WO2011105693A3 - 평면 광회로 소자의 광연결 방법 - Google Patents
평면 광회로 소자의 광연결 방법 Download PDFInfo
- Publication number
- WO2011105693A3 WO2011105693A3 PCT/KR2010/009635 KR2010009635W WO2011105693A3 WO 2011105693 A3 WO2011105693 A3 WO 2011105693A3 KR 2010009635 W KR2010009635 W KR 2010009635W WO 2011105693 A3 WO2011105693 A3 WO 2011105693A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pattern
- grooves
- plc device
- duplicating
- forming
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00663—Production of light guides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/1215—Splitter
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Ophthalmology & Optometry (AREA)
- Mechanical Engineering (AREA)
Abstract
본 발명은 평면광파 회로(Planar Lightwave Circuit;PLC) 소자의 제조시에 단일의 임프린트 금형을 사용하여 PLC 소자와 광섬유 정렬을 위한 그루브(groove)를 동시에 제조하여 광결합을 할 수 있도록 한 평면 광회로 소자의 광연결 방법에 관한 것으로, 원형 실리콘 마스터(original master)를 사용하여 원형 복제 제 1 패턴을 형성하고, 원형 복제 제 1 패턴을 이용하여 원형 복제 제 2 패턴을 형성하는 단계;상기 원형 복제 제 2 패턴을 이용하여 하부 클레드를 형성하는 단계;상기 하부 클레드의 채널 캐비티에 코어층을 형성하고 상부 클레드를 적층하여 PLC 디바이스 칩을 형성하는 단계;상기 원형 복제 제 1 패턴의 입,출력단을 절단하고 그루브에 광 파이버를 실장하는 단계;상기 광 파이버가 실장된 그루브와 상기 PLC 디바이스 칩을 정렬하여 광결합하는 단계;를 포함한다.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2010-0017243 | 2010-02-25 | ||
KR20100017243A KR101086784B1 (ko) | 2010-02-25 | 2010-02-25 | 평면 광회로 소자의 광연결 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2011105693A2 WO2011105693A2 (ko) | 2011-09-01 |
WO2011105693A3 true WO2011105693A3 (ko) | 2011-11-24 |
Family
ID=44507328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2010/009635 WO2011105693A2 (ko) | 2010-02-25 | 2010-12-31 | 평면 광회로 소자의 광연결 방법 |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR101086784B1 (ko) |
WO (1) | WO2011105693A2 (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103246022B (zh) * | 2012-02-09 | 2016-06-01 | 博创科技股份有限公司 | 可插拔式平面光波导器件及其制作方法 |
KR20150056958A (ko) * | 2013-11-18 | 2015-05-28 | 한국전자통신연구원 | 평면 고분자 광회로형 용존 산소 센서 |
KR102096608B1 (ko) | 2018-08-29 | 2020-04-02 | 부산대학교 산학협력단 | 이형성을 높인 롤투롤 임프린트 유연 금형 및 이를 이용한 광도파로 제조 방법 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0954222A (ja) * | 1995-08-16 | 1997-02-25 | Alps Electric Co Ltd | 光導波素子及びその製造方法 |
JP2002333542A (ja) * | 2001-05-07 | 2002-11-22 | Matsushita Electric Ind Co Ltd | 光学素子用成形型、光学素子用成形型の製造方法、光学素子の製造方法、光学素子 |
JP2008122475A (ja) * | 2006-11-08 | 2008-05-29 | Nippon Telegr & Teleph Corp <Ntt> | 光導波路、光導波路の作製方法、導波路作製用の金型、および金型の作製方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100914996B1 (ko) | 2009-04-28 | 2009-09-02 | 에프엔엔(주) | 평면 광도파로형 광소자의 제조 방법 |
-
2010
- 2010-02-25 KR KR20100017243A patent/KR101086784B1/ko not_active IP Right Cessation
- 2010-12-31 WO PCT/KR2010/009635 patent/WO2011105693A2/ko active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0954222A (ja) * | 1995-08-16 | 1997-02-25 | Alps Electric Co Ltd | 光導波素子及びその製造方法 |
JP2002333542A (ja) * | 2001-05-07 | 2002-11-22 | Matsushita Electric Ind Co Ltd | 光学素子用成形型、光学素子用成形型の製造方法、光学素子の製造方法、光学素子 |
JP2008122475A (ja) * | 2006-11-08 | 2008-05-29 | Nippon Telegr & Teleph Corp <Ntt> | 光導波路、光導波路の作製方法、導波路作製用の金型、および金型の作製方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2011105693A2 (ko) | 2011-09-01 |
KR101086784B1 (ko) | 2011-11-25 |
KR20110097411A (ko) | 2011-08-31 |
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