WO2011105693A3 - 평면 광회로 소자의 광연결 방법 - Google Patents

평면 광회로 소자의 광연결 방법 Download PDF

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Publication number
WO2011105693A3
WO2011105693A3 PCT/KR2010/009635 KR2010009635W WO2011105693A3 WO 2011105693 A3 WO2011105693 A3 WO 2011105693A3 KR 2010009635 W KR2010009635 W KR 2010009635W WO 2011105693 A3 WO2011105693 A3 WO 2011105693A3
Authority
WO
WIPO (PCT)
Prior art keywords
pattern
grooves
plc device
duplicating
forming
Prior art date
Application number
PCT/KR2010/009635
Other languages
English (en)
French (fr)
Other versions
WO2011105693A2 (ko
Inventor
정명영
김창석
류진화
오승훈
이태호
조상욱
Original Assignee
부산대학교 산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 부산대학교 산학협력단 filed Critical 부산대학교 산학협력단
Publication of WO2011105693A2 publication Critical patent/WO2011105693A2/ko
Publication of WO2011105693A3 publication Critical patent/WO2011105693A3/ko

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00663—Production of light guides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/1215—Splitter

Abstract

본 발명은 평면광파 회로(Planar Lightwave Circuit;PLC) 소자의 제조시에 단일의 임프린트 금형을 사용하여 PLC 소자와 광섬유 정렬을 위한 그루브(groove)를 동시에 제조하여 광결합을 할 수 있도록 한 평면 광회로 소자의 광연결 방법에 관한 것으로, 원형 실리콘 마스터(original master)를 사용하여 원형 복제 제 1 패턴을 형성하고, 원형 복제 제 1 패턴을 이용하여 원형 복제 제 2 패턴을 형성하는 단계;상기 원형 복제 제 2 패턴을 이용하여 하부 클레드를 형성하는 단계;상기 하부 클레드의 채널 캐비티에 코어층을 형성하고 상부 클레드를 적층하여 PLC 디바이스 칩을 형성하는 단계;상기 원형 복제 제 1 패턴의 입,출력단을 절단하고 그루브에 광 파이버를 실장하는 단계;상기 광 파이버가 실장된 그루브와 상기 PLC 디바이스 칩을 정렬하여 광결합하는 단계;를 포함한다.
PCT/KR2010/009635 2010-02-25 2010-12-31 평면 광회로 소자의 광연결 방법 WO2011105693A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20100017243A KR101086784B1 (ko) 2010-02-25 2010-02-25 평면 광회로 소자의 광연결 방법
KR10-2010-0017243 2010-02-25

Publications (2)

Publication Number Publication Date
WO2011105693A2 WO2011105693A2 (ko) 2011-09-01
WO2011105693A3 true WO2011105693A3 (ko) 2011-11-24

Family

ID=44507328

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/009635 WO2011105693A2 (ko) 2010-02-25 2010-12-31 평면 광회로 소자의 광연결 방법

Country Status (2)

Country Link
KR (1) KR101086784B1 (ko)
WO (1) WO2011105693A2 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103246022B (zh) * 2012-02-09 2016-06-01 博创科技股份有限公司 可插拔式平面光波导器件及其制作方法
KR20150056958A (ko) * 2013-11-18 2015-05-28 한국전자통신연구원 평면 고분자 광회로형 용존 산소 센서
KR102096608B1 (ko) 2018-08-29 2020-04-02 부산대학교 산학협력단 이형성을 높인 롤투롤 임프린트 유연 금형 및 이를 이용한 광도파로 제조 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0954222A (ja) * 1995-08-16 1997-02-25 Alps Electric Co Ltd 光導波素子及びその製造方法
JP2002333542A (ja) * 2001-05-07 2002-11-22 Matsushita Electric Ind Co Ltd 光学素子用成形型、光学素子用成形型の製造方法、光学素子の製造方法、光学素子
JP2008122475A (ja) * 2006-11-08 2008-05-29 Nippon Telegr & Teleph Corp <Ntt> 光導波路、光導波路の作製方法、導波路作製用の金型、および金型の作製方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100914996B1 (ko) 2009-04-28 2009-09-02 에프엔엔(주) 평면 광도파로형 광소자의 제조 방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0954222A (ja) * 1995-08-16 1997-02-25 Alps Electric Co Ltd 光導波素子及びその製造方法
JP2002333542A (ja) * 2001-05-07 2002-11-22 Matsushita Electric Ind Co Ltd 光学素子用成形型、光学素子用成形型の製造方法、光学素子の製造方法、光学素子
JP2008122475A (ja) * 2006-11-08 2008-05-29 Nippon Telegr & Teleph Corp <Ntt> 光導波路、光導波路の作製方法、導波路作製用の金型、および金型の作製方法

Also Published As

Publication number Publication date
WO2011105693A2 (ko) 2011-09-01
KR20110097411A (ko) 2011-08-31
KR101086784B1 (ko) 2011-11-25

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