

An electron generation method according to an embodiment of the present invention includes a first introduction step for introducing argon into a housing, an exhaust step for exhausting the interior of the housing, and an argon-containing atmosphere after being exhausted by the exhaust step. And an electron emission step of emitting electrons from liquid lithium covering the surface of the electrode disposed inside the housing.

In the present inventors' research, by emitting electrons from liquid lithium in an argon-containing atmosphere, the amount of emission current can be remarkably stabilized as compared with the case of emitting electrons in an argon-free atmosphere. found. In the electron generation method, argon is introduced into the housing (first introduction step), and then the interior of the housing is exhausted (exhaust step). Thereby, it is possible to suitably realize an atmosphere containing argon in a substantially vacuum state or a state close thereto. In such an atmosphere, the amount of emission current can be remarkably stabilized by emitting electrons from the liquid lithium covering the surface of the electrode.

The electron generation method further includes a second introduction step for introducing argon into the housing so that the inside of the housing approaches a predetermined pressure, between the exhaust step and the electron emission step. Also good. Thereby, the argon partial pressure inside a housing | casing can be hold | maintained and the amount of electric current discharge | released from liquid lithium can be stabilized further. In this case, the predetermined pressure is preferably 1 × 10 ⁻⁴ Pa or less.

Further, the electron generation method may be characterized in that the first introduction step and the exhaust step are repeated a plurality of times. Thereby, by reducing the atmospheric components such as nitrogen, water, carbon dioxide, and oxygen remaining in the housing, the argon partial pressure can be increased, and the amount of current released from the liquid lithium can be further stabilized. .

In the electron generation method, the housing includes an electron gun chamber that accommodates an electrode, and a second chamber that is partitioned so that electrons pass between the electron gun chamber and the electron gun chamber. In at least one of the first introduction step and the second introduction step, argon may be introduced into the housing from a first argon introduction port provided in the electron gun chamber. Thereby, the argon partial pressure around the electron emission electrode can be increased.

Further, the electron generation method may be characterized in that lithium is disposed on an extension of the central axis of the first argon inlet. Thereby, the argon partial pressure around the electron emission electrode (especially lithium) can be further increased.

Further, in the first introduction step, the electron generation method is configured such that the first argon introduction port and the second argon introduction port provided at a position different from the first argon introduction port are filled with argon inside the casing. It is good also as introduce | transducing. In this case, in the electron generation method, it is preferable to provide the second argon inlet in the second chamber. Thereby, the argon partial pressure can be increased by reducing the atmospheric components such as nitrogen, water, carbon dioxide, and oxygen remaining in the entire interior of the housing.

In the electron generation method, the nitrogen partial pressure and the water pressure in the argon-containing atmosphere in the electron emission step are each 1 × 10 ⁻⁷ Pa or less, more preferably 5 × 10 ⁻⁸ Pa or less. Thereby, the amount of current released from the liquid lithium can be further stabilized.

According to the present invention, the amount of emission current can be stabilized in an electron generation method using liquid lithium as an electron emission source.

FIG. 1 is a diagram showing a configuration of an X-ray inspection apparatus used in an electron generation method according to an embodiment of the present invention. FIG. 2 is a diagram showing an example of a lithium coating method for a liquid metal cathode. FIG. 3A is a longitudinal sectional view of a liquid metal cathode. FIG. 3B shows a state in which an electric field is applied to liquid lithium. FIG. 4 is a flowchart showing a first method among the electron generation methods. FIG. 5 is a flowchart showing a second method among the electron generation methods. FIG. 6 is a flowchart showing a third method among the electron generation methods. FIG. 7 is a flowchart showing a fourth method among the electron generation methods. FIG. 8A shows the case where the inside of the housing is exhausted to an ultra high vacuum of 10 ⁻⁸ Pa and then nitrogen gas and argon gas are continuously introduced so that the pressure in the housing becomes 10 ⁻⁵ Pa. It is a graph which shows the emitted current change of a liquid metal cathode. FIG. 8B shows the liquid metal cathode when the inside of the housing is evacuated to an ultra high vacuum of 10 ⁻⁸ Pa and then argon gas is continuously introduced so that the pressure in the housing becomes 10 ⁻⁴ Pa. It is a graph which shows emission current change. FIG. 9 is obtained by adding graphs G32 and G33 to FIG. Graphs G32 and G33 are graphs showing the results of measuring the time variation of the emission current when electrons are emitted from the liquid metal cathode while the inside of the housing is evacuated to an ultrahigh vacuum (10 ⁻⁸ Pa). is there. FIG. 10 is a diagram showing the analysis results of the residual gas components in the case after the case where the evacuation is performed after purging the inside of the case with argon and the case where the evacuation is performed without purging with the argon. is there. FIG. 11 shows that after the inside of the housing is evacuated to an ultra-high vacuum (10 ⁻⁸ Pa), the internal pressure of the housing is 1 × 10 ⁻⁵ Pa, 1 × 10 ⁻⁶ Pa, and 1 in the second introduction step. ⁷ is a graph showing the results of measuring the time change of the amount of current emitted from a liquid metal cathode when argon is continuously introduced so as to approach each of × 10 ⁻⁷ Pa. FIG. 12 shows the release in the case where the inside of the housing is evacuated to an ultra-high vacuum (10 ⁻⁸ Pa) and the case where argon gas is introduced so that the pressure inside the housing becomes 10 ⁻⁴ Pa. It is a graph which shows the result of having measured the time change of the amount of electric current. FIG. 13 shows that after evacuating the inside of the housing to ultra-high vacuum (10 ⁻⁸ Pa), argon gas is introduced so that the pressure in the housing becomes 10 ⁻⁴ Pa or 10 ⁻³ Pa in the second introduction step. It is a graph which shows the result of having measured the time change of the amount of emitted current when continuing. FIG. 14 is a chart showing the measurement results of nitrogen partial pressure and moisture pressure when the total pressure in the housing is changed in the second introduction step. FIG. 15 is a diagram showing a configuration of an electron microscope that is preferably used in the electron generation method.

Hereinafter, embodiments of an electron generation method according to the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant description is omitted.

FIG. 1 is a diagram illustrating a configuration of an X-ray inspection apparatus 1 including an X-ray generation apparatus 1A that is preferably used in an electron generation method according to an embodiment. An X-ray inspection apparatus 1 shown in FIG. 1 includes a housing 10, a liquid metal cathode 11, an extraction electrode 12, a condenser lens 13, a condenser diaphragm 14, a gate valve 15, a beam alignment coil 16, an objective diaphragm 17, an objective lens 18, The X-ray generator 1A including the target 19 and the window material 20 and the X-ray camera 22 that detects the X-ray image of the sample 21 to be inspected are configured.

The housing 10 accommodates each component of the X-ray generator 1A described above. The housing 10 includes an electron gun chamber (first chamber) 10a, an intermediate chamber 10b, and an electron optical system chamber (second chamber) 10c. The electron gun chamber 10a, the intermediate chamber 10b, and the electron optical system chamber 10c are partitioned by boundary walls except for an opening serving as a passage path for the electron beam E. The electron gun chamber 10a accommodates a liquid metal cathode 11, an extraction electrode 12, and a condenser lens 13 of the electron gun. The intermediate chamber 10b is disposed between the electron gun chamber 10a and the electron optical system chamber 10c. An opening is formed in the boundary wall between the electron gun chamber 10a and the intermediate chamber 10b, and a capacitor diaphragm 14 is disposed in the opening. An opening is formed in the boundary wall between the intermediate chamber 10b and the electron optical system chamber 10c, and a gate valve 15 is disposed in the opening. That is, the electron optical system chamber 10c is partitioned from the electron gun chamber 10a by the boundary wall so that the electron beam E passes through the condenser aperture 14, the intermediate chamber 10b, and the gate valve 15. This gate valve 15 is opened when electrons are generated, and is closed during maintenance such as member replacement, so that the atmosphere of the room where maintenance or the like is not performed can be maintained. The electron optical system chamber 10c accommodates a beam alignment coil 16, an objective diaphragm 17, and an objective lens 18. An opening is formed in a boundary wall between the inspection chamber 10d (a surface facing the inspection chamber 10d in the housing 10), and a window member 20 that holds the target 19 is disposed so as to close the opening. Has been. The target 19 is made of tungsten, and the window member 20 is made of beryllium.

The X-ray camera 22 is disposed so as to face the X-ray emission part (window member 20) of the X-ray generator 1A. The sample 21 to be inspected is disposed between the window member 20 and the X-ray camera 22.

The housing 10 including the electron gun chamber 10a, the intermediate chamber 10b, and the electron optical system chamber 10c constitutes a vacuum container with improved airtightness. The side wall of the electron gun chamber 10a is provided with an exhaust port 10f for evacuation and an argon inlet (first argon inlet) 10g for supplying argon gas to the electron gun chamber 10a. An exhaust pipe 23 is attached to the exhaust port 10f, and an introduction pipe 24 is attached to the argon inlet 10g. Here, the position of the argon inlet 10g in the electron emission direction (that is, the central axis direction of the electron beam E) in the electron gun chamber 10a is the position of the liquid metal cathode 11 (especially lithium described later) in the electron emission direction. It is preferable that they substantially coincide with each other. That is, it is preferable that the introduction tube 24 and the liquid metal cathode 11 are arranged so that the liquid metal cathode 11 is positioned on an extension of the center line of the argon inlet 10g.

The side wall of the electron optical system chamber 10c is provided with an exhaust port 10h for vacuum exhaust and an argon inlet (second argon inlet) 10i for supplying argon gas to the electron optical system chamber 10c. It has been. Thus, the electron optical system chamber 10c of this embodiment has the argon inlet 10i provided in a position different from the argon inlet 10g. An exhaust pipe 25 is attached to the exhaust port 10h, and an introduction pipe 26 is attached to the argon inlet 10i. An exhaust pump is connected to the ends of the

exhaust pipes

23 and 25. The introduction pipe 24 is connected to an argon gas supply source 27 via a valve 28, and the introduction pipe 26 is connected to the argon gas supply source 27 via a valve 29.

The liquid metal cathode 11 is formed by depositing lithium on the surface of the tip of a solid electrode (a needle-like member made of tungsten). A high voltage is applied to the solid electrode from the outside of the housing 10. In addition, lithium is melted into a liquid state due to overheating of the solid electrode when electrons are generated. The liquid metal cathode 11 emits an electron beam E from liquid lithium in a predetermined direction. This predetermined direction coincides with the arrangement direction of the electron gun chamber 10a, the intermediate chamber 10b, the electron optical system chamber 10c, and the inspection chamber 10d.

The extraction electrode 12 and the condenser lens 13 are arranged side by side in the emission direction of the electron beam E with respect to the liquid metal cathode 11. The extraction electrode 12 is set to a predetermined potential, and the electron beam E is extracted from the liquid metal cathode 11 by the potential difference between the extraction electrode 12 and the liquid metal cathode 11. The spread of the electron beam E is focused by the condenser lens 13, and then the electron beam E passes through the condenser aperture 14 and the gate valve 15.

The beam alignment coil 16, the objective diaphragm 17, and the objective lens 18 are arranged in this order along the emission direction of the electron beam E inside the electron optical system chamber 10c. The beam alignment coil 16 is a deflection coil for performing axial alignment of the electron beam E. The objective diaphragm 17 blocks the electron beam E that is not necessary for image formation. The objective lens 18 focuses the electron beam E toward the target 19.

The window member 20 is made of plate-like beryllium having excellent X-ray transmittance, and hermetically seals the opening of the boundary wall between the electron optical system chamber 10c and the inspection chamber 10d. A target 19 made of tungsten for converting electrons into X-rays is formed in a film shape on the surface of the window material 20 facing the liquid metal cathode 11. The target 19 receives the electron beam E and generates an X-ray Xr. The X-ray Xr is taken out into the atmosphere through the window member 20, and is emitted toward the examination room 10d.

In the examination room 10d, the X-ray camera 22 is arranged so that its imaging surface faces the back surface of the window material 20 (the surface opposite to the surface facing the liquid metal cathode 11). The sample 21 to be inspected is disposed between the window member 20 and the X-ray camera 22. The X-ray Xr emitted from the target 19 passes through the inspection sample 21 to become an X-ray image and enters the X-ray camera 22.

Here, the configuration of the liquid metal cathode 11 will be described in detail. FIG. 2 is a diagram showing an example of a lithium coating method (supply method) for the liquid metal cathode 11. As shown in FIG. 2, a solid electrode (a needle-like member made of tungsten) 11 a of the liquid metal cathode 11 is fixed to a bent portion of a bent metal wire, and both ends of the metal wire and an insulating member 35 are interposed. The cathode assembly 33 is formed by electrically connecting the two

electrode rods

30a and 30b that are separated from each other. The

electrode rods

30a and 30b are electrically connected to the negative electrode of the high-voltage power supply 31 through a direct current source. On the other hand, a vapor deposition boat 32 is disposed in the vicinity of the solid electrode 11a. Lithium is disposed inside the vapor deposition boat 32. Lithium vaporized from the vapor deposition boat is deposited on the surface of the solid electrode 11a, and the surface of the liquid metal cathode 11 is covered with lithium.

FIG. 3A is a longitudinal sectional view of the liquid metal cathode 11. As shown in FIG. 3A, the liquid metal cathode 11 includes a solid electrode 11a and lithium 11b. The lithium 11b is deposited in a film shape on the surface of the solid electrode 11a and covers the solid electrode 11a. When the X-ray generator 1A is used, the liquid metal cathode 11 is heated by energization to a melting point of lithium of 180.5 ° C. or higher to melt the lithium 11b. When a potential difference is generated between the molten lithium 11b and the extraction electrode 12 (FIG. 1) by applying a negative voltage to the molten lithium 11b, the shape of the liquid lithium 11b is expressed by the following surface tension (1). When the voltage condition (threshold voltage) in which S and the electric field stress F expressed by Equation (2) are balanced, the shape changes to a conical shape called a tailor cone with an apex angle of 98.6 °. FIG. 3B shows the direction of the surface tension S and the electric field stress F, and the tailor cone 11c generated thereby.

In addition, the supply method of the lithium 11b to the solid electrode 11a is not limited to the method described above. For example, a method in which a lithium-impregnated material is provided in the electron gun chamber 10a, or a lithium and lithium compound reservoir is provided in the electron gun chamber 10a.

An electron generation method using the X-ray generator 1A described above will be described. There are four variations in this electron generation method, each of which will be described in turn.

(First method)
FIG. 4 is a flowchart showing a first method among the electron generation methods according to the present embodiment. As shown in FIG. 4, in this method, argon gas is first introduced into the housing 10 (first introduction step S11). In the present embodiment, in the first introduction step S11, the

valves

28 and 29 shown in FIG. 1 are opened, and the electron gun chamber 10a and the electron optical system chamber 10c from the argon gas supply source 27 through the

argon introduction ports

10g and 10i. Argon gas is introduced into the. Thereby, the inside of the housing 10 (the electron gun chamber 10a, the intermediate chamber 10b, and the electron optical system chamber 10c) is purged with argon gas.

Subsequently, the

valves

28 and 29 are closed and the housing 10 is evacuated (evacuation step S12). In the present embodiment, in the exhaust step S12, the inside of the housing 10 is exhausted from the two

exhaust ports

10f and 10h. Then, the valve 28 is opened, and argon gas is again introduced into the housing 10 from the argon inlet 10g (first introduction step S13). In this step S13, it is preferable to introduce argon gas so that the pressure value inside the housing 10 approaches 0.09 MPa near atmospheric pressure. Thereafter, the exhaust step S12 and the first introduction step S13 are performed until the partial pressure of water and nitrogen inside the housing 10 does not decrease, that is, as much as possible, to reduce the partial pressure of water and nitrogen inside the housing 10 as much as possible. Repeat a plurality of times (step S14).

When the partial pressures of water and nitrogen inside the housing 10 are hardly lowered, the housing 10 is evacuated (evacuation step S15). Then, the argon gas is continuously introduced into the housing 10 so that the inside of the housing 10 approaches a predetermined pressure (second introduction step S16). At that time, by performing evacuation at the same time, a more appropriate argon partial pressure can be maintained. In the present embodiment, in the second introduction step S16, the valve 28 is opened while evacuating from the exhaust pipe 23 via the exhaust port 10f shown in FIG. Then, argon gas is continuously introduced into the electron gun chamber 10a.

Then, the surface of the solid electrode 11a is covered with lithium 11b under the argon-containing atmosphere in the second introduction step S16 (covering step S17). As the covering method at this time, for example, the method described with reference to FIG. 2 is suitable. Thereafter, a predetermined voltage is applied to the liquid metal cathode 11 and the extraction electrode 12, and the electron beam E is emitted from the liquid lithium 11b (electron emission step S18). In addition, in the electron emission step S18, an appropriate atmosphere is maintained by continuously performing the second introduction step S16, but in addition, a covering step S17 for supplementing consumed lithium is appropriately performed, Continuous electron emission in a more preferable state is possible.

(Second method)
FIG. 5 is a flowchart showing a second method of the electron generation method according to the present embodiment. As shown in FIG. 5, first, argon gas is introduced into the housing 10 (first introduction step S21). In this first introduction step S21, the

valves

28 and 29 shown in FIG. 1 are opened, and argon gas is introduced from the argon gas supply source 27 into the electron gun chamber 10a and the electron optical system chamber 10c through the

argon introduction ports

10g and 10i. To do. Thereby, the inside of the housing | casing 10 is purged with argon gas.

Subsequently, the

valves

28 and 29 are closed, and the casing 10 is evacuated (evacuation step S22). In this exhaust step S22, the inside of the housing 10 is exhausted from the two

exhaust ports

10f and 10h. Then, the argon gas is continuously introduced into the housing 10 so that the inside of the housing 10 approaches a predetermined pressure (second introduction step S23). At that time, by performing evacuation at the same time, a more appropriate argon partial pressure can be maintained. In the second introduction step S23, the valve 28 is opened while evacuating from the exhaust pipe 23 through the exhaust port 10f shown in FIG. 1, and the electron gun chamber is opened from the argon gas supply source 27 through the argon introduction port 10g. Continue to introduce argon gas into 10a.

Then, the surface of the solid electrode 11a is covered with lithium 11b under the argon-containing atmosphere in the second introduction step S23 (covering step S24). As the covering method at this time, for example, the method described with reference to FIG. 2 is suitable. Thereafter, a predetermined voltage is applied to the liquid metal cathode 11 and the extraction electrode 12, and the electron beam E is emitted from the liquid lithium 11b (electron emission step S25). In addition, in the electron emission step S25, an appropriate atmosphere is maintained by continuously performing the second introduction step S23, but in addition to that, by appropriately performing the covering step S24 for supplementing the consumed lithium, Continuous electron emission in a more preferable state is possible.

(Third method)
FIG. 6 is a flowchart showing a third method of the electron generation method according to the present embodiment. As shown in FIG. 6, first, argon gas is introduced into the housing 10 (first introduction step S31). In the first introduction step S31, the

valves

argon introduction ports

Subsequently, the

valves

28 and 29 are closed and the inside of the housing 10 is evacuated (exhaust step S32). In this exhaust step S32, the inside of the housing 10 is exhausted from the two

exhaust ports

10f and 10h. Then, the valve 28 is opened, and argon gas is again introduced into the housing 10 from the argon inlet 10g (first introduction step S33). In this step S33, it is preferable to introduce argon gas so that the pressure value inside the housing 10 approaches 0.09 MPa near atmospheric pressure. Thereafter, the exhaust step S32 and the first introduction step S33 are performed until the partial pressure of water and nitrogen inside the housing 10 does not decrease, that is, as much as possible, to reduce the partial pressure of water and nitrogen inside the housing 10 as much as possible. Repeat a plurality of times (step S34).

When the partial pressures of water and nitrogen inside the housing 10 are hardly lowered, the housing 10 is evacuated (evacuation step S35). Then, the surface of the solid electrode 11a is covered with lithium 11b under the argon-containing atmosphere after being evacuated in the evacuation step S35 (covering step S36). As the covering method at this time, for example, the method described with reference to FIG. 2 is suitable. Thereafter, a predetermined voltage is applied to the liquid metal cathode 11 and the extraction electrode 12, and the electron beam E is emitted from the liquid lithium 11b (electron emission step S37).

(Fourth method)
FIG. 7 is a flowchart showing a fourth method of the electron generation method according to the present embodiment. As shown in FIG. 7, first, argon gas is introduced into the housing 10 (first introduction step S41). In the first introduction step S41, the

valves

argon introduction ports

Subsequently, the

valves

28 and 29 are closed and the housing 10 is evacuated (evacuation step S42). In this exhaust step S42, the inside of the housing 10 is exhausted from the two

exhaust ports

10f and 10h. Then, the surface of the solid electrode 11a is covered with lithium 11b under the argon-containing atmosphere after being evacuated in the evacuation step S42 (covering step S43). As the covering method at this time, for example, the method described with reference to FIG. 2 is suitable. Thereafter, a predetermined voltage is applied to the liquid metal cathode 11 and the extraction electrode 12, and the electron beam E is emitted from the liquid lithium 11b (electron emission step S44).

The effects of the electron generation method according to the present embodiment described above will be described. FIG. 8A shows a case where argon gas is continuously introduced so that the pressure in the housing 10 becomes 10 ⁻⁵ Pa after the inside of the housing 10 is evacuated to an ultra-high vacuum (10 ⁻⁸ Pa). (Graph G11), and time of the amount of current released from the liquid metal cathode 11 in each case where nitrogen gas is continuously introduced so that the pressure in the housing 10 becomes 10 ⁻⁵ Pa (graph G12) It is a graph which shows the result of having measured change. FIG. 8B shows that after the inside of the housing 10 is evacuated to an ultra-high vacuum (10 ⁻⁸ Pa), the argon gas is continuously introduced so that the pressure in the housing 10 becomes 10 ⁻⁴ Pa. 6 is a graph showing a temporal change in the amount of current emitted from the liquid metal cathode 11 in the case of In FIG. 8, the vertical axis indicates the amount of emission current (μA), and the horizontal axis indicates time (seconds).

As shown in FIG. 8A, when the argon gas is introduced (graph G11), the amount of emission current is maintained at a constant value over a longer period of time than when the nitrogen gas is introduced (graph G12). It can be seen that it is stable. Further, even though the liquid metal cathode 11 is a field emission cathode, the liquid metal cathode 11 operates properly even under a relatively high pressure such as 10 ⁻⁵ Pa. Further, in the case of a conventional field emission cathode, the operation becomes unstable under a high pressure of 10 ⁻⁴ Pa, and the possibility of causing discharge by gas adsorption or sputtering is very high. In contrast, when the inside of the casing 10 is exhausted to an ultrahigh vacuum of 10 ⁻⁸ Pa, and argon gas is continuously introduced so that the pressure in the casing 10 becomes a higher pressure of 10 ⁻⁴ Pa. Even if it exists, as FIG.8 (b) shows, the liquid metal cathode 11 operate | moves very stably.

FIG. 9 is obtained by adding graphs G32 and G33 to the graphs G11 and G12 shown in FIG. Graphs G32 and G33 show the results of measuring the time variation of the emission current amount when electrons are emitted from the liquid metal cathode 11 while the inside of the housing 10 is exhausted to an ultrahigh vacuum (10 ⁻⁸ Pa). It is a graph. As shown in FIG. 9, when argon gas is introduced (graph G11), even when the inside of the housing 10 is at a relatively high pressure such as 10 ⁻⁵ Pa, the emission current amount is equivalent to that under an ultra-high vacuum. It can be seen that it can be stabilized.

FIG. 10 shows a case where vacuum evacuation is performed without purging with argon (graph G21, solid line), and a case where vacuum evacuation is performed after the inside of the casing 10 is purged with argon (graph G22, broken line). It is a figure which shows the analysis result of the residual gas component in the housing | casing 10. In FIG. 10, the vertical axis represents ion current (nA), and the horizontal axis represents mass number (amu: atomic mass unit).

In the case where the atmosphere is once introduced into the housing 10 and then evacuated again, the inside of the housing 10 is purged with argon gas and then evacuated (graph G22), and then evacuated as it is. Compared with the case (graph G21), it can be seen from FIG. 10 that argon gas is contained and residual gas components such as water and nitrogen gas are reduced. Thus, by containing the argon gas and reducing the residual gas component, the stability of the liquid metal cathode 11 can be improved and the life of the liquid metal cathode 11 can be extended.

As described above, in the inventors' research, by emitting the electron beam E from the liquid lithium 11b under an argon-containing atmosphere, compared with the case where the electron beam is emitted under an argon-free atmosphere, It was found that the amount of emission current was significantly stabilized. In the first to fourth methods described above, argon is introduced into the housing 10 and then the interior of the housing 10 is exhausted. Thereby, it is possible to suitably realize an atmosphere containing argon in a substantially vacuum state or a state close thereto. Then, by emitting the electron beam E from the liquid lithium 11b covering the solid electrode 11a in such an atmosphere, the amount of emission current can be remarkably stabilized. In any method, the solid electrode 11a is coated with lithium immediately before electron emission, and is most preferable. However, it is performed at another stage as long as it is evacuated or replaced with argon. May be.

Further, like the first and second methods described above, the electron generation method is a second method in which argon is introduced so that the inside of the housing 10 approaches a predetermined pressure after the inside of the housing 10 is evacuated. It is preferable to provide an introduction step. Here, FIG. 11, after evacuating the inside of the housing 10 to the super-high vacuum ⁽¹⁰ -8 Pa), the internal pressure of the housing 10 in the second introduction step is ^{1 × 10 -5 Pa, 1 ×} 10 - It is a graph which shows the result of having measured the time change of the amount of electric current discharge | released from the liquid metal cathode 11, when it introduce | transduces argon so that each may approach ⁶ Pa and ^1x10 <^-7> Pa. By providing the second introduction step, the argon partial pressure inside the housing 10 can be maintained. Therefore, as shown in FIG. 11 and FIGS. 8 (a) and 8 (b), from the lithium 11b. The amount of current discharged can be further stabilized. In FIG. 11, the graphs change vertically with a certain period because the consumed lithium 11 b is periodically supplemented.

Further, a graph G41 shown in FIG. 12 shows a current discharged from the liquid metal cathode 11 when the X-ray generator 1A is operated after the inside of the housing 10 is evacuated to an ultrahigh vacuum (10 ⁻⁸ Pa). It is a graph which shows the result of having measured the time change of quantity. In FIG. 12, the vertical axis indicates the amount of emission current (μA), and the horizontal axis indicates time (seconds). As described above, even when the inside of the housing 10 is exhausted to an ultrahigh vacuum (10 ⁻⁸ Pa), a large amount of gas such as nitrogen is released from the electrode or the like with which the electrons collide, as shown in the graph G41. In some cases, the amount of emission current becomes unstable. However, even under such a situation, when the argon gas was introduced so that the pressure inside the housing 10 was 10 ⁻⁴ Pa, the amount of emission current was stabilized as shown in the graph G42 of FIG. . That is, the electron generation method of the present embodiment can further stabilize the amount of current released from the lithium 11b by including the second introduction step.

Note that a preferable range of the argon partial pressure inside the housing 10 is 1 × 10 ⁻⁷ Pa or more and 1 × 10 ⁻⁴ Pa or less. However, if the partial pressure of water and nitrogen gas contained in the introduced argon gas is 1 × 10 ⁻⁸ Pa or less, the argon partial pressure may be 1 × 10 ⁻³ Pa or less.

FIG. 13 shows that after the inside of the housing 10 is evacuated to ultra-high vacuum (10 ⁻⁸ Pa), argon gas is continuously introduced so that the pressure in the housing 10 becomes 10 ⁻⁴ Pa in the second introduction step. Current (graph G51) and the amount of current released from the liquid metal cathode 11 in each case of continuing to introduce argon gas so that the pressure in the housing 10 becomes 10 ⁻³ Pa (graph G52) It is a graph which shows the result of having measured the time change of. In FIG. 13, the vertical axis represents the amount of emission current (μA), and the horizontal axis represents time (seconds).

As shown in FIG. 13, when the argon gas is continuously introduced so that the pressure in the housing 10 becomes 10 ⁻⁴ Pa (graph G51), the pressure in the housing 10 becomes 10 ⁻³ Pa. It can be seen that, compared with the case where the argon gas is continuously introduced (graph G52), the amount of emission current is maintained at a constant value over a long period of time. From this, it became clear that the amount of current released from the lithium 11b can be further stabilized by introducing argon gas so that the pressure in the housing 10 becomes 10 ⁻⁴ Pa or less.

Further, the inventor continued to introduce argon gas so that the inside of the casing 10 has a predetermined total pressure in order to investigate the influence of water and nitrogen gas contained in the casing 10. When the total pressure in the case 10 is 1 × 10 ⁻⁷ Pa, 1 × 10 ⁻⁶ Pa, 1 × 10 ⁻⁵ Pa, 1 × 10 ⁻⁴ Pa, and 1 × 10 ⁻³ Pa, respectively. Nitrogen partial pressure and water pressure were measured. FIG. 14 is a chart showing the results.

As shown in FIG. 14, when argon gas is introduced so that the pressure in the housing 10 becomes 10 ⁻⁵ Pa, each partial pressure of water and nitrogen gas is less than that in the case of 10 ⁻⁶ Pa or less. It can be seen that it has increased. This is because when argon gas is introduced into the housing 10, nitrogen gas and moisture that are active against liquid lithium are also introduced at the same time. As shown in FIG. 13, when the argon gas is continuously introduced so that the pressure in the housing 10 becomes 10 ⁻⁴ Pa or less, the amount of emission current is stable, and the water at this time and since the partial pressure of nitrogen gas is less than 1 × 10 -7 ^Pa, respectively, if the partial pressures of water and nitrogen gas 1 × 10 -7 ^Pa or less, a stable amount of current emitted from the lithium 11b It is thought that it can be made. Further, as shown in the graph G11 of FIG. 8A, if the argon gas is continuously introduced so that the pressure in the housing 10 becomes 10 ⁻⁵ Pa or less, the emission current amount is further stabilized. and, since the partial pressures of water and nitrogen gas at this time is less than 5 × 10 -8 ^Pa, respectively, if the partial pressures of water and nitrogen gas 5 × 10 -8 ^Pa or less, emitted from lithium 11b It is believed that the amount of current that is generated can be further stabilized.

Incidentally, as shown in the graph G52 of FIG. 13, when the pressure in the housing 10 is 10 ⁻³ Pa, the discharge current amount is not stable. The partial pressures of water and nitrogen gas are shown in FIG. This is probably due to the large value as shown.

In addition, as in the first and third methods described above, the electron generation method includes a first introduction step for introducing argon into the housing 10 and an exhaust step for exhausting the inside of the housing 10 a plurality of times. It is preferable to repeat. As a result, by reducing the atmospheric components such as nitrogen, water, carbon dioxide, and oxygen remaining inside the housing 10, the argon partial pressure can be increased, and the solidification of the lithium 11b can be effectively suppressed. it can.

Further, as in the present embodiment, the housing 10 includes an electron gun chamber 10a that houses the liquid metal cathode 11, and an electron optical system chamber 10c that is partitioned so that electrons pass between the electron gun chamber 10a. In the second introduction step of the first and second methods, it is preferable to introduce argon into the housing 10 from the argon introduction port 10g provided in the electron gun chamber 10a. Thereby, the argon partial pressure around the liquid metal cathode 11 can be increased. Further, in the present embodiment, the center line of the argon inlet 10g is also the center line of the inlet tube 24, so that the argon gas flow to the argon inlet 10g is not disturbed, and the argon gas can be liquefied more smoothly. It can be led around the metal cathode 11. In the first introduction step of the first to fourth methods, the same effect as described above can be obtained by introducing argon into the housing 10 from the argon introduction port 10g.

In the present embodiment, lithium 11b is used for the liquid metal cathode 11, but lithium is extremely useful as an electron emission source as compared with other metals such as gallium. The reason is as follows. Lithium has better wettability with tungsten constituting the base (solid electrode) and lower surface tension than gallium or the like, and thus can be formed into a thinner film. Accordingly, the amount of liquid lithium required to form the tailor cone 11c shown in FIG. 3B can be reduced, and the geometric dimension of the tailor cone 11c can be reduced, so that DC operation is possible. . In contrast, gallium has poor wettability with tungsten and has a high surface tension. Therefore, the size of the tailor cone 11c becomes large, causing electric discharge to become inoperable, or even if it operates, it can operate only in a large current pulse mode.

In addition, when the electron generation method is used for an X-ray source, since an electron emission cathode having a large emission current is required, the work function of the electron emission cathode is preferably low. The work function of gallium is 4.1 eV, whereas the work function of lithium is as low as 2.4 eV. Therefore, by using lithium 11b for the liquid metal cathode 11, a large emission current (for example, a large current in DC operation) can be realized.

Further, in this embodiment, argon gas is used as the gas introduced into the housing 10. However, since argon has a larger atomic radius and mass than, for example, helium and neon, the collision cross section and momentum are large. The ability to exhaust nitrogen is excellent. In addition, the dielectric strength of argon is higher than other rare gases. Therefore, in an electron source using lithium, in which it is important to lower the partial pressure of nitrogen, argon gas is suitable for obtaining a high output more stably.

FIG. 15 is a diagram showing a configuration of the electron microscope 2 that is preferably used in the electron generation method described above. The electron beam generator 2A provided in the electron microscope 2 shown in FIG. 15 and the X-ray generator 1A shown in FIG. That is, the housing 40 included in the electron beam generator 2A includes an electron gun chamber (first chamber) 40a, an intermediate chamber 40b, and a sample chamber (second chamber) 40c. The electron gun chamber 40a accommodates the liquid metal cathode 11, the extraction electrode 12, and the condenser lens 13 of the electron gun. The intermediate chamber 40b is disposed between the electron gun chamber 40a and the sample chamber 40c. An opening is formed in the boundary wall between the electron gun chamber 40a and the intermediate chamber 40b, and the capacitor diaphragm 14 is disposed in the opening. An opening is formed in the boundary wall between the intermediate chamber 40b and the sample chamber 40c, and a gate valve 15 is disposed in the opening. That is, the sample chamber 40c is partitioned from the electron gun chamber 40a by the boundary wall so that the electron beam E passes through the condenser aperture 14, the intermediate chamber 40b, and the gate valve 15. Similar to the electron optical system chamber 10c shown in FIG. 1, the sample chamber 40c accommodates the beam alignment coil 16, the objective diaphragm 17, and the objective lens 18. In addition to these, a sample stage 41, a secondary electron detector 42, and an X-ray detector 43 are installed in the sample chamber 40c. The sample table 41 is installed on the central axis of the electron beam E, and the secondary electron detector 42 and the X-ray detector 43 are installed toward the sample table 41. The objective lens 18 focuses the electron beam E toward the sample stage 41.

The electron gun chamber 40a, the intermediate chamber 40b, and the sample chamber 40c constitute a vacuum container 40d with improved airtightness. The side wall of the electron gun chamber 40a is provided with an exhaust port 40f for evacuating and an argon inlet (first argon inlet) 40g for supplying argon gas to the electron gun chamber 40a. An exhaust pipe 23 is attached to the exhaust port 40f, and an introduction pipe 24 is attached to the argon inlet 40g. The position of the argon inlet 40g in the electron emission direction in the electron gun chamber 40a is preferably substantially coincident with the position of the liquid metal cathode 11 in the electron emission direction. That is, it is preferable that the introduction tube 24 and the liquid metal cathode 11 are arranged so that the liquid metal cathode 11 is positioned on an extension of the central axis of the argon introduction port 40g (introduction tube 24).

Further, an exhaust port 40h for vacuum exhaust and an argon inlet (second argon inlet) 40i for supplying argon gas to the sample chamber 40c are provided on the side wall of the sample chamber 40c. Thus, the sample chamber 40c has an argon inlet 40i provided at a position different from the argon inlet 40g. An exhaust pipe 25 is attached to the exhaust port 40h, and an introduction pipe 26 is attached to the argon introduction port 40i. An exhaust pump is connected to the ends of the

exhaust pipes

The electron generation method described above can be suitably used in the electron microscope 2 having such a configuration. That is, an argon-containing atmosphere can be suitably realized by introducing argon into the housing 40 (vacuum container 40d) and then exhausting the interior of the vacuum container 40d. Then, by emitting the electron beam E from the lithium of the liquid metal cathode 11 in such an atmosphere, the amount of emission current can be remarkably stabilized.

The electron generation method of the present invention can be used for non-destructive inspection by X-rays, for example. In a semiconductor device manufacturing process that requires non-destructive inspection by X-rays, circuit patterns having a line width of several tens of nanometers are mass-produced. In addition, if the resolution of the test reaches several nanometers to several tens of nanometers, the characteristic structures and chemical bonding states of various advanced materials used in nanotechnology, or protein distribution inside biological cells can be directly observed. it can.

An X-ray source with nano-order resolution requires an electron source capable of realizing a high radiation angle current density and a minute source size. According to an electron source using a tailor cone made of liquid lithium, it is possible to realize a radiation angle current density two orders of magnitude higher than that of a ZrO / W cathode known as a high-brightness cathode. In addition, it is possible to obtain a current value of several hundred microamperes necessary for taking a bright X-ray image with a nano-order electron source size. From the above, the electron generation method using liquid lithium as the liquid metal cathode is useful for improving the resolution of the X-ray source to the nanometer size.

DESCRIPTION OF SYMBOLS 1 ... X-ray inspection apparatus, 1A ... X-ray generator, 2 ... Electron microscope, 2A ... Electron beam generator, 10 ... Case, 10a ... Electron gun room, 10b ... Intermediate room, 10c ... Electron optical system room, 10d ... Examination room, 10f, 10h ... exhaust port, 10g ... (first) argon inlet, 10i ... (second) argon inlet, 11 ... liquid metal cathode, 11a ... solid electrode, 11b ... lithium, 11c ... Taylor cone, 12 ... extraction electrode, 13 ... condenser lens, 14 ... condenser aperture, 15 ... gate valve, 16 ... beam alignment coil, 17 ... objective diaphragm, 18 ... objective lens, 19 ... target, 20 ... beryllium window material, 21 ... inspection sample, 22 ... X-ray camera, 23,25 ... exhaust pipe, 24,26 ... introduction pipe, 27 ... argon gas supply source, 28,29 ... valve, 41 ... sample stage, 42 ... secondary battery Detector, 43 ... X-ray detector, E ... electron beam, F ... field stress, S ... surface tension.

Claims

A first introduction step of introducing argon into the housing;
An exhaust step for exhausting the interior of the housing;
An electron emission step for emitting electrons from the liquid lithium covering the surface of the electrode disposed inside the housing under an argon-containing atmosphere after being exhausted by the exhaust step, Electron generation method.
A second introduction step of introducing argon into the housing so that the inside of the housing approaches a predetermined pressure is further provided between the exhausting step and the electron emitting step. Item 2. The method for generating electrons according to Item 1.
3. The electron generating method according to claim 2, wherein the predetermined pressure is 1 × 10 −4 Pa or less.
3. The electron generation method according to claim 1, wherein the first introduction step and the exhaust step are repeated a plurality of times.
The housing includes an electron gun chamber that houses the electrode, and a second chamber that is partitioned so that electrons pass between the electron gun chamber and the electron gun chamber.
The argon is introduced into the housing from a first argon inlet provided in the electron gun chamber in at least one of the first introduction step and the second introduction step. 4. The electron generation method according to any one of 1 to 3.
5. The electron generation method according to claim 4, wherein the lithium is disposed on an extension of a central axis of the first argon inlet.
In the first introduction step, argon is introduced into the housing from the first argon introduction port and a second argon introduction port provided at a position different from the first argon introduction port. The method for generating electrons according to claim 4 or 5, characterized in that:
The electron generating method according to claim 6, wherein the second argon inlet is provided in the second chamber.
9. The electron generating method according to claim 1, wherein each of a nitrogen partial pressure and a water pressure in the argon-containing atmosphere in the electron emission step is 1 × 10 −7 Pa or less.
10. The electron generation method according to claim 9, wherein each of a nitrogen partial pressure and a water pressure in the argon-containing atmosphere in the electron emission step is 5 × 10 −8 Pa or less.