WO2011097974A1 - 一种气体激光器 - Google Patents

一种气体激光器 Download PDF

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Publication number
WO2011097974A1
WO2011097974A1 PCT/CN2011/070378 CN2011070378W WO2011097974A1 WO 2011097974 A1 WO2011097974 A1 WO 2011097974A1 CN 2011070378 W CN2011070378 W CN 2011070378W WO 2011097974 A1 WO2011097974 A1 WO 2011097974A1
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Prior art keywords
mirror
strip
output
electrode
discharge
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English (en)
French (fr)
Inventor
张本
王度
罗钦
唐霞辉
李波
柳娟
彭浩
邓前松
肖瑜
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers

Definitions

  • the present invention pertains to laser technology, and more particularly to a gas laser, a gas laser that is primarily used in the lath discharge region of the laser processing industry. Background technique
  • the medium power (hundred watts to kilowatts) laser market has great potential.
  • a domestic solution is to lengthen the sealed type.
  • the discharge area of the glass tube laser because the discharge area is too long, causes the excitation voltage to be too high, and is inconvenient for transportation, installation, use, etc.
  • the second scheme is a folded optical path structure using a plurality of discharge tubes, which increases the optical lens. It also increases the complexity of the system, reduces the stability of the optical path and the stability and reliability of the laser output.
  • the discharge electrodes are metal electrodes with water-cooled channels.
  • the spacing between the electrodes is small, which is a waveguide structure for optical path transmission. Therefore, the processing and installation of electrodes is very complicated.
  • the discharge chamber is a sealed container of metal structure, the power source is a radio frequency power source, the output beam of the laser is a strip spot, and the spot needs to be shaped to be used.
  • the laser has good performance and long life, but the technical difficulty is high, and the equipment procurement and maintenance cost are high. For the same power
  • the object of the present invention is to provide a new and simple gas laser with the advantages of the sealed-off glass tube laser and the RF-excited slab laser and overcome their respective deficiencies.
  • the invention provides a gas laser, comprising a discharge chamber, a discharge electrode, a water cooling passage and a gas storage chamber, wherein the water cooling passage is distributed on the discharge outdoor wall, the gas storage chamber is located outside the water cooling passage, and the discharge chamber and the gas storage chamber
  • the discharge chamber is composed of a discharge chamber, a tail mirror strip mirror, an output strip mirror and a full output mirror to form a sealed chamber
  • the discharge chamber is composed of Slatted hollow structure made of non-metallic material, tail mirror strip mirror and transmission
  • the strip-shaped mirrors are located outside the front and rear ends of the discharge chamber, and the light-emitting holes are left in the middle or one side of the strip mirror at the output end, and the full-transmission output mirror is located at the light-passing hole and serves as a laser output window.
  • the discharge electrode is located in the front and rear ends of the discharge chamber, or in the left and right sides.
  • the laser provided by the invention has a simple structure, and can obtain a power of 100 to 1000 W or higher according to the area of the strip-shaped discharge region. Compared with the prior art, the present invention has the following advantages:
  • the discharge chamber is a strip-shaped sealed discharge chamber composed of non-metal such as glass or ceramic, and the power increase is achieved by increasing the lateral discharge width, compared with the conventional sealed-off carbon dioxide laser of the same length.
  • the power can be increased several times or even tens of times.
  • the structure is more compact, the volume is smaller, and the number of resonator optical lenses is small, thereby ensuring the stability of the optical path and the laser output. The stability and reliability saves costs.
  • the electrode used in the present invention is an electrode material of a common glass tube laser, and the discharge electrode of the RF excited diffusion cooling strip laser is a metal electrode with a water-cooling channel, and the spacing between the electrodes is small, which is a waveguide structure for optical path transmission.
  • the processing precision requirements and installation accuracy requirements of the electrodes are very high, so the electrode structure used in the invention is simple, convenient to install, and low in cost.
  • the discharge electrode used in the present invention may be located in the front and rear ends of the discharge chamber, or in the left and right sides, and the electrode may be designed as a hollow rectangular electrode, a serrated hollow rectangular electrode, a segmented sheet electrode, and more A needle electrode, a plate electrode, a multi-needle electrode, a multi-hole plate electrode, a multi-needle plate electrode, and the like, thereby ensuring uniform and stable discharge over a large area.
  • RF-excited diffusion-cooled slab lasers require a radio frequency power supply with complicated structure, high technical difficulty, and high cost, and the power supply required for the laser of the present invention can be a common DC high-voltage power supply, and has a simple structure.
  • the RF-excited diffusion-cooled slab laser uses a strip-shaped unstable waveguide mixing cavity, that is, an unstable cavity in one direction and a waveguide cavity in the other direction, and the present invention adopts a strip-shaped unstable cavity, and there is no waveguide loss. And waveguide coupling loss.
  • the output beam of the RF excitation diffusion cooling slab laser is a strip spot, and the spot needs to be shaped to be used.
  • the output beam of the present invention can be an approximate square beam, and does not require a complicated integrated optical path structure, and can be directly applied.
  • the resonator lens is equipped with a water-cooling device instead of the conventional method—the lens is cooled together with the gas in the discharge chamber. This design provides good cooling of the lens while ensuring high-power laser output.
  • the water-cooled channel outside the discharge chamber is a water-cooled channel in series and externally connected in series,
  • the water flow is more smooth, there is no water flow dead angle, and the cooling of the discharge gas is more sufficient, so that the stability of the discharge and the stability of the laser output are well ensured.
  • the gas storage chamber is equipped with a filling and exhausting joint to facilitate multiple flushing and exhausting, so that the laser can be used repeatedly, instead of being scrapped once as in the conventional sealed-off glass tube laser, thereby increasing the service life of the laser.
  • Figure 1 is a schematic view of the overall structure of a gas laser.
  • Figures 2.1, 2.2, 2.3, and 2.4 are cross sections of several shapes of a discharge chamber, respectively.
  • Figures 3.1, 3.2, 3.3, and 3.4 show the structure of several longitudinal discharge discharge electrodes.
  • Figures 4.1, 4.2, 4.3, 4.4, and 4.5 are schematic diagrams of electrode structures for several lateral discharges.
  • Fig. 5 is a schematic view showing the structure of the unstable cavity of the coupled side of the concave and convex side.
  • Figure 6 is a schematic diagram of the unstable cavity structure of the concave-convex intermediate coupled output.
  • Figure 7 is a schematic view of the structure of the water-cooled passage. detailed description
  • the gas laser provided by the present invention comprises a discharge chamber 1, a discharge electrode 2, a water-cooling passage 3, a gas storage chamber 4, a tail mirror end strip mirror 8, an output strip mirror 9 and a whole. Through the output mirror 10.
  • the discharge chamber 1 is made of a non-metal such as glass or ceramic.
  • the discharge electrode 2 is located at the front and rear ends of the discharge chamber 1, or the left and right sides, and is connected to the electrode connection 5, and the electrode connection 5 is externally connected.
  • the power supply is connected, and the power supply can be a normal DC power supply without using an RF power supply.
  • the water cooling channel 3 is distributed outside the discharge chamber 1 and can simultaneously cool the area where the discharge electrode 2 is located; the water cooling channel 3 is provided with a gas storage chamber 4, and the gas storage chamber 4 can be designed as an integral structure with the discharge chamber 1 and the water cooling channel 3.
  • the gas storage chamber 4 is provided with a filling and exhausting joint 12, which is convenient for multiple charging and exhausting, thereby improving the service life of the laser;
  • the gas storage chamber 4 is connected to the discharge chamber 1 through the return gas pipe 6, and the gas return pipe A plurality of ends can be disposed;
  • the tail mirror strip mirror 8 and the output strip mirror 9 are respectively located outside the front and rear ends of the discharge chamber 1, and the light is left in the middle or one side of the strip mirror 9 at the output end.
  • the hole (the shape of the hole may be rectangular, square or circular, etc.), and the full output mirror 10 is located at the light passing hole and serves as a laser output window.
  • Mirror end strip mirror 8, output strip mirror 9 and full penetration The output mirror 10 and the discharge chamber 1 together form a sealed discharge chamber.
  • the strip mirror 8, the strip mirror 9 and the full output mirror 10 constitute a laser cavity.
  • Each lens has a water jacket 11; the water cooling channel 3 and the water jacket 11 have inlet and outlet ports 7 .
  • the specific shape of the discharge cavity 1 may be various shapes, which may be a strip shape or a similar strip shape, and FIG. 2 exemplifies several of them, such as a rectangular section strip-like structure (Fig. 2.1) ), a narrow-section, wide-width divergent section-like slat structure (Fig. 2.2), a narrow-width, narrow-sided spindle-like slat structure (Fig. 2.3), a narrow one side and a trapezoid on the other side
  • the cross-sectional slat structure (Fig. 2.4); in addition to this, the discharge chamber 1 may also be other similar shapes having a non-circular cross section.
  • the discharge electrode 2 is located in the front and rear ends of the discharge chamber 1, or in the left and right sides.
  • the discharge direction coincides with the light exit direction, which is a longitudinal discharge, as shown in FIG.
  • the discharge electrode 2 can be designed in various structures, as shown in Fig. 3, a hollow rectangular electrode (Fig. 3.1), a serrated hollow rectangular electrode (Fig. 3.2), Segmented sheet electrodes (Fig. 3.3), multi-needle electrodes (Fig. 3.4), and the like, and their appropriate bending, folding, etc., the two discharge electrodes required by the present invention may be of the same structure and different structures of the above electrodes.
  • a segmented sheet electrode and a multi-needle electrode are used, it is necessary to use a plurality of electrode leads.
  • the specific electrode structure can be a plate electrode 14 (Fig. 4.1, Fig. 4.2), a multi-needle electrode 15 (Fig. 4.3, Fig. 4.4), a perforated plate electrode 16 (Fig. 4.5, Fig. 4.6), and a multi-needle plate electrode 17 (Fig. 4.7, Figure 4.8), hollow rectangular electrode 18 (Fig. 4.9, Fig. 4.10) and the like and their various combinations.
  • the discharge electrode 2 may be made of an electrode material of a common glass tube laser, and does not require a radio frequency excitation diffusion to cool the super-finished metal electrode with a water-cooled channel necessary for cooling the strip laser. If a segmented sheet electrode and a multi-needle electrode are used, it is necessary to use a plurality of electrode leads.
  • the resonant cavity used in the present invention can be specifically designed as a biconcave unstable cavity structure with side coupling output (Fig. 1), a concave-convex unstable cavity structure with side coupling output (Fig. 5.1) and a concave-convex unstable cavity structure with intermediate side coupling output ( Figure 5.2) and so on.
  • the tail mirror end strip mirror 8 is a strip concave mirror
  • the output end strip mirror 9 is strip shape.
  • Concave mirror, the full output mirror 10 is located on one side of the strip mirror 9 at the output end, and the end of the tail mirror is reversed.
  • the sum of the absolute value of the radius of curvature of the mirror 8 and the absolute value of the radius of curvature of the strip mirror 9 at the output end is twice the length of the cavity.
  • the tail mirror end strip mirror 8 is a strip concave mirror
  • the output end strip mirror 9 is a strip convex surface.
  • the mirror, the full output mirror 10 is located on one side of the strip mirror 9 at the output end, and the absolute value of the radius of curvature of the tail strip strip mirror 8 is subtracted from the absolute value of the radius of curvature of the strip mirror 9 at the output end. The value is twice the length of the cavity.
  • the tail mirror end strip mirror 8 is a strip concave mirror
  • the output end strip mirror 9 is a strip convex surface.
  • the mirror, the full output mirror 10 is located in the middle of the output strip mirror 9, and the absolute value of the radius of curvature of the tail mirror strip mirror 8 is subtracted from the absolute value of the curvature radius of the strip mirror 9 of the output end. It is twice the length of the cavity.
  • the concave or convex surface of the tail mirror end strip mirror 8 and the output end strip mirror 9 used in the present invention may be a spherical surface or a cylindrical surface.
  • Each lens has a water jacket 11 and has an inlet and outlet port 7.
  • the resonant cavity used in the present invention is a strip-shaped unstable cavity, one direction is an unstable cavity, and the other direction is a freely transmitted beam due to a large spacing, unlike the unstable waveguide mixing cavity used by the diffusion-cooled slab laser, which does not exist.
  • Waveguide loss and waveguide coupling loss the discharge chamber does not need to be designed as a waveguide structure, so the structural design of the discharge chamber is low.
  • the output beam of the present invention can be an approximately square beam or a circular beam, and does not require a complicated shaping optical path structure, and can be directly applied.
  • the water-cooling passage 3 is designed as a series water passage having an approximately equal cross-sectional area, so that the water flow is smooth without leaving a dead angle. If the area where the discharge chamber needs to be cooled is large, multiple series water channels can be designed, and each series water channel can be used in parallel or independently.
  • the present invention can also use a method of overall cooling.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Description

一种气体激光器
技术领域
本发明属于激光器技术，特别是涉及一种气体激光器，一种主要应用于 激光加工行业的板条状放电区域的气体激光器。 背景技术
目前， 中功率 （数百瓦~千瓦） 的激光器市场潜力巨大， 到现在为止， 还没有用户非常满意的实用产品， 为了获得中高功率的激光输出， 目前， 国 内的一种方案是加长封离式玻璃管激光器放电区， 由于放电区过长， 导致激 励电压过高， 运输、 安装、 使用等不方便； 第二种方案是采用多个放电管的 折叠光路结构， 这种结构增加了光学镜片， 也增加了系统的复杂性,降低了 光路的稳定性和激光输出的稳定性和可靠性。对于大功率激光器，可以采用 快速流动气体激励， 做成横流或轴流激光器， 增加了气体流动与冷却系统， 其结果是体积庞大， 重量重， 运行噪声大， 耗气量大， 运行成本高。 为了解 决这种现状， 国外设计了射频激励扩散冷却板条激光器，放电电极为带水冷 通道的金属电极， 电极之间间距小， 是光路传输的一个波导结构， 所以电极 的加工、 安装非常复杂， 放电室为金属结构的密封容器， 电源是射频电源， 激光器输出光束为条状光斑， 光斑需要整形才能使用， 这种激光器性能好， 寿命长， 但是其技术难度高， 设备采购及使用维护成本高， 对于相同功率的
100瓦激光器， 射频激励板条激光器的价格是封离式玻璃管激光器价格的数 10倍， 所以难以在我国广泛的推广应用。 发明内容
本发明的目的在于结合封离式玻璃管激光器和射频激励板条激光器各 自的优点，并克服它们各自的不足，提供一种全新的结构简单的气体激光器。
本发明提供的一种气体激光器， 包括放电室、放电电极、 水冷通道和储 气室， 水冷通道分布在所述放电室外壁上， 储气室位于水冷通道外， 所述放 电室与储气室之间通过回气管相通， 其特征在于： 放电室为由放电腔体、尾 镜端条状反射镜、 输出端条状反射镜和全透输出镜共同构成一个密封的腔 室，放电腔体由非金属材料制成的板条状空心结构，尾镜端条状反射镜和输 出端条状反射镜分别位于放电腔体的前、后端外， 输出端条状反射镜的中间 或一侧留有通光孔,全透输出镜位于通光孔处,并作为激光输出窗口； 放电电 极位于放电腔体的前、 后两端内， 或者左、 右两侧内。
本发明提供的激光器结构简单，按照板条状放电区面积的不同， 可以获 得 100~1000W甚至更高的功率。 与现有技术相比， 本发明具有如下优点：
( 1 ) 放电室是由玻璃或陶瓷等非金属组成板条状密封放电室， 其功率 的增大是通过增大横向放电宽度来实现，与相同长度的普通封离式二氧化碳 激光器相比，输出功率可提高数倍甚至数十倍， 与加长型玻璃管激光器或折 叠型玻璃管激光器相比， 结构更加紧凑， 体积更加小巧， 谐振腔光学镜片数 量少，从而可保证光路的稳定性和激光输出的稳定性和可靠性，节约了成本。
( 2 ) 本发明采用的电极是普通玻璃管激光器的电极材料， 而射频激励 扩散冷却板条激光器的放电电极为带水冷通道的金属电极， 电极之间间距 小， 是光路传输的一个波导结构， 电极的加工精度要求和安装精度要求都非 常高， 所以本发明采用的电极结构简单， 安装方便， 成本低廉。
( 3 )本发明采用的放电电极可以位于放电室的前、 后两端内， 或者左、 右两侧内， 电极可以设计成空心矩形电极， 锯齿状空心矩形电极， 分段片状 电极、多针状电极、板状电极、多针电极、多孔板电极、多针板电极等结构， 从而保证大面积的均匀稳定放电。
(4 ) 射频激励扩散冷却板条激光器需要结构复杂， 技术难度高， 价格 昂贵的射频电源，而本发明的激光器所需要的电源可以采用普通的直流高压 电源， 结构简单。
( 5 ) 射频激励扩散冷却板条激光器采用的条状非稳波导混合腔， 即在 一个方向是非稳腔， 另外一个方向是波导腔， 而本发明采用是条状非稳腔， 不存在波导损耗和波导耦合损耗。
( 6 ) 射频激励扩散冷却板条激光器的输出光束为条状光斑， 光斑需要 整形才能使用， 而本发明的输出光束可以为近似方形光束，不需要复杂的整 形光路结构， 可以直接应用。
(7 ) 谐振腔镜片都附有水冷装置， 而不是采用普通的方法——镜片和 放电室内的气体一起被冷却，这样的设计在保证输出大功率激光的前提下同 时给镜片以良好的冷却。
( 8 ) 放电室外面的水冷通道是一种外并联内串联组合的水冷通道， 保 证水流更加通畅， 不存在水流死角， 使放电气体的冷却更加充分， 从而很好 地保证放电的稳定性和激光输出的稳定性。
(9) 储气室备留充排气接头， 方便多次冲排气， 使激光器可以反复利 用，而不象普通的封离式玻璃管激光器那样用一次就报废，从而提高激光器 的使用寿命。 附图说明
图 1为气体激光器的整体结构示意图。
图 2.1、 2.2、 2.3、 2.4分别为一种放电室几种形状的横截面。
图 3.1、 3.2、 3.3、 3.4为几种纵向放电的放电电极结构。
图 4.1、 4.2、 4.3、 4.4、 4.5为几种横向放电的电极结构示意图。
图 5为凹凸侧面耦合输出的非稳腔结构示意图。
图 6为凹凸中间耦合输出的非稳腔结构示意图。
图 7为水冷通道结构示意图。 具体实施方式
以下结合附图和实例对本发明作进一步的详细说明。
如图 1所示， 本发明提供的气体激光器， 包括放电腔体 1、放电电极 2、 水冷通道 3、 储气室 4、 尾镜端条状反射镜 8， 输出端条状反射镜 9和全透 输出镜 10。
放电腔体 1由玻璃或陶瓷等非金属制作，所述放电电极 2位于放电腔体 1内的前、 后两端， 或者左、 右两侧， 与电极接线 5相连， 电极接线 5各自 与外接的电源相连，该电源可以采用普通的直流电源，而不必使用射频电源。 水冷通道 3分布在放电腔体 1外侧，可以同时冷却放电电极 2所在区域； 水 冷通道 3外设有储气室 4， 储气室 4可以与放电腔体 1和水冷通道 3设计成 一体结构， 也可以设计成分体结构； 储气室 4上备留充排气接头 12， 方便 多次充排气， 提高激光器的使用寿命； 储气室 4通过回气管 6与放电腔体 1 相通， 回气管可以设置多根； 尾镜端条状反射镜 8 和输出端条状反射镜 9 分别位于放电腔体 1的前、后端外，输出端条状反射镜 9的中间或一侧留有 通光孔（孔的形状可以是矩形、 方形或圆形等），全透输出镜 10位于通光孔 处,并作为激光输出窗口。尾镜端条状反射镜 8、输出端条状反射镜 9和全透 输出镜 10与放电腔体 1共同构成一个密封的放电室。
条状反射镜 8， 条状反射镜 9和全透输出镜 10组成激光谐振腔。 每个 镜片都带有水冷套 11 ; 水冷通道 3和水冷套 11都有进出水口 7。
根据激光谐振腔的需要，放电腔体 1的具体形状可以是多种形状， 可以 是板条状或类似的板条状，图 2举例了其中几种，如矩形截面板条状结构（图 2.1 )， 中间窄、 两侧宽的发散状截面类板条结构 （图 2.2 ) ，中间宽、 两侧窄 的纺锤状截面类板条结构（图 2.3 )， 一侧窄、 另外一侧宽的梯形截面类板条 结构（图 2.4 ); 除此以外， 放电腔体 1还可以是截面为非圆形的其它类似形 状。
放电电极 2位于放电腔体 1的前、 后两端内， 或者左、 右两侧内。 当放 电电极 2位于放电腔体 1的前、 后两端内， 放电方向与出光方向一致， 为纵 向放电， 如图 1所示。 为了提高板条状密封放电腔体 1的放电均匀性， 放电 电极 2可以设计成多种结构， 如图 3所示， 空心矩形电极（图 3.1 )， 锯齿状 空心矩形电极（图 3.2)， 分段片状电极（图 3.3 )、 多针状电极（图 3.4)等， 以及它们的适当的弯曲、折叠等结构，本发明所需的两个放电电极可以由上 述电极的相同结构以及不同结构的各种组合构成。如采用分段片状电极和多 针状电极， 则需要采用多个电极引线。
当放电电极 2位于放电腔体 1的左、右两侧内，放电方向与出光方向垂 直， 为横向放电， 如 4所示。 具体电极结构可以采用板状电极 14 (图 4.1、 图 4.2)、 多针电极 15 (图 4.3、 图 4.4)、 多孔板电极 16 (图 4.5、 图 4.6)、 多针板电极 17 (图 4.7、 图 4.8)、 空心矩形电极 18 (图 4.9、 图 4.10 ) 等结 构以及它们的各种组合结构。
本发明中， 放电电极 2采用的材料可以为普通玻璃管激光器的电极材 料，不需要射频激励扩散冷却板条激光器必须的带水冷通道的表面超精加工 的金属电极。如采用分段片状电极和多针状电极，则需要采用多个电极引线。
本发明采用的谐振腔具体可以设计成为侧面耦合输出的双凹非稳腔结 构 （图 1 )、 侧面耦合输出的凹凸非稳腔结构 （图 5.1 ) 和中间侧面耦合输出 的凹凸非稳腔结构 （图 5.2) 等。
当本发明采用的谐振腔为图 1 所示的双凹侧面耦合输出的非稳腔结构 时，尾镜端条状反射镜 8为条状凹面反射镜， 输出端条状反射镜 9为条状凹 面反射镜， 全透输出镜 10位于输出端条状反射镜 9的一侧， 尾镜端条状反 射镜 8的曲率半径绝对值与输出端条状反射镜 9的曲率半径绝对值之和为谐 振腔腔长的两倍。
当本发明采用的谐振腔为图 5.1所示的侧面耦合输出的凹凸非稳腔结构 时，尾镜端条状反射镜 8为条状凹面反射镜， 输出端条状反射镜 9为条状凸 面反射镜， 全透输出镜 10位于输出端条状反射镜 9的一侧， 尾镜端条状反 射镜 8的曲率半径绝对值减去输出端条状反射镜 9的曲率半径绝对值后所得 的值为谐振腔腔长的两倍。
当本发明采用的谐振腔为图 5.2所示的中间耦合输出的凹凸非稳腔结构 时，尾镜端条状反射镜 8为条状凹面反射镜， 输出端条状反射镜 9为条状凸 面反射镜， 全透输出镜 10位于输出端条状反射镜 9的中间， 尾镜端条状反 射镜 8的曲率半径绝对值减去输出端条状反射镜 9的曲率半径绝对值后所得 的值为谐振腔腔长的两倍。
本发明采用的尾镜端条状反射镜 8和输出端条状反射镜 9的凹面或凸面 可以是球面，也可以是柱面。每个镜片都带有水冷套 11，且都有进出水口 7。
本发明采用的谐振腔为条状非稳腔， 一个方向是非稳腔， 另外一个方向 由于间距较大， 光束是自由传输， 而不像扩散冷却板条激光器采用的非稳波 导混合腔，不存在波导损耗和波导耦合损耗，放电室不需要设计成为波导结 构，所以放电室的结构设计要求低。而本发明的输出光束可以为近似方形光 束或圆形光束， 不需要复杂的整形光路结构， 可以直接应用。
如图 6所示， 为了提高放电室的冷却效果，水冷通道 3设计成了截面积 近似相等的串联水道， 使水流畅通并不留死角。如果放电室需要冷却的面积 较大时， 可以设计多个串联水道， 每个串联水道并联使用或独立供水。本发 明也可以使用整体冷却的方式。
以上所述为本发明的较佳实施例而已，但本发明不应该局限于该实施例 和附图所公开的内容。所以凡是不脱离本发明所公开的精神下完成的等效或 修改， 都落入本发明保护的范围。

Claims

权 利 要 求 书
1、 一种气体激光器， 包括放电室、 放电电极（2)、 水冷通道（3 )和储 气室 （4)， 水冷通道（3 )分布在所述放电室外壁上， 储气室 （4)位于水冷 通道 （3 ) 外， 所述放电室与储气室 （4) 之间通过回气管 （6) 相通， 其特 征在于： 放电室为由放电腔体（1 )、 尾镜端条状反射镜（8 )、 输出端条状反 射镜 （9)和全透输出镜 （10)共同构成一个密封的腔室， 放电腔体（1 ) 由 非金属材料制成的板条状空心结构， 尾镜端条状反射镜 （8) 和输出端条状 反射镜 （9)分别位于放电腔体（1 ) 的前、 后端外， 输出端条状反射镜 （9) 的中间或一侧留有通光孔， 全透输出镜（10)位于通光孔处， 并作为激光输 出窗口； 放电电极（2)位于放电腔体（1 ) 的前、 后两端内， 或者左、 右两
2、 根据权利要求 1所述的气体激光器， 其特征在于： 放电腔体（1 )为 板条状， 其截面为矩形， 或者中间窄、 两侧宽的发散状,或者中间宽、 两侧 窄的纺锤状， 或者一侧窄、 另外一侧宽的梯形。
3、 根据权利要求 1所述的气体激光器， 其特征在于： 当放电电极 （2) 位于放电腔体（1 ) 的前、 后两端内时， 放电电极（2) 为空心矩形电极、 锯 齿状空心矩形电极、 分段片状电极和多针状电极中任一种或任几种的组合。
4、 根据权利要求 1所述的气体激光器， 其特征在于： 当放电电极 （2) 位于放电腔体（1 ) 的左、 右两侧内时， 放电电极（2) 为板状电极、 多针电 极、 多孔板电极、 多针板电极（17 )和空心矩形电极（18) 中任一种或任几 种的组合。
5、根据权利要求 3或 4所述的气体激光器，其特征在于：放电电极（2) 为弯曲或折叠状。
6、 根据权利要求 1所述的气体激光器， 其特征在于： 尾镜端条状反射 镜（8) 为条状凹面反射镜， 输出端条状反射镜（9)为条状凹面反射镜， 全 透输出镜（10)位于输出端条状反射镜（9)的一侧。尾镜端条状反射镜（8) 的曲率半径绝对值与输出端条状反射镜 （9) 的曲率半径绝对值之和为谐振 腔腔长的两倍。
7、 根据权利要求 1所述的气体激光器， 其特征在于： 尾镜端条状反射 镜（8) 为条状凹面反射镜， 输出端条状反射镜（9)为条状凸面反射镜， 全 透输出镜（10)位于输出端条状反射镜（9)的一侧， 尾镜端条状反射镜（8) 的曲率半径绝对值减去输出端条状反射镜 （9) 的曲率半径绝对值后所得的 值为谐振腔腔长的两倍。
8、 根据权利要求 1所述的气体激光器， 其特征在于： 尾镜端条状反射 镜 （8) 为条状凹面反射镜， 输出端条状反射镜（9)为条状凸面反射镜， 全 透输出镜（10)位于输出端条状反射镜（9)的中间， 尾镜端条状反射镜（8) 的曲率半径绝对值减去输出端条状反射镜 （9) 的曲率半径绝对值后所得的 值为谐振腔腔长的两倍。
9、 根据权利要求 1所述的气体激光器， 其特征在于： 水冷通道（3 )为 一条或多条截面积相等或近似相等的串联水道。
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