WO2011097974A1 - Dispositif laser à gaz - Google Patents

Dispositif laser à gaz Download PDF

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Publication number
WO2011097974A1
WO2011097974A1 PCT/CN2011/070378 CN2011070378W WO2011097974A1 WO 2011097974 A1 WO2011097974 A1 WO 2011097974A1 CN 2011070378 W CN2011070378 W CN 2011070378W WO 2011097974 A1 WO2011097974 A1 WO 2011097974A1
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WO
WIPO (PCT)
Prior art keywords
mirror
strip
output
electrode
discharge
Prior art date
Application number
PCT/CN2011/070378
Other languages
English (en)
Chinese (zh)
Inventor
张本
王度
罗钦
唐霞辉
李波
柳娟
彭浩
邓前松
肖瑜
Original Assignee
华中科技大学
秦应雄
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 华中科技大学, 秦应雄 filed Critical 华中科技大学
Publication of WO2011097974A1 publication Critical patent/WO2011097974A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers

Definitions

  • the present invention pertains to laser technology, and more particularly to a gas laser, a gas laser that is primarily used in the lath discharge region of the laser processing industry. Background technique
  • the medium power (hundred watts to kilowatts) laser market has great potential.
  • a domestic solution is to lengthen the sealed type.
  • the discharge area of the glass tube laser because the discharge area is too long, causes the excitation voltage to be too high, and is inconvenient for transportation, installation, use, etc.
  • the second scheme is a folded optical path structure using a plurality of discharge tubes, which increases the optical lens. It also increases the complexity of the system, reduces the stability of the optical path and the stability and reliability of the laser output.
  • the discharge electrodes are metal electrodes with water-cooled channels.
  • the spacing between the electrodes is small, which is a waveguide structure for optical path transmission. Therefore, the processing and installation of electrodes is very complicated.
  • the discharge chamber is a sealed container of metal structure, the power source is a radio frequency power source, the output beam of the laser is a strip spot, and the spot needs to be shaped to be used.
  • the laser has good performance and long life, but the technical difficulty is high, and the equipment procurement and maintenance cost are high. For the same power
  • the object of the present invention is to provide a new and simple gas laser with the advantages of the sealed-off glass tube laser and the RF-excited slab laser and overcome their respective deficiencies.
  • the invention provides a gas laser, comprising a discharge chamber, a discharge electrode, a water cooling passage and a gas storage chamber, wherein the water cooling passage is distributed on the discharge outdoor wall, the gas storage chamber is located outside the water cooling passage, and the discharge chamber and the gas storage chamber
  • the discharge chamber is composed of a discharge chamber, a tail mirror strip mirror, an output strip mirror and a full output mirror to form a sealed chamber
  • the discharge chamber is composed of Slatted hollow structure made of non-metallic material, tail mirror strip mirror and transmission
  • the strip-shaped mirrors are located outside the front and rear ends of the discharge chamber, and the light-emitting holes are left in the middle or one side of the strip mirror at the output end, and the full-transmission output mirror is located at the light-passing hole and serves as a laser output window.
  • the discharge electrode is located in the front and rear ends of the discharge chamber, or in the left and right sides.
  • the laser provided by the invention has a simple structure, and can obtain a power of 100 to 1000 W or higher according to the area of the strip-shaped discharge region. Compared with the prior art, the present invention has the following advantages:
  • the discharge chamber is a strip-shaped sealed discharge chamber composed of non-metal such as glass or ceramic, and the power increase is achieved by increasing the lateral discharge width, compared with the conventional sealed-off carbon dioxide laser of the same length.
  • the power can be increased several times or even tens of times.
  • the structure is more compact, the volume is smaller, and the number of resonator optical lenses is small, thereby ensuring the stability of the optical path and the laser output. The stability and reliability saves costs.
  • the electrode used in the present invention is an electrode material of a common glass tube laser, and the discharge electrode of the RF excited diffusion cooling strip laser is a metal electrode with a water-cooling channel, and the spacing between the electrodes is small, which is a waveguide structure for optical path transmission.
  • the processing precision requirements and installation accuracy requirements of the electrodes are very high, so the electrode structure used in the invention is simple, convenient to install, and low in cost.
  • the discharge electrode used in the present invention may be located in the front and rear ends of the discharge chamber, or in the left and right sides, and the electrode may be designed as a hollow rectangular electrode, a serrated hollow rectangular electrode, a segmented sheet electrode, and more A needle electrode, a plate electrode, a multi-needle electrode, a multi-hole plate electrode, a multi-needle plate electrode, and the like, thereby ensuring uniform and stable discharge over a large area.
  • RF-excited diffusion-cooled slab lasers require a radio frequency power supply with complicated structure, high technical difficulty, and high cost, and the power supply required for the laser of the present invention can be a common DC high-voltage power supply, and has a simple structure.
  • the RF-excited diffusion-cooled slab laser uses a strip-shaped unstable waveguide mixing cavity, that is, an unstable cavity in one direction and a waveguide cavity in the other direction, and the present invention adopts a strip-shaped unstable cavity, and there is no waveguide loss. And waveguide coupling loss.
  • the output beam of the RF excitation diffusion cooling slab laser is a strip spot, and the spot needs to be shaped to be used.
  • the output beam of the present invention can be an approximate square beam, and does not require a complicated integrated optical path structure, and can be directly applied.
  • the resonator lens is equipped with a water-cooling device instead of the conventional method—the lens is cooled together with the gas in the discharge chamber. This design provides good cooling of the lens while ensuring high-power laser output.
  • the water-cooled channel outside the discharge chamber is a water-cooled channel in series and externally connected in series,
  • the water flow is more smooth, there is no water flow dead angle, and the cooling of the discharge gas is more sufficient, so that the stability of the discharge and the stability of the laser output are well ensured.
  • the gas storage chamber is equipped with a filling and exhausting joint to facilitate multiple flushing and exhausting, so that the laser can be used repeatedly, instead of being scrapped once as in the conventional sealed-off glass tube laser, thereby increasing the service life of the laser.
  • Figure 1 is a schematic view of the overall structure of a gas laser.
  • Figures 2.1, 2.2, 2.3, and 2.4 are cross sections of several shapes of a discharge chamber, respectively.
  • Figures 3.1, 3.2, 3.3, and 3.4 show the structure of several longitudinal discharge discharge electrodes.
  • Figures 4.1, 4.2, 4.3, 4.4, and 4.5 are schematic diagrams of electrode structures for several lateral discharges.
  • Fig. 5 is a schematic view showing the structure of the unstable cavity of the coupled side of the concave and convex side.
  • Figure 6 is a schematic diagram of the unstable cavity structure of the concave-convex intermediate coupled output.
  • Figure 7 is a schematic view of the structure of the water-cooled passage. detailed description
  • the gas laser provided by the present invention comprises a discharge chamber 1, a discharge electrode 2, a water-cooling passage 3, a gas storage chamber 4, a tail mirror end strip mirror 8, an output strip mirror 9 and a whole. Through the output mirror 10.
  • the discharge chamber 1 is made of a non-metal such as glass or ceramic.
  • the discharge electrode 2 is located at the front and rear ends of the discharge chamber 1, or the left and right sides, and is connected to the electrode connection 5, and the electrode connection 5 is externally connected.
  • the power supply is connected, and the power supply can be a normal DC power supply without using an RF power supply.
  • the water cooling channel 3 is distributed outside the discharge chamber 1 and can simultaneously cool the area where the discharge electrode 2 is located; the water cooling channel 3 is provided with a gas storage chamber 4, and the gas storage chamber 4 can be designed as an integral structure with the discharge chamber 1 and the water cooling channel 3.
  • the gas storage chamber 4 is provided with a filling and exhausting joint 12, which is convenient for multiple charging and exhausting, thereby improving the service life of the laser;
  • the gas storage chamber 4 is connected to the discharge chamber 1 through the return gas pipe 6, and the gas return pipe A plurality of ends can be disposed;
  • the tail mirror strip mirror 8 and the output strip mirror 9 are respectively located outside the front and rear ends of the discharge chamber 1, and the light is left in the middle or one side of the strip mirror 9 at the output end.
  • the hole (the shape of the hole may be rectangular, square or circular, etc.), and the full output mirror 10 is located at the light passing hole and serves as a laser output window.
  • Mirror end strip mirror 8, output strip mirror 9 and full penetration The output mirror 10 and the discharge chamber 1 together form a sealed discharge chamber.
  • the strip mirror 8, the strip mirror 9 and the full output mirror 10 constitute a laser cavity.
  • Each lens has a water jacket 11; the water cooling channel 3 and the water jacket 11 have inlet and outlet ports 7 .
  • the specific shape of the discharge cavity 1 may be various shapes, which may be a strip shape or a similar strip shape, and FIG. 2 exemplifies several of them, such as a rectangular section strip-like structure (Fig. 2.1) ), a narrow-section, wide-width divergent section-like slat structure (Fig. 2.2), a narrow-width, narrow-sided spindle-like slat structure (Fig. 2.3), a narrow one side and a trapezoid on the other side
  • the cross-sectional slat structure (Fig. 2.4); in addition to this, the discharge chamber 1 may also be other similar shapes having a non-circular cross section.
  • the discharge electrode 2 is located in the front and rear ends of the discharge chamber 1, or in the left and right sides.
  • the discharge direction coincides with the light exit direction, which is a longitudinal discharge, as shown in FIG.
  • the discharge electrode 2 can be designed in various structures, as shown in Fig. 3, a hollow rectangular electrode (Fig. 3.1), a serrated hollow rectangular electrode (Fig. 3.2), Segmented sheet electrodes (Fig. 3.3), multi-needle electrodes (Fig. 3.4), and the like, and their appropriate bending, folding, etc., the two discharge electrodes required by the present invention may be of the same structure and different structures of the above electrodes.
  • a segmented sheet electrode and a multi-needle electrode are used, it is necessary to use a plurality of electrode leads.
  • the specific electrode structure can be a plate electrode 14 (Fig. 4.1, Fig. 4.2), a multi-needle electrode 15 (Fig. 4.3, Fig. 4.4), a perforated plate electrode 16 (Fig. 4.5, Fig. 4.6), and a multi-needle plate electrode 17 (Fig. 4.7, Figure 4.8), hollow rectangular electrode 18 (Fig. 4.9, Fig. 4.10) and the like and their various combinations.
  • the discharge electrode 2 may be made of an electrode material of a common glass tube laser, and does not require a radio frequency excitation diffusion to cool the super-finished metal electrode with a water-cooled channel necessary for cooling the strip laser. If a segmented sheet electrode and a multi-needle electrode are used, it is necessary to use a plurality of electrode leads.
  • the resonant cavity used in the present invention can be specifically designed as a biconcave unstable cavity structure with side coupling output (Fig. 1), a concave-convex unstable cavity structure with side coupling output (Fig. 5.1) and a concave-convex unstable cavity structure with intermediate side coupling output ( Figure 5.2) and so on.
  • the tail mirror end strip mirror 8 is a strip concave mirror
  • the output end strip mirror 9 is strip shape.
  • Concave mirror, the full output mirror 10 is located on one side of the strip mirror 9 at the output end, and the end of the tail mirror is reversed.
  • the sum of the absolute value of the radius of curvature of the mirror 8 and the absolute value of the radius of curvature of the strip mirror 9 at the output end is twice the length of the cavity.
  • the tail mirror end strip mirror 8 is a strip concave mirror
  • the output end strip mirror 9 is a strip convex surface.
  • the mirror, the full output mirror 10 is located on one side of the strip mirror 9 at the output end, and the absolute value of the radius of curvature of the tail strip strip mirror 8 is subtracted from the absolute value of the radius of curvature of the strip mirror 9 at the output end. The value is twice the length of the cavity.
  • the tail mirror end strip mirror 8 is a strip concave mirror
  • the output end strip mirror 9 is a strip convex surface.
  • the mirror, the full output mirror 10 is located in the middle of the output strip mirror 9, and the absolute value of the radius of curvature of the tail mirror strip mirror 8 is subtracted from the absolute value of the curvature radius of the strip mirror 9 of the output end. It is twice the length of the cavity.
  • the concave or convex surface of the tail mirror end strip mirror 8 and the output end strip mirror 9 used in the present invention may be a spherical surface or a cylindrical surface.
  • Each lens has a water jacket 11 and has an inlet and outlet port 7.
  • the resonant cavity used in the present invention is a strip-shaped unstable cavity, one direction is an unstable cavity, and the other direction is a freely transmitted beam due to a large spacing, unlike the unstable waveguide mixing cavity used by the diffusion-cooled slab laser, which does not exist.
  • Waveguide loss and waveguide coupling loss the discharge chamber does not need to be designed as a waveguide structure, so the structural design of the discharge chamber is low.
  • the output beam of the present invention can be an approximately square beam or a circular beam, and does not require a complicated shaping optical path structure, and can be directly applied.
  • the water-cooling passage 3 is designed as a series water passage having an approximately equal cross-sectional area, so that the water flow is smooth without leaving a dead angle. If the area where the discharge chamber needs to be cooled is large, multiple series water channels can be designed, and each series water channel can be used in parallel or independently.
  • the present invention can also use a method of overall cooling.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

La présente invention concerne un dispositif laser à gaz qui comprend une chambre de décharge, des électrodes de décharge (2), des canaux de refroidissement à eau (3) et une chambre de conservation de gaz (4). Les canaux de refroidissement à eau (3) sont répartis sur la paroi extérieure de la chambre de décharge, et la chambre de conservation de gaz (4) est disposée à l'extérieur des canaux de refroidissement à eau (3). La chambre de décharge est une chambre d'étanchéité qui est constituée par une cavité de décharge (1), un miroir de réflexion en forme de bande (8) sur le côté arrière, un miroir de réflexion en forme de bande (9) sur le côté sortie et un miroir de sortie à transmission complète (10). La cavité de décharge (1) est une dalle creuse constituée d'un matériau non métallique. Le dispositif laser présente les avantages suivants : taille compacte, poids léger, construction simple, effet de refroidissement satisfaisant, puissance de sortie élevée, faisceau laser stable et mode laser satisfaisant.
PCT/CN2011/070378 2010-02-10 2011-01-19 Dispositif laser à gaz WO2011097974A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201010114136.7 2010-02-10
CN2010101141367A CN101789559B (zh) 2010-02-10 2010-02-10 一种气体激光器

Publications (1)

Publication Number Publication Date
WO2011097974A1 true WO2011097974A1 (fr) 2011-08-18

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Application Number Title Priority Date Filing Date
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CN (1) CN101789559B (fr)
WO (1) WO2011097974A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103715592A (zh) * 2013-12-31 2014-04-09 丁健君 紧凑型玻璃结构中功率二氧化碳激光器

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101789559B (zh) * 2010-02-10 2012-06-20 华中科技大学 一种气体激光器
CN102354905A (zh) * 2011-10-19 2012-02-15 华中科技大学 一种射频激励气体激光器
CN103117501A (zh) * 2013-01-28 2013-05-22 江苏益林金刚石工具有限公司 射频板条co2激光器电极冷却水流道结构
WO2015149194A1 (fr) * 2014-04-01 2015-10-08 徐海军 Laser à gaz à excitation radiofréquence et son procédé de préparation
CN105093401A (zh) * 2015-08-25 2015-11-25 中国科学院合肥物质科学研究院 一种光波导用可调节温度场分布装置
US9634455B1 (en) * 2016-02-16 2017-04-25 Cymer, Llc Gas optimization in a gas discharge light source
CN110797749B (zh) * 2019-11-07 2021-10-08 深圳市神飞电子科技有限公司 一种激光管的高压激发电路
CN111934172A (zh) * 2020-09-10 2020-11-13 南通斯派特激光科技有限公司 一种板条式二氧化碳玻璃管激光器
CN113520590A (zh) * 2021-06-30 2021-10-22 武汉高科恒大光电股份有限公司 一种二氧化碳激光治疗机

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US3569858A (en) * 1967-06-01 1971-03-09 Philips Corp Device for producing stimulated infrared emission, an iraser
JPS58204583A (ja) * 1982-05-24 1983-11-29 Matsushita Electric Ind Co Ltd 封止型レ−ザ管
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CN86200785U (zh) * 1986-01-29 1987-01-14 南京工学院 具有坡度放电管的气体激光器
CN87203941U (zh) * 1987-03-17 1987-11-25 江苏省激光研究所 自聚焦激光器
CN2901641Y (zh) * 2006-04-18 2007-05-16 王向阳 光催化封离式二氧化碳激光管
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CN1889312A (zh) * 2006-07-19 2007-01-03 中国科学院等离子体物理研究所 大功率连续波dcn激光器
CN101789559A (zh) * 2010-02-10 2010-07-28 华中科技大学 一种气体激光器
CN201667485U (zh) * 2010-02-10 2010-12-08 华中科技大学 一种气体激光器

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103715592A (zh) * 2013-12-31 2014-04-09 丁健君 紧凑型玻璃结构中功率二氧化碳激光器

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CN101789559B (zh) 2012-06-20

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